An experimental device for laser-assisted impact scribing of ultrathin brittle crystal materials

Abstract

An experimental device for laser-assisted impact scribing of ultrathin brittle crystal materials relates to the technical field of impact scribing of crystal materials. The experimental device is used for solving the problem that the existing laser-assisted impact scribing of ultrathin brittle crystal materials cannot fix the workpiece through a vacuum chuck or a wax-based bonding method, and the problems that local heat insulation and heat dissipation and temperature monitoring are difficult to guarantee. The experimental device comprises a temperature measuring device, a workpiece clamping device, a workpiece shaft, an X-axis moving platform, a machine tool base, a laser heating device, a Z-axis moving platform, a rotary scribing device and a scribing shaft. The X-axis moving platform is arranged on one side of the upper end of the machine tool base. The workpiece clamping device clamps the workpiece and can realize fine adjustment of the inclination angle of the lower end of the workpiece. The temperature measuring device and the laser heating device are arranged on the middle part of the upper end of the machine tool base, respectively. The Z-axis moving platform is arranged on the other side of the upper end of the machine tool base. The rotary scribing device is arranged towards the workpiece to scribe the workpiece. The experimental device is used for impact scribing experiments of crystal materials.

Description

Technical Field

[0001] This invention relates to the field of impact scribing technology for crystal materials, and specifically to an experimental apparatus for laser-assisted impact scribing of ultrathin brittle crystal materials. Background Technology

[0002] Existing methods for clamping thin workpieces mainly involve vacuum chucks, lateral mechanical clamping, and wax-based bonding. However, in impact scribing experiments on some ultrathin, brittle crystalline materials, the workpieces are extremely small with a large aspect ratio, and laser assistance is required. These experimental environments are characterized by extremely high temperatures and fragile, difficult-to-clamp workpieces, making vacuum chucks or wax-based bonding unsuitable for securing the workpieces. Furthermore, this necessitates strict requirements for localized heat insulation, heat dissipation, and temperature monitoring. In laser-assisted impact scribing experiments, the workpiece can heat up to 1500°C. If paraffin is used to connect the workpiece and the worktable, the paraffin melts at 80°C, causing the workpiece to fall. If high-temperature adhesive is used to connect the workpiece and the worktable, the adhesive beneath the workpiece expands upon heating, causing the workpiece to tilt and deform under stress, leading to experimental failure. If a vacuum chuck is used to clamp the workpiece, the high temperature of the workpiece after laser irradiation is transferred to the spindle via the chuck, potentially causing machine tool malfunctions due to excessive heat. If traditional mechanical clamping methods are used, it is difficult to clamp ultrathin and brittle crystals with a sample thickness of less than 0.35 mm. To solve the above problems, this invention provides an experimental device for laser-assisted impact scribing of ultrathin and brittle crystal materials. Summary of the Invention

[0003] In order to solve the problems in existing laser-assisted impact scribing experiments on ultrathin brittle crystal materials, such as the inability to fix the workpiece by vacuum chuck or wax-based bonding, and the difficulty in ensuring local heat insulation, heat dissipation and temperature monitoring, this invention proposes an experimental device for laser-assisted impact scribing of ultrathin brittle crystal materials.

[0004] The technical solution adopted by the present invention to solve the above-mentioned technical problems is as follows:

[0005] An experimental apparatus for laser-assisted impact scribing of ultrathin brittle crystalline materials includes a temperature measuring device, a workpiece clamping device, a workpiece axis, an X-axis moving platform, a machine tool base, a laser heating device, a Z-axis moving platform, a rotary scribing device, and a scribing axis. The X-axis moving platform is located on one side of the upper end of the machine tool base and can move along the width direction of the machine tool base. The workpiece clamping device is connected to the inner end of the X-axis moving platform through the workpiece axis. The workpiece clamping device clamps the workpiece and can achieve fine adjustment of the tilt angle of the lower end of the workpiece. The temperature measuring device and the laser heating device are respectively located in the middle of the upper end of the machine tool base and both face the workpiece. The Z-axis moving platform is located on the other side of the upper end of the machine tool base and can move along the length direction of the machine tool base. The rotary scribing device is connected to the inner end of the Z-axis moving platform through the scribing axis and faces the workpiece to scribing the workpiece.

[0006] Furthermore, the temperature measuring device includes a temperature measuring probe, a probe support hole, a probe support, and a turntable. The turntable is fixedly connected to the machine tool base via the probe base. The lower end of the probe support is fixedly connected to the rotating end face of the turntable. The upper end of the probe support is hinged to the probe support hole via a rotating shaft. The temperature measuring probe is threadedly connected to the probe support hole.

[0007] Furthermore, the laser heating device includes a laser gun head, a laser platform, a telescopic rod, a rod sleeve, and a laser base. The lower end of the rod sleeve is fixed to the machine tool base via the laser base. The lower end of the telescopic rod is inserted into the upper end of the rod sleeve and can extend, retract, and rotate within the rod sleeve. The telescopic rod and the rod sleeve are locked together by a tightening bolt. The laser platform is fixed to the upper end of the telescopic rod, and the laser gun head is clamped on the laser platform.

[0008] Furthermore, the workpiece clamping device includes a force gauge, a heat insulation material clamping device, a differential screw fine-tuning device, an annular water-cooled heat dissipation sleeve, a heat insulation layer, and a workpiece fixing device. The force gauge is horizontally set, and the differential screw fine-tuning device is connected to the outer end face of the workpiece shaft through the force gauge. The differential screw fine-tuning device can adjust the tilt angle of the heat insulation material clamping device. The heat insulation material clamping device is fixed to the outer end face of the differential screw fine-tuning device. The inner end of the heat insulation layer is clamped on the heat insulation material clamping device, and the annular water-cooled heat dissipation sleeve is fitted on the outside of the outer end of the heat insulation layer. The workpiece is fixed to the outer end face of the heat insulation layer through the workpiece fixing device.

[0009] Furthermore, the differential screw fine-tuning device includes an adjustable base plate, a fixed base plate, two bolts with holes, and a differential screw assembly. The fixed base plate is vertically fixed to the probe of the force gauge. The adjustable base plate is located at the outer end of the fixed base plate. The upper side of the adjustable base plate and the fixed base plate is connected by two bolts with holes. The middle part of the lower side of the fixed base plate and the adjustable base plate is connected by the differential screw assembly. The differential screw assembly can adjust the lifting and lowering of the lower side of the adjustable base plate.

[0010] Furthermore, the differential screw assembly includes a micro-motion platform, a sleeve, and a variable pitch screw. The micro-motion platform is fixed to the inner end face of the adjustable base plate by connecting bolts, the sleeve is fixed to the outer end face of the fixed base plate, the outer end of the micro-motion platform is inserted into the outer end of the sleeve, and the micro-motion platform and the sleeve are linearly slidingly connected. The variable pitch screw is inserted into the fixed base plate, and the shaft of the variable pitch screw includes a large pitch thread section and a small pitch thread section. The large pitch thread section is threadedly connected to the fixed base plate, and the small pitch thread section passes through the sleeve and is inserted into the micro-motion platform, and is threadedly connected to the micro-motion platform.

[0011] Furthermore, the heat insulation material clamping device includes a bottom rotating disk, a top rotating disk, a lever slide rail, a tightening lever, and three rocker arm assemblies. The bottom rotating disk is disposed on the outer end face of the adjustable base plate, and the top rotating disk is disposed parallel to each other on the outer side of the bottom rotating disk. The top rotating disk and the bottom rotating disk are fixedly connected by turntable bolts. The three rocker arm assemblies are evenly distributed along the circumferential direction on the edge of the outer end of the adjustable base plate. The actuating end of the rocker arm assembly is connected to the top rotating disk and the bottom rotating disk, respectively. The lever slide rail is fixedly connected to one side of the outer end of the adjustable base plate. One end of the tightening lever is fixedly connected to the top rotating disk, and the other end of the tightening lever is inserted into the lever slide rail and slides within the lever slide rail. Rotating the tightening lever drives the top rotating disk and the bottom rotating disk to rotate clockwise, causing the actuating ends of the three rocker arm assemblies to press the heat insulation layer inward for clamping. The tightening lever is locked to the lever slide rail by lever bolts.

[0012] Furthermore, the rocker assembly includes a clamping rocker and a rocker slide. The rocker slide is arranged radially along the bottom rotating disk. An arc-shaped notch is formed on the inner end of the rocker slide. The outer edge of the bottom rotating disk is set in the arc-shaped notch and slides in contact with the arc-shaped notch when rotating. A clamping cylinder is fixedly connected to one end of the clamping rocker. The clamping cylinder is set between the top rotating disk and the bottom rotating disk and is located on one side of the rocker slide. Limiting posts are eccentrically set on the front and rear end faces of the clamping cylinder. The limiting posts are respectively inserted into the top rotating disk and the bottom rotating disk. A slide is fixedly connected to the other end of the clamping rocker. The slide is set in the rocker slide and slides along the rocker slide. The clamping cylinder is the actuating end of the rocker assembly. The side wall of the clamping cylinder can squeeze and clamp the outer circumferential side wall of the heat insulation layer.

[0013] Furthermore, the heat insulation layer includes a columnar heat insulation block and an alumina disc. A groove is formed in the middle of the upper surface of the columnar heat insulation block, and the alumina disc is embedded in the groove. A gap is provided between the outer wall of the alumina disc and the side wall of the groove of the columnar heat insulation block.

[0014] Furthermore, the workpiece fixing device includes a workpiece clamping plate and a spring clip. The workpiece clamping plate has a workpiece slot, and a limiting baffle is provided around the lower end face of the workpiece slot. The workpiece is placed in the workpiece slot and located on the upper end face of the limiting baffle. A gap is provided between one side wall of the workpiece slot and the adjacent side wall of the workpiece. The spring clip is placed in the gap. A cap is provided on the upper end face of the two corner points on the other side of the workpiece slot. Three fixing plates are evenly distributed and vertically fixed along the circumferential direction on the lower end face of the outer edge of the workpiece clamping plate. The fixing plates are respectively inserted into the gap between the alumina disc and the columnar heat insulation block. Three tightening through holes are evenly distributed along the circumferential direction on the side wall of the annular water-cooled heat dissipation sleeve. Tightening screws are threaded into the tightening through holes. The tightening screws tighten the columnar heat insulation block, so that the columnar heat insulation block clamps the fixing plates.

[0015] The beneficial effects of this invention compared to the prior art are:

[0016] This invention provides an experimental apparatus for laser-assisted impact scribing of ultrathin brittle crystalline materials. It effectively clamps and fixes the ultrathin brittle crystalline materials, while a laser heating device heats the workpiece surface during the scribing process. A temperature measuring device monitors the temperature of both the workpiece and the force gauge during processing, feeding the data back to a computer. Based on this feedback, the laser power is adjusted in real time, and a ring-shaped water-cooling jacket is activated for heat dissipation and cooling, ensuring smooth scribing. Furthermore, a heat insulation layer is installed under the workpiece to isolate its temperature from the force gauge, ensuring the force gauge's operating temperature remains within a reasonable range. This experimental apparatus also allows for fine-tuning of the workpiece's tilt angle, with an adjustment accuracy at the micrometer level. This meets the precision requirement of the impact scribing experiment, where the tool must scribing from shallow to deep, with the scribing depth controlled within 3 micrometers. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0018] Figure 2 This is a schematic diagram of the temperature measuring device in this invention;

[0019] Figure 3 This is a schematic diagram of the laser heating device in this invention;

[0020] Figure 4 This is a schematic diagram of the workpiece clamping device structure in this invention;

[0021] Figure 5 This is a schematic diagram of the differential screw fine-tuning device in this invention;

[0022] Figure 6 This is a cross-sectional view of the location of the bolt with holes in this invention;

[0023] Figure 7 This is a schematic diagram of the differential screw assembly in this invention;

[0024] Figure 8 This is a top view schematic diagram of the workpiece clamping device in this invention;

[0025] Figure 9 This is a schematic diagram of the thermal insulation material tightening device in this invention;

[0026] Figure 10 This is a schematic diagram of the main structure of the workpiece clamping plate in this invention;

[0027] Figure 11 This is a schematic diagram of the overall structure of the workpiece clamping plate in this invention;

[0028] Figure 12 This is a schematic diagram of the structure of the annular water-cooled heat dissipation sleeve in this invention;

[0029] Figure 13 This is a schematic diagram of the clamping rocker arm structure in this invention;

[0030] Figure 14 This is a schematic diagram of the columnar heat insulation block in this invention. Detailed Implementation

[0031] To make the technical problems solved, the technical solutions, and the beneficial effects of the present invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining the invention and are not intended to limit the invention.

[0032] Specific implementation method one: Combining Figures 1 to 14 This embodiment describes an experimental apparatus for laser-assisted impact scribing of ultrathin brittle crystal materials, comprising a temperature measuring device 1, a workpiece clamping device 2, a workpiece shaft 3, an X-axis moving platform 4, a machine tool base 5, a laser heating device 6, a Z-axis moving platform 7, a rotary scribing device 8, and a scribing shaft 9. The X-axis moving platform 4 is located on one side of the upper end of the machine tool base 5 and can move along the width direction of the machine tool base 5. The workpiece clamping device 2 is connected to the inner end of the X-axis moving platform 4 via the workpiece shaft 3, and clamps the workpiece 37, allowing for fine adjustment of the tilt angle of the lower end of the workpiece 37. The temperature measuring device 1 and the laser heating device 6 are respectively located in the middle of the upper end of the machine tool base 5 and are both facing the workpiece 37. The Z-axis moving platform 7 is located on the other side of the upper end of the machine tool base 5 and can move along the length direction of the machine tool base 5. The rotary scribing device 8 is connected to the inner end of the Z-axis moving platform 7 via the scribing shaft 9, and is positioned facing the workpiece 37 to scribble on the workpiece 37.

[0033] The apparatus of this invention is mainly used for laser-assisted impact scribing experiments on ultrathin brittle crystal materials to study the microscopic damage evolution mechanism and material removal mechanism of ultrathin brittle crystal materials under laser assistance. Gallium nitride, silicon carbide, and other wafer materials are hard and brittle materials. Chip wafers are generally less than 0.35 mm thick, have high hardness, and are prone to brittle fracture. Therefore, requirements are placed on the experimental apparatus for laser-assisted impact scribing of ultrathin brittle crystal materials. Thus, this invention uses a laser heating device 6 for auxiliary processing. Laser heating acts on the workpiece, increasing its temperature and decreasing its hardness, effectively reducing the occurrence of brittle fracture. Therefore, the experimental apparatus can be used to study the influence of laser on the mechanical properties of materials. In impact scribing, an important indicator is the depth of the first crack appearance, which is the brittle-ductile transition depth, and this is the research objective of this experimental apparatus.

[0034] Specific Implementation Method Two: Combining Figure 1 and Figure 2 This embodiment describes a temperature measuring device 1 comprising a temperature probe 10, a probe support hole 11, a probe support 13, and a turntable 14. The turntable 14 is fixedly connected to the machine tool base 5 via a probe base 15. The lower end of the probe support 13 is fixedly connected to the rotating end face of the turntable 14. The upper end of the probe support 13 is hinged to the probe support hole 11 via a rotating shaft 12. The temperature probe 10 is threadedly connected to the probe support hole 11.

[0035] The undisclosed technical features in this embodiment are the same as those in Specific Embodiment 1.

[0036] In this embodiment, the temperature probe 10 is threadedly connected to the probe support hole 11, the probe support hole 11 is connected to the probe support 13 on the rotating shaft 12, and the angle is adjustable. The probe support 13 is bolted to the turntable 14, and the probe base 15 is bolted to the machine tool base 5. The turntable 14 can rotate freely on the probe base 15, thereby realizing arbitrary angle adjustment of the temperature probe 10.

[0037] Specific implementation method three: Combining Figure 1 and Figure 3 This embodiment describes a laser heating device 6 comprising a laser gun head 17, a laser platform 19, a telescopic rod 20, a rod sleeve 21, and a laser base 22. The lower end of the rod sleeve 21 is fixedly connected to the machine tool base 5 via the laser base 22. The lower end of the telescopic rod 20 is inserted into the upper end of the rod sleeve 21 and can extend, retract, and rotate within the rod sleeve 21. The telescopic rod 20 and the rod sleeve 21 are locked together by a tightening bolt. The laser platform 19 is fixedly connected to the upper end of the telescopic rod 20, and the laser gun head 17 is clamped onto the laser platform 19.

[0038] The undisclosed technical features in this embodiment are the same as those in Specific Embodiment 1.

[0039] The sleeve 21 is threadedly fixed to the laser base 22, and the telescopic rod 20 is threadedly fixed to the laser platform 19.

[0040] A slide rod 18 is vertically fixed to one side of the upper end of the laser platform 19. A strip-shaped pressure block 16 is fitted on the slide rod 18. The strip-shaped pressure block 16 is locked to the slide rod 18 by a locking bolt. The strip-shaped pressure block 16 presses on the laser gun head 17 and is locked by a clamping bolt.

[0041] In this embodiment, the laser gun head 17 is mounted on the laser platform 19, which is threadedly connected to the slide rod 18. A strip-shaped pressure block 16 is fitted onto the slide rod 18 and locked with bolts. The strip-shaped pressure block 16 presses against the laser gun head 17 and is also locked with bolts. The lower telescopic rod 20 is threadedly connected to the laser platform 19 and can extend and retract vertically and rotate freely within the rod sleeve 21, thereby adjusting the laser's point of application on the workpiece surface. The telescopic rod 20 is locked to the rod sleeve 21 with bolts, the rod sleeve 21 is threadedly connected to the laser base 22, and the laser base 22 is bolted to the machine tool base 5.

[0042] Specific implementation method four: Combination Figure 1 and Figures 4 to 14 This embodiment describes a workpiece clamping device 2 comprising a force gauge 23, a heat insulation material clamping device 24, a differential screw fine-tuning device 25, an annular water-cooled heat dissipation sleeve 26, a heat insulation layer, and a workpiece fixing device 28. The force gauge 23 is horizontally positioned. The differential screw fine-tuning device 25 is connected to the outer end face of the workpiece shaft 3 via the force gauge 23. The differential screw fine-tuning device 25 can adjust the tilt angle of the heat insulation material clamping device 24. The heat insulation material clamping device 24 is fixed to the outer end face of the differential screw fine-tuning device 25. The inner end of the heat insulation layer is clamped onto the heat insulation material clamping device 24. The annular water-cooled heat dissipation sleeve 26 is fitted onto the outer end of the heat insulation layer. The workpiece 37 is fixed to the outer end face of the heat insulation layer via the workpiece fixing device.

[0043] The undisclosed technical features in this embodiment are the same as those in Specific Embodiment 1.

[0044] The annular water-cooled heat dissipation sleeve 26 has a water-cooled liquid chamber inside. The outer circumferential side wall of the annular water-cooled heat dissipation sleeve 26 is provided with a water inlet 47 and a water outlet 46, which are respectively connected to the water-cooled liquid chamber.

[0045] Since the impact scratching experiment requires the tool to scratch from shallow to deep, and the scratching depth cannot be too large and needs to be controlled within 3 micrometers, the entire clamping platform needs to have a micrometer-level adjustable tilting function. This tilting function is adjusted by the differential screw fine adjustment device 25.

[0046] Since this experiment involves high-temperature conditions of laser heating and the use of a force measuring instrument with strict requirements on temperature conditions, it is not only necessary to fix and support the ultra-thin workpiece, but also to select a suitable heat insulation material to separate the workpiece from the force measuring instrument and control the working temperature of the force measuring instrument within a reasonable range. Therefore, a heat insulation layer and a heat insulation material clamping device 24 for fixing the heat insulation layer and an annular water-cooled heat dissipation sleeve 26 are set up.

[0047] Specific Implementation Method Five: Combining Figures 4 to 7 This embodiment describes a differential screw fine-tuning device 25, which includes an adjustable base plate 29, a fixed base plate 31, two bolts 30 with holes, and a differential screw assembly. The fixed base plate 31 is vertically fixed to the probe of the force gauge 23. The adjustable base plate 29 is located at the outer end of the fixed base plate 31. The upper sides of the adjustable base plate 29 and the fixed base plate 31 are connected by two bolts 30 with holes. The middle of the lower sides of the fixed base plate 31 and the adjustable base plate 29 are connected by the differential screw assembly. The differential screw assembly can adjust the lifting and lowering of the lower side of the adjustable base plate 29.

[0048] The undisclosed technical features in this embodiment are the same as those in Specific Embodiment Four.

[0049] The perforated bolt 30 is inserted into the adjustable base plate 29 and threadedly connected to it. A waist-shaped through hole is provided on the fixed base plate 31 at a position corresponding to the perforated bolt 30. The end of the perforated bolt 30 is inserted into the waist-shaped through hole. A socketed screw is inserted into the side end face of the fixed base plate 31 and threadedly connected to it. A slot is provided on the side wall of the perforated bolt 30, and the end of the socketed screw is inserted into the slot. When the adjustable base plate 29 on the side where the differential screw assembly is located is raised and lowered, the perforated bolt 30 rotates around the axis of the socketed screw. The waist-shaped through hole provides space for the rotation process.

[0050] Specific Implementation Method Six: Combination Figures 4 to 7 This embodiment describes a differential screw assembly comprising a micro-motion platform 32, a sleeve 33, and a variable pitch screw 35. The micro-motion platform 32 is fixed to the inner end face of the adjustable base plate 29 by connecting bolts. The sleeve 33 is fixed to the outer end face of the fixed base plate 31. The outer end of the micro-motion platform 32 is inserted into the outer end of the sleeve 33, and the micro-motion platform 32 and the sleeve 33 are linearly slidably connected. The variable pitch screw 35 is inserted into the fixed base plate 31. The shaft of the variable pitch screw 35 includes a large pitch thread section and a small pitch thread section. The large pitch thread section is threadedly connected to the fixed base plate 31, and the small pitch thread section passes through the sleeve 33 and is inserted into the micro-motion platform 32, and is threadedly connected to the micro-motion platform 32.

[0051] The undisclosed technical features in this embodiment are the same as those in Specific Embodiment Five.

[0052] The differential screw assembly also includes a guide post 34, which is vertically fixed to the outer side wall of the lower end of the micro-motion platform 32. A guide groove is provided on the sleeve 33 along the length direction, and the guide post 34 is inserted into the guide groove and can move along the length direction of the guide groove.

[0053] In this embodiment, the fixed base plate 31 and the force gauge 23 are connected and fixed by bolts. One side of the adjustable base plate 29 is connected to the fixed base plate 31 by two bolts 30 with holes, and a screw passes through the bolt holes. The screw is threaded and locked to the fixed base plate 31, and the screw can rotate between the hole of the bolt 30 and the hole. The other side is a differential screw structure. The micro-motion platform 32 is connected to the adjustable base plate 29 by bolts. The sleeve 33 is fixed to the fixed base plate 31. The micro-motion platform 32 is nested in the sleeve, and the protruding guide post 34 moves axially in the guide groove on the sleeve, but cannot rotate. The variable pitch screw 35 consists of two screws with different pitches. The pitch of the part threaded to the fixed base plate 31 is P1, and the pitch of the part threaded to the micro-motion platform 32 is P2, and P1>P2. When the variable pitch screw 35 rotates inward one revolution, the screw moves inward by P1 relative to the fixed base plate 31, while the micro-motion platform 32 moves outward by P2 relative to the screw. Therefore, the actual distance S that the micro-motion platform 32 lifts the adjustable base plate 29 is P1-P2. Thus, by calibrating the rotation angle θ of the variable pitch screw 35 and controlling the difference between the two pitches, the adjustable base plate 29 can be lifted at the micrometer level. The lifting distance S is...

[0054]

[0055] Specific implementation method seven: Combining Figures 4 to 13 This embodiment describes a heat insulation material clamping device 24 comprising a bottom rotating disk 38, a top rotating disk 39, a lever slide rail 42, a tightening lever 43, and three rocker arm assemblies. The bottom rotating disk 38 is disposed on the outer end face of the adjustable base plate 29, and the top rotating disk 39 is disposed parallel to each other on the outer side of the bottom rotating disk 38. The top rotating disk 39 and the bottom rotating disk 38 are fixed together by rotating disk bolts. The three rocker arm assemblies are evenly distributed along the circumferential direction on the outer edge of the adjustable base plate 29. The rocker arm assemblies are activated by... The ends are respectively connected to the top rotating disk 39 and the bottom rotating disk 38. The lever slide rail 42 is fixed to one side of the outer end of the adjustable base plate 29. One end of the tightening lever 43 is fixed to the top rotating disk 39, and the other end of the tightening lever 43 is inserted into the lever slide rail 42 and slides within the lever slide rail 42. Rotating the tightening lever 43 drives the top rotating disk 39 and the bottom rotating disk 38 to rotate clockwise, causing the execution ends of the three rocker arm assemblies to press the heat insulation layer inward for clamping. The tightening lever 43 and the lever slide rail 42 are locked together by lever bolts.

[0056] The undisclosed technical features in this embodiment are the same as those in Specific Embodiment Four.

[0057] Specific implementation method eight: Combination Figures 4 to 13 This embodiment describes a rocker assembly comprising a clamping rocker 36 and a rocker slide bar 41. The rocker slide bar 41 is arranged radially along the bottom rotating disk 38. An arc-shaped notch is formed on the inner end of the rocker slide bar 41. The outer edge of the bottom rotating disk 38 is disposed within the arc-shaped notch and slides in connection with the arc-shaped notch during rotation. A clamping cylinder is fixedly connected to one end of the clamping rocker 36. The clamping cylinder is disposed between the top rotating disk 39 and the bottom rotating disk 38 and is located on one side of the rocker slide bar 41. Limiting posts are eccentrically arranged on the front and rear end faces of the clamping cylinder, and the limiting posts are respectively inserted into the top rotating disk 39 and the bottom rotating disk 38. A slide bar is fixedly connected to the other end of the clamping rocker 36. The slide bar is disposed within the rocker slide bar 41 and slides along the rocker slide bar 41. The clamping cylinder is the actuating end of the rocker assembly, and the side wall of the clamping cylinder can compress and clamp the outer circumferential side wall of the heat insulation layer.

[0058] The undisclosed technical features in this embodiment are the same as those in Specific Embodiment Seven.

[0059] The adjustable base plate 29 is fixed and does not rotate. The bottom rotating disk 38 is placed on top. Three rocker slide rails 41 are fixed to the adjustable base plate 29 by bolts. One end of the three clamping rocker arms 36 moves in the rocker slide rail 41, and the two protruding cylinders on both sides of the other end are connected to the holes of the bottom rotating disk 38 and the top rotating disk 39, respectively. The upper and lower rotating disks are connected by bolts, that is, the upper and lower rotating disks rotate simultaneously. One end of the tightening lever 43 is screwed into the threaded hole on the side of the rotating disk, and the other end slides in the lever slide rail 42. When the lever is rotated, the upper and lower rotating disks rotate clockwise, which drives the clamping rocker arms 36 to squeeze inward to clamp the columnar thickened asbestos block 27. Then the bolts passing through the tightening lever 43 in the vertical direction are locked to achieve the clamping and fixing effect.

[0060] Specific Implementation Method Nine: Combining Figure 4 , Figure 8 and Figure 14 This embodiment describes a heat insulation layer comprising a columnar heat insulation block 27 and an alumina disc 40. A groove is formed in the middle of the upper surface of the columnar heat insulation block 27, and the alumina disc 40 is embedded in the groove. A gap is provided between the outer wall of the alumina disc 40 and the side wall of the groove of the columnar heat insulation block 27.

[0061] The undisclosed technical features in this embodiment are the same as those in Specific Embodiment Four.

[0062] During the experiment, since the laser action point is very small, in order to ensure that the workpiece is heated evenly, an alumina disc 40 needs to be set below the workpiece to make the workpiece as a whole heated evenly. The lower part of the alumina disc 40 is insulated with a thickened asbestos columnar heat insulation block 27.

[0063] Specific Implementation Method Ten: Combining Figure 4 , Figures 8 to 12 and Figure 14 This embodiment describes a workpiece fixing device 28 comprising a workpiece clamping plate and a spring clip 45. The workpiece clamping plate has a workpiece slot 44, and a limiting baffle is provided around the lower end face of the workpiece slot 44. The workpiece 37 is positioned within the workpiece slot 44 and on the upper end face of the limiting baffle. A gap exists between one side wall of the workpiece slot 44 and the adjacent side wall of the workpiece 37. The spring clip 45 is positioned within this gap. A cap is provided on the upper end face of the two corner points on the other side of the workpiece slot 44. Three fixing plates are evenly distributed and vertically fixed along the circumferential direction on the lower end face of the outer edge of the workpiece clamping plate. The fixing plates are respectively inserted into the gap between the alumina disc 40 and the columnar heat insulation block 27. Three tightening through holes are evenly distributed along the circumferential direction on the side wall of the annular water-cooled heat dissipation sleeve 26. Tightening screws are threaded into the tightening through holes, and the tightening screws tighten the columnar heat insulation block 27, causing the columnar heat insulation block 27 to clamp the fixing plates.

[0064] The undisclosed technical features in this embodiment are the same as those in specific embodiment nine.

[0065] Since this experiment is an impact scribing experiment, the tool tip needs to contact the workpiece surface while allowing for lateral feed space. Therefore, it is best to ensure that there are no obstructions above the workpiece surface around the thin sheet. Furthermore, the workpiece size is very small, making it difficult to fix using a clamping method. Therefore, a slot and elastic clip clamping method is considered. Three tightening screws pass through the through-hole of the annular water-cooling heat sink 26 and press against the upper side of the columnar heat insulation block 27. There is a certain gap between the columnar heat insulation block 27 and the alumina disc 40. Three fixing plates extending from the workpiece slot 44 are inserted into the gap and tightened by bolts. The slot length is slightly longer than the workpiece. One side is equipped with an elastic clip 45, and the other side has two corner caps. When the workpiece 37 is inserted, it presses against the elastic clip 45 and is then squeezed into the slot to achieve fixation.

[0066] Work process

[0067] First, set up the heat insulation material clamping device 24 and connect the force gauge 23 to collect force signals during tool setting and engraving. Place the grooved cylindrical heat insulation block 27 in the center and rotate the tightening lever 43 in the lever slide rail 42. While the cylindrical heat insulation block 27 is clamped, it automatically centers itself under the action of the three tightening levers 43. At this time, tighten the nut of the lever bolt above the lever slide rail 42 to fix the tightening lever 43 in the clamping position. Place the alumina disc 40 into the circular groove in the center of the cylindrical heat insulation block 27. The three fixing pieces extending from the workpiece slot 44 are respectively aligned with the holes of the three tightening screws and inserted into the gap between the alumina disc 40 and the cylindrical heat insulation block 27, and then pressed in place by the tightening screws. Select a 10mm×10mm×0.35mm gallium nitride wafer as the workpiece 37 and put it into the workpiece slot 44. The workpiece clamping part is now complete. At this point, the workpiece is lifted using the differential screw fine-tuning device 25, creating a height difference between the top and bottom of the workpiece. This determines the rotation direction of the scribing axis 9, allowing the tool tip to perform scribing from top to bottom, gradually increasing in depth. For the top-lower-bottom-high case, the scribing axis 9 rotates clockwise. Next, the temperature measuring device 1 and the laser heating device 6 are turned on. The position of the red light spot of the laser gun head 17 is adjusted to align with the workpiece, and preheating begins. The temperature measuring device 1 has two main functions: first, it measures whether the temperature at the laser point of action has reached the expected experimental temperature and feeds the data back to the computer, adjusting the laser power in real time based on the feedback; second, it measures the temperature of the force gauge 23. If the temperature of the force gauge 23 is too high, reaching the critical working temperature, the annular water-cooled heat sink 26 needs to be activated in time for heat dissipation.

[0068] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of this invention is defined by the appended claims and their equivalents.

Claims

1. An experimental apparatus for laser-assisted impact scribing of ultrathin brittle crystal materials, characterized in that: It includes a temperature measuring device (1), a workpiece clamping device (2), a workpiece shaft (3), an X-axis moving platform (4), a machine tool base (5), a laser heating device (6), a Z-axis moving platform (7), a rotary scribing device (8), and a scribing shaft (9). The X-axis moving platform (4) is located on one side of the upper end of the machine tool base (5) and can move along the width direction of the machine tool base (5). The workpiece clamping device (2) is connected to the inner end of the X-axis moving platform (4) through the workpiece shaft (3) and clamps the workpiece (37). It can also achieve fine adjustment of the tilt angle of the lower end of the workpiece (37). The temperature measuring device (1) and the laser heating device (6) are respectively set in the middle of the upper end of the machine tool base (5) and are both set towards the workpiece (37). The Z-axis moving platform (7) is set on the other side of the upper end of the machine tool base (5) and can move along the length direction of the machine tool base (5). The rotating scribing device (8) is connected to the inner end of the Z-axis moving platform (7) through the scribing shaft (9). The rotating scribing device (8) is set towards the workpiece (37) to scribble on the workpiece (37). The workpiece clamping device (2) includes a force gauge (23), a heat insulation material clamping device (24), a differential screw fine adjustment device (25), an annular water-cooled heat dissipation sleeve (26), a heat insulation layer, and a workpiece fixing device (28). The force gauge (23) is set horizontally. The differential screw fine adjustment device (25) is connected to the outer end face of the workpiece shaft (3) through the force gauge (23). The differential screw fine adjustment device (25) can realize the adjustment of the tilt angle of the heat insulation material clamping device (24). The heat insulation material clamping device (24) is fixed on the outer end face of the differential screw fine adjustment device (25). The inner end of the heat insulation layer is clamped on the heat insulation material clamping device (24). The annular water-cooled heat dissipation sleeve (26) is fitted on the outside of the outer end of the heat insulation layer. The workpiece (37) is fixed on the outer end face of the heat insulation layer through the workpiece fixing device. The heat insulation material clamping device (24) includes a bottom rotating disk (38), a top rotating disk (39), a lever slide rail (42), a tightening lever (43), and three rocker arm assemblies. The bottom rotating disk (38) is set on the outer end face of the adjustable base plate (29), and the top rotating disk (39) is set parallel to each other on the outer side of the bottom rotating disk (38). The top rotating disk (39) and the bottom rotating disk (38) are fixed together by rotating disk bolts. The three rocker arm assemblies are evenly distributed along the circumferential direction on the outer edge of the adjustable base plate (29). The actuating end of the rocker arm assembly is respectively connected to the top rotating disk. (39) is connected to the bottom rotating disk (38). The lever slide rail (42) is fixed to one side of the outer end of the adjustable base plate (29). One end of the tightening lever (43) is fixed to the top rotating disk (39). The other end of the tightening lever (43) is inserted into the lever slide rail (42) and slides in the lever slide rail (42). Rotating the tightening lever (43) drives the top rotating disk (39) and the bottom rotating disk (38) to rotate clockwise, causing the execution ends of the three rocker assemblies to press the heat insulation layer inward for clamping. The tightening lever (43) and the lever slide rail (42) are locked together by lever bolts.

2. The experimental apparatus for laser-assisted impact scribing of ultrathin brittle crystal materials according to claim 1, characterized in that: The temperature measuring device (1) includes a temperature measuring probe (10), a probe support hole (11), a probe support (13), and a turntable (14). The turntable (14) is fixed to the machine tool base (5) through the probe base (15). The lower end of the probe support (13) is fixed to the rotating end face of the turntable (14). The upper end of the probe support (13) is hinged to the probe support hole (11) through the rotating shaft (12). The temperature measuring probe (10) is threadedly connected to the probe support hole (11).

3. The experimental apparatus for laser-assisted impact scribing of ultrathin brittle crystal materials according to claim 1, characterized in that: The laser heating device (6) includes a laser gun head (17), a laser platform (19), a telescopic rod (20), a rod sleeve (21), and a laser base (22). The lower end of the rod sleeve (21) is fixed to the machine tool base (5) through the laser base (22). The lower end of the telescopic rod (20) is inserted into the upper end of the rod sleeve (21) and can extend, retract, and rotate within the rod sleeve (21). The telescopic rod (20) and the rod sleeve (21) are locked together by a tightening bolt. The laser platform (19) is fixed to the upper end of the telescopic rod (20), and the laser gun head (17) is clamped on the laser platform (19).

4. The experimental apparatus for laser-assisted impact scribing of ultrathin brittle crystal materials according to claim 1, characterized in that: The differential screw fine-tuning device (25) includes an adjustable base plate (29), a fixed base plate (31), two bolts with holes (30), and a differential screw assembly. The fixed base plate (31) is vertically fixed to the probe of the force gauge (23). The adjustable base plate (29) is set at the outer end of the fixed base plate (31). The upper side of the adjustable base plate (29) and the fixed base plate (31) is connected by two bolts with holes (30). The middle part of the lower side of the fixed base plate (31) and the adjustable base plate (29) is connected by the differential screw assembly. The differential screw assembly can adjust the lifting and lowering of the lower side of the adjustable base plate (29).

5. The experimental apparatus for laser-assisted impact scribing of ultrathin brittle crystal materials according to claim 4, characterized in that: The differential screw assembly includes a micro-motion platform (32), a sleeve (33), and a variable pitch screw (35). The micro-motion platform (32) is fixed to the inner end face of the adjustable base plate (29) by connecting bolts. The sleeve (33) is fixed to the outer end face of the fixed base plate (31). The outer end of the micro-motion platform (32) is inserted into the outer end of the sleeve (33), and the micro-motion platform (32) and the sleeve (33) are linearly slidably connected. The variable pitch screw (35) is inserted into the fixed base plate (31). The shaft of the variable pitch screw (35) includes a large pitch thread section and a small pitch thread section. The large pitch thread section is threadedly connected to the fixed base plate (31), and the small pitch thread section passes through the sleeve (33) and is inserted into the micro-motion platform (32), and is threadedly connected to the micro-motion platform (32).

6. The experimental apparatus for laser-assisted impact scribing of ultrathin brittle crystal materials according to claim 1, characterized in that: The rocker assembly includes a clamping rocker (36) and a rocker slide (41). The rocker slide (41) is arranged radially along the bottom rotating disk (38). An arc-shaped notch is provided on the inner end of the rocker slide (41). The outer edge of the bottom rotating disk (38) is located in the arc-shaped notch and slides in contact with the arc-shaped notch when rotating. A clamping cylinder is fixedly connected to one end of the clamping rocker (36). The clamping cylinder is located between the top rotating disk (39) and the bottom rotating disk (38). Between and located on one side of the rocker slide (41), the front and rear end faces of the clamping cylinder are respectively provided with limit posts, which are respectively inserted into the top rotating disk (39) and the bottom rotating disk (38). The other end of the clamping rocker (36) is fixedly connected to a slide post, which is set in the rocker slide (41) and slides along the rocker slide (41). The clamping cylinder is the execution end of the rocker assembly, and the side wall of the clamping cylinder can squeeze and clamp the outer circumferential side wall of the heat insulation layer.

7. The experimental apparatus for laser-assisted impact scribing of ultrathin brittle crystal materials according to claim 1, characterized in that: The heat insulation layer includes a columnar heat insulation block (27) and an alumina disc (40). A groove is provided in the middle of the upper surface of the columnar heat insulation block (27), and the alumina disc (40) is embedded in the groove. A gap is provided between the outer wall of the alumina disc (40) and the side wall of the groove of the columnar heat insulation block (27).

8. The experimental apparatus for laser-assisted impact scribing of ultrathin brittle crystal materials according to claim 7, characterized in that: The workpiece fixing device (28) includes a workpiece clamping plate and an elastic card (45). The workpiece clamping plate has a workpiece groove (44). Limiting baffles are provided around the lower end face of the workpiece groove (44). The workpiece (37) is placed in the workpiece groove (44) and located on the upper end face of the limiting baffles. A gap is provided between one side wall of the workpiece groove (44) and the adjacent side wall of the workpiece (37). The elastic card (45) is placed in the gap. The other side of the workpiece groove (44) The upper surfaces of the two corner points are provided with caps. Three fixing plates are evenly distributed and vertically fixed on the lower surface of the outer edge of the workpiece clamping plate along the circumferential direction. The fixing plates are respectively inserted into the gap between the alumina disc (40) and the columnar heat insulation block (27). Three tightening through holes are evenly distributed along the circumferential direction on the side wall of the annular water-cooled heat dissipation sleeve (26). Tightening screws are threaded into the tightening through holes. The tightening screws tighten the columnar heat insulation block (27), so that the columnar heat insulation block (27) clamps the fixing plates.

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