Preparation equipment and manufacturing method of curved-surface high-temperature-resistant polymer precursor ceramic thin film sensor

Abstract

The invention relates to the technical field of preparation of thin film sensors, in particular to preparation equipment and a manufacturing method of a curved-surface high-temperature-resistant polymer precursor ceramic thin film sensor. The preparation equipment comprises a workbench and a brushing device capable of moving on the workbench in the X-axis direction, the Y-axis direction and the Z-axis direction; the brushing device comprises an adjustable angle frame and a scraper; the scraper comprises a pen holder and a flexible brush head, the pen holder and the flexible brush head are detachably connected, the angle-adjustable frame and the scraper are arranged in an inclined mode by 0-85 degrees, the V-shaped clamp comprises a V-shaped seat, a pressing rod, a pressing screw and a sliding rod, the V-shaped seat is fixed to the top of the perforated plate, the bottom of the sliding rod is fixed to the V-shaped seat, and the pressing rod is fixed to the top of the perforated plate. The flexible characteristic of the polyimide film is utilized to adapt to brushing of different curved surfaces, the distance between a needle head and the surface does not need to be accurately controlled, the compatibility to materials is high, and it is not needed to know curved surface data in advance and then write a complex program.

Description

Technical Field

[0001] The present invention relates to the technical field of thin film sensor preparation, and specifically to a preparation device and manufacturing method for a curved surface high-temperature resistant polymer precursor ceramic thin film sensor. Background Art

[0002] In high-temperature fields such as aerospace, temperature is an important indicator for monitoring the health status of parts. A curved surface conformal high-temperature resistant thin film temperature sensor can monitor the temperature of curved surface high-temperature components such as turbine blades in real time, which is of great significance for predicting the failure of curved surface high-temperature components.

[0003] Currently, the traditional preparation method of curved surface thin film temperature sensors mainly uses physical vapor deposition or chemical vapor deposition of noble metals such as platinum and platinum-rhodium to prepare thin film thermocouples or thermal resistors. However, the vapor deposition equipment is expensive, and a special flexible template and multiple targets are required to prepare a curved surface conformal thin film temperature sensor.

[0004] To solve the above problems, in the prior art, such as the cylindrical precursor ceramic thin film temperature sensor and its preparation device and method proposed in the patent application number "CN115900986A", a polymer precursor ceramic thin film temperature sensor is prepared through a four-axis inkjet printing platform. However, its equipment cost is high, there are strict requirements for the viscosity of the direct writing raw material, and a precise three-dimensional model of the curved surface needs to be known in advance and a complex program needs to be written.

[0005] Therefore, there is a need to develop a preparation process for polymer precursor ceramic thin film temperature sensors with low equipment cost, high efficiency and simple process. Summary of the Invention

[0006] The purpose of the present invention is to provide a preparation device and manufacturing method for a curved surface high-temperature resistant polymer precursor ceramic thin film sensor to solve the problems raised in the above background art.

[0007] The purpose of the present invention can be achieved through the following technical solutions:

[0008] A preparation device for a curved surface high-temperature resistant polymer precursor ceramic thin film sensor includes a workbench and a brushing device that can move in the X-axis direction, Y-axis direction and Z-axis direction on the workbench. The brushing device includes an adjustable angle bracket and a scraper; the scraper includes a pen rod and a flexible brush head, the pen rod and the flexible brush head are detachably connected, and both the adjustable angle bracket and the scraper are inclined at 0-85°.

[0009] The V-shaped clamp includes a V-shaped seat, a pressure rod, a compression screw and a slide rod. The V-shaped seat is fixed on the top of the porous plate, the bottom of the slide rod is fixed on the V-shaped seat, the pressure rod is used to fix the curved surface alumina substrate a, the pressure rod is sleeved on the slide rod, and the pressure rod is fixed on the slide rod through the compression screw.

[0010] Preferably, the adjustable angle bracket is installed on the Z-axis slider through a first set screw. Set screw holes for cooperating with the first set screw are provided at the four corners of the Z-axis slider. The pen rod is installed on the adjustable angle bracket through a compression screw.

[0011] Preferably, the workbench includes a workbench main body. A power supply, a start switch, and an emergency stop switch are arranged on one side of the workbench main body. A perforated plate is installed on the top of the workbench main body. A Y-axis module and an auxiliary module are respectively arranged on both sides of the perforated plate.

[0012] Preferably, the Y-axis module includes a Y-axis motor, a Y-axis connecting plate, a Y-axis ball screw, a Y-axis limit proximity sensor, a Y-axis bottom plate, a Y-axis positioning ruler, and a Y-axis slider;

[0013] Among them, the Y-axis bottom plate is fixed on the workbench main body and is located on one side of the perforated plate. Y-axis connecting plates are fixedly connected to the tops of both ends of the Y-axis bottom plate. A Y-axis motor is installed on one of the Y-axis connecting plates. The output end of the Y-axis motor is fixedly connected to a Y-axis ball screw. The end of the Y-axis ball screw far from the Y-axis motor is rotatably connected to the other Y-axis connecting plate. A Y-axis slider is threadedly connected to the Y-axis ball screw. A Y-axis limit proximity sensor is installed on the Y-axis bottom plate. A Y-axis positioning ruler is fixedly connected to one side of the Y-axis bottom plate.

[0014] Preferably, the auxiliary module includes an auxiliary connecting plate, an auxiliary guide rod, an auxiliary bottom plate, and an auxiliary slider;

[0015] Among them, the auxiliary bottom plate is fixed on the workbench main body and is located on one side of the perforated plate. Auxiliary connecting plates are fixedly connected to the tops of both ends of the auxiliary bottom plate. An auxiliary guide rod is rotatably connected between the two auxiliary connecting plates. An auxiliary slider is slidably connected to the auxiliary guide rod.

[0016] Preferably, an X-axis module is arranged above the workbench. The X-axis module includes an X-axis motor, an X-axis connecting plate, an X-axis ball screw, an X-axis limit proximity sensor, an X-axis bottom plate, an X-axis positioning ruler, and an X-axis slider;

[0017] Among them, there are two X-axis connecting plates. The two X-axis connecting plates are respectively fixed on the Y-axis slider and the auxiliary slider. An X-axis bottom plate is fixedly connected between the two X-axis connecting plates. An X-axis motor is installed on one of the X-axis connecting plates. The output end of the X-axis motor is fixedly connected to an X-axis ball screw. The end of the X-axis ball screw far from the X-axis motor is rotatably connected to the other X-axis connecting plate. An X-axis slider is threadedly connected to the X-axis ball screw. An X-axis limit proximity sensor is installed on the X-axis bottom plate. An X-axis positioning ruler is installed on one side of the X-axis limit proximity sensor.

[0018] Preferably, a Z-axis module is connected to the X-axis slider. The Z-axis module includes a Z-axis motor, a Z-axis connecting plate, a Z-axis ball screw, a Z-axis limit proximity sensor, a Z-axis bottom plate, a Z-axis positioning ruler, and a Z-axis slider.

[0019] Among them, the Z-axis bottom plate is fixedly connected to the X-axis slider. Z-axis connecting plates are fixedly connected to both the top and bottom of the Z-axis bottom plate. The Z-axis motor is fixedly installed on the Z-axis connecting plate at the top. The output end of the Z-axis motor is fixedly connected to the Z-axis ball screw. The bottom of the Z-axis ball screw is rotatably connected to the Z-axis connecting plate at the bottom. A Z-axis slider is threadedly connected to the Z-axis ball screw. The Z-axis limit proximity sensor is installed on the Z-axis bottom plate. A Z-axis positioning ruler is fixedly connected to one side of the Z-axis bottom plate.

[0020] Preferably, a driver and a motion controller are installed on the workbench main body. The X-axis motor, Y-axis motor, and Z-axis motor are all electrically connected to the driver and the motion controller. The motion controller is used to read and write G-code and control the movement of the X-axis motor, Y-axis motor, and Z-axis motor, so that the brushing device brushes the ceramic film sensitive layer and the ceramic film protective layer b on the curved surface alumina substrate a.

[0021] A manufacturing method for a curved surface high-temperature resistant polymer precursor ceramic film sensor includes the following steps:

[0022] ① Place a single-sided polyimide thin tape with a thickness of 0.01 mm - 0.2 mm, a width of 10 mm - 20 mm, and a length of 10 mm - 20 mm flat on a planar alumina substrate. Use a carbon dioxide laser to scan the designed path. The laser spot size is 0.1 mm - 0.5 mm. Set the scan line width to 0.1 mm - 0.8 mm, the scan speed to 100 - 500 mm / s, and the scan line spacing to 0.1 mm - 0.5 mm. The scan path is determined according to the sensor type and design to obtain a carbonized polyimide pattern in the scanned area.

[0023] ② Fill 10 wt% - 30 wt% of titanium diboride nano powder and 10 wt% - 30 wt% of zirconium diboride nano powder into the liquid polymer precursor ceramics PSN, PSO, PSNB, or PCS, and magnetically stir for more than 1 hour to form a precursor ceramic slurry.

[0024] ③ Use alcohol to clean the curved surface alumina substrate a. After cleaning, place the curved surface alumina substrate a on a V-shaped seat, and use a compression screw to fix the curved surface alumina substrate a through a pressure rod and a sliding rod. The contact angle between the flexible brush head of the brushing device and the curved surface is 0° - 85°.

[0025] ④ Put the scanned polyimide pattern together with the alumina substrate into alcohol for decarbonization to obtain a polyimide tape with a mesh template. Peel it off from the alumina substrate and stick it on the curved surface alumina substrate a.

[0026] ⑤ Move the flexible brush head to the machining origin, set the machining origin as the origin of the machine coordinate system. After resetting the origin of the machine coordinate system, it coincides with the workpiece coordinate system based on when the G-code is generated;

[0027] ⑥ Turn on the power, input the G-code in the motion controller, apply the precursor slurry onto the curved surface with the polyimide template attached, start the brush coating equipment to automatically brush the slurry. The running trajectory fills the template mesh holes with the slurry and scrapes off the excess slurry in the mesh holes. After removing the template, the required pattern remains on the curved surface;

[0028] ⑦ Place the curved surface alumina into a tube furnace and sinter it in an air atmosphere to obtain a curved surface ceramic sensitive film with a thickness of 10μm - 50μm;

[0029] ⑧ Stick a polyimide tape with a width of 3mm and a length of 15mm onto the alumina sheet. Then place one end of the platinum wire on the tape, and drop the PDC solder joint precursor slurry onto the platinum wire on the polyimide tape, making the diameter of the solder joint precursor less than 3mm and the thickness less than 3mm;

[0030] ⑨ Place the alumina sheet together with the platinum wire, tape, and PDC solder joint precursor slurry into the tube furnace using the same heating method as the curved surface film to obtain a ceramic solder joint connected to the platinum wire;

[0031] ⑩ Apply the slurry to the pins of the curved surface ceramic sensitive film, press the flat side of the ceramic solder joint onto the pins coated with the slurry, fix it with tape, and place it in the tube furnace and heat it to 800 - 900 °C to obtain a curved surface high-temperature resistant polymer precursor ceramic film sensor.

[0032] Preferably, in the step ③, the V-shaped seat can be placed in any direction.

[0033] Advantages of the present invention:

[0034] First, the preparation equipment of the curved surface high-temperature resistant polymer precursor ceramic film sensor proposed by the present invention, compared with the traditional sensor manufacturing methods of physical vapor deposition and chemical vapor deposition, overcomes the problems of expensive equipment, complex process, and uneven curved surface film. Compared with the sensor manufacturing method by manual operation which is not applicable to high-precision application scenarios, it improves the stability, efficiency, and success rate of the film quality, and saves time cost.

[0035] Second, the preparation equipment of the curved surface high-temperature resistant polymer precursor ceramic film sensor proposed by the present invention, compared with four-axis direct writing, can adapt to the brush coating of different curved surfaces by utilizing the flexible characteristics of the polyimide film, without the need to precisely control the distance between the needle and the surface, has strong compatibility with materials, and does not require complex programming after knowing the curved surface data in advance.

[0036] III. The manufacturing method of the curved surface high-temperature resistant polymer precursor ceramic thin film sensor proposed by the present invention uses a carbon dioxide laser to process flexible polyimide on a plane as a template to control the thickness of the thin film brushed by the device. During the preparation of the curved surface high-temperature resistant polymer precursor ceramic thin film sensor, polyimide is used as the flexible brush head of the brushing device, and the raw material brushing direction maintains an angle of 0° to 85° with the normal direction of the curved surface, which can ensure the uniformity and controllability of the thin film and overcome the problem of the surface quality of the thin film easily caused by the liquid leading and lagging phenomena in traditional three-axis direct writing devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, for those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings;

[0038] Figure 1 It is a schematic diagram of the preparation device for the curved surface high-temperature resistant polymer precursor ceramic thin film sensor of the present invention;

[0039] Figure 2 It is Figure 1 an enlarged view of part A of

[0040] Figure 3 It is Figure 1 an enlarged view of part B of

[0041] Figure 4 (a) It is a schematic diagram of the preparation device of the present invention starting to brush the thin film on the curved surface of the alumina sphere;

[0042] Figure 4 (b) It is a schematic diagram of the preparation device of the present invention reaching the starting point of brushing the thin film on the curved surface of the alumina sphere;

[0043] Figure 4 (c) It is a schematic diagram of the preparation device of the present invention reaching the end point of brushing the thin film on the curved surface of the alumina sphere;

[0044] Figure 4 (d) It is a schematic diagram of the preparation device of the present invention completing the brushing of the thin film on the curved surface of the alumina sphere;

[0045] Figure 5 (a) It is an optical picture of the preparation device of the present invention completing the brushing of the thin film on the curved surface of the sphere (the mass ratio of the filled powder to the liquid precursor is 2:8);

[0046] Figure 5 (b) It is an optical picture of the preparation device of the present invention completing the brushing of the thin film on the curved surface of the sphere (the mass ratio of the filled powder to the liquid precursor is 1.5:8.5);

[0047] Figure 5 (c) Optical picture of the spherical surface brush-coated film (the mass ratio of the filled powder to the liquid precursor is 1:9) completed by using the preparation equipment of the present invention;

[0048] Figure 6 Schematic diagram of the preparation equipment and manufacturing method of the present invention;

[0049] Figure 7 Schematic diagram of the curved surface high-temperature resistant polymer precursor ceramic film sensor using the preparation equipment and manufacturing method of the present invention with an alumina sphere as the substrate;

[0050] Figure 8 Exploded view of the curved surface high-temperature resistant polymer precursor ceramic film sensor using the preparation equipment and manufacturing method of the present invention with an alumina sphere as the substrate;

[0051] Figure 9 Physical optical picture of the alumina sphere curved surface high-temperature resistant polymer precursor ceramic film sensor prepared in Example 1 of the present invention;

[0052] Figure 10 Test curve of the change of the 6-round resistance with temperature of the alumina sphere curved surface high-temperature resistant polymer precursor ceramic film sensor prepared in Example 1 of the present invention;

[0053] Figure 11 Test curve of the change of the resistance with temperature of the spherical surface high-temperature resistant polymer precursor ceramic film sensor prepared in Example 1 of the present invention;

[0054] Figure 12 Physical optical picture of the alumina cylinder curved surface high-temperature resistant polymer precursor ceramic film sensor prepared in Example 2 of the present invention;

[0055] Figure 13 Test curve of the change of the 6-round resistance with temperature of the alumina cylinder curved surface high-temperature resistant polymer precursor ceramic film sensor prepared in Example 2 of the present invention;

[0056] Figure 14 Test curve of the change of the resistance with temperature of the alumina cylinder curved surface high-temperature resistant polymer precursor ceramic film sensor prepared in Example 2 of the present invention.

[0057] The reference numerals in the figure are as follows:

[0058] 100, workbench; 1, power supply; 2, perforated plate; 3, driver; 4, start switch; 5, emergency stop switch; 6, motion controller;

[0059] 101. Y-axis module; 7. Y-axis motor; 8. Y-axis connecting plate; 9. Y-axis ball screw; 10. Y-axis limit proximity sensor; 11. Y-axis bottom plate; 12. Y-axis positioning ruler; 13. Y-axis slider;

[0060] 102. Auxiliary module; 14. Auxiliary connecting plate; 15. Auxiliary guide rod; 16. Auxiliary bottom plate; 17. Auxiliary slider;

[0061] 103. X-axis module; 18. X-axis motor; 19. X-axis connecting plate; 20. X-axis ball screw; 21. X-axis limit proximity sensor; 22. X-axis bottom plate; 23. X-axis positioning ruler; 24. X-axis slider;

[0062] 104. Z-axis module; 25. Z-axis motor; 26. Z-axis connecting plate; 27. Z-axis ball screw; 28. Z-axis limit proximity sensor; 29. Z-axis bottom plate; 30. Z-axis positioning ruler; 31. Z-axis slider. Detailed implementation mode

[0063] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.

[0064] Combined with the embodiments such as Figures 1-3 , the present invention provides a preparation device for a curved surface high-temperature resistant polymer precursor ceramic film sensor, including a workbench 100, a Y-axis module 101, an auxiliary module 102, an X-axis module 103, a Z-axis module 104, a driver 3, a motion controller 6, a brushing device 105, and a V-shaped gripper 106. The driver 3 and the motion controller 6 are fixed directly in front of the workbench 100;

[0065] The Y-axis module 101 can drive the X-axis module 103, the Z-axis module 104, and the brushing device 105 to move in the Y-axis direction. The X-axis module 103 can drive the Z-axis module 104 and the brushing device 105 to move in the X-axis direction. The Z-axis module 10 can drive the brushing device 105 to move in the Z-axis direction.

[0066] The workbench 100 includes a workbench main body. A power supply 1 is provided on one side of the workbench main body. All the electrical equipment in the device draws power from the power supply 1. The power supply 1 is connected to an external circuit for real-time power supply, start switch 4, and emergency stop switch 5. A perforated plate 2 is installed on the top of the workbench main body. The Y-axis module 101 and the auxiliary module 102 are respectively arranged on both sides of the perforated plate 2;

[0067] Such as Figure 1, the Y-axis module 101 includes a Y-axis motor 7, a Y-axis connecting plate 8, a Y-axis ball screw 9, a Y-axis limit proximity sensor 10, a Y-axis bottom plate 11, a Y-axis positioning scale 12, and a Y-axis slider 13;

[0068] Among them, the Y-axis bottom plate 11 is fixed to the workbench main body and is located on one side of the perforated plate 2. At the top of both ends of the Y-axis bottom plate 11, Y-axis connecting plates 8 are fixedly connected. A Y-axis motor 7 is installed on one of the Y-axis connecting plates 8. The output end of the Y-axis motor 7 is fixedly connected to a Y-axis ball screw 9. The end of the Y-axis ball screw 9 far from the Y-axis motor 7 is rotatably connected to the other Y-axis connecting plate 8. A Y-axis slider 13 is threadedly connected to the Y-axis ball screw 9. A Y-axis limit proximity sensor 10 is installed on the Y-axis bottom plate 11, and a Y-axis positioning scale 12 is fixedly connected to one side of the Y-axis bottom plate 11.

[0069] The Y-axis motor 7 drives the Y-axis ball screw 9 to rotate in different directions to drive the Y-axis slider 13 to move in different directions. The Y-axis limit proximity sensor 10 is a prior art. When the Y-axis limit proximity sensor 10 senses the Y-axis slider 13, it can stop the operation of the Y-axis motor 7 to provide limit protection for the equipment.

[0070] A limit rod is fixedly connected between the two Y-axis connecting plates 8. The limit rod passes through the Y-axis slider 13 to ensure the horizontal movement of the Y-axis slider 13. The Y-axis ball screw 9, the Y-axis positioning scale 12, and the Y-axis bottom plate 11 are parallel to each other. There are scales on the Y-axis positioning scale 12 to facilitate grasping the movement distance of the Y-axis slider 13.

[0071] The auxiliary module 102 includes an auxiliary connecting plate 14, an auxiliary guide rod 15, an auxiliary bottom plate 16, and an auxiliary slider 17;

[0072] Among them, the auxiliary bottom plate 16 is fixed to the workbench main body and is located on one side of the perforated plate 2. At the top of both ends of the auxiliary bottom plate 16, auxiliary connecting plates 14 are fixedly connected. An auxiliary guide rod 15 is rotatably connected between the two auxiliary connecting plates 14. An auxiliary slider 17 is slidably connected to the auxiliary guide rod 15.

[0073] Such as Figure 1 , the auxiliary module 102 and the Y-axis module 101 are arranged in parallel. At least two auxiliary guide rods 15 are provided to ensure the horizontal movement of the auxiliary slider 17. The auxiliary bottom plate 16 and the auxiliary guide rod 15 are parallel to each other.

[0074] Such as Figure 1 , the X-axis module 103 includes an X-axis motor 18, an X-axis connecting plate 19, an X-axis ball screw 20, an X-axis limit proximity sensor 21, an X-axis bottom plate 22, an X-axis positioning scale 23, and an X-axis slider 24;

[0075] Among them, there are two X-axis connecting plates 19. The two X-axis connecting plates 19 are respectively fixed on the Y-axis slider 13 and the auxiliary slider 17, so that the auxiliary slider 17 provides support for the X-axis connecting plate 19 while not affecting the movement of the X-axis connecting plate 19. There is a fixed connection between the two X-axis connecting plates 19 with an X-axis bottom plate 22. An X-axis motor 18 is installed on one of the X-axis connecting plates 19. The output end of the X-axis motor 18 is fixedly connected with an X-axis ball screw 20. The end of the X-axis ball screw 20 far from the X-axis motor 18 is rotatably connected to the other X-axis connecting plate 19. An X-axis slider 24 is threadedly connected to the X-axis ball screw 20. An X-axis limit proximity sensor 21 is installed on the X-axis bottom plate 22, and an X-axis positioning ruler 23 is installed on one side of the X-axis limit proximity sensor 21.

[0076] The X-axis motor 18 drives the X-axis ball screw 20 to rotate in different directions to drive the X-axis slider 24 to move in different directions. The X-axis limit proximity sensor 21 is a prior art. When the X-axis limit proximity sensor 21 senses the X-axis slider 24, it can stop the operation of the X-axis motor 18 to provide limit protection for the equipment.

[0077] There is a fixed connection between the two X-axis connecting plates 19 with a limit rod. The limit rod passes through the X-axis slider 24 to ensure the horizontal movement of the X-axis slider 24. The X-axis ball screw 20, the X-axis positioning ruler 23 and the X-axis bottom plate 22 are arranged in parallel. There are scales on the X-axis positioning ruler 23 to facilitate grasping the movement distance of the Y-axis slider 13.

[0078] Such as Figure 1 , the Z-axis module 104 includes a Z-axis motor 25, a Z-axis connecting plate 26, a Z-axis ball screw 27, a Z-axis limit proximity sensor 28, a Z-axis bottom plate 29, a Z-axis positioning ruler 30, and a Z-axis slider 31.

[0079] Among them, the Z-axis bottom plate 29 is fixedly connected to the X-axis slider 24. Z-axis connecting plates 26 are fixedly connected to both the top and bottom of the Z-axis bottom plate 29. A Z-axis motor 25 is fixedly installed on the Z-axis connecting plate 26 at the top. The output end of the Z-axis motor 25 is fixedly connected with a Z-axis ball screw 27. The bottom of the Z-axis ball screw 27 is rotatably connected to the Z-axis connecting plate 26 at the bottom. A Z-axis slider 31 is threadedly connected to the Z-axis ball screw 27. A Z-axis limit proximity sensor 28 is installed on the Z-axis bottom plate 29, and a Z-axis positioning ruler 30 is fixedly connected to one side of the Z-axis bottom plate 29.

[0080] The Z-axis motor 25 drives the Z-axis ball screw 27 to rotate in different directions to drive the Z-axis slider 31 to move in different directions. The Z-axis limit proximity sensor 28 is a prior art. When the Z-axis limit proximity sensor 28 senses the Z-axis slider 31, it can stop the operation of the Z-axis motor 25 to provide limit protection for the equipment.

[0081] A limiting rod is fixedly connected between two Z-axis connecting plates 26. The limiting rod passes through the Z-axis slider 31 to ensure the vertical movement of the Z-axis slider 31. The Z-axis ball screw 27, the Z-axis positioning ruler 30, and the Z-axis bottom plate 29 are arranged in parallel. There are scales on the Z-axis positioning ruler 30 to facilitate grasping the movement distance of the Z-axis slider 31.

[0082] The X-axis module 103, the Y-axis module 101, and the Z-axis module 104 are perpendicular to each other pairwise. The brushing device 105 is fixed on the Z-axis slider 31. When the Z-axis slider 31 slides on the Z-axis ball screw 27, it drives the brushing device 105 to slide.

[0083] A V-shaped gripper 106 is installed on the porous plate 2. The V-shaped gripper 106 is used to grip and fix the curved alumina substrate a. The X-axis motor 18, the Y-axis motor 7, and the Z-axis motor 25 are electrically connected to the driver 3 and the motion controller 6. The motion controller 6 is used to read and write G-codes and control the movement of the X-axis motor 18, the Y-axis motor 7, and the Z-axis motor 25, so that the brushing device 105 brushes the ceramic film sensitive layer and the ceramic film protective layer b on the curved alumina substrate a. During the curved surface brushing process, the raw material brushing direction of the flexible brush head 37's brush stroke maintains an angle of 0° to 85° with the normal direction of the curved surface.

[0084] The brushing device 105 includes an adjustable angle bracket 33 and a scraper. The adjustable angle bracket 33 is installed on the Z-axis slider 31 through the first set screw 35. Fixing screw holes 32 that cooperate with the first set screw 35 are provided at the four corners of the Z-axis slider 31.

[0085] The scraper includes a pen rod 36 and a flexible brush head 37. The pen rod 36 and the flexible brush head 37 are detachably connected. The connection methods between the pen rod 36 and the flexible brush head 37 include snap connection, threaded connection, bonding, or bolt fixation. The pen rod 36 is installed on the adjustable angle bracket 33 through a compression screw 34.

[0086] In front of the Z-axis slider 31 is the adjustable angle bracket 33, and its angle is set to 0° to 85°. The scraper consists of a pen rod 36 and a flexible brush head 37. The polyimide film (or a brush made of wolf hair, wool, etc.) is used as the flexible brush head 37. The flexible brush head 37 is replaceable. The pen rod 36 is used to connect the flexible brush head 37 and the adjustable angle bracket 33. The Z-axis motor 25 is used to drive the brushing device 105 to slide along the Z-axis ball screw 27.

[0087] The V-shaped gripper 106 includes a V-shaped seat 38, a pressure rod 39, a compression screw 40 and a sliding rod 41. The V-shaped seat 38 is fixed on the top of the perforated plate 2. The bottom of the sliding rod 41 is fixed on the V-shaped seat 38. The pressure rod 39 is used to fix the curved alumina substrate a. The pressure rod 39 is sleeved on the sliding rod 41 and fixed on the sliding rod 41 by the compression screw 40. Loosen the compression screw 40, and the pressure rod 39 can move up and down to fix the curved alumina substrate a with different heights.

[0088] Such as Figure 4 , a manufacturing method of a curved high-temperature resistant polymer precursor ceramic film sensor, includes the following steps:

[0089] Example 1

[0090] ① Place a single-sided polyimide thin tape (PI tape) with a thickness of 0.01 mm - 0.2 mm, a width of 10 mm - 20 mm, and a length of 10 mm - 20 mm flat on a planar alumina substrate. Use a carbon dioxide laser to scan the designed path. The laser spot size is 0.1 mm - 0.5 mm. Set the scan line width to 0.1 mm - 0.8 mm, the scan speed to 100 - 500 mm / s, and the scan line spacing to 0.1 mm - 0.5 mm. The scan path is determined according to the sensor type and design to obtain a carbonized polyimide pattern in the scanned area;

[0091] ② Fill 10 wt% - 30 wt% of titanium diboride nanopowder and 10 wt% - 30 wt% of zirconium diboride nanopowder into the liquid polymer precursor ceramics PSN (liquid precursor polysilazane of polymer precursor ceramic SiCN), PSO (liquid precursor polysiloxane of SiOC), PSNB (liquid precursor polyborosilazane of SiBCN), or PCS (liquid precursor polycarbosilane of SiC), and magnetically stir for more than 1 hour to form a precursor ceramic slurry;

[0092] ③ Use alcohol to clean the curved alumina substrate a. After cleaning, place the curved alumina substrate a on the V-shaped seat 38. Through the compression screw 40, the pressure rod 39 and the sliding rod 41 complete the fixation of the curved alumina substrate a. The contact angle between the flexible brush head 37 of the brushing device 105 and the curve is 45°. The V-shaped seat 38 can be placed in any direction;

[0093] ④ Put the scanned polyimide pattern together with the alumina substrate into alcohol for decarbonization to obtain a polyimide tape with a mesh template. Peel it off from the alumina substrate and stick it on the curved alumina substrate a;

[0094] ⑤ Move the flexible brush head 37 to the machining origin. Set the machining origin as the origin of the machine tool coordinate system. After resetting the origin of the machine tool coordinate system, it coincides with the workpiece coordinate system based on when the G code is generated;

[0095] ⑥ Turn on the power supply 1, input G-code in the motion controller 6, and apply the precursor slurry onto the curved surface with a polyimide template attached (the device for applying the precursor slurry onto the curved surface with a polyimide template attached is a prior art and will not be elaborated here). Start the brushing device to automatically brush the slurry (the brushing process is as Figure 4 a, Figure 4 b, Figure 4 c and Figure 4 d), and the running track fills the template mesh holes with the slurry and scrapes off the excess slurry in the holes. After removing the template, the required pattern remains on the curved surface;

[0096] ⑦ Place the curved surface alumina in a tube furnace and sinter it in an air atmosphere to obtain a curved surface ceramic sensitive film with a thickness of 10 μm to 50 μm;

[0097] ⑧ Stick a polyimide tape with a width of 3 mm and a length of 15 mm onto the alumina sheet. Then place one end of the platinum wire on the tape, and drop the PDC solder joint precursor slurry onto the platinum wire on the polyimide tape, making the diameter of the solder joint precursor less than 3 mm and the thickness less than 3 mm;

[0098] ⑨ Place the alumina sheet together with the platinum wire, tape, and PDC solder joint precursor slurry in the tube furnace using the same heating method as the curved surface film to obtain a ceramic solder joint connected to the platinum wire;

[0099] ⑩ Apply the slurry to the pins of the curved surface ceramic sensitive film, press one side of the ceramic solder joint onto the pins coated with the slurry, fix it with tape, and place it in the tube furnace and heat it to 800 - 900 °C to obtain a curved surface high-temperature resistant polymer precursor ceramic film sensor (as Figure 7 , Figure 8 and Figure 9 ).

[0100] Place the alumina sphere curved surface high-temperature resistant polymer precursor ceramic film sensor prepared in Example 1 (as Figure 9 shown) in a tube furnace for temperature-resistance performance testing. Figure 10 shows the 6-round temperature cycle test of this alumina sphere curved surface high-temperature resistant polymer precursor ceramic film sensor. The test curve of its resistance changing with temperature is almost a straight line, indicating that the sensor has good repeatability. Figure 11 shows the test curves of the resistance and temperature of this sensor changing with time, from which it can be clearly observed that the sensor has a rapid response to temperature changes.

[0101] Example 2

[0102] ① The same as step ① of Example 1;

[0103] ② The same as step ② of Example 1;

[0104] Replace the curved alumina substrate a in Example 1 with an alumina cylinder and operate according to Steps ③-⑦ of Example 1;

[0105] ⑧Same as Step ⑧ of Example 1;

[0106] ⑨Same as Step ⑨ of Example 1;

[0107] ⑩Same as Step ⑩ of Example 1, and a high-temperature resistant polymer precursor ceramic film sensor with a curved surface of an alumina cylinder is obtained (as Figure 12 shown).

[0108] Place the high-temperature resistant polymer precursor ceramic film sensor with a curved surface of an alumina cylinder prepared in this Example 2 (as Figure 12 shown) in a tube furnace for temperature-resistance performance testing. Figure 13 is the 6-round temperature cycle test of the high-temperature resistant polymer precursor ceramic film sensor with a curved surface of an alumina cylinder. The test curve of its resistance changing with temperature is almost a straight line, indicating that the sensor has good repeatability. Figure 14 is the test curve of the resistance and temperature of the sensor changing with time. It can be clearly observed from it that the sensor has a rapid response to temperature changes. Therefore, the high-temperature resistant polymer precursor ceramic film sensor with a curved surface prepared by the method of the present invention has high feasibility and stability, and can effectively meet the sensing requirements in a high-temperature environment.

[0109] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed.

Claims

1. A preparation device for a curved surface high-temperature resistant polymer precursor ceramic film sensor, comprising a workbench (100) and a brushing device (105) that can move along the X-axis direction, Y-axis direction, and Z-axis direction on the workbench (100), characterized in that, The brushing device (105) includes an adjustable angle bracket (33) and a scraper; the scraper includes a pen rod (36) and a flexible brush head (37), the pen rod (36) and the flexible brush head (37) are detachably connected, and both the adjustable angle bracket (33) and the scraper are inclined at 0 to 85°. The V-shaped holder (106) includes a V-shaped seat (38), a pressure rod (39), a compression screw (40) and a slide rod (41). The V-shaped seat (38) is fixed on the top of the perforated plate (2). The bottom of the slide rod (41) is fixed on the V-shaped seat (38). The pressure rod (39) is used to fix the curved alumina substrate a. The pressure rod (39) is sleeved on the slide rod (41) and fixed on the slide rod (41) by the compression screw (40).

2. The preparation device of a curved surface high-temperature resistant polymer precursor ceramic thin film sensor according to claim 1, characterized in that, The adjustable angle bracket (33) is installed on the Z-axis slider (31) through a first set screw (35). Set screw holes (32) for cooperating with the first set screw (35) are provided at the four corners of the Z-axis slider (31). The pen rod (36) is installed on the adjustable angle bracket (33) through a compression screw (34).

3. The preparation equipment of a curved surface high-temperature resistant polymer precursor ceramic thin film sensor according to claim 1, characterized in that, The workbench (100) includes a workbench main body. A power supply (1), a start switch (4) and an emergency stop switch (5) are arranged on one side of the workbench main body. A perforated plate (2) is installed on the top of the workbench main body. A Y-axis module (101) and an auxiliary module (102) are respectively arranged on both sides of the perforated plate (2).

4. The preparation device of a curved surface high-temperature resistant polymer precursor ceramic thin film sensor according to claim 3, characterized in that, The Y-axis module (101) includes a Y-axis motor (7), a Y-axis connecting plate (8), a Y-axis ball screw (9), a Y-axis limit proximity sensor (10), a Y-axis bottom plate (11), a Y-axis positioning ruler (12), and a Y-axis slider (13). Among them, the Y-axis bottom plate (11) is fixed on the workbench main body and is located on one side of the perforated plate (2). Y-axis connecting plates (8) are fixedly connected to the tops of both ends of the Y-axis bottom plate (11). A Y-axis motor (7) is installed on one of the Y-axis connecting plates (8). The output end of the Y-axis motor (7) is fixedly connected to a Y-axis ball screw (9). The end of the Y-axis ball screw (9) far from the Y-axis motor (7) is rotatably connected to the other Y-axis connecting plate (8). A Y-axis slider (13) is threadedly connected to the Y-axis ball screw (9). A Y-axis limit proximity sensor (10) is installed on the Y-axis bottom plate (11). A Y-axis positioning ruler (12) is fixedly connected to one side of the Y-axis bottom plate (11).

5. The preparation device of a curved surface high-temperature resistant polymer precursor ceramic thin film sensor according to claim 4, characterized in that, The auxiliary module (102) includes an auxiliary connecting plate (14), an auxiliary guide rod (15), an auxiliary bottom plate (16) and an auxiliary slider (17). Among them, the auxiliary bottom plate (16) is fixed on the workbench main body and is located on one side of the perforated plate (2). Auxiliary connecting plates (14) are fixedly connected to the tops of both ends of the auxiliary bottom plate (16). An auxiliary guide rod (15) is rotatably connected between the two auxiliary connecting plates (14). An auxiliary slider (17) is slidably connected to the auxiliary guide rod (15).

6. The preparation device of a curved surface high-temperature resistant polymer precursor ceramic thin film sensor according to claim 5, characterized in that, Above the workbench (100), an X-axis module (103) is provided. The X-axis module (103) includes an X-axis motor (18), an X-axis connecting plate (19), an X-axis ball screw (20), an X-axis limit proximity sensor (21), an X-axis bottom plate (22), an X-axis positioning ruler (23), and an X-axis slider (24). Among them, there are two X-axis connecting plates (19). The two X-axis connecting plates (19) are respectively fixed on the Y-axis slider (13) and the auxiliary slider (17). An X-axis bottom plate (22) is fixedly connected between the two X-axis connecting plates (19). An X-axis motor (18) is installed on one of the X-axis connecting plates (19). The output end of the X-axis motor (18) is fixedly connected to an X-axis ball screw (20). The end of the X-axis ball screw (20) far from the X-axis motor (18) is rotatably connected to the other X-axis connecting plate (19). An X-axis slider (24) is threadedly connected to the X-axis ball screw (20). An X-axis limit proximity sensor (21) is installed on the X-axis bottom plate (22), and an X-axis positioning ruler (23) is installed on one side of the X-axis limit proximity sensor (21).

7. The preparation device of a curved surface high-temperature resistant polymer precursor ceramic thin film sensor according to claim 6, characterized in that, The Z-axis module (104) is connected to the X-axis slider (24). The Z-axis module (104) includes a Z-axis motor (25), a Z-axis connecting plate (26), a Z-axis ball screw (27), a Z-axis limit proximity sensor (28), a Z-axis bottom plate (29), a Z-axis positioning ruler (30), and a Z-axis slider (31). Among them, the Z-axis bottom plate (29) is fixedly connected to the X-axis slider (24). Z-axis connecting plates (26) are fixedly connected to both the top and bottom of the Z-axis bottom plate (29). A Z-axis motor (25) is fixedly installed on the Z-axis connecting plate (26) at the top. The output end of the Z-axis motor (25) is fixedly connected to a Z-axis ball screw (27). The bottom of the Z-axis ball screw (27) is rotatably connected to the Z-axis connecting plate (26) at the bottom. A Z-axis slider (31) is threadedly connected to the Z-axis ball screw (27). A Z-axis limit proximity sensor (28) is installed on the Z-axis bottom plate (29), and a Z-axis positioning ruler (30) is fixedly connected to one side of the Z-axis bottom plate (29).

8. The preparation device of a curved surface high-temperature resistant polymer precursor ceramic thin film sensor according to claim 7, characterized in that, A driver (3) and a motion controller (6) are installed on the workbench main body. The X-axis motor (18), the Y-axis motor (7), and the Z-axis motor (25) are all electrically connected to the driver (3) and the motion controller (6). The motion controller (6) is used to read and write G-code and control the movement of the X-axis motor (18), the Y-axis motor (7), and the Z-axis motor (25), so that the brushing device (105) brushes the ceramic film sensitive layer and the ceramic film protective layer b on the curved alumina substrate a.

9. A manufacturing method of a curved surface high-temperature resistant polymer precursor ceramic thin film sensor, using the preparation equipment of the curved surface high-temperature resistant polymer precursor ceramic thin film sensor described in any one of claims 1-8, characterized in that, The manufacturing method includes the following steps: ① Place a single-sided polyimide tape with a thickness of 0.01mm to 0.2mm, a width of 10mm to 20mm, and a length of 10mm to 20mm flat on a flat alumina substrate. Use a carbon dioxide laser to scan the designed path. The laser spot size is 0.1mm to 0.5mm, the scanning line width is set to 0.1mm to 0.8mm, the scanning speed is 100 to 500mm / s, and the scanning line spacing is 0.1mm to 0.5mm. The scanning path is determined according to the sensor type and design to obtain a carbonized polyimide pattern in the scanning area. ② Filling 10wt% to 30wt% of titanium diboride nanopowder and 10wt% to 30wt% of zirconium diboride nanopowder into liquid polymer precursor ceramic PSN, PSO, PSNB or PCS, and magnetically stirring for more than 1 hour to form a precursor ceramic slurry; ③ Clean the curved aluminum oxide substrate a with alcohol, place the curved aluminum oxide substrate a on a V-shaped seat (38) after cleaning, fix the curved aluminum oxide substrate a with a pressure rod (39) and a slide rod (41) by tightening a screw (40), and make the contact angle between the flexible brush head (37) of the brushing device (105) and the curved surface be 0° to 85°; ④ Place the scanned polyimide pattern and the alumina substrate in alcohol for decarbonization to obtain a polyimide tape with a mesh template. Peel it off the alumina substrate and stick it on the curved alumina substrate a. ⑤ Move the flexible brush head (37) to the processing origin, set the processing origin as the origin of the machine coordinate system, and reset the origin of the machine coordinate system to coincide with the workpiece coordinate system based on which the G code is generated; ⑥ Turn on the power supply (1), enter the G code in the motion controller (6), apply the precursor slurry to the curved surface with the polyimide template, start the brushing device to automatically apply the slurry, run the track to fill the template mesh with slurry and scrape off the excess slurry in the mesh, and remove the template to leave the desired pattern on the curved surface; ⑦ Place the curved alumina in a tube furnace and sinter it in an air atmosphere to obtain a curved ceramic sensitive film with a thickness of 10μm to 50μm; ⑧Attach a 3mm wide and 15mm long polyimide tape to the alumina sheet, then place one end of a platinum wire on the tape. Apply PDC solder joint precursor slurry to the platinum wire on the polyimide tape, making the solder joint precursor diameter less than 3mm and thickness less than 3mm. ⑨ Place the alumina sheet together with the platinum wire, tape, and PDC solder joint precursor slurry in a tube furnace and heat it in the same way as the curved film to obtain a ceramic solder joint connected to the platinum wire. The ceramic solder joint part is hemispherical. ⑩ Apply the slurry to the pins of the curved ceramic sensitive film, press the flat side of the ceramic solder joint to the pins coated with the slurry, fix it with tape, place it in a tube furnace and heat it to 800-900℃ to obtain a curved high-temperature resistant polymer precursor ceramic thin film sensor.

10. A method for manufacturing a curved surface high-temperature resistant polymer precursor ceramic thin film sensor according to claim 9, characterized in that, In the step ③, the V-shaped seat (38) can be placed in any direction.

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