Temperature control device of waste gas inlet pipeline and waste gas treatment device

Abstract

The invention discloses a temperature control device of a waste gas inlet pipeline and a waste gas treatment device. The temperature control device comprises a first sleeve, a second sleeve, a first temperature control gas inlet pipeline, a temperature control gas transmission pipeline and a temperature control gas outlet pipeline. The first sleeve is arranged on the periphery of the first waste gas inlet pipeline in a surrounding manner, and a first preset gap is formed between the first sleeve and the first waste gas inlet pipeline; the second sleeve is arranged on the periphery of the second waste gas inlet pipeline in a surrounding manner, and a second preset gap is formed between the second sleeve and the second waste gas inlet pipeline; the first temperature control gas inlet pipeline is communicated with one end of the first sleeve and provides temperature control gas for the first preset gap; one end of the temperature control gas transmission pipeline is communicated with the other end of the first sleeve, the other end of the temperature control gas transmission pipeline is communicated with one end of the second sleeve, and temperature control gas is provided for the second preset gap; and the temperature control gas outlet pipeline is communicated with the other end of the second sleeve so as to lead out temperature control gas.

Description

Technical Field

[0001] The present application relates to the technical field of waste gas treatment, and in particular to a temperature control device for a waste gas intake pipe and a waste gas treatment device. Background Art

[0002] The semiconductor industry processes a variety of waste gases during production. These waste gases are often contaminated with solid particles, such as silicon tetrafluoride (SiF4) and phosphine. These solid particles easily condense into lumps at the air inlet when cooled. If not promptly addressed, these solid particles can clog the gas inlet before entering the chamber, hindering the exhaust gas treatment device's ability to handle waste gas and dust. Blocked air inlets require prompt cleaning by on-site service personnel, disrupting the proper functioning of the exhaust gas treatment device and resulting in wasted time and personnel.

[0003] The contents of the background technology are merely technologies known to the public and do not necessarily represent existing technologies in this field. Summary of the Invention

[0004] According to one aspect of the present application, a temperature control device for an exhaust gas intake duct is provided. The exhaust gas intake duct includes a first exhaust gas intake duct, a valve body, and a second exhaust gas intake duct. One end of the first exhaust gas intake duct receives exhaust gas to be treated from an external exhaust gas duct. A first end of the valve body is fixedly connected to the other end of the first exhaust gas intake duct. One end of the second exhaust gas intake duct is fixedly connected to the second end of the valve body. The temperature control device includes a first sleeve, a second sleeve, a first temperature-controlled gas intake duct, a temperature-controlled gas transmission duct, and a temperature-controlled gas outlet duct. The first sleeve is arranged around the outer circumference of the first exhaust gas intake pipe, and a first preset gap is set between the first sleeve and the first exhaust gas intake pipe; the second sleeve is arranged around the outer circumference of the second exhaust gas intake pipe, and a second preset gap is set between the second exhaust gas intake pipe; the first temperature-controlled gas intake pipe is connected with one end of the first sleeve to provide temperature-controlled gas to the first preset gap; one end of the temperature-controlled gas transmission pipe is connected with the other end of the first sleeve, and the other end is connected with one end of the second sleeve to provide temperature-controlled gas to the second preset gap; the temperature-controlled gas outlet pipe is connected with the other end of the second sleeve to export the temperature-controlled gas.

[0005] According to some embodiments of the present application, the temperature control device further includes a negative pressure detection pipe. The negative pressure detection pipe is arranged on one side of the first exhaust gas intake pipe, and the negative pressure detection pipe includes an L-shaped detection pipe, a third sleeve and a second temperature-controlled gas intake pipe. The L-shaped detection pipe includes a long pipe and a short pipe. One end of the long pipe is arranged in the pipe of the first exhaust gas intake pipe, and the other end of the long pipe is connected to the external air pressure detection device; the short pipe is arranged in the pipe of the first exhaust gas intake pipe, one end of the short pipe is connected to one end of the long pipe, and the other end is in contact with the exhaust gas to be treated; the third sleeve is arranged around the outer circumference of the long pipe, and a third preset gap is provided between the third sleeve and the long pipe; the second temperature-controlled gas intake pipe is connected to one side of the third sleeve to provide temperature-controlled gas to the third preset gap.

[0006] According to some embodiments of the present application, the other end of the short pipe is a slope with a preset angle, and the preset angle ranges from 30° to 45°.

[0007] According to some embodiments of the present application, the temperature-controlled gas is nitrogen or dry air with a preset temperature.

[0008] According to some embodiments of the present application, the first preset gap and the second preset gap are both in a range of 1 mm to 5 mm.

[0009] According to one aspect of the present application, the present application provides an exhaust gas treatment device, which includes the temperature control device as described above.

[0010] According to some embodiments of the present application, the exhaust gas treatment device further includes a reaction chamber and a temperature-controlled gas purge interface. One end of the reaction chamber is connected to the other end of the second exhaust gas inlet pipe. One end of the temperature-controlled gas purge interface is connected to the reaction chamber, and the other end of the temperature-controlled gas purge interface is connected to the temperature-controlled gas outlet pipe, so that after the temperature-controlled gas flows out of the temperature-controlled gas outlet pipe, it flows into the reaction chamber through the temperature-controlled gas purge interface.

[0011] According to some embodiments of the present application, the exhaust gas treatment device further includes a bypass channel, one end of which is fixedly connected to the third end of the valve body, and the other end of which is connected to an external exhaust gas recovery pipeline, so that the valve body controls the exhaust gas to be treated to flow into the bypass channel.

[0012] According to some embodiments of the present application, the exhaust gas treatment device is applied to the field of semiconductor manufacturing.

[0013] Beneficial effects

[0014] The present application sets a first sleeve outside the first exhaust gas intake pipe so that the temperature-controlled gas can flow into the first preset gap. The present application sets a second sleeve outside the second exhaust gas intake pipe so that the temperature-controlled gas can flow into the second preset gap.

[0015] The temperature control device of the present application can maintain a relatively high temperature in the first and second exhaust gas intake ducts by using temperature-controlled gas, thereby preventing dust particles and the like in the treated exhaust gas from solidifying in the first and second exhaust gas intake ducts. This application can reduce the frequency of manual cleaning of the exhaust gas intake ducts, thereby increasing the normal operating time of the exhaust gas treatment device and improving the operating efficiency of the exhaust gas treatment device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0017] Figure 1 A schematic structural diagram of a temperature control device according to an embodiment of the present application is shown;

[0018] Figure 2 An enlarged structural schematic diagram of a temperature control device according to an embodiment of the present application is shown;

[0019] Figure 3 Another enlarged structural schematic diagram of the temperature control device according to an embodiment of the present application is shown.

[0020] Description of reference numerals:

[0021] Exhaust gas intake duct 100 .

[0022] A first exhaust gas intake pipe 110 ; a valve body 120 ; a second exhaust gas intake pipe 130 ; a temperature-controlled gas purge interface 140 ; and a bypass channel 150 .

[0023] Temperature control device 200.

[0024] A first sleeve 210 ; a second sleeve 220 ; a first temperature-controlled gas inlet pipe 230 ; a temperature-controlled gas transmission pipe 240 ; a temperature-controlled gas outlet pipe 250 ; and a negative pressure detection pipe 260 .

[0025] L-shaped detection pipe 261; third sleeve 262; second temperature-controlled gas inlet pipe 263.

[0026] Long pipe 2611; short pipe 2612. DETAILED DESCRIPTION

[0027] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concepts of the example embodiments to those skilled in the art. Like reference numerals in the drawings represent like or similar parts, and thus repetitive description thereof will be omitted.

[0028] The described features, structures or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, many specific details are provided to provide a full understanding of the embodiments of the present disclosure. However, those skilled in the art will appreciate that the technical solutions of the present disclosure may be practiced without one or more of these specific details, or other methods, components, materials, devices, etc. may be employed. In these cases, well-known structures, methods, devices, implementations, materials or operations will not be shown or described in detail.

[0029] Furthermore, the terms "include," "comprise," and "have," and any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or apparatus comprising a series of steps or elements is not limited to the listed steps or elements, but may optionally include steps or elements not listed, or may optionally include other steps or elements inherent to the process, method, product, or apparatus.

[0030] The terms "first", "second" and the like in the specification, claims and drawings of this application are used to distinguish different objects rather than to describe a specific order.

[0031] The following is a clear and complete description of the technical solution of this application in conjunction with the drawings in the embodiments of this application. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making any creative efforts are within the scope of protection of this application.

[0032] According to one aspect of the present application, a temperature control device for an exhaust gas intake pipe is provided. Figure 1 The exhaust gas intake pipe 100 includes a first exhaust gas intake pipe 110 , a valve body 120 and a second exhaust gas intake pipe 130 .

[0033] One end of the first exhaust gas intake pipe 110 receives untreated exhaust gas from an external exhaust pipe. A first end of a valve body 120 is fixedly connected to the other end of the first exhaust gas intake pipe 110. One end of a second exhaust gas intake pipe 130 is fixedly connected to the second end of the valve body 120. The other end of the second exhaust gas intake pipe 130 can be connected to the reaction chamber of the exhaust gas treatment device. Valve body 120 controls the flow of untreated exhaust gas from the first exhaust gas intake pipe 110 to the second exhaust gas intake pipe 130.

[0034] The first end of the valve body 120 may be an air inlet of the valve body 120 , and the second end of the valve body 120 may be an air outlet of the valve body 120 .

[0035] See also Figure 1 and Figure 2 The temperature control device 200 includes a first sleeve 210 , a second sleeve 220 , a first temperature control gas inlet pipe 230 , a temperature control gas transmission pipe 240 and a temperature control gas outlet pipe 250 .

[0036] According to an exemplary embodiment, the first sleeve 210 is disposed around the outer circumference of the first exhaust gas intake duct 110 , and a first predetermined gap is provided between the first sleeve 210 and the first exhaust gas intake duct 210 .

[0037] For example, the first sleeve 210 may be welded to the outer periphery of the first exhaust gas intake pipe 110 via a KF40 flange. The first preset gap may be the gap between the inner wall of the first sleeve 210 and the outer wall 220 of the first exhaust gas intake pipe.

[0038] According to an exemplary embodiment, the second sleeve 220 is disposed around the outer circumference of the second exhaust gas intake duct 130 , and a second predetermined gap is provided between the second sleeve 220 and the second exhaust gas intake duct 130 .

[0039] For example, the second sleeve 220 may be welded to the outer periphery of the second exhaust gas intake duct 130 via a KF40 flange. The second preset gap may be the gap between the inner wall of the second sleeve 220 and the outer wall of the second exhaust gas intake duct 130.

[0040] The first temperature-control gas inlet pipe 230 is connected to one end of the first sleeve 210 and provides temperature-control gas to the first preset gap to control the temperature of the first sleeve 210. The temperature-control gas can be a gas with a fixed temperature, high temperature gas, or low temperature gas.

[0041] For example, the temperature-controlled gas can be a high-temperature gas (for example, a gas with a temperature of 180°C-300°C), and the high-temperature gas can flow into the first preset gap through the first temperature-controlled gas intake pipe 230, so that the temperature at the first sleeve 210 is in a higher range, thereby reducing the dust particles in the exhaust gas to be treated from solidifying in the first exhaust gas intake pipe 110.

[0042] For another example, the temperature-controlled gas may be a low-temperature gas, which may flow into the first preset gap through the first temperature-controlled gas inlet pipe 230 to keep the temperature of the first sleeve 210 in a lower range.

[0043] According to an exemplary embodiment, one end of the temperature control gas transmission pipe 240 communicates with the other end of the first sleeve 210 , and the other end of the temperature control gas transmission pipe 240 communicates with one end of the second sleeve 220 to provide temperature control gas to the second preset gap.

[0044] After the temperature-control gas flows into the first preset gap, it flows into the temperature-control gas transmission pipe 240 . Thereafter, the temperature-control gas flows into the first preset gap to control the temperature at the second sleeve 220 .

[0045] For example, the temperature-controlled gas can be a high-temperature gas, which can flow into the second preset gap through the temperature-controlled gas transmission pipe 240, so that the temperature at the second sleeve 220 is in a higher range, thereby reducing the dust particles in the exhaust gas to be treated from solidifying in the second exhaust gas intake pipe 130.

[0046] According to an exemplary embodiment, the temperature-controlled gas outlet pipe 250 is in communication with the other end of the second sleeve 220 to discharge the temperature-controlled gas.

[0047] For example, the temperature-control gas may be high-temperature gas, and the high-temperature gas may flow out of the temperature-control device 200 through the temperature-control gas outlet pipe 250 .

[0048] Exemplarily, the first temperature-controlled gas inlet pipe 230 , the temperature-controlled gas transmission pipe 240 , and the temperature-controlled gas outlet pipe 250 may all be 1 / 4 stainless steel pipes.

[0049] Through the above embodiments, the present application sets a first sleeve outside the first exhaust gas intake pipe so that the temperature-controlled gas can flow into the first preset gap. The present application sets a second sleeve outside the second exhaust gas intake pipe so that the temperature-controlled gas can flow into the second preset gap.

[0050] The temperature control device of the present application can maintain a relatively high temperature in the first and second exhaust gas intake ducts by using temperature-controlled gas, thereby preventing dust particles and the like in the treated exhaust gas from solidifying in the first and second exhaust gas intake ducts. This application can reduce the frequency of manual cleaning of the exhaust gas intake ducts, thereby increasing the normal operating time of the exhaust gas treatment device and improving the operating efficiency of the exhaust gas treatment device.

[0051] Alternatively, see Figure 1 and Figure 3 The temperature control device 200 also includes a negative pressure detection pipe 260.

[0052] According to an exemplary embodiment, the negative pressure detection pipe 260 is disposed on one side of the first exhaust gas intake pipe 110 . The negative pressure detection pipe 260 includes an L-shaped detection pipe 261 , a third sleeve 262 , and a second temperature-controlled gas intake pipe 263 .

[0053] See also Figure 1 and Figure 3 The L-shaped detection pipe 261 includes a long pipe 2611 and a short pipe 2612. One end of the long pipe 2611 is arranged in the pipe of the first exhaust gas intake pipe 110, and the other end of the long pipe 2611 is connected to the external air pressure detection device.

[0054] The short pipe 2612 is arranged in the first exhaust gas intake pipe 110, one end of the short pipe 2612 is connected to one end of the long pipe 2611, and the other end of the short pipe 2612 is in contact with the exhaust gas to be treated.

[0055] The waste gas to be treated can flow into the short pipe 2612 through the other end of the short pipe 2612, and then into the long pipe 2611, and then into the external air pressure detection device. The external air pressure detection device (for example, a negative pressure sensor) can detect the air pressure data in the first waste gas intake pipe 110.

[0056] For example, the long pipe 2611 can be arranged perpendicular to the first exhaust gas intake pipe 110, and the short pipe 2612 can be arranged parallel to the first exhaust gas intake pipe 110. The short pipe 2612 is arranged parallel to the first exhaust gas intake pipe 110 so that the short pipe 2612 and the airflow direction of the exhaust gas to be treated are horizontal, thereby reducing the dust particles in the exhaust gas to be treated from being sucked into the negative pressure detection pipe 260 and causing blockage of the external air pressure detection device.

[0057] The third sleeve 262 is disposed around the outer circumference of the long pipe 2611, and a third preset gap is provided between the third sleeve 262 and the long pipe 2611. The third preset gap can be the gap between the inner wall of the third sleeve 262 and the outer wall of the long pipe 2611.

[0058] The second temperature-control gas inlet pipe 263 is in communication with one side of the third sleeve 262 to provide temperature-control gas to the third preset gap.

[0059] For example, the temperature-controlled gas can be high-temperature gas, which flows into the third preset gap through the second temperature-controlled gas inlet pipe 263. Subsequently, the high-temperature gas can flow into the first exhaust gas inlet pipe 110. The high-temperature gas can control the temperature of the L-shaped detection pipe 261, thereby reducing the dust particles in the exhaust gas to be treated from solidifying in the L-shaped detection pipe 261.

[0060] Through the above-mentioned embodiments, the temperature control device of the present application can use temperature-controlled gas to make the temperature of the negative pressure detection pipe at a relatively high temperature, thereby avoiding the dust particles in the processed exhaust gas from solidifying in the negative pressure detection pipe, thereby reducing the frequency of manual cleaning of the exhaust gas intake pipe.

[0061] Optionally, the other end of the short pipe 2612 is a slope with a preset angle, which can increase the contact area between the short pipe and the waste gas to be treated. The preset angle range is 30° to 45°.

[0062] Exemplarily, the preset angle may be 45°.

[0063] Briefly describe the technical effect

[0064] Optionally, the temperature-controlled gas is nitrogen or dry air with a preset temperature. For example, the temperature-controlled gas may be high-temperature gas, which may be high-temperature nitrogen or high-temperature dry air. The temperature of the high-temperature gas may be between 180°C and 300°C.

[0065] While controlling the temperature, nitrogen or dry air can avoid chemical reactions with the waste gas to be treated due to their stable chemical properties, and the cost is low.

[0066] Optionally, the first preset gap, the second preset gap, and the third preset gap are all in the range of 1 mm to 5 mm.

[0067] Exemplarily, the first preset gap, the second preset gap, and the third preset gap are all 2 mm.

[0068] According to one aspect of the present application, an exhaust gas treatment device is provided, which includes the temperature control device 200 as described above.

[0069] Alternatively, see Figure 1 The exhaust gas treatment device further includes a reaction chamber (not shown in the figure) and a temperature-controlled gas purge interface 140.

[0070] According to an exemplary embodiment, one end of the reaction chamber is connected to the other end of the second exhaust gas inlet pipe 130. The reaction chamber can be connected to the second exhaust gas inlet pipe 130 via a stainless steel sleeve. After the waste gas to be treated flows into the second exhaust gas inlet pipe 130, it flows into the reaction chamber for treatment. The other end of the reaction chamber can be connected to an exhaust gas post-treatment device (such as a cleaning device and a filtering device).

[0071] One end of the temperature-controlled gas purge interface 140 is connected to the reaction chamber, and the other end of the temperature-controlled gas purge interface 140 is connected to the temperature-controlled gas outlet pipe 250 (not shown in the figure), so that after the temperature-controlled gas flows out from the temperature-controlled gas outlet pipe 250, the temperature-controlled gas flows into the reaction chamber through the temperature-controlled gas purge interface 140, thereby recovering the temperature-controlled gas.

[0072] For example, the temperature-controlled gas purge interface 140 may be a nitrogen purge interface or a dry air purge interface.

[0073] Alternatively, see Figure 1 , the exhaust gas treatment device also includes a bypass channel 150.

[0074] According to an exemplary embodiment, one end of the bypass channel 150 is fixedly connected to the third end of the valve body 120 , and the other end of the bypass channel 150 is communicated with an external exhaust gas recovery pipeline, so that the valve body 120 controls the exhaust gas to be treated to flow into the bypass channel 150 .

[0075] For example, when the exhaust gas treatment device is not working properly (for example, the device is shut down for cleaning), the valve body 120 can control the exhaust gas to be treated to flow into the external exhaust gas recovery pipeline through the bypass channel 150 .

[0076] Optionally, the exhaust gas treatment device is used in the field of semiconductor manufacturing.

[0077] Finally, it should be noted that the above description is merely a preferred embodiment of the present application and is not intended to limit the present application. Although the present application is described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions of the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. A temperature control device for an exhaust gas intake pipe, the exhaust gas intake pipe comprising: a first exhaust gas inlet pipe, one end of which receives the exhaust gas to be treated from the external exhaust gas pipe; a valve body, a first end of which is fixedly connected to the other end of the first exhaust gas inlet pipe; a second exhaust gas inlet pipe, one end of which is fixedly connected to the second end of the valve body; Characterized in that, the temperature control device comprises: a first sleeve, disposed around an outer circumference of the first exhaust gas intake pipe, with a first preset gap being provided between the first exhaust gas intake pipe and the first sleeve; a second sleeve, disposed around an outer circumference of the second exhaust gas intake pipe, with a second preset gap being provided between the second exhaust gas intake pipe and the second sleeve; a first temperature-controlled gas inlet pipe, connected to one end of the first sleeve, and providing temperature-controlled gas to the first preset gap; a temperature-controlled gas transmission pipeline, one end of which is connected to the other end of the first sleeve and the other end of which is connected to one end of the second sleeve, for supplying temperature-controlled gas to the second preset gap; The temperature-controlled gas outlet pipe is connected to the other end of the second sleeve to output the temperature-controlled gas.

2. The temperature control device according to claim 1, characterized in that: The temperature control device also includes: The negative pressure detection pipe is provided on one side of the first exhaust gas intake pipe and includes: L-shaped detection pipe, including: a long pipe, one end of which is disposed in the first exhaust gas intake pipe, and the other end of which is connected to an external air pressure detection device; a short pipe, arranged in the first exhaust gas inlet pipe, one end of the short pipe being connected to one end of the long pipe, and the other end being in contact with the exhaust gas to be treated; a third sleeve, arranged around the outer circumference of the long pipe, with a third preset gap set between the sleeve and the long pipe; The second temperature-controlled gas inlet pipe is communicated with one side of the third sleeve and provides the temperature-controlled gas to the third preset gap.

3. The temperature control device according to claim 2, characterized in that: The other end of the short pipe is an inclined surface with a preset angle, and the preset angle ranges from 30° to 45°.

4. The temperature control device according to claim 1, characterized in that: The temperature-controlled gas is nitrogen or dry air with a preset temperature.

5. The temperature control device according to claim 1, characterized in that: The first preset gap and the second preset gap are both in the range of 1 mm to 5 mm.

6. An exhaust gas treatment device, characterized in that: The exhaust gas treatment device includes the temperature control device as described in any one of claims 1-5.

7. The exhaust gas treatment device according to claim 6, characterized in that: The exhaust gas treatment device further comprises: a reaction chamber, one end of which is in communication with the other end of the second exhaust gas inlet pipe; A temperature-controlled gas purge interface is connected to the reaction chamber at one end and to the temperature-controlled gas outlet pipe at the other end, so that after the temperature-controlled gas flows out of the temperature-controlled gas outlet pipe, the temperature-controlled gas flows into the reaction chamber through the temperature-controlled gas purge interface.

8. The exhaust gas treatment device according to claim 6, characterized in that: The exhaust gas treatment device further comprises: The bypass channel has one end fixedly connected to the third end of the valve body and the other end communicated with the external exhaust gas recovery pipeline, so that the valve body controls the exhaust gas to be treated to flow into the bypass channel.

9. The exhaust gas treatment device according to claim 6, characterized in that: The exhaust gas treatment device is applied in the field of semiconductor manufacturing process.

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