A preheating device for preparing electronic grade thionyl fluoride
Through the design of the internal circulation contact structure and the lower isolation structure, the problem of uneven preheating of the thionyl fluoride crude gas was solved, the uniformity and suitability of the gas temperature were achieved, and the distillation effect was improved.
Patent Information
- Application Number
- CN202510982795.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-16
- Publication Date
- 2025-09-23
- Estimated Expiration
- 2045-07-16
AI Technical Summary
In the prior art, during the preheating process of thionyl fluoride raw gas, the gas volume and the heat medium contact area are not proportional, resulting in part of the gas not reaching the appropriate temperature, affecting the distillation effect.
The internal circulation contact structure is adopted, and all-round contact heating is carried out on the inside and outside of the serpentine coil through the internal and external contact parts. The condensed water is quickly discharged in combination with the lower isolation structure to ensure the uniformity and suitability of the gas temperature.
The uniform preheating of thionyl fluoride gas is achieved, and the temperature reaches 50-100°C, which ensures that the gas temperature entering the distillation system is appropriate and improves the distillation effect.
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Figure CN120467055B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to thionyl fluoride preparation equipment, in particular to a preheating device for preparing electronic-grade thionyl fluoride. Background Art
[0002] With the continuous development of the semiconductor industry, high-end chip technology has made continuous breakthroughs, among which dry etching technology has been widely used. As the key etching electronic gas and cleaning electronic gas, higher demands have been put forward. Fluorine-based electronic gases have ushered in rapid development. Typical fluorine-based electronic gases currently include sulfur hexafluoride (SF6), carbon tetrafluoride (CF4) and fluorocarbon gases (such as CH3F, CH2F2, CHF3, C2F6, C3F8, etc.). Their GWP values are relatively high and have a greater potential impact on the environment. The development of low-GWP etching and cleaning gases has become the key to the development of the semiconductor industry. While ensuring the etching and cleaning effects, thionyl fluoride (SOF2) is easier to dispose of and more environmentally friendly. Existing technologies usually use anhydrous hydrogen fluoride (AHF) and thionyl chloride (SOCl2) to synthesize thionyl fluoride.
[0003] After anhydrous hydrogen fluoride and thionyl chloride are mixed, a crude thionyl fluoride gas is formed. This crude thionyl fluoride gas needs to be distilled to obtain a relatively pure thionyl fluoride gas. However, before distillation, the crude thionyl fluoride gas has not reached the optimal distillation temperature, and some products during distillation are difficult to purify. Therefore, the existing technology uses a preheater to preheat the crude thionyl fluoride gas. To improve the preheating effect, a coil structure is usually adopted to ensure that the crude thionyl fluoride gas is fully in contact with the heat medium in the coil and improve preheating uniformity. However, with this preheating method, since the heat medium is in the coil, the amount of gas that can be introduced is not proportional to the contact area of the heat medium. As a result, some gas is passed out of the equipment before being raised to an appropriate temperature. As a result, the temperature of some gas during distillation is insufficient, making it difficult to separate the impurities to be separated.
[0004] Therefore, this case aims to provide a preheating device for the preparation of electronic-grade thionyl fluoride. Unlike the traditional way of heat medium entering the serpentine coil, the crude gas to be preheated is passed into the serpentine coil, and multiple contact heat exchange structures are set on the serpentine coil, so that the preheating can be thoroughly completed in the preheater with a shorter path. The preheating effect is excellent, and the crude gas meets the subsequent distillation temperature requirements. Summary of the Invention
[0005] The present invention provides a preheating device for preparing electronic-grade thionyl fluoride, which can effectively solve the above problems.
[0006] The present invention is achieved in that:
[0007] A preheating device for preparing electronic-grade thionyl fluoride comprises: a preheating tank body, the upper end of the preheating tank body being connected to a crude gas inlet, the lower end of the preheating tank body being connected to a crude gas outlet, at least one serpentine coil being connected between the crude gas inlet and the crude gas outlet, the preheating tank body being provided with an inlet pipe and an outlet pipe, and further comprising:
[0008] An internal circulation contact type structure, wherein the serpentine coil comprises an upper through portion connected to the crude gas inlet, the upper through portion is connected to a transverse transmission portion, the end of the transverse transmission portion is connected to a bending portion, the transverse transmission portions and the bending portions are alternately arranged, and the transverse transmission portion at the lowest end is connected to a lower through portion communicating with the crude gas outlet, the internal circulation contact type structure comprises an inner contact piece arranged on the side of the bending portion, a hollow piece is arranged on the outer side of the inner contact piece, an outer contact piece is connected to the side of the inner contact piece close to the transverse transmission portion, the outer contact piece is located between the two transverse transmission portions, the inner and outer contact pieces are both connected to a steam inlet pipe, the steam inlet pipe is located on the outside of the preheating tank body, and the steam entering through the steam inlet pipe is output from the inner contact piece and the outer contact piece and condenses and falls to the bottom of the preheating tank body;
[0009] The lower isolation structure includes an inner heat cover arranged at the lower end of the lower passage, an outer isolation cover is arranged on the outside of the inner heat cover, and a circulation rack is arranged on the outside of the outer isolation cover. The outer side of the circulation rack is fixed to the inner side of the preheating tank body and communicates with the outside. The condensed steam falls to the bottom of the preheating tank body after being guided by the outer isolation cover.
[0010] As a further improvement, the inner and outer sides of the bending portion are both opened, the internal contact part includes an inner air inlet portion embedded in the opening on the outer side of the bending portion, the opening on the inner side of the bending portion is provided with an inner air outlet portion, an inner barrier portion is connected between the inner air inlet portion and the inner air outlet portion, and the inner air inlet portion is connected to the steam inlet pipe.
[0011] As a further improvement, all of the inner barrier portions form a fan-shaped structure.
[0012] As a further improvement, the inner barrier portion includes an inner through-tube connected between the inner air inlet portion and the inner air outlet portion, and a plurality of barbed tubes extend outward from the circumferential outer portion of the inner through-tube.
[0013] As a further improvement, the hollow part includes a small sleeve nested on the outside of the inner air outlet part, a large sleeve nested on the outside of the inner air outlet part, and a holding bag ringed on the outside of the bending part is connected between the small sleeve and the large sleeve, and the holding bag is hollow.
[0014] As a further improvement, the external contact member includes an external transverse tube connected to the steam inlet pipe, and the external transverse tube is provided with an external discharge hole at a position close to the transverse transmission part.
[0015] As a further improvement, a lower guide portion is provided on a side of the outer transverse tube close to the inner contact piece.
[0016] As a further improvement, the inner heat cover includes a long cone portion connected to the lower through portion, the lower end of the long cone portion is connected to a short cone portion, and the long cone portion is spaced apart from the inner wall of the preheating tank body.
[0017] As a further improvement, the outer isolation cover comprises a separation cover which is covered on the inner heat cover, and an isolation felt is embedded in the interior of the separation cover, and the thickness of the isolation felt is half of the thickness of the separation cover.
[0018] As a further improvement, the circulation rack includes a retaining rack fixed to the inner side of the preheating tank, and the retaining rack is connected to the inner side of the separation cover through a plurality of connecting rods.
[0019] The beneficial effects of the present invention are:
[0020] In the prior art, during the preheating stage of the crude thionyl fluoride gas, hot steam is introduced into the serpentine coil, and then the gas is introduced into the equipment to contact the serpentine coil with a certain temperature, thereby raising the temperature of the crude gas to meet the distillation conditions. However, the amount of gas that can be introduced in this way is not proportional to the contact area of the heat medium, resulting in some gas passing out of the equipment before being cooled to a suitable temperature, affecting the distillation effect. Therefore, the present invention provides an internal circulation contact structure to directly introduce the crude thionyl fluoride gas into the serpentine coil, and through the internal contact piece, the external contact piece and the preheating tank body itself, it can achieve full contact with the serpentine coil, so that the crude gas in the serpentine coil can be uniformly preheated and its temperature can be raised to 50-100°C, thereby ensuring that the gas entering the distillation system can always maintain a suitable temperature.
[0021] The flow rates of the crude gas at the transverse transmission part and the bending part are different, which easily leads to uneven preheating at various positions. In order to balance the flow rates at various positions and ensure that the gas always remains at an appropriate temperature, the internal contact member of the present invention is arranged on the inner side of the bending part, and an obstruction is formed in the bending part through the internal barrier part, so that the crude gas passing through this part can be heated by the inner side, thereby reducing the flow rate of the gas, and then balancing the problem of excessive transmission at the front end of the transverse transmission part.
[0022] Although the internal contact piece can heat the crude air from the inside, this also leads to a problem, that is, the crude air can easily leak from the internal air inlet and the internal air outlet of the internal barrier part. Therefore, the present invention provides hollow pieces at the internal air inlet and the internal air outlet, and wraps the entire internal heating structure in a chamber through the two sleeves of the hollow piece, so that even if leakage occurs, there will be a time of saturation. Once saturated, it can continue to flow forward and will not affect the overall use.
[0023] Since multiple serpentine coils are used, the spacing between each horizontal transfer part is small, so the heat transfer effect between each horizontal transfer part is not good. Therefore, the present invention extends the pipeline to between the horizontal transfer parts through the external contact parts, so that the heat medium can be directly extended to the position of the horizontal transfer part, thereby ensuring temperature consistency even in a relatively narrow position.
[0024] The use of an external heat medium means that after preheating, the heat medium will condense into liquid and fall. If this part is directly deposited at the bottom of the preheating tank, it will greatly affect the temperature of the bottom serpentine coil. Therefore, the present invention provides a lower isolation structure on the basis of the internal circulation contact structure, extending the bottom of the entire preheating tank, and wrapping the preheated raw gas in the inner heat cover, which is isolated from the outside by the outer isolation cover, and all the condensed water is passed to the bottom of the preheating tank for rapid discharge, so that the condensed water can be discharged smoothly while avoiding affecting the temperature of the raw gas in the serpentine coil.
[0025] In order to prevent condensed water from accumulating in the serpentine coil, it is necessary to drain the condensed water quickly, and the discharged condensed water must not affect the preheated raw air. Therefore, the present invention configures the inner heat shield to have a structure that is long at the top and short at the bottom. By configuring the long tapered portion and the short tapered portion, the condensed water can be drained away with the largest taper while completely isolating the raw air from the influence of the external temperature, thereby ensuring that the raw air temperature inside is always within the required range. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.
[0027] Figure 1 It is a structural schematic diagram of the present invention.
[0028] Figure 2 It is a schematic diagram of the top structure of the present invention.
[0029] Figure 3 This invention Figure 2 Cross-section view at the middle BB.
[0030] Figure 4 This invention Figure 3 Magnified view of area B.
[0031] Figure 5 It is a structural schematic diagram of the hollow member of the present invention.
[0032] Figure 6It is a structural schematic diagram of the lower isolation structure of the present invention.
[0033] In the picture:
[0034] Preheating tank 1, crude gas inlet 101, crude gas outlet 102, serpentine coil 103, upper through portion 1031, horizontal transmission portion 1032, bending portion 1033, lower through portion 1034, internal circulation contact structure 2, internal contact member 201, internal air inlet portion 2011, internal air outlet portion 2012, internal barrier portion 2013, internal through pipe 20131, thorn pipe 20132, hollow member 202, small sleeve seat 2021, large sleeve Seat 2022, holding bag 2023, external contact piece 203, external transverse tube 2031, external discharge hole 2032, lower guide part 2033, steam inlet pipe 204, lower isolation structure 3, inner heat cover 301, long cone 3011, short cone 3012, outer isolation cover 302, separation cover 3021, isolation felt 3022, circulation rack 303, retaining rack 3031, connecting rod 3032, inflow pipe 4, outflow pipe 5. DETAILED DESCRIPTION
[0035] All embodiments of the present invention are within the scope of protection of the present invention. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0036] In the description of the present invention, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as referring to the purpose, technical solutions and advantages of the methods. To be clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work indicate or imply relative importance or implicitly indicate the number of indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.
[0037] Reference Figures 1 to 6As shown, a preheating device for preparing electronic grade thionyl fluoride comprises: a preheating tank body 1, the upper end of the preheating tank body 1 is connected to a crude gas inlet 101, the lower end of the preheating tank body 1 is connected to a crude gas outlet 102, at least one serpentine coil 103 is connected between the crude gas inlet 101 and the crude gas outlet 102, the preheating tank body 1 is provided with an inlet pipe 4 and an outlet pipe 5, and further comprises: an internal circulation contact type structure 2, the serpentine coil 103 comprises a contact structure with the crude gas. The gas inlet 101 is connected to the upper through portion 1031, the upper through portion 1031 is connected to a horizontal transmission portion 1032, the end of the horizontal transmission portion 1032 is connected to a bending portion 1033, the horizontal transmission portions 1032 and the bending portions 1033 are alternately arranged, and the lowest end of the horizontal transmission portion 1032 is connected to a lower through portion 1034 that communicates with the crude gas outlet 102. The internal circulation contact type structure 2 includes an internal contact member 201 arranged on the side of the bending portion 1033. , a hollow member 202 is provided on the outer side of the inner contact member 201, and an outer contact member 203 is connected to the side of the inner contact member 201 close to the horizontal transmission part 1032. The outer contact member 203 is located between the two horizontal transmission parts 1032. The inner contact member 201 and the outer contact member 203 are both connected to the steam inlet pipe 204. The steam inlet pipe 204 is located on the outer side of the preheating tank body 1. The steam entering through the steam inlet pipe 204 is connected to the inner contact member 201 and the outer After the contact piece 203 is output, the condensed steam falls to the bottom of the preheating tank body 1; the lower isolation structure 3 includes an inner heat cover 301 arranged at the lower end of the lower through portion 1034, and an outer isolation cover 302 is arranged on the outer side of the inner heat cover 301, and a circulation rack 303 is arranged on the outer side of the outer isolation cover 302. The outer side of the circulation rack 303 is fixed to the inner side of the preheating tank body 1 and communicates with the outside. The condensed steam falls to the bottom of the preheating tank body 1 after being guided by the outer isolation cover 302.
[0038] In the preheating stage, the crude gas of thionyl fluoride is introduced into the crude gas inlet 101 , and the crude gas is allowed to enter different serpentine coils 103 , and hot steam is introduced into the inlet pipe 4 of the preheating tank 1 .
[0039] In the prior art, during the preheating stage of the crude thionyl fluoride gas, hot steam is introduced into the serpentine coil 103, and then the gas is introduced into the equipment to contact the serpentine coil 103 with a certain temperature, thereby increasing the temperature of the crude gas to meet the distillation conditions. However, the amount of gas that can be introduced in this way is not proportional to the contact area of the heat medium, resulting in some gas passing out of the equipment before being cooled to a suitable temperature, affecting the distillation effect. Therefore, the present invention provides an internal circulation contact structure 2 to directly introduce the crude thionyl fluoride gas into the serpentine coil 103, and through the internal contact member 201, the external contact member 203 and the preheating tank body 1 itself, it can complete all-round contact with the serpentine coil 103, so that the crude gas in the serpentine coil 103 can be uniformly preheated, and its temperature can be raised to 50-100°C, thereby ensuring that the gas entering the distillation system can always maintain a suitable temperature.
[0040] The flow rate of the crude gas at the transverse transmission portion 1032 and the bend portion 1033 is different, which easily leads to uneven preheating at each position. In order to balance the flow rate at each position and ensure that the gas is always kept at an appropriate temperature, the inner and outer sides of the bend portion 1033 of this embodiment are both opened. The inner contact member 201 includes an inner air inlet portion 2011 embedded in the outer opening of the bend portion 1033, and the inner opening of the bend portion 1033 is provided with an inner air outlet portion 2012. An internal barrier portion 2013 is connected between the internal air inlet portion 2011 and the internal air outlet portion 2012. The internal air inlet portion 2011 is connected to the steam inlet pipe 204. The internal contact member 201 is arranged on the inner side of the bent portion 1033, and the internal barrier portion 2013 forms an obstruction in the bent portion 1033, so that the rough gas passing through this place can be heated by the inner side, thereby reducing the flow rate of the gas, and then balancing the problem of excessive transmission of the horizontal transmission portion 1032 at the front end.
[0041] In order to ensure the covering effect, all the inner blocking portions 2013 form a fan-shaped structure, so as to form a relatively complete coverage area inside the bent portion 1033 .
[0042] In order to cover more areas and fully improve the heat exchange effect, the internal barrier part 2013 includes an internal tube 20131 connected between the internal air inlet part 2011 and the internal air outlet part 2012. A plurality of barbed tubes 20132 extend outward from the circumferential outside of the internal tube 20131, so that the gap in the internal tube 20131 can also be closed by the barbed tubes 20132.
[0043] Although the internal contact piece 201 can heat the coarse air from the inside, this also leads to a problem, that is, the coarse air can easily leak from the inner air inlet 2011 and the inner air outlet 2012 of the inner barrier part 2013. Therefore, the hollow piece 202 of this embodiment includes a small sleeve 2021 nested on the outside of the inner air outlet 2012, and a large sleeve 2022 is nested on the outside of the inner air outlet 2012. A holding bag 2023 is connected between the small sleeve 2021 and the large sleeve 2022, and is ringed on the outside of the bending part 1033. The holding bag 2023 is hollow. By arranging the hollow piece 202 at the inner air inlet 2011 and the inner air outlet 2012, the two sleeves of the hollow piece 202 wrap the entire internal heating structure in a chamber, so that even if leakage occurs, there will be a time of saturation. Once saturated, it can continue to flow forward without affecting the overall use.
[0044] Since multiple serpentine coils 103 are used, the spacing between each transverse transfer part 1032 is small, so the heat transfer effect between each transverse transfer part 1032 is not good. Therefore, the external contact piece 203 of this embodiment includes an outer transverse tube 2031 connected to the steam inlet pipe 204. The outer transverse tube 2031 is provided with an outer discharge hole 2032 near the transverse transfer part 1032. Through the provided external contact piece 203, the pipeline is extended to the transverse transfer part 1032, so that the heat medium can be directly extended to the position of the transverse transfer part 1032, thereby ensuring temperature consistency even in a relatively narrow position.
[0045] In order to avoid turbulence at the far end of the outer transverse tube 2031, a lower guide portion 2033 is provided on the side of the outer transverse tube 2031 close to the inner contact piece 201. The steam can be discharged directly from the lower guide portion 2033 to avoid the formation of internal turbulence and allow the steam to flow out more smoothly.
[0046] By adopting an external heat medium, the heat medium will condense into liquid and fall after preheating. If this part is directly deposited at the bottom of the preheating tank body 1, it will significantly affect the temperature of the bottom serpentine coil 103. Therefore, the present invention provides a lower isolation structure 3 on the basis of the internal circulation contact structure 2, extending the bottom of the entire preheating tank body 1, and wrapping the preheated raw gas in the inner heat cover 301. The inner heat cover 301 is isolated from the outside by the outer isolation cover 302, and all the condensed water is passed to the bottom of the preheating tank body 1 for rapid discharge, so that the condensed water can be discharged smoothly while avoiding affecting the temperature of the raw gas in the serpentine coil 103.
[0047] In order to prevent condensed water from accumulating at the position of the serpentine coil 103, it is necessary to drain the condensed water quickly, and the discharged condensed water must not affect the preheated raw air. Therefore, the inner heat cover 301 of this embodiment includes a long cone 3011 connected to the lower through portion 1034, and the lower end of the long cone 3011 is connected to a short cone 3012. The long cone 3011 is spaced apart from the inner wall of the preheating tank 1, and the inner heat cover 301 is configured as a structure that is long at the top and short at the bottom. Through the configuration of the long cone 3011 and the short cone 3012, the condensed water can be drained away with the largest taper while completely isolating the raw air from the influence of the external temperature, thereby ensuring that the raw air temperature inside is always within the required range.
[0048] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.
Claims
1. A preheating device for preparing electronic grade thionyl fluoride, characterized in that: include: A preheating tank body (1), wherein the upper end of the preheating tank body (1) is connected to a crude gas inlet (101), the lower end of the preheating tank body (1) is connected to a crude gas outlet (102), at least one serpentine coil (103) is connected between the crude gas inlet (101) and the crude gas outlet (102), and the preheating tank body (1) is provided with an inlet pipe (4) and an outlet pipe (5), and further comprising: An internal circulation contact type structure (2), wherein the serpentine coil (103) comprises an upper through portion (1031) connected to a crude gas inlet (101), the upper through portion (1031) being connected to a transverse transmission portion (1032), the end of the transverse transmission portion (1032) being connected to a bending portion (1033), the transverse transmission portions (1032) and the bending portions (1033) being arranged alternately, the transverse transmission portion (1032) at the lowest end being connected to a lower through portion (1034) communicating with a crude gas outlet (102), the internal circulation contact type structure (2) comprising an internal contact member (201) arranged on the side of the bending portion (1033) ), a hollow member (202) is provided on the outer side of the inner contact member (201), an outer contact member (203) is connected to the side of the inner contact member (201) close to the transverse transmission part (1032), the outer contact member (203) is located between the two transverse transmission parts (1032), the inner contact member (201) and the outer contact member (203) are both connected to the steam inlet pipe (204), the steam inlet pipe (204) is located on the outer side of the preheating tank body (1), and the steam entering through the steam inlet pipe (204) is output from the inner contact member (201) and the outer contact member (203) and then condenses and falls to the bottom of the preheating tank body (1); The inner and outer sides of the bending portion (1033) are both opened, the inner contact member (201) comprises an inner air inlet portion (2011) embedded in the opening on the outer side of the bending portion (1033), the inner opening of the bending portion (1033) is provided with an inner air outlet portion (2012), an inner barrier portion (2013) is connected between the inner air inlet portion (2011) and the inner air outlet portion (2012), the inner air inlet portion (2011) is connected to the steam inlet pipe (204), all the inner barrier portions (213) form a fan-shaped structure, the inner barrier portion (2013) comprises an inner through pipe (20131) connected between the inner air inlet portion (2011) and the inner air outlet portion (2012), and a plurality of barbed tubes (20132) extend outwardly from the circumferential exterior of the inner through pipe (20131); The lower isolation structure (3) comprises an inner heat cover (301) arranged at the lower end of the lower through portion (1034), an outer isolation cover (302) is arranged on the outer side of the inner heat cover (301), a circulation rack (303) is arranged on the outer side of the outer isolation cover (302), and the outer side of the circulation rack (303) is fixed to the inner side of the preheating tank body (1) and communicates with the outside, and the condensed steam falls to the bottom of the preheating tank body (1) after being guided by the outer isolation cover (302).
2. The preheating device for preparing electronic-grade thionyl fluoride according to claim 1, wherein The hollow member (202) comprises a small sleeve (2021) nested on the outside of the inner air outlet portion (2012); a large sleeve (2022) is nested on the outside of the inner air outlet portion (2012); a holding bag (2023) looped around the outside of the bending portion (1033) is connected between the small sleeve (2021) and the large sleeve (2022); and the holding bag (2023) is hollow.
3. The preheating device for preparing electronic-grade thionyl fluoride according to claim 1, wherein The external contact member (203) comprises an external transverse tube (2031) connected to the steam inlet tube (204), and the external transverse tube (2031) is provided with an external discharge hole (2032) at a position close to the transverse transmission portion (1032).
4. The preheating device for preparing electronic-grade thionyl fluoride according to claim 3, wherein: A lower guide portion (2033) is provided on one side of the outer transverse tube (2031) close to the inner contact piece (201).
5. The preheating device for preparing electronic-grade thionyl fluoride according to claim 1, wherein: The inner heat shield (301) comprises a long conical portion (3011) connected to the lower through portion (1034), the lower end of the long conical portion (3011) is connected to a short conical portion (3012), and the long conical portion (3011) is spaced apart from the inner wall of the preheating tank body (1).
6. The preheating device for preparing electronic-grade thionyl fluoride according to claim 5, characterized in that: The outer isolation cover (302) comprises a separation cover (3021) which is arranged on the inner heat cover (301), and an isolation felt (3022) is embedded in the interior of the separation cover (3021), and the thickness of the isolation felt (3022) is half the thickness of the separation cover (3021).
7. The preheating device for preparing electronic-grade thionyl fluoride according to claim 6, characterized in that: The circulation rack (303) includes a retaining rack (3031) fixed on the inner side of the preheating tank (1), and the retaining rack (3031) is connected to the inner side of the separation cover (3021) through a plurality of connecting rods (3032).
Citation Information
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