A four-mass gyroscope structure

Abstract

The application provides a four-mass gyroscope structure, which comprises a base and four identical substructures, the four substructures are symmetrically arranged in pairs, and the four substructures are connected through a detection reverse double-lever mechanism, the detection reverse double-lever mechanism comprises two levers arranged in the driving direction, two ends of each lever are connected with two substructures adjacent in the driving direction respectively, and the two levers are connected through an elastic connecting piece in the middle. The four symmetrically arranged substructures are connected through the detection reverse double-lever mechanism, so that the detection direction works in the reverse mode first, the common mode error signal is eliminated, there is no low-order interference mode in the detection direction, and the environmental adaptability of the gyroscope is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of inertial sensors, and in particular relates to a four-mass gyroscope structure. Background Art

[0002] Inertial sensors include accelerometers, gyroscopes, and their single-, dual-, and tri-axis combinations. Accelerometers are used to detect the acceleration signals of an object in the three independent axes of the carrier coordinate system, and gyroscopes are used to detect the angular velocity signals of the carrier relative to the navigation coordinate system. By measuring the angular velocity and acceleration of an object in three-dimensional space, they can accurately characterize the object's posture and have very important application value in navigation.

[0003] In existing four-mass gyroscope structures, the coupling method between different mass blocks is generally elastic beam connection, which enables the movement of the mass blocks to be linked. However, this coupling method between different mass blocks causes the same-direction interference mode to appear before the reverse working mode. The existence of the same-direction interference mode is not conducive to improving the environmental adaptability of the gyroscope. Summary of the Invention

[0004] The purpose of the present invention is to provide a four-mass gyroscope structure that can at least solve some of the defects in the prior art.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] A four-mass gyroscope structure includes a base and four substructures with the same structure. The four substructures are symmetrically arranged in pairs and connected by a detection reverse double lever mechanism. The detection reverse double lever mechanism includes two levers extending along the driving direction, with the two ends of each lever respectively connected to two adjacent substructures in the driving direction, and the middle of the two levers is connected by an elastic connector.

[0007] Furthermore, the lever includes two rod parts and a connecting part connecting the two rod parts, the connecting part is anchored on the base, the ends of the two rod parts are respectively connected to two substructures, and the connecting parts of the two levers are connected by an elastic connecting piece.

[0008] Furthermore, a driving coupling mechanism is connected between two adjacent substructures along the driving direction, and a reverse link mechanism is connected between two adjacent substructures along the detecting direction.

[0009] Furthermore, the driving coupling mechanism is a folding beam structure extending and folding along the driving direction, and two ends of the folding beam structure are respectively connected to two adjacent substructures along the driving direction.

[0010] Furthermore, the reverse linkage mechanism includes a linkage body, both ends of the linkage body are connected to the substructures on the corresponding sides through linkage connecting springs, and the middle part of the linkage body is anchored to the base through a linkage swing spring.

[0011] Furthermore, the substructure includes a sensitive mass block, a driving component and a detection component, the driving component is distributed in the driving direction of the sensitive mass block, the detection component is distributed in the detection direction of the sensitive mass block, and is connected to the sensitive mass block through a vibration decoupling elastic component; each of the detection components is arranged between two adjacent sensitive mass blocks along the detection direction, and each of the detection components is connected to the detection reverse double lever mechanism.

[0012] Furthermore, the driving component includes a driving capacitor and a driving detection capacitor respectively distributed at both ends of the driving direction of the sensitive mass block. The driving capacitor and the driving detection capacitor are both connected to the sensitive mass block through a driving vibration transfer beam, and the driving detection capacitors of the two adjacent substructures along the driving direction are connected through a driving coupling mechanism.

[0013] Furthermore, the driving capacitor includes a first driving frame and at least one group of driving dynamic comb teeth and at least one group of driving fixed comb teeth arranged in the first driving frame; the driving detection capacitor includes a second driving frame and at least one group of driving detection dynamic comb teeth and at least one group of driving detection fixed comb teeth arranged in the second driving frame; the middle parts of the first driving frame and the second driving frame are anchored to the base through a first vibration elastic member, and the ends of the first driving frame and the second driving frame are connected to the sensitive mass block through a driving vibration transfer beam.

[0014] Furthermore, the detection component includes a detection capacitor frame and at least one group of detection movable comb teeth and at least one group of detection fixed comb teeth arranged in the detection capacitor frame; the side of the detection capacitor frame close to the sensitive mass block is connected to the sensitive mass block through a vibration decoupling elastic component, and the side of the detection capacitor frame away from the sensitive mass block is connected to the detection reverse double lever mechanism, and the two ends of the detection capacitor frame are anchored to the base through a second vibration elastic member.

[0015] Furthermore, the substructure also includes an orthogonal correction structure for compensating for the orthogonal stiffness coupling error. The orthogonal correction structure is symmetrically arranged in two groups along the driving direction. The orthogonal correction structure includes orthogonal movable comb teeth and orthogonal fixed comb teeth. The orthogonal fixed comb teeth are anchored on the base, and the orthogonal movable comb teeth are connected to the sensitive mass block.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] The four-mass gyroscope structure provided by the present invention adopts a design in which four symmetrically arranged substructures are connected by a detection reverse double-lever mechanism, so that the detection direction first works in the reverse mode, eliminating the common-mode error signal. At the same time, there is no low-order interference mode in the detection direction, thereby improving the environmental adaptability of the gyroscope.

[0018] The present invention will be described in further detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a schematic diagram of the four-mass gyroscope structure of the present invention;

[0020] Figure 2 is a schematic diagram of a single substructure in the four-mass gyroscope structure of the present invention;

[0021] Figure 3 Schematic diagram of a detection reverse double lever mechanism in a four-mass gyroscope structure of the present invention;

[0022] Figure 4 yes Figure 3 Enlarged view of middle part I;

[0023] Figure 5 Schematic diagram of the vibration of the sensitive mass block of the four-mass gyroscope structure of the present invention along the driving direction;

[0024] Figure 6 It is a schematic diagram of the vibration of the sensitive mass block of the four-mass gyroscope structure of the present invention along the detection direction.

[0025] Explanation of the accompanying drawings: 1. Substructure; 2. Detection reverse double-lever mechanism; 3. Reverse connecting rod mechanism; 4. Drive coupling mechanism; 5. Sensitive mass block; 6. Drive vibration transfer beam; 7. First vibration elastic member; 8. First drive frame; 9. Drive movable comb teeth; 10. Drive fixed comb teeth; 11. Second drive frame; 12. Drive detection movable comb teeth; 13. Drive detection fixed comb teeth; 14. U-shaped beam; 15. Connecting beam; 16. Vibration decoupling straight beam; 17. Second vibration elastic member; 18. Detection capacitor frame; 19. Detection fixed comb teeth; 20. Detection movable comb teeth; 21. Lever connecting spring; 22. Connecting rod swing spring; 23. Connecting rod connecting spring; 24. Orthogonal correction structure; 25. Rod body; 26. Connecting part; 27. Elastic connecting member. DETAILED DESCRIPTION

[0026] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0027] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0028] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "install", "connect" and "connect" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a conflicting connection or an integral connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] The terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, features specified as "first" or "second" may explicitly or implicitly include one or more of such features; and in the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0030] like Figures 1 to 6 As shown, this embodiment provides a four-mass gyroscope structure, including a base (not shown) and four substructures 1 with the same structure, the four substructures 1 are symmetrically arranged in pairs, and the four substructures 1 are connected by a detection reverse double lever mechanism 2, which enables two adjacent substructures to move in opposite directions in the detection working mode; specifically, Figure 3 and Figure 4 As shown, the detection reverse double lever mechanism 2 is a structure symmetrical about the center, including two levers, both of which extend along the driving direction, and the two levers are arranged parallel and symmetrically in the detection direction (i.e., as shown in FIG. Figure 3 The two ends of the lever are respectively connected to the two substructures 1 connected by the same driving coupling mechanism 4, and the middle of the two levers is connected by an elastic connecting member 27. In this embodiment, the driving direction is the movement direction of the substructure 1 in the driving state, that is, Figure 1 The left and right directions are the detection direction, which is the movement direction of substructure 1 in the detection state. Figure 1In this embodiment, when there is an external angular velocity input, the four substructures 1 are subjected to the Coriolis force, which causes vibration in the detection direction. Because the four substructures 1 are coupled using a detection reverse double-lever mechanism 2, each two adjacent substructures 1 move in opposite directions in the detection direction, making the detection work in the reverse mode, thereby improving the environmental adaptability of the gyroscope.

[0031] For ease of description, the upper and lower levers are defined as the first lever and the second lever, respectively. The two ends of the first lever are connected to the upper left and right substructures 1 respectively via lever connecting springs 21, and the two ends of the second lever are connected to the lower left and right substructures 1 respectively via lever connecting springs 21. The first lever and the second lever are connected in the middle by an elastic connector 27. When the four-mass gyro structure vibrates along the detection direction, the two adjacent left and right substructures 1 are connected by the same lever, so the two adjacent left and right substructures 1 move in opposite directions. When the two adjacent upper and lower substructures 1 move in the same direction along the detection direction, the two levers connecting the two substructures 1 are connected in the middle by the elastic connector 27, so the common connection point is subjected to tension on one side and compression on the other side, resulting in a zero net external force at the common point, that is, the state of same-direction motion is suppressed. When the two adjacent upper and lower substructures 1 move in opposite directions along the detection direction, the common connection point of the two levers is subjected to tension on both sides, resulting in a non-zero net external force at the common point, thus allowing for opposite-direction motion.

[0032] Optional, such as Figure 4 As shown, the lever includes two rod portions 25 and a connecting portion 26 connecting the two rod portions 25. The connecting portion 26 is anchored to the base. The ends of the two rod portions 25 are respectively connected to the two substructures 1. The connecting portions 26 of the two levers are connected to form an integrated structure by an elastic connector 27. Specifically, the connecting portion 26 adopts a frame structure. The two rod portions 25 on the left side of the two levers are connected by the elastic connector 27, and the two rod portions 25 on the right side of the two levers are connected by the elastic connector 27.

[0033] In some embodiments, a driving coupling mechanism 4 is designed to connect two adjacent substructures 1 along the driving direction, and two adjacent substructures 1 along the detection direction are connected via a reverse link mechanism 3 .

[0034] Optionally, the drive coupling mechanism 4 is a folding beam structure that extends and folds along the drive direction, and the two ends of the folding beam structure are respectively connected to the two adjacent substructures 1 along the drive direction. In this embodiment, the drive coupling mechanism 4 adopts two groups of W-shaped folding beam structures formed by two U-shaped beams connected side by side. The two groups of W-shaped folding beams are arranged symmetrically up and down, and the two ends of the upper W-shaped folding beam are respectively connected to the upper ends of the two adjacent substructures 1, and the two ends of the lower W-shaped folding beam are respectively connected to the lower ends of the two adjacent substructures 1. The design of this drive coupling mechanism 4 allows the two substructures 1 connected by the same drive coupling mechanism 4 to move in opposite directions in the drive direction.

[0035] Optionally, the reverse linkage mechanism 3 includes a linkage body, the ends of which are connected to the corresponding substructure 1 via a linkage connecting spring 23. The middle portion of the linkage body is anchored to the base via a linkage swing spring 22. When a substructure 1 vibrates in the driving direction, the swinging of the reverse linkage mechanism 3 causes two adjacent substructures 1 connected thereto in the detection direction to move in opposite directions. Since the two substructures 1 connected at both ends of the reverse linkage mechanism 3 move in the driving direction, the linkage connecting spring 23 expands and contracts in the driving direction, and the linkage swing spring 22 expands and contracts in the swinging direction of the linkage body. The four substructures are connected by the drive coupling mechanism 4 and the reverse linkage mechanism 3, so that when the four substructures 1 vibrate in the driving direction, two adjacent substructures 1 move in opposite directions.

[0036] For a single substructure 1, optional implementations, such as Figure 2As shown, the substructure 1 includes a sensitive mass block 5, a driving component and a detection component. The driving component includes a driving capacitor and a driving detection capacitor respectively distributed at both ends of the driving direction of the sensitive mass block 5. The driving capacitor and the driving detection capacitor are both connected to the sensitive mass block 5 through a driving vibration transfer beam 6. The detection component is distributed in the detection direction of the sensitive mass block 5 and is connected to the sensitive mass block 5 through a vibration decoupling elastic component; wherein the driving detection capacitors of the two adjacent substructures 1 along the driving direction are symmetrically arranged between the two sensitive mass blocks 5 and are connected through a driving coupling mechanism 4, and the driving capacitors of the two substructures 1 are symmetrically arranged at both ends of the two sensitive mass blocks 5. Under this structural design, when the gyro structure is in the driving working mode, the sensitive mass block 5 vibrates due to the electrostatic force generated by the driving capacitor. Since the driving capacitors of the two adjacent substructures 1 along the driving direction are symmetrically arranged, the electrostatic forces generated by them act in opposite directions, so the sensitive mass blocks 5 of the two adjacent substructures 1 along the driving direction move in opposite directions. At this time, the driving detection capacitors of the two substructures 1 are connected by a driving coupling mechanism 4. The capacitance values ​​at the left and right ends increase and decrease respectively, and the difference between the two end capacitances forms a differential capacitance, which increases the driving capacitance detection capability. At the same time, the differential subtraction subtracts the common mode error signal, thereby improving the capacitance detection sensitivity.

[0037] Specifically, the driving capacitor includes a first driving frame 8 and at least one group of driving movable comb teeth 9 and at least one group of driving fixed comb teeth 10 arranged in the first driving frame 8, the driving movable comb teeth 9 and the driving fixed comb teeth 10 correspond one to one and extend along the driving direction, the driving fixed comb teeth 10 are anchored on the base, and the driving movable comb teeth 9 are connected to the first driving frame 8; the driving detection capacitor includes a second driving frame 11 and at least one group of driving detection movable comb teeth 12 and at least one group of driving detection fixed comb teeth 13 arranged in the second driving frame 11, the driving detection movable comb teeth 12 and the driving detection fixed comb teeth 13 correspond one to one and extend along the driving direction, the driving detection fixed comb teeth 13 are anchored on the base, and the driving detection movable comb teeth 12 are connected to the second driving frame 11. Among them, the middle parts of the first driving frame 8 and the second driving frame 11 are anchored on the base through the first vibrating elastic member 7. The first vibrating elastic member 7 can be extended and retracted along the driving direction. It can adopt but is not limited to a vibration spring, a retractable and bendable U-shaped beam or O-shaped beam, etc. Through the setting of the first vibrating elastic member 7, the mobility of the first driving frame 8 and the second driving frame 11 along the driving direction is guaranteed. At the same time, the design of anchoring the first vibrating elastic member 7 ensures the stability of the movement of the first driving frame 8 and the second driving frame 11 along the driving direction; the ends of the first driving frame 8 and the second driving frame 11 are connected to the sensitive mass block 5 through the driving vibration transfer beam 6.

[0038] In some embodiments, each of the detection components is designed to be arranged between two adjacent sensitive mass blocks 5 along the detection direction, that is, the detection components of the four substructures 1 are arranged on one side of the sensitive mass block 5 close to the symmetric center of the four substructures 1, and the detection reverse double-lever mechanism 2 is arranged between two adjacent detection components along the detection direction; under this structural design, the sensitive mass block 5 vibrates due to the electrostatic force generated by the driving capacitor. When there is an angular velocity input from the outside, the sensitive mass block 5 is subjected to the Coriolis force and causes vibration in the detection direction. Since the four substructures 1 are connected by the detection reverse double-lever mechanism 2, when the sensitive mass block 5 is subjected to the Coriolis force, due to the existence of the double-lever structure, the four sensitive mass blocks 5 move in opposite directions, and the capacitance values ​​of the detection components at the upper and lower ends of the detection reverse double-lever mechanism 2 increase and decrease respectively, and the difference between the two end capacitances forms a differential capacitance, which increases the capacitance detection signal. At the same time, the differential subtracts the common-mode error signal, thereby improving the capacitance detection sensitivity.

[0039] Optionally, the detection component includes a detection capacitor frame 18 and at least one group of detection movable comb teeth 20 and at least one group of detection fixed comb teeth 19 arranged in the detection capacitor frame 18; the detection movable comb teeth 20 and the detection fixed comb teeth 19 correspond one to one and extend along the detection direction, the detection fixed comb teeth 19 are anchored on the base, and the detection movable comb teeth 20 are connected to the detection capacitor frame 18. Specifically, in a single substructure 1, the comb teeth of each group of detection movable comb teeth 20 have the same orientation, the comb teeth of each group of detection fixed comb teeth 19 have the same orientation, and the orientations of the detection movable comb teeth 20 and the detection fixed comb teeth 19 both extend along the detection direction, and at the same time, the detection components of the two adjacent substructures 1 are symmetrically arranged in the detection direction, that is, the comb teeth orientations of the detection movable comb teeth 20 and the detection fixed comb teeth 19 of the two substructures 1 are opposite. When the sensitive mass block 5 is subjected to the Coriolis force causing vibration in the detection direction, such as Figure 6 As shown, due to the design of the reverse double-lever mechanism 2, the capacitance values ​​of the detection components of the two symmetrical substructures of the reverse double-lever mechanism 2 increase and decrease respectively, and the difference is formed into a differential capacitance, which increases the capacitance detection signal and subtracts the common-mode error signal at the same time. The comb array arrangement on the four detection capacitor frames further increases the capacitance detection signal and improves the capacitance detection sensitivity.

[0040] Specifically, the two ends of the detection capacitor frame 18 are anchored to the base through the second vibrating elastic member 17 to ensure the stability of the detection component moving along the detection direction. Since the movement direction of the detection capacitor frame 18 is along the detection direction, the second vibrating elastic member 17 also expands and contracts along the detection direction. The second vibrating elastic member 17 can be but is not limited to a vibration spring, a retractable and bendable U-shaped beam or O-shaped beam, etc.

[0041] The detection capacitor frame 18 is connected to the sensitive mass block 5 on one side thereof via a vibration decoupling elastic component. Figure 2 and Figure 6 As shown, the vibration decoupling elastic component includes a vibration decoupling straight beam 16 and a U-shaped beam 14. The vibration decoupling straight beam 16 is located between the sensitive mass block 5 and the detection capacitor frame 18. The two ends of the vibration decoupling straight beam 16 are anchored to the base. The opening of the U-shaped beam 14 faces one side of the vibration decoupling straight beam 16. The two ends of the U-shaped beam 14 are connected to the sensitive mass block 5. The bottom center of the U-shaped beam 14 is connected to the center of the vibration decoupling straight beam 16 via a connecting beam 15. At the same time, the middle of the detection capacitor frame 18 is also connected to the center of the vibration decoupling straight beam 16. Specifically, the vibration decoupling straight beam 16 and the U-shaped beam 14 can both expand, contract, bend and deform when subjected to an applied force.

[0042] The detection capacitor frame 18 is connected to the detection reverse double-lever mechanism 2 on the side away from the sensitive mass block 5. Specifically, the detection capacitor frames 18 of the two upper substructures 1 are respectively connected to the two ends of the first lever of the detection reverse double-lever mechanism 2, and the detection capacitor frames 18 of the two lower substructures 1 are respectively connected to the two ends of the second lever of the detection reverse double-lever mechanism 2, thereby realizing reverse movement between two adjacent sensitive mass blocks 5.

[0043] Preferably, the substructure 1 further includes an orthogonal correction structure 24 for compensating for orthogonal stiffness coupling errors. The orthogonal correction structures 24 are symmetrically arranged in two groups along the driving direction. Each group of the orthogonal correction structures 24 includes orthogonal movable comb teeth and orthogonal fixed comb teeth. The orthogonal fixed comb teeth are anchored to the base, and the orthogonal movable comb teeth are connected to the sensitive mass block 5. Specifically, a square frame is provided on the sensitive mass block 5 for arranging the orthogonal correction structure 24. The orthogonal movable comb teeth are symmetrically arranged on the left and right sides of the square frame. The number of orthogonal movable comb teeth can be designed according to actual needs. This embodiment uses four orthogonal movable comb teeth as an example. The four orthogonal movable comb teeth are symmetrically arranged in pairs on the left and right sides of the square frame. The anchor point of the orthogonal fixed comb teeth is located at the center of the square frame. The orthogonal fixed comb teeth have two teeth, extending from the anchor point to the left and right sides, respectively, and located between the two orthogonal movable comb teeth on the corresponding side, and the distance between the two orthogonal movable comb teeth is unequal.

[0044] It should be noted that, in the present invention, Figure 5 and Figure 6 This is a schematic diagram of the final motion state of the movable parts of the four-mass gyroscope structure vibrating along the driving direction and the detection direction respectively. In order to reflect the motion effect, the movement displacement of the movable parts in the figure is exaggerated.

[0045] The above examples are merely illustrative of the present invention and do not limit the scope of protection of the present invention. Any design that is identical or similar to the present invention falls within the scope of protection of the present invention.

Claims

1. A four-mass gyroscope structure, characterized in that: It includes a base and four substructures with the same structure. The four substructures are symmetrically arranged in pairs. The four substructures are connected by a reverse detection double-lever mechanism. The reverse detection double-lever mechanism includes two levers extending along the driving direction. The levers include two rod bodies and a connecting portion connecting the two rod bodies. The connecting portion is anchored on the base. The connecting portion is a frame structure. The ends of the two rod bodies are respectively connected to two substructures adjacent to each other in the driving direction. The connecting portions of the two levers are connected by an elastic connecting piece. The four substructures and the two levers are all arranged in a plane formed by the driving direction and the detection direction. The two levers are both located between the substructures adjacent to each other in the detection direction.

2. The four-mass gyroscope structure according to claim 1, wherein: A driving coupling mechanism is connected between two adjacent substructures along the driving direction, and a reverse link mechanism is connected between two adjacent substructures along the detecting direction.

3. The four-mass gyroscope structure according to claim 2, wherein: The driving coupling mechanism is a folding beam structure that extends and folds along the driving direction, and two ends of the folding beam structure are respectively connected to two adjacent substructures along the driving direction.

4. The four-mass gyroscope structure according to claim 2, wherein: The reverse link mechanism includes a link body, both ends of the link body are connected to the substructures on the corresponding sides through link connecting springs, and the middle part of the link body is anchored on the base through a link swing spring.

5. The four-mass gyroscope structure according to any one of claims 1 to 4, characterized in that: The substructure includes a sensitive mass block, a driving component and a detection component. The driving component is distributed in the driving direction of the sensitive mass block, and the detection component is distributed in the detection direction of the sensitive mass block and is connected to the sensitive mass block through a vibration decoupling elastic component; each detection component is arranged between two adjacent sensitive mass blocks along the detection direction, and each detection component is connected to the detection reverse double lever mechanism.

6. The four-mass gyroscope structure according to claim 5, wherein: The driving component includes a driving capacitor and a driving detection capacitor respectively distributed at both ends of the driving direction of the sensitive mass block. The driving capacitor and the driving detection capacitor are both connected to the sensitive mass block through a driving vibration transfer beam, and the driving detection capacitors of two adjacent substructures along the driving direction are connected through a driving coupling mechanism.

7. The four-mass gyroscope structure according to claim 6, wherein: The driving capacitor includes a first driving frame and at least one group of driving movable comb teeth and at least one group of driving fixed comb teeth arranged in the first driving frame; the driving detection capacitor includes a second driving frame and at least one group of driving detection movable comb teeth and at least one group of driving detection fixed comb teeth arranged in the second driving frame; The middle parts of the first driving frame and the second driving frame are both anchored on the base through the first vibration elastic member, and the ends of the first driving frame and the second driving frame are both connected to the sensitive mass block through the driving vibration transmission beam.

8. The four-mass gyroscope structure according to claim 5, wherein: The detection component includes a detection capacitor frame and at least one group of detection movable comb teeth and at least one group of detection fixed comb teeth arranged in the detection capacitor frame; the side of the detection capacitor frame close to the sensitive mass block is connected to the sensitive mass block through a vibration decoupling elastic component, and the side of the detection capacitor frame away from the sensitive mass block is connected to the detection reverse double lever mechanism, and the two ends of the detection capacitor frame are anchored to the base through a second vibration elastic member.

9. The four-mass gyroscope structure according to claim 5, wherein: The substructure also includes an orthogonal correction structure for compensating for orthogonal stiffness coupling errors. The orthogonal correction structure is symmetrically arranged in two groups along the driving direction. The orthogonal correction structure includes orthogonal movable comb teeth and orthogonal fixed comb teeth. The orthogonal fixed comb teeth are anchored on the base, and the orthogonal movable comb teeth are connected to the sensitive mass block.

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