Microscope and electron microscope system control method

Abstract

The invention discloses a microscope and an electron microscope system control method, the microscope comprises a base, a lens support and a lens, the base is fixedly provided with at least two carrier mounting holes, the distances between the at least two carrier mounting holes and the lens support are different, and the carrier mounting holes are used for mounting carriers of different specifications, so that the carriers are perpendicular to the optical axis of the lens. According to the embodiment of the invention, at least two carrying platform mounting holes are fixedly arranged on the base of the microscope, and the distances between different carrying platform mounting holes and the lens bracket are different, so that the carrying platforms of different specifications can be conveniently and quickly mounted, and in addition, the positions of the carrying platform mounting holes are fixed, so that the carrying platforms can be directly mounted according to the specifications of the carrying platforms. The objective table is installed in alignment with the matched objective table installation hole, so that the optical axis of the lens is perpendicular to the objective table, repeated calibration is not needed, the use efficiency of the microscope is improved, and overall consumed time is saved.

Description

Technical Field

[0001] This application relates to the technical field of microscopes, and in particular, to a control method for a microscope and an electron microscope system. Background Art

[0002] During the use of a microscope, when the objects to be observed are different, the sizes of the stages required often vary. Once the stage needs to be replaced, it is often necessary to manually adjust the lens position and the stage position. Such an adjustment method is time-consuming and laborious and often requires multiple calibrations. Summary of the Invention

[0003] Embodiments of this application provide a control method for a microscope and an electron microscope system to solve the problems that it is difficult to accurately and time-consuming and laborious to manually adjust the lens position and the stage position when replacing the stage.

[0004] In a first aspect, this application provides a microscope, including a base, a lens holder, and a lens. Among them, at least two stage mounting holes are fixedly arranged on the base, and the distances between at least two stage mounting holes and the lens holder are different, which are used to mount stages of different specifications so that the stage is perpendicular to the optical axis of the lens.

[0005] In the embodiments of this application, at least two stage mounting holes are fixedly arranged on the base of the microscope, and the distances between different stage mounting holes and the lens holder are different, so that stages of different specifications can be conveniently and quickly installed. In addition, since the positions of the stage mounting holes are fixed, the stage can be directly installed by aligning with the matching stage mounting hole according to the specification of the stage, making the optical axis of the lens perpendicular to the stage, without multiple calibrations, thereby improving the use efficiency of the microscope and saving the overall time consumption.

[0006] Optionally, the stage includes at least one electric stage, and the stage mounting hole clamps and fixes the electric stage to the base. Based on this, the microscope provided by the embodiments of this application can be compatible with electric stages. With the high-precision planar displacement control of the electric stage, higher observation accuracy can be provided. Moreover, by fixing the electric stage in a clamping manner, the replacement of the electric stage can be supported, so that the stage specification suitable for the observation target can be selected according to the requirements.

[0007] Optionally, the at least two stage mounting holes include a first stage mounting hole and a second stage mounting hole; the first stage mounting hole includes: a first reference plane vertically nested on the base, a second reference plane vertically joined to the first reference plane, and a first interface of the base located in the middle of the second reference plane; the second stage mounting hole includes: a third reference plane vertically nested on the base, a fourth reference plane vertically joined to the third reference plane, and a second interface of the base located in the middle of the fourth reference plane.

[0008] Based on this, the stage mounting holes can cooperate with the stage mounting parts on the stage to achieve snap-fitting and fixing of the stage on the base. The settings of the first base interface and the second base interface can be electrically connected to the stage interface of the electric stage to supply power for the drive of the electric stage, enabling the electric stage to be used after being snap-fitted to the base without the need for additional wiring and power supply for the electric stage, which facilitates the use of the electric stage.

[0009] Optionally, the electric stage includes a stage mounting part, and the stage mounting part includes: a stage interface that matches the first base interface or the second base interface, a first stage reference surface that fits the shape of the first reference surface or the second reference surface, a second stage reference surface that is vertically joined to the first stage reference surface, and a third stage reference surface where the stage interface is located, wherein the third stage reference surface is parallel to the second stage reference surface.

[0010] Based on this, the stage mounting holes can cooperate with the stage mounting parts on the stage to achieve snap-fitting and fixing of the stage on the base. Taking the stage mounting part being arranged in the first stage mounting hole as an example, the first stage reference surface fits the shape of the first reference surface, so that the stage mounting part can vertically extend into the base, and the second stage reference surface is vertically joined to the first stage reference surface. After the stage mounting part vertically extends into the base, the second stage reference surface can fit the second reference surface of the base, providing a vertically upward supporting force for the stage, ensuring the stable installation of the stage, and making the upper surface of the stage perpendicular to the lens optical axis. When the upper surface of the stage is translated, the microscope observation area on the upper surface of the stage is always at the lens focal position, avoiding frequent focusing when the stage moves and making the use of the microscope more convenient. In addition, the third stage reference surface where the stage interface is located is parallel to the second stage reference surface. When the stage interface is connected to the first base interface, the third stage reference surface is also parallel to the second reference surface of the base, thus avoiding interference between the stage interface and the second reference surface of the base during connection, and ensuring the reliability of the connection between the stage interface and the first base interface.

[0011] Optionally, there is at least one stage positioning hole at the top of the first reference surface of the first stage mounting hole, and at least one stage positioning hole at the top of the third reference surface of the second stage mounting hole; stage positioning pins are formed on the first stage reference surface; the stage mounting part is used to install the electric stage into the first stage mounting hole or the second stage mounting hole, and snap the stage positioning pins into the stage positioning holes, so that the electric stage is fully constrained and fixed to the base at a specified height, and the stage interface and the first base interface or the second base interface are assembled and snap-fitted through step screws.

[0012] Based on this, by setting a stage positioning hole on the stage mounting hole, it is ensured that the stage can be quickly positioned, reducing the manual adjustment interface alignment time between the stage interface and the base interface when replacing the stage, realizing the quick assembly of the stage. Moreover, after the stage positioning pin is inserted into the stage positioning hole, the stage can be fully constrained and fixed to the base at a specified height, ensuring the stability of the stage installation. In addition, the stage interface is assembled and clamped with the base first interface or the base second interface through a stepped screw, so that the stage interface can have a certain amount of movement, avoiding over-constraint, and thus ensuring that the stage interface can be connected to the base first interface or the base second interface.

[0013] Optionally, the top chamfer of the stage positioning hole is in a horn shape, used to guide the stage angle of the stage positioning pin when the stage positioning pin is inserted into or pulled out of the stage positioning hole. Based on this, the top chamfer of the stage positioning hole is in a horn shape, so that when installing the stage, the stage positioning pin does not need to be strictly aligned with the stage positioning hole, and the stage positioning pin can be conveniently guided into the stage positioning hole by means of the horn-shaped chamfer, thereby improving the installation efficiency of the stage.

[0014] Optionally, the microscope is an electron microscope, and the electron microscope further includes a main board. The base first interface or the base second interface is electrically connected to the main board, and the installation directions of the base first interface and the base second interface have anti-fooling settings.

[0015] Based on this, the base first interface or the base second interface is electrically connected to the main board, so that the electric stage installed on it can be powered through the base first interface or the base second interface, and the electric stage can be used after being clamped and fixed to the base, without the need for additional wiring and power supply for the electric stage, which is convenient for the use of the electric stage. In addition, the microscope can be compatible with various specifications of electric stages. Different electric stages have different operating parameters. Through the anti-fooling settings of the installation directions of the base first interface and the base second interface, it can be ensured that different specifications of electric stages are correctly installed in the corresponding stage mounting hole positions, so as to ensure that the electric stage can be normally driven.

[0016] Optionally, after the main board determines that there is an electric stage electrically connected to the base first interface or the base second interface through the stage interface, it identifies the specification of the electric stage, obtains the corresponding stage travel according to the identified specification, operates the stage according to the stage travel, and records the coordinates where the center of the field of view of the lens is located; after the main board determines that there is no electric stage electrically connected to all the stage mounting holes, it starts the manual stage mode.

[0017] Based on this, the microscope provided in this application can be compatible with stages of both manual and electric drive modes. Moreover, for the electric stage, it can automatically identify different electric stage specifications, and according to the identified electric stage specifications, drive the stage according to the corresponding stage travel, so as to ensure that different specifications of electric stages can be automatically identified and normally driven, realizing the compatibility of multiple stages.

[0018] Optionally, the specifications of the electric stage include a small stage of 40*40mm and a large stage of 200*100mm. Based on this, the stage specification suitable for the observation target can be selected according to the requirements. Specifically, for an observation target with high requirements for observation accuracy, a 40*40mm small stage is selected. The travel of this small stage is smaller than that of the large stage, and its motion accuracy is higher than that of the large stage. Using the small stage for observation can meet the high-precision observation requirements; for an observation target with lower requirements for observation accuracy, it can be replaced with a 200*100mm large stage. The travel of this large stage is greater than that of the small stage, and it can quickly adjust the observation area of the microscope, thus meeting the requirements of rapid detection.

[0019] In a second aspect, this application also provides a control method for an electron microscope system. The electron microscope system includes a main board, a base, and an electric stage. At least two stage mounting holes are provided on the base, and the main board determines whether there is an electric stage electrically connected in at least two stage mounting holes:

[0020] If the main board determines that there is an electric stage electrically connected in any one of the stage mounting holes, identify the specification of the electric stage, obtain the corresponding stage travel according to the identified specification, operate the electric stage according to the stage travel, and record the coordinates where the center of the field of view of the lens is located;

[0021] If the main board determines that there is no electric stage electrically connected in all the stage mounting holes, then start the manual stage mode.

[0022] Based on this, at least 2 stage mounting holes are fixedly provided on the microscope base provided in this application, so that stages of different specifications can be quickly installed conveniently, and stages of both manual and electric drive modes can be compatible. For the electric stage, the microscope provided in this application can automatically identify different electric stage specifications, and according to the identified electric stage specifications, drive the stage according to the corresponding stage travel, so as to ensure that different specifications of electric stages can be automatically identified and normally driven, realizing the compatibility of multiple stages. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Schematic diagram of a microscope provided by an embodiment of this application;

[0024] Figure 2 Schematic diagram of a stage mounting hole provided by an embodiment of this application;

[0025] Figure 3 Schematic diagram of the stage mounting part provided by an embodiment of the present application;

[0026] Figure 4 Schematic diagram of the stage positioning hole provided by an embodiment of the present application;

[0027] Figure 5 Schematic diagram of the bottom of the stage provided by an embodiment of the present application;

[0028] Figure 6 is Figure 5 Schematic cross-sectional view along the A-A section shown in.

[0029] Reference numerals: base 11, first stage mounting hole 111, first reference plane 101, second reference plane 102, first interface 1111 of the base, second stage mounting hole 112, third reference plane 103, fourth reference plane 104, second interface 1121 of the base, stage positioning hole 113, lens bracket 12, lens 13, electric stage 14, stage mounting part 141, stage interface 1411, step screw 1411a, first reference plane 201 of the stage, second reference plane 202 of the stage, third reference plane 203 of the stage, stage positioning pin 1412. Detailed implementation manners

[0030] The following will describe the present application in detail in conjunction with the specific implementation manners shown in the drawings. However, these implementation manners do not limit the present application, and any structural, method, or functional transformation made by those of ordinary skill in the art based on these implementation manners is included in the protection scope of the present application.

[0031] The purpose of the present application is to solve the problem that it is difficult to accurately adjust the positions of the lens 13 and the stage manually and it is time-consuming and laborious when replacing the stage of a microscope.

[0032] Based on the above purpose, in a first aspect, the present application provides a microscope. The microscope includes: a base 11, a lens bracket 12, and a lens 13. Among them, at least two stage mounting holes are fixedly provided on the base 11, and the distances between the at least two stage mounting holes and the lens bracket 12 are different, for installing stages of different specifications, so that the stage is perpendicular to the optical axis of the lens 13.

[0033] As Figure 1 shown, it shows a schematic diagram of a microscope provided by an embodiment of the present application. Figure 1 defines the up-down, front-back, and left-right orientation relationships of the microscope. To facilitate the description of the microscope provided by the embodiments of the present application, it is assumed below that the microscope is placed on a horizontal plane. Then, the up-down direction of the microscope is perpendicular to the horizontal plane, and the up-down direction, left-right direction, and front-back direction of the microscope are perpendicular to each other in pairs.

[0034] As shown Figure 1 in the figure, the lens holder 12 of the microscope is connected to the base 11. The lens holder 12 includes a lens 13 adjustment mechanism for mounting the lens 13. The optical axis of the lens 13 is perpendicular to the horizontal plane, and the lens 13 adjustment mechanism can adjust the height of the lens 13 in the vertical direction. Two stage mounting holes are provided on the base 11, and the two stage mounting holes are configured such that after the stage is mounted on the base 11 through the stage mounting holes, the upper surface of the stage is perpendicular to the optical axis of the lens 13, so that there is no need for multiple calibrations after mounting the stage, thereby improving the use efficiency of the microscope and saving the overall time consumption.

[0035] As shown Figure 1 in the figure, in the embodiment of the present application, the two stage mounting holes are arranged in the left - right direction of the microscope, so that stages of different specifications can be quickly installed. In another alternative implementation, the two stage mounting holes can be arranged in a first direction, and the first direction forms a certain angle with the left - right direction of the microscope, and the angle between the first direction and the left - right direction of the microscope is less than 90°. In this way, the distances between different stage mounting holes and the lens holder 12 can also be different, facilitating the quick installation of stages of different specifications.

[0036] In another alternative implementation, the number of stage mounting holes can be three or more, so that the microscope can be compatible with more specifications of stages.

[0037] As an alternative implementation, the stage includes at least one electric stage 14, and the stage mounting hole clamps and fixes the electric stage 14 to the base 11. Specifically, the stage mounting hole on the base 11 matches the stage mounting portion 141 at the bottom of the electric stage 14, so that the electric stage 14 can be arranged on the base 11, realizing the compatibility between the microscope and the electric stage 14. Compared with a manually controlled stage, the electric stage 14 can provide a higher horizontal plane displacement control accuracy, realize the precise positioning of the target observation area, facilitate the observation of the microscope, and improve the observation efficiency. Moreover, by fixing the electric stage 14 in a clamping manner, the replacement of the electric stage 14 can be supported, so that the stage specifications suitable for the observation target can be selected according to requirements.

[0038] As an alternative implementation, the at least two stage mounting holes include a first stage mounting hole 111 and a second stage mounting hole 112; the first stage mounting hole 111 includes: a first reference plane 101 vertically nested on the base 11, a second reference plane 102 vertically joined to the first reference plane 101, and a base first interface 1111 located in the middle of the second reference plane 102; the second stage mounting hole 112 includes: a third reference plane 103 vertically nested on the base 11, a fourth reference plane 104 vertically joined to the third reference plane 103, and a base second interface 1121 located in the middle of the fourth reference plane 104.

[0039] Specifically, as Figure 2 shown, it shows a schematic diagram of the first stage mounting hole 111 and the second stage mounting hole 112. For the first stage mounting hole 111, the first reference plane 101 is in the shape of a circular cylinder, and the axis of the cylinder is perpendicular to the horizontal plane, so that the first reference plane 101 is vertically nested on the base 11. The second reference plane 102 is located at the top of the first reference plane 101 and is vertically joined to the first reference plane 101. Based on this, the stage mounting hole can cooperate with the stage mounting portion 141 on the stage (the specific cooperation method will be described later), realizing the clamping and fixing of the stage on the base 11, and facilitating the upper surface of the stage to be perpendicular to the optical axis of the lens 13 after the stage is mounted on the base 11, so that it is not necessary to calibrate and focus multiple times during the process of driving the stage to translate, improving the use efficiency of the microscope.

[0040] In addition, the first base interface 1111 is disposed at the bottom of the first stage mounting hole 111 and is surrounded by the first reference plane 101. For the convenience of description, the projection of the first base interface 1111 on the second reference plane 102 in the vertical direction is defined as the first projection, and the projection of the first reference plane 101 on the second reference plane 102 in the vertical direction is defined as the second projection. The first projection is located in the central area of the second projection. Compared with the way of eccentrically disposing the first base interface 1111 at the bottom of the first stage mounting hole 111, the way provided by the embodiment of the present application of disposing the first base interface 1111 in the central area at the bottom of the first stage mounting hole 111 can be conducive to the electrical connection between the stage interface 1411 on the stage and the first base interface 1111, improving the assembly efficiency of the stage.

[0041] For the second stage mounting hole 112, the settings of the third reference plane 103, the fourth reference plane 104, and the second base interface 1121 are basically the same as those of the first stage mounting hole 111, and will not be described in detail here.

[0042] As an optional implementation manner, the electric stage 14 includes a stage mounting portion 141. The stage mounting portion 141 includes: a stage interface 1411 that matches the first base interface 1111 or the second base interface 1121, a first stage reference plane 201 that fits the shape of the first reference plane 101 or the second reference plane 102, a second stage reference plane 202 that is vertically joined to the first stage reference plane 201, and a third stage reference plane 203 where the stage interface 1411 is located, wherein the third stage reference plane 203 is parallel to the second stage reference plane 202.

[0043] Specifically, as Figure 3As shown, it shows a schematic diagram of the stage mounting portion 141 provided by an embodiment of the present application. Taking the stage mounting portion 141 matching the first stage mounting hole 111 as an example, the first reference plane 201 of the stage is in the shape of the outer wall of a cylinder, and the outer diameter of the cylinder is basically equal to the inner diameter of the first reference plane 101, so that the shape of the first reference plane 101 fits the first reference plane 201 of the stage. A circular protrusion is formed on the top of the first reference plane 101, and the lower surface of the circular protrusion serves as the second reference plane 202 of the stage that is vertically joined to the first reference plane 201 of the stage. When the stage mounting portion 141 is engaged with the first stage mounting hole 111, the first reference plane 201 of the stage mounting portion 141 extends into the first stage mounting hole 111 and fits with the first reference plane 201 of the stage. After the first reference plane 201 of the stage extends to a specified depth, the second reference plane 202 of the stage will abut against the second reference plane 102 of the base 11. Since the first reference plane 101 of the base 11 is vertically nested with the base 11, it can be ensured that after the stage is mounted, the upper surface of the stage is perpendicular to the optical axis of the lens 13. When the upper surface of the stage is translated, the microscopic observation area on the upper surface of the stage is always at the focal position of the lens 13, avoiding frequent focusing when the stage moves and making the use of the microscope more convenient.

[0044] Define the cross-section at the end of the stage interface 1411 as the third reference plane 203 of the stage where the stage interface 1411 is located. The third reference plane 203 of the stage is arranged parallel to the second reference plane 202 of the stage. In this way, when the stage interface 1411 is connected to the first interface 1111 of the base, the third reference plane 203 of the stage is also parallel to the second reference plane 102 of the base 11, so as to avoid interference between the stage interface 1411 and the second reference plane 102 of the base 11 during connection, thereby ensuring the reliability of the connection between the stage interface 1411 and the first interface 1111 of the base.

[0045] As an alternative implementation, there is at least one stage positioning hole 113 at the top of the first reference plane 101 of the first stage mounting hole 111, and at least one stage positioning hole 113 at the top of the third reference plane 103 of the second stage mounting hole 112; a stage positioning pin 1412 is formed on the first reference plane 201 of the stage; the stage mounting portion 141 is used to install the electric stage 14 into the first stage mounting hole 111 or the second stage mounting hole 112, and the stage positioning pin 1412 is snapped into the stage positioning hole 113, so that the electric stage 14 is fully constrained and fixed to the base 11 at a specified height.

[0046] Specifically, in combination with Figure 2 and Figure 3 , taking the first stage mounting hole 111 as an example (the structure of the second stage mounting hole 112 is similar to that of the first stage mounting hole 111 and will not be described in detail), as Figure 2As shown, there is at least one stage positioning hole 113 at the top of the first reference plane 101 of the first stage mounting hole 111. As Figure 3 shown, a stage positioning pin 1412 is formed on the first reference plane 201 of the stage. By matching the stage positioning hole 113 of the base 11 with the stage positioning pin 1412 of the stage, rapid positioning of the stage can be achieved, reducing the manual adjustment interface alignment time between the stage interface 1411 and the base 11 interface during stage installation, and realizing rapid assembly of the stage. Moreover, after the stage positioning pin 1412 is snapped into the stage positioning hole 113, the stage can be fully constrained and fixed to the base 11 at a specified height, ensuring the stability of stage installation.

[0047] As an optional implementation manner, the installation directions of the first base interface 1111 and the second base interface 1121 have anti-fooling settings.

[0048] Specifically, in combination with Figure 2 and Figure 3 , in the embodiment of the present application, the first base 11 interface and the second base 11 interface are in a T-like shape. As Figure 2 shown, the base 11 interface includes a first part extending in the front-back direction and a second part extending in the left-right direction, where the second part intersects with the middle region of the first part. For the first base 11 interface, the second part points to the stage positioning hole 113, while for the second base 11 interface, the second part points away from the stage positioning hole 113. Due to the constraint of the stage positioning hole 113 and the stage positioning pin 1412, the stage can only be snapped into the stage positioning hole 113 in a fixed direction. Therefore, if the directions between the stage interface 1411 and the base 11 interface are opposite, the installation of the stage cannot be achieved, achieving the effect of anti-fooling settings and avoiding incorrect assembly of the stage. In another optional implementation manner, the second parts of the first base 11 interface and the second base 11 interface point to different orientations respectively, which can also achieve the effect of anti-fooling settings.

[0049] As an optional implementation manner, as Figure 4 shown, the top chamfer of the stage positioning hole 113 is in a trumpet shape, used to guide the stage angle of the stage positioning pin 1412 when the stage positioning pin 1412 is snapped into or pulled out of the stage positioning hole 113. Based on this, the top chamfer of the stage positioning hole 113 is in a trumpet shape, so that when installing the stage, the stage positioning pin 1412 does not need to be strictly aligned with the stage positioning hole 113, and the stage positioning pin 1412 can be conveniently introduced into the stage positioning hole 113 by means of the trumpet-shaped chamfer, thereby improving the installation efficiency of the stage.

[0050] As an optional implementation manner, the stage interface 1411 is assembled and snapped with the first base interface 1111 or the second base interface 1121 through a stepped screw 1411a.

[0051] Specifically, in combination with Figure 5 and Figure 6 , the stage interface 1411 includes a stage interface 1411 assembly part for assembling the stepped screw 1411a. The stepped screw 1411a passes through the stage interface 1411 assembly part and is threadedly connected to the bottom of the stage. The thickness of the stage interface 1411 assembly part is less than the screw segment of the stepped screw 1411a, so that the stage interface 1411 can have a certain amount of movement. Since the stage and the base 11 are fully constrained and fixed, in the embodiment of the present application, the stage interface 1411 is assembled by the stepped screw 1411a, so that the stage interface 1411 has a certain amount of movement, avoiding the situation of over-constraint, and thus ensuring that the stage interface 1411 can be connected to the base first interface 1111 or the base second interface 1121.

[0052] As an alternative implementation, the microscope provided in the embodiment of the present application is an electron microscope, and the electron microscope further includes a main board. The base first interface 1111 or the base second interface 1121 is electrically connected to the main board. Based on this, the base first interface 1111 or the base second interface 1121 is electrically connected to the main board, so that the electric stage 14 installed thereon can be powered through the base first interface 1111 or the base second interface 1121. After the electric stage 14 is clamped and fixed to the base 11, it can be used without additional wiring and power supply for the electric stage 14, which is convenient for the use of the electric stage 14.

[0053] As an alternative implementation, after the main board determines that there is an electric stage 14 electrically connected through the stage interface 1411 on the base first interface 1111 or the base second interface 1121, it identifies the specification of the electric stage 14, obtains the corresponding stage travel according to the identified specification, and operates the stage according to the stage travel; after the main board determines that there is no electric stage 14 electrically connected to all the stage mounting holes, it starts the manual stage mode.

[0054] Specifically, assume that the base first interface 1111 is closer to the lens holder 12 than the base second interface 1121. If the main board determines that there is an electric stage 14 electrically connected through the stage interface 1411 on the base first interface 1111, considering the distance limitation between the base 11 interface and the lens holder 12, the main board drives the electric stage to operate with a smaller stroke to avoid interference between the electric stage and the lens holder 12; if the main board determines that there is an electric stage 14 electrically connected through the stage interface 1411 on the base second interface 1121, since the base second interface 1121 is farther from the lens holder 12, the main board can drive the electric stage to operate with a relatively larger stroke. Exemplarily, when driving the electric stage, the electric stage can move on the horizontal position simultaneously or separately on the X-axis and Y-axis according to the instructions of the host to reach the position specified by the host. Whenever the electric stage reaches a position, the coordinates of the center of the field of view of the lens can be recorded.

[0055] Exemplarily, when driving the electric stage, the electric stage can translate in a zigzag or S shape on a horizontal plane, so that the microscope can observe different observation areas of the stage.

[0056] If the main board determines that no electric stage 14 is electrically connected to all the stage mounting holes, it starts the manual stage mode and realizes the movement of the stage by manual driving.

[0057] Based on this, the microscope provided by this application can be compatible with stages driven by both manual and electric methods. Moreover, for the electric stage 14, it can automatically identify different specifications of the electric stage 14, and according to the identified specifications of the electric stage 14, drive the stage according to the corresponding stage travel, so as to ensure that different specifications of the electric stage 14 can be automatically identified and normally driven, achieving the compatibility of multiple stages.

[0058] As an optional implementation manner, the specifications of the electric stage 14 include a small stage of 40*40 mm and a large stage of 200*100 mm. Based on this, the stage specifications suitable for the observation target can be selected according to the requirements. Specifically, for an observation target with high requirements for observation accuracy, a small stage of 40*40 mm is selected. The travel of this small stage is smaller than that of the large stage, and its motion accuracy is higher than that of the large stage. Using the small stage for observation can meet the high-precision observation requirements; for an observation target with low requirements for observation accuracy, it can be replaced with a large stage of 200*100 mm. The travel of this large stage is larger than that of the small stage, and it can quickly adjust the observation area of the microscope, thus meeting the requirements of rapid detection.

[0059] In a second aspect, this application also provides a control method for an electron microscope system. The electron microscope system includes a main board, a base 11, and an electric stage 14. At least two stage mounting holes are provided on the base 11. The main board determines whether an electric stage 14 is electrically connected to at least two stage mounting holes:

[0060] If the main board determines that an electric stage 14 is electrically connected to any one of the stage mounting holes, it identifies the specification of the electric stage 14, obtains the corresponding stage travel according to the identified specification, and operates the electric stage 14 according to the stage travel;

[0061] If the main board determines that no electric stage 14 is electrically connected to all the stage mounting holes, it starts the manual stage mode.

[0062] Specifically, assume that the first stage mounting hole 111 is closer to the lens holder 12 than the second stage mounting hole 112. If the main board determines that there is an electrical connection with the electric stage 14 on the first stage mounting hole 111, considering the distance limitation between the interface of the base 11 and the lens holder 12, the main board drives the electric stage to operate with a smaller stroke to avoid interference between the electric stage and the lens holder 12. If the main board determines that there is an electrical connection with the electric stage 14 on the second stage mounting hole 112, since the second stage mounting hole 112 is farther from the lens holder 12, the main board can drive the electric stage to operate with a relatively larger stroke.

[0063] Exemplarily, the electric stage can move on the horizontal plane simultaneously or separately along the X-axis and the Y-axis according to the instructions of the host computer to reach the position specified by the host computer. Whenever the electric stage reaches a position, the coordinates of the center of the field of view of the lens can be recorded.

[0064] Exemplarily, when driving the electric stage, the electric stage can translate in a zigzag or S-shaped pattern on the horizontal plane, so that the microscope can observe different observation areas of the stage.

[0065] Based on this, at least two stage mounting holes are fixedly arranged on the microscope base 11 provided in the present application, so that stages of different specifications can be quickly installed conveniently, and stages with two driving methods, manual and electric, can be compatible. For the electric stage 14, the microscope provided in the present application can automatically identify the specifications of different electric stages 14, and drive the stage according to the identified specifications of the electric stage 14 and the corresponding stage stroke, so as to ensure that different specifications of electric stages 14 can be automatically identified and normally driven, realizing the compatibility of multiple stages.

[0066] In the above embodiments, it can be implemented in whole or in part by software, hardware, firmware, or any combination thereof. When implemented using software, it can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the processes or functions described in the embodiments of the present application are generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions can be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center by wire (such as coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (such as infrared, wireless, microwave, etc.). The computer-readable storage medium can be any available medium that can be accessed by a computer or a data storage device such as a server or a data center that includes one or more integrated available media. The available medium can be a magnetic medium (such as a floppy disk, a hard disk, a magnetic tape), an optical medium (such as a DVD), or a solid-state disk (SSD), etc.

[0067] It should be noted that in this document, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including", or any other variation thereof is intended to cover non-exclusive inclusion, so that a process, method, article, or device including a series of elements includes not only those elements but also other elements not explicitly listed, or also includes elements inherent to such process, method, article, or device. Without further limitation, an element defined by the statement "including a..." does not exclude the existence of additional identical elements in the process, method, article, or device including the element.

[0068] Each embodiment in this specification is described in a related manner. For the same or similar parts among the embodiments, reference can be made to each other. Each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the description of the method embodiment. The above is only the preferred embodiment of the present application and is not used to limit the protection scope of the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application are included in the protection scope of the present application.

Claims

1. A microscope, characterized in that, Comprising: a base (11), a lens holder (12) and a lens (13); At least two stage mounting holes are fixedly arranged on the base (11), The distances between the at least two stage mounting holes and the lens holder (12) are different, and are used for mounting stages (14) of different specifications, so that the stage (14) is perpendicular to the optical axis of the lens (13).

2. The microscope according to claim 1, wherein The stage (14) includes at least one electric stage, and the stage mounting hole snap-fits and fixes the electric stage to the base (11).

3. The microscope according to claim 2, characterized in that, The at least two stage mounting holes include a first stage mounting hole (111) and a second stage mounting hole (112); The first stage mounting hole (111) includes: a first reference plane (101) vertically nested on the base (11), a second reference plane (102) vertically joined to the first reference plane (101), and a base first interface (1111) located in the middle of the second reference plane (102); The second stage mounting hole (112) includes a third reference plane (103) vertically nested on the base (11), a fourth reference plane (104) vertically joined to the third reference plane (103), and a base second interface (1121) located in the middle of the fourth reference plane (104).

4. The microscope according to claim 3, characterized in that, The electric stage includes: a stage mounting portion (141), The stage mounting portion (141) includes: a stage interface (1411) matching the base first interface (1111) or the base second interface (1121), a stage first reference plane (201) conforming to the shape of the first reference plane (101) or the third reference plane (103), a stage second reference plane (202) vertically joined to the stage first reference plane (201), and a stage third reference plane (203) where the stage interface (1411) is located, wherein, the stage third reference plane (203) is parallel to the stage second reference plane (202).

5. The microscope according to claim 4, characterized in that, At least one stage positioning hole is provided at the top of the first reference plane (101) of the first stage mounting hole (111), and at least one stage positioning hole is provided at the top of the third reference plane (103) of the second stage mounting hole (112); A stage positioning pin (1412) is formed on the stage first reference plane (201); The stage mounting portion (141) is used to install the electric stage into the first stage mounting hole (111) or the second stage mounting hole (112), snap the stage positioning pin (1412) into the stage positioning hole, so that the electric stage is fully constrained and fixed to the base (11) at a specified height, and the stage interface (1411) and the base first interface (1111) or the base second interface (1121) are assembled and snap-connected by a step screw.

6. The microscope according to claim 5, wherein, The top chamfer of the stage positioning hole is in a horn shape, so as to guide the stage angle of the stage positioning pin (1412) when the stage positioning pin (1412) is snapped into or pulled out of the stage positioning hole.

7. The microscope according to claim 4, characterized in that, The microscope is an electron microscope, The electron microscope further includes a main board, and the first interface (1111) of the base or the second interface (1121) of the base is electrically connected to the main board; the installation directions of the first interface (1111) of the base and the second interface (1121) of the base have anti-fooling settings.

8. The microscope according to claim 7, wherein, After the main board determines that there is an electric stage electrically connected through the stage interface (1411) on the first interface (1111) of the base or the second interface (1121) of the base, it identifies the specification of the electric stage, obtains the corresponding stage travel according to the identified specification, operates the stage according to the stage travel, and records the coordinates of the center of the field of view of the lens; After the main board determines that there is no electric stage electrically connected to all the stage mounting holes, it starts the manual stage mode.

9. The microscope according to claim 8, characterized in that, The specifications of the electric stage include: A small stage of 40*40mm and a large stage of 200*100mm.

10. A control method for an electron microscope system, characterized in that, The electron microscope system includes a main board, a base (11), and an electric stage. At least two stage mounting holes are provided on the base, and the main board determines whether there is an electric stage electrically connected to any of the at least two stage mounting holes: If the main board determines that there is an electric stage electrically connected to any one of the stage mounting holes, it identifies the specification of the electric stage, obtains the corresponding stage travel according to the identified specification, operates the electric stage according to the stage travel, and records the coordinates of the center of the field of view of the lens; If the main board determines that there is no electric stage electrically connected to all the stage mounting holes, it starts the manual stage mode.

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