Spindle-adjustable slicing machine

Abstract

The invention discloses a slicing machine with an adjustable main shaft, and belongs to the technical field of semiconductors. The device mainly comprises a rack, first supporting rollers, a distance adjusting structure and a first driver, the two first supporting rollers are arranged on the rack, a first axle box is arranged at the end of each first supporting roller, a first transmission shaft is arranged in each first axle box, and the distance adjusting structure comprises a swing arm, a gear, a first clutch disc, an insertion finger, a gear ring and a second clutch disc. The gear is rotationally matched with the first axle box, the gear and the first supporting roller are coaxially arranged, the insertion finger is slidably inserted into the gear in the axial direction of the gear, the insertion finger is connected with the first clutch disc, an insertion groove is formed in the end of the first axle box, the gear ring is fixedly installed on the rack, the gear ring is coaxial with the rotating axis of the swing arm, the gear is meshed with the gear ring, and the first driver is installed on the first axle box. According to the slicing machine with the adjustable main shaft, the problem that in the prior art, the labor intensity is large when the center distance of the supporting rollers is manually adjusted can be solved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and particularly to a spindle adjustable slicing machine. Background Art

[0002] Silicon slicing machines are mainly applied in the fields of solar silicon wafer production, semiconductor material processing, etc., and are ideal equipment for efficient and precise slicing processing.

[0003] The actual cutting ability of the slicing machine is mainly related to the width of the diamond wire mesh in the cutting area. The smaller the width of the wire mesh, the smaller the size of the hard and brittle material that can be cut; the larger the width of the wire mesh, the larger the size of the hard and brittle material that can be cut. However, when the size of the hard and brittle material is small, under the condition of meeting the cutting requirements, the smaller the width of the wire mesh, the better the cutting yield, and as the width of the wire mesh increases, the yield will correspondingly decrease. Therefore, different sizes of hard and brittle materials need to be cut with wire meshes of corresponding widths to achieve the best yield; for existing spindle adjustable slicing machines, to achieve adjustable center distance between two support rollers, the two ends of the support rollers are usually rotatably installed on the frame through eccentric axle boxes, and manual rotation of the eccentric axle boxes is required to adjust the center distance, resulting in high labor intensity.

[0004] Therefore, it is necessary to provide a new spindle adjustable slicing machine. Summary of the Invention

[0005] Based on the above problems existing in the prior art, the purpose of the embodiments of the present invention is to provide a spindle adjustable slicing machine, which can solve the problem of high labor intensity in manually adjusting the center distance of support rollers in the prior art.

[0006] To achieve the above purpose, the technical solution adopted by the present invention is: to provide a spindle adjustable slicing machine, including a frame, a first support roller, a distance adjustment structure, and a first driver. Two first support rollers are arranged on the frame, and a first axle box is provided at the end of the first support roller. A first transmission shaft fixedly connected to the first support roller is arranged inside the first axle box. The distance adjustment structure includes a swing arm, a gear, a first clutch disc, a finger, a gear ring, and a second clutch disc. The swing arm is hinged to the frame, the first axle box is installed on the swing arm, the gear is rotatably fitted on the first axle box and is coaxially arranged with the first support roller. The finger is axially slidably inserted into the gear and is fixedly connected to the first clutch disc. A slot corresponding to the finger is provided at the end of the first axle box. The second clutch disc is coaxially arranged at the end of the first support roller. The first clutch disc and the second clutch disc are arranged oppositely. The gear ring is fixedly installed on the frame and is coaxially arranged with the rotation axis of the swing arm. The gear meshes with the gear ring. The first driver is installed on the first axle box, and the output end of the first driver is in transmission connection with the first transmission shaft.

[0007] Further, a slip ring is rotatably arranged on the first friction plate, a fork is mounted on the slip ring, a slider is mounted on the fork, and a slide seat is slidably arranged on the slider, and the slide seat is slidably fitted along the circumferential direction of the gear ring.

[0008] Further, two swing arms installed at the same end of the two first support rollers are hinged together through a hinge shaft, and the hinge shaft is installed on the machine frame.

[0009] Further, axle boxes I are rotatably fitted at both ends of the first support roller, and distance adjusting structures are arranged at both ends of the first support roller.

[0010] Further, the main shaft adjustable slicing machine further includes a second support roller located below the two first support rollers. An axle box II is provided at the end of the second support roller, and a transmission shaft II connecting the second support roller is rotatably fitted on the axle box II. A clamping seat is slidably arranged on the swing arm, and the clamping seat slides around the circumferential direction of the axle box II and abuts against the outer peripheral wall of the axle box II.

[0011] Further, the clamping seat is slidably connected to the swing arm through a sliding structure.

[0012] Further, a plurality of rollers are mounted on the clamping seat, and the rollers are in rolling contact with the outer side wall of the axle box II.

[0013] Further, a second driver is provided at one end of the second support roller, the second driver is mounted on the axle box II, and the output end of the second driver is in transmission connection with the transmission shaft II.

[0014] The beneficial effects of the present invention are as follows: The spindle adjustable slicing machine provided by the present invention includes a frame, a first support roller, a distance adjustment structure, and a first driver. There are two first support rollers arranged on the frame. The end of the first support roller is provided with a first axle box. Inside the first axle box, there is a first transmission shaft fixedly connected to the first support roller. The distance adjustment structure includes a swing arm, a gear, a first clutch plate, a finger, a gear ring, and a second clutch plate. The swing arm is hinged to the frame, and the first axle box is installed on the swing arm. The gear is rotatably fitted on the first axle box and is coaxially arranged with the first support roller. The finger slides axially along the gear and is fixedly connected to the first clutch plate. A slot is provided at the end of the first axle box corresponding to the finger. The second clutch plate is coaxially arranged at the end of the first support roller. The first clutch plate and the second clutch plate are arranged opposite to each other. The gear ring is fixedly installed on the frame, and the gear ring is coaxial with the rotation axis of the swing arm. The gear meshes with the gear ring. The first driver is installed on the first axle box, and the output end of the first driver is in transmission connection with the first transmission shaft to drive the first support roller to rotate relative to the first axle box. Thus, when it is necessary to adjust the center distance between the two first support rollers, the finger is toggled to slide on the gear until the finger drives the first clutch plate to move and abut against the second clutch plate, so that the first clutch plate and the second clutch plate cooperate to achieve circumferential transmission connection. In this way, when the first driver is started to drive the first support roller to rotate, the gear will be driven to rotate. The rotation of the gear will further drive the gear to roll circumferentially along the gear ring. At the same time, the swing arm swings around the axis, driving the axis of the first transmission shaft to shift, thereby realizing the adjustment of the center distance. When it is necessary to fix the axis position of the first transmission shaft, only need to slide the finger until the first clutch plate and the second clutch plate are separated and disengaged, and at the same time, the finger is inserted into the slot on the first axle box, so that the gear cannot rotate relative to the first axle box. Further, the gear and the gear ring are relatively fixed, the swing of the swing arm is locked, and the axis position of the first transmission shaft is fixed. The spindle adjustable slicing machine provided by the embodiment of the present invention, wherein the first driver can not only drive the first support roller to rotate for slicing operations, but also drive the swing arm to swing by using the first driver to realize the movement of the axis of the first support roller and adjust the center distance when adjusting the center distance of the first support roller, effectively solving the problem of high labor intensity of manually adjusting the center distance of the support roller in the prior art, and the design is ingenious, reducing the usage amount of the electric control motor and effectively controlling the equipment cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The present invention will be further described below with reference to the drawings and embodiments.

[0016] Figure 1 It is a schematic perspective view of the spindle adjustable slicing machine provided by the embodiment of the present invention.

[0017] Figure 2 It is a schematic diagram of the positional relationship between the distance adjustment structure, the first support roller, and the second support roller provided by the embodiment of the present invention.

[0018] Figure 3 is Figure 2 the front view of the structure shown.

[0019] Figure 4 is Figure 3 A schematic diagram of the structure shown in another working state.

[0020] Figure 5 A schematic diagram of the positional relationship between the distance adjusting structure provided by the embodiment of the present invention and the first supporting roller.

[0021] Figure 6 is Figure 5 An exploded view of the structure shown.

[0022] Figure 7 is Figure 5 A front view of the structure shown.

[0023] Figure 8 is Figure 7 A sectional view taken along the E-E direction in

[0024] Figure 9 A schematic diagram of the positional relationship between the swing arm and the second supporting roller provided by the embodiment of the present invention.

[0025] Figure 10 is Figure 9 A sectional view of the structure shown.

[0026] Among them, the reference numerals in the figure: 1, frame; 2, the first supporting roller; 21, the first axle box; 22, the first transmission shaft; 3, distance adjusting structure; 31, swing arm; 311, slot; 32, gear; 33, the first clutch plate; 34, inserting finger; 35, fork; 351, slider; 352, slide base; 353, slip ring; 36, gear ring; 37, the second clutch plate; 38, hinge shaft; 39, clamping seat; 391, roller; 392, sliding structure; 4, the first driver; 5, the second supporting roller; 51, the second axle box; 52, the second transmission shaft; 6, the second driver. Detailed implementation manners

[0027] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer and more understandable, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0028] It should be noted that when an element is referred to as "connected to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0029] In the description of the present invention, it should be noted that, unless otherwise clearly defined and limited, the terms "mounted", "connected" and "connected" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0030] It should be understood that the orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the present invention.

[0031] Reference throughout the specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the present application. Thus, the phrases "in one embodiment", "in some embodiments", or "in some of these embodiments" appearing throughout the specification do not necessarily all refer to the same embodiment. Additionally, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0032] Please refer to Figures 1 to 10As shown in the figure, a spindle adjustable slicing machine provided by the present invention will be described. The spindle adjustable slicing machine includes a frame 1, a first support roller 2, a distance adjustment structure 3, and a first driver 4. There are two first support rollers 2 arranged on the frame 1. A shaft housing 21 is provided at the end of the first support roller 2. A transmission shaft 22 fixedly connected to the first support roller 2 is arranged inside the shaft housing 21. The distance adjustment structure 3 includes a swing arm 31, a gear 32, a first clutch disc 33, a finger 34, a gear ring 36, and a second clutch disc 37. The swing arm 31 is hinged to the frame 1. The shaft housing 21 is installed on the swing arm 31. The gear 32 is rotatably fitted on the shaft housing 21 and is coaxially arranged with the first support roller 2. The finger 34 is slidably inserted along the axial direction of the gear 32 on the gear 32 and is fixedly connected to the first clutch disc 33. A slot 311 corresponding to the finger 34 is provided at the end of the shaft housing 21. The second clutch disc 37 is coaxially arranged at the end of the first support roller 2. The first clutch disc 33 and the second clutch disc 37 are arranged opposite to each other. The gear ring 36 is fixedly installed on the frame 1. The gear ring 36 is coaxial with the rotation axis of the swing arm 31. The gear 32 is meshed and cooperated with the gear ring 36. The first driver 4 is installed on the shaft housing 21, and the output end of the first driver 4 is in transmission connection with the transmission shaft 22 to drive the first support roller 2 to rotate relative to the shaft housing 21. Thus, when it is necessary to adjust the center distance between the two first support rollers 2, the finger 34 is toggled to slide on the gear 32 until the finger 34 drives the first clutch disc 33 to move and abut against the second clutch disc 37, so that the first clutch disc 33 and the second clutch disc 37 cooperate to achieve circumferential transmission connection. In this way, when the first driver 4 is started to drive the first support roller 2 to rotate, the gear 32 will be driven to rotate. The rotation of the gear 32 further drives the gear 32 to roll along the circumferential direction of the gear ring 36. At the same time, the swing arm 31 swings around the axis, driving the axis of the transmission shaft 22 to shift, thereby realizing the adjustment of the center distance. When it is necessary to fix the axis position of the transmission shaft 22, only need to slide the finger 34 until the first clutch disc 33 and the second clutch disc 37 are separated and disengaged. At the same time, the finger 34 is inserted into the slot 311 on the shaft housing 21, so that the gear 32 cannot rotate relative to the shaft housing 21. Furthermore, the relative fixation between the gear 32 and the gear ring 36 is achieved, the swing of the swing arm 31 is locked, and the axis position of the transmission shaft 22 is fixed. In the spindle adjustable slicing machine provided by the embodiment of the present invention, the first driver 4 can not only drive the first support roller 2 to rotate for slicing operation, but also drive the swing arm 31 to swing by using the first driver 4 to realize the axis movement of the first support roller 2 and achieve the adjustment of the center distance when adjusting the center distance of the first support roller 2, effectively solving the problem of high labor intensity of manually adjusting the center distance of the support roller in the prior art, and with a clever design, reducing the usage amount of the electric control motor and effectively controlling the equipment cost.

[0033] As Figures 5 to 8As shown, in some embodiments, a slip ring 353 is rotatably provided on the clutch plate 1 33, a shift fork 35 is mounted on the slip ring 353, a slider 351 is mounted on the shift fork 35, a slide seat 352 is slidably provided on the slider 351, and the slide seat 352 slides along the circumferential direction of the ring gear 36, so that the axial sliding displacement of the inserting finger 34 can be achieved by shifting the slider 351, and the shift fork 35 can swing along with the swing arm 31.

[0034] like Figure 2 and Figure 4 As shown, in some embodiments, two swing arms 31 installed on the same end of two support rollers 2 are hingedly matched through a hinge shaft 38, and the hinge shaft 38 is installed on the frame 1.

[0035] like Figure 2 and Figure 4 As shown, in some embodiments, both ends of the support roller 2 are rotatably matched with an axle box 21, and both ends of the support roller 2 are provided with a distance adjustment structure 3.

[0036] like Figure 1 and Figure 2 As shown, in some embodiments, the spindle-adjustable slicer further includes a support roller 2 5 located below the two support rollers 1 2, an end portion of the support roller 2 5 is provided with an axle box 2 51, a transmission shaft 2 52 connected to the support roller 2 5 is rotatably engaged on the axle box 2 51, a clamping seat 39 is slidably provided on the swing arm 31, and the clamping seat 39 slides around the circumference of the axle box 2 51 and abuts against the outer peripheral wall of the axle box 2 51, as shown in FIG. Figure 10 As shown, two clamping seats 39 are arranged opposite to each other on the two swing arms 31 at the same end of the two support rollers 2, and the two clamping seats 39 are respectively located on both sides of the axle box 2 51, so that the axle box 2 51 is clamped by the two clamping seats 39 at the same end of the two support rollers 2. When the swing arm 31 is adjusted to swing so that the angle between the two swing arms 31 at the same end of the two support rollers 2 increases, the clamping seat 39 is forced to move downward, thereby driving the axle box 2 51 to move downward; when the swing arm 31 is adjusted to swing so that the angle between the two swing arms 31 at the same end of the two support rollers 2 decreases, the clamping seat 39 is forced to move upward, thereby driving the axle box 2 51 and the support roller 2 5 to move upward. In this way, the support roller 2 5 can be linked to move up and down by increasing the angle between the swing arms 31, as shown in FIG. Figure 3 and Figure 4As shown, when the diameter of the silicon rod to be cut is relatively large and the center distance needs to be adjusted to increase, the second support roller 5 can move downward synchronously to avoid the silicon rod with a larger diameter. When the diameter of the silicon rod to be cut is relatively small and the center distance needs to be adjusted to decrease, the second support roller 5 can move upward synchronously, thereby reducing the empty support area of the diamond wire and minimizing the vibration of the diamond wire to the greatest extent. Compared with the prior art that requires manual adjustment one by one, the operation is more convenient. Specifically, when circumferential limitation is required between the second axle box 51 and the clamping seat 39, locking can be achieved through the screw hole at the end of the second axle box 51 and the clamping seat 39, so that the second axle box 51 and the clamping seat 39 cannot rotate relative to each other.

[0037] As Figure 10 shown, in some embodiments, the clamping seat 39 is slidably connected to the swing arm 31 through a sliding structure 392, and the sliding structure 392 can be, but is not limited to, a guide rod structure.

[0038] As Figure 10 shown, in some embodiments, a plurality of rollers 391 are installed on the clamping seat 39, and the rollers 391 are in rolling contact with the outer side wall of the second axle box 51 to reduce the contact friction between the clamping seat 39 and the second axle box 51.

[0039] As Figure 1 and Figure 2 shown, in some embodiments, a second driver 6 is provided at one end of the second support roller 5, the second driver 6 is installed on the second axle box 51, and the output end of the second driver 6 is in transmission connection with the second transmission shaft 52.

[0040] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A spindle adjustable slicing machine, characterized in that: It includes a frame, a first supporting roller, a distance adjusting structure and a first driver. There are two first supporting rollers arranged on the frame. A first axle box is provided at the end of the first supporting roller. A first transmission shaft fixedly connected to the first supporting roller is arranged inside the first axle box. The distance adjusting structure includes a swing arm, a gear, a first clutch disc, a finger, a gear ring and a second clutch disc. The swing arm is hinged to the frame. The first axle box is installed on the swing arm. The gear is rotatably fitted on the first axle box and is coaxially arranged with the first supporting roller. The finger is slidably inserted along the axial direction of the gear and is fixedly connected to the first clutch disc. A slot corresponding to the finger is provided at the end of the first axle box. The second clutch disc is coaxially arranged at the end of the first supporting roller. The first clutch disc and the second clutch disc are arranged oppositely. The gear ring is fixedly installed on the frame and is coaxially arranged with the rotation axis of the swing arm. The gear meshes with the gear ring. The first driver is installed on the first axle box and the output end of the first driver is in transmission connection with the first transmission shaft.

2. The spindle adjustable slicing machine according to claim 1, wherein: A slip ring is rotatably arranged on the first clutch disc. A fork is installed on the slip ring. A slider is installed on the fork. A sliding seat is slidably arranged on the slider. The sliding seat is slidably fitted along the circumferential direction of the gear ring.

3. The spindle adjustable slicing machine according to claim 1, characterized in that: The two swing arms installed at the same end of the two first supporting rollers are hinged through a hinge shaft. The hinge shaft is installed on the frame.

4. The spindle adjustable slicing machine according to claim 1, characterized in that: The two ends of the first supporting roller are both rotatably fitted with a first axle box, and a distance adjusting structure is arranged at both ends of the first supporting roller.

5. The spindle adjustable slicing machine according to claim 1, characterized in that: The main shaft adjustable slicing machine further includes a second supporting roller located below the two first supporting rollers. A second axle box is provided at the end of the second supporting roller. A second transmission shaft connecting the second supporting roller is rotatably fitted on the second axle box. A clamping seat is slidably arranged on the swing arm. The clamping seat slides circumferentially around the second axle box and abuts against the outer peripheral wall of the second axle box.

6. The spindle adjustable slicing machine according to claim 5, wherein: The clamping seat is slidably connected to the swing arm through a sliding structure.

7. The spindle adjustable slicing machine according to claim 5, wherein: A plurality of rollers are installed on the clamping seat. The rollers rollingly contact the outer side wall of the second axle box.

8. The spindle adjustable slicing machine according to claim 5, characterized in that: A second driver is provided at one end of the second supporting roller. The second driver is installed on the second axle box and the output end of the second driver is in transmission connection with the second transmission shaft.

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