Optical machine adjusting equipment and automatic optical detection system

Abstract

The invention relates to an optical machine adjusting device and an automatic optical detection system, and the optical machine adjusting device comprises an optical machine adjustable bearing mechanism and a camera adjustable bearing mechanism at the same time, and through the arrangement of a related movable connection module, the position adjustment of an optical machine module in the system can be met; and meanwhile, the adjustment of the relative position of the camera module and the optical machine module can be met, so that the automatic optical detection system is higher in precision when being applied. The automatic optical detection system with the optical machine adjusting equipment has the characteristics of high precision, easiness in adjustment and good adaptability.

Description

Technical Field

[0001] The present invention relates to the technical field of precision equipment carriers, and particularly to an optical machine adjustment device and an automatic optical detection system. Background Art

[0002] For an optical detection instrument, which is a precision instrument, the position settings of related components will greatly affect the subsequent use of the instrument. Generally, an optical detection instrument includes components such as a camera, an optical machine, and a carrier mechanism. If the relative positions of the components in the device are not adjusted properly, effective image capture cannot be performed subsequently.

[0003] In the prior art, the optical detection instrument usually only adjusts the position of the optical machine in the device, while ignoring the relative position relationship of other components. Therefore, the optical detection instrument in the prior art cannot meet the actual application requirements. Summary of the Invention

[0004] In view of the above-mentioned defects of the prior art, the present invention provides an optical machine adjustment device and an automatic optical detection system that at least overcome the above-mentioned disadvantages, are easy to operate, have high adjustment accuracy, and good adaptability.

[0005] In order to achieve the above object, the optical machine adjustment device and the automatic optical detection system of the present invention are as follows:

[0006] The optical machine adjustment device is mainly characterized in that the optical machine adjustment device includes an optically adjustable carrier mechanism 1 and a camera adjustable carrier mechanism;

[0007] The optically adjustable carrier mechanism includes an optical machine carrier module, a substrate module, a first movable connection module, and a first adjustment module;

[0008] The optical machine carrier module is connected to the substrate module through the first movable connection module, and the first adjustment module is used to adjust the state of the first movable connection module to adjust the relative position relationship between the optical machine carrier module and the substrate module;

[0009] The camera adjustable carrier mechanism includes an optical machine docking part, a second movable connection module, a camera docking part, and a second adjustment module;

[0010] The optical machine docking part is connected to the camera docking part through the second movable connection module, and the second adjustment module is used to adjust the state of the second movable connection module to adjust the relative position relationship between the optical machine docking part and the camera docking part. An avoidance space for the optical path to pass through is provided in the optical machine docking part, the second movable connection module, and the camera docking part.

[0011] The optical engine adjustment device, wherein the optical engine adjustment device further includes a master control module, and the master control module is used to generate an optical engine adjustment drive signal, and the optical engine adjustment drive signal can be used to drive the first adjustment module and / or the second adjustment module to operate.

[0012] The optical engine adjustment device, wherein the first movable connection module includes a first rotation adjustment unit, the optical engine adjustment drive signal includes a first drive signal, and the first adjustment module includes a first rotation adjustment drive unit;

[0013] The first rotation adjustment unit includes a swing member, and the swing member is used to drive the optical engine carrier module to adjust the rotation angle relative to the substrate module;

[0014] The master control module is used to send the first drive signal to the first rotation adjustment drive unit;

[0015] The first rotation adjustment drive unit is used to adjust the rotation angle of the swing member according to the first drive signal.

[0016] The optical engine adjustment device, wherein the swing member is connected to the substrate module through a rotating shaft, and the swing member can rotate relative to the substrate module under the drive of the first rotation adjustment drive unit.

[0017] The optical engine adjustment device, wherein the first rotation adjustment drive unit includes a plurality of groups of first drive modules respectively arranged on both sides of the substrate module, and the first drive module is used to push the swing member according to the first drive signal to adjust the rotation angle of the swing member.

[0018] The optical engine adjustment device, wherein the first drive module includes:

[0019] A first drive sub-unit, including a first drive device and a first push rod component, and the first drive device is used to control the expansion and contraction of the first push rod component according to the first drive signal;

[0020] A first support sub-unit, including a first elastic support component and a first bearing component, the first bearing component is arranged on the substrate module, and the first elastic support component is arranged on the first bearing component;

[0021] The swing member includes a swing part and a first pushing part, and the first pushing part extends from the swing part between the first push rod component and the first elastic support component.

[0022] The optical engine adjustment device, wherein the first rotation adjustment unit further includes a first locking member, and the first locking member is used to fix the relative position between the swing member and the substrate module after the swing member rotates relative to the substrate module to a target relative rotation angle.

[0023] The optical engine adjustment device, wherein the first movable connection module includes a pitch adjustment unit, the optical engine adjustment drive signal includes a second drive signal, and the first adjustment module includes a pitch adjustment drive unit;

[0024] The pitch adjustment unit includes a pitch adjustment member, and the pitch adjustment member is used to drive the optical engine carrier module to adjust the pitch angle relative to the substrate module;

[0025] The total control module is used to send the second drive signal to the pitch adjustment drive unit;

[0026] The pitch adjustment drive unit is used to adjust the pitch angle of the pitch adjustment member according to the second drive signal.

[0027] The optical engine adjustment device, wherein the pitch adjustment unit further includes a carrier plate, an active fulcrum component is provided between the pitch adjustment member and the carrier plate, the carrier plate and the pitch adjustment member are respectively connected to the optical engine carrier module and the substrate module, and the pitch adjustment member can generate a pitch swing relative to the carrier plate through the active fulcrum component.

[0028] The optical engine adjustment device, wherein the active fulcrum component includes a spherical component, a first fulcrum receiving groove is provided on the carrier plate, a second fulcrum receiving groove is provided on the pitch adjustment member, both ends of the spherical component are respectively located in the first fulcrum receiving groove and the second fulcrum receiving groove, and the total height of the first fulcrum receiving groove and the second fulcrum receiving groove is less than the height of the spherical component.

[0029] The optical engine adjustment device, wherein the pitch adjustment drive unit includes at least two second drive modules, and several second drive modules are arranged on the pitch adjustment unit non-collinearly with the active fulcrum component, and each second drive module is used to adjust the distance between the carrier plate and the pitch adjustment member at the position where it is located according to the second drive signal, so as to adjust the angle of the pitch swing generated by the pitch adjustment member relative to the carrier plate.

[0030] The optical engine adjustment device, wherein the second drive module includes:

[0031] The second driving subunit includes a second driving device and a second push rod component. The second push rod component is located between the bearing plate and the pitching adjustment component. The second driving device is used to control the telescopic movement of the second push rod component according to the second driving signal, so as to adjust the distance between the bearing plate at the position where the corresponding second driving subunit is located and the pitching adjustment component.

[0032] The optical engine adjustment device, wherein the movable fulcrum component includes two of the spherical components;

[0033] The bearing plate includes two first fulcrum receiving grooves, which are respectively located at both ends of the top edge of the bearing plate or at both ends of the bottom edge of the bearing plate;

[0034] The pitching adjustment component includes two second fulcrum receiving grooves, which are respectively located at positions on the pitching adjustment component that are opposite to the two first fulcrum receiving grooves on the bearing plate;

[0035] The two spherical components are respectively located between the corresponding first fulcrum receiving grooves and the second fulcrum receiving grooves.

[0036] The optical engine adjustment device, wherein the pitching adjustment driving unit includes two of the second driving modules, and the two second driving modules are respectively located on both side edges of the pitching adjustment driving unit.

[0037] The optical engine adjustment device, wherein several second elastic support components are also distributed between the bearing plate and the pitching adjustment component.

[0038] The optical engine adjustment device, wherein the pitching adjustment unit further includes a second locking component, and the second locking component is used to fix the relative position between the pitching adjustment component and the bearing plate after the pitching adjustment component is adjusted to the target relative pitching angle with respect to the bearing plate.

[0039] The optical engine adjustment device, wherein the second movable connection module includes a docking base; the second adjustment module includes a second rotary adjustment driving unit and a lifting driving unit;

[0040] The docking base, the optical engine docking part and the camera docking part are all of hollow structures, and the docking base, the optical engine docking part and the camera docking part are coaxially arranged to form the avoidance space for the light path to pass through in the middle of the second movable connection module;

[0041] The camera docking part is located on the first side of the docking base, and the camera docking part can rotate relative to the docking base around the axis under the drive of the second rotary adjustment driving unit;

[0042] The optical machine docking part is nested and connected with the docking base, and the optical machine docking part can move up and down axially relative to the docking base under the drive of the lifting drive unit.

[0043] For the optical machine adjustment device, wherein the docking base includes a first sleeve part and a first docking plate part connected to each other, and the first docking plate part is located on one side of the first sleeve part adjacent to the camera docking part;

[0044] The optical machine docking part includes a second sleeve part and a second docking plate part connected to each other;

[0045] The first sleeve part is connected to the camera docking part through the first docking plate part, the second sleeve part is nested and connected with the first sleeve part, and the second docking plate part is located on the second side of the docking base.

[0046] For the optical machine adjustment device, wherein the optical machine adjustment drive signal includes a third drive signal, and the second rotation adjustment drive unit includes a plurality of third drive modules arranged on the outer side wall of the first sleeve part, and the third drive modules are used to push the camera docking part according to the third drive signal to adjust the relative rotation angle between the camera docking part and the docking base.

[0047] For the optical machine adjustment device, wherein the third drive module includes:

[0048] A third drive sub-unit, including a third drive device and a third push rod component, the third drive device is fixed on the outer side wall of the first sleeve part, and the third drive device is used to control the telescopic movement of the third push rod component according to the third drive signal;

[0049] A second support sub-unit, including a third elastic support component and a second bearing component, the second bearing component is arranged on the outer side wall of the first sleeve part, and the third elastic support component is arranged on the second bearing component;

[0050] The camera docking part includes a docking main body part and a second pushing part, the docking main body part is docked with the first docking plate part, and the second pushing part extends from the docking main body part between the third push rod component and the third elastic support component.

[0051] For the optical machine adjustment device, wherein a third locking member is further arranged between the docking base and the camera docking part, and the third locking member is used to fix the relative position between the docking base and the camera docking part after the camera docking part is adjusted to the target relative selection angle relative to the docking base.

[0052] The optical engine adjustment device, wherein the second sleeve part is located inside the first sleeve part, and an opening is provided on the first sleeve part;

[0053] The lifting drive unit includes a first sleeve docking part, a second sleeve docking part, a third sleeve docking part and a support adjustment screw;

[0054] The first sleeve docking part and the second sleeve docking part are respectively connected to the first sleeve part, and the first sleeve docking part and the second sleeve docking part are respectively located on the upper and lower sides of the opening on the first sleeve part. The third sleeve docking part passes through the opening on the first sleeve part and is connected to the second sleeve part, and the third sleeve docking part is located between the first sleeve docking part and the second sleeve docking part;

[0055] Coaxially arranged first through hole, second through hole and third through hole are respectively provided on the first sleeve docking part, the second sleeve docking part and the third sleeve docking part;

[0056] The support adjustment screw includes a first non-threaded section, a second non-threaded section and a threaded section. The support adjustment screw is sequentially inserted into the second through hole, the third through hole and the first through hole,

[0057] The support adjustment screw is rotatably connected to the first through hole and the second through hole respectively through the first non-threaded section and the second non-threaded section, and the support adjustment screw is threadedly connected to the third through hole through the threaded section, so that when the support adjustment screw rotates, the second sleeve part can be driven to lift relative to the first sleeve part.

[0058] The automatic optical detection system, its main feature is that it includes the optical engine adjustment device, the optical engine device, the camera device and the frame device described in any one of the above;

[0059] The optically adjustable bearing mechanism is fixed on the frame device through the substrate module. The optical engine device is connected to the optical engine bearing module, and the camera adjustable bearing mechanism is connected to the optical engine device through the optical engine docking part. The camera device is connected to the camera adjustable bearing mechanism through the camera docking part.

[0060] The optical engine adjustment device and the automatic optical detection system of the present invention have the following beneficial effects:

[0061] The optical machine adjustment device of the present invention includes both an optically adjustable bearing mechanism and a camera adjustable bearing mechanism. Therefore, it can not only meet the adjustment of the position of the optical machine module in the system, but also meet the adjustment of the relative position between the camera module and the optical machine module, thereby making the automatic optical detection system more accurate in application. The automatic optical detection system equipped with this optical machine adjustment device has the characteristics of high precision, easy adjustment, and good adaptability. BRIEF DESCRIPTION OF THE DRAWINGS

[0062] The concept, specific structure and technical effects of the present invention will be further described below in conjunction with the drawings to fully understand the purpose, features and effects of the present invention.

[0063] Figure 1 is a schematic structural diagram of an automatic optical detection system in an embodiment of the present invention.

[0064] Figure 2 is an exploded view of an automatic optical detection system in an embodiment of the present invention.

[0065] Figure 3 is a schematic structural diagram of the first perspective of the optically adjustable bearing mechanism 1 in an embodiment of the present invention.

[0066] Figure 4 is a schematic structural diagram of the second perspective of the optically adjustable bearing mechanism 1 in an embodiment of the present invention.

[0067] Figure 5 is an exploded view of the optically adjustable bearing mechanism 1 in an embodiment of the present invention.

[0068] Figure 6 is a schematic structural diagram of the first perspective of the first rotation adjustment unit 131 and the first rotation adjustment driving unit 132 in an embodiment of the present invention.

[0069] Figure 7 is Figure 6 a partial enlarged view of the first rotation adjustment driving unit 132 in

[0070] Figure 8 is a schematic structural diagram of the second perspective of the first rotation adjustment unit 131 and the first rotation adjustment driving unit 132 in an embodiment of the present invention

[0071] Figure 9 is an exploded view of the first rotation adjustment unit 131 and the first rotation adjustment driving unit 132 in an embodiment of the present invention.

[0072] Figure 10 is a schematic structural diagram of the pitch adjustment unit 141 and the pitch adjustment driving unit 142 in an embodiment of the present invention.

[0073] Figure 11It is an exploded view of the pitch adjustment unit 141 and the pitch adjustment driving unit 142 in an embodiment of the present invention.

[0074] Figure 12 It is a schematic structural diagram of the pitch adjustment member 1411 in an embodiment of the present invention.

[0075] Figure 13 It is a schematic structural diagram of the carrier plate in an embodiment of the present invention.

[0076] Figure 14 It is a schematic structural diagram when the camera adjustable carrier mechanism 2 and the camera device 4 are combined together in an embodiment of the present invention.

[0077] Figure 15 It is an exploded view of the camera adjustable carrier mechanism 2 and the camera device 4 in an embodiment of the present invention.

[0078] Figure 16 It is an exploded view of the camera adjustable carrier mechanism 2 in an embodiment of the present invention.

[0079] Figure 17 It is a schematic structural diagram of the optical machine docking part 21 in an embodiment of the present invention.

[0080] Figure 18 It is a schematic structural diagram of the docking base 23 in an embodiment of the present invention.

[0081] Figure 19 It is a schematic structural diagram of the camera docking part 22 in an embodiment of the present invention.

[0082] Reference numerals

[0083] 1 Optical machine adjustable carrier mechanism

[0084] 11 Optical machine carrier module

[0085] 12 Substrate module

[0086] 131 First rotation adjustment unit

[0087] 1311 Swing member

[0088] 13111 Swing part

[0089] 13112 First pushing part

[0090] 1313 Rotation axis

[0091] 132 First rotation adjustment driving unit

[0092] 1321 First driving module

[0093] 13211 First driving device

[0094] 13212 First push rod component

[0095] 13213 First bearing component

[0096] 13214 First elastic support component

[0097] 13215 First bearing block

[0098] 133 First locking member

[0099] 141 Pitch adjustment unit

[0100] 1411 Pitch adjustment member

[0101] 14111 Second fulcrum receiving groove

[0102] 1412 Bearing plate

[0103] 14121 First fulcrum receiving groove

[0104] 1413 Spherical component

[0105] 142 Pitch adjustment driving unit

[0106] 1421 Second driving module

[0107] 14211 Second driving device

[0108] 14212 Second push rod component

[0109] 143 Second locking member

[0110] 144 Second elastic support component

[0111] 2 Camera adjustable bearing mechanism

[0112] 21 Optical-mechanical docking part

[0113] 211 Second sleeve part

[0114] 212 Second docking plate part

[0115] 22 Camera docking part

[0116] 221 Docking main body part

[0117] 222 Second pushing part

[0118] 23 Docking base

[0119] 231 First sleeve part

[0120] 2311 Opening

[0121] 232 First docking plate part

[0122] 24 Second Rotating Adjustment Driving Unit

[0123] 241 Third Driving Module

[0124] 2411 Third Driving Device

[0125] 2412 Third Push Rod Component

[0126] 2421 Third Elastic Support Component

[0127] 2422 Second Bearing Component

[0128] 2423 Second Bearing Block

[0129] 25 Lifting Driving Unit

[0130] 251 First Sleeve Docking Port

[0131] 252 Second Sleeve Docking Port

[0132] 253 Third Sleeve Docking Port

[0133] 254 Support Adjusting Screw

[0134] 2541 Screw Main Body Part

[0135] 2542 Knob Part

[0136] 26 Avoidance Space

[0137] 27 Third Locking Component

[0138] 3 Optical Machine Equipment

[0139] 4 Camera Equipment Detailed Implementation Manner

[0140] In order to make the technical means, creative features, achieved purposes and effects of the invention easy to understand, the present invention will be further described below in conjunction with specific drawings. However, the present invention is not limited to the following implementation cases.

[0141] It should be noted that the structures, proportions, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those who are familiar with this technology to understand and read, and are not used to limit the limited conditions under which the present invention can be implemented. Therefore, they do not have any technical substance. Any modification of the structure, change of the proportional relationship or adjustment of the size, without affecting the effects that the present invention can produce and the purposes that can be achieved, should still fall within the scope that can be covered by the technical content disclosed by the present invention.

[0142] The automatic optical inspection systems in the prior art have the characteristic that the opto-mechanical modular weight is relatively large, but the adjustment of the position and attitude of the opto-mechanical system is relatively precise. Mechanical vibration will cause problems such as the deviation of the optical path position and the difficulty in adjusting the camera.

[0143] In order to solve the problem that after the fine adjustment of the opto-mechanical module on the current AOI device (i.e., the automatic optical inspection system), mechanical vibration will cause the change of the fine adjustment angle and affect the precision and reinforcement mechanical mechanism of the fine adjustment module and the camera module for collecting data of the optical path, the present invention provides an opto-mechanical adjustment device and an automatic optical inspection system.

[0144] The following will be combined with Figures 1 to 19 to further illustrate the opto-mechanical adjustment device and the automatic optical inspection system of the present invention.

[0145] As Figures 1 to 2 shown, the automatic optical inspection system of the present invention includes an opto-mechanical adjustment device, an opto-mechanical device 3, a camera device 4, and a frame device (the frame device can be composed of the frame device in the prior art, so the frame device is not drawn in the figure);

[0146] Among them, the opto-mechanical adjustment device includes an opto-mechanical adjustable bearing mechanism 1 and a camera adjustable bearing mechanism 2;

[0147] The opto-mechanical adjustable bearing mechanism 1 includes an opto-mechanical bearing module 11, a substrate module 12, a first movable connection module, and a first adjustment module;

[0148] The opto-mechanical bearing module 11 is connected to the substrate module 12 through the first movable connection module, and the first adjustment module is used to adjust the state of the first movable connection module to adjust the relative position relationship between the opto-mechanical bearing module 11 and the substrate module 12;

[0149] The camera adjustable bearing mechanism 2 includes an opto-mechanical docking part 21, a second movable connection module, a camera docking part 22, and a second adjustment module;

[0150] The opto-mechanical docking part 21 is connected to the camera docking part 22 through the second movable connection module, and the second adjustment module is used to adjust the state of the second movable connection module to adjust the relative position relationship between the opto-mechanical docking part 21 and the camera docking part 22. An avoidance space 26 for the optical path to pass through is provided in the opto-mechanical docking part 21, the second movable connection module, and the camera docking part 22.

[0151] The optical machine adjustable bearing mechanism 1 is fixed to the frame device through the substrate module 12. The optical machine device 3 is connected to the optical machine bearing module 11 in the optical machine adjustment device. Moreover, the camera adjustable bearing mechanism 2 in the optical machine adjustment device is connected to the optical machine device 3 through the optical machine docking part 21 therein, and the camera device 4 is connected to the camera adjustable bearing mechanism 2 in the optical machine adjustment device through the camera docking part 22 in the optical machine adjustment device.

[0152] In this embodiment, the optical machine adjustment device is equipped with both the optical machine adjustable bearing mechanism 1 and the camera adjustable bearing mechanism 2. Therefore, it can not only meet the adjustment of the position state of the optical machine device 3, but also meet the position adjustment of the camera device 4, so that the automatic optical detection system can better achieve image capture.

[0153] During specific implementation, a master control module can also be set in the optical machine adjustment device. The master control module is used to generate an optical machine adjustment drive signal, and the optical machine adjustment drive signal can be used to drive the first adjustment module and / or the second adjustment module to operate. By adopting an automated mechanical control method, the adjustment can be made more accurate and convenient. The master control module can be composed of controllable devices such as a PLC, a single-chip microcomputer, a computer, etc.

[0154] As Figures 3 to 13 shown, the first movable connection module in this embodiment includes a first rotation adjustment unit 131, the optical machine adjustment drive signal includes a first drive signal, and the first adjustment module includes a first rotation adjustment drive unit 132;

[0155] The first rotation adjustment unit 131 includes a swing member 1311, and the swing member 1311 is used to drive the optical machine bearing module 11 to adjust the rotation angle relative to the substrate module 12;

[0156] The master control module is used to send the first drive signal to the first rotation adjustment drive unit 132;

[0157] The first rotation adjustment drive unit 132 is used to adjust the rotation angle of the swing member 1311 according to the first drive signal.

[0158] In this embodiment, the swing member 1311 is connected to the substrate module 12 through a rotating shaft 1313, and the swing member 1311 can rotate relative to the substrate module 12 under the drive of the first rotation adjustment drive unit 132.

[0159] In this embodiment, the first rotation adjustment driving unit 132 includes a plurality of first driving modules 1321 respectively disposed on both sides of the substrate module 12. The first driving module 1321 is configured to push the swing member 1311 according to the first driving signal to adjust the rotation angle of the swing member 1311.

[0160] In this embodiment, the first driving module 1321 includes:

[0161] A first driving subunit, including a first driving device 13211 and a first push rod member 13212. The first driving device 13211 is configured to control the telescopic movement of the first push rod member 13212 according to the first driving signal;

[0162] A first support subunit, including a first elastic support member 13214 and a first bearing member 13213. The first bearing member 13213 is disposed on the substrate module 12, and the first elastic support member 13214 is disposed on the first bearing member 13213;

[0163] The swing member 1311 includes a swing portion 13111 and a first pushing portion 13112. The first pushing portion 13112 extends from the swing portion 13111 to between the first push rod member 13212 and the first elastic support member 13214.

[0164] In this embodiment, the first rotation adjustment unit 131 further includes a first locking member 133. The first locking member 133 is configured to fix the relative position between the swing member 1311 and the substrate module 12 after the swing member 1311 rotates relative to the substrate module 12 to a target relative rotation angle.

[0165] In this embodiment, the first locking member 133 includes a nut, a waist-shaped hole on the swing member 1311, and a screw hole on the substrate module 12. The nut can pass through the waist-shaped hole and be threadedly connected to the screw hole to achieve fixation.

[0166] As Figures 6 to 9 shown, the first rotation adjustment unit 131 mainly includes a swing member 1311, which can rotate relative to the substrate module 12. Among them, the swing member 1311 can form a rotating plate, and the substrate module 12 can form a rotating bottom plate. In other embodiments, other bearing plates can also be used to form the rotating bottom plate, and the bearing plate forming the rotating bottom plate is connected to the substrate module 12.

[0167] A rotating shaft 1313, which is used to implement the rotating shaft 1313 between the rotating bottom plate and the rotating plate;

[0168] The first rotation adjustment driving unit 132 includes two groups of first driving modules 1321 respectively arranged on both sides of the substrate module 12, and the two groups of first driving modules 1321 respectively constitute a left fine adjustment module and a right fine adjustment module:

[0169] Left fine adjustment module: mainly includes a left precision adjustment head. The left precision adjustment head is fixed on the substrate module 12 through a corresponding first bearing block 13215, and cooperates with a first elastic support member 13214 on the left first bearing member 13213, so as to push and support the left first pushing portion 13112 located between the first elastic support member 13214 and the left precision adjustment head.

[0170] Right fine adjustment module: mainly includes a right precision adjustment head. The right precision adjustment head is fixed on the substrate module 12 through a corresponding first bearing block 13215, and cooperates with a first elastic support member 13214 on the right first bearing member 13213, so as to push and support the right first pushing portion 13112 located between the first elastic support member 13214 and the right precision adjustment head.

[0171] The specific executable implementation manner is as follows:

[0172] Rotate and fine-tune in the clockwise direction,

[0173] The left fine adjustment module needs to drive the left adjustment action block to push forward. The left adjustment fixing block is fixed on the rotating plate, so as to push linearly. In the case of taking the rotation axis 1313 as the axis, the linear fine adjustment push is converted into a rotation angle fine adjustment form;

[0174] In the left fine adjustment module among them, the left precision adjustment head is rotated manually to convert the rotation angle into a linear micro-motion form. At the same time, the left elastic body is compressed and acts on the left adjustment action block together with the left precision adjustment head to play a force balance role and temporarily balance;

[0175] Before this action, the right precision fine adjustment head needs to be retracted to leave enough distance for the left precision adjustment head to adjust;

[0176] During the operation, the clarity can be viewed through the camera image.

[0177] Among them, the left and right precision adjustment heads can be composed of high-precision micro-motion heads with a level of 0.01 mm that is divided into 50 equal parts of 0.5 mm; they can be adjusted within the range of ±2°; perform rotation fine adjustment.

[0178] When the relevant angle adjustment is completed, the determined angle can be stored in the system as the reference adjustment angle and used as the target adjustment position signal for subsequent adjustments.

[0179] During specific implementation, the optical machine adjustable bearing mechanism 1 further includes a first detection module, which is used to detect the position state of the first movable connection module to collect position detection signals; when the total control module drives the first adjustment module to operate through the optical machine adjustment drive signal, the optical machine adjustment drive signal can be generated according to the position detection signal and a preset target adjustment position signal.

[0180] The first detection module includes a first detection unit, the position detection signal includes a first position detection signal, and the target adjustment position signal includes a first target adjustment position signal;

[0181] The first detection unit is used to detect the rotation angle of the swing member 1311 to obtain the first position detection signal, and send the first position detection signal to the total control module, and the first drive signal is generated according to the first position detection signal and a preset first target adjustment position signal.

[0182] The first detection unit includes a first distance sensor and a second distance sensor. The first distance sensor and the second distance sensor are respectively arranged on both sides of the swing member 1311, and the signals detected by the first distance sensor and the second distance sensor together constitute the first position detection signal.

[0183] In this embodiment, the first movable connection module includes a pitch adjustment unit 141, the optical machine adjustment drive signal includes a second drive signal, and the first adjustment module includes a pitch adjustment drive unit 142;

[0184] The pitch adjustment unit 141 includes a pitch adjustment member 1411, which is used to drive the optical machine bearing module 11 to adjust the pitch angle relative to the substrate module 12;

[0185] The total control module is used to send the second drive signal to the pitch adjustment drive unit 142;

[0186] The pitch adjustment drive unit 142 is used to adjust the pitch angle of the pitch adjustment member 1411 according to the second drive signal.

[0187] In this embodiment, the pitch adjustment unit 141 further includes a bearing plate 1412. An active fulcrum component is provided between the pitch adjustment member 1411 and the bearing plate 1412. The bearing plate 1412 and the pitch adjustment member 1411 are respectively connected to the optical machine bearing module 11 and the substrate module 12, and the pitch adjustment member 1411 can generate a pitch swing relative to the bearing plate 1412 through the active fulcrum component.

[0188] In this embodiment, the movable fulcrum component includes a spherical component 1413. A first fulcrum receiving groove 14121 is provided on the bearing plate 1412, and a second fulcrum receiving groove 14111 is provided on the pitching adjustment member 1411. Both ends of the spherical component 1413 are respectively located in the first fulcrum receiving groove 14121 and the second fulcrum receiving groove 14111, and the total height of the first fulcrum receiving groove 14121 and the second fulcrum receiving groove 14111 is less than the height of the spherical component 1413.

[0189] In this embodiment, the pitching adjustment driving unit 142 includes at least two second driving modules 1421. The several second driving modules 1421 are arranged on the pitching adjustment unit 141 non-collinearly with the movable fulcrum component. Each second driving module 1421 is used to adjust the distance between the bearing plate 1412 and the pitching adjustment member 1411 at its position according to the second driving signal, so as to adjust the angle of the pitching swing generated by the pitching adjustment member 1411 relative to the bearing plate 1412.

[0190] In this embodiment, the second driving module 1421 includes:

[0191] A second driving subunit, including a second driving device 14211 and a second push rod component 14212. The second push rod component 14212 is located between the bearing plate 1412 and the pitching adjustment member 1411. The second driving device 14211 is used to control the telescopic movement of the second push rod component 14212 according to the second driving signal, so as to adjust the distance between the bearing plate 1412 and the pitching adjustment member 1411 at the position of the corresponding second driving subunit.

[0192] In this embodiment, the movable fulcrum component includes two spherical components 1413;

[0193] The bearing plate 1412 includes two first fulcrum receiving grooves 14121, which are respectively located at both ends of the top edge of the bearing plate 1412 or at both ends of the bottom edge of the bearing plate 1412;

[0194] The pitching adjustment member 1411 includes two second fulcrum receiving grooves 14111, which are respectively located at positions in the pitching adjustment member 1411 opposite to the two first fulcrum receiving grooves 14121 on the bearing plate 1412;

[0195] The two spherical components 1413 are respectively located between the corresponding first fulcrum receiving grooves 14121 and the second fulcrum receiving grooves 14111.

[0196] In this embodiment, the pitch adjustment driving unit 142 includes two second driving modules 1421 , and the two second driving modules 1421 are respectively located on two sides of the pitch adjustment driving unit 142 .

[0197] In this embodiment, a plurality of second elastic supporting components 144 are distributed between the supporting plate 1412 and the pitch adjustment member 1411 .

[0198] In this embodiment, the pitch adjustment unit 141 further includes a second locking member 143, which is used to fix the relative position of the pitch adjustment member 1411 and the supporting plate 1412 after the pitch adjustment member 1411 is adjusted to a target relative pitch angle relative to the supporting plate 1412.

[0199] The second locking member 143 includes a nut, a screw hole on the supporting plate 1412 and a screw hole on the pitch adjustment member 1411 . The nut is fixed by being threadedly connected with the screw hole on the supporting plate 1412 and the screw hole on the pitch adjustment member 1411 .

[0200] In a specific embodiment, the camera image status can be used to provide an adjustment basis, and the specific operation method is as follows:

[0201] The two second drive modules 1421 respectively constitute the main precision fine-tuning head and the auxiliary precision fine-tuning head. The main precision fine-tuning head is rotated and extended forward to support the camera to generate an angle. The pitch adjustment is achieved by observing the horizontal state of the surface camera image. At the same time, the auxiliary precision fine-tuning head is rotated to support the image until there is no change. Finally, the angle is fixed using the second locking member 143 composed of a total of 6 reinforcing screws on the left and right sides. At this point, the pitch fine-tuning is complete.

[0202] like Figure 10 As shown, the pitch adjustment unit 141 mainly includes a pitch adjustment component 1411 , a supporting plate 1412 , a left precision adjustment head, two spherical components 1413 , a right precision adjustment head, a second elastic support component 144 and a second locking component 143 .

[0203] The pitch adjustment member 1411 forms a movable fine adjustment plate. The left precision adjustment head forms the main adjustment head; the right precision adjustment head forms the auxiliary adjustment head; the two spherical components 1413 form the left and right rotation fulcrum bodies, which are used to form the angle adjustment fulcrum between the support plate 1412 and the pitch adjustment member 1411.

[0204] Twelve groups of elastic bodies are evenly distributed on the supporting plate 1412 and the pitch adjustment member 1411 to form a second elastic support member 144 for flexible connection between the supporting plate 1412 and the pitch adjustment member 1411;

[0205] The left and right fixing screws form the second locking member 143, which is used to reinforce the angle between the carrier plate 1412 and the pitching adjustment member 1411 after the angle is determined, ensuring that the angle between the carrier plate and the pitching adjustment member 1411 will not be affected by mechanical vibration.

[0206] Among them, the second drive sub-unit can be composed of a high-precision micro-moving head with a level of 0.01 mm divided into 50 equal parts by 0.5 mm, so as to achieve adjustment within the range of ±2°.

[0207] During operation, when the main precision micro-moving head is rotated and extended forward to support, an angle will be generated; wait until the horizontal level is observed through the image state of the surface camera to achieve adjustment. In addition, rotate the auxiliary precision micro-moving head until the image does not change; finally, use a total of 6 reinforcing screws on both sides to fix the angle; thus, the pitching fine adjustment is all completed.

[0208] The relevant pitching adjustment angles can be stored in the system and used as target tilt position signals for subsequent adjustments.

[0209] In specific implementation, the optical-mechanical adjustable carrier mechanism 1 may further include a second detection module, and the second detection module is used to detect the tilt state of the pitching adjustment member 1411 to collect tilt state signals; when the total control module drives the pitching adjustment drive unit 142 to operate through the optical-mechanical adjustment drive signal, the optical-mechanical adjustment drive signal can be generated according to the tilt state signal and the preset target tilt position signal.

[0210] The second detection module includes a second detection unit, the tilt state signal includes a second position detection signal, and the target tilt position signal includes a second target adjustment position signal;

[0211] The second detection unit is used to detect the pitching angle of the pitching adjustment member 1411 to obtain the second position detection signal, and send the second position detection signal to the total control module, and the second drive signal is generated according to the second position detection signal and the preset second target adjustment position signal.

[0212] The second detection unit includes at least three non-collinear third distance sensors, and each third distance sensor is used to detect the relative distance between the pitching adjustment member 1411 at each corresponding position and the carrier plate, and the signals detected by several of the third distance sensors together constitute the second position detection signal.

[0213] As Figures 14 to 19 shown, in this embodiment, the second movable connection module includes a docking base 23; the second adjustment module includes a second rotation adjustment drive unit 24 and a lifting drive unit 25;

[0214] The docking base 23, the optical machine docking part 21 and the camera docking part 22 are all of hollow structures, and the docking base 23, the optical machine docking part 21 and the camera docking part 22 are coaxially arranged to form the avoidance space 26 for the optical path to pass through in the middle of the second movable connection module;

[0215] The camera docking part 22 is located on the first side of the docking base 23, and the camera docking part 22 can rotate relative to the docking base 23 about the axis under the drive of the second rotation adjustment drive unit 24;

[0216] The optical machine docking part 21 is nested with the docking base 23, and the optical machine docking part 21 can move up and down relative to the docking base 23 along the axis under the drive of the lifting drive unit 25.

[0217] In this embodiment, the docking base 23 includes a first sleeve part 231 and a first docking plate part 232 which are connected to each other, and the first docking plate part 232 is located on the side adjacent to the camera docking part 22 in the first sleeve part 231;

[0218] The optical machine docking part 21 includes a second sleeve part 211 and a second docking plate part 212 which are connected to each other;

[0219] The first sleeve part 231 is connected to the camera docking part 22 through the first docking plate part 232, the second sleeve part 211 is nested with the first sleeve part 231, and the second docking plate part 212 is located on the second side of the docking base 23.

[0220] In this embodiment, the optical machine adjustment drive signal includes a third drive signal, and the second rotation adjustment drive unit 24 includes a plurality of third drive modules 241 arranged on the outer side wall of the first sleeve part 231. The third drive module 241 is used to push the camera docking part 22 according to the third drive signal to adjust the relative rotation angle between the camera docking part 22 and the docking base 23.

[0221] In this embodiment, the third drive module 241 includes:

[0222] A third drive sub-unit, including a third drive device 2411 and a third push rod member 2412. The third drive device 2411 is fixed on the outer side wall of the first sleeve part 231, and the third drive device 2411 is used to control the expansion and contraction of the third push rod member 2412 according to the third drive signal;

[0223] The second support sub-unit includes a third elastic support member 2421 and a second load-bearing member 2422. The second load-bearing member 2422 is disposed on the outer side wall of the first sleeve portion 231, and the third elastic support member 2421 is disposed on the second load-bearing member 2422.

[0224] The camera docking portion 22 includes a docking main body portion 221 and a second pushing portion 222. The docking main body portion 221 is docked with the first docking plate portion 232, and the second pushing portion 222 extends from the docking main body portion 221 between the third push rod member 2412 and the third elastic support member 2421.

[0225] In this embodiment, a third locking member 27 is further provided between the docking base 23 and the camera docking portion 22. The third locking member 27 is used to fix the relative positions of the docking base 23 and the camera docking portion 22 after the camera docking portion 22 is adjusted to a target relative selection angle with respect to the docking base 23.

[0226] The third locking member 27 includes a bolt (not shown in the figure), a threaded hole on the docking base 23, and a waist-shaped hole on the camera docking portion 22. The bolt passes through the waist-shaped hole on the camera docking portion 22 and is threadedly connected to the threaded hole on the docking base 23 to achieve fixation.

[0227] In this embodiment, the second sleeve portion 211 is located inside the first sleeve portion 231, and an opening 2311 is provided on the first sleeve portion 231.

[0228] The lifting drive unit 25 includes a first sleeve docking portion 251, a second sleeve docking portion 252, a third sleeve docking portion 253, and a support adjustment screw 254.

[0229] The first sleeve docking portion 251 and the second sleeve docking portion 252 are respectively connected to the first sleeve portion 231, and the first sleeve docking portion 251 and the second sleeve docking portion 252 are respectively located on the upper and lower sides of the opening 2311 on the first sleeve portion 231. The third sleeve docking portion 253 passes through the opening 2311 on the first sleeve portion 231 and is connected to the second sleeve portion 211, and the third sleeve docking portion 253 is located between the first sleeve docking portion 251 and the second sleeve docking portion 252.

[0230] The first sleeve docking portion 251, the second sleeve docking portion 252, and the third sleeve docking portion 253 are respectively provided with coaxially arranged first through holes, second through holes, and third through holes.

[0231] The support adjustment screw 254 includes a first non-threaded section, a second non-threaded section, and a threaded section. The support adjustment screw 254 is sequentially passed through the second through hole, the third through hole, and the first through hole.

[0232] The support adjustment screw 254 is rotatably connected to the first through hole and the second through hole through the first non-threaded section and the second non-threaded section respectively, and the support adjustment screw 254 is threadedly connected to the third through hole through the threaded section, so that when the support adjustment screw 254 rotates, the second sleeve portion 211 can be driven to move up and down relative to the first sleeve portion 231.

[0233] As Figures 14 to 19 shown, the camera adjustable bearing mechanism 2 in this embodiment includes an opto-mechanical docking portion 21, a second movable connection module, a camera docking portion 22, and a second adjustment module. The second movable connection module includes a docking base 23.

[0234] The camera docking portion 22 constitutes a rotating plate;

[0235] The camera docking portion 22 is provided with an annular member extending toward the docking base 23 to form a rotation axis between the camera docking portion 22 and the docking base 23. During adjustment, the camera docking portion 22 and the camera module are fixed and rotated for fine adjustment together.

[0236] The second rotation adjustment driving unit 24 includes a left fine adjustment module and a right fine adjustment module composed of two third driving modules 241:

[0237] The left fine adjustment module mainly includes a third driving subunit on the left, a third elastic support member 2421, a second bearing member 2422, and a second bearing block 2423. The third driving subunit on the left is fixed to the docking base 23 through the corresponding second bearing block 2423. The third elastic support member 2421 on the left is fixed to the docking base 23 through the corresponding second bearing member 2422. The corresponding second pushing portion 222 in the camera docking portion 22 is located between the third elastic support member 2421 and the third driving subunit and can be rotated to a certain extent under the push of the third driving subunit.

[0238] The right fine-tuning module mainly includes a third driving subunit, a third elastic support member 2421, a second bearing member 2422, and a second bearing block 2423 located on the right side; the third driving subunit located on the right side is fixed to the docking base 23 through the corresponding second bearing block 2423, and the third elastic support member 2421 located on the right side is fixed to the docking base 23 through the corresponding second bearing member 2422. The corresponding second pushing portion 222 in the camera docking portion 22 is located between the third elastic support member 2421 and the third driving subunit, and can be rotated to a certain extent under the push of the third driving subunit.

[0239] During specific implementation:

[0240] It can be fine-tuned by rotating in the required direction. The specific operation is as follows:

[0241] The left fine-tuning module needs to drive the left second pushing portion 222 to push forward. The left second pushing portion 222 is fixed to the docking main body portion 221, so as to push linearly. In the case of taking the rotation axis as the center, the linear fine-tuning push is converted into a rotational angle fine-tuning form;

[0242] In the left fine-tuning module, the left precision adjustment head is rotated manually, and the rotation angle is converted into a linear micro-motion form. At the same time, the left elastic body is compressed and the left precision adjustment head together act on the left adjustment action block to play a force balance role and temporarily balance;

[0243] Before this action, the right precision fine-tuning head needs to be retracted to leave enough distance for the left precision adjustment head to adjust; similarly, for counterclockwise micro-motion adjustment.

[0244] The left and right precision fine-tuning heads can be composed of high-precision micro-motion heads with a level of 0.01 mm that divides 0.5 mm into 50 equal parts, so as to perform adjustment within the range of ±2° and perform rotational fine-tuning.

[0245] Vertical micro-motion:

[0246] The support adjustment screw 254 may include a screw main body portion 2541 and a knob portion 2542. As described above, the screw main body portion 2541 is respectively connected to the first sleeve docking portion 251, the second sleeve docking portion 252, and the third sleeve docking portion 253, and the knob portion 2542 is fixedly connected to the screw main body portion 2541. The operator can drive the screw main body portion 2541 to rotate through the knob portion 2542. The screw main body portion 2541 is respectively rotatably connected to the first sleeve docking portion 251 and the second sleeve docking portion 252 without relative axial movement, so as to drive the third sleeve docking portion 253 to move up and down in a reaction manner, and further drive the relative up and down movement of the optical machine docking portion 21 and the docking base 23, so as to drive the entire fine-tuning fixing seat to move upward by an increased ΔT for fine-tuning, or perform fine-tuning by decreasing ΔT.

[0247] Adjustment description: Rotate the up-and-down fine-tuning knob one full turn. For the high-precision fine-tuning of ΔT at the 0.01 mm level with 0.5 mm divided into 50 equal parts.

[0248] During specific implementation, since the adjustment involved in the present invention mainly belongs to fine-tuning, the adjustment is carried out within the range of ±2° in terms of angle; while the distance ΔT is fine-tuned within ±2.5 mm, and the adjustment range is relatively small. Among them, the first driving device 13211, the second driving device 14211, and the third driving device 2411 can all be composed of electric motors in the prior art to drive the corresponding first push rod member 13212, second push rod member 14212, and third push rod member 2412 to expand and contract. Adjustment by means of a lead screw can effectively ensure the adjustment accuracy. In specific applications, the first driving sub-unit, the second driving sub-unit, and the third driving sub-unit can also be composed of micrometers in the prior art. Adopting the relevant structure can make the adjustment accuracy higher, avoid the cumbersome operation during each adjustment, and through the setting of the relevant first locking member 133, second locking member 143, and third locking member 27, the relative position can be strengthened after fine-tuning, thereby ensuring subsequent applications and reducing the problem of loosening after using for a certain period of time.

[0249] The connection between the components not specifically described in this application can be connected by means of bolt connection, or other connection methods can also be adopted.

[0250] The automatic optical detection system in this embodiment is divided into modules for each degree of freedom and is independent, including rotational fine-tuning and pitch fine-tuning, which can perform fine-tuning on a relatively high-precision heavy-duty opto-mechanical system, and a reinforcement mechanism can be added to ensure the maintainability of the heavy-duty precision.

[0251] The opto-mechanical adjustment device and the automatic optical detection system of the present invention have the following beneficial effects:

[0252] The opto-mechanical adjustment device of the present invention simultaneously includes an opto-mechanical adjustable bearing mechanism 1 and a camera adjustable bearing mechanism 2, so that it can not only meet the adjustment of the position of the opto-mechanical module in the system, but also meet the adjustment of the relative position between the camera module and the opto-mechanical module, thereby making the automatic optical detection system have higher accuracy during application. The automatic optical detection system equipped with this opto-mechanical adjustment device has the characteristics of high precision, easy adjustment, and good adaptability.

[0253] The above has described in detail the preferred specific embodiments of the present invention. It should be understood that those of ordinary skill in the art can make many modifications and variations based on the concept of the present invention without creative labor. Therefore, all technical solutions that can be obtained by those skilled in the art in the technical field of the present invention through logical analysis, reasoning, or limited experiments based on the concept of the present invention on the basis of the prior art should be within the protection scope determined by the claims.

Claims

1. An optical-mechanical adjustment device, characterized in that, The optical machine adjustment device includes an optical machine adjustable bearing mechanism and a camera adjustable bearing mechanism; The optical machine adjustable bearing mechanism includes an optical machine bearing module, a substrate module, a first movable connection module, and a first adjustment module; The optical machine bearing module is connected to the substrate module through the first movable connection module, and the first adjustment module is used to adjust the state of the first movable connection module to adjust the relative position relationship between the optical machine bearing module and the substrate module; The camera adjustable bearing mechanism includes an optical machine docking part, a second movable connection module, a camera docking part, and a second adjustment module; The optical machine docking part is connected to the camera docking part through the second movable connection module. The second adjustment module is used to adjust the state of the second movable connection module to adjust the relative position relationship between the optical machine docking part and the camera docking part. An avoidance space for the optical path to pass through is provided in the optical machine docking part, the second movable connection module, and the camera docking part.

2. The optical machine adjustment device according to claim 1, wherein the optical machine adjustment device further includes a master control module, and the master control module is used to generate an optical machine adjustment drive signal, and the optical machine adjustment drive signal can be used to drive the first adjustment module and / or the second adjustment module to operate.

3. The optical-mechanical adjustment device according to claim 2, wherein The first movable connection module includes a first rotation adjustment unit, the optical machine adjustment drive signal includes a first drive signal, and the first adjustment module includes a first rotation adjustment drive unit; The first rotation adjustment unit includes a swinging member, and the swinging member is used to drive the optical machine bearing module to adjust the rotation angle relative to the substrate module; The master control module is used to send the first drive signal to the first rotation adjustment drive unit; The first rotation adjustment drive unit is used to adjust the rotation angle of the swinging member according to the first drive signal.

4. The optical machine adjustment device according to claim 3, wherein the swinging member is connected to the substrate module through a rotating shaft, and the swinging member can rotate relative to the substrate module under the drive of the first rotation adjustment drive unit.

5. The optical machine adjustment device according to claim 4, characterized in that The first rotation adjustment drive unit includes a plurality of groups of first drive modules respectively arranged on both sides of the substrate module, and the first drive module is used to push the swinging member according to the first drive signal to adjust the rotation angle of the swinging member.

6. The optical-mechanical adjustment device according to claim 5, characterized in that The first drive module includes: A first drive sub-unit, including a first drive device and a first push rod component, and the first drive device is used to control the telescopic movement of the first push rod component according to the first drive signal; A first support sub-unit, including a first elastic support component and a first bearing component, the first bearing component is arranged on the substrate module, and the first elastic support component is arranged on the first bearing component; The swinging member includes a swinging part and a first pushing part, and the first pushing part extends from the swinging part to between the first push rod component and the first elastic support component.

7. The optical-mechanical adjustment device according to claim 4, wherein, The first rotation adjustment unit further includes a first locking member, which is used to fix the relative position between the swing member and the substrate module after the swing member rotates relative to the substrate module to a target relative rotation angle.

8. The optical-mechanical adjustment device according to claim 2, wherein, The first movable connection module includes a pitch adjustment unit, the optical engine adjustment drive signal includes a second drive signal, and the first adjustment module includes a pitch adjustment drive unit; The pitch adjustment unit includes a pitch adjustment member, which is used to drive the optical engine carrier module to adjust the pitch angle relative to the substrate module; The master control module is used to send the second drive signal to the pitch adjustment drive unit; The pitch adjustment drive unit is used to adjust the pitch angle of the pitch adjustment member according to the second drive signal.

9. The optical engine adjustment device according to claim 8, wherein The pitch adjustment unit further includes a carrier plate, and an active fulcrum component is provided between the pitch adjustment member and the carrier plate. The carrier plate and the pitch adjustment member are respectively connected to the optical engine carrier module and the substrate module, and the pitch adjustment member can generate a pitch swing relative to the carrier plate through the active fulcrum component.

10. The optical-mechanical adjustment device according to claim 9, wherein, The active fulcrum component includes a spherical component. A first fulcrum receiving groove is provided on the carrier plate, and a second fulcrum receiving groove is provided on the pitch adjustment member. Two ends of the spherical component are respectively located in the first fulcrum receiving groove and the second fulcrum receiving groove, and the total height of the first fulcrum receiving groove and the second fulcrum receiving groove is less than the height of the spherical component.

11. The optical-mechanical adjustment device according to claim 10, wherein The pitch adjustment drive unit includes at least two second drive modules. The plurality of second drive modules are arranged on the pitch adjustment unit non-collinearly with the active fulcrum component. Each second drive module is used to adjust the distance between the carrier plate and the pitch adjustment member at its position according to the second drive signal, so as to adjust the angle of the pitch swing generated by the pitch adjustment member relative to the carrier plate.

12. The optical-mechanical adjustment device according to claim 11, wherein The second drive module includes: A second drive sub-unit, including a second drive device and a second push rod component. The second push rod component is located between the carrier plate and the pitch adjustment member. The second drive device is used to control the expansion and contraction of the second push rod component according to the second drive signal, so as to adjust the distance between the carrier plate and the pitch adjustment member at the position where the corresponding second drive sub-unit is located.

13. The optical engine adjustment device according to claim 11, wherein The active fulcrum component includes two of the spherical components; The carrier plate includes two first fulcrum receiving grooves, which are respectively located at both ends of the top edge of the carrier plate or at both ends of the bottom edge of the carrier plate; The pitch adjustment member includes two second fulcrum receiving grooves, which are respectively located at positions on the pitch adjustment member opposite to the two first fulcrum receiving grooves on the carrier plate; The two spherical components are respectively located between the corresponding first fulcrum receiving grooves and the second fulcrum receiving grooves.

14. The optical-mechanical adjustment device according to claim 13, wherein, The pitching adjustment driving unit includes two second driving modules, and the two second driving modules are respectively located on both side edges of the pitching adjustment driving unit.

15. The optical machine adjustment device according to claim 9, characterized in that, There are also several second elastic support components distributed between the bearing plate and the pitching adjustment component.

16. The optical-mechanical adjustment device according to claim 9, characterized in that, The pitching adjustment unit further includes a second locking component, which is used to fix the relative position between the pitching adjustment component and the bearing plate after the pitching adjustment component is adjusted to a target relative pitching angle relative to the bearing plate.

17. The optical-mechanical adjustment device according to claim 2, characterized in that, The second movable connection module includes a docking base; the second adjustment module includes a second rotation adjustment driving unit and a lifting driving unit; The docking base, the optical machine docking part and the camera docking part are all of a hollow structure, and the docking base, the optical machine docking part and the camera docking part are coaxially arranged to form the avoidance space for the light path to pass through in the middle of the second movable connection module; The camera docking part is located on the first side of the docking base, and the camera docking part can generate a relative rotational movement around the axis with the docking base under the drive of the second rotation adjustment driving unit; The optical machine docking part is nested with the docking base, and the optical machine docking part can generate a relative lifting movement along the axis with the docking base under the drive of the lifting driving unit.

18. The optical machine adjustment device according to claim 17, wherein The docking base includes a first sleeve part and a first docking plate part which are connected to each other, and the first docking plate part is located on the side adjacent to the camera docking part in the first sleeve part; The optical machine docking part includes a second sleeve part and a second docking plate part which are connected to each other; The first sleeve part is connected to the camera docking part through the first docking plate part, the second sleeve part is nested with the first sleeve part, and the second docking plate part is located on the second side of the docking base.

19. The optical-mechanical adjustment device according to claim 18, characterized in that, The optical machine adjustment driving signal includes a third driving signal, and the second rotation adjustment driving unit includes several third driving modules arranged on the outer side wall of the first sleeve part, and the third driving modules are used to push the camera docking part according to the third driving signal to adjust the relative rotation angle between the camera docking part and the docking base.

20. The optical-mechanical adjustment device according to claim 19, characterized in that, The third driving module includes: A third driving sub-unit, including a third driving device and a third push rod component, the third driving device is fixed on the outer side wall of the first sleeve part, and the third driving device is used to control the expansion and contraction of the third push rod component according to the third driving signal; A second support sub-unit, including a third elastic support component and a second bearing component, the second bearing component is arranged on the outer side wall of the first sleeve part, and the third elastic support component is arranged on the second bearing component; The camera docking part includes a docking main body part and a second pushing part. The docking main body part is docked with the first docking plate part, and the second pushing part extends from the docking main body part between the third push rod component and the third elastic support component.

21. The optical-mechanical adjustment device according to claim 19, characterized in that, A third locking component is further provided between the docking base and the camera docking part. The third locking component is used to fix the relative positions of the docking base and the camera docking part after the camera docking part is adjusted to a target relative selection angle relative to the docking base.

22. The optical-mechanical adjustment device according to claim 19, wherein The second sleeve part is located inside the first sleeve part, and the first sleeve part is provided with an opening. The lifting drive unit includes a first sleeve docking part, a second sleeve docking part, a third sleeve docking part and a support adjustment screw. The first sleeve docking part and the second sleeve docking part are respectively connected to the first sleeve part, and the first sleeve docking part and the second sleeve docking part are respectively located on the upper and lower sides of the opening on the first sleeve part. The third sleeve docking part passes through the opening on the first sleeve part and is connected to the second sleeve part, and the third sleeve docking part is located between the first sleeve docking part and the second sleeve docking part. The first sleeve docking part, the second sleeve docking part and the third sleeve docking part are respectively provided with coaxially arranged first through holes, second through holes and third through holes. The support adjustment screw includes a first non-threaded section, a second non-threaded section and a threaded section. The support adjustment screw is sequentially inserted into the second through hole, the third through hole and the first through hole. The support adjustment screw is rotatably connected to the first through hole and the second through hole through the first non-threaded section and the second non-threaded section respectively, and the support adjustment screw is threadedly connected to the third through hole through the threaded section, so that when the support adjustment screw rotates, it can drive the second sleeve part to lift relative to the first sleeve part.

23. An automatic optical inspection system, characterized in that, Including the optical machine adjustment device, the optical machine device, the camera device and the frame device according to any one of claims 1 to 22. The optically adjustable bearing mechanism is fixed to the frame device through the substrate module. The optical machine device is connected to the optical machine bearing module, and the camera adjustable bearing mechanism is connected to the optical machine device through the optical machine docking part. The camera device is connected to the camera adjustable bearing mechanism through the camera docking part.

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