Chip fixing device for low-light microscope

Abstract

The present invention discloses a chip fixing device for a low-light microscope, which relates to the technical field of low-light microscopes and includes a base. The base is constructed with an opening, the bottom of the opening is provided with light-transmitting glass, a plurality of connecting rods are circumferentially provided on the inner wall of the opening, a clamping block is provided at the end of the connecting rod, and a first elastic member is further connected to the connecting rod, the first elastic member is used to push the connecting rod to move toward the center of the opening, a first inclined surface is provided on the side wall of the clamping block, and the plurality of first inclined surfaces cooperate to form a receiving port. The chip to be tested is placed in the receiving port, and the chip is pressed toward the light-transmitting glass. Under the action of the first inclined surface, the connecting rod will slide outward, and the plurality of clamping blocks will gradually open until the chip is stuck between the plurality of clamping blocks. Under the action of the first elastic member, the plurality of clamping blocks will complete the clamping of the chip in the opening. The present invention can complete the clamping by simply pressing the chip into the receiving port, and can achieve rapid clamping of the chip.

Description

Technical Field

[0001] The present invention relates to the technical field of low-light microscopes, and in particular to a chip fixing device for low-light microscopes. Background Art

[0002] An emission microscope (EMMI) is a high-precision analytical device based on photon detection, primarily used to locate defects or failure points in semiconductor devices. EMMI utilizes applied voltage to induce electron-hole recombination or hot carrier emission at the defect site (wavelength range 350-1700 nm). Highly sensitive detectors (such as InGaAs or CCD) capture these weak light signals, locating hot spots.

[0003] Currently, Chinese patent publication number CN203249874U discloses a backside microscopic microscope device comprising a package having an opening with a light-transmitting glass disposed at the bottom of the opening. Furthermore, the package is provided with a chip-fixing device comprising a rubber head, a telescopic rod, and a control screw. The telescopic rod extends into the opening, and the control screw is turned to move the telescopic rod further into the opening, thereby driving the rubber head to clamp the chip in the opening.

[0004] However, the method of adjusting by controlling the screws is time-consuming and labor-intensive, and cannot achieve quick clamping of the chip. Summary of the Invention

[0005] The purpose of the present invention is to overcome the deficiencies of the prior art and provide a chip fixing device for a low-light microscope.

[0006] The object of the present invention is achieved through the following technical solutions:

[0007] A chip fixing device for a micro-light microscope includes a base, an opening is constructed on the base, a light-transmitting glass is provided at the bottom of the opening, a plurality of connecting rods are circumferentially provided on the inner wall of the opening, a clamping block is provided at the end of the connecting rod, and a first elastic member is further connected to the connecting rod, the first elastic member is used to push the connecting rod to move toward one side of the center of the opening, a first inclined surface is provided on the side wall of the clamping block, and a plurality of the first inclined surfaces cooperate to form a receiving port whose diameter gradually expands from the bottom to the top.

[0008] Preferably, the light-transmitting glass is movably arranged in the vertical direction, and the base is further provided with a driving mechanism for driving the light-transmitting glass to move.

[0009] Preferably, a cleaning rod is rotatably provided on the bottom surface of the connecting rod, and a second elastic member is also connected to the cleaning rod, and the second elastic member is used to push the cleaning rod to abut against the light-transmitting glass; when the driving mechanism drives the light-transmitting glass to move away from one side of the clamping block, the cleaning rod is pushed to the cleaning position, and at this time the cleaning rod is driven to rotate and can sweep between the clamping block and the light-transmitting glass.

[0010] Preferably, a third elastic member is connected between the light-transmitting glass and the base, the driving mechanism includes a magnetic adsorption device, a magnetic block is provided on the light-transmitting glass, and the magnetic adsorption device can attract or release the magnetic block.

[0011] Preferably, the length of the cleaning rod is adapted so that when the first elastic member is in a natural state, the cleaning rod can rotate so that its end portion passes over the virtual centers of several of the clamping blocks.

[0012] Preferably, a motor for driving the cleaning rod to rotate is provided on the connecting rod.

[0013] Preferably, a connecting column is provided on the cleaning rod, a driving sleeve is provided on the bottom surface of the connecting rod, the connecting column is sleeved on the driving sleeve, and a spline structure is adapted between the connecting column and the driving sleeve.

[0014] Preferably, the connecting rod is a hollow structure, and a driving rod is provided in the sliding cavity of the connecting rod, the driving rod extends into the inner cavity of the connecting rod, the driving shaft of the cleaning rod extends into the inner cavity of the connecting rod, and a gear is also provided on the driving shaft of the cleaning rod, and a rack portion is provided on the side wall of the driving rod. As the connecting rod slides outward, the driving rod and the connecting rod move relative to each other, thereby driving the rack portion to engage with the gear; a torsion spring is also connected to the driving shaft of the cleaning rod, and the torsion spring is used to keep the cleaning rod away from the initial posture of the receiving port.

[0015] Preferably, in the circumferential direction, the rack portion on the driving rod at the rear end is closer to the respective gears than the corresponding rack portion on the driving rod at the front end.

[0016] Preferably, a connecting port is constructed on the first inclined surface, and an air nozzle is slidably adapted in the clamping block, and the air nozzle is opposite to the connecting port. The driving rod extends into the clamping block, and a second inclined surface is provided at the end of the driving rod, and a third inclined surface is provided on the end of the air nozzle away from the connecting port, and the third inclined surface is adapted to the second inclined surface. As the driving rod and the connecting rod move relative to each other, the driving rod pushes the air nozzle to slide from top to bottom under the cooperation of the third inclined surface and the second inclined surface, and the air nozzle is connected to an air source.

[0017] The beneficial effects of the present invention are:

[0018] 1. Place the chip to be tested into the receiving port and press it toward the light-transmitting glass. The first inclined surface causes the connecting rod to slide outward, and the clamping blocks gradually open until the chip is trapped between them. The first elastic member then forces the clamping blocks to clamp the chip within the opening. Compared to existing technologies, this invention achieves quick clamping by simply pressing the chip into the receiving port.

[0019] 2. The light-transmitting glass can be moved vertically, so that a gap can be maintained between the light-transmitting glass and the clamping block when the chip is pressed into the receiving port, making it difficult for the clamping block to scratch the light-transmitting glass.

[0020] 3. A cleaning rod is provided on the connecting rod. The rotation of the cleaning rod can clean the light-transmitting glass, so that the chip is not easily disturbed by dust and other debris during detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural diagram of an embodiment;

[0022] Figure 2 for Figure 1 A magnified view of part A;

[0023] Figure 3 for Figure 1 A magnified view of part B;

[0024] Figure 4 The top view of the clamping block is a schematic diagram (the cleaning range of the cleaning rod is indicated by a dotted line).

[0025] Figure markings: 1. base; 2. opening; 3. light-transmitting glass; 4. connecting rod; 5. clamping block; 6. first elastic member; 7. first inclined surface; 8. receiving port; 9. driving mechanism; 10. cleaning rod; 11. second elastic member; 12. third elastic member; 13. magnetic adsorption device; 14. magnetic block; 15. connecting column; 16. driving sleeve; 17. driving rod; 18. gear; 19. rack portion; 20. connecting port; 21. air nozzle; 22. second inclined surface; 23. third inclined surface; 24. connecting groove; 25. connecting ear; 26. chip. DETAILED DESCRIPTION

[0026] The following will clearly and completely describe the technical solutions of the present invention in conjunction with the embodiments. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work shall fall within the scope of protection of the present invention.

[0027] like Figures 1 to 4 As shown, a chip fixture for a microscopic microscope includes a base 1 with an opening 2 formed therein. Translucent glass 3 is disposed at the bottom of the opening 2, forming an upwardly open concave shape. Several connecting rods 4 are circumferentially disposed on the inner wall of the opening 2, with a first elastic member 6 interposed between the connecting rods 4 and the base 1. The elastic force of the first elastic member 6 pushes the ends of the connecting rods 4 toward each other, and clamping blocks 5 are disposed at the ends of the connecting rods 4.

[0028] A first inclined surface 7 is specifically provided on the side wall of the clamping block 5 , and the first inclined surfaces 7 on several clamping blocks 5 cooperate to form a receiving opening 8 with a diameter gradually expanding from the bottom to the top.

[0029] To clamp the chip 26 to be tested, the chip 26 can be placed into the receiving port 8 and then further pressed into the opening 2. Under the action of the first inclined surface 7, the connecting rod 4 slides outward, and the clamping blocks 5 gradually open until the chip 26 is clamped between the clamping blocks 5. At this point, under the action of the first elastic member 6, the clamping blocks 5 completely clamp the chip 26 in the opening 2.

[0030] In some embodiments, the adapted transparent glass 3 is preferably movable vertically. For example, a drive mechanism 9 can be provided on the base 1 to drive the desired movement of the transparent glass 3. Where possible, the drive mechanism 9 can be a linear ejection device such as a pneumatic or electric cylinder (not shown). In particular, when the chip 26 is not yet inserted into or has just been inserted into the receiving port 8, the drive mechanism 9 can drive the transparent glass 3 away from the clamping block 5, creating a gap between the transparent glass 3 and the clamping block 5. This prevents relative friction between the clamping block 5 and the transparent glass 3 during the subsequent insertion of the chip 26 into the opening 2, making the transparent glass 3 less susceptible to scratches.

[0031] like Figure 1 、 Figure 3 As shown, in a possible example, a third elastic member 12 may be connected between the light-transmitting glass 3 and the base 1, and a magnetic block 14 may also be provided on the light-transmitting glass 3. The driving mechanism 9 may include a magnetic attraction device 13, such as an electromagnet. When the electromagnet is energized, the magnetic block 14 is attracted toward the magnetic attraction device 13, at which point the third elastic member 12 is compressed, forming a gap between the clamping block 5 and the light-transmitting glass 3. When the electromagnet is de-energized, the third elastic member 12 returns to its natural state, pushing the light-transmitting glass 3 out again, eliminating the aforementioned gap. At this point, the sidewalls of the chip 26 are fully laterally clamped by the clamping block 5, and are less likely to be left hanging.

[0032] For example, a connection groove 24 may be formed at the bottom of the opening 2, and a connection ear 25 may be provided on the side wall of the light-transmitting glass 3. The connection ear 25 is inserted into the connection groove 24, and the magnetic attraction device 13 is disposed in the connection groove 24, and the magnetic block 14 may be correspondingly disposed on the connection ear 25. On the one hand, the connection ear 25 and the connection groove 24 can form a sliding guide for the light-transmitting glass 3, making its sliding state more stable. On the other hand, the arrangement of the magnetic attraction device 13 and the magnetic block 14 in the connection groove 24 is unlikely to cause obstruction of the detection area of ​​the light-transmitting glass 3 used for light transmission.

[0033] like Figure 1 、 Figure 2 As shown, in a preferred embodiment, a cleaning rod 10 is rotatably provided on the bottom surface of the connecting rod 4, and a second elastic member 11 is further connected to the cleaning rod 10. Under the elastic force of the second elastic member 11, the cleaning rod 10 will abut against the light-transmitting glass 3. For example, bristles may be further provided on the bottom surface of the cleaning rod 10, and the bristles will abut against the light-transmitting glass 3.

[0034] When the light-transmitting glass 3 is braked to a side away from the clamping block 5 and the aforementioned gap is formed, the cleaning rod 10 is pushed to the cleaning position by the second elastic member 11. At this time, as viewed from a vertical cross-section, the cleaning rod 10 is located between the clamping block 5 and the light-transmitting glass 3. It can be imagined that at this time, the cleaning rod 10 is controlled to rotate, and the cleaning rod 10 will sweep between the clamping block 5 and the light-transmitting glass 3, especially the area of ​​the light-transmitting glass 3 below the chip 26, so that the chip 26 is less likely to be disturbed by dust and other debris during inspection.

[0035] For example, the rotational power of the cleaning rod 10 can be provided by a motor (not shown). In a specific example, a connecting post 15 can be provided on the cleaning rod 10, and a drive sleeve 16 can be provided on the bottom surface of the connecting rod 4. The connecting post 15 is sleeved on the drive sleeve 16, and a spline structure is adapted between the two. The second elastic member 11 can preferably be disposed within the drive sleeve 16. The motor can be disposed on the connecting rod 4, and its output rod is attached to the drive sleeve 16. It can be understood that in this case, the drive sleeve 16 constitutes the drive shaft of the cleaning rod 10. The rotation of the drive sleeve 16 is transmitted to the connecting post 15 via the spline structure, ultimately achieving the rotational drive of the cleaning rod 10.

[0036] A photoelectric or camera-type sensor (not shown) may preferably be provided on the base 1. The sensor senses the insertion of the chip 26 into the receiving port 8 and then synchronously controls the motor to rotate, allowing the cleaning rod 10 to clean the area of ​​the light-transmitting glass 3 below the chip 26. The motor preferably drives the cleaning rod 10 in a full rotation, so that when the cleaning action stops, the cleaning rod 10 can maintain its initial position away from the receiving port 8. For example, the cleaning rod 10 can be vertically aligned with the connecting rod 4, thereby ensuring that the cleaning rod 10 is not easily caught between the chip 26 and the light-transmitting glass 3.

[0037] like Figure 1 、 Figure 2 、 Figure 4 As shown, in a preferred example, the length of the cleaning rod 10 is adapted to meet the following conditions:

[0038] When the first elastic member 6 is in the natural state, the cleaning rod 10 can rotate so that its end portion passes over the virtual centers of the clamping blocks 5 .

[0039] It can be understood that after several cleaning rods 10 have completed the rotational cleaning, the cleaning areas of the several cleaning rods 10 will overlap, and it is less likely that there will be a cleaning blind spot, and the dust removal effect of the light-transmitting glass 3 is guaranteed.

[0040] In other embodiments, the connecting rod 4 may preferably be constructed as a hollow structure, and a driving rod 17 is further provided in the sliding cavity of the connecting rod 4, and the driving rod 17 extends into the inner cavity of the connecting rod 4. In addition, the driving shaft of the cleaning rod 10 also extends into the inner cavity of the connecting rod 4, and a gear 18 is further provided on the driving shaft of the cleaning rod 10. A rack portion 19 is provided on the side wall of the driving rod 17. In the process of pressing the chip 26 into the receiving port 8, as the connecting rod 4 slides outward (that is, the connecting rod 4 slides further into its sliding cavity), the driving rod 17 and the connecting rod 4 will move relative to each other, and at this time the rack portion 19 will engage with the gear 18, thereby driving the driving shaft of the cleaning rod 10 to rotate, thereby realizing the rotational drive of the cleaning rod 10.

[0041] In addition, a torsion spring (not shown) can be connected to the driving shaft of the cleaning rod 10. As the driving rod 17 and the connecting rod 4 continue to move relative to each other, the rack portion 19 will be staggered with the gear 18. At this time, no matter where the cleaning rod 10 is adapted to rotate, under the action of the torsion spring, the cleaning rod 10 will maintain its initial posture away from the receiving port 8.

[0042] For example, it is preferred that the cleaning rod 10 rotates nearly a full circle under the cooperation of the rack portion 19 and the gear 18, and then under the action of the torsion spring, the cleaning rod 10 can rotate in the opposite direction to complete another cleaning stroke.

[0043] In a preferred embodiment, multiple racks 19 are provided along the axial direction of the drive rod 17. Furthermore, from a circumferential perspective, the racks 19 on the rear end of the drive rod 17 are closer to their respective gears 18 than the racks 19 on the front end. It can be imagined that while the corresponding drive rods 17 and connecting rods 4 will move in unison as the chip 26 is pressed into the receiving port 8, the axial positions of the corresponding racks 19 on the drive rod 17 are different. This allows the multiple cleaning rods 10 to rotate and clean sequentially along the circumference, making it less likely that the cleaning rods 10 will collide with each other and interfere with each other.

[0044] Figure 4 The figure shows the cleaning positions of different cleaning rods 10. It can be seen that under the same moving distance of the clamping block 5, the circumferential rotation angles of different cleaning rods 10 are different, so it is not easy for them to collide with each other.

[0045] like Figure 1 、 Figure 2As shown, the first inclined surface 7 may also be preferably configured with a connection port 20, and the clamping block 5 may also be slidably adapted to be provided with an air nozzle 21 opposite to the connection port 20. The drive rod 17 is preferably adapted to extend into the clamping block 5, and the end of the drive rod 17 is provided with a second inclined surface 22, and the end of the air nozzle 21 facing away from the connection port 20 is provided with a third inclined surface 23. The second inclined surface 22 and the third inclined surface 23 have matching slopes. In addition, the air nozzle 21 may also be preferably connected to an air source such as an air pump. Through the cooperation of the second inclined surface 22 and the third inclined surface 23, the present disclosure may have the following usage process:

[0046] The chip 26 to be tested is pressed into the receiving port 8, and the clamping blocks 5 are opened to each other, and the chip 26 to be tested gradually tends to be stuck between the clamping blocks 5. During this period, the connecting rod 4 will slide further into its sliding cavity, and the driving rod 17 will move relative to the connecting rod 4. At this time, through the engagement of the rack portion 19 and the gear 18, the cleaning rod 10 will continuously rotate and clean. At the same time, the driving rod 17 will push the air nozzle 21 to slide from the top to the bottom, which enables the air nozzle 21 to always follow the bottom surface of the chip 26 and descend synchronously. The airflow ejected from the air nozzle 21 will blow off the dust adhering to the bottom surface of the chip 26, and the cleaning rod 10 can just sweep out the fallen dust.

[0047] Through the above process, after the chip 26 is clamped, dust is not easily adhered to the bottom surface of the chip 26 and the top surface of the light-transmitting glass 3, so that subsequent detection is not easily disturbed.

[0048] In a specific example, the gas source may preferably be an airbag (not shown) disposed within the clamping block 5. The drive rod 17 compresses the airbag as it moves relative to the clamping block 5, causing the gas within the airbag to be ejected from the air nozzle 21 via a pipeline. Furthermore, a pressure sensor (not shown) may be provided on the clamping surface of the clamping block 5 to monitor the engagement of the chip 26. This pressure sensor can then control, for example, the braking of the magnetic attraction device 13, thereby securing the transparent glass 3 to the clamping block 5, as the relative movement of the clamping block 5 has ceased.

[0049] The above definitions of top, bottom, up and down do not limit the absolute positional relationship, especially for low-light microscope detection, which is divided into front detection and back detection according to the characteristics of the chip. Therefore, the top, bottom, up and down disclosed in this invention can be inverted.

[0050] In addition, the transmission principle of the first inclined plane, the second inclined plane and the third inclined plane is the wedge block transmission principle in the prior art. The specific slope adaptation and selection of the three should be known to those skilled in the art. Figure 1-3The three positions are shown schematically and do not represent the actual slope and adaptation method. Furthermore, the air nozzle 21 may be connected to a return spring (not shown) to return the air nozzle 21 to its initial top position after the clamping block 5 returns to its original position.

[0051] The foregoing description is merely a preferred embodiment of the present invention. It should be understood that the present invention is not limited to the form disclosed herein and should not be construed as excluding other embodiments. Rather, the present invention can be used in various other combinations, modifications, and environments and can be modified within the scope of the concept described herein through the above teachings or techniques or knowledge in the relevant field. Modifications and variations made by those skilled in the art that do not depart from the spirit and scope of the present invention are intended to be protected by the appended claims.

Claims

1. A chip fixing device for a micro-light microscope, comprising a base (1), an opening (2) being formed on the base (1), and a light-transmitting glass (3) being provided at the bottom of the opening (2), wherein: A plurality of connecting rods (4) are provided on the inner wall of the opening (2) along the circumferential direction, a clamping block (5) is provided at the end of the connecting rod (4), and a first elastic member (6) is also connected to the connecting rod (4), the first elastic member (6) is used to push the connecting rod (4) to move toward the center of the opening (2), a first inclined surface (7) is provided on the side wall of the clamping block (5), and a plurality of the first inclined surfaces (7) cooperate to form a receiving port (8) whose diameter gradually expands from the bottom to the top; The light-transmitting glass (3) is arranged to be movable in the vertical direction, and a driving mechanism (9) for driving the light-transmitting glass (3) to move is also arranged on the base (1); A cleaning rod (10) is rotatably provided on the bottom surface of the connecting rod (4), and a second elastic member (11) is also connected to the cleaning rod (10), and the second elastic member (11) is used to push the cleaning rod (10) to abut against the light-transmitting glass (3); When the driving mechanism (9) drives the light-transmitting glass (3) to move away from one side of the clamping block (5), the cleaning rod (10) is pushed to a cleaning position. At this time, the cleaning rod (10) is driven to rotate and can sweep between the clamping block (5) and the light-transmitting glass (3).

2. The chip fixing device for a micro-light microscope according to claim 1, wherein: A third elastic member (12) is connected between the light-transmitting glass (3) and the base (1); the driving mechanism (9) includes a magnetic adsorption device (13); a magnetic block (14) is provided on the light-transmitting glass (3); and the magnetic adsorption device (13) is capable of attracting or releasing the magnetic block (14).

3. The chip fixing device for a micro-light microscope according to claim 1, wherein: The length of the cleaning rod (10) is adapted to: When the first elastic member (6) is in a natural state, the cleaning rod (10) can rotate so that its end portion passes over the virtual centers of several of the clamping blocks (5).

4. The chip fixing device for a micro-light microscope according to claim 1, wherein: The connecting rod (4) is provided with a motor for driving the cleaning rod (10) to rotate.

5. The chip fixing device for a micro-light microscope according to claim 1 or 4, characterized in that: The cleaning rod (10) is provided with a connecting column (15), and a driving sleeve (16) is provided on the bottom surface of the connecting rod (4). The connecting column (15) is sleeved on the driving sleeve (16), and a spline structure is adapted between the connecting column (15) and the driving sleeve (16).

6. The chip fixing device for a micro-light microscope according to claim 1, wherein: The connecting rod (4) is a hollow structure, and a driving rod (17) is provided in the sliding cavity of the connecting rod (4), the driving rod (17) extends into the inner cavity of the connecting rod (4), the driving shaft of the cleaning rod (10) extends into the inner cavity of the connecting rod (4), and a gear (18) is also provided on the driving shaft of the cleaning rod (10), and a rack portion (19) is provided on the side wall of the driving rod (17). As the connecting rod (4) slides outward, the driving rod (17) and the connecting rod (4) move relative to each other, thereby driving the rack portion (19) to engage with the gear (18); A torsion spring is also connected to the driving shaft of the cleaning rod (10), and the torsion spring is used to maintain the initial posture of the cleaning rod (10) away from the receiving port (8).

7. The chip fixing device for a micro-light microscope according to claim 6, wherein: In the circumferential direction, the rack portion (19) on the drive rod (17) at the rear end is closer to the respective gears (18) than the corresponding rack portion (19) on the drive rod (17) at the front end.

8. The chip fixing device for a micro-light microscope according to claim 6 or 7, characterized in that: A connecting port (20) is constructed on the first inclined surface (7), and an air nozzle (21) is slidably adapted in the clamping block (5), and the air nozzle (21) is opposite to the connecting port (20). The driving rod (17) extends into the clamping block (5), and a second inclined surface (22) is provided at the end of the driving rod (17). A third inclined surface (23) is provided on the end of the air nozzle (21) away from the connecting port (20), and the third inclined surface (23) is adapted to the second inclined surface (22). As the driving rod (17) and the connecting rod (4) move relative to each other, the driving rod (17) pushes the air nozzle (21) to slide from top to bottom under the cooperation of the third inclined surface (23) and the second inclined surface (22), and the air nozzle (21) is connected to an air source, and a return spring is also connected to the air nozzle (21).

Images