Probe control method and device and storage medium

Abstract

The invention discloses a probe control method and device and a storage medium, and relates to the technical field of chip detection. According to the application, the first function relationship is obtained by pre-fitting the multiple groups of sample acupuncture depths and the corresponding sample pressure data as the calibration value, so that the corresponding pressure target value can be determined by directly inputting the specified acupuncture depth to the first function relationship in practical application; therefore, in the process that the probe is inserted into the target chip from the surface of the target chip, a user only needs to pay attention to whether the real-time pressure data reaches the calculated pressure target value or not, convenience is considered, meanwhile, the accuracy of the probe insertion depth is guaranteed, and the detection efficiency is improved.

Description

Technical Field

[0001] This application relates to the technical field of chip detection, and particularly to a probe control method, device, and storage medium. Background Art

[0002] In the related art, during the production of wafers or chips, needles need to be inserted through probes for relevant inspections. The moving stroke of the probe can be represented by the displacement amount shown by a displacement encoder.

[0003] However, for chips or wafers of different specifications, their thicknesses are different, or there are certain dimensional errors for chips or wafers of different batches. Therefore, when inserting needles according to the displacement amount given by the displacement sensor, it is difficult to achieve the accuracy requirements of the needle insertion depth for needle insertion detection.

[0004] Therefore, how to ensure the accuracy of the probe insertion depth is an urgent problem to be solved currently. Summary of the Invention

[0005] The main purpose of this application is to provide a probe control method, device, and storage medium, aiming to solve the technical problem of how to ensure the accuracy of the probe insertion depth.

[0006] To achieve the above purpose, this application proposes a probe control method, which includes: During the process of the probe inserting from the surface of the target chip into the target chip, continuously obtain the real-time pressure data of the pressure sensor; wherein, the wafer test equipment includes an electric probe holder, and the swing arm of the electric probe holder is connected with a probe through a pressure sensor; When the real-time pressure data reaches the pressure target value, control the probe to stop moving; wherein, the pressure target value is calculated according to the first functional relationship between the needle insertion depth and the pressure data; the first functional relationship is obtained by fitting multiple groups of sample needle insertion depths and the corresponding sample pressure data.

[0007] In some embodiments, before continuously obtaining the real-time pressure data of the pressure sensor during the process of the probe inserting from the surface of the target chip into the target chip, the probe control method further includes: During the process of the probe inserting into the sample chip, obtain the displacement data of multiple swing arms and the corresponding sample pressure data for each displacement data; For each displacement data, use the difference between the displacement data and the starting displacement data of the needle insertion as the sample needle insertion depth; the starting displacement data of the needle insertion is the swing arm displacement data when the tip of the probe touches the surface of the sample chip; According to multiple groups of sample needle insertion depths and the corresponding sample pressure data, fit to obtain the first functional relationship.

[0008] In some embodiments, during the process of the probe penetrating the sample chip, obtaining displacement data of multiple swing arms and sample pressure data corresponding to each displacement data includes: During the process of the probe penetrating the sample chip and moving a preset distance, obtaining the displacement data of the swing arms multiple times, and obtaining the sample pressure data corresponding to each displacement data.

[0009] In some embodiments, during the process of the probe penetrating the sample chip, obtaining displacement data of multiple swing arms and sample pressure data corresponding to each displacement data includes: During the process of the probe penetrating the sample chip and moving at a constant speed for a preset distance, obtaining displacement data of multiple swing arms and sample pressure data corresponding to each displacement data.

[0010] In some embodiments, the probe control method further includes: Before the probe penetrates the target chip, continuously obtaining the real-time pressure data of the pressure sensor; in the case where the change trend of the real-time pressure data is detected not to match the corresponding value in the second functional relationship, controlling the probe to stop moving; wherein, the second functional relationship is used to characterize the relationship between the displacement data of the probe and the real-time pressure data before the probe penetrates the target chip; and / or During the process of the probe penetrating the target chip, in the case where the change trend of the real-time pressure data is detected not to match the first functional relationship, controlling the probe to stop moving.

[0011] In some embodiments, the probe control method further includes: Obtaining the first displacement data of the probe and the corresponding first pressure value; wherein, the first displacement data is used to characterize the position of the probe when it is stationary before moving, and the first pressure value is the real-time pressure data of the pressure sensor when the probe is stationary; In the case where it is detected that the tip of the probe touches the surface of the sample chip, obtaining the corresponding second pressure value and the second displacement data of the probe; Based on the first displacement data, the second displacement data, the first pressure value, and the second pressure value, fitting to obtain the second functional relationship.

[0012] In some embodiments, before continuously obtaining the real-time pressure data of the pressure sensor during the process of the probe penetrating from the surface of the target chip into the target chip, the probe control method further includes: During the process of the probe moving from the starting position to the target chip, obtaining the real-time pressure data of the pressure sensor at multiple sampling points; For any two adjacent sampling points, calculating the difference between the corresponding real-time pressure data; In the case where the difference between the real-time pressure data is greater than a specified threshold, determining that the tip of the probe touches the surface of the target chip.

[0013] In addition, to achieve the above-mentioned purpose, the present application also proposes a probe control device, which includes: a stage; an electric probe seat, which can be moved to approach or move away from the stage, and the swing arm of the electric probe seat is connected to the probe through a pressure sensor; and a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the computer program is configured to implement the steps of the probe control method described above.

[0014] In some embodiments, the electric probe seat further includes a wire fixing device, which is used to fix the test cable to the probe so that the probe remains relatively fixed to the test cable during movement.

[0015] In addition, to achieve the above objectives, the present application also proposes a storage medium, which is a computer-readable storage medium. A computer program is stored on the storage medium. When the computer program is executed by a processor, the steps of the probe control method described above are implemented.

[0016] One or more technical solutions proposed in this application have at least the following technical effects: By pre-fitting multiple groups of sample needle insertion depths and corresponding sample pressure data, a first functional relationship is obtained as a calibration value, so that in actual applications, the corresponding pressure target value can be determined by directly inputting the specified needle insertion depth into the first functional relationship. As a result, in the process of the probe penetrating from the surface of the target chip into the target chip, the user only needs to pay attention to whether the real-time pressure data reaches the calculated pressure target value. This ensures the accuracy of the needle insertion depth while taking into account convenience, thereby improving detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 A schematic diagram of a flow chart of a probe control method provided in an embodiment of the present application is shown; Figure 2 A schematic structural diagram of an electric probe base provided by an exemplary embodiment of the present application is shown; Figure 3A schematic diagram showing a first functional relationship provided by an exemplary embodiment of the present application; Figure 4 A schematic flowchart showing a probe control method provided by another embodiment of the present application; Figure 5 A schematic structural diagram showing a probe control device provided by an embodiment of the present application.

[0020] The implementation, functional features, and advantages of the present application will be further described in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Embodiments

[0021] It should be understood that the specific embodiments described herein are only used to explain the technical solutions of the present application and are not used to limit the present application.

[0022] To better understand the technical solutions of the present application, the following will be described in detail in conjunction with the drawings of the specification and specific embodiments.

[0023] The main solution of the embodiment of the present application is: during the process of the probe piercing into the target chip from the surface of the target chip, continuously obtain the real-time pressure data of the pressure sensor; wherein, the wafer testing device includes an electric probe head, and the swing arm of the electric probe head is connected with a probe through a pressure sensor; when the real-time pressure data reaches the pressure target value, control the probe to stop moving; wherein, the pressure target value is calculated according to the first functional relationship between the needle penetration depth and the pressure data; the first functional relationship is obtained by fitting multiple groups of sample needle penetration depths and corresponding sample pressure data.

[0024] In the related art, during the production of wafers or chips, it is necessary to perform needle piercing through probes for relevant inspections.

[0025] For chips or wafers of different specifications, due to external environmental interference or hardware precision limitations, it is difficult to accurately find the needle penetration depth of the electric probe head in the chip every time. Therefore, when performing needle piercing according to the displacement amount given by the displacement sensor, the needle penetration depth is difficult to meet the precision requirements, resulting in the need for manual setting of the contact point by the staff every time after switching chips or wafers.

[0026] Secondly, there may be certain dimensional errors for chips or wafers of the same specification in different batches. When the thickness of a certain batch of chips or wafers is thicker or thinner, when performing needle piercing according to the displacement amount given by the displacement sensor, the needle penetration depth is also difficult to meet the precision requirements.

[0027] In addition, in the related art, cameras with different magnifications are also used for focusing to detect the height change of the needle insertion point, so as to combine and obtain the height difference of the probe needle insertion. However, the algorithm adopted by this method is very complex, and requires a large number of sensor configurations, resulting in high costs. Moreover, errors caused by the accuracy of the sensors and the algorithm relied on during actual calibration may instead affect the calculation accuracy of the needle insertion height difference.

[0028] Therefore, how to ensure the accuracy of the probe insertion depth is an urgent problem to be solved currently.

[0029] Based on this, the present application provides a solution. By pre-fitting the first functional relationship between the needle insertion depth and the pressure data, the corresponding pressure data can be determined by directly inputting the specified needle insertion depth in actual applications. Through the high correlation between the needle insertion depth and the pressure data, users only need to pay attention to whether the pressure data reaches the calculated result, which not only ensures the convenience but also guarantees the accuracy of the needle insertion depth and improves the detection efficiency.

[0030] It should be noted that the execution subject of this embodiment can be a computing service device with data processing, network communication, and program running functions, such as a tablet computer, a personal computer, a mobile phone, etc., or a probe control device capable of implementing the above functions. Hereinafter, taking the probe control device as an example, this embodiment and the following embodiments will be described.

[0031] Refer to Figure 1 , Figure 1 shows a schematic flowchart of a probe control method provided by an embodiment of the present application. The probe control method can be applied to a probe control device, including the following steps S110 to S120: Step S110, during the process of the probe inserting from the surface of the target chip into the target chip, continuously obtain the real-time pressure data of the pressure sensor.

[0032] After the chip on the wafer is manufactured, it is often necessary to perform performance tests on it to determine whether the chip meets the design requirements. The probe is like a "detection tentacle", and through the probe, it can accurately contact the pads on the chip on the wafer (i.e., the metal area on the chip for electrical connection), so as to realize various detection items of the chip.

[0033] In this embodiment, the probe can be set on the electric probe base of the wafer testing device. The electric probe base can reciprocate in the Z-axis direction of the wafer testing device, so as to approach or move away from the target chip on the stage. As Figure 2 shown, the electric probe base has a swing arm a for controlling the movement of the probe, and a pressure sensor c is connected between the swing arm a and the probe b, so that the change of pressure can be recorded in real time during the movement of the probe.

[0034] The target chip refers to the chip that is currently being detected. It can be understood that during the process of the probe penetrating the target chip, the target chip will exert a certain resistance on the probe in the opposite direction, enabling the pressure sensor to collect corresponding real-time pressure data.

[0035] Step S120: When the real-time pressure data reaches the pressure target value, control the probe to stop moving.

[0036] In this embodiment, the pressure target value refers to the pressure value calculated by substituting the required needle penetration depth for detecting the target chip into the first functional relationship between the needle penetration depth and the pressure data. By comparing the real-time pressure data with the pressure target value, the purpose of detecting whether the tip of the detection probe accurately reaches the specified needle penetration depth can be achieved.

[0037] Among them, the first functional relationship is a function relationship obtained by fitting that can approximately reflect the correlation between the pressure value and the needle penetration depth.

[0038] Specifically, the first functional relationship can be calculated in advance through the following steps S210 to S230 before step S110 of this embodiment: Step S210: During the process of the probe penetrating the sample chip, obtain the displacement data of multiple swing arms and the corresponding sample pressure data for each displacement data.

[0039] Among them, the sample chip can be a chip of the same type (or batch) as the target chip. During the process of the probe penetrating the sample chip, the displacement data of multiple swing arms and the corresponding sample pressure data can be obtained at a certain interval (for example, taking 1um as a displacement interval). Among them, the displacement data can be represented by the displacement amount shown by the displacement encoder.

[0040] It can be understood that if the swing arm exerts a certain acceleration or deceleration on the probe during the process of the probe penetrating the sample chip, an additional force will inevitably be exerted on the probe, which will affect the pressure value obtained by the pressure sensor and cause distortion of the pressure value. Therefore, to ensure higher accuracy, in this embodiment, the probe can be controlled to penetrate the sample chip at a first preset speed uniformly, thereby reducing the influence of the externally applied interference force on the real-time pressure data obtained by the pressure sensor.

[0041] In addition, the detection of the sample chip generally has a corresponding depth range (for example, 10 - 80um). The maximum value of the depth range can be determined as the preset distance, and the probe is penetrated into the sample chip until it reaches the preset distance. It can be understood that compared with the needle penetration depth exceeding the preset distance (for example, 10 - 80um), the data collected in this way is more in line with the actual needle penetration stroke, and the curve (the first functional relationship) obtained by fitting is more accurate.

[0042] Step S220: For each displacement data, take the difference between the displacement data and the starting displacement data of needle insertion as the sample needle insertion depth.

[0043] Among them, the starting displacement data of needle insertion is the swing arm displacement data when the tip of the probe touches the surface of the sample chip. It can be understood that steps S210 to S230 involve the process after inserting into the chip, so the starting position is the position when the tip of the probe just touches the chip surface.

[0044] In this embodiment, for the swing arm, a preset coordinate system can be available. In the process of the probe gradually inserting in this embodiment, in the z-axis of this preset coordinate system, it can be understood as the change of the z coordinate value. The swing arm displacement data essentially reflects the coordinate value of the tip of the probe on the z-axis. Therefore, the difference between the real-time obtained displacement data and the swing arm displacement data is the depth of the probe insertion at the corresponding moment.

[0045] Step S230: According to multiple groups of sample needle insertion depths and the corresponding sample pressure data, fit to obtain the first functional relationship.

[0046] It can be understood that when the chip type (batch) is the same and the probe itself remains unchanged, the above-mentioned multiple groups of sample needle insertion depths and the corresponding sample pressure data can generally reflect the correlation between the pressure value and the insertion depth. In some embodiments, multiple groups of the above data can be added to the coordinate system to observe its variation law. As Figure 3 shown, set the abscissa as the sample needle insertion depth, with the unit of micrometer (μm), and the ordinate as the sample pressure data, with the unit of gram per mil (g / mil). Sample and take points at a specified sampling interval (i.e., the points in Figure 3 ), and observe the general trend of the sampling points (i.e., the curve in Figure 3 ). It can be found that as the needle insertion depth increases, the contact area between the probe and the material at the needle insertion point becomes larger, and the pressure value will increase.

[0047] Therefore, in this embodiment, polynomial fitting can be performed on the above-mentioned multiple groups of data. In some embodiments, a second-order polynomial can be selected for fitting, that is, Y = A1 + A2*X + A3*X². Fitting can also be performed using polynomials of other orders, which is not limited in this embodiment.

[0048] In the process of specifically performing fitting using a second-order polynomial, multiple groups of collected X and Y data can be substituted into the equation to establish a linear equation system about the coefficients A1, A2, and A3, and the best fitting coefficients can be obtained by solving this equation system.

[0049] After calibrating to obtain the best fitting coefficient, the first functional relationship mentioned above can be obtained, that is, Figure 3 The curve in .

[0050] In step S120, for the detection of the target chip, the staff can pre-specify the needle insertion depth, and then substitute the needle insertion depth as X into the above-mentioned first functional relationship to calculate the corresponding Y, that is, the pressure target value.

[0051] That is, when the pressure sensor detects that the real-time pressure data just reaches the pressure target value, it can be determined that the current actual acupuncture depth is the acupuncture depth pre-specified by the staff.

[0052] In addition, there may be some unexpected situations in the process of the probe penetrating the target chip, such as deviation in the penetration position, the presence of other external forces, etc. It is understandable that in the presence of other external forces, the correlation between the penetration depth and the pressure data may deviate greatly from the first functional relationship. Therefore, in some embodiments, in the process of the probe penetrating the target chip, when it is detected that the change trend of the real-time pressure data does not match the first functional relationship, the probe is controlled to stop moving.

[0053] The present embodiment provides a probe control method, which pre-fits a first functional relationship as a calibration value through multiple sets of sample needle insertion depths and corresponding sample pressure data, so that in actual applications, the corresponding pressure target value can be determined by directly inputting the specified needle insertion depth into the first functional relationship. As a result, in the process of the probe penetrating from the surface of the target chip into the target chip, the user only needs to pay attention to whether the real-time pressure data reaches the calculated pressure target value. This ensures the accuracy of the needle insertion depth while taking into account convenience, thereby improving detection efficiency.

[0054] Reference Figure 4 , Figure 4 The flowchart of the probe control method provided by another embodiment of the present application is shown. Before step S110, the probe control method may further include the following steps S310 to S320: Step S310 , controlling the probe to move from the starting position toward the target chip, and continuously acquiring real-time pressure data of the pressure sensor.

[0055] The starting position refers to the initial default position of the probe. There is a distance between the starting position of the probe and the surface of the target chip. Steps S310 to S320 involve the contents executed within this distance.

[0056] Similar to the above embodiments, in this embodiment, during the process of the probe moving uniformly from the starting position to the surface of the target chip, since a test cable is connected to the probe, and the test cable has a certain self-weight, and the test cable will also move along with the probe during the movement of the probe, different moving speeds will result in different pressure value changes.

[0057] Therefore, similar to the foregoing embodiments, multiple sets of sample data can be used for fitting the pressure value changes, so as to monitor the movement of the target chip this time.

[0058] In some embodiments, since the chip surface is not contacted in this stage, a linear polynomial can be directly selected for fitting. Obtain the first displacement data of the probe and the corresponding first pressure value; when it is detected that the tip of the probe touches the surface of the sample chip, obtain the corresponding second pressure value and the second displacement data of the probe; based on the first displacement data, the second displacement data, the first pressure value, and the second pressure value, fit to obtain the second functional relationship.

[0059] Among them, the first displacement data is used to represent the position of the probe when it is stationary before moving, for example, the Z-axis coordinate value can be 0. The first pressure value is the real-time pressure data of the pressure sensor when the probe is stationary.

[0060] In this embodiment, the real-time pressure data is also continuously obtained, for example, it can be sampled at regular intervals.

[0061] In some embodiments, during the process of the probe moving from the starting position to the target chip, obtain the real-time pressure data of the pressure sensor at multiple sampling points; for any two adjacent sampling points, calculate the corresponding difference in real-time pressure data; when the difference in real-time pressure data is greater than the specified threshold, determine that the tip of the probe touches the surface of the target chip.

[0062] Specifically, when the tip of the probe touches the chip surface, the pressure will change greatly. Therefore, if it is detected that the difference between the real-time pressure data corresponding to two adjacent sampling times (that is, the difference in real-time pressure data) is greater than the specified value, it can be determined that the latter of the two sampling times is the mutation point, that is, the chip surface is touched. The second pressure value and the second displacement data of the probe are the data corresponding to the mutation point.

[0063] Specifically, the first displacement data and the corresponding first pressure value can be determined as (S1, P1), and the second displacement data and the second pressure value can be determined as (S2, P2), then an expression about Y = KX + B can be directly established, and K and B can be solved to obtain the specific second functional relationship.

[0064] It can be understood that an image similar to the foregoing Figure 2 can be established in the coordinate system, that is, each abscissa value (displacement distance) can correspond to a specific ordinate value (pressure value).

[0065] For the probes with the same test cable, the second functional relationship can be used as the calibration value under normal circumstances, so as to detect whether the movement process before contacting the surface of the target chip meets the requirements.

[0066] Step S320, when it is detected that the change trend of the real-time pressure data does not match the corresponding value in the second functional relationship, control the probe to stop moving.

[0067] It can be understood that the real-time pressure data has corresponding sampling moments (displacement distances), and data comparison can be performed through the image established by the foregoing method: taking the abscissa as the displacement distance as an example, if the deviation between the real-time pressure data corresponding to the same displacement distance and the corresponding Y value in the second functional relationship is greater than the specified deviation threshold, it can be determined that there is other external force acting on the probe. At this time, the probe can be controlled to stop moving to detect the source of the external force and make corresponding adjustments.

[0068] Through the above steps S310 to S320, the process of the probe moving from the starting position to the surface of the target chip can be detected, and it can be pre-warned in advance whether there is external force interference before piercing into the target chip, avoiding detecting the action of the external force only after piercing into the chip and causing damage to the chip, reducing the cost and improving the detection efficiency.

[0069] For ease of understanding, an exemplary embodiment is provided here.

[0070] ① At the beginning of detecting chips of the same batch, first select one of the chips as the sample chip and place it in the detection area. Control the swing arm of the electric probe base to move uniformly towards the sample chip from the initial state (Z-axis coordinate is z1, pressure value is p1) at a speed of V1, and continuously collect the corresponding real-time pressure data at intervals of 0.5um through the pressure sensor during this process.

[0071] When it is detected that the real-time pressure data changes suddenly, it is determined that the tip of the probe touches the surface of the sample chip, and the corresponding Z-axis coordinate and the corresponding real-time pressure data (z2, p2) are obtained at this time.

[0072] Through (z1, p1) and (z2, p2), fit and determine the curve before contacting the sample chip: y = ax + b.

[0073] Adjust the speed of the swing arm to V2 so that the swing arm further moves downward at a constant speed. After the probe penetrates the sample chip, continue to collect real-time pressure data at the aforementioned intervals until the penetration depth of the probe reaches a preset threshold of 80 um.

[0074] Through multiple sets of data such as (z2, p2), …, (zn, pn), fit and determine the curve after penetrating the sample chip: y = ax 2 + bx + c.

[0075] ② When detecting any target chip in this batch, obtain the corresponding needle penetration depth (for example, α) of the target chip, substitute it as x into y = ax 2 + bx + c, and calculate the corresponding y value, that is, the target pressure value.

[0076] During the process of the swing arm of the electric probe holder approaching the sample chip at a constant speed V1 from the initial state, continuously collect the corresponding real-time pressure data at intervals of 0.5 um through the pressure sensor, and compare it with the corresponding value in the curve of y = ax + b. If the comparison result deviates too much, it means that there is an external force acting, and stop the subsequent detection.

[0077] When it is determined that the tip of the probe touches the surface of the target chip, adjust the speed of the swing arm to V2 so that the swing arm further moves downward at a constant speed. During this process, continuously collect the corresponding real-time pressure data at intervals of 0.5 um through the pressure sensor until the real-time pressure data reaches the target pressure value and then stop.

[0078] Similarly, during the process of penetrating the target chip, the real-time pressure data can be compared with the corresponding value in y = ax 2 + bx + c. If the comparison result deviates too much, it means that there is an external force acting, and stop the subsequent detection.

[0079] This application provides a probe control device, which includes: a stage; an electric probe holder that can move closer to or away from the stage, and the swing arm of the electric probe holder is connected with a probe through a pressure sensor; and at least one processor; and a memory communicatively connected to the at least one processor; wherein, the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor so that the at least one processor can execute the probe control method in the first embodiment above.

[0080] In some embodiments, such as Figure 2As shown, the electric probe base further includes a wire fixing device d, which is used to fixedly connect the test cable to the probe so that the probe remains relatively fixed to the test cable during movement. It can be understood that the probe remaining relatively fixed to the test cable during movement can prevent the test cable itself from exerting additional variable forces on the probe, and can minimize the influence of factors such as the self-weight of the test cable on needle insertion.

[0081] Refer to the following Figure 5 , which shows a schematic structural diagram of a probe control device suitable for implementing the embodiments of the present application. The probe control device in the embodiments of the present application may include, but is not limited to, mobile terminals such as mobile phones, laptop computers, digital broadcast receivers, PDAs (Personal Digital Assistants), PADs (Portable Application Descriptions: tablet computers), PMPs (Portable Media Players), vehicle terminals (such as vehicle navigation terminals), etc., and fixed terminals such as digital TVs, desktop computers, etc. Figure 5 The probe control device shown is merely an example and should not impose any limitations on the functions and usage scope of the embodiments of the present application.

[0082] As Figure 5As shown, the probe control device 100 may include a processing device 110 (such as a central processing unit, a graphics processing unit, etc.), which may perform various appropriate actions and processes according to a program stored in a read-only memory (ROM: Read Only Memory) 120 or a program loaded from a storage device 130 into a random access memory (RAM: Random Access Memory) 140. In the RAM 140, various programs and data required for the operation of the probe control device are also stored. The processing device 110, the ROM 120, and the RAM 140 are connected to each other through a bus 150. An input / output (I / O) interface 160 is also connected to the bus. Generally, the following systems may be connected to the I / O interface 160: an input device 170 including, for example, a touch screen, a touch pad, a keyboard, a mouse, an image sensor, a microphone, an accelerometer, a gyroscope, etc.; an output device 180 including, for example, a liquid crystal display (LCD: Liquid Crystal Display), a speaker, a vibrator, etc.; a storage device 130 including, for example, a magnetic tape, a hard disk, etc.; and a communication device 190. The communication device 190 may allow the probe control device to communicate with other devices wirelessly or wiredly to exchange data. Although the probe control device with various systems is shown in the figure, it should be understood that it is not required to implement or have all the shown systems. More or fewer systems may be implemented or had alternatively.

[0083] In particular, according to the embodiments disclosed in the present application, the processes described above with reference to the flowcharts may be implemented as computer software programs. For example, the embodiments disclosed in the present application include a computer program product, which includes a computer program carried on a computer-readable medium, and the computer program includes program codes for performing the methods shown in the flowcharts. In such an embodiment, the computer program may be downloaded and installed from a network through the communication device, or installed from the storage device 130, or installed from the ROM 120. When the computer program is executed by the processing device 110, the above-mentioned functions defined in the methods of the embodiments disclosed in the present application are executed.

[0084] The probe control device provided in the present application adopts the probe control method in the above-mentioned embodiment, and can solve the technical problem of how to ensure the accuracy of the probe penetration depth. Compared with the prior art, the beneficial effects of the probe control device provided in the present application are the same as those of the probe control method provided in the above-mentioned embodiment, and other technical features in the probe control device are the same as those disclosed in the method of the previous embodiment, and will not be elaborated here.

[0085] It should be understood that each part disclosed in this application can be implemented by hardware, software, firmware, or a combination thereof. In the description of the above embodiments, specific features, structures, materials, or characteristics can be combined in a suitable manner in any one or more embodiments or examples.

[0086] As described above, the above are only specific embodiments of this application, but the protection scope of this application is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed in this application, and all of them should be covered by the protection scope of this application. Therefore, the protection scope of this application should be subject to the protection scope of the claims.

[0087] This application provides a computer-readable storage medium having computer-readable program instructions (i.e., computer programs) stored thereon, and the computer-readable program instructions are used to execute the probe control method in the above embodiments.

[0088] The computer-readable storage medium provided by this application can be, for example, a USB flash drive, but is not limited to electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems or devices, or any combination of the above. More specific examples of the computer-readable storage medium may include, but are not limited to: electrical connections with one or more wires, portable computer disks, hard disks, random access memory (RAM: Random Access Memory), read-only memory (ROM: Read Only Memory), erasable programmable read-only memory (EPROM: Erasable Programmable Read Only Memory or flash memory), optical fibers, portable compact disk read-only memory (CD-ROM: CD-Read Only Memory), optical storage devices, magnetic storage devices, or any suitable combination of the above. In this embodiment, the computer-readable storage medium can be any tangible medium that contains or stores a program, and this program can be used by or combined with an instruction execution system or device. The program code contained on the computer-readable storage medium can be transmitted by any appropriate medium, including but not limited to: wires, optical cables, RF (RadioFrequency), etc., or any suitable combination of the above.

[0089] The above computer-readable storage medium can be included in the probe control device; or it can exist separately without being assembled into the probe control device.

[0090] The above computer-readable storage medium carries one or more programs which, when executed by a probe control device, enable the probe control device to write computer program code for performing the operations of the present application in one or more programming languages or combinations thereof. The programming languages include object-oriented programming languages such as Java, Smalltalk, C++, and also include conventional procedural programming languages such as the "C" language or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, executed as a stand-alone software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., through the Internet using an Internet service provider).

[0091] The flowcharts and block diagrams in the accompanying drawings illustrate the possible architectures, functions, and operations of systems, methods, and computer program products according to various embodiments of the present application. In this regard, each block in the flowchart or block diagram may represent a module, a program segment, or a portion of code that contains one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions denoted in the blocks may occur in a different order than that denoted in the accompanying drawings. For example, two consecutive blocks shown may actually be executed substantially in parallel, and they may sometimes be executed in the reverse order, depending on the functions involved. It should also be noted that each block in the block diagram and / or flowchart, and combinations of blocks in the block diagram and / or flowchart, may be implemented by a dedicated hardware-based system for performing the specified functions or operations, or may be implemented by a combination of dedicated hardware and computer instructions.

[0092] The modules described in the embodiments of the present application may be implemented in software or in hardware. In some cases, the name of the module does not constitute a limitation on the unit itself.

[0093] The readable storage medium provided by this application is a computer-readable storage medium. The computer-readable storage medium stores computer-readable program instructions (i.e., computer programs) for executing the above probe control method, which can solve the technical problem of how to ensure the accuracy of the probe penetration depth. Compared with the prior art, the beneficial effects of the computer-readable storage medium provided by this application are the same as those of the probe control method provided by the above embodiments, and will not be elaborated here.

[0094] The above are only some embodiments of this application, and thus do not limit the patent scope of this application. Any equivalent structural transformation made under the technical concept of this application by using the content of the specification and drawings of this application, or any direct / indirect application in other related technical fields, is included in the patent protection scope of this application.

Claims

1. A probe control method, characterized in that The probe control method includes: During the process of the probe piercing into the target chip from the surface of the target chip, continuously obtain the real-time pressure data of the pressure sensor; wherein, the wafer testing equipment includes an electric probe holder, and the swing arm of the electric probe holder is connected with the probe through the pressure sensor; When the real-time pressure data reaches the pressure target value, control the probe to stop moving; wherein, the pressure target value is calculated according to the first function relationship between the needle insertion depth and the pressure data; the first function relationship is obtained by fitting multiple groups of sample needle insertion depths and corresponding sample pressure data.

2. The probe control method according to claim 1, wherein Before continuously obtaining the real-time pressure data of the pressure sensor during the process of the probe piercing into the target chip from the surface of the target chip, the probe control method further includes: During the process of the probe piercing into the sample chip, obtain the displacement data of multiple swing arms and the sample pressure data corresponding to each displacement data; For each displacement data, use the difference between the displacement data and the initial needle insertion displacement data as the sample needle insertion depth; the initial needle insertion displacement data is the swing arm displacement data when the tip of the probe touches the surface of the sample chip; According to multiple groups of the sample needle insertion depths and corresponding sample pressure data, fit to obtain the first function relationship.

3. The probe control method according to claim 2, wherein The step of obtaining the displacement data of multiple swing arms and the sample pressure data corresponding to each displacement data during the process of the probe piercing into the sample chip includes: During the process of the probe piercing into the sample chip and moving a preset distance, obtain the displacement data of the swing arm multiple times, and obtain the sample pressure data corresponding to each displacement data.

4. The probe control method according to claim 2, wherein The step of obtaining the displacement data of multiple swing arms and the sample pressure data corresponding to each displacement data during the process of the probe piercing into the sample chip includes: During the process of the probe piercing into the sample chip and moving at a constant speed for a preset distance, obtain the displacement data of multiple swing arms and the sample pressure data corresponding to each displacement data.

5. The probe control method according to claim 3, characterized in that The probe control method further includes: Before the probe pierces into the target chip, continuously obtain the real-time pressure data of the pressure sensor; when it is detected that the change trend of the real-time pressure data does not match the corresponding value in the second function relationship, control the probe to stop moving; wherein, the second function relationship is used to characterize the relationship between the displacement data of the probe and the real-time pressure data before the probe pierces into the target chip; and / or During the process of the probe piercing into the target chip, when it is detected that the change trend of the real-time pressure data does not match the first function relationship, control the probe to stop moving.

6. The probe control method according to claim 5, wherein The probe control method further includes: Obtain the first displacement data of the probe and the corresponding first pressure value; wherein, the first displacement data is used to characterize the position of the probe when it is stationary before moving, and the first pressure value is the real-time pressure data of the pressure sensor when the probe is stationary. When it is detected that the tip of the probe touches the surface of the sample chip, obtain the corresponding second pressure value and the second displacement data of the probe; Based on the first displacement data, the second displacement data, the first pressure value, and the second pressure value, fit to obtain the second functional relationship.

7. The probe control method according to any one of claims 1 to 6, characterized in that, Before continuously obtaining the real-time pressure data of the pressure sensor during the process of the probe piercing into the target chip from the surface of the target chip, the probe control method further includes: During the process of the probe moving from the starting position to the target chip, obtain the real-time pressure data of the pressure sensor at multiple sampling points; For any two adjacent sampling points, calculate the corresponding difference in real-time pressure data; When the difference in real-time pressure data is greater than a specified threshold, determine that the tip of the probe touches the surface of the target chip.

8. A probe control device, characterized in that, The probe control device includes: A stage; An electric probe holder, the electric probe holder is movable to approach or away from the stage, and the swing arm of the electric probe holder is connected with a probe through a pressure sensor; and A memory, a processor, and a computer program stored on the memory and executable on the processor, the computer program is configured to implement the steps of the probe control method according to any one of claims 1 to 7.

9. The probe control device according to claim 8, wherein, The electric probe holder further includes a wire fixing device, and the wire fixing device is used to fixedly connect the test cable to the probe, so that the probe and the test cable remain relatively fixed during the movement process.

10. A storage medium, characterized in that, The storage medium is a computer-readable storage medium, and a computer program is stored on the storage medium, and when the computer program is executed by a processor, it implements the steps of the probe control method according to any one of claims 1 to 7.

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