Substrate storage container

Abstract

A substrate storage container (1) is provided with: a container body (2) provided with a cylindrical wall section (20) in which a container body opening is formed at one end of the front side (D11) and the other end of the rear side (D12) is closed by a rear wall (22), the inner surface of the wall section (20) forming a substrate storage space (27) capable of storing a plurality of substrates and communicating with the container body opening; and a cover body which is detachable with respect to the opening part of the container main body and can close the opening part of the container main body. The inner wall (22) is provided with a leg part (221), and the leg part (221) forms a landing surface (CP) when the container main body (2) is carried in a manner that the inner wall (22) faces downwards. The inner wall (22) has a gate trace (226) facing the rear side (D12). The gate mark (226) is located on the front side (D11) of the ground contact surface (CP).

Description

Technical Field

[0001] The present invention relates to a substrate storage container used for storing, storing, transporting, conveying, etc. a substrate composed of a semiconductor wafer or the like. Background Art

[0002] As a substrate storage container for storing a substrate composed of a semiconductor wafer and transporting the substrate in a process in a factory, a substrate storage container having a structure including a container main body and a lid has been conventionally known (for example, refer to Patent Document 1).

[0003] One end portion of the container main body has an opening peripheral portion forming an opening of the container main body. The other end portion of the container main body has a closed cylindrical wall portion. A substrate storage space is formed inside the container main body. The substrate storage space is surrounded by the wall portion and can store a plurality of substrates. The lid is detachable with respect to the opening peripheral portion and can close the opening of the container main body. When the opening of the container main body is closed by the lid, a plurality of substrates are held in a state where adjacent substrates are arranged at a predetermined interval from each other.

[0004] The substrate storage container is formed by injection molding of a resin such as polycarbonate as a molding material. The resin flows from an injection molding device through a main runner of a mold (a resin flow path up to a sub-runner; sprue), a sub-runner branched from the main runner (a resin flow path up to a gate; runner), and a gate (a resin inlet into a cavity), and fills the cavity, and is molded into the container main body by replicating the shape of the cavity (for example, refer to Patent Document 1). At a position corresponding to the gate in the molded container main body, a gate mark (also referred to as a gate scar) is inevitably formed.

[0005] Patent Document 1: Japanese Patent Laid-Open No. 2017-050494

[0006] The gate mark is usually more prominent than a reference surface of the outer surface. Due to manufacturing restrictions, the gate mark is sometimes arranged on the inner wall (rear wall) of the container main body. When it is desired to carry the container main body with the side having the gate mark facing downward, the gate mark sometimes interferes with and abuts against an undesired portion, causing the container main body to tilt and shake. In particular, in the case of the hot runner method, since it is difficult to control the shape of the gate mark, this problem becomes significant. In addition, the hot runner method is a technique in which, in injection molding of a thermoplastic resin, the resin is kept in a molten state in the main runner and the sub-runner, and a molded product is obtained by cutting the resin at the gate in this state. Summary of the Invention

[0007] An object of the present invention is to provide a substrate storage container. In a substrate storage container having a gate mark on the inner wall of the container body, when it is desired to place the container body with the inner wall facing downwards, tilting and shaking of the container body caused by interference and contact between the gate mark and an undesired part can be suppressed.

[0008] The substrate storage container of the present invention includes: a container body having a cylindrical wall portion with a container body opening formed at one end portion on the front side and the other end portion on the rear side closed by an inner wall, and a substrate storage space for accommodating a plurality of substrates and communicating with the container body opening formed by the inner surface of the wall portion; and a lid that is detachable from the container body opening and can close the container body opening. Among them, the inner wall has a foot portion, the foot portion forms a landing surface when the container body is placed with the inner wall facing downwards, the inner wall has a gate mark facing the rear side, and the gate mark is located more on the front side than the landing surface.

[0009] In addition, it may be that the landing surface is formed by the bottom surface of one or more of the foot portions, and a concave portion recessed towards the front side is provided on the bottom surface. By arranging the gate mark in the concave portion, the gate mark is located more on the front side than the landing surface.

[0010] In addition, it may be that the landing surface is formed by the bottom surface of one or more foot portions, and the gate mark is located more on the front side than the landing surface by being arranged on the outer surface of the inner wall that is more on the front side than the bottom surface.

[0011] According to the present invention, a substrate storage container can be provided. In a substrate storage container having a gate mark on the inner wall of the container body, when it is desired to place the container body with the inner wall facing downwards, tilting and shaking of the container body caused by interference and contact between the gate mark and an undesired part can be suppressed. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is an exploded perspective view showing a state where a plurality of substrates W are accommodated in the substrate storage container 1 of the first embodiment of the present invention. Figure 2 It is an upper perspective view of the container body 2 of the substrate storage container 1 of the first embodiment of the present invention as viewed from the front. Figure 3A It is a lower perspective view of the container body 2 of the substrate storage container 1 of the first embodiment of the present invention as viewed from the rear. Figure 3B It is a front view of the container body 2 of the substrate storage container 1 of the first embodiment of the present invention. Figure 3C Is Figure 3A The cross-sectional view taken along the line A-A shown. Figure 4A This is a bottom perspective view showing a container body 2A of a substrate storage container according to a second embodiment of the present invention from the rear. Figure 4B It is an upper perspective view showing a container body 2A of a substrate storage container according to a second embodiment of the present invention from the front. Figure 4C yes Figure 4A BB cross section shown. Figure 5A This is an upper perspective view showing a container body 2B of a substrate storage container according to a third embodiment of the present invention from the rear. Figure 5B It is a top view of the container body 2B of the substrate storage container according to the third embodiment of the present invention. Figure 5C yes Figure 5A The CC cross-section is shown. DETAILED DESCRIPTION

[0013] Hereinafter, a substrate storage container 1 according to a first embodiment will be described with reference to the drawings. Figure 1 1 is an exploded perspective view showing a state where a plurality of substrates W are stored in the substrate storage container 1 according to the first embodiment of the present invention. Figure 2 This is an upper perspective view showing the container body 2 of the substrate storage container 1 according to the first embodiment of the present invention from the front. Figure 3A This is a bottom perspective view showing the container body 2 of the substrate storage container 1 according to the first embodiment of the present invention from the rear. Figure 3B It is a front view of the container body 2 of the substrate storage container 1 according to the first embodiment of the present invention. Figure 3C yes Figure 3A AA cross-section shown.

[0014] Here, for the sake of convenience, the direction from the container body 2 to the cover body 3 ( Figure 1 The direction from the upper right to the lower left in the figure is defined as the front direction D11 or the front side D11, and the opposite direction is defined as the rear direction D12 or the rear side D12, and these are combined to define the front-to-back direction D1. In addition, the direction from the lower wall 24 to the upper wall 23 ( Figure 1 The upper direction in the figure is defined as the upper direction D21, the opposite direction is defined as the lower direction D22, and they are combined to define the upper and lower directions D2. Figure 1 The left direction D31 is defined as the direction from the lower right to the upper left in the figure, and the opposite direction is defined as the right direction D32, and these are combined to define the left-right direction D3 or the lateral direction D3. In some drawings, arrows indicating these directions are illustrated.

[0015] In addition, the substrate W stored in the substrate storage container 1 (refer to Figure 1 ) is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is an industrial thin substrate. The substrate W in the present embodiment is a 300-mm-diameter silicon wafer.

[0016] As Figure 1 shown, the substrate storage container 1 serves as a shipping container for storing the substrate W composed of the above-mentioned silicon wafer and transporting the substrate W by means of transportation tools such as land transportation tools, air transportation tools, and sea transportation tools. The substrate storage container 1 is composed of a container body 2 and a lid 3. The container body 2 is provided with a lateral substrate support portion 5 and an inner substrate support portion 6 (refer to Figure 2 etc.). The lid 3 is provided with a front retainer (not shown) as a lid-side substrate support portion.

[0017] The container body 2 has a cylindrical wall portion 20, and a container body opening 21 is formed at one end portion of the wall portion 20, and the other end portion is closed. A substrate storage space 27 is formed inside the container body 2. The substrate storage space 27 is surrounded by the wall portion 20. The lateral substrate support portion 5 and the inner substrate support portion 6 are arranged in a portion of the wall portion 20 that forms the substrate storage space 27. As Figure 1 shown, a plurality of substrates W can be stored in the substrate storage space 27.

[0018] Inside the substrate storage space 27, the lateral substrate support portions 5 are provided in pairs on the wall portion 20. When the container body opening 21 is not closed by the lid 3, the lateral substrate support portions 5 can support the edge portions of a plurality of substrates W in a state where the adjacent substrates W are separated from each other by a predetermined interval by abutting against the edge portions of the plurality of substrates W. Inside the lateral substrate support portion 5, the inner substrate support portion 6 is integrally formed with the lateral substrate support portion 5.

[0019] Inside the substrate storage space 27, the inner substrate support portion 6 (refer to Figure 2 etc.) is provided on the wall portion 20 in a paired manner with the front retainer. When the container body opening 21 is closed by the lid 3, the inner substrate support portion 6 can support the rear portions of the edge portions of a plurality of substrates W by abutting against the edge portions of the plurality of substrates W.

[0020] The lid 3 is detachable from the opening peripheral portion 28 that forms the container body opening 21 and can close the container body opening 21. The front retainer is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3. Inside the substrate storage space 27, the front retainer is arranged in a paired manner with the inner substrate support portion 6.

[0021] When the opening 21 of the container body is closed by the lid body 3, the front retainer can support the front portions of the edges of the plurality of substrates W by abutting against the edges of the plurality of substrates W. When the opening 21 of the container body is closed by the lid body 3, the front retainer supports the plurality of substrates W in cooperation with the inner substrate support portion 6, thereby holding the plurality of substrates W in a state where adjacent substrates W are arranged at a predetermined interval apart from each other.

[0022] The substrate storage container 1 is made of a resin such as a plastic material. Examples of the resin as this material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyether ketone, polybutylene terephthalate, polyether ether ketone, and liquid crystal polymer, and alloys thereof. When imparting conductivity to these resin materials, conductive substances such as carbon fiber, carbon powder, carbon nanotubes, and conductive polymers are selectively added. In addition, in order to improve rigidity, glass fiber, carbon fiber, etc. can also be added.

[0023] Hereinafter, each part will be described in detail. As Figure 1 shown, the wall portion 20 of the container body 2 has an inner wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The inner wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are integrally formed of the above-mentioned materials.

[0024] The first side wall 25 and the second side wall 26 face each other in the lateral direction D3, and the upper wall 23 and the lower wall 24 face each other in the vertical direction D2. The rear ends of the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are all connected to the inner wall 22. The front ends of the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 constitute an opening peripheral portion 28, and the opening peripheral portion 28 has a positional relationship relative to the inner wall 22 and forms a substantially rectangular container body opening 21.

[0025] The opening peripheral portion 28 is provided at one end of the container body 2, and the inner wall 22 is located at the other end of the container body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the inner wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 form a substrate storage space 27 surrounded by them. The container body opening 21 formed in the opening peripheral portion 28 communicates with the substrate storage space 27, and the substrate storage space 27 is surrounded by the wall portion 20 and formed inside the container body 2. Up to 25 substrates W can be stored in the substrate storage space 27.

[0026] As Figure 1As shown, at a portion near the opening peripheral portion 28 which is a part of the upper wall 23 and the lower wall 24, there are formed locking engagement concave portions 231A, 231B, 241A, 241B that are recessed outwardly from the substrate accommodation space 27. The locking engagement concave portions 231A, 231B, 241A, 241B are each formed at the vicinity of the left and right end portions of the upper wall 23 and the lower wall 24, and a total of four are formed.

[0027] As Figure 1 shown, on the outer surface of the upper wall 23, the rib 235 is provided integrally formed with the upper wall 23. The rib 235 improves the rigidity of the container body 2. In addition, the top flange 236 is fixed to the central portion of the upper wall 23. When suspending the substrate accommodation container 1 in an AMHS (Automated Wafer Handling System), PGV (Wafer Substrate Handling Cart), etc., the top flange 236 is a component that becomes the portion to be hooked and suspended in the substrate accommodation container 1.

[0028] The side substrate support portions 5 are respectively provided on the first side wall 25 and the second side wall 26, and are built-in components that are arranged in pairs in the left - right direction D3 within the substrate accommodation space 27. Specifically, as Figure 2 shown, the side substrate support portion 5 has a plate portion 51 and a support wall 52 as a plate portion support portion. The plate portion 51 and the support wall 52 are integrally formed of a resin material, and the plate portion 51 is supported by the support wall 52.

[0029] When observed in the up - down direction D2, the plate portion 51 is in a substantially arc shape of a plate. Twenty - five plate portions 51 are respectively provided along the up - down direction D2 on the first side wall 25 and the second side wall 26, and a total of 50 are provided. The adjacent plate portions 51 are separated in the up - down direction D2 and are arranged in a parallel positional relationship. In addition, above the uppermost plate portion 51, there is also arranged a plate - shaped component parallel to the plate portion 51, and this component is a component that guides the substrate W when inserting the uppermost substrate W into the substrate accommodation space 27.

[0030] The 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 have a positional relationship of being opposite to each other in the left - right direction D3. In addition, the 50 plate portions 51 and the plate - shaped guiding component parallel to the plate portion 51 have a positional relationship parallel to the inner surface of the lower wall 24. As Figure 2 shown, a convex portion 511 is provided on the upper surface of the plate portion 51. The substrate W supported by the plate portion 51 only contacts the protruding end of the convex portion 511 and does not contact the plate portion 51 surface - to - surface.

[0031] The support wall 52 is in the shape of a plate extending in the vertical direction D2 and the substantially front-rear direction D1. The support wall 52 has a predetermined length in the longitudinal direction of the plate portion 51 and is connected to the side edge of the plate portion 51. The plate-shaped support wall 52 bends along the outer edge of the plate portion 51 toward the substrate accommodation space 27.

[0032] That is, the 25 plate portions 51 provided on the first side wall 25 are connected to the support walls 52 provided on the side of the first side wall 25. Similarly, the 25 plate portions 51 provided on the second side wall 26 are connected to the support walls 52 provided on the side of the second side wall 26. The support walls 52 are respectively fixed to the first side wall 25 and the second side wall 26.

[0033] The side substrate support portion 5 configured as such can support the edge portions of multiple substrates W in a state where adjacent substrates W among the multiple substrates W are separated from each other by a predetermined interval and are in a parallel positional relationship.

[0034] As Figure 1 shown, the lid 3 is substantially rectangular and is substantially the same shape as the opening peripheral portion 28 of the container body 2. The lid 3 is detachable from the opening peripheral portion 28 of the container body 2. By mounting the lid 3 on the opening peripheral portion 28, the lid 3 can close the container body opening 21. On the sealing surface that is the inner surface of the lid 3 ( Figure 1 the surface on the back side of the lid 3 shown) and faces the surface of the step portion formed at a position in the rear direction D12 close to the opening peripheral portion 28 when the lid 3 closes the container body opening 21, an annular sealing member 4 is mounted. The sealing member 4 is composed of various thermoplastic elastomers such as polyester-based and polyolefin-based that can be elastically deformed, fluororubber, silicone rubber, etc. The sealing member 4 is arranged to surround the outer peripheral edge of the lid 3 for one week.

[0035] When the lid 3 is mounted on the opening peripheral portion 28, the sealing member 4 is elastically deformed by being clamped between the sealing surface and the inner surface of the lid 3, and the lid 3 closes the container body opening 21 in a sealed state. By detaching the lid 3 from the opening peripheral portion 28, the substrate W can be taken out or put into the substrate accommodation space 27 in the container body 2.

[0036] A locking mechanism is provided on the lid 3. The locking mechanism is provided near the left and right ends of the lid 3. As Figure 1 shown, it includes: two upper locking portions 32A that can protrude upward in the direction D21 from the upper side of the lid 3; and two lower locking portions 32B that can protrude downward in the direction D22 from the lower side of the lid 3. The two upper locking portions 32A are arranged near the left and right ends of the upper side of the lid 3, and the two lower locking portions 32B are arranged near the left and right ends of the lower side of the lid 3.

[0037] An operation part 33 is provided on the outer surface of the lid body 3. By operating the operation part 33 from the front side of the lid body 3, the upper locking part 32A and the lower locking part 32B can protrude from the upper and lower edges of the lid body 3, and in addition, a state can be achieved in which the upper locking part 32A and the lower locking part 32B do not protrude from the upper and lower edges of the lid body 3. The upper locking part 32A protrudes upward from the upper edge of the lid body 3 and engages with the locking engagement recesses 231A and 231B of the container body 2, and the lower locking part 32B protrudes downward from the lower edge of the lid body 3 and engages with the locking engagement recesses 241A and 241B of the container body 2, whereby the lid body 3 is fixed to the opening peripheral part 28 of the container body 2.

[0038] Next, the inner wall 22 will be described in detail. As Figures 3A - 3C shown, the inner wall 22 has feet 221 on the outer surface side (rear side D12), and the feet 221 form a landing surface CP (indicated by a double-dashed line in Figure 3C ) when the container body 2 is carried with the inner wall 22 facing downward. For example, when the substrate W is not accommodated in the container body 2, the container body 2 may be carried with the inner wall 22 facing downward. As long as the feet 221 can form the landing surface CP, the number and shape of the feet 221 are not limited. For example, if the area of the feet 221 is large and it is a flat plane, one foot 221 can form the landing surface CP.

[0039] In the first embodiment, the inner wall 22 has one foot 221 at each of the four corners, and a total of four feet 221. The bottom surface 222 (the surface on the rear side D12) of the feet 221 is a flat plane parallel to the D2-D3 plane (a plane orthogonal to the front-rear direction D1). The bottom surfaces 222 of the four feet 221 are arranged in a positional relationship forming the vertices of a rectangle, and form a landing surface CP parallel to the D2-D3 plane. That is, the landing surface CP is formed by the bottom surfaces 222 of one or more feet 221.

[0040] The portion of the rear side D12 of the inner wall 22 other than the feet 221 is located more on the front side D11 than the bottom surface 222 of the feet 221 forming the landing surface CP. The portion of the rear side D12 of the inner wall 22 other than the feet 221 can adopt various shapes according to the container body 2. For example, between two feet 221 arranged in the up-down direction D2, a concave region 223 that is more recessed toward the front side D11 than the bottom surface 222 of the feet 221 is provided. Two linear groove portions 224 that are recessed toward the front side D11 and extend in the up-down direction D2 are provided inside the feet 221 and the concave region 223 arranged in the lateral direction D3 in the lateral direction D3. The depth H224 of the linear groove portion 224 with respect to the landing surface CP (refer to Figure 3C ) is, for example, 20 to 40 mm.

[0041] An island region 225 is provided between two linear groove portions 224 arranged on the lateral D3. The surface of the rear side D12 of the island region 225 is more on the front side D11 than the bottom surface 222 of the leg portion 221. In addition, corresponding to the linear groove portion 224, a linear bulge portion 271 that bulges forward in the D11 direction and extends in the vertical direction D2 is provided in the substrate accommodation space 27.

[0042] The inner wall 22 has a gate mark 226 facing the rear side D12. The gate mark 226 is more on the front side D11 than the grounding surface CP. If described in detail, a recess 227 is provided on the bottom surface 222 of the leg portion 221 as a recess that depresses forward in the D11 direction. The gate mark 226 is located more on the front side D11 than the grounding surface CP by being disposed in the recess 227. Since the expansion of the gate mark 226 is very small, in the cross-sectional view shown in etc., the outer surface (the surface of the rear side D12) of the gate mark 226 appears to be substantially linear. The depth H227 of the recess 227 with respect to the grounding surface CP (refer to Figure 3C ) is, for example, 0.5 to 3.0 mm, preferably 1.0 to 1.5 mm. Figure 3C )

[0043] In addition, corresponding to the recess 227, a bulge portion 272 that bulges forward in the D11 direction is formed in the substrate accommodation space 27.

[0044] The gate is an inlet for flowing molten resin from an injection molding machine into a mold (molded product). At the position corresponding to the gate in the molded product, a gate mark inevitably remains. In the case of manufacturing the container body 2 in the substrate accommodation container 1 by molding, due to restrictions such as the shape of the container body 2 and molding conditions, the gate mark is also mostly disposed on the inner wall 22 of the container body 2. If the inner wall 22 is flat, by disposing the gate mark near the center of the D2-D3 plane in the inner wall 22, it is relatively easy to mold the container body 2 through one gate (gate mark). However, in the case where the linear groove portion 224 is provided on the inner wall 22 as in the present embodiment, since the fluidity of the molten resin in the linear groove portion 224 is poor, it is difficult to appropriately mold the container body 2. Therefore, in the present embodiment, by disposing a total of four gates (gate marks 226) at the four corners of the inner wall 22, the moldability of the container body 2 is improved.

[0045] The identification member 245 (refer to Figure 3A) is a component that can be freely attached and detached to the lower part of the rear of the container body 2 in order to identify information of the substrate W accommodated in the substrate accommodation container 1. Due to the shape of the identification component 245, etc., when the identification component 245 is installed on the container body 2, there is a case where the identification component 245 is located more on the rear side D12 than the ground surface CP. However, when it is desired to carry the container body 2 with the inner wall 22 facing downwards, before carrying, the identification component 245 is detached from the container body 2.

[0046] According to the substrate accommodation container 1 of the first embodiment, the following effects can be obtained. The substrate accommodation container 1 of the first embodiment includes: a container body 2 having a cylindrical wall portion 20 formed with a container body opening portion 21 at one end of the front side D11 and closed by an inner wall 22 at the other end of the rear side D12, and a substrate accommodation space 27 formed by the inner surface of the wall portion 20 and communicating with the container body opening portion 21 for accommodating a plurality of substrates W; and a lid body 3 that is attachable and detachable with respect to the container body opening portion 21 and can close the container body opening portion 21. The inner wall 22 has a foot portion 221, and the foot portion 221 forms a ground surface CP when the container body 2 is carried with the inner wall 22 facing downwards. The inner wall 22 has a gate mark 226 facing the rear side D12. The gate mark 226 is located more on the front side D11 than the ground surface CP.

[0047] Therefore, in the substrate accommodation container 1 in which the inner wall 22 of the container body 2 has a gate mark 226, when it is desired to carry the container body 2 with the inner wall 22 facing downwards, the ground surface CP (the foot portion 221 touches the ground) can be formed by the foot portion 221 without the gate mark 226 touching the ground. It is also possible to simplify the shape control and post-processing of the gate mark 226. Therefore, it is possible to suppress the inclination and shaking of the container body 2 caused by the interference and contact between the gate mark 226 and an undesired portion.

[0048] The ground surface CP is formed by the bottom surfaces 222 of one or more (four in this embodiment) foot portions 221, and a concave portion 227 recessed towards the front side D11 is provided on the bottom surface 222. The gate mark 226 is located more on the front side D11 than the ground surface CP by being disposed in the concave portion 227. Therefore, it is easy to dispose the gate mark 226 (i.e., the gate of the injection molding machine) on the foot portion 221, the restriction on the position of the gate mark 226 is reduced, and the moldability of the container body 2 can be improved.

[0049] Corresponding to the concave portion 227, a bulging portion 272 bulging towards the front side D11 is formed in the substrate accommodation space 27, but the bulging portion 272 is disposed on the foot portion 221 located at the rearmost side D12 in the container body 2. Therefore, the adverse effect on the substrate accommodation space 27 caused by the presence of the bulging portion 272 can be minimized.

[0050] Next, the substrate storage container according to the second embodiment of the present invention will be described with reference to the accompanying drawings. Figure 4A It is a bottom perspective view of the container body 2A of the substrate storage container according to the second embodiment of the present invention, shown from the rear. Figure 4B It is a top perspective view of the container body 2A of the substrate storage container according to the second embodiment of the present invention, shown from the front. Figure 4C It is Figure 4A The cross-sectional view taken along line B - B shown.

[0051] In the second embodiment, regarding the features of the present invention, for example, the number, position, shape, etc. of the feet 221 and the number, position, etc. of the gate marks 226 are different from those in the first embodiment. The structures other than these are substantially the same as those in the first embodiment. Therefore, the same components are illustrated with the same reference numerals, and the description is omitted (the description of the structures and effects of the first embodiment is also appropriately cited in other embodiments).

[0052] In the container body 2A of the substrate storage container according to the second embodiment, as Figures 4A - 4C shown, the inner wall 22 has feet 221 that form a ground contact surface CP (shown by a two-dot chain line in Figure 4C ) on the outer surface side (rear side D12). Since the bottom surface 222 of the feet 221 in the second embodiment has a large area and is a flat plane, the ground contact surface CP can be formed by the bottom surface 222 of one foot 221.

[0053] The inner wall 22 has gate marks 226 facing the rear side D12. The gate marks 226 are located more on the front side D11 than the ground contact surface CP. If described in detail, a recess 227 is provided on the bottom surface 222 of the feet 221 as a recess that depresses toward the front side D11. The gate marks 226 are located more on the front side D11 than the ground contact surface CP by being arranged in the recess 227. The gate marks 226 and the recess 227 are arranged at the central position of the D2 - D3 plane in the inner wall 22, that is, at the position arranged on the rearmost side D12 in the inner wall 22. Since the expansion of the gate marks 226 is very small, in the cross-sectional view shown in Figure 4C etc., the outer surface (the surface on the rear side D12) of the gate marks 226 appears linear.

[0054] Next, the substrate storage container according to the third embodiment of the present invention will be described with reference to the accompanying drawings. Figure 5A It is a top perspective view of the container body 2B of the substrate storage container according to the third embodiment of the present invention, shown from the rear. Figure 5B It is a top view of the container body 2B of the substrate storage container according to the third embodiment of the present invention. Figure 5C It is Figure 5A The cross-sectional view taken along line C - C shown.

[0055] In the third embodiment, regarding the features of the present invention, for example, the number, position, etc. of the gate marks 226 are different from those in the first embodiment. The structures other than this are substantially the same as those in the first embodiment, so the same components are illustrated with the same reference numerals and the description thereof is omitted.

[0056] In the container body 2B of the substrate storage container in the third embodiment, as Figures 5A - 5C shown, the inner wall 22 has gate marks 226 facing the rear side D12. The gate marks 226 are located more on the front side D11 than the grounding surface CP. If described in detail, the gate marks 226 are not arranged on the bottom surface 222 of the leg portion 221. The gate marks 226 are provided in the island region 225. If described in detail, the surface on the rear side D12 of the island region 225 is the outer surface of the inner wall 22 that is more on the front side D11 than the bottom surface 22 of the leg portion 221 and is more on the front side D11 than the bottom surface 222 of the leg portion 221. Gate marks 226 are provided on the surface on the rear side D12 of the island region 225. By arranging the gate marks 226 on the outer surface of the island region 225, the gate marks 226 are located more on the front side D11 than the grounding surface CP. The distance H226 between the grounding surface CP and the gate marks 226 (refer to Figure 5C ) is, for example, 0.5 to 15 mm, preferably 0.5 to 2.0 mm.

[0057] According to the substrate storage container of the third embodiment, the following effects can be obtained. In the substrate storage container of the third embodiment, the gate marks 226 are located more on the front side D11 than the grounding surface CP by being arranged on the outer surface of the inner wall 22 that is more on the front side D11 than the bottom surface 222 of the leg portion 221. Therefore, the gate marks 226 can be arranged at positions other than the leg portion 221, and the degree of freedom in arranging the gate marks 226 is high, and it is easy to improve the moldability.

[0058] The present invention is not limited to the above-described embodiments, and can be modified within the technical scope described in the claims.

[0059] For example, the shapes of the container body and the lid, the number of substrates that can be stored in the container body, and the dimensions are not limited to the shapes of the container body 2 and the lid 3, the number of substrates W that can be stored in the container body 2, and the dimensions in the present embodiment. In addition, the substrate W in the present embodiment is a silicon wafer with a diameter of 300 mm, but it is not limited to this value. Description of reference numerals

[0060] 1 Substrate storage container 2 Container body 3 Lid 21 Container body opening 20 Wall portion 22 Inner wall 27 Substrate storage space 221 Leg 222 Bottom surface 226 Gate mark 227 Recess CP Contact surface D11 Front side D12 Rear side W Substrate

Claims

1. A substrate storage container, comprising: A container body having a cylindrical wall portion with a container body opening formed at one end of the front side and the other end of the rear side closed by an inner wall, and a substrate storage space capable of storing a plurality of substrates formed by the inner surface of the wall portion and communicating with the container body opening; And A lid that is detachable from the container body opening and can close the container body opening, The substrate storage container is characterized in that The inner wall has feet, and the feet form a landing surface when the container body is carried with the inner wall facing downwards, The inner wall has a gate mark facing the rear side, The gate mark is located more towards the front side than the landing surface.

2. The substrate storage container according to claim 1, characterized in that The landing surface is formed by the bottom surface of one or more of the feet, A recess recessed towards the front side is provided on the bottom surface, The gate mark is located more towards the front side than the landing surface by being disposed in the recess.

3. The substrate storage container according to claim 1, characterized in that The landing surface is formed by the bottom surface of one or more feet, The gate mark is located more towards the front side than the landing surface by being disposed on the outer surface of the inner wall that is more towards the front side than the bottom surface and other than the bottom surface.

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