Distributed symmetrical four-mass gyroscope structure

Abstract

The invention provides a distributed symmetric four-mass gyroscope structure which comprises a substrate, two substructures, a driving coupling mechanism and a detection coupling mechanism, and the two substructures are connected through the driving coupling mechanism and the detection coupling mechanism; each substructure comprises two sensitive mass blocks, a driving assembly and a detection assembly, the two sensitive mass blocks are connected through a detection transmission assembly, the detection transmission assembly is further connected with a plurality of detection assemblies arranged between the two sensitive mass blocks, and the detection transmission assembly comprises a plurality of vibration transmission beams which are symmetrically arranged; one end of each vibration transmission beam is connected with the detection assembly on the corresponding side, and the other end is connected with the sensitive mass block on the corresponding side. Through the design of the detection transmission assembly, the detection assembly connected with the detection transmission assembly moves reversely, so that the detection work of the gyroscope structure is in a reverse mode, a common-mode error signal is eliminated, meanwhile, a low-order interference mode does not exist in the detection direction, and the environmental adaptability of the gyroscope is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of inertial sensors, and particularly relates to a distributed symmetric four-mass gyro structure. Background Art

[0002] Inertial sensors include accelerometers, gyroscopes, and their single, dual, and triaxial combinations. Among them, accelerometers are used to detect the acceleration signals of an object in the independent three axes of the carrier coordinate system, and gyroscopes are used to detect the angular velocity signals of the carrier relative to the navigation coordinate system. Measuring the angular velocity and acceleration of an object in three-dimensional space can accurately characterize the attitude of the object, which has very important application value in navigation.

[0003] In the existing four-mass gyro structures, the coupling method between different mass blocks is generally elastic beam connection, which enables the linkage of the movements between the mass blocks. However, this coupling method between different mass blocks causes the co-directional interference mode to appear before the reverse working mode, and the existence of the co-directional interference mode is not conducive to improving the environmental adaptability of the gyro. Summary of the Invention

[0004] The purpose of the present invention is to provide a distributed symmetric four-mass gyro structure, which can at least solve some defects existing in the prior art.

[0005] To achieve the above purpose, the present invention adopts the following technical solutions: A distributed symmetric four-mass gyro structure includes a base, two sub-structures, a driving coupling mechanism, and a detection coupling mechanism. The two sub-structures are connected through the driving coupling mechanism and the detection coupling mechanism; each sub-structure includes two sensitive mass blocks, a driving component, and a detection component. The two sensitive mass blocks are connected through a detection transmission component, and the detection transmission component is also connected to a plurality of detection components arranged between the two sensitive mass blocks. The detection transmission component includes a plurality of symmetrically arranged vibration transmission beams. One end of each vibration transmission beam is connected to the corresponding detection component, and the other end is connected to the corresponding sensitive mass block.

[0006] Further, the vibration transmission beam has an asymmetric structure at both ends.

[0007] Further, both ends of the vibration transmission beam have vibration elastic parts that can expand and contract along the driving direction.

[0008] Further, the detection transmission component further includes a transmission vibration spring. One end of the transmission vibration spring is connected to the detection component, and the other end is anchored to the base.

[0009] Further, the detection component is connected to the sensitive mass block through a vibration decoupling elastic component, and one end of the vibration transfer beam connected to the sensitive mass block is connected to the vibration decoupling elastic component.

[0010] Further, the detection component includes a detection frame and at least one set of detection moving comb teeth and at least one set of detection fixed comb teeth arranged in the detection frame. The detection moving comb teeth and the detection fixed comb teeth correspond to each other one by one and extend along the driving direction. The detection moving comb teeth are connected to the detection frame, and the detection fixed comb teeth are anchored to the substrate. One end of the detection frame along the driving direction is connected to the detection transfer component, and the other end is connected to a first vibration elastic member that can expand and contract along the driving direction.

[0011] Further, the detection component further includes a tuning capacitor for adjusting the vibration frequency of the sensitive mass block in the detection direction. The tuning capacitor includes at least one set of tuning moving comb teeth and at least one set of tuning fixed comb teeth. The tuning moving comb teeth and the tuning fixed comb teeth correspond to each other one by one and extend along the detection direction. The tuning moving comb teeth are connected to the detection frame, and the tuning fixed comb teeth are anchored to the substrate.

[0012] Further, the detection component further includes a detection force - adding capacitor for closed - loop control. The detection force - adding capacitor includes at least one set of force - adding moving comb teeth and at least one set of force - adding fixed comb teeth. The force - adding moving comb teeth and the force - adding fixed comb teeth correspond to each other one by one and extend along the driving direction. The force - adding moving comb teeth are connected to the detection frame, and the force - adding fixed comb teeth are anchored to the substrate.

[0013] Further, the driving component includes a driving capacitor and a driving detection capacitor respectively distributed at both ends of the sensitive mass block in the driving direction; the driving capacitor and the driving detection capacitor are connected to the sensitive mass block through a driving vibration transfer beam and are simultaneously anchored to the substrate through a second vibration elastic member.

[0014] Further, two driving capacitors in a single substructure are connected through a reverse link mechanism, the driving detection capacitors of two substructures are symmetrically connected through the driving coupling mechanism, and the driving capacitors of two substructures are symmetrically arranged.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: (1) Through the design of the detection transfer component, by using the rotational motion of the vibration transfer beam of the detection transfer component, the detection component connected thereto moves in the reverse direction, so that the detection work of the gyro structure is in the reverse mode, eliminating the common - mode error signal. At the same time, there is no low - order interference mode in the detection direction, improving the environmental adaptability of the gyro; further, through the design of the vibration transfer beam with an asymmetric structure form, the vibration transfer beam is more likely to rotate, improving the response speed of the gyro.

[0016] (2) In the present invention, a detection boosting capacitor is designed in the detection component, enabling the gyro structure to operate in a position closed-loop state, further expanding the application scope of the gyro.

[0017] (3) Through the arrangement of multiple groups of comb teeth in the present invention, the differential capacitance formed during vibration is doubled, increasing the capacitance detection signal and enhancing the detection sensitivity of the capacitance signal.

[0018] The present invention will be further described in detail below with reference to the accompanying drawings. Description of the Drawings

[0019] Figure 1 It is a schematic diagram of the distributed symmetric four-mass gyro structure of the present invention; Figure 2 It is a schematic diagram of a single sub-structure in the distributed symmetric four-mass gyro structure of the present invention; Figure 3 It is a schematic diagram of the detection and transfer component in the distributed symmetric four-mass gyro structure of the present invention; Figure 4 It is a schematic diagram of the vibration transfer beam structure of the detection and transfer component in the present invention; Figure 5 It is a schematic diagram of the detection coupling mechanism in the distributed symmetric four-mass gyro structure of the present invention; Figure 6 It is a schematic diagram of the vibration of the sensitive mass block along the driving direction in the distributed symmetric four-mass gyro structure of the present invention; Figure 7 It is a schematic diagram of the vibration of the sensitive mass block along the detection direction in the distributed symmetric four-mass gyro structure of the present invention.

[0020] Description of the reference numerals in the drawings: 1, sub-structure; 2, driving coupling mechanism; 3, detection coupling mechanism; 4, detection and transfer component; 5, reverse link mechanism; 6, sensitive mass block; 7, driving vibration transfer beam; 8, first driving frame; 9, driving fixed comb teeth; 10, driving moving comb teeth; 11, link connection spring; 12, link swing spring; 13, first vibration elastic member; 14, vibration decoupling straight beam; 15, U-shaped beam; 16, connection beam; 17, orthogonal correction structure; 18, second vibration elastic member; 19, second driving frame; 20, driving and detection fixed comb teeth; 21, driving and detection moving comb teeth; 22, detection frame; 23, detection moving comb teeth; 24, detection fixed comb teeth; 25, tuning fixed comb teeth; 26, tuning moving comb teeth; 27, boosting fixed comb teeth; 28, boosting moving comb teeth; 29, vibration transfer beam; 30, transfer vibration spring; 31, vibration elastic part; 32, anchor point fixing beam; 33, straight beam. Detailed Embodiment

[0021] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0022] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0023] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "coupling" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or a contact connection or an integral connection; for those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0024] The terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features; in the description of the present invention, unless otherwise stated, the meaning of "plurality" is two or more.

[0025] As Figures 1 to 7 shown, this embodiment provides a distributed symmetric four-mass gyro structure, including a base (not shown in the figure), two sub-structures 1, a driving coupling mechanism 2 and a detection coupling mechanism 3. The two sub-structures 1 are symmetrically arranged in the driving direction and are connected through the driving coupling mechanism 2 and the detection coupling mechanism 3; each sub-structure 1 includes two sensitive mass blocks 6, a driving component and a detection component. The two sensitive mass blocks 6 are relatively arranged in the detection direction. The driving component is distributed in the driving direction of the sensitive mass block 6. Multiple detection components can be designed. In this embodiment, two detection components are taken as an example. The two detection components are arranged opposite to each other in the driving direction between the two sensitive mass blocks 6. The two detection components are connected through a detection transmission component 4, so that the two detection components move in opposite directions in the detection working mode. Among them, in this embodiment, the driving direction is the movement direction of the sensitive mass block 6 in the driving state, that is Figure 1In the left - right direction, the detection direction is the movement direction of the sensitive mass block 6 in the detection state, that is Figure 1 In the up - down direction. In this embodiment, when there is an angular velocity input from the outside world, when the four sensitive mass blocks 6 are subjected to the Coriolis force and thus cause vibrations in the detection direction, the movement of the sensitive mass blocks 6 drives the corresponding movement of the detection transfer component 4. Since the two detection components in a single sub - structure 1 are connected through the detection transfer component 4, the movement of the detection transfer component 4 can cause the two detection components to move in the opposite direction, so that the detection work of the gyro structure is in the reverse mode, eliminating the common - mode error signal. At the same time, there is no low - order interference mode in the detection direction, improving the environmental adaptability of the gyro.

[0026] As a specific implementation, as Figure 3 and Figure 4 shown, the detection transfer component 4 includes a plurality of symmetrically arranged vibration transfer beams 29. In this embodiment, specifically four vibration transfer beams 29 are designed. One end of each vibration transfer beam 29 is connected to the corresponding side detection component, and the other end is connected to the corresponding side sensitive mass block 6. When the sensitive mass block 6 moves in the detection direction, it will generate a force on the vibration transfer beam 29 connected to it, and this force is transmitted to the detection component through the vibration transfer beam 29, causing the detection component to move correspondingly; for example, Figure 7 when the upper - right sensitive mass block 6 moves downward, it will generate a downward force on the upper ends of the two vibration transfer beams 29 connected to it, thereby pushing these two vibration transfer beams 29 to rotate. Since these two vibration transfer beams 29 are symmetrically arranged, the rotation directions of these two vibration transfer beams 29 are opposite, and then push the two detection components respectively connected to these two vibration transfer beams 29 to move in opposite directions (i.e., left - right movement), realizing the detection work of the gyro structure in the reverse mode.

[0027] Preferably, as Figure 4 shown, the vibration transfer beam 29 is a structure with asymmetric ends. Through the asymmetric structure design, the vibration transfer beam 29 is more likely to rotate. Further, vibration elastic parts 31 that can expand and contract along the driving direction are provided at both ends of the vibration transfer beam 29.

[0028] Optionally, the detection component is connected to the sensitive mass block 6 through a vibration decoupling elastic component, and one end of the vibration transfer beam 29 connected to the sensitive mass block 6 is connected to the vibration decoupling elastic component; preferably, the two vibration transfer beams 29 connected to the same sensitive mass block 6 are connected to the same point of the vibration decoupling elastic component, so as to ensure that the two vibration transfer beams 29 are subjected to the same force, thereby enabling the two detection components to move synchronously in the opposite direction.

[0029] Specifically, the vibration decoupling elastic component includes a vibration decoupling straight beam 14 and a U-shaped beam 15. The vibration decoupling straight beam 14 is located between the sensitive mass block 6 and the detection component. Both ends of the vibration decoupling straight beam 14 are respectively connected to two detection components. The opening of the U-shaped beam 15 faces the side of the vibration decoupling straight beam 14. Both ends of the U-shaped beam 15 are connected to the sensitive mass block 6. The center of the bottom of the U-shaped beam 15 is connected to the center of the vibration decoupling straight beam 14 through a connecting beam 16. At the same time, the end of the vibration transmission beam 29 is also connected to the center of the vibration decoupling straight beam 14. Among them, the vibration decoupling straight beam 14 and the U-shaped beam 15 can both stretch and bend when subjected to forces.

[0030] Optionally, as Figure 3 shown, the detection and transmission component 4 further includes a transmission vibration spring 30. One end of the transmission vibration spring 30 is connected to the detection component, and the other end is anchored to the substrate. The detection component is anchored to the substrate through the transmission vibration spring 30 to ensure the stability of the movement of the detection component. Since the detection component moves along the driving direction (i.e., the left-right direction) in this embodiment, the transmission vibration spring 30 also stretches and contracts along the driving direction. Optimally, the four transmission vibration springs 30 are symmetrically arranged in the space enclosed by the four vibration transmission beams 29 to improve the compactness of the gyro structure.

[0031] As a specific implementation manner, as Figure 2 shown, the detection component includes a detection frame 22 and at least one group of detection moving comb teeth 23 and at least one group of detection fixed comb teeth 24 arranged in the detection frame 22. The detection moving comb teeth 23 and the detection fixed comb teeth 24 correspond one by one and extend along the driving direction. The detection moving comb teeth 23 and the detection fixed comb teeth 24 form a detection capacitor. The detection moving comb teeth 23 are connected to the detection frame 22, and the detection fixed comb teeth 24 are anchored to the substrate. One end of the detection frame 22 along the driving direction is connected to the detection and transmission component 4. Specifically, the middle part of the detection frame 22 is connected to the center of the vibration decoupling straight beam 14 of the vibration decoupling elastic component through the vibration transmission beam 29. At the same time, the middle part of the detection frame 22 is also anchored to the substrate through the transmission vibration spring 30. The other end of the detection frame 22 along the driving direction is connected to a first vibration elastic member 13 that can stretch and contract along the driving direction. The first vibration elastic member 13 can stretch and contract along the driving direction (i.e., the left-right direction). The first vibration elastic member 13 can be, but is not limited to, a vibration spring, a U-shaped beam or an O-shaped beam that can stretch and bend, etc. Since the two detection components connected by the same detection and transmission component 4 move in opposite directions, the capacitance values at its left and right ends increase and decrease, and the difference between the capacitances at both ends forms a differential capacitance, increasing the capacitance detection signal. At the same time, the common-mode error signal is subtracted by the differential, and the comb tooth arrays on the four detection frames 22 further increase the capacitance detection signal, improving the capacitance detection sensitivity.

[0032] Optionally, the detection frame 22 is designed as an outer frame and an inner frame. The two ends of the outer frame along the driving direction are anchored to the base. The vibration decoupling straight beam 14 of the vibration decoupling elastic component is connected to the outer frame of the detection frame 22. One end of the inner frame close to the detection transmission component 4 is connected to the vibration transmission beam 29 and the transmission vibration spring 30 of the detection transmission component 4. The end of the inner frame far from the detection transmission component 4 is connected to the outer frame through the first vibration elastic member 13. Both the detection moving comb teeth 23 and the detection fixed comb teeth 24 are located inside the inner frame, and the detection moving comb teeth 23 are connected to the inner frame. With this structural design, when the sensitive mass block 6 moves along the detection direction (i.e., the up and down direction), since the detection frame 22 is connected to the sensitive mass block 6 through the outer frame, and the inner frame of the detection frame 22 is not directly connected to the sensitive mass block 6, the inner frame of the detection frame 22 will not move up and down with the sensitive mass block 6, and only moves left and right under the action of the vibration transmission beam 29 to generate a detection capacitance, improving the detection sensitivity.

[0033] Optionally, the detection component further includes a tuning capacitor for adjusting the vibration frequency of the sensitive mass block 6 in the detection direction. Specifically, the tuning capacitor includes at least one group of tuning moving comb teeth 26 and at least one group of tuning fixed comb teeth 25. The tuning moving comb teeth 26 and the tuning fixed comb teeth 25 correspond one by one and extend along the detection direction. The tuning moving comb teeth 26 are connected to the detection frame 22, and the tuning fixed comb teeth 25 are anchored to the base.

[0034] Optionally, the detection component further includes a detection force - adding capacitor for closed - loop operation, enabling the gyro structure to work in a closed - loop state and expanding the application range of the gyro structure. Specifically, the detection force - adding capacitor includes at least one group of force - adding moving comb teeth 28 and at least one group of force - adding fixed comb teeth 27. The force - adding moving comb teeth 28 and the force - adding fixed comb teeth 27 correspond one by one and extend along the driving direction. The force - adding moving comb teeth 28 are connected to the detection frame 22, and the force - adding fixed comb teeth 27 are anchored to the base.

[0035] The adjacent two detection components between the two substructures 1 are connected through a detection coupling mechanism 3. In some embodiments, such as Figure 1 and Figure 5As shown, the detection coupling mechanism 3 includes two sets of anchor fixed beam groups arranged symmetrically up and down. There is a straight beam 33 between the two sets of anchor fixed beam groups. The straight beam 33 extends along the driving direction. The two ends of the straight beam 33 are respectively connected to the middle parts of the two detection components in the center. Each set of anchor fixed beam groups includes two anchor fixed beams 32 arranged symmetrically left and right. The anchor fixed beams 32 extend along the detection direction. One end of the anchor fixed beam 32 is anchored to the base, and its anchoring point is close to the straight beam 33. The other end of the anchor fixed beam 32 is connected to the ends of the two detection components in the center. Specifically, the two anchor fixed beams 32 above the straight beam 33 are respectively connected to the upper ends of the detection frames 22 of the two detection components in the center, and the two anchor fixed beams 32 below the straight beam 33 are respectively connected to the lower ends of the detection frames 22 of the two detection components.

[0036] As a specific implementation, as Figure 2 shown, the driving component includes a driving capacitor and a driving detection capacitor respectively distributed at both ends of the sensitive mass block 6 in the driving direction; both the driving capacitor and the driving detection capacitor are connected to the sensitive mass block 6 through a driving vibration transmission beam 7 and are simultaneously anchored to the base through a second vibration elastic member 18. Among them, the driving detection capacitors of the two sub-structures 1 are symmetrically arranged and connected through the driving coupling mechanism 2; the driving capacitors of the two sub-structures 1 are located outside the two sub-structures 1 and are symmetrically arranged, and at the same time, the two driving capacitors in the same sub-structure 1 are connected through a reverse link mechanism 5. Under this structural design, when the gyro structure is in the driving working mode, the sensitive mass block 6 vibrates under the electrostatic force generated by the driving capacitor. Since the driving capacitors of the two sub-structures 1 are symmetrically arranged, the directions of the electrostatic forces generated by them are opposite, so the sensitive mass blocks 6 between the two sub-structures 1 move in opposite directions. At the same time, since the two driving capacitors in the same sub-structure 1 are connected through a reverse link mechanism 5, the two sensitive mass blocks 6 in the same sub-structure 1 also move in opposite directions; at this time, for the left and right two driving detection capacitors connected by the same driving coupling mechanism 2 along the driving direction, the capacitance values of one increase and one decrease, and the difference between the capacitances at both ends forms a differential capacitance, which increases the driving capacitor detection ability, and at the same time, the differential subtracts the common-mode error signal, improving the capacitance detection sensitivity.

[0037] Specifically, the driving capacitor includes a first driving frame 8, and at least one set of driving moving comb teeth 10 and at least one set of driving fixed comb teeth 9 arranged in the first driving frame 8. The driving moving comb teeth 10 and the driving fixed comb teeth 9 correspond one by one and extend along the driving direction. The driving fixed comb teeth 9 are anchored on the substrate, and the driving moving comb teeth 10 are connected to the first driving frame 8. The driving detection capacitor includes a second driving frame 19, and at least one set of driving detection moving comb teeth 21 and at least one set of driving detection fixed comb teeth 20 arranged in the second driving frame 19. The driving detection moving comb teeth 21 and the driving detection fixed comb teeth 20 correspond one by one and extend along the driving direction. The driving detection fixed comb teeth 20 are anchored on the substrate, and the driving detection moving comb teeth 21 are connected to the second driving frame 19. Among them, the middle parts of the first driving frame 8 and the second driving frame 19 are both anchored on the substrate through a second vibration elastic member 18. The second vibration elastic member 18 can expand and contract along the driving direction, and can be, but is not limited to, a vibration spring, a U-shaped beam or an O-shaped beam that can be telescopically bent. Through the arrangement of the second vibration elastic member 18, the movability of the first driving frame 8 and the second driving frame 19 along the driving direction is ensured. At the same time, the design of anchoring the second vibration elastic member 18 ensures the stability of the movement of the first driving frame 8 and the second driving frame 19 along the driving direction; the ends of the first driving frame ⑧ and the second driving frame 19 are both connected to the sensitive mass block 6 through a driving vibration transmission beam 7.

[0038] Optionally, the driving coupling mechanism 2 is a folded beam structure extending and folded along the driving direction. The two ends of the folded beam structure are respectively connected to two adjacent driving detection capacitors along the driving direction. In this embodiment, the driving coupling mechanism 2 adopts a W-shaped folded beam structure formed by arranging two U-shaped beams side by side. The two sets of W-shaped folded beams are arranged symmetrically up and down. The two ends of the upper W-shaped folded beam are respectively connected to the upper ends of two adjacent driving detection capacitors, and the two ends of the lower W-shaped folded beam are respectively connected to the lower ends of two adjacent driving detection capacitors. With this design of the driving coupling mechanism 2, it is ensured that two driving detection capacitors connected by the same driving coupling mechanism 2 move in opposite directions in the driving direction.

[0039] Optionally, the reverse link mechanism 5 includes a link body. The two ends of the link body are connected to the corresponding driving capacitors through link connection springs 11, and the middle part of the link body is anchored on the substrate through a link swing spring 12. When the sub-structure 1 vibrates in the driving direction, the reverse movement between the two sensitive mass blocks 6 in the same sub-structure 1 is caused by the swing of the reverse link mechanism 5. Since the moving directions of the sensitive mass blocks 6 connected to both ends of the reverse link mechanism 5 are along the driving direction, the link connection springs 11 expand and contract along the driving direction, and the link swing springs 12 expand and contract along the swinging direction of the link body.

[0040] Preferably, the sub-structure 1 further includes an orthogonal correction structure 17 for compensating the orthogonal stiffness coupling error. Two sets of orthogonal correction structures are correspondingly arranged for each sensitive mass block 6, symmetrically arranged along the driving direction. Each set of the orthogonal correction structures 17 includes orthogonal moving comb teeth and orthogonal fixed comb teeth. The orthogonal fixed comb teeth are anchored on the substrate, and the orthogonal moving comb teeth are connected to the sensitive mass block 6. Specifically, a square frame for arranging the orthogonal correction structure 17 is provided on the sensitive mass block 6. The comb teeth of the orthogonal moving comb teeth are symmetrically arranged on the left and right sides of the square frame. The number of the comb teeth of the orthogonal moving comb teeth can be designed according to actual requirements. In this embodiment, taking the orthogonal moving comb teeth having four comb teeth as an example, the four comb teeth of the orthogonal moving comb teeth are arranged in two-by-two symmetry on the left and right sides of the square frame. The anchoring points of the orthogonal fixed comb teeth are located at the center of the square frame. The orthogonal fixed comb teeth have two comb teeth, which respectively extend from the anchoring point to the left and right sides, and are located between the two orthogonal moving comb teeth on the corresponding side and the distances between the two orthogonal moving comb teeth are not equal.

[0041] It should be noted that in the present invention, Figure 6 and Figure 7 are schematic diagrams of the final states of the movements of the movable components of the distributed symmetric four-mass gyro structure vibrating along the driving direction and the detection direction respectively. And in order to show the movement effect, the moving displacements of the movable components in the figure are exaggerated.

[0042] The above examples are only illustrative of the present invention and do not constitute a limitation on the protection scope of the present invention. Any design identical or similar to the present invention falls within the protection scope of the present invention.

Claims

1. A distributed symmetric four-mass gyro structure, characterized in that: It includes a substrate, two sub-structures, a driving coupling mechanism and a detecting coupling mechanism. The two sub-structures are connected through the driving coupling mechanism and the detecting coupling mechanism. Each sub-structure includes two sensitive mass blocks, a driving component and a detecting component. The two sensitive mass blocks are connected through a detecting transmission component. The detecting transmission component is also connected to a plurality of detecting components arranged between the two sensitive mass blocks. The detecting transmission component includes a plurality of symmetrically arranged vibration transmission beams. One end of each vibration transmission beam is connected to the corresponding detecting component, and the other end is connected to the corresponding sensitive mass block.

2. The distributed symmetric four-mass gyro structure according to claim 1, characterized in that: The vibration transmission beam has an asymmetric structure at both ends.

3. The distributed symmetric four-mass gyro structure according to claim 1 or 2, characterized in that: Both ends of the vibration transmission beam have vibration elastic parts that can expand and contract along the driving direction.

4. The distributed symmetric four-mass gyro structure according to claim 1, characterized in that: The detecting transmission component further includes a transmission vibration spring. One end of the transmission vibration spring is connected to the detecting component, and the other end is anchored to the substrate.

5. The distributed symmetric four-mass gyro structure according to claim 1, wherein: The detecting component is connected to the sensitive mass block through a vibration decoupling elastic component. One end of the vibration transmission beam connected to the sensitive mass block is connected to the vibration decoupling elastic component.

6. The distributed symmetric four-mass gyro structure according to claim 1, characterized in that: The detecting component includes a detecting frame and at least one set of detecting moving comb teeth and at least one set of detecting fixed comb teeth arranged in the detecting frame. The detecting moving comb teeth and the detecting fixed comb teeth correspond to each other one by one and extend along the driving direction. The detecting moving comb teeth are connected to the detecting frame, and the detecting fixed comb teeth are anchored to the substrate. One end of the detecting frame along the driving direction is connected to the detecting transmission component, and the other end is connected to a first vibration elastic part that can expand and contract along the driving direction.

7. The distributed symmetric four-mass gyro structure according to claim 6, wherein: The detecting component further includes a tuning capacitor for adjusting the vibration frequency of the sensitive mass block in the detecting direction. The tuning capacitor includes at least one set of tuning moving comb teeth and at least one set of tuning fixed comb teeth. The tuning moving comb teeth and the tuning fixed comb teeth correspond to each other one by one and extend along the detecting direction. The tuning moving comb teeth are connected to the detecting frame, and the tuning fixed comb teeth are anchored to the substrate.

8. The distributed symmetric four-mass gyro structure according to claim 6, characterized in that: The detecting component further includes a detecting force adding capacitor for closed-loop. The detecting force adding capacitor includes at least one set of force adding moving comb teeth and at least one set of force adding fixed comb teeth. The force adding moving comb teeth and the force adding fixed comb teeth correspond to each other one by one and extend along the driving direction. The force adding moving comb teeth are connected to the detecting frame, and the force adding fixed comb teeth are anchored to the substrate.

9. The distributed symmetric four-mass gyro structure according to claim 1, wherein: The driving component includes a driving capacitor and a driving detecting capacitor respectively distributed at both ends of the sensitive mass block in the driving direction. The driving capacitor and the driving detecting capacitor are connected to the sensitive mass block through a driving vibration transmission beam and are simultaneously anchored to the substrate through a second vibration elastic part.

10. The distributed symmetric four-mass gyro structure according to claim 9, characterized in that: Two driving capacitors in a single sub-structure are connected through a reverse link mechanism. The driving detecting capacitors of the two sub-structures are symmetrically connected through the driving coupling mechanism, and the driving capacitors of the two sub-structures are symmetrically arranged.

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