Dual-optical-path synchronous scanning galvanometer system

Abstract

The invention relates to the technical field of optics, and discloses a dual-optical-path synchronous scanning galvanometer system, so as to save galvanometer resources and improve efficiency. The system comprises a first galvanometer with a rotating shaft in a first direction; the second galvanometer and the third galvanometer are separately arranged on two sides of the first galvanometer at equal intervals, and rotating shafts are orthogonal to the first direction; rotating shafts of the second galvanometer and the third galvanometer are parallel, two paths of incident light on the front and back surfaces of the first galvanometer are opposite in direction, and two sections of light beams synchronously reflected to the second galvanometer and the third galvanometer on the front and back surfaces of the first galvanometer are opposite in direction; driving sources of rotating shafts of the second galvanometer and the third galvanometer share the same motor or two independent motors which are controlled by the control host and synchronously controlled by the same instruction, so that the first galvanometer, the second galvanometer and the third galvanometer are in a linkage period; two initial positions and scanning contours which are in central rotational symmetry are synchronously formed on a plane right below the two rotating shafts parallel to the second galvanometer and the third galvanometer, and the rotating center is the intersection point of the plane and the rotating axis corresponding to the first direction.

Description

Technical Field

[0001] The present invention relates to the field of optical technology, and in particular to a dual-light-path synchronous scanning galvanometer system. Background Art

[0002] A laser scanning galvanometer is a high-precision laser beam dynamic deflection system driven by a high-speed electromagnetic mechanism. Its core consists of a reflective lens, a limited-deflection galvanometer motor, a position sensor, and a closed-loop drive control subsystem. Laser scanning galvanometers can be used in a single-axis or multi-axis configuration to meet the needs of different applications. A common laser galvanometer scanning head, or a two-axis galvanometer, consists of orthogonal X / Y-axis galvanometers. Under the dynamic control of a synchronous control system, the X / Y-axis galvanometers coordinate deflection, completing two-dimensional dynamic beam scanning through vector synthesis, thereby achieving laser processing capabilities within a certain planar spatial range.

[0003] In some laser processing applications, such as precision laser marking, precision laser cutting, and additive manufacturing, multiple laser scanning galvanometer heads are often used to synchronize processing to expand the laser's working area and improve production efficiency. Each scanning galvanometer head operates relatively independently, responsible for scanning and processing within a specified area, and is generally unrelated in structure and optical path. While multi-galvanometer scanning systems can expand processing areas and improve efficiency through parallel processing, the optical paths of each scanning galvanometer head are independent subsystems, resulting in high costs.

[0004] When there are situations where a large amount of repetitive graphics processing is required, such as cutting a large number of equidistant circular holes or printing the titanium alloy case structure of a smartwatch, these processed workpieces are not directly connected and do not require overlap. They are relatively independent and need to be replicated in large quantities, and the placement direction does not need to be strictly restricted. Therefore, it is possible to consider reusing the actuator of the galvanometer to achieve low-cost, more efficient, and more consistent laser scanning processing. In addition, this method can also be used for centrally symmetrical workpieces to be processed. Summary of the Invention

[0005] The present invention aims to disclose a dual-light-path synchronous scanning galvanometer system to save galvanometer resources and improve efficiency.

[0006] To achieve the above-mentioned purpose, the dual-light path synchronous scanning galvanometer system disclosed in the present invention includes:

[0007] a first galvanometer having a rotation axis in a first direction;

[0008] A second galvanometer and a third galvanometer, the rotation axis of which is in a second direction; the second direction is orthogonal to the first direction;

[0009] The second galvanometer mirror and the third galvanometer mirror are equidistantly spaced on either side of the first galvanometer mirror to respectively receive reflected light beams respectively transferred based on the parallel front and back surfaces of the first galvanometer mirror. The rotation axis of the second galvanometer mirror is parallel to the rotation axis of the third galvanometer mirror. The two incident light beams on the front and back surfaces of the first galvanometer mirror are in opposite directions, and the two light beams respectively synchronously reflected from the front and back surfaces of the first galvanometer mirror to the second galvanometer mirror and the third galvanometer mirror are always in opposite directions.

[0010] The driving source of the second galvanometer rotation axis and the driving source of the third galvanometer rotation axis share the same motor or two independent motors controlled by the control host with the same instructions, so that the first galvanometer, the second galvanometer and the third galvanometer synchronously form two initial positions and scanning profiles with central rotational symmetry on the plane directly below the two rotation axes of the second galvanometer and the third galvanometer within one linkage cycle, and the rotation center is the intersection of the plane where the two scanning profiles are located and the rotation axis corresponding to the first direction.

[0011] Optionally, the two scanning profiles correspond to two different exposure areas on the same processed surface of the same sample parallel to the two rotation axes of the second galvanometer mirror and the third galvanometer mirror.

[0012] Optionally, the two scanning profiles correspond to at least two different exposure surfaces of two different samples, or correspond to at least two different exposure surfaces of the same sample.

[0013] Optionally, a shaping device for scaling, splitting and / or collimating the light beam is disposed between the second galvanometer mirror and / or the third galvanometer mirror and the corresponding exposure surface.

[0014] Optionally, the two incident light sources on the front and back sides of the first galvanometer are two beams of incident light after being split by a beam splitter from the same laser light source; or the two incident light sources on the front and back sides of the first galvanometer are two independent laser light sources that are synchronously switched on and off by the same control host.

[0015] The present invention has the following beneficial effects:

[0016] 1. The second and third galvanometers share the first galvanometer, which improves resource utilization.

[0017] 2. The driving source of the second galvanometer rotation axis and the driving source of the third galvanometer rotation axis share the same motor or are two independent motors controlled by the control host with the same instructions, thereby ensuring dynamic synchronization during the scanning process.

[0018] 3. In the optical path of the light beam, by setting the specific geometric position relationship of the first galvanometer, the second galvanometer and the third galvanometer, two initial positions and scanning profiles with central rotational symmetry can be synchronously formed on the plane directly below the two rotation axes of the second galvanometer and the third galvanometer within one linkage cycle, ensuring the consistency of the two scanning profiles.

[0019] 4. In the present invention, the plane containing the scanning profile, defined directly below the rotation axes of the second and third galvanometer mirrors, should be broadly understood as a spatially real plane that can be the actual processing surface of the sample or a virtual plane, but should not be narrowly understood as limited to the processing surface of the sample. To meet different user application requirements, the single- or dual-path light beams that pass through the virtual plane can be scaled, split, and / or collimated before entering the final at least two exposure surfaces, thereby forming identical, similar, or related processing structures on each exposure surface. This provides good scalability and facilitates the compact design of the volumetric dimensions of the series of devices in the optical path preceding the plane containing the scanning profile.

[0020] The present invention will be described in further detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings, which constitute part of this application, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0022] Figure 1 This is a schematic diagram of the optical path and component distribution of the dual-optical path synchronous scanning galvanometer system disclosed in an embodiment of the present invention.

[0023] Figure 2 Yes Figure 1 Schematic diagram of the principle of the structure shown in the initial position and central rotational symmetry in the plane where the scanning profile is located. DETAILED DESCRIPTION

[0024] The embodiments of the present invention are described in detail below with reference to the accompanying drawings. However, the present invention can be implemented in many different ways as defined and covered by the claims.

[0025] Example 1

[0026] This embodiment discloses a dual-light-path synchronous scanning galvanometer system.

[0027] Reference Figure 1 and Figure 2, where 1 is laser beam 1, 2 is laser beam 2, 3 is beam expander and collimator 1, 4 is beam expander and collimator 2, 5 is the X-axis uniaxial galvanometer, 6 is the Y-axis uniaxial galvanometer 1, 7 is the Y-axis uniaxial galvanometer 2, 8 is the F-Theta mirror 1, 9 is the F-Theta mirror 2, 10 is the scanning plane 1 of laser beam 1, and 11 is the scanning plane 2 of laser beam 2. The X-axis galvanometer's rotation axis must be orthogonal to the rotation axes of both the Y-axis galvanometer 1 and the Y-axis galvanometer 2.

[0028] After beam expansion and collimation 1, laser beam 1 forms a parallel beam, which is reflected by surface A of the X-axis galvanometer reflector and then reflected a second time by the Y-axis galvanometer reflector 1. The reflected beam is focused by F-Theta mirror 1, forming a focused spot with high energy density on scanning plane 1. Driven by a synchronous control system, the laser beam and the XY-axis galvanometers coordinate their deflection, ultimately forming the desired laser scanning pattern on scanning plane 1. Similarly, laser beam 2 also forms a processing pattern on scanning plane 2. Because the X-axis galvanometer is reused and the Y-axis galvanometer control instructions are the same, the shape and size of this pattern are consistent with the previous one, but it is rotationally symmetric around the center.

[0029] The light sources of laser beams 1 and 2 can be provided by splitting a single light source or by two independent light sources. However, the latter requires synchronization of the laser light source control signals to avoid inconsistent beam switching timing.

[0030] The working principle of the dual-light path synchronous scanning galvanometer system of this embodiment is as follows: Figure 2 As shown. Among them, xoy is the scanning working plane, the X-axis galvanometer is placed with its rotation axis perpendicular to the xoy plane, the rotation axes of the Y-axis galvanometers 1 and 2 are parallel to the xoy plane and at the same time parallel to the x direction, and the centers of the three reflectors are placed at the same height. Laser beams 1 and 2 are incident on the A / B surfaces of the X-axis galvanometer along the x direction respectively, and after reflection, they reach the reflectors of the Y-axis galvanometers 1 and 2 respectively. After reflection again, they are projected on the xoy plane, and the spot positions are (x1, y1) and (x2, y2) respectively. d1 and d2 are the center distances from the A / B surface of the X-axis galvanometer reflector to the reflectors of the Y-axis galvanometer 1 and 2 respectively, h1 and h2 are the distances from the center of the Y-axis galvanometer 1 and 2 reflectors to the scanning working plane respectively, and O1 and O2 are the zero position coordinates of the dual optical path respectively (i.e., the initial position coordinates). θ x0 ,θ 10 ,θ 20 are the angular positions of the X-axis galvanometer, Y-axis galvanometer 1 and 2 mirrors corresponding to the zero position, and the deflection angles of the X-axis galvanometer, Y-axis galvanometer 1 and 2 mirrors are recorded as Δθ respectively x , Δθ1 and Δθ2. Assume that the counterclockwise rotation angle is positive, let θ x0 ,θ 10 ,θ 20 Both are 45°. At this time, the two incident light rays will reach the scanning working surfaces O1 and O2 after two 90° reflections.

[0031] according to Figure 2 From the geometric relationship, we can see that:

[0032]

[0033] Let d1=d2, h1=h2, when Δθ1=Δθ2, then (x1, y1) and (x2, y2) are symmetric about the rotation center O.

[0034] based on Figure 1 、 Figure 2 From the above content, it can be concluded that the core components of the dual-light path synchronous scanning galvanometer system disclosed in this embodiment can be summarized as follows:

[0035] The first galvanometer has a rotation axis in a first direction.

[0036] The second galvanometer and the third galvanometer have a rotation axis in a second direction; the second direction is orthogonal to the first direction.

[0037] The second galvanometer and the third galvanometer are equidistantly spaced on both sides of the first galvanometer to respectively receive the reflected light beams transferred based on the parallel front and back surfaces of the first galvanometer. The rotation axis of the second galvanometer is parallel to the rotation axis of the third galvanometer, and the two incident light beams on the front and back surfaces of the first galvanometer are reversed (the so-called "reverse" means "opposite directions, or it can be understood that the angle between the two directions is 180 degrees"), and the two light beams synchronously reflected from the front and back surfaces of the first galvanometer to the second galvanometer and the third galvanometer are always reversed.

[0038] The driving source of the second galvanometer rotation axis and the driving source of the third galvanometer rotation axis share the same motor or are two independent motors controlled by the control host with the same instructions, so that the first galvanometer, the second galvanometer and the third galvanometer synchronously form two initial positions and scanning profiles with central rotational symmetry on the plane directly below the two rotation axes of the second galvanometer and the third galvanometer within one linkage cycle, and the rotation center is the intersection of the plane where the two scanning profiles are located and the rotation axis corresponding to the first direction.

[0039] The plane of the scanning profile defined in this embodiment, which is parallel to and directly below the rotation axes of the second and third galvanometer mirrors, should be understood broadly as a real spatial plane that can be the actual processing surface of the sample or a virtual plane, but should not be narrowly understood as limited to the processing surface of the sample. To meet different user application requirements, the single-path or dual-path light beams that pass through the virtual plane can be scaled, split, and / or collimated before entering the final at least two exposure surfaces, thereby forming identical, similar, or related processing structures on each exposure surface. This provides good scalability and facilitates the compact design of the volumetric dimensions of the series of devices in the optical path preceding the plane where the scanning profile is located.

[0040] Therefore, the two scanning profiles of this embodiment can correspond to two different exposure areas on the same sample's processed surface parallel to the rotation axes of the second and third galvanometer mirrors; or they can correspond to at least two different exposure surfaces of two different samples, or at least two different exposure surfaces of the same sample. If necessary, a beam shaping device for scaling, splitting, and / or collimating the beam can be positioned between the second and / or third galvanometer mirrors and the corresponding exposure surfaces.

[0041] Among them, the two incident light sources on the front and back sides of the first galvanometer are two beams of incident light after being split by a beam splitter from the same laser light source; or the two incident light sources on the front and back sides of the first galvanometer are two independent laser light sources that are synchronously switched on and off by the same control host.

[0042] In summary, the dual-light-path synchronous scanning galvanometer system disclosed in the embodiments of the present invention also has the following beneficial effects:

[0043] 1. The second and third galvanometers share the first galvanometer, which improves resource utilization.

[0044] 2. The driving source of the second galvanometer rotation axis and the driving source of the third galvanometer rotation axis share the same motor or are two independent motors controlled by the control host with the same instructions, thereby ensuring dynamic synchronization during the scanning process.

[0045] 3. In the optical path of the light beam, by setting the specific geometric position relationship of the first galvanometer, the second galvanometer and the third galvanometer, two initial positions and scanning profiles with central rotational symmetry can be synchronously formed on the plane directly below the two rotation axes of the second galvanometer and the third galvanometer within one linkage cycle, ensuring the consistency of the two scanning profiles.

[0046] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A dual-optical path synchronous scanning galvanometer system, characterized in that: include: a first galvanometer having a rotation axis in a first direction; A second galvanometer and a third galvanometer, the rotation axis of which is in a second direction; the second direction is orthogonal to the first direction; The second galvanometer mirror and the third galvanometer mirror are equidistantly spaced on either side of the first galvanometer mirror to respectively receive reflected light beams respectively transferred based on the parallel front and back surfaces of the first galvanometer mirror. The rotation axis of the second galvanometer mirror is parallel to the rotation axis of the third galvanometer mirror. The two incident light beams on the front and back surfaces of the first galvanometer mirror are in opposite directions, and the two light beams respectively synchronously reflected from the front and back surfaces of the first galvanometer mirror to the second galvanometer mirror and the third galvanometer mirror are always in opposite directions. The driving source of the second galvanometer rotation axis and the driving source of the third galvanometer rotation axis share the same motor or two independent motors controlled by the control host with the same instructions, so that the first galvanometer, the second galvanometer and the third galvanometer synchronously form two initial positions and scanning profiles with central rotational symmetry on the plane directly below the two rotation axes of the second galvanometer and the third galvanometer within one linkage cycle, and the rotation center is the intersection of the plane where the two scanning profiles are located and the rotation axis corresponding to the first direction.

2. The dual-light path synchronous scanning galvanometer system according to claim 1, characterized in that: The two scanning profiles correspond to two different exposure areas on the same processed surface of the same sample that are parallel to the two rotation axes of the second galvanometer mirror and the third galvanometer mirror.

3. The dual-light path synchronous scanning galvanometer system according to claim 1, characterized in that: The two scanning profiles correspond to at least two different exposure surfaces of two different samples, or correspond to at least two different exposure surfaces of the same sample.

4. The dual-light path synchronous scanning galvanometer system according to claim 3, characterized in that: A shaping device for scaling, splitting and / or collimating the light beam is further disposed between the second galvanometer mirror and the corresponding exposure surface.

5. The dual-light path synchronous scanning galvanometer system according to claim 3, characterized in that: A shaping device for scaling, splitting and / or collimating the light beam is further disposed between the third galvanometer mirror and the corresponding exposure surface.

6. The dual-light path synchronous scanning galvanometer system according to claim 1, characterized in that: The two incident light sources on the front and back sides of the first galvanometer are two beams of incident light obtained by splitting the same laser light source by a beam splitter.

7. The dual-light path synchronous scanning galvanometer system according to claim 1, characterized in that: The two incident light sources on the front and back sides of the first galvanometer are two independent laser light sources that are synchronously switched on and off by the same control host.

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