A detection device and method for a grating ruler with a re-check function

Abstract

The present invention discloses a detection device and method for a grating ruler with a re-inspection function, which relate to the technical field of grating ruler detection. The detection device for a grating ruler with a re-inspection function comprises a precision platform, a marble base is installed on the precision platform, a strip groove is provided on the top of the marble base, an LED backlight source is installed in the strip groove, light source installation limit blocks are installed at both ends of the LED backlight source, a grating ruler support block is installed in the strip groove, a high-precision linear motor motion platform is installed on the marble base, a camera detection component and a photoelectric detection component are installed on the high-precision linear motor motion platform, a robotic arm is installed on the precision platform, a re-inspection camera and a detection lens are installed at the end of the robotic arm, when the grating ruler needs to be detected, the LED backlight source is turned on, and at the same time, the high-precision linear motor motion platform drives the photoelectric detection component and the camera detection component to operate, and then the robotic arm drives the detection lens on the re-inspection camera to operate.

Description

Technical Field

[0001] The present invention relates to the technical field of grating ruler detection, and in particular to a grating ruler detection device and method with a re-inspection function. Background Art

[0002] A grating ruler, also known as a grating ruler displacement sensor, is a measurement feedback device that works based on the optical principle of a grating. It is often used in the closed-loop servo system of CNC machine tools and can be used to detect linear or angular displacement. The performance of the grating ruler itself will have a significant impact on the servo control and processing effects of the CNC machine tool.

[0003] In the related art, when the grating ruler manufacturer uses a grating ruler detection device without a re-inspection function to measure the grating ruler's accuracy, it is necessary to install the grating ruler on a specified platform so that the system forms a closed-loop motion control, and then use a standard gauge block or a laser interferometer to measure and count the actual displacement generated, and inversely calculate the grating ruler's accuracy. However, this measurement method requires the grating ruler to be installed and disassembled, which will inevitably damage or affect the reuse of the grating ruler. Summary of the Invention

[0004] The object of the present invention is to provide a detection device and method for a grating ruler with a re-inspection function to solve the problems raised in the prior art.

[0005] To achieve the above object, the present invention provides the following technical solution: the detection device for a grating ruler with a recheck function comprises a split frame, on which a multi-source data detection component and a recheck detection component are provided;

[0006] The multi-source data detection component includes a marble base, a high-precision linear motor motion platform, a light source installation limit block, an LED backlight, a grating scale support block, a strip slot, a photoelectric detection component and a camera detection component, and the review detection component includes a mounting base, a robotic arm, a review camera and a detection lens;

[0007] A marble base is installed on the precision platform, a strip groove is opened on the top of the marble base, an LED backlight is installed in the strip groove, light source installation limit blocks are installed at both ends of the LED backlight, a grating scale support block is installed in the strip groove, a high-precision linear motor motion platform is installed on the marble base, and a camera detection component and a photoelectric detection component are installed on the high-precision linear motor motion platform;

[0008] The precision platform is provided with a mounting base on one side close to the marble base, a robotic arm is provided on the mounting base, a re-inspection camera is provided at the end of the robotic arm, and a detection lens is provided on the re-inspection camera. When the grating ruler needs to be inspected, the grating ruler to be measured is placed on the grating ruler support block, and the LED backlight source is turned on to provide a stable measurement environment for the grating ruler to be measured during inspection. At this time, the high-precision linear motor motion platform drives the camera detection component to perform an initial image acquisition on the grating ruler to be measured, and at the same time, the photoelectric detection component collects point variable information on the grating ruler to be measured. After the initial image acquisition and point variable information acquisition are completed, the robotic arm is started, and the detection lens on the re-inspection camera is driven by the robotic arm to perform a secondary image acquisition on the grating ruler to be measured, thereby realizing the measurement and re-inspection of relevant dimensions to ensure the reliability of the measurement data.

[0009] As a preferred technical solution, the split frame includes a frame, a precision platform, double doors, positioning blocks and moving wheels;

[0010] A precision platform is installed on the top of the frame, a positioning block is installed on the precision platform, a double door is installed on one side of the frame, and four moving wheels are installed on the bottom of the frame;

[0011] As a preferred technical solution, the camera detection assembly includes a fine-tuning lifting platform, a support base, a detection camera, and a center lens;

[0012] A fine-tuning lifting platform is installed on the top of the high-precision linear motor motion platform, a support seat is installed on the fine-tuning lifting platform, a detection camera is installed on the support seat, and a center-of-center lens is installed on the detection camera.

[0013] As a preferred technical solution, the photoelectric detection assembly includes a fixed horizontal plate, a fixed vertical plate and a laser displacement sensor;

[0014] A fixed horizontal plate is installed on one side of the high-precision linear motor motion platform close to the fine-tuning lifting platform, a fixed vertical plate is installed on the fixed horizontal plate, and laser displacement sensors are symmetrically installed on both sides of the fixed vertical plate.

[0015] As a preferred technical solution, the review and detection assembly further includes an end connection plate, a mounting support plate, an adjustment block, a connection block and a protective housing;

[0016] An end connecting plate is installed at the end of the robotic arm, a mounting support plate is installed on the end connecting plate, an adjustment block is installed on the mounting support plate, a connecting block is installed on the adjustment block, a re-inspection camera is installed on the connecting block, a detection lens is installed on the re-inspection camera, the outer cover of the re-inspection camera is provided with a protective shell, and the protective shell is fixedly connected to the mounting support plate. When the re-inspection camera performs a secondary image acquisition on the measured grating scale, the position of the re-inspection camera is adjusted by the adjustment block to ensure the reliability of the detection data. The protective shell outside the re-inspection camera can prevent the robotic arm from damaging the re-inspection camera and the detection lens in the event of an accidental collision, thereby realizing a protective function.

[0017] As an optimal technical solution, a bracket is installed on the precision platform, and a data processing terminal and an operating keyboard are installed on the bracket. The data processing terminal is connected to the operating keyboard through a data cable, and the data processing terminal is electrically connected to the re-inspection camera, the detection camera and the laser displacement sensor. When the measurement and re-inspection data of the relevant dimensions are collected, the collected data is transmitted to the data processing terminal for comparison processing. The debugging and control of the detection system can be achieved by using the operating keyboard.

[0018] As a preferred technical solution, the precision platform is further equipped with a cleaning assembly, which includes a loading plate, a function box, a sliding sleeve, a transmission shaft, a hollow sleeve, a first driving pulley, an electric telescopic rod, a driving motor, a first driven pulley, a second driving pulley, a second driven pulley, a cover, an impeller, a rotating shaft, a fixing plate, a nozzle, a cleaning head and a cleaning liquid tank;

[0019] The top of the transmission gear is connected with the transmission gear of the transmission gear of the transmission gear. The transmission gear of the transmission gear is connected with the transmission gear of the transmission gear to the transmission gear. When the transmission gear is connected with the transmission gear of the transmission gear, the transmission gear of the transmission gear is connected with the transmission gear of the transmission gear to the transmission gear. The smooth end is provided with a second driven pulley, and a second belt is sleeved between the second driven pulley and the second driving pulley. An impeller is installed on the rotating shaft, and the impeller slides in the cover shell, and a fixed plate is installed on the sliding sleeve, and a nozzle is installed on the fixed plate. The nozzle is connected to the output end of the cover shell through a first one-way pipe, and the input end of the cover shell is connected to the cleaning liquid tank through a second one-way pipe. When the robotic arm drives the detection lens back to the initial position and the position sensor senses the detection lens, the electric telescopic rod causes the sliding sleeve to drive the transmission shaft to rise. When the electric telescopic rod stops moving, the drive motor is started, and the drive motor drives the first driven pulley and the second driven pulley to rotate through the first driving pulley and the second driving pulley on the output shaft respectively. The first driven pulley rotates the transmission shaft by driving the hollow sleeve, thereby driving the cleaning head to rotate and clean the detection lens. At the same time, the second driven pulley drives the rotating shaft to rotate, so that the impeller on the rotating shaft can generate suction during the rotation of the cover shell, and continuously transports the cleaning liquid in the cleaning liquid tank to the nozzle through the liquid inlet pipe and the liquid infusion pipe, so as to fully spray the detection lens.

[0020] As an optimal technical solution, the liquid inlet pipeline and the liquid delivery pipeline are both one-way pipelines.

[0021] The present invention provides a detection method for a grating ruler detection device with a re-checking function, which is characterized by:

[0022] Step 1: Place the grating ruler to be measured on the grating ruler support block;

[0023] Step 2: Driven by a high-precision linear motor motion platform, the camera detection component and the photoelectric detection component complete the acquisition of full-size images and point position data of the measured grating scale;

[0024] Step 3: The recheck detection component moves horizontally from one side of the measured grating scale to complete the recheck image acquisition of the full size of the measured grating scale;

[0025] Step 4: Transmit the collected data to the data processing terminal;

[0026] Step 5: Use the data processing terminal to compare the image data and point data collected initially with the image data collected secondary.

[0027] Compared with the prior art, the present invention has the following beneficial effects:

[0028] 1. This application realizes the relevant size detection and re-inspection of the measured grating ruler by setting a multi-source data detection component and a review detection component, avoiding repeated installation and disassembly of the grating ruler to detect the grating ruler accuracy, thereby reducing damage to the grating ruler.

[0029] 2. This application cleans the detection lens by setting up a cleaning component. When the position sensor senses the detection lens, the electric telescopic rod causes the sliding sleeve to drive the transmission shaft to rise. When the electric telescopic rod stops moving, the drive motor starts to drive the cleaning head to rotate and clean the detection lens. At the same time, the suction force generated by the impeller rotating in the cover causes the cleaning liquid in the cleaning liquid tank to be continuously transported to the nozzle, thereby achieving sufficient spraying of the cleaning liquid on the detection lens. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the main structure of the present invention;

[0031] Figure 2 This is a schematic diagram of the structure of the multi-source data detection component of the present invention;

[0032] Figure 3 This is a schematic diagram of the structure of the review and detection component of the present invention;

[0033] Figure 4 It is a schematic diagram of the cross-section structure of the main body of the present invention;

[0034] Figure 5 This is a schematic structural diagram of the cleaning component of the present invention;

[0035] Figure 6 This is a schematic diagram of the cross-sectional structure of the cleaning component of the present invention;

[0036] Figure 7 It is a schematic diagram of the transmission shaft structure of the present invention;

[0037] Figure 8 for Figure 1 A in the figure shows the enlarged structural diagram;

[0038] Figure 9 for Figure 2The enlarged structural diagram at B in FIG.

[0039] In the figure: 1. Split frame; 101. Frame; 102. Precision platform; 103. Double door; 104. Positioning block; 105. Moving wheel;

[0040] 2. Multi-source data detection assembly; 201. Marble base; 202. High-precision linear motor motion platform; 203. Light source installation limit block; 204. LED backlight; 205. Grating scale support block; 206. Strip slot; A. Photoelectric detection assembly; 220. Fixed horizontal plate; 221. Laser displacement sensor; 222. Fixed vertical plate; B. Camera detection assembly; 231. Fine-tuning lifting platform; 232. Support base; 233. Detection camera; 234. Center-of-center lens;

[0041] 3. Verification and inspection components; 301. Mounting base; 302. Robotic arm; 303. End connection plate; 304. Mounting support plate; 307. Adjustment block; 308. Connecting block; 305. Protective housing; 309. Re-inspection camera; 306. Inspection lens;

[0042] 401, bracket; 402, data processing terminal; 403, operation keyboard;

[0043] 5. Cleaning assembly; 501. Loading plate; 502. Function box; 503. Sliding sleeve; 504. Transmission shaft; 505. Hollow sleeve; 506. First driving pulley; 508. Electric telescopic rod; 509. Driving motor; 510. First driven pulley; 511. Second driving pulley; 513. Second driven pulley; 514. Cover; 515. Impeller; 516. Rotating shaft; 518. Fixed plate; 519. Nozzle; 520. Cleaning head; 530. Cleaning liquid tank. DETAILED DESCRIPTION

[0044] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0045] Example: Figures 1-4 As shown in FIG, the present invention provides a technical solution of a detection device and method for a grating ruler with a recheck function, wherein the detection device for a grating ruler with a recheck function comprises a split frame 1, on which a multi-source data detection component 2 and a recheck detection component 3 are provided;

[0046] The multi-source data detection component 2 includes a marble base 201, a high-precision linear motor motion platform 202, a light source installation limit block 203, an LED backlight 204, a grating scale support block 205, a strip groove 206, a photoelectric detection component A, and a camera detection component B. The review detection component 3 includes a mounting base 301, a robotic arm 302, a review camera 309, and a detection lens 306.

[0047] A marble base 201 is mounted on the precision platform 102. A strip groove 206 is formed on the top of the marble base 201. An LED backlight source 204 is mounted in the strip groove 206. Light source mounting limit blocks 203 are mounted on both ends of the LED backlight source 204. A grating scale support block 205 is mounted in the strip groove 206. A high-precision linear motor motion platform 202 is mounted on the marble base 201. A camera detection component B and a photoelectric detection component A are mounted on the high-precision linear motor motion platform 202.

[0048] A mounting base 301 is installed on the side of the precision platform 102 close to the marble base 201, and a robotic arm 302 is installed on the mounting base 301. A re-inspection camera 309 is installed at the end of the robotic arm 302, and a detection lens 306 is installed on the re-inspection camera 309. When the grating scale needs to be inspected, the grating scale to be measured is placed on the grating scale support block 205, and the LED backlight source 204 is turned on to provide a stable measurement environment for the grating scale to be measured during inspection. At this time, the high-precision linear motor motion platform 202 drives the camera detection component B to perform an initial image acquisition on the grating scale to be measured, and at the same time, the photoelectric detection component A performs point variable information acquisition on the grating scale to be measured. After the initial image acquisition and point variable information acquisition are completed, the robotic arm 302 is started, and the detection lens 306 on the re-inspection camera 309 is driven by the robotic arm 302 to perform a secondary image acquisition on the grating scale to be measured, thereby realizing the measurement and re-inspection of relevant dimensions to ensure the reliability of the measurement data.

[0049] The split frame 1 includes a frame 101, a precision platform 102, a double door 103, a positioning block 104 and a moving wheel 105;

[0050] A precision platform 102 is installed on the top of the frame 101 , a positioning block 104 is installed on the precision platform 102 , a double door 103 is installed on one side of the frame 101 , and four moving wheels 105 are installed on the bottom of the frame 101 .

[0051] like Figure 9 As shown, the camera detection assembly B includes a fine-tuning lifting platform 231, a support base 232, a detection camera 233, and a center lens 234;

[0052] A fine-tuning lifting platform 231 is installed on the top of the high-precision linear motor motion platform 202 . A support base 232 is installed on the fine-tuning lifting platform 231 . A detection camera 233 is installed on the support base 232 . A center lens 234 is installed on the detection camera 233 .

[0053] like Figure 8 As shown, the photoelectric detection assembly A includes a fixed horizontal plate 220, a fixed vertical plate 222 and a laser displacement sensor 221;

[0054] A fixed horizontal plate 220 is installed on one side of the high-precision linear motor motion platform 202 near the fine-tuning lifting platform 231 , and a fixed vertical plate 222 is installed on the fixed horizontal plate 220 . Laser displacement sensors 221 are symmetrically installed on both sides of the fixed vertical plate 222 .

[0055] like Figure 1 and Figure 3-Figure 4 As shown, the verification and detection assembly 3 also includes an end connection plate 303, a mounting support plate 304, an adjustment block 307, a connection block 308 and a protective housing 305;

[0056] An end connecting plate 303 is installed at the end of the robotic arm 302, and a mounting support plate 304 is installed on the end connecting plate 303, and an adjustment block 307 is installed on the mounting support plate 304. A connecting block 308 is installed on the adjusting block 307, and a re-inspection camera 309 is installed on the connecting block 308. A detection lens 306 is installed on the re-inspection camera 309. The outer cover of the re-inspection camera 309 is provided with a protective shell 305, and the protective shell 305 is fixedly connected to the mounting support plate 304. When the re-inspection camera 309 performs a secondary image acquisition on the measured grating scale, the position of the re-inspection camera 309 is adjusted by the adjustment block 307 to ensure the reliability of the detection data. The protective shell 305 outside the re-inspection camera 309 can prevent the robotic arm 302 from damaging the re-inspection camera 309 and the detection lens 306 in the event of an accidental collision, thereby realizing a protective function.

[0057] like Figure 1 As shown, a bracket 401 is installed on the precision platform 102, and a data processing terminal 402 and an operating keyboard 403 are installed on the bracket 401. The data processing terminal 402 and the operating keyboard 403 are connected through a data cable. The data processing terminal 402 is electrically connected to the re-inspection camera 309, the detection camera 233 and the laser displacement sensor 221. When the measurement and re-inspection data of the relevant dimensions are collected, the collected data is transmitted to the data processing terminal 402 for comparison processing. The debugging and control of the detection system can be achieved by using the operating keyboard 403.

[0058] like Figure 6-Figure 7As shown, a cleaning assembly 5 is also installed on the precision platform 102, and the cleaning assembly 5 includes a loading plate 501, a function box 502, a sliding sleeve 503, a transmission shaft 504, a hollow sleeve 505, a first driving pulley 506, an electric telescopic rod 508, a driving motor 509, a first driven pulley 510, a second driving pulley 511, a second driven pulley 513, a cover 514, an impeller 515, a rotating shaft 516, a fixing plate 518, a nozzle 519, a cleaning head 520 and a cleaning liquid tank 530;

[0059] A loading plate 501 is installed on the precision platform 102, a function box 502 is installed on the loading plate 501, a position sensor is installed on the top of the function box 502, a slide groove is opened on the top of the function box 502, a slideway is opened on one side of the slide groove, a round hole is opened at the bottom of the slide groove, a sleeve 503 is slidably installed in the slide groove, a hollow sleeve 505 is rotatably installed in the function box 502, a transmission shaft 504 is slidably installed in the hollow sleeve 505, the top of the transmission shaft 504 passes through the round hole and the sleeve 503 and the transmission shaft 504 and the sleeve 503 are rotatably connected, a cleaning head 520 is installed on the top of the transmission shaft 504, a first active pulley 506 is installed on the hollow sleeve 505, and the function box 5 02 is installed with an electric telescopic rod 508, the end of the electric telescopic rod 508 is fixedly connected to the sliding sleeve 503 through a connecting rod, the electric telescopic rod 508 is electrically connected to the position sensor, a driving motor 509 is installed in the function box 502, and a first driven pulley 510 and a second driving pulley 511 are installed on the output shaft of the driving motor 509, a first belt is sleeved between the first driven pulley 510 and the first driving pulley 506, a cover 514 is installed on the loading plate 501, a rotating shaft 516 is rotatably installed in the cover 514, and the smooth end of the rotating shaft 516 passes through the top of the cover 514, and the smooth end of the rotating shaft 516 is installed with a second driven pulley 513, and the second driven pulley A second belt is provided between the pulley 513 and the second active pulley 511, an impeller 515 is installed on the rotating shaft 516, and the impeller 515 slides in the cover 514, a fixing plate 518 is installed on the sliding sleeve 503, and a nozzle 519 is installed on the fixing plate 518. The nozzle 519 is connected to the output end of the cover 514 through a first one-way pipe, and the input end of the cover 514 is connected to the cleaning liquid tank 530 through a second one-way pipe. When the robot arm 302 drives the detection lens 306 back to the initial position and the position sensor senses the detection lens 306, the electric telescopic rod 508 causes the sliding sleeve 503 to drive the transmission shaft 504 to rise. When the electric telescopic rod 508 stops moving, the drive The motor 509 is started, and the driving motor 509 drives the first driven pulley 510 and the second driven pulley 513 to rotate respectively through the first active pulley 506 and the second active pulley 511 on the output shaft. The first driven pulley 510 drives the transmission shaft 504 to rotate by driving the hollow sleeve 505, thereby driving the cleaning head 520 to rotate and clean the detection lens 306. At the same time, the second driven pulley 513 drives the rotating shaft 516 to rotate, so that the impeller 515 on the rotating shaft 516 can rotate in the cover 514 to generate suction, and continuously transport the cleaning liquid in the cleaning liquid tank 530 to the nozzle 519 through the liquid inlet pipe and the liquid infusion pipe, so as to fully spray the detection lens 306.

[0060] Both the liquid inlet pipeline and the liquid delivery pipeline are one-way pipelines.

[0061] The present invention provides a detection method for a grating ruler detection device with a re-checking function, which is characterized by:

[0062] Step 1: Place the grating ruler to be measured on the grating ruler support block 205;

[0063] Step 2: The camera detection component B and the photoelectric detection component A are driven by the high-precision linear motor motion platform 202 to complete the image and point position data acquisition of the full size of the measured grating scale;

[0064] Step 3: The recheck detection component 3 moves horizontally from one side of the measured grating scale to complete the recheck image acquisition of the full size of the measured grating scale;

[0065] Step 4: Transmit the collected data to the data processing terminal 402;

[0066] Step 5: Use the data processing terminal 402 to compare the image data and point data collected initially with the image data collected secondary.

[0067] Working principle of the present invention:

[0068] When the grating ruler needs to be inspected, the grating ruler to be measured is placed on the grating ruler support block 205, and the LED backlight source 204 is turned on to provide a stable measurement environment for the grating ruler to be measured during inspection. At this time, the high-precision linear motor motion platform 202 drives the camera detection component B to perform initial image acquisition on the grating ruler to be measured, and at the same time, the photoelectric detection component A collects point variable information on the grating ruler to be measured. After the initial image acquisition and point variable information acquisition are completed, the mechanical arm 302 is started, and the detection lens 306 on the re-inspection camera 309 is driven by the mechanical arm 302 to perform secondary image acquisition on the grating ruler to be measured, thereby realizing the measurement of relevant dimensions. Measurement and re-inspection are performed to ensure the reliability of the measurement data. When the re-inspection camera 309 performs a second image acquisition on the measured grating ruler, the position of the re-inspection camera 309 is adjusted by the adjustment block 307 to ensure the reliability of the detection data. The protective shell 305 outside the re-inspection camera 309 can prevent the robot arm 302 from damaging the re-inspection camera 309 and the detection lens 306 in the event of an accidental collision, thereby realizing a protective function. When the measurement and re-inspection data of the relevant dimensions are collected, the collected data is transmitted to the data processing terminal 402 for comparison processing. The detection system can be debugged and controlled by using the operation keyboard 403.

[0069] When the robotic arm 302 drives the inspection lens 306 back to the initial position and the position sensor senses the inspection lens 306, the electric telescopic rod 508 causes the sliding sleeve 503 to drive the transmission shaft 504 to rise. When the electric telescopic rod 508 stops moving, the drive motor 509 is started. The drive motor 509 drives the first driven pulley 510 and the second driven pulley 513 to rotate respectively through the first active pulley 506 and the second active pulley 511 on the output shaft. The first driven pulley 510 drives the transmission shaft 504 to rotate by driving the hollow sleeve 505, thereby driving the cleaning head 520 to rotate and clean the inspection lens 306. At the same time, the second driven pulley 513 drives the rotating shaft 516 to rotate, so that the impeller 515 on the rotating shaft 516 can rotate in the cover 514 to generate suction, and the cleaning liquid in the cleaning liquid tank 530 is continuously transported to the nozzle 519 through the liquid inlet pipe and the liquid infusion pipe, so as to achieve sufficient spraying of the inspection lens 306.

[0070] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A detection device for a grating ruler with a recheck function, characterized in that: The detection device for a grating ruler with a rechecking function comprises a split frame (1), the split frame (1) comprising a precision platform (102), and a multi-source data detection component (2) and a rechecking detection component (3) are provided on the precision platform (102); The multi-source data detection component (2) includes a marble base (201), a high-precision linear motor motion platform (202), a light source installation limit block (203), an LED backlight source (204), a grating scale support block (205), a strip groove (206), a photoelectric detection component (A) and a camera detection component (B); the review detection component (3) includes a mounting base (301), a mechanical arm (302), a review camera (309) and a detection lens (306); A marble base (201) is installed on the precision platform (102), a strip groove (206) is provided on the top of the marble base (201), an LED backlight source (204) is installed in the strip groove (206), light source installation limit blocks (203) are installed at both ends of the LED backlight source (204), a grating scale support block (205) is installed in the strip groove (206), a high-precision linear motor motion platform (202) is installed on the marble base (201), and a camera detection component (B) and a photoelectric detection component (A) are installed on the high-precision linear motor motion platform (202); A mounting base (301) is installed on the side of the precision platform (102) close to the marble base (201), a mechanical arm (302) is installed on the mounting base (301), a re-inspection camera (309) is installed at the end of the mechanical arm (302), and a detection lens (306) is installed on the re-inspection camera (309); The camera detection component (B) includes a fine-tuning lifting platform (231), a support base (232), a detection camera (233), and a center lens (234); A fine-tuning lifting platform (231) is installed on the top of the high-precision linear motor motion platform (202), a support seat (232) is installed on the fine-tuning lifting platform (231), a detection camera (233) is installed on the support seat (232), and a center lens (234) is installed on the detection camera (233); The photoelectric detection component (A) comprises a fixed horizontal plate (220), a fixed vertical plate (222) and a laser displacement sensor (221); A fixed horizontal plate (220) is installed on one side of the high-precision linear motor motion platform (202) close to the fine-tuning lifting platform (231), a fixed vertical plate (222) is installed on the fixed horizontal plate (220), and laser displacement sensors (221) are symmetrically installed on both sides of the fixed vertical plate (222).

2. The grating ruler detection device with a re-inspection function according to claim 1, characterized in that: The split frame (1) includes a frame (101), a precision platform (102), a double door (103), a positioning block (104) and a moving wheel (105); A precision platform (102) is installed on the top of the frame (101), a positioning block (104) is installed on the precision platform (102), a double door (103) is installed on one side of the frame (101), and four moving wheels (105) are installed on the bottom of the frame (101).

3. The grating ruler detection device with a re-inspection function according to claim 2, characterized in that: The verification and detection assembly (3) further includes an end connection plate (303), a mounting support plate (304), an adjustment block (307), a connection block (308) and a protective housing (305); The end of the robotic arm (302) is equipped with an end connecting plate (303), a mounting support plate (304) is mounted on the end connecting plate (303), an adjustment block (307) is mounted on the mounting support plate (304), a connecting block (308) is mounted on the adjusting block (307), a re-inspection camera (309) is mounted on the connecting block (308), a detection lens (306) is mounted on the re-inspection camera (309), and a protective shell (305) is provided on the outer cover of the re-inspection camera (309), and the protective shell (305) is fixedly connected to the mounting support plate (304).

4. The detection device for a grating ruler with a re-inspection function according to claim 3, characterized in that: A bracket (401) is installed on the precision platform (102), and a data processing terminal (402) and an operating keyboard (403) are installed on the bracket (401). The data processing terminal (402) and the operating keyboard (403) are connected via a data line, and the data processing terminal (402) is electrically connected to the re-inspection camera (309), the detection camera (233) and the laser displacement sensor (221).

5. The grating ruler detection device with a re-inspection function according to claim 4, characterized in that: A cleaning assembly (5) is also mounted on the precision platform (102), and the cleaning assembly (5) comprises a loading plate (501), a function box (502), a sliding sleeve (503), a transmission shaft (504), a hollow sleeve (505), a first driving pulley (506), an electric telescopic rod (508), a driving motor (509), a first driven pulley (510), a second driving pulley (511), a second driven pulley (513), a cover (514), an impeller (515), a rotating shaft (516), a fixing plate (518), a nozzle (519), a cleaning head (520), and a cleaning liquid tank (530); A loading plate (501) is mounted on the precision platform (102), a function box (502) is mounted on the loading plate (501), a position sensor is mounted on the top of the function box (502), a chute is provided on the top of the function box (502), a slideway is provided on one side of the chute, a round hole is provided at the bottom of the chute, a sleeve (503) is slidably mounted in the chute, a hollow sleeve (505) is rotatably mounted in the function box (502), a transmission shaft (504) is slidably mounted in the hollow sleeve (505), and the transmission shaft The top of the (504) passes through the circular hole and the sliding sleeve (503), and the transmission shaft (504) and the sliding sleeve (503) are rotatably connected. A cleaning head (520) is installed on the top of the transmission shaft (504). A first active pulley (506) is installed on the hollow sleeve (505). An electric telescopic rod (508) is installed in the function box (502). The end of the electric telescopic rod (508) is fixedly connected to the sliding sleeve (503) through a connecting rod. The electric telescopic rod (508) is electrically connected to the position sensor. The function box (502) A driving motor (509) is installed, and a first driven pulley (510) and a second driving pulley (511) are installed on the output shaft of the driving motor (509), and a first belt is provided between the first driven pulley (510) and the first driving pulley (506). A cover (514) is installed on the loading plate (501), and a rotating shaft (516) is rotatably installed in the cover (514), and the smooth end of the rotating shaft (516) passes through the top of the cover (514). The smooth end of the rotating shaft (516) is installed with the second driven pulley (511). 13), a second belt is provided between the second driven pulley (513) and the second driving pulley (511), an impeller (515) is installed on the rotating shaft (516), and the impeller (515) slides in the cover (514), a fixed plate (518) is installed on the sliding sleeve (503), a nozzle (519) is installed on the fixed plate (518), the nozzle (519) is connected to the output end of the cover (514) through a liquid infusion pipe, and the input end of the cover (514) is connected to the cleaning liquid tank (530) through a first liquid inlet pipe.

6. The grating ruler detection device with a re-inspection function according to claim 5, characterized in that: The liquid inlet pipeline and the liquid delivery pipeline are both one-way pipelines.

7. The detection method for a grating ruler detection device with a re-checking function according to claims 1-6, characterized in that: Step 1: Place the grating ruler to be measured on the grating ruler support block (205); Step 2: The camera detection component (B) and the photoelectric detection component (A) are driven by the high-precision linear motor motion platform (202) to complete the image and point position data acquisition of the full size of the measured grating scale; Step 3: The recheck detection component (3) moves horizontally from one side of the measured grating scale to complete the recheck image acquisition of the full size of the measured grating scale; Step 4: Transmit the collected data to the data processing terminal (402); Step 5: Use the data processing terminal (402) to compare the image data and point data collected initially with the image data collected secondary.

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