Wafer conveying device suitable for gluing developing machine

Abstract

The invention provides a wafer conveying device suitable for a gluing developing machine, and relates to the field of wafer conveying. A mounting seat is fixedly mounted at the bottom of the base; a conveying assembly is fixedly arranged in the supporting base, and a reinforcing structure is fixedly arranged on the top of the base. A lifting assembly is fixedly arranged at the top of the conveying assembly, and a turnover mechanism is fixedly arranged on the outer side of the lifting assembly. A telescopic assembly is fixedly arranged on the outer side of the turnover mechanism, and a taking device is fixedly arranged on the outer side of the telescopic assembly. By means of the reinforcing structure and the turnover device, the stability of the conveying guide frame during movement can be guaranteed, the phenomenon that the wafer is unstable in the conveying process is prevented, the wafer can be conveniently turned over, multi-face treatment on the wafer is facilitated, and the wafer conveying efficiency is improved. The problem that a conveying guide rail is always unstable due to the influence of wafer quality, conveying speed and external environment factors is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer transfer, and particularly to a wafer transfer device suitable for a spin coater / developer. Background Art

[0002] In the field of semiconductor manufacturing, a spin coater / developer is a key device in the lithography process, mainly used for coating photoresist on a wafer and performing a developing process to form a fine circuit pattern; the spin coater / developer has multiple wafer processing units, and to meet the requirements of different processing steps, it is equipped with an efficient wafer transfer device to ensure that the wafer can be smoothly and accurately transferred between each processing unit to achieve a continuous processing flow.

[0003] The existing wafer transfer device needs to flexibly drive the wafer to adjust its position according to the specific positions of each wafer processing unit when transferring the wafer; although this dynamic adjustment meets the diverse needs of the production line, it also brings a series of technical challenges; specifically, since the wafer transfer device needs to move the wafer in different directions and paths, its transfer guide rail must be able to withstand complex and variable mechanical loads; however, in actual operation, the transfer guide rail often shows unstable phenomena due to the influence of wafer quality, transfer speed, and external environmental factors; this instability may lead to position deviation, speed fluctuation, or even collision of the wafer during the transfer process, thereby posing a potential threat to the surface quality and overall performance of the wafer; and it is not convenient to flip the wafer during the transfer process. Summary of the Invention

[0004] In view of this, the present invention provides a wafer transfer device suitable for a spin coater / developer, which has a reinforcement structure and a flipping device, can ensure the stability of the transfer guide frame during movement, prevent unstable phenomena from occurring during the transfer of the wafer, and can conveniently flip the wafer, which is beneficial to multi-faceted processing of the wafer.

[0005] The present invention provides a wafer transfer device suitable for a spin coater / developer, specifically including: a base; an installation seat is fixedly installed at the bottom of the base, and an installation hole is provided inside the installation seat; a driving shaft is rotatably arranged inside the base, a support seat is fixedly arranged at the top of the driving shaft, and a large bevel gear is fixedly arranged outside the driving shaft; the support seat is U-shaped, a transfer component is fixedly arranged inside the support seat, and a reinforcement structure is fixedly arranged at the top of the base; A lifting component is fixedly arranged at the top of the transfer component, and a flipping mechanism is fixedly arranged outside the lifting component; a telescopic component is fixedly arranged outside the flipping mechanism, and a picking device is fixedly arranged outside the telescopic component; The conveying assembly includes: a conveying guide frame, a driving lead screw, a conveying seat and a guide groove; the conveying guide frame is fixedly arranged inside the support seat; the driving lead screw is rotatably arranged inside the conveying guide frame, and the driving lead screw is fixedly arranged at the shaft end of the motor device, and the motor device is fixedly arranged outside the conveying guide frame; the conveying seat is slidably arranged inside the conveying guide frame through a dovetail groove, and the conveying seat is threadedly connected to the outside of the driving lead screw; the guide groove is opened inside the top side of the conveying guide frame; the reinforcement structure includes: a reinforcement plate and a guide rail; the reinforcement plate is fixedly arranged on the top of the base, and the reinforcement plate is located outside the driving shaft; the guide rails are fixedly arranged on the top and bottom of the reinforcement plate, and the guide rails are arranged in an annular structure.

[0006] In at least some embodiments, a horizontal shaft is rotatably arranged inside the base, and a small bevel gear is fixedly arranged at one end of the horizontal shaft; the small bevel gear meshes with a large bevel gear, and the tooth number ratio of the small bevel gear to the large bevel gear is set to 1:4; a limit motor is fixedly arranged outside the base, and the shaft end of the limit motor is fixedly connected to the other end of the horizontal shaft.

[0007] In at least some embodiments, the conveying assembly further includes: a receiving frame and a ball A; the receiving frame is fixedly arranged on the top of the conveying seat; the ball A is rotatably arranged inside the bottom side of the receiving frame, and the ball A is movably arranged inside the guide groove, and the ball A is arranged in a linear arrangement.

[0008] In at least some embodiments, the reinforcement structure includes: a sliding seat and a reinforcement rod; the sliding seat is slidably arranged outside the guide rail, and the sliding seat can rotate around the reinforcement plate through the guide rail; one end of the reinforcement rod is fixedly arranged outside the sliding seat, and the other end of the reinforcement rod is fixedly arranged at the bottom of the conveying guide frame, and four groups of reinforcement rods are symmetrically arranged.

[0009] In at least some embodiments, the lifting assembly includes: a lifting frame, a lifting screw rod and a lifting seat; the lifting frame is fixedly arranged on the top of the receiving frame; the lifting screw rod is rotatably arranged between the lifting frame and the receiving frame, and the lifting screw rod is fixedly arranged at the shaft end of the motor device, and the motor device is fixedly arranged on the top of the lifting frame; the lifting seat is threadedly connected to the outside of the lifting screw rod, and the lifting seat is slidably arranged inside the lifting frame through a dovetail groove.

[0010] In at least some embodiments, the flipping mechanism includes: a fixed box, a flipping shaft, a worm gear, a worm and an annular groove; the fixed box is fixedly installed outside the lifting seat; the flipping shaft is rotatably arranged inside the fixed box; the worm gear is fixedly arranged outside the flipping shaft; the worm is rotatably arranged inside the fixed box, and the worm meshes with the worm gear; the worm is also fixedly arranged at the shaft end of the motor device, and the motor device is fixedly arranged outside the fixed box; the annular groove is opened inside one side of the fixed box.

[0011] In at least some embodiments, the flipping mechanism further includes: a flipping disk and a ball B; the flipping disk is fixedly arranged at the top end of the flipping shaft; the ball B is rotatably arranged inside one side of the flipping disk, and the ball B is arranged in an annular array, and the ball B is movably arranged inside the annular groove.

[0012] In at least some embodiments, the telescopic assembly includes: a fixed cross frame, a telescopic arm, a fixed seat and a rotating lead screw; the fixed cross frame is fixedly arranged outside the flipping disk, and a rib plate is arranged between the outside of the fixed cross frame and the outside of the flipping disk; the telescopic arm is slidably arranged inside the fixed cross frame through a dovetail groove; the fixed seat is fixedly arranged inside the fixed cross frame; the rotating lead screw is rotatably arranged inside the fixed seat, and the rotating lead screw is threadedly connected inside the telescopic arm; the rotating lead screw is fixedly arranged at the shaft end of the motor device, and the motor device is fixedly arranged outside the fixed seat.

[0013] In at least some embodiments, the picking device includes: a picking disk and a picking suction cup; the picking disk is fixedly arranged at the end of the telescopic arm; the picking suction cup is fixedly arranged inside the picking disk, and four groups of picking suction cups are arranged in an annular array. Beneficial effects

[0014] 1. In the present invention, by providing an annular guide rail and a sliding seat, when the driving shaft drives the conveying and guiding frame to rotate through the support seat, the reinforcing rods can follow the conveying and guiding frame to rotate; so that the four reinforcing rods can always support and reinforce the end of the conveying and guiding frame, which is beneficial to enhancing the stability of the conveying and guiding frame during movement; and it can prevent the phenomenon of instability of the wafer during the conveying process.

[0015] 2. In the present invention, by providing a small bevel gear, a large bevel gear and a limit motor, the driving shaft can drive the conveying and guiding frame to rotate a specified angle through the support seat, and then the conveying direction of the wafer can be flexibly adjusted according to the specific positions of each wafer processing unit, which is beneficial to multi-position conveying of the wafer.

[0016] 3. In the present invention, by providing a lifting screw rod, a lifting seat and a lifting frame, the lifting seat can drive the fixed cross frame and the telescopic arm to move up and down through the fixed box, which is beneficial to picking and placing the wafer according to the specific height of each wafer processing unit; by using the telescopic assembly, the wafer can be picked and placed according to the specific positions of each wafer processing unit; and by using the annular array of picking suction cups, the wafer can be effectively sucked and fixed, which is beneficial to picking and placing the wafer and preventing the wafer from moving during the conveying process, ensuring the accurate effect of wafer conveying.

[0017] 4. In the present invention, by providing a turning shaft, a worm gear and a worm, the turning shaft can drive the fixed cross frame to rotate through the turning disk, so that during the wafer transfer process, the wafer can be turned, which is beneficial to multi-sided processing of the wafer. At the same time, by using the annular groove and the ball B, the stability of the turning disk during rotation can be ensured, which is beneficial to ensuring the stability of the wafer during turning. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings of the embodiments will be briefly introduced below.

[0019] The drawings in the following description only relate to some embodiments of the present invention and do not limit the present invention.

[0020] In the drawings: Figure 1 is a schematic diagram of the overall structure of the present invention.

[0021] Figure 2 is a schematic diagram of the upper surface structure of the mounting seat of the present invention.

[0022] Figure 3 is a schematic diagram of the internal structure of the base of the present invention.

[0023] Figure 4 is a schematic diagram of the lower surface structure of the transfer guide frame of the present invention.

[0024] Figure 5 is a schematic diagram of the internal structure of the transfer guide frame of the present invention.

[0025] Figure 6 is a schematic diagram of the split structure of the reinforcement structure of the present invention.

[0026] Figure 7 is a schematic diagram of the structure of the lifting assembly of the present invention.

[0027] Figure 8 is a schematic diagram of the lower surface structure of the receiving frame of the present invention.

[0028] Figure 9 is a schematic diagram of the internal structure of the fixed box of the present invention.

[0029] Figure 10 is a schematic diagram of the structure of the telescopic assembly of the present invention.

[0030] LIST OF REFERENCE NUMERALS 1. Base; 101. Mounting seat; 102. Drive shaft; 103. Support seat; 104. Large bevel gear; 105. Horizontal shaft; 106. Small bevel gear; 107. Limit motor; 2. Conveying assembly; 201. Conveying guide frame; 202. Driving screw; 203. Conveying seat; 204. Guide groove; 205. Receiver frame; 206. Ball A; 3. Reinforcement structure; 301. Reinforcement plate; 302. Guide rail; 303. Sliding seat; 304. Reinforcement rod; 4. Lifting assembly; 401. Lifting frame; 402. Lifting screw; 403. Lifting seat; 5. Turning mechanism; 501. Fixed box; 502. Turning shaft; 503. Worm gear; 504. Worm; 505. Annular groove; 506. Turning plate; 507. Ball B; 6. Telescopic assembly; 601. Fixed horizontal frame; 602. Telescopic arm; 603. Fixed seat; 604. Rotating screw; 7. Picking device; 701. Picking plate; 702. Picking suction cup. DETAILED DESCRIPTION

[0031] In order to make the purpose, scheme and advantages of the technical solution of the present invention more clear, the technical solution of the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings of specific embodiments of the present invention. Unless otherwise specified, the terms used herein have the common meanings in the art. The same reference numerals in the drawings represent the same components.

[0032] Example 1: Please refer to Figures 1 to 10 As shown: The present invention provides a wafer conveying device suitable for a coating and developing machine, comprising a base 1; a mounting seat 101 is fixedly mounted on the bottom of the base 1, and a mounting hole is opened inside the mounting seat 101; a drive shaft 102 is rotatably arranged inside the base 1, and a support seat 103 is fixedly arranged on the top of the drive shaft 102, and a large bevel gear 104 is fixedly arranged on the outside of the drive shaft 102; the support seat 103 is configured to be U-shaped, and a conveying assembly 2 is fixedly mounted inside the support seat 103, and a reinforcement structure 3 is fixedly mounted on the top of the base 1; In the embodiments of the present disclosure, a lifting component 4 is fixedly arranged on the top of the conveying component 2, and a flipping mechanism 5 is fixedly arranged on the outside of the lifting component 4; a telescopic component 6 is fixedly arranged on the outside of the flipping mechanism 5, and a taking device 7 is fixedly arranged on the outside of the telescopic component 6; the conveying component 2 includes: a conveying guide frame 201, a driving lead screw 202, a conveying seat 203 and a guide groove 204; the conveying guide frame 201 is fixedly arranged inside the support seat 103; the driving lead screw 202 is rotatably arranged inside the conveying guide frame 201, and the driving lead screw 202 is fixedly arranged at the shaft end of the motor device, and the motor device is fixedly arranged outside the conveying guide frame 201; the conveying seat 203 is slidably arranged inside the conveying guide frame 201 through a dovetail groove, and the conveying seat 203 is threadedly connected to the outside of the driving lead screw 202; the guide groove 204 is opened inside the top side of the conveying guide frame 201; the reinforcement structure 3 includes: a reinforcement plate 301 and a guide rail 302; the reinforcement plate 301 is fixedly arranged on the top of the base 1, and the reinforcement plate 301 is located outside the driving shaft 102; the guide rails 302 are fixedly arranged on the top and bottom of the reinforcement plate 301, and the guide rails 302 are arranged in an annular structure; a horizontal shaft 105 is rotatably arranged inside the base 1, and a small bevel gear 106 is fixedly arranged at one end of the horizontal shaft 105; the small bevel gear 106 meshes with the large bevel gear 104, and the tooth number ratio of the small bevel gear 106 to the large bevel gear 104 is set to 1:4; a limit motor 107 is fixedly arranged outside the base 1, and the shaft end of the limit motor 107 is fixedly connected to the other end of the horizontal shaft 105; the conveying component 2 further includes: a receiving frame 205 and a ball A206; the receiving frame 205 is fixedly arranged on the top of the conveying seat 203; the ball A206 is rotatably arranged inside the bottom side of the receiving frame 205, and the ball A206 is movably arranged inside the guide groove 204, and the ball A206 is arranged in a linear arrangement; the reinforcement structure 3 includes: a sliding seat 303 and a reinforcement rod 304; the sliding seat 303 is slidably arranged outside the guide rail 302, and the sliding seat 303 can rotate around the reinforcement plate 301 through the guide rail 302; one end of the reinforcement rod 304 is fixedly arranged outside the sliding seat 303, and the other end of the reinforcement rod 304 is fixedly arranged at the bottom of the conveying guide frame 201, and four groups of the reinforcement rods 304 are symmetrically arranged; its specific function is: by arranging the annular guide rail 302 and the sliding seat 303, when the driving shaft 102 drives the conveying guide frame 201 to rotate through the support seat 103, the reinforcement rod 304 can follow the conveying guide frame 201 to rotate; so that the four groups of reinforcement rods 304 can always support and reinforce the end of the conveying guide frame 201.

[0033] Embodiment Two: Please refer to Figure 7 , Figure 8 and Figure 10As shown in the figure: On the basis of the first embodiment, the lifting component 4 includes a lifting frame 401, a lifting screw 402, and a lifting seat 403; the lifting frame 401 is fixedly arranged on the top of the receiving frame 205; the lifting screw 402 is rotatably arranged between the inside of the lifting frame 401 and the receiving frame 205, and the lifting screw 402 is fixedly arranged at the shaft end of the motor device, and the motor device is fixedly arranged on the top of the lifting frame 401; the lifting seat 403 is arranged outside the lifting screw 402 through a threaded connection, and the lifting seat 403 is slidably arranged inside the lifting frame 401 through a dovetail groove; the telescopic component 6 includes a fixed cross frame 601, a telescopic arm 602, a fixed seat 603, and a rotating lead screw 604; the fixed cross frame 601 is fixedly arranged outside the turning disk 506, and a rib plate is arranged between the outside of the fixed cross frame 601 and the outside of the turning disk 506; the telescopic arm 602 is slidably arranged inside the fixed cross frame 601 through a dovetail groove; the fixed seat 603 is fixedly arranged inside the fixed cross frame 601; the rotating lead screw 604 is rotatably arranged inside the fixed seat 603, and the rotating lead screw 604 is arranged inside the telescopic arm 602 through a threaded connection; the rotating lead screw 604 is fixedly arranged at the shaft end of the motor device, and the motor device is fixedly arranged outside the fixed seat 603; the picking device 7 includes a picking disk 701 and picking suction cups 702; the picking disk 701 is fixedly arranged at the end of the telescopic arm 602; the picking suction cups 702 are fixedly arranged inside the picking disk 701, and four groups of picking suction cups 702 are arranged in an annular array; its specific function is: by arranging the lifting screw 402, the lifting seat 403 and the lifting frame 401, the lifting seat 403 can drive the fixed cross frame 601 and the telescopic arm 602 to move up and down through the fixed box 501, which is beneficial to pick and place the wafers according to the specific heights of each wafer processing unit; by using the telescopic component 6, the wafers can be picked and placed according to the specific positions of each wafer processing unit.

[0034] Embodiment 3: Please refer to Figure 9 and Figure 10As shown in the figure: Based on the first embodiment and the second embodiment, the flipping mechanism 5 includes: a fixed box 501, a flipping shaft 502, a worm gear 503, a worm 504, an annular groove 505, a flipping disk 506 and a ball B507; the fixed box 501 is fixedly installed on the outside of the lifting seat 403; the flipping shaft 502 is rotatably arranged inside the fixed box 501; the worm gear 503 is fixedly arranged on the outside of the flipping shaft 502; the worm 504 is rotatably arranged inside the fixed box 501, and the worm 504 meshes with the worm gear 503; the worm 504 is also fixedly arranged at the shaft end of the motor device, and the motor device is fixedly arranged on the outside of the fixed box 501; the annular groove 505 is opened inside one side of the fixed box 501; the flipping disk 506 is fixedly arranged at the top of the flipping shaft 502; the ball B507 is rotatably arranged inside one side of the flipping disk 506, and the ball B507 is arranged in an annular array, and the ball B507 is movably arranged inside the annular groove 505; its specific function is: by arranging the flipping shaft 502, the worm gear 503 and the worm 504, the flipping shaft 502 can drive the fixed cross frame 601 to rotate through the flipping disk 506, and further, during the wafer transfer process, the wafer can be flipped, which is beneficial to multi-sided processing of the wafer.

[0035] Specific usage and functions of this embodiment: In the present invention, when in use, the base 1 is fixed at a specified position inside the coating and developing machine through the mounting seat 101; the wafer is sucked and fixed by the annular array of picking suction cups 702; the limit motor 107 is started to drive the horizontal shaft 105 and the small bevel gear 106 to rotate, the small bevel gear 106 drives the drive shaft 102 to rotate through the large bevel gear 104, and the drive shaft 102 drives the transfer guide frame 201 to rotate through the support seat 103, so that the transfer direction is adjusted according to the specific positions of each wafer processing unit; the motor device is started to drive the lifting screw 402 to rotate, and the lifting screw 402 drives the wafer to move up and down through the lifting seat 403, so that the wafer reaches the specified height; the motor device is started to drive the drive screw 202 to rotate, and the drive screw 202 drives the wafer to move in the specified transfer direction through the transfer seat 203; at the same time, the motor device is started to drive the rotating screw 604 to rotate, so that the telescopic arm 602 slides inside the fixed cross frame 601, and further, the picking plate 701 can put the wafer into the wafer processing unit through the picking suction cups 702; during the wafer transfer process, the motor device can be started to drive the worm 504 to rotate, the worm 504 drives the flipping shaft 502 to rotate through the worm gear 503, and the flipping shaft 502 drives the fixed cross frame 601 and the wafer to flip through the flipping disk 506; during the rotation of the transfer guide frame 201, by the cooperation of the guide rail 302 and the sliding seat 303, the reinforcing rod 304 can follow the transfer guide frame 201 to rotate, and further, the reinforcing rod 304 always supports and reinforces both ends of the transfer guide frame 201, which is beneficial to enhancing the stability of the transfer guide frame 201 during movement; it can prevent the wafer from being unstable during the transfer process.

Claims

1. A wafer transfer device applicable to a coating and developing machine, characterized in that, include: A base (1); a mounting seat (101) is fixedly mounted on the bottom of the base (1), and a mounting hole is provided inside the mounting seat (101); a drive shaft (102) is rotatably provided inside the base (1), a support seat (103) is fixedly provided on the top of the drive shaft (102), and a large bevel gear (104) is fixedly provided on the outside of the drive shaft (102); the support seat (103) is configured to be U-shaped, a transmission assembly (2) is fixedly provided inside the support seat (103), and a reinforcement structure (3) is fixedly provided on the top of the base (1); A lifting assembly (4) is fixedly provided on the top of the conveying assembly (2), and a turning mechanism (5) is fixedly provided on the outside of the lifting assembly (4); a telescopic assembly (6) is fixedly provided on the outside of the turning mechanism (5), and a picking device (7) is fixedly provided on the outside of the telescopic assembly (6); The transmission assembly (2) comprises: a transmission guide frame (201), a driving screw (202), a transmission seat (203) and a guide groove (204); the transmission guide frame (201) is fixedly arranged inside the support seat (103); the driving screw (202) is rotatably arranged inside the transmission guide frame (201), and the driving screw (202) is fixedly arranged at the shaft end of the motor device, and the motor device is fixedly arranged outside the transmission guide frame (201); the transmission seat (203) is slidably arranged on the transmission guide frame (201) through a dovetail groove. 01), and the transmission seat (203) is arranged on the outside of the driving screw (202) through a threaded connection; the guide groove (204) is opened inside the top side of the transmission guide frame (201); the reinforcement structure (3) includes: a reinforcement plate (301) and a guide rail (302); the reinforcement plate (301) is fixedly arranged on the top of the base (1), and the reinforcement plate (301) is located on the outside of the driving shaft (102); the guide rail (302) is fixedly arranged on the top and bottom of the reinforcement plate (301), and the guide rail (302) is arranged as a ring structure.

2. The wafer transfer device applicable to a spin coater / developer according to claim 1, characterized in that: A horizontal shaft (105) is rotatably provided inside the base (1), and a small bevel gear (106) is fixedly provided at one end of the horizontal shaft (105); the small bevel gear (106) is meshed with the large bevel gear (104), and the gear ratio of the small bevel gear (106) to the large bevel gear (104) is set to 1:4; a limit motor (107) is fixedly provided outside the base (1), and the shaft end of the limit motor (107) is fixedly connected to the other end of the horizontal shaft (105).

3. The wafer transfer device applicable to a spin coater / developer according to claim 1, characterized in that: The conveying assembly (2) further comprises: a receiving frame (205) and balls A (206); the receiving frame (205) is fixedly arranged on the top of the conveying seat (203); the balls A (206) are rotatably arranged inside the bottom side of the receiving frame (205), and the balls A (206) are movably arranged inside the guide groove (204), and the balls A (206) are arranged in a straight line.

4. A wafer transfer device applicable to a glue coating and developing machine according to claim 1, characterized in that: The reinforcement structure (3) includes: a sliding seat (303) and a reinforcement rod (304); the sliding seat (303) is slidably arranged outside the guide rail (302), and the sliding seat (303) can rotate around the reinforcement disc (301) through the guide rail (302); one end of the reinforcement rod (304) is fixedly arranged outside the sliding seat (303), and the other end of the reinforcement rod (304) is fixedly arranged at the bottom of the transfer guide frame (201), and four groups of reinforcement rods (304) are symmetrically arranged.

5. The wafer transfer device applicable to a glue coating and developing machine according to claim 3, wherein: The lifting assembly (4) includes: a lifting frame (401), a lifting screw (402) and a lifting seat (403); the lifting frame (401) is fixedly arranged at the top of the receiving frame (205); the lifting screw (402) is rotatably arranged between the inside of the lifting frame (401) and the receiving frame (205), and the lifting screw (402) is fixedly arranged at the shaft end of the motor device, and the motor device is fixedly arranged at the top of the lifting frame (401); the lifting seat (403) is threadedly connected to the outside of the lifting screw (402), and the lifting seat (403) is slidably arranged inside the lifting frame (401) through a dovetail groove.

6. The wafer transfer device applicable to a spin coater / developer according to claim 5, characterized in that: The flipping mechanism (5) includes: a fixed box (501), a flipping shaft (502), a worm gear (503), a worm (504) and an annular groove (505); the fixed box (501) is fixedly installed outside the lifting seat (403); the flipping shaft (502) is rotatably arranged inside the fixed box (501); the worm gear (503) is fixedly arranged outside the flipping shaft (502); the worm (504) is rotatably arranged inside the fixed box (501), and the worm (504) meshes with the worm gear (503); the worm (504) is also fixedly arranged at the shaft end of the motor device, and the motor device is fixedly arranged outside the fixed box (501); the annular groove (505) is opened inside one side of the fixed box (501).

7. A wafer transfer device applicable to a glue coating and developing machine according to claim 6, characterized in that: The flipping mechanism (5) further includes: a flipping disc (506) and a ball B (507); the flipping disc (506) is fixedly arranged at the top end of the flipping shaft (502); the ball B (507) is rotatably arranged inside one side of the flipping disc (506), and the ball B (507) is arranged in an annular array, and the ball B (507) is movably arranged inside the annular groove (505).

8. The wafer transfer device applicable to a spin coater / developer according to claim 7, wherein: The telescopic assembly (6) includes: a fixed cross frame (601), a telescopic arm (602), a fixed seat (603) and a rotating lead screw (604); the fixed cross frame (601) is fixedly arranged outside the flipping disc (506), and a rib plate is arranged between the outside of the fixed cross frame (601) and the outside of the flipping disc (506); the telescopic arm (602) is slidably arranged inside the fixed cross frame (601) through a dovetail groove; the fixed seat (603) is fixedly arranged inside the fixed cross frame (601); the rotating lead screw (604) is rotatably arranged inside the fixed seat (603), and the rotating lead screw (604) is threadedly connected to the inside of the telescopic arm (602); the rotating lead screw (604) is fixedly arranged at the shaft end of the motor device, and the motor device is fixedly arranged outside the fixed seat (603).

9. The wafer transfer device applicable to a spin coater / developer according to claim 8, wherein: The taking device (7) includes: a taking plate (701) and taking suction cups (702); the taking plate (701) is fixedly arranged at the end of the telescopic arm (602); the taking suction cups (702) are fixedly arranged inside the taking plate (701), and four groups of taking suction cups (702) are arranged in an annular array.

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