High-power plasma source adopting cooling system

Abstract

The invention discloses a high-power plasma source adopting a cooling system, and relates to the technical field of plasma sources, the high-power plasma source comprises a shell and an upper top cover, the shell is fixedly connected with the upper top cover, an air cooling chamber is formed by the shell and the upper top cover, an outer flow storage box is further arranged in the air cooling chamber, an inner main pipeline is fixedly installed in the outer flow storage box, and the inner main pipeline is connected with the outer flow storage box. Cooling modules are fixedly installed at the two ends of the outer flow storage box, each cooling module is composed of a plurality of airflow channels and liquid channels, the two ends of each airflow channel are in a horn shape, the horn shapes of the two ends of each airflow channel are inconsistent, and the liquid channels are formed by combining gaps between the two liquid channels after the two liquid channels make contact with each other. According to the device, a plurality of airflow channels are formed in the cooling module, meanwhile, through the special shapes of the airflow channels, the device can increase the contact area of a liquid channel and airflow, meanwhile, the flowability of air is enhanced, and the cooling effect and the cooling strength of the device are improved.

Description

Technical Field

[0001] The invention belongs to the technical field of plasma sources, and in particular relates to a high-power plasma source using a cooling system. Background Art

[0002] A plasma source is a device used to generate plasma. It is usually used for surface treatment, material modification, thin film deposition and other processes in a vacuum environment. During the operation of the plasma source, multiple main boards, electrical components, circuits, etc. in the plasma source will emit heat. In particular, the high-voltage main board among the main boards generates a lot of heat. Therefore, during the operation of the plasma source, a dedicated cooling system must be used to reduce the temperature.

[0003] The Chinese invention patent with announcement number: CN113594580B discloses a power lithium battery heat dissipation mechanism. This invention uses a suction fan, heat dissipation holes, heat sensors, induction wires, filter plates and fixing devices in combination. When the temperature inside the lithium battery shell is too high, the heat sensor operates and transmits the signal to the suction fan through the induction wire. The suction fan starts to rotate upon receiving the command to suck the outside air into the lithium battery shell, and the hot air in the lithium battery shell will flow to the outside through the heat dissipation holes on both sides. This solves the problem that the existing power lithium batteries are in a sealed state when installed in the shell. Long-term operation of electric vehicles will increase the heat of the battery itself. If the battery is sealed, the air inside it will expand violently, causing the battery to bulge. In severe cases, the battery will explode, which is easy to endanger the user.

[0004] Existing cooling systems for plasma sources all use air as a cooling medium. Moreover, during the operation of the plasma source, users are unable to proactively adjust the cooling efficiency of the cooling system in advance. As a result, the cooling system will only increase its cooling efficiency after the temperature of the plasma source rises. This usage situation will result in the cooling system being unable to proactively increase its cooling efficiency when the high-power plasma source is instantly powered up, thereby causing the high-power plasma source to overheat and be damaged. Summary of the Invention

[0005] In view of the above technical problems, the present invention proposes the following technical solutions: A high-power plasma source using a cooling system includes an outer shell and an upper cover, the outer shell and the upper cover are fixedly connected, the outer shell and the upper cover form an air-cooling chamber, a plasma source is fixedly installed in the air-cooling chamber, and the plasma source is fixedly connected to the outer shell, characterized in that: the air-cooling chamber is also provided with an external flow storage box, the external flow storage box is fixedly connected to the inner wall of the outer shell, an inner main pipe is fixedly installed in the external flow storage box, a main elbow is fixedly installed at one end of the inner main pipe close to the upper cover, a cooling module is fixedly installed at both ends of the external flow storage box, the cooling module consists of a plurality of air flow channels and liquid channels, the two ends of the air flow channel are trumpet-shaped, the trumpet shapes at the two ends of the air flow channel are inconsistent, the liquid channel is formed by the gap between the two liquid channels after the two liquid channels contact each other, a diversion side box is fixedly installed at the other end of the cooling module, the diversion side box is fixedly connected to the inner wall of the outer shell, and a secondary elbow is also fixedly installed on the diversion side box.

[0006] Furthermore, a diverter plate is fixedly installed on one end of the plasma source close to the upper top cover, a diverter pipe is fixedly installed on one end of the diverter plate close to the upper top cover, the other end of the diverter pipe is fixedly connected to the main bend pipe, heat conduction blocks are fixedly installed on both sides of the diverter plate, the heat conduction block is fixedly connected to the upper top cover, a plurality of guide grooves are arranged in the heat conduction block, a cross plate is also slidably installed on the heat conduction block, a plurality of flow change plates are fixedly installed on the cross plate, the flow change plates are arranged in the guide groove to control the flow rate of the liquid in the guide groove, one end of the flow change plate is also in contact with the diverter plate, and a side bracket is fixedly installed on the end of the heat conduction block away from the diverter plate.

[0007] Furthermore, an adjusting screw is rotatably installed on the side bracket, and the adjusting screw is rotatably connected to the upper cover. An adjusting rack is slidably installed on the side bracket, and an intermediate bracket is fixedly installed on the adjusting rack. The intermediate bracket is fixedly connected to the cross plate, and the adjusting rack is connected to the adjusting screw by threads. A collecting cylinder is rotatably installed in the side bracket, and a plurality of arc-shaped openings are provided on the collecting cylinder, and the arc-shaped openings correspond to the plurality of guide grooves on the heat-conducting block. An adjusting gear is fixedly installed on the collecting cylinder, and the adjusting gear is meshed with the adjusting rack.

[0008] Furthermore, a liquid storage tank is fixedly installed in the outer shell, a main motor is fixedly installed on the outside of the liquid storage tank, a main turbine is fixedly installed on the output shaft of the main motor, and the main turbine is arranged in the inner main pipeline to drive liquid circulation. A motor bevel gear is also fixedly installed on the output shaft of the main motor, and a plurality of side brackets are meshed and installed on the motor bevel gear, and the side brackets are rotatably connected to the liquid storage tank.

[0009] Furthermore, an intermediate shaft is fixedly mounted on the side bracket, a side turbine is fixedly mounted on one end of the intermediate shaft away from the side bracket, a plurality of side pipes are fixedly mounted on the liquid storage tank, the side pipes are fixedly connected to the inner wall of the outer shell, the side turbine on the intermediate shaft is arranged in the side pipe to drive the liquid to flow into the side pipe, and a plurality of side heat dissipation plates are fixedly mounted on the other end of the side pipe.

[0010] Furthermore, a folded pipeline is provided in the side heat sink, the side heat sink is fixedly connected to the outer wall of the plasma source, and a plurality of heat dissipation fins for heat dissipation are provided on the outer surface of the side heat sink away from the plasma source. A side collecting pipe is also fixedly installed on the side heat sink, the side collecting pipe is fixedly connected to the plasma source, and the side collecting pipe is also fixedly connected to the diversion side box. The side collecting pipe is connected to multiple side heat sinks to collect liquid, so that the liquid flows out of the side heat sink and is collected through the side collecting pipe and flows into the diversion side box for circulation.

[0011] Furthermore, an acceleration motor is fixedly mounted on the outside of the collecting cylinder, and an acceleration turbine is fixedly mounted on the output shaft of the acceleration motor. The acceleration turbine is used to drive the liquid to circulate in the device.

[0012] Furthermore, a fan bracket is fixedly installed in the shell, and a plurality of cooling fans are arranged on the fan bracket. The cooling fans are arranged between the plasma source and the cooling module.

[0013] Compared with the prior art, the present invention has the following advantages: (1) the device changes the flow rate of the liquid in the heat-conducting block by actively adjusting the adjusting screw, thereby adapting to different usage conditions of the plasma power supply; (2) the device is provided with a folded pipeline in the side heat dissipation plate, and heat dissipation fins are provided on the outer surface of the side heat dissipation plate. While increasing the heat dissipation effect of the side heat dissipation plate, the side heat dissipation plate can also play the effect of lowering the temperature of the liquid to ensure the cooling effect of the device; (3) the device is provided with multiple air flow channels on the cooling module, and the special shape of the air flow channels allows the device to increase the contact area between the liquid channel and the air flow while enhancing the fluidity of the air, thereby increasing the cooling effect and the cooling intensity of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the overall structure of the device.

[0015] Figure 2 This is a schematic diagram of the structure of the upper cover and outer shell of this device after sectioning.

[0016] Figure 3 This is a schematic diagram of the rack structure for adjusting the device.

[0017] Figure 4This is a schematic diagram of the cross-section structure of the device's heat conduction block, transverse plate, diverter plate, collecting tube, and side bracket.

[0018] Figure 5 This is a schematic diagram of the cross-section structure of the diversion side box, internal main pipeline, and liquid storage tank of this device.

[0019] Figure 6 for Figure 5 A partial enlarged view of point A in the middle.

[0020] Figure 7 This is a schematic diagram of the cross-section structure of the diversion side box and side heat sink of this device.

[0021] Figure 8 This is a schematic diagram of the cross-section structure of the upper cover and cooling module of this device.

[0022] Figure 9 for Figure 8 A partial enlarged view of point B in the middle.

[0023] Reference numerals: 101-housing; 102-external interface; 103-display screen; 104-functional area; 105-upper cover; 106-plasma source; 201-adjusting screw; 202-heat conducting block; 203-cross plate; 204-diverter pipe; 205-diverter plate; 206-flow changing plate; 207-collecting cylinder; 208-adjusting rack; 209-side bracket; 210-middle bracket; 211-accelerating turbine; 212-adjusting gear; 213-adding Speed motor; 301- auxiliary bend; 302- diverter side box; 303- cooling module; 304- inner main pipeline; 305- outer flow storage box; 306- main bend; 307- liquid storage tank; 308- main motor; 309- side bracket; 310- intermediate shaft; 311- main turbine; 401- side pipeline; 402- side heat sink; 403- side collecting pipe; 404- cooling fan; 405- fan bracket; 3031- air flow channel; 3032- liquid channel. DETAILED DESCRIPTION

[0024] like Figures 1 to 3 As shown, a high-power plasma source using a cooling system includes a shell 101 and an upper cover 105, the shell 101 and the upper cover 105 are fixedly connected, one end of the shell 101 is provided with a display screen 103, and the end of the shell 101 provided with the display screen 103 is also provided with a functional area 104 and an external interface 102, the display screen 103 and the functional area 104 are used to display and reflect the status and parameters of the device, and the external interface 102 is used to connect to an external interface, the shell 101 and the upper cover 105 form an air-cooled chamber, and a plasma source 106 is fixedly installed in the air-cooled chamber, the plasma source 106 is fixedly connected to the shell 101, and the plasma source 106 is connected to the external interface 102 through a line.

[0025] like Figures 3 to 5 As shown, the plasma source 106 is fixedly installed with a diverter plate 205 at one end close to the upper cover 105, and a diverter pipe 204 is fixedly installed at one end of the diverter plate 205 close to the upper cover 105. Heat conducting blocks 202 are fixedly installed on both sides of the diverter plate 205. The heat conducting blocks 202 are fixedly connected to the upper cover 105. A plurality of guide grooves are provided in the heat conducting blocks 202. A transverse plate 203 is also slidably installed on the heat conducting block 202. A plurality of flow deflection plates 206 are fixedly installed on the transverse plate 203. The deflector plate 206 is arranged in the guide groove to control the flow rate of the liquid in the guide groove. One end of the deflector plate 206 is also in contact with the diverter plate 205. The end of the heat conducting block 202 away from the diverter plate 205 is fixedly installed with a side bracket 209. The side bracket 209 is rotatably installed with an adjusting screw rod 201. The adjusting screw rod 201 is rotatably connected to the upper cover 105. The side bracket 209 is slidably installed with an adjusting rack 208. The adjusting rack 208 is fixedly installed with an intermediate bracket 210. The intermediate bracket 210 is fixedly connected to the horizontal plate 203, the adjusting rack 208 is connected to the adjusting screw 201 by a thread, the collecting cylinder 207 is rotatably installed in the side bracket 209, the collecting cylinder 207 is provided with a plurality of arc-shaped openings, the arc-shaped openings correspond to the plurality of guide grooves on the heat conducting block 202, and the collecting cylinder 207 is fixedly installed with an adjusting gear 212, the adjusting gear 212 is engaged with the adjusting rack 208, and when the adjusting screw 201 rotates, it drives the adjusting rack 208, the intermediate The bracket 210, the cross plate 203, and the deflector plate 206 move away from or toward the upper cover 105. While changing the width of the guide groove in the deflector plate 206, the collecting tube 207 is rotated to change the direction of the arc-shaped opening on the collecting tube 207 so that the arc-shaped opening can correspond to the size of the upper guide groove. An acceleration motor 213 is also fixedly installed on the outside of the collecting tube 207. An acceleration turbine 211 is fixedly installed on the output shaft of the acceleration motor 213. The acceleration turbine 211 is used to drive the liquid to circulate in this device.

[0026] like Figure 3 、 Figure 5 、 Figure 8 、 Figure 9As shown, an external flow box 305 is further provided in the air-cooling chamber, and the external flow box 305 is fixedly connected to the inner wall of the shell 101. An internal main pipe 304 is fixedly installed in the external flow box 305. A main bend pipe 306 is fixedly installed at one end of the internal main pipe 304 close to the upper cover 105. The other end of the main bend pipe 306 is fixedly connected to the diversion pipe 204. Cooling modules 303 are fixedly installed at both ends of the external flow box 305. The cooling module 303 consists of a plurality of air flow channels 3031 and liquid channels 3032. The two ends of the air flow channel 3031 are trumpet-shaped, and the middle section is a straight line. The trumpet shapes at both ends of the air flow channel 3031 are inconsistent. The liquid channel 3032 is composed of the gap between the two liquid channels 3032 after the two liquid channels 3032 come into contact. The shape of the air flow channel 3031 is set in this way so that the air flow channel 3031 can adopt the movement principle of the Laval nozzle, so that the air flow can accelerate the movement of the air flow when passing through the air flow channel 3031, so that the air flow can take away the heat of the liquid in the liquid channel 3032 faster. The other end of the cooling module 303 is fixedly installed with a diversion side box 302, and the diversion side box 302 is fixedly connected to the inner wall of the outer shell 101. The diversion side box 302 is also fixedly installed with a secondary bend pipe 301, and the secondary bend pipe 301 is fixedly connected to the collecting tube 207.

[0027] like Figures 6 to 7As shown, a liquid storage tank 307 is fixedly installed in the shell 101, and a main motor 308 is fixedly installed on the outside of the liquid storage tank 307. A main turbine 311 is fixedly installed on the output shaft of the main motor 308, and the main turbine 311 is arranged in the inner main pipe 304 to drive liquid circulation. A motor bevel gear is also fixedly installed on the output shaft of the main motor 308, and a plurality of eccentric brackets 309 are meshed and installed on the motor bevel gear. The eccentric bracket 309 is rotatably connected to the liquid storage tank 307, and an intermediate shaft 310 is fixedly installed on the eccentric bracket 309. A side turbine is fixedly installed on the end of the intermediate shaft 310 away from the eccentric bracket 309, and a plurality of side pipes 401 are fixedly installed on the liquid storage tank 307. The side pipes 401 are fixedly connected to the inner wall of the shell 101, and the side turbines on the intermediate shaft 310 are arranged in the side pipes 401 to drive liquid to flow into the side pipes 401. The other end of the side pipes 401 is fixedly installed with a plurality of side heat dissipation plates 402, a folded pipeline is provided in the side heat sink 402, the side heat sink 402 is fixedly connected to the outer wall of the plasma source 106, and a plurality of heat dissipation fins are provided on the outer surface of the side heat sink 402 away from the plasma source 106 for heat dissipation, and a side collecting pipe 403 is also fixedly installed on the side heat sink 402, and the side collecting pipe 403 is fixedly connected to the plasma source 106, and the side collecting pipe 403 is also fixedly connected to the diversion side box 302, and the side collecting pipe 403 is connected to multiple side heat sinks 402 to collect liquid, so that the liquid flows out of the side heat sink 402 and is collected through the side collecting pipe 403 to flow into the diversion side box 302 for circulation, and a fan bracket 405 is also fixedly installed in the shell 101, and a plurality of cooling fans 404 are provided on the fan bracket 405, and the cooling fans 404 are arranged between the plasma source 106 and the cooling module 303, and the cooling fans 404 should be closer to the cooling module 303 when installed.

[0028] Working principle: Before using this device, make sure that this device has heat dissipation space, and avoid external devices blocking the cooling module 303. After that, when this device is in use, the plasma source 106 will gradually heat up. When the plasma source 106 is in use, the main motor 308 of this device will also start, and the main motor 308 will drive the liquid into the inner main pipe 304 through the main turbine 311. The liquid then passes through the main bend 306 and the diversion pipe 204 into the diversion plate 205. The liquid in the diversion plate 205 then enters the heat conduction blocks 202 on both sides of the diversion plate 205. The liquid will pass through multiple guide grooves in the heat conduction block 202. When the liquid flows through the guide grooves, it will take away the heat from the plasma source 106. The liquid will then gather at the collection tube 207. At this time, the acceleration motor 213 can also be started to drive the acceleration turbine 211 to rotate to accelerate the liquid, so that the liquid enters the diversion side box 302 through the secondary bend 301. After the liquid enters the diversion side box 302, it will gradually enter the multiple liquid channels 3032 on the cooling module 303. At this time, the cooling fan 404 will also be started to allow the cooling module 303 to drive the airflow from both sides of the plasma source 106 to the cooling module 303, so that when the airflow passes through the airflow channel 3031, it takes away the heat on the liquid channel 3032 to complete the cooling of the liquid. After cooling, the liquid will be collected in the external flow storage box 305, and the liquid in the external flow storage box 305 will flow into the liquid storage tank 307 to complete the cycle.

[0029] When the main motor 308 rotates, the main motor 308 will also rotate the side turbine on the intermediate shaft 310 through the side bracket 309, so that the liquid in the liquid storage tank 307 is sent into the side heat sink 402 through the side pipe 401, and the liquid takes away the heat from the plasma source 106 through the bent pipe in the side heat sink 402. The liquid will be collected through the side collecting pipe 403 and then enter the diversion side box 302 for circulation. Moreover, when the cooling fan 404 drives the air flow, the air flow will also pass through the heat sink fins on the outer wall of the side heat sink 402, allowing the air flow to take away the heat from the heat sink fins, thereby allowing the temperature of the liquid to be reduced when passing through the side heat sink 402.

[0030] When the device is about to output high power or is in a high temperature environment, the user can improve the cooling efficiency of the device by rotating the adjusting screw 201, allowing the adjusting screw 201 to move with the adjusting rack 208 away from the upper cover 105 to change the height of the guide groove in the heat conducting block 202, thereby increasing the liquid flowing through the guide groove. At the same time, the arc-shaped opening on the collecting tube 207 will also increase the liquid flow along with the guide groove to adapt to high power use.

Claims

1. A high-power plasma source using a cooling system, comprising a housing (101) and an upper cover (105), wherein the housing (101) and the upper cover (105) are fixedly connected, and the housing (101) and the upper cover (105) form an air-cooling chamber, wherein a plasma source (106) is fixedly installed in the air-cooling chamber, and the plasma source (106) is fixedly connected to the housing (101), characterized in that: An external flow storage box (305) is further provided in the air-cooling chamber. The external flow storage box (305) is fixedly connected to the inner wall of the outer shell (101). An internal main pipe (304) is fixedly installed in the external flow storage box (305). A main bend pipe (306) is fixedly installed at one end of the internal main pipe (304) close to the upper cover (105). Cooling modules (303) are fixedly installed at both ends of the external flow storage box (305). The cooling module (303) consists of a plurality of air flow channels (3031) and liquid channels (3032). Both ends of the air flow channel (3031) are trumpet-shaped, and the trumpet shapes at both ends of the air flow channel (3031) are inconsistent. The liquid channel (3032) is formed by the gap between the two liquid channels (3032) after the two liquid channels (3032) are in contact. The other end of the cooling module (303) is fixedly installed with a diversion side box (302), and the diversion side box (302) is fixedly connected to the inner wall of the shell (101). The diversion side box (302) is also fixedly installed with a secondary bend pipe (301).

2. The high-power plasma source using a cooling system according to claim 1, characterized in that: A diverter plate (205) is fixedly installed on one end of the plasma source (106) close to the upper cover (105), a diverter pipe (204) is fixedly installed on one end of the diverter plate (205) close to the upper cover (105), the other end of the diverter pipe (204) is fixedly connected to the main bend pipe (306), and heat conduction blocks (202) are fixedly installed on both sides of the diverter plate (205), the heat conduction blocks (202) are fixedly connected to the upper cover (105), and the heat conduction blocks A plurality of guide grooves are provided in (202), a transverse plate (203) is also slidably mounted on the heat conductive block (202), a plurality of flow change plates (206) are fixedly mounted on the transverse plate (203), the flow change plates (206) are arranged in the guide grooves to control the flow of the liquid in the guide grooves, one end of the flow change plate (206) is also in contact with the diverter plate (205), and a side bracket (209) is fixedly mounted on one end of the heat conductive block (202) away from the diverter plate (205).

3. The high-power plasma source using a cooling system according to claim 2, characterized in that: An adjusting screw rod (201) is rotatably mounted on the side bracket (209), and the adjusting screw rod (201) is rotatably connected to the upper cover (105). An adjusting rack (208) is slidably mounted on the side bracket (209), and an intermediate bracket (210) is fixedly mounted on the adjusting rack rod (208). The intermediate bracket (210) is fixedly connected to the transverse plate (203), and the adjusting rack rod (208) is connected to the adjusting screw rod (201) via a thread. A collecting tube (207) is rotatably mounted in the side bracket (209), and a plurality of arc-shaped openings are provided on the collecting tube (207), and the arc-shaped openings correspond to the plurality of guide grooves on the heat conducting block (202). An adjusting gear (212) is fixedly mounted on the collecting tube (207), and the adjusting gear (212) is meshed with the adjusting rack rod (208).

4. The high-power plasma source using a cooling system according to claim 1, characterized in that: A liquid storage tank (307) is fixedly mounted in the housing (101), a main motor (308) is fixedly mounted outside the liquid storage tank (307), a main turbine (311) is fixedly mounted on the output shaft of the main motor (308), and the main turbine (311) is arranged in the inner main pipe (304) to drive liquid circulation. A motor bevel gear is also fixedly mounted on the output shaft of the main motor (308), and a plurality of eccentric brackets (309) are meshedly mounted on the motor bevel gear. The eccentric brackets (309) are rotatably connected to the liquid storage tank (307).

5. The high-power plasma source using a cooling system according to claim 4, characterized in that: An intermediate shaft (310) is fixedly mounted on the eccentric bracket (309), and a side turbine is fixedly mounted on one end of the intermediate shaft (310) away from the eccentric bracket (309). A plurality of side pipes (401) are fixedly mounted on the liquid storage tank (307), and the side pipes (401) are fixedly connected to the inner wall of the housing (101). The side turbine on the intermediate shaft (310) is arranged in the side pipe (401) to drive liquid to flow into the side pipe (401), and a plurality of side heat dissipation plates (402) are fixedly mounted on the other end of the side pipe (401).

6. The high-power plasma source using a cooling system according to claim 5, characterized in that: A folded pipeline is provided in the side heat sink (402), the side heat sink (402) is fixedly connected to the outer wall of the plasma source (106), a plurality of heat dissipation fins are provided on the outer surface of the side heat sink (402) away from the plasma source (106) for heat dissipation, a side collecting pipe (403) is also fixedly installed on the side heat sink (402), the side collecting pipe (403) is fixedly connected to the plasma source (106), the side collecting pipe (403) is also fixedly connected to the diversion side box (302), the side collecting pipe (403) is connected to the plurality of side heat sinks (402) for collecting liquid, and the liquid flows out of the side heat sink (402) and then flows into the diversion side box (302) for circulation through the side collecting pipe (403).

7. The high-power plasma source using a cooling system according to claim 3, characterized in that: An acceleration motor (213) is fixedly mounted on the outside of the collecting cylinder (207), and an acceleration turbine (211) is fixedly mounted on the output shaft of the acceleration motor (213). The acceleration turbine (211) is used to drive the liquid to circulate within the device.

8. The high-power plasma source using a cooling system according to claim 1, characterized in that: A fan bracket (405) is also fixedly installed in the housing (101), and a plurality of cooling fans (404) are provided on the fan bracket (405). The cooling fans (404) are provided between the plasma source (106) and the cooling module (303).

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