Liquid opening distance adjusting device and method

Abstract

The invention provides a liquid opening distance adjusting device and method. The liquid opening distance adjusting device comprises a crucible, a projection assembly, a transmission assembly and an image acquisition assembly. A flow guide cylinder of the projection assembly faces the liquid level, and hollowed-out structures at different positions are arranged on the variable-diameter ring. The image acquisition assembly acquires the variable-diameter ring and a projection image of the variable-diameter ring on the liquid level, controls the transmission assembly to adjust the distance between the liquid level and the variable-diameter ring, and detects control parameters of the transmission assembly in different overlapping states to construct an adjustment relational expression which reflects the corresponding relation between the control parameters and the distance. And inputting the target distance into the relational expression to obtain a target control parameter, and driving the transmission assembly to realize accurate adjustment. Compared with the defects that the imaging method depends on the pixel proportion to estimate the distance and the precision is easily influenced by the jitter of the liquid level of the molten silicon, the adjustment model is constructed on the basis of the projection overlapping state of the hollow structure, so that the interference of liquid level fluctuation is effectively overcome, the measurement and adjustment precision of the liquid opening distance is greatly improved, and the high-precision process requirement is met.

Description

Technical Field

[0001] The present invention relates to the technical field of Czochralski crystal growth, and mainly relates to a liquid port distance adjusting device and an adjusting method. Background Art

[0002] In the production of Czochralski single crystal, the liquid port distance is a key parameter that determines the quality and growth stability of the crystal rod. Its slight fluctuation can cause the crystal rod to twist and deform or the growth to interrupt.

[0003] In the related art, the CCD (Charge-Coupled Device Camera) imaging method is commonly used to detect and adjust the liquid port distance. This method collects the liquid surface image containing the projection of the variable diameter ring through a camera, and analyzes the pixel ratio to estimate the distance.

[0004] However, since the molten silicon liquid surface is prone to jitter during the crystal pulling process, disturbing the judgment of the liquid surface area based on the pixel ratio, resulting in insufficient measurement accuracy of the liquid port distance and making it difficult to meet the accuracy requirements for measuring and adjusting the liquid port distance. Summary of the Invention

[0005] Aiming at the problems in the background art, the present invention provides a liquid port distance adjusting device and an adjusting method to solve the problem of poor measurement and adjustment accuracy of the liquid port distance in the related art.

[0006] To solve the above problems, the present invention is implemented as follows:

[0007] In a first aspect, an embodiment of the present invention provides a liquid port distance adjusting device, including: a crucible containing liquid, a projection assembly, a transmission assembly for controlling the lifting of the crucible, and an image acquisition assembly facing the liquid surface of the liquid and used for collecting images;

[0008] The projection assembly includes a flow guide tube and a variable diameter ring. The flow guide tube faces the liquid surface, the variable diameter ring is coaxially arranged with the flow guide tube, and the variable diameter ring is connected to the side of the flow guide tube close to the liquid surface;

[0009] At least two hollow structures at different positions are provided on the variable diameter ring;

[0010] The image includes: the variable diameter ring and the projection of the variable diameter ring formed on the liquid surface;

[0011] The image acquisition assembly is used to control the transmission assembly to adjust the distance between the liquid surface and the variable diameter ring, respectively detect the control parameters of the transmission assembly when the variable diameter ring and the projection in the image are in different overlapping states, and construct an adjustment relational expression according to the control parameters;

[0012] The adjustment relational expression is used to reflect the corresponding relationship between the control parameters and the distance;

[0013] The image acquisition component is further configured to input the value of the target spacing into the adjustment relationship formula to obtain the target control parameter output by the adjustment relationship formula, and control the transmission component through the target control parameter to adjust the variable diameter ring and the liquid level to reach the target spacing.

[0014] Optionally, the image acquisition component is further configured to:

[0015] When the variable diameter ring and the projection are in the first overlapping state, record the first control parameter of the transmission component and the first spacing between the liquid level and the variable diameter ring;

[0016] When the variable diameter ring and the projection are in the second overlapping state, record the second control parameter of the transmission component and the second spacing between the liquid level and the variable diameter ring;

[0017] Construct the adjustment relationship formula according to the first control parameter, the first spacing, the second control parameter, and the second spacing.

[0018] Optionally, the adjustment relationship formula is |a1 - a2| = |h1 - h2|;

[0019] Wherein, a1 is the first control parameter, a2 is the second control parameter, h1 is the first spacing, and h2 is the second spacing.

[0020] Optionally, the hollow structure includes: a first hollow structure and a second hollow structure;

[0021] The first overlapping state is the state when the projection of the first hollow structure coincides with the inner diameter of the variable diameter ring in the line-of-sight direction of the image acquisition component;

[0022] The second overlapping state is the state when the projection of the second hollow structure coincides with the inner diameter of the variable diameter ring in the line-of-sight direction of the image acquisition component.

[0023] Optionally, the distance between the first hollow structure and the inner diameter of the variable diameter ring is r1; the distance between the second hollow structure and the inner diameter of the variable diameter ring is r2; r1 = 2r2

[0024] The image acquisition component is further configured to calculate the ratio of h1 and h2 according to the ratio of r1 and r2, and substitute the ratio of h1 and h2 into the adjustment relationship formula to calculate the values of h1 and h2.

[0025] Optionally, when the crucible is in the second overlapping state, the image acquisition component is further configured to input the target spacing into the adjustment relationship formula to obtain the target control parameter.

[0026] Optionally, the image acquisition component is further configured to replace h1 in the adjustment relation |a1 - a2| = |h1 - h2| with h3 and replace a1 with a3, obtaining a replaced adjustment relation: |a3 - a2| = |h3 - h2|;

[0027] Wherein, h3 is the target spacing, and a3 is the target control parameter;

[0028] Calculate the second adjustment relation to obtain the target control parameter a3.

[0029] Optionally, the liquid orifice distance adjustment device further includes a heat preservation barrel and a heater;

[0030] The heat preservation barrel is arranged around the crucible for heat preservation of the crucible; a protrusion extending radially along the heat preservation barrel and away from the axis direction of the heat preservation barrel is arranged on one side of the draft tube away from the liquid surface, the radius of the protrusion is greater than the radius of the heat preservation barrel, and the protrusion is connected to one side of the heat preservation barrel away from the liquid surface to suspend the draft tube above the liquid surface;

[0031] The heater is arranged between the crucible and the heat preservation barrel for heating the crucible.

[0032] Optionally, the liquid orifice distance adjustment device further includes a furnace cover and a furnace body;

[0033] The heat preservation barrel, the draft tube and the heater are all arranged in the furnace body;

[0034] The furnace cover is connected to the furnace body, and an observation port is opened on the furnace cover, and the observation port is used for the image acquisition component to acquire the image through the observation port.

[0035] In a second aspect, an embodiment of the present application provides a method for adjusting the liquid orifice distance, which is applied to the liquid orifice distance adjustment device described in any one of the above, and includes the following steps:

[0036] Acquire an image, where the image includes a variable diameter ring and a projection formed by the variable diameter ring on the liquid surface;

[0037] Control the transmission component to adjust the height of the crucible, detect the control parameter of the transmission component when the variable diameter ring and the projection in the image are in different overlapping states, and construct an adjustment relation according to the control parameter;

[0038] Input the target height of the variable diameter ring and the liquid surface into the adjustment relation to obtain the target control parameter output by the adjustment relation, and adjust the transmission component to the target control parameter to adjust the variable diameter ring and the liquid surface to reach the target spacing.

[0039] The liquid orifice distance adjustment device provided by the embodiment of the present invention sets at least two hollow structures at different positions on the variable diameter ring, uses the image acquisition component to acquire an image including the variable diameter ring and its projection formed on the liquid surface, controls the transmission component to adjust the distance between the liquid surface and the variable diameter ring, detects the control parameters when the variable diameter ring and the projection are in different overlapping states, and constructs an adjustment relationship formula, so that the corresponding relationship between the control parameters and the distance can be accurately reflected based on the change of the overlapping state between the variable diameter ring and the projection. Compared with the problem in the related art that the distance is estimated based on the pixel ratio and is easily affected by the liquid surface jitter, the projection overlapping state used in this application has characteristic changes based on the geometric relationship between the structure of the variable diameter ring itself and the projection. Even if the liquid surface jitters, the relative geometric characteristics of the variable diameter ring and the projection are still stably measurable, effectively reducing the interference of the liquid surface jitter on the measurement accuracy, improving the accuracy and stability of the liquid orifice distance adjustment, and being able to more accurately control the target distance between the variable diameter ring and the liquid surface, thereby ensuring the quality of the crystal bar and the stability of the growth process in the Czochralski single crystal production, and avoiding problems such as crystal bar distortion or growth interruption caused by the fluctuation of the liquid orifice distance. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the related art, the following will briefly introduce the drawings required for use in the description of the embodiments or the related art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0041] Figure 1 Schematic diagram of a liquid orifice distance adjustment device in this application.

[0042] Figure 2 Exploded view of a liquid orifice distance adjustment device in this application.

[0043] Figure 3 Schematic diagram of the variable diameter ring in this application.

[0044] Figure 4 Schematic diagram of the variable diameter ring and its projection in the first overlapping state in this application.

[0045] Figure 5 Schematic diagram of the variable diameter ring and its projection in the second overlapping state in this application.

[0046] Figure 6 Schematic diagram of a liquid orifice distance adjustment method in this application.

[0047] Explanation of the reference numerals:

[0048] 100, crucible; 200, projection component; 300, transmission component; 400, image acquisition component; 210, diversion cylinder; 220, reducing ring; 221, hollow structure; 2211, first hollow structure; 2212, second hollow structure; 500, heat preservation barrel; 600, heater; 211, protrusion; 700, furnace cover; 800, furnace body; 710, observation port. Detailed implementation manners

[0049] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and in no way constitutes a limitation on the present invention and its application or use. Based on the embodiments of the present invention, any product obtained by anyone under the inspiration of the present invention or by combining the features of the present invention with other related technologies that is the same as or similar to the present invention falls within the protection scope of the present invention. Also, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0050] Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and devices should be regarded as part of the specification of the present invention.

[0051] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0052] In the first aspect, as Figure 1 , Figure 2 and Figure 3As shown in the figure, an embodiment of the present invention provides a liquid port distance adjustment device, including: a crucible 100 containing liquid, a projection assembly 200, a transmission assembly 300 for controlling the lifting of the crucible 100, and an image acquisition assembly 400 facing the liquid surface of the liquid and used for acquiring images; the projection assembly 200 includes a diversion cylinder 210 and a variable diameter ring 220. The diversion cylinder 210 faces the liquid surface, the variable diameter ring 220 is coaxially arranged with the diversion cylinder 210, and the variable diameter ring 220 is connected to the side of the diversion cylinder 210 close to the liquid surface; at least two hollow structures 221 at different positions are arranged on the variable diameter ring 220; the image includes: the variable diameter ring 220 and the projection of the variable diameter ring 220 formed on the liquid surface; the image acquisition assembly 400 is used to control the transmission assembly 300 to adjust the distance between the liquid surface and the variable diameter ring 220, so as to respectively detect the control parameters of the transmission assembly 300 when the variable diameter ring 220 and the projection in the image are in different overlapping states, and construct an adjustment relationship formula according to the control parameters; the adjustment relationship formula is used to reflect the corresponding relationship between the control parameters and the distance; the image acquisition assembly 400 is also used to input the value of the target distance into the adjustment relationship formula to obtain the target control parameter output by the adjustment relationship formula, and control the transmission assembly 300 through the target control parameter to adjust the variable diameter ring 220 and the liquid surface to reach the target distance.

[0053] Specifically, the liquid port distance adjustment device includes a crucible 100, a projection assembly 200, a transmission assembly 300, and an image acquisition assembly 400. The crucible 100 contains liquid for crystal pulling, and this liquid can be molten silicon, which provides a light source inside the liquid port distance adjustment device while ensuring that the crystal pulling conditions are met. The projection assembly 200 includes a diversion cylinder 210 and a variable diameter ring 220. The variable diameter ring 220 is coaxially arranged with the diversion cylinder 210. The diversion cylinder 210 faces the liquid surface in the crucible 100, and the variable diameter ring 220 is connected to the side of the diversion cylinder 210 close to the liquid surface. At least two hollow structures 221 at different positions and with unequal distances from the variable diameter ring 220 are arranged on the variable diameter ring 220. The transmission assembly 300 is used to control the lifting of the crucible 100 to adjust the distance between the liquid surface in the crucible 100 and the variable diameter ring 220. The transmission assembly 300 can be an integrated transmission device integrating a motor, a lead screw, and a push rod, or a transmission device in which the motor drives the gear to rotate, and the gear meshes with the rack fixed on the bracket of the crucible 100 to convert the rotational motion into a linear motion. The embodiments of the present application do not limit it, and the specific implementation manner of the transmission assembly 300 can refer to related technologies.

[0054] The image acquisition component 400 is used to acquire an image, which includes the variable diameter ring 220 and the projection of the variable diameter ring 220 on the liquid surface in the crucible 100; it is also used to control the drive component 300 to adjust the distance between the liquid surface and the variable diameter ring 220, so as to detect the control parameters of the drive component 300 when the variable diameter ring 220 and the projection in the image are in different overlapping states respectively. The control parameters are used for the drive component 300 to adjust the height of the crucible 100, and an adjustment relationship formula for reflecting the corresponding relationship between the control parameters and the distance is constructed according to the detected control parameters. The image acquisition component 400 is also used to input the value of the target distance into the adjustment relationship formula, obtain the target control parameter output by the adjustment relationship formula, and control the drive component 300 to be adjusted to the target control parameter, so as to adjust the variable diameter ring 220 and the liquid surface to reach the target distance.

[0055] The image acquisition component 400 is used to acquire an image including the variable diameter ring 220 and its projection on the liquid surface of the crucible 100; it is also used to control and adjust the distance between the liquid surface and the variable diameter ring 220, control the drive component 300 to adjust the relative position of the liquid surface and the variable diameter ring 220, and respectively record the control parameters of the drive component 300 when the variable diameter ring 220 and the projection are in different overlapping states. The control parameters are used to adjust the height of the crucible 100. According to the recorded multiple groups of control parameters and their corresponding actual distances, an adjustment relationship formula between the control parameters and the liquid port distance is constructed. Substitute the target liquid port distance into the adjustment relationship formula to obtain the corresponding target control parameter, and drive the drive component 300 to adjust the liquid port distance to the target value.

[0056] Optionally, the image acquisition component 400 may include an image acquisition device and a controller. Among them, the image acquisition device may be an image acquisition device such as a CCD camera, which is used to acquire an image; the controller is used to control the drive component 300 to adjust the distance between the liquid surface and the variable diameter ring 220, detect the control parameters of the drive component 300 when the variable diameter ring 220 and the projection in the image acquired by the image acquisition device are in different overlapping states, construct an adjustment relationship formula according to the control parameters, the adjustment relationship formula is used to reflect the corresponding relationship between the control parameters and the distance, input the value of the target distance into the adjustment relationship formula, obtain the target control parameter output by the adjustment relationship formula, and control the drive component 300 through the target control parameter to adjust the variable diameter ring 220 and the liquid surface to reach the target distance.

[0057] Understandably, for the liquid port distance adjustment device provided by the embodiments of the present invention, by providing at least two hollow structures 221 at different positions on the diameter-changing ring 220, using the image acquisition component 400 to collect in real time an image including the diameter-changing ring 220 and its liquid surface projection, and combining the precise control of the crucible 100 lifting by the transmission component 300, it is possible to directly obtain the control parameters of the transmission component 300 based on the different overlapping state characteristics of the diameter-changing ring 220 and the projection, and construct an adjustment relationship formula reflecting the corresponding relationship between the control parameters and the distance between the liquid surface and the diameter-changing ring 220 (hereinafter referred to as the liquid port distance). This design changes the traditional method of estimating the distance based on the pixel ratio, and instead realizes the quantitative detection and adjustment of the liquid port distance through the qualitative characteristic change of the projection overlapping state, effectively avoiding the interference of the molten silicon liquid surface jitter on the area judgment, significantly improving the accuracy of the liquid port distance measurement and adjustment, ensuring that the distance between the diameter-changing ring 220 and the liquid surface can be precisely controlled according to the target value through the adjustment relationship formula, thus providing a key guarantee for the stability of the crystal bar quality in the Czochralski single crystal production, and avoiding the crystal bar defects or growth interruption problems caused by the liquid port distance fluctuation.

[0058] Optionally, the image acquisition component 400 is further configured to: when the diameter-changing ring 220 and the projection are in the first overlapping state, record the first control parameter of the transmission component 300, and at this time, the distance between the liquid surface and the diameter-changing ring 220 is the first distance; when the diameter-changing ring 220 and the projection are in the second overlapping state, record the second control parameter of the transmission component 300, and at this time, the distance between the liquid surface and the diameter-changing ring 220 is the second distance; construct an adjustment relationship formula according to the first control parameter, the first distance, the second control parameter, and the second distance.

[0059] The image acquisition component 400 is further configured to obtain the control parameters and distances of the transmission component 300 when the diameter-changing ring 220 and the projection are in different overlapping states. Specifically, when the diameter-changing ring 220 and its projection are in the first overlapping state, record the first control parameter of the transmission component 300, and at this time, the distance between the liquid surface and the diameter-changing ring 220 is the first distance; when the diameter-changing ring 220 and its projection are in the second overlapping state, record the second control parameter of the transmission component 300, and at this time, the distance between the liquid surface and the diameter-changing ring 220 is the second distance. Construct an adjustment relationship formula according to the first control parameter, the first distance, the second control parameter, and the second distance. It can be understood that at this time, the first control parameter and the second control parameter are known values that can be detected by the image acquisition component 400, and the first distance and the second distance are unknown values.

[0060] Understandably, by recording the control parameters of the variable-diameter ring 220 in the first overlapping state and the second overlapping state and constructing an adjustment relationship formula based on the two sets of data. Compared with the fuzzy estimation of a single reference point, this method establishes a direct correspondence between the control parameter and the spacing through two clear projection overlapping features (such as the coincidence state of the projection of different hollow structures 221 and the inner diameter of the variable-diameter ring 220), which can effectively eliminate the influence of interference factors such as liquid surface jitter and light change on a single measurement, making the adjustment relationship formula more mathematically rigorous and adaptable to working conditions. The relationship formula constructed through two sets of measured data can directly reflect the linear change law between the control amount of the transmission component 300 and the liquid port distance, ensuring that when adjusting the target distance, accurate derivation can be achieved based on historical calibration data, avoiding the cumulative error caused by a single data deviation in the traditional method, thus significantly improving the dynamic response accuracy and system stability of the liquid port distance adjustment.

[0061] Optionally, the adjustment relationship formula is |a1 - a2| = |h1 - h2|; where a1 is the first control parameter, a2 is the second control parameter, h1 is the first spacing, and h2 is the second spacing.

[0062] Specifically, during a single crystal pulling process, the transmission component 300 changes the liquid surface height by controlling the lifting of the crucible 100, thereby changing the distance between the liquid surface and the variable-diameter ring 220 (i.e., the liquid port distance). When the variable-diameter ring 220 and its projection are in different overlapping states, the control parameters of the transmission component 300 correspond to different heights of the crucible 100. At this time, the liquid surface height also changes accordingly, resulting in different liquid port distances. Since the change amount of the control parameter has a direct linear correspondence with the actual displacement of the crucible 100 lifting (i.e., the change amount of the liquid port distance), the difference between the control parameters of the transmission component 300 in different overlapping states is equal to the difference between the liquid port distances in the corresponding states. Therefore, when a1 is the first control parameter, a2 is the second control parameter, h1 is the first spacing, and h2 is the second spacing, the adjustment relationship formula between the control parameter of the transmission component 300 and the spacing between the liquid surface and the variable-diameter ring 220 can be constructed as |a1 - a2| = |h1 - h2|.

[0063] Understandably, by establishing an equal relationship between the difference in control parameters and the absolute value of the difference in the liquid orifice distance, and by capturing the control parameters (a1, a2) and their corresponding spacings (h1, h2) of the variable diameter ring 220 in two overlapping states, the complex spatial distance measurement is transformed into the difference operation of control parameters, avoiding the dependence on absolute position and the interference of single measurement error in the traditional method. Since the control parameters of the transmission component 300 are linearly mapped to the lifting displacement of the crucible 100, the difference directly reflects the change in the liquid level height, and the absolute value form is compatible with the two-way adjustment requirements in the lifting direction, ensuring the universality of the relational expression under different working conditions. It avoids the influence of non-linear error or environmental interference on the calculation result, provides efficient and reliable mathematical support for the real-time dynamic control of the liquid orifice distance, and is especially suitable for the Czochralski single crystal growth process with extremely high precision requirements, ensuring the stability of the crystal rod quality in principle.

[0064] Optionally, as Figure 3 shown, the hollow structure 221 includes: a first hollow structure 2211 and a second hollow structure 2212; the first overlapping state is the state when the projection of the first hollow structure 2211 coincides with the inner diameter of the variable diameter ring 220 in the line-of-sight direction of the image acquisition component 400; the second overlapping state is the state when the projection of the second hollow structure 2212 coincides with the inner diameter of the variable diameter ring 220 in the line-of-sight direction of the image acquisition component 400.

[0065] Specifically, the hollow structure 221 of the variable diameter ring 220 can be set as the first hollow structure 2211 and the second hollow structure 2212 evenly distributed along the circumferential direction, which are located at different radius positions on the inner side wall of the variable diameter ring 220 respectively. For example, the distance between the first annular groove and the inner diameter of the variable diameter ring 220 is r1, and the distance of the second annular groove is r2 (r1 < r2). When the image acquisition component 400 acquires an image, the variable diameter ring 220 and its projection form a symmetric annular contour on the liquid surface. When the liquid level height in the crucible 100 changes and the distance between the liquid surface and the variable diameter ring 220 is h1, the outer edge of the projection of the first hollow structure 2211 exactly coincides with the actual edge of the inner diameter of the variable diameter ring 220 in the image (i.e., the first overlapping state). When the distance between the liquid surface and the variable diameter ring 220 is further adjusted to h2, the outer edge of the projection of the second hollow structure 2212 coincides with the inner diameter edge of the variable diameter ring 220 in the image (the second overlapping state). The image acquisition component 400 records the control parameters of the transmission component 300 and the distance between the liquid surface and the variable diameter ring 220 in the first overlapping state and the second overlapping state respectively and constructs an adjustment relational expression.

[0066] Understandably, by providing the first hollow structure 2211 and the second hollow structure 2212 on the variable diameter ring 220, and taking the coincidence state of their projections with the inner diameter of the variable diameter ring 220 in the line-of-sight direction as the first overlapping state and the second overlapping state, the accuracy and reliability of the liquid port distance adjustment are significantly improved: using the clear geometric feature that the projection of the hollow structure 221 coincides with the inner diameter edge as the detection reference, compared with the traditional fuzzy judgment based on pixel ratio or gray-scale analysis, the key nodes of the liquid port distance change can be accurately captured by the image acquisition component 400, effectively avoiding the interference of liquid surface jitter on the measurement; the two hollow structures 221 in different positions form double calibration points, providing two independent and repeatable physical reference points for constructing the control parameters and the adjustment relationship formula of the distance between the liquid surface and the variable diameter ring 220. Based on the linear correspondence established by the two points, single data deviation can be excluded and the system error can be reduced, making the adjustment process more mathematically rigorous; in addition, the image feature of edge coincidence is easy to be quickly recognized by mature edge detection algorithms, simplifying the image analysis process and improving the real-time control efficiency, especially suitable for the single-crystal silicon growth environment with high temperature and high disturbance, ensuring the accuracy and stability of the liquid port distance adjustment in principle.

[0067] Optionally, as Figure 4 and Figure 5 shown, the inner diameter distance between the first hollow structure 2211 and the variable diameter ring 220 is r1; the inner diameter distance between the second hollow structure 2212 and the variable diameter ring 220 is r2; r1 = 2r2; the image acquisition component 400 is also used to calculate the ratio of h1 and h2 according to the ratio of r1 and r2, and substitute the ratio of h1 and h2 into the adjustment relationship formula to calculate the values of h1 and h2.

[0068] Specifically, the first hollow structure 2211 and the second hollow structure 2212 are evenly distributed along the circumferential direction of the variable diameter ring 220 and are respectively located at different radius positions on the inner side wall of the variable diameter ring 220. The inner diameter distance r2 between the first hollow structure 2211 and the variable diameter ring 220 is twice the inner diameter distance r1 between the first hollow structure 2211 and the variable diameter ring 220.

[0069] Understandably, as Figure 3 and Figure 4 shown, since the variable diameter ring 220 and its projection are symmetrically distributed on the liquid surface, when the variable diameter ring 220 and its projection are in the first overlapping state, the distances from both of them to the liquid surface are h1. Therefore, the vertical total distance from the variable diameter ring 220 to the projection is 2h1. When the image acquisition component 400 takes a picture in the line-of-sight direction with an angle θ with the normal line of the liquid surface, the radial distance r1 from the first hollow structure 2211 to the inner diameter of the variable diameter ring 220, the total distance 2h1, and the line-of-sight direction form a right triangle. According to the trigonometric function relationship Similarly, when the variable diameter ring 220 and its projection are in the second overlapping state, Since the distance from the image acquisition component 400 to the reducing ring 220 is greater than a preset value compared to the distance from the reducing ring 220 to the liquid surface, the change in the viewing angle θ during the two detections can be ignored. Therefore, it can be deduced that That is

[0070] Furthermore, the ratio of the radial distances of the hollow structure 221 is equal to the ratio of the corresponding distances between the liquid surface and the reducing ring 220, providing a geometric optical basis for constructing the adjustment relationship: when the preset r1 = 2r2, it can be directly deduced that h1 = 2h2. Substituting this ratio into the adjustment relationship, the values of the distances h1 and h2 between the liquid surface and the reducing ring 220 in the first overlapping state or the second overlapping state can be obtained. This enables a clear quantitative relationship to be formed for the liquid port distances in different overlapping states. Combining the linear mapping characteristics between the control parameters of the transmission component 300 and the liquid port distance, precise adjustment of the liquid port distance can be achieved through simple proportional operations, effectively reducing the influence of angular deviation on the measurement accuracy and providing a theoretical support for high-precision crystal growth control.

[0071] Optionally, the image acquisition component 400 is further configured to input a target distance into the adjustment relationship to obtain a target control parameter when the crucible 100 is in the second overlapping state.

[0072] Specifically, when the crucible 100 is in the second overlapping state, the control parameter of the transmission component 300 is a2, and the distance between the liquid surface and the reducing ring 220 is h2. At this time, the target distance between the reducing ring 220 and the liquid surface is input into the adjustment relationship to obtain the control parameter of the transmission component 300, that is, the target control parameter, when the distance between the reducing ring 220 and the liquid surface is the target distance.

[0073] It can be understood that the image acquisition component 400 selects to input the target distance and calculate the target control parameter when the crucible 100 is in the second overlapping state. Using the second overlapping state as the adjustment reference point, a known reference coordinate is constructed using the recorded control parameter a2 and the corresponding liquid port distance h2 in this state. Combining the adjustment relationship, the adjustment of the target distance can be transformed into a difference operation based on known points, avoiding the cumbersome process of re-calibrating from the initial state and significantly improving the adjustment efficiency; this design eliminates the cumulative error of multiple measurements by fixing the reference point. The projection coincidence feature of the second overlapping state has high repeatability, ensuring the stability and reliability of the reference values of h2 and a2, and enabling the calculation of the target control parameter to depend only on the difference between h3 and h2, rather than absolute position measurement, effectively reducing the influence of liquid surface jitter or equipment thermal drift on the adjustment accuracy.

[0074] Optionally, the image acquisition component 400 is further configured to replace h1 in the adjustment relation |a1 - a2| = |h1 - h2| with h3 and replace a1 with a3, obtaining a replaced adjustment relation: |a3 - a2| = |h3 - h2|; where h3 is the target distance and a3 is the target control parameter; calculate the second adjustment relation to obtain the target control parameter a3.

[0075] Specifically, when the crucible 100 is in the second overlapping state, replace h1 in the adjustment relation |a1 - a2| = |h1 - h2| with h3 and replace a1 with a3, obtaining a replaced adjustment relation: |a3 - a2| = |h3 - h2|. Among them, a2 and h2 in the replaced adjustment relation are known values that can be obtained by the image acquisition component 400 after the first overlapping state and the second overlapping state, and h3 is also a known value as the target distance. Therefore, the image acquisition component 400 can calculate the target control parameter a3 through the replaced adjustment relation |a3 - a2| = |h3 - h2|.

[0076] Optionally, since the replaced adjustment relation |a3 - a2| = |h3 - h2| is an absolute value calculation, there may be two values for the calculated target control parameter a3. The image acquisition component 400 is further configured to, when the control parameter of the transmission component 300 is positively correlated with the liquid port distance (such as when the control parameter increases corresponding to the crucible 100 descending), take the solution with the same sign as (h3 - h2); when the control parameter of the transmission component 300 is negatively correlated with the liquid port distance, take the solution with the opposite sign. If the system cannot automatically determine the effective solution direction, the image acquisition component 400 will output two candidate values of the target control parameter a3, and the operator selects according to the process experience in the crystal pulling stage.

[0077] It can be understood that by replacing h1 in the adjustment relation |a1 - a2| = |h1 - h2| with h3 and a1 with a3, a new relation |a3 - a2| = |h3 - h2| is formed, directly reusing the calibrated reference parameters (a2, h2), converting the calculation of the target distance h3 into a linear interpolation operation based on known points, avoiding the cumbersome process of repeatedly measuring multiple reference points in the traditional method, and significantly improving the adjustment efficiency; this design converts complex distance measurement into simple algebraic operations of control parameters, and uses the symmetry of the absolute value equation to ensure that regardless of whether the target distance is greater than or less than the current distance, the target control parameter can be quickly deduced through the same relation, realizing two-way precise adjustment; since a2 and h2 are verified and reliable reference values, the replaced adjustment relation effectively avoids the cumulative error of multiple measurements, making the adjustment accuracy only depend on the setting error of the single target distance, rather than relying on the absolute accuracy of multiple measurement points, and is particularly suitable for the single-crystal silicon growth scenario that is easily disturbed in high-temperature environments.

[0078] Optionally, such asFigure 1 and Figure 2 As shown in Figure 2 , the liquid level distance adjustment device further includes a heat preservation barrel 500 and a heater 600; the heat preservation barrel 500 is arranged on the periphery of the crucible 100 for heat preservation of the crucible 100; a convex part 211 extending radially along the guide cylinder 210 and away from the axis direction of the guide cylinder 210 is arranged on the side of the guide cylinder 210 away from the liquid level, and the radius of the convex part 211 is greater than the radius of the heat preservation barrel 500, and the convex part 211 is connected to the side of the heat preservation barrel 500 away from the liquid level to suspend the guide cylinder 210 above the liquid level; the heater 600 is arranged between the crucible 100 and the heat preservation barrel 500 for heating the crucible 100.

[0079] Specifically, the liquid level distance adjustment device further includes a heat preservation barrel 500 and a heater 600. The heat preservation barrel 500 is a circular ring-shaped cylindrical component, tightly sleeved on the periphery of the crucible 100, made of high-temperature resistant heat-insulating material, and a heat preservation cavity is formed between its inner wall and the outer wall of the crucible 100 for reducing heat dissipation to maintain the temperature stability of the liquid in the crucible 100. The guide cylinder 210 is in the shape of a hollow cylinder, and an annular convex part 211 is arranged on the outer side of its upper end. The outer diameter of the convex part 211 is greater than the outer diameter of the heat preservation barrel 500 and is fixedly connected to the top edge of the heat preservation barrel 500, so that the guide cylinder 210 is horizontally suspended directly above the liquid level and is coaxially arranged with the crucible 100. The heater 600 is arranged in the heat preservation cavity between the crucible 100 and the heat preservation barrel 500 for heating the crucible 100 to ensure that the liquid in the crucible 100 is in a stable molten state.

[0080] It can be understood that by setting the heat preservation barrel 500 and the heater 600, the liquid level distance adjustment device significantly improves the temperature stability and structural reliability of the system: the heat preservation barrel 500 tightly wraps around the periphery of the crucible 100, blocking heat dissipation, providing a constant temperature environment for the liquid in the crucible 100, avoiding liquid level shaking or changes in the molten state caused by temperature fluctuations, and fundamentally reducing the interference factors affecting the measurement accuracy of the liquid level distance; the guide cylinder 210 is connected to the top of the heat preservation barrel 500 through the radial convex part 211, and the design that the radius of the convex part 211 is greater than that of the heat preservation barrel 500 forms a mechanical limit structure, ensuring that the guide cylinder 210 is firmly suspended above the liquid level and is coaxially arranged with the crucible 100. This not only avoids the blockage of the optical path by the support structure in the traditional installation method, but also improves the position stability of the projection component 200 through rigid connection, preventing the offset of the variable diameter ring 220 caused by equipment vibration; the heater 600 is arranged between the crucible 100 and the heat preservation barrel 500, which can compensate for heat loss in real time and maintain the optimal growth temperature of the molten liquid. Its uniform heating characteristic cooperates with the heat preservation barrel 500 to further optimize the temperature field distribution and ensure the consistency of physical parameters during the liquid level distance adjustment process.

[0081] Optionally, as Figure 1 and Figure 2As shown in the figure, the liquid level distance adjustment device further includes a furnace cover 700 and a furnace body 800; the heat preservation barrel 500, the flow guide cylinder 210 and the heater 600 are all arranged inside the furnace body 800; the furnace cover 700 is connected to the furnace body 800, and an observation port 710 is opened on the furnace cover 700, and the observation port 710 is used for the image acquisition component 400 to acquire images through the observation port 710.

[0082] Specifically, the liquid level distance adjustment device further includes a furnace body 800 and a furnace cover 700. The furnace body 800 is a cylindrical closed cavity, and a lifting platform for supporting the crucible 100 is arranged at the bottom. The platform is connected to the transmission component 300 to realize the vertical displacement of the crucible 100. The heat preservation barrel 500, the flow guide cylinder 210 and the heater 600 are all installed in the inner cavity of the furnace body 800. Among them, the heat preservation barrel 500 is fixed at the bottom of the furnace body 800, and the flow guide cylinder 210 is suspended at the top of the heat preservation barrel 500 through its radial protrusion 211. The heater 600 surrounds the heat preservation cavity outside the crucible 100. The furnace cover 700 is a hemispherical structure, and a circular observation port 710 is opened at its spherical surface position. The image acquisition component 400 is fixed above the furnace cover 700, and the lens is directly facing the observation port 710 to ensure that the variable diameter ring 220 and its projection image on the liquid surface can be clearly captured.

[0083] In some embodiments, a high-temperature resistant transparent quartz glass window is embedded in the observation port 710, and an inert gas purging pipeline is arranged around the observation port 710, and a protective gas such as argon can be introduced to prevent the window from being polluted.

[0084] It can be understood that the liquid level distance adjustment device adds the structures of the furnace cover 700 and the furnace body 800. The furnace body 800, as the core load-bearing component, provides a stable installation space for the heat preservation barrel 500, the flow guide cylinder 210 and the heater 600. Its closed structure can effectively isolate the interference of the external environment, maintain the stability of internal process conditions such as high temperature and inert gas, and avoid the influence of environmental factors on the liquid state in the crucible 100 and the measurement of the liquid level distance; the furnace cover 700 and the furnace body 800 are connected to form a complete closed space, which can not only prevent heat dissipation and reduce energy consumption, but also avoid impurities from entering and polluting the liquid, creating a clean environment for processes such as crystal growth. The observation port 710 on the furnace cover 700 is specially designed for the image acquisition component 400 to ensure that it can collect the variable diameter ring 220 and its projection image without obstruction, ensuring the accuracy and consistency of image acquisition; in addition, the setting of the observation port 710 can also prevent the image acquisition component 400 from being directly exposed to high temperature and corrosive environments, extending its service life, thereby improving the reliability and stability of the operation of the entire liquid level distance adjustment device, and providing a solid guarantee for high-precision process control.

[0085] In the second aspect, as Figure 6As shown in the figure, an embodiment of the present application provides a method for adjusting the liquid orifice distance, which is applied to the liquid orifice distance adjusting device described in any of the above, and includes the following steps: collecting an image, the image including the variable diameter ring 220 and the projection formed by the variable diameter ring 220 on the liquid surface; controlling the transmission assembly 300 to adjust the height of the crucible 100, detecting the control parameters of the transmission assembly 300 when the variable diameter ring 220 and the projection are in different overlapping states in the image, and constructing an adjustment relationship formula according to the control parameters; inputting the target height of the variable diameter ring 220 and the liquid surface into the adjustment relationship formula, obtaining the target control parameters output by the adjustment relationship formula, and adjusting the transmission assembly 300 to the target control parameters to adjust the variable diameter ring 220 and the liquid surface to reach the target distance.

[0086] Based on the description of the liquid orifice distance adjusting device in the above embodiment, referring to Figure 3 , an embodiment of the present invention provides a method for adjusting the liquid orifice distance, including:

[0087] Step 101: Collect an image, the image including the variable diameter ring 220 and the projection formed by the variable diameter ring 220 on the liquid surface.

[0088] Step 102: Control the transmission assembly 300 to adjust the height of the crucible 100, and detect the control parameters of the transmission assembly 300 when the variable diameter ring 220 and its projection are in different overlapping states in the image, and construct an adjustment relationship formula according to the control parameters.

[0089] Step 103: Input the target height of the variable diameter ring 220 and the liquid surface into the adjustment relationship formula, obtain the target control parameters output by the adjustment relationship formula, and adjust the transmission assembly 300 to the target control parameters to adjust the variable diameter ring 220 and the liquid surface to reach the target distance.

[0090] Understandably, the variable-diameter ring 220 and its projection information are obtained through image acquisition. An adjustment relational expression is constructed using the control parameters of the transmission component 300 in different overlapping states, and precise quantitative calculation is achieved by combining the geometric characteristics of the hollow structure 221. This method uses the overlapping state of the variable-diameter ring 220 and its projection in the image as the measurement reference, converts the complex spatial distance measurement into an associative operation between control parameters and geometric dimensions, and effectively eliminates the influence of liquid surface fluctuations and environmental interference on the measurement accuracy; the liquid orifice distance ratio is calculated through the distance ratio of the hollow structure 221, establishing a clear mathematical mapping relationship, making the adjustment process more logical and accurate, and avoiding the errors caused by relying on empirical estimation in traditional methods; the target control parameters are derived using the adjustment relational expression, enabling closed-loop control from measurement, calculation to adjustment, and ensuring that the distance between the variable-diameter ring 220 and the liquid surface accurately reaches the target value. This method does not require complex sensors or high-precision measurement equipment, and can achieve high-precision adjustment of the liquid orifice distance only through image processing and simple geometric calculations. It has the advantages of high calculation efficiency, accurate adjustment accuracy, and strong environmental adaptability, providing a reliable and efficient solution for processes such as crystal growth that require precise control of the liquid orifice distance.

[0091] Optionally, step 102 may specifically include:

[0092] Step 1021: When controlling the transmission component 300 to adjust the height of the crucible 100 until the variable-diameter ring 220 and its projection are in the first overlapping state, detect the first control parameter a1 of the transmission component 300;

[0093] Step 1022: When controlling the transmission component 300 to adjust the height of the crucible 100 until the variable-diameter ring 220 and its projection are in the second overlapping state, detect the second control parameter a2 of the transmission component 300;

[0094] Step 1023: Construct an adjustment relational expression according to the recorded first control parameter a1 and second control parameter a2.

[0095] Understandably, during the implementation process, the first control parameter a1 and the second control parameter a2 when the variable-diameter ring 220 and its projection are in two specific overlapping states are captured respectively. An adjustment relational expression is constructed using these two discrete but clearly characterized reference points, avoiding the cumulative error that may be introduced by continuous measurement and reducing the algorithm complexity at the same time. It not only simplifies the derivation process of the mapping relationship between control parameters and the liquid orifice distance, but also effectively avoids the influence of liquid surface fluctuations and environmental interference on the measurement accuracy through discrete measurement methods; the two overlapping states correspond to different projection characteristics of the hollow structure 221, enabling the change of control parameters to intuitively reflect the actual change of the liquid orifice distance, thus providing a reliable and repeatable mathematical model for the subsequent calculation of the target distance and ensuring that the adjustment relational expression has high universality and reliability, suitable for process scenarios such as single-crystal silicon growth with extremely high precision requirements.

[0096] Optionally, step 1021 may specifically include:

[0097] Step 10211 controls the transmission component 300 to adjust the height of the crucible 100 until the projection of the first hollow structure 2211 coincides with the inner diameter of the diameter-changing ring 220 in the line-of-sight direction of the image acquisition component 400.

[0098] Optionally, step 1022 may specifically include:

[0099] Step 10221 controls the transmission component 300 to adjust the height of the crucible 100 until the projection of the second hollow structure 2212 coincides with the inner diameter of the diameter-changing ring 220 in the line-of-sight direction of the image acquisition component 400.

[0100] Optionally, step 1023 may specifically include:

[0101] Step 10231 constructs an adjustment relational expression |a1 - a2| = |h1 - h2| according to the recorded first control parameter a1 and second control parameter a2, where a1 is the first control parameter, a2 is the second control parameter, h1 is the first distance, and h2 is the second distance.

[0102] It can be understood that by specifically defining the first overlapping state and the second overlapping state as the coincidence of the projections of the first hollow structure 2211 and the second hollow structure 2212 with the inner diameter of the diameter-changing ring 220, the accuracy and reliability of the liquid outlet distance adjustment are enhanced. Taking the coincidence of the projection of the hollow structure 221 and the inner diameter of the diameter-changing ring 220 as the measurement reference, and using their clear geometric edge features, the fuzzy image judgment is converted into a clear edge alignment signal, greatly reducing the detection error caused by liquid level fluctuations and light interference; by distinguishing the coincidence states triggered by the first hollow structure 2211 and the second hollow structure 2212 at different positions, two independent and verifiable measurement nodes are formed, which not only provides a stable reference coordinate for constructing the adjustment relational expression between the control parameter and the liquid outlet distance, but also can quickly deduce the change amount of the liquid outlet distance in different states based on the fixed geometric distance difference of the hollow structure 221, avoiding complex three-dimensional space calculations.

[0103] Optionally, step 103 may specifically include:

[0104] Step 1031 inputs the target height of the diameter-changing ring 220 and the liquid level into the adjustment relational expression.

[0105] Step 1032 outputs the target control parameter through the adjustment relational expression.

[0106] Step 1033 adjusts the transmission component 300 to the target control parameter.

[0107] Understandably, with the adjustment relationship formula as the core, the target height is directly substituted into the calculation, avoiding the inefficient process of repeated trial and error and gradual approximation in the traditional adjustment method, and greatly shortening the adjustment time. The relationship formula is based on the quantitative mapping of the control parameters and the liquid outlet distance accurately constructed in the early stage, and can quickly output the unique target control parameter that matches the target height, effectively eliminating the errors of manual estimation or empirical adjustment. The transmission component 300 is accurately adjusted to the target control parameter to ensure that the actual liquid outlet distance coincides with the target value, enhancing the reliability and stability of the adjustment system. This process not only reduces the dependence on the experience of operators, but also meets the requirements of real-time and accurate adjustment of the liquid outlet distance in complex processes such as single crystal growth, effectively guaranteeing the process quality and production efficiency.

[0108] Optionally, in the scenario of continuous crystal pulling, each time the crystal pulling ends, the construction of the adjustment relationship formula is carried out once. On the one hand, it dynamically adapts to the minor wear of the equipment, thermal expansion deformation, and subtle changes in environmental parameters during the crystal pulling process. Since the equipment state and process conditions may vary after each crystal pulling ends, reconstructing the adjustment relationship formula can timely correct the mapping relationship between the control parameters and the liquid outlet distance, avoid error accumulation, and ensure that the liquid outlet distance adjustment in subsequent crystal pulling links always maintains high precision. On the other hand, it improves the self-adaptability and robustness of the system, enabling the adjustment model to quickly respond to changes such as the characteristics of crystal pulling raw materials and process parameter adjustments in different batches, without the need for manual recalibration or algorithm modification, reducing the dependence on the experience of operators. By continuously updating the adjustment relationship formula, the liquid outlet distance control in the continuous crystal pulling process can always be maintained in the best state, ensuring the consistency of single crystal growth in each batch and the stability of product quality, and effectively improving the overall production efficiency and yield.

[0109] In the description of this specification, the descriptions referring to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine the different embodiments or examples described in this specification.

[0110] For the method embodiments, for the sake of simple description, they are all expressed as a series of action combinations. However, those skilled in the art should know that the present invention is not limited by the described action sequence, because according to the present invention, certain steps can be performed in other sequences or simultaneously. Secondly, those skilled in the art should also know that the embodiments described in the specification are all preferred embodiments, and the actions and components involved are not necessarily essential to the present invention.

Claims

1. A liquid port distance adjustment device, characterized in that, The liquid outlet distance adjustment device includes: a crucible (100) containing liquid, a projection assembly (200), a transmission assembly (300) for controlling the lifting of the crucible (100), and an image acquisition assembly (400) facing the liquid surface of the liquid and used for acquiring images; The projection assembly (200) includes a diversion cylinder (210) and a variable diameter ring (220). The diversion cylinder (210) faces the liquid surface. The variable diameter ring (220) is coaxially arranged with the diversion cylinder (210), and the variable diameter ring (220) is connected to the side of the diversion cylinder (210) close to the liquid surface; At least two hollow structures (221) at different positions are provided on the variable diameter ring (220); The image includes: the variable diameter ring (220) and the projection of the variable diameter ring (220) formed on the liquid surface; The image acquisition assembly (400) is further used to control the transmission assembly (300) to adjust the distance between the liquid surface and the variable diameter ring (220), respectively detect the control parameters of the transmission assembly (300) when the variable diameter ring (220) and the projection in the image are in different overlapping states, and construct an adjustment relationship formula according to the control parameters; the adjustment relationship formula is used to reflect the corresponding relationship between the control parameters and the distance; The image acquisition assembly (400) is further used to input the value of the target distance into the adjustment relationship formula, obtain the target control parameter output by the adjustment relationship formula, and control the transmission assembly (300) through the target control parameter to adjust the variable diameter ring (220) and the liquid surface to reach the target distance.

2. The liquid port distance adjustment device according to claim 1, characterized in that The image acquisition assembly (400) is further used for: When the variable diameter ring (220) and the projection are in a first overlapping state, record the first control parameter of the transmission assembly (300). At this time, the distance between the liquid surface and the variable diameter ring (220) is the first distance; When the variable diameter ring (220) and the projection are in a second overlapping state, record the second control parameter of the transmission assembly (300). At this time, the distance between the liquid surface and the variable diameter ring (220) is the second distance; Construct the adjustment relationship formula according to the first control parameter, the first distance, the second control parameter, and the second distance.

3. The liquid port distance adjustment device according to claim 2, wherein The adjustment relationship formula is |a1 - a2| = |h1 - h2|; Wherein, a1 is the first control parameter, a2 is the second control parameter, h1 is the first distance, and h2 is the second distance.

4. The liquid port distance adjusting device according to claim 3, wherein, The image acquisition assembly (400) is further used to, when the crucible (100) is in the second overlapping state, input the target distance into the adjustment relationship formula to obtain the target control parameter.

5. The liquid port distance adjusting device according to claim 4, wherein The image acquisition assembly (400) is further used to replace h1 in the adjustment relationship formula |a1 - a2| = |h1 - h2| with h3 and replace a1 with a3 to obtain the replaced adjustment relationship formula: |a3 - a2| = |h3 - h2|; Wherein, h3 is the target distance and a3 is the target control parameter; Calculate the second adjustment relation expression to obtain the target control parameter a3.

6. The liquid port distance adjustment device according to claim 3, wherein, The hollow structure (221) includes: a first hollow structure (2211) and a second hollow structure (2212); The first overlapping state is the state when the projection of the first hollow structure (2211) coincides with the inner diameter of the variable-diameter ring (220) in the line-of-sight direction of the image acquisition component (400); The second overlapping state is the state when the projection of the second hollow structure (2212) coincides with the inner diameter of the variable-diameter ring (220) in the line-of-sight direction of the image acquisition component (400).

7. The liquid port distance adjusting device according to claim 3, wherein, The inner diameter distance between the first hollow structure (2211) and the diameter-changing ring (220) is r1; the inner diameter distance between the second hollow structure (2212) and the diameter-changing ring (220) is r2; r1 = 2r2, 8. The liquid port distance adjustment device according to claim 7, characterized in that, The liquid outlet distance adjustment device further includes a heat preservation barrel (500) and a heater (600); The heat preservation barrel (500) is arranged outside the crucible (100) for heat preservation of the crucible (100); a protrusion (211) extending radially along the guide cylinder (210) and away from the axis direction of the guide cylinder (210) is arranged on the side of the guide cylinder (210) away from the liquid surface, the radius of the protrusion (211) is greater than the radius of the heat preservation barrel (500), and the protrusion (211) is connected to the side of the heat preservation barrel (500) away from the liquid surface to suspend the guide cylinder (210) above the liquid surface; The heater (600) is arranged between the crucible (100) and the heat preservation barrel (500) for heating the crucible (100).

9. The liquid port distance adjusting device according to claim 8, characterized in that, The liquid outlet distance adjustment device further includes a furnace cover (700) and a furnace body (800); The heat preservation barrel (500), the guide cylinder (210) and the heater (600) are all arranged in the furnace body (800); The furnace cover (700) is connected to the furnace body (800), and an observation port (710) is opened on the furnace cover (700), and the observation port (710) is used for the image acquisition component (400) to acquire the image through the observation port (710).

10. A liquid port distance adjustment method, applied to the liquid port distance adjustment device according to any one of claims 1-9 above, characterized in that It includes the following steps: Acquire an image, where the image includes a variable-diameter ring (220) and the projection formed by the variable-diameter ring (220) on the liquid surface; Control the transmission component (300) to adjust the height of the crucible (100), detect the control parameters of the transmission component (300) when the variable-diameter ring (220) and the projection are in different overlapping states in the image, and construct an adjustment relation expression according to the control parameters; Input the target height of the variable-diameter ring (220) and the liquid surface into the adjustment relation expression to obtain the target control parameter output by the adjustment relation expression, and adjust the transmission component (300) to the target control parameter to adjust the variable-diameter ring (220) and the liquid surface to reach the target distance.

Images