Scorpion poison hair imitating omni-directional sensing micro flow velocity sensor and manufacturing method thereof

Abstract

The invention relates to the technical field of bionic sensors, in particular to a scorpion poison hair imitating omni-directional sensing micro flow velocity sensor and a manufacturing method thereof, the sensor comprises a sensor substrate, a hairy transduction sensing structure, a sensitivity / bandwidth adjusting block and a data acquisition output unit, the free end of the hairy transduction sensing structure is connected to the movable end of the sensitivity / bandwidth adjusting block; the sensor base comprises a substrate, a limiting guide groove and a threading hole are formed in the substrate, and the sensitivity / bandwidth adjusting block is embedded in the limiting guide groove in a sliding manner; the hairy transduction sensing structure comprises a precursor, the tail end of the precursor is integrally connected with a poison hair imitating cantilever beam, a stress concentration area of the precursor is provided with a piezoresistive strain unit, and the piezoresistive strain unit is connected with a data acquisition output unit through a flat cable plug and a wire; the problems that the sensitivity and the bandwidth of an existing bionic cilium sensor are mutually restricted, a self-adaptive adjusting mechanism is lacked, and a large-length-diameter-ratio structure is large in manufacturing difficulty, high in cost and difficult to produce in batches are solved.

Description

Technical Field

[0001] The present invention relates to the technical field of bionic sensors, in particular to an omnidirectional sensing micro-flow velocity sensor imitating scorpion hairs and a manufacturing method thereof. Background Art

[0002] Flow velocity and flow rate are among the most important basic physical quantities in the field of fluid flow. Traditional methods for measuring micro-flow or supersonic fluids require indirect test data combined with simulation calculations, which presents problems such as computational complexity and poor versatility. Inspired by biological sensing structures such as scorpion hairs, ciliary micro-flow sensors significantly improve sensitivity and resolution by mimicking arthropod hairs and fish lateral line organs. These sensors utilize ciliary structures to convert fluid vibrations into mechanical deformations, and then output electrical signals through effects such as piezoresistance and capacitance, providing a new technical path for micro-flow detection.

[0003] However, existing bionic cilia sensors still have significant defects: first, the sensitivity of the sensor is contradictory to the working bandwidth. High sensitivity often comes at the expense of bandwidth, making it difficult to maintain stable performance over a wide range. Therefore, the existing bionic cilia sensor structure lacks a bionic control mechanism for the dynamic morphology of scorpion hairs and cannot achieve adaptive adjustment of sensitivity and bandwidth; second, traditional micromachining processes face challenges in manufacturing cilia structures with large aspect ratios. Whether it is high aspect ratio etching or thick resist photolithography, there are bottlenecks such as complex processes that lead to extremely difficult manufacturing, extremely high material requirements, high costs, and difficulty in mass production.

[0004] Therefore, it is necessary to invent an omnidirectional sensing micro-flow velocity sensor imitating scorpion hair and a manufacturing method to solve the above problems. Summary of the Invention

[0005] In order to solve the problems of existing bionic cilia sensors, such as the mutual restriction between sensitivity and bandwidth, the lack of adaptive adjustment mechanism, and the difficulty in manufacturing large aspect ratio structures, high cost, and difficulty in mass production, the present invention provides an omnidirectional sensing micro-flow velocity sensor imitating scorpion cilia and a manufacturing method.

[0006] The present invention is achieved by adopting the following technical solutions: An omnidirectional micro-flow velocity sensor imitating scorpion hairs comprises a sensor substrate, a hair-like transducer sensing structure, a sensitivity / bandwidth adjustment block, and a data acquisition and output unit. The free end of the hair-like transducer sensing structure is integrally connected to the active end of the sensitivity / bandwidth adjustment block. The sensor base comprises a base plate, the upper surface of which is provided with a limit guide groove and a threading hole, and the sensitivity / bandwidth adjustment block is slidably embedded in the limit guide groove; The hair-like transducer sensing structure includes a precursor, the tail end of which is integrally connected to a cantilever beam imitating a bee hair, a piezoresistive strain unit is provided in the stress concentration area of the precursor, and the piezoresistive strain unit is connected to a data acquisition and output unit via a cable plug and a wire.

[0007] Furthermore, the substrate is circular, with 6 limiting guide grooves, and the 6 limiting guide grooves are evenly distributed in a circular array on the substrate, the angle between the center lines of adjacent limiting guide grooves is 60°, and the number of threading holes is the same as the number of limiting guide grooves.

[0008] Furthermore, the number of the piezoresistive strain units on the precursor is 4.

[0009] Furthermore, the stress concentration area of the precursor is obtained through finite element analysis.

[0010] Furthermore, a temperature compensation sensor is provided at the tail of the simulated bee hair cantilever beam.

[0011] Furthermore, the precursor is in the shape of a straight beam or a curved beam.

[0012] Furthermore, the data acquisition and output unit is a Wheatstone bridge formed by interconnecting four piezoresistive strain units on the same precursor through wires.

[0013] A method for manufacturing an omnidirectional micro-flow velocity sensor imitating scorpion hairs, the method being used to prepare the omnidirectional micro-flow velocity sensor imitating scorpion hairs as described in the present invention, comprising the following steps: S1: preparing a circular substrate, and opening a limiting guide groove and a threading hole on the circular substrate to obtain a sensor base; S2: Preparation of hair-like transducer sensing structure and sensitivity / bandwidth adjustment block; S3: The prepared hair-like transducer sensing structure and sensitivity / bandwidth adjustment block are slidably embedded in the limiting guide groove, and the piezoresistive strain unit of the hair-like transducer sensing structure is led out to the outside of the circular substrate through the wiring plug and the wire through the threading hole and connected to the data acquisition and output unit, thereby obtaining an omnidirectional sensing micro-flow velocity sensor imitating the scorpion's hair.

[0014] Furthermore, in step S2, the hairy transducer sensor structure and the sensitivity / bandwidth adjustment block are integrally formed using a MEMS process or a laser processing process; the MEMS process is targeted at hairy transducer sensor structures and sensitivity / bandwidth adjustment blocks of millimeter scale and above; the laser processing process is targeted at hairy transducer sensor structures and sensitivity / bandwidth adjustment blocks of micron and submicron scale.

[0015] Furthermore, the steps of integrating the hair-like transducer sensor structure and the sensitivity / bandwidth adjustment block using a MEMS process include: S201: spin-coating a layer of polymethyl methacrylate on the silicon wafer and baking and curing it to obtain a sacrificial layer I; S202: Spin-coating a layer of polyimide on the sacrificial layer I and baking and curing it to obtain the insulating layer I; S203: Vapor-depositing a layer of copper on the insulating layer I to obtain an electrode layer; S204: Photolithography and patterning the electrode layer mask to obtain a patterned electrode layer; S205: Spin-coating a layer of polyimide on the patterned electrode layer and baking and curing it to obtain an insulating layer II; S206: evaporating a layer of nickel on the insulating layer II to obtain a piezoresistive strain unit layer; S207: patterning the piezoresistive strain unit layer to obtain a patterned piezoresistive strain unit layer; S208: Spin-coating a layer of polyimide on the patterned piezoresistive strain unit layer and baking and curing it to obtain an insulating layer III; S209: evaporating a layer of gold on the insulating layer III to obtain a temperature compensation sensor electrode layer; S210: performing patterning processing on the temperature compensation sensor electrode layer to obtain a patterned temperature compensation sensor electrode layer; S211: Spin-coating a layer of polyimide on the patterned temperature compensation sensor electrode layer and baking and curing it to form a package, thereby obtaining a hairy transducer sensing structure and a sensitivity / bandwidth adjustment block.

[0016] The present invention provides an omnidirectional sensing micro-flow velocity sensor imitating scorpion hairs and a manufacturing method thereof, which has the following advantages over the prior art: 1. The present invention changes the buckling morphology of the precursor by sliding the sensitivity / bandwidth adjustment block, changing the precursor state from a two-dimensional precursor state to a three-dimensional configuration, dynamically adjusting the stiffness of the hair-like transducer sensing structure, and then adjusting the characteristic frequency to achieve coordinated optimization of sensitivity and bandwidth, that is, expanding the low-frequency detection range while ensuring the high-sensitivity mode; this mechanism simulates the morphological changes of scorpion hairs such as "vertical" and "fallen" under different stress states, realizing the bionic regulation function of sensor sensitivity and bandwidth to achieve adaptive environmental response.

[0017] 2. The present invention utilizes mechanically guided assembly technology to transform the original two-dimensional planar structure precursor into a three-dimensional "hair" structure, i.e., a three-dimensional configuration, through bending deformation. This eliminates the need for complex processes such as large aspect ratio etching or thick resist photolithography faced by traditional micromachining processes when manufacturing ciliary structures with large aspect ratios, thereby significantly reducing manufacturing difficulty and cost. At the same time, the present invention is compatible with planar micromachining processes and supports cross-scale manufacturing, making it suitable for both millimeter-level laser cutting and micron-level MEMS processes. In addition, the integrated molding of the hair-like transducer sensing structure and the sensitivity / bandwidth adjustment block improves the consistency and reliability of the structure.

[0018] 3. In the present invention, a plurality of piezoresistive strain units are provided in the stress concentration area of the hair-like transducer sensing structure, which outputs electrical signals through the Wheatstone bridge circuit, thereby realizing efficient conversion of tiny air vibration signals into electrical signals, greatly improving the sensitivity of the sensor; at the same time, a temperature compensation sensor is arranged in the tail area of the hair-like cantilever beam to effectively eliminate the error caused by temperature drift and improve the long-term operation stability and measurement accuracy.

[0019] In summary, this invention, through its biomimetic structural design, mechanically guided three-dimensional assembly, cross-scale manufacturing, multi-channel circular array layout, and integrated sensing and compensation mechanisms, successfully overcomes the shortcomings of existing biomimetic ciliary microflow sensors, including sensitivity-bandwidth conflicts, manufacturing difficulties, narrow measurement range, and poor anti-interference capabilities. Not only does it achieve the performance advantages of high sensitivity, broadband response, and omnidirectional sensing, it also possesses excellent manufacturability and scalability, providing a novel solution for the development of microflow detection technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of the present invention.

[0021] Figure 2 It is a structural schematic diagram of the sensor substrate in the present invention.

[0022] Figure 3 It is a structural schematic diagram of the hair-like transducer sensor structure in the present invention.

[0023] Figure 4 It is a structural schematic diagram of the hair-like transducer sensor structure in the shape of a straight beam in the present invention.

[0024] Figure 5 It is a structural schematic diagram of the hair-like transducer sensor structure in the shape of a curved beam in the present invention.

[0025] Figure 6 This is a finite element analysis diagram of the stress distribution when the sensitivity / bandwidth adjustment block in the present invention is displaced along the direction of the limiting guide groove.

[0026] Figure 7 It is a circuit diagram of the data acquisition and output unit in the present invention.

[0027] Figure 8 This is a flow chart of the method for manufacturing a hair-like transducer sensor structure using MEMS technology in the present invention.

[0028] Figure 9 It is a schematic diagram of the buckling deformation process of the hair-like transducer sensor structure in the present invention.

[0029] In the figure: 1. Sensor base; 2. Hair-like transducer sensing structure; 3. Sensitivity / bandwidth adjustment block; 4. Data acquisition and output unit; 1.1. Base plate; 1.2. Transmission limit guide groove; 1.3. Threading hole; 2.1. Precursor; 2.2. Imitation Gu hair cantilever beam; 2.3. Piezoresistive strain unit. DETAILED DESCRIPTION

[0030] The following will be combined with the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0031] To facilitate understanding of the technical solution of this patent, the following lists some of the professional terms involved in this specification and their corresponding English full names and abbreviations: Polymethyl Methacrylate (PMMA); Polyimide (PI); Copper (Cu); Nickel (Ni); Gold (Au); Silicon Wafer (SiWafer); Micro-Electro-Mechanical Systems (MEMS).

[0032] It should be noted that the MEMS process integrated molding refers to a manufacturing method that uses Micro-Electro-Mechanical Systems (MEMS) technology to directly manufacture a complete device containing multiple functional components on a substrate material through a single process flow without the need for subsequent assembly or splicing. Example 1

[0033] An omnidirectional sensing micro-flow velocity sensor imitating scorpion hair, as shown in the attached Figure 1 As shown, it includes a sensor substrate 1, six hair-like transducer sensing structures 2, six sensitivity / bandwidth adjustment blocks 3, and a data acquisition and output unit 4. The free ends of the six hair-like transducer sensing structures 2 are integrally connected to the active ends of the six sensitivity / bandwidth adjustment blocks 3 in a one-to-one correspondence. As attached Figure 2 As shown, the sensor base 1 includes a circular base plate 1.1. The upper surface of the base plate 1.1 is provided with six limiting guide grooves 1.2 and six threading holes 1.3. The six limiting guide grooves 1.2 are evenly distributed in a circular array on the base plate 1.1. The included angle between the center lines of adjacent limiting guide grooves 1.2 is 60°. Six sensitivity / bandwidth adjustment blocks 3 are slidably embedded in the six limiting guide grooves 1.2 in a one-to-one correspondence. The sensitivity and bandwidth of the omnidirectional micro-flow velocity sensor can be adjusted by changing the relative position of the sensitivity / bandwidth adjustment block 3 in the corresponding limiting guide groove 1.2.

[0034] As attached Figure 3 ~Attached Figure 4 As shown, each hair-like transducer sensor structure 2 includes a precursor 2.1, each precursor 2.1 is in the shape of a straight beam, and the tail end of each precursor 2.1 is integrally connected to a cantilever beam 2.2 imitating a beetle hair, and the tail of each cantilever beam 2.2 is provided with a temperature compensation sensor. Each precursor 2.1 has four stress concentration areas obtained by finite element analysis, as shown in the attached figure. Figure 6 As shown, the position indicated by the dotted box in the figure is the stress concentration area of the precursor 2.1, and each stress concentration area is provided with a piezoresistive strain unit 2.3; The arrangement of the piezoresistive strain unit 2.3 in the stress concentration area of the precursor 2.1 can further improve the sensitivity of the present omnidirectional sensing micro-flow velocity sensor, and the structural design of the temperature compensation sensor can eliminate the influence of temperature drift on the accuracy of the present omnidirectional sensing micro-flow velocity sensor; Each piezoresistive strain unit 2.3 is connected to the data acquisition and output unit 4 through a cable plug and a wire. That is, the four piezoresistive strain units 2.3 on the same precursor 2.1 are interconnected through wires to form a Wheatstone bridge. Figure 7 As shown, 、 、 、 They correspond to the four piezoresistive strain units 2.3 on the same precursor 2.1, VCC represents the positive power supply electrode of the Wheatstone bridge, represents the output end of the Wheatstone bridge, and GND is the reference zero potential point of the circuit.

[0035] When sensitivity / bandwidth control is specifically implemented for the present omnidirectional sensing micro-flow velocity sensor, displacement is applied to the sensitivity / bandwidth adjustment block 3 to cause the precursor 2.1 to buckle and deform. For ease of description, the present invention defines the planar shape of the precursor 2.1 when not buckled by force as a two-dimensional precursor, and the three-dimensional buckled shape of the precursor 2.1 when buckled and deformed after being subjected to external tension as a three-dimensional configuration. The change in the shape of the precursor 2.1 will cause a change in the structural stiffness of the hairy transducer sensing structure 2, thereby causing a change in the sensitivity of the hairy transducer sensing structure 2. At the same time, the characteristic frequency calculation formula of the hairy transducer sensing structure 2 is as follows:

[0036] Where: represents the characteristic frequency of the hair-like transducer sensing structure 2; k represents the stiffness of the hair-like transducer sensing structure 2; m represents the mass of the hairy transducer sensor structure 2.

[0037] During the buckling deformation of the precursor 2.1, the mass of the hair-like transducer sensor structure 2 m The only thing that changes is the stiffness of the hair-like transducer sensor structure 2. k , stiffness k The change of leads to the change of the characteristic frequency of the hair-like transducer sensing structure 2, thereby realizing the regulation of the bandwidth of the omnidirectional sensing micro-flow velocity sensor and increasing its bandwidth.

[0038] After the precursor 2.1 changes from a two-dimensional precursor state to a three-dimensional configuration, when it is disturbed by a micro-flow velocity, that is, by a signal disturbance of a tiny air vibration, the slender hair-like cantilever beam 2.2 will be disturbed by the airflow, thereby causing the piezoresistive strain unit 2.3 to deform, thereby causing the resistance of the piezoresistive strain unit 2.3 to change. Then, through the output of the data acquisition and output unit 4, the micro-flow velocity is converted into an electrical signal, thereby achieving ultra-sensitive perception of the micro-flow velocity. The buckling deformation process of the hair-like transducer sensing structure 2 is shown in the attached figure. Figure 9 shown. Example 2

[0039] An omnidirectional micro-flow velocity sensor imitating scorpion hairs comprises a sensor substrate 1, six hair-like transducer sensing structures 2, six sensitivity / bandwidth adjustment blocks 3, and a data acquisition and output unit 4. The free ends of the six hair-like transducer sensing structures 2 are integrally connected to the active ends of the six sensitivity / bandwidth adjustment blocks 3 in a one-to-one correspondence. The sensor base 1 includes a circular substrate 1.1, the upper surface of which is provided with 6 limiting guide grooves 1.2 and 6 threading holes 1.3. The 6 limiting guide grooves 1.2 are evenly distributed in a circular array on the substrate 1.1, and the angle between the center lines of adjacent limiting guide grooves 1.2 is 60 degrees. The 6 sensitivity / bandwidth adjustment blocks 3 are slidably embedded in the 6 limiting guide grooves 1.2 in a one-to-one correspondence. Each hair-like transducer sensor structure 2 includes a precursor 2.1, and the tail end of each precursor 2.1 is There is an imitation bee hair cantilever beam 2.2 connected to the whole body, and a temperature compensation sensor is set at the tail of each imitation bee hair cantilever beam 2.2. Each precursor 2.1 is analyzed by finite element to obtain four stress concentration areas, and each stress concentration area is provided with a piezoresistive strain unit 2.3. Each piezoresistive strain unit 2.3 is connected to the data acquisition output unit 4 through a cable plug and a wire. That is, the four piezoresistive strain units 2.3 on the same precursor 2.1 are interconnected by wires to form a Wheatstone bridge, as shown in the attached figure. Figure 7 As shown, 、 、 、 They correspond to the four piezoresistive strain units 2.3 on the same precursor 2.1, VCC represents the positive power supply electrode of the Wheatstone bridge, represents the output end of the Wheatstone bridge, and GND is the reference zero potential point of the circuit.

[0040] It should be noted that the precursors 2.1 described in this embodiment are all in the shape of a curved beam, as shown in the attached Figure 5 shown. Example 3

[0041] A method for manufacturing an omnidirectional micro-flow velocity sensor imitating scorpion hairs comprises the following steps: S1: Prepare a circular substrate 1.1, and open a limiting guide groove 1.2 and a threading hole 1.3 on the circular substrate 1.1 to obtain a sensor base 1.

[0042] S2: preparing a hair-like transducer sensing structure 2 and a sensitivity / bandwidth adjustment block 3; The hairy transducer sensor structure 2 and the sensitivity / bandwidth adjustment block 3 are integrally formed using a MEMS process; the MEMS process is targeted at hairy transducer sensor structures 2 and sensitivity / bandwidth adjustment blocks 3 of millimeter scale or above; As attached Figure 8 As shown, the steps of integrating the hair-like transducer sensor structure 2 and the sensitivity / bandwidth adjustment block 3 using the MEMS process include: S201: spin-coating a layer of polymethyl methacrylate on the silicon wafer and baking and curing it to obtain a sacrificial layer I; S202: Spin-coating a layer of polyimide on the sacrificial layer I and baking and curing it to obtain the insulating layer I; S203: Vapor-depositing a layer of copper on the insulating layer I to obtain an electrode layer; S204: Photolithography and patterning the electrode layer mask to obtain a patterned electrode layer; S205: Spin-coating a layer of polyimide on the patterned electrode layer and baking and curing it to obtain an insulating layer II; S206: evaporating a layer of nickel on the insulating layer II to obtain a piezoresistive strain unit layer; S207: patterning the piezoresistive strain unit layer to obtain a patterned piezoresistive strain unit layer; S208: Spin-coating a layer of polyimide on the patterned piezoresistive strain unit layer and baking and curing it to obtain an insulating layer III; S209: evaporating a layer of gold on the insulating layer III to obtain a temperature compensation sensor electrode layer; S210: performing patterning processing on the temperature compensation sensor electrode layer to obtain a patterned temperature compensation sensor electrode layer; S211: Spin-coating a layer of polyimide on the patterned temperature compensation sensor electrode layer and baking and curing it to form a package, thereby obtaining a hairy transducer sensing structure 2 and a sensitivity / bandwidth adjustment block 3.

[0043] S3: The prepared hair-like transducer sensing structure 2 and the sensitivity / bandwidth adjustment block 3 are slidably embedded in the limiting guide groove 1.2, and the piezoresistive strain unit 2.3 of the hair-like transducer sensing structure 2 is led out to the outside of the circular substrate 1.1 through the wiring plug and the wire through the threading hole 1.3 and connected to the data acquisition and output unit 4, thereby obtaining an omnidirectional sensing micro-flow velocity sensor imitating the scorpion hair.

[0044] It should be noted that the patterning steps described in this embodiment all omit a specific reactive ion etching (RIE) process mask manufacturing method, which is a prior art and will not be described in detail here. Example 4

[0045] The difference between this embodiment and embodiment 3 is that: step S2: preparing the hairy transducer sensor structure 2 and the sensitivity / bandwidth adjustment block 3; the hairy transducer sensor structure 2 and the sensitivity / bandwidth adjustment block 3 are integrated into one piece by laser processing technology; the laser processing technology is targeted at the hairy transducer sensor structure 2 and the sensitivity / bandwidth adjustment block 3 of micron and submicron scales, and the remaining manufacturing steps are the same as those of embodiment 3.

[0046] In the specific implementation process of the present invention, the number of the limiting guide groove 1.2 and the hair-like transducer sensor structure 2 can be determined according to the requirements of different omnidirectional sensing environments, and the length of the hair-like cantilever beam 2.2 can be adjusted according to actual needs to further adjust the characteristic frequency of the hair-like transducer sensor structure 2. In this way, while ensuring the high sensitivity of the omnidirectional sensing micro-flow velocity sensor, the measurement range of the omnidirectional sensing micro-flow velocity sensor is increased in an array manner; the shape of the precursor 2.1 can be continuously improved and optimized according to needs, and is not limited to a straight beam or a curved beam.

[0047] In the description of the present invention, it should be understood that the indicated orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0048] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. An omnidirectional micro-flow velocity sensor imitating scorpion hairs, characterized by: The invention comprises a sensor base (1), a hair-like transducer sensing structure (2), a sensitivity / bandwidth adjustment block (3), and a data acquisition and output unit (4), wherein the free end of the hair-like transducer sensing structure (2) is integrally connected to the active end of the sensitivity / bandwidth adjustment block (3); The sensor base (1) comprises a base plate (1.1); a limit guide groove (1.2) and a threading hole (1.3) are provided on the upper surface of the base plate (1.1); a sensitivity / bandwidth adjustment block (3) is slidably embedded in the limit guide groove (1.2); The hair-like transducer sensing structure (2) comprises a precursor (2.1), the tail end of the precursor (2.1) being integrally connected to a cantilever beam (2.2) imitating a bee hair; a piezoresistive strain unit (2.3) is provided in a stress concentration region of the precursor (2.1); and the piezoresistive strain unit (2.3) is connected to a data acquisition and output unit (4) via a cable plug and a wire.

2. The omnidirectional micro-flow velocity sensor imitating scorpion hair according to claim 1 is characterized in that: The base plate (1.1) is circular, the number of the limiting guide grooves (1.2) is 6, and the 6 limiting guide grooves (1.2) are evenly distributed in a circular array on the base plate (1.1), the angle between the center lines of adjacent limiting guide grooves (1.2) is 60°, and the number of threading holes (1.3) is the same as the number of the limiting guide grooves (1.2).

3. The omnidirectional micro-flow velocity sensor imitating scorpion hair according to claim 1, characterized in that: The number of the piezoresistive strain units (2.3) on the precursor (2.1) is four.

4. The omnidirectional micro-flow velocity sensor imitating scorpion hair according to claim 1, characterized in that: The stress concentration area of the precursor (2.1) is obtained through finite element analysis.

5. The omnidirectional micro-flow velocity sensor imitating scorpion hair according to claim 1, characterized in that: A temperature compensation sensor is provided at the tail of the simulated bee hair cantilever beam (2.2).

6. The omnidirectional micro-flow velocity sensor imitating scorpion hair according to claim 1, characterized in that: The precursor (2.1) is in the shape of a straight beam or a curved beam.

7. The omnidirectional micro-flow velocity sensor imitating scorpion hair according to claim 3, characterized in that: The data acquisition and output unit (4) is a Wheatstone bridge formed by interconnecting four piezoresistive strain units (2.3) on the same precursor (2.1) through wires.

8. A method for manufacturing an omnidirectional micro-flow velocity sensor imitating scorpion hairs, the method being used to prepare the omnidirectional micro-flow velocity sensor imitating scorpion hairs as claimed in claim 5, characterized in that: The following steps are involved: S1: preparing a circular substrate (1.1), and opening a limiting guide groove (1.2) and a threading hole (1.3) on the circular substrate (1.1) to obtain a sensor base (1); S2: Prepare the hair-like transducer sensing structure (2) and the sensitivity / bandwidth adjustment block (3); S3: The prepared hair-like transducer sensing structure (2) and the sensitivity / bandwidth adjustment block (3) are slidably embedded in the limiting guide groove (1.2), and the piezoresistive strain unit (2.3) of the hair-like transducer sensing structure (2) is led out to the outside of the circular substrate (1.1) through the wiring plug and the wire through the threading hole (1.3) and connected to the data acquisition output unit (4), thereby obtaining an omnidirectional sensing micro-flow velocity sensor imitating the scorpion's hair.

9. The method for manufacturing the omnidirectional micro-flow velocity sensor imitating scorpion hairs according to claim 8, characterized in that: In step S2, the hairy transducer sensor structure (2) and the sensitivity / bandwidth adjustment block (3) are integrally formed using a MEMS process or a laser processing process; the MEMS process is targeted at hairy transducer sensor structures (2) and sensitivity / bandwidth adjustment blocks (3) of millimeter scale and above; the laser processing process is targeted at hairy transducer sensor structures (2) and sensitivity / bandwidth adjustment blocks (3) of micrometer and submicrometer scale.

10. The method for manufacturing the omnidirectional micro-flow velocity sensor imitating scorpion hairs according to claim 9, characterized in that: The steps of integrating the hair-like transducer sensor structure (2) and the sensitivity / bandwidth adjustment block (3) using a MEMS process include: S201: spin-coating a layer of polymethyl methacrylate on the silicon wafer and baking and curing it to obtain a sacrificial layer I; S202: Spin-coating a layer of polyimide on the sacrificial layer I and baking and curing it to obtain the insulating layer I; S203: Vapor-depositing a layer of copper on the insulating layer I to obtain an electrode layer; S204: Photolithography and patterning the electrode layer mask to obtain a patterned electrode layer; S205: Spin-coating a layer of polyimide on the patterned electrode layer and baking and curing it to obtain an insulating layer II; S206: evaporating a layer of nickel on the insulating layer II to obtain a piezoresistive strain unit layer; S207: patterning the piezoresistive strain unit layer to obtain a patterned piezoresistive strain unit layer; S208: Spin-coating a layer of polyimide on the patterned piezoresistive strain unit layer and baking and curing it to obtain an insulating layer III; S209: evaporating a layer of gold on the insulating layer III to obtain a temperature compensation sensor electrode layer; S210: performing patterning processing on the temperature compensation sensor electrode layer to obtain a patterned temperature compensation sensor electrode layer; S211: Spin-coating a layer of polyimide on the patterned temperature compensation sensor electrode layer and baking and curing it to form a package, thereby obtaining a hairy transducer sensing structure (2) and a sensitivity / bandwidth adjustment block (3).

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