An electrostatic detection probe

Abstract

This invention relates to the technical field of electrostatic detection, and in particular to an electrostatic detection probe. The electrostatic detection probe of this invention has a housing comprising a first housing segment and a second housing segment. The second housing segment is a metal component, and the first housing segment is made of an anti-static material. The first housing segment has an electrostatic detection window, and a sensing element is located within the electrostatic detection window with a gap between it and the inner wall of the window to allow vibration of the sensing element. A circuit module is mounted on a mounting plate and is used to control the vibration of a vibrating element to drive the vibrating arm and to receive the voltage signal sensed by the sensing element. The housing portion containing the electrostatic detection window of this application's electrostatic detection probe is made of an anti-static material. Compared to metal materials, the detection window of this application has less influence on the electric field, making it less likely for charges to be conducted to the ground along the metal material, thus maintaining a stable charge level. This is especially beneficial in scenarios with low charge levels, resulting in a more stable electric field and higher detection accuracy.

Description

Technical Field

[0001] This invention relates to the technical field of electrostatic detection, and in particular to an electrostatic detection probe. Background Technology

[0002] Electrostatic sensors and / or electrostatic detectors are specialized, precision instruments for monitoring static electricity on object surfaces, playing a vital role in electrostatic measurement and protection.

[0003] On the production line of an electronics factory, electrostatic discharge (ESD) monitoring is crucial for preventing products from being damaged by electrostatic discharge and ensuring product quality. This is especially true in the semiconductor industry, where the miniaturization and precision of products have led to increasingly stringent requirements for ESD detection, demanding extremely low static electricity levels. This necessitates equipment capable of detecting such minute static charges to meet these requirements.

[0004] Existing electrostatic detection probes have low detection resolution and limited applicability, making them unsuitable for detecting small electrostatic charges. Summary of the Invention

[0005] The purpose of this invention is to provide an electrostatic detection probe to improve the resolution of electrostatic detection.

[0006] To address the aforementioned technical problems, this invention provides an electrostatic detection probe.

[0007] The electrostatic detection probe of the present invention includes a housing and a mounting plate, a circuit module, a vibrating arm, a vibrating element, and a sensing element disposed within the housing;

[0008] The mounting plate is fixed in the housing;

[0009] The vibrating arm is fixedly connected to the mounting plate. The vibrating arm has a first arm and a second arm arranged at intervals and having the same natural frequency. There are two vibrating elements, which are respectively disposed on the first arm and the second arm.

[0010] The sensing element is disposed on the first arm and is used to sense static electricity;

[0011] The outer casing includes a first casing segment and a second casing segment. The second casing segment is a metal part, and the first casing segment is made of an antistatic material. The first casing segment is provided with an electrostatic detection window. The sensing element is located in the electrostatic detection window and has a gap between it and the inner wall of the electrostatic detection window to allow the sensing element to vibrate.

[0012] The circuit module is mounted on the mounting plate and is used to control the vibration of the vibrating element to drive the vibrating arm to vibrate and to receive the voltage signal sensed by the sensing element.

[0013] Furthermore, the length of the first arm is greater than the length of the second arm, and the second arm is provided with an adjustment element so that the natural frequencies of the second arm and the first arm are the same.

[0014] Furthermore, the first arm has a mounting section for mounting the sensor, the mounting section being parallel to the electrostatic detection window.

[0015] Furthermore, the first housing segment is columnar, the electrostatic detection window is located on the side of the first housing segment, and the mounting segment is parallel to the second support arm.

[0016] Furthermore, the side of the first housing segment has an arc-shaped surface, and the electrostatic detection window is disposed on the arc-shaped surface; or, the side of the first housing segment has a flat surface, and the electrostatic detection window is disposed on the flat surface.

[0017] Furthermore, the first housing segment is columnar, the electrostatic detection window is located at the end face of the first housing segment, and the mounting segment is perpendicular to the second support arm.

[0018] Furthermore, an inclined surface is provided at the end of the first housing segment, the mounting segment is parallel to the inclined surface, and the electrostatic detection window is disposed on the inclined surface.

[0019] Furthermore, the thickness of the first arm and the second arm is 0.4-1.2 mm.

[0020] Furthermore, a fastener is provided in the second housing section to secure the mounting plate.

[0021] Furthermore, both the detection window and the sensing element are circular.

[0022] Compared with the prior art, the present invention has at least the following beneficial effects:

[0023] The housing portion of the electrostatic detection probe of this application, where the electrostatic detection window is located, is made of antistatic material. Compared with metal materials, the detection window of this application has less impact on the electric field, making it less likely for the charge to be conducted to the ground along the metal material. This makes it less likely for the charge to decrease and the charge quantity to remain stable. Especially in scenarios with less charge, it is less likely to change the already weak electric field, making the electric field more stable and resulting in higher detection accuracy.

[0024] Furthermore, by placing the electrostatic detection window in different locations on the casing, it is possible to meet the usage requirements of various spaces.

[0025] Furthermore, when an inclined surface is provided on the first housing segment and the electrostatic detection window is located on the inclined surface, it is convenient to arrange a larger electrostatic detection window and sensing element, thereby better sensing smaller external electric fields.

[0026] Furthermore, by setting both the electrostatic detection window and the sensing element to be circular, the influence of the shape of the sensing element and the electrostatic detection window on the detection accuracy can be reduced, thereby improving the detection accuracy. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of the first embodiment of the electrostatic detection probe of the present invention;

[0028] Figure 2 for Figure 1 A structural schematic diagram showing the internal contours of a medium-speed electrostatic detection probe;

[0029] Figure 3 for Figure 1 A schematic diagram of the electrostatic detection probe with its housing removed;

[0030] Figure 4 for Figure 1 A structural schematic diagram showing the internal contours of a medium-sized electrostatic detection probe from another perspective;

[0031] Figure 5 This is a schematic diagram of the structure of a second embodiment of the electrostatic detection probe of the present invention;

[0032] Figure 6 for Figure 5 A schematic diagram of the electrostatic detection probe from another perspective;

[0033] Figure 7 for Figure 5 A structural schematic diagram showing the internal contour of the electrostatic detection probe in the image;

[0034] Figure 8 This is a schematic diagram of the structure of the third embodiment of the electrostatic detection probe of the present invention;

[0035] Figure 9 for Figure 8 A schematic diagram of the electrostatic detection probe from another perspective;

[0036] Figure 10 for Figure 8 A structural schematic diagram showing the internal contour of the electrostatic detection probe in the image;

[0037] Figure 11 This is a schematic diagram of the structure of the fourth embodiment of the electrostatic detection probe of the present invention;

[0038] Figure 12 for Figure 8 A schematic diagram of the electrostatic detection probe from another perspective;

[0039] Figure 13 for Figure 8 A structural schematic diagram showing the internal contour of the electrostatic detection probe in the image;

[0040] Figure label:

[0041] 1. Mounting plate; 2. Circuit module; 3. Vibrating component; 4. Sensing component; 5. First support arm; 6. Second support arm; 7. First housing section; 8. Second housing section; 9. Electrostatic detection window; 10. Adjusting component; 11. Mounting section; 12. Resin. Detailed Implementation

[0042] The electrostatic detection probe of the present invention will now be described with reference to schematic diagrams, which illustrate preferred embodiments of the invention. It should be understood that those skilled in the art can modify the invention described herein while still achieving its advantageous effects. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit the invention.

[0043] The serial numbers assigned to components in this document, such as "first," "second," etc., are merely used to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages). In the description of this invention, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention.

[0044] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0045] The invention is described more specifically by way of example in the following paragraphs with reference to the accompanying drawings. The advantages and features of the invention will become clearer from the following description and claims. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the invention.

[0046] The following is in conjunction with the instruction manual appendix. Figure 1 To be continued Figure 13 The electrostatic detection probe of the present invention will be described below.

[0047] In some of these embodiments, such as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the electrostatic detection probe includes a housing and a mounting plate 1, a circuit module 2, a vibrating arm, a vibrating element 3, and a sensing element 4 disposed within the housing;

[0048] The mounting plate 1 is fixed in the outer casing;

[0049] The vibrating arm is fixedly connected to the mounting plate 1. The vibrating arm has a first arm 5 and a second arm 6 arranged at intervals and having the same natural frequency. There are two vibrating elements 3, which are respectively disposed on the first arm 5 and the second arm 6.

[0050] The sensing element 4 is disposed on the first support arm 5 and is used to sense static electricity;

[0051] The outer shell includes a first shell section 7 and a second shell section 8. The second shell section 8 is a metal part. The first shell section 7 is made of antistatic material. The first shell section 7 is provided with an electrostatic detection window 9. The sensing element 4 is located in the electrostatic detection window 9 and has a gap between it and the inner sidewall of the electrostatic detection window 9 to allow the sensing element 4 to vibrate.

[0052] The circuit module 2 is mounted on the mounting plate 1 and is used to control the vibration of the vibrating element 3 to drive the vibrating arm to vibrate and to receive the voltage signal sensed by the sensing element 4.

[0053] The antistatic material can be antistatic plastic, such as polycarbonate (PC) or polymethyl methacrylate (PMMA), or it can be carbon fiber or conductive ceramic. The housing refers to the structure used to house and protect the internal components of the electrostatic detection probe. The mounting plate 1 is the basic structure used to fix and support other components, and can be made of metal. The circuit module 2 is a collection of electronic components used to control vibration and process signals, and can be implemented using printed circuit boards and related electronic components. The vibrating arm is the structure used to support the sensing element 4 and generate vibration, and can be made of elastic metal. The vibrating element 3 is the component used to drive the vibrating arm, and can be implemented using piezoelectric ceramics or an electromagnetic actuator. The sensing element 4 is the core element used to detect static electricity, and can be implemented using a capacitor, an electrostatic induction electrode, or a field-effect transistor.

[0054] The housing portion of the electrostatic detection probe of this application, where the electrostatic detection window is located, is made of antistatic material. Compared with metal materials, the detection window of this application has less impact on the electric field, making it less likely for the charge to be conducted to the ground along the metal material. This makes it less likely for the charge to decrease and the charge quantity to remain stable. Especially in scenarios with less charge, it is less likely to change the already weak electric field, making the electric field more stable and resulting in higher detection accuracy.

[0055] In one embodiment, such as Figure 3 As shown, the length of the first support arm 5 is greater than the length of the second support arm 6, and the second support arm 6 is provided with an adjusting member 10 so that the natural frequencies of the second support arm 6 and the first support arm 5 are the same.

[0056] This adjustment element 10 can adjust the mass distribution of the second arm 6, thereby changing its natural frequency to match the natural frequency of the first arm 5.

[0057] Specifically, the adjusting member 10 can be implemented in various forms. As a preferred embodiment, the adjusting member 10 is a metal block. The metal block has a high density, which can provide sufficient mass in a small volume, facilitating precise adjustment. For example, metal blocks of different weights can be used, or the position of the metal block on the second support arm 6 can be adjusted to achieve precise adjustment.

[0058] Furthermore, the design of the adjusting member 10 can also take other factors into account. For example, it can be designed to be detachable for replacement or fine-tuning when needed. It can also be designed to be sliding, allowing the natural frequency to be adjusted by changing its position on the second arm 6.

[0059] By adding an adjusting element 10 to the second arm 6, the natural frequencies of the two arms can be precisely adjusted to keep them consistent. This design ensures that the vibrating arms remain synchronized during vibration, improving the accuracy and sensitivity of electrostatic detection.

[0060] As a specific embodiment, for example, the length of the first arm 5 is 100mm, and the length of the second arm 6 is 80mm. A sliding metal block, with a mass of 5g, is mounted on the second arm 6 as an adjustment element 10, which can slide along the length of the second arm 6 for adjustment. By changing the position of the metal block on the second arm 6, the natural frequency of the second arm 6 can be precisely adjusted to match the natural frequency of the first arm 5 (e.g., 200Hz). The metal block can be threaded onto the second arm 6 for easy adjustment and fixation.

[0061] In some embodiments, to further improve detection accuracy, such as Figure 3 As shown, the first arm 5 has a mounting section 11 for mounting the sensor 4, and the mounting section 11 is parallel to the electrostatic detection window 9.

[0062] Specifically, the mounting section 11 can be a specially designed flat surface or groove on the first arm 5 for placing and fixing the sensor 4. The surface of this flat surface or groove is parallel to the electrostatic detection window 9 to ensure that the sensor 4 is always oriented correctly.

[0063] Mounting section 11 can employ an adjustable structure, such as using fine-tuning screws or elastic clips, allowing for fine-tuning of the position of the sensor 4 during installation to achieve precise parallelism with the electrostatic detection window 9.

[0064] In the first embodiment, as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, an inclined surface is provided at the end of the first housing segment 7, the mounting segment 11 is parallel to the inclined surface, and the electrostatic detection window 9 is disposed on the inclined surface.

[0065] Specifically, the inclined surface at the end of the first housing segment 7 can be implemented in various ways. For example, the inclined surface can be a plane or an arc. The angle between the inclined surface and the horizontal plane can be designed according to actual needs, typically between 15° and 75°. This inclined design makes it easier for the probe to approach the object being measured, especially for irregularly shaped or hard-to-reach surfaces, improving the flexibility of the detection. In addition, by setting an inclined surface on the first housing segment 7 and placing the electrostatic detection window 9 on the inclined surface, it is also possible to arrange a larger electrostatic detection window 9 and the sensing element 10, thereby better sensing smaller external electric fields.

[0066] In some embodiments, the first housing segment 7 is columnar, the electrostatic detection window 9 is disposed on the side of the first housing segment 7, and the mounting segment 11 is parallel to the second support arm 6.

[0067] The electrostatic detection window 9 is located on the side of the first housing section 7, which makes the probe suitable for narrow spaces or environments that require side detection, thus making electrostatic detection more convenient.

[0068] Furthermore, the parallel design of mounting section 11 with the second arm 6 optimizes the vibration effect of the vibrating arm. This parallel arrangement allows the first arm 5 and the second arm 6 to maintain good balance during vibration, reducing unnecessary interference. Because mounting section 11 is parallel to the second arm 6, the vibration direction of the sensing element 4 is consistent with the vibration direction of the second arm 6, which helps to improve the sensitivity and accuracy of electrostatic detection.

[0069] Furthermore, in the second embodiment, as Figure 5 , Figure 6 and Figure 7 As shown, the side of the first housing segment 7 has an arc-shaped surface, and the electrostatic detection window 9 is disposed on the arc-shaped surface; or, in the third embodiment, as... Figure 8 , Figure 9 and Figure 10 As shown, the side of the first housing segment 7 has a plane, and the electrostatic detection window 9 is disposed on the plane.

[0070] The curved surface is suitable for scenarios requiring a larger detection range or specific curved surface detection, while the flat surface is suitable for conventional flat surface detection scenarios. This design increases the applicability of the electrostatic detection probe, enabling it to adapt to different detection environments and requirements.

[0071] Specifically, such as Figure 5 , Figure 6 and Figure 7 As shown, when the side of the first housing segment 7 has a curved surface, the electrostatic detection window 9 can be positioned on the curved surface. The curved surface design provides a larger detection range, suitable for scenarios requiring wide-angle detection. For example, when detecting static electricity on the surface of a cylindrical object, the electrostatic detection window 9 on the curved surface can better fit the surface of the object being detected, improving detection accuracy.

[0072] On the other hand, such as Figure 8 , Figure 9 and Figure 10As shown, when the side of the first housing segment 7 has a flat surface, the electrostatic detection window 9 can be positioned on that surface. This flat design is suitable for typical flat surface detection scenarios, such as detecting static electricity on the surfaces of objects like flat plates and thin films. The flat electrostatic detection window 9 ensures a stable distance from the surface being detected, which is beneficial for obtaining consistent detection results.

[0073] In the fourth embodiment, as Figure 11 , Figure 12 and Figure 13 As shown, the first housing segment 7 is columnar, the electrostatic detection window 9 is located at the end face of the first housing segment 7, and the mounting segment 11 is perpendicular to the second support arm 6.

[0074] This structural design allows the electrostatic detection probe to adapt to scenarios requiring end-face inspection, such as the internal spaces of electronic components and gaps in mechanical equipment. By placing the electrostatic detection window 9 on the end face of the columnar first housing segment 7, it can more flexibly approach the object being inspected, improving the accuracy and flexibility of the inspection.

[0075] Specifically, the columnar first housing segment 7 can take various shapes, such as cylindrical, elliptical, or polygonal. The electrostatic detection window 9 can be positioned at the center or off-center of the end face of the first housing segment 7 to accommodate different detection requirements. The design of the mounting segment 11 being perpendicular to the second support arm 6 allows the sensing element 4 to be better aligned with the detection window, thereby improving the accuracy and sensitivity of the detection.

[0076] In the different embodiments described above, by placing the electrostatic detection window in different positions on the housing, the usage requirements of various spaces can be met.

[0077] Furthermore, in some embodiments, both the electrostatic detection window 9 and the sensing element 10 are circular, which can reduce the influence of the shape of the sensing element and the electrostatic detection window on the detection accuracy, thereby improving the detection accuracy.

[0078] In some embodiments, the thickness of the first arm 5 and the second arm 6 is 0.4-1.2 mm. For example, it can be 0.5 mm, 0.8 mm, or 1 mm.

[0079] Setting the thickness of the first arm 5 and the second arm 6 within this range allows the vibrating arms to have sufficient strength and rigidity, while avoiding excessive thickness that could affect vibration performance.

[0080] In some embodiments, a fastener is provided in the second housing segment 8 to secure the mounting plate 1.

[0081] Preferably, the fastener is resin 12, which encapsulates the circuit module 2 and part of the mounting plate 1. For example, epoxy resin, polyurethane resin, or silicone resin can be used as the fastener. The resin 12 can encapsulate the circuit module 2 and part of the mounting plate 1 by casting, injection, or coating. The extent of encapsulation can be adjusted according to actual needs; it can completely encapsulate the circuit module 2 or only encapsulate key parts of the circuit module 2.

[0082] For mounting plate 1, resin 12 can cover part or most of it, but usually some area is left unused for connecting other components. The thickness of the resin 12 covering can be adjusted as needed, typically between 0.5mm and 5mm. After the resin 12 cures, it forms a solid whole, firmly fixing the circuit module 2 and mounting plate 1 inside the probe.

[0083] The resin 12 encapsulation not only secures the circuit module 2 and mounting plate 1, but also reduces the impact of vibration on the circuit, improving the overall stability and reliability of the probe. Simultaneously, the insulating properties of the resin 12 help prevent electrostatic interference, further enhancing the probe's detection accuracy.

[0084] Furthermore, the resin 12 encapsulation also protects the circuit module 2, preventing external environmental interference or damage. The resin 12 material has excellent insulation properties, effectively isolating external electromagnetic interference and improving the circuit's operational stability. Simultaneously, the sealing performance of the resin 12 also prevents external factors such as dust and moisture from affecting the circuit module 2, extending the probe's lifespan.

[0085] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. An electrostatic detection probe, characterized in that, It includes a housing and a mounting plate, circuit module, vibrating arm, vibrating element, and sensing element disposed within the housing; The mounting plate is fixed in the housing; The vibrating arm is fixedly connected to the mounting plate. The vibrating arm has a first arm and a second arm arranged at intervals and having the same natural frequency. There are two vibrating elements, which are respectively disposed on the first arm and the second arm. The sensing element is disposed on the first arm and is used to sense static electricity; The outer casing includes a first casing segment and a second casing segment. The second casing segment is a metal part, and the first casing segment is made of an antistatic material. The first casing segment is provided with an electrostatic detection window. The sensing element is located in the electrostatic detection window and has a gap between it and the inner wall of the electrostatic detection window to allow the sensing element to vibrate. The circuit module is mounted on the mounting plate and is used to control the vibration of the vibrating element to drive the vibrating arm to vibrate and to receive the voltage signal sensed by the sensing element. The length of the first arm is greater than the length of the second arm, and the second arm is provided with an adjustment component to make the natural frequencies of the second arm and the first arm the same.

2. The electrostatic detection probe according to claim 1, characterized in that, The first arm has a mounting section for mounting the sensor, the mounting section being parallel to the electrostatic detection window.

3. The electrostatic detection probe according to claim 2, characterized in that, The first housing segment is columnar, the electrostatic detection window is located on the side of the first housing segment, and the mounting segment is parallel to the second support arm.

4. The electrostatic detection probe according to claim 3, characterized in that, The first housing segment has an arc-shaped side surface, and the electrostatic detection window is disposed on the arc-shaped side surface; or, the first housing segment has a flat side surface, and the electrostatic detection window is disposed on the flat side surface.

5. The electrostatic detection probe according to claim 2, characterized in that, The first housing segment is columnar, the electrostatic detection window is located at the end face of the first housing segment, and the mounting segment is perpendicular to the second support arm.

6. The electrostatic detection probe according to claim 2, characterized in that, An inclined surface is provided at the end of the first housing segment, the mounting segment is parallel to the inclined surface, and the electrostatic detection window is disposed on the inclined surface.

7. The electrostatic detection probe according to claim 1, characterized in that, The thickness of the first arm and the second arm is 0.4-1.2 mm.

8. The electrostatic detection probe according to claim 1, characterized in that, The second housing section is provided with a fastener to fix the mounting plate.

9. The electrostatic detection probe according to claim 1, characterized in that, Both the detection window and the sensing element are circular.

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