Micropore machining device, method and system

Abstract

The invention relates to the field of micropore machining of hard and brittle materials, in particular to a micropore machining device, method and system and the micropore machining device.The micropore machining device comprises a cutter assembly, the cutter assembly is used for feeding and drilling in the vertical direction and comprises a power shaft, and the power shaft is used for providing drilling power; the microneedle is fixedly connected to the power shaft, and the microneedle is used for drilling a workpiece; the carrier assembly is arranged below the cutter assembly, the carrier assembly comprises a carrier, the carrier is used for bearing a workpiece, and the carrier has the moving freedom degree in the vertical direction relative to the cutter assembly; and the adjusting piece is located below the carrier, the adjusting piece is connected with the carrier and acts on the carrier, and the adjusting piece can output adjustable acting force Fx upwards to the carrier so that the actual punching acting force F0 of the microneedle to the workpiece can be kept constant. The technical effect of improving the micropore machining quality is achieved by dynamically adjusting the interaction force of the cutter and the workpiece.

Description

Technical Field

[0001] This application relates to the field of micro-hole machining of hard and brittle materials, in particular to micro-hole machining devices, methods and systems. Background Art

[0002] Ceramic materials such as silicon carbide and aluminum nitride have been widely used in the fields of electronics and semiconductors due to their outstanding properties such as high thermal conductivity, high insulation and high temperature resistance. However, due to the extremely high hardness and brittleness of ceramic materials, it is quite difficult to carry out forming processing on them. This processing difficulty is particularly evident in micro-hole machining. The machining of small apertures not only needs to cope with the challenges of the rigid and brittle properties of the material itself, but also puts almost harsh requirements on the accuracy and stability of the processing technology, making the related processing technology a research difficulty and focus in this field.

[0003] In the prior art, the common methods for micro-hole machining of hard and brittle materials include machining center machine tool machining, ultrasonic drilling and laser machining, but these machining methods have obvious deficiencies: when micro-hole drilling with a machining center machine tool, the tool faces significant wear problems; laser machining is prone to cause material deformation or micro-cracks due to the heat affected zone problem, and these conditions will lead to poor quality of micro-hole machining.

[0004] Therefore, the technical problem of the prior art is that the quality of micro-hole machining is poor. Summary of the Invention

[0005] This application provides a micro-hole machining device, method and system, which can achieve the technical effect of improving the quality of micro-hole machining by dynamically adjusting the interaction force between the tool and the workpiece.

[0006] In a first aspect, the micro-hole machining device provided by this application adopts the following technical solution: A micro-hole machining device, comprising: A tool assembly, which is used for feeding and drilling in the vertical direction, and the tool assembly includes: A power shaft, which is used to provide drilling power; A micro-needle, which is fixedly connected to the power shaft and is used for drilling the workpiece; A carrier assembly, which is arranged below the tool assembly, and the carrier assembly includes: A carrier, which is used to carry the workpiece, and the carrier has a degree of freedom of movement in the vertical direction relative to the tool assembly; An adjusting member, which is located below the carrier, the adjusting member is connected to and acts on the carrier, and the adjusting member can output an adjustable acting force Fx upward to the carrier so that the actual punching force F0 of the micro-needle on the workpiece remains constant.

[0007] Preferably, the adjusting member is a voice coil motor.

[0008] Preferably, it further includes a guiding assembly for guiding the movable adjustment of the carrier. The guiding assembly includes: A guiding rod, which is arranged in the vertical direction and is slidably connected to the carrier, so that the carrier can be movably adjusted along the direction where the guiding rod is located.

[0009] In a second aspect, the micro-hole processing method provided by this application adopts the following technical solutions: A micro-hole processing method, applicable to the micro-hole processing device, includes: Press the tool assembly against the workpiece; Obtain the acting force F of the tool assembly on the workpiece, the gravity m1g of the workpiece, and the gravity m2g of the carrier; Make the voice coil motor output an adjustable acting force Fx upward on the carrier, so that the actual punching acting force F0 of the micro-needle on the workpiece remains constant.

[0010] Preferably, the step of "making the voice coil motor output an adjustable acting force Fx upward on the carrier, so that the actual punching acting force F0 of the micro-needle on the workpiece remains constant" includes: The voice coil motor obtains the resultant force F+(m1+m2)g received by the carrier, where F is the acting force of the tool assembly on the workpiece, m1 is the mass of the workpiece, and m2 is the mass of the carrier; The acting force Fx output by the voice coil motor satisfies: Fx≥F+(m1+m2)g; Adjust the acting force Fx output by the voice coil motor to make the actual punching acting force F0=F-(Fx-(m1+m2)g) of the micro-needle on the workpiece remain constant.

[0011] Preferably, set the output threshold of the voice coil motor as Fxmax; when the acting force output by the voice coil motor satisfies: Fx = Fxmax < F+(m1+m2)g: Make the carrier move downward along with the movable part of the voice coil motor, and feedback to the tool assembly through the voice coil motor to reduce the feed rate of the tool assembly.

[0012] Preferably, during the process of "making the carrier move downward along with the movable part of the voice coil motor", make Fx = Fxmax; After the feed rate of the tool assembly is adjusted, the voice coil motor obtains the resultant force F+(m1+m2)g acting on the carrier, and re-adjusts the acting force Fx output by the voice coil motor, so that the actual punching force F0 of the micro-needle on the workpiece remains constant, where F0 = F-(Fx-(m1+m2)g).

[0013] Preferably, the initial height L0 at which the micro-needle descends to the surface of the workpiece is obtained; After drilling, the height Lx at which the micro-needle descends to the surface of the workpiece is obtained; If Lw-(L0-Lx)<L, the micro-needle needs to be replaced, where Lw is the initial length of the micro-needle and L is the thickness of the workpiece.

[0014] In a third aspect, the micro-hole processing system provided by the present application adopts the following technical solutions: A micro-hole processing system applicable to the micro-hole processing method includes: An acquisition unit configured to acquire the resultant force F+(m1+m2)g acting on the carrier, where F is the acting force of the tool assembly on the workpiece, m1 is the mass of the workpiece, and m2 is the mass of the carrier; A control unit configured to adjust the acting force Fx output by the voice coil motor based on the resultant force F+(m1+m2)g acting on the carrier, so that the actual punching force F0 of the micro-needle on the workpiece remains constant.

[0015] Preferably, it further includes a feedback unit configured to: Set the output threshold of the voice coil motor as Fxmax; when the acting force output by the voice coil motor satisfies: Fx = Fxmax<F+(m1+m2)g: move the carrier downward along with the movable part of the voice coil motor, and feedback through the voice coil motor to the tool assembly to reduce the feed rate of the tool assembly.

[0016] In summary, the present application includes at least one of the following beneficial technical effects: By adjusting the acting force on the carrier through the adjusting member, the acting force of the micro-needle on the workpiece is always kept constant, which is beneficial to reducing tool wear and improving the punching quality. Description of the Drawings

[0017] Figure 1 is a schematic diagram of the micro-hole processing device described in the present application; Figure 2 is a schematic diagram of the carrier assembly of the micro-hole processing device described in the present application; Figure 3 is a schematic diagram of the micro-hole processing method described in the present application; Figure 4 is a schematic diagram of the micro-hole processing system described in the present application.

[0018] Description of reference numerals in the drawings: 100, tool assembly; 110, power shaft; 120, microneedle; 130, driving member; 200, carrier assembly; 210, carrier; 220, adjusting member; 221, voice coil motor; 2211, movable part; 230, frame; 300, guiding assembly; 310, guiding rod; 400, workpiece. Detailed implementation manners

[0019] In this text, the serial numbers assigned to components themselves, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequential or technical meanings. And the "connection" and "coupling" mentioned in this application, unless otherwise specified, both include direct and indirect connections (couplings). In the description of this application, it should be understood that the orientation or positional relationship indicated by terms such as "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to this application.

[0020] In this application, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on" the second feature may be that the first feature is directly above or obliquely above the second feature, or simply means that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "under" the second feature may be that the first feature is directly below or obliquely below the second feature, or simply means that the first feature has a lower horizontal height than the second feature.

[0021] The embodiments of this application provide a micro-hole machining device, method and system, which achieve the technical effect of improving the quality of micro-hole machining by dynamically adjusting the interaction force between the tool and the workpiece 400.

[0022] To better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the drawings in the specification and specific implementation manners. It should be understood that the specific embodiments described herein are only used to explain this application and are not used to limit this application.

[0023] This application provides a micro-hole machining device, such as Figure 1 , 2As shown, it includes a tool assembly 100, a carrier assembly 200, and a guiding assembly 300. The tool assembly 100 is used to feed the workpiece 400 to perform a drilling operation; the carrier assembly 200 is used to carry the workpiece 400 and adjust the acting force; the guiding assembly 300 is used to adjust the carrier 210 in the vertical direction.

[0024] As Figure 1 shown, the tool assembly 100 is used to feed the workpiece 400 to perform a drilling operation. The tool assembly 100 is used to feed and drill in the vertical direction. The tool assembly 100 includes: a power shaft 110, a micro-needle 120, and a driving member 130. The power shaft 110 is used to provide drilling power; the micro-needle 120 is fixedly connected to the power shaft 110, and the micro-needle 120 is used to drill the workpiece 400; specifically, the tool assembly 100 is arranged in the vertical direction and has a moving freedom in the vertical direction. The tool assembly 100 is used to feed in the vertical direction and act on the workpiece 400 to perform drilling; the tool assembly 100 includes a power shaft 110, a micro-needle 120, and a driving member 130. The power shaft 110 is arranged vertically, and the power shaft 110 is used to provide drilling power for the micro-needle 120. For example, ultrasonic vibration is used as the drilling power source; in one embodiment, the power shaft 110 is a transducer. The micro-needle 120 is fixedly connected to the bottom end of the power shaft 110, and the micro-needle 120 is arranged vertically. The micro-needle 120 is a drilling component that directly acts on the workpiece 400. The tip of the micro-needle 120 is designed for micro-hole machining to ensure that precise micro-holes can be formed on the workpiece 400; in one embodiment, there are multiple groups of micro-needles 120, and the multiple groups of micro-needles 120 are evenly connected to the bottom end of the power shaft 110 in the vertical direction to achieve multi-hole machining on the workpiece 400. The driving member 130 is used to drive the micro-needle 120 and the power shaft 110 to move up or down in the vertical direction. The power shaft 110 is fixedly connected to the driving member 130, so that the power shaft 110 and the micro-needle 120 can move up or down in the vertical direction; optionally, the driving member 130 can be a linear motor, a cylinder, an electric cylinder, a screw slider, or other linear driving structures.

[0025] As Figure 2 shown, the carrier assembly 200 is used to carry the workpiece 400 and adjust the acting force. The carrier assembly 200 is arranged below the tool assembly 100. The carrier assembly 200 includes a carrier 210 and an adjusting member 220. The carrier 210 is used to carry the workpiece 400, and the carrier 210 has a moving freedom in the vertical direction relative to the tool assembly 100; the adjusting member 220 is located below the carrier 210. The adjusting member 220 is connected to and acts on the carrier 210. The adjusting member 220 can output an adjustable acting force Fx upward to the carrier 210, so that the actual drilling acting force F0 of the micro-needle 120 on the workpiece 400 remains constant.

[0026] In other words, as Figure 2As shown, the carrier 210 is used to carry the workpiece 400, and the carrier 210 can move in the vertical direction; the adjusting member 220 is connected to the lower part of the carrier 210, and the adjusting member 220 can apply an adjustable upward acting force Fx to counteract the downward pressure of the tool assembly 100 on the workpiece 400, the gravity of the workpiece 400, and the gravity of the carrier 210, so as to keep the actual punching force F0 of the microneedle 120 on the workpiece 400 constant.

[0027] In one embodiment, as Figure 2 shown, the adjusting member 220 is preferably a voice coil motor 221, and the voice coil motor 221 is connected to the carrier 210 and outputs an upward controllable acting force Fx. By obtaining the resultant force received by the carrier 210 in real time, the resultant force refers to the sum of the acting force F of the tool assembly 100 on the workpiece 400, the gravity m1g of the workpiece 400, and the gravity m2g of the carrier 210, and by dynamically adjusting Fx through the voice coil motor 221, the actual punching force F0 = F - (Fx - (m1 + m2)g) of the microneedle 120 on the workpiece 400 is kept constant.

[0028] As Figure 2 shown, the guiding assembly 300 is used to adjust the carrier 210 in the vertical direction. The guiding assembly 300 includes a guiding rod 310, the guiding rod 310 is arranged in the vertical direction, and the guiding rod 310 is slidably connected to the carrier 210 so that the carrier 210 can be adjusted to move along the direction where the guiding rod 310 is located; the guiding rod 310 is arranged in the vertical direction, and the guiding rod 310 is slidably connected to the carrier 210 so that the carrier 210 can be adjusted to move along the direction where the guiding rod 310 is located; more specifically, the carrier 210 is slidably connected to the guiding rod 310 or sleeved on the guiding rod 310; the arrangement of the guiding rod 310 ensures the stability and accuracy of the movement of the carrier 210 in the vertical direction, avoids lateral deviation, and thus ensures the contact position accuracy between the microneedle 120 and the workpiece 400. The carrier assembly 200 further includes a frame 230, and the guiding rod 310 and the adjusting member 220 can be fixedly connected to the frame 230.

[0029] This application also provides a micro-hole processing method, as Figure 3 shown, which is applicable to the above-mentioned micro-hole processing device, and realizes constant force control in the micro-hole processing process by dynamically adjusting the acting force. The processing method includes: Placing the workpiece 400 on the carrier 210; Pressing the tool assembly 100 to act on the workpiece 400; Obtaining the acting force F of the tool assembly 100 on the workpiece 400, the gravity m1g of the workpiece 400, and the gravity m2g of the carrier 210, that is, obtaining the resultant force F+(m1 + m2)g of the carrier 210; The voice coil motor 221 outputs an adjustable acting force Fx upward to the carrier 210, so that the actual punching force F0 of the micro needle 120 on the workpiece 400 remains constant.

[0030] Further, the voice coil motor 221 obtains the resultant force F+(m1+m2)g received by the carrier 210, where F refers to the acting force of the tool assembly 100 on the workpiece 400, m1 is the mass of the workpiece 400, and m2 is the mass of the carrier 210; the acting force Fx output by the voice coil motor 221 satisfies: Fx≥F+(m1+m2)g; the acting force Fx output by the voice coil motor 221 is adjusted so that the actual punching force F0=F-(Fx-(m1+m2)g) of the micro needle 120 on the workpiece 400 remains constant.

[0031] Specifically, tool feeding: Start the downward movement of the tool assembly 100 to press the micro needle 120 to contact the workpiece 400. Obtain the force signal: Obtain the acting force F of the tool assembly 100 on the workpiece 400 through the voice coil motor 221. At the same time, combining the gravity m1g of the workpiece 400 and the gravity m2g of the carrier 210, the resultant force received by the carrier 210 can be obtained as F+(m1+m2)g. Force balance adjustment: The voice coil motor 221 outputs an acting force Fx upward to the carrier 210 based on the resultant force F+(m1+m2)g received by the carrier 210, and Fx≥F+(m1+m2)g. And through the formula F0=F-(Fx-(m1+m2)g), Fx is dynamically adjusted to ensure that the actual punching force F0 of the micro needle 120 on the workpiece 400 remains constant.

[0032] Further, it also includes an overload protection process: Set the output threshold of the voice coil motor 221 as Fxmax; when the acting force output by the voice coil motor 221 satisfies: Fx=Fxmax<F+(m1+m2)g: Make the carrier 210 move downward with the movable part 2211 of the voice coil motor 221, and feedback through the voice coil motor 221 to the tool assembly 100 to reduce the feeding rate of the tool assembly 100.

[0033] Among them, in the process of "making the carrier 210 move downward with the movable part 2211 of the voice coil motor 221", it includes: making Fx=Fxmax; after the feeding rate of the tool assembly 100 is adjusted, the voice coil motor 221 obtains the resultant force F+(m1+m2)g received by the carrier 210, and re-adjusts the acting force Fx output by the voice coil motor 221 so that the actual punching force F0=F-(Fx-(m1+m2)g) of the micro needle 120 on the workpiece 400 remains constant.

[0034] Specifically, based on the actual process parameters, the output threshold of the voice coil motor 221 is set to Fxmax. When Fx = Fxmax < F + (m1 + m2)g, the following operations are performed: The voice coil motor 221 itself can be set to a constant torque mode, and the carrier 210 descends and buffers along with the movable part 2211 of the voice coil motor 221. At this time, the acting force output by the voice coil motor 221 remains Fx = Fxmax. At the same time, the voice coil motor 221 feeds back a signal to the driving part 130 of the tool assembly 100 to reduce the feed rate of the tool assembly 100. After the resultant force F + (m1 + m2)g on the carrier 210 decreases, Fx is readjusted to resume constant force machining, that is, F0 = F - (Fx - (m1 + m2)g) remains constant.

[0035] In other words, the starting height position of the micro needle 120 is fixed, the initial length of the micro needle 120 is Lw, the initial height of the micro needle 120 when it descends to the surface of the workpiece 400 is L0. After drilling, when drilling next time, the height of the micro needle 120 when it descends to the surface of the workpiece 400 is Lx. Then, L0 - Lx is the wear amount of the micro needle 120. If Lw - (L0 - Lx) < L, it means that the wear amount of the micro needle 120 exceeds the allowable range, that is, the length of the micro needle 120 cannot penetrate the workpiece 400, and the micro needle 120 needs to be replaced to ensure the accuracy and quality of subsequent processing.

[0036] In other words, in the micro hole processing method, first, initialization settings are performed: including but not limited to disposing the workpiece 400 on the carrier 210, and obtaining the mass m1 of the workpiece 400 and the mass m2 of the carrier 210 through detection or preset parameters. At the same time, the maximum output threshold Fxmax of the voice coil motor 221 is set, and the setting of the threshold can be determined based on factors such as the strength of the micro needle 120 and the material properties of the workpiece 400. Next, the tool assembly 100 is pressed down: The driving part 130 controls the micro needle 120 to press down at a preset rate until the micro needle 120 touches the surface of the workpiece 400. The acting force F is detected through the back electromotive force of the voice coil motor 221 at the moment of contact. Then, the acting force Fx is dynamically adjusted: Calculate the resultant force F+(m1+m2)g acting on the carrier 210; The voice coil motor 221 outputs an upward acting force Fx, satisfying Fx≥F+(m1+m2)g, and dynamically adjusts Fx based on F0=F-(Fx-(m1+m2)g) to keep F0 constant; Further, if Fx reaches Fxmax and F+(m1+m2)g>Fxmax, that is, Fx=Fxmax<F+(m1+m2)g, overload protection is triggered: The carrier 210 moves downward and buffers along with the movable part 2211 (i.e., the mover) of the voice coil motor 221. At the same time, the voice coil motor 221 sends a signal to the driving member 130 of the tool assembly 100 to reduce the feed rate to prevent the micro needle 120 from being damaged; When the overload is triggered, the voice coil motor 221 maintains Fx=Fxmax, and the carrier 210 moves downward smoothly under the constraint of the guiding assembly 300, temporarily reducing the contact pressure between the micro needle 120 and the workpiece 400; Finally, after the tool assembly 100 reduces the feed rate, it re-detects F+(m1+m2)g, and when F+(m1+m2)g ≤Fxmax, it resumes the dynamic adjustment of Fx and continues to maintain F0 constant.

[0037] In this way, the micro-hole processing method of the present application constructs a closed-loop control system of "force detection - force compensation - overload buffering", effectively solves the core problem of unstable force control in the micro-hole processing of hard and brittle materials, and significantly improves the processing accuracy and reliability.

[0038] Furthermore, it also includes the micro needle 120 life detection process: Obtain the initial height L0 when the micro needle 120 descends to the surface of the workpiece 400; After drilling, obtain the height Lx when the micro needle 120 descends to the surface of the workpiece 400; If Lw-(L0-Lx)<L, the micro needle 120 needs to be replaced, where Lw is the initial length of the micro needle 120 and L is the thickness of the workpiece 400.

[0039] The present application also provides a micro-hole processing system suitable for the above processing method, as Figure 4 shown, including an acquisition unit, a control unit, and a feedback unit.

[0040] The acquisition unit is configured to acquire the resultant force F+(m1+m2)g acting on the carrier 210, where F refers to the acting force of the tool assembly 100 on the workpiece 400, m1 is the mass of the workpiece 400, and m2 is the mass of the carrier 210; That is, it real-time collects the downward pressure F of the tool assembly 100 on the workpiece 400, and the gravity data of the workpiece 400 and the carrier 210.

[0041] The control unit is configured to adjust the acting force Fx output by the voice coil motor 221 based on the resultant force F+(m1+m2)g received by the carrier 210, so that the actual punching force F0 of the micro needle 120 on the workpiece 400 remains constant; that is, calculate the acting force Fx that the voice coil motor 221 needs to output according to the resultant force received by the carrier 210, and control the voice coil motor 221 to perform the adjustment.

[0042] The feedback unit is configured to set the output threshold of the voice coil motor 221 as Fxmax; when the acting force output by the voice coil motor 221 satisfies: Fx = Fxmax < F+(m1+m2)g: move the carrier 210 downward along with the movable part 2211 of the voice coil motor 221, and feedback through the voice coil motor 221 to the tool assembly 100, so as to reduce the feed rate of the tool assembly 100; that is, when the output force of the voice coil motor 221 reaches the threshold Fxmax, trigger the downward movement of the carrier 210 and the adjustment of the feed rate of the tool assembly 100 to form a closed-loop control.

[0043] Although the preferred embodiments of the present application have been described, those skilled in the art can make additional changes and modifications to these embodiments once they learn the basic creative concept. Therefore, the appended claims are intended to be construed as including the preferred embodiments and all changes and modifications falling within the scope of the present application.

[0044] Obviously, those skilled in the art can make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalent technologies, the present application is also intended to include these modifications and variations.

Claims

1. A micro-hole machining device, characterized in that: A tool assembly (100), the tool assembly (100) is used for vertical feeding drilling, and the tool assembly (100) includes: A power shaft (110), the power shaft (110) is used to provide drilling power; A micro-needle (120), the micro-needle (120) is fixedly connected to the power shaft (110), and the micro-needle (120) is used to drill holes in the workpiece (400); A carrier assembly (200), the carrier assembly (200) is arranged below the tool assembly (100), and the carrier assembly (200) includes: A carrier (210), the carrier (210) is used to carry the workpiece (400), and the carrier (210) has a degree of freedom of movement in the vertical direction relative to the tool assembly (100); An adjusting member (220), the adjusting member (220) is located below the carrier (210), the adjusting member (220) is connected to and acts on the carrier (210), and the adjusting member (220) can output an adjustable acting force Fx upward to the carrier (210) so that the actual punching force F0 of the micro-needle (120) on the workpiece (400) remains constant.

2. The micro-hole processing device according to claim 1, wherein The adjusting member (220) is a voice coil motor (221).

3. The micro-hole processing device according to any one of claims 1 or 2, characterized in that It further includes a guiding assembly (300), the guiding assembly (300) is used to guide the movement adjustment of the carrier (210), and the guiding assembly (300) includes: A guiding rod (310), the guiding rod (310) is arranged in the vertical direction, and the guiding rod (310) is slidably connected to the carrier (210) so that the carrier (210) can be adjusted to move along the direction where the guiding rod (310) is located.

4. A method for micro-hole machining, characterized in that, Applied to the micro-hole machining device according to claim 2, including: Pressing the tool assembly (100) downward to act on the workpiece (400); Obtaining the acting force F of the tool assembly (100) on the workpiece (400), the gravity m1g of the workpiece (400), and the gravity m2g of the carrier (210); Making the voice coil motor (221) output an adjustable acting force Fx upward to the carrier (210) so that the actual punching force F0 of the micro-needle (120) on the workpiece (400) remains constant.

5. The micro-hole processing method according to claim 4, characterized in that The "making the adjustable acting force Fx be output upward to the carrier (210) so that the actual punching force F0 of the micro-needle (120) on the workpiece (400) remains constant" includes: The voice coil motor (221) obtains the resultant force F+(m1 + m2)g received by the carrier (210), where F refers to the acting force of the tool assembly (100) on the workpiece (400), m1 is the mass of the workpiece (400), and m2 is the mass of the carrier (210); The acting force Fx output by the voice coil motor (221) satisfies: Fx≥F+(m1 + m2)g; Adjusting the acting force Fx output by the voice coil motor (221) so that the actual punching force F0 = F-(Fx-(m1 + m2)g) of the micro-needle (120) on the workpiece (400) remains constant.

6. The micro-hole machining method according to claim 5, characterized in that: Set the output threshold of the voice coil motor (221) as Fxmax; when the acting force output by the voice coil motor (221) satisfies: Fx = Fxmax < F + (m1 + m2)g: Move the carrier (210) downward along with the movable part (2211) of the voice coil motor (221), and feedback through the voice coil motor (221) to the tool assembly (100) to reduce the feed rate of the tool assembly (100).

7. The micro-hole processing method according to claim 6, characterized in that, During the process of "moving the carrier (210) downward along with the movable part (2211) of the voice coil motor (221)", make Fx = Fxmax; After the feed rate of the tool assembly (100) is adjusted, the voice coil motor (221) obtains the resultant force F + (m1 + m2)g received by the carrier (210), and re-adjusts the acting force Fx output by the voice coil motor (221) to keep the actual punching force F0 of the micro-needle (120) on the workpiece (400) constant, where F0 = F - (Fx - (m1 + m2)g).

8. The micro-hole machining method according to claim 4, characterized in that: Obtain the initial height L0 when the micro-needle (120) descends to the surface of the workpiece (400); After drilling, obtain the height Lx when the micro-needle (120) descends to the surface of the workpiece (400); If Lw - (L0 - Lx) < L, the micro-needle (120) needs to be replaced, where Lw is the initial length of the micro-needle (120) and L is the thickness of the workpiece (400).

9. A micro-hole machining system, characterized in that, Applied to the micro-hole machining method according to claim 4, including: An acquisition unit configured to acquire the resultant force F + (m1 + m2)g received by the carrier (210), where F is the acting force of the tool assembly (100) on the workpiece (400), m1 is the mass of the workpiece (400), and m2 is the mass of the carrier (210); A control unit configured to adjust the acting force Fx output by the voice coil motor (221) based on the resultant force F + (m1 + m2)g received by the carrier (210) to keep the actual punching force F0 of the micro-needle (120) on the workpiece (400) constant.

10. The micro-hole processing system according to claim 9, characterized in that, It further includes a feedback unit configured to: Set the output threshold of the voice coil motor (221) as Fxmax; when the acting force output by the voice coil motor (221) satisfies: Fx = Fxmax < F + (m1 + m2)g: move the carrier (210) downward along with the movable part (2211) of the voice coil motor (221), and feedback through the voice coil motor (221) to the tool assembly (100) to reduce the feed rate of the tool assembly (100).

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