Ultrasonic inspection device and ultrasonic inspection method

Abstract

Even if gain adjustment is performed according to the signal intensity of a reflected wave, the internal state of a subject is examined with high precision. The ultrasonic inspection device is configured to have an ultrasonic probe provided with a piezoelectric element for transmitting and receiving ultrasonic waves and an acoustic lens, and is further provided with: a gain setting unit for setting a gain for amplifying reflected waves; a reference wave information acquisition unit that acquires, as reference waves of lens echoes generated in the acoustic lens, reflected waves amplified using the gain set by the gain setting unit when the output ultrasonic waves are transmitted to a test environment in which the subject is not present; an interference wave information acquisition unit that acquires, as interference wave information including information on the internal state of the subject, a reflected wave amplified using the gain set by the gain setting unit when the output ultrasonic wave is transmitted to a test environment in which the subject is present; and an information processing unit that obtains information about the internal state of the subject on the basis of the information about the interference waves and the information about the reference waves.

Description

Technical Field

[0001] The present invention relates to an ultrasonic inspection apparatus and an ultrasonic inspection method for inspecting the internal state of an object to be inspected, such as a semiconductor wafer, using ultrasonic waves. Background Art

[0002] The invention of an ultrasonic inspection apparatus for inspecting the internal state of an object to be inspected using ultrasonic waves is disclosed in Patent Document 1.

[0003] The ultrasonic inspection apparatus of Patent Document 1 includes: an oscillator that outputs high-frequency pulses; a conversion element that outputs ultrasonic waves by the high-frequency pulses from the oscillator and outputs an electric signal proportional thereto by the input of ultrasonic waves from the object to be inspected; and an acoustic lens that supports the conversion element and converges the ultrasonic waves.

[0004] In the ultrasonic inspection apparatus of Patent Document 1, before the ultrasonic inspection of the object to be inspected, data of a lens echo generated by the reciprocation of ultrasonic waves in the acoustic lens is stored in a storage unit. At the time of ultrasonic inspection of the object to be inspected, data of the lens echo stored in the storage unit at the same time is subtracted from the data of the obtained electric signal.

[0005] According to the ultrasonic inspection apparatus of Patent Document 1, a high-precision inspection result in which a lens echo (noise) generated in the acoustic lens is canceled can be obtained.

[0006] In addition, the invention of an ultrasonic inspection apparatus is disclosed in Patent Document 2. Even if the reflection intensity signal including the intensity of the reflected wave returned from the object to be inspected is assumed to be small, in order to capture the small reflection intensity signal without escaping, the signal intensity of the reflected wave is amplified by multiplying it by a prescribed gain value.

[0007] Here, even if the intensity of the radiation wave is the same, the intensity of the reflected wave varies depending on conditions such as the material and thickness of the object to be inspected. In order to address such a problem, Patent Document 2 also describes the following: If the signal intensity of the reflected wave exceeds a prescribed threshold value, gain adjustment is performed in such a way as to reduce the gain value.

[0008] According to the ultrasonic inspection apparatus of Patent Document 2, a high-precision inspection result in which a small reflection intensity signal does not leak can be obtained.

[0009] Prior Art Documents

[0010] Patent Document 1: Japanese Patent Laid-Open No. 4-040362

[0011] Patent Document 2: Japanese Patent Laid-Open No. 8-145961 Summary of the Invention

[0012] Suppose the following application was tried: combining the technique of adjusting the gain according to the signal intensity of the reflected wave of the ultrasonic inspection device according to Patent Document 2 in the technique of canceling the lens echo generated in the acoustic lens of the ultrasonic inspection device of Patent Document 1.

[0013] However, in the combined ultrasonic inspection device of Patent Document 1 and Patent Document 2 described above, it is impossible to adjust the amplitude of the signal waveform for canceling the lens echo. Therefore, even if an attempt is made to cancel the lens echo, the lens echo based on the amplitude variation amount due to gain adjustment cannot be canceled and remains. As a result, there is a problem that the inspection accuracy of the internal state of the subject is impaired.

[0014] The present invention has been completed to solve the above problems, and an object thereof is to provide an ultrasonic inspection device and an ultrasonic inspection method capable of accurately inspecting the internal state of a subject even when gain adjustment is performed according to the signal intensity of a reflected wave or the like.

[0015] Means for Solving the Problems

[0016] To solve the above problems, regarding the ultrasonic inspection device of the present invention,

[0017] It has an ultrasonic probe having a piezoelectric element for transmitting and receiving ultrasonic waves and an acoustic lens, and has a test mode for obtaining information on a reference wave related to a lens echo generated in the acoustic lens, and an inspection mode for obtaining information on the internal state of a subject.

[0018] Its most important feature is that the ultrasonic inspection device is configured to have:

[0019] A reception unit that receives operation mode indication information indicating whether the operation mode is the test mode or the inspection mode, and setting information of an inspection gain value set by a user when the operation mode is the inspection mode;

[0020] A transmission / reception control unit that transmits a prescribed output ultrasonic wave via the acoustic lens by driving the piezoelectric element, and on the other hand, receives a reflected wave of the transmitted output ultrasonic wave via the acoustic lens and the piezoelectric element;

[0021] A gain setting unit that sets multi-stage test gains for amplifying the reflected wave related to the transmission / reception control unit in the test mode based on the operation mode indication information of the reception unit, and on the other hand, sets an inspection gain value based on the setting information of the reception unit among the multi-stage test gains in the inspection mode based on the operation mode indication information of the reception unit;

[0022] A reference wave information acquisition unit that, in the test mode, acquires, as information on the reference wave related to the lens echo, the reflected wave amplified by each of the multiple test gains when the output ultrasonic wave is transmitted to a test environment where the subject is absent, and associates each of the multiple test gains;

[0023] A reference wave database that stores the information on the reference wave related to the lens echo acquired by the reference wave information acquisition unit in association with each of the multiple test gains;

[0024] An interference wave information acquisition unit that, in the inspection mode, acquires, as information on the interference wave containing information on the internal state of the subject, the reflected wave amplified by the inspection gain value when the output ultrasonic wave is transmitted to an inspection environment where the subject is present;

[0025] An information processing unit that obtains information on the internal state of the subject based on the information on the interference wave acquired by the interference wave information acquisition unit and the information on the reference wave stored in the reference wave database.

[0026] Advantages of the Invention

[0027] According to the present invention, even when gain adjustment is performed based on the signal intensity of the reflected wave or the like, it is possible to accurately perform an inspection of the internal state of the subject.

[0028] Problems, configurations, and effects other than those described above will be described in detail in the following embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1A It is a functional block diagram conceptually showing the concept of an ultrasonic inspection apparatus according to an embodiment of the present invention.

[0030] Figure 1B It is an explanatory diagram conceptually showing a situation where a lens echo is generated in an acoustic lens included in an ultrasonic probe.

[0031] Figure 1C It is a functional block diagram showing the schematic configuration of an ultrasonic inspection apparatus according to an embodiment of the present invention.

[0032] Figure 2 It is a flowchart showing the process of constructing a reference wave database included in an ultrasonic inspection apparatus according to an embodiment of the present invention.

[0033] Figure 3 It is a flowchart showing the process of inspection included in an ultrasonic inspection apparatus according to an embodiment of the present invention.

[0034] Figure 4It is an explanatory diagram showing a construction example of a reference wave database.

[0035] Figure 5 It is an explanatory diagram conceptually showing the function of the noise removal unit included in the ultrasonic inspection apparatus according to an embodiment of the present invention.

[0036] Figure 6A It is an explanatory diagram respectively showing an interference wave, a reference wave, and a subject reflected wave after subtraction processing when performing ultrasonic inspection using a first inspection gain value.

[0037] Figure 6B It is an explanatory diagram respectively showing an interference wave, a reference wave, and a subject reflected wave after subtraction processing when performing ultrasonic inspection using a second inspection gain value larger than the first inspection gain value.

[0038] Figure 7 It is an explanatory diagram showing a construction example of a probe specification database.

[0039] Figure 8 It is an explanatory diagram conceptually showing a deformation example of a first lens echo remaining for a reference wave registered in a reference wave database.

[0040] Figure 9 It is an explanatory diagram respectively showing and comparing an interference wave, a subject reflected wave after subtraction processing of an embodiment, and a subject reflected wave after subtraction processing of a deformation example when performing ultrasonic inspection using a first inspection gain value. DETAILED DESCRIPTION OF THE INVENTION

[0041] The ultrasonic inspection apparatus and ultrasonic inspection method according to an embodiment of the present invention will be described in detail with reference to appropriate drawings.

[0042] In the description of the ultrasonic inspection apparatus according to an embodiment of the present invention, constituent elements having common functions are denoted by common reference numerals, and redundant descriptions thereof are omitted.

[0043] 〔Concept of Ultrasonic Inspection Apparatus - 11A According to Embodiment of the Present Invention〕

[0044] First, with reference to Figure 1A 、 Figure 1B the concept of the ultrasonic inspection apparatus - 11A according to an embodiment of the present invention will be described. Figure 1A It is a functional block diagram showing the concept of the ultrasonic inspection apparatus - 11A according to an embodiment of the present invention. Figure 1B It is an explanatory diagram conceptually showing a situation where a lens echo is generated in the acoustic lens - 15 included in the ultrasonic probe - 17.

[0045] As shown in Figure 1AAs shown, the ultrasonic inspection apparatus 11A according to an embodiment of the present invention includes: an ultrasonic probe 17 having a piezoelectric element 13 for transmitting and receiving ultrasonic waves and an acoustic lens 15. The ultrasonic inspection apparatus 11A has a test mode for obtaining information on a reference wave USref related to a lens echo generated in the acoustic lens 15, and an inspection mode for obtaining information on the internal state of a subject 19 such as a semiconductor wafer.

[0046] Specifically, as Figure 1A shown, the ultrasonic inspection apparatus 11A according to an embodiment of the present invention is configured to include: a transmission / reception control unit 21 that transmits a prescribed output ultrasonic wave via the acoustic lens 15 by driving the piezoelectric element 13, and on the other hand, receives a reflected wave of the transmitted output ultrasonic wave via the acoustic lens 15 and the piezoelectric element 13; a gain setting unit 23 that sets multi-stage test gains for amplifying the reflected wave related to the transmission / reception control unit 21 in the test mode, and on the other hand, sets any one inspection gain value among the multi-stage test gains in the inspection mode; a reference wave information acquisition unit 25 that, in the test mode, obtains reflected waves amplified by the respective multi-stage test gains when the output ultrasonic wave is transmitted to a test environment where the subject 19 does not exist, as information on the reference wave USref related to the lens echo, and associates them with the respective multi-stage test gains; a reference wave database 31 that stores the information on the reference wave USref related to the lens echo obtained by the reference wave information acquisition unit 25 in association with the respective multi-stage test gains; an interference wave information acquisition unit 27 that, in the inspection mode, obtains a reflected wave amplified by the inspection gain value when the output ultrasonic wave is transmitted to an inspection environment where the subject 19 exists, as information on an interference wave USint including the internal state of the subject 19; and an information processing unit 29 that obtains information on the internal state of the subject 19 based on the information on the interference wave USint obtained by the interference wave information acquisition unit 27 and the information on the reference wave USref stored in the reference wave database 31.

[0047] 〔Definition of Terms〕

[0048] Here, terms used in the description of the embodiment of the present invention are defined.

[0049] The drive signal of the piezoelectric element 13 output from the transmission / reception control unit 21 is referred to as a transmission signal, the ultrasonic wave output from the piezoelectric element 13 is referred to as an output ultrasonic wave, and the ultrasonic wave returned from the subject 19 is referred to as a subject reflected wave.

[0050] As Figure 1B shown, the prescribed output ultrasonic wave refers to an ultrasonic wave having a prescribed frequency and signal intensity used in ultrasonic inspection.

[0051] The concept of the reflected wave of the output ultrasonic wave is the ultrasonic wave reflected by the test object 19, etc. in the inspection environment where the test object 19 exists when the output ultrasonic wave is transmitted, and includes the information of the reference wave USref related to the lens echo and the information of the test object reflected wave indicating the internal state of the test object 19.

[0052] The information of the reference wave USref refers to the information of the lens echo (noise: reference Figure 1B ) generated by the internal reflection of the output ultrasonic wave transmitted by the drive of the piezoelectric element 13 in the acoustic lens 15.

[0053] The concept of the information of the interference wave USint includes both the information of the test object reflected wave indicating the internal state of the test object 19 and the information of the reference wave USref related to the lens echo generated in the acoustic lens 15 (reference Figure 1B ).

[0054] In addition, both the reference wave USref and the interference wave USint have the property of belonging to the category of reflected waves, but in the description of the embodiment of the present invention, as a special case of the reflected wave, different names are given for processing from the reflected wave.

[0055] The information processing unit 29 reads out the information of the reference wave USref corresponding to the inspection gain value from the stored content of the reference wave database 31, and based on the information of the interference wave USint obtained by the interference wave information acquisition unit 27 and the read information of the reference wave USref, performs a subtraction process of subtracting the signal intensity component of the reference wave USref from the signal intensity component of the interference wave USint at the same moment starting from the output time of the output ultrasonic wave, thereby obtaining the information of the test object reflected wave indicating the internal state of the test object 19.

[0056] According to the ultrasonic inspection device 11A of the embodiment of the present invention, the information processing unit 29 performs a subtraction process of subtracting the signal intensity component of the reference wave USref from the signal intensity component of the interference wave USint at the same moment starting from the output time of the output ultrasonic wave, thereby obtaining the information of the test object reflected wave indicating the internal state of the test object 19. Therefore, even when performing gain adjustment based on the signal intensity of the reflected wave, etc., the inspection of the internal state of the test object 19 can be performed with high accuracy.

[0057] In addition, the ultrasonic inspection apparatus 11A according to an embodiment of the present invention further includes: an image generation unit 35 that generates a cross-sectional image (inspection image) of the subject 19 based on information on the internal state of the subject 19 obtained by the information processing unit 29; and a display control unit 37 that causes the inspection image of the subject 19 generated by the image generation unit 35 to be displayed on the display unit 38.

[0058] If configured in this way, even when gain adjustment is performed based on the signal intensity of the reflected wave or the like, in addition to the effect of accurately performing the inspection of the internal state of the subject 19, the internal state of the subject 19 can be visualized and presented to the user through the inspection image of the subject 19 displayed on the display unit 38.

[0059] In addition, the ultrasonic inspection apparatus 11 according to an embodiment of the present invention further includes: a probe specification database 39 (see Figure 7 ; details will be described later), which stores the identification information of a plurality of ultrasonic probes 17 having different specifications in correspondence with the specification information of each of the plurality of ultrasonic probes 17; and a reception unit 33 that receives the identification information of the ultrasonic probe 17 used in the inspection.

[0060] In this case, the information processing unit 29 may also be configured as follows: read out the specification information of the ultrasonic probe 17 corresponding to the identification information received by the reception unit 33 from the stored content of the probe specification database 39, and set the target time region for performing the subtraction process of subtracting the signal intensity component of the reference wave USref from the signal intensity component of the interference wave USint based on the read specification information of the ultrasonic probe 17.

[0061] Details of the operation and effect of this configuration will be described later.

[0062] In addition, in the ultrasonic inspection apparatus 11 according to an embodiment of the present invention, in addition to the operation mode indication information indicating one of the test mode and the inspection mode, the reception unit 33 also receives the inspection gain value set by the user when the operation mode is the inspection mode, the replacement requirement of the ultrasonic probe 17, and information indicating that the set environment temperature of the ultrasonic inspection apparatus 11 deviates from the specified temperature range.

[0063] In this case, the reference wave information acquisition unit 25 may also be configured as follows: reconstruct the reference wave database 31 when the reception unit 33 receives the replacement requirement of the ultrasonic probe 17 or information indicating that the set environment temperature of the ultrasonic inspection apparatus 11 deviates from the specified temperature range.

[0064] If configured in this way, the reconstruction of the reference wave database 31 can be performed timely and accurately.

[0065] As a result, even when gain adjustment is performed based on the signal intensity of the reflected wave or the like, the effect of further improving the inspection of the internal state of the subject 19 with high precision can be achieved.

[0066] 〔Schematic Structure of Ultrasonic Inspection Device 11C According to Embodiment of the Present Invention〕

[0067] Next, with reference to Figure 1C the schematic structure of the ultrasonic inspection device 11C according to the embodiment of the present invention will be described. Figure 1C is a functional block diagram showing the schematic structure of the ultrasonic inspection device 11C according to the embodiment of the present invention.

[0068] Figure 1A The ultrasonic inspection device 11A shown in Figure 1C and the ultrasonic inspection device 11C shown in both have common functions. However, in Figure 1A the ultrasonic inspection device 11A shown in, the functions are represented from a conceptual point of view. In contrast, in Figure 1C the ultrasonic inspection device 11C shown in, the functions are represented from the point of view of a concrete structure, and the two differ in this regard.

[0069] Therefore, by focusing on the differences (including supplementary content) between the two and making an explanation, instead of Figure 1C the description of the ultrasonic inspection device 11C shown in.

[0070] In addition, in the description of the embodiment of the present invention, when it is not necessary to distinguish between Figure 1A the ultrasonic inspection device 11A shown in and Figure 1C the ultrasonic inspection device 11C shown in, they are sometimes collectively referred to as "ultrasonic inspection device 11".

[0071] As shown in Figure 1C , the structure of the ultrasonic inspection device 11C includes: a control device 20; and a probe driving unit 22 that drives the piezoelectric element 13 included in the ultrasonic probe 17 and scans and drives the ultrasonic probe 17 itself in three axial directions.

[0072] The piezoelectric element 13 is configured to sandwich, for example, a piezoelectric film (not shown) made of zinc oxide (ZnO), ceramics, fluorine-based copolymer, etc. between a pair of electrodes. The piezoelectric element 13 vibrates the piezoelectric film by applying a predetermined voltage between the pair of electrodes, and operates in such a way as to transmit a predetermined output ultrasonic wave through this vibration. In addition, the piezoelectric element 13 operates in such a way as to convert the reflected wave received by the piezoelectric film into a voltage signal generated between the pair of electrodes and output it as information on the interference wave USint (see Figure 1B ).

[0073] The acoustic lens 15 functions to focus the specified output ultrasonic wave transmitted from the piezoelectric element 13 on a desired focal position.

[0074] As Figure 1A , Figure 1C shown, the subject 19 is placed in a submerged state on the bottom of a water tank 18 filled with water as a propagation medium for ultrasonic waves. The subject 19 is, for example, a semiconductor package including a semiconductor wafer having a stacked structure.

[0075] The ultrasonic probe 17 is arranged to face the surface of the subject 19 with a specified interval therebetween in a state of being immersed in water.

[0076] The control device 20 is configured to include: a transceiver control unit 21, a gain setting unit 23, a noise removal unit 28, a gate setting unit 30, a reference wave database 31, a reception unit 33, an image generation unit 35, a display control unit 37, a display unit 38, a probe specification database 39, and a scan control unit 41.

[0077] In addition, there are no particular differences among the transceiver control unit 21, the reference wave database 31, the reception unit 33, the image generation unit 35, the display control unit 37, the display unit 38, and the probe specification database 39. Therefore, repeated descriptions are omitted.

[0078] Here, the problems and gist of the ultrasonic inspection device 11 according to an embodiment of the present invention are mentioned.

[0079] Assume that an inspection image related to the internal state of the subject 19 is generated by only using the information of the interference wave USint. In this case, the information of the interference wave USint includes, in addition to the information of the subject reflection wave indicating the internal state of the subject 19, the information of the reference wave USref (lens echo noise) related to the lens echo generated in the acoustic lens 15. Therefore, the lens echo noise is reflected in the inspection image, and a high-precision inspection image cannot be generated.

[0080] Therefore, in order to generate and utilize a high-precision inspection image, it is particularly important to solve the following problems.

[0081] The first problem is to make the subject reflection wave with a relatively weak signal intensity appear without omission and generate an inspection image. This is because, among the subject reflection waves with a relatively weak signal intensity, there may be latent defects such as minute voids and delaminations as the internal state of the subject 19 such as a semiconductor wafer.

[0082] The second problem is to pre-remove the lens echo noise from the information of the interference wave USint in the pre-stage of generating an image. This is because, in order to generate and utilize a high-precision inspection image, it is strongly required to carefully obtain the information of the subject reflection wave that forms the basis of the inspection image in a manner that does not include the lens echo noise.

[0083] To solve the first problem, in the ultrasonic inspection apparatus 11 according to an embodiment of the present invention, for the purpose of picking up the subject reflection wave with a weak signal intensity without omission, gain adjustment is performed by multiplying the information of the interference wave USint (time-series change information of the interference waveform) output from the piezoelectric element 13 included in the ultrasonic probe 17 by a prescribed inspection gain value corresponding to the signal intensity for amplification. However, if gain adjustment for amplifying the information of the interference wave USint is performed, in addition to the information of the subject reflection wave, the lens echo noise is also amplified.

[0084] On the other hand, to solve the second problem, in the pre-stage of inspection image generation, in order to pre-remove the lens echo noise from the information of the interference wave USint, the signal intensity component of the reference wave USref is subtracted from the signal intensity component of the interference wave USint at the same time point starting from the output time of the output ultrasonic wave. However, as in Patent Document 1, if the signal intensity component of the reference wave (lens echo) USref that does not take into account the gain adjustment is subtracted from the signal intensity component of the interference wave USint after the gain adjustment, the lens echo based on the amplitude variation amount due to the gain adjustment cannot be canceled and remains, and as a result, the inspection accuracy of the internal state of the subject 19 is impaired.

[0085] Therefore, in the ultrasonic inspection apparatus 11 according to an embodiment of the present invention, in order to solve the above-described first and second problems at once and perform the inspection of the internal state of the subject 19 with high precision even when gain adjustment is performed based on the signal intensity of the reflection wave or the like, a gain setting unit 23 and a noise removal unit 28 are provided respectively.

[0086] That is, the gain setting unit 23 has the following functions: in a test mode for obtaining the information of the reference wave USref related to the lens echo generated in the acoustic lens 15, sets a multi-stage test gain for amplifying the reflection wave related to the transmission / reception control unit 21, and on the other hand, in an inspection mode for obtaining the information of the internal state of the subject 19 such as a semiconductor wafer, sets any one of the inspection gain values of the multi-stage test gain.

[0087] When described in detail, in the test mode, the gain setting unit 23 sets multi-level test gains, and obtains reflected waves when output ultrasonic waves are transmitted to a test environment without the subject 19, and the reflected waves amplified by each of the multi-level test gains, as information on the reference wave USref related to the lens echo, and associates them with each of the multi-level test gains respectively. The information on the reference wave USref related to the lens echo obtained in this way is stored in the reference wave database 31 corresponding to each of the multi-level test gains, and is used appropriately in the noise removal process by the noise removal unit 28 (the details will be described later).

[0088] On the other hand, in the inspection mode, the gain setting unit 23 sets any one inspection gain value (the gain setting value accepted by the acceptance unit 33) among the multi-level test gains, and obtains reflected waves when output ultrasonic waves are transmitted to an inspection environment with the subject 19, and the reflected waves amplified by the inspection gain value, as information on the interference wave USint including the internal state information of the subject 19. The information on the interference wave USint obtained in this way is used appropriately in the noise removal process by the noise removal unit 28 (the details will be described later).

[0089] The gain setting unit 23 has the functions of a "reference wave information acquisition unit" and an "interference wave information acquisition unit".

[0090] In the inspection mode, the noise removal unit 28 reads out the information on the reference wave USref corresponding to the inspection gain value from the stored content of the reference wave database 31, and performs a subtraction process of subtracting the signal intensity component of the reference wave USref from the signal intensity component of the interference wave USint at the same moment starting from the output time of the output ultrasonic wave, based on the information on the interference wave USint including the internal state information of the subject 19 amplified by the gain setting unit 23 and the read information on the reference wave USref.

[0091] The same moment starting from the output time of the output ultrasonic wave means a state where the phases of the interference wave USint and the reference wave USref are consistent. In addition, regarding the phase consistency between the interference wave USint and the reference wave USref, the interference wave USint and the reference wave USref with a common time axis can also be displayed on the display screen of the display unit 38, and the user can appropriately execute while visually confirming.

[0092] The signal intensity component refers to the intensity component of the reflected wave that the output ultrasonic wave transmitted from the piezoelectric element 13 collides with the subject 19 etc. and returns to the piezoelectric element 13 (for example, the voltage value generated by the piezoelectric element 13 due to the reflected wave).

[0093] In summary, the noise removal unit 28 removes the information of the reference wave USref related to the lens echo (noise) from the information of the interference wave USint including the information of the internal state of the subject 19, and thus outputs the information of the internal state of the subject 19 based on the subject reflection wave.

[0094] The information of the internal state of the subject 19 based on the subject reflection wave thus output is displayed on the display screen of the display unit 38.

[0095] The noise removal unit 28 corresponds to the "information processing unit".

[0096] The gate setting unit 30 detects the depth position on the surface of the subject 19 based on the information of the reflected wave related to the transmission / reception control unit 21 (the interference wave USint including the information of the internal state of the subject 19), etc., and sets the time region for identification when using the detected depth position as the trigger point (refer to Figure 8 : the depth position is related to the elapsed time) as the S gate, and sets the time region divided by the end point delayed by a predetermined time from the trigger point identified through the S gate as the F gate (the inspection target region). For the detailed setting method of the S gate and the F gate, for example, refer to the content of Japanese Patent No. 7042149.

[0097] The scan control unit 41 shares various information including the transmission / reception timing related to ultrasonic waves and the inspection target part with the transmission / reception control unit 21, and based on this various information, issues a scan control command to the probe drive unit 22. That is, the scan control unit 41 operates in the following manner: while acquiring the current position information of the ultrasonic probe 17 via the mechanical control unit 43 provided in the probe drive unit 22, it performs drive control of the mechanical control unit 43 and the three-axis scanner 45 that scans and drives the ultrasonic probe 17 in the three axial directions of the X axis, Y axis, and Z axis.

[0098] 〔Operation of the ultrasonic inspection apparatus 11 according to the embodiment of the present invention〕

[0099] Next, with appropriate reference to Figures 2 - 5 、 Figure 6A 、 Figure 6B the operation of the ultrasonic inspection apparatus 11 according to the embodiment of the present invention will be described.

[0100] Figure 2 is a flowchart showing the flow of the reference wave database construction process included in the ultrasonic inspection apparatus 11. Figure 3 is a flowchart showing the flow of the inspection process included in the ultrasonic inspection apparatus 11. Figure 4 is an explanatory diagram showing a construction example of the reference wave database 31. Figure 5This is an explanatory diagram conceptually showing the function of the noise removal unit 28 included in the ultrasonic inspection apparatus 11.

[0101] 〔Reference wave database construction process〕

[0102] First, refer to Figure 2 and Figure 4 to explain the flow of the construction process of the reference wave database 31 referred to during the inspection process of the ultrasonic inspection apparatus 11.

[0103] As a prerequisite, the operation mode of the ultrasonic inspection apparatus 11 is set to a test mode in which information on the reference wave USref related to the lens echo generated in the acoustic lens 15 is obtained with a multi-stage test gain.

[0104] In step S21, the control device 20 included in the ultrasonic inspection apparatus 11C sets the count value n of the test gain level counter to 1 (n = 1).

[0105] In steps S22 to S23, the gain setting unit 23 of the control device 20 obtains the nth gain value among the multi-stage test gains corresponding to the count value n of the test gain level counter CT, and sets the obtained nth gain value.

[0106] In step S24, the transmission / reception control unit 21 of the control device 20 transmits a prescribed output ultrasonic wave via the acoustic lens 15 by driving the piezoelectric element 13.

[0107] In step S25, the gain setting unit 23 of the control device 20 obtains information on the reference wave USref corresponding to the nth gain value. In addition, the information on the reference wave USref corresponding to the nth gain value refers to waveform information obtained by multiplying the lens echo waveform, which is the reflected wave in the case where the output ultrasonic wave is transmitted to a test environment where the subject 19 is not present, by the nth gain value (refer to Figure 5 ).

[0108] In step S26, the gain setting unit 23 of the control device 20 registers the combination of the nth gain value and the information on the reference wave USref corresponding to the nth gain value in the reference wave database (reference wave DB) 31.

[0109] In step S27, the gain setting unit 23 of the control device 20 determines whether all the gain values have been processed for the multi-stage test gains.

[0110] If the result of the determination in step S27 is a determination that not all the gain values have been processed (step S27: No), the control device 20 advances the processing flow to the next step S28.

[0111] On the other hand, when the result of the determination in step S27 is a determination meaning that the processing of all gain values is completed (step S27 is YES), the control device 20 ends the reference wave database construction process.

[0112] In step S28, the control device 20 increments the count value n of the test gain level counter (n = n + 1). Then, the control device 20 returns the processing flow to step S22, and repeats the processing of steps S22 to S26 until a determination result meaning that all gain values have been processed is obtained.

[0113] In Figure 4 In the construction example of the reference wave database 31 shown, as multi-level test gains, information on the reference wave USref is registered corresponding to each of the three-stage gain values (30 / 50 / 80: unit dB). Here, as the information on the reference wave USref registered in the reference wave database 31, for example, a method of storing the change in the signal intensity data with respect to the change in the elapsed time starting from the transmission of the output ultrasonic wave can be adopted.

[0114] In addition, the number of levels of the test gain is not limited to the above three levels. For example, an appropriate number of levels such as a 1 dB unit between 1 and 80 dB can also be adopted. Also, for the lower limit / upper limit of the test gain, appropriate values can be adopted in consideration of various situations such as the material of the subject 19 and the focal position.

[0115] 〔Inspection process〕

[0116] Next, the process flow of the inspection process performed by the ultrasonic inspection device 11 will be described with appropriate reference to Figure 3 、 Figure 5 、 Figure 6A and Figure 6B 。

[0117] As a premise, the operation mode of the ultrasonic inspection device 11 is set to an inspection mode for obtaining information on the internal state of the subject 19 such as a semiconductor wafer.

[0118] In step S31, the control device 20 included in the ultrasonic inspection device 11C determines whether the reconstruction condition of the reference wave database (reference wave DB) 31 is satisfied.

[0119] Here, the reconstruction condition means, for example, a case where the reception unit 33 has received a request for replacement of the ultrasonic probe 17, or information meaning that the set environment temperature of the ultrasonic inspection device 11 has deviated from the specified temperature range. When the ultrasonic probe 17 is replaced or the set environment temperature of the ultrasonic inspection device 11 has deviated from the specified temperature range, if the current reference wave database 31 is directly used, the inspection result may be impaired.

[0120] Therefore, in step S31, the control device 20 determines whether the reconstruction condition of the reference wave database 31 is satisfied.

[0121] When the result of the determination in step S31 is a determination that the reconstruction condition is satisfied (step S31 is), the control device 20 advances the processing flow to the next step S32.

[0122] On the other hand, when the result of the determination in step S31 is a determination that the reconstruction condition is not satisfied (step S31 is no), the control device 20 jumps the processing flow to step S33.

[0123] In step S32, the control device 20 causes the display control unit 37 to present information prompting the reconstruction of the reference wave DB. After that, the control device 20 ends the series of inspection processing flows.

[0124] In addition, the user who has received the information prompting the reconstruction of the reference wave DB causes the ultrasonic inspection device 11C to perform Figure 2 the reference wave DB construction process shown.

[0125] In steps S33 to S34, the gain setting unit 23 of the control device 20 acquires the inspection gain value set by the user via the reception unit 33 when the operation mode is the inspection mode, and sets the acquired inspection gain value.

[0126] In step S35, the transmission / reception control unit 21 of the control device 20 transmits a prescribed output ultrasonic wave via the acoustic lens 15 by driving the piezoelectric element 13.

[0127] In step S36, the gain setting unit 23 of the control device 20 acquires information on the interference wave USint corresponding to the inspection gain value. In addition, the information on the interference wave USint corresponding to the inspection gain value refers to the waveform information obtained by multiplying the overlapping waveform of the reference wave USref related to the reflected wave of the subject and the lens echo when the output ultrasonic wave is transmitted to the inspection environment where the subject 19 exists by the inspection gain value (see Figure 5 ).

[0128] In step S37, the gain setting unit 23 of the control device 20 reads out and acquires the information on the reference wave USref corresponding to the inspection gain value from the stored content of the reference wave database 31.

[0129] In step S38, the noise removal unit 28 of the control device 20 performs a subtraction process of subtracting the signal intensity component of the reference wave USref obtained in step S37 from the signal intensity component of the interference wave USint at the same moment starting from the output time of the ultrasonic wave output, based on the information of the interference wave USint obtained in step S36 and the information of the reference wave USref obtained in step S37. This subtraction process is executed for each unit moment on the time axis. Thus, information on the subject reflection wave representing the internal state of the subject 19 is obtained.

[0130] Here, referring Figure 6A 、 Figure 6B , the operation of the ultrasonic inspection device 11 will be described.

[0131] Figure 6A are explanatory diagrams respectively showing the interference wave USint, the reference wave USref, and the subject reflection wave after the subtraction process when performing ultrasonic inspection using the first inspection gain value. Figure 6B are explanatory diagrams respectively showing the interference wave USint, the reference wave USref, and the subject reflection wave after the subtraction process when performing ultrasonic inspection using the second inspection gain value which is larger than the first inspection gain value.

[0132] In the case of the first embodiment where ultrasonic inspection is performed using the first inspection gain value, as Figure 6A shown, the noise removal unit 28 performs a subtraction process of subtracting the signal intensity component of the reference wave USref corresponding to the first inspection gain value from the signal intensity component of the interference wave USint corresponding to the first inspection gain value. Thus, information on the subject reflection wave of the first embodiment after the subtraction process is obtained. If the information on the subject reflection wave of the first embodiment is observed, it can be seen that the lens echo noise is removed.

[0133] On the other hand, in the case of the second embodiment where ultrasonic inspection is performed using the second inspection gain value which is larger than the first inspection gain value, as Figure 6B shown, the noise removal unit 28 performs a subtraction process of subtracting the signal intensity component of the reference wave USref corresponding to the second inspection gain value from the signal intensity component of the interference wave USint corresponding to the second inspection gain value. Thus, information on the subject reflection wave related to the second embodiment after the subtraction process is obtained. If the information on the subject reflection wave related to the second embodiment is observed, it can be seen that the lens echo noise is removed and the signal intensity (height of the wave) of the subject reflection wave is amplified compared to the case where the first inspection gain value is used.

[0134] Through such amplification of the signal intensity of the subject reflection wave, it is possible to make the minute defects latent inside the subject 19 become apparent without being buried in the white noise inevitably generated along with the signal amplification.

[0135] In step S39, the gate setting unit 30 of the control device 20 detects the depth position on the surface of the subject 19 based on the information of the interference wave USint obtained in step S36, etc., and sets the time region when identifying with the detected depth position as the trigger point (refer to Figure 8 ) as the S gate, and sets the time region delayed by a predetermined time from the trigger point identified through the S gate as the F gate (inspection target region).

[0136] In step S40, the image generation unit 35 of the control device 20 generates an inspection image of the internal state of the subject 19 based on the reflected wave of the subject related to the F gate (inspection target region) set in step S39. The inspection image generated in this way is amplified by multiplying by a predetermined inspection gain value and is generated based on the reflected wave of the subject from which the influence of the lens echo has been removed. Therefore, the internal state of the subject 19 is represented with high precision.

[0137] In step S41, the display control unit 37 of the control device 20 causes the inspection image generated in step S40 to be displayed on the display screen of the display unit 38. Thereby, the internal state of the subject 19 can be visualized and presented to the user through the inspection image displayed on the display unit 38.

[0138] 〔Modification example of the noise removal unit 28〕

[0139] Next, refer to Figures 7 - 9 A modification example of the noise removal unit 28 will be described.

[0140] Figure 7 is an explanatory diagram showing a construction example of the probe specification database 39. Figure 8 is an explanatory diagram conceptually showing a modification example in which the first lens echo of the reference wave USref registered in the reference wave database 31 remains.

[0141] In the modification example of the noise removal unit 28, a structure in which the first lens echo among the lens echoes related to the reference wave USref registered in the reference wave database 31 remains is adopted.

[0142] Specifically, the first lens echo (refer to Figure 8 ) among the lens echoes related to the reference wave USref is generated earliest starting from the time of sending the ultrasonic wave in multiple lens echoes, and its signal intensity is also relatively high. The first lens echo is sometimes used as a reference for the user to know the lower limit position when positioning the ultrasonic probe 17 in the vertical direction.

[0143] That is, in order to align the focus of the ultrasonic wave with the interface inside the subject 19, the user gradually lowers the ultrasonic probe 17 toward the subject 19 through the three-axis scanner 45. At this time, on the time axis, the position of the reflected wave on the surface of the subject 19 approaches the position of the first lens echo.

[0144] When the ultrasonic probe 17 is lowered to a position before it collides with the subject 19, on the time axis, the reflected wave on the surface of the subject 19 reaches a position adjacent to the first lens echo. Therefore, based on the relative positional relationship on the time axis between the reflected wave on the surface of the subject 19 and the first lens echo, the user can predict the possibility of the ultrasonic probe 17 colliding with the subject 19.

[0145] As described above, the position of the first lens echo on the time axis is sometimes used as a reference for the user to know the lower limit position when positioning the ultrasonic probe 17 in the vertical direction. Therefore, a structure is adopted in which the first lens echo among the lens echoes related to the reference wave USref registered and remaining in the reference wave database 31 is used.

[0146] In addition, when determining the time region related to the first lens echo in the reference wave USref, refer to Figure 7 the probe specification database 39 shown. As Figure 7 shown, in the probe specification database 39, identification information (PR1, PR2,..., PR9) of a plurality of ultrasonic probes 17 with different specifications is registered, and the specification information (including the start point of the first echo gate and the width of the first echo gate) of each of the plurality of ultrasonic probes 17 is correspondingly registered. In addition, the specification information (start point of the first echo gate, width of the first echo gate) of each of the plurality of ultrasonic probes 17 depends on the specifications of the acoustic lens 15 each ultrasonic probe 17 has and is set.

[0147] By referring to the probe specification database 39, the noise removal unit 28 of the modified example determines the time region related to the first lens echo in the reference wave USref, and excludes the determined time region related to the first lens echo from the target time region related to the noise removal process.

[0148] In other words, the target time region for performing the subtraction process of subtracting the signal intensity component of the reference wave USref from the signal intensity component of the interference wave USint is set to exclude the time region related to the first lens echo among multiple lens echoes according to the specification information of the ultrasonic probe 17.

[0149] Figure 9Compare and show the interference wave USint corresponding to the first inspection gain value, the reflected wave of the subject of the first embodiment, and the reflected wave of the subject of the modified example, respectively, in the case of performing ultrasonic inspection using the first inspection gain value.

[0150] If the information of the reflected wave of the subject of the modified example is compared with the information of the reflected wave of the subject of the first embodiment, it can be seen that the first lens echo noise remains.

[0151] In the ultrasonic inspection apparatus 11 having the noise removal unit 28 of the modified example, when performing the subtraction process of subtracting the signal intensity component of the reference wave USref from the signal intensity component of the interference wave USint, the target time region is set to exclude the time region related to the first lens echo according to the specification information of the ultrasonic probe 17. Therefore, the user can know the reference of the lower limit position of the ultrasonic probe 17 and can prevent the ultrasonic probe 17 from colliding with the subject 19.

[0152] 〔Ultrasonic inspection method according to an embodiment of the present invention〕

[0153] Next, the ultrasonic inspection method according to an embodiment of the present invention will be described.

[0154] The ultrasonic inspection method according to an embodiment of the present invention is premised on the following ultrasonic inspection method, which is used in an ultrasonic inspection apparatus 11 having an ultrasonic probe 17 including a piezoelectric element 13 that transmits and receives ultrasonic waves and an acoustic lens 15, and having a test mode for obtaining information on a reference wave related to a lens echo generated in the acoustic lens 15 and an inspection mode for obtaining information on the internal state of the subject 19. By driving the piezoelectric element 13, a prescribed output ultrasonic wave is transmitted via the acoustic lens 15. On the other hand, the reflected wave of the transmitted output ultrasonic wave is received via the acoustic lens 15 and the piezoelectric element 13, thereby inspecting the internal state of the subject 19 using ultrasonic waves.

[0155] The ultrasonic inspection method according to an embodiment of the present invention sequentially performs the following steps in the test mode: a step of setting multi-stage test gains for amplifying the reflected wave; a step of constructing a reference wave database 31 that obtains, as information on the reference wave USref related to the lens echo, the reflected waves amplified by the respective multi-stage test gains when the output ultrasonic wave is transmitted to a test environment where the subject 19 does not exist, and associates the obtained information on the reference wave USref related to the lens echo with the respective multi-stage test gains.

[0156] On the other hand, in the inspection mode, the following steps are sequentially performed: a step of setting any one of the inspection gain values among the multi-stage test gains; a step of obtaining, as information of the interference wave USint including information on the internal state of the object under inspection 19, the reflected wave amplified by using the inspection gain value when the output ultrasonic wave is transmitted to the inspection environment where the object under inspection exists; and an information processing step of obtaining information on the internal state of the object under inspection 19 based on the information of the obtained interference wave USint and the information of the reference wave USref stored in the reference wave database 31.

[0157] According to the ultrasonic inspection method of the embodiment of the present invention, in the information processing step, information on the internal state of the object under inspection 19 is obtained based on the information of the obtained interference wave USint and the information of the reference wave USref stored in the reference wave database 31. Therefore, even when gain adjustment is performed based on the signal intensity of the reflected wave or the like, the inspection of the internal state of the object under inspection 19 can be performed with high accuracy.

[0158] In addition, the ultrasonic inspection method of the embodiment of the present invention may also adopt the following structure: in the information processing step, the information of the reference wave USref corresponding to the inspection gain value is read out from the stored content of the reference wave database 31, and based on the information of the obtained interference wave USint and the read-out information of the reference wave USref, a subtraction process of subtracting the signal intensity component of the reference wave USref from the signal intensity component of the interference wave USint is performed, thereby obtaining information on the internal state of the object under inspection 19.

[0159] If configured in this way, in the information processing step, information on the internal state of the object under inspection 19 is obtained by performing a subtraction process of subtracting the signal intensity component of the reference wave USref from the signal intensity component of the interference wave USint. Therefore, through a more specific embodiment, even when gain adjustment is performed based on the signal intensity of the reflected wave or the like, the effect of accurately performing the inspection of the internal state of the object under inspection 19 can be achieved.

[0160] In addition, the ultrasonic inspection method of the embodiment of the present invention may also adopt a structure further having the following steps: a step of generating an inspection image of the object under inspection 19 based on the information on the internal state of the object under inspection 19 obtained in the information processing step; and a step of causing the display unit 38 to display the generated inspection image of the object under inspection 19.

[0161] If configured in this way, even when gain adjustment is performed based on the signal intensity of the reflected wave or the like, in addition to the effect of accurately performing the inspection of the internal state of the subject 19, the internal state of the subject 19 can be visualized and presented to the user through the inspection image of the subject 19 displayed on the display unit 38.

[0162] In addition, the ultrasonic inspection method according to an embodiment of the present invention may also adopt the following configuration: It further has a process of identifying information of a plurality of ultrasonic probes 17 with different specifications, and constructing a probe specification database 39 by corresponding the specification information of each of the plurality of ultrasonic probes 17; and a process of receiving the identification information of the ultrasonic probe 17 for inspection. In the information processing process, the specification information of the ultrasonic probe 17 corresponding to the received identification information is read out from the stored content of the probe specification database 39, and according to the specification information related to the read ultrasonic probe 17, the time region related to the first lens echo in the lens echo related to the reference wave USref is excluded from the object time region when performing the subtraction process.

[0163] If configured in this way, in the information processing process, the object time region when performing the subtraction process is set to exclude the time region related to the first lens echo according to the specification information of the ultrasonic probe 17. Therefore, the user can know the reference of the lower limit position of the ultrasonic probe 17, and the collision between the ultrasonic probe 17 and the subject 19 can be prevented.

[0164] In addition, the ultrasonic inspection method according to an embodiment of the present invention may also adopt a configuration that further has the following processes: a process of receiving a replacement request for the ultrasonic probe 17 or information indicating that the set environmental temperature of the ultrasonic inspection device 11 deviates from a specified temperature region; and a process of prompting the meaning of urging the reconstruction of the reference wave database 31 when a replacement request for the ultrasonic probe 17 or information indicating that the set environmental temperature of the ultrasonic inspection device 11 deviates from a specified temperature region is received.

[0165] If configured in this way, when a replacement request for the ultrasonic probe 17 or information indicating that the set environmental temperature of the ultrasonic inspection device 11 deviates from a specified temperature region is received, the meaning of urging the reconstruction of the reference wave database 31 is prompted. Therefore, the reconstruction of the reference wave database 31 can be performed timely and accurately.

[0166] As a result, even when gain adjustment is performed based on the signal intensity of the reflected wave or the like, the effect of accurately performing the inspection of the internal state of the subject 19 can be further improved.

[0167] In addition, the ultrasonic inspection method according to an embodiment of the present invention may also adopt the following structure: It further has a process of receiving a request for replacement of the ultrasonic probe 17 or information indicating that the set environmental temperature of the ultrasonic inspection device 11 has deviated from a specified temperature range. In the process of constructing the reference wave database 31, when a request for replacement of the ultrasonic probe 17 or information indicating that the set environmental temperature of the ultrasonic inspection device 11 has deviated from a specified temperature range is received, the reference wave database 31 is constructed again.

[0168] If configured in this way, in the process of constructing the reference wave database 31, when a request for replacement of the ultrasonic probe 17 or information indicating that the set environmental temperature of the ultrasonic inspection device 11 has deviated from a specified temperature range is received, the reference wave database 31 is constructed again. Therefore, the effect of further improving the timely and accurate reconstruction of the reference wave database 31 can be achieved.

[0169] As a result, even when performing gain adjustment based on the signal intensity of the reflected wave, etc., the effect of highly accurately inspecting the internal state of the subject 19 can be significantly improved.

[0170] 〔Other Embodiments〕

[0171] The multiple embodiments described above represent specific examples of the present invention. Therefore, the technical scope of the present invention should not be construed as being limited by these. This is because the present invention can be implemented in various ways without departing from its gist or its main features.

[0172] In addition, a part of the structure of the embodiments described herein can be replaced with the structure of other embodiments, and the structure of other embodiments can also be added to the structure of a certain embodiment. Also, with respect to a part of the structure of each embodiment, other structures can be added, deleted, or replaced.

[0173] In the ultrasonic inspection device 11 according to an embodiment of the present invention, an example of using ultrasonic waves to inspect defects in the internal state of a subject 19 such as a semiconductor wafer has been described, but the present invention is not limited to this example. The ultrasonic inspection device 11 according to an embodiment of the present invention can also be applied to inspect a tray of a subject 19 that is an IC tray in which IC circuits are regularly arranged. In addition, the reference wave database 31 and the probe specification database 39 can also be configured to be provided outside the structure of the ultrasonic inspection device 11 such as in a cloud server, and the ultrasonic inspection device 11 can appropriately access the reference wave database 31 and the probe specification database 39 in the cloud server, etc.

[0174] Reference Numeral Explanation

[0175] 11 Ultrasonic inspection device

[0176] 11A Ultrasonic inspection device

[0177] 11C Ultrasonic inspection device

[0178] 13 Piezoelectric element

[0179] 15 Acoustic lens

[0180] 17 Ultrasonic probe

[0181] 19 Subject

[0182] 20 Control device

[0183] 21 Transmission / reception control unit

[0184] 22 Probe drive unit

[0185] 23 Gain setting unit (reference wave information acquisition unit, interference wave information acquisition unit)

[0186] 25 Reference wave information acquisition unit

[0187] 27 Interference wave information acquisition unit

[0188] 28 Noise removal unit (information processing unit)

[0189] 29 Information processing unit

[0190] 31 Reference wave database (reference wave DB)

[0191] 33 Reception unit<s

[0192] 35 Image generation unit

[0193] 37 Display control unit

[0194] 38 Display unit

[0195] 39 Probe specification database (probe specification DB).

Claims

1. An ultrasonic inspection device includes an ultrasonic probe having a piezoelectric element for transmitting and receiving ultrasonic waves and an acoustic lens, and has a test mode for obtaining information on a reference wave related to a lens echo generated in the acoustic lens, and an inspection mode for obtaining information on the internal state of a subject. The ultrasonic inspection device is characterized in that: The ultrasonic inspection device is configured to have: A reception unit that receives action mode indication information indicating whether the action mode is the test mode or the inspection mode, and setting information of an inspection gain value set by a user when the action mode is the inspection mode; A transmission / reception control unit that transmits a prescribed output ultrasonic wave via the acoustic lens by driving the piezoelectric element, and on the other hand, receives a reflected wave of the transmitted output ultrasonic wave via the acoustic lens and the piezoelectric element; A gain setting unit that, in the test mode based on the action mode indication information of the reception unit, sets a multi-stage test gain for amplifying the reflected wave related to the transmission / reception control unit, and on the other hand, in the inspection mode based on the action mode indication information of the reception unit, sets an inspection gain value based on the setting information of the reception unit among the multi-stage test gains; A reference wave information acquisition unit that, in the test mode, obtains the reflected waves amplified by using the respective multi-stage test gains when the output ultrasonic wave is transmitted to a test environment where the subject does not exist, as information on the reference wave related to the lens echo, and associates them with the respective multi-stage test gains; A reference wave database that stores the information on the reference wave related to the lens echo obtained by the reference wave information acquisition unit in association with the respective multi-stage test gains; An interference wave information acquisition unit that, in the inspection mode, obtains the reflected wave amplified by using the inspection gain value when the output ultrasonic wave is transmitted to an inspection environment where the subject exists, as information on an interference wave including the internal state of the subject; An information processing unit that obtains information on the internal state of the subject based on the information on the interference wave obtained by the interference wave information acquisition unit and the information on the reference wave stored in the reference wave database.

2. The ultrasonic inspection device according to claim 1, characterized in that: The information processing unit reads out the information on the reference wave corresponding to the inspection gain value from the stored content of the reference wave database, and based on the information on the interference wave obtained by the interference wave information acquisition unit and the read-out information on the reference wave, performs a subtraction process of subtracting the signal intensity component of the reference wave from the signal intensity component of the interference wave, thereby obtaining information on the internal state of the subject.

3. The ultrasonic inspection device according to claim 2, characterized in that: The ultrasonic inspection device further has: An image generation unit that generates an inspection image of the subject based on the information on the internal state of the subject obtained by the information processing unit; A display control unit that causes a display unit to display the inspection image of the subject generated by the image generation unit.

4. The ultrasonic inspection apparatus according to claim 2 or 3, wherein the ultrasonic inspection apparatus further includes: a probe specification database that stores, for identification information of a plurality of ultrasonic probes having different specifications, the specification information of each of the plurality of ultrasonic probes in correspondence with each other; the receiving unit further receives the identification information of the ultrasonic probe for inspection; the information processing unit is configured to read, from the stored content of the probe specification database, the specification information of the ultrasonic probe corresponding to the identification information received by the receiving unit, and based on the read specification information of the ultrasonic probe, exclude, from the object time region during the subtraction process, the time region related to the first lens echo among the lens echoes related to the reference wave.

5. The ultrasonic inspection apparatus according to claim 4, wherein the receiving unit further receives a replacement request for the ultrasonic probe or information indicating that the set environmental temperature of the ultrasonic inspection apparatus has deviated from a specified temperature range; when the receiving unit receives a replacement request for the ultrasonic probe or information indicating that the set environmental temperature of the ultrasonic inspection apparatus has deviated from a specified temperature range, the reference wave information acquisition unit reconstructs the reference wave database.

6. An ultrasonic inspection method, which is used in an ultrasonic inspection apparatus having an ultrasonic probe including a piezoelectric element for transmitting and receiving ultrasonic waves and an acoustic lens, and having a test mode for acquiring information of a reference wave related to a lens echo generated in the acoustic lens and an inspection mode for acquiring information of the internal state of a subject. By driving the piezoelectric element to transmit a prescribed output ultrasonic wave via the acoustic lens, and on the other hand, receiving a reflected wave of the transmitted output ultrasonic wave via the acoustic lens and the piezoelectric element, thereby inspecting the internal state of the subject using ultrasonic waves. The ultrasonic inspection method is characterized in that the ultrasonic inspection method includes: a reception step of receiving action mode indication information indicating whether the action mode is the test mode or the inspection mode, and setting information of an inspection gain value set by the user when the action mode is the inspection mode; in the test mode based on the action mode indication information of the reception step, the following steps are sequentially performed: a step of setting a multi-stage test gain for amplifying the reflected wave; a step of constructing a reference wave database that acquires, as information of the reference wave related to the lens echo, the reflected waves amplified by the respective multi-stage test gains when the output ultrasonic wave is transmitted to a test environment where the subject does not exist, and registers the acquired information of the reference wave related to the lens echo in correspondence with the respective multi-stage test gains; on the other hand, in the inspection mode based on the action mode indication information of the reception step, the following steps are sequentially performed: a step of setting an inspection gain value of the multi-stage test gains based on the setting information of the reception step; A step of obtaining, as information on an interference wave including information on the internal state of the subject, a reflected wave amplified using the inspection gain value when the output ultrasonic wave is transmitted to the inspection environment where the subject exists; An information processing step of obtaining information on the internal state of the subject based on the obtained information on the interference wave and the information on the reference wave stored in the reference wave database.

7. The ultrasonic inspection method according to claim 6, characterized in that in the information processing step, the information on the reference wave corresponding to the inspection gain value is read out from the stored content of the reference wave database, and based on the obtained information on the interference wave and the read-out information on the reference wave, a subtraction process of subtracting the signal intensity component of the reference wave from the signal intensity component of the interference wave is performed, thereby obtaining information on the internal state of the subject.

8. The ultrasonic inspection method according to claim 7, characterized in that the ultrasonic inspection method further includes: a step of generating an inspection image of the subject based on the information on the internal state of the subject obtained in the information processing step; a step of causing a display unit to display the generated inspection image of the subject.

9. The ultrasonic inspection method according to claim 7, characterized in that the ultrasonic inspection method further includes: a step of constructing a probe specification database by associating the specification information of each of the plurality of ultrasonic probes with different specifications with the identification information of the plurality of ultrasonic probes, in the reception step, the identification information of the ultrasonic probe for inspection is further received, in the information processing step, it is set to read out the specification information of the ultrasonic probe corresponding to the received identification information from the stored content of the probe specification database, and based on the read-out specification information of the ultrasonic probe, the time region related to the first lens echo in the lens echo related to the reference wave is excluded from the target time region when performing the subtraction process.

10. The ultrasonic inspection method according to any one of claims 6 to 8, characterized in that in the reception step, information indicating a replacement request for the ultrasonic probe or that the set environment temperature of the ultrasonic inspection device has deviated from a specified temperature range is further received, the ultrasonic inspection method further includes: a step of prompting a meaning of urging reconstruction of the reference wave database when information indicating a replacement request for the ultrasonic probe or that the set environment temperature of the ultrasonic inspection device has deviated from a specified temperature range is received.

11. The ultrasonic inspection method according to any one of claims 6 to 8, characterized in that in the reception step, information indicating a replacement request for the ultrasonic probe or that the set environment temperature of the ultrasonic inspection device has deviated from a specified temperature range is further received, in the step of constructing the reference wave database, when information indicating a replacement request for the ultrasonic probe or that the set environment temperature of the ultrasonic inspection device has deviated from a specified temperature range is received, the reference wave database is reconstructed.

12. An ultrasonic inspection device configured to have an ultrasonic probe including a piezoelectric element for transmitting and receiving ultrasonic waves and an acoustic lens, and inspecting the internal state of a subject using ultrasonic waves, characterized in that: The ultrasonic inspection device includes: A transmission / reception control unit that transmits a prescribed output ultrasonic wave via the acoustic lens by driving the piezoelectric element, and on the other hand, receives a reflected wave of the transmitted output ultrasonic wave via the acoustic lens and the piezoelectric element; A gain setting unit that sets a gain for amplifying the reflected wave related to the transmission / reception control unit; A reference wave information acquisition unit that acquires, as information on a reference wave related to a lens echo generated in the acoustic lens, the reflected wave amplified by the gain set by the gain setting unit when the output ultrasonic wave is transmitted to a test environment where the subject does not exist; An interference wave information acquisition unit that acquires, as information on an interference wave including information on the internal state of the subject, the reflected wave amplified by the gain set by the gain setting unit when the output ultrasonic wave is transmitted to a test environment where the subject exists; An information processing unit that obtains information on the internal state of the subject based on the information on the interference wave acquired by the interference wave information acquisition unit and the information on the reference wave acquired by the reference wave information acquisition unit; The reference wave information acquisition unit further includes: A reference wave database that stores information on the reference wave related to the lens echo; A reception unit that receives identification information of the ultrasonic probe for inspection; The information processing unit performs processing of subtracting the signal intensity component of the reference wave from the signal intensity component of the interference wave based on the information on the interference wave acquired by the interference wave information acquisition unit and the information on the reference wave stored in the reference wave database, thereby obtaining information on the internal state of the subject; The reception unit further receives a replacement request for the ultrasonic probe, or information indicating that the set environment temperature of the ultrasonic inspection device has deviated from a prescribed temperature range; When the reception unit receives the replacement request for the ultrasonic probe, or the information indicating that the set environment temperature of the ultrasonic inspection device has deviated from a prescribed temperature range, the reference wave information acquisition unit reconstructs the reference wave database.

13. An ultrasonic inspection device having an ultrasonic probe including a piezoelectric element for transmitting and receiving ultrasonic waves and an acoustic lens, and having a test mode for acquiring information on a reference wave related to a lens echo generated in the acoustic lens and an inspection mode for acquiring information on the internal state of a subject, characterized in that: The ultrasonic inspection device is configured to include: A transmission / reception control unit that transmits a prescribed output ultrasonic wave via the acoustic lens by driving the piezoelectric element, and on the other hand, receives a reflected wave of the transmitted output ultrasonic wave via the acoustic lens and the piezoelectric element; A gain setting unit that sets a multi-stage test gain for amplifying the reflected wave related to the transmission / reception control unit in the test mode, and on the other hand, sets an inspection gain value of any one of the multi-stage test gains in the inspection mode; A reference wave information acquisition unit that, in the test mode, acquires, as information on a reference wave related to the lens echo, the reflected wave amplified by each of the multi-stage test gains when the output ultrasonic wave is transmitted to a test environment where the subject is not present, and associates each of the multi-stage test gains; A reference wave database that stores, in association with each of the multi-stage test gains, the information on the reference wave related to the lens echo acquired by the reference wave information acquisition unit; An interference wave information acquisition unit that, in the inspection mode, acquires, as information on an interference wave including information on the internal state of the subject, the reflected wave amplified by the inspection gain value when the output ultrasonic wave is transmitted to an inspection environment where the subject is present; An information processing unit that obtains information on the internal state of the subject based on the information on the interference wave acquired by the interference wave information acquisition unit and the information on the reference wave stored in the reference wave database; A reception unit that receives identification information of an ultrasonic probe for detection; The reception unit also receives a replacement request for the ultrasonic probe or information indicating that the set environmental temperature of the ultrasonic inspection device has deviated from a specified temperature range; When the reception unit has received a replacement request for the ultrasonic probe or information indicating that the set environmental temperature of the ultrasonic inspection device has deviated from a specified temperature range, the reference wave information acquisition unit reconstructs the reference wave database.

Images