Method for manufacturing a ceramic and metal composite electrostatic chuck

Abstract

The present invention discloses a method for manufacturing a ceramic and metal composite electrostatic chuck, which relates to the field of clamping technology in the semiconductor manufacturing process. The method comprises a ceramic shell and a metal substrate, wherein a plurality of groups of concentrically arranged concentric ring electrodes are arranged between the ceramic shell and the metal substrate. During the manufacturing process of the ceramic and metal composite electrostatic chuck of the present invention, a pressing device is used to press the concentric ring electrodes into the embedded groove of the ceramic shell. During the pressing process, through the mutual cooperation of the pressing assembly, the detection assembly and the transmission assembly, it is possible to intuitively judge whether there is any abnormality after the concentric ring electrodes are pressed. In combination with the position and shape of the abnormal line, the position and cause of the abnormal pressing of the concentric ring electrodes can be judged. No repeated detection is required subsequently, thereby improving the efficiency of the preparation of the ceramic and metal composite electrostatic chuck and reducing the equipment cost of the chuck preparation.

Description

Technical Field

[0001] The invention relates to the technical field of clamping in a semiconductor manufacturing process, in particular to a method for manufacturing a ceramic and metal composite electrostatic chuck. Background Art

[0002] The ceramic and metal composite electrostatic chuck is a key component used in semiconductor manufacturing. It is made of ceramic and metal materials through a specific process and uses the principle of electrostatic adsorption to fix and clamp workpieces such as wafers.

[0003] During the manufacturing process of ceramic and metal composite electrostatic chucks, it is necessary to use pressing equipment to press the concentric ring electrodes into the embedded groove of the ceramic shell. During the pressing process, the flatness of the concentric ring electrodes needs to be ensured to facilitate subsequent insulation filling while ensuring the uniformity of electrostatic adsorption, consistency of electric field distribution, mechanical structure stability and functional reliability of the ceramic and metal composite electrostatic chuck. However, in the actual pressing process, it is difficult to intuitively identify and judge the flatness status of the concentric ring electrodes, and repeated testing is required, which affects the efficiency of the preparation of the ceramic and metal composite electrostatic chuck and the equipment cost of the preparation. For this reason, we propose a method for preparing a ceramic and metal composite electrostatic chuck. Summary of the Invention

[0004] The object of the present invention is to provide a method for manufacturing a ceramic and metal composite electrostatic chuck to solve the problems raised in the above background technology.

[0005] To achieve the above objectives, the present invention provides the following technical solutions: a method for manufacturing a ceramic and metal composite electrostatic chuck, the ceramic and metal composite electrostatic chuck comprising a ceramic housing and a metal substrate, multiple sets of concentric ring electrodes being concentrically arranged between the ceramic housing and the metal substrate, the ceramic housing being provided with an embedding groove for embedding the concentric ring electrodes, the metal substrate being provided with an embedding groove for embedding the ceramic housing, and the metal substrate being provided with a cooling channel for assisting heat dissipation. The method for manufacturing the ceramic and metal composite electrostatic chuck comprises the following steps:

[0006] S1: Ceramic shell pretreatment: Use a laser device to cut and form multiple sets of concentric embedded grooves on the ceramic shell;

[0007] S2: Concentric ring electrode processing: using photolithography-etching equipment to form concentric ring electrodes on the molybdenum alloy electrode material;

[0008] S3: Concentric ring electrode press-fitting: Use press-fitting equipment to press-fit the concentric ring electrodes into the buried grooves and fill the pressed concentric ring electrodes with insulating material;

[0009] S4: Chuck assembly: The ceramic housing with the concentric ring electrodes is positioned and installed on the inner side of the metal substrate through the embedded groove and the positioning installation gap is sealed by welding to form a ceramic and metal composite electrostatic chuck;

[0010] The pressing equipment includes a frame, a lifting platform and a supporting platform for supporting and placing the ceramic shell are provided on the frame, the lifting platform is located above the supporting platform, and a circular cover is provided between the lifting platform and the supporting platform, the circular cover is concentrically arranged with the clamped and fixed ceramic shell, and a rotating component for rotating the circular cover is provided on the lifting platform, the bottom of the circular cover is slidably connected to a plurality of groups of mounting blocks through a plurality of groups of mounting grooves, and each group of mounting blocks is arranged in a ring array on the circular cover, a pressing component for pressing the concentric circular ring electrodes and a detection component for detecting during the pressing process are provided on the mounting block, a transmission component for transmitting when an abnormality occurs during the pressing detection process is provided between the pressing component and the detection component, the pressing component, the detection component and the transmission component form a group of detection units, and two groups of detection units are symmetrically arranged on the mounting block, and an adjustment component for adjusting the spacing between each group of mounting blocks is provided on the circular cover.

[0011] Preferably, the press-fit assembly includes a mounting seat arranged below the mounting block, a pressure rod for pressing against the concentric ring electrodes is fixed at the lower end of the mounting seat, and a telescopic assembly for assisting the telescopic connection is provided between the mounting seat and the bottom of the mounting block.

[0012] Preferably, the telescopic assembly includes a sleeve fixed to the lower end of the mounting block, a sliding rod is slidably connected to the sleeve, one end of the sliding rod is fixed to the mounting seat, a spring is sleeved on the outer side of the sleeve, and both ends of the spring are respectively connected to the mounting seat and the mounting block.

[0013] Preferably, the detection component includes a mounting bracket, the upper end of the mounting bracket is slidably connected to the bottom of the mounting block, and the lower end of the mounting bracket is detachably mounted with a marking pen for marking against the surface of the ceramic shell by means of a thread.

[0014] Preferably, the transmission assembly includes two groups of transmission plates fixed on the mounting base, the mounting frame is located between the two groups of transmission plates, a first inclined groove is opened on the transmission plate, a first transmission pin is slidably connected to the first inclined groove, and one end of the first transmission pin is fixed to the mounting frame.

[0015] Preferably, the adjustment component includes a driving disk rotatably connected to the inside of the circular cover, and a plurality of groups of second inclined grooves are provided on the driving disk, and each group of the second inclined grooves is slidably connected to a second transmission pin, and each group of the second transmission pins is respectively fixed to each group of mounting blocks, and a plurality of groups of guide rods for guiding are slidably connected to the mounting blocks, and one end of the guide rod is fixed to the inner wall of the circular cover, and a driving component for rotationally driving the driving disk is provided on the circular cover.

[0016] Preferably, the drive assembly includes a ring gear fixed to the outside of the drive disk, the inside of the circular cover is rotatably connected to a gear, the gear and the ring gear are meshed with each other, and a drive motor for driving the gear is installed on the outside of the circular cover.

[0017] Preferably, the rotating assembly includes a U-shaped frame fixed to the lower end of the lifting platform, the U-shaped frame is rotatably connected to a mounting shaft, the circular cover is centrally fixed to the lower end of the mounting shaft, and the U-shaped frame is equipped with a mounting motor for driving the mounting shaft.

[0018] Preferably, the supporting platform is provided with a clamping component for clamping the ceramic shell after placement, and the frame is provided with a cylinder for driving the lifting platform to rise and fall.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] During the manufacturing process of the ceramic and metal composite electrostatic chuck of the present invention, a pressing device is used to press the concentric ring electrodes into the embedded groove of the ceramic shell. During the pressing process, through the mutual cooperation of the pressing assembly, the detection assembly and the transmission assembly and other components, it can be intuitively judged whether there is any abnormality after the concentric ring electrodes are pressed. In addition, combined with the position and shape of the abnormal drawing, the position of the abnormal pressing of the concentric ring electrodes and the cause of the abnormal pressing can be judged. There is no need for repeated detection later, which improves the efficiency of the preparation of the ceramic and metal composite electrostatic chuck and reduces the equipment cost of the chuck preparation. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the overall appearance structure of the present invention;

[0022] Figure 2 It is a schematic diagram of the press-fitting equipment of the present invention;

[0023] Figure 3 This is a schematic diagram of the positional relationship among the frame, lifting platform, bearing platform and cylinder of the present invention;

[0024] Figure 4 This is a schematic diagram of the ceramic housing of the present invention after being clamped on the supporting platform;

[0025] Figure 5This is a schematic diagram of the circular cover structure of the present invention;

[0026] Figure 6 It is a schematic diagram of the internal structure of the rotating assembly and the circular cover of the present invention;

[0027] Figure 7 It is a schematic structural diagram of the adjustment component and the driving component of the present invention;

[0028] Figure 8 This is a schematic diagram of the press-fit assembly and mounting block structure of the present invention;

[0029] Figure 9 It is a schematic structural diagram of the press-fit assembly, telescopic assembly, detection assembly and transmission assembly of the present invention;

[0030] Figure 10 This is a schematic diagram of the state before press-fitting detection of the present invention;

[0031] Figure 11 This is a schematic diagram of the movement direction of the detection component during press-fit detection of the present invention;

[0032] Figure 12 This is a schematic diagram of the movement direction of the detection assembly when the concentric ring electrodes have an inclined slope during the press-fit detection of the present invention;

[0033] Figure 13 This is a schematic diagram of the drawing state of the detection component of the present invention when detecting that the press-fitting is normal;

[0034] Figure 14 This is a schematic diagram of the drawing state when the detection component of the present invention detects press-fitting abnormality;

[0035] Figure 15 This is a schematic diagram of the line drawing state when the detection component of the present invention detects the presence of a slope in the press assembly.

[0036] In the figure: 101-metal substrate; 102-ceramic shell; 103-concentric ring electrode; 104-buried groove; 105-embedded groove; 201-frame; 202-lifting platform; 203-carrying platform; 204-cylinder; 3-circular cover; 401-U-shaped frame; 402-mounting shaft; 403-mounting motor; 5-mounting groove; 6-mounting block; 701-mounting seat; 702-pressure rod; 801-sleeve; 802-sliding rod; 803-spring; 901-mounting frame; 902-marking pen; 1001-transmission plate; 1002-first inclined groove; 1003-first transmission pin; 1101-driving disk; 1102-second inclined groove; 1103-second transmission pin; 1104-guide rod; 1201-gear ring; 1202-gear; 1203-driving motor. DETAILED DESCRIPTION

[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0038] Example 1, please refer to Figures 1-15 , a method for manufacturing a ceramic and metal composite electrostatic chuck is shown in the figure, wherein the ceramic and metal composite electrostatic chuck includes a ceramic housing 102 and a metal substrate 101, and a plurality of groups of concentric circular electrodes 103 are arranged concentrically between the ceramic housing 102 and the metal substrate 101;

[0039] The concentric ring electrodes 103 are provided with power terminals for connecting to electricity;

[0040] The ceramic housing 102 is provided with an embedding groove 104 for embedding and installing the concentric ring electrodes 103. The metal substrate 101 is provided with an embedding groove 105 for embedding and installing the ceramic housing 102. The metal substrate 101 is provided with a cooling channel for auxiliary heat dissipation.

[0041] When in use, the concentric ring electrodes 103 are connected to a high-voltage power supply through the power terminals. After the connection is completed, the concentric ring electrodes 103 form a uniform electric field on the surface of the ceramic shell 102. When the wafer is placed on the surface of the ceramic shell 102, the polarized charges between the electrodes and the wafer generate electrostatic force, achieving a clamping effect.

[0042] A method for manufacturing a ceramic and metal composite electrostatic chuck comprises the following steps:

[0043] S1: Pre-processing the ceramic housing 102: using a laser device to cut and form a plurality of concentric buried grooves 104 on the ceramic housing 102;

[0044] S2: Processing of the concentric ring electrodes 103: using a photolithography-etching device to form the concentric ring electrodes 103 on the molybdenum alloy electrode material;

[0045] S3: Press-fitting the concentric ring electrodes 103: Press-fitting the concentric ring electrodes 103 into the embedded grooves 104 using a press-fitting device and filling the press-fitted concentric ring electrodes 103 with an insulating material. The insulating material may be an epoxy resin-based insulating material. The filling method is a conventional technical means in this application, and its working principle and operation steps are not described in detail here.

[0046] S4: Chuck assembly: The ceramic housing 102 with the concentric ring electrodes 103 is positioned and mounted on the inner side of the metal substrate 101 through the embedding groove 105 and the positioning installation gap is sealed by welding to form a ceramic and metal composite electrostatic chuck. The welding method can be vacuum brazing to ensure sealing. Vacuum brazing is a conventional welding method, and its working principle and operation method are not described in detail here.

[0047] It should be noted here that the laser device, photolithography-etching equipment and welding operation are conventional technical components in the chuck manufacturing process. Their working principles and operating methods are regarded as prior art in this application and will not be described in detail here.

[0048] Preferably, the press-fitting device includes a frame 201, on which a lifting platform 202 and a carrying platform 203 for carrying and placing the ceramic shell 102 are provided, and the carrying platform 203 is provided with a clamping component for clamping the ceramic shell 102 after placement;

[0049] It is worth noting here that: the clamping component is a conventional clamping component, and its working principle and operation method are considered as prior art in this application and will not be described in detail here;

[0050] The frame 201 is provided with a cylinder 204 for driving the lifting platform 202 to lift and lower. The lifting platform 202 is located above the supporting platform 203, and a circular cover 3 is provided between the lifting platform 202 and the supporting platform 203. The circular cover 3 is concentrically arranged with the clamped ceramic shell 102. The lifting platform 202 is provided with a rotating assembly for rotating the circular cover 3. The bottom of the circular cover 3 is slidably connected to multiple groups of mounting blocks 6 through multiple groups of mounting grooves 5, and each group of mounting blocks 6 is arranged in a ring array on the circular cover 3. A pressing assembly for pressing the concentric circular ring electrodes 103 and a detection assembly for detecting during the pressing process are provided on the mounting block 6. A transmission assembly for transmitting when an abnormality occurs during the pressing detection process is provided between the pressing assembly and the detection assembly. The pressing assembly, the detection assembly and the transmission assembly form a group of detection units, and two groups of detection units are symmetrically arranged on the mounting block 6. An adjustment assembly for adjusting the spacing between each group of mounting blocks 6 is provided on the circular cover 3;

[0051] It should be noted here that: the concentric ring electrode 103 is pressed into the embedded groove 104 of the ceramic shell 102 using a pressing device. During the pressing process, through the mutual cooperation of the pressing assembly, the detection assembly and the transmission assembly, it is possible to intuitively judge whether there is any abnormality in the concentric ring electrode 103 after pressing. In combination with the position and shape of the abnormal drawing, the position and cause of the abnormal pressing of the concentric ring electrode 103 can be judged. There is no need for repeated detection later, which improves the efficiency of the preparation of the ceramic and metal composite electrostatic chuck while reducing the equipment cost of the chuck preparation.

[0052] Preferably, the press-fit assembly includes a mounting seat 701 disposed below the mounting block 6, a pressing rod 702 for pressing against the concentric ring electrode 103 is fixed at the lower end of the mounting seat 701, and a telescopic assembly for assisting the telescopic connection is provided between the mounting seat 701 and the bottom of the mounting block 6;

[0053] It should be noted here that: after the position adjustment of each group of mounting blocks 6 is completed, the lifting platform 202 is driven to move downward by the cylinder 204. During the downward movement of the lifting platform 202, the circular cover 3 and each group of mounting blocks 6 are driven to move downward synchronously through the connection of the rotating assembly. Through the downward movement of the mounting block 6, the lower end of the pressure rod 702 is abutted against the upper side of the concentric ring electrode 103. During the abutment process, accompanied by the continued downward movement of the mounting block 6, the pressure rod 702 and the mounting seat 701 are contracted toward the bottom of the mounting block 6 and the spring 803 is deformed by force to generate elastic force. Through the elastic force of the spring 803, the front end of the pressure rod 702 squeezes the concentric ring electrode 103. Through the squeezing action, the concentric ring electrode 103 is squeezed and pressed into the interior of the buried groove 104, completing the press-fitting of the concentric ring electrode 103.

[0054] Preferably, the telescopic assembly includes a sleeve 801 fixed to the lower end of the mounting block 6, a slide rod 802 is slidably connected to the sleeve 801, one end of the slide rod 802 is fixed to the mounting seat 701, and a spring 803 is sleeved on the outer side of the sleeve 801, and the two ends of the spring 803 are respectively connected to the mounting seat 701 and the mounting block 6;

[0055] It should be noted that the sleeve 801 and the slide bar 802 facilitate the telescopic connection of the mounting seat 701 , and the spring 803 facilitates the reset push of the mounting seat 701 after the contraction movement.

[0056] Preferably, the detection assembly includes a mounting bracket 901, the upper end of the mounting bracket 901 is slidably connected to the bottom of the mounting block 6, and the lower end of the mounting bracket 901 is detachably mounted with a marking pen 902 for marking against the surface of the ceramic housing 102 by means of a thread;

[0057] It should be noted here that: through the detection component, the position and cause of the abnormal press-fitting of the concentric ring electrode 103 can be determined, and there is no need to repeat the detection later, which improves the efficiency of the preparation of the ceramic and metal composite electrostatic chuck while reducing the equipment cost of the chuck preparation.

[0058] Preferably, the transmission assembly includes two sets of transmission plates 1001 fixed on the mounting base 701, and the mounting frame 901 is located between the two sets of transmission plates 1001. The transmission plates 1001 are provided with a first inclined slot 1002, and a first transmission pin 1003 is slidably connected to the first inclined slot 1002. One end of the first transmission pin 1003 is fixed to the mounting frame 901.

[0059] It should be noted here that: when the mounting seat 701 moves toward or away from the mounting block 6, the transmission plate 1001 is driven to move synchronously. During the movement of the transmission plate 1001, the interaction between the first inclined slot 1002 and the first transmission pin 1003 causes the mounting frame 901 to be forced to move laterally.

[0060] Preferably, the adjustment assembly includes a drive disk 1101 rotatably connected to the interior of the circular cover 3, the drive disk 1101 is provided with multiple groups of second inclined slots 1102, each group of second inclined slots 1102 is slidably connected to a second transmission pin 1103, each group of second transmission pins 1103 is respectively fixed to each group of mounting blocks 6, and the mounting blocks 6 are slidably connected to multiple groups of guide rods 1104 for guiding, one end of the guide rod 1104 is fixed to the inner wall of the circular cover 3, and the circular cover 3 is provided with a drive assembly for rotating the drive disk 1101;

[0061] It should be noted here that: the driving disk 1101 is rotated by the driving assembly. During the rotation of the driving disk 1101, the interaction between each group of second inclined grooves 1102 and each group of second transmission pins 1103 and the connection between the second transmission pins 1103 are used to move each group of mounting blocks 6. During the movement of the mounting blocks 6, the sliding guiding effect of each group of guide rods 1104 is used to make each group of mounting blocks 6 move closer to or away from each other after being subjected to force.

[0062] Preferably, the driving assembly includes a ring gear 1201 fixed to the outside of the driving disk 1101, and a gear 1202 is rotatably connected to the inside of the circular cover 3. The gear 1202 and the ring gear 1201 are meshed with each other. A driving motor 1203 for driving the gear 1202 is installed on the outside of the circular cover 3;

[0063] It should be noted that: the gear 1202 is driven to rotate by the driving motor 1203 , and during the rotation of the gear 1202 , the driving disc 1101 is rotated by the mutual meshing transmission between the gear 1202 and the ring gear 1201 .

[0064] Preferably, the rotating assembly includes a U-shaped frame 401 fixed to the lower end of the lifting platform 202, a mounting shaft 402 is rotatably connected to the U-shaped frame 401, the circular cover 3 is centrally fixed to the lower end of the mounting shaft 402, and a mounting motor 403 for driving the mounting shaft 402 is installed on the U-shaped frame 401;

[0065] It should be noted here that: the mounting motor 403 is used to drive the mounting shaft 402 to rotate, and the rotation of the mounting shaft 402 drives the circular cover 3 to rotate.

[0066] In this solution, a press-fitting device is used to press-fit the concentric ring electrodes 103 into the embedded grooves 104 of the ceramic housing 102. During the press-fitting process, the ceramic housing 102 is placed on the carrier 203 and clamped and fixed by a clamping component. During the placement and clamping process, the embedded grooves 104 on the ceramic housing 102 are set upward. After the ceramic housing 102 is installed and clamped, the concentric ring electrodes 103 to be press-fitted are initially placed into the embedded grooves 104. During the placement process, due to the effect of the matching clearance, the concentric ring electrodes 103 are not directly installed in place.

[0067] After the concentric ring electrodes 103 are placed, the driving assembly and the adjusting assembly cooperate with each other to make the groups of mounting blocks 6 on the circular cover 3 move closer to or away from each other. The use position of each group of mounting blocks 6 is adjusted by the movement of the mounting blocks 6. Through the adjustment, the pressure rod 702 on the mounting block 6 is placed directly above the embedded groove 104 where the concentric ring electrodes 103 are placed (see FIG. Figure 10 ), after the position adjustment of each group of mounting blocks 6 is completed, the lifting platform 202 is driven to move downward by the cylinder 204. During the downward movement of the lifting platform 202, the circular cover 3 and each group of mounting blocks 6 are driven to move downward synchronously through the connection of the rotating assembly. Through the downward movement of the mounting block 6, the lower end of the pressure rod 702 is abutted against the upper side of the concentric ring electrode 103. During the abutment process, as the mounting block 6 continues to move downward, the pressure rod 702 and the mounting seat 701 are contracted toward the bottom of the mounting block 6, and the spring 803 is deformed by force to generate elastic force. Through the elastic force of the spring 803, The front end of the pressure rod 702 is used to squeeze the concentric ring electrode 103. Through the squeezing action, the concentric ring electrode 103 is squeezed and press-fitted into the interior of the embedded groove 104, completing the press-fitting of the concentric ring electrode 103. After the lowering and press-fitting, the circular cover 3, the mounting block 6 and the pressure rod 702 on the mounting block 6 are rotated around the trajectory of the embedded groove 104 by rotating the assembly. During the rotation process, the pressure rod 702 is kept against the upper end of the concentric ring electrode 103 and slides on the upper side of the concentric ring electrode 103, thereby squeezing different positions of the concentric ring electrode 103 and ensuring the press-fitting effect.

[0068] In the process of driving the mounting block 6 and the pressing rod 702 to descend for press-fitting, the front end of the marking pen 902 on the mounting frame 901 is abutted against the end of the ceramic shell 102 by the descending of the mounting block 6, and subsequently when the mounting block 6 is driven to rotate around the embedded groove 104, the marking pen 902 is driven to move synchronously. During the movement of the marking pen 902, the front end of the marking pen 902 abuts against the end of the ceramic shell 102 and the rotation of the marking pen 902, so that the marking pen 902 slides out a circular trajectory on the surface of the ceramic shell 102 (see FIG. Figure 13 When the concentric ring electrode 103 is not completely pressed into a certain position during the press-fitting process, the concentric ring electrode 103 and the pressing rod 702 counteract each other, causing the pressing rod 702 to move toward or away from the mounting block 6. During the movement, the pressing rod 702 cooperates with the transmission assembly to cause the mounting frame 901 and the marking pen 902 to move in the lateral direction (see FIG. Figure 11 The marking pen 902 is moved so that the marking pen 902 rotates in a circular motion and an abnormality occurs in the track of the abnormal pressing position (see Figure 14 In addition, when the concentric ring electrode 103 has a local position slope during the press-fitting process, the existence of the slope causes the push and retraction state of the corresponding position pressure rod 702 to be different, and the two groups of marking pens 902 are driven by the transmission assembly to move horizontally by different distances (see Figure 12 The difference in the position of the two sets of marking pens 902 makes the two sets of marking pens 902 rotate in a circle and the track of the slope position in the press-fitting process is abnormal (see Figure 15 Therefore, during the entire press-fitting process, the two sets of detection components can be used to intuitively determine whether there is any abnormality in the press-fitting of the concentric ring electrodes 103 by drawing circles on the ceramic housing 102. In addition, the position and shape of the abnormal drawing can be used to determine the position and cause of the press-fitting abnormality of the concentric ring electrodes 103. Subsequently, repeated detection is not required, thereby improving the efficiency of preparing the ceramic and metal composite electrostatic chuck and reducing the equipment cost of the chuck preparation.

[0069] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0070] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A method for manufacturing a ceramic and metal composite electrostatic chuck, the ceramic and metal composite electrostatic chuck comprising a ceramic housing, a metal substrate, concentric ring electrodes, a buried groove, and an embedded groove, characterized in that: The method for manufacturing a ceramic and metal composite electrostatic chuck comprises the following steps: S1: ceramic shell pretreatment; S2: concentric ring electrode processing; S3: Press-fit the concentric ring electrodes using a press-fit device; S4: chuck assembly; The pressing equipment in S3 includes a frame, a lifting platform and a bearing platform, a circular cover is provided between the lifting platform and the bearing platform, the bottom of the circular cover is slidably connected to a plurality of mounting blocks arranged in a ring array through a plurality of mounting grooves, a pressing assembly for pressing the concentric ring electrodes and a detection assembly for detecting during the pressing process are provided on the mounting blocks, a transmission assembly for transmitting when an abnormality occurs during the pressing detection process is provided between the pressing assembly and the detection assembly, and the pressing assembly, the detection assembly and the transmission assembly form a set of detection units; The press-fit assembly includes a mounting seat provided below the mounting block, a pressure rod fixed to the lower end of the mounting seat for pressing against the concentric ring electrodes, and a telescopic assembly for assisting the telescopic connection provided between the mounting seat and the bottom of the mounting block; The detection component includes a mounting bracket, the upper end of the mounting bracket is slidably connected to the bottom of the mounting block, and the lower end of the mounting bracket is detachably mounted with a marking pen for marking against the surface of the ceramic shell by means of a thread, the circular cover is provided with an adjustment component for adjusting the spacing between each group of mounting blocks, the circular cover is provided with a driving component for rotating the driving disk, and the lifting platform is provided with a rotating component for rotating the circular cover.

2. The method for manufacturing a ceramic and metal composite electrostatic chuck according to claim 1, characterized in that: The telescopic assembly includes a sleeve fixed to the lower end of the mounting block, a sliding rod is slidably connected to the sleeve, one end of the sliding rod is fixed to the mounting seat, a spring is sleeved on the outer side of the sleeve, and both ends of the spring are respectively connected to the mounting seat and the mounting block.

3. The method for manufacturing a ceramic and metal composite electrostatic chuck according to claim 2, characterized in that: The transmission assembly includes two groups of transmission plates fixed on the mounting base, the mounting frame is located between the two groups of transmission plates, a first inclined slot is provided on the transmission plate, a first transmission pin is slidably connected to the first inclined slot, and one end of the first transmission pin is fixed to the mounting frame.

4. The method for manufacturing a ceramic and metal composite electrostatic chuck according to claim 1, wherein: The detection unit is symmetrically arranged in two groups on the mounting block, and the adjustment component includes a driving disk rotatably connected to the inside of the circular cover, and multiple groups of second inclined grooves are provided on the driving disk, and each group of the second inclined grooves is slidably connected to a second transmission pin, and each group of the second transmission pins is respectively fixed to each group of mounting blocks, and multiple groups of guide rods for guidance are slidably connected to the mounting block, and one end of the guide rod is fixed to the inner wall of the circular cover.

5. The method for manufacturing a ceramic and metal composite electrostatic chuck according to claim 4, characterized in that: The driving assembly includes a ring gear fixed to the outside of the driving disk, a gear is rotatably connected inside the circular cover, the gear and the ring gear are meshed with each other, and a driving motor for driving the gear is installed on the outside of the circular cover.

6. The method for manufacturing a ceramic and metal composite electrostatic chuck according to claim 1, characterized in that: The rotating assembly includes a U-shaped frame fixed to the lower end of the lifting platform, the U-shaped frame is rotatably connected to a mounting shaft, the circular cover is centrally fixed to the lower end of the mounting shaft, and the U-shaped frame is equipped with a mounting motor for driving the mounting shaft.

7. The method for manufacturing a ceramic and metal composite electrostatic chuck according to claim 1, characterized in that: The supporting platform is provided with a clamping component for clamping the ceramic shell after placement, and the frame is provided with a cylinder for driving the lifting platform to rise and fall.

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