Wire feeding method and vacuum evaporation coating device

Abstract

The invention provides a wire feeding method and a vacuum evaporation coating device. The wire feeding method is applied to vacuum evaporation coating and comprises the following steps: preheating an evaporation boat; when the evaporation boat is heated at the first power, wire feeding is conducted at the first speed; when the target material in the evaporation boat is in a molten state and forms a molten pool; when the evaporation boat is heated at the second power, wire feeding is conducted at the second speed; wherein the second power is smaller than the first power, and the second speed is larger than the first speed. According to the wire feeding method, the power is reduced after the target material is molten, the wire feeding speed is increased synchronously, the molten pool is expanded, and the stability of the molten pool is improved. According to the wire feeding method disclosed by the invention, the liquid target material in the evaporation boat can be stabilized, so that the service life of the evaporation boat is prolonged, a coating film is stable and is uniformly formed, the heating power of the evaporation boat is reduced after a molten pool is formed by the target material which is subjected to wire feeding at the first speed, and the quality of the formed film is improved while energy sources are saved and the cost is reduced.

Description

Technical Field

[0001] The present disclosure relates to the technical field of physical vapor deposition coating, and more particularly, to a wire feeding method and a vacuum evaporation coating device. Background Art

[0002] PVD (Physical Vapor Deposition) technology is one of the main technologies for preparing thin target materials, and vacuum coating, as a traditional PVD technology, is widely used in many fields. Its process control is simple and the film forming purity is high. The vacuum coating technology is to contact a metal wire with an evaporation boat, the metal wire melts and sublimes into metal vapor, and the substrate to be coated is passed above the evaporation boat, and the metal vapor is deposited on the surface of the substrate as a thin metal layer.

[0003] Currently, wire feeding evaporation is used in the vacuum coating process. It is preheated according to a traditional set heating curve. After the preheating is completed, continuous wire feeding can be carried out for wire feeding evaporation. During the evaporation process, the evaporation boat always maintains a too high temperature, and the evaporation boat material will decompose or deform at high temperature, seriously reducing the service life of the evaporation boat. Moreover, during the melting process of the target material, after melting and dropping onto the boat, it will immediately evaporate clean, making the liquid target material in the molten pool unstable and unable to ensure the uniformity of film formation. Summary of the Invention

[0004] The purpose of the present disclosure is to provide a wire feeding method and a vacuum evaporation coating device, which can solve at least one of the above-mentioned technical problems. The specific solutions are as follows:

[0005] According to a specific embodiment of the present disclosure, on the one hand, the present disclosure provides a wire feeding method applied to vacuum evaporation coating, including: preheating an evaporation boat; heating the evaporation boat at a first power while feeding wire at a first speed; when the target material in the evaporation boat is in a molten state and a molten pool is formed, heating the evaporation boat at a second power while feeding wire at a second speed; wherein, the second power is less than the first power, and the second speed is greater than the first speed.

[0006] In an optional embodiment, the preheating of the evaporation boat includes: placing a metal wire or metal particles in the evaporation boat; evacuating the vacuum chamber; preheating the evaporation boat with an increasing power, and when the power reaches the first power, stop increasing the power; heating the evaporation boat at the first power until all of the metal wire or the metal particles are evaporated, and the preheating ends.

[0007] In an optional embodiment, the preheating of the evaporation boat with an increasing power includes: forming an increasing power by increasing the voltage; preheating the evaporation boat with an increasing power until the power reaches the first power.

[0008] In an alternative embodiment, the increasing power is formed by increasing the voltage; preheating the evaporation boat with the increasing power until the power reaches the first power, including: preheating the evaporation boat for the first time with a first voltage, the duration of the first preheating being a first duration; preheating the evaporation boat for the second time with a second voltage, the duration of the second preheating being the first duration; preheating the evaporation boat for the third time with a third voltage, the duration of the third preheating being the first duration; preheating the evaporation boat for the fourth time with a fourth voltage, the duration of the fourth preheating being a second duration; wherein, the first voltage is less than the second voltage, the second voltage is less than the third voltage, and the third voltage is less than the fourth voltage; when the voltage is the fourth voltage, the power reaches the first power.

[0009] In an alternative embodiment, the second duration is the duration for all of the wire or the metal particles to evaporate.

[0010] In an alternative embodiment, when the target material in the evaporation boat is in a molten state and a molten pool is formed, heating the evaporation boat with a second power and feeding wire at a second speed includes: when the target material in the evaporation boat is in a molten state and a molten pool is formed, reducing the first power to the second power by gradually decreasing the voltage, and at the same time increasing the first speed to the second speed by a gradually accelerating manner.

[0011] In an alternative embodiment, reducing the first power to the second power by gradually decreasing the voltage includes: reducing a first preset voltage every third duration until the first power is reduced to the second power; increasing the first speed to the second speed by a gradually accelerating manner includes: increasing a first preset speed every third duration until the first speed is increased to the second speed.

[0012] In an alternative embodiment, the method of wire feeding further includes: starting the coating, and heating the evaporation boat with the second power, and continuously feeding wire to the evaporation boat at the second speed.

[0013] In an alternative embodiment, after heating the evaporation boat with the second power, it further includes: continuously reducing the second power by a preset decrease to maintain the stability of the molten pool.

[0014] In an alternative embodiment, the method of wire feeding further includes: disposing a baffle between the evaporation boat and the substrate; when the target material in the evaporation boat is in a molten state and a molten pool is formed, removing the baffle and starting the evaporation coating.

[0015] According to a specific embodiment of the present disclosure, on the other hand, the present disclosure provides a vacuum evaporation coating method, including: the wire feeding method according to any one of the above technical solutions.

[0016] According to a specific embodiment of the present disclosure, on another aspect, the present disclosure provides a vacuum evaporation coating device for performing vacuum evaporation coating by the vacuum evaporation coating method according to any one of the above technical solutions.

[0017] The above solution of the embodiment of the present disclosure has at least the following beneficial effects compared with the prior art:

[0018] The wire feeding method of the present disclosure improves the stability of the molten pool by reducing the power after melting the target material, synchronously increasing the wire feeding speed, and expanding the molten pool. Most target materials require a higher temperature for initial melting, and the heat requirement decreases after melting. At the same time, the target material extends into the molten pool, and the molten pool wraps the target material, resulting in better heat conduction effect, making the target material melt steadily. The wire feeding method of the present disclosure can stabilize the liquid target material in the evaporation boat, thereby increasing the service life of the evaporation boat, and enabling stable and uniform film formation during coating. After the molten pool is formed by the target material fed at the first speed, the heating power of the evaporation boat is reduced, which can also save energy, reduce costs, and improve the quality of the film formed. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The flowchart showing the wire feeding method according to an embodiment of the present disclosure is shown.

[0020] Figure 2 The flowchart showing the wire feeding method according to another embodiment of the present disclosure is shown.

[0021] Figure 3 The voltage adjustment curve diagram in the wire feeding method according to an embodiment of the present disclosure is shown.

[0022] Figure 4 The sheet resistance change diagram of the coating sample obtained by the wire feeding method according to an embodiment of the present disclosure is shown.

[0023] Figure 5 The structural schematic diagram of the vacuum evaporation coating device according to an embodiment of the present disclosure is shown.

[0024] Reference Numerals:

[0025] 100: Evaporation boat; 200: Wire feeding mechanism; 300: Vacuum chamber; 400: Baffle; 500: Main roller; 600: Rewinding roller; 700: Unwinding roller; 800: Vacuum pumping mechanism.

[0026] In Figure 3Among them, the abscissa is the wire feeding time, with the unit of min; the ordinate is the voltage for heating the evaporation boat, with the unit of V; A is the preheating stage, a1 is the first duration, a2 is the second duration, a3 is the third duration; b1 is the first voltage corresponding to the ordinate, b2 is the second voltage corresponding to the ordinate, b3 is the third voltage corresponding to the ordinate, b4 is the fourth voltage corresponding to the ordinate, and b5 is the first preset voltage corresponding to the ordinate. Detailed implementation manners

[0027] In order to make the objectives, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present disclosure.

[0028] The terms used in the embodiments of the present disclosure are only for the purpose of describing specific embodiments, and are not intended to limit the present disclosure. The singular forms "a", "the" and "said" used in the embodiments of the present disclosure and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. "Plural" generally includes at least two.

[0029] It should be understood that the term "and / or" used herein is only an associative relationship describing associated objects, indicating that three relationships may exist. For example, A and / or B may represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " herein generally represents an "or" relationship between the associated objects before and after.

[0030] It should be understood that although the terms first, second, third, etc. may be used in the embodiments of the present disclosure to describe structures, these structures should not be limited to these terms. These terms are only used to distinguish different structures. For example, without departing from the scope of the embodiments of the present disclosure, the first component may also be referred to as the second component, and similarly, the second component may also be referred to as the first component.

[0031] Depending on the context, the words "if", "when" as used herein may be interpreted as "when...", "when...", "in response to determining" or "in response to detecting". Similarly, depending on the context, the phrase "if determined" or "if detecting (stated condition or event)" may be interpreted as "when determined", "in response to determining", "when detecting (stated condition or event)", or "in response to detecting (stated condition or event)".

[0032] It should also be noted that the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, such that a commodity or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such commodity or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the commodity or device comprising said element.

[0033] In the related art, copper foil is used as the negative electrode current collector material in lithium batteries and accounts for about 10% of the cell cost. Traditional copper foils include rolled copper foil and electrolytic copper foil, and the mainstream process currently applied to lithium batteries is electrolytic copper foil. Composite copper foil is a new process that uses polymer materials such as PET (PP) as the base material, and deposits metallic copper on both the upper and lower surfaces to form a structure similar to a "sandwich". Composite copper foil has safety and economy advantages compared to electrolytic copper foil. In the related art, the evaporation coating process is used to prepare the current collector material. The melting point of copper is 1083°C, which is much higher than the melting point of aluminum wire at 660°C. Therefore, the copper wire will show an unstable melting state. So, when plating copper, a greater power needs to be output to the evaporation boat to ensure that the boat has enough temperature to promote the continuous and stable melting of the copper wire. However, in an environment with a pressure of 9*10 -3 Pa, the evaporation temperature of copper is lower than its melting point. After the copper melts and drips onto the boat, since the temperature of the boat is much higher than the evaporation temperature, the copper liquid will immediately evaporate completely, and this state will continue. Not only can the film formation uniformity not be guaranteed, but also a stable molten pool cannot be formed on the evaporation boat. Keeping a too high temperature all the time, the evaporation boat material will decompose or deform at high temperature, seriously reducing the service life of the evaporation boat.

[0034] In order to solve at least one of the above-mentioned technical problems, the present disclosure provides a wire feeding method and a vacuum evaporation coating device. The wire feeding method is applied to vacuum evaporation coating. Wherein, the wire feeding method may include preheating the evaporation boat 100; heating the evaporation boat 100 at a first power while feeding wire at a first speed. When the target material in the evaporation boat 100 is in a molten state and a molten pool is formed, heating the evaporation boat 100 at a second power while feeding wire at a second speed. Wherein, the second power is less than the first power, and the second speed is greater than the first speed. The wire feeding method of the present disclosure improves the stability of the molten pool by reducing the power after the target material melts, synchronously increasing the wire feeding speed, and expanding the molten pool. Most target materials require a higher temperature for initial melting. After melting, the heat requirement decreases. At the same time, the target material extends into the molten pool, and the molten pool wraps the target material, resulting in better heat conduction effect and enabling the target material to melt steadily. The wire feeding method of the present disclosure can stabilize the liquid target material in the evaporation boat 100, and the liquid target material forms a stable molten pool in the evaporation boat 100, thereby increasing the service life of the evaporation boat 100, and enabling stable and uniform film formation. After the molten pool is formed by the target material fed at the first speed, reducing the heating power of the evaporation boat 100 can also save energy, reduce costs while improving the quality of the film formation.

[0035] The optional embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings.

[0036] Figure 1 The flowchart of the wire feeding method according to an embodiment of the present disclosure is shown. As Figure 1 shown, according to the specific implementation manner of the present disclosure, on the one hand, a wire feeding method is provided, which is applied to vacuum evaporation coating. The wire feeding method may at least include the following steps:

[0037] S100. Preheat the evaporation boat 100.

[0038] S200. Heat the evaporation boat 100 at a first power while feeding wire at a first speed.

[0039] S300. When the target material in the evaporation boat 100 is in a molten state and a molten pool is formed, heat the evaporation boat 100 at a second power while feeding wire at a second speed.

[0040] The wire feeding method of the present disclosure can stabilize the liquid target material in the evaporation boat 100, and the liquid target material forms a stable molten pool in the evaporation boat 100, thereby increasing the service life of the evaporation boat 100, and enabling stable and uniform film formation. After the molten pool is formed by the target material fed at the first speed, reducing the heating power of the evaporation boat 100 can also save energy, reduce costs while improving the quality of the film formation.

[0041] Among them, in step S100, the second power is less than the first power, and the second speed is greater than the first speed. It should be noted that the second power is the power for heating the evaporation boat 100 when the current target material is stably forming a film; the second speed is the wire feeding speed when the current target material is stably forming a film. The present disclosure is not only applicable to copper as the target material, but also applicable to all materials with high melting points. In the current collector material, copper is usually used as the main material for the negative current collector, and aluminum is used as the main material for the positive current collector. Since the melting point of copper is much higher than that of aluminum, copper is taken as an example. In the actual use process, the wire feeding method of the present disclosure can be applied to all target materials. First, heat at a high temperature (heating the evaporation boat 100 with the first power) and at a slow wire feeding speed (feeding the target material to the evaporation boat 100 at the first speed) to first form a stable target material molten pool in the evaporation boat 100, and then reduce the first power. When it reaches the second power, start the formal evaporation coating. At this time, the molten pool in the evaporation boat 100 is stable, avoiding local or overall dry burning of the evaporation boat 100, resulting in too high a boat temperature. Just feed the wire and evaporate the target material normally. By this method, not only the service life of the evaporation boat 100 can be increased, but also the film forming quality can be improved, and the energy consumption during evaporation coating can be reduced. It should be noted that the evaporation boat 100 is made of boron nitride conductive ceramic, and its material is one or more of TiB2, BN, AlN, and WC; the target material has a purity of 3N or above.

[0042] Figure 2 The flowchart of the wire feeding method according to another embodiment of the present disclosure is shown. Figure 3 The voltage adjustment curve diagram in the wire feeding method according to an embodiment of the present disclosure is shown; among them, in Figure 3 the abscissa is the wire feeding time, with the unit of min; the ordinate is the voltage for heating the evaporation boat, with the unit of V; A is the preheating stage, a1 is the first duration, a2 is the second duration, a3 is the third duration; b1 is the first voltage corresponding to the ordinate, b2 is the second voltage corresponding to the ordinate, b3 is the third voltage corresponding to the ordinate, b4 is the fourth voltage corresponding to the ordinate, and b5 is the first preset voltage corresponding to the ordinate; in Figure 3 in the order from left to right, the time corresponding to the first a1 is the first preheating, the time corresponding to the second a1 is the second preheating, the time corresponding to the third a1 is the third preheating, and the time corresponding to a2 is the fourth preheating. As Figure 2 and Figure 3 shown, in an optional embodiment, step S100 may include:

[0043] S110. Place a metal wire or metal granule in the evaporation boat 100.

[0044] S120. Evacuate the vacuum chamber 300.

[0045] S130. Preheat the evaporation boat 100 with increasing power. When the power reaches the first power, stop increasing the power.

[0046] S140. Heat the evaporation boat 100 at the first power until all the metal wires or metal grains are evaporated, and the preheating ends.

[0047] Among them, the steps S110, S120, S130, and S140 are the preheating process of the evaporation boat 100, which will gradually increase the temperature of the evaporation boat 100. The evaporation boat 100 is preheated in 3 - 5 power gradients to remove the residual gas in the evaporation boat 100; the last power gradient should be greater than the power during stable film formation (i.e., the second power is less than the first power); and the temperature of the evaporation boat 100 is judged whether it meets the requirements by the metal wires or metal grains. In the step S120, the pressure in the vacuum chamber 300 is pumped down to below 9×10 -3 Pa.

[0048] Specifically, the step S130 may include:

[0049] S131. Form an increasing power by increasing the voltage.

[0050] S132. Preheat the evaporation boat 100 with increasing power until the power reaches the first power.

[0051] In an optional embodiment, the steps S131 and S132 may specifically include:

[0052] S1301. Perform the first preheating of the evaporation boat 100 at the first voltage, and the duration of the first preheating is the first duration.

[0053] S1302. Perform the second preheating of the evaporation boat 100 at the second voltage, and the duration of the second preheating is the first duration.

[0054] S1303. Perform the third preheating of the evaporation boat 100 at the third voltage, and the duration of the third preheating is the first duration.

[0055] S1304. Perform the fourth preheating of the evaporation boat 100 at the fourth voltage, and the duration of the fourth preheating is the second duration.

[0056] Among them, in the steps S1301, S1302, S1303, and S1304, the first voltage is less than the second voltage, the second voltage is less than the third voltage, and the third voltage is less than the fourth voltage; when the voltage is the fourth voltage, the power reaches the first power; the second duration is the duration when all of the metal wire or metal particles are evaporated. In this embodiment, 4 gradients are used to increase the power during preheating. When the evaporation boat 100 is preheated for the fourth time with the fourth voltage, the power corresponding to the fourth voltage is the first power. Observe the melting effect of the copper wire (target). When all of the metal wire or metal particles are completely melted and evaporated, it indicates that the preheating is completed. In an alternative embodiment, the first voltage, the second voltage, the third voltage, and the fourth voltage form an arithmetic progression, and the difference is the second preset voltage. In an alternative embodiment, the first voltage is 7V, and the second preset voltage is 2 - 4V. In an alternative embodiment, the first duration is 1 - 5 min, and the second duration is 2 - 8 min. Specifically, the first duration is 3 min, and the second duration is 5 min.

[0057] Among them, in step S200, after the preheating is completed, wire feeding can be performed. At this time, the wire feeding speed needs to be much lower than the wire feeding speed during stable film formation (i.e., the second speed is greater than the first speed); and there is no need to adjust the heating state of the evaporation boat 100, and the evaporation boat 100 is still heated with the first power. Observe the melting effect of the copper wire (target). When the copper wire melts and the copper liquid spreads into a molten pool, immediately reduce the output voltage of the evaporation boat 100 and simultaneously increase the wire feeding speed, and adjust to match the power with the target wire feeding speed. In an alternative embodiment, step S200 may specifically include: S210. After the preheating is completed, the evaporation boat 100 is still heated with the first power, and wire feeding is performed at the first speed simultaneously.

[0058] Among them, in step S300, when the molten pool in the evaporation boat 100 is stable, reduce the power at a specified slope to stabilize the molten pool and form a stable film.

[0059] In an alternative embodiment, step S300 may include:

[0060] S310. When the target material in the evaporation boat 100 is in a molten state and a molten pool is formed, gradually reduce the voltage to reduce the first power to the second power, and at the same time, increase the first speed to the second speed by gradually accelerating.

[0061] Among them, step S310 may include:

[0062] S311. The step of reducing the first power to the second power by gradually decreasing the voltage may include: reducing a first preset voltage every third time period until the first power is reduced to the second power.

[0063] S312. The step of increasing the first speed to the second speed by gradually accelerating may include: increasing a first preset speed every third time period until the first speed is increased to the second speed.

[0064] Among the step 310, the step S311, and the step S312, in some embodiments, the third time period is 1 - 5 min, the first preset voltage is 0.1 - 1 V, and the first preset speed is 30 - 150 mm / min. Specifically, the third time period is 3 min, the first preset voltage is 2 V, and the first preset speed is 50 - 100 mm / min.

[0065] In some embodiments, the wire feeding method may further include:

[0066] S400. Start coating, heat the evaporation boat 100 at the second power, and continuously feed wire to the evaporation boat 100 at the second speed.

[0067] In an alternative embodiment, the step S400 may include:

[0068] S410. Continuously reduce the second power at a preset reduction rate to maintain the stability of the molten pool.

[0069] Among the step 400 and the step S410, since the molten pool is already in a stable state, coating can be performed using the second power (the power for heating the evaporation boat 100 when the current target is stably forming a film) and the second speed (the wire feeding speed when the current target is stably forming a film). In some embodiments, the preset reduction rate is 0.03 - 0.1% / 3 min. Specifically, the preset reduction rate is 0.05% / 3 min. Specifically, in the step S410, as the ambient temperature around the evaporation boat 100 gradually rises, more heat is used for evaporation, reducing heat loss. Therefore, the heating temperature can be reduced by reducing the power so that the temperature inside the evaporation boat 100 reaches the temperature for maintaining the stability of the molten pool, reducing waste of resources.

[0070] In some embodiments, before the step S100, the wire feeding method may further include: S10. Set a baffle 400 between the evaporation boat 100 and the substrate; after the step S312, the wire feeding method may further include: S350. Remove the baffle 400 and start evaporation coating.

[0071] Example 1

[0072] Select a PET substrate and a 4N purity copper wire with a diameter of 2 mm and place them in a roll-to-roll evaporation coating equipment.

[0073] Place a baffle 400 between the evaporation boat 100 and the main roller 500.

[0074] Place a small amount of copper wire in the evaporation boat 100; evacuate the vacuum chamber 300 until the pressure in the vacuum chamber 300 reaches 5×10 -3 Pa.

[0075] Start preheating the evaporation boat 100. Perform the first preheating of the evaporation boat 100 with an output voltage of 7V for 3 minutes; increase the voltage and perform the second preheating of the evaporation boat 100 with an output voltage of 9V for 3 minutes; increase the voltage and perform the third preheating of the evaporation boat 100 with an output voltage of 11V for 3 minutes; increase the voltage and perform the fourth preheating of the evaporation boat 100 with an output voltage of 13V. After 5 minutes of the fourth preheating, all the copper wire has evaporated.

[0076] Keep the output voltage unchanged, turn on the wire feeding mechanism 200 with a wire feeding speed of 100 mm / min, and wait for the copper wire to melt. After the copper wire melts and forms a stable molten pool, the wire feeding speed is increased by 50 - 100 mm / min every 3 minutes, and at the same time, the power is reduced by 0.3 - 0.5V every 3 minutes; finally, it stabilizes at 12V and 450 mm / min.

[0077] Remove the baffle 400 and start evaporation coating.

[0078] The main roller 500 starts to rotate at a speed of 10 m / min; at the same time, the output voltage is reduced at a rate of 0.05% / 3 min to ensure the stability of the molten pool.

[0079] It should be noted that in this embodiment, copper is used as the target material for illustration, but the target material of the wire feeding method of the present disclosure is not limited to copper wire.

[0080] Through the wire feeding method of this embodiment, it avoids the use of sputtering + electroplating technology in the related art for processing and production, and the film thickness is uneven finally due to the uneven distribution of the base film current, resulting in uneven film formation uniformity. The wire feeding method of this embodiment does not use electroplating with water at the same time, without water pollution. Through the wire feeding by the evaporation boat 100 and power adjustment, the product uniformity can be effectively controlled, the film formation uniformity is good, and the evaporation boat 100 is basically not damaged.

[0081] Figure 4 The figure shows the sheet resistance change diagram of the coating sample obtained by the wire feeding method according to an embodiment of the present disclosure.

[0082] As shown Figure 4 in the figure Figure 4 is a curve plotted from the measured values of the sheet resistance in the width direction of the coating sample obtained by the wire feeding method of the present disclosure, which represents the sheet resistance uniformity (sheet resistance unit MΩ / □). It can be seen Figure 4 from this that the sheet resistance of the coating sample obtained by the wire feeding method of the present disclosure is very uniform, indicating that the film formation of the coating sample obtained by the wire feeding method of the present disclosure is good in uniformity.

[0083] In some embodiments, the preheating of the evaporation boat 100 may include: placing a metal wire or metal particles in the evaporation boat 100; evacuating the vacuum chamber 300; preheating the evaporation boat 100 with an increasing power, and when the power reaches a first power, stopping the increase of the power; heating the evaporation boat 100 with the first power until all of the metal wire or the metal particles are evaporated, and the preheating ends.

[0084] In some embodiments, the preheating of the evaporation boat 100 with an increasing power may include: forming an increasing power by increasing the voltage; preheating the evaporation boat 100 with the increasing power until the power reaches the first power.

[0085] In some embodiments, the forming of the increasing power by increasing the voltage; preheating the evaporation boat 100 with the increasing power until the power reaches the first power may include: preheating the evaporation boat 100 for the first time with a first voltage, and the duration of the first preheating is a first duration; preheating the evaporation boat 100 for the second time with a second voltage, and the duration of the second preheating is the first duration; preheating the evaporation boat 100 for the third time with a third voltage, and the duration of the third preheating is the first duration; preheating the evaporation boat 100 for the fourth time with a fourth voltage, and the duration of the fourth preheating is a second duration; wherein, the first voltage is less than the second voltage, the second voltage is less than the third voltage, the third voltage is less than the fourth voltage; when the voltage is the fourth voltage, the power reaches the first power.

[0086] In some embodiments, the second duration is the duration for all of the metal wire or the metal particles to be evaporated.

[0087] In some embodiments, when the target material in the evaporation boat 100 is in a molten state and a molten pool is formed, heating the evaporation boat 100 at a second power while feeding wire at a second speed may include: when the target material in the evaporation boat 100 is in a molten state and a molten pool is formed, reducing the first power to the second power by gradually decreasing the voltage, and at the same time increasing the first speed to the second speed by a gradually accelerating manner.

[0088] In some embodiments, reducing the first power to the second power by gradually decreasing the voltage may include: reducing a first preset voltage every third time period until the first power is reduced to the second power; increasing the first speed to the second speed by a gradually accelerating manner may include: increasing a first preset speed every third time period until the first speed is increased to the second speed.

[0089] In some embodiments, the wire feeding method may further include: starting film coating and heating the evaporation boat 100 at the second power, and continuously feeding wire to the evaporation boat 100 at the second speed.

[0090] In some embodiments, after heating the evaporation boat 100 at the second power, it may further include: continuously reducing the second power at a preset reduction rate to maintain the stability of the molten pool.

[0091] In some embodiments, the wire feeding method may further include: disposing a baffle 400 between the evaporation boat 100 and the substrate; when the target material in the evaporation boat 100 is in a molten state and a molten pool is formed, removing the baffle 400 and starting evaporation coating.

[0092] According to a specific embodiment of the present disclosure, on the other hand, a vacuum evaporation coating method is provided, which may include: the wire feeding method as described in any one of the above embodiments.

[0093] Figure 5 The structural schematic diagram of a vacuum evaporation coating device according to an embodiment of the present disclosure is shown. As Figure 5 shown, according to a specific embodiment of the present disclosure, on the other hand, a vacuum evaporation coating device is provided for performing vacuum evaporation coating by the vacuum evaporation coating method as described in any one of the above embodiments.

[0094] In some embodiments, the vacuum evaporation coating device may include: a controller, and the controller is used to control the vacuum evaporation coating device to execute the wire feeding method as described in any one of the above embodiments.

[0095] In some embodiments, the vacuum evaporation coating device may further include: an evaporation boat 100, a wire feeding mechanism 200, a vacuum chamber 300, a baffle 400, a main roller 500, a winding roller 600, and an unwinding roller 700. The evaporation boat 100, the wire feeding mechanism 200, the main roller 500, the winding roller 600, and the unwinding roller 700 are disposed inside the vacuum chamber 300. The baffle 400 is configured to be placed between the main roller 500 and the evaporation boat 100 during formal coating. The main roller 500, the winding roller 600, and the unwinding roller 700 are configured to transport a substrate. The evaporation boat 100 is located directly below the main roller 500. In an alternative embodiment, the vacuum evaporation coating device may further include: a vacuum pumping mechanism 800 configured to pump the vacuum chamber 300; a baffle displacement controller configured to control the movement of the baffle 400; and an evaporation boat heating mechanism configured to heat the evaporation boat 100.

[0096] In some embodiments, the wire feeding mechanism 200, the vacuum pumping mechanism 800, the main roller 500, the winding roller 600, the unwinding roller 700, the baffle displacement controller, and the evaporation boat heating mechanism are all connected to the controller.

[0097] The present disclosure aims to protect a wire feeding method, a vacuum evaporation coating method, and a device. The wire feeding method is applied to vacuum evaporation coating. The wire feeding method may include preheating the evaporation boat 100; heating the evaporation boat 100 at a first power while feeding wire at a first speed. When the target material in the evaporation boat 100 is in a molten state and a molten pool is formed, heating the evaporation boat 100 at a second power while feeding wire at a second speed. The second power is less than the first power, and the second speed is greater than the first speed. The wire feeding method of the present disclosure improves the stability of the molten pool by reducing the power after the target material melts, synchronously increasing the wire feeding speed, and expanding the molten pool. Most target materials require a higher temperature for initial melting and less heat after melting. At the same time, the target material extends into the molten pool, and the molten pool wraps the target material, resulting in better heat conduction effect and enabling the target material to melt steadily. The wire feeding method of the present disclosure can stabilize the liquid target material in the evaporation boat 100, thereby increasing the service life of the evaporation boat 100, and enabling stable and uniform film formation. After the molten pool is formed by the target material fed at the first speed, reducing the heating power of the evaporation boat 100 can also save energy, reduce costs, and improve the quality of the film formation.

[0098] Finally, it should be noted that the various embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. For the same or similar parts among the various embodiments, reference can be made to each other. For the systems or devices disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the description is relatively simple. For the relevant parts, reference can be made to the description in the method section.

[0099] The above embodiments are only used to illustrate the technical solutions of the present disclosure, rather than to limit them; although the present disclosure has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present disclosure.

Claims

1. A wire feeding method, applied to vacuum evaporation coating, characterized in that, Including: Preheating the evaporation boat; Heating the evaporation boat at a first power while feeding wire at a first speed; When the target material in the evaporation boat is in a molten state and a molten pool is formed, heating the evaporation boat at a second power while feeding wire at a second speed; Wherein, the second power is less than the first power, and the second speed is greater than the first speed.

2. The wire feeding method according to claim 1, characterized in that, The preheating of the evaporation boat includes: Placing a metal wire or metal grains in the evaporation boat; Evacuating the vacuum chamber; Preheating the evaporation boat with an increasing power. When the power reaches the first power, stop increasing the power; Heating the evaporation boat at the first power until all of the metal wire or the metal grains are evaporated, and the preheating ends.

3. The wire feeding method according to claim 2, characterized in that The preheating of the evaporation boat with an increasing power includes: Forming an increasing power by increasing the voltage; Preheating the evaporation boat with an increasing power until the power reaches the first power.

4. The wire feeding method according to claim 3, characterized in that The forming of an increasing power by increasing the voltage; preheating the evaporation boat with an increasing power until the power reaches the first power includes: Performing a first preheating of the evaporation boat at a first voltage, and the duration of the first preheating is a first duration; Performing a second preheating of the evaporation boat at a second voltage, and the duration of the second preheating is the first duration; Performing a third preheating of the evaporation boat at a third voltage, and the duration of the third preheating is the first duration; Performing a fourth preheating of the evaporation boat at a fourth voltage, and the duration of the fourth preheating is a second duration; Wherein, the first voltage is less than the second voltage, the second voltage is less than the third voltage, and the third voltage is less than the fourth voltage; when the voltage is the fourth voltage, the power reaches the first power.

5. The wire feeding method according to claim 4, wherein The second duration is the duration for all of the metal wire or the metal grains to be evaporated.

6. The wire feeding method according to claim 1, characterized in that The when the target material in the evaporation boat is in a molten state and a molten pool is formed, heating the evaporation boat at a second power while feeding wire at a second speed includes: When the target material in the evaporation boat is in a molten state and a molten pool is formed, reducing the first power to the second power by gradually reducing the voltage, and at the same time increasing the first speed to the second speed by a gradually accelerating manner.

7. The wire feeding method according to claim 6, wherein The reducing the first power to the second power by gradually reducing the voltage includes: reducing a first preset voltage every third duration until the first power is reduced to the second power; The increasing the first speed to the second speed by a gradually accelerating manner includes: increasing a first preset speed every third duration until the first speed is increased to the second speed.

8. The wire feeding method according to claim 1, wherein The method further includes: Starting coating and heating the evaporation boat at the second power, and continuously feeding wire for the evaporation boat at the second speed.

9. The wire feeding method according to claim 8, characterized in that After heating the evaporation boat at the second power, it further includes: Continuously reduce the second power at a preset reduction rate to maintain the stability of the molten pool.

10. A vacuum evaporation coating device, characterized in that, For vacuum evaporation coating by the wire feeding method according to any one of claims 1-9.

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