Device and method for automatic fire polishing of quartz boat

Abstract

The automatic fire polishing device comprises a graphite positioning tool, a polishing lamp set and an oxyhydrogen pipe closed-loop control device, an electronic fire maker is arranged on a workbench corresponding to the graphite positioning tool, and the oxyhydrogen pipe closed-loop control device is used for accurately adjusting the flow, pressure and mixing proportion of hydrogen and oxygen. The robot body comprises a robot body, an intelligent control system, a mechanical arm movably arranged at the front end of the robot body, an oxyhydrogen pipe and an electromagnetic valve which are movably arranged on a lamp handle, and the lamp handle is movably connected with the mechanical arm through a corresponding connector. According to the full-automatic fire polishing method for the quartz boat, double polishing lamp sets are integrated through the six-axis robot, and high-precision and high-efficiency polishing of the surface of the quartz boat is achieved in cooperation with graphite tool positioning and an oxyhydrogen gas closed-loop control system. Compared with a traditional technology, the technology is safe and reliable, the polishing uniformity is improved by 50%, the machining time of a single piece is shortened to 15 minutes, and the technology is suitable for batch processing of quartz boats in the photovoltaic industry and has high popularization value.

Description

Technical Field

[0001] The present invention relates to the technical field of flame polishing devices, and particularly to a device and method for automatically flame polishing quartz boats. Background Art

[0002] Quartz is a mineral resource with very stable physical and chemical properties. It has a wide range of uses. The glass made from molten quartz can be used to make optical instruments, glasses, glass tubes and other products. It can also be used as industrial raw materials such as bearings for precision instruments, abrasive materials, and glass ceramics. Due to its excellent properties such as high temperature resistance and chemical corrosion resistance, it is widely used in the photovoltaic and semiconductor industries. Flame polishing the groove rods of quartz boats in the photovoltaic industry can greatly increase the number of times the quartz boat can be used and improve the product quality of the silicon wafers carried.

[0003] With the rapid development of the domestic photovoltaic industry, quartz boats are widely used as carriers for silicon wafers. The flame polishing of quartz boats is an important process for quartz boats. The flame polishing process has strict requirements, and the quality of flame polishing directly determines the service life of the quartz boat.

[0004] Traditional flame polishing completely relies on manual operation. The flame polishing uses a single-core polishing lamp with a hydrogen-oxygen flame. This not only has low polishing efficiency, uneven polishing affects the quality, but also the heat of the polishing lamp held by hand is relatively large, causing thermal radiation to humans and affecting human health.

[0005] Currently, the quartz glass flame polishing process is basically manual operation. Since it is difficult for a person to hold the lamp handle to evenly flame polish the quartz boat, the quality stability of the structural processing is poor, and the labor intensity of workers is large, the efficiency is low, the labor cost is high, and it is not suitable for batch processing of quartz boats.

[0006] Therefore, it is urgent for engineering and technical personnel in this field to develop a device and method for automatically flame polishing quartz boats that is simple in structure, convenient to use, has good quality stability in processing, high polishing efficiency, uniform polishing, small impact of thermal radiation on human health, high labor cost, safe and reliable, and suitable for mass production. Summary of the Invention

[0007] The technical problem to be solved by the present invention is to provide a device and method for automatically flame polishing quartz boats to replace the technical problems of poor processing quality, low polishing efficiency, uneven polishing, large impact of thermal radiation on human health, great potential safety hazards, and unsuitability for mass production in manual polishing.

[0008] To solve the above technical problems, the technical solution of the present invention is as follows:

[0009] A device for automatic flame polishing of a quartz boat, comprising: a graphite positioning tooling, a polishing lamp group, and a closed-loop control device for hydrogen-oxygen gas pipes. The graphite positioning tooling is horizontally arranged on a workbench. The polishing lamp group and the closed-loop control device for hydrogen-oxygen gas pipes are arranged on a robot body. The robot body is a SCARA robot. An electronic igniter is provided on the workbench corresponding to the graphite positioning tooling. The graphite positioning tooling includes a support and a positioning plate. There are two positioning plates, and the two positioning plates are correspondingly arranged with a right-angle positioning structure on the support. The closed-loop control device for hydrogen-oxygen gas pipes includes a plurality of hydrogen-oxygen gas pipes, solenoid valves, proportional regulating valves, and a sensor module. The solenoid valves, proportional regulating valves, and sensor module are respectively arranged corresponding to the plurality of hydrogen-oxygen gas pipes. The closed-loop control device for hydrogen-oxygen gas pipes is movably arranged on the robot body. The closed-loop control device for hydrogen-oxygen gas pipes is used to precisely adjust the flow rate, pressure, and mixing ratio of hydrogen and oxygen. The polishing lamp group includes a lamp handle and polishing lamps movably arranged on the left and right sides of the lamp handle and a polishing lamp arranged at the front end of the lamp handle. The robot body includes a fuselage, an intelligent control system, and a robotic arm movably arranged at the front end of the fuselage. An interface for installing the lamp handle is provided on the robotic arm. The hydrogen-oxygen gas pipes and solenoid valves are movably arranged on the lamp handle. The lamp handle is movably connected to the robotic arm through a corresponding interface. The method for automatic flame polishing of the quartz boat is as follows:

[0010] S1: First, place the quartz boat on the workbench and adjust the graphite positioning tooling. Clamp and fix the quartz boat through the positioning plates on both sides and the corresponding right-angle limiting structures.

[0011] S2: Start the intelligent control system, move the robot body and control the specific position of the polishing lamp group, make the polishing lamp on the left correspond to the ignition position of the electronic igniter, and keep the distance between the polishing lamp and the surface of the quartz boat at 10 ± 0.5 mm.

[0012] S3: Control the solenoid valve on the hydrogen-oxygen gas pipe corresponding to the polishing lamp on the left through the intelligent control system, turn on the supply of hydrogen and oxygen. Among them, the initial flow rates of hydrogen and oxygen are 2 L / min for hydrogen and 1 L / min for oxygen respectively. At the same time, turn on the electronic igniter to work, ignite the hydrogen and oxygen of the corresponding hydrogen-oxygen gas pipe, and dynamically adjust the ratio of hydrogen and oxygen according to the surface temperature feedback by the sensor module, so that the mixing ratio of hydrogen and oxygen by volume of the polishing lamp is 1.8:1 to 2.2:1, make the flame temperature of the polishing lamp between 1100 and 1350 °C, and make the temperature of the polishing lamp group on the left approach the target value. Among them, the target value is 1200 ± 50 °C.

[0013] S4: The robot drives the polishing lamp on the left side through the robotic arm to reciprocate at a speed of 200 mm / s according to the set path, successively completing the polishing of the outer surface of the quartz boat on the right side, and controlling the corresponding solenoid valve to close hydrogen and oxygen;

[0014] S5: The robot drives the polishing lamp on the right side through the robotic arm to move to the ignition position of the electronic igniter according to the set program, controls the solenoid valve switch on the corresponding hydrogen-oxygen gas pipe, and ignites the polishing lamp on the right side;

[0015] S6: Using the above method, according to the pre-set path, the robotic arm drives the polishing lamp on the right side to reciprocate at a speed of 200 mm / s, successively completing the polishing of the outer surface of the quartz boat on the left side;

[0016] S7: After completing the polishing of the outer surfaces on both sides of the quartz boat, the robotic arm moves the two polishing lamps at the front end close to the quartz boat groove rod to be polished according to the set path, controls the solenoid valve on the corresponding hydrogen-oxygen gas pipe through the intelligent control system, ignites the corresponding two polishing lamps using the residual heat, and fully opens the two polishing lamps at the front end;

[0017] S8: Place the two fully ignited polishing lamps in the middle of the quartz boat, adopt a segmented polishing path, and the two polishing lamps at both ends polish the inner groove in the middle of the quartz boat groove rod at the same time. Among them, the inclination angles of the two polishing lamps at both ends are 25° - 35°, and the moving speed is 100 - 200 mm / s. After the inner groove polishing is completed, the intelligent control system closes the corresponding solenoid valve on the hydrogen-oxygen gas pipe, and then nitrogen is introduced through the nitrogen gas pipeline to purge the residual gas. The purging time is ≥10 s, and the robotic arm returns to the initial position;

[0018] S9: After the quartz boat cools down to 60 °C, take down the quartz boat from the workbench to complete the polishing of the quartz boat.

[0019] In the above structure, the workbench is a rectangular frame structure, including a bracket and a work panel. The work panel is horizontally arranged on the upper part of the bracket. The bracket is a profile frame structure, the work panel is a graphite plate, and a high-temperature resistant ceramic coating with a thickness of 0.2 - 0.5 mm is provided on the surface of the graphite plate. The work panel is bolted to the bracket, and a leveling structure is provided at the lower part of the bracket.

[0020] In the above structure, grooves for installing the positioning plates are embedded in both side surfaces of the support. The two positioning plates are movably arranged on both sides of the support. The right-angle limiting structure is located on the side of the support away from the side where the two positioning plates are provided. The right-angle limiting structure is integrally provided on the upper part of the support. The two positioning plates and the corresponding right-angle positioning structures form a space for fixing the quartz boat. The two positioning plates are respectively bolted to the support.

[0021] In the above structure, the intelligent control system includes a human-machine interface and a controller. The human-machine interface is used for parameter setting and status monitoring. The electromagnetic valve and the sensor module are both connected to the intelligent control system. The sensor module transmits the actual parameters to the intelligent control system and generates an error signal by comparing with the set value.

[0022] In the above structure, the sensor module includes a flow sensor, a pressure sensor, and a concentration sensor. The flow sensor is used to monitor the instantaneous flow rates of hydrogen and oxygen in real time. The pressure sensor is used to detect the gas path pressure to prevent overpressure or leakage. The concentration sensor is used to monitor the ratio of hydrogen and oxygen in the mixed gas. The temperature sensor can avoid abnormal gas temperature from affecting the reaction efficiency or equipment safety.

[0023] In the above structure, the proportional regulating valve can adjust the gas flow according to the control signal. The proportional regulating valve is arranged adjacent to the electromagnetic valve. The proportional regulating valve is electrically connected to the intelligent control system.

[0024] In the above structure, an explosion-proof device is further included. The explosion-proof device includes a pressure relief piece and a spark arrester. The pressure relief piece and the spark arrester are arranged on the hydrogen-oxygen pipe corresponding to the polishing lamp.

[0025] In the above structure, the SCARA robot includes a six-axis robot.

[0026] The beneficial effects of the present invention are as follows:

[0027] The fixed workbench of the quartz boat of the present invention uses a graphite mold and adopts a right-angle positioning method. The quartz boat only needs to be placed on the workbench and then the right angle is leaned against the right angle of the workbench to quickly complete the positioning. It is not afraid of the platform deformation caused by high temperature for the robot to move. It can complete the polishing of each part of the quartz boat without omission through programming. The polishing lamp is driven by the robotic arm at a constant speed to polish the quartz boat. The uniform polishing of the quartz boat is beneficial to improving the product quality of the quartz boat. There is a hydrogen-oxygen gas flow adjustment on both sides of the mold for clamping the polishing lamp, which can adjust the state of the polishing lamp to the best. The polishing lamp greatly improves the polishing efficiency of the quartz boat. The solenoid valve can complete the automatic on-off of hydrogen and oxygen, saving the repeated switching of manual polishing and reducing the labor intensity of people. People only need to place the quartz boat on the workbench and then press the button, and the robot can complete the polishing of the quartz boat. Moreover, one person can control multiple devices at the same time, improving the production efficiency. The automatic fire polishing device of the present invention can realize the automatic fire polishing operation of quartz products. During the operation, the positioning of the quartz products is accurate and reliable, the processing quality is relatively stable, the thermal radiation has little impact on the physical health of the staff, greatly reducing the labor cost, and it can adapt to the fire polishing operation of quartz products of different sizes and specifications, with high polishing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 FIG. 1 is a schematic structural diagram of a robot body in an embodiment of the device for automatically fire-polishing a quartz boat according to the present invention;

[0029] Figure 2 FIG. 2 is a schematic structural diagram of a workbench in an embodiment of the device for automatically fire-polishing a quartz boat according to the present invention;

[0030] Figure 3 FIG. 3 is a schematic structural diagram of a polishing lamp group in an embodiment of the device for automatically fire-polishing a quartz boat according to the present invention;

[0031] Figure 4 FIG. 4 is a usage state diagram of an embodiment of the device and method for automatically fire-polishing a quartz boat according to the present invention;

[0032] Figure 5 FIG. 5 is a flowchart of the device and method for automatically fire-polishing a quartz boat according to the present invention.

[0033] In the figures, 1-graphite positioning tooling, 2-workbench, 3-polishing lamp group, 4-robot body, 5-electronic igniter, 6-support, 7-positioning plate, 8-hydrogen-oxygen gas pipe, 9-solenoid valve, 10-lamp handle, 11-polishing lamp, 12-robotic arm, 13-quartz boat, 14-bracket, 15-work panel. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0034] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings. It should be noted here that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation on the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0035] As Figures 1-5 shown, a device for automatic flame polishing of a quartz boat includes: a graphite positioning tooling 1, a polishing lamp group 3, and a hydrogen-oxygen gas pipe closed-loop control device. The graphite positioning tooling 1 is horizontally arranged on a workbench 2, and the polishing lamp group 3 and the hydrogen-oxygen gas pipe closed-loop control device are arranged on a robot body 4. The robot body 1 is a SCARA robot. An electronic igniter 5 is provided on the workbench 2 corresponding to the graphite positioning tooling 1. The graphite positioning tooling 1 includes a support 6 and a positioning plate 7. There are two positioning plates 7, and the two positioning plates 7 are correspondingly arranged with a right-angle positioning structure on the support 6. The hydrogen-oxygen gas pipe closed-loop control device includes a plurality of hydrogen-oxygen gas pipes 8, solenoid valves 9, proportional regulating valves, and a sensor module. The solenoid valves 9, proportional regulating valves, and sensor module are respectively arranged corresponding to the plurality of hydrogen-oxygen gas pipes 8. The hydrogen-oxygen gas pipe closed-loop control device is movably arranged on the robot body 1. The hydrogen-oxygen gas pipe closed-loop control device is used to precisely adjust the flow rate, pressure, and mixing ratio of hydrogen and oxygen. The polishing lamp group includes a lamp handle 10 and polishing lamps 11 movably arranged on the left and right sides of the lamp handle 10 and polishing lamps 11 arranged at the front end of the lamp handle 10. The robot body 4 includes a fuselage, an intelligent control system, and a robotic arm 12 movably arranged at the front end of the fuselage. An interface for installing the lamp handle 10 is provided on the robotic arm 12. The hydrogen-oxygen gas pipes 8 and solenoid valves 9 are movably arranged on the lamp handle 10, and the lamp handle 10 is movably connected to the robotic arm 12 through a corresponding interface.

[0036] Specifically, in this embodiment, the quartz boat 13 is placed on a graphite platform, and the positioning sensor is triggered; the robot body 4 adopts a segmented polishing path according to the set program to polish the outer surfaces on both sides of the quartz boat 13 and the inner groove in the middle in a coordinated manner. The polishing lamp 11 is a quartz lamp.

[0037] Specifically, in this embodiment, the surface of the working panel 15 on the upper part of the workbench 2 is coated with a high-temperature resistant ceramic layer with a thickness of 0.2 - 0.5 mm and a temperature resistance of ≥1800 °C.

[0038] The method for automatic flame polishing of the quartz boat is specifically operated as follows:

[0039] S1: First, place the quartz boat 13 on the workbench 2, and adjust the graphite positioning tooling 1 to clamp and fix the quartz boat 13 through the positioning plates 7 on both sides and the corresponding right-angle limiting structures;

[0040] Specifically, in this embodiment, the graphite positioning tooling 1 is a right-angle positioning tooling. The contact surface between the graphite positioning tooling 1 and the quartz boat is provided with a high-temperature resistant ceramic coating. The right-angle positioning structure enables the quartz boat to be quickly positioned, and the positioning repeat accuracy is ≤0.1 mm. The right-angle positioning is a prior art and will not be elaborated here.

[0041] S2: Start the intelligent control system to move the robot body 4 and control the specific position of the polishing lamp group, so that the left polishing lamp 11 corresponds to the ignition position of the electronic igniter 5, and keep the surface distance between the polishing lamp 11 and the quartz boat 13 at 10 ± 0.5 mm;

[0042] S3: Control the solenoid valve on the hydrogen-oxygen pipe 8 corresponding to the left polishing lamp 11 through the intelligent control system to open the supply of hydrogen and oxygen. Among them, the initial flow rates of hydrogen and oxygen are 2 L / min for hydrogen and 1 L / min for oxygen respectively. At the same time, start the electronic igniter 5 to work, ignite the hydrogen and oxygen in the corresponding hydrogen-oxygen pipe 8, and dynamically adjust the ratio of hydrogen and oxygen according to the surface temperature feedback by the sensor module, so that the volume mixing ratio of hydrogen and oxygen in the polishing lamp 11 is 1.8:1 to 2.2:1, make the flame temperature of the polishing lamp 11 between 1100 and 1350 °C, and make the temperature of the left polishing lamp group close to the target value, where the target value is 1200 ± 50 °C;

[0043] S4: The robot body 4 drives the left polishing lamp 11 to reciprocate at a speed of 200 mm / s through the robotic arm 12 according to the set path, successively complete the polishing of the outer surface of the right quartz boat 13, and control the corresponding solenoid valve 9 to close the supply of hydrogen and oxygen;

[0044] Specifically, in this embodiment, the path accuracy of the robotic arm 12 is ±0.05 mm, the surface roughness Ra ≤ 1.6 μm, safety is enhanced, the fully enclosed gas path design reduces the leakage risk, the operator is far away from the high-temperature area, and cost is saved: the service life of the graphite tooling is extended by 3 times, and the consumption of hydrogen and oxygen is reduced by 25%.

[0045] Specifically, in this embodiment, it also includes a gas leakage emergency mechanism. The pressure sensor is linked to the intelligent control system. If there is an alarm, the machine can be stopped immediately.

[0046] S5: The robot drives the right polishing lamp 11 to move to the ignition position of the electronic igniter 5 through the robotic arm 12 according to the set program, controls the opening and closing of the solenoid valve 9 on the corresponding hydrogen-oxygen pipe 8, and ignites the right polishing lamp 11;

[0047] S6: Using the above method, according to the pre-set path, make the robotic arm 12 drive the right polishing lamp 11 to reciprocate at a speed of 200 mm / s, and successively complete the polishing of the outer surface of the left quartz boat 13;

[0048] S7: After the outer surfaces on both sides of the quartz boat 13 are polished, the robotic arm 12 moves the two polishing lamps 11 at the front end close to the groove rods of the quartz boat 13 to be polished according to the set path. The solenoid valves on the corresponding hydrogen-oxygen gas pipes 8 are controlled by the intelligent control system, and the corresponding two polishing lamps 11 are ignited using the remaining heat, and the two polishing lamps 11 at the front end are fully opened;

[0049] Specifically, in this embodiment, the hydrogen-oxygen gas path includes 4 groups of solenoid valves, and the polishing lamps 11 are arranged symmetrically on both sides, supporting synchronous polishing.

[0050] S8: The two fully ignited polishing lamps 11 are placed in the middle of the quartz boat 13, and a segmented polishing path is adopted. The polishing lamps 11 at both ends polish the inner groove in the middle of the quartz boat groove rods simultaneously. Among them, the inclination angles of the polishing lamps 11 at both ends are 25° - 35°, and the moving speed is 100 - 200 mm / s. After the inner groove polishing is completed, the corresponding solenoid valves 9 on the hydrogen-oxygen gas pipes 8 are closed through the intelligent control system, and then nitrogen gas is introduced through the nitrogen gas pipeline to purge the residual gas. The purging time is ≥10 s, and the robotic arm 12 returns to the initial position;

[0051] Specifically, in this embodiment, the robotic arm 12 performs a layered scanning polishing on the outer surface of the quartz boat 13 according to a preset program. The bilateral polishing lamps 11 work alternately, and the double-lamp collaborative polishing is adopted in the inner groove area. Closed-loop control: The hydrogen-oxygen gas mixing ratio is adjusted in real-time through the feedback of the sensor.

[0052] Specifically, in this embodiment, after the polishing is completed in the termination stage, the solenoid valve 9 is closed and nitrogen gas is introduced to purge the residual gas. The robot 12 returns to the initial position, and the quartz boat 13 is unloaded after it cools down to below 80°C. The surface roughness of the polished quartz boat 13 is reduced from Ra3.2 μm to Ra1.6 μm.

[0053] S9: After the quartz boat 13 cools down to 60°C, the quartz boat 13 is taken off the workbench, and the polishing of the quartz boat 13 is completed.

[0054] Specifically, in this embodiment, the working panel 15 (graphite platform density ≥1.78 g / cm³), the purity of the quartz tube of the polishing lamp 11 (SiO2 ≥99.99%)

[0055] Specifically, in this embodiment, initial stage: The quartz boat 13 is placed on the graphite tooling, triggering right-angle positioning. Ignition stage: The robotic arm 12 moves the polishing lamp to the electronic ignition position, and the solenoid valve 9 is opened to ignite the hydrogen-oxygen flame; Path polishing: The robotic arm 12 performs a layered scanning polishing on the outer surface of the quartz boat according to a preset program; The bilateral polishing lamps 11 work alternately, and the double-lamp collaborative polishing is adopted in the inner groove area; Closed-loop control: The hydrogen-oxygen gas mixing ratio is adjusted in real-time through the feedback of the flow sensor.

[0056] In a preferred embodiment of the present invention, the workbench 2 is a rectangular frame structure, including a bracket 14 and a work panel 15. The work panel 15 is horizontally arranged on the upper part of the bracket 14. The bracket 14 is a profile frame structure, and the work panel 15 is a graphite plate. The surface of the graphite plate is provided with a high-temperature ceramic coating with a thickness of 0.2 - 0.5 mm. The work panel 15 is bolted to the bracket 14, and a leveling structure is provided at the lower part of the bracket 14.

[0057] In a preferred embodiment of the present invention, grooves for installing positioning plates 7 are embedded on both sides of the support 6. The two positioning plates 7 are movably arranged on both sides of the support 6. The right-angle limiting structure is located on the side of the support 6 away from the side where the two positioning plates 7 are provided. The right-angle limiting structure is integrally provided on the upper part of the support 6. A space for fixing the quartz boat 13 is formed between the two positioning plates 7 and the corresponding right-angle positioning structures. The two positioning plates 7 are respectively bolted to the support 6.

[0058] Specifically, the two positioning plates 7 are respectively arranged corresponding to the limiting structures on the support 6, and the equipment life is extended: the graphite tooling can be reused > 1000 times (compared with 200 times in the traditional solution).

[0059] In a preferred embodiment of the present invention, the intelligent control system includes a human-machine interface and a controller. The human-machine interface is used for parameter setting and status monitoring. The solenoid valve 9 and the sensor module are both connected to the intelligent control system. The sensor module transmits the actual parameters to the intelligent control system and compares them with the set values to generate an error signal.

[0060] In a preferred embodiment of the present invention, the sensor module includes a flow sensor, a pressure sensor, and a concentration sensor. The flow sensor is used to real-time monitor the instantaneous flow rates of hydrogen and oxygen. The pressure sensor is used to detect the gas path pressure to prevent overpressure or leakage. The concentration sensor is used to monitor the ratio of hydrogen and oxygen in the mixed gas. The temperature sensor can avoid abnormal gas temperature affecting the reaction efficiency or equipment safety.

[0061] In a preferred embodiment of the present invention, the proportional regulating valve can adjust the gas flow according to the control signal. The proportional regulating valve is arranged adjacent to the solenoid valve 9 and is electrically connected to the intelligent control system.

[0062] Specifically, in Example 1, the parameter settings are as follows: polishing lamp power: 2.5 kW; the movement speed of the robotic arm 12: 150 mm / s on the outer surface and 100 mm / s in the inner groove; hydrogen-oxygen mixing ratio: 2:1 (volume ratio).

[0063] Operation process: Place the quartz boat 13 on the graphite platform and trigger the positioning sensor; the robotic arm 12 completes the outer surface polishing according to the preset path (taking 8 minutes); switch to the inner groove polishing mode, and the bilateral polishing lamps work together (taking 5 minutes); unload the material after nitrogen purging for 10 seconds.

[0064] Specifically, in the second embodiment, it is applicable to the ultra-large-sized quartz boat 13 (length > 1.5 m): increase the spacing of the polishing lamps 11 to 180 mm; adopt a segmented polishing strategy, and the overlapping area of each segment is ≥ 20 mm.

[0065] In a preferred embodiment of the present invention, an explosion-proof device is further included. The explosion-proof device includes a pressure relief piece and a spark arrester. The pressure relief piece and the spark arrester are correspondingly arranged on the hydrogen-oxygen pipe 8 with respect to the polishing lamp 11.

[0066] In a preferred embodiment of the present invention, the SCARA robot is a six-axis robot.

[0067] Specifically, this device is applicable to the batch production scenario of quartz boats in the photovoltaic industry. The operator only needs to place the workpiece and start the program. The daily processing capacity of a single device can reach 60 pieces, which is 300% higher than the traditional process. It overcomes the problems of low efficiency, poor uniformity, short tooling life, and safety hazards in the traditional quartz boat flame polishing process.

[0068] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0069] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0070] The above has described the embodiments of the present invention in detail in conjunction with the drawings, but the present invention is not limited to the described embodiments. For those skilled in the art, without departing from the principle and spirit of the present invention, various changes, modifications, substitutions, and variations made to these embodiments still fall within the protection scope of the present invention.

Claims

1. An apparatus for automatic flame polishing of quartz boats, characterized in that, Including: A graphite positioning tooling, a polishing lamp set, and a hydrogen-oxygen gas pipe closed-loop control device. The graphite positioning tooling is horizontally arranged on a workbench. The polishing lamp set and the hydrogen-oxygen gas pipe closed-loop control device are arranged on a robot body. The robot body is a SCARA robot. An electronic igniter is provided on the workbench corresponding to the graphite positioning tooling. The graphite positioning tooling includes a support and two positioning plates. The two positioning plates are correspondingly arranged with right-angle positioning structures on the support. The hydrogen-oxygen gas pipe closed-loop control device includes a plurality of hydrogen-oxygen gas pipes, solenoid valves, proportional regulating valves, and a sensor module. The solenoid valves, proportional regulating valves, and sensor module are respectively arranged corresponding to the plurality of hydrogen-oxygen gas pipes. The hydrogen-oxygen gas pipe closed-loop control device is movably arranged on the robot body. The hydrogen-oxygen gas pipe closed-loop control device is used to precisely adjust the flow rate, pressure, and mixing ratio of hydrogen and oxygen. The polishing lamp set includes a lamp handle and polishing lamps movably arranged on the left and right sides of the lamp handle and a polishing lamp arranged at the front end of the lamp handle. The robot body includes a fuselage, an intelligent control system, and a robotic arm movably arranged at the front end of the fuselage. An interface for installing the lamp handle is provided on the robotic arm. The hydrogen-oxygen gas pipes and solenoid valves are movably arranged on the lamp handle. The lamp handle is movably connected to the robotic arm through corresponding interfaces. The method for automatically fire-polishing a quartz boat is as follows: S1: First, place the quartz boat on the workbench and adjust the graphite positioning tooling. Clamp and fix the quartz boat through the positioning plates on both sides and the corresponding right-angle limiting structures. S2: Start the intelligent control system to move the robot body and control the specific position of the polishing lamp set, so that the polishing lamp on the left corresponds to the ignition position of the electronic igniter, and keep the surface distance between the polishing lamp and the quartz boat at 10 ± 0.5 mm. S3: Control the solenoid valve on the hydrogen-oxygen gas pipe corresponding to the polishing lamp on the left through the intelligent control system to open the supply of hydrogen and oxygen. Among them, the initial flow rates of hydrogen and oxygen are 2 L / min for hydrogen and 1 L / min for oxygen respectively. At the same time, start the electronic igniter to work, ignite the hydrogen and oxygen in the corresponding hydrogen-oxygen gas pipe, and dynamically adjust the ratio of hydrogen and oxygen according to the surface temperature feedback by the sensor module, so that the volume mixing ratio of hydrogen and oxygen in the polishing lamp is 1.8:1 to 2.2:1, make the flame temperature of the polishing lamp between 1100 and 1350 °C, and make the temperature of the polishing lamp set on the left approach the target value, where the target value is 1200 ± 50 °C. S4: The robot drives the polishing lamp on the left to reciprocate at a speed of 200 mm / s through the robotic arm according to the set path, successively complete the polishing of the outer surface of the quartz boat on the right, and control the corresponding solenoid valve to close the supply of hydrogen and oxygen. S5: The robot drives the polishing lamp on the right side to move to the ignition position of the electronic igniter through the robotic arm according to the set program, controls the solenoid valve switch on the corresponding hydrogen-oxygen gas pipe, and ignites the polishing lamp on the right side. S6: Using the above method, drive the polishing lamp on the right side by the robotic arm to reciprocate at a speed of 200 mm / s according to the preset path, and successively complete the polishing of the outer surface of the quartz boat on the left side. S7: After completing the polishing of the outer surfaces on both sides of the quartz boat, the robotic arm moves the two polishing lamps at the front end close to the quartz boat groove rod to be polished according to the set path, controls the solenoid valve on the corresponding hydrogen-oxygen gas pipe through the intelligent control system, ignites the corresponding two polishing lamps using the remaining heat, and fully opens the two polishing lamps at the front end. S8: Place the two fully ignited polishing lamps in the middle of the quartz boat, adopt a segmented polishing path, and the two polishing lamps at both ends polish the inner groove in the middle of the quartz boat groove rod at the same time. Among them, the inclination angles of the two polishing lamps at both ends are 25° - 35°, and the moving speed is 100 - 200 mm / s. After the inner groove polishing is completed, close the corresponding solenoid valve on the hydrogen-oxygen gas pipe through the intelligent control system, and then introduce nitrogen through the nitrogen gas pipeline to purge the residual gas. The purging time is ≥10 s, and the robotic arm returns to the initial position. S9: After the quartz boat cools down to 60 °C, remove the quartz boat from the workbench to complete the polishing of the quartz boat.

2. The device for automatic fire polishing of a quartz boat according to claim 1, wherein, The workbench is a rectangular frame structure, including a bracket and a work panel. The work panel is horizontally arranged on the upper part of the bracket. The bracket is a profile frame structure, the work panel is a graphite plate, and a high-temperature resistant ceramic coating with a thickness of 0.2 - 0.5 mm is provided on the surface of the graphite plate. The work panel is bolted to the bracket, and a leveling structure is provided at the lower part of the bracket.

3. The device for automatic flame polishing of quartz boats according to claim 1, characterized in that, Grooves for installing the positioning plates are embedded on both sides of the support. The two positioning plates are movably arranged on both sides of the support. The right-angle limit structure is located on the side of the support away from the two positioning plates, and the right-angle limit structure is integrally provided on the upper part of the support. The two positioning plates and the corresponding right-angle positioning structure form a space for fixing the quartz boat, and the two positioning plates are respectively bolted to the support.

4. A device for automatic flame polishing of quartz boats according to claim 1, characterized in that, The intelligent control system includes a human-machine interface and a controller. The human-machine interface is used for parameter setting and status monitoring. The solenoid valve and the sensor module are both connected to the intelligent control system. The sensor module transmits the actual parameters to the intelligent control system and compares them with the set values to generate an error signal.

5. An apparatus for automatic flame polishing of a quartz boat according to claim 1, characterized in that, The sensor module includes a flow sensor, a pressure sensor, and a concentration sensor. The flow sensor is used to monitor the instantaneous flow rates of hydrogen and oxygen in real time. The pressure sensor is used to detect the gas path pressure to prevent overpressure or leakage. The concentration sensor is used to monitor the ratio of hydrogen and oxygen in the mixed gas. The temperature sensor can avoid the abnormal gas temperature from affecting the reaction efficiency or equipment safety.

6. The device for automatic flame polishing of a quartz boat according to claim 1, characterized in that, The proportional control valve can adjust the gas flow according to the control signal. The proportional control valve is arranged adjacent to the solenoid valve and is electrically connected to the intelligent control system.

7. The device for automatic flame polishing of quartz boats according to claim 2, characterized in that, It further includes an explosion-proof device, which includes a pressure relief piece and a spark arrester. The pressure relief piece and the spark arrester are arranged on the hydrogen-oxygen pipe corresponding to the polishing lamp.

8. The device for automatic flame polishing of quartz boats according to claim 1, characterized in that, The SCARA robot is a six-axis robot.

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