Blue film wafer expanding device and use method thereof

Abstract

The invention discloses a blue film wafer expanding device and a using method thereof, and relates to the technical field of blue film wafer expanding, the blue film wafer expanding device comprises a supporting box, a machine door, a control button, a supporting table and a clamping stabilizing mechanism, the machine door is installed on the outer wall of the supporting box, the control button is installed on the outer wall of the supporting box, and the supporting table is installed on the inner wall of the supporting box; a clamping stabilizing mechanism is installed on the inner wall of the supporting box, a seventh sliding rod is installed on the top of the supporting table, and a seventh sliding ring is installed on the outer wall of the seventh sliding rod. An eighth sliding ring moves to enable a seventh clamping head to move out of a seventh clamping cylinder, at the moment, a pull rod is pulled to drive a pressing table to move, the pressing table moves to move away from a supporting table, a blue film is placed on the surface of the supporting table, and at the moment, the pull rod is pressed downwards to drive the pressing table to press the blue film on the surface of the supporting table; at the moment, a seventh servo motor rotates reversely to enable a seventh clamping head to be clamped into a seventh clamping cylinder to fix a pressing table, and the function of stably fixing the blue film of the blue film wafer expanding device and improving the wafer expanding stability of the blue film is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of blue film expansion technology, and specifically to a blue film expansion device and a method for using the same. Background Art

[0002] In the semiconductor manufacturing process, wafer cutting is a key step. As a special adhesive film with high adhesion and low residual glue properties, the blue film is widely used in the wafer cutting and handling processes to fix and protect the wafer. The blue film can firmly fix the wafer on the cutting table, prevent the wafer from being damaged due to vibration or movement, and at the same time keep the cut chips neatly arranged, avoiding chip dropping or misalignment. The blue film also has important applications in life science research. It is a polymer material made of polystyrene microspheres as the base material. However, the blue film of the existing blue film expansion device cannot be stably fixed, reducing the stability of blue film expansion.

[0003] The defects of the existing blue film expansion devices are as follows: 1. Patent document CN214898378U discloses a chip blue film expansion auxiliary device, "including a main frame, a limiting ring, an electric control suction cup, and an induced draft fan. The upper surface of the main frame is fixedly provided with an expansion plate, and the upper surface of the main frame is fixedly provided with a support ring surrounding the expansion plate. The support ring penetrates through the main frame and is hermetically connected with symmetric air inlet pipes. An induced draft fan is fixedly provided in the air inlet pipes. Air inlets are fixedly provided on both sides of the main frame at the fan blades of the induced draft fan. A first motor is fixedly provided on one side of the upper surface of the main frame. The first motor is connected with a first rotating shaft, the first rotating shaft is connected with a limiting ring, the limiting ring is provided with a second motor, the second motor is connected with a second rotating shaft, and the second rotating shaft is connected with an electric control suction cup through a connecting frame. The present utility model can provide air cooling for temperature reduction during the expansion process, improve the working efficiency, and can take out and convey it after the expansion is completed, eliminating the manual steps and improving the safety, and is suitable for popularization", but the blue film of the existing blue film expansion device cannot be stably fixed, reducing the stability of blue film expansion; 2. Patent document CN109920746B discloses a fully automatic die bonder, "including a blue film loading manipulator, a paper tearing device, an outer ring loading device, an inner ring loading device, a die bonding device, a blanking manipulator, and a control system. The paper tearing device is arranged in front of the die bonding device, the blue film loading manipulator is arranged above the paper tearing device, the inner ring loading device and the outer ring loading device are arranged on one side of the die bonding device, the blanking device is arranged behind the die bonding device, and the blue film loading manipulator, the film tearing device, the outer ring loading device, the inner ring loading device, the die bonding device, and the blanking manipulator are all electrically connected to the control system. In the present invention, by electrically connecting the blue film loading manipulator, the paper tearing device, the outer ring loading device, the inner ring loading device, the die bonding device, and the blanking manipulator to the control system, automatic dust paper tearing, automatic loading of the blue film, outer ring, and inner ring, automatic film expansion, waste film removal, and automatic blanking of finished products can be achieved, improving production efficiency, reducing labor costs, and meeting mass production requirements", but the air bubbles between the blue film and the wafer of the existing blue film die bonding device cannot be quickly scraped off, reducing the quality of blue film die bonding; 3. Patent document CN117855090A discloses a film expanding device and a film expanding method, "including a base, a film expanding ring, a lifting assembly, and a pressing ring assembly. The film expanding ring and the lifting assembly are both fixedly installed on the base, and the outer diameter of the film expanding ring is smaller than the inner diameter of the crystal ring; the pressing ring assembly includes a pressing ring, the pressing ring is connected to the lifting assembly, the inner diameter of the pressing ring is larger than the outer diameter of the film expanding ring and is coaxially arranged with the film expanding ring; the pressing ring is provided with a suction cup, and the suction cup can adsorb the ring body of the crystal ring; the lifting assembly can drive the pressing ring assembly to rise or fall along the axial direction of the film expanding ring and the pressing ring. This film expanding device can expand the blue film, and after the film expansion is completed, the crystal ring can be directly taken away by a manipulator or other devices to immediately start the film expansion of the next crystal ring, so the efficiency of the entire film expansion process can be improved; in addition, this film expanding device can be easily processed and assembled", but the height of the existing blue film die bonding device cannot be automatically adjusted when scraping the air bubbles between the blue film and the wafer, reducing the working stability; 4. Patent document CN214542140U discloses a blue film removing device, "including an expanding area for expanding the wafer to be demolded before demolding; a demolding area including a suction cup, and the wafer to be demolded is placed on the suction cup. A plurality of vacuum suction holes are opened on the suction cup, and an external air source evacuates the vacuum suction holes to adsorb the blue film side of the wafer to be demolded on the suction cup. A heating element for heating the wafer to be demolded is arranged along the circumference of the suction cup; a collecting area for placing and collecting the wafer after demolding the blue film in the demolding area; an xz-axis moving assembly is arranged between the expanding area, the demolding area, and the collecting area, and the xz-axis moving assembly is used to sequentially move the wafer to be demolded to the expanding area, the demolding area, and move the wafer after demolding the blue film to the collecting area. The utility model has the effect of facilitating blue film removal and avoiding damage to the wafer", but the blue film of the existing blue film die bonding device cannot be stably cut, reducing the efficiency of blue film die bonding. Summary of the Invention

[0004] The object of the present invention is to provide a blue film expanding device and its usage method, so as to solve the technical problem that the blue film of the blue film expanding device cannot be stably fixed, reducing the stability of blue film expansion in the above-mentioned background technology.

[0005] To achieve the above object, the present invention provides the following technical solution: A blue film expanding device, including a support box, a machine door, control buttons, a support table and a clamping and stabilizing mechanism. The outer wall of the support box is equipped with a machine door, the outer wall of the support box is equipped with control buttons, the inner wall of the support box is equipped with a support table, the inner wall of the support box is equipped with a clamping and stabilizing mechanism, the top of the support table is equipped with a seventh slide bar, the outer wall of the seventh slide bar is equipped with a seventh slide ring, the outer wall of the seventh slide ring is equipped with a pressing table, a seventh opening is opened on the outer wall of the pressing table, a pull rod is installed on the outer wall of the pressing table, an electric push head is installed on the inner wall of the support box, a defoaming component is installed on the top of the support table, the defoaming component is used to remove the bubbles between the blue film and the wafer, a jacking head is installed on the inner wall of the support box, and the output end of the jacking head penetrates the support table, and the output end of the jacking head is installed with a jacking table; The clamping and stabilizing mechanism includes an eighth slide bar, an eighth slide ring, a seventh clamping cylinder, a seventh clamping head, and a seventh servo motor. The eighth slide bar is located inside the support box, the eighth slide ring is located on the outer wall of the eighth slide bar, the seventh clamping cylinder is located on the outer wall of the seventh slide ring, the seventh clamping head is located on the outer wall of the eighth slide ring, the seventh servo motor is located inside the support box, a toothed rod is installed on the outer wall of the seventh clamping head, the output end of the seventh servo motor is installed with a gear, and the toothed rod meshes with the gear.

[0006] Preferably, the seventh clamping head is clamped into the seventh clamping cylinder, and the eighth slide ring moves through the support of the eighth slide bar.

[0007] Preferably, the defoaming component includes a sixth support platform, an electric push rod, a fourth box, a third servo motor, a third slide bar, a third slide ring, and a scraping and pressing head. The sixth support platform is located on the top of the support table, the electric push rod is located on the outer wall of the sixth support platform, the fourth box is located at the output end of the electric push rod, the third servo motor is located inside the fourth box, the output end of the third servo motor is installed with a threaded rod, a threaded sleeve is installed on the outer wall of the threaded rod, a third opening is opened at the bottom of the fourth box, the scraping and pressing head penetrates both ends of the third opening, the third slide bar is located inside the fourth box, the outer wall of the third slide bar is equipped with a third slide ring, and the outer wall of the scraping and pressing head is connected to the outer wall of the third slide ring, and the outer wall of the threaded sleeve is connected to the outer wall of the scraping and pressing head.

[0008] Preferably, the third slide ring moves through the support of the third slide bar, the scraping and pressing head moves through the third opening, and the scraping and pressing head is located above the pressing table.

[0009] Preferably, an automatic adjustment component is installed at the bottom of the fourth box. The automatic adjustment component includes an infrared height sensor and a processing module. The processing module is located on the inner wall of the support box, and the infrared height sensor is located at the bottom of the fourth box. The infrared height sensor is used to detect the real-time height data of the blue film. The processing module stores the appropriate height data of the blue film, and the appropriate height data is 1 mm to 5 mm.

[0010] Preferably, the real-time height data of the blue film is transmitted into the processing module. The processing module compares the real-time height data of the blue film with the appropriate height data of the blue film. When the real-time height data of the blue film is greater than the appropriate height data of the blue film, it is set as the high height state. When the real-time height data of the blue film is less than the appropriate height data of the blue film, it is set as the low height state. When the real-time height data of the blue film is within the appropriate height data of the blue film, it is set as the appropriate height state.

[0011] Preferably, a film pressing table is installed at the output end of the electric push head. A cutting component is installed through the inner wall of the film pressing table, and the cutting component is arranged around the bottom of the film pressing table for one week.

[0012] Preferably, the cutting component includes a fifth servo motor, a collecting wheel, an L-shaped frame, a fourth spring, a cutting head, and a fifth opening. The fifth servo motor is located on the inner wall of the film pressing table, the collecting wheel is located at the output end of the fifth servo motor, the L-shaped frame is located on the inner wall of the film pressing table, a sixth sliding ring is installed on the outer wall of the L-shaped frame, a cutting head is installed on the outer wall of the sixth sliding ring, a seventh platform is installed on the outer wall of the cutting head, a fourth spring is installed on the outer wall of the seventh platform, and one end of the fourth spring is connected to the outer wall of the L-shaped frame. A pulling rope is installed on the outer wall of the collecting wheel, and one end of the pulling rope is connected to the outer wall of the cutting head. The fifth opening is opened at the bottom of the film pressing table.

[0013] Preferably, the sixth sliding ring moves through the support of the L-shaped frame, and the cutting head moves through the fifth opening.

[0014] Preferably, the usage method of the blue film dicing device includes the following steps: Step S1: The seventh servo motor rotates to drive the rack to move. The movement of the rack drives the seventh chuck to move. The movement of the seventh chuck drives the eighth sliding ring to move. The movement of the eighth sliding ring causes the seventh chuck to move out of the seventh cartridge. At this time, pulling the pull rod drives the pressing table to move. The movement of the pressing table makes it move away from the support table. At this time, the blue film is placed on the surface of the support table. At this time, pressing down the pull rod drives the pressing table to press the blue film on the surface of the support table. At this time, the seventh servo motor rotates in reverse to make the seventh chuck snap into the seventh cartridge to fix the pressing table, realizing the function of stably fixing the blue film of the blue film dicing device and improving the stability of blue film dicing. Step S2: The function of the sixth support platform is to provide support for the electric push rod. The third servo motor rotates to drive the threaded rod to rotate. The rotation of the threaded rod drives the threaded sleeve to move. The movement of the threaded sleeve drives the scraping head to move. The movement of the scraping head drives the third slip ring to move. The movement of the third slip ring makes the scraping head move to a suitable height. At this time, the electric push rod moves to drive the fourth box to move. The movement of the fourth box makes the scraping head quickly scrape off the bubbles between the blue film and the wafer, realizing the function of quickly scraping off the bubbles between the blue film and the wafer of the blue film expansion device and improving the quality of blue film expansion; Step S3: When the processing module detects the state of too high height, the processing module controls the defoaming component to lower. After the defoaming component lowers, the infrared height sensor continuously detects the real-time height data of the blue film until the processing module detects the state of too low height or the state of suitable height. When the processing module detects the state of too low height, the processing module controls the defoaming component to lift. After the defoaming component lifts, the infrared height sensor continuously detects the real-time height data of the blue film until the processing module detects the state of too high height or the state of suitable height. When the processing module detects the state of suitable height, the processing module controls the defoaming component to stop. After the defoaming component stops, the infrared height sensor continuously detects the real-time height data of the blue film until the processing module detects the state of too high height or the state of too low height, realizing the function of automatically adjusting the height during the bubble scraping between the blue film and the wafer to improve the working stability; Step S4: The fifth servo motor rotates to drive the collecting wheel to rotate. The rotation of the collecting wheel drives the pull rope to move. The movement of the pull rope drives the cutting head to move. The movement of the cutting head drives the sixth slip ring to move. The movement of the sixth slip ring makes the cutting head drive the seventh platform to move. The movement of the seventh platform drives the fourth spring to move. At this time, the electric push head moves to drive the film pressing platform to move. The movement of the film pressing platform presses the blue film and the wafer together. After pressing, the fifth servo motor quickly reverses, and the elastic force of the fourth spring makes the cutting head contact the blue film and cut it, realizing the function of stably cutting the blue film of the blue film expansion device and improving the blue film expansion efficiency.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. In the present invention, the seventh servo motor is installed to rotate to drive the toothed rod to move. The movement of the toothed rod drives the seventh chuck to move. The movement of the seventh chuck drives the eighth slip ring to move. The movement of the eighth slip ring makes the seventh chuck move out of the seventh cartridge. At this time, the pull rod is pulled to drive the pressing platform to move. The movement of the pressing platform makes it move away from the support platform. At this time, the blue film is placed on the surface of the support platform. At this time, the pull rod is pressed down to drive the pressing platform to press the blue film on the surface of the support platform. At this time, the seventh servo motor reverses to make the seventh chuck snap into the seventh cartridge to fix the pressing platform, realizing the function of stably fixing the blue film of the blue film expansion device and improving the stability of blue film expansion; 2. The function of the sixth support platform installed in the present invention is to provide support for the electric push rod. The rotation of the third servo motor drives the rotation of the threaded rod. The rotation of the threaded rod drives the movement of the threaded sleeve. The movement of the threaded sleeve drives the movement of the scraping head. The movement of the scraping head drives the movement of the third slip ring. The movement of the third slip ring moves the scraping head to a suitable height. At this time, the movement of the electric push rod drives the movement of the fourth box. The movement of the fourth box enables the scraping head to quickly scrape off the bubbles between the blue film and the wafer, realizing the function of quickly scraping off the bubbles between the blue film and the wafer in the blue film expansion device and improving the quality of blue film expansion; 3. When the processing module installed in the present invention detects a state of too high height, the processing module controls the bubble removal component to lower. After the bubble removal component lowers, the infrared height sensor continuously detects the real-time height data of the blue film until the processing module detects a state of too low height or a state of suitable height. When the processing module detects a state of too low height, the processing module controls the bubble removal component to lift. After the bubble removal component lifts, the infrared height sensor continuously detects the real-time height data of the blue film until the processing module detects a state of too high height or a state of suitable height. When the processing module detects a state of suitable height, the processing module controls the bubble removal component to stop. After the bubble removal component stops, the infrared height sensor continuously detects the real-time height data of the blue film until the processing module detects a state of too high height or a state of too low height, realizing the function of automatically adjusting the height during the scraping of bubbles between the blue film and the wafer to improve the working stability; 4. The rotation of the fifth servo motor installed in the present invention drives the rotation of the collecting wheel. The rotation of the collecting wheel drives the movement of the pulling rope. The movement of the pulling rope drives the movement of the cutting head. The movement of the cutting head drives the movement of the sixth slip ring. The movement of the sixth slip ring enables the cutting head to drive the movement of the seventh table. The movement of the seventh table drives the movement of the fourth spring. At this time, the movement of the electric push head drives the movement of the film pressing table. The movement of the film pressing table presses and combines the blue film and the wafer. After pressing and combining, the fifth servo motor quickly reverses, and the elastic force of the fourth spring makes the cutting head contact the blue film and cut it, realizing the function of stably cutting the blue film in the blue film expansion device and improving the efficiency of blue film expansion. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a front view structural schematic diagram of the present invention; Figure 2 It is a front structural schematic diagram of the present invention; Figure 3 It is a structural schematic diagram of the seventh chuck of the present invention; Figure 4 For the present invention Figure 3 Structural schematic diagram of A; Figure 5 It is a structural schematic diagram of the scraping head of the present invention; Figure 6 It is a structural schematic diagram of the infrared height sensor of the present invention; Figure 7Schematic structural diagram of the height control process of the present invention; Figure 8 Schematic structural diagram of the cutting head of the present invention.

[0017] In the figure: 1, support box; 2, machine door; 3, control button; 5, support table; 7, jacking head; 8, electric push head; 9, film pressing table; 11, top table; 12, pressing table; 13, seventh port; 14, sixth support table; 15, seventh slide bar; 16, seventh slide ring; 17, eighth slide bar; 18, eighth slide ring; 19, seventh chuck; 20, seventh servo motor; 21, gear; 22, rack; 23, seventh cartridge; 24, pull rod; 25, fifth servo motor; 26, collecting wheel; 27, pull rope; 28, L-shaped frame; 29, sixth slide ring; 30, cutting head; 31, seventh table; 32, fourth spring; 33, fifth port; 34, electric push rod; 35, fourth box; 36, third slide bar; 37, third slide ring; 38, third servo motor; 39, threaded rod; 40, threaded sleeve; 41, third port; 42, scraping and pressing head; 43, infrared height sensor. Specific embodiments

[0018] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0019] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0020] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. Those of ordinary skill in the art can understand according to specific circumstances.

[0021] Embodiment 1: Please refer toFigure 1 , Figure 2 , Figure 3 and Figure 4 , an embodiment provided by the present invention: a blue film expanding device, including a support box 1, a machine door 2, control buttons 3, a support table 5 and a clamping and stabilizing mechanism. A machine door 2 is installed on the outer wall of the support box 1, control buttons 3 are installed on the outer wall of the support box 1, a support table 5 is installed on the inner wall of the support box 1, a clamping and stabilizing mechanism is installed on the inner wall of the support box 1. A seventh slide bar 15 is installed on the top of the support table 5, a seventh slide ring 16 is installed on the outer wall of the seventh slide bar 15, a pressing table 12 is installed on the outer wall of the seventh slide ring 16, a seventh port 13 is opened on the outer wall of the pressing table 12, a pull rod 24 is installed on the outer wall of the pressing table 12, an electric pusher 8 is installed on the inner wall of the support box 1, a defoaming component is installed on the top of the support table 5, and the defoaming component is used to remove the bubbles between the blue film and the wafer. A pushing head 7 is installed on the inner wall of the support box 1, and the output end of the pushing head 7 penetrates through the support table 5. The output end of the pushing head 7 is installed with a pushing table 11. The machine door 2 is used to place the blue film and the wafer on the surface of the support table 5. The control buttons 3 are used to control the start and stop of the blue film expanding device. The clamping and stabilizing mechanism includes a second slide bar 17, a second slide cylinder 18, a first clamping cylinder 23, a first clamping head 19, and a first motor 20. The second slide bar 17 is located on the inner wall of the support box 1, the second slide cylinder 18 is located on the outer wall of the second slide bar 17, the first clamping cylinder 23 is located on the outer wall of the first slide cylinder 16, the first clamping head 19 is located on the outer wall of the second slide cylinder 18, and the first motor 20 is located on the inner wall of the support box 1. A toothed rod 22 is installed on the outer wall of the first clamping head 19, a gear 21 is installed on the output end of the first motor 20, and the toothed rod 22 meshes with the gear 21. The first clamping head 19 is inserted into the first clamping cylinder 23. The second slide cylinder 18 moves through the support of the second slide bar 17. The first motor 20 rotates to drive the toothed rod 22 to move. The toothed rod 22 moves to drive the first clamping head 19 to move. The first clamping head 19 moves to drive the second slide cylinder 18 to move. The second slide cylinder 18 moves to make the first clamping head 19 move out of the first clamping cylinder 23. At this time, pulling the pull rod 24 drives the pressing plate 12 to move, and the pressing plate 12 moves to move away from the support table 5. At this time, the blue film is placed on the surface of the support table 5. At this time, pressing down the pull rod 24 drives the pressing plate 12 to press the blue film on the surface of the support table 5. At this time, the first motor 20 rotates in reverse to make the first clamping head 19 be inserted into the first clamping cylinder 23 to fix the pressing plate 12, realizing the function of stably fixing the blue film of the blue film expanding device and improving the stability of blue film expansion.

[0022] Example 2: Please refer to Figure 2 , Figure 3 , Figure 4 and Figure 5, an embodiment provided by the present invention: The defoaming component includes a sixth support plate 14, an electric push rod 34, a fourth box 35, a third motor 38, a third slide bar 36, a third slide cylinder 37, and a scraping head 42. The sixth support plate 14 is located at the top of the support table 5. The electric push rod 34 is located on the outer wall of the sixth support plate 14. The fourth box 35 is located at the output end of the electric push rod 34. The third motor 38 is located inside the fourth box 35. A threaded rod 39 is installed at the output end of the third motor 38. A threaded sleeve 40 is installed on the outer wall of the threaded rod 39. A third opening 41 is formed at the bottom of the fourth box 35. The scraping head 42 penetrates through both ends of the third opening 41. The third slide bar 36 is located inside the fourth box 35. A third slide cylinder 37 is installed on the outer wall of the third slide bar 36. The outer wall of the scraping head 42 is connected to the outer wall of the third slide cylinder 37. The outer wall of the threaded sleeve 40 is connected to the outer wall of the scraping head 42. The third slide cylinder 37 moves by the support of the third slide bar 36. The scraping head 42 moves through the third opening 41. The scraping head 42 is located above the pressing plate 12. The function of the sixth support plate 14 is to provide support for the electric push rod 34. The third motor 38 rotates to drive the threaded rod 39 to rotate. The threaded rod 39 rotates to drive the threaded sleeve 40 to move. The threaded sleeve 40 moves to drive the scraping head 42 to move. The scraping head 42 moves to drive the third slide cylinder 37 to move. The movement of the third slide cylinder 37 makes the scraping head 42 move to a suitable height. At this time, the electric push rod 34 moves to drive the fourth box 35 to move. The movement of the fourth box 35 enables the scraping head 42 to quickly scrape off the bubbles between the blue film and the wafer, realizing the function of quickly scraping off the bubbles between the blue film and the wafer in the blue film expansion device and improving the quality of blue film expansion.

[0023] Embodiment 3: Please refer to Figure 5 , Figure 6 and Figure 7, an embodiment provided by the present invention: An automatic adjustment component is installed at the bottom of the fourth box 35. The automatic adjustment component includes an infrared height sensor 43 and a processing module. The processing module is located on the inner wall of the support box 1, and the infrared height sensor 43 is located at the bottom of the fourth box 35. The infrared height sensor 43 is used to detect the real-time height data of the blue film. The processing module stores the appropriate height data of the blue film, and the appropriate height data is 1 mm to 5 mm. The real-time height data of the blue film is transmitted into the processing module. The processing module compares the real-time height data of the blue film with the appropriate height data of the blue film. When the real-time height data of the blue film is greater than the appropriate height data of the blue film, it is set as the state of too high height. When the real-time height data of the blue film is less than the appropriate height data of the blue film, it is set as the state of too low height. When the real-time height data of the blue film is within the appropriate height data of the blue film, it is set as the state of appropriate height. When the processing module detects the state of too high height, the processing module controls the defoaming component to lower. After the defoaming component lowers, the infrared height sensor 43 continuously detects the real-time height data of the blue film until the processing module detects the state of too low height or the state of appropriate height. When the processing module detects the state of too low height, the processing module controls the defoaming component to lift. After the defoaming component lifts, the infrared height sensor 43 continuously detects the real-time height data of the blue film until the processing module detects the state of too high height or the state of appropriate height. When the processing module detects the state of appropriate height, the processing module controls the defoaming component to stop. After the defoaming component stops, the infrared height sensor 43 continuously detects the real-time height data of the blue film until the processing module detects the state of too high height or the state of too low height.

[0024] Embodiment 4: Please refer to Figure 2 and Figure 8, an embodiment provided by the present invention: A pressure film plate 9 is installed at the output end of the electric pusher 8. A cutting assembly is installed through the inner wall of the pressure film plate 9. The cutting assembly is arranged around the bottom of the pressure film plate 9 for one week. The cutting assembly includes a fifth motor 25, a collecting wheel 26, an L-shaped frame 28, a fourth spring 32, a cutting head 30, and a fifth opening 33. The fifth motor 25 is located inside the pressure film plate 9. The collecting wheel 26 is located at the output end of the fifth motor 25. The L-shaped frame 28 is located inside the pressure film plate 9. A sixth sliding cylinder 29 is installed on the outer wall of the L-shaped frame 28. A cutting head 30 is installed on the outer wall of the sixth sliding cylinder 29. A first plate 31 is installed on the outer wall of the cutting head 30. A fourth spring 32 is installed on the outer wall of the first plate 31, and one end of the fourth spring 32 is connected to the outer wall of the L-shaped frame 28. A pulling rope 27 is installed on the outer wall of the collecting wheel 26, and one end of the pulling rope 27 is connected to the outer wall of the cutting head 30. The fifth opening 33 is opened at the bottom of the pressure film plate 9. The sixth sliding cylinder 29 moves through the support of the L-shaped frame 28. The cutting head 30 moves through the fifth opening 33. The fifth motor 25 rotates to drive the collecting wheel 26 to rotate. The collecting wheel 26 rotates to drive the pulling rope 27 to move. The pulling rope 27 moves to drive the cutting head 30 to move. The cutting head 30 moves to drive the sixth sliding cylinder 29 to move. The sixth sliding cylinder 29 moves to make the cutting head 30 drive the first plate 31 to move. The first plate 31 moves to drive the fourth spring 32 to move. At this time, the electric pusher 8 moves to drive the pressure film plate 9 to move. The pressure film plate 9 moves to press and bond the blue film and the wafer. After pressing, the fifth motor 25 quickly reverses, and the elastic force of the fourth spring 32 makes the cutting head 30 contact the blue film for cutting, realizing the function of stably cutting the blue film of the blue film expanding device and improving the blue film expanding efficiency.

[0025] The usage method of this blue film expanding device includes the following steps: Step S1: The seventh servo motor 20 rotates to drive the toothed rod 22 to move. The toothed rod 22 moves to drive the seventh chuck 19 to move. The seventh chuck 19 moves to drive the eighth sliding ring 18 to move. The eighth sliding ring 18 moves to make the seventh chuck 19 move out of the seventh cartridge 23. At this time, pull the pull rod 24 to drive the pressing table 12 to move. The pressing table 12 moves to move it away from the support table 5. At this time, place the blue film on the surface of the support table 5. At this time, press down the pull rod 24 to drive the pressing table 12 to press the blue film on the surface of the support table 5. At this time, the seventh servo motor 20 reverses to make the seventh chuck 19 snap into the seventh cartridge 23 to fix the pressing table 12, realizing the function of stably fixing the blue film of the blue film expanding device and improving the stability of blue film expansion; Step S2: The function of the sixth support platform 14 is to provide support for the electric push rod 34. The third servo motor 38 rotates to drive the threaded rod 39 to rotate. The rotation of the threaded rod 39 drives the movement of the threaded sleeve 40. The movement of the threaded sleeve 40 drives the movement of the scraping head 42. The movement of the scraping head 42 drives the movement of the third slip ring 37. The movement of the third slip ring 37 moves the scraping head 42 to an appropriate height. At this time, the electric push rod 34 moves to drive the fourth box 35 to move. The movement of the fourth box 35 enables the scraping head 42 to quickly scrape off the bubbles between the blue film and the wafer, realizing the function of quickly scraping off the bubbles between the blue film and the wafer of the blue film expansion device to improve the quality of blue film expansion; Step S3: When the processing module detects the state of too high height, the processing module controls the defoaming component to lower. After the defoaming component lowers, the infrared height sensor 43 continuously detects the real-time height data of the blue film until the processing module detects the state of too low height or the state of appropriate height. When the processing module detects the state of too low height, the processing module controls the defoaming component to lift. After the defoaming component lifts, the infrared height sensor 43 continuously detects the real-time height data of the blue film until the processing module detects the state of too high height or the state of appropriate height. When the processing module detects the state of appropriate height, the processing module controls the defoaming component to stop. After the defoaming component stops, the infrared height sensor 43 continuously detects the real-time height data of the blue film until the processing module detects the state of too high height or the state of too low height, realizing the function of automatically adjusting the height during the bubble scraping between the blue film and the wafer to improve the working stability; Step S4: The fifth servo motor 25 rotates to drive the collection wheel 26 to rotate. The rotation of the collection wheel 26 drives the movement of the pulling rope 27. The movement of the pulling rope 27 drives the movement of the cutting head 30. The movement of the cutting head 30 drives the movement of the sixth slip ring 29. The movement of the sixth slip ring 29 enables the cutting head 30 to drive the seventh platform 31 to move. The movement of the seventh platform 31 drives the movement of the fourth spring 32. At this time, the electric push head 8 moves to drive the film pressing platform 9 to move. The movement of the film pressing platform 9 presses and combines the blue film and the wafer. After the pressing and combination, the fifth servo motor 25 quickly reverses, and the elastic force of the fourth spring 32 makes the cutting head 30 contact the blue film to cut it, realizing the function of stable cutting of the blue film of the blue film expansion device to improve the blue film expansion efficiency.

[0026] Working principle: The seventh servo motor 20 rotates to drive the rack 22 to move. The movement of the rack 22 drives the seventh chuck 19 to move. The movement of the seventh chuck 19 drives the eighth slip ring 18 to move. The movement of the eighth slip ring 18 causes the seventh chuck 19 to move out of the seventh cartridge 23. At this time, the pull rod 24 is pulled to drive the pressing table 12 to move. The movement of the pressing table 12 causes it to move away from the support table 5. At this time, the blue film is placed on the surface of the support table 5. Then, the pull rod 24 is pressed down to drive the pressing table 12 to press the blue film on the surface of the support table 5. At this time, the seventh servo motor 20 rotates in reverse to make the seventh chuck 19 snap into the seventh cartridge 23 to fix the pressing table 12, realizing the function of stably fixing the blue film of the blue film expanding device and improving the stability of blue film expansion. The function of the sixth support platform 14 is to provide support for the electric push rod 34. The third servo motor 38 rotates to drive the threaded rod 39 to rotate. The rotation of the threaded rod 39 drives the threaded sleeve 40 to move. The movement of the threaded sleeve 40 drives the scraping and pressing head 42 to move. The movement of the scraping and pressing head 42 drives the third slip ring 37 to move. The movement of the third slip ring 37 makes the scraping and pressing head 42 move to a suitable height. At this time, the electric push rod 34 moves to drive the fourth box 35 to move. The movement of the fourth box 35 makes the scraping and pressing head 42 quickly scrape off the bubbles between the blue film and the wafer, realizing the function of quickly scraping off the bubbles between the blue film and the wafer of the blue film expanding device and improving the quality of blue film expansion. When the processing module detects a state of too high height, the processing module controls the defoaming component to lower. After the defoaming component lowers, the infrared height sensor 43 continuously detects the real-time height data of the blue film until the processing module detects a state of too low height or a suitable height state. When the processing module detects a state of too low height, the processing module controls the defoaming component to lift. After the defoaming component lifts, the infrared height sensor 43 continuously detects the real-time height data of the blue film until the processing module detects a state of too high height or a suitable height state. When the processing module detects a suitable height state, the processing module controls the defoaming component to stop. After the defoaming component stops, the infrared height sensor 43 continuously detects the real-time height data of the blue film until the processing module detects a state of too high height or too low height, realizing the function of automatically adjusting the height when scraping off the bubbles between the blue film and the wafer and improving the working stability. The fifth servo motor 25 rotates to drive the collecting wheel 26 to rotate. The rotation of the collecting wheel 26 drives the pull rope 27 to move. The movement of the pull rope 27 drives the cutting head 30 to move. The movement of the cutting head 30 drives the sixth slip ring 29 to move. The movement of the sixth slip ring 29 makes the cutting head 30 drive the seventh table 31 to move. The movement of the seventh table 31 drives the fourth spring 32 to move. At this time, the electric push head 8 moves to drive the film pressing table 9 to move. The movement of the film pressing table 9 presses the blue film and the wafer together. After pressing, the fifth servo motor 25 quickly rotates in reverse, and the elastic force of the fourth spring 32 makes the cutting head 30 contact the blue film to cut it, realizing the function of stably cutting the blue film of the blue film expanding device and improving the efficiency of blue film expansion.

[0027] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above-described exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, in any aspect, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be embraced within the present invention. Any reference signs in the claims should not be construed as limiting the claims involved.

Claims

1. A blue film expanding device, comprising a support box (1), a machine door (2), control buttons (3), a support table (5) and a clamping and stabilizing mechanism, characterized in that: An organic door (2) is installed on the outer wall of the support box (1), a control button (3) is installed on the outer wall of the support box (1), a support platform (5) is installed on the inner wall of the support box (1), a clamping and stabilizing mechanism is installed on the inner wall of the support box (1), a seventh sliding rod (15) is installed on the top of the support platform (5), a seventh sliding ring (16) is installed on the outer wall of the seventh sliding rod (15), a pressing platform (12) is installed on the outer wall of the seventh sliding ring (16), a seventh opening (13) is formed on the outer wall of the pressing platform (12), a pull rod (24) is installed on the outer wall of the pressing platform (12), an electric push head (8) is installed on the inner wall of the support box (1), a bubble removing assembly is installed on the top of the support platform (5), the bubble removing assembly is used to remove the bubbles between the blue film and the wafer, a pushing head (7) is installed on the inner wall of the support box (1), and the output end of the pushing head (7) penetrates through the support platform (5), and a pushing platform (11) is installed at the output end of the pushing head (7); The clamping and stabilizing mechanism includes an eighth sliding rod (17), an eighth sliding ring (18), a seventh clamping cylinder (23), a seventh clamping head (19), and a seventh servo motor (20). The eighth sliding rod (17) is located on the inner wall of the support box (1), the eighth sliding ring (18) is located on the outer wall of the eighth sliding rod (17), the seventh clamping cylinder (23) is located on the outer wall of the seventh sliding ring (16), the seventh clamping head (19) is located on the outer wall of the eighth sliding ring (18), the seventh servo motor (20) is located on the inner wall of the support box (1), a toothed rod (22) is installed on the outer wall of the seventh clamping head (19), a gear (21) is installed at the output end of the seventh servo motor (20), and the toothed rod (22) meshes with the gear (21).

2. The blue film crystal expanding device according to claim 1, characterized in that: The seventh clamping head (19) is clamped into the seventh clamping cylinder (23), and the eighth sliding ring (18) moves by the support of the eighth sliding rod (17).

3. A blue film expanding device according to claim 1, characterized in that: The bubble removing assembly includes a sixth support platform (14), an electric push rod (34), a fourth box (35), a third servo motor (38), a third sliding rod (36), a third sliding ring (37), and a scraping and pressing head (42). The sixth support platform (14) is located on the top of the support platform (5), the electric push rod (34) is located on the outer wall of the sixth support platform (14), the fourth box (35) is located at the output end of the electric push rod (34), the third servo motor (38) is located on the inner wall of the fourth box (35), a threaded rod (39) is installed at the output end of the third servo motor (38), a threaded sleeve (40) is installed on the outer wall of the threaded rod (39), a third opening (41) is formed at the bottom of the fourth box (35), the scraping and pressing head (42) penetrates through both ends of the third opening (41), the third sliding rod (36) is located on the inner wall of the fourth box (35), a third sliding ring (37) is installed on the outer wall of the third sliding rod (36), and the outer wall of the scraping and pressing head (42) is connected to the outer wall of the third sliding ring (37), and the outer wall of the threaded sleeve (40) is connected to the outer wall of the scraping and pressing head (42).

4. The blue film expanding device according to claim 3, characterized in that: The third sliding ring (37) moves by the support of the third sliding rod (36), the scraping and pressing head (42) moves through the third opening (41), and the scraping and pressing head (42) is located above the pressing platform (12).

5. The blue film expanding device according to claim 3, wherein: An automatic adjustment component is installed at the bottom of the fourth box (35). The automatic adjustment component includes an infrared height sensor (43) and a processing module. The processing module is located on the inner wall of the support box (1), and the infrared height sensor (43) is located at the bottom of the fourth box (35). The infrared height sensor (43) is used to detect the real-time height data of the blue film. The processing module has the appropriate height data of the blue film stored inside, and the appropriate height data is 1 mm to 5 mm.

6. The blue film expanding device according to claim 5, characterized in that: The real-time height data of the blue film is transmitted into the processing module. The processing module compares the real-time height data of the blue film with the appropriate height data of the blue film. When the real-time height data of the blue film is greater than the appropriate height data of the blue film, it is set as the state of too high height. When the real-time height data of the blue film is less than the appropriate height data of the blue film, it is set as the state of too low height. When the real-time height data of the blue film is within the appropriate height data of the blue film, it is set as the state of appropriate height.

7. A blue film expanding device according to claim 1, characterized in that: A film pressing table (9) is installed at the output end of the electric push head (8). A cutting component is installed through the inner wall of the film pressing table (9), and the cutting component is arranged around the bottom of the film pressing table (9) for one week.

8. A blue film expanding device according to claim 7, characterized in that: The cutting component includes a fifth servo motor (25), a collecting wheel (26), an L-shaped frame (28), a fourth spring (32), a cutting head (30), and a fifth opening (33). The fifth servo motor (25) is located on the inner wall of the film pressing table (9). The collecting wheel (26) is located at the output end of the fifth servo motor (25). The L-shaped frame (28) is located on the inner wall of the film pressing table (9). A sixth slip ring (29) is installed on the outer wall of the L-shaped frame (28). A cutting head (30) is installed on the outer wall of the sixth slip ring (29). A seventh platform (31) is installed on the outer wall of the cutting head (30). A fourth spring (32) is installed on the outer wall of the seventh platform (31), and one end of the fourth spring (32) is connected to the outer wall of the L-shaped frame (28). A pull rope (27) is installed on the outer wall of the collecting wheel (26), and one end of the pull rope (27) is connected to the outer wall of the cutting head (30). The fifth opening (33) is opened at the bottom of the film pressing table (9).

9. The blue film expanding device according to claim 8, wherein: The sixth slip ring (29) moves through the support of the L-shaped frame (28), and the cutting head (30) moves through the fifth opening (33).

10. A method for using a blue film expanding device, applicable to a blue film expanding device according to any one of claims 1-9, characterized in that, The usage method of this blue film expanding and crystalizing device includes the following steps: Step S1: The seventh servo motor (20) rotates to drive the toothed rod (22) to move. The toothed rod (22) moves to drive the seventh chuck (19) to move. The seventh chuck (19) moves to drive the eighth slip ring (18) to move. The movement of the eighth slip ring (18) causes the seventh chuck (19) to move out of the seventh cartridge (23). At this time, the pull rod (24) is pulled to drive the pressing table (12) to move. The movement of the pressing table (12) makes it move away from the support table (5). At this time, the blue film is placed on the surface of the support table (5). At this time, the pull rod (24) is pressed down to drive the pressing table (12) to press the blue film on the surface of the support table (5). At this time, the seventh servo motor (20) rotates in reverse to make the seventh chuck (19) snap into the seventh cartridge (23) to fix the pressing table (12), realizing the function of stably fixing the blue film of the blue film expanding and crystalizing device and improving the stability of blue film expanding and crystalizing. Step S2: The function of the sixth support platform (14) is to provide support for the electric push rod (34). The third servo motor (38) rotates to drive the threaded rod (39) to rotate. The rotation of the threaded rod (39) drives the movement of the threaded sleeve (40). The movement of the threaded sleeve (40) drives the movement of the scraping head (42). The movement of the scraping head (42) drives the movement of the third slip ring (37). The movement of the third slip ring (37) moves the scraping head (42) to an appropriate height. At this time, the electric push rod (34) moves to drive the fourth box (35) to move. The movement of the fourth box (35) enables the scraping head (42) to quickly scrape off the bubbles between the blue film and the wafer, realizing the function of quickly scraping off the bubbles between the blue film and the wafer of the blue film expansion device and improving the quality of blue film expansion; Step S3: When the processing module detects the state of too high height, the processing module controls the bubble removal component to lower. After the bubble removal component lowers, the infrared height sensor (43) continuously detects the real-time height data of the blue film until the processing module detects the state of too low height or the state of appropriate height. When the processing module detects the state of too low height, the processing module controls the bubble removal component to lift. After the bubble removal component lifts, the infrared height sensor (43) continuously detects the real-time height data of the blue film until the processing module detects the state of too high height or the state of appropriate height. When the processing module detects the state of appropriate height, the processing module controls the bubble removal component to stop. After the bubble removal component stops, the infrared height sensor (43) continuously detects the real-time height data of the blue film until the processing module detects the state of too high height or the state of too low height, realizing the function of automatically adjusting the height during the bubble scraping between the blue film and the wafer to improve the working stability; Step S4: The fifth servo motor (25) rotates to drive the collection wheel (26) to rotate. The rotation of the collection wheel (26) drives the movement of the pull rope (27). The movement of the pull rope (27) drives the movement of the cutting head (30). The movement of the cutting head (30) drives the movement of the sixth slip ring (29). The movement of the sixth slip ring (29) enables the cutting head (30) to drive the seventh platform (31) to move. The movement of the seventh platform (31) drives the movement of the fourth spring (32). At this time, the electric push head (8) moves to drive the film pressing platform (9) to move. The movement of the film pressing platform (9) presses the blue film and the wafer together. After pressing, the fifth servo motor (25) quickly reverses, and the elastic force of the fourth spring (32) makes the cutting head (30) contact the blue film to cut it, realizing the function of stable cutting of the blue film of the blue film expansion device and improving the efficiency of blue film expansion.

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