Vacuum film forming equipment for perovskite solar cell

Abstract

The invention relates to perovskite solar cell vacuum film forming equipment, which comprises a first shell, a second shell, a vacuumizing module and a heating module, and is characterized in that the first shell is provided with a cavity with an opening at one end; the second shell covers the opening corresponding to the first shell; the vacuumizing module is communicated with the cavity through a pipeline, and the vacuumizing module is used for providing a vacuum environment for the cavity; the heating module is arranged on the first shell or the second shell and located in the cavity, and the heating module can generate heat and exchange heat with the cavity. By arranging the heating module, heat generated by the heating module can be exchanged with the closed cavity in a heat transfer and / or heat radiation mode, so that the temperature in the closed cavity reaches a target value. By arranging the heating module, the evaporation rate of the perovskite solvent on the surface of the base material is improved, so that rapid film forming of the base material is facilitated.

Description

Technical Field

[0001] The present invention relates to the technical field of solar energy devices, and particularly to a vacuum film forming device for perovskite solar cells. Background Art

[0002] Traditional monocrystalline silicon cells are one type of solar cells, which mainly use silicon materials as the photo - electric conversion layer. The purity and crystal structure of silicon materials have a great influence on the performance of solar cells, and complex processes such as purification and crystallization of silicon materials are required during the production process. The photo - electric conversion efficiency of mass - produced monocrystalline silicon cells is about 15% - 20%. In order to improve the photo - electric conversion efficiency, perovskite cells are becoming more and more popular in the photovoltaic industry.

[0003] Perovskite solar cells are a new generation of photovoltaic technology using perovskite - type organometallic halide semiconductors as light - absorbing materials, with core advantages such as high efficiency, low cost, and flexible preparation. In perovskite solar cells, the slot - die coating method is one of the perovskite layer preparation processes. In the prior art, after slot - die coating, the substrate with perovskite solution is placed in a vacuum chamber for crystal growth to form a perovskite layer. In related technologies, it is just a vacuum chamber, and the crystal growth time is long, resulting in low production efficiency and high production cost of perovskite cells. Summary of the Invention

[0004] Based on this, in view of the technical problem of low production efficiency of the existing perovskite crystal growth equipment, it is necessary to provide a vacuum film forming device for perovskite solar cells.

[0005] A vacuum film forming device for perovskite solar cells, the vacuum film forming device for perovskite solar cells includes:

[0006] A first housing, configured with a cavity having one end open;

[0007] A second housing, covering the corresponding opening of the first housing, the first housing and the second housing enclosing a sealed chamber, and the second housing can move relative to the first housing so that the sealed chamber can be switched between being sealed and opened;

[0008] A vacuum pumping module, connected to the cavity through a pipeline, and the vacuum pumping module is used to provide a vacuum environment for the cavity;

[0009] A heating module, disposed on the first housing or the second housing and located inside the cavity, the heating module can generate heat and exchange heat with the cavity.

[0010] In one embodiment, the heating module includes:

[0011] An electric heating element disposed on one side of the second housing facing the first housing, the electric heating element being capable of generating heat after being energized; and,

[0012] A hot air element disposed on the first housing or the second housing, an air vent being formed on the first housing or the second housing, and an air outlet of the hot air element being communicated with the air vent;

[0013] Wherein, the electric heating element and the hot air element can be alternately switched to operate, or, the electric heating element and the hot air element can operate simultaneously.

[0014] In one embodiment, the electric heating element is a heating film and a conducting wire, the heating film being fixedly connected to the side surface of the second housing facing the first housing;

[0015] One end of the conducting wire is electrically connected to a power source, and the other end is electrically connected to the heating film, and the conducting wire passes through the air vent.

[0016] In one embodiment, the heating module further includes:

[0017] A temperature detection element disposed on the first housing or the second housing, the temperature detection element being used for detecting the temperature inside the cavity.

[0018] In one embodiment, the vacuum pumping module includes:

[0019] A plurality of vacuum pump groups, each vacuum pump group including at least two vacuum pumps;

[0020] A main pipeline communicated with the cavity;

[0021] A plurality of sub-pipelines corresponding to the number of the vacuum pump groups, one end of each sub-pipeline being communicated with the main pipeline, and the other end being communicated with the vacuum pump group.

[0022] In one embodiment, the vacuum pumping module is disposed below the first housing; the vacuum pumping module further includes:

[0023] A vacuum degree detection element disposed inside the cavity, the vacuum degree detection element being used for detecting the vacuum degree inside the cavity.

[0024] In one embodiment, the perovskite solar cell vacuum film forming device further includes:

[0025] A base, on which the first housing and the second housing are both supported and connected;

[0026] A first lifting mechanism is disposed on the base, the first lifting mechanism includes a first supporting portion and a first lifting portion, the first supporting portion is fixedly connected to the base, the first lifting portion is movably connected to the first supporting portion, one end of the first lifting portion away from the first supporting portion extends into the cavity, and the first lifting portion is used to carry a workpiece.

[0027] In one embodiment, the number of the first lifting mechanisms is two, and the two first lifting mechanisms are arranged at intervals.

[0028] In one embodiment, the perovskite solar cell vacuum film forming equipment further comprises:

[0029] a second lifting mechanism, the second lifting mechanism being arranged between the two first lifting mechanisms, the second lifting mechanism comprising a second supporting portion and a second lifting portion, the second supporting portion being fixedly connected to the base, the second lifting portion being movably connected to the second supporting portion, and an end of the second lifting portion away from the second supporting portion extending into the cavity;

[0030] The second lifting mechanism further includes a spoiler, which is connected to the second lifting portion, and the second lifting portion can adjust the distance between the spoiler and the vacuum port on the first shell.

[0031] In one of the embodiments, the first lifting mechanism further includes a material presence detection component, which is disposed on the first lifting part, and the material presence detection component can detect whether there is a workpiece on the first lifting part.

[0032] Beneficial effects of the present invention:

[0033] The present invention provides a perovskite solar cell vacuum film forming device, which is a device for quickly forming a perovskite layer after substrate slot coating. The perovskite solar cell vacuum film forming device includes a first housing, a second housing, a vacuum pumping module and a heating module. Among them, a cavity with one end open is arranged on the first housing, and the second housing is covered on the corresponding opening of the first housing, so that the first housing and the second housing enclose a sealed chamber, thereby providing a space for the formation of the perovskite layer on the substrate. The vacuum pumping module is connected to the cavity, and the sealed chamber is evacuated through the vacuum pumping module, thereby providing a vacuum environment for the formation of the perovskite layer on the substrate, so that the liquid film on the substrate with a slit coating thickness can quickly volatilize, so that the perovskite liquid film can quickly enter the supersaturated state and then quickly nucleate. A heating module is arranged on the first housing or the second housing, and the heating module is located in the cavity, so that the heat generated by the heating module can exchange heat with the sealed chamber in the form of heat transfer and / or thermal radiation, so that the temperature in the sealed chamber reaches the target value. By setting the heating module, the evaporation rate of the perovskite solvent on the surface of the substrate is increased, which is beneficial to the rapid film formation of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 FIG. is a schematic structural diagram of a perovskite solar cell vacuum film forming device provided by an embodiment of the present invention;

[0035] Figure 2 FIG. is a schematic structural diagram of the second housing in the perovskite solar cell vacuum film forming device provided by an embodiment of the present invention;

[0036] Figure 3 FIG. is a schematic structural diagram of the second housing in the perovskite solar cell vacuum film forming device provided by an embodiment of the present invention from another perspective;

[0037] Figure 4 FIG. is a schematic structural diagram of the vacuum pumping module in the perovskite solar cell vacuum film forming device provided by an embodiment of the present invention;

[0038] Figure 5 FIG. is a schematic structural diagram of the first lifting mechanism and the second lifting mechanism in the perovskite solar cell vacuum film forming device provided by an embodiment of the present invention.

[0039] REFERENCE SIGNS:

[0040] 100. First housing; 110. Vacuum pumping port; 200. Second housing; 210. Vent port; 300. Vacuum pumping module; 310. Vacuum pump set; 311. Vacuum pump; 320. Main pipeline; 330. Branch pipeline; 340. Air extraction pipeline; 410. Electric heating element; 420. Hot air element; 500. First lifting mechanism; 510. First support portion; 520. Second lifting portion; 521. First servo motor; 522. First drive screw; 523. First guide post; 524. First lifting plate; 525. First lifting rod; 600. Second lifting mechanism; 610. Second support portion; 620. Second lifting portion; 630. Turbulence plate; 700. Base. Detailed implementation manners

[0041] In order to make the above objects, features, and advantages of the present invention more obvious and understandable, the following will describe the detailed implementation manners of the present invention with reference to the accompanying drawings. Many specific details are set forth in the following description to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed below.

[0042] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention.

[0043] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present invention, "a plurality" means at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0044] In the present invention, unless otherwise clearly defined and limited, terms such as "installed", "connected", "linked", "fixed", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral one; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two components or the interaction relationship between two components, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0045] In the present invention, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0046] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it may be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are only for the purpose of illustration and do not represent the only implementation.

[0047] Referring to Figures 1 to 5 , an embodiment of the present invention provides a perovskite solar cell vacuum film forming device. The perovskite solar cell vacuum film forming device includes a first housing 100, a second housing 200, a vacuum pumping module 300 and a heating module. The first housing 100 is configured with a cavity having one end open; the second housing 200 is covered on the corresponding opening of the first housing 100, and the first housing and the second housing enclose a sealed chamber. The second housing can move relative to the first housing so that the sealed chamber can be switched between being sealed and opened; the vacuum pumping module 300 is connected to the cavity through a pipeline, and the vacuum pumping module 300 is used to provide a vacuum environment for the cavity; the heating module is disposed on the first housing 100 or the second housing 200 and is located inside the cavity. The heating module can generate heat and exchange heat with the cavity.

[0048] The present technical solution provides a perovskite solar cell vacuum film-forming device, which is a device for rapidly forming a perovskite layer after slit coating of a substrate. The perovskite solar cell vacuum film-forming device includes a first housing 100, a second housing 200, a vacuum pumping module 300, and a heating module. Among them, a cavity with one end open is arranged on the first housing 100, and the second housing 200 is covered on the corresponding opening of the first housing 100, so that the first housing 100 and the second housing 200 enclose a sealed chamber, thereby providing a space for the formation of the perovskite layer on the substrate. The vacuum pumping module 300 is connected to the cavity, and the sealed chamber is evacuated through the vacuum pumping module 300, thereby providing a vacuum environment for the formation of the perovskite layer on the substrate, so that the liquid film on the substrate with a slit-coated film thickness can quickly evaporate, so that the perovskite liquid film can quickly enter the supersaturated state, and then quickly nucleate. A heating module is arranged on the first housing 100 or the second housing 200, and the heating module is located inside the cavity, so that the heat generated by the heating module can exchange heat with the sealed chamber in the form of heat transfer and / or thermal radiation, so that the temperature in the sealed chamber reaches the target value. By setting the heating module, the evaporation rate of the perovskite solvent on the surface of the substrate is increased, which is beneficial to the rapid film formation of the substrate.

[0049] It can be understood that both the first housing 100 and the second housing 200 are made of stainless steel, and a heat-insulating layer is arranged inside the first housing 100 and the second housing 200. The heat-insulating layer is a high-temperature heat-insulating material, which can be ceramic fiber, aluminum silicate fiber, alumina fiber, etc. By setting the heat-insulating layer, the temperature loss in the sealed chamber is prevented, thereby improving the heat-insulating performance of the entire sealed chamber and reducing energy consumption. The second housing can move relative to the first housing, so that the sealed chamber can be switched between sealed and open, so that the substrate after slit coating can be placed into the sealed chamber through the opening on the first housing.

[0050] As Figure 2 and Figure 3 shown, in one embodiment, the heating module includes an electric heating element 410 and a hot air element 420. The electric heating element 410 is arranged on the side of the second housing 200 facing the first housing 100. The electric heating element 410 can generate heat after being powered on; the hot air element 420 is arranged on the first housing 100 or the second housing 200, and an air vent 210 is constructed on the first housing 100 or the second housing 200. The air outlet of the hot air element 420 is connected to the air vent 210; among them, the electric heating element 410 and the hot air element 420 can be alternately switched to operate, or the electric heating element 410 and the hot air element 420 can operate simultaneously.

[0051] Specifically, the electric heating element 410 is a heating element that converts electrical energy into heat energy. The electric heating element 410 is fixedly connected to one side of the second housing 200 facing the cavity of the first housing 100. In this way, when the second housing 200 is covered on the opening of the first housing 100, the electric heating element 410 faces the cavity inside the first housing 100. When the electric heating element 410 is powered on, it can heat the sealed chamber formed by the first housing 100 and the second housing 200. By providing a hot air element 420 on the first housing 100 or the second housing 200, and providing a vent 210 on the corresponding first housing 100 or second housing 200, the air outlet of the hot air element 420 is connected to the vent 210, so that the hot air blown out by the hot air element 420 can be blown into the sealed chamber to heat the sealed chamber.

[0052] In addition, in this embodiment, the electric heating element 410 and the hot air element 420 are arranged to be able to operate alternately, so that the perovskite solar cell vacuum film forming device can select the heating method according to the actual situation. In another embodiment, the electric heating element 410 and the hot air element 420 can also be arranged to be able to operate simultaneously to improve the heating efficiency of the sealed chamber.

[0053] Specifically, the perovskite solar cell vacuum film forming device further includes a control unit. The control unit is electrically connected to both the electric heating element 410 and the hot air element 420. The control unit can control the operation of the electric heating element 410 or the operation of the hot air element 420 unit. The control unit can also control the simultaneous operation of the electric heating element 410 and the hot air element 420.

[0054] As Figure 2 shown, in one of the embodiments, the electric heating element 410 is a heating film and a conducting wire. The heating film is fixedly connected to the side of the second housing 200 facing the first housing 100; one end of the conducting wire is electrically connected to the power supply, and the other end is electrically connected to the heating film. The conducting wire passes through the vent 210.

[0055] Specifically, the heating film includes a metal resistance circuit layer and a polyethylene terephthalate heat-conducting layer (referred to as the PET layer). The metal resistance circuit layer is encapsulated between two PET layers. This heating film has the advantages of no open flame, high temperature shock resistance, and long service life. In this embodiment, one end of the conducting wire is electrically connected to the power supply, and the other end is electrically connected to the metal resistance circuit layer of the heating film to form a complete circuit. The conducting wire is passed through the air vent 210 so that the wiring of the electric heating element 410 and the hot air duct of the hot air element 420 share a channel, thereby simplifying the device structure while reducing the holes opened on the first housing 100 or the second housing 200. While reducing the sealing cost, the air leakage performance can be reduced, and thus the vacuum degree in the sealed chamber can be guaranteed. Specifically, the hot air element 420 mainly generates Joule heat when an electric current passes through a resistive material, and the heat is transferred to the air through heat conduction or convection, and the fan sends out the hot air to form hot air.

[0056] It can be understood that, in order to improve the heating uniformity, in this embodiment, the air vents 210 can be evenly distributed around the first housing 100 or the second housing 200, so that the hot air formed by the hot air unit is sent into the sealed chamber through the uniformly arranged air vents 210, thereby improving the temperature uniformity in the sealed chamber.

[0057] In one of the embodiments, the heating module further includes a temperature detection component. The temperature detection component is arranged on the first housing 100 or the second housing 200, and the temperature detection component is used to detect the temperature in the chamber. Specifically, the temperature detection component is a temperature sensor. The temperature sensor is communicatively connected to the control unit. The temperature sensor can convert the temperature in the sealed chamber into an electrical signal. After receiving the electrical signal on the temperature sensor, the control unit can control the operation of the heating module according to actual needs. For example, when the temperature sensor detects that the temperature in the sealed chamber is lower than the preset temperature value, the control unit controls the electric heating element 410 or the hot air element 420 to operate to heat the sealed chamber; when the temperature sensor detects that the temperature in the sealed chamber is higher than the preset temperature value, the control unit controls the electric heating element 410 or the hot air element 420 to stop operating. By setting the temperature sensor, the temperature in the sealed chamber is within the preset temperature range, thereby ensuring that the formation of the perovskite layer on the substrate is more stable and reliable.

[0058] As Figure 1 and 4 shown, in one of the embodiments, the vacuum pumping module 300 includes a plurality of vacuum pump groups 310, a main pipeline 320, and a plurality of branch pipelines 330. Each vacuum pump group 310 includes at least two vacuum pumps 311; the main pipeline 320 is connected to the chamber; the number of the plurality of branch pipelines 330 corresponds to the number of the vacuum pump groups 310. One end of the branch pipeline 330 is connected to the main pipeline 320, and the other end is connected to the vacuum pump group 310.

[0059] Specifically, a total of four vacuum pump groups 310 are provided, each vacuum pump group 310 includes two vacuum pumps 311. In this embodiment, the vacuum pump 311 uses a dry screw vacuum pump 311. The dry screw vacuum pump 311 is an oil-free, high-precision air extraction device with the advantages of low power consumption and convenient maintenance. The four vacuum pump groups 310 are connected to the main pipeline 320 through four branch pipelines 330. The main pipeline 320 is respectively connected to four air extraction pipelines 340. Four vacuum extraction ports 110 are provided on the bottom wall of the first shell 100. The four air extraction pipelines 340 are respectively connected to the four vacuum extraction ports 110 provided on the first shell 100, so as to extract the air in the closed chamber through the vacuum pump group 310, thereby forming a negative pressure environment in the closed chamber.

[0060] like Figure 1 and 4 As shown, in one embodiment, the vacuum module 300 is disposed below the first shell 100; the vacuum module 300 also includes a vacuum detection element, which is disposed in the cavity and is used to detect the vacuum degree in the cavity.

[0061] Specifically, the vacuum degree detection element is a vacuum gauge. In this embodiment, eight high-power dry screw vacuum pumps 311 are continuously working at the same time, and a piping method of one main pipeline 320 and four branch pipelines 330 is adopted. The vacuum pump 311 and the vacuum pipeline are arranged directly below the equipment to shorten the length of the vacuum pipeline and reduce vacuum consumption. A vacuum gauge is equipped on the pipeline to monitor the vacuum state in real time. The control unit can control the operating power of the vacuum pump group 310 according to the vacuum state, thereby controlling the vacuum state in the sealed chamber.

[0062] like Figure 1 , Figure 4 and Figure 5 As shown, in one of the embodiments, the vacuum film forming equipment for perovskite solar cells also includes a base and a first lifting mechanism 500, and the first shell 100 and the second shell 200 are both supported and connected to the base; the first lifting mechanism 500 is arranged on the base, and the first lifting mechanism 500 includes a first supporting part 510 and a first lifting part, the first supporting part 510 is fixedly connected to the base, the first lifting part is movably connected to the first supporting part 510, and one end of the first lifting part away from the first supporting part 510 extends into the cavity, and the first lifting part is used to carry the workpiece.

[0063] Specifically, the base is set as a frame structure, which is supported on the ground, a first support plate is set in the middle position of the frame in the vertical direction, a second support plate is set on the top of the steel frame, and the space below is used to set the vacuum pump group 310. The first support part 510 of the first lifting mechanism 500 is set on the first support plate, and the first lifting part passes through the second support plate and the bottom wall of the first shell 100 and extends into the closed chamber. By movably connecting the first lifting part with the first support part 510, the first lifting part can move up and down in the vertical direction, so that the workpiece carried on the first lifting part can move up and down.

[0064] Specifically, the first lifting part is connected to the first supporting part 510 by a servo motor and a ball screw, so that the first top part can move up and down relative to the first supporting part 510. More specifically, the first supporting part 510 includes a first fixed plate, which is fixedly connected to the first supporting plate, a first servo motor 521 is fixedly connected to the first fixed plate, the first lifting part includes a first lifting plate 524, a first transmission screw 522 and a plurality of first guide posts 523, the first transmission screw is fixedly connected to the output shaft of the first servo motor 521, the first transmission screw 522 is also rotatably connected to the first lifting plate 524, the first guide post 523 is fixedly connected to the first fixing plate, a first guide hole is provided on the first lifting plate 524, the first guide post 523 is penetrated in the first guide hole, a plurality of first lifting rods 525 are provided on the first lifting plate 524, and the first lifting rods 525 extend into the enclosed space to lift a pair of substrates. When the output shaft of the first servo motor 521 rotates, it drives the first transmission screw 522 to rotate, thereby driving the first lifting plate 524 to move along the axis of the first transmission screw 522, and driving the first lifting rod 525 to move, thereby realizing the up and down movement of the solar substrate in the closed chamber.

[0065] like Figure 1 , Figure 4 and Figure 5 As shown, in one embodiment, the first lifting mechanism 500 further includes a material detection member, which is disposed on the first lifting part and can detect whether there is a workpiece on the first lifting part. Specifically, the material detection member is a material detection sensor.

[0066] Specifically, after the solar cell substrate completes the slot coating process, the first lifting mechanism 500 uses a servo motor and a ball screw to lift the first lifting plate 524 to the receiving safety position. The handling robot places the substrate on the first lifting plate 524. After the presence detection sensor detects the substrate, the first lifting mechanism 500 drives the substrate to descend to the safety position, and the electric cylinder drives the second housing 200 to descend until it is fully combined with the first housing 100. Eight vacuum pumps 311 continuously operate to evacuate the air. Four vacuum angle valves on the first housing 100 are simultaneously opened, and four sub-pipes 330 start to evacuate the air simultaneously, and the sealed chamber is evacuated to the target state through the four vacuum ports 110 of the first housing 100. The pressure sensor continuously monitors the pressure value inside the chamber.

[0067] As Figure 1 , Figure 4 and Figure 5 shown, in one embodiment, the number of the first lifting mechanisms 500 is two, and the two first lifting mechanisms 500 are arranged at intervals. By arranging two first lifting mechanisms 500 at intervals, the two spaced-apart first lifting plates 524 are used to support both ends of the solar substrate, so as to ensure that the movement of the solar substrate in the sealed chamber is more stable and reliable.

[0068] As Figure 1 , Figure 4 and Figure 5 shown, in one embodiment, the perovskite solar cell vacuum film forming device further includes a second lifting mechanism 600. The second lifting mechanism 600 is arranged between the two first lifting mechanisms 500. The second lifting mechanism 600 includes a second support portion 610 and a second lifting portion 620. The second support portion 610 is fixedly connected to the base, the second lifting portion 620 is movably connected to the second support portion 610, and one end of the second lifting portion 620 facing away from the second support portion 610 extends into the chamber; the second lifting mechanism 600 further includes a spoiler 630. The spoiler 630 is connected to the second lifting portion 620, and the second lifting portion 620 can adjust the distance between the spoiler 630 and the vacuum port 110 on the first housing 100.

[0069] In this embodiment, the specific structure of the second lifting mechanism 600 is basically the same as that of the first lifting mechanism 500, except that the second lifting mechanism 600 is used to drive the spoiler 630 to move up and down in the sealed chamber to adjust the distance between the spoiler 630 and the vacuum pumping port 110 on the first housing 100, thereby adjusting the vacuum pumping rate. Since four vacuum pumping ports 110 are arranged at intervals on the bottom wall of the first housing 100, when the second lifting mechanism 600 drives the spoiler 630 to move upward, the distance between the spoiler 630 and the vacuum pumping port 110 increases. At this time, the vacuum pumping rate increases; when the second lifting mechanism 600 drives the spoiler 630 to move downward, the distance between the spoiler 630 and the vacuum pumping port 110 decreases. At this time, the vacuum pumping rate decreases.

[0070] In this embodiment, by adjusting the distance between the spoiler 630 and the vacuum pumping port 110 on the first housing 100 through the second lifting mechanism 600, different vacuum pumping effects and data are obtained. By optimizing the pipeline path and selecting a suitable vacuum pump 311, this device can achieve a vacuum pumping effect of pumping the vacuum degree in the sealed chamber to 1 Pa in 5 s, -5 Pa in 3 s, and -20 Pa in 2 s. The four vacuum pumping ports 110 on the lower cavity are evenly distributed, making the air extraction more balanced. Once the perovskite liquid film enters the saturated or supersaturated state, the nucleation and crystal growth processes will start simultaneously. The faster the evaporation rate, the less time the nucleation and crystal growth coexist. Furthermore, the nucleation rate is much greater than the crystal growth rate, making the crystal growth process controllable.

[0071] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0072] The above-described embodiments only represent several implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the invention patent should be subject to the appended claims.

Claims

1. A perovskite solar cell vacuum film forming device, characterized in that, The perovskite solar cell vacuum film forming equipment comprises: A first shell is configured as a cavity with an open end; A second shell is covered on the opening corresponding to the first shell, the first shell and the second shell are enclosed to form a closed chamber, and the second shell is movable relative to the first shell so that the closed chamber can be switched between closed and open; A vacuum pumping module, connected to the cavity through a pipeline, and used for providing a vacuum environment for the cavity; The heating module is arranged on the first shell or the second shell and is located in the cavity. The heating module can generate heat and perform heat exchange with the cavity.

2. The perovskite solar cell vacuum film forming device according to claim 1, wherein, The heating module comprises: an electric heating element disposed on a side of the second shell facing the first shell, the electric heating element being capable of generating heat after being energized; and, A hot air element is provided on the first shell or the second shell, a vent is configured on the first shell or the second shell, and an air outlet of the hot air element is connected to the vent; The electric heating element and the hot air element can be operated alternately, or the electric heating element and the hot air element can be operated simultaneously.

3. The perovskite solar cell vacuum film forming device according to claim 2, characterized in that, The electric heating element is a heating film and a conductive wire, and the heating film is fixedly connected to the side of the second shell facing the first shell; One end of the conductive wire is electrically connected to a power source, and the other end is electrically connected to the heating film, and the conductive wire passes through the vent.

4. The perovskite solar cell vacuum film forming device according to claim 2, wherein, The heating module also includes: A temperature detection component is provided on the first shell or the second shell, and is used to detect the temperature in the cavity.

5. The perovskite solar cell vacuum film forming device according to claim 1, characterized in that, The vacuum module comprises: A plurality of vacuum pump groups, each of the vacuum pump groups comprising at least two vacuum pumps; a main pipeline, connected to the cavity; A plurality of branch pipes correspond to the number of the vacuum pump groups, one end of each branch pipe is connected to the main pipe, and the other end of each branch pipe is connected to the vacuum pump group.

6. The perovskite solar cell vacuum film forming device according to claim 5, characterized in that, The vacuum pumping module is disposed below the first shell; the vacuum pumping module further includes: A vacuum degree detection element is disposed in the cavity, and the vacuum degree detection element is used to detect the vacuum degree in the cavity.

7. The perovskite solar cell vacuum film forming device according to claim 1, characterized in that, The perovskite solar cell vacuum film forming equipment also includes: A base, on which the first shell and the second shell are both supported and connected; A first lifting mechanism is disposed on the base, the first lifting mechanism includes a first supporting portion and a first lifting portion, the first supporting portion is fixedly connected to the base, the first lifting portion is movably connected to the first supporting portion, one end of the first lifting portion away from the first supporting portion extends into the cavity, and the first lifting portion is used to carry a workpiece.

8. The perovskite solar cell vacuum film forming device according to claim 7, characterized in that, The number of the first lifting mechanisms is two, and the two first lifting mechanisms are arranged at intervals.

9. The perovskite solar cell vacuum film forming device according to claim 8, characterized in that, The perovskite solar cell vacuum film forming equipment also includes: a second lifting mechanism, the second lifting mechanism being arranged between the two first lifting mechanisms, the second lifting mechanism comprising a second supporting portion and a second lifting portion, the second supporting portion being fixedly connected to the base, the second lifting portion being movably connected to the second supporting portion, and an end of the second lifting portion away from the second supporting portion extending into the cavity; The second lifting mechanism further includes a spoiler, which is connected to the second lifting portion, and the second lifting portion can adjust the distance between the spoiler and the vacuum port on the first shell.

10. The perovskite solar cell vacuum film forming device according to claim 7, characterized in that, The first lifting mechanism further includes a material presence detection component, which is disposed on the first lifting portion and can detect whether there is a workpiece on the first lifting portion.

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