Method and system for monitoring the operation of a plasma exhaust treatment apparatus

Abstract

The application relates to the technical field of waste gas treatment, in particular to a working operation monitoring method and system of a plasma waste gas treatment equipment, which comprises the following steps: determining a gas stability value of an air inlet stage by analyzing the similarity of the contents of all kinds of gases between any adjacent moments in the air inlet stage; determining the matching degree of each moment in an ignition stage by analyzing the change trend of all temperature data of each temperature sensor within a preset time length before each moment in the ignition stage after the air inlet stage and the similarity of the temperature data of all temperature sensors between different directions, and combining the gas stability value, so as to monitor the running state of a plasma torch. The application solves the problems of hysteresis and inaccuracy of traditional operation monitoring, optimizes the parameters of the plasma waste gas treatment equipment, and improves the effect and precision of waste gas treatment.

Description

Technical Field

[0001] This application relates to the field of waste gas treatment technology, specifically to a method and system for monitoring the operation of a plasma waste gas treatment device. Background Technology

[0002] With the continuous development of industrial production, a large amount of waste gas is generated during manufacturing activities. If this waste gas is discharged directly without treatment, it will cause significant environmental pollution. Therefore, a waste gas treatment technology is needed. Among these technologies, plasma water washing waste gas treatment technology, as a highly efficient waste gas treatment method, is widely used in the current industrial field. This technology combines the advantages of plasma treatment and water washing treatment, and can effectively treat a variety of complex waste gases.

[0003] The plasma-washing waste gas treatment process mainly includes two stages: the plasma combustion reaction stage and the water washing stage. Current research on plasma waste gas treatment primarily focuses on the influencing factors of catalysts and plasma treatment in terms of treatment effectiveness, but it does not consider the impact of the accuracy and timeliness of monitoring the operational status of the waste gas treatment equipment on the treatment effect. Summary of the Invention

[0004] To address the aforementioned technical problems, the purpose of this application is to provide a method and system for monitoring the operation of a plasma exhaust gas treatment device. The specific technical solution adopted is as follows:

[0005] In a first aspect, embodiments of this application provide a method for monitoring the operation of a plasma exhaust gas treatment device, the method comprising the following steps:

[0006] The temperature data of each temperature sensor at different positions in the plasma chamber during the current plasma exhaust gas treatment process is acquired in real time, and the content of various gases in the exhaust gas during the intake stage is acquired synchronously using a gas sensor.

[0007] By analyzing the similarity of the content of all gases between any adjacent moments during the intake phase, the gas stability value during the intake phase is determined.

[0008] By analyzing the changing trends of all temperature data from each temperature sensor within a preset time period before each moment in the ignition phase after the intake phase, the first temperature characteristic value at each moment in the ignition phase is determined; by analyzing the similarity of temperature data from all temperature sensors at different locations at each moment in the ignition phase, the second temperature characteristic value at each moment in the ignition phase is determined; and by combining the first temperature characteristic value, the stable temperature value at each moment in the ignition phase is determined; based on the stable temperature value and the stable gas value, the matching degree at each moment in the ignition phase is determined.

[0009] Based on the matching degree, a judgment threshold is determined to monitor the current operating status of the plasma torch.

[0010] Preferably, the various gases in the exhaust gas during the intake stage include perfluorocarbon gas and hydrides.

[0011] Preferably, the gas stability value during the intake phase is the sum of the similarities in gas content between all adjacent moments in the intake phase.

[0012] Preferably, the method for determining the first temperature characteristic value at each moment during the ignition phase is as follows:

[0013] All temperature data from each temperature sensor within a preset time period before each moment in the ignition phase are fitted to obtain a temperature fitting line for each temperature sensor. The average slope of the temperature fitting lines of all temperature sensors is taken as the first temperature characteristic value at each moment in the ignition phase.

[0014] Preferably, the method for determining the second temperature characteristic value at each moment during the ignition phase is as follows:

[0015] Calculate the similarity of temperature data from all temperature sensors between any two locations at any time during the ignition phase, and take the average of the similarity of the temperature data between all locations as the second temperature feature value at each time during the ignition phase.

[0016] Preferably, the temperature stability value at each moment during the ignition phase is the result of a positive fusion of the first temperature characteristic value and the second temperature characteristic value at each moment during the ignition phase.

[0017] Preferably, the matching degree at each moment in the ignition stage is the normalized result of the ratio of the stable temperature value to the stable gas value at each moment in the ignition stage.

[0018] Preferably, the method for determining the judgment threshold is as follows:

[0019] The temperature data of each temperature sensor at different positions in the plasma chamber at all sampling times during the previous plasma exhaust gas treatment process are obtained, as well as the content of various gases in the exhaust gas during the air intake stage. According to the matching degree calculation method, the matching degree of each sampling time during the ignition stage of the previous plasma exhaust gas treatment process is calculated, and the maximum value of the matching degree of all sampling times is used as the judgment threshold.

[0020] Preferably, the monitoring of the operating status of the plasma torch includes:

[0021] In the current plasma exhaust gas treatment process, if the matching degree is greater than the judgment threshold for a consecutive preset number of time points during the ignition stage, the plasma torch is in an abnormal operating state; otherwise, the plasma torch is in a normal operating state.

[0022] Secondly, embodiments of this application also provide a working operation monitoring system for a plasma exhaust gas treatment device, including a memory, a processor, and a computer program stored in the memory and running on the processor. When the processor executes the computer program, it implements the steps of any one of the above-described methods for monitoring the working operation of a plasma exhaust gas treatment device.

[0023] This application has at least the following beneficial effects:

[0024] This application constructs a gas stability value by analyzing the similarity of the content of all gases between any adjacent moments during the intake phase. This helps to more accurately assess the fluctuation of the content of harmful gases in the exhaust gas during the intake phase, which is beneficial for the precise adjustment of the plasma torch output power. Furthermore, by analyzing the changing trends of all temperature data from each temperature sensor within a preset time period before each moment in the ignition phase after the intake phase, a first temperature characteristic value is constructed. This helps to more accurately assess the stability of the plasma torch output power and facilitates the timely detection of abnormalities within the plasma chamber. Furthermore, by evaluating the temperature distribution at different locations within the plasma chamber... Uniformity was assessed, and a second temperature characteristic value was constructed to help identify potential local overheating or insufficient cooling within the plasma chamber, thereby guiding more precise adjustments to the plasma torch's output power. Furthermore, by integrating gas stability values, the first temperature characteristic value, and the second temperature characteristic value, a matching degree was constructed to determine the degree of matching between the plasma torch's output power and the hazardous gases in the exhaust gas. This timely reflection of the plasma exhaust gas treatment equipment's operating status solves the problem of lag in traditional operation monitoring, improves the accuracy of operation monitoring, and helps optimize the parameters of the plasma exhaust gas treatment equipment, thereby improving the effectiveness and precision of exhaust gas treatment. Attached Figure Description

[0025] To more clearly illustrate the technical solutions and advantages in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 A flowchart illustrating the steps of a method for monitoring the operation of a plasma exhaust gas treatment device, as provided in one embodiment of this application;

[0027] Figure 2 This is a schematic diagram of the matching degree extraction process provided in one embodiment of this application. Detailed Implementation

[0028] To further illustrate the technical means and effects adopted by this application to achieve the intended purpose of the invention, the following, in conjunction with the accompanying drawings and preferred embodiments, details the specific implementation, structure, features, and effects of a plasma exhaust gas treatment equipment monitoring method and system proposed in this application. In the following description, different "one embodiment" or "another embodiment" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0030] The following description, in conjunction with the accompanying drawings, details the specific scheme of the operation monitoring method and system for a plasma waste gas treatment device provided in this application.

[0031] Please see Figure 1 The diagram illustrates a flowchart of a method for monitoring the operation of a plasma exhaust gas treatment device according to an embodiment of this application. The method includes the following steps:

[0032] Step S1: In real time, acquire the temperature data of each temperature sensor at different positions in the plasma chamber during the current plasma exhaust gas treatment process, and use a gas sensor to synchronously acquire the content of various gases in the exhaust gas during the intake stage.

[0033] During equipment operation, the collected industrial waste gas is connected to the equipment's air inlet through a pipeline, ensuring a tight connection to prevent leaks. The waste gas enters the intake manifold through the air inlet and intake pipeline. The intake manifold collects all the waste gas from the intake ports and connects it to the plasma chamber. All intake pipelines are at a fixed angle to the main intake manifold, typically between 30° and 60° to facilitate gas flow.

[0034] As exhaust gas continuously enters the plasma chamber, once the chamber reaches its fixed capacity, the valve between the plasma chamber and the intake pipe closes, and the plasma ignition stage begins.

[0035] Furthermore, the plasma chamber described in this embodiment is made of high-temperature resistant stainless steel 310, with multiple layers of Bohr rings placed inside. The plasma torch inside is powered by a plasma power supply and is made of a characteristic alloy material that can withstand high temperatures and aging. The average length of the plasma flame produced is 30cm.

[0036] Furthermore, for the intake stage, a gas sensor is deployed in the intake manifold to detect the content of various gases in the exhaust gas in real time, thereby obtaining the fluctuation of the exhaust gas in the plasma chamber. In this embodiment, the various gases include: PFC, GAS, perfluorocarbon gas and hydrides. In addition, the data acquisition frequency of the gas sensor in this embodiment is 0.5Hz. The implementer can also set it according to the specific situation. This embodiment does not impose any special restrictions.

[0037] High-temperature resistant temperature sensors are deployed on the surface of a cylindrical Bohr ring inside the plasma chamber. N temperature sensors are deployed from top to bottom in four directions, with a 90° difference between the four directions. The temperature data of each temperature sensor at different directions in the plasma chamber is collected in real time during the current plasma exhaust gas treatment process. In this embodiment, there are 12 temperature sensors, with 3 installed in each direction. The implementer can also set the number of temperature sensors according to the specific situation. This embodiment does not impose any special restrictions. The temperature data acquisition frequency is set to 2Hz in this embodiment. The implementer can also set it according to the specific situation. This embodiment does not impose any special restrictions.

[0038] Step S2: Determine the gas stability value during the intake phase by analyzing the similarity of the content of all gases between any adjacent moments within the intake phase.

[0039] In traditional plasma torch output power control within a plasma chamber, the concentration of hazardous gases in the exhaust gas is relied upon. However, it is usually assumed that the concentration of hazardous gases in the exhaust gas remains relatively constant. Only the concentration at a single or a few moments during the intake phase is measured, and the concentration data of hazardous gases in the plasma chamber is estimated by averaging. However, in actual applications, this assumption is often constrained by production conditions, which can cause significant fluctuations in the content of hazardous gases in the exhaust gas within a short period of time. Moreover, these fluctuations are not simply an overall increase or decrease in the concentration gradient of hazardous gases in the exhaust gas, but rather individual changes in the content of each hazardous gas. Therefore, the characteristics of hazardous gases in the exhaust gas are constantly changing, which will further affect the adjustment of the plasma torch output power.

[0040] Since this embodiment mainly focuses on the operation monitoring of the ignition and combustion stage, the intake stage must have ended when the ignition stage occurs. Therefore, it is possible to obtain complete gas content data of the intake stage.

[0041] Therefore, based on the above analysis, the gas stability value of the intake stage is determined by analyzing the similarity of the content of all gases between any adjacent time points within the gas stage, specifically as follows:

[0042] Calculate the similarity of the content of all gases between any adjacent moments in the intake phase. The sum of the similarities of the gas contents between any adjacent moments in the intake phase is taken as the gas stability value of the intake phase. The greater the similarity of the content of all gases between adjacent moments, the more stable the content of harmful gases in the exhaust gas is. In this case, the output power of the plasma torch may be more in line with the actual situation during the ignition phase. Conversely, the smaller the similarity of the content of all gases between adjacent moments, the more drastic the fluctuation of the gas content in the exhaust gas is.

[0043] It should be noted that there are many methods to measure the similarity between data groups. In this embodiment, the cosine similarity of the content of all kinds of gases between any adjacent time points in the intake stage is used as the similarity of the content of all kinds of gases between any adjacent time points in the intake stage. In practical applications, as other implementation methods, implementers may also use other methods to measure the similarity between data groups, such as the reciprocal of Euclidean distance, depending on the specific circumstances. This embodiment does not impose any special restrictions on the selection of methods to measure the similarity between data groups.

[0044] The method for calculating cosine similarity is a well-known technique, and its specific calculation process will not be elaborated here.

[0045] It should be noted that, in this embodiment, all methods involving the calculation of similarity between data groups use cosine similarity.

[0046] Thus, by analyzing the changing trend of gas content during the intake phase, the stable gas value during the intake phase was obtained.

[0047] Step S3: By analyzing the changing trends of all temperature data from each temperature sensor within a preset time period before each moment in the ignition phase after the intake phase, determine the first temperature characteristic value at each moment in the ignition phase; by analyzing the similarity of temperature data from all temperature sensors at different locations at each moment in the ignition phase, determine the second temperature characteristic value at each moment in the ignition phase; and by combining the first temperature characteristic value, determine the stable temperature value at each moment in the ignition phase; based on the stable temperature value and the stable gas value, determine the matching degree at each moment in the ignition phase.

[0048] Based on the analysis in step S2 of the fluctuations in the content of hazardous gases in the exhaust gas throughout the entire intake stage, the stable gas value during the intake stage is obtained. In the actual ignition stage, a plasma torch is driven by a plasma power source to form a high-voltage electric field, thereby generating a high-energy, highly oxidizing, and highly reactive plasma. Plasma represents the fourth state of matter, and it transforms the highly hazardous exhaust gas into an intermediate state for absorption and treatment.

[0049] Since the equipment is in its initial startup state during the initial preheating process of the ignition phase, no data analysis is performed. The preheating process typically lasts 8–10 seconds. Therefore, in the optimized implementation process, data within the initial 10 seconds is not analyzed. During the initial adjustment process, the average concentration of hazardous gases in the exhaust gas at all sampling times during the intake phase is used as the control concentration value for the ignition phase. The equipment can adjust the output power of the plasma torch based on the prior relationship between concentration and output power. However, in actual processes, the content of hazardous organic gases in the exhaust gas is dynamically changing. Therefore, the gas characteristics exhibited in the plasma chamber are diverse, resulting in differences in the spatial distribution and plasma decomposition state of different hazardous gases within the plasma chamber. When the output power of the plasma torch does not match the gas characteristics of the hazardous gases in the exhaust gas within the plasma chamber, side reactions or poor treatment effects are likely to occur.

[0050] In the priori control relationship, the higher the concentration of gases in the exhaust gas, the greater the output power of the plasma torch. This leads to increased side reactions within the plasma chamber. Taking CF4 in PFC GAS as an example, a higher output power from the plasma torch generates more plasma, releasing more heat and easily producing more complex side reactions, such as potentially generating more difficult-to-decompose fluorocarbons, further exacerbating the difficulty of exhaust gas treatment.

[0051] At the same time, there are also differences in the properties of the gases. For example, when the chemical bonds between fluorine-containing gases are relatively stable, such as the CF and NF bonds with high bond energies, a large amount of energy is required to break the chemical bonds in order to achieve the purpose of waste gas treatment. However, for hydride gases, such as SiH4, the molecular bonds are highly reactive and are easily affected by plasma, releasing more heat.

[0052] In summary, considering the influence of the characteristics and matching relationship of the exhaust gas in the plasma ignition chamber, the gas diffusion process is affected by intermolecular forces and thermal motion. Gases with similar molecular structures are more likely to agglomerate together. Therefore, during the ignition stage, the data in the plasma chamber show that the temperature deviation is greater in different spatial distributions.

[0053] Ideally, when the output power of the plasma torch is well matched to the content of harmful gases in the exhaust gas, the overall temperature rise rate and fluctuations are relatively stable. Simultaneously, the overall temperature at the plasma outlet of the plasma torch exhibits a regular, gradual change. Conversely, if the power matching is poor, the characteristics of the exhaust gas will disrupt the temperature distribution.

[0054] Therefore, based on the above, by analyzing the changing trends of all temperature data from each temperature sensor within a preset time period before each moment in the ignition phase after the intake phase, the first temperature characteristic value at each moment in the ignition phase is determined; by analyzing the similarity of temperature data from all temperature sensors at different locations at each moment in the ignition phase, the second temperature characteristic value at each moment in the ignition phase is determined; and combined with the first temperature characteristic value, the stable temperature value at each moment in the ignition phase is determined; based on the stable temperature value and the stable gas value, the matching degree at each moment in the ignition phase is determined. The specific process is as follows:

[0055] (1) Analyze the changing trends of all temperature data from each temperature sensor within a preset time period before each moment in the ignition phase after the intake phase, and determine the first temperature characteristic value at each moment in the ignition phase, specifically:

[0056] All temperature data from each temperature sensor within a preset time period before each moment in the ignition phase are fitted to obtain a temperature fitting line for each temperature sensor. The average slope of the temperature fitting lines of all temperature sensors is taken as the first temperature characteristic value at each moment in the ignition phase.

[0057] Based on the first temperature characteristic value at each moment during the ignition phase, it can be understood that the first temperature characteristic value reflects the stability of the temperature change over time measured by all temperature sensors in the plasma chamber at each moment. If the first temperature characteristic value is larger, it indicates that the temperature change over time is more stable, which means that the output power of the plasma torch is well matched with the harmful gases in the exhaust gas, the plasma generation and reaction process is relatively stable, and there are fewer side reactions. Conversely, if the first temperature characteristic value is smaller, it indicates that the temperature fluctuates more over time, which may indicate that the output power of the plasma torch is poorly matched with the harmful gases in the exhaust gas, the plasma generation and reaction process may be disturbed, there are more side reactions, and the treatment effect may be poor.

[0058] It should be noted that there are many commonly used fitting methods. In this embodiment, the least squares fitting method is used to fit the temperature data. In practical applications, as other implementation methods, implementers may also use other fitting methods such as the polynomial function fitting method according to the specific situation. This embodiment does not impose any special restrictions on the selection of fitting methods.

[0059] The least squares fitting method is a well-known technique, and its specific principles will not be elaborated here.

[0060] (2) Further, by analyzing the similarity of temperature data from all temperature sensors at different locations at different times during the ignition phase, the second temperature characteristic value at each time point during the ignition phase is determined, specifically:

[0061] Calculate the similarity of temperature data from all temperature sensors between any two locations at any time during the ignition phase, and take the average of the similarity of the temperature data between all locations as the second temperature feature value at each time during the ignition phase.

[0062] The similarity of the temperature data is the cosine similarity of the temperature data.

[0063] Based on the second temperature characteristic values ​​at each moment during the ignition phase, it can be understood that the second temperature characteristic value reflects the consistency of the temperature distribution trend of the plasma cavity in all directions at each moment. The greater the similarity of the temperature data, the larger the second temperature characteristic value, indicating that the plasma generated by the plasma torch is spatially uniformly distributed, has a good treatment effect on the exhaust gas, and the output power of the plasma torch is well matched with the spatial distribution characteristics of the exhaust gas. Conversely, if the similarity of the temperature data is smaller, the second temperature characteristic value is smaller, indicating that the temperature trend in the four directions is inconsistent. This may mean that the plasma generated by the plasma torch is spatially unevenly distributed, the treatment effect on the exhaust gas may be uneven, and the output power of the plasma torch is poorly matched with the spatial distribution characteristics of the exhaust gas.

[0064] (3) Further, based on the second temperature characteristic value and the first temperature characteristic value at each moment during the ignition stage, the stable temperature value at each moment during the ignition stage is determined, and combined with the gas stability value, the matching degree at each moment during the ignition stage is determined, specifically as follows:

[0065] The stable temperature value at each moment is the result of the positive fusion of the first and second temperature characteristic values ​​at each moment during the ignition phase.

[0066] It should be understood that positive fusion refers to combining two or more indicators through addition or multiplication to obtain a comprehensive indicator, thereby more comprehensively and accurately assessing a phenomenon or problem. This fusion method is not limited to simple arithmetic operations, but can also include more complex statistical models and analytical methods. Implementers can choose according to specific circumstances, and this embodiment does not impose any special restrictions.

[0067] Preferably, in this embodiment, the temperature stability value at each moment during the ignition phase is the sum of the first temperature characteristic value and the second temperature characteristic value at each moment during the ignition phase.

[0068] Furthermore, the normalized result of the ratio of the stable temperature value to the stable gas value at each moment during the ignition stage is used as the matching degree at each moment during the ignition stage.

[0069] Based on the gas characteristics and distribution causes of hazardous gases in the exhaust gas within the plasma chamber, as well as the response under power mismatch, and combined with the distribution characteristics of data in the actual process, the power matching degree of the plasma torch at a single sampling moment can be obtained. If the overall hazardous gas content in the exhaust gas does not change significantly and is relatively stable, the power matching of the prior fitting relationship is good, resulting in a larger power matching degree value. However, when the exhaust gas concentration fluctuates significantly, the power matching degree value is smaller due to the influence of the gas characteristics in the exhaust gas.

[0070] Preferably, the matching degree extraction process provided in this embodiment is illustrated in the following diagram: Figure 2 As shown.

[0071] Thus, by analyzing the changing trends of all temperature data from each temperature sensor within a preset time period before each moment in the ignition phase after the intake phase, and by analyzing the similarity of temperature data from all temperature sensors at different locations at each moment in the ignition phase, and combining this with the gas stability value, the matching degree at each moment in the ignition phase was obtained.

[0072] Step S4: Based on the matching degree, determine the judgment threshold to monitor the current operating status of the plasma torch.

[0073] The temperature data of each temperature sensor at different positions in the plasma chamber at all sampling times during the previous plasma exhaust gas treatment process are obtained, as well as the content of various gases in the exhaust gas during the air intake stage. According to the matching degree calculation method, the matching degree of each sampling time during the ignition stage of the previous plasma exhaust gas treatment process is calculated, and the maximum value of the matching degree of all sampling times is used as the judgment threshold.

[0074] In the current plasma exhaust gas treatment process, if the matching degree is greater than the judgment threshold for a consecutive preset number of time points during the ignition stage, the plasma torch is in an abnormal operating state. The analysis results will be presented to the technicians to provide theoretical data support for the technicians to adjust the equipment; otherwise, the plasma torch is in a normal operating state.

[0075] It should be noted that the preset quantity is set manually. In this embodiment, the preset quantity is 5. The implementer can also set it according to the specific situation. This embodiment does not impose any special restrictions.

[0076] Therefore, compared to the traditional passive method of judging the working status of equipment based on the concentration of hazardous gases after exhaust gas treatment, this embodiment analyzes the situation of the plasma reaction stage in the treatment process of plasma wet exhaust gas treatment equipment. By analyzing the gas fluctuation during the intake process and the characteristics of hazardous gases in the exhaust gas during the ignition stage, the matching degree between the output power of the plasma torch and the hazardous gases in the exhaust gas in the plasma chamber is evaluated. This enables the monitoring of the operation of the plasma exhaust gas treatment equipment, solving the problem of the lag in monitoring the operating status of exhaust gas treatment equipment in traditional methods, which leads to poor exhaust gas treatment effect. At the same time, by combining the analysis of the causes and data distribution characteristics, the accuracy of operation monitoring is improved, which helps to optimize the parameters of subsequent exhaust gas treatment equipment and improves the effect and accuracy of exhaust gas treatment.

[0077] Based on the same inventive concept as the above method, this application embodiment also provides a working operation monitoring system for a plasma exhaust gas treatment device, including a memory, a processor, and a computer program stored in the memory and running on the processor. When the processor executes the computer program, it implements the steps of any one of the above-described methods for monitoring the working operation of a plasma exhaust gas treatment device.

[0078] It should be noted that the order of the embodiments described above is merely for descriptive purposes and does not represent the superiority or inferiority of the embodiments. Furthermore, specific embodiments of this specification have been described above. Additionally, the processes depicted in the accompanying drawings do not necessarily require a specific or sequential order to achieve the desired results. In some implementations, multitasking and parallel processing are possible or may be advantageous.

[0079] The various embodiments in this specification are described in a progressive manner. The same or similar parts between the various embodiments can be referred to each other. Each embodiment focuses on describing the differences from other embodiments.

[0080] The above description is only a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the principles of this application should be included within the protection scope of this application.

Claims

1. A method for monitoring the operation of a plasma waste gas treatment device, characterized in that, The method includes the following steps: The temperature data of each temperature sensor at different positions in the plasma chamber during the current plasma exhaust gas treatment process is acquired in real time, and the content of various gases in the exhaust gas during the intake stage is acquired synchronously using a gas sensor. By analyzing the similarity of the content of all gases between any adjacent moments during the intake phase, the gas stability value during the intake phase is determined. By analyzing the changing trends of all temperature data from each temperature sensor within a preset time period before each moment in the ignition phase after the intake phase, the first temperature characteristic value at each moment in the ignition phase is determined; by analyzing the similarity of temperature data from all temperature sensors at different locations at each moment in the ignition phase, the second temperature characteristic value at each moment in the ignition phase is determined; and by combining the first temperature characteristic value, the stable temperature value at each moment in the ignition phase is determined; based on the stable temperature value and the stable gas value, the matching degree at each moment in the ignition phase is determined. Based on the matching degree, a judgment threshold is determined to monitor the current operating status of the plasma torch; The gas stability value during the intake phase is the sum of the similarities in gas content between all adjacent moments during the intake phase. The temperature stability value at each moment during the ignition phase is the result of the positive fusion of the first temperature characteristic value and the second temperature characteristic value at each moment during the ignition phase. The matching degree at each moment in the ignition stage is the normalized result of the ratio of the stable temperature value to the stable gas value at each moment in the ignition stage.

2. The method for monitoring the operation of a plasma waste gas treatment device as described in claim 1, characterized in that, During the intake phase, the exhaust gas contains various gases, including perfluorocarbons and hydrides.

3. The method for monitoring the operation of a plasma waste gas treatment device as described in claim 1, characterized in that, The method for determining the first temperature characteristic value at each moment during the ignition phase is as follows: All temperature data from each temperature sensor within a preset time period before each moment in the ignition phase are fitted to obtain a temperature fitting line for each temperature sensor. The average slope of the temperature fitting lines of all temperature sensors is taken as the first temperature characteristic value at each moment in the ignition phase.

4. The method for monitoring the operation of a plasma waste gas treatment device as described in claim 1, characterized in that, The method for determining the second temperature characteristic value at each moment during the ignition phase is as follows: Calculate the similarity of temperature data from all temperature sensors between any two locations at any time during the ignition phase, and take the average of the similarity of the temperature data between all locations as the second temperature feature value at each time during the ignition phase.

5. The method for monitoring the operation of a plasma waste gas treatment device as described in claim 1, characterized in that, The method for determining the threshold is as follows: The temperature data of each temperature sensor at different positions in the plasma chamber at all sampling times during the previous plasma exhaust gas treatment process are obtained, as well as the content of various gases in the exhaust gas during the air intake stage. According to the matching degree calculation method, the matching degree of each sampling time during the ignition stage of the previous plasma exhaust gas treatment process is calculated, and the maximum value of the matching degree of all sampling times is used as the judgment threshold.

6. The method for monitoring the operation of a plasma waste gas treatment device as described in claim 1, characterized in that, The monitoring of the plasma torch's operating status includes: In the current plasma exhaust gas treatment process, if the matching degree is greater than the judgment threshold for a consecutive preset number of times during the ignition stage, the plasma torch is in an abnormal operating state; otherwise, the plasma torch is in a normal operating state.

7. A monitoring system for the operation of a plasma exhaust gas treatment device, comprising a memory, a processor, and a computer program stored in the memory and running on the processor, characterized in that, When the processor executes the computer program, it implements the steps of the operation monitoring method for a plasma exhaust gas treatment device as described in any one of claims 1-6.

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