A die bonding head

Abstract

The present invention discloses a crystal bonding head, which includes a power element, a transmission airbag, an air-floating bearing, and a suction nozzle mechanism; the air-floating bearing includes an air-floating sleeve and an air-floating shaft, the air-floating shaft being rotatably arranged in the air-floating sleeve, and an air film gap being formed between the air-floating shaft and the air-floating sleeve; the power element is connected to the transmission airbag for outputting rotational motion; the transmission airbag is connected to the first end of the air-floating shaft for power transmission; and the suction nozzle mechanism is arranged at the second end of the air-floating shaft. A transmission airbag is arranged between the power element and the air-floating bearing, so that the power element outputs power, which is then transmitted to the air-floating shaft through the transmission airbag and finally to the suction nozzle mechanism. During crystal bonding, the transmission airbag cushions the pressure applied by the crystal bonding head to the wafer, avoiding the rigid impact of the crystal bonding head on the wafer, avoiding or reducing wafer breakage, and improving the safety of the wafer.

Description

Technical Field

[0001] The present invention relates to the technical field of crystal bonding components, in particular to a crystal bonding head. Background Art

[0002] The die bonder is a key piece of equipment in the packaging process for LEDs and semiconductor chips. In some LED package die bonders, the die bonder is typically used for high-precision wafer placement, such as using a wafer pickup device to precisely place the LED wafer at the blue film dispensing location. The die bonder features high-speed, precision positioning control, with numerous internal mechanisms, multiple motors, and complex control logic. The die bonder is a key structure for wafer grabbing and placement, consisting of a motor, coupling, connecting rod, and suction nozzle. The motor drives the nozzle to rotate via the coupling and connecting rod. The retrieval platform drives the die bonder to move and lift, while the die bonder absorbs the wafer and adjusts its angle.

[0003] However, during the die bonding process, the motor is connected to the connecting rod through a coupling, directly transmitting the force of the die removal platform to the suction nozzle. This can easily cause the chip to be under excessive pressure and cause the chip to break. Summary of the Invention

[0004] In order to solve the technical problem in the prior art that the coupling transmission easily causes the wafer to be broken due to excessive pressure, one of the objectives of the present invention is to provide a wafer bonding head.

[0005] One of the purposes of the present invention is achieved by the following technical solution:

[0006] A crystal bonding head, comprising a power element, a transmission airbag, an air bearing and a suction nozzle mechanism;

[0007] The air bearing comprises an air sleeve and an air shaft, wherein the air shaft is rotatably arranged in the air sleeve, and an air film gap is formed between the air shaft and the air sleeve;

[0008] The power element is connected to the transmission airbag and is used to output rotational motion;

[0009] The transmission airbag is connected to the first end of the air-floating shaft for power transmission;

[0010] The suction nozzle mechanism is arranged at the second end of the air floating shaft.

[0011] Optionally, the transmission airbag includes a first connector, an airbag and a second connector, the first connector and the second connector are respectively arranged at two ends of the airbag, the first connector is connected to the power element, and the second connector is connected to the air floating shaft.

[0012] Optionally, the outer circumferential surface of the airbag is provided with a plurality of annular folds, and the annular folds are arranged along the transmission direction.

[0013] Optionally, the annular fold includes two annular surfaces arranged side by side, with a gap between the two annular surfaces, and the edges of the two annular surfaces are sealed and connected.

[0014] Optionally, the airbag is made of metal, plastic or elastic ceramic.

[0015] Optionally, the first connector is provided with a connecting hole and a locking hole;

[0016] The output end of the power element extends into the connecting hole, and a locking piece is provided in the locking hole for locking the output end of the power element.

[0017] Optionally, the die-bonding head further includes a flywheel mechanism, one side of the flywheel mechanism is connected to the transmission airbag, and the other side of the flywheel mechanism is connected to the air-floating shaft.

[0018] Optionally, the air bearing is provided with an adjustment hole for adjusting the axial movement of the air bearing shaft.

[0019] Optionally, the air-floating shaft includes a shaft and a positioning plate provided at the end of the shaft, the shaft is rotatably provided in the air-floating sleeve, an air film gap is provided between the shaft and the air-floating sleeve, and the shaft is connected to the flywheel mechanism;

[0020] The suction nozzle mechanism is arranged on the positioning plate.

[0021] Optionally, the flywheel mechanism includes a disc and a wheel ring, the disc is connected to the shaft, and the wheel ring is sleeved on the disc.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] In this invention, a transmission airbag is installed between the power element and the air bearing. This allows the power output from the power element to be transmitted through the transmission airbag to the air bearing shaft and finally to the suction nozzle mechanism. During die bonding, the transmission airbag cushions the pressure exerted by the die bonding head on the wafer, preventing or minimizing the impact of the die bonding head on the wafer, thereby improving wafer safety.

[0024] In addition, the rigid connection provided by the coupling and the buffering mass include at least the mass of the entire die bonding head. The die bonding head itself has a large inertial momentum, and the wafer needs to withstand the pressure brought by the die bonding head during die bonding. In this embodiment, a transmission airbag is provided between the power element and the air bearing. The transmission airbag can act as a buffer. The buffering mass is the mass of the air bearing shaft and the suction nozzle mechanism. The mass of the air bearing shaft and the suction nozzle mechanism is much smaller than the mass of the die bonding head and has a smaller inertial momentum. In the die bonding head of this embodiment, the pressure that the wafer needs to withstand during die bonding is much smaller than the pressure brought by the die bonding head with the coupling, resulting in a smaller buffering pressure, thereby effectively improving safety during die bonding. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 Schematic diagram of the structure of the die bonding head of the present invention;

[0026] Figure 2 Schematic diagram of the exploded view of the die bonding head of the present invention;

[0027] Figure 3 A partial cross-sectional view of a die bonding head of the present invention;

[0028] Figure 4 A cross-sectional view of the air bearing and nozzle mechanism in the die bonding head of the present invention;

[0029] Figure 5 It is a cross-sectional view of the air floating shaft and the suction nozzle mechanism in the die bonding head of the present invention;

[0030] Figure 6 A half-section view of the transmission airbag in the die bonding head of the present invention;

[0031] Figure 7 Schematic diagram of the position of the torque sensor in the die bonding head of the present invention.

[0032] Description of the accompanying drawings:

[0033] 1. Power components;

[0034] 2. Transmission airbag; 21. First connector; 22. Second connector; 23. Hollow airbag; 231. Annular fold; 232. Connecting ring; 233. Connecting panel;

[0035] 3. Air bearing; 31. Air sleeve; 311. Annular pressure-equalizing groove; 312. Annular pressure groove; 313. Orifice; 314. Friction surface; 315. Balancing hole;

[0036] 32. Air-floating shaft; 321. Shaft; 3211. Hollow channel; 3212. First through hole; 322. Positioning plate; 3221. Positioning protrusion; 3222. Magnetic assembly groove; 3223. Annular groove; 3224. Diversion channel; 3225. Exhaust hole; 323. Torque sensor;

[0037] 33. Nozzle positioning ring; 34. Magnetic block; 35. Steel ring;

[0038] 36, valve core; 361, negative pressure airway; 362, positive pressure airway; 363, positive pressure annular groove; 364, negative pressure annular groove;

[0039] 37. Suction cup; 371. First adsorption airway;

[0040] 38. Bearing housing; 381. Assembly cavity; 382. First air hole; 383. Second air hole; 384. Third air hole; 385. Fourth air hole;

[0041] 4. Suction nozzle mechanism; 41. Mounting plate; 411. Assembly positioning ring; 412. Mounting platform; 4121. Suction nozzle groove; 4122. Deformable claw; 42. Suction nozzle; 421. Second suction air channel; 43. Locking screw;

[0042] 5. Flywheel mechanism; 51. Disc; 52. Wheel ring;

[0043] 6. Nozzle flange. DETAILED DESCRIPTION

[0044] The following is a combination of the appended examples of the present application Figure 1 To the attached Figure 7 , clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the described embodiments are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making any creative efforts shall fall within the scope of protection of this application.

[0045] It should be noted that all directional indications in the embodiments of the present application (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0046] In addition, the descriptions of "first", "second", etc. in this application are for descriptive purposes only and should not be understood as indicating or implying their relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0047] In a die bonder, a robotic arm or a multi-axis mobile platform drives the die bond head to move, typically including movements in the three directions of the X-axis, Y-axis, and Z-axis. In some die bonders, a motor outputs power, and a coupling connects the motor's output shaft and the coupling. The wafer itself is a tiny, fragile object, so high movement accuracy is required of the robotic arm or multi-axis platform. In the die bonder of the prior art, a coupling is used to connect the motor and the coupling, and the motor outputs power in a relatively rigid manner, forming a rigid connection between the motor and the suction nozzle. When fixing the wafer, the die bonder directly applies pressure to the wafer, and the suction nozzle rigidly presses the wafer, causing the wafer to break.

[0048] like Figure 1-3 The die bonding head shown in FIG. 1 includes a power element 1, a transmission airbag 2, an air bearing 3, and a nozzle mechanism 4. Specifically, the air bearing 3 includes an air sleeve 31 and an air shaft 32. The air shaft 32 is rotatably mounted within the air sleeve 31, with an air film gap between the air shaft 32 and the air sleeve 31. The power element 1 is connected to the transmission airbag 2 to output rotational motion. The transmission airbag 2 is connected to the first end of the air shaft 32 for power transmission. The nozzle mechanism 4 is disposed at the second end of the air shaft 32 to assemble the nozzle mechanism 4 and drive it in motion. In this embodiment, the transmission airbag 2 is disposed between the power element 1 and the air bearing 3. Thus, the power output by the power element 1 is transmitted through the transmission airbag 2 to the air shaft 32, and finally to the nozzle mechanism 4. During die bonding, the transmission airbag 2 cushions the pressure applied by the die bonding head to the wafer, preventing rigid impact of the die bonding head on the wafer, preventing or reducing wafer breakage, and improving wafer safety.

[0049] In addition, in this embodiment, the nozzle mechanism 4 is directly connected to the power element 1 through the air bearing 3 and the transmission airbag 2. Compared with some belt drives and gear drives, it has higher installation accuracy, high concentricity, simple transmission, and easy installation.

[0050] Furthermore, the rigid connection provided by the coupling requires a buffering mass that includes at least the mass of the entire die bonding head. The die bonding head itself has a significant moment of inertia, and the wafer must withstand the pressure exerted by the die bonding head during die bonding. In this embodiment, a transmission airbag 2 is provided between the power element 1 and the air bearing 3. This transmission airbag 2 provides a buffering effect, with the buffering mass equal to the mass of the air bearing shaft 32 and the suction nozzle mechanism 4. The mass of the air bearing shaft 32 and the suction nozzle mechanism 4 is significantly smaller than that of the die bonding head, resulting in a smaller moment of inertia. In this embodiment, the die bonding head withstands significantly less pressure during die bonding than the die bonding head with the coupling, resulting in a smaller buffering pressure, thereby effectively improving safety during die bonding.

[0051] In a crystal bonding machine, a robotic arm or a multi-axis mobile platform drives the movement of the crystal bonding head, which usually includes movement in three directions: X-axis, Y-axis, and Z-axis. In some crystal bonding heads, a motor outputs power, and the output shaft of the motor and the air-floating shaft 32 are connected by a coupling. The chip itself is a tiny and fragile object, so high movement accuracy is required for the robotic arm or multi-axis platform. In the crystal bonding head of the prior art, a coupling is used to connect the motor and the air-floating shaft 32, and the motor outputs power in a relatively rigid manner, so that a rigid connection is formed between the motor and the suction nozzle 42. When fixing the chip, the crystal bonding head directly applies pressure to the chip, and the suction nozzle 42 rigidly presses the chip, causing the chip to break.

[0052] In some embodiments of the transmission airbag 2, such as Figure 6 As shown, the transmission airbag 2 includes a first connector 21, a second connector 22, and a hollow airbag 23. The first connector 21 and the second connector 22 are respectively arranged at the two ends of the hollow airbag 23. The first connector 21 is connected to the power element 1, and the second connector 22 is connected to the air-floating shaft 32. The transmission airbag 2 as a whole is a transmission and buffering structure. Specifically, the first connector 21 and the second connector 22 are the two end connection structures of the transmission airbag 2, which are used for power input and output. The hollow airbag 23 is a transmission and buffering structure. When bonding, the hollow airbag 23 is compressed by the pressure fed back by the air-floating shaft 32 at the lower end, thereby effectively reducing the impact force of the bonding head on the wafer and improving the safety of bonding.

[0053] In some embodiments of the hollow bladder 23, such as Figure 6 As shown, the outer circumference of the hollow bladder 23 is provided with a plurality of annular folds 231, arranged along the transmission direction. The hollow bladder 23 has annular folds 231 surrounding the outer circumference. The pressure fed back from the air bearing shaft 32 acts on the annular folds 231, giving the annular folds 231 a wider deformation range and requiring less force to deform. This increases the elastic deformation space of the hollow bladder 23, reduces the elastic coefficient, and improves the cushioning effect.

[0054] Especially when the hollow balloon 23 is made of metal or ceramic materials, the metal or ceramic hollow balloon 23 itself has the defect of being difficult to deform. The hollow balloon 23 of the present invention can change the original structural defects of the metal hollow balloon 23, so that the hollow balloon 23 has good elasticity. At the same time, it utilizes the strength of the metal or ceramic itself to maintain the strength in the rotation direction, thereby accurately outputting the rotational motion.

[0055] Specifically, the annular fold 231 comprises two parallel annular surfaces with a gap between them, and the edges of the two surfaces are sealed together. In this embodiment, the hollow bladder 23 has an annular fold 231 surrounding its outer circumference. External feedback force is transmitted to the second connector 22 via the air bearing shaft 32. Within the allowable range of the gap, this force ultimately forces the annular surfaces to undergo elastic deformation, achieving elastic deformation of the hollow bladder 23.

[0056] For the hollow air bag 23, its structure does not only include the annular folds 231. In some embodiments of the hollow air bag 23, such as Figure 6 As shown, the hollow bladder 23 includes a plurality of annular folds 231, a plurality of connecting rings 232, and two connecting panels 233. The connecting rings 232 are spaced apart from the annular folds 231, with the ends of the connecting rings 232 connected to the annular surfaces of adjacent annular folds 231. The two connecting panels 233 block the ends of the hollow bladder 23. When the annular folds 231 are located at the ends of the hollow bladder 233, the connecting panels 233 are connected to the annular folds 231, or the connecting panels 233 block the second through-hole in the middle of the outer annular surface of the annular folds 231. When the connecting rings 232 are located at the ends of the hollow bladder 233, the connecting panels 233 are connected to the outer ends of the connecting rings 232, specifically blocking the outer ends of the connecting rings 232.

[0057] At the same time, the first connection head 21 and the second connection head 22 are connected to the two connection panels 233 respectively.

[0058] Regarding the specific material of the hollow balloon 23 , the material of the hollow balloon 23 includes but is not limited to metal, plastic, or elastic ceramic material.

[0059] The first connector 21 is provided with a connection hole and a locking hole. The connection hole is provided at the end of the first connector 21, and the axial direction of the connection hole is the same as the length direction of the first connector 21. The locking hole is located on the side wall of the connection hole and is used to lock the first connector 21 to the power element 1. The output end of the power element 1 extends into the connection hole, and a locking member is provided in the locking hole to lock the output end of the power element 1.

[0060] In some assembly embodiments of the nozzle mechanism 4, such as Figure 7As shown, the nozzle mechanism 4 is threadedly connected to the second end of the air floating shaft 32. The nozzle mechanism 4 is assembled with threaded connection, has good installation accuracy and concentricity, can be assembled using ordinary tools, and is easy to install.

[0061] In some assembly embodiments of the nozzle mechanism 4, such as Figure 4 、 5 As shown, the air-bearing shaft 32 includes a shaft 321 and a positioning plate 322 disposed at the end of the shaft 321. The shaft 321 is rotatably disposed within the air-bearing sleeve 31, with an air film gap formed between the shaft 321 and the air-bearing sleeve 31. The shaft 321 is connected to the transmission airbag 2. The nozzle mechanism 4 includes a mounting plate 41 and a nozzle 42. The nozzle 42 is disposed on the mounting plate 41, and the mounting plate 41 is magnetically attracted to the positioning plate 322.

[0062] In this embodiment, the air-floating shaft 32 is configured as a shaft 321 and a positioning plate 322, and the positioning plate 322 is used to position and install the nozzle mechanism 4. The nozzle mechanism 4 is configured to include a mounting plate 41 and a nozzle 42, and the nozzle 42 is assembled with the mounting plate 41. In addition, the positioning plate 322 and the mounting plate 41 are configured to be connected by magnetic attraction. In this way, when installing the nozzle 42, it is only necessary to bring the mounting plate 41 close to the positioning plate 322 to magnetically assemble the mounting plate 41. When disassembly is required, the nozzle mechanism 4 can be directly grasped to overcome the magnetic attraction force and then disassemble the nozzle mechanism 4, which has good disassembly and assembly convenience.

[0063] In some embodiments of the positioning plate 322, the positioning plate 322 is provided with a positioning hole. The mounting plate 41 is provided with a positioning protrusion 3221 extending toward the positioning plate 322. The positioning protrusion 3221 engages with the positioning hole. Thus, during assembly, the positioning protrusion 3221 on the mounting plate 41 can be used to precisely locate the assembly position, improving assembly accuracy.

[0064] In addition, in order to increase the assembly speed, such as Figure 5 As shown, the edge of the positioning plate 322 is provided with a nozzle positioning ring 33 for guiding the mounting plate 41 to dock with the positioning plate 322. When installing the nozzle mechanism 4, the nozzle mechanism 4 is first aligned with the nozzle positioning ring 33 and inserted into the nozzle positioning ring 33. Under the guidance and preliminary positioning of the nozzle positioning ring 33, assembly is performed so that the mounting plate 41 approaches the positioning plate 322 until the positioning protrusion 3221 is embedded in the positioning hole.

[0065] The magnetic adsorption connection between the mounting plate 41 and the positioning plate 322 is specifically as follows: Figure 2 、 Figure 4As shown, the positioning plate 322 is provided with a plurality of magnets 34 evenly distributed along its circumference. The magnets 34 are magnetically connected to the mounting plate 41. More specifically, a plurality of magnetic mounting grooves 3222 are provided on one side of the positioning plate 322 near the mounting plate 41. Specifically, the bottom of the positioning plate 322 is provided with a plurality of magnetic mounting grooves 3222, within which the magnets 34 are mounted. Preferably, the magnetic mounting grooves 3222 are evenly distributed along the circumference.

[0066] Furthermore, to precisely determine the angle between the positioning plate 322 and the mounting plate 41, a plurality of magnetic positioning grooves are provided on the side of the mounting plate 41 near the positioning plate 322, corresponding one-to-one with the magnets 34. Specifically, the top of the mounting plate 41 is provided with a plurality of magnetic positioning grooves corresponding one-to-one with the magnets 34. The magnets 34 are fixedly mounted in the magnetic mounting grooves 3222, with portions of the magnets 34 protruding from the grooves 3222. When the mounting plate 41 is mounted on the positioning plate 322, the magnets 34 within the magnetic mounting grooves 3222 partially embed within the magnetic positioning grooves, thus achieving precise magnetic positioning.

[0067] In some embodiments of the positioning plate 322 and the mounting plate 41, as Figure 2 、 Figure 5 As shown, an annular groove 3223 is provided on the side of the positioning plate 322 facing the mounting plate 41, and a steel ring 35 is disposed within the annular groove 3223. An assembly positioning ring 411 is provided on the surface of the mounting plate 41 on the side adjacent to the positioning plate 322. Specifically, the assembly positioning ring 411 is disposed on the top of the mounting plate 41. The assembly positioning ring 411 is embedded in the annular groove 3223 and abuts the steel ring 35. A guiding bevel is provided on the top edge of the assembly positioning ring 411 to guide the assembly positioning ring 411 into the annular groove 3223, thereby reducing assembly difficulty and improving assembly convenience.

[0068] In some embodiments of the shaft 321, such as Figure 4 、 Figure 5 As shown, a hollow channel 3211 is provided within the shaft 321, and the hollow channel 3211 is connected to the positioning hole. Specifically, the hollow channel 3211 is directly opposite the positioning hole. The air bearing 3 also includes a valve core 36 and a suction cup 37 for adsorbing the mounting plate 41. The valve core 36 is disposed within the hollow channel 3211. The first end of the valve core 36 is the end adjacent to the positioning plate 322, i.e., the lower end of the valve core 36. A negative pressure air channel 361 is provided within the valve core 36, extending toward the first end. The suction cup 37 is disposed at the first end of the valve core 36. A first adsorption air channel 371 within the suction cup 37 is connected to the negative pressure air channel 361.

[0069] In this embodiment, the valve core 36 is inverted and movably disposed within the hollow channel 3211, i.e., the valve core 36 can move and rotate within the hollow channel 3211. The magnetic connection between the mounting plate 41 and the positioning plate 322 secures the nozzle mechanism 4, the valve core 36, and the nozzle 42 to the positioning plate 322, preventing the nozzle mechanism 4, the valve core 36, and the nozzle 42 from falling.

[0070] When disassembling the suction nozzle mechanism 4, the air source connected to the negative pressure airway 361 is suspended, and the valve core 36 slides downward under the action of its own gravity, thereby automatically falling off and disassembling the valve core 36 and the suction cup 37. In this way, the valve core 36 can fall and be disassembled along with the disassembly of the suction nozzle mechanism 4, so that the valve core 36 has good disassembly convenience and also facilitates the convenient disassembly and assembly of the suction nozzle mechanism 4.

[0071] When the nozzle mechanism 4 is disassembled, the air source connected to the negative pressure air channel 361 is maintained. The negative pressure prevents the valve core 36 from descending, and the valve core 36 remains in the hollow channel 3211. In this way, the nozzle mechanism 4 can be disassembled separately.

[0072] In addition, the negative pressure air channel 361 in the valve core 36 is connected to the negative pressure air source, thereby providing negative pressure to the suction cup 37 and providing negative pressure for the suction cup 37 to adsorb the suction nozzle mechanism 4.

[0073] Regarding the suction cup 37 adsorbing the nozzle mechanism 4 , specifically, the suction cup 37 adsorbs the aforementioned positioning protrusion 3221 .

[0074] Furthermore, if Figure 5 As shown, the second suction air channel 421 within the suction nozzle 42 is connected to the first suction air channel 371. More specifically, the cross-sectional area of ​​the second suction air channel 421 is smaller than the cross-sectional area of ​​the first suction air channel 371. When both the second suction air channel 421 and the first suction air channel 371 are circular holes, the diameter of the second suction air channel 421 is smaller than the diameter of the first suction air channel 371. Because the second suction air channel 421 is connected to the first suction air channel 371, the negative pressure channel 361 provides negative pressure to the second suction air channel 421, thereby increasing the negative pressure required for suction by the suction nozzle 42.

[0075] Of course, for the hollow channel 3211 and the positioning hole, the positioning hole may be a part of the hollow channel 3211 , that is, the positioning hole is the lower end opening of the hollow channel 3211 .

[0076] In some embodiments of the valve core 36, such as Figure 5As shown, a positive pressure air channel 362 extending toward the first end is further provided in the valve core 36. A guide channel 3224 is provided on the positioning disk 322. One end of the guide channel 3224 is connected to the positive pressure air channel 362, and the other end extends to the surface of the positioning disk 322 facing the mounting disk 41, that is, the lower surface of the positioning disk 322, for guiding the airflow to assist in the disassembly of the suction nozzle mechanism 4. When the suction nozzle mechanism 4 needs to be disassembled separately, the air source connected to the negative pressure air channel 361 is maintained. The negative pressure causes the valve core 36 to drop and fall, and the valve core 36 remains in the hollow channel 3211. However, this also increases the difficulty of disassembling the suction nozzle mechanism 4 from the suction cup 37. In this embodiment, a positive pressure air channel 362 is provided in the valve core 36, and the airflow is guided to between the positioning disk 322 and the mounting disk 41 through the guide channel 3224. The high-speed airflow impacts the mounting disk 41, pushing the mounting disk 41 to separate, helping to disassemble the suction nozzle mechanism 4 and reducing the difficulty of disassembly.

[0077] One end of the flow guide channel 3224 is connected to the positive pressure air channel 362. The flow guide channel 3224 and the positive pressure air channel 362 can be connected directly or indirectly. In some embodiments of indirect connection, when the length of the valve core 36 is less than the length of the hollow channel 3211, the positive pressure air channel 362 first connects to the hollow channel 3211, and the hollow channel 3211 connects to the flow guide channel 3224. In this way, the working positive pressure air in the positive pressure air channel 362 flows through the hollow channel 3211 to the flow guide channel 3224, and finally flows to the gap between the positioning plate 322 and the mounting plate 41.

[0078] Of course, if Figure 2 As shown, the positioning plate 322 is provided with exhaust holes 3225 running through the upper and lower surfaces to discharge the gas discharged from the positive pressure airway 362. The pressurized gas flows through the gap between the positioning plate 322 and the mounting plate 41 and is finally discharged through the exhaust holes 3225.

[0079] A positive pressure airway 362 and a negative pressure airway 361 are provided in the valve core 36. The negative pressure airway 361 is located at the center of the valve core 36, specifically at the axis of the valve core 36. There is at least one positive pressure airway 362, specifically one positive pressure airway 362, two positive pressure airways 362, three positive pressure airways 362, four positive pressure airways 362, or other numbers of positive pressure airways 362. The positive pressure airway 362 is provided in the valve core 36 around the negative pressure airway 361. In addition, as Figure 5As shown, the outer circumferential surface of the valve core 36 is provided with a positive-pressure annular groove 363 and a negative-pressure annular groove 364. The positive-pressure annular groove 363 and the negative-pressure annular groove 364 respectively surround the outer circumferential surface of the valve core 36. The interior of the positive-pressure annular groove 363 communicates with each positive-pressure airway 362, and the opening of the positive-pressure annular groove 363 communicates with the annular pressure groove 312 at the corresponding position on the air-floating sleeve 31. The interior of the negative-pressure annular groove 364 communicates with the negative-pressure airway 361, and the opening of the negative-pressure annular groove 364 communicates with the annular pressure groove 312 at the corresponding position on the air-floating sleeve 31.

[0080] like Figure 5 As shown, the valve core 36 itself is disposed within the shaft 321. Consequently, the shaft 321 is provided with two sets of first through-holes 3212, which serve as holes for fluids to pass through the positive-pressure airway 362 and the negative-pressure airway 361, respectively. Each set of first through-holes 3212 is circumferentially arranged on the shaft 321. The inner ends of the two sets of first through-holes 3212 communicate with the positive-pressure annular groove 363 and the negative-pressure annular groove 364, respectively, thereby connecting the positive-pressure airway 362 and the negative-pressure airway 361, respectively. The outer ends of the two sets of first through-holes 3212 also communicate with the central annular pressure groove 312 and the annular pressure groove 312 near the positioning plate 322, respectively.

[0081] In some embodiments of the shaft 321, such as Figure 2 or Figure 7 As shown, the air-floating shaft 32 is provided with a torque sensor 323 or a pressure sensor. Specifically, when the nozzle mechanism 4 is magnetically assembled with the air-floating shaft 32, a torque sensor 323 or a pressure sensor is provided on the shaft 321. The torque sensor 323 or the pressure sensor converts the pressing force into an electrical signal, thereby enabling precise control of the pressure of the nozzle 42 based on the electrical signal. Specifically, the torque sensor 323 is provided at the lower end of the shaft 321. Specifically, the lower end of the shaft 321 is connected to the torque sensor 323, which is in turn connected to the positioning plate 322. In other words, the shaft 321 is divided into two sections, and the torque sensor 323 is provided between the two sections of the shaft 321.

[0082] When the nozzle mechanism 4 is threadedly assembled with the air bearing shaft 32, Figure 7 As shown, the air bearing shaft 32 is provided with a torque sensor 323 or a pressure sensor.

[0083] In some embodiments of the air bearing sleeve 31, such as Figure 4As shown, the outer circumference of the air-floating sleeve 31 is provided with three annular pressure-equalizing grooves 311, and the inner circumference of the air-floating sleeve 31 is provided with three annular pressure grooves 312. The three annular pressure grooves 312 are respectively located on the inner sides of the three annular pressure-equalizing grooves 311. A plurality of throttle holes 313 are provided between the annular pressure grooves 312 and the corresponding annular pressure-equalizing grooves 311. The negative pressure air channel 361 is connected to the annular pressure groove 312 located in the middle, and the positive pressure air channel 362 is connected to the annular pressure groove 312 near the positioning plate 322. The high-speed airflow enters the throttle hole 313 from the annular pressure-equalizing groove 311, and then enters the annular pressure groove 312, so that an air film is formed between the air-floating sleeve 31 and the shaft 321, forming a suspended support for the shaft 321.

[0084] In some embodiments of the air bearing 3, such as Figure 4 As shown, the air bearing 3 further includes a bearing housing 38 , in which an assembly cavity 381 is provided. The assembly cavity 381 runs through both ends of the bearing housing 38 . The air bearing sleeve 31 is disposed in the bearing housing 38 .

[0085] The bearing housing 38 is provided with a first air hole 382, ​​a second air hole 383, and a third air hole 384. These holes are located sequentially away from the positioning plate 322 and communicate with the air film gap. The first air hole 382, ​​the second air hole 383, and the third air hole 384 can be located on the same side line or on different side lines. The first air hole 382, ​​the second air hole 383, and the third air hole 384 are each connected to the three annular pressure-equalizing grooves 311.

[0086] The first and third air holes 382 and 384 are positive-pressure holes, connected to a compressed air source, specifically a compressor. The second air hole 383 is a negative-pressure hole, connected to a vacuum air source, specifically a negative-pressure pump. The positive-pressure air channel 362 communicates with the first air holes 382 via one set of first through holes 3212 and the air film gap. The negative-pressure air channel 361 communicates with the second air hole 383 via another set of first through holes 3212 and the air film gap.

[0087] The number of the first through holes 3212 of the shaft 321 is limited, for example, the number of the first through holes is 2 to 8, specifically two, three, four, five, six, seven, eight, etc.

[0088] As for the air bearing 3 , the air bearing 3 carries the air shaft 32 by air flow pressure, which can reduce the friction force on the air shaft 32 , reduce the rotation resistance of the air shaft 32 , and improve the adjustment accuracy and rotation speed.

[0089] Of course, if Figure 1 、 Figure 2As shown, a nozzle flange 6 is provided between the power element 1 and the air bearing 3. One end of the nozzle flange 6 is connected to the power element 1, specifically to the housing of the power element 1, and the other end of the nozzle flange 6 is connected to the air bearing 3, specifically to the bearing housing 38. The nozzle flange 6 has a cavity therein, extending through both ends of the nozzle flange 6, for accommodating the transmission airbag 2, hereinafter referred to as the transmission airbag 2. The transmission airbag 2 is disposed within the cavity of the nozzle flange 6.

[0090] In some embodiments of the nozzle mechanism 4, such as Figure 5 As shown, the mounting plate 41 is provided with a mounting platform 412 for assembling the suction nozzle 42. The mounting platform 412 is provided with a suction nozzle groove 4121. The outer circumferential surface of the mounting platform 412 is provided with an external thread. The mounting platform 412 is provided with a plurality of deformable claws 4122 surrounding the suction nozzle groove 4121. The suction nozzle 42 is inserted into the suction nozzle groove 4121 and protrudes from the area between the deformable claws 4122. The suction nozzle mechanism 4 also includes a locking screw 43. The locking screw 43 is threadedly engaged with the mounting platform 412 and the locking screw 43 presses the deformable claws 4122. When it is necessary to lock the suction nozzle 42, the locking screw 43 is tightened, and the deformation of the deformable claws 4122 is used to lock the suction nozzle 42. Conversely, when it is necessary to remove and replace the suction nozzle 42, the locking screw 43 is loosened, the deformable claws 4122 rebound, and the suction nozzle 42 is released, so that the suction nozzle 42 can be pulled out of the frame.

[0091] In this embodiment, the detachable cooperation between the nozzle mechanism 4 and the positioning plate 322 can be utilized to achieve quick and convenient disassembly and assembly of the nozzle mechanism 4. In addition, after disassembling the nozzle mechanism 4, the nozzle 42 can be loosened or locked using the locking screw 43. Thus, the nozzle 42 can be loosened using the locking screw 43, and the nozzle 42 can be directly inserted and removed, allowing the nozzle 42 to be replaced in the nozzle mechanism 4. In this way, in this embodiment, the nozzle mechanism 4 can be disassembled and replaced first, and the nozzle 42 can be disassembled and replaced in the nozzle mechanism 4 at the same time, allowing for secondary disassembly and replacement, which provides greater convenience.

[0092] In some embodiments of the die bonding head, such as Figure 3 As shown, the die bonding head further includes a flywheel mechanism 5, one side of which is connected to the transmission airbag 2, and the other side of which is connected to the air-floating shaft 32. When the flywheel mechanism 5 is connected to the transmission airbag 2, it is specifically connected to the second connector 22. The flywheel mechanism 5 balances the motion of the air-floating shaft 32, thereby increasing its motion stability.

[0093] In addition, the air bearing 3 is provided with adjustment holes, specifically, the bearing housing 38, for adjusting the axial movement of the air shaft 32. Specifically, the adjustment holes are the aforementioned first and third air holes 382 and 384. These two air inlet holes can also be used to adjust the axial movement of the air shaft 32. The first and third air holes 382 and 384 supply air to the corresponding two rings of throttle holes 313, respectively. By changing the air pressure difference between the two air inlet holes, the air shaft 32 is moved. For example, increasing the air pressure in the third air hole 384 causes the air shaft 32 to move away from the transmission airbag 2. In this way, after moving a certain distance, the flywheel mechanism 5 contacts the air shaft sleeve 31. The friction between the flywheel mechanism 5 and the end surface of the air shaft sleeve 31 acts as a brake, thereby braking the transmission airbag 2 and preventing the nozzle mechanism 4 from rotating, making it easier to deal with unexpected situations. The flywheel mechanism 5 can quickly brake the power element 1, accelerating the stopping speed of the power element 1.

[0094] Of course, in addition to the air-floating sleeve 31 , the flywheel mechanism 5 can also be braked by friction with the end surface of the bearing housing 38 .

[0095] The air-floating sleeve 31 participates in braking. Specifically, one end of the air-floating sleeve 31 close to the transmission airbag 2 is provided with a friction surface 314 , and the friction surface 314 is provided with anti-slip grooves.

[0096] Of course, after the flywheel mechanism 5 moves toward the transmission airbag 2 , the flywheel mechanism 5 and the nozzle flange 6 are frictionally braked.

[0097] In some configurations, the brake state is normally engaged after wafer adsorption, or in other words, the flywheel mechanism 5 is in the brake state during operation. The flywheel mechanism 5 brakes power transmission, preventing the air bearing shaft 32 from rotating. To adjust the wafer angle, the position of the air bearing shaft 32 is adjusted by adjusting the air holes, and the flywheel mechanism 5 is released from the brake state. After adjusting the wafer angle, the flywheel mechanism 5 acts as a positioning structure or locking mechanism for the air bearing shaft 32, preventing the wafer from rotating and improving the angular accuracy of the wafer bond.

[0098] In addition, before the die is bonded, the flywheel mechanism 5 is in a braking state, the flywheel mechanism 5 moves toward the bearing housing 38, and the transmission airbag 2 is in an extended state. At this time, the transmission airbag 2 has the longest switching stroke, which improves the buffering effect of the die bonding head.

[0099] For the flywheel mechanism 5, specifically, Figure 3 、 Figure 4 As shown, the flywheel mechanism 5 includes a disc 51 and a wheel ring 52 . The disc 51 is connected to the shaft 321 , and the wheel ring 52 is sleeved on the disc 51 .

[0100] Either the disc 51 or the wheel ring 52 can participate in the braking, wherein the disc 51 and the end surface of the air-floating sleeve 31 perform friction braking, while the wheel ring 52 and the bearing housing 38 perform friction braking.

[0101] Specifically, the disc 51 is a disc-shaped spring piece, and the wheel ring 52 is sleeved on the outer circumference of the spring piece. The disc-shaped spring piece allows the wheel ring 52 to maintain elastic contact with the bearing housing 38 to avoid rigid collision.

[0102] When the flywheel mechanism 5 and the end surface of the air-floating sleeve 31 are frictionally braked, the disc 51 and the friction surface 314 are frictionally braked.

[0103] Furthermore, if Figure 3 、 Figure 4 As shown, the end surface of the air-floating sleeve 31 near the flywheel mechanism 5 is provided with a plurality of balancing air holes 315 distributed along the circumference. The bearing housing 38 is provided with a fourth air hole 385. This fourth air hole 385 is a positive pressure hole connected to a compressed air source. Furthermore, the fourth air hole 385 is connected to one end of the balancing air hole 315, and the other end of the balancing air hole 315 faces the flywheel mechanism 5. This allows the balancing air hole 315 to spray high-speed airflow toward the flywheel mechanism 5, maintaining its balance. This prevents brake lock when braking is not required.

[0104] Furthermore, a connecting tube and a third connector are provided on both sides of the middle portion of the disc 51. The connecting tube has a similar structure to the first connector 21, also having a connection hole and a locking hole. The second connector 22 is inserted into the connecting tube and threadedly connected to the connecting tube. The connection between the second connector 22 and the connecting tube can be locked using a locking screw 43.

[0105] The power element 1 may specifically be a servo motor or a stepper motor.

[0106] The above embodiments are only preferred embodiments of the present invention and cannot be used to limit the scope of protection of the present invention. Any non-substantial changes and replacements made by technicians in this field on the basis of the present invention fall within the scope of protection required by the present invention.

Claims

1. A die bonding head, characterized in that: The die bonding head includes a power element, a transmission airbag, an air bearing, a suction nozzle mechanism, a bearing housing and a flywheel mechanism; The air-floating bearing comprises an air-floating sleeve and an air-floating shaft, wherein the air-floating sleeve is arranged in the bearing housing, and the air-floating shaft is rotatably arranged in the air-floating sleeve, and an air film gap is provided between the air-floating shaft and the air-floating sleeve, and the end face of the air-floating sleeve close to the flywheel mechanism is provided with a plurality of balancing air holes distributed along the circumference; The power element is connected to the transmission airbag and is used to output rotational motion; The transmission airbag is connected to the first end of the air-floating shaft for power transmission; The suction nozzle mechanism is arranged at the second end of the air floating shaft; One side of the flywheel mechanism is connected to the transmission airbag, and the other side of the flywheel mechanism is connected to the air floating shaft; The bearing housing is provided with a fourth air hole, the fourth air hole is connected to the compressed air source, and the fourth air hole is also connected to one end of the balance air hole; The balancing air holes spray high-speed airflow toward the flywheel mechanism to maintain the balance of the flywheel mechanism and prevent friction locking.

2. The die bonding head according to claim 1, wherein: The transmission airbag includes a first connector, an airbag and a second connector. The first connector and the second connector are respectively arranged at two ends of the airbag. The first connector is connected to the power element, and the second connector is connected to the air floating shaft.

3. The die bonding head according to claim 2, wherein: The outer circumferential surface of the airbag is provided with a plurality of annular folds, and the annular folds are arranged along the transmission direction.

4. The die bonding head according to claim 3, wherein: The annular fold includes two annular surfaces arranged side by side, with a gap between the two annular surfaces, and the edges of the two annular surfaces are sealed and connected.

5. The die bonding head according to any one of claims 2 to 4, wherein: The airbag is made of metal, plastic or elastic ceramic.

6. The die bonding head according to claim 2, wherein: The first connector is provided with a connecting hole and a locking hole; The output end of the power element extends into the connecting hole, and a locking piece is provided in the locking hole for locking the output end of the power element.

7. The die bonding head according to claim 1, wherein: The air bearing is provided with an adjusting air hole for adjusting the axial movement of the air bearing shaft.

8. The die bonding head according to claim 7, wherein: The air-floating shaft includes a shaft and a positioning plate provided at the end of the shaft, the shaft is rotatably provided in the air-floating sleeve, an air film gap is provided between the shaft and the air-floating sleeve, and the shaft is connected to the flywheel mechanism; The suction nozzle mechanism is arranged on the positioning plate.

9. The die bonding head according to claim 8, wherein: The flywheel mechanism includes a disc and a wheel ring, the disc is connected to the shaft, and the wheel ring is sleeved on the disc.

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