Sensing device and sensing detection method of magnetic suspension motor

Abstract

The embodiment of the invention discloses a sensing device and a sensing detection method of a magnetic suspension motor. The sensing device comprises a hollow cylinder body, a radial sensor and an axial sensor, the radial sensor is arranged on the inner cylindrical surface of the hollow cylindrical body, and a probe of the radial sensor is exposed out of the inner cylindrical surface and is used for detecting the radial displacement of a rotor penetrating through the hollow part of the hollow cylindrical body; and the axial sensor is arranged on the annular end face of the hollow cylinder body, is exposed on the annular end face and is used for detecting the axial displacement of the rotor. According to the sensing device provided by the invention, the radial and axial integrated arrangement is realized, the sensor does not need to be installed at different positions, and only the integrated sensing device needs to be installed, so that the sensor layout is optimized, the installation position is unified, and the installation complexity is reduced.

Description

Technical Field

[0001] This application relates to the technical field of sensing devices, and particularly to a sensing device and a sensing detection method for a magnetic levitation motor. Background Art

[0002] As a high-performance motor technology, magnetic levitation motors are widely used in fields such as semiconductor precision manufacturing, industrial automation, and aerospace. Their core advantage lies in achieving contactless operation through magnetic levitation technology, thereby reducing mechanical wear and improving efficiency and reliability.

[0003] There are some technical bottlenecks in the radial and axial position detection of existing magnetic levitation motors. In traditional magnetic levitation motor designs, radial and axial position detection usually adopts a decentralized installation and measurement method. Specifically, two radial sensors and two axial sensors need to be installed at four positions of the magnetic levitation motor respectively to achieve precise detection of the rotor position. The main problems are as follows: (1) Sensors need to be installed at four positions of the magnetic levitation motor respectively, increasing the installation difficulty and time cost; (2) The sensor layout at multiple positions makes equipment maintenance and system wiring complicated, increasing the maintenance cost; (3) The decentralized module reduces the system reliability and increases the system failure probability. Summary of the Invention

[0004] Embodiments of this application provide a sensing device and a sensing detection method for a magnetic levitation motor to improve the integration of radial sensors and axial sensors and facilitate installation and disassembly.

[0005] According to one aspect of this application, a sensing device for a magnetic levitation motor is provided. The device includes:

[0006] A hollow cylindrical body, a radial sensor, and an axial sensor;

[0007] The radial sensor is disposed on the inner cylindrical surface of the hollow cylindrical body, and the probe of the radial sensor is exposed on the inner cylindrical surface for detecting the radial displacement of a rotor passing through the hollow of the hollow cylindrical body;

[0008] The axial sensor is disposed on the annular end face of the hollow cylindrical body, and the axial sensor is exposed on the annular end face for detecting the axial displacement of the rotor.

[0009] According to one aspect of this application, a sensing detection method for a magnetic levitation motor is provided. The method is applied to the sensing device for a magnetic levitation motor in any of the embodiments. The method includes:

[0010] Obtain the radial sensing data of the radial sensor and determine the radial displacement of the rotor passing through the hollow part of the sensing device;

[0011] Obtain the axial sensing data of the axial sensor and determine the axial displacement of the rotor;

[0012] Adjust the coil current of the magnetic levitation motor according to the radial displacement and the axial displacement.

[0013] According to another aspect of the present application, there is provided an electronic device, which includes:

[0014] At least one processor; and

[0015] A memory communicatively connected to at least one processor; wherein,

[0016] The memory stores a computer program executable by at least one processor, and the computer program is executed by at least one processor so that at least one processor can execute the sensing detection method of the magnetic levitation motor according to any embodiment of the present application.

[0017] According to another aspect of the present application, there is provided a computer-readable storage medium storing computer instructions for causing a processor to implement the sensing detection method of the magnetic levitation motor according to any embodiment of the present application when executed.

[0018] The technical solution of the embodiments of the present application provides a sensing device and a sensing detection method for a magnetic levitation motor. The sensing device includes a hollow cylindrical body, a radial sensor, and an axial sensor; the radial sensor is disposed on the inner cylindrical surface of the hollow cylindrical body, and the probe of the radial sensor is exposed on the inner cylindrical surface for detecting the radial displacement of a rotor passing through the hollow of the hollow cylindrical body; the axial sensor is disposed on the annular end surface of the hollow cylindrical body, and the axial sensor is exposed on the annular end surface for detecting the axial displacement of the rotor. The sensing device in the present application realizes an integrated radial and axial setting. By integrating the radial sensor and the axial sensor into the same sensing device, there is no need to install sensors at different positions, and only the integrated sensing device needs to be installed, which optimizes the sensor layout, unifies the installation position, and reduces the installation complexity.

[0019] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present application, nor is it used to limit the scope of the present application. Other features of the present application will become easily understood through the following description. Description of the Drawings

[0020] To more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the accompanying drawings required for the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can also be obtained based on these drawings.

[0021] Figure 1 Structural diagram of a sensing device for a magnetic levitation motor provided by an embodiment of the present application;

[0022] Figure 2 Schematic diagram of the radial cross-section of the sensing device provided by an embodiment of the present application;

[0023] Figure 3 Schematic diagram of the annular end face of the sensing device for a magnetic levitation motor provided by an embodiment of the present application;

[0024] Figure 4 Structural diagram of another sensing device for a magnetic levitation motor provided by an embodiment of the present application;

[0025] Figure 5 Flowchart of a sensing detection method for a magnetic levitation motor provided by an embodiment of the present application. Detailed implementation manners

[0026] In order to enable those skilled in the art to better understand the solutions of the present application, the following will clearly and completely describe the technical solutions in the embodiments of the present application in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0027] It should be noted that the terms "first", "second", "third", "fourth", "actual", "preset", etc. in the specification, claims and the above accompanying drawings of the present application are used to distinguish similar objects, and do not necessarily need to describe a specific order or sequence. It should be understood that such used data can be interchanged under appropriate circumstances so that the embodiments of the present application described here can be implemented in an order other than those illustrated or described here. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device including a series of steps or units does not necessarily need to be limited to those clearly listed steps or units, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0028] Figure 1The structural diagram of a sensing device for a magnetic levitation motor provided by an embodiment of the present application. The embodiment of the present application is a solution for a sensing device used to detect the displacement of a rotor in a magnetic levitation motor. As Figure 1 shown, the device includes:

[0029] A hollow cylindrical body 110, a radial sensor 120, and an axial sensor 130;

[0030] The radial sensor 120 is disposed on the inner cylindrical surface of the hollow cylindrical body 110, and the probe of the radial sensor 120 is exposed on the inner cylindrical surface for detecting the radial displacement of the rotor 140 passing through the hollow of the hollow cylindrical body 110;

[0031] The axial sensor 130 is disposed on the annular end surface of the hollow cylindrical body 110, and the axial sensor 130 is exposed on the annular end surface for detecting the axial displacement of the rotor 140.

[0032] Exemplarily, Figure 1 is a schematic axial cross-sectional view of the sensing device of the magnetic levitation motor, Figure 1 which only includes the sensing device and the rotor 140 described in the embodiment of the present application, and does not include structures such as coils in the magnetic levitation motor. The sensing device includes a hollow cylindrical body 110, and the diameter of the hollow cylindrical region of the hollow cylindrical body 110 needs to be greater than or equal to the diameter of the rotor 140 so that the rotor 140 can pass through the hollow of the hollow cylindrical body 110. The sensing device further includes a radial sensor 120, and the radial sensor 120 is disposed on the inner cylindrical surface of the hollow cylindrical body 110, and the main body is buried in the hollow cylindrical body 110, but the probe of the radial sensor is exposed on the inner cylindrical surface to detect the rotor 140 in the hollow. At least one radial sensor can be disposed in the same radial extension direction, such as Figure 1 the radial sensor 120 in. Two can also be disposed opposite to each other in the horizontal direction. In fact, two can also be included that are disposed opposite to each other in the horizontal direction perpendicular to the paper surface, and two other radial sensors 120 can also be included that are disposed opposite to each other on other radial extension lines in the horizontal direction. It is not limited here and can be set according to actual needs. The horizontal direction mentioned here refers to the direction in Figure 1The horizontal direction in the shown perspective, i.e., the horizontal direction of the radial direction. The radial sensor 120 can detect the distance from the outer cylindrical surface of the rotor 140, thereby reflecting the displacement of the rotor 140 in the radial direction. The sensing device further includes an axial sensor 130 disposed on the annular end face of the hollow cylindrical body 110. Similarly to the radial sensor 120, the main body of the axial sensor 130 is also buried in the hollow cylindrical body 110, and the probe is exposed to the annular end face to detect the axial displacement of the rotor 140 through the probe exposed to the annular end face. The number of axial sensors 130 can be set according to actual situations. At least one can be set. In the case of setting one, the axial displacement of the rotor 140 can also be detected. Multiple can also be set to detect the axial displacement through multiple axial sensors 130 to avoid inaccurate detection of the axial displacement caused by the detection error of one axial sensor 130. As Figure 1 shown, there is a baffle structure arranged circumferentially on the end face of the rotor 140, serving as the detection surface for axial displacement detection. The axial sensor 130 detects the change in the distance from the baffle structure, reflecting the displacement of the rotor 140 that moves synchronously with the baffle.

[0033] In the embodiment of the present application, in addition to the above-mentioned components and structures, the sensing device may further include circuit structures required for the normal processes of transmitting sensor sensing data, storing sensing data, and controlling sensors in the conventional case, such as communication between sensors, communication between sensors and processors, connection circuits between sensors and memories or between processors and sensors, including wireless or wired communication connections, which can be specifically set and connected according to actual requirements. The above-mentioned sensors include radial sensors and axial sensors. The sensing data of the sensors in the sensing device can also be transmitted to electronic devices outside the sensing device for processing, such as being transmitted to an electronic device for controlling a magnetic levitation motor for processing. The circuits, processors, memories, etc. for data transmission can all be integrated inside the hollow cylindrical body of the sensing device to achieve an integrated design. The inside of the hollow cylindrical body can be laid out according to the circuit routing settings and the positions of the processors and memories, leaving a hollow part for circuit routing settings and the positions of the processors and memories. Other parts that do not need to be occupied can be poured to increase the stability and firmness of the sensing device, playing a role in fixing and restricting the wiring therein.

[0034] The technical solution of the embodiment of the present application provides a sensing device and a sensing detection method for a magnetic levitation motor. The sensing device includes a hollow cylindrical body, a radial sensor, and an axial sensor. The radial sensor is disposed on the inner cylindrical surface of the hollow cylindrical body, and the probe of the radial sensor is exposed on the inner cylindrical surface for detecting the radial displacement of the rotor passing through the hollow of the hollow cylindrical body. The axial sensor is disposed on the annular end surface of the hollow cylindrical body, and the axial sensor is exposed on the annular end surface for detecting the axial displacement of the rotor. The sensing device in the present application realizes an integrated radial and axial setting. By integrating the radial sensor and the axial sensor into the same sensing device, there is no need to install sensors at different positions, and only the integrated sensing device needs to be installed, which optimizes the sensor layout, unifies the installation position, and reduces the installation complexity.

[0035] In a feasible solution of the embodiment of the present application, the solution of the embodiment of the present application can be combined with each optional solution in one or more of the above embodiments. In the sensing device of the magnetic levitation motor of the embodiment of the present application, the radial sensor 120 includes at least one radial sensor 120 disposed in the first degree of freedom direction of the rotor 140, and at least one radial sensor 120 disposed in the second degree of freedom direction of the rotor 140. Wherein, the first degree of freedom direction and the second degree of freedom direction are perpendicular.

[0036] Exemplarily, as Figure 2 shown, Figure 2 is a schematic radial cross-section view of the sensing device of the magnetic levitation motor. In the Figure 2 placement mode of the magnetic levitation motor, radial sensors 120 are disposed along the horizontal degree of freedom direction and the water quality degree of freedom direction to respectively detect the displacement of the rotor 140 in the horizontal degree of freedom direction and the displacement in the vertical degree of freedom direction. The radial sensors 120 disposed along each degree of freedom direction can be at least one. Figure 2 What is shown in Figure 2As shown, the body part of the radial sensor 120 can be embedded inside the hollow cylindrical body, but the probe of the radial sensor 120 needs to be exposed through the inner cylindrical surface to emit detection signals outside the inner cylindrical surface to detect the distance between the rotor 140 and the radial sensor 120, so as to detect the displacement of the rotor 140. The above solution can integrate the radial sensor 120 onto a detachable sensing device independent of the magnetic levitation motor, rather than being arranged inside the magnetic levitation motor, which is more convenient for installation and disassembly. When the sensor fails, it can be easily disassembled and replaced without disassembling the magnetic levitation motor, improving the usability. And through the above settings, it is possible to detect the displacement of the rotor 140 in two mutually perpendicular degrees of freedom directions, and realize the detection of the displacement of the rotor 140 in different degrees of freedom directions.

[0037] In an implementable solution of the embodiment of the present application, the solution of the embodiment of the present application can be combined with each optional solution in one or more of the above embodiments. In the sensing device of the magnetic levitation motor of the embodiment of the present application, at least three axial sensors 130 are included, and at least three axial sensors 130 are circumferentially distributed along the circumferential end face.

[0038] Exemplarily, Figure 3 is a schematic diagram of the circumferential end face of the sensing device of the magnetic levitation motor provided by the embodiment of the present application. At least three axial sensors 130 are arranged on the circumferential end face of the sensing device of the magnetic levitation motor, and the three axial sensors 130 can be arranged at positions as close as possible to the inner ring of the circumferential end face. The beneficial effect of setting at least three is that based on the principle of three points determining a plane, through at least three axial sensors 130, the distance between the detection surface on one side of the rotor and the axial sensors 130 can be detected more accurately, and the axial displacement of the rotor can be accurately determined, reducing the detection error caused by a single axial sensor 130.

[0039] In an implementable solution of the embodiment of the present application, the solution of the embodiment of the present application can be combined with each optional solution in one or more of the above embodiments. In the sensing device of the magnetic levitation motor of the embodiment of the present application, the included angles between the connecting lines of adjacent axial sensors 130 and the center of the circumferential end face are equal.

[0040] Exemplarily, as Figure 3 shown, the three axial sensors 130 are circumferentially evenly distributed on the circumferential end face, and the included angles between the connecting lines of adjacent circumferential sensors and the center of the circumferential end face are equal. Figure 3 Shows the case of three axial sensors 130, and the same applies when the number of axial sensors 130 is other. The beneficial effect of the above solution is that it can detect from multiple positions evenly distributed along the circumference, improve the detection accuracy, and avoid the situation where the axial sensors 130 are concentrated at a unified position and it is difficult to play the role of reducing errors by multiple sensors.

[0041] In an implementable solution of the embodiment of the present application, the solution of the embodiment of the present application can be combined with each optional solution in one or more of the above embodiments. In the sensing device of the magnetic levitation motor of the embodiment of the present application, the hollow cylindrical body includes a first hollow cylindrical body 111 and a second hollow cylindrical body 112. The first hollow cylindrical body 111 and the second hollow cylindrical body 112 are connected at the annular end face, and the hollow parts are completely communicated to form a continuous internal channel. The cross-sectional diameter of the outer cylindrical surface of the first hollow cylindrical body 111 is greater than the cross-sectional diameter of the outer cylindrical surface of the second hollow cylindrical body 112. The radial sensor is arranged on the inner cylindrical surface of the first hollow cylindrical body 111, and the axial sensor 130 is arranged on the annular end face of the second hollow cylindrical body 112.

[0042] Exemplarily, as Figure 4 shown, the hollow cylinder includes a first hollow cylindrical body 111 and a second hollow cylindrical body 112. The first hollow cylindrical body 111 and the second hollow cylindrical body 112 are connected at the annular end face, and the hollow parts are completely communicated to form a continuous internal channel. The rotor penetrates through the internal channel. The cross-sectional diameter of the outer cylindrical interface of the first hollow cylindrical body 111 is greater than the diameter of the outer cylindrical surface of the second hollow cylindrical body 112. The axial sensor 130 is arranged on the annular end face of the second hollow cylindrical body 112, and the body is embedded in the annular end face of the second hollow cylindrical body 112, and the probe is exposed on the annular end face to detect the axial displacement of the rotor. The beneficial effect of the above solution is that the radial sensor and the axial sensor 130 can be arranged axially separated inside the sensing device, avoiding problems such as insufficient internal space and chaotic wiring caused by being arranged in the same radial dimension.

[0043] In an implementable solution of the embodiment of the present application, the solution of the embodiment of the present application can be combined with each optional solution in one or more of the above embodiments. In the sensing device of the magnetic levitation motor of the embodiment of the present application, the height of the first hollow cylindrical body 111 is the minimum height at which the first hollow cylindrical body 111 can accommodate the radial sensor and the circuit board, and the height of the second hollow cylindrical body 112 is the minimum height at which the axial sensor 130 and the wiring can be accommodated.

[0044] Exemplarily, in Figure 4Based on the middle structure, the heights of the first hollow cylinder body 111 and the second hollow cylinder body 112 can be restricted. The height of the first hollow cylinder body 111 can be set to the minimum height capable of accommodating the radial sensor and the circuit board, and the height of the second hollow cylinder body 112 is the minimum height capable of accommodating the axial sensor 130 and the wiring, so as to minimize the material consumption and volume of the sensing device and reduce the internal casting cost.

[0045] In an implementable solution of the embodiment of the present application, the solution of the embodiment of the present application can be combined with each of the optional solutions in one or more of the above embodiments. In the sensing device of the magnetic levitation motor in the embodiment of the present application, one end of the rotor includes a circumferentially arranged baffle. Along the direction of the connection line between the center of the annular end face and any axial sensor, the distance between the edge of the baffle and the center of the baffle is greater than or equal to the distance between the center of the annular end face and the axial sensor in this connection line direction; the sensing device is installed and disassembled through the end of the rotor without the baffle.

[0046] Exemplarily, as Figure 1 shown, one end of the rotor 140 includes a circumferentially arranged baffle, while the other end of the rotor 140 does not have a baffle, and the sensing device can be installed and disassembled through the end of the rotor 140 without the baffle. Along the direction of the connection line between the center of the annular end face and any axial sensor 130, the distance between the edge of the baffle and the center of the baffle is greater than or equal to the distance between the center of the annular end face and the axial sensor 130, so that the baffle can be used as a detection board to block the detection light emitted by the axial sensor 130 to realize the detection of the distance. Alternatively, the baffle can be set to be circular, and the radius of the circle is greater than or equal to the maximum distance between the center of the annular end face and the axial sensor 130. Alternatively, the baffle can be set to any shape, and the minimum distance between the center and the edge of the baffle is greater than or equal to the maximum distance between the center of the annular end face and the axial sensor 130.

[0047] Figure 5 The figure is a flowchart of a magnetic levitation motor sensing and detecting method provided by an embodiment of the present application. The embodiment of the present application is applicable to the situation of detecting the displacement of the rotor of a magnetic levitation motor. This method can be executed by a magnetic levitation motor sensing and detecting device, which can be implemented in the form of hardware and / or software, and the magnetic levitation motor sensing and detecting device can be configured in an electronic device. As Figure 5 shown, this method is applied to the sensing device of the magnetic levitation motor described in any of the above embodiments, and this method includes:

[0048] S510. Obtain the radial sensing data of the radial sensor and determine the radial displacement of the rotor passing through the hollow part of the sensing device.

[0049] Exemplarily, the rotor can penetrate through the hollow part of the sensing device to install the sensing device outside the rotor. The relative position between the sensing device and the magnetic levitation motor coil is not limited. Radial sensing data through the radial sensor is obtained to determine the radial displacement of the rotor penetrating through the hollow part of the sensing device.

[0050] S520. Obtain the axial sensing data of the axial sensor and determine the axial displacement of the rotor.

[0051] Exemplarily, the axial sensing data detected by the axial sensor can be obtained to determine the axial displacement of the rotor.

[0052] S530. Adjust the coil current of the magnetic levitation motor according to the radial displacement and the axial displacement.

[0053] Exemplarily, generally, for the magnetic levitation state of the rotor, it is necessary to be controlled to keep a certain levitation state. The coil current of the magnetic levitation motor can be adjusted according to the detected radial displacement and axial displacement, so as to control the rotor to maintain the required levitation state.

[0054] In the embodiment of the present application, after obtaining the radial sensing data and the axial sensing data, the method further includes:

[0055] Filter the currently obtained target sensing data based on the previously obtained target sensing data and the filtering coefficient; and / or,

[0056] For the target sensing data in the same degree-of-freedom direction, use the difference method to process the target sensing data;

[0057] Wherein, the target sensing data includes radial sensing data and axial sensing data.

[0058] Exemplarily, for the target sensing data, in order to reduce the influence of unknown loop noise, a filter can be added at the feedback end to filter the target sensing data to improve the accuracy. Specifically, the target sensing data is processed according to the following formula:

[0059] V i =(αs i )+(1 - α)s' i ;

[0060] In the formula: V i is the processed sensor data, s i is the original sensor data, s’ i is the original sensor data at the previous moment, and α is the filtering coefficient.

[0061] In the embodiments of the present application, for the target sensing data in the same degree of freedom direction, a differential method can also be used to process the target sensing data to eliminate the interference of the common-mode signal.

[0062] In the embodiments of the present application, the method further includes:

[0063] Determine the theoretical sensing data of the sensor in the same degree of freedom direction according to the displacement of the rotor;

[0064] According to the initial sensing data of the sensor in the same degree of freedom direction and the theoretical sensing data, solve the error correction parameters for the sensor, and construct a calculation formula for the target sensing data based on the error correction parameters, so as to process the actual sensing data actually detected by the sensor based on the calculation formula to obtain the target sensing data; wherein, the theoretical sensing data, the initial sensing data, the actual sensing data, and the target sensing data include radial sensing data and axial sensing data.

[0065] Exemplarily, the accuracies of the sensors are different, and there may be detection errors. Therefore, before use, it is necessary to calibrate each sensor. Specifically, it is possible to pre-determine that the rotor offsets a certain displacement, and determine the theoretical sensing data of the sensor in the same degree of freedom direction according to this displacement. Based on the sensor in this degree of freedom direction, actual detection is performed to obtain the initial sensing data. According to the initial sensing data and the theoretical sensing data, solve the error correction parameters for the sensor, construct a calculation formula for the target sensing data based on the error correction parameters, and process the actual sensing data actually detected during the subsequent application of the sensor based on the calculation formula to obtain the target sensing data. Exemplarily, for Figure 4 the actual sensing data Vx in the X direction, it can be processed based on P x = k x × (V x + b x ) to obtain the target sensing data Px. For Figure 4 the actual sensing data Vy in the Y direction, it can be processed based on P y = k y × (V y + b y ) to obtain the target sensing data Py. Based on Figure 3 the actual sensing data Vz, it can be processed based on P z = k z × (V z + b z ) to obtain the target sensing data Pz. Wherein, kx, b x , k y , b y , k z , b zNamely, the error correction parameters obtained by solving in the above calibration process.

Claims

1. A sensing device for a magnetic levitation motor, characterized in that, The device includes: a hollow cylindrical body, a radial sensor, and an axial sensor; The radial sensor is disposed on the inner cylindrical surface of the hollow cylindrical body, and the probe of the radial sensor is exposed on the inner cylindrical surface for detecting the radial displacement of the rotor passing through the hollow of the hollow cylindrical body; The axial sensor is disposed on the annular end face of the hollow cylindrical body, and the axial sensor is exposed on the annular end face for detecting the axial displacement of the rotor.

2. The device according to claim 1, wherein The radial sensor includes at least one radial sensor disposed in the first degree of freedom direction of the rotor and at least one radial sensor disposed in the second degree of freedom direction of the rotor; wherein, the first degree of freedom direction and the second degree of freedom direction are perpendicular.

3. The device according to claim 1, wherein The axial sensor includes at least three, and at least three axial sensors are circumferentially distributed along the annular end face.

4. The device according to claim 3, characterized in that The angles formed by the connecting lines between adjacent axial sensors and the center of the annular end face are equal.

5. The device according to claim 1, characterized in that, The hollow cylindrical body includes a first hollow cylindrical body and a second hollow cylindrical body. The first hollow cylindrical body and the second hollow cylindrical body are connected at the annular end face, and the hollow parts are completely communicated to form a continuous internal channel. The cross-sectional diameter of the outer cylindrical surface of the first hollow cylindrical body is greater than the cross-sectional diameter of the outer cylindrical surface of the second hollow cylindrical body; the radial sensor is disposed on the inner cylindrical surface of the first hollow cylindrical body, and the axial sensor is disposed on the annular end face of the second hollow cylindrical body.

6. The device according to claim 5, characterized in that, The height of the first hollow cylindrical body is the minimum height at which the first hollow cylindrical body can accommodate the radial sensor and the circuit board, and the height of the second hollow cylindrical body is the minimum height at which the axial sensor and the wiring can be accommodated.

7. The device according to any one of claims 1-6, characterized in that, One end of the rotor includes a circumferentially arranged baffle. Along the direction of the connection line between the center of the annular end face and any axial sensor, the distance between the edge of the baffle and the center of the baffle is greater than or equal to the distance between the center of the annular end face and the axial sensor in the direction of the connection line; the sensing device is installed and disassembled through the end of the rotor without the baffle.

8. A sensing and detection method for a magnetic levitation motor, characterized in that, A sensing device applied to the magnetic levitation motor according to any one of claims 1-7, the method includes: Obtaining the radial sensing data of the radial sensor and determining the radial displacement of the rotor passing through the hollow part of the sensing device; Obtaining the axial sensing data of the axial sensor and determining the axial displacement of the rotor; Adjusting the coil current of the magnetic levitation motor according to the radial displacement and the axial displacement.

9. The method according to claim 8, wherein After obtaining the radial sensing data and the axial sensing data, the method further includes: Filtering the currently obtained target sensing data based on the previously obtained target sensing data and the filtering coefficient; and / or, Processing the target sensing data by using a differential method for the target sensing data in the same degree of freedom direction; wherein, the target sensing data includes radial sensing data and axial sensing data.

10. The method according to claim 8, characterized in that The method further includes: Determining the theoretical sensing data of the sensor in the same degree of freedom direction according to the displacement of the rotor; Solve the error correction parameters for the sensor according to the initial sensing data of the sensor and the theoretical sensing data in the same degree of freedom direction, and construct a calculation formula for the target sensing data based on the error correction parameters, so as to process the actual sensing data actually detected by the sensor based on the calculation formula to obtain the target sensing data; wherein, the theoretical sensing data, the initial sensing data, the actual sensing data and the target sensing data include radial sensing data and axial sensing data.

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