Femtosecond laser direct writing device with online detection function and use method

Abstract

The invention provides a femtosecond laser direct writing device with an online detection function and a use method, and relates to the technical field of laser precision machining and detection. Through the optical system integrating the laser direct writing module, the microscopic imaging module and the three-dimensional imaging module, the efficient and accurate online detection function of the femtosecond laser direct writing device is realized.

Description

Technical Field

[0001] This application relates to the technical field of laser precision machining and detection, and specifically, to a femtosecond laser direct writing device and method with an online detection function. Background Art

[0002] With the technological progress of laser processing equipment and high-power femtosecond lasers, the processing efficiency and online detection accuracy of similar products such as ultra-precision laser direct writing equipment have been greatly improved, which also poses higher technical thresholds for laser direct writing equipment. However, the online detection accuracy and efficiency of existing equipment have become bottlenecks in the production process. Among them, offline detection is mostly used in most online detection scenarios, seriously affecting the processing efficiency and quality. Therefore, how to design a dedicated online optical system to ensure that the laser can be efficiently transmitted to the processing area of the workpiece to be processed, meet the requirements of high-precision micro-nano processing and online automatic detection accuracy, so as to improve the automation degree of laser direct writing.

[0003] In response to the above problems, there is currently no effective technical solution. Summary of the Invention

[0004] The purpose of this application is to provide a femtosecond laser direct writing device and a usage method with an online detection function. Through an optical system integrating a laser direct writing module, a microscopic imaging module, and a three-dimensional imaging module, the efficient and accurate online detection function of the femtosecond laser direct writing device is realized.

[0005] This application provides a femtosecond laser direct writing device with an online detection function, including: an electric control system and an optical system. The optical system includes a laser direct writing module, a microscopic imaging module, a three-dimensional imaging module, a first dichroic mirror, a second dichroic mirror, a laser objective lens, a Mirau-type interference objective lens, an imaging objective lens, and an objective linear switching platform; The laser direct writing module is used to emit femtosecond laser, so that the femtosecond laser sequentially passes through the first dichroic mirror, the second dichroic mirror, and the laser objective lens to process the workpiece; The three-dimensional imaging module is used to emit a continuous spectrum beam, and the continuous spectrum beam is split into a reference beam and a measurement beam by the Mirau-type interference objective lens. The three-dimensional imaging module is also used to obtain a three-dimensional image of the workpiece according to the returned reference beam and measurement beam; The microscopic imaging module is used to sequentially emit bright-field illumination light and dark-field illumination light to irradiate the workpiece to form bright-field reflected light and dark-field reflected light. The microscopic imaging module is also used to generate a bright-field image and a dark-field image according to the returned bright-field reflected light and dark-field reflected light respectively; The laser objective lens, the Mirau type interference objective lens, and the imaging objective lens are all arranged on a linear objective lens switching platform, which is used to switch the positions of the objective lenses so that one of the objective lenses is in the working position; The electronic control system is used to generate an online detection result based on the bright-field image, the dark-field image, and the three-dimensional image, and optimize the processing parameters according to the online detection result. The electronic control system is also used to control the laser direct writing module to process the workpiece.

[0006] Through the above settings, the efficient and accurate online detection function of the femtosecond laser direct writing device is realized.

[0007] Optionally, the optical system further includes a focusing platform, which is connected to the linear objective lens switching platform. A focusing sensor is arranged in the microscopic imaging module. The focusing sensor is used to emit detection laser light. After the detection laser light is focused on the surface of the workpiece through the laser objective lens, the Mirau type interference objective lens, or the imaging objective lens and then reflected and returns along the original path into the focusing sensor, the focusing sensor is also used to output the height information of the focusing focal plane according to the returned detection laser light, and the focusing platform is used to adjust the height of the linear objective lens switching platform according to the height information so that the focusing focal plane of the laser objective lens, the Mirau type interference objective lens, or the imaging objective lens is located on the surface of the workpiece.

[0008] Through the above settings, it is ensured that the laser objective lens is accurately focused on the surface of the workpiece and the accuracy of two-dimensional and three-dimensional imaging is guaranteed.

[0009] Optionally, the microscopic imaging module includes an illumination module, a third dichroic mirror, a first beam splitter, an imaging tube lens, and a color camera. The illumination module is used to emit bright-field illumination light. The bright-field illumination light is transmitted through the third dichroic mirror and the first beam splitter, and then reflected by the second dichroic mirror and passes through the imaging objective lens to irradiate the workpiece to form the bright-field reflected light. The bright-field reflected light is reflected by the second dichroic mirror and the first beam splitter and enters the imaging tube lens for combined imaging to be generated into a bright-field image by the color camera. The illumination module is also used to emit dark-field illumination light. The dark-field illumination light is transmitted through the third dichroic mirror and the first beam splitter, and then reflected by the second dichroic mirror and passes through the imaging objective lens to irradiate the workpiece to form the dark-field reflected light. The dark-field reflected light is reflected by the second dichroic mirror and the first beam splitter and enters the imaging tube lens for combined imaging to be generated into a dark-field image by the color camera. The linear objective lens switching platform is used to align the imaging objective lens with the second dichroic mirror.

[0010] Through the collaborative work of these components, the microscopic imaging module can effectively obtain the bright-field image and the dark-field image of the workpiece processing area, providing an image data basis for subsequent online detection and processing parameter optimization.

[0011] Optionally, the illumination module includes a bright-field illumination component, a dark-field illumination component, a mirror, and a second beam splitter. The bright-field illumination component is configured to emit bright-field illumination light, and the bright-field illumination light is reflected by the mirror and the second beam splitter to the third dichroic mirror. The dark-field illumination component is configured to emit dark-field illumination light, and the dark-field illumination light is transmitted through the second beam splitter to the third dichroic mirror.

[0012] Optionally, both the bright-field illumination component and the dark-field illumination component include a red LED, a red light collimator, a green LED, a green light collimator, a blue LED, a blue light collimator, and a trichromatic synthesis prism. The red LED, the green LED, and the blue LED are all configured to emit light sources and pass through the corresponding collimators. The trichromatic synthesis prism is configured to synthesize the light sources emitted by the red LED, the green LED, and the blue LED into the bright-field illumination light or the dark-field illumination light.

[0013] Optionally, the three-dimensional imaging module includes an SLD light source, a second collimator, a polarization beam splitter prism, a quarter-wave plate, a three-dimensional imaging tube lens, an analyzer, a three-dimensional camera, and a piezoelectric ceramic phase shifter. The SLD light source emits the continuous spectrum beam, and the continuous spectrum beam is collimated by the second collimator and then incident on the polarization beam splitter prism. The polarization beam splitter prism outputs linearly polarized light and converts it into circularly polarized light through the quarter-wave plate. The circularly polarized light is reflected by the first dichroic mirror, passes through the second dichroic mirror, enters the Mirau interferometric objective lens, and is split into a reference beam and a measurement beam by the Mirau interferometric objective lens. The measurement beam is reflected by the workpiece and then returns to the Mirau interferometric objective lens. Together with the reference beam, after passing through the second dichroic mirror and being transmitted and reflected by the first dichroic mirror, it is then converted into linearly polarized light through the quarter-wave plate. The linearly polarized light is reflected by the polarization beam splitter prism and enters the three-dimensional imaging tube lens and the analyzer to form interference fringes. The piezoelectric ceramic phase shifter is respectively connected to the Mirau interferometric objective lens and the objective lens linear switching platform. The piezoelectric ceramic phase shifter is configured to adjust the interference phase shift of the Mirau interferometric objective lens. The three-dimensional camera is configured to generate a three-dimensional image based on the interference fringes and the interference phase shift. The objective lens linear switching platform is configured to align the Mirau interferometric objective lens with the second dichroic mirror.

[0014] Optionally, the laser direct writing module includes a femtosecond laser, an automatic attenuator, a two-dimensional scanning galvanometer group, an F-θ field mirror and a laser tube mirror. The femtosecond laser is used to emit a femtosecond laser. After passing through the automatic attenuator, the femtosecond laser is transmitted to the F-θ field mirror through the two-dimensional scanning galvanometer group to form a focused light spot. The focused light spot is scaled by the laser tube mirror and then passes through the first dichroic mirror, the second dichroic mirror and the laser objective lens in sequence to process the workpiece. The automatic attenuator has a built-in mechanical shutter, which can turn off the laser. The objective lens linear switching platform is used to align the laser objective lens with the second dichroic mirror.

[0015] Optionally, the laser direct writing module further includes a continuous zoom lens, which is used to convert the femtosecond laser into a circular flat-top spot of corresponding magnification according to different magnifications.

[0016] Optionally, the electronic control system includes a moving workpiece table, a fixed frame, an electronic control unit and a computer, the fixed frame is arranged on the moving workpiece table, the fixed frame is used to install the optical system, the electronic control unit is connected to the computer, the electronic control unit is connected to the optical system and the moving workpiece table, the moving workpiece table is used to place the workpiece to be processed, the electronic control unit is used to control the operation of the optical system and the moving workpiece table, and the computer is used to control the automated operation of the optical system and the moving workpiece table.

[0017] In a second aspect, the present application provides a method for using a femtosecond laser direct writing device with an online detection function. Based on any of the above-mentioned femtosecond laser direct writing devices with an online detection function, the method for using the femtosecond laser direct writing device with an online detection function comprises the following steps: The electronic control system obtains processing parameters of the workpiece to be processed, and the electronic control system controls the laser direct writing module to process the workpiece according to the processing parameters; After the direct writing process is completed, the electronic control system controls the laser direct writing module to turn off the laser to switch to the online detection mode; In the online detection mode, the electronic control system controls the microscopic imaging module and the three-dimensional imaging module to obtain the bright field image, the dark field image and the three-dimensional image; The electronic control system performs data fusion processing according to the bright field image, the dark field image and the three-dimensional image to obtain an online detection result; The electronic control system is further used to optimize the processing parameters of the laser direct writing module according to the online detection results.

[0018] As can be seen from the above, the femtosecond laser direct writing device with an online detection function and its usage method provided by the present application achieve the efficient and accurate online detection function of the femtosecond laser direct writing device through an optical system integrating a laser direct writing module, a microscopic imaging module, and a three-dimensional imaging module.

[0019] Other features and advantages of the present application will be described in the subsequent specification, and, in part, will become apparent from the specification or be understood by implementing the embodiments of the present application. The objectives and other advantages of the present application can be realized and obtained by the structures specifically pointed out in the written specification and the accompanying drawings. Brief Description of the Drawings

[0020] Figure 1 It is a schematic diagram of the overall structure of the femtosecond laser direct writing device with an online detection function provided by an embodiment of the present application.

[0021] Figure 2 It is a schematic diagram of the structure of the microscopic imaging module provided by an embodiment of the present application.

[0022] Figure 3 It is a schematic diagram of the structure of the three-dimensional imaging module provided by an embodiment of the present application.

[0023] Figure 4 It is a schematic diagram of the structure of the bright-field illumination component provided by an embodiment of the present application.

[0024] Figure 5 It is a schematic diagram of the structure of the electronic control system provided by an embodiment of the present application.

[0025] Description of reference numerals: 100, laser direct writing module; 200, microscopic imaging module; 300, three-dimensional imaging module; 1, femtosecond laser; 2, automatic attenuator; 3, continuously variable zoom lens; 4, two-dimensional scanning galvanometer group; 5, F-θ field lens; 6, laser tube lens; 7, first dichroic mirror; 8, second dichroic mirror; 9, focusing platform; 10, objective lens linear switching platform; 11, laser objective lens; 12, Mirau-type interference objective lens; 13, imaging objective lens; 14, piezoelectric ceramic phase shifter; 15, first beam splitter; 16, third dichroic mirror; 17, color camera; 18, imaging barrel lens; 19, focusing sensor; 400, illumination module; 201, bright field illumination component; 202, dark field illumination component; 203, mirror; 204, second beam splitter; 211, red LED; 212, red collimating lens; 213, green LED; 214, green collimating lens; 215, blue LED; 216, blue collimating lens; 217, three-primary-color synthesis prism; 101, SLD light source; 102, second collimating lens; 103, polarization beam splitter prism; 104, quarter-wave plate; 105, three-dimensional imaging barrel lens; 106, analyzer; 107, three-dimensional camera; 500, optical system; 501, moving workpiece table; 502, fixing bracket; 503, electronic control unit; 504, computer. Detailed implementation manners

[0026] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Usually, the components of the embodiments of the present application described and shown in the accompanying drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application to be protected, but only represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present application.

[0027] It should be noted that: similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. At the same time, in the description of the present application, the terms "first", "second", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0028] Please refer to Figures 1 - 5 , Figure 1It is a schematic diagram of the overall structure of a femtosecond laser direct writing device with an online detection function provided by this application. It is used to solve the problem that in femtosecond laser direct writing processing, online detection cannot be carried out efficiently and accurately. The device realizes the combination of processing and detection through an optical system 500 that integrates a laser direct writing module 100, a microscopic imaging module 200, and a three-dimensional imaging module 300.

[0029] In a first aspect, this application provides a femtosecond laser direct writing device with an online detection function, including: an electric control system and an optical system 500. The optical system 500 includes a laser direct writing module 100, a microscopic imaging module 200, a three-dimensional imaging module 300, a first dichroic mirror 7, a second dichroic mirror 8, a laser objective lens 11, a Mirau-type interference objective lens 12, an imaging objective lens 13, and an objective linear switching platform 10; The laser direct writing module 100 is used to emit femtosecond laser, and make the femtosecond laser pass through the first dichroic mirror 7, the second dichroic mirror 8, and the laser objective lens 11 in sequence to process the workpiece; The three-dimensional imaging module 300 is used to emit a continuous spectrum beam, and make the continuous spectrum beam pass through the second dichroic mirror 8 after being reflected by the first dichroic mirror 7 and enter the Mirau-type interference objective lens 12, and the Mirau-type interference objective lens 12 divides it into a reference beam and a measurement beam. The measurement beam returns to the Mirau-type interference objective lens 12 after being reflected by the workpiece, and returns to the three-dimensional imaging module 300 together with the reference beam along the original path; the three-dimensional imaging module 300 is also used to obtain a three-dimensional image of the workpiece according to the returned reference beam and measurement beam; The microscopic imaging module 200 is used to emit bright-field illumination light and dark-field illumination light in sequence, and make the corresponding illumination light pass through the imaging objective lens 13 after being reflected by the second dichroic mirror 8 to irradiate the workpiece to form bright-field reflected light and dark-field reflected light, and the reflected light returns to the microscopic imaging module 200 along the original path; the microscopic imaging module 200 is also used to generate a bright-field image and a dark-field image according to the returned bright-field reflected light and dark-field bright-field reflected light; The laser objective lens 11, the Mirau-type interference objective lens 12, and the imaging objective lens 13 are all arranged on the objective linear switching platform 10. The objective linear switching platform 10 is used to switch the positions of each objective lens so that one of the objective lenses is in the working position (for example, the objective linear switching platform 10 aligns the imaging objective lens 13 with the second dichroic mirror 8, the objective linear switching platform 10 aligns the Mirau-type interference objective lens 12 with the second dichroic mirror 8, or the objective linear switching platform 10 aligns the laser objective lens 11 with the second dichroic mirror 8, so as to realize the work of each module); The electric control system is used to generate an online detection result according to the bright-field image, the dark-field image, and the three-dimensional image, and optimize the processing parameters according to the online detection result. The electric control system is also used to control the laser direct writing module 100 to process the workpiece.

[0030] Specifically, the laser direct writing module 100 emits femtosecond laser, which passes through the first dichroic mirror 7, the second dichroic mirror 8 and the laser objective lens 11 to perform micro-nano processing on the workpiece. To achieve on-line detection of the processing area, the optical system 500 also includes a microscopic imaging module 200 and a three-dimensional imaging module 300. The microscopic imaging module 200 emits bright-field and dark-field illumination light. The illumination light irradiates the workpiece through the second dichroic mirror 8 and the imaging objective lens 13, and the reflected light returns to the microscopic imaging module 200 to generate bright-field and dark-field images of the workpiece processing area for two-dimensional topography detection. The three-dimensional imaging module 300 emits a continuous-spectrum beam. The beam is reflected by the first dichroic mirror 7, passes through the second dichroic mirror 8 and the Mirau-type interference objective lens 12, and is divided into a reference beam and a measurement beam in the Mirau-type interference objective lens 12. The measurement beam is reflected by the workpiece and returns to the three-dimensional imaging module 300 together with the reference beam to generate a three-dimensional image of the workpiece processing area for three-dimensional topography detection.

[0031] The laser objective lens 11, the Mirau-type interference objective lens 12 and the imaging objective lens 13 are installed on the objective linear switching platform 10. Different objective lenses can be placed in the working position through the objective linear switching platform 10 to achieve rapid switching between the laser processing objective lens and the on-line detection objective lens, enabling on-line detection without moving the workpiece, thus improving the detection efficiency. The electronic control system receives the images generated by the microscopic imaging module 200 and the three-dimensional imaging module 300, performs data fusion processing to obtain the on-line detection result, and optimizes the laser processing parameters according to the detection result to achieve closed-loop control of the processing process, improving the processing accuracy and quality.

[0032] The first dichroic mirror 7 and the second dichroic mirror 8, as optical beam combining / splitting elements, integrate the laser direct writing optical path, the microscopic imaging optical path and the three-dimensional imaging optical path in the same optical system 500, simplifying the system structure. The introduction of the microscopic imaging module 200 and the three-dimensional imaging module 300 endows the device with the capabilities of bright-field, dark-field two-dimensional imaging and three-dimensional topography detection, realizing multi-dimensional on-line detection of the processing area. The setting of the objective linear switching platform 10 realizes rapid switching between the processing and detection objective lenses, ensuring the efficiency of on-line detection. The electronic control system optimizes the processing parameters according to the detection result, realizing closed-loop control of the processing process. In summary, through the collaborative work of each module, this technical solution realizes the efficient and accurate on-line detection function of the femtosecond laser direct writing device.

[0033] In some embodiments, the optical system 500 further includes a focusing platform 9, which is connected to the objective linear switching platform 10. A focusing sensor 19 is provided in the microscopic imaging module 200. The focusing sensor 19 is used to emit detection laser. After the detection laser is focused on the workpiece surface through the laser objective 11, the Mirau interferometric objective 12 or the imaging objective 13 and then reflected and returns along the original path into the focusing sensor 19. The focusing sensor 19 is further used to output the height information of the focusing focal plane according to the returned detection laser. The focusing platform 9 is used to adjust the height of the objective linear switching platform 10 according to the height information, so that the focusing focal plane of the laser objective 11, the Mirau interferometric objective 12 or the imaging objective 13 is located on the workpiece surface.

[0034] Specifically, the setting of the focusing platform 9 realizes the synchronous adjustment of the heights of all objectives on the objective linear switching platform 10. The introduction of the focusing sensor 19 provides height information for the focusing platform 9 and realizes the autofocus function. Through the feedback of the detection laser and the height information, the system can automatically adjust the objective height to ensure that when the laser objective 11, the Mirau interferometric objective 12 and the imaging objective 13 are switched and used, they can all be accurately focused on the workpiece surface. The introduction of this autofocus mechanism reduces the need for manual adjustment and improves the operation efficiency and processing accuracy.

[0035] Among them, the focusing sensor 19 can be a laser displacement sensor that emits detection laser with a visible light or infrared light wavelength. The focusing platform 9 can be an electric lifting platform, and the height adjustment of the objective linear switching platform 10 is realized through a servo motor and a lead screw structure. The electronic control system receives the height information output by the focusing sensor 19 and adjusts the height of the objective linear switching platform 10, and the adjustment accuracy can reach the micron level or even the nanometer level. For example, before the femtosecond laser direct writing device performs fine processing, first perform autofocus through the focusing sensor 19 and the focusing platform 9 to ensure that the laser objective 11 is accurately focused on the workpiece surface, and then perform the laser processing operation. When switching to the microscopic imaging module 200 and the three-dimensional imaging module 300 for on-line detection, the heights of the imaging objective 13 and the Mirau interferometric objective 12 can also be adjusted through focusing to ensure the accuracy of two-dimensional and three-dimensional imaging.

[0036] In some embodiments, the microscopic imaging module 200 includes an illumination module 400, a third dichroic mirror 16, a first beam splitter 15, an imaging tube lens 18, and a color camera 17. The illumination module 400 is configured to emit bright-field illumination light. The bright-field illumination light is transmitted through the third dichroic mirror 16 and the first beam splitter 15, and then reflected by the second dichroic mirror 8 and passes through the imaging objective lens 13 to irradiate the workpiece, forming bright-field reflected light. The bright-field reflected light is reflected by the second dichroic mirror 8 and the first beam splitter 15 and enters the imaging tube lens 18 for combined imaging to be generated as a bright-field image by the color camera 17. The illumination module 400 is further configured to emit dark-field illumination light. The dark-field illumination light is transmitted through the third dichroic mirror 16 and the first beam splitter 15, and then reflected by the second dichroic mirror 8 and passes through the imaging objective lens 13 to irradiate the workpiece, forming dark-field reflected light. The dark-field reflected light is reflected by the second dichroic mirror 8 and the first beam splitter 15 and enters the imaging tube lens 18 for combined imaging to be generated as a dark-field image by the color camera 17. The objective lens linear switching platform 10 is used to align the imaging objective lens 13 with the second dichroic mirror 8, as Figure 2 shown.

[0037] Specifically, the illumination module 400 is responsible for providing two kinds of illumination light sources, bright field and dark field, to meet different imaging requirements. The third dichroic mirror 16 and the first beam splitter 15 cooperate to guide the optical paths of the illumination light and the reflected light, so as to effectively irradiate the illumination light onto the workpiece and guide the reflected light to the imaging tube lens 18. The imaging tube lens 18 is used for imaging the reflected light, and the color camera 17 is used for capturing image information. Through the collaborative work of these components, the microscopic imaging module 200 can effectively obtain the bright-field image and the dark-field image of the workpiece processing area, providing an image data basis for subsequent on-line detection and processing parameter optimization.

[0038] In some embodiments, the illumination module 400 includes a bright-field illumination component 201, a dark-field illumination component 202, a reflector 203, and a second beam splitter 204. The bright-field illumination component 201 is configured to emit bright-field illumination light. The bright-field illumination light is reflected by the reflector 203 and the second beam splitter 204 to the third dichroic mirror 16. The dark-field illumination component 202 is configured to emit dark-field illumination light. The dark-field illumination light is transmitted through the second beam splitter 204 to the third dichroic mirror 16.

[0039] Specifically, the bright-field illumination light emitted by the bright-field illumination component 201 first changes the optical path direction through the reflector 203, and then is reflected by the second beam splitter 204 so that its optical path is consistent with the optical path direction of the dark-field illumination light. The dark-field illumination light emitted by the dark-field illumination component 202 directly passes through the second beam splitter 204. In this way, by utilizing the beam splitting characteristics of the second beam splitter 204, the two different types of illumination lights are combined in space and uniformly introduced into the subsequent optical element, the third dichroic mirror 16, to provide a composite light source for subsequent microscopic imaging. This structural design enables the bright-field illumination and the dark-field illumination to be independently controlled and optimized respectively, and then through the way of optical path integration, share the subsequent optical path, simplify the complexity of the optical system 500, and provide a hardware basis for realizing the switching and collaborative work of the bright-field and dark-field illumination modes.

[0040] In some embodiments, both the bright-field illumination component 201 and the dark-field illumination component 202 include a red LED 211, a red light collimator 212, a green LED 213, a green light collimator 214, a blue LED 215, a blue light collimator 216, and a trichromatic synthesis prism 217. The red LED 211, the green LED 213, and the blue LED 215 are all used to emit light sources and pass through the corresponding collimators. The trichromatic synthesis prism 217 is used to synthesize the light sources emitted by the red LED 211, the green LED 213, and the blue LED 215 into bright-field illumination light or dark-field illumination light, as Figure 4 shown.

[0041] An LED light source is used as the light source of the bright-field illumination component 201 and the dark-field illumination component 202. For example, both the bright-field illumination component 201 and the dark-field illumination component 202 can include a red LED 211, a green LED 213, and a blue LED 215. The light emitted by these LED light sources is collimated by the corresponding collimators respectively, and then the collimated red light, green light, and blue light are synthesized into illumination light by the trichromatic synthesis prism 217. The third dichroic mirror 16 can select a film system with high reflectivity and high transmittance for specific wavelengths of light. For example, a dichroic mirror with high reflectivity for the excitation light wavelength and high transmittance for the emission light wavelength can be selected. The first beam splitter 15 can select a film layer beam splitter, and the beam splitting ratio can be selected according to actual needs. For example, a beam splitter with a beam splitting ratio of 50:50 can be selected. The imaging tube lens 18 can select an achromatic lens group to reduce chromatic aberration and improve the imaging quality. The color camera 17 can select a CMOS color camera, which has the characteristics of high resolution and high frame rate and can quickly capture clear images. Through the selection and configuration of the above components, the microscopic imaging module 200 can achieve high-quality bright-field and dark-field microscopic imaging of the workpiece processing area, provide reliable data support for on-line detection, and then realize the real-time monitoring and optimization of the laser direct writing processing process.

[0042] In some embodiments, the three-dimensional imaging module 300 includes an SLD light source 101, a second collimating mirror 102, a polarization beam splitter prism 103, a quarter-wave plate 104, a three-dimensional imaging tube lens 105, an analyzer 106, a three-dimensional camera 107, and a piezoelectric ceramic phase shifter 14. The SLD light source 101 emits a continuous spectrum beam. After being collimated by the second collimating mirror 102, the continuous spectrum beam is incident on the polarization beam splitter prism 103. The polarization beam splitter prism 103 outputs linearly polarized light, which is converted into circularly polarized light by the quarter-wave plate 104. The circularly polarized light passes through the first dichroic mirror 7 and then passes through the second dichroic mirror 8 and enters the Mirau interferometric objective lens 12, and is split into a reference beam and a measurement beam by the Mirau interferometric objective lens 12. The measurement beam is reflected by the workpiece and then returns to the Mirau interferometric objective lens 12. After passing through the second dichroic mirror 8 in transmission and the first dichroic mirror 7 in reflection together with the reference beam, it is then converted into linearly polarized light by the quarter-wave plate 104. The linearly polarized light enters the three-dimensional imaging tube lens 105 and the analyzer 106 after being reflected by the polarization beam splitter prism 103 and forms interference fringes. The piezoelectric ceramic phase shifter 14 is respectively connected to the Mirau interferometric objective lens 12 and the objective linear switching platform 10. The piezoelectric ceramic phase shifter 14 is used to adjust the interference phase shift of the Mirau interferometric objective lens 12. The three-dimensional camera 107 is used to generate a three-dimensional image based on the interference fringes and the interference phase shift. The objective linear switching platform 10 is used to align the Mirau interferometric objective lens 12 with the second dichroic mirror 8, as Figure 3 shown.

[0043] When the three-dimensional imaging module 300 is working, the continuous-spectrum light beam emitted by the SLD light source 101 is collimated by the second collimating mirror 102 to form a parallel light beam. The collimated continuous-spectrum light beam is incident on the polarization beam splitter prism 103, and the polarization beam splitter prism 103 divides the light beam into linearly polarized light, which is converted into circularly polarized light after passing through the quarter-wave plate 104. The circularly polarized light is reflected by the first dichroic mirror 7, then passes through the second dichroic mirror 8, and enters the Mirau-type interference objective lens 12. The Mirau-type interference objective lens 12 divides the light beam into a reference beam and a measurement beam. The measurement beam irradiates the surface of the workpiece, carries the surface topography information of the workpiece and reflects back, and interferes with the reference beam. The interfered light beam returns along the original path, passes through the transmission of the second dichroic mirror 8 and the reflection of the first dichroic mirror 7, and then passes through the quarter-wave plate 104 again, and is converted into linearly polarized light. The linearly polarized light is reflected by the polarization beam splitter prism 103 and enters the three-dimensional imaging tube lens 105 and the analyzer 106. The analyzer 106 is used to improve the contrast of the interference fringes, making the interference fringes clearer. The three-dimensional camera 107 acquires the image containing the interference fringes. The piezoelectric ceramic phase shifter 14 precisely controls the position of the Mirau-type interference objective lens 12, adjusts the optical path difference between the reference beam and the measurement beam, and realizes interference phase shift. The three-dimensional camera 107 calculates and generates the three-dimensional image of the workpiece surface according to the acquired interference fringe images under different phase shifts. Through the combination of white light interference and polarization beam splitting technology, the three-dimensional imaging module 300 achieves a measurement resolution below the nanometer level, ensures the high-quality recognition effect of the key features of the processed sample, solves the problem of insufficient online detection accuracy, and improves the accuracy and quality of online detection.

[0044] Among them, the SLD light source 101 can select a superluminescent light-emitting diode with a central wavelength of 840 nm to provide a broadband light source. The second collimating mirror 102 selects a lens with a focal length of 20 mm to collimate the divergent continuous-spectrum light beam. The polarization beam splitter prism 103 selects a prism with an extinction ratio greater than 1000:1 to ensure the polarization beam splitting effect. The quarter-wave plate 104 selects a wave plate with a working wavelength range covering the visible light to near-infrared band. The Mirau-type interference objective lens 12 selects an objective lens with a numerical aperture of 0.55, a magnification of 50X, and a working distance of 2 mm. The displacement resolution of the piezoelectric ceramic phase shifter 14 can reach 1 nm to achieve nanoscale phase shift control. The three-dimensional camera 107 selects a CMOS camera with a resolution of 1280x1024 and a pixel size of 5.3 μm. The above is only the preferred method of this application, and the model parameters can be set according to actual needs, and no specific restrictions are made here.

[0045] In some embodiments, the laser direct writing module 100 includes a femtosecond laser 1, an automatic attenuator 2, a two-dimensional scanning galvanometer group 4, an F-θ field lens 5, and a laser tube lens 6. The femtosecond laser 1 is used to emit femtosecond laser. After the femtosecond laser passes through the automatic attenuator 2, it is transmitted to the F-θ field lens 5 through the two-dimensional scanning galvanometer group 4 to form a focused spot. The focused spot passes through the laser tube lens 6 and then passes through the first dichroic mirror 7, the second dichroic mirror 8, and the laser objective lens 11 in sequence for scaling to process the workpiece. The automatic attenuator 2 is internally provided with a mechanical shutter, and the mechanical shutter can turn off the laser. The objective lens linear switching platform 10 is used to align the laser objective lens 11 with the second dichroic mirror 8, as Figure 1 shown.

[0046] Specifically, the working principle of the laser direct writing module 100 is as follows: First, the femtosecond laser 1 generates high-energy femtosecond laser pulses; the laser pulses then enter the automatic attenuator 2, where the laser energy is precisely adjusted to adapt to specific materials and processing parameters; the laser beam with adjusted energy is incident on the two-dimensional scanning galvanometer group 4; the two-dimensional scanning galvanometer group 4, under the control of the electronic control system, precisely deflects the direction of the laser beam to achieve the two-dimensional scanning movement of the laser beam on the workpiece surface and scans out a predetermined processing pattern; the scanned laser beam passes through the F-θ field lens 5, and the F-θ field lens 5 focuses the scanned laser beam on the workpiece surface and corrects the aberration during the scanning process to ensure the quality and position accuracy of the focus; to further improve the processing accuracy, before the laser beam reaches the workpiece surface, it also needs to pass through the combination of the laser tube lens 6 and the laser objective lens 11 for relay scaling of the light spot (relay scaling means that a primary image is formed by focusing the light spot through the F-θ field lens 5, and then a secondary image is formed by the combination of the laser tube lens 6 and the laser objective lens 11 and transmitted to the workpiece), realizing the microscopic reduction of the laser light spot, and finally the size of the light spot focused on the workpiece surface reaches the micron or even sub-micron level, meeting the requirements of high-precision micro-nano processing; the mechanical shutter integrated in the automatic attenuator 2 (the response time of this mechanical shutter is 0.1 s) can quickly turn off the laser (since it takes a certain time for the femtosecond laser 1 to switch to stabilize the power), facilitating the subsequent switching to the online detection mode and quickly avoiding unnecessary laser irradiation, which is crucial for the processing of fine patterns; through the collaborative work of the above components, the laser direct writing module 100 can achieve precise control of the laser energy, light spot shape, and scanning trajectory. This high-precision laser direct writing ability provides high-quality processed samples for subsequent online detection and ensures the accuracy and reliability of the online detection results.

[0047] In some embodiments, the laser direct writing module 100 further includes a continuously variable zoom lens 3, and the continuously variable zoom lens 3 is used to convert the femtosecond laser into a circular flat-top light spot with a corresponding magnification according to different magnifications.

[0048] Specifically, the femtosecond laser emitted by the femtosecond laser 1 passes through the automatic attenuator 2 and then enters the continuously variable zoom lens 3. The continuously variable zoom lens 3 converts the femtosecond laser into a circular flat-top light spot with a corresponding magnification and outputs it to the two-dimensional scanning galvanometer group 4, and is transmitted to the F-θ field lens 5 to form a focused light spot.

[0049] Different applications require different laser spot sizes. The continuously variable zoom lens 3 solves this problem by allowing the user to adjust the magnification and thereby adjust the spot size without the need to replace the lens. By adjusting the zoom lens, the femtosecond laser beam can be shaped into a circular flat-top beam with the desired magnification. This allows the laser spot size to be optimized for different materials and processing parameters, thereby improving the processing flexibility and applicable range of the laser direct writing device.

[0050] In some embodiments, the electric control system includes a moving workpiece table 501, a fixing frame 502, an electric control unit 503, and a computer 504. The fixing frame 502 is arranged on the moving workpiece table 501. The fixing frame 502 is used to mount the optical system 500. The electric control unit 503 is connected to the computer 504. The electric control unit 503 is connected to the optical system 500 and the moving workpiece table 501. The moving workpiece table 501 is used to place the workpiece to be processed. The electric control unit 503 is used to control the operation of the optical system 500 and the moving workpiece table 501. The computer 504 is used to control the automated operation of the optical system 500 and the moving workpiece table 501, such as Figure 5 shown.

[0051] Among them, the moving workpiece table 501 is configured to carry the workpiece to be processed and provide precise position movement capabilities to support the workpiece positioning requirements during the laser direct writing and on-line detection processes. The fixing frame 502 is designed as a support structure for mounting the optical system 500. By being arranged on the moving workpiece table 501, the integration of the optical system 500 and the moving workpiece table 501 is realized, ensuring the stability of the optical system 500 during movement. The electric control unit 503, as the core control component, is responsible for receiving instructions from the computer 504 and converting them into control signals for the optical system 500 and the moving workpiece table 501, coordinating the collaborative work of each component. The computer 504 is used as an advanced control platform to perform tasks such as image processing, data analysis, on-line detection result generation, and automated workflow management. A communication connection is established between the computer 504 and the electric control unit 503 to realize the transmission of control instructions and data. The electric control unit 503 is further connected to the optical system 500 and the moving workpiece table 501 to realize the precise control of hardware devices such as the femtosecond laser 1, the two-dimensional scanning galvanometer group 4, the objective lens linear switching platform 10, the color camera 17, the three-dimensional camera 107, and the moving workpiece table 501.

[0052] When the electronic control system is working, the computer 504 first generates corresponding control instructions according to the preset processing parameters or online detection requirements. These instructions are sent to the electronic control unit 503. After the electronic control unit 503 analyzes the instructions, it drives the moving workpiece table 501 to move along a predetermined trajectory, and at the same time controls the femtosecond laser direct writing module 100 to emit a laser beam to process the workpiece, or controls the microscopic imaging module 200 and the three-dimensional imaging module 300 to collect image data of the workpiece surface. In the online detection mode, the bright-field images, dark-field images and three-dimensional images obtained by the microscopic imaging module 200 and the three-dimensional imaging module 300 are transmitted to the computer 504. The computer 504 performs fusion processing and analysis on these image data to generate an online detection result. The online detection result can be used to evaluate the processing quality and feedback to the electronic control unit 503 for real-time adjustment and optimization of the processing parameters of the femtosecond laser direct writing module 100. Through the coordinated operation of the moving workpiece table 501, the fixing frame 502, the electronic control unit 503 and the computer 504, the automatic control and online detection functions of the femtosecond laser direct writing device are realized.

[0053] In a second aspect, the present application provides a method for using a femtosecond laser direct writing device with an online detection function. Based on the femtosecond laser direct writing device with an online detection function described in any of the foregoing items, the method for using a femtosecond laser direct writing device with an online detection function includes the steps of: The electronic control system obtains the processing parameters of the workpiece to be processed, and the electronic control system controls the femtosecond laser direct writing module 100 to process the workpiece according to the processing parameters; After the direct writing process is completed, the electronic control system controls the femtosecond laser direct writing module 100 to turn off the laser to switch to the online detection mode; In the online detection mode, the electronic control system controls the microscopic imaging module 200 and the three-dimensional imaging module 300 to work to obtain bright-field images, dark-field images and three-dimensional images; The electronic control system performs data fusion processing on the bright-field images, dark-field images and three-dimensional images to obtain an online detection result; The electronic control system is also used to optimize the processing parameters of the femtosecond laser direct writing module 100 according to the online detection result.

[0054] Among them, the data fusion processing is a prior art. For example, it can be multi-modal feature extraction and fusion or a deep learning-driven method, but it is not limited thereto.

[0055] Specifically, the electronic control system first obtains the processing parameters of the workpiece to be processed, and controls the laser direct writing module 100 to process the workpiece according to the processing parameters. After the laser direct writing process is completed, the electronic control system controls the laser direct writing module 100 to turn off the laser. The electronic control system switches to the online detection mode. In the online detection mode, the electronic control system controls the microscopic imaging module 200 and the three-dimensional imaging module 300 to work together to obtain the bright-field image, dark-field image and three-dimensional image of the workpiece processing area. These images contain the surface topography and quality information of the workpiece after processing. The electronic control system performs data fusion processing on these multi-source images and comprehensively analyzes to obtain the online detection result. More importantly, the electronic control system can reverse-optimize the processing parameters of the laser direct writing module 100 according to the online detection result. Thus, the processing process forms a closed-loop feedback electronic control system, realizing real-time online detection of the processing result and parameter optimization, overcoming the defects of low efficiency and untimely feedback of traditional offline detection, improving the automation degree, efficiency and processing quality of laser direct writing processing. By guiding the subsequent processing parameter adjustment based on the online detection result, more accurate and high-quality laser direct writing processing can be achieved.

[0056] Specifically, the usage method begins with the operator setting or the system presetting the processing parameters. The processing parameters can include laser power, scanning speed, and pattern. The electronic control system then sends a signal to the laser direct writing module 100 to drive the laser direct writing module 100 to perform the manufacturing process according to these parameters. After the laser direct writing process is completed, the electronic control system stops the laser emission of the laser direct writing module 100 and switches the system to the online detection mode. The mode switch may involve the movement of physical components or just a change in the system operation mode. In the online detection mode, the electronic control system controls the microscopic imaging module 200 and the three-dimensional imaging module 300 to work together to capture images of the processed workpiece area. The microscopic imaging module 200 provides bright-field and dark-field images, and the three-dimensional imaging module 300 provides three-dimensional topography images. After the electronic control system obtains the images from the microscopic imaging module 200 and the three-dimensional imaging module 300, it performs data fusion to obtain a comprehensive evaluation of the processing result. Based on the online detection result, if the detection result indicates a deviation from the expected result, the system modifies the processing parameters (parameters such as laser power and scanning speed) to improve subsequent processing cycles.

[0057] In this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0058] The above are only embodiments of the present application and are not intended to limit the protection scope of the present application. For those skilled in the art, various modifications and changes can be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. A femtosecond laser direct writing device with an online detection function, characterized in that, Comprising: An electric control system and an optical system (500), the optical system (500) including a laser direct writing module (100), a microscopic imaging module (200), a three-dimensional imaging module (300), a first dichroic mirror (7), a second dichroic mirror (8), a laser objective lens (11), a Mirau type interference objective lens (12), an imaging objective lens (13), and an objective lens linear switching platform (10); The laser direct writing module (100) is used to emit femtosecond laser, and make the femtosecond laser pass through the first dichroic mirror (7), the second dichroic mirror (8), and the laser objective lens (11) in sequence to process a workpiece; The three-dimensional imaging module (300) is used to emit a continuous spectrum beam, and the continuous spectrum beam is split into a reference beam and a measurement beam by the Mirau type interference objective lens (12), and the three-dimensional imaging module (300) is also used to obtain a three-dimensional image of the workpiece according to the returned reference beam and measurement beam; The microscopic imaging module (200) is used to emit bright field illumination light and dark field illumination light in sequence to irradiate the workpiece to form bright field reflected light and dark field reflected light, and the microscopic imaging module (200) is also used to generate a bright field image and a dark field image respectively according to the returned bright field reflected light and dark field reflected light; The laser objective lens (11), the Mirau type interference objective lens (12), and the imaging objective lens (13) are all arranged on the objective lens linear switching platform (10), and the objective lens linear switching platform (10) is used to switch the positions of the objective lenses so that one of the objective lenses is in the working position; The electric control system is used to generate an on-line detection result according to the bright field image, the dark field image, and the three-dimensional image, and optimize the processing parameters according to the on-line detection result, and the electric control system is also used to control the laser direct writing module (100) to process the workpiece.

2. The femtosecond laser direct writing device with an online detection function according to claim 1, wherein The optical system (500) further includes a focusing platform (9), the focusing platform (9) is connected to the objective lens linear switching platform (10), a focusing sensor (19) is arranged in the microscopic imaging module (200), the focusing sensor (19) is used to emit detection laser, the detection laser is focused on the workpiece surface after passing through the laser objective lens (11), the Mirau type interference objective lens (12), or the imaging objective lens (13) and then reflected and returns along the original path into the focusing sensor (19), and the focusing sensor (19) is also used to output the height information of the focusing focal plane according to the returned detection laser, and the focusing platform (9) is used to adjust the height of the objective lens linear switching platform (10) according to the height information so that the focusing focal plane of the laser objective lens (11), the Mirau type interference objective lens (12), or the imaging objective lens (13) is located on the workpiece surface.

3. The femtosecond laser direct writing device with an online detection function according to claim 1, characterized in that, The microscopic imaging module (200) includes an illumination module (400), a third dichroic mirror (16), a first beam splitter (15), an imaging tube lens (18), and a color camera (17). The illumination module (400) is used to emit bright-field illumination light. The bright-field illumination light is transmitted through the third dichroic mirror (16) and the first beam splitter (15), and then reflected by the second dichroic mirror (8) and passes through the imaging objective lens (13) to irradiate the workpiece to form the bright-field reflected light. The bright-field reflected light is reflected by the second dichroic mirror (8) and the first beam splitter (15) and enters the imaging tube lens (18) for combined imaging to be generated into a bright-field image by the color camera (17). The illumination module (400) is also used to emit dark-field illumination light. The dark-field illumination light is transmitted through the third dichroic mirror (16) and the first beam splitter (15), and then reflected by the second dichroic mirror (8) and passes through the imaging objective lens (13) to irradiate the workpiece to form the dark-field reflected light. The dark-field reflected light is reflected by the second dichroic mirror (8) and the first beam splitter (15) and enters the imaging tube lens (18) for combined imaging to be generated into a dark-field image by the color camera (17). The objective lens linear switching platform (10) is used to align the imaging objective lens (13) with the second dichroic mirror (8).

4. The femtosecond laser direct writing device with an on-line detection function according to claim 3, characterized in that, The illumination module (400) includes a bright-field illumination component (201), a dark-field illumination component (202), a mirror (203), and a second beam splitter (204). The bright-field illumination component (201) is used to emit bright-field illumination light. The bright-field illumination light is reflected by the mirror (203) and the second beam splitter (204) to the third dichroic mirror (16). The dark-field illumination component (202) is used to emit dark-field illumination light. The dark-field illumination light is transmitted through the second beam splitter (204) to the third dichroic mirror (16).

5. The femtosecond laser direct writing device with an online detection function according to claim 4, wherein, Both the bright-field illumination component (201) and the dark-field illumination component (202) include a red LED (211), a red collimating lens (212), a green LED (213), a green collimating lens (214), a blue LED (215), a blue collimating lens (216), and a trichromatic synthesis prism (217). The red LED (211), the green LED (213), and the blue LED (215) are all used to emit light sources and pass through the corresponding collimating lenses. The trichromatic synthesis prism (217) is used to synthesize the light sources emitted by the red LED (211), the green LED (213), and the blue LED (215) into the bright-field illumination light or the dark-field illumination light.

6. The femtosecond laser direct writing device with an online detection function according to claim 1, characterized in that, The three-dimensional imaging module (300) includes an SLD light source (101), a second collimator (102), a polarization beam splitter (103), a quarter wave plate (104), a three-dimensional imaging tube lens (105), a polarizer (106), a three-dimensional camera (107) and a piezoelectric ceramic phase shifter (14). The SLD light source (101) emits the continuous spectrum light beam, which is collimated by the second collimator (102) and then incident on the polarization beam splitter (103). The polarization beam splitter (103) outputs linearly polarized light and is converted into circularly polarized light by the quarter wave plate (104). The circularly polarized light is reflected by the first dichroic mirror (7) and then passes through the second dichroic mirror (8) into the Mirau interference objective lens (12), and is divided into a reference beam and a measurement beam by the Mirau interference objective lens (12). The measurement beam is reflected by the workpiece. The light beam returns to the Mirau interference objective lens (12), and together with the reference light beam, is transmitted through the second dichroic mirror (8) and reflected through the first dichroic mirror (7), and then converted into linearly polarized light through a quarter wave plate (104). The linearly polarized light is reflected through the polarization beam splitter prism (103) and enters the three-dimensional imaging tube lens (105) and the analyzer (106) to form interference fringes. The piezoelectric ceramic phase shifter (14) is respectively connected to the Mirau interference objective lens (12) and the objective lens linear switching platform (10). The piezoelectric ceramic phase shifter (14) is used to adjust the interference phase shift of the Mirau interference objective lens (12). The three-dimensional camera (107) is used to generate a three-dimensional image according to the interference fringes and the interference phase shift. The objective lens linear switching platform (10) is used to align the Mirau interference objective lens (12) with the second dichroic mirror (8).

7. The femtosecond laser direct writing device with an online detection function according to claim 1, characterized in that, The laser direct writing module (100) comprises a femtosecond laser (1), an automatic attenuator (2), a two-dimensional scanning galvanometer group (4), an F-θ field mirror (5) and a laser tube mirror (6). The femtosecond laser (1) is used to emit a femtosecond laser. After passing through the automatic attenuator (2), the femtosecond laser is transmitted to the F-θ field mirror (5) through the two-dimensional scanning galvanometer group (4) to form a focused light spot. The focused light spot is scaled by the laser tube mirror (6) and then sequentially passes through a first dichroic mirror (7), a second dichroic mirror (8) and a laser objective lens (11) to process a workpiece. The automatic attenuator (2) has a built-in mechanical shutter, which can turn off the laser. The objective lens linear switching platform (10) is used to align the laser objective lens (11) with the second dichroic mirror (8).

8. The femtosecond laser direct writing device with an online detection function according to claim 1, characterized in that, The laser direct writing module (100) further comprises a continuous zoom lens (3), and the continuous zoom lens (3) is used to convert the femtosecond laser into a circular flat-top light spot of corresponding magnification according to different magnifications.

9. The femtosecond laser direct writing device with an online detection function according to claim 1, characterized in that, The electric control system includes a moving workpiece table (501), a fixing frame (502), an electric control unit (503) and a computer (504). The fixing frame (502) is arranged on the moving workpiece table (501). The fixing frame (502) is used for installing the optical system (500). The electric control unit (503) is connected to the computer (504). The electric control unit (503) is connected to the optical system (500) and the moving workpiece table (501). The moving workpiece table (501) is used for placing the workpiece to be processed. The electric control unit (503) is used for controlling the operation of the optical system (500) and the moving workpiece table (501). The computer (504) is used for controlling the automated operation of the optical system (500) and the moving workpiece table (501).

10. A method for using a femtosecond laser direct writing device with an online detection function, characterized in that, Based on the femtosecond laser direct writing device with an online detection function according to any one of claims 1-9, the method for using the femtosecond laser direct writing device with an online detection function includes the steps: The electric control system obtains the processing parameters of the workpiece to be processed, and the electric control system controls the laser direct writing module (100) to process the workpiece according to the processing parameters; After the direct writing process is completed, the electric control system controls the laser direct writing module (100) to turn off the laser to switch to the online detection mode; In the online detection mode, the electric control system controls the microscopic imaging module (200) and the three-dimensional imaging module (300) to operate to obtain the bright field image, the dark field image and the three-dimensional image; The electric control system performs data fusion processing according to the bright field image, the dark field image and the three-dimensional image to obtain the online detection result; The electric control system is further used for optimizing the processing parameters of the laser direct writing module (100) according to the online detection result.

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