Test equipment, probe detection method and positioning method

Abstract

The invention discloses test equipment, a probe detection method and a positioning method. The test equipment comprises a carrying table; the probe card comprises a bearing part and a probe, one end, far away from the bearing part, of the probe is provided with a probe tip, the probe tip is used for being electrically contacted with an object to be detected in a needle inserting state, and the bearing part and the carrying platform can have a target relative position relation in the needle inserting state; the signal transmitting device is used for transmitting a first detection signal to the probe, the first detection signal is transmitted in the direction parallel to the surface of the carrying table, and the first detection signal is configured to be projected to a target part of the tip of the probe under the target relative position relation; and the signal receiving device is used for receiving a second detection signal formed by continuously transmitting the first detection signal after the first detection signal passes through the position of the probe, and obtaining a detection result according to the second detection signal. By arranging the signal receiving and transmitting device in the test equipment, the levelness deviation condition of the probe card can be found in time, and the detection accuracy of the probe card is improved.

Description

Technical Field

[0001] Embodiments of the present invention relate to the field of semiconductor manufacturing, and particularly to a test device, a probe detection method, and a positioning method. Background Art

[0002] Before a wafer is cut into packaged chips, it is necessary to perform electrical performance tests on the chips in the wafer to screen out defective chips so as to discard the defective chips before subsequent packaging processes. Therefore, the electrical performance test is crucial, which can confirm the performance of the chips to screen the chips, thereby reducing the packaging cost.

[0003] The test device for performing electrical performance tests includes a probe card. When performing a test, the probes on the probe card are in contact with the contact pads on the object under test, realizing electrical contact with the object under test, so as to transmit the electrical signals sent by the tester to the object under test and transmit the feedback signals of the object under test in response to the electrical signals to the tester, so as to determine whether there are defects in the object under test based on the feedback signals of the probe card. For example, if the object under test is a wafer, the probes are directly in contact with the contact pads of the bare chips (i.e., unpackaged chips) on the wafer, and electrical signals are transmitted through the probes to test the electrical performance of the chips.

[0004] Therefore, whether good electrical contact can be achieved between the probes and the object under test directly affects the accuracy of the test results of the electrical performance test. Summary of the Invention

[0005] The problem solved by the embodiments of the present invention is to provide a test device, a probe detection method, and a positioning method for timely detecting the level deviation of the probe card and improving the detection accuracy of the level deviation of the probe card through the test results.

[0006] To solve the above problems, an embodiment of the present invention provides a test device, including: a stage for carrying a device under test; a probe card including a carrying part and probes provided on the carrying part, wherein the probes have probe tips at one end far from the carrying part, and the probe tips are used for making electrical contact with the device under test in the needle-poking state, and in the needle-poking state, a target relative position relationship can exist between the carrying part and the stage; a signal transceiver including a signal transmitting device and a signal receiving device; the signal transmitting device is used for transmitting a first detection signal to the probes, the first detection signal is transmitted along a direction parallel to the surface of the stage, and the first detection signal is configured such that: in the target relative position relationship, the first detection signal is projected onto a target part of the probe tip; the signal receiving device is used for receiving a second detection signal formed by the continued transmission of the first detection signal after passing through the position where the probes are located, and obtaining a detection result according to the second detection signal, and the detection result is used to characterize the actual relative position relationship between the carrying part and the stage.

[0007] An embodiment of the present invention further provides a probe detection method based on the test device according to any embodiment of the present invention, including: performing a detection process on the probes at a position to be measured using the signal transceiver, and the position to be measured is the same as the position of the probes in the needle-poking state; the detection process includes: causing the signal transmitting device to transmit a first detection signal to the probes, the first detection signal is transmitted along a direction parallel to the surface of the stage; causing the signal receiving device to receive a second detection signal formed by the continued transmission of the first detection signal after passing through the position where the probes are located, and obtaining a detection result according to the second detection signal, and the detection result is used to characterize the actual relative position relationship between the carrying part and the stage.

[0008] An embodiment of the present invention further provides a positioning method for a signal transceiver device, which is applied to the test equipment described in any embodiment of the present invention. The positioning method includes: pre-correcting the relative position relationship between the bearing part and the stage to make the bearing part and the stage have a target relative position relationship; after the pre-correction, performing a positioning process on the signal transceiver device, and the positioning process includes: performing a first positioning on the signal transmitting device by using a first detection signal emitted by the signal transmitting device, and the first positioning includes: adjusting the position of the signal transmitting device relative to the stage and the probe until the first detection signal is transmitted along a direction parallel to the surface of the stage and projected onto a target part of the probe tip; after completing the first positioning, performing a second positioning on the signal receiving device by using the first detection signal, and the second positioning includes: adjusting the position of the signal receiving device relative to the signal transmitting device until all the second detection signals formed after the first detection signal passes through the position where the probe is located are received by the signal receiving device, and obtaining a detection result for characterizing the actual relative position relationship between the bearing part and the stage.

[0009] Compared with the prior art, the technical solution of the embodiment of the present invention has the following advantages:

[0010] An embodiment of the present invention provides a test equipment, which includes a stage, a probe card and a signal transceiver device. The probe tip is used for making electrical contact with the object under test on the stage in the needle insertion state. The signal transceiver device includes a signal transmitting device and a signal receiving device. The signal transmitting device is used for transmitting a first detection signal to the probe along a direction parallel to the surface of the stage. The signal receiving device is used for receiving the second detection signal formed after the first detection signal passes through the position where the probe is located and obtaining a detection result according to the second detection signal. The detection result is used for characterizing the actual relative position relationship between the bearing part and the stage. Wherein, in the needle insertion state, the bearing part and the stage can have a target relative position relationship, and the first detection signal is configured to: in the target relative position relationship, the first detection signal is projected onto a target part of the probe tip. Therefore, when the actual relative position relationship between the bearing part and the stage deviates, it will cause the actual projection position of the first detection signal on the probe to deviate from the target part, correspondingly causing a change in the shielding degree of the first detection signal by the probe, thereby causing a change in the second detection signal, and further causing a change in the detection result. In summary, by setting a signal transceiver device in the test equipment, the horizontal deviation of the probe card can be detected in time, and the detection accuracy of the horizontal deviation of the probe card can be improved through the test result.

[0011] Correspondingly, an embodiment of the present invention further provides a probe detection method based on a test device. The test device includes a stage, a probe card, and a signal transceiver. The probe tip is used for electrical contact with the object to be measured in the needle-inserted state. The signal transceiver includes a signal transmitting device and a signal receiving device. The detection method includes: using the signal transceiver to perform detection processing on the probe at the position to be measured, where the position to be measured is the same as the position of the probe in the needle-inserted state; the detection processing includes: causing the signal transmitting device to transmit a first detection signal to the probe along a direction parallel to the surface of the stage, causing the signal receiving device to receive a second detection signal formed by the first detection signal continuing to transmit after passing through the position where the probe is located, and obtaining a detection result according to the second detection signal. The detection result is used to characterize the actual relative position relationship between the bearing part and the stage; wherein, in the needle-inserted state, there can be a target relative position relationship between the bearing part and the stage, and the first detection signal is configured such that: in the target relative position relationship, the first detection signal is projected onto the target part of the probe tip. Therefore, when the actual relative position relationship between the bearing part and the stage deviates, it will cause the actual projection position of the first detection signal on the probe to deviate from the target part, correspondingly causing the shielding degree of the first detection signal by the probe to change, thereby causing the second detection signal to change, and further causing the detection result to change. In summary, by detecting the probe through the signal transceiver, the horizontal deviation of the probe card can be detected in a timely manner, and the detection accuracy of the horizontal deviation of the probe card can be improved through the test result.

[0012] Correspondingly, an embodiment of the present invention further provides a positioning method of a signal transceiver in a test device. The test device includes a stage and a probe card. The stage is used to carry the object to be measured. The probe card includes a bearing part and probes provided on the bearing part. The probes have probe tips at one end far from the bearing part. The probe tips are used for electrical contact with the object to be measured in the needle-inserted state. In the positioning method, after making the bearing part and the stage have a target relative position relationship through pre-calibration, the signal transmitting device is first positioned using the first detection signal emitted by the signal transmitting device, so that the first detection signal is transmitted along a direction parallel to the surface of the stage and projected onto the target part of the probe tip. After completing the first positioning, the signal receiving device is second-positioned using the first detection signal, so that the second detection signal formed by the first detection signal continuing to transmit after passing through the position where the probe is located is received by the signal receiving device; through the above positioning method, the first detection signal is configured such that: in the target relative position relationship, the first detection signal is projected onto the target part of the probe tip, and the relative positions of the signal transmitting device and the signal receiving device are accurate, which is beneficial to improving the detection accuracy of the horizontal deviation of the probe card by the test device integrated with the signal transmitting tube device and the signal receiving device. Description of the Drawings

[0013] Figure 1 It is a schematic diagram of a stage and a probe card in the test device according to the first embodiment of the present invention;

[0014] Figure 2 It is a schematic diagram of the relative positional relationship among a signal transmitter, a probe card, and a signal receiver in the test device according to the first embodiment of the present invention;

[0015] Figure 3 It is a schematic diagram of the relative positional relationship between a probe and a corresponding signal transceiver device in the test device according to the first embodiment of the present invention;

[0016] Figure 4 It is a cross-sectional view of the probe card along the arrangement direction of the probes in the test device according to the first embodiment of the present invention;

[0017] Figure 5 It is a partial enlarged view of the signal transmitter and the slit assembly in the test device according to the first embodiment of the present invention;

[0018] Figure 6 It is a schematic diagram of the relative positional relationship among a signal transmitter, a probe card, and a signal receiver in the test device according to the second embodiment of the present invention;

[0019] Figure 7 It is a schematic diagram of the relative positional relationship between a probe and a signal transceiver device in the test device according to the second embodiment of the present invention;

[0020] Figure 8 It is a schematic flowchart of a probe detection method according to an embodiment of the present invention;

[0021] Figure 9 It is a schematic flowchart of a positioning method for a signal transceiver device according to an embodiment of the present invention;

[0022] Figure 10 It is Figure 9 a schematic diagram of an embodiment of pre-calibration corresponding to step S110 in

[0023] Figure 11 It is Figure 9 a flowchart of an embodiment of step S120 in Detailed implementation manners

[0024] As can be seen from the background, whether good electrical contact can be achieved between the probe and the object to be tested directly affects the accuracy of the test results of the electrical performance test. However, as the usage time of the probe card increases, the flatness of the probe card may change, resulting in poor electrical contact between the probe and the object to be tested, thereby affecting the test results of the electrical performance test.

[0025] When performing electrical performance tests, the probe card is installed on the probe card holder. Currently, after loading the probe card on the probe card holder, the levelness of the probe card is not detected again. Moreover, if it is necessary to detect the levelness of the probe card, the testing machine often needs to be shut down. Therefore, it is currently difficult to timely detect the deviation of the levelness of the probe card before performing electrical performance tests on the object to be tested. How to timely and accurately detect the deviation of the levelness of the probe card has become a technical problem that urgently needs to be solved.

[0026] To solve the above technical problems, an embodiment of the present invention provides a testing device, including: a stage for carrying the object to be tested; a probe card including a carrying part and probes provided on the carrying part, the probes having probe tips at one end far from the carrying part, the probe tips being used for making electrical contact with the object to be tested in the needle insertion state, and in the needle insertion state, a target relative position relationship can exist between the carrying part and the stage; a signal transceiver including a signal transmitting device and a signal receiving device; the signal transmitting device is used for transmitting a first detection signal to the probes, the first detection signal is transmitted along a direction parallel to the surface of the stage, and the first detection signal is configured to: in the target relative position relationship, the first detection signal is projected onto the target part of the probe tip; the signal receiving device is used for receiving a second detection signal formed by the first detection signal continuing to be transmitted after passing through the position where the probes are located, and obtaining a detection result according to the second detection signal, and the detection result is used to characterize the actual relative position relationship between the carrying part and the stage.

[0027] In the embodiment of the present invention, when the actual relative position relationship between the carrying part and the stage deviates, it will cause the actual projection position of the first detection signal on the probes to deviate from the target part, correspondingly causing the shielding degree of the first detection signal by the probes to change, thereby causing the second detection signal to change, and further causing the detection result to change. In summary, by setting a signal transceiver in the testing device, the deviation of the levelness of the probe card can be timely detected, and the detection accuracy of the deviation of the levelness of the probe card can be improved through the test result.

[0028] In order to make the above objects, features, and advantages of the embodiments of the present invention more obvious and understandable, the following detailed description of the specific embodiments of the present invention will be given with reference to the accompanying drawings.

[0029] Refer to Figures 1 to 5 , Figure 1 which is a schematic diagram of the stage and the probe card in the testing device according to the first embodiment of the present invention, Figure 2 which is a schematic diagram of the relative position relationship between the signal transmitter, the probe card, and the signal receiver in the testing device according to the first embodiment of the present invention, Figure 3 which is a schematic diagram of the relative position relationship between one probe and the corresponding signal transceiver in the testing device according to the first embodiment of the present invention, Figure 4It is a cross-sectional view of the probe card along the arrangement direction of the probes in the test device according to the first embodiment of the present invention. Figure 5 It is a partially enlarged view of the signal emitter and the slit assembly in the test device according to the first embodiment of the present invention. It should be noted that Figure 4 In it, a dotted line is used to distinguish the probe tip 145 from the rest of the probe 140.

[0030] In the embodiment of the present invention, the test device includes: a stage 100 for carrying a device under test 110; a probe card 120 including a carrier portion 130 and probes 140 disposed on the carrier portion 130, and the probes 140 have probe tips 145 at one end away from the carrier portion 130 (as Figure 3 shown), and the probe tips 145 are used for electrical contact with the device under test 110 in the needle-inserting state, and in the needle-inserting state, a target relative position relationship can exist between the carrier portion 130 and the stage 100; a signal transceiver 200 (as Figure 2 shown), including a signal emitter 210 (as Figure 2 shown) and a signal receiver 220 (as Figure 2 shown); the signal emitter 210 is used to emit a first detection signal 240 to the probes 140, the first detection signal 240 is transmitted along a direction parallel to the surface of the stage 100, and the first detection signal 240 is configured to: in the target relative position relationship, the first detection signal 240 is projected onto a target portion (not labeled) of the probe tip 145; the signal receiver 220 is used to receive a second detection signal 250 formed by the first detection signal 240 continuing to be transmitted after passing through the position where the probes 140 are located, and obtain a detection result according to the second detection signal 250, and the detection result is used to characterize the actual relative position relationship between the carrier portion 130 and the stage 100.

[0031] The stage 100 is used to carry the device under test 110, thereby providing a test platform for the electrical performance test of the device under test 110.

[0032] The device under test 110 includes contact pads, and the contact pads are used for direct contact with the probe tips 145, so as to realize the electrical contact between the device under test 110 and the probes 140. Specifically, the device under test 110 may include one or more devices under test (DUTs), and the devices under test include contact pads.

[0033] As an example, the device under test 110 is a wafer, the wafer includes a plurality of chips, the chips are used as devices under test, and each chip includes a contact pad. In other embodiments, the device under test 110 may also be other products to be subjected to electrical performance tests.

[0034] The probe 140 serves as an interface between the device under test and the tester, and is used to transmit electrical signals to the device under test and output the feedback signals generated by the device under test in response to the input electrical signals to the tester for detection and analysis, so as to determine whether there are defects in the device under test. As an example, the probes 140 are arranged in one-to-one correspondence with the contact pads in the device under test for performing specific test items. The probes 140 are in contact with the corresponding contact pads to achieve electrical connection with the device under test.

[0035] In this embodiment, the probe card 120 further includes a carrier portion 130. As an example, the carrier portion 130 is used to fix the probes 140 to improve the stability of the probes 140, and the carrier portion 130 can also serve as an intermediate carrier for realizing the electrical connection between the probe card 120 and the external circuit.

[0036] Specifically, the probes 140 of the probe card 120 are independent of each other. The carrier portion 130 has a circuit, and the circuit is electrically connected to each probe 140 respectively. The top surface (not marked) of the carrier portion 130 facing away from the probes 140 is provided with contacts. After the probe card 120 is loaded onto the probe card holder 150, the contacts of the carrier portion 130 are in contact with the probe card holder 150, so as to realize signal transmission and further realize the test function.

[0037] One end of the probe 140 away from the carrier portion 130 has a probe tip 145. The probe tip 145 is used for electrical contact with the object to be tested 110 in the needle insertion state, so as to transmit electrical signals to the device under test through the probe 140 and output the feedback signals generated by the device under test in response to the input electrical signals to the tester. It can be understood that the needle insertion state is a working state of the probe card 120.

[0038] In the needle insertion state, a target relative position relationship can exist between the carrier portion 130 and the stage 100. In the target relative position relationship, the levelness of the probe card 120 is regarded as meeting the requirements.

[0039] It should be noted that the diameter of the probe tip 145 gradually becomes smaller in the direction away from the carrier portion 130. By configuring the first detection signal 240 to: in the target relative position relationship, the first detection signal 240 is projected onto the probe tip 145, it is easy to make the degree of occlusion of the probe pair 140 to the first detection signal change when the actual relative position relationship between the carrier portion 130 and the stage 100 deviates.

[0040] In this embodiment, the probe card 120 includes a plurality of probes 140, and the plurality of probes 140 are arranged in sequence along the second direction Y (as Figure 2 shown), and the second direction Y is parallel to the surface of the stage 100.

[0041] As Figure 2 andFigure 4 As an example, the number of probes 140 is four, namely the first probe 141, the second probe 142, the third probe 143, and the fourth probe 144. In one embodiment, the four probes 140 of the probe card 120 are used for resistance detection, so that the test device can measure the sheet resistance by the four-probe method. In other embodiments, according to actual needs, the number of probes included in the probe card may also be other values.

[0042] As an example, the probe 140 is a vertical probe. In the needle insertion state, the probe 140 extends in the direction towards the stage 100. In other embodiments, the probe 140 may also be of other types.

[0043] In this embodiment, the test device further includes: a probe card holder 150 for loading the probe card 120. The probe card holder 150 is used to fix the probe card 120 and can also be used to drive the movement of the probe card 120 during the electrical test, so that the probe 140 is in electrical contact with the object under test 110 in the needle insertion state. In some preferred embodiments, after the probe card holder 150 fixes the probe card 120, the stage 100 drives the object under test 110 to move, so that the probe 140 is in electrical contact with the object under test 110 in the needle insertion state. As Figure 2 and Figure 3 shown, the signal transmitting device 210 is used to transmit a first detection signal 240 along a direction parallel to the surface of the stage 100 to the probe 140. The signal receiving device 220 is used to receive a second detection signal 250 formed by the continued transmission of the first detection signal 240 after passing through the position where the probe 140 is located, and obtain a detection result according to the second detection signal 250. The detection result is used to characterize the actual relative position relationship between the bearing portion 130 and the stage 100. Therefore, the signal transmitting device 210 is used to detect the levelness of the probe card 120.

[0044] It should be noted that in the needle insertion state, a target relative position relationship can exist between the carrier part 130 and the stage 100, and the first detection signal 240 is configured such that in the target relative position relationship, the first detection signal 240 is projected onto the target part of the probe tip 145. Therefore, when the level of the probe card 120 is offset, or when the actual relative position relationship between the carrier part 130 and the stage 100 is offset, this will cause the actual projection position of the first detection signal 240 on the probe 140 to be offset from the target part, correspondingly causing a change in the degree of occlusion of the first detection signal 240 by the probe 140, thereby causing a change in the second detection signal 250 and further causing a change in the detection result. For this reason, in this embodiment, by providing a signal transceiver device 200 in the test equipment, the level offset of the probe card 120 can be detected in a timely manner, and the detection accuracy of the level offset of the probe card 120 can be improved based on the test result.

[0045] It should also be noted that in the needle insertion state, the probe 140 extends in the direction towards the stage 100, and the first detection signal 240 is transmitted in a direction parallel to the surface of the stage 100, which is conducive to detecting changes in the detection result caused by the level offset of the probe card 120.

[0046] In addition, the signal receiving device 220 is used to receive the second detection signal 250 formed after the first detection signal 240 continues to be transmitted after passing through the position where the probe 140 is located. When the level of the probe card 120 is offset, the degree of occlusion of the first detection signal 240 by the probe 140 changes. Therefore, the detection result obtained based on the second detection signal 250 can be used to characterize the actual relative position relationship between the carrier part 130 and the stage 100.

[0047] As Figure 2 and Figure 3 shown, in this embodiment, the signal transmitting device 210 and the signal receiving device 220 are respectively located on both sides of the probe 140 in the first direction X. The signal transmitting device 210 is used to transmit the first detection signal 240 along the first direction X, and the signal receiving device 220 is used to receive the second detection signal 250 along the first direction X. The first direction X is parallel to the surface of the stage 100, which is conducive to shortening the length of the signal transmission path, thereby reducing the probability of energy loss of the detection signal on the transmission path. Correspondingly, this is conducive to ensuring the signal strength when the first detection signal 240 reaches the position where the probe 140 is located, and is conducive to ensuring the signal strength when the second detection signal 250 reaches the signal receiving device 220, and further conducive to improving the accuracy of the test result.

[0048] In other embodiments, according to actual needs, other relative position relationships may also be satisfied among the signal transmitting device, the signal receiving device, and the probe. For example, the signal transmitting device may also be located at other positions, and through the first signal guiding element, the transmission path of the first detection signal emitted by the signal transmitting device is changed, so that the first detection signal is finally projected onto the probe. For example, taking the first detection signal as an optical signal, the transmission path of the first detection signal can be changed by a reflecting element or other first signal guiding elements.

[0049] Similarly, in other embodiments, the signal receiving device may also be located at other positions, and through the second signal guiding element, the transmission path of the second detection signal is changed, so that the second detection signal is finally projected onto the signal receiving device.

[0050] In this embodiment, a plurality of probes 140 are arranged in sequence along the second direction Y (as Figure 2 shown), so the second direction Y is parallel to the surface of the stage 100 and perpendicular to the first direction X.

[0051] As Figure 2 and Figure 3 shown, in this embodiment, the signal transmitting device 210 includes a signal transmitter 211 for transmitting the first detection signal 240, and the signal receiving device 220 includes a signal receiver 221 for receiving the second detection signal 250.

[0052] As Figure 2 shown, in this embodiment, the number of probes 140 is multiple, the number of signal transmitters 211 is adapted to the number of probes 140, and they are respectively located at the emission positions (not marked) corresponding to the probes 140 one by one; the number of signal receivers 221 is adapted to the number of probes 140, and they are respectively located at the reception positions (not marked) corresponding to the probes 140 one by one.

[0053] In other words, the signal transceiver devices 200 and the probes 140 are in one-to-one correspondence. On the one hand, it is convenient to simultaneously test each probe card 120 through multiple signal transceiver devices 200, which is beneficial to improving the test efficiency; on the other hand, the signal transmitters 211 and the signal receivers 221 can be fixedly installed, which is beneficial to ensuring the accuracy of the relative position between the signal transmitter 211 and the probe 140, and ensuring the accuracy of the relative position between the signal receiver 221 and the signal transmitter 211, thereby being beneficial to improving the accuracy of the test results.

[0054] As Figure 2As shown, in this embodiment, when the number of signal transmitters 211 is adapted to the probes 140, the arrangement direction of the multiple signal transmitters 211 is parallel to the second direction Y, which is beneficial to improving the consistency of the distances between the respective probes 140 and the corresponding signal transmitters 211, thereby reducing the influence of the distance difference between the probes 140 and the corresponding signal transmitters 211 on the detection result. In other embodiments, the arrangement direction of the multiple signal transmitters may also form an angle with the second direction.

[0055] As Figure 2 shown, in this embodiment, when the number of signal receivers 221 is adapted to the probes 140, the arrangement direction of the multiple signal receivers 221 is parallel to the second direction Y, which is beneficial to improving the consistency of the distances between the respective probes 140 and the corresponding signal receivers 221, thereby reducing the influence of the distance difference between the probes 140 and the corresponding signal receivers 221 on the detection result. In other embodiments, the arrangement direction of the multiple signal receivers may also form an angle with the second direction.

[0056] In other embodiments, the number of signal transmitters is one and it is a movable signal transmitter, and the movable signal transmitter is used to sequentially emit the first detection signal at the emission positions corresponding to the respective probes. The number of signal receivers is one and it is a movable signal receiver, and the movable signal receiver is used to sequentially receive the second detection signal at the reception positions corresponding to the respective probes; or, the number of signal transmitters is adapted to the probes, and the number of signal receivers is one and it is a movable signal receiver; or, the number of signal transmitters is one and it is a movable signal transmitter, and the number of signal receivers is adapted to the probes.

[0057] In this embodiment, the first detection signal 240 is projected towards the probe 140 along the first direction X, and the first detection signal 240 has a preset width (not marked) in the second direction Y.

[0058] Specifically, the preset width (not marked) of the first detection signal 240 in the second direction Y is greater than the diameter D of the target part (not marked) of the probe 140 (as Figure 4 shown), the first direction X is parallel to the surface of the stage 100, and the second direction Y is parallel to the surface of the stage 100 and perpendicular to the first direction X.

[0059] By making the preset width of the first detection signal 240 in the second direction Y greater than the diameter D of the target part of the probe 140, it is easy to change the degree of occlusion of the first detection signal 240 by the probe 140 when the level of the probe card 120 is shifted, thereby improving the reliability of the detection result.

[0060] As an example, when the width (not labeled) of the first detection signal 240 in the second direction Y is greater than the diameter D of the target part (not labeled) of the probe 140, the difference between the preset width of the first detection signal 240 in the second direction Y and the diameter D of the target part is greater than or equal to 0.1 mm. This is beneficial for making the projection area of the first detection signal 240 on the probe 140 larger when the level deviation degree of the probe card 120 is within the normal fluctuation range, thereby helping to reduce the noise during the level detection process and lower the alarm frequency.

[0061] It should be noted that the difference between the preset width of the first detection signal 240 in the second direction Y and the diameter D of the target part can be set according to the actual situation, as long as it is ensured that when the level deviation degree of the probe card 120 reaches the alarm level, the first detection signal 240 can still be projected onto the probe 140. For example, by setting the difference between the width of the first detection signal 240 in the second direction Y and the diameter D of the target part, when the level deviation degree of the probe card 120 reaches the alarm level, the first detection signal 240 can still be projected onto the probe 140 and the projection area at least covers the radius area of the target part.

[0062] In other embodiments, the width of the first detection signal in the second direction can also meet other conditions, as long as it is ensured that during the level detection process, the first detection signal can be projected onto the probe tip.

[0063] In this embodiment, the type of the signal transceiver device 200 includes a directional signal transceiver device. A directional signal refers to a signal that propagates along a specific direction (for example, a directional signal usually propagates in a straight line).

[0064] By using a directional signal transceiver device, the first detection signal 240 emitted by the signal transmitter 210 can propagate along a specific direction, and the possibility of the first detection signal 240 spreading around is relatively low, thereby improving the signal transmission efficiency. Moreover, it is beneficial to reduce the energy loss of the first detection signal 240 and the second detection signal 250 during the transmission process, thereby reducing the interference of signal spreading on the level detection of the probe card 120.

[0065] As an example, the directional signal transceiver device includes a visible light transceiver device. The optical signal of visible light can propagate in a straight line, so it is easy to obtain a directional signal transceiver device. Moreover, when installing the signal transceiver device 200 into the test equipment, it is convenient to position the signal transceiver device 200 through the light spot of visible light, thereby improving the positioning accuracy of the signal transceiver device 200 and reducing the positioning difficulty of the signal transceiver device 200. Correspondingly, the signal transmitter 211 is an optical signal transmitter, and the signal receiver 221 is a photodetector.

[0066] In a specific embodiment, the visible light transceiver device includes a laser transceiver device. The laser has strong energy, which is conducive to ensuring the signal strength when the first detection signal 240 reaches the position where the probe 140 is located, and is also conducive to ensuring the signal strength when the second detection signal 250 reaches the signal receiving device 220. Moreover, the laser has low diffusivity, which is conducive to reducing the interference of signal diffusion on the flatness detection of the probe card 120, and thus is conducive to improving the accuracy of the test results. Correspondingly, the signal transmitter 211 is a laser transmitter.

[0067] In other embodiments, the visible light transceiver device may further include other signal emission devices for emitting light signals that can be blocked by the probe, and signal receiving devices adapted to the signal emission devices.

[0068] In this embodiment, the test device may further include a controller (not shown in the figure), which is coupled to the signal transceiver device 200 and is used to control the turning on and off of the signal emission device 210, and to control the turning on and off of the signal receiving device 220. As an example, the controller 600 may be a Programmable Logic Controller (PLC).

[0069] In this embodiment, the first detection signal 240 (as Figure 2 shown) is projected towards the probe 140 along the first direction X. The signal emission device 210 of the visible light transceiver device is used to emit a planar light 245 with a preset width (as Figure 5 shown) as the first detection signal. The direction of the preset width of the planar light 245 is the second direction Y.

[0070] The planar light 245 represents light whose path shape is flat, and its light spot is a rectangle with a small thickness. The height of the planar light 245 along the normal direction of the surface of the stage 100 is small, and can even be ignored. By using the planar light 245, it is easy to improve the sensitivity of the change amount of the second detection signal 250 received by the signal receiving device 220 to the offset degree of the probe tip 145, which is conducive to improving the accuracy of the detection result of the flatness offset of the probe card 120, and thus is conducive to timely detecting the flatness abnormality of the probe card 120.

[0071] With reference to Figure 3 and Figure 5 , in this embodiment, the signal emission device 210 includes a slit assembly 208. The slit 209 of the slit assembly 208 serves as the light exit of the signal emission device 210. The signal emission device 210 emits a planar light 245 with a preset width through the slit 209 of the slit assembly 208.

[0072] Through the slit 209 of the slit assembly 208, the shape of the first detection signal 240 is made into the shape of a planar light source. By adjusting the length and width of the slit 209 of the slit assembly 208, the width of the detection light emitted by the signal emission device 210 along the second direction Y and the height along the normal direction of the surface of the stage 100 are controlled, so as to obtain light of a specific shape and size. Therefore, through the slit assembly 208, the complexity of preparing the signal emission device 210 capable of emitting planar light 245 is reduced.

[0073] Specifically, the signal emission device 210 includes a signal emitter 211 and a slit assembly 208. The light beam emitted by the signal emitter 211 passes through the slit 209 of the slit assembly 208, so as to obtain planar light 245 with a preset width.

[0074] In one embodiment, in the signal emission device 210, the signal emitter 211 is used to emit initial light. The initial light is projected towards the slit 209 of the slit assembly 208, and the initial light after passing through the slit 209 is used as the first detection signal. The slit 209 has a preset width, and the radial dimension of the initial light is greater than or equal to the opening dimension of the slit 209.

[0075] By making the radial dimension of the initial light greater than or equal to the opening dimension of the slit 209, the size and shape of the emitted planar light 245 are effectively controlled by using the slit 209 of the slit assembly 208.

[0076] In other embodiments, in the signal emission device, the signal emitter is used to emit initial light (not labeled) with a preset width. The initial light is projected towards the slit of the slit assembly, and the initial light after passing through the slit is used as the first detection signal.

[0077] The signal emitter is used to emit initial light with a preset width. Therefore, through the slit of the slit assembly, the height of the planar light along the normal direction of the surface of the stage is controlled. Among them, by making the signal emitter emit initial light with a preset width, the requirement for the dimension of the slit in the second direction is reduced, thereby improving the processing flexibility of the slit and reducing the processing difficulty of the slit.

[0078] It should be noted that, in one embodiment, the initial light emitted by the signal emitter is circular light.

[0079] As an example, the slit assembly 208 is fixed on the emission end base 212 and faces the signal emitter 211. For example, the slit assembly 208 can be a baffle with a slit fixed in front of the signal emitter 211. The first detection signal 240 can pass through the slit on the baffle to form planar light 245, and the first detection signal 240 cannot pass through the baffle itself.

[0080] In some other embodiments, the signal transmitting device may also obtain planar light through other optical elements (e.g., cylindrical lenses).

[0081] In still some other embodiments, the signal transmitting device of the visible light transceiver device may also be used to emit circular light as the first detection signal. Correspondingly, the preset width of the first detection signal in the second direction is the radial dimension of the circular light (i.e., the diameter of the circular light).

[0082] It should be noted that in this embodiment, the signal transmitting device including a slit is taken as an example for illustration. In other embodiments, the signal receiving device may also include a signal receiver and a slit assembly. The slit of the slit assembly serves as the light incident port of the signal receiving device, and the signal receiver is used to receive the second detection signal passing through the slit.

[0083] The slit of the signal receiving device determines the amount of light signal received by the signal receiver. Therefore, by providing a slit assembly in the signal receiving device, it is beneficial to improve the sensitivity of the change amount of the second detection signal received by the signal receiver to the offset degree of the probe tip, thereby facilitating improving the accuracy of the detection result of the level offset of the probe card; moreover, providing a slit assembly in the signal receiving device is also beneficial to reducing the requirement for the shape of the light emitted by the signal transmitting device. Correspondingly, the signal transmitting device may not include a slit assembly either.

[0084] It can be understood that the solution where the signal transmitting device includes a slit assembly or the signal receiving device includes a slit assembly is only taken as an example. As long as it can be ensured that the light received by the signal receiver is planar light and the change amount of the second detection signal received by the signal receiver can reflect the shielding degree of the probe tip to the first detection signal.

[0085] In other embodiments, the directional signal transceiver device may also include other signal transmitting devices for emitting detection signals that propagate in a specific direction and can be blocked by the probe, and signal receiving devices adapted to the signal transmitting devices. For example, the signal transmitting device may be a directional sound wave transmitting device, and correspondingly, the signal receiving device may be a sound wave receiving device.

[0086] As Figure 2 shown, in this embodiment, the number of probes 140 is multiple, and the multiple probes 140 are arranged in sequence along the second direction Y, and the signal transmitting device 210 is used to emit the first detection signal 240 to a single probe 140. Therefore, the preset width (not marked) of the first detection signal 240 in the second direction Y is less than half of the spacing d between adjacent probes 140 (as Figure 4 shown).

[0087] By making the preset width of the first detection signal 240 in the second direction Y less than half of the spacing d between adjacent probes 140, it is beneficial to reduce the interference of the first detection signal 240 corresponding to any probe 140 on other probes 140, thereby improving the accuracy of the detection results of each probe 140.

[0088] Here, the spacing d between adjacent probes 140 refers to the distance of the remaining part of the probe 140 above the probe tip 145.

[0089] It should be noted that along the direction away from the carrier 130, the diameter of the probe tip 145 gradually decreases, the spacing between adjacent probe tips 145 gradually increases, and the spacing between adjacent probe tips 145 is greater than the spacing d between adjacent probes 140. Therefore, by selecting the spacing d between adjacent probes 140 as the reference standard, it is beneficial to significantly reduce the possibility of overlap of the first detection signals 240 corresponding to adjacent probes 140.

[0090] As Figure 3 shown, in this embodiment, the signal transmitting device 210 includes a transmitting end base 212 and a signal transmitter 211 disposed on the transmitting end base 212. Through the transmitting end base 212, it is convenient to install the signal transmitting device 210 in the test equipment, and it is also beneficial to improve the stability of the signal transmitter 211.

[0091] As an example, the transmitting end base 212 has a fixing groove and a fixing block (not labeled) disposed in the fixing groove, and the signal transmitter 211 is disposed on the fixing block, so as to control the position of the signal transmitter 211 on the transmitting end base 212 through the fixing block.

[0092] In other embodiments, the signal transmitting device may also not include a transmitting end base.

[0093] In this embodiment, the signal receiving device 220 includes a receiving end base 222 and a signal receiver 221 disposed on the receiving end base 222. Through the receiving end base 222, it is convenient to install the signal receiving device 220 in the test equipment, and it is also beneficial to improve the stability of the signal receiver 221.

[0094] As an example, the receiving end base 222 has a fixing groove and a fixing block (not labeled) disposed in the fixing groove, and the signal receiver 221 is disposed on the fixing block, so as to control the position of the signal receiver 221 on the receiving end base 222 through the fixing block.

[0095] In other embodiments, the signal receiving device may also not include a receiving end base.

[0096] As Figure 2 and Figure 3As shown, in this embodiment, the signal receiving device 220 further includes an encoder 230 coupled to the signal receiver 221, and the encoder 230 is configured to convert the second detection signal 250 received by the signal receiver 221 into a test result.

[0097] Specifically, the encoder 230 corresponds to the signal receiver 221 one by one, so as to accurately obtain the second detection signal 250 of the corresponding signal receiver 221.

[0098] It should be noted that, as an illustration, Figure 3 only the encoder 230 corresponding to one signal receiver 221 is schematically shown. It can be understood that when the number of signal receivers 221 is four, the number of encoders 230 is also four.

[0099] It should also be noted that in other embodiments, according to the functional integration degree of the signal receiver, the signal receiving device may not include an independent encoder; or, according to the processing performance of the encoder, multiple signal receivers may also share the same encoder.

[0100] In this embodiment, the detection result is a signal strength value, and the test device further includes: a processor 260 (as Figure 2 shown), coupled to the signal receiving device 220, and the processor 260 is configured to compare the signal strength value with a preset specification range and give a warning when the signal strength value exceeds the preset specification range, so as to be able to timely detect the problem that the level deviation of the probe card 120 exceeds the acceptable degree.

[0101] Specifically, the processor 260 is coupled to the encoder 230. As an example, the processor 260 can be a Central Processing Unit (CPU), or the processor 260 can be integrated in a programmable logic controller.

[0102] It should be noted that the test device further includes: a chamber (not shown in the figure), so as to easily control the test environment (such as temperature, humidity or cleanliness, etc.), isolate external interference, and easily meet the requirements of specific test conditions (such as vacuum degree or gas atmosphere, etc.).

[0103] In this embodiment, the stage 100 is located in the chamber.

[0104] In this embodiment, both the signal transmitting device 210 and the signal receiving device 220 are disposed on the inner wall of the chamber, so as to reduce the installation complexity of the signal transceiver device 200. Specifically, the transmitting end base 212 and the receiving end base 222 are both disposed on the inner wall of the chamber.

[0105] With reference to Figure 6 and Figure 7 ,Figure 6 It is a schematic diagram of the relative positional relationship among a signal transmitter, a probe card, and a signal receiver in the test device according to the second embodiment of the present invention. Figure 7 It is a schematic diagram of the relative positional relationship between a probe and a signal transceiver device in the test device according to the second embodiment of the present invention.

[0106] The similarities between this embodiment and the foregoing embodiments will not be elaborated herein. The differences between this embodiment and the foregoing embodiments are as follows: The number of signal transmitters 411 is one and it is a movable signal transmitter, and the number of signal receivers 421 is one and it is a movable signal receiver.

[0107] Specifically, the movable signal transmitter is used to sequentially transmit a first detection signal 440 (as shown in Figure 7 ) at the transmission positions 402 corresponding to each probe 340 (as shown in Figure 6 ), and the movable signal receiver is used to sequentially receive a second detection signal 450 (as shown in Figure 7 ) at the reception positions 404 corresponding to each probe 340 (as shown in Figure 6 ). For example, if the number of probes 340 is four, then the number of both the transmission positions 402 and the reception positions 404 is four.

[0108] By adopting a movable signal transmitter, it is beneficial to reduce the cost of the signal transmitter 411. Moreover, it is easy to enable the movable signal transmitter to meet the requirements of different spacings between adjacent probes and different numbers of probes, improving the versatility of the signal transmitting device 410, and it is beneficial to avoid detection errors caused by different signal transmitters.

[0109] Similarly, by adopting a movable signal receiver, it is beneficial to reduce the cost of the signal receiver 421. Moreover, it is easy to enable the movable signal receiver to meet the requirements of different spacings between adjacent probes and different numbers of probes, improving the versatility of the signal receiving device 420, and it is beneficial to avoid detection errors caused by different signal receivers.

[0110] Correspondingly, by making the signal transceiver device 400 include a movable signal transmitter and a movable signal receiver, the versatility of the signal transceiver device 400 is improved.

[0111] In this embodiment, the signal transmitting device 410 and the signal receiving device 420 are respectively located on both sides of the probe 340 in the first direction X. The signal transmitting device 410 is used to transmit the first detection signal 440 along the first direction X, and the signal receiving device 420 is used to receive the second detection signal 450 along the first direction X. The first direction X is parallel to the surface of the stage 100.

[0112] In this embodiment, the preset traveling direction (not marked) of the movable signal transmitter is parallel to the second direction Y, which is beneficial to improving the distance consistency between the signal transmitter 411 and the corresponding probe 340 at each transmitting position 402, thereby reducing the influence of the distance difference between the signal transmitter 411 and the probe 340 on the detection result.

[0113] In this embodiment, the preset traveling direction (not marked) of the movable signal receiver is parallel to the second direction Y, which is beneficial to improving the distance consistency between the signal receiver 421 and the corresponding probe 340 at each receiving position 404, thereby reducing the influence of the distance difference between the signal transmitter 411 and the probe 340 on the detection result.

[0114] In other embodiments, the preset traveling direction of the movable signal transmitter may also form an angle with the second direction, or the preset traveling direction of the movable signal receiver may also form an angle with the second direction.

[0115] Therefore, combining the second embodiment and the first embodiment, the signal transceiver device can satisfy at least one of the following situations: when the number of signal transmitters matches the number of probes, the arrangement direction of multiple signal transmitters is parallel to the second direction; when the number of signal receivers matches the number of probes, the arrangement direction of multiple signal receivers is parallel to the second direction; when the number of signal transmitters is one, the preset traveling direction of the movable signal transmitter is parallel to the second direction; when the number of signal receivers is one, the preset traveling direction of the movable signal receiver is parallel to the second direction.

[0116] As Figure 7 shown, in this embodiment, the signal transmitting device 410 includes a transmitting end base 412 and a signal transmitter 411 disposed on the transmitting end base 412, and the signal receiving device 420 includes a receiving end base 422 and a signal receiver 421 disposed on the receiving end base 422.

[0117] As Figure 6 shown, as an example, when the number of signal transmitters 411 is one, the transmitting end base 412 has a chute 415 and a slider 413 slidably disposed in the chute 415, and the signal transmitter 411 is disposed on the slider 413 of the transmitting end base 412. The slider 413 of the transmitting end base 412 is used to drive the signal transmitter 411 to move along the chute 415.

[0118] By moving the signal transmitter 411 along the chute 415, the movement path of the signal transmitter 411 can be configured through the chute 415, which is beneficial to improving the smoothness of the signal transmitter 411 during movement.

[0119] AsFigure 7 As shown, as an example, when the number of signal receivers 421 is one, the receiving end base 422 has a chute 425 and a slider 423 slidably disposed in the chute 425. The signal receiver 421 is disposed on the slider 423 of the receiving end base 422, and the slider 423 of the receiving end base 422 is used to drive the signal receiver 421 to move along the chute 425.

[0120] By moving the signal receiver 421 along the chute 425, the movement path of the signal receiver 421 can be configured by the chute 425, which is beneficial to improving the stability of the signal receiver 421 during movement.

[0121] In this embodiment, when the number of both the signal transmitter 411 and the signal receiver 421 is one (that is, when the signal transmitter 411 is a movable signal transmitter and the signal receiver 421 is a movable signal receiver), the slider 413 of the transmitting end base 412 and the slider 423 of the receiving end base 422 are configured to move synchronously in the same direction. Thus, after the first detection signal 440 is emitted by the signal transmitter 411, the second detection signal 450 corresponding to the first detection signal 440 can be timely received by the signal receiver 421, which is beneficial to improving the detection efficiency.

[0122] In other embodiments, the movement modes of the signal transmitter and the signal receiver can be configured in other ways, as long as after the signal transmitter emits the first detection signal at any emission position, the signal receiver can move to the receiving position corresponding to the emission position and receive the second detection signal.

[0123] In this embodiment, when the number of either the signal transmitter 411 or the signal receiver 421 is one, the test device further includes: a linear module 500 (as Figure 7 shown), which is used to drive the slider to move in the chute; a controller 600 (as Figure 7 shown), which is coupled to the linear module 500 and the signal transceiver device 400 (as Figure 6 shown).

[0124] The linear module 500 corresponding to the movable signal transmitter is used to drive the slider 413 in the transmitting end base 412 to move in the chute 415, and the linear module 500 corresponding to the movable signal receiver is used to drive the slider 423 in the receiving end base 422 to move in the chute 425. Through the linear module 500 and the controller 600, it is beneficial to perform detection in an automated control manner.

[0125] Moreover, through the linear module 500, it is beneficial to precisely control the linear movement of the slider 413 or the slider 423, and improve the detection reliability of the probe 340.

[0126] In addition, by means of automatic control, it is also beneficial to enable the movable signal transmitter to accurately move to each transmission position 402, and to enable the movable signal receiver to accurately move to each reception position 404.

[0127] In this embodiment, when the number of signal transmitters 411 is one, the controller 600 is configured to control the linear module 500 corresponding to the signal transmitter 411 to drive the slider 423 in the transmitting end base 412 to sequentially move to each transmission position 402, and is further configured to control the linear module 500 corresponding to the signal transmitter 411 to stop driving and control the signal transmitter 411 to emit the first detection signal 440 when the slider 423 of the transmitting end base 412 reaches each transmission position 402.

[0128] As an example, the controller 600 is further configured to control the signal transmitter 411 to be turned off when controlling the linear module 500 corresponding to the signal transmitter 411 to drive, so as to help avoid waste of energy, extend the service life of the signal transmitter 411, and reduce the impact on the environment or other components in the chamber.

[0129] In other embodiments, according to actual needs, when the controller controls the linear module corresponding to the signal transmitter to drive, it may also control the signal transmitter to be always in the on state.

[0130] In this embodiment, when the number of signal receivers 421 is one, the controller 600 is configured to control the linear module 500 corresponding to the signal receiver 421 to drive the slider 423 in the receiving end base 422 to sequentially move to each reception position 404, and is further configured to control the linear module 500 corresponding to the signal receiver 421 to stop driving and control the signal receiver 421 to receive the second detection signal 450 when the slider 423 of the receiving end base 422 reaches each reception position 404.

[0131] As an example, the controller 600 is further configured to control the signal receiver 421 to be turned off when controlling the linear module 500 corresponding to the signal receiver 421 to drive, so as to help avoid waste of energy, extend the service life of the signal receiver 421, and reduce the impact on the environment or other components in the chamber.

[0132] In other embodiments, according to actual needs, when the controller controls the linear module corresponding to the signal receiver to drive, it may also control the signal receiver to be always in the on state.

[0133] In this embodiment, the linear module 500 includes: a motor 510 and a transmission component (not labeled). The motor 510 drives the transmission component to move, thereby driving the slider 413 or the slider 423 to move through the transmission component, and further driving the signal transmitter 411 to move through the slider 413, or driving the signal receiver 421 to move through the slider 423.

[0134] Correspondingly, by controlling the power of the motor, the motor 510 is stopped when it reaches the preset movement duration or the preset rotation angle, so as to control the signal transmitter 411 to stop when it reaches the preset position (for example, the emission position 402), or control the signal receiver 421 to stop when it reaches the preset position (for example, the reception position 404).

[0135] Specifically, the movable signal transmitter also has a starting position (Home Position) 401 (as Figure 7 shown). In each detection, through the linear module 500 corresponding to the movable signal transmitter, the movable signal transmitter is driven to move from the starting position 401 to each emission position 402 in sequence, so as to detect each probe 340 in sequence. Therefore, there may be a mapping relationship between the preset movement duration or the preset rotation angle of the motor 510 corresponding to the movable signal transmitter and each emission position 402. After completing the detection of all the probes 340, the linear module 500 corresponding to the movable signal transmitter is used to control the movable signal transmitter to return to the starting position 401.

[0136] As an example, the transmission component includes a gear component, thereby driving the movement of the signal transmitter 411 in a gear transmission manner. With reference to Figure 7 taken as an example, a linear module 500 will be described in detail with the movable signal transmitter as an example.

[0137] Taking the slider 413 in the transmitting end base 412 as a cylinder as an example, the transmission assembly includes a passive gear 540, a rack 530, and an active gear 520. One end of the slider 413 is fixed on the passive gear 540. Among them, the passive gear 540 is rotatably arranged in the chute 415 of the transmitting end base 412, and the passive gear 540 is exposed from the transmitting end base 412 through the bottom of the chute 415; the rack 530, one end of the rack 530 meshes with the part of the passive gear 540 exposed from the transmitting end base 412; the active gear 520, is fixed on the motor shaft (not labeled) of the motor 510, and the active gear 520 meshes with the other end of the rack 530. The active gear 520 is used to receive the power input of the motor 510 and drive the rack 530 to perform a linear motion. Therefore, the rotation of the motor shaft drives the active gear 520 to rotate, the active gear 520 drives the rack 530 to move linearly, and the rack 530 drives the passive gear 540 to rotate, thereby driving the slider 413 to perform a linear movement along the chute 415 in a rotational manner.

[0138] In this embodiment, the movable signal receiver may also have a starting position 403 (as Figure 7 shown), so that in each detection, through the linear module 500 corresponding to the movable signal receiver, the movable signal receiver is driven to move from the starting position 403 to each receiving position 404 in sequence, so as to detect each probe 340 in sequence. Therefore, a specific movement duration or a specific rotation angle of the motor 510 corresponding to the movable signal receiver may have a mapping relationship with each receiving position 404. After completing the detection of all the probes 340, the movable signal receiver is controlled to return to the starting position 403 through the linear module 500 corresponding to the movable signal receiver.

[0139] It should be noted that the slider 423 in the receiving end base 422 may also be cylindrical, and the linear module 500 of the movable signal receiver may be the same as the linear module 500 of the movable signal transmitter, which will not be elaborated here.

[0140] It should also be noted that Figure 7 the linear module 500 shown is only an example. In other embodiments, the linear module may also adopt a driving method in which a motor is combined with other types of transmission components to achieve the linear motion of the movable signal transmitter or the movable signal receiver. For example, the transmission assembly may further include a telescopic rod, a cylinder, a hydraulic cylinder, or a lead screw, etc.

[0141] As an example, the controller 600 may be a programmable logic controller.

[0142] It can be understood that since the signal transmitter 411 can move along the chute 415, each emission position 402 of the signal emission device 410 can be adjusted according to actual needs. For example, each emission position 402 of the signal emission device 410 can be adjusted according to the distance between the probes 340.

[0143] Similarly, since the signal receiver 421 can move along the chute 425, each reception position 404 of the signal reception device 420 can be adjusted according to actual needs. For example, each reception position 404 of the signal reception device 420 can be adjusted according to the distance between the probes 340.

[0144] It should be noted that the detection result is a signal strength value, and the test device further includes a processor 460 (as Figure 6 shown), coupled to the signal reception device 420. The processor 460 is used to compare the signal strength value with a preset specification range and give a warning when the signal strength value exceeds the preset specification range. For the description of the processor 460, reference can be made to the content of the first embodiment, which will not be elaborated here.

[0145] As Figure 7 shown, in this embodiment, the signal emission device 410 further includes a slit assembly 408. The slit 409 of the slit assembly 408 serves as the light exit port of the signal emission device 410, and the signal emission device 410 emits a plane light with a preset width through the slit 409 of the slit assembly 408.

[0146] As Figure 7 shown, in one embodiment, in the signal emission device 410, the signal transmitter 411 is used to emit an initial light, the initial light is projected towards the slit 409 of the slit assembly 408, and the initial light after passing through the slit 409 serves as the first detection signal 440. The slit 409 has a preset width, and the radial dimension of the initial light is greater than or equal to the opening dimension of the slit 209.

[0147] Correspondingly, the slit assembly 408 includes a plurality of slits 409 with a preset width, and the plurality of slits 409 correspond to each emission position 402 one by one, so that the signal emission device 410 can emit a plane light with a preset width as the first detection signal at each emission position 402.

[0148] In some other embodiments, in the signal emission device, the signal transmitter is used to emit an initial light with a preset width (not labeled), the initial light is projected towards the slit of the slit assembly, and the initial light after passing through the slit serves as the first detection signal.

[0149] Correspondingly, in the case where the signal transmitter is used to emit an initial light with a preset width, the slits at each emission position can extend and be connected into one body along the connection direction of each probe.

[0150] It should be noted that when the slits at each emission position can extend along the connection direction of each probe and be integrated into one body, the position where the signal emission device emits plane light is controlled by a braking device (for example, a linear module and a controller).

[0151] It should also be noted that when the slider 413 rotates, the slider 413 drives the signal emitter 411 to rotate. Since the initial light emitted by the signal emitter 411 is circular light, the width of the initial light emitted by the signal emitter 411 can be fixed.

[0152] As an example, the slit assembly 408 is fixed on the emission end base 412 and faces the signal emitter 411.

[0153] In addition, in this embodiment, the signal emission device is described by taking the example that it includes a slit. In other embodiments, the signal reception device may also include a signal receiver and a slit assembly. The slit of the slit assembly serves as the light incident port of the signal reception device, and the signal receiver is used to receive the second detection signal passing through the slit.

[0154] Correspondingly, the slits at each reception position extend along the connection direction of each probe and are integrated into one body; or, the slit assembly includes a plurality of slits, and the plurality of slits correspond to each reception position one by one.

[0155] It should be noted that the light emitted by the signal emission device has a preset width along the second direction, and the width of the second detection signal along the second direction is controllable. Therefore, even if the slits at each reception position extend along the connection direction of each probe and are integrated into one body, the accuracy of the detection result of the level offset of the probe card can still be ensured.

[0156] Correspondingly, the embodiment of the present invention further provides a probe detection method for a test device based on any one of the foregoing embodiments. Refer to Figure 8 , Figure 8 is a schematic flowchart of the probe detection method according to an embodiment of the present invention.

[0157] The following will describe the probe detection method of this embodiment in conjunction with the signal transceiver device 200 shown in the first embodiment (as Figures 2 to 3 shown).

[0158] With reference to Figures 1 to 3 and Figure 8 , step S10 is executed to perform a detection process on the probe 140 at the position to be measured by using the signal transceiver device 200, and the position to be measured is the same as the position of the probe 140 when it is in the needle insertion state.

[0159] Through detection processing, the detection result of the probe 140 is obtained. Moreover, by performing detection processing on the probe 140 at the position to be measured, it is possible to determine whether the probe 140 in the needle insertion state will be skewed.

[0160] In this embodiment, the detection processing includes: performing step S11 to cause the signal transmitting device 210 to transmit a first detection signal 240 to the probe 140, and the first detection signal 240 is transmitted in a direction parallel to the surface of the stage 100; performing step S12 to cause the signal receiving device 220 to receive a second detection signal 250 formed by the continued transmission of the first detection signal 240 after passing through the position where the probe 140 is located, and obtaining a detection result according to the second detection signal 250, and the detection result is used to characterize the actual relative position relationship between the carrying portion 130 and the stage 100.

[0161] By transmitting the first detection signal 240, the signal receiving device 220 is enabled to receive the second detection signal 250 formed by the continued transmission of the first detection signal 240 after passing through the position where the probe 140 is located.

[0162] Among them, in the needle insertion state, a target relative position relationship can exist between the carrying portion 130 and the stage 100, and the first detection signal 240 is configured such that: in the target relative position relationship, the first detection signal 240 is projected onto a target part (not marked) of the probe tip 145. Therefore, when the actual relative position relationship between the carrying portion 130 and the stage 100 deviates, it will cause the actual projection position of the first detection signal 240 on the probe 140 to deviate from the target part, correspondingly causing a change in the degree of occlusion of the first detection signal 240 by the probe 140, thereby causing a change in the second detection signal 250, and further causing a change in the detection result. In summary, by detecting the probe 140 through the signal transceiver device 200, the level deviation of the probe card 120 can be detected in a timely manner, and the detection accuracy of the level deviation of the probe card 120 can be improved through the test result.

[0163] Specifically, the signal transmitting device 210 includes a signal transmitter 211 for transmitting the first detection signal 240, and the signal receiving device 220 includes a signal receiver 221 for receiving the second detection signal 250.

[0164] In this embodiment, in the detection processing, the signal transmitting device 210 is caused to move from the probe 140 in the first direction X (such as Figure 2 or Figure 3On one side of the (as shown), a first detection signal 240 is emitted along the first direction X, and the signal receiving device 220 receives a second detection signal 250 from the other side of the probe 140 along the first direction X. The first direction X is parallel to the surface of the stage 100, which is conducive to shortening the length of the signal transmission path, thereby reducing the probability of energy loss of the detection signal on the transmission path, ensuring the signal strength when the first detection signal 240 reaches the position where the probe 140 is located, and ensuring the signal strength when the second detection signal 250 reaches the signal receiving device 220, and further improving the accuracy of the test results.

[0165] In other embodiments, the signal transmitting device may also emit the first detection signal from other positions, or the signal receiving device may also receive the second detection signal at other positions.

[0166] In this embodiment, the number of probes 140 is multiple, and the multiple probes 140 are arranged in sequence along the second direction Y (as Figure 2 shown), and the second direction Y is parallel to the surface of the stage 100 and perpendicular to the first direction X.

[0167] Correspondingly, the manner of making the signal transmitting device 210 emit the first detection signal 240 includes: making multiple signal transmitters 211 corresponding to the probes 140 one by one emit the first detection signal 240 at the emission positions (not marked) corresponding to the probes 140 respectively; the manner of making the signal receiving device 220 receive the second detection signal 240 includes: making multiple signal receivers 221 corresponding to the probes 140 one by one receive the second detection signal 250 at the reception positions (not marked) corresponding to the probes 140 respectively.

[0168] By adopting the above signal emission manner and signal reception manner, on the one hand, it is convenient to test each probe card 120 simultaneously through multiple signal transceiver devices 200, which is conducive to improving the test efficiency; on the other hand, it is conducive to ensuring the accuracy of the relative position between the signal transmitter 211 and the probe 140, and ensuring the accuracy of the relative position between the signal receiver 221 and the signal transmitter 211, thereby improving the accuracy of the test results.

[0169] In other embodiments, the manner of making the signal transmitting device emit the first detection signal includes: making a movable signal transmitter emit the first detection signal at the emission positions corresponding to each probe in sequence; or the manner of making the signal receiving device receive the second detection signal includes: making a movable signal receiver receive the second detection signal at the reception positions corresponding to each probe in sequence.

[0170] It should be noted that, according to actual needs, the method of making the signal transmitting device transmit the first detection signal and the method of making the signal receiving device receive the second detection signal can be cross - combined.

[0171] In this embodiment, the detection result is a signal intensity value. For example, taking the signal transceiver as a visible light transceiver as an example, then the detection result is a light intensity value.

[0172] In this embodiment, the signal intensity value has a preset specification range, so as to judge whether the degree of horizontal deviation of the probe card 120 exceeds the acceptable degree according to the preset specification range.

[0173] Therefore, as Figure 8 shown, the probe detection method further includes: performing step S20, and the detection method further includes: comparing the signal intensity value obtained by the detection process with the preset specification range, and giving a warning when the signal intensity value exceeds the preset specification range.

[0174] By performing step S20, it is beneficial to timely detect the abnormal horizontal degree of the probe card 120.

[0175] As an example, the way to obtain the preset specification range may include: making the probe card 120 in a state of the maximum acceptable deviation degree; using the signal transceiver 200 to detect the probe 140 in the state of the maximum acceptable deviation degree to obtain the signal intensity value corresponding to the maximum acceptable deviation degree; obtaining the preset specification range based on the signal intensity value corresponding to the maximum acceptable deviation degree, and the signal intensity value corresponding to the maximum acceptable deviation degree is the boundary value of the preset specification range.

[0176] As an example, with the help of a test fixture, the probe card holder 150 can be made in a state of the maximum acceptable deviation degree. Correspondingly, after loading the probe card 130 on the probe card holder 150, the probe card 120 is made in a state of the maximum acceptable deviation degree.

[0177] Specifically, load a test fixture on the probe card holder 150, and the end of the test fixture far from the probe card holder 150 is a plane; by adjusting the relative position relationship between the end of the test fixture far from the probe card holder 150 and the object to be measured 110 on the stage 100, the probe card holder 150 is made in a state of the maximum acceptable deviation degree.

[0178] In other embodiments, the preset specification range can also be obtained by other means. For example, the boundary value of the preset specification range can be an empirical value.

[0179] As Figure 8 shown, the probe detection method can also include: performing step S30, and when the signal intensity value obtained by the detection process exceeds the preset specification range, re - performing the detection process.

[0180] By re - executing the probing process, it is beneficial to improve the credibility of the test results.

[0181] In this embodiment, the signal strength value has a target strength value, which is the signal strength value under the target relative position relationship. The carrier part 130 has opposite first ends 130a (as Figure 1 shown) and second ends 130b (as Figure 1 shown) along the connection direction of each probe 140. Therefore, as Figure 7 shown, the probe detection method may further include: performing step S40 to judge the actual relative position between the carrier part 130 and the stage 100 according to the difference between the signal strength values corresponding to each probe and the target strength value. By performing step S40, the offset direction of the levelness of the probe card 120 can be known, so as to correct the levelness of the probe card 120 pertinently.

[0182] Specifically, the judgment operation includes: if the difference between the signal strength values corresponding to each probe 140 and the target strength value satisfies being monotonically decreasing in the direction from the first end 130a to the second end 130b, it is determined that the carrier part 130 is tilted in the second direction Y, and the vertical distance from the second end 130b to the stage 100 is less than the vertical distance from the first end 130a to the stage 100; if the difference between the signal strength values corresponding to each probe 140 and the target strength value satisfies being monotonically increasing in the direction from the first end 130a to the second end 130b, it is determined that the carrier part 130 is tilted in the second direction Y, and the vertical distance from the second end 130b to the stage 100 is greater than the vertical distance from the first end 130a to the stage 100; if the signal strength values corresponding to each probe 140 and the target strength value are not completely equal, and the difference between the signal strength value and the target strength value does not satisfy being monotonically increasing or monotonically decreasing in the direction from the first end 130a to the second end 130b, it is determined that the carrier part 130 is tilted in the first direction X.

[0183] When the carrying part 130 is tilted in the second direction Y, and the vertical distance from the second end 130b to the stage 100 is less than the vertical distance from the first end 130a to the stage 100, in the direction from the first end 130a to the second end 130b, the vertical distance from the carrying part 130 to the stage 100 decreases monotonically. Correspondingly, the probe 140 closest to the second end 130b has the greatest degree of occlusion of the first detection signal 240, the signal intensity value corresponding to the probe 140 closest to the second end 130b is the smallest, the probe 140 closest to the first end 130a has the smallest degree of occlusion of the first detection signal 240, and the signal intensity value corresponding to the probe 140 closest to the first end 130a is the largest. Therefore, after the detection process is completed, the difference between the signal intensity value corresponding to each probe 140 and the target intensity value satisfies a monotonic decrease in the direction from the first end 130a to the second end 130b.

[0184] For example, according to the vertical distance from the carrying part 130 to the stage 100, the signal intensity value of each probe 140 is less than the target intensity value, and the difference between the signal intensity value corresponding to each probe 140 and the target intensity value satisfies a monotonic decrease in the direction from the first end 130a to the second end 130b; or, the signal intensity value of each probe 140 is greater than the target intensity value, and the difference between the signal intensity value corresponding to each probe 140 and the target intensity value satisfies a monotonic decrease in the direction from the first end 130a to the second end 130b, or, the signal intensity value of some probes 140 is less than the target intensity value, and the signal intensity value of some probes 140 is greater than the target intensity value, and the difference between the signal intensity value corresponding to each probe 140 and the target intensity value satisfies a monotonic decrease in the direction from the first end 130a to the second end 130b.

[0185] Similarly, when the carrying part 130 is tilted in the second direction Y, and the vertical distance from the second end 130b to the stage 100 is greater than the vertical distance from the first end 130a to the stage 100, after the detection process is completed, the difference between the signal intensity value corresponding to each probe 140 and the target intensity value satisfies a monotonic increase in the direction from the first end 130a to the second end 130b.

[0186] When the carrying part 130 is tilted in the first direction X, the signal intensity values corresponding to each probe 140 are usually relatively close. Therefore, the signal intensity value corresponding to each probe 140 is not exactly equal to the target intensity value, and the difference between the signal intensity value and the target intensity value does not satisfy a monotonic increase or monotonic decrease in the direction from the first end 130a to the second end 130b.

[0187] It should be noted that in the probe detection method of the test device based on the first embodiment, for the content related to the test device, reference can be made to the relevant records in the first embodiment, which will not be elaborated here.

[0188] In other embodiments, the probe detection method can also be performed using the signal transceiver device 400 shown in the second embodiment (as Figures 6 to 7 shown).

[0189] Correspondingly, the method of causing the signal transmitting device 410 to transmit the first detection signal 440 includes: causing a movable signal transmitter (i.e., the signal transmitter 411) to sequentially transmit the first detection signal 440 at the transmission positions 402 corresponding to the respective probes 340; the method of causing the signal receiving device 420 to receive the second detection signal 450 includes: causing a movable signal receiver (i.e., the signal receiver 421) to sequentially receive the second detection signal 450 at the reception positions 404 corresponding to the respective probes 340.

[0190] In one embodiment, the detection process satisfies one or both of the following situations: in the step of causing a movable signal transmitter to sequentially transmit the first detection signal 440 at the transmission positions 402 corresponding to the respective probes 340, causing the movable signal transmitter to sequentially move along a preset traveling direction to the transmission positions 402 corresponding to the respective probes 340, and the preset traveling direction is parallel to the second direction Y; in the step of causing a movable signal receiver to sequentially receive the second detection signal 450 at the reception positions 404 corresponding to the respective probes 340, causing the movable signal receiver to sequentially move along a preset traveling direction to the reception positions 404 corresponding to the respective probes 340, and the preset traveling direction is parallel to the second direction Y.

[0191] In this embodiment, the signal transmitting device 410 includes a transmitting end base 412 and a signal transmitter 411 provided on the transmitting end base 412, and the signal receiving device 420 includes a receiving end base 422 and a signal receiver 421 provided on the receiving end base 422.

[0192] When the number of signal transmitters 411 is one, the transmitting end base 412 has a chute 415 and a slider 413 slidably disposed in the chute 415, and the signal transmitter 411 is provided on the slider 413 of the transmitting end base 412; the method of causing a movable signal transmitter to sequentially transmit the first detection signal 440 at the transmission positions 402 corresponding to the respective probes 340 includes: driving the slider 413 of the transmitting end base 412 so that the slider 413 drives the signal transmitter 411 to sequentially move along the chute 415 to the transmission positions 402 corresponding to the respective probes 340.

[0193] When the number of signal receivers 421 is one, the receiving end base 422 has a chute 425 and a slider 423 slidably disposed in the chute 425, and the signal receiver 421 is disposed on the slider 423 of the receiving end base 422; the manner of enabling the movable signal receiver to receive the second detection signal 450 at the receiving positions 404 corresponding to the respective probes 340 in sequence includes: driving the slider 423 of the receiving end base 422 so that the slider 423 drives the signal receiver 421 to move along the chute 425 to the receiving positions 404 corresponding to the respective probes 340 in sequence.

[0194] In this embodiment, when the number of signal transmitters 411 is one, the steps of enabling the movable signal transmitter (i.e., the signal transmitter 411) to transmit the first detection signal 440 at the transmission positions 402 corresponding to the respective probes 340 in sequence include: controlling the linear module 500 corresponding to the movable signal transmitter to drive the slider 413 in the transmitting end base 412 to move to each transmission position 402 in sequence, and when the slider 413 of the transmitting end base 412 reaches each transmission position 402, controlling the linear module 500 corresponding to the movable signal transmitter to stop driving, and controlling the signal transmitter 411 to transmit the first detection signal 440.

[0195] In this embodiment, when the number of signal receivers 421 is one, the steps of enabling the movable signal receiver (i.e., the signal receiver 421) to receive the second detection signal 450 at the receiving positions 404 corresponding to the respective probes 340 in sequence include: controlling the linear module 500 corresponding to the movable signal receiver to drive the slider 423 of the receiving end base 422 to move to each receiving position 404 in sequence, and when the slider 423 of the receiving end base 422 reaches each receiving position 404, controlling the linear module 500 corresponding to the signal receiver 421 to stop driving, and controlling the signal receiver 421 to receive the second detection signal 450.

[0196] Specifically, the linear module 500 includes a motor 510.

[0197] Correspondingly, when the number of signal transmitters 411 is one, the manner of controlling the linear module 500 corresponding to the movable signal transmitter to drive the slider 413 in the transmitting end base 412 to move to each transmission position 402 in sequence includes: enabling the motor 510 corresponding to the movable signal transmitter to move for a preset movement duration or a preset rotation angle, so as to drive the slider 413 in the transmitting end base 412 to move to each transmission position 402 in sequence, and the preset movement duration or the preset rotation angle of the motor 510 corresponding to the movable signal transmitter has a mapping relationship with the respective transmission positions 402.

[0198] Correspondingly, when the number of signal receivers 421 is one, the method for controlling the linear module 500 corresponding to the movable signal receiver to drive the slider 423 of the receiving end base 422 to move to each receiving position 404 in sequence includes: making the motor 510 corresponding to the movable signal receiver move for a preset movement duration or a preset rotation angle, so as to drive the slider 423 of the receiving end base 422 to move to each receiving position 404 in sequence. The preset movement duration or the preset rotation angle of the motor 510 corresponding to the movable signal receiver has a mapping relationship with each receiving position 404.

[0199] In this embodiment, when the number of signal transmitters 411 is one, the step of making the movable signal transmitter emit the first detection signal 440 at the emission position 402 corresponding to each probe 340 in sequence further includes: when controlling the linear module 500 corresponding to the movable signal transmitter to drive, controlling the signal transmitter 411 to turn off.

[0200] In this embodiment, when the number of signal receivers 421 is one, the step of making the movable signal receiver receive the second detection signal 450 at the receiving position 404 corresponding to each probe 340 in sequence further includes: when controlling the linear module 500 corresponding to the movable signal receiver to drive, controlling the signal receiver 421 to turn off.

[0201] As an example, when the numbers of both the signal transmitter 411 and the signal receiver 421 are one, in the detection process, the slider 413 of the transmitting end base 412 and the slider 423 of the receiving end base 422 are driven to move synchronously in the same direction. In other embodiments, the movement modes of the signal transmitter and the signal receiver can be configured in other ways.

[0202] It should be noted that for the probe detection method of the test device based on the second embodiment, the content related to the test device can refer to the relevant records in the second embodiment and will not be elaborated here.

[0203] It should also be noted that in one embodiment, the foregoing detection process is performed before the electrical contact in the first needle insertion state, which is beneficial to improving the accuracy of the test results of the subsequent electrical performance test. In other embodiments, the detection process can also be performed between the electrical contacts in two adjacent needle insertion states, so as to be able to detect in real time whether the probe is skewed.

[0204] Taking the object under test 110 as a wafer, and the wafer includes multiple chips as an example, the foregoing probing process can be performed before the electrical performance test of the first chip, or after the electrical performance test of one chip and before the electrical performance test of the next chip.

[0205] Correspondingly, an embodiment of the present invention further provides a positioning method for a signal transceiver device. With reference to Figures 9 to 11 , Figure 9 is a flowchart of a positioning method for a signal transceiver device according to an embodiment of the present invention, Figure 10 is Figure 9 a schematic diagram of an embodiment of pre-calibration corresponding to step S110 in Figure 11 is Figure 9 a flowchart of an embodiment of step S120 in

[0206] In this embodiment, the positioning method is applied to the test equipment of the foregoing embodiment. Therefore, for the description of the test equipment, reference can be made to the relevant content of the foregoing embodiment, which will not be elaborated here.

[0207] It should be noted that the signal transceiver device can be the signal transceiver device 200 shown in the first embodiment (as Figures 2 to 3 shown), or the signal transceiver device 400 shown in the second embodiment (as Figures 6 to 7 shown).

[0208] In this embodiment, the positioning method of the signal transceiver device includes: performing step S110 to pre-calibrate the relative position relationship between the carrier part and the stage 100 (as Figure 10 shown), so that the carrier part and the stage 100 have a target relative position relationship.

[0209] Performing pre-calibration first is beneficial to improving the accuracy of the relative position relationship between the subsequent signal transceiver device and the probe, and it is easy to configure the first detection signal to: under the target relative position relationship, the first detection signal is projected onto the target part of the probe tip.

[0210] In this embodiment, the test equipment further includes: a probe card holder 150 for loading the probe card 120. Correspondingly, the steps of pre-calibration include: loading the object under test 110 onto the stage 100; loading the test fixture 700 on the probe card holder 150, and one end 610 of the test fixture 700 away from the probe card holder 150 is a plane; making the test fixture 700 contact the object under test 110 on the stage 100, and adjusting the relative position relationship between the probe card holder 150 and the stage 100 until one end 610 of the test fixture 700 away from the probe card holder 150 fits the object under test 110 on the stage 100.

[0211] After pre-calibration and before positioning the signal transceiver device, the positioning method further includes: unloading the test fixture 700; after unloading the test fixture 700, loading a probe card on the probe card holder 150.

[0212] The probe card is fixed on the probe card holder 150. Pre-calibrating the relative position relationship between the probe card holder 150 and the stage 100 is regarded as pre-calibrating the relative position relationship between the bearing part and the stage 100. Therefore, after pre-calibration, it is easy to make the bearing part and the stage 100 have a target relative position relationship.

[0213] It should be noted that pre-calibrating the relative position relationship between the probe card holder 150 and the stage 100 through the test fixture 700 is beneficial to reducing the complexity of pre-calibration.

[0214] Continue to refer to Figure 9 , perform step S120. After pre-calibration, perform a positioning process on the signal transceiver device.

[0215] Specifically, with reference to Figure 11 , the positioning process includes: performing step S121, performing a first positioning on the signal transmitting device using the first detection signal emitted by the signal transmitting device. The first positioning includes: adjusting the position of the signal transmitting device relative to the stage and the probe until the first detection signal is transmitted along a direction parallel to the surface of the stage and projects to the target part of the probe tip; performing step S122. After completing the first positioning, perform a second positioning on the signal receiving device using the first detection signal. The second positioning includes: adjusting the position of the signal receiving device relative to the signal transmitting device until all the second detection signals formed after the first detection signal continues to be transmitted after passing through the position of the probe are received by the signal receiving device, and obtaining a detection result for characterizing the actual relative position relationship between the bearing part and the stage.

[0216] First, perform step S121. Taking the probe and the stage as reference objects, adjust the position of the signal transmitting device relative to the stage and the probe, so that it is easy for the first detection signal to be transmitted along a direction parallel to the surface of the stage, and the first detection signal is configured to: under the target relative position relationship, the first detection signal projects to the target part of the probe tip.

[0217] After completing the first positioning, perform step S122. Taking the second detection signal as a reference object, adjust the position of the signal receiving device relative to the signal transmitting device until all the second detection signals formed after the first detection signal continues to be transmitted after passing through the position of the probe are received by the signal receiving device, and ensure that the signal receiving device can detect the detection result, which makes the relative position of the signal transmitting device and the signal receiving device accurate.

[0218] In summary, by performing step S121 and step S122, it is beneficial to improve the detection accuracy of the horizontal displacement of the probe card by the test equipment integrated with the signal emission tube device and the signal receiving device.

[0219] As an example, the signal emission device and the signal receiving device are respectively located on both sides of the probe in the first direction. The signal emission device is used to emit a first detection signal along the first direction, and the signal receiving device is used to receive a second detection signal along the first direction. The first direction is parallel to the surface of the stage 100. The number of probes is multiple, and the multiple probes are arranged in sequence along the second direction. The second direction is parallel to the surface of the stage and perpendicular to the first direction.

[0220] Correspondingly, the signal emission device includes a signal emitter for emitting the first detection signal. The first positioning method includes any one of the following situations: when the number of signal emitters is adapted to and in one-to-one correspondence with the probes, respectively perform first positioning on the signal emitters corresponding to each probe to determine the emission positions of each signal emitter; when the number of signal emitters is one and it is a movable signal emitter, adjust the relative positions of the signal emitter and each probe to determine the respective emission positions of the signal emitter.

[0221] Correspondingly, the signal receiving device includes a signal receiver for receiving the second detection signal. The second positioning method includes any one of the following situations: when the number of signal receivers is adapted to and in one-to-one correspondence with the probes, respectively perform second positioning on the signal receivers corresponding to each probe to determine the receiving positions of each signal receiver; when the number of signal receivers is one and it is a movable signal receiver, adjust the relative positions of the signal receiver and the signal emitters located at each emission position to determine the respective receiving positions of the signal receiver.

[0222] It should be noted that multiple probes share one movable signal emitter. Therefore, it is necessary to adjust the relative positions of the signal emitter and each probe to take into account the detection accuracy of each probe. Similarly, in order to take into account the detection accuracy of each probe, when the number of signal receivers is one and it is a movable signal receiver, it is necessary to adjust the relative positions of the signal receiver and the signal emitters located at each emission position.

[0223] Specifically, the signal emission device includes a transmitting end base and a signal emitter arranged on the transmitting end base, and the signal receiving device includes a receiving end base and a signal receiver arranged on the receiving end base. When the number of both the signal emitter and the signal receiver is one, in the positioning process, drive the sliders of the transmitting end base and the receiving end base to move synchronously in the same direction, thereby improving the efficiency of the positioning process.

[0224] As an example, the signal transceiver device includes a visible light transceiver device; therefore, in the step of performing the first positioning on the signal transmitting device, the position of the signal transmitting device relative to the stage and the probe is adjusted until the spot of the first detection signal emitted by the signal transmitting device is aligned with the target part at the tip of the probe. Through the spot of the first detection signal, it is thus easy to determine whether the first detection signal is projected onto the target part at the tip of the probe, reducing the complexity of the first positioning.

[0225] Similarly, in the step of performing the second positioning on the signal receiving device, the position of the signal receiving device relative to the signal transmitting device is adjusted until the spot of the second detection signal is aligned with the signal receiver of the signal receiving device, and the signal receiver is used to receive the second detection signal. Through the spot of the second detection signal, it is thus easy to determine whether the second detection signal is received by the signal receiving device, reducing the complexity of the second positioning.

[0226] It should be noted that by adjusting the brightness and visibility of the light, the spot is thus easy to observe.

[0227] In one embodiment, the first detection signal is projected towards the probe along a first direction, and the signal transmitting device includes a signal transmitter and a slit assembly. The signal transmitting device emits a plane light with a preset width through the slit of the slit assembly, and the direction of the preset width is a second direction, and the second direction is parallel to the surface of the stage and perpendicular to the first direction. Among them, the signal transmitter is used to emit an initial light with a preset width, the initial light is projected towards the slit of the slit assembly, and the initial light after passing through the slit is used as the first detection signal; or, the signal transmitter is used to emit an initial light, the initial light is projected towards the slit of the slit assembly, and the initial light after passing through the slit is used as the first detection signal, the slit has a preset width, and the radial dimension of the initial light is greater than or equal to the opening dimension of the slit.

[0228] Therefore, before performing the first positioning on the signal transmitting device by using the first detection signal emitted by the signal transmitting device, the positioning method further includes: adjusting the position of the slit relative to the signal transmitter until the initial light is projected onto the slit of the slit assembly and emits a plane light with a preset width through the slit.

[0229] By adjusting the relative position of the slit and the signal transmitter, the position accuracy of the first detection signal emitted by the signal transmitting device is ensured, and moreover, it is also beneficial to make the size and shape of the plane light meet the expectations.

[0230] In another embodiment, the signal receiving device includes a signal receiver and a slit assembly, and the slit of the slit assembly serves as the light incident port of the signal receiving device, and the signal receiver is used to receive the second detection signal passing through the slit.

[0231] Correspondingly, the steps of adjusting the position of the signal receiving device relative to the signal transmitting device include: adjusting the position of the slit relative to the signal transmitting device until the second detection signal is projected onto the slit of the slit assembly; and adjusting the position of the slit relative to the signal receiver until the second detection signal passing through the slit is received by the signal receiver.

[0232] By adjusting the relative positions among the signal transmitting device, the slit of the signal receiving device, and the signal receiver, the position accuracy of the signal receiving device for receiving the second detection signal is ensured. Moreover, it is also beneficial to improve the accuracy of the light signal reception amount of the signal receiver.

[0233] It should be noted that for the specific descriptions of the test equipment and the signal transceiver device, reference can be made to the relevant content in the foregoing embodiments, which will not be elaborated herein.

[0234] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be subject to the scope defined by the claims.

Claims

1. A test device, characterized in that, Comprising: A stage for carrying a device under test. A probe card including a carrier portion and probes disposed on the carrier portion, the probes having probe tips at one end remote from the carrier portion, the probe tips being configured to make electrical contact with the device under test in a needle-insertion state, and in the needle-insertion state, a target relative position relationship can exist between the carrier portion and the stage. A signal transceiver device including a signal transmitting device and a signal receiving device. The signal transmitting device is configured to transmit a first detection signal to the probes, the first detection signal being transmitted in a direction parallel to the surface of the stage, and the first detection signal being configured such that, in the target relative position relationship, the first detection signal is projected onto a target portion of the probe tip. The signal receiving device is configured to receive a second detection signal formed by the continued transmission of the first detection signal after passing through the position of the probes, and to obtain a detection result based on the second detection signal, the detection result being used to characterize the actual relative position relationship between the carrier portion and the stage.

2. The test device according to claim 1, characterized in that, The signal transmitting device and the signal receiving device are respectively located on two sides of the probes in a first direction, the signal transmitting device is configured to transmit the first detection signal along the first direction, and the signal receiving device is configured to receive the second detection signal along the first direction, the first direction being parallel to the surface of the stage.

3. The testing device according to claim 2, wherein, The number of the probes is plural, and the plural probes are arranged in sequence in a second direction, the second direction being parallel to the surface of the stage and perpendicular to the first direction. The signal transmitting device includes a signal transmitter for transmitting the first detection signal, and the signal transmitter satisfies any one of the following situations: the number of the signal transmitters is adapted to the number of the probes and are respectively located at emission positions corresponding to the probes one by one; the number of the signal transmitters is one and is a movable signal transmitter for sequentially transmitting the first detection signal at emission positions corresponding to each of the probes. The signal receiving device includes a signal receiver for receiving the second detection signal, and the signal receiver satisfies any one of the following situations: the number of the signal receivers is adapted to the number of the probes and are respectively located at receiving positions corresponding to the probes one by one; the number of the signal receivers is one and is a movable signal receiver for sequentially receiving the second detection signal at receiving positions corresponding to each of the probes.

4. The test device according to claim 3, characterized in that, The signal transceiver device satisfies at least one of the following situations: When the number of the signal transmitters is adapted to the number of the probes, the arrangement direction of the plural signal transmitters is parallel to the second direction. When the number of the signal receivers is adapted to the number of the probes, the arrangement direction of the plural signal receivers is parallel to the second direction. When the number of the signal transmitters is one, the preset traveling direction of the movable signal transmitter is parallel to the second direction. When the number of the signal receivers is one, the preset traveling direction of the movable signal receiver is parallel to the second direction.

5. The test device according to claim 1, characterized in that The signal transceiver device includes a directional signal transceiver device.

6. The testing device according to claim 5, characterized in that, The directional signal transceiver device includes a visible light transceiver device.

7. The test device according to claim 6, characterized in that, The visible light transceiver device includes a laser transceiver device.

8. The testing device according to claim 6, characterized in that The first detection signal is projected towards the probe along a first direction. The signal transmitting device of the visible light transceiver device is configured to emit a planar light with a preset width as the first detection signal. The direction of the preset width of the planar light is a second direction, and the second direction is parallel to the surface of the stage and perpendicular to the first direction.

9. The testing device according to claim 8, characterized in that The signal transmitting device includes a slit assembly, and the signal transmitting device emits the planar light with the preset width through the slit of the slit assembly.

10. The test device according to any one of claims 6 to 9, characterized in that The first detection signal is projected towards the probe along a first direction. The preset width of the first detection signal in the second direction is greater than the diameter of the target site. The first direction is parallel to the surface of the stage, and the second direction is parallel to the surface of the stage and perpendicular to the first direction.

11. The test device according to claim 10, characterized in that, The number of the probes is multiple, and the multiple probes are arranged in sequence along the second direction; The signal transmitting device is configured to emit the first detection signal to a single probe, and the preset width of the first detection signal in the second direction is less than half of the spacing between adjacent probes.

12. The testing device according to claim 10, characterized in that, The difference between the preset width of the first detection signal in the second direction and the diameter of the target site is greater than or equal to 0.1 mm.

13. The test device according to claim 6, characterized in that, The signal receiving device includes a signal receiver and a slit assembly. The slit of the slit assembly serves as the light incident port of the signal receiving device, and the signal receiver is configured to receive the second detection signal passing through the slit.

14. The test device according to claim 1, characterized in that The detection result is a signal intensity value. The testing device further includes: a processor, coupled to the signal receiving device, and the processor is configured to compare the signal intensity value with a preset specification range and give a warning when the signal intensity value exceeds the preset specification range.

15. The test device according to any one of claims 1 to 4, characterized in that The testing device further includes: a chamber; The stage is located in the chamber; The signal transmitting device includes a transmitting end base and a signal transmitter disposed on the transmitting end base. The signal transmitter is configured to emit the first detection signal. The signal receiving device includes a receiving end base and a signal receiver disposed on the receiving end base. The signal receiver is configured to receive the second detection signal. Both the transmitting end base and the receiving end base are disposed on the inner wall of the chamber.

16. A probe detection method for the test equipment according to any one of claims 1 to 15, characterized in that, including: using the signal transceiver device to perform a detection process on the probe at a position to be measured, where the position to be measured is the same as the position of the probe when in the needle insertion state; The detection process includes: causing the signal transmitting device to emit a first detection signal to the probe, and the first detection signal is transmitted along a direction parallel to the surface of the stage; causing the signal receiving device to receive the second detection signal formed after the first detection signal continues to be transmitted after passing through the position of the probe, and obtaining a detection result based on the second detection signal, where the detection result is used to characterize the actual relative position relationship between the bearing portion and the stage.

17. The probe detection method according to claim 16, wherein The detection result is a signal strength value, and the signal strength value has a preset specification range; the detection method further includes: comparing the signal strength value obtained by the detection process with the preset specification range, and giving a warning when the signal strength value exceeds the preset specification range.

18. The probe detection method according to claim 16, wherein, The detection process is performed before the electrical contact in the first needle insertion state; or, the detection process is performed between the electrical contacts in two adjacent needle insertion states.

19. A positioning method for a signal transceiver device, applied to the test equipment described in any one of claims 1 to 15, characterized in that, The positioning method includes: Pre-correcting the relative position relationship between the carrier part and the stage so that there is a target relative position relationship between the carrier part and the stage; After the pre-correction, performing a positioning process on the signal transceiver device, and the positioning process includes: Performing a first positioning on the signal transmitting device by using a first detection signal emitted by the signal transmitting device, and the first positioning includes: adjusting the position of the signal transmitting device relative to the stage and the probe until the first detection signal is transmitted along a direction parallel to the surface of the stage and projected onto a target part of the probe tip; After completing the first positioning, performing a second positioning on the signal receiving device by using the first detection signal, and the second positioning includes: adjusting the position of the signal receiving device relative to the signal transmitting device until all second detection signals formed after the first detection signal passes through the position where the probe is located and continues to be transmitted are received by the signal receiving device, and obtaining a detection result for characterizing the actual relative position relationship between the carrier part and the stage.

20. The positioning method according to claim 19, characterized in that, The signal transceiver device includes a visible light transceiver device; In the step of performing the first positioning on the signal transmitting device, adjusting the position of the signal transmitting device relative to the stage and the probe until the light spot of the first detection signal emitted by the signal transmitting device is aligned with the target part of the probe tip; In the step of performing the second positioning on the signal receiving device, adjusting the position of the signal receiving device relative to the signal transmitting device until the light spot of the second detection signal is aligned with the signal receiver of the signal receiving device, and the signal receiver is used to receive the second detection signal.

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