Method and device for accelerating cooling speed in closed environment

Abstract

The present invention provides a method and device for accelerating the cooling rate of a closed environment, relating to the field of cooling. The method comprises: a fan blowing nitrogen through a cooling component support system to be cooled, the nitrogen absorbing heat and then cooling through a heat exchanger, and then returning to the fan through an air duct for recirculation. The method also comprises: installing a cooling plate in the closed environment with a blackness suitable for absorbing thermal radiation energy radiated by the cooling component during cooling, with a wavelength in the range of 2.5 microns to 3.5 microns; installing a mirror reflector on a wall surface in the closed environment where the cooling plate is not installed, so that the radiant heat is quickly absorbed by the cooling plate; reducing the amount of heat absorbed by other components in the closed environment other than the cooling plate and the mirror reflector, thereby reducing the temperature rise within the closed environment. The present invention adopts the installation of the above-mentioned cooling plate and the mirror reflector in the closed environment, so that the thermal radiation energy radiated by the cooling component is directionally reflected by the mirror reflector to the surface of the cooling plate, thereby reducing the temperature rise within the closed environment.

Description

Technical Field

[0001] The present invention relates to the field of cooling technology, and in particular to a method and device for accelerating the cooling speed of a closed environment. Background Art

[0002] In the cooling stage of the cooling parts in the closed environment of existing equipment, a fan is used to blow nitrogen through the cooling part carrier system that needs to be cooled. After absorbing heat, the nitrogen is cooled through the heat exchanger and then returns to the fan through the air duct for recirculation. This method has the disadvantage that the heat capacity of nitrogen is small and the heat absorption is very small. A large amount of heat is radiated into the closed environment, causing the temperature in the closed environment to rise a lot in the initial cooling stage of the cooling parts, which will accelerate the aging of the components in the closed environment and pose a safety hazard. Summary of the Invention

[0003] The present invention provides a method and device for accelerating the cooling speed of a closed environment, so as to solve the technical problems raised by the above-mentioned background technology.

[0004] To solve the above technical problems, the present invention discloses a method for accelerating the cooling speed of a closed environment, comprising: a fan blowing nitrogen through a cooling component carrying system to be cooled; the nitrogen absorbs heat and is cooled by a heat exchanger; and then returns to the fan through an air duct for recirculation; and further comprising:

[0005] A cooling plate with a blackness suitable for absorbing the thermal radiation energy radiated by the cooling element during cooling, with a wavelength in the range of 2.5 microns to 3.5 microns, is installed in the closed environment. A mirror reflector is installed on the wall surface in the closed environment where the cooling plate is not installed, so that the thermal radiation energy radiated by the cooling element is reflected directionally by the mirror reflector to the surface of the cooling plate, and the radiant heat is quickly absorbed by the cooling plate.

[0006] The heat absorbed by other components in the closed environment except the cooling plate and the mirror reflector is reduced, thereby reducing the temperature rise inside the closed environment.

[0007] Preferably, a filter is also provided at the air outlet of the fan.

[0008] Preferably, the heat exchanger is a finned heat exchanger.

[0009] Preferably, a temperature sensor is provided in the air duct.

[0010] Preferably, a filter monitoring process is further included, and the filter monitoring process is performed once every preset time interval. The current filter monitoring process includes:

[0011] Step 101: During the operation of the fan, key parameters of the filter inlet side and key parameters of the filter outlet side are obtained within a preset time period after the start of the current filter monitoring process; the key parameters include: wind speed;

[0012] Step 102: Determine the ratio of the average value of each key parameter at the filter outlet side within the current preset time period to the average value of the corresponding key parameter at the filter inlet side within the current preset time period;

[0013] Step 103: Obtaining actual wind speeds in different cooling areas of the cooling component carrying system within the current preset time period;

[0014] Step 104: When any of the ratios obtained in step 102 is not within the corresponding allowable range, an alarm is generated through an alarm device 1;

[0015] Step 105: When the actual wind speed of different cooling areas in the cooling component carrying system is less than the minimum value of the corresponding required wind speed range, an alarm is issued through the second alarm.

[0016] Preferably, the key parameters also include: air pressure;

[0017] The method further includes: Step 11: determining whether to adjust the fan parameters according to the filter monitoring process, and determining the adjusted fan parameters if adjustment is required.

[0018] Preferably, step 11 includes:

[0019] Step 111: When the first alarm is not sounding and the second alarm is sounding, obtaining a current required nitrogen flow rate range and a current required nitrogen pressure range at the current nitrogen temperature at the fan inlet of the cooling component carrier system; and determining a revised current required nitrogen flow rate range and a revised current required nitrogen pressure range based on a ratio determined during a most recent filter monitoring process;

[0020] Step 112: Obtain a current fan speed-theoretical wind speed curve and a fan speed-theoretical wind pressure curve;

[0021] Step 113: Based on the corrected current nitrogen flow rate requirement range and the corrected current nitrogen pressure requirement range and step 112, determine an initial speed that satisfies both the corrected current nitrogen flow rate requirement range and the corrected current nitrogen pressure requirement range, and determine a current fan speed-theoretical wind speed curve segment and a current fan speed-theoretical wind pressure curve segment corresponding to the initial speed;

[0022] Step 114: Filtering a number of target initial speeds from all initial speeds, and determining a comprehensive compliance coefficient between each target initial speed and the air pressure and flow rate corresponding to its preset speed range, selecting the average of M target initial speeds whose comprehensive compliance coefficients are equal to the preset compliance coefficients and whose difference with the fan speed in the most recent filter monitoring process is the smallest as the corrected speed;

[0023] Step 115: Control the current operating power of the fan so that the actual speed is the corrected speed and the fan operates until the first alarm or the second alarm sounds.

[0024] Preferably, the cooling element carrying system is located on the left side of the filter, and the filter includes:

[0025] The filter housing of the filter housing is connected to a horizontal partition, and the horizontal partition divides the filter housing into a lower cavity in the upper cavity, and the horizontal partition is provided with a vertical pipe 1 and a vertical pipe 2 at intervals on the left and right. The vertical pipe 1 and the vertical pipe 2 pass through the horizontal partition up and down, and a control valve is provided at the bottom of the vertical pipe 1 and the vertical pipe 2. The upper end of the vertical pipe 2 is closed and the upper end of the vertical pipe 2 is close to the upper end of the upper cavity. The left side of the vertical pipe 2 is connected to several horizontal pipes 1 at intervals up and down, and a vertical filter screen is provided in the upper cavity, and the vertical filter screen is located on the left side of the vertical pipe 1, and the left end of the horizontal pipe 1 contacts the right end of the vertical filter screen. The filter holes of the vertical filter screen are horizontal in the left and right directions, and the left end of the vertical filter screen contacts the right end of the horizontal pipe 2. The left end of the horizontal pipe 2 passes through the left end of the filter housing, and the left end of the horizontal pipe 2 is connected to the nozzle 1. A horizontal pipe 3 is provided between the upper and lower adjacent horizontal pipes 2, and the horizontal pipe 3 passes through the left side of the filter housing, and the left end of the horizontal pipe 2 is connected to the nozzle 2.

[0026] Preferably, the method further comprises:

[0027] During the operation of the fan, the wind speed loss coefficients on the inlet side of the vertical filter area corresponding to the working nozzles are determined in real time or at preset time intervals, and the average wind speed loss coefficients corresponding to the working nozzles whose wind speed loss coefficients are less than the preset loss coefficients are determined;

[0028] The air flow monitoring process is performed every preset time interval. The current air flow monitoring process includes:

[0029] Step 121: Obtain a fitting curve of the fan speed and the standard wind speed at the inlet side of the vertical filter area corresponding to each nozzle under the condition that the left control valve of the fan is closed and the right control valve is open;

[0030] And obtain the standard wind speed fitting curve of the fan speed - the inlet side of the vertical filter area corresponding to each nozzle 2 under the condition that the control valve on the right side of the fan is closed and the control valve on the left side is opened;

[0031] And obtain the target required air flow range of nitrogen for each cooling area of ​​the cooling component carrying system;

[0032] Step 122: obtaining the actual wind speed of different cooling areas of the cooling component carrying system and the average speed of the fan within a preset time period two after the current air outlet monitoring process starts during the fan operation process;

[0033] The upper and lower adjacent nozzles 1 and 2 form a nozzle group. Each nozzle group corresponds to a cooling area. The cooling component carrying system is divided into multiple cooling areas at intervals.

[0034] Step 123: When the wind speed unevenness coefficient of all cooling areas is greater than a preset value, or the wind speed of any cooling area is not within the required wind speed range of the corresponding working nozzle, an alarm is issued through the third alarm device;

[0035] Step 124: When the alarm sounds three times, the adjusted speed is determined based on the average value of the wind speed loss coefficient corresponding to the working nozzles in step 121 and the most recently determined wind speed loss coefficient being less than the preset loss coefficient, and the control valve that is not working in step 122 is opened, the control valve that is working in step 122 is closed, and the actual speed of the fan is controlled to be the adjusted speed.

[0036] The present invention also discloses a device for accelerating the cooling speed of a closed environment. The device is applied to the method for accelerating the cooling speed of a closed environment. The device includes: a fan, a heat exchanger, an air duct, a cooling plate, a mirror reflector, and a filter.

[0037] Compared with the prior art, the present invention has the following beneficial effects:

[0038] The present invention adopts a method of installing a cooling plate in a closed environment, the blackness of which is suitable for absorbing the thermal radiation energy radiated by the cooling component during cooling, with a wavelength in the range of 2.5 microns to 3.5 microns, and installing a mirror reflector on the wall surface in the closed environment where the cooling plate is not installed, so that the thermal radiation energy radiated by the cooling component is directionally reflected to the surface of the cooling plate through the mirror reflector, and the radiant heat is quickly absorbed by the cooling plate, so that the heat absorption of other components in the closed environment except the cooling plate and the mirror reflector is reduced, thereby reducing the temperature rise inside the closed environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction is given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0040] Figure 1 A top view of the present invention;

[0041] Figure 2 It is a front view of the present invention;

[0042] Figure 3 It is a front view of an embodiment of the present invention.

[0043] In the figure: 1. Fan; 2. Cooling component carrying system; 3. Closed environment; 4. Cooling plate; 5. Air duct; 6. Mirror reflector; 7. Wafer; 8. Heat exchanger; 9. Filter; 91. Filter housing; 9101. Upper cavity; 9102. Lower cavity; 92. Horizontal partition; 93. Vertical pipe 1; 94. Vertical pipe 2; 95. Control valve; 96. Horizontal pipe 1; 97. Vertical filter; 98. Horizontal pipe 2; 99. Horizontal pipe 3; 910. Nozzle 1; 911. Nozzle 2. DETAILED DESCRIPTION

[0044] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0045] Example 1:

[0046] The purpose of the present invention is to provide a method for accelerating the cooling rate of a closed environment. Figure 1-Figure 2 As shown, the process includes: a fan 1 blows nitrogen through the cooling component carrier system 2 that needs to be cooled (mainly cooling the cooling components of the cooling component carrier system 2), the nitrogen absorbs heat, cools through the heat exchanger 8, and then returns to the fan 1 through the air duct 5 for recirculation, and also includes:

[0047] A cooling plate 4 is installed in the closed environment 3, and its blackness is suitable for absorbing the thermal radiation energy radiated by the cooling element during cooling, with a wavelength in the range of 2.5 microns to 3.5 microns. A mirror reflector 6 is installed on the wall surface in the closed environment 3 where the cooling plate 4 is not installed, so that the thermal radiation energy radiated by the cooling element is reflected directionally by the mirror reflector 6 to the surface of the cooling plate 4, and the radiated heat is quickly absorbed by the cooling plate 4.

[0048] The amount of heat absorbed by components other than the cooling plate 4 and the mirror reflector 6 in the closed environment 3 is reduced, thereby lowering the temperature rise within the closed environment 3 .

[0049] A filter 9 is also provided at the air outlet of the fan 1 .

[0050] The heat exchanger 8 is a fin-type heat exchanger.

[0051] The air duct 5 is provided with a temperature sensor for monitoring the nitrogen temperature in the air duct 5 and giving an alarm when the nitrogen temperature is not within the corresponding required nitrogen temperature range.

[0052] The present invention also discloses a device for accelerating the cooling speed of a closed environment. The device is applied to the method for accelerating the cooling speed of a closed environment. The device includes: a fan 1, a heat exchanger 8, an air duct 5, a cooling plate 4, a mirror reflection plate 6, and a filter 9.

[0053] The beneficial effects of the above technical solution are:

[0054] The present invention adopts a method of installing a cooling plate 4 in a closed environment 3, the blackness of which is suitable for absorbing the thermal radiation energy radiated by the cooling component during cooling, with a wavelength in the range of 2.5 microns to 3.5 microns, and installing a mirror reflection plate 6 on the wall surface in the closed environment 3 where the cooling plate 4 is not installed, so that the thermal radiation energy radiated by the cooling component is directionally reflected to the surface of the cooling plate 6 through the mirror reflection plate 6, and the radiant heat is quickly absorbed by the cooling plate 4, so that the heat absorption of other components in the closed environment 3 except the cooling plate 4 and the mirror reflection plate 6 is reduced, thereby reducing the temperature rise inside the closed environment 3.

[0055] Example 2, based on Example 1, further includes a filter 9 monitoring process, which is performed once every preset time interval. The current filter 9 monitoring process includes:

[0056] Step 101: During the operation of the fan 1, key parameters of the filter 9 inlet side and key parameters of the filter 9 outlet side are obtained within a preset time period after the start of the current filter 9 monitoring process; the key parameters include: wind speed;

[0057] Step 102: Determine the ratio of the average value of each key parameter on the outlet side of the filter 9 within the current preset time period to the average value of the corresponding key parameter on the inlet side of the filter 9 within the current preset time period (the ratio of the average value of each key parameter on the outlet side of the filter 9 within the current preset time period to the average value of the key parameter on the inlet side of the filter 9 within the current preset time period);

[0058] Step 103: Obtaining actual wind speeds in different cooling areas of the cooling component carrying system 2 within the current preset time period;

[0059] Step 104: When any of the ratios obtained in step 102 is not within the corresponding allowable range, an alarm is generated through an alarm device 1;

[0060] Step 105: When the actual wind speed of different cooling areas at the cooling component carrying system 2 is less than the minimum value of the corresponding required wind speed range, an alarm is issued through the second alarm.

[0061] The beneficial effects of the above technical solution are:

[0062] By determining the ratio of the average value of each key parameter on the outlet side of the filter 9 within the current preset time length to the average value of the corresponding key parameter on the inlet side of the filter 9 within the current preset time length, when the ratio deviates from the allowable range (such as outlet wind speed / inlet wind speed <0.8, indicating that the blockage has caused the wind speed to attenuate aggravated), alarm 1 is triggered.

[0063] When the actual wind speed in different cooling areas of the cooling element carrier system 2 is less than the minimum value of the corresponding required wind speed range (e.g., <2m / s, which cannot meet the cooling requirements of wafer 7), alarm 2 is triggered to avoid local overheating caused by insufficient wind speed.

[0064] Example 3, based on Example 2, Figure 2 As shown, the method further includes: step 11: determining whether to adjust the parameters of the fan 1 according to the monitoring process of the filter 9, and determining the adjusted parameters of the fan 1 if adjustment is required;

[0065] Step 11 includes:

[0066] Step 111: When the alarm 1 does not sound and the alarm 2 sounds, obtain the current required nitrogen flow rate range of the cooling component carrier system 2 at the current nitrogen temperature at the air inlet of the fan 1 And the current required nitrogen pressure range Based on the ratio determined by the most recent filter 9 monitoring process, determine the corrected current demand nitrogen flow rate range And the corrected current required nitrogen pressure range ;

[0067] The current required nitrogen flow rate range of the cooling element carrying system 2 at the current nitrogen temperature at the air inlet of the fan 1 is And the current demand nitrogen pressure range The following formula is used to obtain the current nitrogen flow rate range that satisfies the heat dissipation requirement of the wafer 7 of the cooling element carrier system 2 (which may be the temperature when the wafer 7 enters the closed environment 3) and the heat dissipation requirement, and the current nitrogen temperature at the air inlet of the fan 1, based on heat balance calculation or experiment, to determine the current nitrogen flow rate range that satisfies the heat dissipation requirement of the wafer 7 of the cooling element carrier system 2. And the current demand nitrogen pressure range ;

[0068] Current required nitrogen flow rate range And the current demand nitrogen pressure range Required parameters for the air outlet of the filter;

[0069] in ; ; 、 are the ratio corresponding to the flow rate and the ratio corresponding to the air pressure determined during the most recent monitoring process of the filter 9;

[0070] Step 112: Obtain a current speed-theoretical wind speed curve and a current speed-theoretical wind pressure curve of fan 1. Based on the initially used fan 1, adjust the speed of fan 1, detect the wind speed and wind pressure at the air outlet of fan 1, and construct the current speed-theoretical wind speed curve and the current speed-theoretical wind pressure curve of fan 1 (obtained through testing of the initially used fan 1 and filter 9).

[0071] Step 113: Based on the corrected current required nitrogen flow rate range and the corrected current required nitrogen pressure range and step 112, determine the initial speed (speed of fan 1) that satisfies both the corrected current required nitrogen flow rate range and the corrected current required nitrogen pressure range, and determine the current speed-theoretical wind speed curve segment and the current speed-theoretical wind pressure curve segment of fan 1 corresponding to the initial speed;

[0072] Step 114: Filter a number of target initial speeds from all initial speeds (based on a preset rule, such as integers), determine a comprehensive compliance coefficient between each target initial speed and the air pressure and flow rate corresponding to its preset speed range, and select the average of M (3-5) target initial speeds whose comprehensive compliance coefficients are equal to the preset compliance coefficient (1) and whose difference from the speed of the fan 1 during the most recent filter 9 monitoring process is the smallest as the corrected speed;

[0073] The preset speed range corresponding to the i-th target initial speed is obtained based on the following method:

[0074] According to the current unit time speed ratio attenuation value setting of the fan 1, the speed ratio is: the current actual speed of the fan 1 at the corresponding working power ÷ the current initial theoretical speed of the fan 1 at the corresponding working power, and the current unit time speed ratio attenuation value Y is determined (the difference between the last determined speed ratio and the current determined speed ratio ÷ the time interval between the current determined speed ratio and the last determined speed ratio); in the present invention, an alarm is triggered when the speed ratio is abnormal;

[0075] but ;

[0076] is the preset speed range corresponding to the i-th target initial speed, If any of the speeds satisfies the corresponding speed of the current fan 1 speed-theoretical wind speed curve segment and the current fan 1 speed-theoretical wind pressure curve segment, then the comprehensive compliance coefficient of the i-th target initial speed and the air pressure and flow rate corresponding to its preset speed range is 1, otherwise it is 0; The theoretical adjustment time interval for adjusting the speed of fan 1, For The corresponding speed range (such as ), under the condition of not adjusting the working power, the historical duration of the speed drop value being greater than the preset speed value; the speed unit is (rpm); the value of O is 1-5 rpm; is the i-th target speed.

[0077] Step 115: Control the current operating power of the fan 1 so that the actual speed is the corrected speed and the fan 1 operates until the first alarm or the second alarm sounds.

[0078] In this embodiment, the filter 9 may only include: a filter shell 91, a vertical filter screen 97 is set in the filter shell 91, the air inlet of the filter shell 91 is connected to the air outlet of the fan 1, and the air outlet is set on the left side of the filter shell 91 or is fully open; this embodiment can also be used for the following filter 9, which is based on dynamic adjustment during the use of the vertical filter screen 97.

[0079] The beneficial effects of the above technical solution are:

[0080] Through thermal balance calculation and filter 9 monitoring data, the corrected current required nitrogen flow rate range and the corrected current required nitrogen pressure range are dynamically determined. Combined with the current fan 1 speed-theoretical wind speed curve and the fan 1 speed-theoretical wind pressure curve, the nitrogen supply is precisely regulated to ensure uniform and stable heat dissipation of the wafer 7, avoid processing defects caused by abnormal temperature (such as thermal stress deformation and process parameter drift), and improve product yield.

[0081] Based on the "speed ratio attenuation value," the system calculates a preset speed range and selects the target speed based on the comprehensive compliance coefficient. This system proactively adapts to the performance degradation of Fan 1 (such as impeller wear and motor efficiency) caused by long-term operation. This ensures nitrogen supply meets demand while preventing fan overload or inefficiency, extending equipment life and reducing operation and maintenance costs.

[0082] By adjusting the required range and selecting the optimal speed, while ensuring heat dissipation for wafer 7, the system prioritizes speeds with a small difference from historical speeds and a high overall compliance coefficient, thus reducing power waste in fan 1. Furthermore, the system optimizes control logic by leveraging the "historical duration of speed reduction without power adjustment" to avoid ineffective power consumption and achieve system-level energy savings.

[0083] Example 4, based on any one of Examples 1-3, Figure 3 As shown, the cooling element carrying system 2 is located on the left side of the filter 9, and the filter 9 includes:

[0084] The filter housing 91 has a horizontal partition 92 connected to the lower part of the filter housing 91. The horizontal partition 92 divides the filter housing 91 into a lower cavity 9102 in the upper cavity 9101. Vertical pipes 1 93 and 2 94 are arranged at intervals on the left and right of the horizontal partition 92. The vertical pipes 1 93 and 2 94 pass through the horizontal partition 92 from top to bottom. Control valves 95 are arranged at the lower parts of the vertical pipes 1 93 and 2 94. The upper end of the vertical pipe 2 94 is closed and the upper end of the vertical pipe 2 94 is close to the upper end of the upper cavity 9101. The left side of the vertical pipe 2 94 is connected to a plurality of horizontal pipes 1 96 at intervals on the upper and lower sides. A vertical filter screen 97 is provided in the cavity 9101, and the vertical filter screen 97 is located on the left side of the vertical pipe 1 93. The left end of the horizontal pipe 1 96 contacts the right end of the vertical filter screen 97. The filter holes of the vertical filter screen 97 are in the horizontal direction left and right. The left end of the vertical filter screen 97 contacts the right end of the horizontal pipe 2 98. The left end of the horizontal pipe 2 98 passes through the left end of the filter housing 91. The left end of the horizontal pipe 2 98 is connected to the nozzle 1 910. A horizontal pipe 3 99 is provided between the upper and lower adjacent horizontal pipes 2 98. The horizontal pipe 3 99 passes through the left side of the filter housing 91. The left end of the horizontal pipe 2 98 is connected to the nozzle 2 911.

[0085] The beneficial effects of the above technical solution are:

[0086] Through the combined design of vertical pipe 1 93, vertical pipe 2 94, and control valve 95, when nozzle 2 911 experiences an air output abnormality (such as blockage, insufficient pressure), or when the vertical filter 97 area corresponding to nozzle 2 911 becomes clogged, the nitrogen path can be quickly switched to avoid the inability to reliably cool the currently cooling wafer 7 due to the need to prepare for replacing the vertical filter 97. Close the control valve 95 corresponding to vertical pipe 1 93, and open the control valve 95 corresponding to vertical pipe 2 94, allowing nitrogen to pass through horizontal pipe 1 96 and the vertical filter 97 in the area corresponding to horizontal pipe 1 96, while using nozzle 1 910 to maintain nitrogen output. This mechanism avoids system shutdowns caused by nozzle 2 911 failure or clogged vertical filter 97 area corresponding to nozzle 2 911, ensuring the continuity of nitrogen supply, and is particularly suitable for scenarios with extremely high requirements for gas supply stability.

[0087] Example 5, based on Example 4, Figure 3 As shown, the method further includes:

[0088] During the operation of the fan 1, the wind speed loss coefficient of the inlet side of the vertical filter 97 area corresponding to the working nozzle (nozzle 1 910 or nozzle 2 911) is determined in real time or at every preset time interval, and the average wind speed loss coefficient of the nozzles whose wind speed loss coefficient is less than the preset loss coefficient is determined;

[0089] The air flow monitoring process is performed every preset time interval. The current air flow monitoring process includes:

[0090] Step 121: Obtain a standard wind speed fitting curve (obtained based on the initial filter 9 and fan 1 based on the test) between the speed of fan 1 and the inlet side of the vertical filter 97 area corresponding to each nozzle 1 910 under the condition that the control valve 95 on the left side of fan 1 is closed and the control valve 95 on the right side of fan 1 is open.

[0091] And obtain the standard wind speed fitting curve of the fan 1 speed and the inlet side of the vertical filter 97 area corresponding to each nozzle 2 911 under the condition that the control valve 95 on the right side of the fan 1 is closed and the control valve 95 on the left side is open (based on the filter 9 and the fan 1 initially used and obtained through experiments);

[0092] and obtaining a target required nitrogen air flow range for each cooling area of ​​the cooling component carrier system 2 (determined based on a heat dissipation model or heat dissipation test to meet the heat dissipation requirements of the wafer 7);

[0093] Step 122: obtaining the actual wind speed of different cooling areas of the cooling component carrying system 2 and the average speed of the fan 1 during the preset time period after the current air outlet monitoring process starts during the operation of the fan 1;

[0094] The nozzle 1 910 and the nozzle 2 911 adjacent to each other form a nozzle group. Each nozzle group corresponds to a cooling area. The cooling element carrying system 2 is divided into multiple cooling areas at intervals.

[0095] Step 123: When the wind speed unevenness coefficient of all cooling zones (which is calculated as the standard deviation of the average value of the actual wind speeds of all cooling zones obtained in step 122 divided by the arithmetic mean of the average value of the actual wind speeds of all cooling zones obtained in step 122) is greater than a preset value (e.g., 0.1), and the wind speed of any cooling zone is not within the required wind speed range of the corresponding working nozzle (nozzle 1 910 or nozzle 2 911), an alarm is issued through the third alarm to remind the user to open the non-currently working control valve 95 (the non-currently working control valve 95 in step 122);

[0096] For each cooling area, first calculate the average value of the corresponding actual wind speed;

[0097] Step 124: When the alarm sounds three times, the adjusted speed is determined based on the average value of the wind speed loss coefficient corresponding to the working nozzles whose wind speed loss coefficient is less than the preset loss coefficient (such as 0.1) in step 121 and the latest determined wind speed loss coefficient, and the control valve 95 that is not working in step 122 is opened, the control valve 95 that is working in step 122 is closed, and the actual speed of the fan 1 is controlled to be the adjusted speed.

[0098] The target required air flow range for nitrogen (nitrogen temperature is fixed and controlled by the air temperature control device at the air inlet of fan 1) in the current cooling area ;

[0099] The target required wind speed range of nozzle 1910 corresponding to the current cooling area is:

[0100] ;

[0101] The target required wind speed range of nozzle 2 911 corresponding to the current cooling area is:

[0102] ;

[0103] in, is the inner diameter of the horizontal pipe 98; is the inner diameter of horizontal pipe 399;

[0104] The current wind speed loss coefficient U at the inlet side of the vertical filter 97 area corresponding to the current nozzle 1 910 is :

[0105] is: the average wind speed detected value in the current time period at the inlet side of the vertical filter 97 area corresponding to the current nozzle 1 910 (working in the current time period) at the current speed of the fan 1;

[0106] The standard wind speed fitting curve at the inlet side of the vertical filter 97 area corresponding to the current nozzle 910 is: the speed of the fan 1 when the left control valve 95 is closed and the right control valve 95 is open, and the corresponding standard wind speed at the current speed of the fan 1;

[0107] When the control valve 95 that is not currently operating in step 122 is the right control valve 95, In the step 2, multiple wind speeds are selected according to the selection rules (selected according to the preset rules, or integer values ​​can be selected), and the reliable value corresponding to each selected wind speed is determined;

[0108] ; is the reliable value of the mth selected wind speed; is the mth selected wind speed value; when all nozzles 910 are in the corresponding standard wind speed fitting curve The standard deviation of the corresponding fan 1 speed is less than the preset standard deviation, then The value is 1, otherwise The value is 0;

[0109] Determine the minimum N (e.g., 3) wind speeds with a reliability value equal to 1. The average wind speed is selected in the standard wind speed fitting curve corresponding to all nozzles 910 (the control valve 95 working in step 122 is the control valve on the left). The maximum value of the speed of fan 1 is the adjusted speed.

[0110] The beneficial effects of the above technical solution are:

[0111] By monitoring and calculating the wind speed loss coefficient of the working nozzle (nozzle 1 910 or nozzle 2 911), combined with the preset target demand air flow range of nitrogen in each cooling area of ​​the cooling component carrier system 2, the speed of the fan 1 and the state of the control valve 95 are dynamically adjusted to ensure that the wind speed in different cooling areas is uniform and meets the wafer processing requirements, avoid uneven cooling of the wafer 7 due to abnormal wind speed, thermal stress or processing defects, and improve product yield.

[0112] When the wind speed unevenness coefficient of all cooling areas (taken as the standard deviation of the average value of the actual wind speeds of all cooling areas obtained in step 122 ÷ the arithmetic mean of the average value of the actual wind speeds of all cooling areas obtained in step 122) is greater than a preset value (such as 0.1), and the wind speed of any cooling area is not within any of the required wind speed ranges for the working nozzles (nozzle one 910 or nozzle two 911), an alarm is issued through the third alarm to remind you to open the control valve 95 that is not currently working (the control valve 95 that is not currently working in step 122), and the speed of the fan 1 is automatically adjusted and the control valve 95 is switched based on the wind speed loss coefficient and the standard wind speed fitting curve, without the need for frequent manual intervention, thereby ensuring continuous and stable operation of the system and reducing operation and maintenance costs.

[0113] The arithmetic mean of the average values ​​of the actual wind speeds of all cooling areas obtained in step 122 is specifically as follows: when the average value of the actual wind speed of the first cooling area obtained in step 122 is 20 m / s, when the average value of the actual wind speed of the second cooling area obtained in step 122 is 21 m / s, when the average value of the actual wind speed of the third cooling area obtained in step 122 is 20 m / s, when the average value of the actual wind speed of the fourth cooling area obtained in step 122 is 21 m / s, when the average value of the actual wind speed of the fifth cooling area obtained in step 122 is 20 m / s, then the arithmetic mean of the average values ​​of the actual wind speeds of all cooling areas obtained in step 122 is m / s;

[0114] The rotation speed is adjusted based on dynamic calculations such as the wind speed loss coefficient and the standard wind speed fitting curve. Under the premise of meeting the wafer cooling requirements, the fan "over-operation" is avoided to achieve energy saving and consumption reduction, and the standard deviation of the wind speed on the inlet side of the vertical filter 97 area corresponding to the nozzle 910 is ensured not to be too large. At the same time, the cooling requirements of different nozzle groups are flexibly adapted by switching the control valve 95, thereby improving the overall efficiency of the system.

[0115] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. Methods for accelerating the cooling rate of a closed environment include: The fan (1) blows nitrogen through the cooling component carrying system (2) to be cooled. The nitrogen absorbs heat and is cooled by the heat exchanger (8). The nitrogen then returns to the fan (1) through the air duct (5) for recirculation. The invention is characterized in that it also includes: A cooling plate (4) having a blackness suitable for absorbing heat radiation energy radiated by the cooling element during cooling, with a wavelength in the range of 2.5 microns to 3.5 microns, is installed in the closed environment (3); a mirror reflection plate (6) is installed on a wall surface in the closed environment (3) where the cooling plate (4) is not installed, so that the heat radiation energy radiated by the cooling element is directionally reflected by the mirror reflection plate (6) to the surface of the cooling plate (4), and the radiated heat is quickly absorbed by the cooling plate (4); The amount of heat absorbed by the components other than the cooling plate (4) and the mirror reflector (6) in the closed environment (3) is reduced, thereby reducing the temperature rise within the closed environment (3); A filter (9) is also provided at the air outlet of the fan (1); The cooling element carrying system (2) is located on the left side of the filter (9), and the filter (9) includes: A filter housing (91) is provided. The lower portion of the filter housing (91) is connected to a horizontal partition (92). The horizontal partition (92) divides the filter housing (91) into a lower cavity (9102) in an upper cavity (9101). Vertical pipes 1 (93) and 2 (94) are arranged at intervals on the left and right sides of the horizontal partition (92). The vertical pipes 1 (93) and 2 (94) pass through the horizontal partition (92) from top to bottom. Control valves (95) are arranged at the lower portions of the vertical pipes 1 (93) and 2 (94). The upper end of the vertical pipe 2 (94) is closed and the upper end of the vertical pipe 2 (94) is close to the upper end of the upper cavity (9101). The left side of the vertical pipe 2 (94) is connected to a plurality of horizontal pipes 1 (96) at intervals from top to bottom. A vertical filter screen (97) is provided in the upper cavity (9101), and the vertical filter screen (97) is located on the left side of the vertical pipe 1 (93). The left end of the horizontal pipe 1 (96) contacts the right end of the vertical filter screen (97). The filter holes of the vertical filter screen (97) are in the horizontal direction. The left end of the vertical filter screen (97) contacts the right end of the horizontal pipe 2 (98). The left end of the horizontal pipe 2 (98) passes through the left end of the filter housing (91). The left end of the horizontal pipe 2 (98) is connected to the nozzle 1 (910). A horizontal pipe 3 (99) is provided between the upper and lower adjacent horizontal pipes 2 (98). The horizontal pipe 3 (99) passes through the left side of the filter housing (91). The left end of the horizontal pipe 2 (98) is connected to the nozzle 2 (911).

2. The method for accelerating the cooling rate of a closed environment according to claim 1, characterized in that: The heat exchanger (8) is a fin-type heat exchanger.

3. The method for accelerating the cooling rate of a closed environment according to claim 1, characterized in that: The air duct (5) is provided with a temperature sensor.

4. The method for accelerating the cooling rate of a closed environment according to claim 1, characterized in that: The method further includes a filter (9) monitoring process, which is performed once every preset time interval. The current filter (9) monitoring process includes: Step 101: During the operation of the fan (1), key parameters of the filter (9) inlet side and key parameters of the filter (9) outlet side are obtained within a preset time period after the start of the current filter (9) monitoring process; the key parameters include: wind speed; Step 102: determining the ratio of the average value of each key parameter on the outlet side of the filter (9) within the current preset time period to the average value of the corresponding key parameter on the inlet side of the filter (9) within the current preset time period; Step 103: obtaining the actual wind speeds of different cooling areas of the cooling element carrying system (2) within the current preset time period; Step 104: When any of the ratios obtained in step 102 is not within the corresponding allowable range, an alarm is generated through an alarm device 1; Step 105: When the actual wind speed of different cooling areas at the cooling element carrying system (2) is less than the minimum value of the corresponding required wind speed range, an alarm is sounded through the second alarm.

5. The method for accelerating the cooling rate of a closed environment according to claim 4, characterized in that: The key parameters also include: air pressure; The method further comprises: step 11: determining whether to adjust the parameters of the fan (1) according to the monitoring process of the filter (9), and determining the adjusted parameters of the fan (1) when adjustment is required.

6. The method for accelerating the cooling rate of a closed environment according to claim 5, characterized in that: Step 11 includes: Step 111: When the first alarm does not sound and the second alarm sounds, the current required nitrogen flow rate range and the current required nitrogen pressure range of the cooling component carrier system (2) at the current nitrogen temperature at the air inlet of the fan (1) are obtained; based on the ratio determined in the most recent filter (9) monitoring process, the corrected current required nitrogen flow rate range and the corrected current required nitrogen pressure range are determined; Step 112: Obtain the current speed-theoretical wind speed curve of the fan (1) and the speed-theoretical wind pressure curve of the fan (1); Step 113: Based on the corrected current nitrogen flow rate range and the corrected current nitrogen pressure range and step 112, determine the initial speed that satisfies both the corrected current nitrogen flow rate range and the corrected current nitrogen pressure range, and determine the speed-theoretical wind speed curve segment and the speed-theoretical wind pressure curve segment of the current fan (1) corresponding to the initial speed; Step 114: Filtering a number of target initial speeds from all initial speeds, and determining a comprehensive compliance coefficient between each target initial speed and the air pressure and flow rate corresponding to its preset speed range, selecting the average of M target initial speeds whose comprehensive compliance coefficients are equal to the preset compliance coefficients and whose difference with the speed of the fan (1) during the nearest filter (9) monitoring process is the smallest as the corrected speed; Step 115: Control the current working power of the fan (1) so that the actual speed is the corrected speed and the fan operates until the first alarm or the second alarm sounds.

7. The method for accelerating the cooling rate of a closed environment according to claim 6, characterized in that: The method further comprises: During the operation of the fan (1), the wind speed loss coefficient of the inlet side of the vertical filter (97) area corresponding to the working nozzle is determined in real time or at every preset time interval, and the average value of the wind speed loss coefficients corresponding to the working nozzles whose wind speed loss coefficients are less than the preset loss coefficient is determined; The air flow monitoring process is performed every preset time interval. The current air flow monitoring process includes: Step 121: Obtain a standard wind speed fitting curve of the fan (1) speed and the inlet side of the vertical filter (97) area corresponding to each nozzle (910) under the condition that the left control valve (95) of the fan (1) is closed and the right control valve (95) is opened; and obtaining a standard wind speed fitting curve of the fan (1) speed and the vertical filter (97) area inlet side corresponding to each nozzle 2 (911) under the condition that the control valve (95) on the right side of the fan (1) is closed and the control valve (95) on the left side is opened; and obtaining a target required air flow range of nitrogen for each cooling area of ​​the cooling component carrying system (2); Step 122: obtaining the actual wind speed of different cooling areas at the cooling component carrying system (2) and the average speed of the fan (1) within a preset time period two after the current air outlet monitoring process starts during the operation of the fan (1); The nozzle head 1 (910) and the nozzle head 2 (911) adjacent to each other in the upper and lower parts form a nozzle head group, each nozzle head group corresponds to a cooling area, and the cooling element carrying system (2) is divided into multiple cooling areas in the upper and lower parts; Step 123: When the wind speed unevenness coefficient of all cooling areas is greater than a preset value, or the wind speed of any cooling area is not within the required wind speed range of the corresponding working nozzle, an alarm is issued through the third alarm device; Step 124: When the alarm sounds three times, the adjusted speed is determined based on the average value of the wind speed loss coefficient corresponding to the working nozzle whose wind speed loss coefficient is less than the preset loss coefficient and the latest determined wind speed loss coefficient, and the control valve (95) that is not working in step 122 is opened, the control valve (95) that is working in step 122 is closed, and the actual speed of the control fan (1) is controlled to be the adjusted speed.

8. A device for accelerating the cooling rate of a closed environment, characterized in that: The device is applied to the method for accelerating the cooling speed of a closed environment as described in any one of claims 1 to 7, and comprises: a fan (1), a heat exchanger (8), an air duct (5), a cooling plate (4), a mirror reflector (6), and a filter (9).

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