Sealing device of laser and sealing method thereof

Abstract

The invention relates to the technical field of sealing devices, and discloses a sealing device of a laser device and a sealing method thereof.The sealing device of the laser device comprises a first shell and a second shell, and a containing space with an opening in one side is formed in the first shell; the second shell covers the opening and is connected with the first shell in a sealing mode so that a first sealing cavity can be defined by the second shell and the first shell, a second sealing cavity is further formed in the connecting position of the first shell and the second shell, and the second sealing cavity is arranged on the periphery of the first sealing cavity in a surrounding mode and is isolated from the first sealing cavity and the outside of the sealing device. The second sealing cavity is arranged on the periphery of the first sealing cavity, and the second sealing cavity is blocked between the first sealing cavity and the external environment, so that the risk that water vapor in the external environment invades into the first sealing cavity to influence the working performance of the laser can be effectively reduced, and the sealing protection effect of the sealing device on the laser is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of sealing devices, and in particular to a sealing device for a laser and a sealing method thereof. Background Art

[0002] Components such as the optical elements and laser source in the laser are extremely sensitive to the environment. The intrusion of even tiny dust or water vapor may cause performance degradation or even failure. Therefore, a sealing device is needed to effectively isolate the laser from the external environment to ensure the reliability of the laser.

[0003] In the prior art, the sealing of the laser by the sealing device is usually achieved through two technologies. One is to set a sealing ring between the shell of the sealing device to form a sealed connection, and the other is to use a parallel sealing process to weld the shell of the sealing device to achieve a sealed connection.

[0004] However, for the first technology, the sealing ring is prone to aging, hardening or deformation during long-term use, and its performance is prone to degradation in high or low temperature environments, which will affect the sealing effect of the sealing device; for the second technology, during the actual processing process, slight unevenness or assembly errors on the shell welding surface may lead to insufficient welding consistency, making it difficult to ensure the sealing effect of the sealing device. Summary of the Invention

[0005] In view of the above-mentioned deficiencies in the prior art, the object of the present invention is to provide a laser sealing device and a sealing method thereof, aiming to improve the sealing and protective effect of the sealing device on the laser.

[0006] In order to achieve the above object, the present invention provides a sealing device for a laser, comprising:

[0007] a first shell, wherein a receiving space with an opening on one side is formed in the first shell; and

[0008] A second shell, the second shell cover is arranged at the opening and is sealed with the first shell to form a first sealed cavity together with the first shell. A second sealed cavity is also provided at the connection between the first shell and the second shell. The second sealed cavity is annularly arranged on the outer periphery of the first sealed cavity and is respectively isolated from the first sealed cavity and the outside of the sealing device.

[0009] In one embodiment, one of the first shell and the second shell is provided with at least one recessed portion, and the other of the first shell and the second shell is provided with at least one raised portion, each of the raised portions is arranged opposite to one of the recessed portions, a sealing area is formed between the raised portion and the recessed portion, and the second sealing cavity is located in the sealing area.

[0010] In one embodiment, the sealing device further comprises a sealing member, which is disposed between the raised portion and the recessed portion and is sealedly connected to the raised portion and the recessed portion respectively to form the sealing area between the raised portion and the recessed portion.

[0011] In one embodiment, one of the raised portions includes two spaced-apart protrusions, both of which are arranged around the first sealing cavity. The sealing member is elastically deformed by being pressed by the two protrusions, and a second sealing cavity is formed between the two protrusions.

[0012] In one embodiment, one of the recessed portions includes two grooves spaced apart from each other, both grooves being arranged around the circumference of the first sealing cavity, the shape of the grooves being adapted to the shape of the protrusions, and each of the protrusions being inserted into one of the grooves.

[0013] In one embodiment, one of the recessed portions includes a groove, the groove is arranged around the circumference of the first sealing cavity, and a plurality of the protrusions are arranged side by side in one of the grooves.

[0014] In one embodiment, the vertical distances between the two protrusions and the sealing member are not equal;

[0015] And / or, the size of the protrusion gradually converges in a direction toward the recessed portion.

[0016] In one embodiment, a guide block is provided on a side of the second shell facing the first shell, and the guide block is inserted into the opening;

[0017] And / or, the sealing device further includes a fastener, wherein the fastener passes through a connection between the first shell and the second shell, so that the first shell and the second shell are detachably connected.

[0018] The present invention further provides a laser sealing method, which is applied to the laser sealing device described in any one of the above, and the laser sealing method comprises the following steps:

[0019] When the ambient air pressure value is within a preset positive pressure range, placing the laser into the accommodating space;

[0020] The first shell is covered on the opening, and the first shell is connected and fixed to the second shell, thereby forming the first sealed cavity and the second sealed cavity, and the first shell is sealed and connected to the second shell.

[0021] In one embodiment, the laser sealing method further comprises the following steps:

[0022] placing a seal around the periphery of the opening of the first housing;

[0023] The second shell is covered on the opening, and at least one of the first shell and the second shell is pressed or punctured to deform the sealing member, thereby forming the second sealing cavity.

[0024] An embodiment of the present invention provides a sealing device and a sealing method for a laser. Compared with the prior art, the device has the following advantages: a first sealed cavity for placing a laser is formed between a first shell and a second shell, and a second sealed cavity is provided at the connection between the first shell and the second shell, so that the second sealed cavity can be arranged around the outer periphery of the first sealed cavity and block the first sealed cavity from the external environment, thereby effectively reducing the risk of water vapor in the external environment invading the first sealed cavity and affecting the working performance of the laser, thereby improving the sealing and protective effect of the sealing device on the laser. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is a schematic structural diagram of a sealing device according to an embodiment of the present invention;

[0026] Figure 2 is an exploded view of a sealing device according to an embodiment of the present invention;

[0027] Figure 3 is a schematic structural diagram of a second housing of a sealing device according to an embodiment of the present invention;

[0028] Figure 4 is a cross-sectional view of a sealing device according to an embodiment of the present invention;

[0029] Figure 5 yes Figure 4 A magnified view of the local structure at point A;

[0030] Figure 6 is another enlarged view of a partial structure of the sealing device according to an embodiment of the present invention;

[0031] Figure 7 4 is a flow chart of a laser sealing method according to an embodiment of the present invention.

[0032] In the figure, 100, sealing device; 100a, first sealing cavity; 100b, second sealing cavity; 10, first shell; 11, opening; 12, recessed portion; 121, groove; 20, second shell; 21, guide block; 22, raised portion; 221, protrusion; 30, sealing member. DETAILED DESCRIPTION

[0033] The following embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples. The following examples are used to illustrate the present invention but are not intended to limit the scope of the present invention.

[0034] It should be understood that the present invention uses terms such as "front" and "back" to describe various types of information, but such information should not be limited to these terms. These terms are merely used to distinguish information of the same type from one another. For example, "front" information could also be referred to as "back" information, and "back" information could also be referred to as "front" information without departing from the scope of the present invention.

[0035] like Figures 1 to 6 As shown, a sealing device 100 for a laser according to an embodiment of the present invention includes a first shell 10 and a second shell 20. A accommodating space with an opening 11 on one side is formed in the first shell 10; the second shell 20 covers the opening 11 and is sealed with the first shell 10 to enclose the first shell 10 to form a first sealed cavity 100a. A second sealed cavity 100b is further provided at the connection between the first shell 10 and the second shell 20. The second sealed cavity 100b is arranged around the outer periphery of the first sealed cavity 100a and is isolated from the first sealed cavity 100a and the outside of the sealing device 100 respectively.

[0036] Among them, a accommodating space with an opening 11 on one side is formed in the first shell 10 for placing the optical components of the laser. The second shell 20 is covered at the opening 11 of the first shell 10 and is used to enclose with the first shell 10 to form a first sealed cavity 100a, so as to realize the packaging of the laser through the first sealed cavity 100a. When the second shell 20 is covered at the opening 11 of the first shell 10, the relative surfaces of the first shell 10 and the second shell 20 are abutted and sealed. Optionally, the material of the first shell 10 and the second shell 20 can be set to oxygen-free copper, aluminum alloy, indium steel, stainless steel, etc., which is not limited here.

[0037] Furthermore, a second sealed cavity 100b is provided at the connection between the first shell 10 and the second shell 20. By making the second sealed cavity 100b annularly arranged on the circumferential side of the first sealing member 30 and isolating the second sealed cavity 100b from the first sealed cavity 100a and the outside of the sealing device 100 respectively, the second sealed cavity 100b can be made to block the first sealed cavity 100a and the external environment, so as to effectively cut off the connection between the first sealed cavity 100a and the external environment through the second sealed cavity 100b, thereby preventing water vapor in the external environment from directly entering the first sealed cavity 100a and reducing gas leakage in the first sealed cavity 100a, thereby ensuring the sealing and protection effect of the first sealed cavity 100a and improving the reliability and service life of the laser encapsulated by the sealing device 100.

[0038] The second sealed cavity 100b can be filled with a positive pressure dry gas. This configuration allows the air pressure within the second sealed cavity 100b to be greater than the external ambient pressure, thereby reducing the risk of moisture from the external environment invading the second sealed cavity 100b. Optionally, the water and oxygen content of the positive pressure dry gas can be set to less than 0.1 ppm. The gas can be specifically configured as a sealing protective gas such as pure nitrogen or pure argon, or as dry air. The specific implementation method can be customized according to actual needs and is not limited here.

[0039] Furthermore, in a feasible embodiment, the sealing device 100 also includes a fastener 40, which passes through the connection between the first shell 10 and the second shell 20 to enable the first shell 10 and the second shell 20 to be detachably connected. Specifically, the sealing device 100 can be provided with multiple fasteners 40 along its circumference to fix the second shell 20 to the first shell 10 via the multiple fasteners 40, wherein the fasteners 40 can be provided as, but not limited to, fastening bolts, and the fasteners 40 can be distributed on the outer circumference of the second sealed cavity 100b. With this arrangement, the fasteners 40 can be used to achieve a detachable connection between the first shell 10 and the second shell 20, so as to facilitate maintenance of the laser encapsulated in the first sealed cavity 100a, which is conducive to improving the ease of use of the sealing device 100.

[0040] like Figures 2 to 6 As shown, one of the first shell 10 and the second shell 20 of the embodiment of the present invention is provided with at least one recessed portion 12, and the other of the first shell 10 and the second shell 20 is provided with at least one raised portion 22. Each raised portion 22 is arranged opposite to a recessed portion 12, and a sealing area is formed between the raised portion 22 and the recessed portion 12. The second sealed cavity 100b is located in the sealing area.

[0041] The first shell 10 may be provided with a recessed portion 12 on one side of the first shell 10 facing the second shell 20, the recessed portion 12 being arranged around the outer periphery of the opening 11 of the first shell 10, and a protrusion 22 being provided on the side of the second shell 20 facing the first shell 10. Alternatively, the first shell 10 may be provided with a protrusion 22 on one side of the second shell 20 facing the second shell 10, and the protrusion 22 being arranged around the outer periphery of the opening 11 of the first shell 10, and a recessed portion 12 being provided on the side of the second shell 20 facing the first shell 10. Such an arrangement allows, on the one hand, a second sealed cavity 100b to be provided between the protrusion 22 and the recessed portion 12, and the second sealed cavity 100b located in the sealed area can be isolated from the first sealed cavity 100a and the external environment, and on the other hand, facilitates the docking and mating of the first shell 10 and the second shell 20.

[0042] It should be noted that when there are two or more recessed portions 12 and protruding portions 22, two adjacent recessed portions 12 and two adjacent protruding portions 22 can be spaced apart around the periphery of the first sealed cavity 100a, with each recessed portion 12 corresponding to a protruding portion 22. A second sealed cavity 100b can be provided between the sealed area between each recessed portion 12 and a protruding portion 22. In this way, multiple second sealed cavities 100b can be provided between the first sealed cavity 100a and the external environment, thereby further improving the sealing and isolation effect of the sealing device 100.

[0043] like Figure 2 and Figures 4 to 6 As shown, the sealing device 100 of the embodiment of the present invention further includes a sealing member 30, which is disposed between the raised portion 22 and the recessed portion 12 and is sealedly connected to the raised portion 22 and the recessed portion 12 respectively to form the sealing area between the raised portion 22 and the recessed portion 12.

[0044] This arrangement allows for effective sealing between the first and second housings 10, 20 by tightly fitting the seal 30 therebetween. Specifically, in some embodiments, the seal 30 can be made of an elastic material, such as polytetrafluoroethylene. When positioned between the first and second housings 10, 20, the seal 30 elastically deforms under the compressive forces of the first and second housings 10, 20, thereby filling the gap between the first and second housings 10, 20 and achieving a sealed connection between the first and second housings 10, 20.

[0045] Of course, the technical solution of the present invention is not limited to this. In other embodiments, the seal 30 may also be made of a metal material, such as aluminum, titanium, or indium. When the seal 30 is positioned between the first shell 10 and the second shell 20, the seal 30 can undergo plastic deformation under the pressure of the first shell 10 and the second shell 20, thereby filling the fitting gap between the first shell 10 and the second shell 20 to achieve a sealed connection between the first shell 10 and the second shell 20. The specific implementation can be customized according to actual needs and is not limited here.

[0046] like Figure 5 and Figure 6 As shown, a raised portion 22 of an embodiment of the present invention includes two spaced-apart protrusions 221 , both of which are arranged around the first sealing cavity 100a . The sealing member 30 is elastically deformed by being pressed by the two protrusions 221 , and a second sealing cavity 100b is formed between the two protrusions 221 .

[0047] Among them, one raised portion 22 includes two spaced-apart protrusions 221, with an interval between adjacent protrusions 221. Each protrusion 221 protrudes toward the recessed portion 12 and can abut against the sealing member 30 provided in the recessed portion 12. This arrangement allows the side of the sealing member 30 facing the raised portion 22 to be pressed by the protrusions 221, causing it to deform, thereby being spaced apart from the surface of the raised portion 22 located between the two adjacent protrusions 221. As a result, a second sealed cavity 100b can be formed by enclosing the portion of the surface of the sealing member 30 facing the raised portion 22, the facing surfaces of the two adjacent protrusions 221, and the surface of the raised portion 22 located between the adjacent protrusions.

[0048] Furthermore, the risk of water vapor from the external environment invading the second sealed cavity 100b can be reduced by filling the first sealed cavity 100a and the second sealed cavity 100b with sealed protective gas or dry air, so that the laser sealed in the first sealed cavity 100a can be effectively protected; and even if the air pressure in the second sealed cavity 100b gradually decreases as the sealing device 100 is used for a longer time, so that external water vapor begins to invade the sealing device 100, the external water vapor needs to first slowly invade the second sealed cavity 100b and cannot directly enter the first sealed cavity 100a, so that the first sealed cavity 100a and the external environment can be effectively isolated through the second sealed cavity 100b, so that the sealing device 100 has better sealing performance.

[0049] like Figure 5 As shown, in a feasible embodiment, one of the recessed portions 12 of the embodiment of the present invention includes a groove 121 , which is arranged around the circumference of the first sealed cavity 100a , and a plurality of the protrusions 221 are arranged side by side in one of the grooves 121 .

[0050] The sealing member 30 is disposed in the groove 121, and a plurality of protrusions 221 protrude into the groove 121 to abut against the sealing member 30 disposed in the groove 121. Optionally, to facilitate the abutment and cooperation between the sealing member 30 and the protrusions 221 of the raised portion 22, the sealing member 30 can be partially protruded from the notch of the groove 121.

[0051] like Figure 6 As shown, in another feasible embodiment, one of the recessed portions 12 of an embodiment of the present invention includes two grooves 121 spaced apart from each other, and the two grooves 121 are both arranged around the circumference of the first sealing cavity 100a, and the shape of the grooves 121 is adapted to the shape of the protrusions 221, and each of the protrusions 221 is inserted into one of the grooves 121.

[0052] Specifically, by providing two protrusions 221 on the raised portion 22 and correspondingly providing two grooves 121 on the recessed portion 12, so that the protrusions 221 and the grooves 121 are mated one-to-one, the mating stability of the sealing device 100 can be further improved. Furthermore, by matching the shapes of the grooves 121 and the protrusions 221, the grooves 121 and the protrusions 221 can be utilized to fully squeeze the sealing member 30, thereby improving the mating stability between the first housing 10, the second housing 20, and the sealing member 30 of the sealing device 100 and ensuring the sealing effect of the sealing member 30.

[0053] like Figures 5 and 6 As shown, the vertical distances between each two adjacent protrusions 221 and the sealing member 30 are not equal. This arrangement helps reduce the risk of the sealing member 30 breaking under the pressure of multiple protrusions 221, thereby helping to ensure the reliability of the sealing device 100.

[0054] like Figures 5 and 6 As shown, the dimensions of the protrusion 221 in this embodiment of the present invention gradually converge toward the recessed portion 12. This arrangement facilitates a good fit between the protrusion 221 and the seal 30, thereby ensuring the reliability of the sealing device 100. Specifically, in this embodiment, the width dimension D of the protrusion 221 can be gradually reduced toward the recessed portion 12, so that the protrusion 221 can be configured in a toothed shape, thereby ensuring a tight fit between the first housing 10, the second housing 20, and the seal 30. Of course, the protrusion 221 can also be configured in other shapes, which are not limited here.

[0055] In some embodiments, the protrusion 221 can be squeezed to elastically deform the seal 30, thereby achieving a good fit between the protrusion 221 and the seal 30. In this case, the seal 30 can be made of an elastic material. In other embodiments, the protrusion 221 can be pierced to tightly engage the seal 30, thereby achieving a good fit between the two. In this case, the seal 30 can be made of a metal material. The specific implementation method can be customized according to actual needs and is not limited here.

[0056] The positive pressure range of the second sealed cavity 100b in the embodiment of the present invention is 5mbar to 15mbar. Specifically, the positive pressure value of the second sealed cavity 100b can be 5mbar, 7mbar, 9mbar, 11mbar, 13mbar, 15mbar, or any value between 5mbar and 15mbar. By controlling the positive pressure range of the second sealed cavity 100b, a certain pressure difference can be formed between the second sealed cavity 100b and the external environment of the sealing device 100, thereby reducing the risk of water vapor from the external environment invading the second sealed cavity 100b, which is beneficial to ensuring the sealing performance of the sealing device 100 and effectively isolating the first sealed cavity 100a from the external environment.

[0057] like Figure 1 As shown, in this embodiment of the present invention, a guide block 21 is provided on the side of the second housing 20 facing the first housing 10. The guide block 21 is inserted into the opening 11. With this arrangement, when the sealing device 100 is assembled, the guide block 21 on the second housing 20 can cooperate with the opening 11 on the first housing 10 to serve as a guide, thereby facilitating the docking of the first and second housings 10, 20.

[0058] Alternatively, as Figure 5 and Figure 6 As shown, a guide surface may be provided at one end of the guide block 21 facing the first shell 10 , and the guide surface may be set as an inclined plane; of course, the guide surface may also be set as an arc surface or other shapes, which are not limited here.

[0059] Furthermore, in some embodiments, by plugging the guide block 21 into the opening 11, the guide block 21 can be used to stop the opening 11 to prevent the seal 30 from passing through the opening 11 into the accommodating space of the first shell 10, thereby preventing the sealing gasket from releasing organic pollutants due to photochemical reactions after entering the first sealed cavity 100a.

[0060] The present invention also proposes a laser sealing method, which is applied to a laser sealing device 100. The specific structure of the laser sealing device 100 is referred to the above embodiment. Figure 7 As shown, the laser sealing method specifically includes the following steps:

[0061] S10, placing the laser into the accommodating space when the ambient pressure value is within a preset positive pressure range;

[0062] S20 , covering the opening with the second shell 20 , and connecting and fixing the first shell 10 and the second shell 20 , thereby forming the first sealed cavity 100 a and the second sealed cavity 100 b , and sealingly connecting the first shell 10 and the second shell 20 .

[0063] It should be noted that, by placing the laser into the accommodating space of the first shell 10 when the ambient air pressure value is within the preset positive pressure range, and connecting and fixing the first shell 10 and the second shell 20, since the air pressure value of the assembly environment is greater than the external environmental air pressure, the air pressure in the first sealed cavity 100a and the second sealed cavity 100b in the assembled sealing device 100 can also be greater than the external environmental air pressure, thereby reducing the risk of water vapor in the external environment invading the second sealed cavity 100b and the first sealed cavity 100a.

[0064] For example, the sealing device 100 can be assembled in a glove box to securely connect the first housing 10 to the second housing 20. The glove box has an internal sealed environment with a positive pressure. The internal sealed environment can be filled with a sealed protective gas or dry air, and the water and oxygen content of the gas can be set to less than 0.1 ppm.

[0065] In some embodiments, the preset positive pressure range of the embodiments of the present invention is 5mbar to 15mbar. Among them, the positive pressure value of the ambient air pressure can be specifically 5mbar, 7mbar, 9mbar, 11mbar, 13mbar, 15mbar, and any value between 5mbar and 15mbar. By controlling the ambient air pressure value within the preset positive pressure range, on the one hand, it can be avoided that the set positive pressure value is too low and it is difficult to ensure the sealing and isolation effect of the sealing device 100. On the other hand, it can be avoided that the set positive pressure value is too high and increases the difficulty of sealing the laser and the packaging cost.

[0066] Furthermore, in some embodiments, the step of “covering the opening with the second shell 20 and connecting and fixing the first shell 10 and the second shell 20 to form the first sealed cavity 100a and the second sealed cavity 100b, and sealingly connecting the first shell 10 and the second shell 20” includes:

[0067] Place a seal 30 around the outer periphery of the opening of the first shell 10, cover the opening with the second shell 20, and arrange the seal 30 between the first shell 10 and the second shell 20;

[0068] The first shell 10 and the second shell 20 are connected and fixed, so that the first shell 10 and the second shell 20 enclose a first sealed cavity 100a, and the sealing member 30 is squeezed or punctured by at least one of the first shell 10 and the second shell 20 to be deformed, thereby forming the second sealed cavity 100b on at least one side of the sealing member 30.

[0069] In this embodiment, at least one of the first shell 10 and the second shell 20 is provided with a protrusion 221, and the seal 30 can be made of an elastic material such as polytetrafluoroethylene, so that the seal 30 is elastically deformed by the protrusion 221 squeezing the seal 30. Alternatively, the seal 30 can be made of a metal material such as aluminum, titanium, or indium, so that the seal 30 is plastically deformed by the protrusion 221 piercing the seal 30. Such a configuration allows, on the one hand, the seal 30 to deform under the action of the protrusion 221, thereby ensuring the connection stability between the seal 30 and the first shell 10 and the second shell 20 and the sealing and isolation effect of the seal 30. On the other hand, the deformation of the seal 30 can form a second sealed cavity 100b on the deformed side of the seal, so that the second sealed cavity 100b can be located in the sealing area at the connection between the first shell 10 and the second shell 20.

[0070] Optionally, in some embodiments, before the step of “when the ambient pressure value is within a preset positive pressure range, placing the laser into the accommodating space”, the method further includes:

[0071] Performing a pre-cleaning process on the laser and the sealing device 100 to be assembled;

[0072] When the ambient pressure value is within the preset positive pressure range, the first shell 10 and the second shell 20 are assembled;

[0073] Performing high and low temperature cycle treatment on the first shell 10 and the second shell 20;

[0074] A secondary cleaning process is performed on the first housing 10 , the second housing 20 and the laser.

[0075] In this embodiment, by pre-cleaning the laser and the sealing device 100 to be assembled, residual oil, burrs, and other pollutants and water vapor can be preliminarily removed. Optionally, in some embodiments, the step of "pre-cleaning the laser and the sealing device 100 to be assembled" includes:

[0076] Cleaning the laser and the sealing device 100 to be assembled;

[0077] The laser and the sealing device 100 to be assembled are baked at high temperature in a low vacuum environment.

[0078] With this arrangement, the laser and the sealing device 100 to be assembled can be cleaned first to remove contaminants such as oil, burrs, etc.; then the laser and the sealing device 100 to be assembled can be baked at high temperature to further remove moisture and contaminants, so that the sealing device 100 and the laser can be kept clean. For example, the high temperature baking time can be configured to be 48 hours or more, and the air pressure range of the low vacuum environment can be configured to be 105 ~10 -1 Pa can be determined specifically according to the type of laser and is not limited here. For example, when the laser wavelength is less than 300 nm, it can be baked at a high temperature for 72 hours or more to ensure the cleaning effect of the laser and the sealing device 100.

[0079] In some embodiments, the first housing 10 may include a housing body with a window, a plurality of pins, and a window piece. The housing body includes a housing space with an opening 11 on one side for accommodating the laser's optical components. The window piece may be integrated with the housing body through welding or gluing; the plurality of pins may be integrated with the housing body through glass sealing; and the second housing 20 may be an integrally formed structural component, which is not limited herein.

[0080] Furthermore, after pre-assembling the sealing device 100, the assembled first and second shells 10, 20 can be subjected to high and low temperature cycling in a temperature cycle chamber, effectively eliminating mechanical stress during device assembly. For example, the sealing device 100 can be subjected to high and low temperature cycling in a temperature cycle chamber, and the duration of the high and low temperature cycling can be configured to be 24 hours or longer. Of course, the technical solution of the present invention is not limited to this, and the various parameters of the high and low temperature cycling can be customized according to the materials of the first and second shells 10, 20, and are not limited here.

[0081] Furthermore, by performing a secondary cleaning process on the first shell 10, the second shell 20, and the laser, moisture and contaminants therein can be further removed, so as to facilitate subsequent assembly of the first shell 10, the second shell 20, and the laser. Optionally, in some embodiments, the step of "performing a secondary cleaning process on the first shell 10, the second shell 20, and the laser" includes:

[0082] The first housing 10, the second housing 20, and the laser are baked at high temperature in a low vacuum environment. For example, the high temperature baking time can be configured to be 48 hours or longer, and the pressure range of the low vacuum environment can be configured to be 105 to 10-1 Pa, which is not limited here.

[0083] Furthermore, the first housing 10 and the second housing 20 can be sealed together by a seal 30. For example, the seal 30 can be placed between the first housing 10 and the second housing 20, and then the second housing 20 can be fixed to the first housing 10 by a plurality of fasteners 40, so that the sealing device 100 can be detachable while also having a good sealing effect.

[0084] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. A sealing device for a laser, characterized in that: include: a first shell, wherein a receiving space with an opening on one side is formed in the first shell; and A second shell, the second shell cover is arranged at the opening and is sealed with the first shell to form a first sealed cavity together with the first shell. A second sealed cavity is also provided at the connection between the first shell and the second shell. The second sealed cavity is annularly arranged on the outer periphery of the first sealed cavity and is respectively isolated from the first sealed cavity and the outside of the sealing device.

2. The laser sealing device according to claim 1, characterized in that: One of the first shell and the second shell is provided with at least one recessed portion, and the other of the first shell and the second shell is provided with at least one raised portion. Each raised portion is arranged opposite to a recessed portion, and a sealing area is formed between the raised portion and the recessed portion. The second sealing cavity is located in the sealing area.

3. The laser sealing device according to claim 2, characterized in that: The sealing device further includes a sealing member, which is disposed between the raised portion and the recessed portion and is sealedly connected to the raised portion and the recessed portion respectively to form the sealing area between the raised portion and the recessed portion.

4. The laser sealing device according to claim 3, characterized in that: One of the raised portions includes two spaced-apart convex blocks, both of which are arranged around the circumference of the first sealing cavity. The sealing member is elastically deformed by being pressed by the two convex blocks, and a second sealing cavity is formed between the two convex blocks.

5. The laser sealing device according to claim 4, characterized in that: One of the recessed portions includes two grooves spaced apart from each other. Both of the grooves are arranged around the circumference of the first sealing cavity. The shape of the grooves matches the shape of the bumps. Each bump is inserted into one of the grooves.

6. The laser sealing device according to claim 4, characterized in that: One of the recessed portions includes a groove, the groove is arranged around the circumference of the first sealing cavity, and a plurality of the protrusions are arranged side by side in one of the grooves.

7. The laser sealing device according to claim 4, characterized in that: The vertical distances between the two protrusions and the sealing member are not equal; And / or, the size of the protrusion gradually converges in a direction toward the recessed portion.

8. The laser sealing device according to any one of claims 1 to 7, characterized in that: A guide block is provided on a side of the second shell facing the first shell, and the guide block is inserted into the opening; And / or, the sealing device further includes a fastener, wherein the fastener passes through a connection between the first shell and the second shell, so that the first shell and the second shell are detachably connected.

9. A laser sealing method, wherein the laser sealing method is applied to the laser sealing device according to any one of claims 1 to 8, characterized in that: The following steps are involved: When the ambient air pressure value is within a preset positive pressure range, placing the laser into the accommodating space; The second shell is covered on the opening, and the first shell is connected and fixed to the second shell, thereby forming the first sealed cavity and the second sealed cavity, and the first shell is sealed and connected to the second shell.

10. The laser sealing method according to claim 9, characterized in that: The following steps are also included: placing a seal around the periphery of the opening of the first housing; The second shell is covered on the opening, and at least one of the first shell and the second shell is pressed or punctured to deform the sealing member, thereby forming the second sealing cavity.

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