Method and device for increasing cooling speed of closed environment

Abstract

The invention provides a method and device for increasing the cooling speed of a closed environment and relates to the field of cooling, and the method comprises the steps that a draught fan blows nitrogen through a cooling part bearing system needing to be cooled, the nitrogen absorbs heat and then is cooled through a heat exchanger, and then the nitrogen returns to the draught fan through an air duct to be recycled; the cooling plate is installed in the closed environment, the blackness of the cooling plate is suitable for absorbing heat radiation energy which is radiated by the cooling part when the cooling part is used for cooling, the wavelength of the heat radiation energy is within the range of 2.5-3.5 microns, and the mirror reflection plate is installed on the wall face, without the cooling plate, in the closed environment so that radiant heat can be rapidly absorbed by the cooling plate; the heat absorbed by other parts except the cooling plate and the mirror reflection plate in the closed environment is reduced, and the temperature rising range in the closed environment is reduced. The cooling plate and the mirror reflection plate are installed in the closed environment, so that heat radiation energy radiated by the cooling part is directionally reflected to the surface of the cooling plate through the mirror reflection plate, and the temperature rising range in the closed environment is reduced.

Description

Technical Field

[0001] The present invention relates to the field of cooling technology, and in particular to a method and device for accelerating the cooling speed of a closed environment. Background Art

[0002] In the cooling stage of the cooling parts in the closed environment of existing equipment, a fan is used to blow nitrogen through the cooling part carrier system that needs to be cooled. After absorbing heat, the nitrogen is cooled through the heat exchanger and then returns to the fan through the air duct for recirculation. This method has the disadvantage that the heat capacity of nitrogen is small and the heat absorption is very small. A large amount of heat is radiated into the closed environment, causing the temperature in the closed environment to rise a lot in the initial stage of cooling the cooling parts, which will accelerate the aging of the components in the closed environment and pose a safety hazard. Summary of the Invention

[0003] The present invention provides a method and device for accelerating the cooling speed of a closed environment, so as to solve the technical problems raised by the above-mentioned background technology.

[0004] To solve the above technical problems, the present invention discloses a method for accelerating the cooling speed of a closed environment, comprising: a fan blowing nitrogen through a cooling component carrying system to be cooled; the nitrogen absorbs heat and is cooled by a heat exchanger; and then returns to the fan through an air duct for recirculation; and further comprising: A cooling plate with a blackness suitable for absorbing the thermal radiation energy radiated by the cooling element during cooling, with a wavelength in the range of 2.5 microns to 3.5 microns, is installed in the closed environment. A mirror reflector is installed on the wall surface in the closed environment where the cooling plate is not installed, so that the thermal radiation energy radiated by the cooling element is reflected directionally by the mirror reflector to the surface of the cooling plate, and the radiant heat is quickly absorbed by the cooling plate. The heat absorbed by other components in the closed environment except the cooling plate and the mirror reflector is reduced, thereby reducing the temperature rise inside the closed environment.

[0005] Preferably, a filter is also provided at the air outlet of the fan.

[0006] Preferably, the heat exchanger is a finned heat exchanger.

[0007] Preferably, a temperature sensor is provided in the air duct.

[0008] Preferably, a filter monitoring process is further included, and the filter monitoring process is performed once every preset time interval. The current filter monitoring process includes: Step 101: During the operation of the fan, key parameters of the filter inlet side and key parameters of the filter outlet side are obtained within a preset time period after the start of the current filter monitoring process; the key parameters include: wind speed; Step 102: Determine the ratio of the average value of each key parameter on the outlet side of the filter within the current preset time period to the average value of the corresponding key parameter on the inlet side of the filter within the current preset time period; Step 103: Obtain the actual wind speeds in different cooling areas at the cooling element bearing system within the current preset time period; Step 104: When any ratio obtained in Step 102 is not within the corresponding allowable range, alarm through Alarm 1; Step 105: When the actual wind speeds in different cooling areas at the cooling element bearing system are less than the minimum value of the corresponding required wind speed range, alarm through Alarm 2.

[0009] Preferably, the key parameters further include: air pressure; It further includes: Step 11: Determine whether to adjust the fan parameters according to the filter monitoring process, and determine the adjusted fan parameters when adjustment is required.

[0010] Preferably, Step 11 includes: Step 111: When Alarm 1 does not alarm and Alarm 2 alarms, obtain the current required nitrogen flow rate range and the current required nitrogen air pressure range at the current nitrogen temperature at the fan inlet of the cooling element bearing system; based on the ratio determined in the most recent filter monitoring process, determine the corrected current required nitrogen flow rate range and the corrected current required nitrogen air pressure range; Step 112: Obtain the rotation speed - theoretical wind speed curve and the rotation speed - theoretical wind pressure curve of the current fan; Step 113: Based on the corrected current required nitrogen flow rate range, the corrected current required nitrogen air pressure range, and Step 112, determine the initial rotation speed that simultaneously satisfies the corrected current required nitrogen flow rate range and the corrected current required nitrogen air pressure range, and determine the rotation speed - theoretical wind speed curve segment and the rotation speed - theoretical wind pressure curve segment of the current fan corresponding to the initial rotation speed; Step 114: Screen several target initial rotation speeds from all the initial rotation speeds, and determine the comprehensive compliance coefficient of the air pressure and flow rate corresponding to each target initial rotation speed and its preset rotation speed range. Select the average value of M target initial rotation speeds with the comprehensive compliance coefficient equal to the preset compliance coefficient and the smallest difference from the fan rotation speed in the most recent filter monitoring process as the corrected rotation speed; Step 115: Control the working power of the current fan so that the actual rotation speed is the corrected rotation speed for operation until Alarm 1 or Alarm 2 alarms.

[0011] Preferably, the cooling element bearing system is located on the left side of the filter, and the filter includes: Filter housing, a horizontal partition is connected to the lower part inside the filter housing, and the horizontal partition divides the filter housing into an upper cavity and a lower cavity. Vertical pipes 1 and 2 are arranged at left and right intervals on the horizontal partition. Vertical pipes 1 and 2 penetrate the horizontal partition up and down. Control valves are arranged at the lower parts of vertical pipes 1 and 2. The upper end of vertical pipe 2 is closed and the upper end of vertical pipe 2 is close to the upper end of the upper cavity. A number of horizontal pipes 1 are connected in series at left and right intervals on the left side of vertical pipe 2. A vertical filter screen is arranged in the upper cavity, and the vertical filter screen is located on the left side of vertical pipe 1. The left end of the horizontal pipe 1 contacts the right end of the vertical filter screen. The filter holes of the vertical filter screen are in the horizontal direction from left to right. The left end of the vertical filter screen contacts the right end of the horizontal pipe 2. The left end of the horizontal pipe 2 penetrates the left end of the filter housing, and the left end of the horizontal pipe 2 is connected to a first nozzle. A horizontal pipe 3 is arranged between adjacent horizontal pipes 2 up and down. The horizontal pipe 3 penetrates the left side of the filter housing. The left end of the horizontal pipe 2 is connected to a second nozzle.

[0012] Preferably, the method further includes: During the operation of the fan, determine the wind speed loss coefficient on the inlet side of the corresponding vertical filter screen area of the working nozzle in real time or at every preset time interval three, and determine the average value of the wind speed loss coefficients corresponding to the working nozzles with the wind speed loss coefficient less than the preset loss coefficient; Outlet air monitoring process, perform an outlet air monitoring process every preset time interval two. The current outlet air monitoring process includes: Step 121: Obtain the standard wind speed fitting curve of the fan speed - the inlet side of the vertical filter screen area corresponding to each first nozzle under the condition that the control valve on the left side of the fan is closed and the control valve on the right side is open; And obtain the standard wind speed fitting curve of the fan speed - the inlet side of the vertical filter screen area corresponding to each second nozzle under the condition that the control valve on the right side of the fan is closed and the control valve on the left side is open; And obtain the target required air flow range of nitrogen for each cooling area of the cooling element bearing system; Step 122: Obtain the actual wind speed at different cooling areas of the cooling element bearing system and the average speed of the fan within a preset duration two after the start of the current outlet air monitoring process during the operation of the fan; The upper and lower adjacent first nozzles and second nozzles form a group of nozzles, and each group of nozzles corresponds to a cooling area. The cooling element bearing system is divided into multiple cooling areas at upper and lower intervals; Step 123: When the wind speed unevenness coefficient of all cooling areas is greater than the preset value or the wind speed in any cooling area is not within the required air flow speed range of the corresponding working nozzle, alarm through an alarm 3; Step 124: When Alarm 3 alarms, determine the adjusted rotation speed based on the average of the wind speed loss coefficients of the nozzles that are operating based on Step 121 and whose most recently determined wind speed loss coefficients are less than the preset loss coefficient, open the control valves that are not operating in accordance with Step 122, close the control valves that are operating in accordance with Step 122, and control the actual rotation speed of the fan to be the adjusted rotation speed.

[0013] The present invention also discloses a device for accelerating the temperature reduction speed in a closed environment. The device is applied to the method for accelerating the temperature reduction speed in a closed environment, and the device includes: a fan, a heat exchanger, an air duct, a cooling plate, a specular reflector, and a filter.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: The present invention installs a cooling plate with a suitable blackness in the closed environment to absorb the thermal radiation energy with a wavelength in the range of 2.5 micrometers to 3.5 micrometers radiated by the temperature reduction component during temperature reduction, and installs a specular reflector on the wall surface in the closed environment where the cooling plate is not installed, so that the thermal radiation energy radiated by the temperature reduction component is directionally reflected to the surface of the cooling plate by the specular reflector, and the radiation heat is quickly absorbed by the cooling plate, reducing the heat absorption of other components in the closed environment except the cooling plate and the specular reflector, and reducing the temperature rise amplitude inside the closed environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0016] Figure 1 It is a top view of the present invention; Figure 2 It is a front view of the present invention; Figure 3 It is a front view of an embodiment of the present invention.

[0017] In the figure: 1. Fan; 2. Temperature reduction component bearing system; 3. Closed environment; 4. Cooling plate; 5. Air duct; 6. Specular reflector; 7. Wafer; 8. Heat exchanger; 9. Filter; 91. Filter housing; 9101. Upper cavity; 9102. Lower cavity; 92. Horizontal partition; 93. Vertical pipe 1; 94. Vertical pipe 2; 95. Control valve; 96. Horizontal pipe 1; 97. Vertical filter; 98. Horizontal pipe 2; 99. Horizontal pipe 3; 910. Nozzle 1; 911. Nozzle 2. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0018] To make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions in the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the present invention. Apparently, the described embodiments are part of the embodiments of the present invention, rather than all of them. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present invention without any creative work belong to the scope of protection of the present invention.

[0019] Embodiment 1: The objective of the present invention is to provide a method for accelerating the cooling rate of a closed environment. As shown in Figure 1 - Figure 2 , it includes: The fan 1 blows nitrogen over the cooling element carrying system 2 to be cooled (mainly cooling the cooling elements of the cooling element carrying system 2). After the nitrogen absorbs heat, it is cooled by the heat exchanger 8, and then returns to the fan 1 through the air duct 5 for recycling. It also includes: A cooling plate 4 suitable for absorbing the thermal radiation energy with a wavelength in the range of 2.5 to 3.5 micrometers, which is radiated by the cooling elements during the cooling of the cooling elements, is installed in the closed environment 3. A mirror reflector 6 is installed on the wall surface in the closed environment 3 where the cooling plate 4 is not installed, so that the thermal radiation energy radiated by the cooling elements is directionally reflected by the mirror reflector 6 to the surface of the cooling plate 4, and the radiation heat is quickly absorbed by the cooling plate 4; Reduce the heat absorption of other components in the closed environment 3 except the cooling plate 4 and the mirror reflector 6, and reduce the temperature rise amplitude inside the closed environment 3.

[0020] A filter 9 is also provided at the air outlet of the fan 1.

[0021] The heat exchanger 8 is a finned heat exchanger.

[0022] A temperature sensor is provided in the air duct 5 to monitor the nitrogen temperature in the air duct 5. When the nitrogen temperature is not within the corresponding required nitrogen temperature range, an alarm is given.

[0023] The present invention also discloses a device for accelerating the cooling rate of a closed environment. The device is applied to the method for accelerating the cooling rate of a closed environment. The device includes: a fan 1, a heat exchanger 8, an air duct 5, a cooling plate 4, a mirror reflector 6, and a filter 9.

[0024] The beneficial effects of the above technical solutions are: The present invention installs a cooling plate 4 with a suitable blackness in a closed environment 3 to absorb the thermal radiation energy with a wavelength in the range of 2.5 to 3.5 microns radiated by the cooling element during cooling. A mirror reflector 6 is installed on the wall surface of the closed environment 3 where the cooling plate 4 is not installed, so that the thermal radiation energy radiated by the cooling element is directionally reflected by the mirror reflector 6 to the surface of the cooling plate 6, and the radiation heat is quickly absorbed by the cooling plate 4, reducing the heat absorption of other components in the closed environment 3 except the cooling plate 4 and the mirror reflector 6, and reducing the temperature rise amplitude inside the closed environment 3.

[0025] Embodiment 2, on the basis of Embodiment 1, further includes a filter 9 monitoring process, which is performed once every preset time interval. The current filter 9 monitoring process includes: Step 101: During the operation of the fan 1, obtain the key parameters on the inlet side of the filter 9 and the key parameters on the outlet side of the filter 9 within a preset time period 1 after the start of the current filter 9 monitoring process; the key parameters include: wind speed. Step 102: Determine the ratio of the average value of each key parameter on the outlet side of the filter 9 within the current preset time period to the average value of the corresponding key parameter on the inlet side of the filter 9 within the current preset time period (the ratio of the average value of each key parameter on the outlet side of the filter 9 within the current preset time period ÷ the average value of the corresponding key parameter on the inlet side of the filter 9 within the current preset time period); Step 103: Obtain the actual wind speeds in different cooling regions at the cooling element bearing system 2 within the current preset time period; Step 104: When any ratio obtained in Step 102 is not within the corresponding allowable range, alarm through alarm 1. Step 105: When the actual wind speeds in different cooling regions at the cooling element bearing system 2 are less than the minimum value of the corresponding required wind speed range, alarm through alarm 2.

[0026] The beneficial effects of the above technical solutions are: By determining the ratio of the average value of each key parameter on the outlet side of the filter 9 within the current preset time period to the average value of the corresponding key parameter on the inlet side of the filter 9 within the current preset time period, when the ratio deviates from the allowable range (such as outlet wind speed / inlet wind speed < 0.8, indicating that blockage causes increased wind speed attenuation), alarm 1 is triggered.

[0027] When the actual wind speeds in different cooling regions at the cooling element bearing system 2 are less than the minimum value of the corresponding required wind speed range (such as < 2 m / s, unable to meet the cooling requirements of the wafer 7), alarm 2 is triggered. Avoid local overheating caused by insufficient wind speed.

[0028] Embodiment 3, on the basis of Embodiment 2, such as Figure 2As shown, it further includes: Step 11: Determine whether to adjust the parameters of the fan 1 according to the monitoring process of the filter 9, and determine the parameters of the fan 1 after adjustment when adjustment is required; Step 11 includes: Step 111: When Alarm 1 does not alarm and Alarm 2 alarms, obtain the current required nitrogen flow rate range and the current required nitrogen gas pressure range of the cooling element carrying system 2 at the current nitrogen temperature at the air inlet of the fan 1; and the current required nitrogen gas pressure range; ; Based on the ratio determined in the most recent filter 9 monitoring process, determine the corrected current required nitrogen flow rate range and the corrected current required nitrogen gas pressure range; ; The above-mentioned current required nitrogen flow rate range and the current required nitrogen gas pressure range of the cooling element carrying system 2 at the current nitrogen temperature at the air inlet of the fan 1 and the current required nitrogen gas pressure range are obtained in the following manner: Based on the temperature of the wafer 7 of the cooling element carrying system 2 (which can be the temperature when entering the closed environment 3) and the heat dissipation requirement, at the current nitrogen temperature at the air inlet of the fan 1, determine the current required nitrogen flow rate range and the current required nitrogen gas pressure range that meet the heat dissipation requirement of the wafer 7 of the cooling element carrying system 2 based on heat balance calculation or experiment and the current required nitrogen gas pressure range; ; The current required nitrogen flow rate range and the current required nitrogen gas pressure range are the parameters required at the outlet of the filter; where ; ; and are respectively the ratio corresponding to the flow rate and the ratio corresponding to the gas pressure determined in the most recent filter 9 monitoring process; Step 112: Obtain the rotational speed - theoretical wind speed curve and the rotational speed - theoretical wind pressure curve of the current fan 1; Based on the initially used fan 1, by adjusting the rotational speed of the fan 1, detect the wind speed and wind pressure at the outlet of the fan 1, and construct the rotational speed - theoretical wind speed curve and the rotational speed - theoretical wind pressure curve of the current fan 1 (obtained through testing based on the initially used fan 1 and the filter 9); Step 113: Based on the corrected current required nitrogen flow rate range, the corrected current required nitrogen gas pressure range, and Step 112, determine the initial rotational speed (the rotational speed of the fan 1) that simultaneously satisfies the corrected current required nitrogen flow rate range and the corrected current required nitrogen gas pressure range, and determine the rotational speed - theoretical wind speed curve segment and the rotational speed - theoretical wind pressure curve segment of the current fan 1 corresponding to the initial rotational speed; Step 114: Screen a number of target initial speeds from all the initial speeds (screen according to a preset rule, such as integers can be selected), and determine the comprehensive compliance coefficient of the air pressure and flow rate corresponding to each target initial speed and its preset speed range. Select the average value of M (where M ranges from 3 to 5) target initial speeds whose comprehensive compliance coefficient is equal to the preset compliance coefficient (with a value of 1) and whose difference in the rotational speed of the fan 1 during the monitoring process of the nearest filter 9 is the smallest as the corrected rotational speed; The preset speed range corresponding to the i-th target initial speed is obtained based on the following method: Set according to the current decay value of the rotational speed ratio per unit time of the fan 1. The rotational speed ratio is: the actual rotational speed of the current fan 1 at the corresponding working power ÷ the initial theoretical rotational speed of the current fan 1 at the corresponding working power. Determine the current decay value Y of the rotational speed ratio per unit time (the difference between the previously determined rotational speed ratio and the currently determined rotational speed ratio ÷ the time interval between the currently determined rotational speed ratio and the previously determined rotational speed ratio). In the present invention, an alarm is given when the rotational speed ratio is abnormal; Then ; is the preset speed range corresponding to the i-th target initial speed, Any rotational speed in which satisfies the rotational speed of the corresponding current fan 1 - the rotational speed - theoretical wind speed curve segment and the rotational speed - theoretical wind pressure curve segment of the current fan 1, then the comprehensive compliance coefficient of the i-th target initial speed and the air pressure and flow rate corresponding to its preset speed range is 1, otherwise it is 0; is the theoretical adjustment time interval for the adjustment of the rotational speed of the fan 1, is within The corresponding speed range (such as ), without adjusting the working power, the historical duration during which the rotational speed drop value is greater than the preset speed value; the rotational speed unit is (revolutions per minute); O ranges from 1 to 5 revolutions per minute; is the i-th target rotational speed.

[0029] Step 115: Control the working power of the current fan 1 so that the actual rotational speed works at the corrected rotational speed until Alarm 1 or Alarm 2 gives an alarm.

[0030] In this embodiment, the filter 9 may only include: a filter housing 91, a vertical filter screen 97 is provided on the filter housing 91, the air inlet of the filter housing 91 is connected to the air outlet of the fan 1, and the air outlet is provided on the left side of the filter housing 91 or is completely open; this embodiment can also be used for the following filter 9, which is based on the dynamic adjustment during the use of the vertical filter screen 97.

[0031] The beneficial effects of the above technical solutions are: By performing heat balance calculations and monitoring the data of filter 9, dynamically determine the corrected current demand nitrogen flow rate range and the corrected current demand nitrogen gas pressure range. Combining with the rotational speed-theoretical wind speed curve and the rotational speed-theoretical wind pressure curve of the current fan 1, precisely control the nitrogen supply to ensure uniform and stable heat dissipation of the wafer 7, and avoid processing defects (such as thermal stress deformation and process parameter drift) caused by abnormal temperatures, thereby improving the product yield.

[0032] Calculate the preset rotational speed range based on the "rotational speed ratio attenuation value", and select the target rotational speed by combining the comprehensive compliance coefficient to actively adapt to the performance attenuation of fan 1 caused by long-term operation (such as impeller wear and motor efficiency decline). This not only ensures that the nitrogen supply meets the demand but also avoids the fan from being "overloaded" or "operating inefficiently", prolongs the service life of the equipment, and reduces the operation and maintenance costs.

[0033] By correcting the demand range and screening the optimal rotational speed, on the premise of meeting the heat dissipation of the wafer 7, preferentially select the rotational speed with a small difference from the historical rotational speed and a high comprehensive compliance coefficient to reduce the power waste of fan 1. At the same time, use the "historical duration of rotational speed decline without power adjustment" to optimize the control logic, avoid ineffective power consumption, and achieve system-level energy conservation.

[0034] Example 4, based on any one of Examples 1-3, as Figure 3 shown, the cooling element carrier system 2 is located on the left side of the filter 9, and the filter 9 includes: A filter housing 91, a horizontal partition 92 is connected to the lower part inside the filter housing 91. The horizontal partition 92 divides the filter housing 91 into an upper cavity 9101 and a lower cavity 9102. The horizontal partition 92 is provided with a vertical pipe one 93 and a vertical pipe two 94 at intervals left and right. The vertical pipe one 93 and the vertical pipe two 94 penetrate the horizontal partition 92 up and down. Control valves 95 are provided at the lower parts of the vertical pipe one 93 and the vertical pipe two 94. The upper end of the vertical pipe two 94 is closed and the upper end of the vertical pipe two 94 is close to the upper end of the upper cavity 9101. A plurality of horizontal pipes one 96 are connected in series up and down on the left side of the vertical pipe two 94. A vertical filter screen 97 is arranged in the upper cavity 9101. The vertical filter screen 97 is located on the left side of the vertical pipe one 93. The left end of the horizontal pipe one 96 contacts the right end of the vertical filter screen 97. The filter holes of the vertical filter screen 97 are in the horizontal direction from left to right. The left end of the vertical filter screen 97 contacts the right end of the horizontal pipe two 98. The left end of the horizontal pipe two 98 penetrates the left end of the filter housing 91. The left end of the horizontal pipe two 98 is connected to a spray head one 910. A horizontal pipe three 99 is arranged between adjacent horizontal pipes two 98 up and down. The horizontal pipe three 99 penetrates the left side of the filter housing 91. The left end of the horizontal pipe two 98 is connected to a spray head two 911.

[0035] The beneficial effects of the above technical solutions are: Through the combined design of the first vertical pipe 93, the second vertical pipe 94 and the control valve 95, when abnormal air outlet occurs in the second nozzle 911 (such as blockage, insufficient pressure) or the vertical filter screen 97 area corresponding to the second nozzle 911 is blocked, the nitrogen path can be quickly switched to avoid the situation that the currently cooling wafer 7 cannot be reliably cooled due to the preparation work of replacing the vertical filter screen 97. Close the control valve 95 corresponding to the first vertical pipe 93, open the control valve 95 corresponding to the second vertical pipe 94, so that nitrogen passes through the first horizontal pipe 96 and the vertical filter screen 97 in the area corresponding to the first horizontal pipe 96, and at the same time use the first nozzle 910 to maintain the nitrogen output. This mechanism avoids system shutdown caused by the failure of the second nozzle 911 or the blockage of the vertical filter screen 97 area corresponding to the second nozzle 911, ensures the continuity of nitrogen supply, and is especially suitable for scenarios with extremely high requirements for gas supply stability.

[0036] Embodiment 5, on the basis of Embodiment 4, as Figure 3 shown, the method further includes: During the operation of the fan 1, determine the wind speed loss coefficient on the inlet side of the vertical filter screen 97 area corresponding to the working nozzle (the first nozzle 910 or the second nozzle 911) in real time or at every preset time interval three, and determine the average value of the wind speed loss coefficients corresponding to the nozzles with the wind speed loss coefficient less than the preset loss coefficient; During the air outlet monitoring process, the air outlet monitoring process is performed once at every preset time interval two. The current air outlet monitoring process includes: Step 121: Obtain the standard wind speed fitting curve of the rotational speed of the fan 1 - the inlet side of the vertical filter screen 97 area corresponding to each first nozzle 910 (obtained based on the initially used filter 9 and the fan 1 through tests) under the condition that the control valve 95 on the left side of the fan 1 is closed and the control valve 95 on the right side is open; And obtain the standard wind speed fitting curve of the rotational speed of the fan 1 - the inlet side of the vertical filter screen 97 area corresponding to each second nozzle 911 (obtained based on the initially used filter 9 and the fan 1 through tests) under the condition that the control valve 95 on the right side of the fan 1 is closed and the control valve 95 on the left side is open; And obtain the target required air flow range of nitrogen for each cooling area of the cooling element carrying system 2 (determined based on the heat dissipation model or heat dissipation test to meet the heat dissipation requirements of the wafer 7); Step 122: Obtain the actual wind speed at different cooling areas of the cooling element carrying system 2 and the average rotational speed of the fan 1 within the preset duration two after the start of the current air outlet monitoring process during the operation of the fan 1; The upper and lower adjacent first nozzles 910 and second nozzles 911 form a group of nozzles, and each group of nozzles corresponds to a cooling area. The cooling element carrying system 2 is divided into multiple cooling areas at intervals up and down; Step 123: When the non-uniformity coefficient of the wind speed in all cooling areas (the standard deviation of the actual wind speeds in all cooling areas obtained in Step 122 divided by the arithmetic mean of the actual wind speeds in all cooling areas obtained in Step 122) is greater than a preset value (such as 0.1), or when the wind speed in any cooling area is not within the required air flow speed range of the corresponding working sprinkler (sprinkler one 910 or sprinkler two 911), alarm through alarm three to remind to open the control valve 95 that is not currently working (the control valve 95 that is not working in the current Step 122). First, calculate the average value of the corresponding actual wind speed for each cooling area; Step 124: When alarm three alarms, determine the adjusted rotation speed based on Step 121 and the average value of the wind speed loss coefficients corresponding to the working sprinklers with the latest determined wind speed loss coefficient less than the preset loss coefficient (such as 0.1), open the control valve 95 that is not working in Step 122, close the control valve 95 that is working in Step 122, and control the actual rotation speed of the fan 1 to be the adjusted rotation speed.

[0037] The target required air flow rate range of nitrogen (the temperature of nitrogen is fixed and is controlled by the air temperature regulating device at the air inlet of the fan 1) for the current cooling area ; Then the target required wind speed range of sprinkler one 910 corresponding to the current cooling area is: ; Then the target required wind speed range of sprinkler two 911 corresponding to the current cooling area is: ; Among them, is the inner diameter of the horizontal pipe two 98; is the inner diameter of the horizontal pipe three 99; The current wind speed loss coefficient U at the inlet side of the corresponding vertical filter screen 97 area of the current sprinkler one 910 is : is: the average wind speed detection value within the current time period at the inlet side of the corresponding vertical filter screen 97 area of the current sprinkler one 910 (working within the current time period) at the current rotation speed of the fan 1; is: the standard wind speed corresponding to the rotation speed of the fan 1 at the inlet side of the vertical filter screen 97 area corresponding to the current sprinkler one 910 under the condition that the left control valve 95 is closed and the right control valve 95 is opened - the standard wind speed fitting curve; When the control valve 95 that is not working in the current Step 122 is the right control valve 95, from Select multiple wind speeds according to the selection rule (selected according to a preset rule, or an integer value can also be selected), and determine the reliability value corresponding to each selected wind speed; ; is the reliability value of the m-th selected wind speed; is the m-th selected wind speed value; when all the nozzles 910 are in the corresponding standard wind speed fitting curve the standard deviation of the rotational speed of the corresponding fan 1 is less than the preset standard deviation, then takes the value of 1, otherwise takes the value of 0; Determine the average value of the smallest N selected wind speeds (such as taking 3 values) with a reliability value equal to 1, and the maximum value of the rotational speed of the fan 1 in the standard wind speed fitting curve corresponding to all the nozzles 910 (the control valve 95 working in step 122 is the left control valve) is the adjusted rotational speed.

[0038] The beneficial effects of the above technical solution are: By monitoring and calculating the wind speed loss coefficient of the working nozzles (nozzle 9-10 or nozzle 9-11), combined with the target required air flow rate range of nitrogen in each cooling area of the preset cooling element bearing system 2, dynamically adjust the rotational speed of the fan 1 and the state of the control valve 95 to ensure that the wind speed in different cooling areas is uniform and meets the requirements of wafer processing, avoiding uneven cooling of the wafer 7, thermal stress or processing defects caused by abnormal wind speed, and improving the product yield.

[0039] When the wind speed non-uniformity coefficient of all cooling areas (the standard deviation of the average value of the actual wind speeds of all cooling areas obtained in step 122 divided by the arithmetic mean of the average values of the actual wind speeds of all cooling areas obtained in step 122) is greater than the preset value (such as 0.1), or the wind speed in any cooling area is not within the required air flow rate range of the working nozzles (nozzle 9-10 or nozzle 9-11), an alarm is given by alarm three to remind to open the control valve 95 that is not currently working (the control valve 95 that is not working in the current step 122), and automatically adjust the rotational speed of the fan 1 and switch the control valve 95 based on the wind speed loss coefficient and the standard wind speed fitting curve, without frequent manual intervention, ensuring the continuous and stable operation of the system and reducing the operation and maintenance cost.

[0040] The arithmetic mean of the average actual wind speeds of all the cooling areas obtained in step 122 is specifically as follows: when the average actual wind speed of the first cooling area obtained in step 122 is 20 m / s, when the average actual wind speed of the second cooling area obtained in step 122 is 21 m / s, when the average actual wind speed of the third cooling area obtained in step 122 is 20 m / s, when the average actual wind speed of the fourth cooling area obtained in step 122 is 21 m / s, and when the average actual wind speed of the fifth cooling area obtained in step 122 is 20 m / s, then the arithmetic mean of the average actual wind speeds of all the cooling areas obtained in step 122 is m / s; Based on the wind speed loss coefficient, standard wind speed fitting curve, etc., dynamically calculate and adjust the rotational speed. On the premise of meeting the wafer cooling requirements, avoid the "over - operation" of the fan, achieve energy conservation and consumption reduction, and ensure that the standard deviation of the wind speed on the inlet side of the vertical filter screen 97 area corresponding to the nozzle 910 is not too large. At the same time, flexibly adapt to the cooling requirements of different nozzle groups by controlling the valve 95 to improve the overall efficiency of the system.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. Method for accelerating the cooling rate of a closed environment, comprising: The blower (1) blows nitrogen gas over the cooling element carrying system (2) to be cooled. After the nitrogen gas absorbs heat, it is cooled by the heat exchanger (8), and then returns to the blower (1) through the air duct (5) for recirculation. It is characterized in that it further includes: A cooling plate (4) with a suitable blackness for absorbing the thermal radiation energy in the wavelength range of 2.5 to 3.5 micrometers radiated by the cooling element during the cooling of the cooling element is installed in the closed environment (3). A specular reflector (6) is installed on the wall surface in the closed environment (3) where the cooling plate (4) is not installed, so that the thermal radiation energy radiated by the cooling element is directionally reflected by the specular reflector (6) to the surface of the cooling plate (4), and the radiant heat is quickly absorbed by the cooling plate (4); Reduce the heat absorption of other components in the closed environment (3) except the cooling plate (4) and the specular reflector (6), and reduce the rising amplitude of the temperature inside the closed environment (3).

2. The method for accelerating the cooling rate of a closed environment according to claim 1, wherein A filter (9) is also provided at the air outlet of the blower (1).

3. The method for accelerating the cooling rate of a closed environment according to claim 1, wherein, The heat exchanger (8) is a finned heat exchanger.

4. The method for accelerating the cooling rate of a closed environment according to claim 1, wherein A temperature sensor is provided in the air duct (5).

5. The method for accelerating the cooling rate of a closed environment according to claim 2, characterized in that, It further includes a filter (9) monitoring process, which is carried out once every preset time interval. The current filter (9) monitoring process includes: Step 101: During the operation of the blower (1), obtain the key parameters on the inlet side of the filter (9) and the key parameters on the outlet side of the filter (9) within a preset time period 1 after the start of the current filter (9) monitoring process; the key parameters include: wind speed; Step 102: Determine the ratio of the average value of each key parameter on the outlet side of the filter (9) within the current preset time period to the average value of the corresponding key parameter on the inlet side of the filter (9) within the current preset time period; Step 103: Obtain the actual wind speeds in different cooling regions at the cooling element carrying system (2) within the current preset time period; Step 104: When any ratio obtained in Step 102 is not within the corresponding allowable range, alarm through alarm 1; Step 105: When the actual wind speeds in different cooling regions at the cooling element carrying system (2) are less than the minimum value of the corresponding required wind speed range, alarm through alarm 2.

6. The method for accelerating the cooling rate of a closed environment according to claim 5, characterized in that, The key parameters further include: air pressure; It further includes: Step 11: Determine whether to adjust the parameters of the blower (1) according to the filter (9) monitoring process, and determine the adjusted parameters of the blower (1) when adjustment is required.

7. The method for accelerating the cooling rate of a closed environment according to claim 6, wherein Step 11 includes: Step 111: When alarm 1 does not alarm and alarm 2 alarms, obtain the current required nitrogen gas flow rate range and the current required nitrogen gas pressure range of the cooling element carrying system (2) at the current nitrogen gas temperature at the air inlet of the blower (1); based on the ratio determined in the most recent filter (9) monitoring process, determine the corrected current required nitrogen gas flow rate range and the corrected current required nitrogen gas pressure range; Step 112: Obtain the rotation speed - theoretical wind speed curve and the rotation speed - theoretical wind pressure curve of the current blower (1); Step 113: Based on the corrected current required nitrogen flow rate range, the corrected current required nitrogen gas pressure range, and Step 112, determine the initial rotational speed that simultaneously meets the corrected current required nitrogen flow rate range and the corrected current required nitrogen gas pressure range, and determine the rotational speed - theoretical wind speed curve segment and the rotational speed - theoretical wind pressure curve segment of the current fan (1) corresponding to the initial rotational speed; Step 114: Screen several target initial rotational speeds from all the initial rotational speeds, and determine the comprehensive compliance coefficient of the air pressure and flow rate corresponding to each target initial rotational speed and its preset rotational speed range. Select the average value of M target initial rotational speeds whose comprehensive compliance coefficient is equal to the preset compliance coefficient and whose rotational speed difference from the fan (1) during the monitoring process of the nearest filter (9) is the smallest as the corrected rotational speed; Step 115: Control the working power of the current fan (1) so that the actual rotational speed is the corrected rotational speed for operation until Alarm 1 or Alarm 2 alarms.

8. The method for accelerating the cooling rate of a closed environment according to claim 1, wherein The cooling element bearing system (2) is located on the left side of the filter (9), and the filter (9) includes: A filter housing (91), a horizontal partition (92) is connected to the lower part inside the filter housing (91), and the horizontal partition (92) divides the filter housing (91) into an upper cavity (9101) and a lower cavity (9102). The horizontal partition (92) is provided with a vertical pipe 1 (93) and a vertical pipe 2 (94) at intervals left and right. The vertical pipe 1 (93) and the vertical pipe 2 (94) penetrate the horizontal partition (92) up and down. Control valves (95) are provided at the lower parts of the vertical pipe 1 (93) and the vertical pipe 2 (94). The upper end of the vertical pipe 2 (94) is closed and the upper end of the vertical pipe 2 (94) is close to the upper end of the upper cavity (9101). A plurality of horizontal pipes 1 (96) are connected in series up and down on the left side of the vertical pipe 2 (94). A vertical filter screen (97) is arranged in the upper cavity (9101). The vertical filter screen (97) is located on the left side of the vertical pipe 1 (93). The left end of the horizontal pipe 1 (96) contacts the right end of the vertical filter screen (97). The filter holes of the vertical filter screen (97) are in the horizontal direction from left to right. The left end of the vertical filter screen (97) contacts the right end of the horizontal pipe 2 (98). The left end of the horizontal pipe 2 (98) penetrates the left end of the filter housing (91). The left end of the horizontal pipe 2 (98) is connected to a spray head 1 (910). A horizontal pipe 3 (99) is arranged between adjacent horizontal pipes 2 (98) up and down. The horizontal pipe 3 (99) penetrates the left side of the filter housing (91). The left end of the horizontal pipe 2 (98) is connected to a spray head 2 (911).

9. The method for accelerating the cooling rate of a closed environment according to claim 8, wherein The method further includes: During the operation of the fan (1), determine the wind speed loss coefficient on the inlet side of the corresponding vertical filter screen (97) area of the working spray head in real time or at every preset time interval 3, and determine the average value of the wind speed loss coefficients corresponding to the working spray heads whose wind speed loss coefficients are less than the preset loss coefficient; During the air outlet monitoring process, perform an air outlet monitoring process once every preset time interval 2. The current air outlet monitoring process includes: Step 121: Obtain the fitting curve of the rotational speed of the fan (1) - the standard wind speed at the inlet side of the vertical filter screen (97) area corresponding to each first nozzle (910) under the condition that the control valve (95) on the left side of the fan (1) is closed and the control valve (95) on the right side is open; And obtain the fitting curve of the rotational speed of the fan (1) - the standard wind speed at the inlet side of the vertical filter screen (97) area corresponding to each second nozzle (911) under the condition that the control valve (95) on the right side of the fan (1) is closed and the control valve (95) on the left side is open; And obtain the target required air flow rate range of nitrogen for each cooling area of the cooling element carrying system (2); Step 122: During the operation of the fan (1), obtain the actual wind speed of different cooling areas at the cooling element carrying system (2) and the average rotational speed of the fan (1) within a preset time period two after the start of the current air outlet monitoring process; The upper and lower adjacent first nozzles (910) and second nozzles (911) form a set of nozzles, and each set of nozzles corresponds to a cooling area. The cooling element carrying system (2) is divided into multiple cooling areas at intervals up and down; Step 123: When the wind speed unevenness coefficient of all cooling areas is greater than the preset value or the wind speed in any cooling area is not within the required air flow speed range of the working nozzles corresponding thereto, alarm through Alarm Three; Step 124: When Alarm Three alarms, determine the adjusted rotational speed based on Step 121 and the average value of the wind speed loss coefficients corresponding to the working nozzles with the latest determined wind speed loss coefficient less than the preset loss coefficient, open the control valves (95) that are not working in Step 122, close the control valves (95) that are working in Step 122, and control the actual rotational speed of the fan (1) to be the adjusted rotational speed.

10. Device for accelerating the cooling rate of a closed environment, characterized in that, The device is applied to the method for accelerating the cooling speed of a closed environment as described in any one of Claims 1 - 9. The device includes: a fan (1), a heat exchanger (8), an air duct (5), a cooling plate (4), a specular reflector (6), and a filter (9).

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