High-pressure laser maintaining plasma light source device with multiple windows

Abstract

The invention provides a high-pressure laser maintenance plasma light source device with multiple windows, and relates to the technical field of plasma generation and maintenance. The basic structure of the device comprises an adjustable electrode insulation packaging system, a light path collection system with specific wavelength selection, and a circulating water cooling system. The adjustable electrode insulation packaging system is arranged in the center of the light source device and used for generating an initial plasma area, and the electrode distance and the electrode tip shape can be changed according to actual requirements. The light path collecting system with specific wavelength selection is arranged in the light source device and is used for selectively collecting plasma radiation light and transmitting the plasma radiation light to the light outlet window, and the collected radiation wave band can be selected according to actual requirements and the divergence angle of the radiation light output by the light source device can be changed; the circulating water cooling system is arranged outside the light source device and used for reducing the temperature of the light source device in the working process. According to the scheme, an adjustable electrode insulation packaging system is integrally designed, the light source device is provided with a light path collecting system with an enhancing effect and specific wavelength selection, parts are simplified, assembly is easy, the occupied size is small, and the laser maintaining plasma light source device with the high-pressure-resistant capacity in the working process is achieved.

Description

Technical Field

[0001] The invention relates to an implementation method of a high-pressure laser-maintained plasma light source device with multiple windows. Background Art

[0002] Laser-sustained plasma light sources feature high brightness, a broad spectrum, and a long lifespan, finding widespread application in fields such as spectral analysis, wafer inspection, environmental analysis, and high-resolution imaging. A typical laser-sustained plasma is achieved by pre-generating an initial plasma in a high-pressure gas using electrical excitation or other methods. A laser beam is then focused on the initial plasma, maintaining the plasma at a specific size solely by absorbing the energy from the pump laser. In laser-sustained plasma light source applications, the fill gas pressure is a crucial factor influencing the characteristics of the source, and increasing this pressure is crucial for achieving high-brightness plasma.

[0003] Current laser-sustained plasma light sources typically use a sealed lamp body to provide the necessary gas environment for the plasma. Due to the limitations of the sealed lamp body's quartz material and packaging process, the internal gas pressure is difficult to increase further, hindering further improvements in the light source's radiated power. Furthermore, the gas composition and pressure within the sealed lamp body are fixed after fabrication, making it impossible to adjust the internal gas parameters to meet different application requirements. Therefore, it is necessary to design a high-pressure laser-sustained plasma light source device with high collection efficiency and multiple windows to achieve high-power radiated light output at higher operating pressures. Summary of the Invention

[0004] This invention addresses the shortcomings of existing technologies and provides a method for implementing a high-pressure, laser-maintained plasma light source device with multiple windows. This method incorporates multi-path laser control, combined with a highly efficient and enhanced collection cavity, to achieve high-power radiation output at higher operating pressures.

[0005] In order to solve the above-mentioned technical problems, the present invention adopts the following technical solutions:

[0006] The present invention provides a high-pressure laser-maintained plasma light source device with multiple windows, comprising:

[0007] Adjustable electrode insulation packaging system, wherein the electrode tip portion, the columnar threaded electrode portion, and the stepped limit electrode portion together constitute a discharge path; the electrode limit insulation fastener is configured to tighten the columnar threaded electrode portion after adjusting the inter-electrode spacing; the triple high-temperature resistant sealing portion and the sealing gasket are configured to form a high-pressure sealing environment between the discharge path, the high-temperature resistant insulating sleeve portion, and the device housing; the voltage balancing portion is configured to stabilize the electric field distribution inside the light source device to prevent the generation of partial discharge and abnormal arcing;

[0008] An optical path collection system with specific wavelength selection, wherein the main beam collection unit is configured to selectively collect a portion of plasma radiation and transmit it to the light exit window of the light source device; the secondary beam collection unit is configured to collect a portion of plasma radiation and refocus it to the plasma; and the laser transmission path is configured to transmit the converged laser beam and the residual laser beam that have passed through the laser wavelength anti-reflection window;

[0009] The circulating water cooling system, the side wall water cooling jacket, is configured to reduce the temperature of the optical path collection system during operation; the electrode side water cooling jacket is configured to reduce the temperature of the discharge path during operation; the laser transmission path side water cooling jacket is configured to reduce the temperature of the laser transmission path and the laser wavelength anti-reflection window during operation; the circulating water cooling system connector is configured to be connected to a water cooler outside the light source device.

[0010] According to the technical solution provided in the embodiment of the present application, the basic structure of the high-pressure laser-maintained plasma light source device with multiple windows includes an adjustable electrode insulation packaging system, an optical path collection system with specific wavelength selection, and a circulating water cooling system, the internal filling gas pressure of which is between 10Pa and 18Mpa.

[0011] According to the technical solution provided in the embodiment of the present application, the type of gas filled in the interior of the light source device includes any one of pure gases among xenon, argon, and krypton, or a partial mixture thereof.

[0012] According to the technical solution provided in the embodiment of the present application, the main structure of the adjustable electrode insulation packaging system includes an electrode tip portion, a columnar threaded electrode portion, an electrode limit insulating fastener, a triple high-temperature resistant sealing portion, a stepped limit electrode portion, a high-temperature resistant insulating sleeve portion, a sealing gasket and a voltage equalizing portion.

[0013] In terms of layout, the axes of the electrode tip, columnar threaded electrode part, electrode limit insulating fastener, triple high temperature resistant sealing part, stepped limit electrode, high temperature resistant insulating sleeve part, sealing gasket and voltage equalizing part coincide and are arranged in a straight line in sequence.

[0014] According to the technical solution provided in the embodiment of the present application, the interpole spacing of the electrode front portion composed of the electrode tip portion and the columnar threaded electrode portion on both sides of the axis of the light source device is adjustable, and the interpole spacing range is 0mm to 12mm.

[0015] According to the technical solution provided in the embodiment of the present application, the electrode tip can be replaced according to different application requirements. Different electrode tips have different slot shapes. The shape of the electrode tip includes any one of a conical, circular, trapezoidal, and stepped shape, wherein the angle of the electrode tip is between 30° and 120°.

[0016] According to the technical solution provided in the embodiment of the present application, the main beam collecting part can selectively collect light of a specific wavelength band through the processing technology and film system design of the cavity surface, and the surface shape of the main beam collecting part includes any one of a sphere, an ellipsoid, and a parabola.

[0017] According to the technical solution provided in the embodiment of the present application, the secondary beam collecting unit is used to return part of the light not collected by the main beam collecting unit to the plasma, redistribute the energy of the light beam returned to the plasma, and improve the collection efficiency of the light source device.

[0018] A method for maintaining plasma with a high-pressure laser having multiple windows is characterized by utilizing the high-pressure laser maintaining plasma light source device with multiple windows as described above, specifically comprising the following steps:

[0019] Step 1: Pre-starting the circulating water cooling system to reduce the temperature of the light source device during operation;

[0020] Step 2: generating initial plasma: external excitation passes through the discharge path formed by the stepped limiting electrode portion, the columnar threaded electrode portion and the electrode tip portion, generating initial plasma between the electrodes;

[0021] Step 3: The external laser maintains the laser beam, which is focused onto the plasma through the laser wavelength anti-reflection window and the laser transmission path;

[0022] Step 4: Output of plasma radiation light: the main beam collecting unit and the sub-beam collecting unit selectively collect part of the plasma radiation light and transmit it to the light output window of the light source device.

[0023] Compared with the prior art, the beneficial technical effects of the present invention are:

[0024] The high-pressure laser-sustaining plasma light source device with multiple windows proposed in this application adopts an adjustable electrode insulation packaging system to generate the initial plasma region. The electrode spacing and the shape of the electrode tip can be changed according to actual needs. It is also equipped with an optical path collection system with specific wavelength selection, which is used to selectively collect plasma radiation and transmit it to the light output window. The collected radiation band can be selected according to actual needs and the divergence angle of the radiation output by the light source device can be changed. A circulating water cooling system is configured outside the light source device to reduce the temperature of the light source device during operation. This solution integrates the adjustable electrode insulation packaging system into an integrated design. The light source device is equipped with an optical path collection system with an enhancement effect and specific wavelength selection, which simplifies components, is simple to assemble, and occupies a small volume, thereby realizing a high-pressure laser-sustaining plasma light source device with high pressure resistance during operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The present invention will be further described below with reference to the accompanying drawings.

[0026] Figure 1 1 is a cross-sectional schematic diagram of a high-pressure laser-maintained plasma light source device with multiple windows provided in an embodiment of the present application;

[0027] Figure 2 This is a schematic top view of the structure of a high-pressure laser-maintained plasma light source device with multiple windows provided in an embodiment of the present application.

[0028] The text annotations in the figure represent:

[0029] 101. Electrode tip; 102. Columnar threaded electrode portion; 103. Electrode limit insulating fastener; 104. Triple high-temperature resistant sealing portion; 105. Stepped limit electrode portion; 106. High-temperature resistant insulating sleeve portion; 107. Sealing gasket; 108. Voltage equalizing portion; 201. Main beam collecting portion; 202. Slave beam collecting portion; 203. Light exit window; 204. Plasma; 205. Laser transmission path, 206. Laser wavelength anti-reflection window; 301. Side wall water-cooling jacket; 302. Electrode side water-cooling jacket; 303. Laser transmission path side water-cooling jacket; 304. Circulating water cooling system connector. DETAILED DESCRIPTION

[0030] The present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are intended only to explain the relevant invention application and are not intended to limit the invention application. It should also be noted that, for ease of description, only portions relevant to the invention are shown in the drawings.

[0031] It should be noted that, in the absence of conflict, the features of the embodiments and examples in this application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0032] As mentioned in the background technology, in order to solve the problems and deficiencies in the prior art, this application proposes a high-pressure laser-maintained plasma light source device with multiple windows. Figure 1 and Figure 2 As shown, including:

[0033] An adjustable electrode insulation packaging system is configured to generate an initial plasma region. The adjustable electrode insulation packaging system includes multiple components. The electrode tip portion 101, the columnar threaded electrode portion 102, and the stepped limit electrode portion 105 together constitute a discharge path; the electrode limit insulation fastener 103 is configured to fasten the columnar threaded electrode portion 102 after adjusting the inter-pole spacing; the triple high-temperature resistant sealing portion 104 and the sealing gasket 107 are configured to form a high-pressure sealed environment between the discharge path, the high-temperature resistant insulating sleeve portion 106, and the device housing; the voltage balancing portion 108 is configured to stabilize the electric field distribution inside the light source device to prevent local discharge and abnormal arcing.

[0034] An optical path collection system with specific wavelength selection is configured to selectively collect plasma radiation and transmit it to the light exit window of the light source device. The optical path collection system with specific wavelength selection has multiple components. The main beam collection unit 201 is configured to selectively collect a portion of the plasma radiation and transmit it to the light exit window 203 of the light source device; the secondary beam collection unit 202 is configured to collect a portion of the plasma radiation and re-converge it to the plasma 204; and the laser transmission path 205 is configured to transmit the converged laser beam and the residual laser beam that have passed through the laser wavelength anti-reflection window 206.

[0035] A circulating water cooling system is configured to reduce the temperature of the light source device during operation. The circulating water cooling system has multiple components. The side wall water cooling jacket 301 is configured to reduce the temperature of the optical path collection system during operation; the electrode side water cooling jacket 302 is configured to reduce the temperature of the discharge path during operation; the laser transmission path side water cooling jacket 303 is configured to reduce the temperature of the laser transmission path 205 and the laser wavelength anti-reflection window 206 during operation; and the circulating water cooling system connector 304 is configured to be connected to a water cooler outside the light source device.

[0036] For details, please refer to Figure 1As shown, the main structure of the adjustable electrode insulation packaging system includes an electrode tip portion 101, a columnar threaded electrode portion 102, a current limiting insulating fastener 103, a triple high-temperature resistant sealing portion 104, a step-limiting electrode portion 105, a high-temperature resistant insulating sleeve portion 106, a sealing gasket 107 and a voltage equalizing portion 108. The axes of the electrode tip portion 101, the columnar threaded electrode portion 102, the current limiting insulating fastener 103, the triple high-temperature resistant sealing portion 104, the step-limiting electrode portion 105, the high-temperature resistant insulating sleeve portion 106, the sealing gasket 107 and the voltage equalizing portion 108 coincide and are arranged in a straight line in sequence.

[0037] Specifically, the electrode tip 101 can be replaced according to different application requirements. Different electrode tip portions 101 have different slot shapes, which to a certain extent play a role in stabilizing the plasma plume and extending the life of the electrode. The angle of the electrode tip is between 30° and 120°.

[0038] Specifically, the electrical limit insulating fastener 103, triple high temperature resistant sealing part 104, high temperature resistant insulating sleeve part 106 and sealing gasket 107 are all made of high temperature resistant insulating materials, which can ensure the stability of the light source device in long-term operation, and the components are all modularly designed and can be easily replaced when the service life reaches the upper limit.

[0039] Specifically, the electrode tip portion 101 and the columnar threaded electrode portion 102 are connected by threads, and the inter-pole spacing of the electrode front portion formed together is adjustable. The adjusted electrode front portion can be fixed and limited by the electrode limiting insulating fastener 103.

[0040] Specifically, the surface of the high-temperature resistant insulating sleeve portion 106 has serrated protrusions, which are used to extend the discharge path of high-voltage discharge on the sleeve surface, and are used in conjunction with the voltage equalizing portion 108 to reduce the probability of abnormal discharge, so that the discharge breakdown occurs at the correct position between the electrodes.

[0041] Traditional spatial light collection systems are mostly composed of a single collection component. Such a design makes it difficult to further improve the collection and utilization efficiency of spatial light. The optical path collection system of the present application is equipped with multiple components and has the function of selecting specific wavelengths. The main beam collection unit 201 is configured to selectively collect part of the plasma radiation light and transmit it to the light output window of the light source device. It is the most important collection component; the secondary beam collection unit 202 is used to return part of the light not collected by the main beam collection unit to the plasma, redistribute the energy of the light beam returned to the plasma, and further improve the collection efficiency of the light source device. It is an auxiliary collection component.

[0042] Specifically, the main beam collecting portion 201 is obtained through surface processing technology and film system design technology, and can selectively collect light in a specific band. The surface shape of the main beam collecting portion 201 includes any one of a sphere, an ellipsoid, and a parabola.

[0043] Specifically, the outer surface of the main beam collecting portion 201 is provided with a limiting convex body, which is used to form a matching relationship with the housing of the light source device to prevent the main beam collecting portion 201 from sliding.

[0044] Specifically, the outer surface of the main beam collecting portion 201 has a groove passage design, which is used to provide a gas passage for the filling and exhaust of high-pressure gas in the light source device.

[0045] Specifically, the secondary beam collecting unit 202 is used to return part of the light not collected by the primary beam collecting unit 201 to the plasma 204 , redistribute the energy of the light beam returned to the plasma, and improve the collection efficiency of the light source device.

[0046] Specifically, the space formed between the main beam collecting part 201 and the slave beam collecting part 202 is filled with high-pressure gas, wherein the type of internal filling gas includes any pure gas of xenon, argon, krypton or a partial mixed gas thereof.

[0047] The light source device of the present application has multiple windows, which can provide transmission paths for two lasers at the same time, forming an orthogonal dual-path laser-maintained plasma light source device; at the same time, it can also provide a transmission path for only one laser, forming a traditional single-path laser-maintained plasma light source device.

[0048] A method for maintaining plasma with a high pressure laser having multiple windows is performed using the high pressure laser maintaining plasma light source device with multiple windows as described above, and specifically comprises the following steps:

[0049] Step 1: Pre-starting the circulating water cooling system to reduce the temperature of the light source device during operation;

[0050] Step 2: generating initial plasma: external excitation passes through the discharge path formed by the stepped limiting electrode portion, the columnar threaded electrode portion and the electrode tip portion, generating initial plasma between the electrodes;

[0051] Step 3: The external laser maintains the laser beam, which is focused onto the plasma through the laser wavelength anti-reflection window and the laser transmission path;

[0052] Step 4: Output of plasma radiation light: the main beam collecting unit and the sub-beam collecting unit selectively collect part of the plasma radiation light and transmit it to the light output window of the light source device.

[0053] Specifically, during operation, the main beam collecting unit 201 is replaced according to different application requirements, and radiation light output of a specific wavelength band is selected from the broadband light of the plasma 204; the plasma 204 can be controlled by wavelength selection of the multi-channel laser, and the plasma 204 can be controlled by operating mode selection of the multi-channel laser.

[0054] The contents not described in detail in the specification of the present invention belong to the prior art known to those skilled in the art.

[0055] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0056] The embodiments described above are merely descriptions of preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Without departing from the spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by persons skilled in the art should fall within the scope of protection defined by the claims of the present invention.

Claims

1. A high-pressure laser-maintained plasma light source device with multiple windows, comprising: An adjustable electrode insulation packaging system is configured to generate an initial plasma region. The adjustable electrode insulation packaging system is provided with a plurality of components. The electrode tip portion (101), the columnar threaded electrode portion (102), and the stepped position-limiting electrode portion (105) together constitute a discharge path; the electrode position-limiting insulating fastener (103) is configured to fasten the columnar threaded electrode portion (102); the triple high-temperature resistant sealing portion (104) and the sealing gasket (107) are configured to form a high-pressure sealing environment between the discharge path, the high-temperature resistant insulating sleeve portion (106), and the device housing; and the voltage-equalizing portion (108) is configured to stabilize the electric field distribution inside the light source device to prevent the generation of local discharge and abnormal arcs. An optical path collection system with specific wavelength selection is configured to selectively collect plasma radiation light and transmit it to the light exit window of a light source device. The optical path collection system with specific wavelength selection is provided with multiple components. The main beam collection part (201) is configured to selectively collect part of the plasma radiation light and transmit it to the light exit window (203) of the light source device; the secondary beam collection part (202) is configured to collect part of the plasma radiation light and re-converge it to the plasma (204); and the laser transmission path (205) is configured to transmit the converged laser beam and the residual laser beam passing through the laser wavelength anti-reflection window (206); A circulating water cooling system is configured to reduce the temperature of the light source device during operation. The circulating water cooling system has multiple components. The side wall water cooling jacket (301) is configured to reduce the temperature of the light path collection system during operation; the electrode side water cooling jacket (302) is configured to reduce the temperature of the discharge path during operation; the laser transmission path side water cooling jacket (303) is configured to reduce the temperature of the laser transmission path (205) and the laser wavelength anti-reflection window (206) during operation; and the circulating water cooling system connector (304) is configured to be connected to a water cooler outside the light source device.

2. The high-pressure laser-maintained plasma light source device with multiple windows according to claim 1, characterized in that: Its basic structure includes an adjustable electrode insulation packaging system, an optical path collection system with specific wavelength selection, and a circulating water cooling system. The gas filling pressure inside the light source device is between 10Pa and 18Mpa.

3. The high-pressure laser-maintained plasma light source device with multiple windows according to claim 1, characterized in that: The type of gas filled in the light source device includes any one of pure gases among xenon, argon and krypton or a partial mixture thereof.

4. The high-pressure laser-maintained plasma light source device with multiple windows according to claim 1, characterized in that: The main structure of the adjustable electrode insulation packaging system includes an electrode tip portion (101), a columnar threaded electrode portion (102), an electric limit insulating fastener (103), a triple high-temperature resistant sealing portion (104), a stepped position-limiting electrode portion (105), a high-temperature resistant insulating sleeve portion (106), a sealing gasket (107) and a voltage equalizing portion (108). The axes of the electrode tip portion (101), the columnar threaded electrode portion (102), the electric limit insulating fastener (103), the triple high-temperature resistant sealing portion (104), the stepped position-limiting electrode portion (105), the high-temperature resistant insulating sleeve portion (106), the sealing gasket (107) and the voltage equalizing portion (108) coincide and are arranged in sequence on a straight line.

5. The high-pressure laser-maintained plasma light source device with multiple windows according to claim 4, characterized in that: The interpole spacing of the electrode front portion composed of the electrode tip portion (101) and the columnar threaded electrode portion (102) on both sides of the light source device axis is adjustable, and the interpole spacing range is 0 mm to 12 mm.

6. The high-pressure laser-maintained plasma light source device with multiple windows according to claim 4, characterized in that: The electrode tip portion (101) can be replaced according to different application requirements. Different electrode tip portions (101) have different slot shapes. The shape of the electrode tip portion (101) includes any one of a cone, a circle, a trapezoid, and a step shape, wherein the angle of the electrode tip is between 30° and 120°.

7. The high-pressure laser-maintained plasma light source device with multiple windows according to any one of claims 1 to 6, characterized in that: The main beam collecting portion (201) can selectively collect light of a specific wavelength band through the processing technology and film system design of the cavity surface, and the surface shape of the main beam collecting portion (201) includes any one of a spherical surface, an ellipsoidal surface, and a paraboloidal surface.

8. The high-pressure laser-maintained plasma light source device with multiple windows according to any one of claims 1 to 6, characterized in that: The secondary beam collecting unit (202) is used to return part of the light not collected by the primary beam collecting unit (201) to the plasma (204), redistribute the energy of the light beam returned to the plasma, and improve the collection efficiency of the light source device.

9. A high-pressure laser-maintained plasma method with multiple windows, characterized in that: The method is carried out using the high-pressure laser-maintained plasma light source device with multiple windows according to any one of claims 1 to 8, specifically comprising the following steps: Step 1: Pre-starting the circulating water cooling system to reduce the temperature of the light source device during operation; Step 2: generating initial plasma, external excitation passes through a discharge path formed by the stepped limiting electrode portion (105), the columnar threaded electrode portion (102) and the electrode tip portion (101), generating initial plasma between the electrodes; Step 3: maintaining the external laser, the external laser beam is focused to the plasma through the laser wavelength anti-reflection window (206) and the laser transmission path (205); Step 4: Output of plasma radiation light: the main beam collecting unit (201) and the sub-beam collecting unit (202) selectively collect part of the plasma radiation light and transmit it to the light output window (203) of the light source device.

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