Sealing device for a laser and method for sealing the same

Abstract

The application relates to the technical field of sealing devices, and discloses a sealing device of a laser and a sealing method thereof, wherein the sealing device of the laser comprises a first shell and a second shell, an accommodating space with an open side is formed in the first shell; the second shell is arranged on the opening and is sealingly connected with the first shell to form a first sealing cavity together with the first shell; a second sealing cavity is further arranged at the connecting position of the first shell and the second shell, the second sealing cavity is annularly arranged at the outer periphery of the first sealing cavity, and the second sealing cavity is isolated from the first sealing cavity and the outside of the sealing device, respectively. According to the application, the second sealing cavity is arranged at the outer periphery of the first sealing cavity, and the second sealing cavity is arranged between the first sealing cavity and the external environment, so that the risk that the water vapor in the external environment invades the first sealing cavity and affects the working performance of the laser can be effectively reduced, and the sealing and protection effect of the sealing device on the laser is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of sealing devices, in particular to a sealing device of a laser and a sealing method thereof. BACKGROUND

[0002] The optical elements and laser sources in the laser are extremely sensitive to the environment, and the invasion of a small amount of dust or water vapor can lead to performance degradation or even failure. Therefore, it is necessary to effectively isolate the laser from the external environment by a sealing device to ensure the reliability of the laser.

[0003] In the prior art, the sealing of the laser by the sealing device is usually achieved by two technologies. One is to set a sealing ring between the housings of the sealing device to form a sealed connection, and the other is to weld the housings of the sealing device by parallel welding process to achieve a sealed connection.

[0004] However, for the first technology, the sealing ring is prone to aging, hardening or deformation during long-term use, and is prone to performance degradation in high-temperature or low-temperature environments, thereby affecting the sealing effect of the sealing device. For the second technology, small irregularities on the welding surface of the housing or assembly errors may lead to insufficient welding consistency during actual processing, thereby making it difficult to ensure the sealing effect of the sealing device. SUMMARY

[0005] In view of the above deficiencies in the prior art, the present application aims to provide a sealing device of a laser and a sealing method thereof, which aims to improve the sealing and protection effect of the sealing device on the laser.

[0006] To achieve the above-mentioned purpose, the present application provides a sealing device of a laser, comprising:

[0007] a first housing, wherein an accommodation space with an open side is formed in the first housing; and

[0008] a second housing, wherein the second housing is arranged on the opening and is in sealed connection with the first housing to form a first sealed cavity together with the first housing, and a second sealed cavity is arranged at the connection between the first housing and the second housing, the second sealed cavity is arranged around the outer periphery of the first sealed cavity and is isolated from the first sealed cavity and the outside of the sealing device, respectively.

[0009] In an embodiment, one of the first housing and the second housing is provided with at least one recess, and the other of the first housing and the second housing is provided with at least one protrusion, each protrusion is arranged opposite to a recess, a sealing area is formed between the protrusion and the recess, and the second sealed cavity is located in the sealing area.

[0010] In an embodiment, the sealing device further comprises a sealing member arranged between the protruding part and the recessed part and sealingly connected with the protruding part and the recessed part respectively to form the sealing area between the protruding part and the recessed part.

[0011] In an embodiment, one of the protruding parts comprises two protruding blocks arranged at intervals, both of which are annularly arranged at the periphery of the first sealing cavity, and the sealing member is elastically deformed by being pressed by the two protruding blocks, and a second sealing cavity is formed between the two protruding blocks.

[0012] In an embodiment, one of the recessed parts comprises two recessed grooves arranged at intervals, both of which are annularly arranged at the periphery of the first sealing cavity, and the shape of the recessed grooves is matched with the shape of the protruding blocks, and each of the protruding blocks is inserted into one of the recessed grooves.

[0013] In an embodiment, one of the recessed parts comprises one recessed groove annularly arranged at the periphery of the first sealing cavity, and a plurality of protruding blocks are arranged side by side in the recessed groove.

[0014] In an embodiment, the vertical distances between the two protruding blocks and the sealing member are not equal.

[0015] In an embodiment, the size of the protruding blocks gradually converges in the direction towards the recessed part.

[0016] In an embodiment, the second shell is provided with a guide block on the side towards the first shell, and the guide block is inserted into the opening.

[0017] In an embodiment, the sealing device further comprises a fastener penetrating through the connection part of the first shell and the second shell to enable detachable connection of the first shell and the second shell.

[0018] The present application further provides a sealing method of a laser device, which is applied to the sealing device of any one of the preceding embodiments, and the sealing method of the laser device comprises the following steps:

[0019] In the case that the ambient air pressure value is within a preset positive pressure range, the laser device is placed into the accommodating space.

[0020] The first shell is covered on the opening, and the first shell and the second shell are connected and fixed to form the first sealing cavity and the second sealing cavity, and the first shell and the second shell are sealingly connected.

[0021] In an embodiment, the sealing method of the laser device further comprises the following steps:

[0022] placing a sealing member on the outer periphery of the opening of the first shell;

[0023] covering the second shell on the opening, at least one of the first shell and the second shell extruding or puncturing the sealing member, deforming the sealing member to form the second sealed cavity.

[0024] The sealing device for the laser and the sealing method thereof provided by the embodiment of the present application have the beneficial effects that: the first sealed cavity for placing the laser is formed by surrounding between the first shell and the second shell, and the second sealed cavity is arranged at the connecting position of the first shell and the second shell, so that the second sealed cavity can be arranged around the outer periphery of the first sealed cavity and block the connection between the first sealed cavity and the external environment, thereby effectively reducing the risk that the water vapor in the external environment enters the first sealed cavity and affects the working performance of the laser, and improving the sealing protection effect of the sealing device on the laser. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is a structural schematic diagram of the sealing device described in the embodiment of the present application;

[0026] Figure 2 is an exploded view of the sealing device described in the embodiment of the present application;

[0027] Figure 3 is a structural schematic diagram of the second shell of the sealing device described in the embodiment of the present application;

[0028] Figure 4 is a sectional view of the sealing device described in the embodiment of the present application;

[0029] Figure 5 is Figure 4 is a local structure enlarged view of A in FIG. 1;

[0030] Figure 6 is another local structure enlarged view of the sealing device described in the embodiment of the present application;

[0031] Figure 7 is a flow chart of the sealing method for the laser described in the embodiment of the present application.

[0032] In the drawings, 100 is a sealing device; 100a is a first sealed cavity; 100b is a second sealed cavity; 10 is a first shell; 11 is an opening; 12 is a recessed part; 121 is a groove; 20 is a second shell; 21 is a guide block; 22 is a protruding part; 221 is a protruding block; and 30 is a sealing member. DETAILED DESCRIPTION

[0033] The specific embodiments of the present application will be further described in conjunction with the drawings and examples. The following examples are used to illustrate the present application, but not to limit the scope of the present application.

[0034] It should be understood that the terms "front", "back" and the like are used herein to describe various information, but the information should not be limited to these terms, and these terms are only used to distinguish the same type of information from each other. For example, the "front" information can also be referred to as "back" information, and the "back" information can also be referred to as "front" information without departing from the scope of the present application.

[0035] As shown in Figures 1 to 6 A sealing device 100 of a laser according to an embodiment of the present application includes a first housing 10 and a second housing 20. The first housing 10 has a receiving space with a side opening 11. The second housing 20 is arranged at the opening 11 of the first housing 10 and is sealingly connected to the first housing 10 to form a first sealed cavity 100a with the first housing 10. The connection between the first housing 10 and the second housing 20 is further provided with a second sealed cavity 100b. The second sealed cavity 100b is arranged around the outer periphery of the first sealed cavity 100a and is isolated from the first sealed cavity 100a and the outside of the sealing device 100, respectively.

[0036] The first housing 10 has a receiving space with a side opening 11 for placing optical components of the laser. The second housing 20 is arranged at the opening 11 of the first housing 10 to form a first sealed cavity 100a with the first housing 10, so as to realize the packaging of the laser through the first sealed cavity 100a. When the second housing 20 is arranged at the opening 11 of the first housing 10, the opposite surfaces of the first housing 10 and the second housing 20 abut and are sealingly connected. Optionally, the materials of the first housing 10 and the second housing 20 can be oxygen-free copper, aluminum alloy, indium steel, stainless steel, etc., which are not limited herein.

[0037] Further, the connection between the first housing 10 and the second housing 20 is further provided with a second sealed cavity 100b. By arranging the second sealed cavity 100b around the side of the first sealing member 30 and isolating the second sealed cavity 100b from the first sealed cavity 100a and the outside of the sealing device 100, respectively, the second sealed cavity 100b can be isolated between the first sealed cavity 100a and the outside environment, so as to effectively cut off the connection between the first sealed cavity 100a and the outside environment through the second sealed cavity 100b, thereby avoiding the direct entry of water vapor in the outside environment into the first sealed cavity 100a and reducing the gas leakage in the first sealed cavity 100a. Thus, the sealing protection effect of the first sealed cavity 100a can be guaranteed, and the reliability and service life of the laser packaged by the sealing device 100 are improved.

[0038] The second sealing cavity 100b can be filled with a positive pressure dry gas. In this way, the air pressure in the second sealing cavity 100b is greater than the air pressure in the external environment, so as to reduce the risk of water vapor in the external environment invading the second sealing cavity 100b. Optionally, the water and oxygen content in the positive pressure dry gas can be less than 0.1 ppm. The gas can be a sealing protection gas such as pure nitrogen or pure argon, or can be dry air. The specific implementation can be set according to actual needs, and is not limited herein.

[0039] Further, in an available embodiment, the sealing device 100 further comprises a fastener 40 penetrating through the connection between the first shell 10 and the second shell 20, so that the first shell 10 and the second shell 20 are detachably connected. Specifically, the sealing device 100 can be provided with a plurality of fasteners 40 along the circumference thereof, so as to fix the second shell 20 to the first shell 10 by the plurality of fasteners 40. The fastener 40 can be, but is not limited to, a fastening bolt, and the fastener 40 can be distributed on the outer circumferential side of the second sealing cavity 100b. In this way, the detachable connection between the first shell 10 and the second shell 20 can be achieved by the fastener 40, so as to facilitate the maintenance of the laser packaged in the first sealing cavity 100a, and improve the use convenience of the sealing device 100.

[0040] As shown in Figures 2 to 6 One of the first shell 10 and the second shell 20 is provided with at least one recess 12, and the other of the first shell 10 and the second shell 20 is provided with at least one protrusion 22. Each protrusion 22 is arranged opposite to a recess 12, and a sealing area is formed between the protrusion 22 and the recess 12. The second sealing cavity 100b is located in the sealing area.

[0041] The recess 12 can be formed on the side surface of the first shell 10 facing the second shell 20, and the recess 12 is arranged on the outer circumferential side of the opening 11 of the first shell 10. The protrusion 22 is correspondingly arranged outwardly on the side surface of the second shell 20 facing the first shell 10. Alternatively, the protrusion 22 can be arranged outwardly on the side surface of the first shell 10 facing the second shell 20, and the protrusion 22 is arranged on the outer circumferential side of the opening 11 of the first shell 10. The recess 12 is correspondingly formed on the side surface of the second shell 20 facing the first shell 10. The specific implementation is not limited herein. In this way, the second sealing cavity 100b can be arranged between the protrusion 22 and the recess 12, and the second sealing cavity 100b located in the sealing area can be isolated from the first sealing cavity 100a and the external environment, respectively. In addition, the first shell 10 and the second shell 20 can be conveniently butted and matched.

[0042] It should be noted that when the recess 12 and the protrusion 22 are provided with two or more, the adjacent two recesses 12 and the adjacent two protrusions 22 can be arranged at the circumferential side of the first sealing cavity 100a, and each recess 12 corresponds to one protrusion 22, and a second sealing cavity 100b can be arranged between each recess 12 and the sealing area of one protrusion 22. In this way, a plurality of second sealing cavities 100b can be arranged between the first sealing cavity 100a and the external environment, thereby further improving the sealing isolation effect of the sealing device 100.

[0043] As shown in Figure 2 and Figures 4 to 6 The sealing device 100 of the embodiment of the present application further comprises a sealing member 30 arranged between the protrusion 22 and the recess 12 and sealingly connected with the protrusion 22 and the recess 12 respectively, so as to form the sealing area between the protrusion 22 and the recess 12.

[0044] In this way, the sealing member is arranged to be tightly matched with the first shell 10 and the second shell 20, so as to realize effective sealing between the first shell 10 and the second shell 20. Specifically, in some embodiments, the sealing member 30 can be made of an elastic material, such as polytetrafluoroethylene or the like. When the sealing member 30 is arranged between the first shell 10 and the second shell 20, the sealing member 30 can be elastically deformed under the extrusion of the first shell 10 and the second shell 20, so as to fill the matching gap between the first shell 10 and the second shell 20, thereby realizing the sealing connection between the first shell 10 and the second shell 20.

[0045] Of course, the technical solution of the present application is not limited to this, and in other embodiments, the sealing member 30 can also be made of a metal material, such as aluminum, titanium or indium, etc. When the sealing member 30 is arranged between the connecting part of the first shell 10 and the second shell 20, the sealing member 30 can be plastically deformed under the pressure of the first shell 10 and the second shell 20, so as to fill the matching gap between the first shell 10 and the second shell 20, thereby realizing the sealing connection between the first shell 10 and the second shell 20. The specific implementation can be arranged according to actual needs, which is not limited here.

[0046] As shown in Figure 5 and Figure 6 One protrusion 22 of the embodiment of the present application comprises two spacers 221 arranged at intervals, and the two spacers 221 are arranged around the circumferential side of the first sealing cavity 100a. The sealing member 30 is elastically deformed under the pressure of the two spacers 221, and a second sealing cavity 100b is formed between the two spacers 221.

[0047] One of the protrusions 22 includes two protrusions 221 spaced apart. The protrusions 221 are spaced apart from each other, and each protrusion 221 protrudes toward the recess 12 and can abut against the sealing member 30 located in the recess 12. This arrangement allows the side of the sealing member 30 facing the protrusion 22 to be deformed by the pressure of the protrusions 221, so that it can be spaced apart from the surface of the protrusion 22 located between the two adjacent protrusions 221. Thus, a second sealing cavity 100b can be formed by the partial surface of the sealing member 30 facing the protrusion 22, the opposing surfaces of the two adjacent protrusions 221, and the surface of the protrusion 22 located between the adjacent protrusions.

[0048] Furthermore, by filling the first sealing cavity 100a and the second sealing cavity 100b with sealing protective gas or dry air, the risk of moisture from the external environment invading the second sealing cavity 100b can be reduced, thus effectively protecting the laser sealed in the first sealing cavity 100a. Moreover, even if the air pressure in the second sealing cavity 100b gradually decreases as the sealing device 100 is used for a longer period, causing external moisture to begin invading the sealing device 100, the external moisture will first need to slowly invade the second sealing cavity 100b and cannot directly enter the first sealing cavity 100a. Therefore, the second sealing cavity 100b can effectively isolate the first sealing cavity 100a from the external environment, giving the sealing device 100 better sealing performance.

[0049] like Figure 5 As shown, in one feasible embodiment, one of the recesses 12 of the present invention includes a groove 121, the groove 121 being arranged around the periphery of the first sealing cavity 100a, and a plurality of protrusions 221 being arranged side by side in one groove 121.

[0050] The sealing element 30 is disposed within the groove 121, and a plurality of protrusions 221 protrude toward the groove 121 to abut against the sealing element 30 disposed in the groove 121. Optionally, to facilitate the abutment and engagement between the sealing element 30 and the protrusions 221 of the protrusion 22, the sealing element 30 may be partially protruding from the opening of the groove 121.

[0051] like Figure 6 As shown, in another feasible embodiment, one of the recesses 12 of the present invention includes two grooves 121 spaced apart. Both grooves 121 are arranged around the periphery of the first sealing cavity 100a. The shape of the grooves 121 is adapted to the shape of the protrusions 221, and each protrusion 221 is inserted into one of the grooves 121.

[0052] The two protrusions 221 of the protrusion portion 22 are correspondingly matched with the two grooves 121 of the recess portion 12, so that the matching stability of the sealing device 100 is further improved. The shape of the groove 121 and the protrusion 221 is matched, so that the sealing member 30 is pressed by the groove 121 and the protrusion 221, the matching stability between the first shell 10, the second shell 20 and the sealing member 30 of the sealing device 100 is improved, and the sealing effect of the sealing member 30 is ensured.

[0053] As shown in Figures 5 to 6 The vertical distance between each two adjacent protrusions 221 and the sealing member 30 is not equal. In this way, the risk of the sealing member 30 being broken under the pressure of the plurality of protrusions 221 is reduced, so that the reliability of the sealing device 100 is ensured.

[0054] As shown in Figures 5 to 6 The size of the protrusion 221 gradually converges in the direction towards the recess portion 12. In this way, the protrusion 221 and the sealing member 30 are well matched, so that the reliability of the sealing device 100 is ensured. Specifically, in the embodiment, the width size D of the protrusion 221 gradually decreases in the direction towards the recess portion 12, so that the protrusion 221 is in the form of a tooth, and the first shell 10, the second shell 20 and the sealing member 30 are tightly engaged. Of course, the protrusion 221 can also be in other forms, which are not limited herein.

[0055] In some embodiments, the protrusion 221 can be pressed against the sealing member 30 to elastically deform the sealing member 30, so that the protrusion 221 and the sealing member 30 are well matched. In this case, the sealing member 30 can be made of elastic material. In other embodiments, the protrusion 221 can pierce the sealing member 30 to tightly combine the protrusion 221 and the sealing member 30, so that the protrusion 221 and the sealing member 30 are well matched. In this case, the sealing member 30 can be made of metal material. The specific implementation can be set according to actual needs, which is not limited herein.

[0056] The positive pressure range of the second sealed cavity 100b is 5 mbar to 15 mbar. The positive pressure value of the second sealed cavity 100b can be 5 mbar, 7 mbar, 9 mbar, 11 mbar, 13 mbar, 15 mbar, or any value within the range of 5 mbar to 15 mbar. By controlling the positive pressure range of the second sealed cavity 100b, a certain air pressure difference can be formed between the second sealed cavity 100b and the external environment of the sealing device 100, thereby reducing the risk of water vapor from the external environment invading the second sealed cavity 100b, and facilitating the sealing performance of the sealing device 100, and effectively isolating the first sealed cavity 100a from the external environment.

[0057] As shown in Figure 1 , the second housing 20 of the embodiment of the application is provided with a guide block 21 on the side facing the first housing 10, and the guide block 21 is inserted into the opening 11. In this way, when the sealing device 100 is assembled, the guide block 21 on the second housing 20 can cooperate with the opening 11 on the first housing 10 to play a guiding role, so as to facilitate the mutual docking of the first housing 10 and the second housing 20.

[0058] Optionally, as shown in Figure 5 and Figure 6 , one end of the guide block 21 facing the first housing 10 can be provided with a guide surface, which can be an inclined plane; of course, the guide surface can also be an arc surface or other shapes, which are not limited here.

[0059] Further, in some embodiments, by inserting the guide block 21 and the opening 11, the guide block 21 can also be stopped in the opening 11 to prevent the sealing member 30 from entering the accommodation space of the first housing 10 through the opening 11, thereby avoiding the release of organic pollutants due to photochemical reaction after the sealing gasket enters the first sealed cavity 100a.

[0060] The application also provides a sealing method for a laser, which is applied to the sealing device 100 of the laser. The specific structure of the sealing device 100 of the laser is referred to the above embodiments. As shown in Figure 7 , the sealing method for the laser specifically includes the following steps:

[0061] S10, in the case that the environmental air pressure value is within a preset positive pressure range, placing the laser into the accommodation space;

[0062] S20, covering the second housing 20 on the opening, and connecting and fixing the first housing 10 and the second housing 20, so as to form the first sealed cavity 100a and the second sealed cavity 100b, and seal the connection between the first housing 10 and the second housing 20.

[0063] It should be noted that by placing the laser into the accommodating space of the first shell 10 when the environmental pressure value is in the preset positive pressure range, and connecting and fixing the first shell 10 with the second shell 20, since the air pressure value of the assembly environment is greater than the external environmental air pressure, the air pressure in the first sealing cavity 100a and the second sealing cavity 100b in the assembled sealing device 100 can also be greater than the external environmental air pressure, thereby reducing the risk of water vapor in the external environment invading the second sealing cavity 100b and the first sealing cavity 100a.

[0064] Exemplarily, the sealing device 100 can be assembled by using a glove box to realize the connection and fixation of the first shell 10 with the second shell 20. The glove box has an internal sealed environment, and the environmental air pressure of the internal sealed environment is positive pressure. The internal sealed environment can be filled with a sealed protective gas or dry air, and the water and oxygen content in the gas can be set to be less than 0.1 ppm.

[0065] In some embodiments, the preset positive pressure range of the embodiment of the present application is 5 mbar to 15 mbar. The positive pressure value of the environmental air pressure can be specifically 5 mbar, 7 mbar, 9 mbar, 11 mbar, 13 mbar, 15 mbar, or any value between 5 mbar and 15 mbar. By controlling the environmental air pressure value in the preset positive pressure range, on the one hand, it can avoid that the set positive pressure value is too low to guarantee the sealing isolation effect of the sealing device 100, and on the other hand, it can avoid that the set positive pressure value is too high to increase the operation difficulty and packaging cost of the laser sealing.

[0066] Further, in some embodiments, the step of "covering the second shell 20 on the opening, and connecting and fixing the first shell 10 with the second shell 20 to form the first sealing cavity 100a and the second sealing cavity 100b, and sealingly connecting the first shell 10 with the second shell 20" comprises:

[0067] placing a sealing member 30 on the outer periphery of the opening of the first shell 10, covering the second shell 20 on the opening, and arranging the sealing member 30 between the first shell 10 and the second shell 20;

[0068] connecting and fixing the first shell 10 with the second shell 20, so that the first shell 10 and the second shell 20 are enclosed to form the first sealing cavity 100a, and the sealing member 30 is deformed by being extruded or pierced by at least one of the first shell 10 and the second shell 20, so that the second sealing cavity 100b is formed on at least one side of the sealing member 30.

[0069] In the embodiment, at least one of the first shell 10 and the second shell 20 is provided with the protrusion 221, and the sealing member 30 can be made of an elastic material such as polytetrafluoroethylene. The sealing member 30 can be elastically deformed by being extruded by the protrusion 221, or the sealing member 30 can be made of a metal material such as aluminum, titanium, or indium. The sealing member 30 can be plastically deformed by being pierced by the protrusion 221. In this way, on the one hand, the sealing member 30 can be deformed under the action of the protrusion 221, thereby ensuring the stability of the connection between the sealing member 30 and the first shell 10 and the second shell 20 and the sealing isolation effect of the sealing member 30. On the other hand, the second sealing cavity 100b can be formed on the side of the deformation of the sealing member 30, so that the second sealing cavity 100b is located in the sealing area at the connection between the first shell 10 and the second shell 20.

[0070] Optionally, in some embodiments, before the step of "placing the laser into the accommodating space in the case that the environmental air pressure value is in the preset positive pressure range", the method further comprises:

[0071] performing a pre-cleaning treatment on the laser and the sealing device 100 to be assembled;

[0072] assembling the first shell 10 and the second shell 20 in the case that the environmental air pressure value is in the preset positive pressure range;

[0073] performing a high-low temperature cycle treatment on the first shell 10 and the second shell 20;

[0074] performing a secondary cleaning treatment on the first shell 10, the second shell 20, and the laser.

[0075] In the embodiment, the pre-cleaning treatment on the laser and the sealing device 100 to be assembled can preliminarily remove the contaminants such as oil stains and burrs and moisture. Optionally, in some embodiments, the step of "performing a pre-cleaning treatment on the laser and the sealing device 100 to be assembled" comprises:

[0076] cleaning the laser and the sealing device 100 to be assembled;

[0077] performing a high-temperature baking on the laser and the sealing device 100 to be assembled in a low-vacuum environment.

[0078] In this way, the laser and the sealing device 100 to be assembled can be cleaned first to remove the contaminants such as oil stains and burrs, and then the laser and the sealing device 100 to be assembled can be subjected to high-temperature baking to further remove moisture and contaminants, so that the sealing device 100 and the laser remain clean. For example, the duration of high-temperature baking can be configured to be 48 hours or more, and the air pressure range of the low-vacuum environment can be configured to be 105 ~ 10 -1 Pa, which can be determined according to the type of the laser, and is not limited herein. For example, when the wavelength of the laser is less than 300 nm, the laser can be subjected to high-temperature baking for 72 hours or more to ensure the cleaning effect on the laser and the sealing device 100.

[0079] In some embodiments, the first shell 10 can include a shell body provided with a window, a plurality of pins, and a window sheet, the shell body forming an accommodating space with an open side 11 for placing the optical components of the laser. The window sheet can be combined with the shell body by welding or gluing process; the plurality of pins can be combined with the shell body by glass sealing process; and the second shell 20 can be an integrally formed structure, which is not limited herein.

[0080] Further, after pre-assembly of the sealing device 100, the first shell 10 and the second shell 20 obtained by assembly can be subjected to high-low temperature cycle treatment by using a temperature cycle box, which can effectively eliminate the mechanical stress during device assembly. For example, the sealing device 100 can be subjected to high-low temperature cycle treatment by using a temperature cycle box, and the duration of the high-low temperature cycle treatment can be configured to be 24 hours or more. Of course, the technical solution of the present application is not limited to this, and each parameter of the high-low temperature cycle treatment can be set according to the material of the first shell 10 and the second shell 20, which is not limited herein.

[0081] Further, by performing secondary cleaning treatment on the first shell 10, the second shell 20, and the laser, water vapor and pollutants can be further removed, so as to facilitate subsequent assembly of the first shell 10, the second shell 20, and the laser. Optionally, in some embodiments, the step of "performing secondary cleaning treatment on the first shell 10, the second shell 20, and the laser" includes:

[0082] high-temperature baking of the first shell 10, the second shell 20, and the laser in a low-vacuum environment. For example, the duration of the high-temperature baking can be configured to be 48 hours or more, and the pressure range of the low-vacuum environment can be configured to be 105-10-1Pa, which is not limited herein.

[0083] Further, the first shell 10 and the second shell 20 can be sealed and connected by the sealing member 30. For example, the sealing member 30 can be placed between the first shell 10 and the second shell 20, and then the second shell 20 can be fixed on the first shell 10 by a plurality of fasteners 40, so that the sealing device 100 has good sealing effect while being detachable.

[0084] The above merely describes the preferred embodiments of the present application, and it should be pointed out that, for those skilled in the art, several improvements and replacements can be made without departing from the technical principles of the present application, and these improvements and replacements should also be considered as the protection scope of the present application.

Claims

1. A sealing device for a laser, characterized in that The sealing device comprises: a first shell, in which a containing space with a side opening is formed; and a second shell, which covers the opening and is sealingly connected with the first shell to form a first sealed cavity together with the first shell, and a second sealed cavity is also formed at the connection between the first shell and the second shell, which is annularly arranged outside the first sealed cavity and is isolated from the first sealed cavity and the outside of the sealing device respectively; one of the first shell and the second shell is provided with at least one recess, and the other of the first shell and the second shell is provided with at least one protrusion, each of the protrusions is arranged opposite to one of the recesses, a sealing area is formed between the protrusion and the recess, and the second sealed cavity is located in the sealing area; the sealing device further comprises a sealing member, which is arranged between the protrusion and the recess and is sealingly connected with the protrusion and the recess respectively to form the sealing area between the protrusion and the recess; one of the protrusions comprises two protruding blocks arranged at intervals, and the two protruding blocks are annularly arranged on the side of the first sealed cavity, the sealing member is elastically deformed by being pressed by the two protruding blocks, and a second sealed cavity is formed between the two protruding blocks.

2. The laser-sealing device of claim 1, wherein One of the recesses comprises two recesses arranged at intervals, and the two recesses are annularly arranged on the side of the first sealed cavity, the shape of the recesses is matched with the shape of the protruding blocks, and each of the protruding blocks is inserted into one of the recesses.

3. The laser-sealing apparatus of claim 1, wherein One of the recesses comprises one recess, which is annularly arranged on the side of the first sealed cavity, and a plurality of protruding blocks are arranged side by side in the recess.

4. The laser-sealing apparatus of claim 1, wherein The vertical distance between the two protruding blocks and the sealing member is not equal; and / or, the size of the protruding blocks gradually converges in the direction towards the recess.

5. The sealing arrangement for a laser as claimed in any one of claims 1 to 4, characterized in that The second shell is provided with a guide block on the side towards the first shell, and the guide block is inserted into the opening; and / or, the sealing device further comprises a fastener, which passes through the connection between the first shell and the second shell, so that the first shell and the second shell can be detachably connected.

6. A sealing method of a laser, the sealing method of a laser being applied to the sealing device of a laser according to any one of claims 1 to 5, characterized by, The sealing device comprises the following steps: when the environmental air pressure value is in a preset positive pressure range, the laser is placed in the containing space; the second shell is covered on the opening, and the first shell and the second shell are connected and fixed, so as to form the first sealed cavity and the second sealed cavity, and the first shell and the second shell are sealingly connected.

7. The method of sealing a laser as defined in claim 6, wherein, The sealing device further comprises the following steps: a sealing member is placed on the outer periphery of the opening of the first shell; the second shell is covered on the opening, at least one of the first shell and the second shell extrudes or pierces the sealing member, the sealing member is deformed to form the second sealed cavity.

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