Laser coating device and coating method for transparent material
By designing a laser coating device that includes components such as fixed seats, motors, rotating rods, gears, threaded rods, etc., combined with ion flow and laser treatment, the problems of transparent materials with low coating accuracy and pinhole bubbles are solved, and high-precision and dense film deposition are achieved, suitable for irregular surfaces.
Patent Information
- Application Number
- CN202410999707.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-24
- Publication Date
- 2025-07-29
AI Technical Summary
When existing laser coating equipment coats transparent materials, the coating accuracy is low, it is difficult to control the film thickness and composition, and problems such as pinholes and bubbles are prone to occur, and it is impossible to coat the irregular product surface with grooves or water chestnuts.
A laser coating device is adopted to ensure that the target material is fixed and the angle adjustment of the substrate is adjusted by setting up components such as fixing seats, motors, rotating rods, gears, threaded rods, sliders, air pumps, etc. by combining the use of ion flow and lasers, ensuring that the target material atoms or molecules are sputtered onto the substrate, and the deposition rate and film structure are controlled by laser.
High-precision coating of transparent materials is achieved, the film is densely structured, without pinholes or bubbles, and can be coated on irregular surfaces with grooves or corners, and compounds, alloys, and non-metals can all form films.
Smart Images
Figure CN120384261A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of coating equipment, and specifically to a laser coating device and a coating method for transparent materials. Background Art
[0002] Laser electroplating is a newly emerging high-energy beam electroplating technology, which is of great significance for the production and repair of microelectronic devices and large-scale integrated circuits. As a new type of coating equipment, laser coating equipment has a wide range of applications and can be used to prepare thin films of various substances such as metals, semiconductors, oxides, nitrides, carbides, borides, silicides, sulfides, and fluorides. It can even be used to prepare some difficult-to-synthesize material films, such as diamond and cubic nitride films. In a laser coating equipment, the laser emitted from a laser passes through a laser window part and enters a coating cavity, and bombards a target material, so that the target material evaporates or even ionizes and moves towards a substrate, thereby forming a thin film material.
[0003] Most of the existing laser coating equipments cannot improve the coating precision when coating transparent materials, cannot well control the thickness and composition of the thin film, and problems such as pinholes and bubbles will occur, and they cannot coat on the surface of irregular products with grooves or edges. Therefore, the technical personnel in this field provide a laser coating device and a coating method for transparent materials to solve the problems raised in the above background art. Summary of the Invention
[0004] (1) Technical Problems to be Solved
[0005] Aiming at the deficiencies of the prior art, the present invention provides a laser coating device and a coating method for transparent materials, which can have high coating precision, can accurately control the thickness and composition of the thin film. After adopting the ion plating process, the coating quality is very good, the coating structure is dense, and conventional coatings such as pinholes and bubbles will not be generated. The surface of the product is evenly thick and thin, and ion coating can even be carried out on the surface of irregular products with grooves or edges. The ion adhesion performance is good, and compounds, alloys, and non-metals can all form films, solving the problems that when coating transparent materials, it cannot improve the coating precision, cannot well control the thickness and composition of the thin film, and problems such as pinholes and bubbles will occur, and it cannot coat on the surface of irregular products with grooves or edges.
[0006] (2) Technical Solutions
[0007] To achieve the above object, the present invention is realized by the following technical solutions: A laser coating device and coating method for transparent materials, including a box body, the inner side wall of the box body is fixedly connected with a fixed seat, a first motor is fixedly arranged on the outer side of the fixed seat, the output end of the first motor is fixedly connected with a rotating rod, one end of the rotating rod is fixedly connected with a driving gear, both sides of the outer side wall of the driving gear are engaged with driven gears, one side of each of the two driven gears is penetrated and connected with a first threaded rod, the outer side walls of the two first threaded rods are both threadedly sleeved with threaded blocks, the upper ends of the two threaded blocks are fixedly connected with connecting rods, the lower end surfaces of the two connecting rods are fixedly connected with sliders, one side of each of the two sliders is fixedly connected with a fixing plate, one side of each of the two fixing plates is fixedly connected with a spring seat, one end of each of the two spring seats away from the fixing plate is fixedly connected with a connecting block, and one side of each of the two connecting blocks is fixedly connected with a clamping block through a connecting plate;
[0008] The inner bottom end surface of the box body is fixedly connected with a base, both sides of the upper end surface of the base are fixedly connected with bearing blocks, a transmission rod is penetrated through one side of each of the two bearing blocks, a second motor is fixedly arranged at one end of the transmission rod, a transmission base is sleeved on the outer side wall of the transmission rod, a bearing block is fixedly connected with the upper end surface of the transmission base, an adjusting seat is fixedly connected with the upper end surface of the bearing block, a second threaded rod is rotatably connected with the inner side wall of the adjusting seat, one end of the second threaded rod is fixedly connected with a rotating disc, an adjusting slider is threadedly sleeved on the outer side wall of the second threaded rod, a fixed base is fixedly connected with the upper end surface of the adjusting slider, air pumps are fixedly arranged on both sides of the outer side wall of the fixed base, the output ends of the two air pumps are fixedly connected with two pneumatic rods, the other ends of the plurality of pneumatic rods away from the air pumps are fixedly connected with clamps, and a buffer layer is laid on one side of each of the two clamps;
[0009] Through the above technical solutions, by setting a fixed seat, a first motor, a rotating rod, a driving gear, a driven gear, a first threaded rod, a threaded block, a connecting rod, a slider, an empty slot, a fixing plate, a spring seat, a connecting block, a connecting plate and a clamping block, the device can be rotated by the first motor to drive the rotating rod, so that the rotating rod drives the driving gear to rotate, thereby driving two driven gears to rotate. When the first threaded rod rotates, it drives the threaded block and the connecting rod to slide, thereby driving the slider to drive the fixing plate and the spring seat to move, so as to fix the target. The ion stream is transmitted through the transmission pipeline to the ion stream emission port by the ion stream emitter, and the target is impacted, so that the atoms or molecules on the surface of the target are sputtered out; by setting a base, a bearing block, a second motor, a transmission rod, a transmission base, a bearing block, an adjustment seat, a rotating disk, a second threaded rod, an adjustment slider, a fixed base, an air pump, a pneumatic rod and a fixture, the device can drive the transmission rod to rotate through the second motor, so that the transmission base can slide to drive the substrate to adjust the angle. By rotating the rotating disk, the second threaded rod rotates to drive the adjustment slider to slide, so as to adjust the substrate, receive the sputtered target atoms or molecules, and drive the pneumatic rod to push the fixture to fix the substrate through the air pump, so that the substrate will not slide when moving for coating.
[0010] Preferably, an ion stream emitter is fixedly connected to the upper end surface of the box body, a transmission pipeline is fixedly connected to one side of the ion stream emitter, and an ion stream emission port is fixedly connected to the end of the transmission pipeline far from the ion stream emitter;
[0011] Through the above technical solutions, the device can emit an ion stream.
[0012] Preferably, a laser emitter is fixedly arranged on one side of the outer side wall of the box body, a laser emission port is fixedly connected to one side of the laser emitter, and one end of the laser emission port penetrates through the box body;
[0013] Through the above technical solutions, for the atoms and molecules sputtered out by the ion stream, irradiating the substrate or the sputtering process with laser can change the deposition rate, film structure and performance, and the high energy of the laser can promote the evaporation and deposition of the target.
[0014] Preferably, a box door is rotatably connected to the front end surface of the box body, and a handle is fixedly connected to one side of the front section surface of the box door;
[0015] Through the above technical solutions, by setting the box door, the device can be opened to put in the target and the substrate.
[0016] Preferably, an observation window is embedded in the front end surface of the box door;
[0017] Through the above technical solutions, by setting the observation window, the device can observe the coating situation.
[0018] Preferably, two sliding grooves are formed in the upper end surface of the base, and a transmission base is slidably connected to the inner side walls of the two sliding grooves;
[0019] Through the above technical solution, by providing the sliding grooves, the transmission base can slide.
[0020] Preferably, an empty groove is formed in the upper end surface of the fixed seat, and two sliders are slidably connected to the inner side wall of the empty groove;
[0021] Through the above technical solution, by providing the empty groove, the molecules and atoms generated by the impact of the target can be sputtered onto the substrate.
[0022] Preferably, the laser emission port is located between the base and the fixed seat;
[0023] Through the above technical solution, by providing the laser emission port between the base and the fixed seat, the atoms and molecules sputtered out by the ion stream can be irradiated with laser on the substrate or during the sputtering process, which can change the deposition rate, film structure and performance. The high energy of the laser can promote the evaporation and deposition of the target.
[0024] Preferably, a laser coating method for transparent materials is characterized in that it comprises the following steps:
[0025] S1: Select a suitable target according to the coating requirements, such as metals, oxide compounds, etc., and clean the substrate to ensure the coating quality.
[0026] S2: Use an ion source to generate an ion beam. The ion source can be a DC ion source, a radio frequency ion source or a microwave ion source, etc. Use the ion source to generate a high-speed ion beam, and then aim this ion beam at the target. The ion beam impacts the target, causing the atoms or molecules on the surface of the target to be sputtered out.
[0027] S3: The sputtered target atoms or molecules fly towards the substrate in a vacuum environment and deposit on the substrate to form a film. During ion sputtering, irradiating the substrate or the sputtering process with laser can change the deposition rate, film structure and performance. The high energy of the laser can promote the evaporation and deposition of the target, improving the quality and uniformity of the film.
[0028] S4: During the whole process, by adjusting parameters such as ion beam intensity, laser power, sputtering time, substrate temperature, etc., the characteristics such as film thickness, composition, lattice structure, etc. can be precisely controlled.
[0029] S5: After the coating is completed, wait for the substrate to cool down to make the transparent film firmly adhere to the substrate, and process the deposited transparent film, such as annealing, oxidation or nitriding, etc., to improve the film performance
[0030] Working principle: The device rotates the first motor to drive the rotating rod, so that the rotating rod drives the driving gear to rotate, thereby driving the two driven gears to rotate. When the first threaded rod rotates, it drives the threaded block and the connecting rod to slide, thereby driving the slider to drive the fixing plate and the spring seat to move, fixing the target. The ion beam emitter transmits the ion beam through the transmission pipeline to the ion beam emission port to impact the target, so that the atoms or molecules on the surface of the target are sputtered out. The device drives the transmission rod to rotate through the second motor, so that the transmission base slides to drive the substrate to adjust the angle. By rotating the rotating disc, the second threaded rod rotates to drive the adjustment slider to slide, adjusting the substrate to receive the sputtered target atoms or molecules. The air pump drives the pneumatic rod to push the fixture to fix the substrate, so that the substrate will not slide when moving for coating.
[0031] (III) Beneficial effects
[0032] The present invention provides a laser coating device and a coating method for transparent materials. It has the following
[0033] Beneficial effects:
[0034] 1. The present invention provides a laser coating device and a coating method for transparent materials. By setting the fixed seat, the first motor, the rotating rod, the driving gear, the driven gears, the first threaded rod, the threaded block, the connecting rod, the slider, the empty slot, the fixing plate, the spring seat, the connecting block, the connecting plate and the clamping block, the device can drive the rotating rod by rotating the first motor, so that the rotating rod drives the driving gear to rotate, thereby driving the two driven gears to rotate. When the first threaded rod rotates, it drives the threaded block and the connecting rod to slide, thereby driving the slider to drive the fixing plate and the spring seat to move, fixing the target. The ion beam emitter transmits the ion beam through the transmission pipeline to the ion beam emission port to impact the target, so that the atoms or molecules on the surface of the target are sputtered out.
[0035] 2. The present invention provides a laser coating device and a coating method for transparent materials. By setting the base, the bearing block, the second motor, the transmission rod, the transmission base, the bearing block, the adjustment seat, the rotating disc, the second threaded rod, the adjustment slider, the fixed base, the air pump, the pneumatic rod and the fixture, the device can drive the transmission rod to rotate through the second motor, so that the transmission base slides to drive the substrate to adjust the angle. By rotating the rotating disc, the second threaded rod rotates to drive the adjustment slider to slide, adjusting the substrate to receive the sputtered target atoms or molecules.
[0036] 3. The present invention provides a laser coating device and a coating method for transparent materials. The air pump drives the pneumatic rod to push the fixture to fix the substrate, so that the substrate will not slip when moving for coating. BRIEF DESCRIPTION OF THE DRAWINGS
[0037] Figure 1 It is a schematic diagram of the main structure of the present invention;
[0038] Figure 2 It is a front sectional view of the present invention;
[0039] Figure 3 It is a schematic diagram of the adjustment mechanism structure of the present invention;
[0040] Figure 4 It is a schematic diagram of the fixing mechanism structure of the present invention;
[0041] Figure 5 It is a schematic diagram of the transmission mechanism structure of the present invention;
[0042] Figure 6 For the present invention Figure 4 An enlarged view of part A in
[0043] Wherein, 1. Box body; 2. Box door; 3. Handle; 4. Observation window; 5. Ion flow emitter; 6. Transmission pipeline; 7. Ion flow emission port; 8. Fixed seat; 9. First motor; 10. Rotating rod; 11. Driving gear; 12. Driven gear; 13. First threaded rod; 14. Threaded block; 15. Connecting rod; 16. Slide block; 17. Empty slot; 18. Fixed plate; 19. Spring seat; 20. Connecting block; 21. Connecting plate; 22. Clamping block; 23. Base; 24. Bearing block; 25. Second motor; 26. Transmission rod; 27. Transmission base; 28. Bearing block; 29. Adjustment seat; 30. Rotating disk; 31. Second threaded rod; 32. Adjustment slide block; 33. Fixed base; 34. Air pump; 35. Pneumatic rod; 36. Fixture; 37. Buffer layer; 38. Sliding slot; 39. Laser emitter; 40. Laser emission port. DETAILED DESCRIPTION OF THE INVENTION
[0044] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention. In the description of the present application, it should be noted that the terms used herein are only for the purpose of describing specific embodiments, and are not intended to limit the exemplary embodiments of the present application. For the convenience of description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationship. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the said technologies, methods, and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific value should be construed as merely exemplary, rather than as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further discussed in the subsequent drawings.
[0045] Embodiment 1:
[0046] As Figures 1-6 shown, the embodiment of the present invention provides a laser coating device and a coating method for transparent materials, including a box body 1. A fixed seat 8 is fixedly connected to the inner side wall of the box body 1. A first motor 9 is fixedly arranged on the outer side of the fixed seat 8. The output end of the first motor 9 is fixedly connected to a rotating rod 10. One end of the rotating rod 10 is fixedly connected to a driving gear 11. Both sides of the outer side wall of the driving gear 11 are engaged with driven gears 12. A first threaded rod 13 penetrates through one side of each of the two driven gears 12. Threaded blocks 14 are sleeved on the outer side walls of the two first threaded rods 13. Connecting rods 15 are fixedly connected to the upper ends of the two threaded blocks 14. Sliders 16 are fixedly connected to the lower end surfaces of the two connecting rods 15. Fixing plates 18 are fixedly connected to one side of each of the two sliders 16. Spring seats 19 are fixedly connected to one side of each of the two fixing plates 18. Connecting blocks 20 are fixedly connected to the ends of the two spring seats 19 away from the fixing plates 18. Clamping blocks 22 are fixedly connected to one side of the two connecting blocks 20 through a connecting plate 21;
[0047] The inner bottom end face of the box body 1 is fixedly connected with a base 23. Both sides of the upper end face of the base 23 are fixedly connected with bearing blocks 24. A transmission rod 26 is arranged through one side of the two bearing blocks 24. One end of the transmission rod 26 is fixedly provided with a second motor 25. A transmission base 27 is sleeved on the outer side wall of the transmission rod 26. The upper end face of the transmission base 27 is fixedly connected with a bearing block 28. The upper end face of the bearing block 28 is fixedly connected with an adjustment base 29. The inner side wall of the adjustment base 29 is rotatably connected with a second threaded rod 31. One end of the second threaded rod 31 is fixedly connected with a rotating disk 30. An adjustment slider 32 is threadedly sleeved on the outer side wall of the second threaded rod 31. The upper end face of the adjustment slider 32 is fixedly connected with a fixed base 33. Both sides of the outer side wall of the fixed base 33 are fixedly provided with air pumps 34. The output ends of the two air pumps 34 are fixedly connected with two pneumatic rods 35. One end of the multiple pneumatic rods 35 away from the air pumps 34 is fixedly connected with a clamp 36. A buffer layer 37 is laid on one side of the two clamps 36. By arranging the fixed seat 8, the first motor 9, the rotating rod 10, the driving gear 11, the driven gear 12, the first threaded rod 13, the threaded block 14, the connecting rod 15, the slider 16, the empty groove 17, the fixing plate 18, the spring seat 19, the connecting block 20, the connecting plate 21 and the clamping block 22, the device can be rotated by the first motor 9 to drive the rotating rod 10, so that the rotating rod 10 drives the driving gear 11 to rotate, thereby driving the two driven gears 12 to rotate, so that when the first threaded rod 13 rotates, it drives the threaded block 14 and the connecting rod 15 to slide, thereby driving the slider 16 to drive the fixing plate 18 and the spring seat 19 to move, so as to fix the target. The ion stream is transmitted to the ion stream emission port 7 through the transmission pipeline 6 by the ion stream emitter 5 to impact the target, so that the atoms or molecules on the surface of the target are sputtered out; by arranging the base 23, the bearing block 24, the second motor 25, the transmission rod 26, the transmission base 27, the bearing block 28, the adjustment base 29, the rotating disk 30, the second threaded rod 31, the adjustment slider 32, the fixed base 33, the air pump 34, the pneumatic rod 35 and the clamp 36, the device can drive the transmission rod 26 to rotate through the second motor 25, so that the transmission base 27 can slide to drive the substrate to adjust the angle. By rotating the rotating disk 30, the second threaded rod 31 rotates to drive the adjustment slider 32 to slide, so as to adjust the substrate, receive the sputtered target atoms or molecules, and drive the pneumatic rod 35 to push the clamp 36 to fix the substrate through the air pump 34, so that the substrate will not slide when moving for coating.
[0048] The upper end face of the box body 1 is fixedly connected with an ion stream emitter 5. One side of the ion stream emitter 5 is fixedly connected with a transmission pipeline 6. One end of the transmission pipeline 6 away from the ion stream emitter 5 is fixedly connected with an ion stream emission port 7;
[0049] Through the above technical solution, the device can emit an ion stream.
[0050] Preferably, a laser emitter 39 is fixedly arranged on one side of the outer side wall of the box body 1, and a laser emission port 40 is fixedly connected to one side of the laser emitter 39. One end of the laser emission port 40 penetrates through the box body 1.
[0051] Through the above technical solution, the atoms and molecules ejected by ion beam sputtering can be irradiated with laser on the substrate or during the sputtering process, which can change the deposition rate, film structure and properties. The high energy of the laser can promote the evaporation and deposition of the target material.
[0052] Preferably, a box door 2 is rotatably connected to the front end face of the box body 1, and a handle 3 is fixedly connected to one side of the front section face of the box door 2.
[0053] Through the above technical solution, by providing the box door 2, the device can be opened to put in the target material and the substrate.
[0054] Preferably, an observation window 4 is embedded in the front end face of the box door 2.
[0055] Through the above technical solution, by providing the observation window 4, the coating situation of the device can be observed.
[0056] Preferably, two sliding grooves 38 are formed in the upper end face of the base 23, and a transmission base 27 is slidably connected to the inner side walls of the two sliding grooves 38.
[0057] Through the above technical solution, by providing the sliding grooves 38, the transmission base 27 can slide.
[0058] Preferably, an empty groove 17 is formed in the upper end face of the fixed seat 8, and two sliders 16 are slidably connected to the inner side walls of the empty groove 17.
[0059] Through the above technical solution, by providing the empty groove 17, the molecules and atoms generated by the impact of the target material can be sputtered onto the substrate.
[0060] Preferably, the laser emission port 40 is located between the base 23 and the fixed seat 8.
[0061] Through the above technical solution, by setting the laser emission port 40 between the base 23 and the fixed seat 8, the atoms and molecules ejected by ion beam sputtering can be irradiated with laser on the substrate or during the sputtering process, which can change the deposition rate, film structure and properties. The high energy of the laser can promote the evaporation and deposition of the target material.
[0062] Preferably, a laser coating method for transparent materials is characterized by comprising the following steps:
[0063] S1: Select a suitable target material according to the coating requirements, such as metals, oxide compounds, etc., and clean the substrate to ensure the coating quality.
[0064] S2: Generate an ion beam using an ion source, which can be a DC ion source, a radio frequency ion source, a microwave ion source, etc. Use an ion source such as an argon ion gun to generate a high-speed ion beam, and then aim this ion beam at the thin film material to be prepared on the target. The ion beam impacts the target, causing atoms or molecules on the surface of the target to be sputtered out.
[0065] S3: The sputtered target atoms or molecules fly towards the substrate (the object to be coated) in a vacuum environment and deposit on the substrate to form a thin film. During ion sputtering, irradiating the substrate or the sputtering process with a laser can change the deposition rate, thin film structure, and properties. The high energy of the laser can promote the evaporation and deposition of the target, improving the quality and uniformity of the thin film.
[0066] S4: During the whole process, by adjusting parameters such as ion beam intensity, laser power, sputtering time, and substrate temperature, the characteristics of the thin film such as thickness, composition, and lattice structure can be precisely controlled.
[0067] S5: After the coating is completed, wait for the substrate to cool down to make the transparent thin film firmly adhere to the substrate, and process the deposited transparent thin film, such as annealing, oxidation, or nitridation, etc., to improve the performance of the thin film.
[0068] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A laser coating device for transparent materials, comprising a box body (1), characterized in that: The inner side wall of the box body (1) is fixedly connected with a fixed seat (8). A first motor (9) is fixedly arranged on the outer side of the fixed seat (8). The output end of the first motor (9) is fixedly connected with a rotating rod (10). One end of the rotating rod (10) is fixedly connected with a driving gear (11). Both sides of the outer side wall of the driving gear (11) are meshed with driven gears (12). One side of each of the two driven gears (12) is connected through a first threaded rod (13). Threaded blocks (14) are sleeved on the outer side walls of the two first threaded rods (13). Connecting rods (15) are fixedly connected to the upper ends of the two threaded blocks (14). Sliders (16) are fixedly connected to the lower end faces of the two connecting rods (15). Fixing plates (18) are fixedly connected to one side of each of the two sliders (16). Spring seats (19) are fixedly connected to one side of each of the two fixing plates (18). Connecting blocks (20) are fixedly connected to the ends of the two spring seats (19) away from the fixing plates (18). Clamping blocks (22) are fixedly connected to one side of the two connecting blocks (20) through a connecting plate (21). The inner bottom end face of the box body (1) is fixedly connected with a base (23). Bearing blocks (24) are fixedly connected to both sides of the upper end face of the base (23). A transmission rod (26) is arranged through one side of each of the two bearing blocks (24). A second motor (25) is fixedly arranged at one end of the transmission rod (26). A transmission base (27) is sleeved on the outer side wall of the transmission rod (26). A bearing block (28) is fixedly connected to the upper end face of the transmission base (27). An adjusting seat (29) is fixedly connected to the upper end face of the bearing block (28). A second threaded rod (31) is rotatably connected to the inner side wall of the adjusting seat (29). A rotating disc (30) is fixedly connected to one end of the second threaded rod (31). An adjusting slider (32) is sleeved on the outer side wall of the second threaded rod (31). A fixed base (33) is fixedly connected to the upper end face of the adjusting slider (32). Air pumps (34) are fixedly arranged on both sides of the outer side wall of the fixed base (33). The output ends of the two air pumps (34) are fixedly connected with two pneumatic rods (35). The ends of the plurality of pneumatic rods (35) away from the air pumps (34) are fixedly connected with clamps (36). A buffer layer (37) is laid on one side of each of the two clamps (36).
2. The laser coating device and coating method for transparent materials according to claim 1, characterized in that: An ion flow emitter (5) is fixedly connected to the upper end face of the box body (1). A transmission pipeline (6) is fixedly connected to one side of the ion flow emitter (5). An ion flow emission port (7) is fixedly connected to the end of the transmission pipeline (6) away from the ion flow emitter (5).
3. The laser coating device and coating method for transparent materials according to claim 1, characterized in that: A laser emitter (39) is fixedly arranged on one side of the outer side wall of the box body (1). A laser emission port (40) is fixedly connected to one side of the laser emitter (39). One end of the laser emission port (40) penetrates through the box body (1).
4. A laser coating device and coating method for transparent materials according to claim 1, characterized in that: A door (2) is rotatably connected to the front end face of the box body (1), and a handle (3) is fixedly connected to one side of the front section face of the door (2).
5. A laser coating device and coating method for transparent materials according to claim 1, characterized in that: An observation window (4) is embedded in the front end face of the door (2).
6. The laser coating device and coating method for transparent materials according to claim 1, characterized in that: Two sliding grooves (38) are formed in the upper end face of the base (23), and a transmission base (27) is slidably connected to the inner side walls of the two sliding grooves (38).
7. A laser coating device and coating method for transparent materials according to claim 1, characterized in that: An empty groove (17) is formed in the upper end face of the fixed seat (8), and two sliders (16) are slidably connected to the inner side wall of the empty groove (17).
8. The laser coating device and coating method for transparent materials according to claim 3, characterized in that: The laser emission port (40) is located between the base (23) and the fixed seat (8).
9. A laser coating method for transparent materials, characterized in that: It includes the following steps: S1: Select a suitable target material according to the requirements of film coating, such as metals, oxide compounds, etc., and clean the substrate to ensure the quality of the film coating. S2: Use an ion source to generate an ion beam. The ion source can be a DC ion source, a radio frequency ion source, a microwave ion source, etc. Use an ion source (such as an argon ion gun) to generate a high-speed ion beam, and then aim this ion beam at the target material (the thin film material to be prepared). The ion beam impacts the target material, causing atoms or molecules on the surface of the target material to be sputtered out. S3: The sputtered target material atoms or molecules fly towards the substrate (the object to be coated with a film) in a vacuum environment and deposit on the substrate to form a thin film. During ion sputtering, irradiating the substrate or the sputtering process with a laser can change the deposition rate, thin film structure, and properties. The high energy of the laser can promote the evaporation and deposition of the target material, improving the quality and uniformity of the thin film. S4: During the whole process, by adjusting parameters such as ion beam intensity, laser power, sputtering time, and substrate temperature, the characteristics of the thin film such as thickness, composition, and lattice structure can be precisely controlled. S5: After the film coating is completed, wait for the substrate to cool down to make the transparent thin film firmly adhere to the substrate, and process the deposited transparent thin film, such as annealing, oxidation, or nitridation, etc., to improve the performance of the thin film.