Optical element driving device and distance measuring system

Abstract

An optical element drive device (50) for a distance measurement system, which can be arranged adjacent to a light receiving device, is provided with a drive unit (DM) comprising a magnetic field generating member (5) and a coil (9). The fixed-side member (FB) has an outer portion disposed on the light-receiving device side. The drive unit (DM) is disposed at a position farther from the outside than a portion of the through portion (2K) where the optical element (OE) is disposed. The first coil (9A) has a first extension portion (9AE) and a second extension portion (9AP) extending along a first extension direction (EL1), and the second coil (9B) has a third extension portion (9BE) and a fourth extension portion (9BP) extending along a second extension direction (EL2). The first extension direction EL1 and the second extension direction EL2 are substantially orthogonal in a plan view in the vertical direction.

Description

Technical Field

[0001] The invention relates to an optical element driving device and a distance measuring system. Background Art

[0002] Conventionally, there are known distance measurement systems that measure the distance to a subject by irradiating light from multiple light-emitting elements in a light-emitting device toward multiple distance measurement points on the subject (see Patent Document 1). This distance measurement system is configured such that a light-receiving device and a light-emitting device are arranged adjacent to each other in the Y-axis direction in an XY plane perpendicular to the direction toward the subject (Z-axis direction), and an optical system (optical element) including a collimating lens and a diffractive optical element is movable in the X-axis direction to increase the number of distance measurement points. Specifically, this distance measurement system achieves movement of the optical element in the X-axis direction by arranging a pair of movable portions (a coil and a permanent magnet) so as to sandwich the optical element in the X-axis direction. Furthermore, by not arranging a movable portion between the light-receiving device and the light-emitting device in the Y-axis direction, the distance (baseline length) between the central axis of the light-receiving device and the central axis of the light-emitting device is shortened.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: International Publication No. 2022 / 085381 Summary of the Invention

[0006] Technical problem to be solved by the invention

[0007] However, this distance measurement system cannot move the optical element in the Y-axis direction. As mentioned above, this is because, in order to avoid increasing the distance between the light-emitting device (optical element) and the light-receiving device, this distance measurement system uses a single-axis drive that only moves the optical element in the X-axis direction, rather than a dual-axis drive that can move the optical element in both the X-axis and Y-axis directions.

[0008] Therefore, it is desirable to provide an optical element driving device for a distance measuring system having a structure capable of suppressing an increase in the distance between an optical element in a light emitting device and a light receiving device while adopting biaxial driving.

[0009] Means for solving technical problems

[0010] The optical element driving device of an embodiment of the present invention comprises: a fixed side component, which includes a base component; an optical element holding component, which has a through-hole penetrating in the vertical direction on which the optical element can be arranged, and is opposed to the base component in the vertical direction; a supporting component, which supports the optical element holding component so as to be movable in a direction perpendicular to the vertical direction; and a driving component, which moves the optical element holding component in the direction perpendicular to the vertical direction and is composed of at least a magnetic field generating component and a coil. When viewed from above in the vertical direction, in an optical element driving device for a ranging system that can be arranged adjacent to a light receiving device, the fixed side component has an outer side portion arranged on the light receiving device side, the driving component is arranged at a position farther away from the outer side portion than a portion of the through-hole on which the optical element is arranged, and the magnetic field generating component has a magnetic field generating component provided on the movable side component and the optical element holding component. The first magnetic field generating component and the second magnetic field generating component are on one of the fixed side components, and the coil has a first coil and a second coil arranged on the movable side component and the other component of the fixed side component. The first coil is opposite to the first magnetic field generating component in the up-down direction, and the second coil is opposite to the second magnetic field generating component in the up-down direction. The first coil is constructed to have a first coil axis extending in the up-down direction, and has a first extension part and a second extension part that are arranged opposite to each other with the first coil axis clamped and extend in a manner along the first extension direction. The second coil is constructed to have a second coil axis extending in the up-down direction, and has a third extension part and a fourth extension part that are arranged opposite to each other with the second coil axis clamped and extend in a manner along the second extension direction. When viewed from above along the up-down direction, the first extension direction is approximately orthogonal to the second extension direction.

[0011] Effects of the Invention

[0012] The above-mentioned optical element driving device can suppress the increase in the distance between the optical element arranged in the optical element holding member and the light receiving device while adopting biaxial driving. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a stereogram of the ranging system.

[0014] Figure 2 It is a cross-sectional view of the ranging system.

[0015] Figure 3 It is a perspective view of the light emitting device.

[0016] Figure 4 This is an exploded perspective view of the lower part.

[0017] Figure 5 This is a bottom view of the optical element holding component.

[0018] Figure 6 This is a top view of the base assembly.

[0019] Figure 7 This is an exploded perspective view of the fixed side component.

[0020] Figure 8 It is a three-view diagram of the magnetic system.

[0021] Figure 9 This is a perspective view of the optical element holding component and the beam component.

[0022] Figure 10 It is a side view of the optical element holding component and the beam component.

[0023] Figure 11 is a top view of the light emitting device.

[0024] Figure 12 It is a front view of the light emitting device.

[0025] Figure 13 It is a perspective view of another structural example of the light emitting device.

[0026] Figure 14 It is composed Figure 13 An exploded perspective view of the lower part of the light-emitting device. DETAILED DESCRIPTION

[0027] Hereinafter, a distance measuring system RS according to an embodiment of the present invention will be described with reference to the drawings. Figure 1 1 is a perspective view of a distance measuring system RS including a light emitting device 100 , a light receiving device 200 , a substrate 300 , and a control device CTR.

[0028] exist Figure 1 In , X1 represents one direction of the X axis constituting the three-dimensional orthogonal coordinate system, and X2 represents the other direction of the X axis. In addition, Y1 represents one direction of the Y axis constituting the three-dimensional orthogonal coordinate system, and Y2 represents the other direction of the Y axis. Similarly, Z1 represents one direction of the Z axis constituting the three-dimensional orthogonal coordinate system, and Z2 represents the other direction of the Z axis. Figure 1 In the figure, the X1 side of the ranging system RS corresponds to the front side (front side) of the ranging system RS, and the X2 side of the ranging system RS corresponds to the rear side (back side) of the ranging system RS. Furthermore, the Y1 side of the ranging system RS corresponds to the left side of the ranging system RS, and the Y2 side of the ranging system RS corresponds to the right side of the ranging system RS. Furthermore, the Z1 side of the ranging system RS corresponds to the top side of the ranging system RS, and the Z2 side of the ranging system RS corresponds to the bottom side of the ranging system RS. This also applies to the other figures.

[0029] Figure 2is a cross-sectional view of the ranging system RS, showing the Figure 1 The single-dot chain line L1 is a cross section of the ranging system RS in an imaginary plane parallel to the XZ plane.

[0030] In the illustrated example, the ranging system RS is configured to emit light from a light-emitting device 100 toward an illuminated object, and receive light reflected from the illuminated object at a light-receiving device 200. This allows calculation of the distance between the ranging system RS and each of multiple illuminated points on the illuminated object based on the time of flight (ToF) of light between the time of emission and the time of reception. Hereinafter, the function of calculating the distance between the ranging system RS and each of multiple illuminated points on the illuminated object, implemented by the ranging system RS, is also referred to as the distance measurement function.

[0031] Specifically, the light-emitting device 100 includes a light-emitting element LE, an optical element OE, and an optical element driving device 50. The light-emitting element LE is, for example, an element having a plurality of light-emitting bodies arranged in a two-dimensional array on a substrate 300. In the example shown in the figure, the light-emitting element LE has a VCSEL (Vertical Cavity Surface Emitting Laser) structure, which is configured to generate laser light. The light generated by the light-emitting element LE is, for example, visible light or infrared light. The optical element OE is an element supported so as to be able to move in any direction on an imaginary plane parallel to the XY plane. In the example shown in the figure, the optical element OE is a combination of a lens body and a diffraction optical element. The lens body is, for example, a collimating lens. In addition, the optical element OE may also be a lens body or a diffraction optical element.

[0032] The light receiving device 200 includes a lens unit LU and an imaging element IS. In the illustrated example, the lens unit LU includes multiple lenses that focus light reflected from the illuminated object. Each of these lenses may be covered with an anti-reflection film to prevent light reflection. This anti-reflection film may also function as a BPF (bandpass filter), transmitting light of the same wavelength as the light emitted from the light emitting device 100. Specifically, the imaging element IS is, for example, a CCD image sensor or a CMOS image sensor.

[0033] The control device CTR is a device for controlling the various actions of the ranging system RS. In the example shown in the figure, the control device CTR is a microcomputer having a processor and a memory. Specifically, the control device CTR is configured to be able to control the distance measurement function implemented by the ranging system RS. In addition, the control device CTR controls the action of the light-emitting device 100, or measures (calculates) the distance between the ranging system RS and the irradiated object using an image based on the reflected light detected by the imaging element IS of the light-receiving device 200. The distance measurement function of this embodiment is implemented by the above-mentioned ToF method, but it can also be implemented by other methods. In addition, the control device CTR can also be assembled in either the light-emitting device 100 or the light-receiving device 200.

[0034] Next, refer to Figure 3 , an optical element driving device 50 involved in an embodiment of the present disclosure is described. Figure 3 1 is a perspective view of a light emitting device 100 including an optical element driving device 50. Specifically, Figure 3 The upper figure is a perspective view of the light emitting device 100 including the optical element driving device 50 composed of the cover member 4 and the lower member LB. Figure 3 The lower figure is an exploded perspective view of the light emitting device 100, showing a state where the cover member 4 and the optical element OE are separated from the lower member LB. Figure 4 It is an exploded perspective view of the lower member LB, showing a state in which the movable member MB is separated from the fixed member FB. Figure 5 It is a bottom view of the optical element holding member 2 constituting the movable-side member MB. Figure 6 It is a plan view of the base member 18 constituting the fixed-side member FB. Figure 7 It is an exploded perspective view of the fixed-side member FB from which the cover member 4 is removed.

[0035] The optical element driving device 50 is a device for moving the optical element OE on a virtual plane parallel to the XY plane. Figure 3 In the figure, for the sake of clarity, the optical element OE is shown as having a substantially rectangular parallelepiped shape, but may also have other shapes such as a cylindrical shape.

[0036] Specifically, if Figure 3 As shown, the optical element driving device 50 is configured to include a lower member LB and a cover member 4 as a part of a fixed member FB.

[0037] The cover member 4 is configured to cover the upper portion of the lower member LB. In the illustrated example, the cover member 4 is manufactured by punching and drawing a plate made of a non-magnetic metal such as aluminum. Since it is made of a non-magnetic metal, the cover member 4 does not adversely affect the electromagnetic drive unit DM (described later).

[0038] In addition, if Figure 3 As shown in the figure below, the cover part 4 has a rectangular cylindrical shape with a cover that defines a storage portion 4S. Specifically, the cover part 4 has a generally rectangular cylindrical outer wall portion 4A and a generally rectangular flat plate-shaped top plate portion 4B provided in a manner continuous with the upper end (end on the Z1 side) of the outer wall portion 4A. A generally rectangular through hole 4K is formed in the top plate portion 4B. The outer wall portion 4A includes a first side plate portion 4A1 to a fourth side plate portion 4A4. The first side plate portion 4A1 and the third side plate portion 4A3 are opposed to each other, and the second side plate portion 4A2 and the fourth side plate portion 4A4 are opposed to each other. In addition, the second side plate portion 4A2 and the fourth side plate portion 4A4 extend perpendicularly to the first side plate portion 4A1 and the third side plate portion 4A3. In addition, as shown Figure 3 As shown in the upper drawing of FIG. 1 , the cover member 4 is bonded to the base member 18 by an adhesive and constitutes the frame body HS together with the base member 18 .

[0039] like Figure 4 As shown, the lower part LB includes the coil 9 as part of the fixed part FB, the magnetic sensor 10, the base part 18, the beam part 19, and the movable part MB. The movable part MB includes the optical element holding part 2, the magnetic field generating part 5, and the detection magnet 6.

[0040] The coil 9 is a component constituting the driving unit DM. Figure 4 In the example shown, the coil 9 is a wound coil including a first coil 9A and a second coil 9B. The first coil 9A has a first coil axis 9AX extending in the Z-axis direction, and the second coil 9B has a second coil axis 9BX extending in the Z-axis direction. The wire material constituting the coil 9 is subjected to an insulating coating. Figure 4 , for the sake of clarity, the detailed illustration of the wire material constituting the coil 9 is omitted. The same applies to the other figures including the coil 9. In addition, the coil 9 can be a laminated type or a thin film type. That is, the coil 9 can also be a coil formed by a pattern of a wiring substrate. In addition, in the example shown in the figure, the coil 9 is fixed to the base member 18 by an adhesive, but it can also be installed on a wiring substrate such as a flexible wiring substrate, which is fixed to the base member 18 by an adhesive or the like.

[0041] In addition, the coil 9 is configured to have an extension portion extending in a straight line. Figure 4 、 Figure 6 as well as Figure 7As shown, the first coil 9A is constructed to have a first extension portion 9AE and a second extension portion 9AP extending in a straight line along the first extension direction EL1 indicated by the single-dot chain line. In addition, the second coil 9B is constructed to have a third extension portion 9BE and a fourth extension portion 9BP extending in a straight line along the second extension direction EL2 indicated by the single-dot chain line. In the example shown in the figure, the first extension portion 9AE constitutes the outer portion of the first coil 9A, and the second extension portion 9AP constitutes the inner portion of the first coil 9A. Similarly, the third extension portion 9BE constitutes the outer portion of the second coil 9B, and the fourth extension portion 9BP constitutes the inner portion of the second coil 9B. In addition, "outside" refers to the side away from the center of the optical element driving device 50, and "inside" refers to the side close to the center of the optical element driving device 50. The same applies to the following description.

[0042] In the example shown in the figure, the first coil 9A is configured such that the first extension direction EL1 is inclined 45 degrees relative to the X-axis when viewed from above along the vertical direction. Furthermore, the second coil 9B is configured such that the second extension direction EL2 is perpendicular to the first extension direction EL1 when viewed from above along the vertical direction. Specifically, Figure 6 As shown, the first coil 9A is arranged so that the first extension portion 9AE faces the first corner portion 18C1 of the base member 18 , and the second coil 9B is arranged so that the third extension portion 9BE faces the second corner portion 18C2 of the base member 18 .

[0043] The driving unit DM is configured to move the optical element OE in a direction perpendicular to the optical axis direction (Z-axis direction). Figure 7 As shown, the driving part DM includes a first driving part DM1 that moves the optical element OE along a first driving direction MD1 perpendicular to the first extending direction EL1 , and a second driving part DM2 that moves the optical element OE along a second driving direction MD2 perpendicular to the second extending direction EL2 .

[0044] Specifically, if Figure 4 As shown, the first driving unit DM1 includes a first coil 9A provided on the base member 18 and a magnetic field generating unit 5 (first magnetic field generating unit 5A) spaced apart from the first coil 9A in the Z-axis direction. The second driving unit DM2 includes a second coil 9B provided on the base member 18 and a magnetic field generating unit 5 (second magnetic field generating unit 5B) spaced apart from the second coil 9B in the Z-axis direction.

[0045] In addition, if Figure 1 and Figure 2As shown, the optical element driving device 50 having a substantially rectangular parallelepiped shape is mounted on a substrate 300. Furthermore, the coil 9 is connected to a current supply source (current supply circuit) via the substrate 300. When current flows through the coil 9, the driving unit DM generates an electromagnetic force in a direction parallel to the XY plane.

[0046] The magnetic field generating component 5 is a component that constitutes the driving unit DM together with the coil 9. Specifically, the magnetic field generating component 5 is a component that is arranged in a manner opposite to the coil 9 in the up and down directions, and includes a first magnetic field generating component 5A arranged in a manner opposite to the first coil 9A and a second magnetic field generating component 5B arranged in a manner opposite to the second coil 9B. In the example shown in the figure, the first magnetic field generating component 5A is a permanent magnet magnetized into two poles along the first driving direction MD1, and the second magnetic field generating component 5B is a permanent magnet magnetized into two poles along the second driving direction MD2. Specifically, as Figure 4 As shown in FIG. 1 , the outer portion of the first magnetic field generating component 5A is magnetized to the N pole, and the inner portion is magnetized to the S pole. Similarly, the outer portion of the second magnetic field generating component 5B is magnetized to the N pole, and the inner portion is magnetized to the S pole. Figure 4 In the figure, for ease of explanation, the portion magnetized to the north pole is represented by a cross pattern, and the portion magnetized to the south pole is represented by a dot pattern. The same applies to the other figures including the magnetic field generating component 5. However, the first magnetic field generating component 5A may also be a structure composed of two permanent magnets magnetized to two poles in the vertical direction (Z-axis direction) arranged along the first driving direction MD1, or a permanent magnet with four poles. The same applies to the second magnetic field generating component 5B.

[0047] The detection magnet 6 is used to detect the displacement of the optical element OE. In the example shown in the figure, the detection magnet 6 includes a first detection magnet 6A for detecting the displacement of the optical element OE in the first driving direction MD1, and a second detection magnet 6B for detecting the displacement of the optical element OE in the second driving direction MD2. In the example shown in the figure, the first detection magnet 6A is a permanent magnet magnetized into two poles along the first driving direction MD1, and the second detection magnet 6B is a permanent magnet magnetized into two poles along the second driving direction MD2. Specifically, as Figure 4 As shown in FIG, the outer portion of the first detection magnet 6A is magnetized to the N pole, and the inner portion is magnetized to the S pole. Similarly, the outer portion of the second detection magnet 6B is magnetized to the N pole, and the inner portion is magnetized to the S pole. Figure 4 In order to facilitate the explanation, the portion magnetized to the N pole is indicated by a cross pattern, and the portion magnetized to the S pole is indicated by a dot pattern. The same applies to the other figures including the detection magnet 6.

[0048] The magnetic sensor 10 detects the displacement of the movable member MB (optical element OE) by detecting the magnetism generated by the detection magnet 6 attached to the movable member MB. In the illustrated example, the magnetic sensor 10 includes a first magnetic sensor 10A, which detects the displacement of the movable member MB (optical element OE) in a first driving direction MD1 by detecting the magnetism generated by the first detection magnet 6A attached to the movable member MB; and a second magnetic sensor 10B, which detects the displacement of the movable member MB (optical element OE) in a second driving direction MD2 by detecting the magnetism generated by the second detection magnet 6B attached to the movable member MB.

[0049] In the illustrated example, the magnetic sensor 10 is comprised of a Hall element. By measuring the Hall element's output voltage, which changes depending on the magnitude of the magnetic field applied to the Hall element by the detection magnet 6, the position of the movable member MB, including the detection magnet 6, can be detected. However, the magnetic sensor 10 may also be configured to detect the position of the optical element OE using a magnetoresistive element such as a giant magnetoresistive effect (GMR) element, a semiconductor magnetoresistive (SMR) element, an anisotropic magnetoresistive (AMR) element, or a tunnel magnetoresistive (TMR) element.

[0050] The optical element holding component 2 is a component for holding the optical element OE. In this embodiment, the optical element holding component 2 is configured to hold the optical element OE, the magnetic field generating component 5, and the detection magnet 6. In the example shown in the figure, the optical element holding component 2 is formed by injection molding a synthetic resin such as liquid crystal polymer (LCP). In addition, as Figure 4 As shown, the optical element holding member 2 includes a through portion 2K formed so as to extend parallel to the Z axis. The optical element OE is fixed to the inner peripheral surface of the through portion 2K with an adhesive. Furthermore, the through portion 2K may not be a through hole (a structure defining a space surrounded by walls on the front, back, left, and right sides) as shown in the figure, but may be a cutout (for example, a structure defining an open space by omitting one of the walls on the front, back, left, and right sides).

[0051] In addition, if Figure 4 As shown, a cylindrical housing portion 2Q with a bottom that is recessed in the Z2 direction and a gravity center adjustment portion 2T with a triangular prism shape with a bottom that is recessed in the Z2 direction are provided on the end face of the upper side (Z1 side) of the optical element holding component 2. The housing portion 2Q is a portion for accommodating a vibration-damping material DP, which constitutes a vibration-damping mechanism for suppressing the vibration of the optical element holding component 2. In the example shown in the figure, the vibration-damping material DP is a gel-like component of the ultraviolet curing type. Figure 4 In the embodiment, for the sake of clarity, the vibration damping material DP contained in the housing 2Q has a cross pattern. The center of gravity adjustment portion 2T is based on the center of gravity CG (refer to FIG. 1 ) of the movable side member MB to which the optical element OE is mounted. Figure 11 ) is located within the housing portion 2Q and is used to adjust the weight balance of the optical element holding member 2. In the illustrated example, the center of gravity adjustment portion 2T is configured to define a space in the shape of a triangular prism, but it may also be configured to define a space in another shape, such as a cylindrical or prism shape. Furthermore, the center of gravity adjustment portion 2T may be a through-hole or cutout, or a protrusion protruding from the surface of the optical element holding member 2. Furthermore, the center of gravity adjustment portion 2T may be omitted.

[0052] Here, refer to Figure 5 The optical element holding member 2 will be described in detail. Figure 5 : is a bottom view of the optical element holding component 2. Specifically, Figure 5 The upper figure is a bottom view of the optical element holding component 2 before the optical element OE, the magnetic field generating component 5, the detection magnet 6 and the suspension wire SW are installed. Figure 5 The lower figure is a bottom view of the optical element holding component 2 after the magnetic field generating component 5, the detection magnet 6 and the suspension wire SW are installed.

[0053] In the illustrated example, the optical element holding component 2 is a roughly rectangular ring-shaped frame. The four sides 2E that constitute the frame include a first side 2E1 to a fourth side 2E4. Moreover, there is a corner 2C between each of the four sides 2E, and the corner 2C includes a first corner 2C1 to a fourth corner 2C4. Specifically, there is a first corner 2C1 between the first side 2E1 and the fourth side 2E4, a second corner 2C2 between the first side 2E1 and the second side 2E2, a third corner 2C3 between the second side 2E2 and the third side 2E3, and a fourth corner 2C4 between the third side 2E3 and the fourth side 2E4. In addition, grooves 2G (first groove 2G1 to fourth groove 2G4) for holding the metal suspension wires SW (first wire SW1 to fourth wire SW4) are respectively formed at the four corners 2C (first corner 2C1 to fourth corner 2C4).

[0054] The suspension wires SW are an example of an elastic support member, configured to enable the movable side member MB (optical element holding member 2) to move relative to the fixed side member FB (base member 18) in the XY plane. In the illustrated example, the suspension wires SW include first to fourth wires SW1 to SW4. The upper end of the first wire SW1 is fixed to the optical element holding member 2 with adhesive AD1 while being inserted through the first groove 2G1. Similarly, the upper end of the second wire SW2 is fixed to the optical element holding member 2 with adhesive AD1 while being inserted through the second groove 2G2. The upper end of the third wire SW3 is fixed to the optical element holding member 2 with adhesive AD1 while being inserted through the third groove 2G3. The upper end of the fourth wire SW4 is fixed to the optical element holding member 2 with adhesive AD1 while being inserted through the fourth groove 2G4. Alternatively, the upper ends of the suspension wires SW may be fixed to a metal plate fixed to the upper surface of the synthetic resin optical element holding member 2 with adhesive or the like using solder or adhesive.

[0055] like Figure 5 As shown in the figure above, a receiving portion 2R is provided on the end surface of the lower side (Z2 side) of the optical element holding component 2, which is recessed in the Z1 direction. Figure 5 As shown in the figure below, the magnetic field generating component 5 is housed in the housing portion 2R. The magnetic field generating component 5 is fixed to the optical element holding component 2 using an adhesive. In the example shown, the housing portion 2R is configured to accommodate the first magnetic field generating component 5A and the second magnetic field generating component 5B, but it can also be separated into a portion for accommodating the first magnetic field generating component 5A and a portion for accommodating the second magnetic field generating component 5B. In other words, the housing portion 2R can also be composed of two recessed portions. In addition, the housing portion 2R can be open not only on the lower side, but also on the side, and can also be formed to pass through the optical element holding component 2.

[0056] In addition, if Figure 5 As shown in the figure above, a receiving portion 2S is provided on the end surface of the lower side (Z2 side) of the optical element holding component 2, which is recessed in the Z1 direction. Figure 5 As shown in the figure below, the housing portion 2S houses the detection magnet 6. Specifically, the housing portion 2S includes a first housing portion 2S1 that houses the first detection magnet 6A and a second housing portion 2S2 that houses the second detection magnet 6B. Furthermore, the detection magnet 6 is secured to the optical element holding member 2 with an adhesive.

[0057] The base member 18 is configured to hold the coil 9 and the magnetic sensor 10. In the example shown in the figure, the base member 18 is formed by injection molding a synthetic resin such as a liquid crystal polymer (LCP). Figure 4As shown, the base member 18 includes a through portion 18K formed to correspond to the through portion 2K of the optical element holding member 2 and extending parallel to the Z axis. In addition, the through portion 18K, like the through portion 2K, may be not only a through hole as shown but also a notch.

[0058] In addition, if Figure 5 As shown in the figure below, a pair of stoppers ST, projecting in the X2 direction, are provided on the rear (X2-side) end surface of the optical element holding member 2. The stoppers ST are used to limit the amount of movement of the optical element holding member 2 in the X2 direction. Specifically, the stoppers ST are configured to contact the inner surface of the third side plate 4A3 of the cover member 4, which serves as the fixed-side member FB, when the movable member MB (optical element holding member 2) moves in the X2 direction relative to the fixed-side member FB (base member 18), thereby preventing the movable member MB (optical element holding member 2) from further moving in the X2 direction.

[0059] Next, refer to Figure 6 , the details of the base component 18 are described. Figure 6 18 is a top view of the base member 18. Specifically, Figure 6 The upper figure is a top view of the base member 18 before the coil 9, the magnetic sensor 10 and the suspension wire SW are installed. Figure 6 The lower figure is a top view of the base member 18 after the coil 9, the magnetic sensor 10 and the suspension wire SW are mounted.

[0060] In the example shown in the figure, Figure 6 As shown, the base member 18 is a roughly rectangular ring-shaped frame. The four sides 18E that constitute the frame include a first side 18E1 to a fourth side 18E4. Furthermore, corners 18C are located between each of the four sides 18E. Corner portions 18C include a first corner 18C1 to a fourth corner 18C4. Specifically, the first corner 18C1 is located between the first side 18E1 and the fourth side 18E4, the second corner 18C2 is located between the first side 18E1 and the second side 18E2, the third corner 18C3 is located between the second side 18E2 and the third side 18E3, and the fourth corner 18C4 is located between the third side 18E3 and the fourth side 18E4. Furthermore, grooves 18G (first groove 18G1 to fourth groove 18G4 ) for holding the suspension wires SW (first wire SW1 to fourth wire SW4 ) are formed in the four corners 18C (first corner 18C1 to fourth corner 18C4 ).

[0061] The lower end of the first wire SW1 is fixed to the base member 18 with adhesive AD2 while being inserted through the first groove 18G1. Similarly, the lower end of the second wire SW2 is fixed to the base member 18 with adhesive AD2 while being inserted through the second groove 18G2. The lower end of the third wire SW3 is fixed to the base member 18 with adhesive AD2 while being inserted through the third groove 18G3. The lower end of the fourth wire SW4 is fixed to the base member 18 with adhesive AD2 while being inserted through the fourth groove 18G4.

[0062] Furthermore, when the coil 9 is mounted on a wiring substrate such as a flexible wiring substrate and the wiring substrate is fixed to the base member 18 by adhesive or the like, the lower end of the suspension wire SW may be fixed to the wiring substrate by solder or adhesive or the like.

[0063] In the example shown in the figure, the coil 9 and the magnetic sensor 10 are fixed to the Z1 side surface of the base member 18, that is, the upper surface, by adhesive, and the substrate 300 is fixed to the Z2 side surface of the base member 18, that is, the lower surface, by adhesive. Figure 7 As shown, a metal conductive member CM is embedded in the base member 18. The conductive member CM is used to supply power to the coil 9 and the magnetic sensor 10. Specifically, the conductive member CM includes a first conductive member CM1 to a twelfth conductive member CM12.

[0064] like Figure 6 As shown in the above figure, a housing portion 18S for accommodating the magnetic sensor 10 is provided on the top surface of the base member 18. The housing portion 18S includes a first housing portion 18S1 for accommodating the first magnetic sensor 10A and a second housing portion 18S2 for accommodating the second magnetic sensor 10B. Furthermore, the first housing portion 18S1 is configured so that a portion of each of the fifth through eighth conductive components CM5 through CM8 is exposed at its bottom, while the second housing portion 18S2 is configured so that a portion of each of the ninth through twelfth conductive components CM9 through CM12 is exposed at its bottom. With this structure, the fifth through eighth conductive components CM5 through CM8 are connected to the four terminals of the first magnetic sensor 10A accommodated in the first housing portion 18S1, and the ninth through twelfth conductive components CM9 through CM12 are connected to the four terminals of the second magnetic sensor 10B accommodated in the second housing portion 18S2. The connection between the terminals of the magnetic sensor 10 and the conductive components CM is achieved using solder or a conductive adhesive.

[0065] In addition, if Figure 6 As shown in the above figure, a protrusion 18P for fixing the coil 9 is formed on the upper surface of the base member 18. The protrusion 18P includes a first protrusion 18P1 for fixing the first coil 9A and a second protrusion 18P2 for fixing the second coil 9B.

[0066] In addition, if Figure 6 As shown in the above figure, the top surface of the base member 18 is formed with recesses 18Q and 18R for receiving the ends of the wire rod constituting the coil 9. Specifically, recess 18Q includes a first recess 18Q1 for receiving the first end portion 9AT1, which serves as one end of the first coil 9A, and a second recess 18Q2 for receiving the first end portion 9BT1, which serves as one end of the second coil 9B. Recess 18R includes a first recess 18R1 for receiving the second end portion 9AT2, which serves as the other end of the first coil 9A, and a second recess 18R2 for receiving the second end portion 9BT2, which serves as the other end of the second coil 9B. Furthermore, first recess 18Q1 is configured to expose a portion of the first conductive member CM1 at its bottom, first recess 18R1 is configured to expose a portion of the second conductive member CM2 at its bottom, second recess 18Q2 is configured to expose a portion of the third conductive member CM3 at its bottom, and second recess 18R2 is configured to expose a portion of the fourth conductive member CM4 at its bottom. In this structure, the first conductive member CM1 is connected to the first end 9AT1 of the first coil 9A inserted in the first recess 18Q1, and the second conductive member CM2 is connected to the second end 9AT2 of the first coil 9A inserted in the first recess 18R1. Furthermore, the third conductive member CM3 is connected to the first end 9BT1 of the second coil 9B inserted in the second recess 18Q2, and the fourth conductive member CM4 is connected to the second end 9BT2 of the second coil 9B inserted in the second recess 18R2. The ends of the coil 9 and the conductive members CM are connected using solder or a conductive adhesive.

[0067] Furthermore, a pair of wall portions 18W for supporting the beam member 19 is formed on the upper surface of the base member 18. The pair of wall portions 18W includes a left side wall portion 18WL and a right side wall portion 18WR.

[0068] The beam member 19 is part of the fixed-side member FB that constitutes the vibration damping mechanism that suppresses vibrations of the optical element retaining member 2. In the illustrated example, the beam member 19 is formed of a translucent synthetic resin material. After liquid vibration damping material DP is applied (injected) into the housing portion 2Q, the beam member 19 is fixed to the pair of wall portions 18W using an adhesive. Furthermore, while fixed to the pair of wall portions 18W, the beam member 19 is irradiated with ultraviolet light from above. The vibration damping material DP housed in the housing portion 2Q is cured into a gel-like state by the ultraviolet light that passes through the beam member 19.

[0069] Specifically, if Figure 4As shown, beam member 19 includes a plate-shaped base portion 19B and a protrusion 19P formed to protrude downward from the lower surface of base portion 19B. Protrusion 19P protrudes downward so that, when base portion 19B is fixed to a pair of wall portions 18W, the tip of protrusion 19P enters a receptacle 2Q provided on the upper surface of optical element holding member 2. Furthermore, protrusion 19P is configured so that its tip contacts the vibration-damping material DP housed in receptacle 2Q. This structure allows protrusion 19P and vibration-damping material DP to form a vibration-damping mechanism that suppresses vibrations of optical element holding member 2, enabling premature attenuation of vibrations of optical element holding member 2.

[0070] Next, refer to Figure 8 , the positional relationship between the magnetic field generating member 5, the detection magnet 6, the coil 9, and the magnetic sensor 10 constituting the magnetic system including the driving unit DM will be described. Figure 8 The three-dimensional view (front view, top view, and right side view) of the magnetic system mounted on the optical element driving device 50. The magnetic system is a system that uses magnetic force and includes a driving unit DM and a position detection unit PD. Figure 8 In the drawings, for easier understanding of the description, illustration of components other than the magnetic field generating member 5 , the detection magnet 6 , the coil 9 , and the magnetic sensor 10 is omitted.

[0071] The driving unit DM is a unit for moving the optical element OE on the XY plane. In the illustrated example, the driving unit DM includes a first driving unit DM1 that moves the optical element OE along a first driving direction MD1 and a second driving unit DM2 that moves the optical element OE along a second driving direction MD2.

[0072] like Figure 4 As shown, the first driving unit DM1 includes a first coil 9A provided on the base member 18 and a first magnetic field generating member 5A spaced apart from the first coil 9A in the Z-axis direction. Figure 8 As shown in the front view and the right side view of FIG, the first magnetic field generating member 5A and the first coil 9A are arranged to face each other with a small gap therebetween.

[0073] like Figure 4 As shown, the second driving unit DM2 includes a second coil 9B provided on the base member 18 and a second magnetic field generating member 5B disposed apart from the second coil 9B in the Z-axis direction. Figure 8 As shown in the front view of FIG, the second magnetic field generating member 5B and the second coil 9B are arranged to face each other with a small gap therebetween.

[0074] When the current Figure 8When the current flows in the first coil 9A in the direction indicated by the dotted arrow AR1, the optical element holding member 2 (first magnetic field generating member 5A) moves rightward and forward relative to the base member 18 along the first driving direction MD1 while being supported by the suspension wire SW. Figure 8 When the light flows in the first coil 9A in the direction indicated by the dotted arrow AR2, the optical element holding component 2 (first magnetic field generating component 5A) moves to the left rearward along the first driving direction MD1 relative to the base component 18 while being supported by the suspension wire SW. This is because the Lorentz force acts on the charged particles, and its reaction force causes the first magnetic field generating component 5A to move to the right front or left rearward along the first driving direction MD1. The charged particles are charged particles moving within the wire material constituting the first coil 9A fixed to the base component 18. In other words, this is because the force acting on the optical element holding component 2 to move the first magnetic field generating component 5A to the right frontward along the first driving direction MD1, that is, the first driving force, or the force acting on the first magnetic field generating component 5A to move to the left rearward along the first driving direction MD1, that is, the second driving force.

[0075] Likewise, when the current Figure 8 When the current flows in the second coil 9B in the direction indicated by the dotted arrow AR3, the optical element holding member 2 (second magnetic field generating member 5B) moves forward and leftward along the second driving direction MD2 relative to the base member 18 while being supported by the suspension wire SW. Figure 8 When the light flows in the second coil 9B in the direction indicated by the dotted arrow AR4, the optical element holding component 2 (second magnetic field generating component 5B) moves rightward and rearward along the second driving direction MD2 relative to the base component 18 while being supported by the suspension wire SW. This is because the Lorentz force acts on the charged particles, which are charged particles moving within the wire material constituting the second coil 9B fixed to the base component 18, and uses its reaction force to move the second magnetic field generating component 5B to the left front or right rear. In other words, this is because the third driving force acts on the optical element holding component 2 to move the second magnetic field generating component 5B to the left front along the second driving direction MD2, or the fourth driving force acts to move the second magnetic field generating component 5B to the right rear along the second driving direction MD2.

[0076] The control device CTR causes current to flow through the first coil 9A in the direction indicated by the dotted arrow AR1 and through the second coil 9B in the direction indicated by the dotted arrow AR3, thereby moving the optical element holding member 2 (the first magnetic field generating member 5A and the second magnetic field generating member 5B) forward (in the X1 direction) relative to the base member 18. This is because the first driving force that moves the first magnetic field generating member 5A forward and right along the first driving direction MD1 and the third driving force that moves the second magnetic field generating member 5B forward and left along the second driving direction MD2 act simultaneously on the optical element holding member 2. In this case, the movement speed of the optical element holding member 2 is greater than when driven solely by the first driving force or the third driving force.

[0077] Furthermore, the control device CTR can move the optical element holding member 2 (the first magnetic field generating member 5A and the second magnetic field generating member 5B) rightward (in the Y2 direction) relative to the base member 18 by causing current to flow through the first coil 9A in the direction indicated by the dotted arrow AR1 and current to flow through the second coil 9B in the direction indicated by the dotted arrow AR4. This is because the first driving force that moves the first magnetic field generating member 5A toward the right front along the first driving direction MD1 and the fourth driving force that moves the second magnetic field generating member 5B toward the right rear along the second driving direction MD2 act simultaneously on the optical element holding member 2. In this case, the movement speed of the optical element holding member 2 is greater than when driven solely by the first driving force or the fourth driving force.

[0078] Furthermore, the control device CTR can move the optical element holding member 2 (the first magnetic field generating member 5A and the second magnetic field generating member 5B) to the left (in the Y1 direction) relative to the base member 18 by causing current to flow through the first coil 9A in the direction indicated by the dotted arrow AR2 and current to flow through the second coil 9B in the direction indicated by the dotted arrow AR3. This is because the second driving force that moves the first magnetic field generating member 5A to the left rearward along the first driving direction MD1 and the third driving force that moves the second magnetic field generating member 5B to the left frontward along the second driving direction MD2 act simultaneously on the optical element holding member 2. In this case, the movement speed of the optical element holding member 2 is greater than when driven solely by the second driving force or the third driving force.

[0079] Furthermore, the control device CTR can move the optical element holding member 2 (the first magnetic field generating member 5A and the second magnetic field generating member 5B) rearward (in the X2 direction) relative to the base member 18 by causing current to flow through the first coil 9A in the direction indicated by the dotted arrow AR2 and current to flow through the second coil 9B in the direction indicated by the dotted arrow AR4. This is because the second driving force that moves the first magnetic field generating member 5A rearward and leftward along the first driving direction MD1 and the fourth driving force that moves the second magnetic field generating member 5B rearward and rightward along the second driving direction MD2 act simultaneously on the optical element holding member 2. In this case, the movement speed of the optical element holding member 2 is greater than when driven solely by the second driving force or the fourth driving force.

[0080] In addition, the control device CTR can, for example, move the optical element holding component 2 (the first magnetic field generating component 5A and the second magnetic field generating component 5B) in any direction on the XY plane relative to the base component 18 by adjusting the magnitude of the current flowing in the first coil 9A and the second coil 9B, respectively, that is, by adjusting the magnitude of the first driving force, the second driving force, the third driving force and the fourth driving force.

[0081] The position detection unit PD is a unit for detecting the position of the optical element OE fixed to the optical element holding member 2. In the illustrated example, the position detection unit PD is configured to detect the position of the optical element OE fixed to the optical element holding member 2 in an imaginary plane parallel to the XY plane. Specifically, the position detection unit PD includes a first position detection unit PD1 for detecting the position of the optical element OE in the first drive direction MD1 and a second position detection unit PD2 for detecting the position of the optical element OE in the second drive direction MD2.

[0082] like Figure 8 As shown in the front view and right side view of the first position detection unit PD1, the first position detection unit PD1 is configured to include a first detection magnet 6A and a first magnetic sensor 10A that are spaced apart from each other in the vertical direction. Figure 8 As shown in the front view and the right side view of FIG, the second position detector PD2 is configured to include a second detection magnet 6B and a second magnetic sensor 10B that are spaced apart from each other in the vertical direction.

[0083] Next, refer to Figure 9 and Figure 10 , a vibration damping mechanism for suppressing vibration of the optical element holding component 2 will be described. Figure 9 : is a perspective view of the optical element holding component 2 and the beam component 19. Specifically, Figure 9 The upper left figure is a perspective view of the beam member 19 viewed from the Z2 side. Figure 9 The upper right figure is a perspective view of the beam member 19 viewed from the Z1 side. Figure 9 The lower right figure (lower figure) is a perspective view of the optical element holding member 2 and the beam member 19 viewed from the Z1 side. Figure 10 : is a side view of the optical element holding component 2 and the beam component 19. Specifically, Figure 10 The upper figure is a right side view of the optical element holding component 2 and the beam component 19. Figure 10 The figure below is a front view of the optical element holding component 2 and the beam component 19. Figure 9 In order to make the description easier to understand, a thick dot pattern is added to the beam member 19 and a thin dot pattern is added to the optical element holding member 2. Figure 10 In FIG, a thick dot pattern is added to the beam member 19, and the receiving portion 2Q formed on the upper surface of the optical element holding member 2 and the front end portion of the protrusion 19P inserted into the receiving portion 2Q, which are actually invisible, are indicated by a dotted line. In addition, a cross pattern is added to the vibration damping material DP received in the receiving portion 2Q, which is actually invisible. Figure 9 and Figure 10 In the figure, members other than the optical element holding member 2 and the beam member 19 are omitted from illustration.

[0084] like Figure 9 The lower right image (below) and Figure 10 As shown in FIG. 1 , in a state where the liquid damping material DP is injected into the housing portion 2Q of the optical element holding member 2, the tip portion of the protrusion 19P of the beam member 19 is inserted into the housing portion 2Q. Specifically, as shown in FIG. Figure 10 As shown, the protrusion 19P is inserted into the receiving portion 2Q such that the tip portion thereof is inserted into the liquid vibration damping material DP and the liquid vibration damping material DP is also adhered to the peripheral surface thereof.

[0085] The liquid damping material DP is then cured into a gel by ultraviolet light. In the illustrated example, the beam member 19 is formed of a translucent synthetic resin material. Therefore, the liquid damping material DP is irradiated with ultraviolet light while the tip of the protrusion 19P is inserted into the receiving portion 2Q. This ultraviolet light passes through the beam member 19 and irradiates the liquid damping material DP contained within the receiving portion 2Q. This structure allows the liquid damping material DP to gel with the tip of the protrusion 19P inserted.

[0086] Next, refer to Figure 11 as well as Figure 12 , the position of the center of gravity CG of the movable-side member MB to which the optical element OE is mounted will be described. Figure 11 1 is a top view of the light emitting device 100 with the cover member 4 and the beam member 19 removed. Figure 11 The above figure is a top view of the light emitting device 100 according to the above embodiment. Figure 11The lower figure is a top view of a light-emitting device 100 x as another structural example of the light-emitting device 100 . Figure 12 1 is a front view of the light emitting device 100 with the cover member 4 and the beam member 19 removed. Figure 12 The above figure is a front view of the light emitting device 100 according to the above embodiment. Figure 12 The following picture is Figure 11 The main view of the light emitting device 100x is shown in the figure below. Figure 11 In order to facilitate the understanding of the description, a thick dot pattern is added to the base member 18 and a thin dot pattern is added to the optical element holding member 2. Figure 12 In the figure, the base part 18 is marked with a thick dot pattern, the actually invisible housing portion 2Q formed on the upper surface of the optical element holding part 2 and the front end portion of the protrusion 19P inserted into the housing portion 2Q are represented by dotted lines, and the actually invisible vibration-damping material DP housed in the housing portion 2Q is marked with a cross pattern.

[0087] The light emitting device 100x is different from the light emitting device 100 in that two receiving portions 2Q are formed on the upper surface of the optical element holding member 2 and two protrusions 19P are formed on the lower surface of the beam member 19, but is the same as the light emitting device 100 in other respects. Specifically, Figure 11 As shown in the figure below, the housing portion 2Q formed on the upper surface of the optical element holding member 2 of the light emitting device 100x includes a left housing portion 2QL and a right housing portion 2QR. Figure 12 As shown in the figure below, the protrusion 19P formed on the lower surface of the beam member 19 of the light emitting device 100x includes a left protrusion 19PL and a right protrusion 19PR. Figure 12 As shown in the figure below, the left-side vibration-damping material DPL is housed in the left-side housing portion 2QL, and the right-side vibration-damping material DPR is housed in the right-side housing portion 2QR.

[0088] like Figure 11 The above picture and Figure 12 As shown in the figure above, in the light emitting device 100, the optical element holding member 2 is configured so that, when viewed from above in the vertical direction, the center of gravity CG of the movable side member MB to which the optical element OE is mounted, that is, the center of gravity CG of the optical element holding member 2 to which the optical element OE, the magnetic field generating member 5, and the detection magnet 6 are mounted, is located within the housing portion 2Q. In the example shown in the figure, Figure 11 As shown in the above figure, the optical element holding member 2 is configured so that the position and size of the center of gravity adjustment portion 2T can be adjusted, and the center of gravity CG is located substantially at the center of the accommodation portion 2Q.

[0089] According to this structure, the vibration damping mechanism composed of the protrusion 19P and the vibration damping material DP can effectively damp the vibration of the movable side member MB relative to the fixed side member FB. This is because the center of vibration is roughly aligned with the position of the center of gravity CG. Figure 11 In the example shown in the figure above, light-emitting device 100 is configured so that, when viewed from above, a line passing through first wire SW1, damping material DP, and third wire SW3 is parallel to or aligned with first drive direction MD1, and a line passing through second wire SW2, damping material DP, and fourth wire SW4 is parallel to or aligned with second drive direction MD2. Consequently, light-emitting device 100 can achieve stable transient response characteristics.

[0090] And, as Figure 11 The following figure and Figure 12 As shown in the figure below, in the light emitting device 100x, the optical element holding member 2 is configured so that, when viewed from above in the vertical direction, the center of gravity CG of the movable side member MB on which the optical element OE is mounted is located between the left receiving portion 2QL and the right receiving portion 2QR. Figure 11 As shown in the figure below, the optical element holding member 2 is configured so that the center of gravity CG is located approximately at the midpoint between the left receiving portion 2QL and the right receiving portion 2QR.

[0091] With this configuration, the vibration damping mechanism, which includes the left protrusion 19PL, the right protrusion 19PR, the left vibration damping material DPL, and the right vibration damping material DPR, can effectively dampen the vibration of the movable member MB relative to the fixed member FB. This is because the center of vibration is approximately aligned with the center of gravity CG.

[0092] In addition, the receiving portion 2Q that receives the vibration-damping material DP may be formed at any other position, and the number of receiving portions 2Q may be three or more. The same applies to the protrusion 19P. For example, in the illustrated example, the receiving portion 2Q that receives the vibration-damping material DP is arranged in a position closer to the front side (X1 side) than the portion where the optical element OE is arranged, but it may also be arranged in a position closer to the left side (Y1 side) or the right side (Y2 side) than the portion where the optical element OE is arranged, or it may be arranged in a position closer to the rear side (X2 side) than the portion where the optical element OE is arranged. In addition, the receiving portion that receives the vibration-damping material may also be formed in the fixed-side member FB. In this case, the protrusion that enters the receiving portion may be formed in the movable-side member MB.

[0093] Next, refer to Figure 13 and Figure 14 , a light emitting device 100A as yet another structural example of the light emitting device 100 will be described. Figure 13 is a perspective view of the light emitting device 100A, and Figure 3 Specifically, Figure 13The upper figure is a perspective view of a light emitting device 100A including an optical element driving device 50A which is another structural example of the optical element driving device 50 composed of the cover member 4 and the lower member LB. Figure 13 The lower figure is an exploded perspective view of the light emitting device 100A, showing a state where the cover member 4 and the optical element OE are separated from the lower member LB. Figure 14 It is an exploded perspective view of the lower part LB constituting the optical element driving device 50A. Figure 4 Specifically, Figure 14 The movable-side member MB is shown in a state separated from the fixed-side member FB.

[0094] The main difference between the optical element driving device 50A and the optical element driving device 50 is that the coil 9 is installed on the optical element holding part 2A, which is another structural example of the optical element holding part 2 and is part of the movable side part MB, and the magnetic field generating part 5 is installed on the base part 18A, which is another structural example of the base part 18 and is part of the fixed side part FB, but other respects are the same as the optical element driving device 50.

[0095] Specifically, if Figure 14 As shown, the lower part LB of the optical element driving device 50A includes a movable side metal part MT attached to the upper surface of the optical element holding part 2A by adhesive. In addition, the optical element holding part 2A has a protrusion 2U formed so as to protrude upward from the upper surface. The protrusion 2U is the part around which the end of the wire constituting the coil 9 is wound, and includes a first protrusion 2U1 around which the first end 9AT1 of the first coil 9A is wound, a second protrusion 2U2 around which the first end 9BT1 of the second coil 9B is wound, a third protrusion 2U3 around which the second end 9BT2 of the second coil 9B is wound, and a fourth protrusion 2U4 around which the second end 9AT2 of the first coil 9A is wound.

[0096] The movable side metal part MT is configured to form a part of the current path for supplying current to the coil 9 fixed to the lower surface of the optical element holding part 2A by an adhesive. In the illustrated example, the movable side metal part MT includes a first metal part MT1 to a fourth metal part MT4. A roughly rectangular through-hole for inserting the first protrusion 2U1 to the fourth protrusion 2U4 is formed in the inner part of the first metal part MT1 to the fourth metal part MT4, respectively. In addition, a roughly circular through-hole for inserting the first wire SW1 to the fourth wire SW4 is formed in the outer part of the first metal part MT1 to the fourth metal part MT4, respectively. In this example, the suspension wire SW (the first wire SW1 to the fourth wire SW4) is configured to form another part of the current path for supplying current to the coil 9 fixed to the lower surface of the optical element holding part 2A. The suspension wire SW is a supporting part made of elastic metal.

[0097] According to this structure, Figure 14 As shown, the first end portion 9AT1 of the first coil 9A wound on the first protrusion 2U1 is joined to the first metal component MT1 by solder or a conductive adhesive, the first end portion 9BT1 of the second coil 9B wound on the second protrusion 2U2 is joined to the second metal component MT2 by solder or a conductive adhesive, the second end portion 9BT2 of the second coil 9B wound on the third protrusion 2U3 is joined to the third metal component MT3 by solder or a conductive adhesive, and the second end portion 9AT2 of the first coil 9A wound on the fourth protrusion 2U4 is joined to the fourth metal component MT4 by solder or a conductive adhesive.

[0098] In addition, if Figure 13 and Figure 14 As shown, the upper end of the suspension wire SW is bonded to the movable-side metal member MT via solder or conductive adhesive, while the lower end of the suspension wire SW is bonded to the metal conductive member CM via solder or conductive adhesive. As a result, the first metal member MT1 is electrically connected to the first conductive member CM1 via the first wire SW1, the second metal member MT2 is electrically connected to the third conductive member CM3 via the second wire SW2, the third metal member MT3 is electrically connected to the fourth conductive member CM4 via the third wire SW3, and the fourth metal member MT4 is electrically connected to the second conductive member CM2 via the fourth wire SW4.

[0099] The optical element driving device 50A constructed in this way can move the optical element OE in a direction perpendicular to the up and down direction relative to the fixed side part FB, similar to the optical element driving device 50 in which the magnetic field generating part 5 is fixed to the movable side part MB (optical element holding part 2) and the coil 9 is fixed to the fixed side part FB (base part 18), even when the coil 9 is fixed to the movable side part MB (optical element holding part 2A) and the magnetic field generating part 5 is fixed to the fixed side part FB (base part 18A).

[0100] As mentioned above, Figure 1 As shown, the optical element driving device 50 according to the embodiment of the present disclosure is an optical element driving device 50 for the distance measuring system RS that can be arranged adjacent to the light receiving device 200 when viewed from above. The optical element driving device 50 can be arranged adjacent to the light receiving device 200 in the following cases: Figure 2As shown, the optical element driving device 50 can be arranged in a state where the housing of the light-emitting device 100 (the third side plate portion 4A3 of the cover member 4) and the housing of the light-receiving device 200 (the side plate portion on the X1 side) are adjacent to each other; or the optical element driving device 50 can be arranged in a state where a portion of such a housing (the third side plate portion 4A3 functioning as a partition plate and the side plate portion on the X1 side of the housing of the light-receiving device 200) is omitted. In the latter case, the housings of the light-emitting device 100 and the light-receiving device 200 can also be integrated.

[0101] Specifically, if Figure 4 As shown, the optical element driving device 50 comprises: a fixed side member FB including a base member 18; an optical element holding member 2 having a base member 18 on which the optical element OE can be placed (see FIG. Figure 1 ) in the up-down direction and is opposite to the base part 18 in the up-down direction; a suspension wire SW as a supporting part, which supports the optical element holding part 2 so as to be movable in a direction perpendicular to the up-down direction relative to the base part 18; and a driving part DM, which moves the optical element holding part 2 in a direction perpendicular to the up-down direction and is constructed to include at least a magnetic field generating part 5 and a coil 9.

[0102] Moreover, the fixed side part FB has an outer portion arranged on the light receiving device 200 side (X2 side). The outer portion is a portion of the fixed side part FB that is located on the outer side of the optical element OE. In the example shown in the figure, the outer portion that is located on the rear side (X2 side) of the optical element OE is the outer peripheral wall portion 4A of the cover part 4. Specifically, the outer portion is the third side plate portion 4A3. In addition, the third side plate portion 4A3 may also be omitted. In this case, the outer portion may also be the base part 18. Specifically, the outer portion may also be the third side portion 18E3 of the base part 18. In addition, the outer portion may not be a flat plate portion like the third side plate portion 4A3, but may have a concave and convex portion. In addition, in the example shown in the figure, the cover part 4 has an outer shape that is larger than the base part 18 when viewed from above, but may also have an outer shape that is smaller than the base part 18.

[0103] In addition, the driving portion DM is arranged at a position farther from the outer portion (the third side plate portion 4A3) than the portion where the optical element OE is arranged in the through portion 2K. Figure 4 As shown, the driving portion DM is arranged at a position farther from the third side plate portion 4A3 than the optical element OE, that is, on the X1 side of the optical element OE.

[0104] In addition, the magnetic field generating component 5 has a first magnetic field generating component 5A and a second magnetic field generating component 5B, which are provided in one of the movable side component MB and the fixed side component FB including the optical element holding component 2 and are configured separately from each other.

[0105] In addition, the coil 9 includes a first coil 9A and a second coil 9B provided in the other of the movable side member MB and the fixed side member FB. Figure 4 As shown, the first coil 9A is configured to be opposite to the first magnetic field generating component 5A in the vertical direction, and the second coil 9B is configured to be opposite to the second magnetic field generating component 5B in the vertical direction. More specifically, the first coil 9A is configured to have a first coil axis 9AX extending in the vertical direction, and has a first extension portion 9AE and a second extension portion 9AP that are arranged opposite to each other with the first coil axis 9AX clamped therebetween and extend in the first extension direction EL1. Similarly, the second coil 9B is configured to have a second coil axis 9BX extending in the vertical direction, and has a third extension portion 9BE and a fourth extension portion 9BP that are arranged opposite to each other with the second coil axis 9BX clamped therebetween and extend in the second extension direction EL2. And, as Figure 6 As shown in the figure below, when viewed from above along the up-down direction, the first extension direction EL1 and the second extension direction EL2 are substantially orthogonal (substantially perpendicular).

[0106] Through the above-mentioned structure, the optical element driving device 50 adopts a dual-axis drive based on the driving unit DM (the first driving unit DM1 and the second driving unit DM2), and at the same time, the distance between the optical element OE and the light receiving device 200 (lens unit LU) can be shortened compared to the structure in which the driving unit is arranged between the optical element OE and the light receiving device 200 (lens unit LU). Therefore, the optical element driving device 50 can realize a light-emitting device (ranging system) that can also cope with short-distance ranging to the irradiated object at a relatively small distance. In addition, the optical element driving device 50 adopts a dual-axis drive, so the number of irradiation points can be increased compared to the case of adopting a single-axis drive. In addition, the optical element driving device 50 has the effect of suppressing the overall size of the device. This is because, compared to the structure in which the driving units are dispersed around the optical element OE, the driving unit DM is concentratedly arranged in a relatively narrow range with high spatial efficiency.

[0107] In addition, in the above-mentioned optical element driving device 50, as Figure 8As shown, when viewed from above along the vertical direction, the first extension direction EL1 and the second extension direction EL2 may be directions inclined relative to the direction (X-axis direction) in which the light receiving device 200 and the fixed side member FB are arranged. In the example shown in the figure, the first extension direction EL1 and the second extension direction EL2 are respectively as follows: Figure 8 As shown, the direction is inclined 45 degrees relative to the direction (X-axis direction) in which the light receiving device 200 and the fixed-side member FB are arranged when viewed from above in the vertical direction. That is, when viewed from above in the vertical direction, the direction in which the first drive unit DM1 moves the optical element OE, i.e., the first drive direction MD1, and the direction in which the second drive unit DM2 moves the optical element OE, i.e., the second drive direction MD2, are both inclined 45 degrees relative to the X-axis direction or the Y-axis direction.

[0108] This configuration has the following advantages: Compared to a configuration in which the first drive direction MD1 is set parallel to the X-axis direction and the second drive direction MD2 is set parallel to the Y-axis direction, it is possible to increase the movement speed of the movable side member MB in the X-axis direction or the Y-axis direction, improve the responsiveness when moving the movable side member MB in the X-axis direction or the Y-axis direction, and thereby increase the distance measurement efficiency (the number of irradiation points per unit time). This is because, in this configuration, the optical element driving device 50 can move the movable side member MB in the X-axis direction or the Y-axis direction using the combined force of the driving force of the first driving unit DM1 and the driving force of the second driving unit DM2. However, the optical element driving device 50 can also be configured such that the first drive direction MD1 is parallel to the X-axis direction (or the Y-axis direction) and the second drive direction MD2 is parallel to the Y-axis direction (or the X-axis direction), as long as the driving unit DM is positioned farther from the outer portion (the third side plate portion 4A3) than the portion of the through-hole 2K where the optical element OE is positioned. Specifically, the coil 9 may be configured such that, when viewed from above along the vertical direction, the first extension direction EL1 is parallel to the Y-axis direction (or the X-axis direction), and the second extension direction EL2 is parallel to the X-axis direction (or the Y-axis direction). The same applies to the magnetic field generating component 5 disposed opposite the coil 9.

[0109] In addition, in the above-mentioned optical element driving device 50, as Figure 8As shown, the movable member MB may also include a first detection magnet 6A disposed at a position spaced apart from and facing the first magnetic field generating member 5A in the first driving direction MD1 parallel to the second extending direction EL2; and a second detection magnet 6B disposed at a position spaced apart from and facing the second magnetic field generating member 5B in the second driving direction MD2 parallel to the first extending direction EL1. In this case, the fixed member FB may include a first magnetic sensor 10A for detecting the magnetic field of the first detection magnet 6A and a second magnetic sensor 10B for detecting the magnetic field of the second detection magnet 6B.

[0110] This configuration brings about an effect of being able to detect the position of a predetermined portion of the movable member MB (for example, the center of gravity CG of the movable member MB) in a virtual plane parallel to the XY plane.

[0111] In addition, in the above-mentioned optical element driving device 50, as Figure 8 As shown, the magnetization direction of one of the first detection magnet 6A and the second detection magnet 6B may be along the first driving direction MD1, which is parallel to the second extension direction EL2. Alternatively, the magnetization direction of the other of the first detection magnet 6A and the second detection magnet 6B may be along the second driving direction MD2, which is parallel to the first extension direction EL1. In the illustrated example, the outer portion of the first detection magnet 6A is magnetized to an N pole, and the inner portion is magnetized to an S pole, in the first driving direction MD1. Furthermore, the outer portion of the second detection magnet 6B is magnetized to an N pole, and the inner portion is magnetized to an S pole, in the second driving direction MD2. However, the first detection magnet 6A may be magnetized to have different magnetic poles along the second driving direction MD2, and the second detection magnet 6B may be magnetized to have different magnetic poles along the first driving direction MD1.

[0112] This configuration facilitates feedback control of the position of the movable member MB based on the position detected by the detection magnet 6 , compared to a case where the magnetization direction of the detection magnet 6 and the direction of the driving force generated by the driver DM are not parallel.

[0113] In addition, in the above-mentioned optical element driving device 50, as Figure 5 As shown in the figure below, the first detection magnet 6A and the second detection magnet 6B may be fixed to the optical element holding member 2 so as to face each other with the through portion 2K interposed therebetween.

[0114] This structure provides the following effects: by providing the detection magnet 6 in a portion (a portion of the optical element holding member 2 ) where the magnetic field generating member 5 (driving unit DM) is not arranged, space efficiency can be improved and the optical element driving device 50 can be miniaturized.

[0115] In addition, if Figure 4 As shown, in the optical element driving device 50 described above, the first magnetic field generating component 5A and the second magnetic field generating component 5B can also be provided on the movable side component MB. Alternatively, the first coil 9A and the second coil 9B can be provided on the fixed side component FB. In this case, the first magnetic field generating component 5A is configured so that the magnetic pole (N pole) of the portion facing the first extension 9AE of the first coil 9A is different from the magnetic pole (S pole) of the portion facing the second extension 9AP of the first coil 9A. Furthermore, the second magnetic field generating component 5B is configured so that the magnetic pole (N pole) of the portion facing the third extension 9BE of the second coil 9B is different from the magnetic pole (S pole) of the portion facing the fourth extension 9BP of the second coil 9B.

[0116] This structure brings the following effects: Figure 13 and Figure 14 The overall structure of the optical element driving device 50 is simplified compared to the case where the coil 9 is provided on the movable member MB as shown. This is because the current path for supplying current to the coil 9 can be formed relatively simply.

[0117] In addition, if Figure 4 As shown, in the aforementioned optical element driving device 50, the optical element holding member 2 may include a receiving portion 2Q with at least one of the upper and lower portions being open. Furthermore, the fixed-side member FB (beam member 19) may include a protrusion (protrusion 19P) whose tip is inserted into the receiving portion 2Q. Furthermore, the receiving portion 2Q may accommodate a vibration-damping material DP. In this case, the tip of the protrusion 19P may contact the vibration-damping material DP provided in the receiving portion 2Q.

[0118] Compared to a structure without the vibration-damping material DP, this structure has the effect of shortening the time it takes for the vibration of the movable member MB to converge around the specific position when the movable member MB is moved to the specific position. Consequently, this structure has the effect of improving the responsiveness associated with position control of the movable member MB.

[0119] In the above-described optical element driving device 50 , the housing portion 2Q may be provided at a position farther from the outer portion (the third side plate portion 4A3 ) than the portion of the through portion 2K where the optical element OE is disposed.

[0120] This configuration brings about an effect in that the provision of the housing portion 2Q can suppress the distance between the optical element OE and the light receiving device 200 from being affected (increased).

[0121] In addition, in the above-mentioned optical element driving device 50, the first magnetic field generating member 5A and the second magnetic field generating member 5B may also be provided on the movable side member MB. Figure 11 The above picture and Figure 12 As shown in the above figure, the movable side part MB can also be constructed so that when viewed from above in the up and down directions, the position of the center of gravity CG of the optical element OE, the first magnetic field generating part 5A, the second magnetic field generating part 5B, the first detection magnet 6A and the second detection magnet 6B when they are fixed to the optical element holding part 2 is included in the range of the accommodation part 2Q.

[0122] This structure has the effect of damping the vibration of the movable member MB centered at a specific position, which is generated when the movable member MB is moved to a specific position, more quickly than when the position of the center of gravity CG and the position of the housing portion 2Q (vibration-damping material DP) are separated. Furthermore, it has the effect of damping the vibration of the movable member MB more quickly, regardless of the direction of the vibration.

[0123] In addition, in the above-mentioned optical element driving device 50, as Figure 11 The following figure and Figure 12 As shown in the following figure, a plurality of receiving portions 2Q may be provided. In this case, a plurality of protrusions 19P are also provided. Figure 11 The following figure and Figure 12 In the example shown in the following figure, two receiving portions 2Q are provided, and two protruding portions 19P are also provided.

[0124] This structure has the effect of suppressing the rotation of the movable member MB when the vibration of the movable member MB is attenuated by the vibration damping mechanism. Specifically, this structure has the effect of suppressing at least one of the rotation of the movable member MB around the X-axis, the Y-axis, and the Z-axis.

[0125] In addition, in the above-mentioned optical element driving device 50, as Figure 9 As shown, the receiving portion 2Q may be provided in the optical element holding member 2 so as to be open at least at the top. Alternatively, a hole may be provided at the bottom of the receiving portion 2Q, penetrating the optical element holding member 2 in the vertical direction. Furthermore, the fixed-side member FB may include a beam member 19, which is a synthetic resin member and is formed of a translucent synthetic resin material that transmits ultraviolet light or the like. In this case, the beam member 19 may include a plate-shaped base 19B provided so as to cover a portion of the optical element holding member 2, and a protrusion 19P formed so as to protrude downward from the base 19B.

[0126] This structure achieves the following effect: even when the tip of the beam member 19 is inserted into the housing 2Q (vibration damping material DP), that is, when the vibration damping material DP, which is a light-curing resin such as an ultraviolet-curing resin, is covered by the beam member 19, the vibration damping material DP can be irradiated with light such as ultraviolet rays. Therefore, this structure improves the productivity of the optical element driving device 50. This is because after the liquid vibration damping material DP is injected into the housing 2Q and the beam member 19 is attached to the base member 18 so that the tip of the beam member 19 contacts the vibration damping material DP, the vibration damping material DP can be irradiated with ultraviolet rays.

[0127] In addition, if Figure 4 As shown, in the above-described optical element driving device 50 , the support member may be composed of at least three suspension wires SW arranged between the movable member MB and the fixed member FB including the optical element holding member 2 and extending in the vertical direction.

[0128] This structure has the following effect: compared with a case where the movable member MB (optical element holding member 2) is supported by the fixed member FB (base member 18) via a sphere, etc., the movable member MB (optical element holding member 2) is less susceptible to the effects of sliding friction, etc. between the movable member MB (optical element holding member 2) and the fixed member FB (base member 18). In addition, since the movable member MB (optical element holding member 2) moves along the XY plane, it is preferable that the suspension wires SW are respectively arranged at the four corners of the movable member MB.

[0129] In addition, if Figure 3 As shown, in the optical element driving device 50 described above, the fixed-side member FB may also include a frame HS that houses the optical element holding member 2. In this case, the outer portion may also be provided on the frame HS. In the illustrated example, the third side plate portion 4A3, as an example of the outer portion, is a portion of the outer peripheral wall portion 4A of the cover member 4. The cover member 4 constitutes the frame HS having a generally rectangular shape when viewed from above.

[0130] This structure brings about an effect in which the light emitting device 100 including the optical element driving device 50 and the light receiving device 200 are provided as separate independent devices.

[0131] In addition, if Figure 2 As shown, the ranging system RS of the embodiment of the present disclosure has: a light-emitting device 100, which includes an optical element driving device 50, an optical element OE arranged in the optical element holding part 2 and including at least one of a lens body and a diffraction optical element, and a light-emitting element LE arranged opposite to the bottom of the optical element OE; and a light-receiving device 200, which is arranged adjacent to the light-emitting device 100.

[0132] According to this configuration, the distance measuring system RS can suppress an increase in the distance between the optical element OE and the light receiving device 200 while adopting biaxial drive.

[0133] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the above embodiments. Various modifications and substitutions can be applied to the above embodiments without departing from the scope of the present invention. In addition, the various features described with reference to the above embodiments may be appropriately combined as long as they are not technically inconsistent.

[0134] For example, in the above-mentioned embodiment, the housing portion 2Q is configured to be recessed toward the Z2 side on the upper surface of the optical element holding component 2, but may be configured to be recessed toward the Z1 side on the lower surface of the optical element holding component 2. In this case, the protrusion 19P may be a portion of the base component 18 that protrudes upward from the upper surface of the base component 18. Alternatively, the housing portion 2Q may be configured to be recessed inward on the side surface of the optical element holding component 2. In this case, the protrusion 19P may be configured to protrude inward from the inner surface of a pair of wall portions 18W, for example. In addition, the protrusion 19P may be a portion of the cover component 4. In this case, the beam component 19 may also be omitted.

[0135] This application claims priority based on Japanese Patent Application No. 2022-201842, filed on December 19, 2022, the entire contents of which are incorporated herein by reference.

[0136] Description of Reference Numerals

[0137] 2. 2A···Optical element holding part 2C···Corner 2C1···First corner 2C2···Second corner 2C3···Third corner 2C4···Fourth corner 2E···Side 2E1···First side 2E2···Second side 2E3···Third side 2E4···Fourth side 2G…Groove 2G1···First groove 2G2···Second groove 2G3···Third groove 2G4···Fourth groove 2K…Through portion 2Q…Accommodation 2QL…Left side accommodation portion 2QR···Right side accommodation portion 2R···Accommodation 2S···Accommodation 2S1···First accommodation portion 2S2···Second accommodation portion 2T···Center of gravity adjustment portion 2U···Protrusion 2U1··· First protrusion 2U2···Second protrusion 2U3···Third protrusion 2U4···Fourth protrusion 4···Cover part 4A…Outer peripheral wall part 4A1···First side plate part 4A2···Second side plate part 4A3···Third side plate part 4A4···Fourth side plate part 4B…Top plate part 4K…Through hole 4S…Accommodation part 5···Magnetic field generating part 5A…First magnetic field generating part 5B…Second magnetic field generating part 6···Detection magnet 6A…First detection magnet 6B…Second detection magnet 9···Coil 9A…First coil 9AE···First extension part 9AP···Second extension part 9AT1···First end part 9AT2···Second end part 9AX···First coil axis 9B···Second coil 9BE···Third extension portion 9BP···Fourth extension portion 9BT1···First end portion 9BT2···Second end portion 9BX…Second coil bobbin 10···Magnetic sensor 10A···First magnetic sensor 10B···Second magnetic sensor 18, 18A···Base member 18C···Corner portion 18C1···First corner portion 18C2···Second corner portion 18C3···Third corner portion 18C4···Fourth corner portion 18E···Side portion 18E1···First side portion 18E2···Second side portion 18E3···Third side portion 18E4···Fourth side portion 18G…Groove portion 18G1···First groove portion 18G2···Second groove portion 18G3···Third groove portion 18G4· ··Fourth groove portion 18K…through portion 18P…convex portion 18P1···First convex portion 18P2···Second convex portion 18Q···Concave portion 18Q1···First concave portion 18Q2···Second concave portion 18R···Concave portion 18R1···First concave portion 18R2···Second concave portion 18S···Accommodation portion 18S1···First accommodation portion 18S2···Second accommodation portion 18W···Wall portion 18WL···Left side wall portion 18WR···Right side wall portion 19···Beam member 19B···Base 19P···Protrusions 50, 50A···Optical element driving device 100, 100A, 100x···Light emitting device 200···Light receiving device 300···Substrate AD1,AD2···Adhesive CG···Center of gravity CM···Conductive component CM1···First conductive component CM2···Second conductive component CM3···Third conductive component CM4···Fourth conductive component CM5···Fifth conductive component CM6···Sixth conductive component CM7···Seventh conductive component CM8···Eighth conductive component CM9···Ninth conductive component CM10···Tenth conductive component CM11···Eleventh conductive component CM12···Twelfth conductive component CTR…Control device DM…Driver DM1···First drive part DM2···Second drive part DP…Vibration damping material DPL…Left side vibration damping material DPR…Right side vibration damping material EL1···First extension part Toward EL2···second extension direction FB…fixed side component HS…frame IS…shooting element LB…lower side component LE…light emitting element LU···lens unit MB···movable side component MD1···first driving direction MD2···second driving direction MT···movable side metal component MT1···first metal component MT2···second metal component MT3···third metal component MT4···fourth metal component OE···optical element PD···position detection part PD1···first position detection part PD2···second position detection part RS···ranging system SW···suspension wire SW1···first wire SW2···second wire SW3···third wire SW4···fourth wire,

Claims

1. An optical element driving device for a distance measuring system, which can be arranged to be adjacent to a light receiving device when viewed from above, wherein: include: a fixed side member including a base member; an optical element holding member having a through portion extending vertically therethrough and capable of arranging an optical element, the optical element holding member being opposed to the base member in the vertical direction; a supporting member that supports the optical element holding member so as to be movable relative to the base member in a direction perpendicular to the up-down direction; as well as The driving unit moves the optical element holding member in a direction perpendicular to the up-down direction and includes at least a magnetic field generating member and a coil. It is characterized in that, in the optical element driving device, The fixed side member has an outer side portion arranged on the light receiving device side, The driving portion is arranged at a position farther from the outer portion than a portion of the through portion where the optical element is arranged. The magnetic field generating member includes a first magnetic field generating member and a second magnetic field generating member provided on one of the movable side member including the optical element holding member and the fixed side member. The coil includes a first coil and a second coil provided on the other of the movable side member and the fixed side member. The first coil is opposed to the first magnetic field generating component in the vertical direction. The second coil is opposed to the second magnetic field generating member in the vertical direction. The first coil is configured to have a first coil axis extending in the vertical direction, and includes a first extending portion and a second extending portion disposed opposite to each other with the first coil axis interposed therebetween and extending in a first extending direction. The second coil is configured to have a second coil axis extending in the vertical direction, and has a third extending portion and a fourth extending portion disposed opposite to each other with the second coil axis interposed therebetween and extending along a second extending direction. The first extending direction and the second extending direction are substantially orthogonal to each other when viewed in a plan view along the up-down direction.

2. The optical element driving device according to claim 1, wherein: The first extending direction and the second extending direction are directions inclined with respect to the direction in which the light receiving device and the fixed-side member are arranged, when viewed in a plan view along the up-down direction.

3. The optical element driving device according to claim 2, wherein: The first extending direction and the second extending direction are directions inclined by 45 degrees with respect to the direction in which the light receiving device and the fixed-side member are arranged, when viewed in a plan view along the up-down direction.

4. The optical element driving device according to claim 2, wherein: The movable side member has: a first detection magnet disposed at a position separated from the first magnetic field generating member in the second extending direction; as well as The second detection magnet is provided at a position separated from the second magnetic field generating member in the first extending direction. The fixed-side member is provided with a first magnetic sensor and a second magnetic sensor. The first magnetic sensor detects the magnetic field of the first detection magnet, and the second magnetic sensor detects the magnetic field of the second detection magnet.

5. The optical element driving device according to claim 4, wherein: The magnetization direction of one of the first detection magnet and the second detection magnet is along the second extension direction. The magnetization direction of the other of the first detection magnet and the second detection magnet is along the first extending direction.

6. The optical element driving device according to claim 4 or 5, wherein: The first detection magnet and the second detection magnet are fixed to the optical element holding member so as to face each other with the penetration portion interposed therebetween.

7. The optical element driving device according to any one of claims 1 to 5, wherein: The first magnetic field generating member and the second magnetic field generating member are provided on the movable side member. The first coil and the second coil are provided on the fixed side member. The first magnetic field generating member is configured such that the magnetic pole of a portion facing the first extension portion of the first coil is different from the magnetic pole of a portion facing the second extension portion of the first coil. The second magnetic field generating member is configured so that a magnetic pole of a portion of the second coil facing the third extending portion is different from a magnetic pole of a portion of the second coil facing the fourth extending portion.

8. The optical element driving device according to claim 4, wherein: The optical element holding member has a receiving portion that is open at least on the top and the bottom. The fixed side member has a protrusion whose front end is inserted into the receiving portion. The housing contains a vibration-damping material. The front end of the protrusion is in contact with the vibration-damping material provided in the accommodation portion.

9. The optical element driving device according to claim 8, wherein: The housing portion is provided at a position farther from the outer portion than a portion of the through portion where the optical element is arranged.

10. The optical element driving device according to claim 8, wherein: The first magnetic field generating member and the second magnetic field generating member are provided on the movable side member. The movable side part is configured so that, when viewed from above in the up and down direction, the center of gravity positions of the optical element, the first magnetic field generating part, the second magnetic field generating part, the first detection magnet and the second detection magnet when they are fixed to the optical element holding part are contained in the housing part.

11. The optical element driving device according to claim 8, wherein: The receiving portion is provided with a plurality of A plurality of protrusions are also provided.

12. The optical element driving device according to any one of claims 8 to 11, wherein: The receiving portion is provided on the optical element holding member in a manner such that at least the upper portion is open. The fixed side member includes a synthetic resin member formed of a light-transmitting synthetic resin material. The synthetic resin member includes a base portion provided to cover a portion of the optical element holding member and a protrusion portion formed to protrude downward from the base portion.

13. The optical element driving device according to any one of claims 1 to 5 and 8 to 11, wherein: The support member is disposed between the movable-side member including the optical element holding member and the fixed-side member, and is composed of at least three suspension wires extending in the vertical direction.

14. The optical element driving device according to any one of claims 1 to 5 and 8 to 11, wherein: The fixed side member has a frame body for accommodating the optical element holding member. The outer portion is arranged on the frame.

15. A distance measurement system, characterized in that: It has a light emitting device and a light receiving device, The light emitting device comprises: The optical element driving device according to any one of claims 1 to 5 and 8 to 11; The optical element is provided in the optical element holding member and includes at least one of a lens body and a diffractive optical element; and A light emitting element is arranged below and opposite to the optical element. The light receiving device is arranged adjacent to the light emitting device.

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