Aging test method and device for near-infrared Fabry-Perot cavity spectrum sensor

Abstract

The invention relates to the field of Fabry-Perot cavity spectrum sensors, in particular to a near-infrared Fabry-Perot cavity spectrum sensor aging test method and device for carrying out aging test on a near-infrared Fabry-Perot cavity spectrum sensor, and the method comprises the following steps: a, preparing the near-infrared Fabry-Perot cavity spectrum sensor; b, a sensor to be tested is arranged on a circuit board in the test box, the circuit board is communicated with a power supply through an electric wire, then the sensor is connected to the circuit board, and the power supply is started; c, adjusting the temperature and humidity in the test box; d, starting a first test: continuously emitting wide-spectrum infrared light after the near-infrared light source lamp is electrified, and transmitting a signal of acquired light wave wavelength to a computer through a circuit board; e, the signals are collected again at the same time intervals; and f, turning off the power supply after the aging is completed. The method is especially suitable for the aging test of the near-infrared Fabry-Perot cavity spectrum sensor and the life estimation test of the near-infrared Fabry-Perot cavity spectrum sensor.

Description

Technical Field

[0001] The present invention relates to the field of Fabry - Perot cavity spectroscopic sensors, and particularly to an aging test method and device for a near - infrared Fabry - Perot cavity spectroscopic sensor. Background Art

[0002] The near - infrared Fabry - Perot cavity spectroscopic sensor combines near - infrared spectroscopy technology (the wavelength range of near - infrared light is 750 - 2500 nm) and the Fabry - Perot (F - P) interference principle, and realizes high - precision sensing by modulating the cavity length change caused by external physical quantities (such as pressure and temperature). At present, near - infrared Fabry - Perot cavity spectroscopic sensors have been widely used in the fields of biomedical detection, nuclear reactors, aerospace, etc.

[0003] The near - infrared Fabry - Perot cavity spectroscopic sensor can filter near - infrared light of different wavelengths under the control of different voltages and convert it into an output electrical signal. Due to the control of chip stress involved in the preparation conditions and process procedures, within a certain period of time after the near - infrared Fabry - Perot cavity spectroscopic sensor is initially used after production, its sensing performance will be unstable due to the release and self - adjustment of internal stress, which is disadvantageous for the actual use of the near - infrared Fabry - Perot cavity spectroscopic sensor.

[0004] Taking the solution with the publication number CN119687987A as an example, the detection method of the existing sensor aging device is as follows: install the photoelectric sensor on the aging test bench, and make the sensing surface of the photoelectric sensor face one side of the shielding test board. Then, power on the photoelectric sensor to make it in the working state, and then make the rotary drive device work to drive the rotary arm to rotate, so as to make the first connecting rod rotate and make the shielding test board move up and down, so that the shielding test board appears and disappears on the sensing surface of the photoelectric sensor to simulate the actual application situation of the photoelectric sensor. In the above solution, there is no aging test for the near - infrared Fabry - Perot cavity spectroscopic sensor in the near - infrared band, and its test solution cannot be applied to the aging test of the near - infrared Fabry - Perot cavity spectroscopic sensor. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide an aging test method and device for a near - infrared Fabry - Perot cavity spectroscopic sensor, which can perform aging tests on the near - infrared Fabry - Perot cavity spectroscopic sensor under set temperature and humidity conditions.

[0006] The technical solution adopted by the present invention to solve its technical problems is: an aging test method for a near-infrared Fabry-Perot cavity spectral sensor, including the following steps: a. Prepare a near-infrared Fabry-Perot cavity spectral sensor to be subjected to aging test, and ensure that the near-infrared Fabry-Perot cavity spectral sensor can work normally; b. Set the near-infrared Fabry-Perot cavity spectral sensor to be tested on the circuit board inside the test chamber. The circuit board is connected to the power supply through a wire. Subsequently, connect the near-infrared Fabry-Perot cavity spectral sensor to the circuit board and turn on the power supply. Connect the circuit board and the computer through a signal transmission line, and ensure that the sensing surface of the near-infrared Fabry-Perot cavity spectral sensor is coaxially arranged with the near-infrared light source lamp above the photosensitive port. After adjustment, close the test chamber, and seal the wire harness through holes through which the wire and the signal transmission line pass with heat-insulating materials; c. Adjust the temperature and humidity inside the test chamber until the temperature and humidity conditions required for aging test are reached; d. Start the first test: The near-infrared light source lamp continuously emits broadband infrared light after being powered on. The near-infrared Fabry-Perot cavity spectral sensor to be tested, under the action of different voltages, transmits the signals of the collected light wave wavelengths to the computer through the circuit board. According to the calibration results of the near-infrared Fabry-Perot cavity spectral sensor, the voltage and the data of the collected light wave wavelengths are corresponded one by one, and this data is used as the initial comparison data; e. Subsequently, collect signals again at the same interval; f. Judge the aging degree of the near-infrared Fabry-Perot cavity spectral sensor according to the change of the signals. When the signal change range of the near-infrared Fabry-Perot cavity spectral sensor is within ±1 minimum resolution, it can be considered that the aging is completed; after the aging is completed, turn off the power supply. After the temperature in the test chamber cools down to room temperature, take out the near-infrared Fabry-Perot cavity spectral sensor that has completed the aging test.

[0007] Furthermore, in step f, after the aging is completed, adjust the temperature of the test chamber and continue the test. According to the change of the performance of the near-infrared Fabry-Perot cavity spectral sensor, use the Arrhenius model to infer the life of the near-infrared Fabry-Perot cavity spectral sensor; the Arrhenius model is: λ(T)=Aexp(-Ea / kT), where A and k are constants, T is the absolute temperature, Ea is the activation energy, and λ(T) is the sensor life.

[0008] Furthermore, in step f, after the aging is completed and the aged near-infrared Fabry-Perot cavity spectral sensor is taken out, put the next near-infrared Fabry-Perot cavity spectral sensor and repeat the above steps b to f.

[0009] An aging test device for a near-infrared Fabry-Perot cavity spectral sensor, including a test chamber, a circuit board is arranged inside the test chamber, the circuit board is respectively connected to a computer and a power supply outside the test chamber, the circuit board is used to place a near-infrared Fabry-Perot cavity spectral sensor to be subjected to aging test, a near-infrared light source lamp is arranged inside the test chamber, the near-infrared light source lamp is arranged directly above the near-infrared Fabry-Perot cavity spectral sensor, and a temperature adjustment device and a humidity adjustment device are arranged inside the test chamber.

[0010] Furthermore, the circuit board is electrically connected to a computer outside the test chamber through signal transmission lines.

[0011] Furthermore, the circuit board is electrically connected to a power supply outside the test chamber through electric wires.

[0012] Furthermore, the test chamber includes through holes for wire harnesses of electric wires and signal transmission lines, and when the aging test is carried out, heat insulation materials are hermetically arranged in the through holes of the wire harnesses.

[0013] Furthermore, the temperature regulating device includes an electric heating rod or an electric heating wire.

[0014] Furthermore, the humidity regulating device includes a constant humidity machine or a humidifying machine.

[0015] The beneficial effects of the present invention are as follows: First, when the near-infrared Fabry-Perot cavity optical spectrum sensor is actually used, changes in the external temperature and humidity will cause changes in its cavity length, which is also the basis for its realization of high-precision sensing. Therefore, in the aging test of the present solution, in view of the above characteristics of the near-infrared Fabry-Perot cavity optical spectrum sensor, when the aging test is carried out, by adjusting the temperature and humidity, its actual application scenario is simulated, greatly enriching the test data and also improving the test efficiency. Second, after the aging is completed, the temperature and humidity of the test chamber are adjusted and the test is continued. According to the change in the performance of the near-infrared Fabry-Perot cavity optical spectrum sensor, the life of the near-infrared Fabry-Perot cavity optical spectrum sensor is inferred by using the Arrhenius model, realizing the inference of the life of the near-infrared Fabry-Perot cavity optical spectrum sensor by adjusting the temperature and humidity while completing the aging test. Third, in view of the characteristic that the near-infrared Fabry-Perot cavity optical spectrum sensor filters near-infrared light of different wavelengths under the control of different voltages and converts it into an output electrical signal, a near-infrared light source lamp is specifically set for testing, and corresponding positional relationships and structural relationships are formed, creating a brand-new device for aging test of the near-infrared Fabry-Perot cavity optical spectrum sensor, making the aging test more suitable for the near-infrared Fabry-Perot cavity optical spectrum sensor and improving the efficiency and accuracy of the aging test. The present invention is particularly applicable to the aging test of the near-infrared Fabry-Perot cavity optical spectrum sensor and the life prediction test of the near-infrared Fabry-Perot cavity optical spectrum sensor. Description of the Drawings

[0016] Figure 1 is a schematic diagram of the internal structure of the test chamber of the present invention.

[0017] Figure 2 is a schematic diagram of the connection relationship between the test chamber of the present invention and a computer and a power supply.

[0018] The labels in the figure are: near-infrared light source lamp mounting base 1, near-infrared light source lamp 2, near-infrared Fabry-Perot cavity spectral sensor 3, circuit board 4, circuit board mounting base 5, signal transmission line 6, thermal insulation material 7, electric wire 8, test chamber 9, power supply 10, computer 11. Detailed implementation mode

[0019] The present invention will be further described below in conjunction with the accompanying drawings.

[0020] As Figure 1 and Figure 2 shown is a schematic diagram of an aging test device for a near-infrared Fabry-Perot cavity spectral sensor. A power supply 10 and a computer 11 are respectively arranged on the right side of the test chamber 9. The power supply 10 is electrically connected to the near-infrared light source lamp 2 in the test chamber 9 through an electric wire 8. At the same time, the power supply 10 is also electrically connected to the circuit board 4 in the test chamber 9 through an electric wire 8. The circuit board 4 is an AC-DC conversion circuit board, which converts the alternating current of the power supply 10 into direct current to supply power to the near-infrared Fabry-Perot cavity spectral sensor 3 to be measured. The computer 11 is electrically connected to the circuit board 4 in the test chamber 9 through a signal transmission line 6. The electric wire 8 and the signal transmission line 6 pass through the wire harness through holes on the side wall of the test chamber 9. During the aging test, a thermal insulation material 7 is hermetically arranged in the wire harness through holes to achieve heat preservation and moisture preservation in the test chamber 9.

[0021] The current output by the power supply 10 excites the near-infrared light source lamp 2 to continuously emit near-infrared light. At the same time, the current output by the power supply 10 will be adjusted by the circuit board 4 to provide a changing DC voltage for the near-infrared Fabry-Perot cavity spectral sensor 3 to be measured. At different voltages, the near-infrared Fabry-Perot cavity spectral sensor 3 will respond to light of a specific wavelength and output an electrical signal related to the light intensity to the computer 11. Among them, the near-infrared Fabry-Perot cavity spectral sensor 3 is calibrated, and the wavelength of the light wave that the near-infrared Fabry-Perot cavity spectral sensor 3 can transmit at different voltages is certain and known. Under the conditions of voltage change and light source irradiation, the near-infrared Fabry-Perot cavity spectral sensor 3 is in a simulated normal working state. In this state, the internal stress accumulated during the preparation and packaging of the thin film braking chip and the photoelectric conversion chip in the near-infrared Fabry-Perot cavity spectral sensor 3 will be gradually eliminated. At the same time, the change in its output characteristics will also become gradually obvious as the test time increases. Continuously collect the signals of the near-infrared Fabry-Perot cavity spectral sensor 3 for a period of time. By analyzing the changes in the transmitted peak wavelength and intensity signal of the near-infrared Fabry-Perot cavity spectral sensor 3, the aging degree of the near-infrared Fabry-Perot cavity spectral sensor 3 can be monitored, and the effective working life of the near-infrared Fabry-Perot cavity spectral sensor 3 can be estimated.

[0022] Figure 2An embodiment of the internal structure of the test chamber 9 is shown. A circuit board mounting seat 5 is provided on the inner bottom surface of the test chamber 9. A circuit board 4 is provided on the circuit board mounting seat 5. The near-infrared Fabry-Perot cavity optical spectrum sensor 3 to be tested is provided on the circuit board 4, and the near-infrared Fabry-Perot cavity optical spectrum sensor 3 is connected to the circuit board 4. The voltage regulation of the near-infrared Fabry-Perot cavity optical spectrum sensor 3 is adjusted through the circuit board 4, and the wavelength signal of the near-infrared Fabry-Perot cavity optical spectrum sensor 3 is transmitted to the computer 11 through the circuit board 4. A near-infrared light source lamp 2 is provided directly above the near-infrared Fabry-Perot cavity optical spectrum sensor 3, and the near-infrared light source lamp 2 is fixedly provided on the inner top surface of the test chamber 9 through the near-infrared light source lamp mounting seat 1. The sensing surface of the near-infrared Fabry-Perot cavity optical spectrum sensor 3 is coaxially arranged with the near-infrared light source lamp 2 above the light sensing port, which means that the connection line between the geometric center of the near-infrared light source lamp 2 and the geometric center of the sensing surface of the near-infrared Fabry-Perot cavity optical spectrum sensor 3 is perpendicular to the horizontal plane, thereby ensuring that the light emitted by the near-infrared light source lamp 2 is stable and controllable. The temperature regulating device and the humidity regulating device ensure the constancy of the temperature and humidity during the test. At the same time, by adjusting the temperature and humidity, the cavity length change of the near-infrared Fabry-Perot cavity optical spectrum sensor 3 can be realized, thereby realizing the aging test under various environmental conditions and the life prediction test of the near-infrared Fabry-Perot cavity optical spectrum sensor 3. Generally, the temperature regulating device can be selected as an electric heating rod or an electric heating wire, and the humidity regulating device can be selected as a constant humidity machine or a humidifier.

[0023] The aging test method for a near-infrared Fabry-Perot cavity spectral sensor can be carried out according to the following steps: a. Prepare the near-infrared Fabry-Perot cavity spectral sensor 3 to be aged, ensuring that the near-infrared Fabry-Perot cavity spectral sensor 3 can work normally; b. Set the near-infrared Fabry-Perot cavity spectral sensor 3 to be tested on the circuit board 4 inside the test chamber 9. The circuit board 4 is connected to the power supply 10 through the wire 8. Subsequently, connect the near-infrared Fabry-Perot cavity spectral sensor 3 to the circuit board 4 and start the power supply 10. Connect the circuit board 4 and the computer 11 through the signal transmission line 6, ensuring that the sensing surface of the near-infrared Fabry-Perot cavity spectral sensor 3 is coaxially arranged with the near-infrared light source lamp 2 above the photosensitive port. After adjustment, close the test chamber 9 and seal the wire harness through holes passed by the wire 8 and the signal transmission line 6 with the thermal insulation material 7; c. Adjust the temperature and humidity inside the test chamber 9 until the temperature and humidity conditions required for the aging test are reached; d. Start the first test: The near-infrared light source lamp 2 continuously emits broadband infrared light after being powered on. The near-infrared Fabry-Perot cavity spectral sensor 3 to be tested, under the action of different voltages, transmits the signals of the collected light wave wavelengths to the computer 11 through the circuit board 4. According to the calibration result of the near-infrared Fabry-Perot cavity spectral sensor 3, the voltage and the data of the collected light wave wavelengths are corresponded one by one, and this data is used as the initial comparison data; e. Subsequently, collect the signals again at the same interval; f. Judge the aging degree of the near-infrared Fabry-Perot cavity spectral sensor 3 according to the change of the signals. When the signal change range of the near-infrared Fabry-Perot cavity spectral sensor 3 is within ±1 minimum resolution, it can be considered that the aging is completed; after the aging is completed, turn off the power supply 10. After the temperature in the test chamber 9 cools down to room temperature, take out the near-infrared Fabry-Perot cavity spectral sensor 3 that has completed the aging test. Among them, the near-infrared light source lamp 2 should be a light source with high stability, and after being used for a period of time, it is necessary to re-calibrate the spectrum or replace it with a new near-infrared light source lamp 2 to ensure the consistency of the light source. If the output signal change of the near-infrared Fabry-Perot cavity spectral sensor 3 to be tested is very drastic, it should be re-calibrated after testing for a period of time.

[0024] After the aging is completed, adjust the temperature of the test chamber and continue the test. According to the change of the performance of the near-infrared Fabry-Perot cavity spectral sensor, use the Arrhenius model to infer the life of the near-infrared Fabry-Perot cavity spectral sensor; the Arrhenius model is: λ(T) = Aexp(-Ea / kT), where A and k are constants, T is the absolute temperature, Ea is the activation energy, and λ(T) is the sensor life.

[0025] Embodiment

[0026] The operating voltage range of the near-infrared Fabry-Perot cavity spectral sensor 3 is 24 - 47V, and the operating wavelength range is 1750 - 2150nm. To cover most of the operating range of the near-infrared Fabry-Perot cavity spectral sensor 3, the voltages output by the circuit board 4 are 24V, 29V, 33V, 39V, and 46V respectively. To protect the near-infrared Fabry-Perot cavity spectral sensor 3, the maximum voltage output by the circuit board 4 has a margin of 1V lower than the maximum value of the actual operating voltage of the near-infrared Fabry-Perot cavity spectral sensor 3. The near-infrared light source lamp 2 selects a 0.75W tungsten halogen lamp.

[0027] Let the voltage output by the circuit board 4 be m, the number of acquisitions be n, and the near-infrared Fabry-Perot cavity spectral sensors 3 to be tested be A, B, C... respectively. Then the acquired data are Amn, Bmn, Cmn, Dmn, and Emn respectively.

[0028] Taking the near-infrared Fabry-Perot cavity spectral sensor 3 numbered A as an example, the data Amn output by the near-infrared Fabry-Perot cavity spectral sensor 3 will tend to be stable as n increases. When the value fluctuation between Amn and Amn+3 is small, that is, when the signal change range between Amn and Amn+3 is within ±1 minimum resolution, it can be considered that the aging is completed.

Claims

1. Aging test method for near-infrared Fabry-Perot cavity optical spectrum sensor, characterized in that, It includes the following steps: a. Prepare a near-infrared Fabry-Perot cavity spectroscopic sensor (3) waiting for aging test, and ensure that the near-infrared Fabry-Perot cavity spectroscopic sensor (3) can work normally; b. Set the near-infrared Fabry-Perot cavity spectroscopic sensor (3) to be tested on the circuit board (4) inside the test chamber (9). The circuit board (4) is connected to the power supply (10) through a wire (8). Then, connect the near-infrared Fabry-Perot cavity spectroscopic sensor (3) to the circuit board (4) and start the power supply (10). Connect the circuit board (4) and the computer (11) through a signal transmission line (6). Ensure that the sensing surface of the near-infrared Fabry-Perot cavity spectroscopic sensor (3) and the near-infrared light source lamp (2) above the photosensitive port are coaxially arranged. After adjustment, close the test chamber (9), and use a heat-insulating material (7) to seal the wire bundle through holes through which the wire (8) and the signal transmission line (6) pass; c. Adjust the temperature and humidity inside the test chamber (9) until the temperature and humidity conditions required for the aging test are reached; d. Start the first test: The near-infrared light source lamp (2) continuously emits broadband infrared light after being powered on. The near-infrared Fabry-Perot cavity spectroscopic sensor (3) to be tested, under the action of different voltages, transmits the signals of the collected light wave wavelengths to the computer (11) via the circuit board (4). According to the calibration result of the near-infrared Fabry-Perot cavity spectroscopic sensor (3), the voltage and the data of the collected light wave wavelengths are corresponded one by one, and this data is used as the initial comparison data; e. Subsequently, collect signals again at the same interval; f. Judge the aging degree of the near-infrared Fabry-Perot cavity spectroscopic sensor (3) according to the change of the signals. When the signal change range of the near-infrared Fabry-Perot cavity spectroscopic sensor (3) is within ±1 minimum resolution, it can be considered that the aging is completed; After the aging is completed, turn off the power supply (10). After the temperature inside the test chamber (9) cools down to room temperature, take out the near-infrared Fabry-Perot cavity spectroscopic sensor (3) that has completed the aging test.

2. The aging test method of the near-infrared Fabry-Perot cavity spectral sensor according to claim 1, characterized in that: In step f, after the aging is completed, adjust the temperature of the test chamber (9) and continue the test. According to the change of the performance of the near-infrared Fabry-Perot cavity spectroscopic sensor (3), use the Arrhenius model to infer the life of the near-infrared Fabry-Perot cavity spectroscopic sensor (3); The Arrhenius model is: λ(T) = Aexp(-Ea / kT), where A and k are constants, T is the absolute temperature, Ea is the activation energy, and λ(T) is the sensor life.

3. The aging test method for the near-infrared Fabry-Perot cavity spectral sensor according to claim 1 or 2, characterized in that: In step f, after the aging is completed and the aged near-infrared Fabry-Perot cavity spectroscopic sensor (3) is taken out, put the next near-infrared Fabry-Perot cavity spectroscopic sensor (3) and repeat the above steps b to f.

4. A near-infrared Fabry-Perot cavity spectroscopic sensor aging test device, including a test chamber (9). A circuit board (4) is arranged inside the test chamber (9). The circuit board (4) is respectively connected to a computer (11) and a power supply (10) outside the test chamber (9). The circuit board (4) is used to place a near-infrared Fabry-Perot cavity spectroscopic sensor (3) waiting for aging test. It is characterized in that: A near-infrared light source lamp (2) is provided inside the test chamber (9), and the near-infrared light source lamp (2) is arranged directly above the near-infrared Fabry-Perot cavity spectral sensor (3). A temperature adjustment device and a humidity adjustment device are provided inside the test chamber (9).

5. The aging test device for the near-infrared Fabry-Perot cavity spectroscopic sensor according to claim 4, characterized in that: The circuit board (4) is electrically connected to a computer (11) outside the test chamber (9) through a signal transmission line (6).

6. The aging test device for the near-infrared Fabry-Perot cavity spectral sensor according to claim 5, characterized in that: The circuit board (4) is electrically connected to a power supply (10) outside the test chamber (9) through an electric wire (8).

7. The aging test device for the near-infrared Fabry-Perot cavity spectroscopic sensor according to claim 6, wherein: The test chamber (9) includes a wire harness through-hole for the electric wire (8) and the signal transmission line (6). When the aging test is carried out, a heat-insulating material (7) is hermetically arranged inside the wire harness through-hole.

8. The aging test device for the near-infrared Fabry-Perot cavity spectroscopic sensor according to claim 4, wherein: The temperature adjustment device includes an electric heating rod or an electric heating wire.

9. The aging test device for the near-infrared Fabry-Perot cavity optical spectrum sensor according to claim 4, wherein: The humidity adjustment device includes a constant humidity machine or a humidifying machine.

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