A small precision motion table

Abstract

The present invention discloses a small precision motion stage, comprising a marble base and a fixed base, a micro-motion stage, a flexible connection assembly, and a micro-motion leveling assembly. The upper surface of the marble base is connected to the micro-motion stage and an X-axis drive structure and a Y-axis drive structure for driving the micro-motion stage. The X-axis drive structure is connected to the Y-axis drive structure via a fixed base. The Y-axis drive structure is installed with an error reading structure. The Y-axis drive structure is connected to the micro-motion stage via a flexible connection assembly. The micro-motion stage comprises a glass base, an upper loading platform, an unloading platform, and a micro-motion leveling assembly for improving the stability of the micro-motion stage. The micro-motion leveling assembly is installed on the unloading platform. A cooling structure is provided in the unloading platform. A purge mechanism for dissipating heat and cleaning particles on the error reading structure is provided on the glass base. Advantages include spherical support, point contact, and a flexible connection that blocks the transmission of some vibrations, thereby improving stability.

Description

Technical Field

[0001] The present invention belongs to the field of semiconductor technology, and in particular relates to a small precision motion stage. Background Art

[0002] In the field of silicon wafer or mask defect detection, precision motion stages are a key technology, and their performance directly affects the inspection results. As semiconductor chip manufacturing processes continue to advance, silicon wafer and mask inspection equipment is moving towards greater precision, accuracy, and productivity.

[0003] Existing precision motion stages are mostly made of steel rails or air-floating guide rails. Steel rails are rigidly connected and can easily generate forces or disturbances in non-working directions in addition to the forces in the working direction. Air-floating guide rails have a complex layout and high cost and require large load conditions for use, which limits their suitability for small precision micro-motion stages.

[0004] The announcement number is CN222337464U, and the invention is titled "A small motion platform comprising a base and a platform disposed above the base, as well as a drive device and a guide rail assembly disposed between the base and the platform; a first mounting slot is disposed at the lower end of the platform, and a second mounting slot corresponding to the first mounting slot is disposed at the upper end of the base; the drive device is fixedly connected within the second mounting slot, and its drive end is connected to the first mounting slot; the guide direction of the guide rail assembly is parallel to the drive direction of the drive device. By providing corresponding mounting slots for multiple platforms and the base, space is provided for the installation of the drive device, guide rail assembly, etc., and embedded installation can reduce the overall height of the motion platform; at the same time, the side walls of the mounting slots act as reinforcing ribs, reinforcing the strength of the base or platform and increasing stability during use.

[0005] The assembly of semiconductor equipment chucks is mostly surface contact. To make it easier to control flatness, there are also three or four small surface contacts. The friction generated is relatively large, affecting the precision of the motion table. Therefore, a spherical support and three-point contact method is needed to further improve the convenience of chuck horizontal surface adjustment. Summary of the Invention

[0006] The technical problem to be solved by the present invention is that the friction force generated by the contact between the downloading platform and the uploading platform is relatively large, which affects the precision of the motion platform.

[0007] In response to the above technical problems, a small precision motion platform is proposed; it is achieved through the following technical solutions:

[0008] It includes a marble base and a fixed base, as well as a micro-motion stage, a flexible connection component and a micro-motion leveling component. The upper surface of the marble base is connected to the micro-motion stage and an X-axis drive structure and a Y-axis drive structure for driving the micro-motion stage to move. The X-axis drive structure is connected to the Y-axis drive structure through a fixed base. The Y-axis drive structure is provided with an error reading structure. The Y-axis drive structure is connected to the micro-motion stage through a flexible connection component. The micro-motion stage includes a glass base, an upper loading platform, an unloading platform and a micro-motion leveling component for improving the stability of the micro-motion stage. The micro-motion leveling component is arranged on the unloading platform. The upper end of the micro-motion leveling component supports the upper loading platform. A cooling structure is provided in the unloading platform. The unloading platform is arranged above the glass base. The glass base is arranged on the fixed base. A purge mechanism for heat dissipation and cleaning particles on the error reading structure is provided on the glass base. The micro-motion leveling component includes a fixed support ball, two adjustable support ball structures and four springs. The three corresponding corners of the upper loading platform and the unloading platform are non-rigidly connected through a fixed support ball, two adjustable support ball structures and four springs.

[0009] The X-axis drive structure and the Y-axis drive structure are used to drive the fine-motion stage to move in two directions for position adjustment. When performing position adjustment, the deviation of the displacement of the fine-motion stage driven by the X-axis drive structure and the Y-axis drive structure is monitored by the error reading structure to improve the accuracy of the fine-motion stage movement. The purge mechanism cleans the particles on the error reading structure to prevent the particles from affecting the reading of the error reading structure. The purge mechanism also appropriately cools the glass base. A cooling structure is provided in the unloading platform to cool the unloading platform and the loading platform to reduce the possibility of deformation of the loading platform or the unloading platform due to high temperature, which may affect the accuracy of the fine-motion stage. A three-point contact support surface is formed by two adjustable support ball structures and one fixed support ball, which can block some vibration conduction and improve stability. At the same time, the angles of the unloading platform and the loading platform can be adjusted by the two adjustable support ball structures, thereby realizing horizontal adjustment of the loading platform.

[0010] Preferably, the technical solution of the present invention is provided with an adjustable support ball structure and a spring at a group of diagonally opposite corners on the upper surface of the unloading platform, the adjustable support ball structure is close to the spring, a fixed support ball is provided on the other corner of the unloading platform, a spring is provided on both sides of the fixed support ball, the adjustable support ball structure and the upper end of the fixed support ball support the loading platform, and a connecting groove for facilitating the setting of the fixed support ball is provided at the position of the fixed support ball on the lower surface of the loading platform, and an inclined platform for facilitating the horizontal adjustment of the loading platform by the adjustable support ball structure is provided on the lower surface of the loading platform, and the position of each inclined platform corresponds to an adjustable support ball structure, and the angle between the loading platform and the unloading platform is adjusted by adjusting the position of the adjustable support ball structure, thereby realizing the leveling of the loading platform.

[0011] Preferably, the technical solution of the present invention is that the X-axis drive structure includes an X-axis motor, an X-axis screw, two X-axis slide rails and two groups of X-axis sliders. The X-axis motor is arranged on a marble base, the output shaft of the X-axis motor is connected to the X-axis screw rod, a first block is sleeved on the X-axis screw rod, the upper surface of the first block is connected to the fixed base, and the lower surface of the fixed base is connected to two groups of X-axis sliders, each group of X-axis sliders is respectively slidably connected to the X-axis slide rails, the two X-axis slide rails are arranged on the marble base, the X-axis sliders are slidably connected to the X-axis slide rails, and the X-axis motor drives the fixed base to move on the X-axis slide rails, thereby driving the micro-motion stage to move.

[0012] Preferably, the Y-axis driving structure includes a guide box, a Y-axis screw, a Y-axis motor and a Y-axis slider. The guide box is arranged on a fixed base, the Y-axis screw is arranged inside the guide box, the Y-axis motor is arranged on the end face of the guide box and passes through the guide box to connect to the Y-axis screw, the Y-axis slider is arranged inside the guide box and connected to the Y-axis screw, the Y-axis slider is connected to the flexible connection component, and adapter plates are provided at both ends of the Y-axis slider. The Y-axis motor drives the Y-axis screw to rotate and drive the Y-axis slider to move in the guide box, thereby driving part of the micro-motion table to move.

[0013] Preferably, the technical solution of the present invention is that the flexible connection assembly includes a rigid fixing plate, a flexible connection plate, a pin hole and a fixing hole. One side of the flexible connection plate is connected to the Y-axis slider through a pin and a pin hole, and the other side is connected to the lower platform through a fixing hole and a screw. Rigid fixing plates are provided on the upper and lower surfaces of the flexible connection plate to increase the strength of the transmission process. The conductive structure formed by the combination of the flexible connection plate and the rigid fixing plate can effectively suppress the parasitic movement generated in the non-working direction during operation, and the structure can extend the transmission force arm, so that the force point is closer to the center of the platform.

[0014] In the preferred embodiment of the technical solution of the present invention, the error reading structure includes a grating scale and a reading head. The grating scale is arranged on the side of the glass base corresponding to the guide box. The adapter plates at both ends of the Y-axis slider are provided with reading heads corresponding to the grating scale to observe the motion position error of the micro-motion stage and improve the accuracy of the micro-motion stage displacement.

[0015] In the preferred embodiment of the technical solution of the present invention, the cooling structure includes a cooling water channel, a water channel inlet and a water channel outlet. A cooling water channel is opened inside the unloading platform, and the two ends of the cooling water channel are respectively connected to the water channel inlet and the water channel outlet. The water channel inlet and the water channel outlet are connected with water pipes, which realize water supply and drainage in the cooling water channel, thereby dissipating heat and cooling the unloading platform.

[0016] In the preferred embodiment of the technical solution of the present invention, a drag chain structure for guiding the built-in water pipe and gas pipe is provided on the side of the Y-axis drive structure. The water pipe and gas pipe pass through the interior of the drag chain structure and are connected to the water supply device and the gas supply device. A plurality of non-metallic gaskets are provided between the glass base and the downloading platform. The drag chain structure organizes the water pipe, gas pipe and other pipelines inside.

[0017] Preferably, the technical solution of the present invention is that the purge mechanism includes a cleaning air inlet, a cleaning nozzle and two heat dissipation nozzles. The cleaning air inlet is arranged on the Y-axis slider, and the cleaning air inlet is connected to the cleaning nozzle through an adapter plate. The cleaning nozzle is arranged on the side of the Y-axis slider, and the position of the cleaning nozzle corresponds to the grating scale. The two heat dissipation nozzles are arranged on the side of the downloading platform, and dissipate heat to multiple non-metallic gaskets and the downloading platform respectively. The two heat dissipation nozzles are respectively connected to the air inlet adapter. The cleaning nozzle ensures the accurate reading of the grating scale while dissipating heat to the non-metallic gaskets.

[0018] Preferably, the technical solution of the present invention is that the adjustable support ball structure includes an adjusting top screw, a micro motor, a shaft sleeve, a movable support ball and a guide groove. A guide groove is provided on the upper surface of the downloading platform, and an adjusting top screw is provided at a corner of the upper surface of the downloading platform. The two ends of the adjusting top screw are respectively connected to the micro motor and the movable support ball. The micro motor drives the adjusting top screw to rotate so that the movable support ball moves in the guide groove, and cooperates with the inclined platform to adjust the height of the upper loading platform. A shaft sleeve is provided on the adjusting top screw, and a fine thread for improving the self-locking ability is provided on the shaft sleeve. The adjusting top screw rotates to control the movable support ball to move in the guide groove. The angle between the upper loading platform and the downloading platform will also change when the contact position of the movable support ball and the inclined platform is different.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. The Y-axis drive structure is flexibly connected to the micro-motion stage. The upper and lower stages are fixed by spring tension, spherical support, point contact, and flexible connection to block the conduction of some vibrations and improve stability.

[0021] 2. The conductive structure, which combines a flexible connecting plate with a rigid fixing plate, effectively suppresses parasitic motion in non-working directions during operation. This structure can also extend the transmission arm, bringing the force point closer to the center of the platform.

[0022] 3. The error reading structure monitors the deviation of the displacement of the micro-motion stage driven by the X-axis drive structure and the Y-axis drive structure. The purge mechanism cleans the particles on the error reading structure to prevent the particles from affecting the reading of the error reading structure and improve the accuracy of the micro-motion stage movement.

[0023] 4. The purge mechanism also cools down the glass base appropriately. A cooling structure is provided inside the unloading platform to cool down the unloading platform and the upper loading platform, thereby reducing the possibility of deformation of the upper loading platform or the unloading platform due to high temperature, which may affect the accuracy of the micro-motion stage. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 Shown is a schematic diagram of the three-dimensional structure of the present invention;

[0025] Figure 2 Shown is an exploded structural diagram of the X-axis drive structure and the fixed base of the present invention;

[0026] Figure 3 It is a schematic diagram of the connection structure between the Y-axis driving structure and the glass base of the present invention;

[0027] Figure 4 Shown is a schematic diagram of the structures of the upload platform and the download platform of the present invention;

[0028] Figure 5 Shown is a schematic diagram of the explosion structure between the upload platform and the download platform of the present invention;

[0029] Figure 6 Shown is the present invention Figure 1 A partial enlarged view of position A in the middle;

[0030] Figure 7 Shown is the present invention Figure 3 A partial enlarged view of position B in the middle.

[0031] Explanation of reference numerals: 1. Marble base; 2. Micro-motion platform; 21. Unloading platform; 22. Loading platform; 221. Inclined platform; 23. Glass base; 24. Non-metallic gasket; 3. Y-axis driving structure; 31. Guide box; 32. Y-axis screw rod; 33. Y-axis motor; 34. Y-axis slider; 4. X-axis driving structure; 41. X-axis motor; 42. X-axis screw rod; 43. X-axis slide rail; 44. X-axis slider; 45. First block; 5. Flexible connection assembly; 51. Rigid fixing plate; 52. Flexible connection plate; 53. Fixing hole; 5 4. Pin hole; 6. Micro-leveling assembly; 61. Fixed support ball; 62. Adjustable support ball structure; 621. Adjusting top screw; 622. Bushing; 623. Movable support ball; 624. Guide groove; 63. Spring; 7. Fixed base; 8. Error reading structure; 81. Grating scale; 82. Reading head; 9. Cooling structure; 91. Waterway inlet; 92. Waterway outlet; 10. Purge mechanism; 101. Cleaning air inlet; 102. Cleaning nozzle; 103. Heat dissipation nozzle; 105. Air inlet adapter; 11. Drag chain structure. DETAILED DESCRIPTION

[0032] The following is a combination of the embodiments of the present invention Figure 1-Figure 7 , the technical solutions in the embodiments of the present invention are described in detail.

[0033] like Figure 1As shown, a small precision motion stage includes a marble base 1 and a fixed base 7, and also includes a micro-motion stage 2, a Y-axis driving structure 3, an X-axis driving structure 4, a flexible connection component 5 and a micro-motion leveling component 6.

[0034] In this embodiment, the movement direction of the X-axis driving structure 4 is the X-axis direction, and the movement direction of the Y-axis driving structure 3 is the Y-axis direction.

[0035] like Figure 1 As shown, the entire small precision motion stage is installed on the upper surface of the marble base 1. A groove is opened on the upper surface of the marble base 1. The X-axis drive structure 4 is installed inside the groove by screws. The fixed base 7 is welded on the upper surface of the X-axis drive structure 4. The Y-axis drive structure 3 and the fine-motion stage 2 are installed on the upper surface of the fixed base 7. The X-axis drive structure 4 and the Y-axis drive structure 3 drive the fine-motion stage 2 to move along the X-axis direction and the Y-axis direction respectively, driving the fine-motion stage 2 to move precisely.

[0036] A fine-motion stage 2 is provided on the upper surface of the marble base 1 , corresponding to the side of the Y-axis driving structure 3 .

[0037] The Y-axis driving structure 3 is connected to the micro-motion stage 2 through a flexible connection component 5. The flexible connection component 5 forms a conductive structure composed of a flexible connection plate 52 and a rigid fixing plate 51. During operation, the parasitic motion generated in the non-working direction is effectively suppressed, and the structure can extend the transmission force arm, so that the force point is closer to the center of the stage.

[0038] The fine motion stage 2 includes a glass base 23, an upper loading platform 22, an unloading platform 21 and a fine motion leveling assembly 6 for improving the stability of the fine motion stage 2. The glass base 23, the upper loading platform 22 and the unloading platform 21 are all rectangular parallelepiped bases.

[0039] The glass base 23 is adhered to the upper surface of the fixed base 7. An error reading structure 8 is adhered to the side of the glass base 23. The motion error of the micro-motion stage 2 can be visually seen through the error reading structure 8, which facilitates timely position compensation of the entire motion stage.

[0040] The upper surface of the glass base 23 is slidably connected to the downloading platform 21, and a placement groove is provided on the lower surface of the downloading platform 21. The flexible connection component 5 is installed in the placement groove by screws. The downloading platform 21 is connected to the Y-axis drive structure 3 through the flexible connection component 5. The Y-axis drive structure 3 drives the downloading platform 21 to slide on the glass base 23. Compared with traditional steel rails or other rigid structures, the present invention can reduce the friction coefficient.

[0041] A cooling structure 9 is provided in the unloading platform 21 to absorb the heat generated by friction during the movement of the unloading platform 21 .

[0042] A purge mechanism 10 for dissipating heat and cleaning particles on the error reading structure 8 is bonded to the glass base 23 , thereby assisting in heat dissipation while ensuring the accuracy of the readings of the error reading structure 8 .

[0043] like Figure 1 、 Figure 5 As shown, a fine-motion leveling assembly 6 is installed on the upper surface of the unloading platform 21, and the upper end of the fine-motion leveling assembly 6 supports the upper loading platform 22 to form a three-point contact support surface. The flexible connection can block the conduction of some vibrations, thereby improving stability while leveling the upper loading platform 22 and the unloading platform 21.

[0044] like Figure 5 As shown, the micro-leveling assembly 6 includes a fixed support ball 61, two adjustable support ball structures 62 and four springs 63. The upper loading platform 22 and the unloading platform 21 are non-rigidly connected by a fixed support ball 61, two adjustable support ball structures 62 and four springs 63 installed at the three corners corresponding to the upper loading platform 22 and the unloading platform 21, thereby blocking the transmission of some vibrations.

[0045] like Figure 5 As shown, an adjustable support ball structure 62 is installed at the diagonal corners of the upper surface of the downloading platform 21, and a spring 63 is welded to the side of the adjustable support ball structure 62 on the upper surface of the downloading platform 21. A fixed support ball 61 is welded on a corner of the downloading platform 21 where the adjustable support ball structure 62 is not installed. A spring 63 is welded on both sides of the fixed support ball 61 on the upper surface of the downloading platform 21. The upper ends of the adjustable support ball structure 62 and the fixed support ball 61 support the upper loading platform 22, and the two ends of the four springs 63 are welded to the upper loading platform 22 and the downloading platform 21 respectively. The upper loading platform 22 and the downloading platform 21 are supported by a three-point contact support surface to reduce the contact area and reduce vibration transmission.

[0046] like Figure 5 As shown, a connecting groove is provided on the lower surface of the upper loading platform 22 at the position corresponding to the fixed support ball 61. When the adjustable support ball structure 62 is displaced, the angle of the upper loading platform 22 changes, and the relative angle between the fixed support ball 61 and the upper loading platform 22 changes. The connecting groove allows the fixed support ball 61 to still be in normal contact and support with the upper loading platform 22 while the relative angle between the fixed support ball 61 and the upper loading platform 22 changes.

[0047] like Figure 5 As shown, an inclined platform 221 is cut out on the lower surface of the upper loading platform 22 corresponding to the adjustable supporting ball structure 62. When the adjustable supporting ball structure 62 is adjusted, the adjustable supporting ball structure 62 adjusts the height of the corresponding angle between the upper loading platform 22 and the adjustable supporting ball structure 62 along the inclined platform 221, thereby adjusting the angle of the entire upper loading platform 22, so that the relative angle between the upper loading platform 22 and the unloading platform 21 changes, thereby realizing the leveling of the upper loading platform 22.

[0048] like Figure 6 As shown, the adjustable support ball structure 62 includes an adjusting top screw 621, a micro motor, a sleeve 622, a movable support ball 623 and a guide groove 624. A guide groove 624 is provided at the corner of the upper surface of the downloading platform 21. There are protrusions at two diagonally opposite corners on the upper surface of the downloading platform 21 for facilitating the installation of the adjusting top screw 621. The side of the downloading platform 21 is connected with an adjusting top screw 621 through the protrusion through a bearing. One end of the adjusting top screw 621 is connected to the movable support ball 623 through a bearing. The micro motor is installed on the outer side of the protrusion. The output end of the micro motor is connected to the adjusting top screw 621, driving the adjusting top screw 621 to rotate, thereby driving the movable support ball 623 to move.

[0049] A shaft sleeve 622 is sleeved at the connection between the adjusting top screw 621 and the protrusion. The shaft sleeve 622 has a fine thread for improving the self-locking ability, so that the adjusting top screw 621 can be stably locked when not working.

[0050] The adjusting screw 621 is rotated to adjust the horizontal movement. When the adjusting screw 621 is fed in the direction of the movable support ball 623, the movable support ball 623 moves along the guide groove 624 on the unloading platform 21. At this time, the movable support ball 623 cooperates with the inclined platform 221 on the lower surface of the upper loading platform 22 to raise the corresponding corner of the upper loading platform 22, thereby adjusting one end of the upper loading platform 22 to rise. When the adjusting screw 621 moves in the opposite direction, it drives the movable support ball 623 to move along the guide groove 624 on the unloading platform 21. At this time, the movable support ball 623 cooperates with the inclined platform 221 on the lower surface of the upper loading platform 22, and the corresponding corner of the upper loading platform 22 sinks, thereby adjusting the angle of the upper loading platform 22 and realizing the horizontal adjustment of the upper loading platform 22.

[0051] A guide groove 624 is provided on the upper surface of the unloading platform 21. The movable support ball 623 moves in the guide groove 624 under the drive of the adjusting top screw 621, and cooperates with the inclined platform 221 to adjust the height of the loading platform 22. The adjusting top screw 621 is operated to move the movable support ball 623 in the guide groove 624. If the contact position of the movable support ball 623 and the inclined platform 221 is different, the angle between the loading platform 22 and the unloading platform 21 will also change, thereby realizing the horizontal adjustment of the loading platform 22.

[0052] like Figure 1 and Figure 2As shown, the X-axis drive structure 4 includes an X-axis motor 41, an X-axis screw 42, two X-axis slide rails 43, two groups of X-axis sliders 44 and a first block 45. The X-axis motor 41 is installed in the groove of the marble base 1, and the two X-axis slide rails 43 are respectively installed on both sides of the groove on the upper surface of the marble base 1 by screws. The output end of the X-axis motor 41 is threadedly connected to the first block 45 through the X-axis screw 42. The fixed base 7 is welded on the upper surface of the first block 45, and two groups of X-axis sliders 44 are welded on the lower surface of the fixed base 7. The X-axis slider 44 is slidably connected to the X-axis slide rail 43. The X-axis motor 41 drives the X-axis screw 42 to rotate, driving the X-axis slider 44 welded under the fixed base 7 to move along the X-axis slide rail 43.

[0053] The upper surface of the fixed base 7 is connected to the Y-axis driving structure 3 and the fine-motion stage 2 , and the X-axis driving structure 4 simultaneously drives the Y-axis driving structure and the fine-motion stage 2 to move along the X-axis direction.

[0054] like Figure 3 As shown, the Y-axis driving structure 3 includes a guide box 31, a Y-axis screw rod 32, a Y-axis motor 33 and a Y-axis slider 34. The guide box 31 is installed on one side of the upper surface of the fixed base 7, and the Y-axis motor 33 is installed at one end of the guide box 31 by screws. The Y-axis screw rod 32 is installed inside the guide box 31 through a bearing. The output end of the Y-axis motor 33 passes through the guide box 31 to connect to the Y-axis screw rod 32. The Y-axis slider 34 is threadedly connected to the Y-axis screw rod 32. The Y-axis motor 33 drives the Y-axis screw rod 32 to rotate and drives the Y-axis slider 34 to move inside the guide box 31. The Y-axis slider 34 is connected to the micro-motion stage 2 through the flexible connection component 5, driving the upper loading stage 22 and the unloading stage 21 to slide on the glass base 23.

[0055] like Figure 3 As shown, the flexible connection assembly 5 includes a rigid fixing plate 51, a flexible connection plate 52, a pin hole 54 and a fixing hole 53. One side of the flexible connection plate 52 is connected to the Y-axis slider 34 through a pin and a pin hole 54, and the other side of the flexible connection plate 52 is fixedly connected to the unloading platform 21 through a fixing hole 53 and a screw. The upper and lower surfaces of the flexible connection plate 52 are fixed to the rigid fixing plate 51 by screws. The area of ​​the rigid fixing plate 51 is smaller than that of the flexible connection plate 52. The conductive structure formed by the combination of the flexible connection plate 52 and the rigid fixing plate 51 can effectively suppress the parasitic movement generated in the non-working direction during operation, and the structure can extend the transmission force arm, so that the force point is closer to the center of the carrier.

[0056] like Figure 3As shown, the error reading structure 8 includes a grating scale 81 and a reading head 82. The grating scale 81 is pasted on the side of the glass base 23 corresponding to the guide box 31. The reading heads 82 corresponding to the grating scale 81 are welded on the adapter plates at both ends of the Y-axis slider 34, which makes it convenient to observe the motion position error of the micro-motion stage 2. The driving position of the X-axis driving structure 4 and the Y-axis driving structure 3 can be adjusted according to the error to improve the displacement accuracy of the moving stage.

[0057] like Figure 4 As shown, the cooling structure 9 includes a cooling water channel, a water channel inlet 91 and a water channel outlet 92. The cooling water channel is opened inside the unloading platform 21. The water channel inlet 91 and the water channel outlet 92 are welded to the side of the unloading platform 21. The two ends of the cooling water channel are respectively connected to the water channel inlet 91 and the water channel outlet 92 by threads. Water enters the cooling water channel of the unloading platform 21 from the water channel inlet 91 and is discharged from the water channel outlet 92.

[0058] Water pipes are connected to the water channel inlet 91 and the water channel outlet 92. The water pipe of the water channel inlet 91 supplies water to the cooling water channel, and the water pipe of the water channel outlet 92 discharges water from the cooling water channel, thereby dissipating heat and cooling the unloading platform 21, reducing the possibility of deformation of the unloading platform 21 due to frictional heating.

[0059] like Figure 3 and Figure 7 As shown, the purge mechanism 10 includes a cleaning air inlet 101 and a cleaning nozzle 102. An adapter plate is welded on both sides of the Y-axis slider 34. The cleaning air inlet 101 is threadedly connected to the adapter plate. An air pipe is installed inside the adapter plate. The cleaning air inlet 101 is connected to the cleaning nozzle 102 through the air pipe in the adapter plate. The cleaning air inlet 101 is connected to the air source through the air pipe. The air source supplies air to the cleaning nozzle 102 through the air pipe, the cleaning air inlet 101 and the air pipe. The cleaning nozzle 102 sprays air to perform cleaning.

[0060] The cleaning nozzle 102 and the reading head 82 are arranged parallel to each other up and down. The reading head 82 is welded to the lower side of the adapter plate and faces downward to prevent the cleaning nozzle 102 from affecting the reading of the reading head 82. The cleaning nozzle 102 is welded to the upper side of the adapter plate. The cleaning nozzle 102 blows off the processed particles on the grating scale 81 to ensure accurate reading of the grating scale 81.

[0061] like Figure 3 As shown, a drag chain structure 11 for guiding the water pipe and the gas pipe is welded on the side of the Y-axis drive structure 3. The water pipe and the gas pipe pass through the inside of the drag chain structure 11 and are connected to the water supply device and the gas supply device. The drag chain structure 11 organizes the water pipe, the gas pipe and other pipelines inside. The drag chain structure 11 can also guide the overall wires.

[0062] like Figure 4As shown, four embedding grooves are provided on the lower surface of the unloading platform 21, and four non-metallic gaskets 24 are respectively pasted in the four embedding grooves. The unloading platform 21 and the non-metallic gaskets 24 slide on the glass base 23. The unloading platform 21 is supported by the non-metallic gaskets 24 and friction transmission is performed on the glass base 23 to reduce the friction area.

[0063] like Figure 4 、 Figure 5 As shown, the purge mechanism 10 also includes two heat dissipation nozzles 103, which are installed on the side of the unloading platform 21. The two heat dissipation nozzles 103 are connected to an air intake adapter 105, and the air supply pipe is connected through the air intake adapter 105 to supply air to the heat dissipation nozzles 103. The two heat dissipation nozzles 103 purge the four non-metallic gaskets 24 and the unloading platform 21 to dissipate heat and cool down.

[0064] Working principle:

[0065] The X-axis drive structure 4 and the Y-axis drive structure 3 drive the fine motion stage 2 to move in two directions for position adjustment. During position adjustment, the error reading structure 8 monitors the deviation in the displacement of the fine motion stage 2 driven by the X-axis drive structure 4 and the Y-axis drive structure 3 to improve the accuracy of the movement of the fine motion stage 2. The purge mechanism 10 removes particulate matter from the error reading structure 8 to prevent particulate matter from affecting the reading of the error reading structure 8. The purge mechanism 10 also appropriately cools the glass base 23. A cooling structure 9 is provided in the unloading stage 21 to cool the unloading stage 21 and the upper loading stage 22, thereby reducing the possibility of deformation of the upper loading stage 22 or the unloading stage 21 due to high temperature, which may affect the accuracy of the fine motion stage 2. A three-point contact support surface is formed by two adjustable support ball structures 62, a fixed support ball 61, and four springs 63, which can block some vibration transmission and improve stability. At the same time, the two adjustable support ball structures 62 can adjust the angle between the unloading stage 21 and the upper loading stage 22, thereby achieving horizontal adjustment of the upper loading stage 22 and improving the processing accuracy of the motion stage for semiconductors.

[0066] The above embodiments are only for illustrating the technical idea of ​​the present invention and cannot be used to limit the protection scope of the present invention. Any changes made on the basis of the technical solution in accordance with the technical idea proposed by the present invention shall fall within the protection scope of the present invention.

Claims

1. A small precision motion table, comprising a marble base (1) and a fixed base (7), characterized in that: The apparatus further comprises a micro-motion stage (2), a flexible connection assembly (5) and a micro-motion leveling assembly (6); the upper surface of the marble base (1) is connected to the micro-motion stage (2) and an X-axis driving structure (4) and a Y-axis driving structure (3) for driving the micro-motion stage (2); the X-axis driving structure (4) is connected to the Y-axis driving structure (3) via a fixed base (7); the Y-axis driving structure (3) is provided with an error reading structure (8); the Y-axis driving structure (3) is connected to the micro-motion stage (2) via the flexible connection assembly (5); the micro-motion stage (2) comprises a glass base (23) , an upper loading platform (22), a downloading platform (21) and a fine-motion leveling assembly (6) for improving the stability of the fine-motion platform (2), the fine-motion leveling assembly (6) is arranged on the downloading platform (21), the upper end of the fine-motion leveling assembly (6) supports the upper loading platform (22), a cooling structure (9) is arranged in the downloading platform (21), the downloading platform (21) is arranged above a glass base (23), the glass base (23) is arranged on a fixed base (7), and a purge mechanism (10) for dissipating heat and cleaning particles on the error reading structure (8) is arranged on the glass base (23); The micro-leveling assembly (6) includes a fixed support ball (61), two adjustable support ball structures (62) and four springs (63), and the three corresponding corners of the loading platform (22) and the unloading platform (21) are non-rigidly connected through the fixed support ball (61), the two adjustable support ball structures (62) and the four springs (63); An adjustable support ball structure (62) and a spring (63) are respectively provided at a set of diagonally opposite corners on the upper surface of the downloading platform (21), the adjustable support ball structure (62) is close to the spring (63), a fixed support ball (61) is provided at another corner of the downloading platform (21), a spring (63) is respectively provided on both sides of the fixed support ball (61), the upper ends of the adjustable support ball structure (62) and the fixed support ball (61) support the loading platform (22), a connection groove for facilitating the setting of the fixed support ball (61) is provided at a position corresponding to the fixed support ball (61) on the lower surface of the loading platform (22), an inclined platform (221) for horizontal adjustment is provided on the lower surface of the loading platform (22), the inclined platform (221) is in contact with the support ball structure (62), and each position of the inclined platform (221) corresponds to an adjustable support ball structure (62); The adjustable support ball structure (62) includes an adjusting top screw (621), a micro motor, a shaft sleeve (622), a movable support ball (623) and a guide groove (624). The upper surface of the download platform (21) is provided with a guide groove (624). The upper corner of the download platform (21) is provided with an adjusting top screw (621). The two ends of the adjusting top screw (621) are respectively connected to the micro motor and the movable support ball (623). The micro motor drives the adjusting top screw (621) to rotate, so that the movable support ball (623) moves in the guide groove (624) and cooperates with the inclined platform (221) to adjust the height of the upper loading platform (22). The adjusting top screw (621) is provided with a shaft sleeve (622), and the shaft sleeve (622) is provided with a fine thread for improving the self-locking ability.

2. The small precision motion stage according to claim 1, characterized in that: The X-axis driving structure (4) includes an X-axis motor (41), an X-axis screw (42), two X-axis slide rails (43) and two groups of X-axis sliders (44). The X-axis motor (41) is arranged on a marble base (1). The output shaft of the X-axis motor (41) is connected to the X-axis screw (42). A first block (45) is sleeved on the X-axis screw (42). The upper surface of the first block (45) is connected to a fixed base (7). The lower surface of the fixed base (7) is connected to two groups of X-axis sliders (44). Each group of X-axis sliders (44) is slidably connected to the X-axis slide rail (43). The two X-axis slide rails (43) are arranged on the marble base (1).

3. The small precision motion stage according to claim 1, characterized in that: The Y-axis driving structure (3) includes a guide box (31), a Y-axis screw rod (32), a Y-axis motor (33) and a Y-axis slider (34), wherein the guide box (31) is arranged on a fixed base (7), the Y-axis screw rod (32) is arranged inside the guide box (31), the Y-axis motor (33) is arranged on the end face of the guide box (31) and passes through the guide box (31) to be connected to the Y-axis screw rod (32), the Y-axis slider (34) is arranged inside the guide box (31) and connected to the Y-axis screw rod (32), the Y-axis slider (34) is connected to the flexible connection component (5), and adapter plates are provided at both ends of the Y-axis slider (34).

4. The small precision motion stage according to claim 3, characterized in that: The flexible connection assembly (5) includes a rigid fixing plate (51), a flexible connection plate (52), a pin hole (54) and a fixing hole (53). One side of the flexible connection plate (52) is connected to the Y-axis slider (34) through a pin and a pin hole (54), and the other side is connected to the download platform (21) through a fixing hole (53) and a screw. Rigid fixing plates (51) for increasing the strength of the transfer process are provided on the upper and lower surfaces of the flexible connection plate (52).

5. The small precision motion stage according to claim 4, characterized in that: The error reading structure (8) includes a grating ruler (81) and a reading head (82). The grating ruler (81) is arranged on the side of the glass base (23) corresponding to the guide box (31). The adapter plates at both ends of the Y-axis slider (34) are provided with reading heads (82) corresponding to the grating ruler (81) to observe the motion position error of the micro-motion stage (2).

6. The small precision motion stage according to claim 5, characterized in that: The cooling structure (9) includes a cooling water channel, a water channel inlet (91) and a water channel outlet (92). A cooling water channel is provided inside the downloading platform (21). Both ends of the cooling water channel are connected to the water channel inlet (91) and the water channel outlet (92) respectively. Water pipes are connected to the water channel inlet (91) and the water channel outlet (92).

7. The small precision motion stage according to claim 6, characterized in that: A drag chain structure (11) for guiding the built-in water pipe and gas pipe is provided on the side of the Y-axis driving structure (3). The water pipe and gas pipe pass through the interior of the drag chain structure (11) and are connected to the water supply device and the gas supply device. A plurality of non-metallic gaskets (24) are provided between the glass base (23) and the downloading platform (21).

8. The small precision motion stage according to claim 7, characterized in that: The purge mechanism (10) includes a purge air inlet (101), a purge nozzle (102) and two heat dissipation nozzles (103). The purge air inlet (101) is arranged on the Y-axis slider (34). The purge air inlet (101) is connected to the purge nozzle (102) through an adapter plate. The purge nozzle (102) is arranged on the side of the Y-axis slider (34). The position of the purge nozzle (102) corresponds to the grating scale (81). The two heat dissipation nozzles (103) are arranged on the side of the download platform (21) to dissipate heat for multiple non-metallic gaskets (24) and the download platform (21). The two heat dissipation nozzles (103) are respectively connected to air inlet adapters (105).

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