Three-dimensional piezoelectric nanometer positioning table

Abstract

The invention relates to the technical field of precise positioning tables, and discloses a three-dimensional piezoelectric nanometer positioning table which sequentially comprises an X-axis piezoelectric driving mechanism, a Z-axis piezoelectric driving mechanism and a Y-axis piezoelectric driving mechanism from bottom to top. The Y-axis piezoelectric driving mechanism and the Z-axis piezoelectric driving mechanism are connected through a first adapter plate. And the Z-axis piezoelectric driving mechanism is connected with the X-axis piezoelectric driving mechanism through a second adapter plate. And the Y-axis piezoelectric driving mechanism is provided with a moving surface. And the X-axis piezoelectric driving mechanism, the Y-axis piezoelectric driving mechanism and the Z-axis piezoelectric driving mechanism respectively drive the moving surface to linearly move along the X axis, the Y axis and the Z axis. According to the invention, piezoelectric ceramic is taken as a driving source, and X-axis, Y-axis and Z-axis three-dimensional ultra-precision movement of a moving surface is realized through a series structure of the Y-axis piezoelectric driving mechanism, the first adapter plate, the Z-axis piezoelectric driving mechanism, the second adapter plate and the X-axis piezoelectric driving mechanism. The whole structure is compact, the motion coupling is small, the repeated positioning precision is high, the response speed is high, and the stroke is large.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision positioning platforms, and in particular relates to a three-dimensional piezoelectric nanopositioning platform. Background Art

[0002] As scientific and technological exploration deepens into the microscopic world, more and more scientific fields have extreme demands for precision positioning, such as ensuring stable focusing of light beams at the nanometer level in laser processing, achieving precise wafer alignment in semiconductor testing, and performing super-resolution microscopic imaging in biomedicine. These application scenarios all have the same core demand - a precision positioning stage with multiple degrees of freedom, high precision, and fast response. In recent years, thanks to the advancement of piezoelectric ceramic manufacturing processes and technologies, current commercial piezoelectric ceramic sheets have significant characteristics such as miniaturization, high reliability and stability, and are very suitable for various precision adjustments and precision instrument applications. However, since multi-degree-of-freedom precision positioning stages are often complex in structure and large in size, on the one hand, they are not easy to integrate with other positioning systems, and on the other hand, they have problems such as large motion coupling, low repeatability, small load, and slow response speed.

[0003] Based on the above, the current problem to be solved is to provide a three-dimensional piezoelectric nanopositioning stage with high repeatability, fast response speed, large load and small size. Summary of the Invention

[0004] The purpose of the present invention is to provide a three-dimensional piezoelectric nanopositioning stage, aiming to solve the problems of the prior art multi-degree-of-freedom positioning stage, such as complex structure, large volume, low repeatability, slow response speed and small load.

[0005] The present invention is achieved by providing a three-dimensional piezoelectric nanopositioning stage, comprising an upper cover, a lower cover, and a housing, wherein an X-axis piezoelectric drive mechanism, a Z-axis piezoelectric drive mechanism, and a Y-axis piezoelectric drive mechanism are sequentially provided between the upper cover and the lower cover and within the housing from bottom to top;

[0006] The Y-axis piezoelectric drive mechanism is connected to the Z-axis piezoelectric drive mechanism via a first adapter plate; the Z-axis piezoelectric drive mechanism is connected to the X-axis piezoelectric drive mechanism via a second adapter plate;

[0007] The Y-axis piezoelectric drive mechanism is provided with a moving surface, and the X-axis piezoelectric drive mechanism, the Y-axis piezoelectric drive mechanism, and the Z-axis piezoelectric drive mechanism drive the moving surface to move linearly along the X-axis, the Y-axis, and the Z-axis respectively.

[0008] Furthermore, the Y-axis piezoelectric drive mechanism further includes a first moving part and a first fixed part provided on the periphery of the first moving part, and a first flexible hinge connected to the first moving part and the first fixed part;

[0009] The moving surface is arranged on a side of the first moving part close to the upper cover, and a groove is provided on a side of the first moving part facing away from the moving surface, and a first piezoelectric ceramic is provided in the groove; the first piezoelectric ceramic is arranged parallel to the Y-axis, the fixed end of the first piezoelectric ceramic passes through the groove and is connected to the first fixed part, and the moving end of the first piezoelectric ceramic is connected to the first moving part.

[0010] Furthermore, the first flexible hinge includes a plurality of first flexible hinge arms, which are arranged parallel to the X-axis and symmetrically distributed on both sides of the first moving part.

[0011] Furthermore, a strain sensor is provided on the side of the first flexible hinge arm.

[0012] Furthermore, the Z-axis piezoelectric drive mechanism includes several Z-axis piezoelectric drive mechanism units; the Z-axis piezoelectric drive mechanism unit includes a first amplifier and a second piezoelectric ceramic, the first amplifier is provided with a cavity structure, the second piezoelectric ceramic is provided in the cavity structure, the movable end of the Z-axis piezoelectric drive mechanism unit is connected to the first adapter plate, and the fixed end of the Z-axis piezoelectric drive mechanism unit is connected to the second adapter plate.

[0013] Furthermore, several of the Z-axis piezoelectric drive mechanism units are arranged parallel to the X-axis or the Y-axis, and the angles between the long axes of two adjacent second piezoelectric ceramics and the Z-axis are +α and -α, respectively, and 0≤α<90°.

[0014] Furthermore, the Z-axis piezoelectric drive mechanism unit is provided with a strain sensor.

[0015] Furthermore, the X-axis piezoelectric drive mechanism includes a second moving part and a second fixed part provided on the periphery of the second moving part, and an X-axis piezoelectric driver and a third flexible hinge connected to the second moving part and the second fixed part;

[0016] The X-axis piezoelectric driver includes a quadrilateral magnifying body and a third piezoelectric ceramic arranged in the quadrilateral magnifying body. The third piezoelectric ceramic is arranged parallel to the Y-axis. The fixed end of the quadrilateral magnifying body is connected to the second fixed part, and the movable end of the quadrilateral magnifying body is connected to the second moving part, which is used to push the second moving part to move linearly along the X-axis.

[0017] Furthermore, the third flexible hinge includes a plurality of third flexible hinge arms, and the plurality of third flexible hinge arms are arranged parallel to the Y axis and symmetrically distributed on both sides of the second moving part.

[0018] Furthermore, a strain sensor is provided on the side surface of the third flexible hinge arm.

[0019] The beneficial effects of the three-dimensional piezoelectric nanopositioning stage provided by the present invention are as follows:

[0020] The present invention uses piezoelectric ceramics as a driving source and realizes three-dimensional ultra-precision motion of the moving surface in the X-axis, Y-axis and Z-axis directions through a series structure of a Y-axis piezoelectric driving mechanism, a first adapter plate, a Z-axis piezoelectric driving mechanism, a second adapter plate and an X-axis piezoelectric driving mechanism.

[0021] The Y-axis piezoelectric drive mechanism utilizes direct drive from the first piezoelectric ceramic, resulting in fast response speed, high resonant frequency, and excellent rigidity for the Y-axis linear motion of the moving surface. The first moving portion, first flexible hinge, and first fixed portion of the Y-axis piezoelectric drive mechanism are integrated into a series structure from the inside out. This provides the Y-axis piezoelectric drive mechanism with minimal kinematic coupling, high repeatability, fast response speed, and a compact structure with minimal dimensions. The thickness of the Y-axis piezoelectric drive mechanism approximates that of the first piezoelectric ceramic, significantly reducing the height of the series connection.

[0022] The Z-axis piezoelectric drive mechanism adopts a structure combining a second piezoelectric ceramic and a first amplifier. At the same time, several groups of Z-axis piezoelectric drive mechanism units are arranged parallel to the X-axis or Y-axis, with a compact layout and meeting large stroke requirements.

[0023] The X-axis piezoelectric drive mechanism utilizes a third piezoelectric ceramic and a quadrilateral amplifying body. The second moving portion, third flexible hinge, and second fixed portion are integrated and arranged in series from the inside out. This results in a large X-axis linear motion range, a compact structure, minimal kinematic coupling, and high repeatability. The X-axis piezoelectric drive mechanism is thin, approaching the thickness of the third piezoelectric ceramic, further reducing the height of the series connection and achieving miniaturization of the 3D piezoelectric nanopositioning stage.

[0024] The first adapter plate is provided with a first protrusion and a second protrusion, and the second adapter plate is provided with a third protrusion and a fourth protrusion, which effectively prevents mutual interference during structural movement on the one hand, and facilitates positioning and installation on the other hand.

[0025] The X-axis, Y-axis, and Z-axis piezoelectric actuators are equipped with strain sensors. The closed-loop, full-bridge design prevents temperature drift and eliminates the hysteresis and creep characteristics of piezoelectric ceramics. This provides real-time position detection and feedback, achieving millisecond-level response speeds and nanometer-level precision positioning control. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A schematic diagram of the three-dimensional structure of the three-dimensional piezoelectric nanopositioning stage provided by the present invention;

[0027] Figure 2 An exploded view of the three-dimensional piezoelectric nanopositioning stage provided by the present invention;

[0028] Figure 3 A schematic diagram of the three-dimensional structure of the combination of the X-axis piezoelectric driver, the second adapter plate, the Z-axis piezoelectric drive mechanism, the first adapter plate, and the Y-axis piezoelectric drive mechanism provided by the present invention;

[0029] Figure 4 A schematic diagram of the three-dimensional structure of the Y-axis piezoelectric drive mechanism provided by the present invention;

[0030] Figure 5 A bottom view of the Y-axis piezoelectric drive mechanism provided by the present invention;

[0031] Figure 6 A schematic diagram of the three-dimensional structure of the Z-axis piezoelectric drive mechanism provided by the present invention;

[0032] Figure 7 A top view of the X-axis piezoelectric drive mechanism provided by the present invention;

[0033] Figure 8 A schematic diagram of the three-dimensional structure of the first adapter plate provided by the present invention;

[0034] Figure 9 A schematic diagram of the three-dimensional structure of the second adapter plate provided by the present invention;

[0035] In the figure: 1-upper cover; 2-lower cover; 3-housing; 4-X-axis piezoelectric drive mechanism; 41-second moving part; 42-second fixed part; 43-X-axis piezoelectric driver; 431-quadrilateral amplifier; 432-third piezoelectric ceramic; 44-third flexible hinge; 5-Z-axis piezoelectric drive mechanism; 51-Z-axis piezoelectric drive mechanism unit; 511-first amplifier; 5111-second flexible hinge; 5112-cavity structure; 512-second piezoelectric ceramic; 6-Y-axis piezoelectric drive mechanism; 61-moving surface; 62-first moving part; 622-groove; 623-first piezoelectric ceramic; 63-first fixed part; 64-first flexible hinge; 7-first adapter plate; 71-first protrusion; 72-second protrusion; 8-second adapter plate; 81-third protrusion; 82-fourth protrusion; 9-strain sensor. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0037] The implementation of the present invention is described in detail below with reference to specific embodiments.

[0038] The same or similar numbers in the drawings of this embodiment correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right", etc. indicate the orientation or position relationship, they are based on the orientation or position relationship shown in the drawings. This is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, the terms describing the position relationship in the drawings are only used for illustrative purposes and cannot be understood as limiting this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0039] Reference Figure 1-9 The figure shows a preferred embodiment of the present invention.

[0040] A three-dimensional piezoelectric nanopositioning stage comprises an upper cover 1, a lower cover 2 and a housing 3. Figure 1 The upper cover 1, the lower cover 2 and the outer shell 3 together form a receiving cavity. Between the upper cover 1 and the lower cover 2, the outer shell 3 is provided with an X-axis piezoelectric drive mechanism 4, a Z-axis piezoelectric drive mechanism 5 and a Y-axis piezoelectric drive mechanism 6 from bottom to top. Figure 2-3 The top of the Y-axis piezoelectric drive mechanism 6 is provided with a raised moving surface 61. The upper cover 1 is provided with a through hole corresponding to the moving surface 61. The moving surface 61 passes through the through hole with a gap between the moving surface 61 and the through hole, allowing the moving surface 61 to move linearly along the X-axis, Y-axis, and Z-axis within and near the through hole.

[0041] The Y-axis piezoelectric drive mechanism 6 and the Z-axis piezoelectric drive mechanism 5 are connected by setting a first adapter plate 7. Figure 8 A plurality of first protrusions 71 are provided around one side of the first adapter plate 7. The first protrusions 71 are connected to the four sides of the Y-axis piezoelectric drive mechanism 6 via bolts. A second protrusion 72 is provided on the side of the first adapter plate 7 facing away from the first protrusions 71. The second protrusions 72 are connected to the Z-axis piezoelectric drive mechanism 5.

[0042] The Z-axis piezoelectric drive mechanism 5 and the Y-axis piezoelectric drive mechanism 6 are connected by setting a second adapter plate 8. Figure 9 . A third protrusion 81 is provided around one side of the second adapter plate 8. The third protrusion 81 is connected to the Z-axis piezoelectric drive mechanism 5. A fourth protrusion 82 is provided in the middle of the side of the second adapter plate 8 facing away from the third protrusion 81. The fourth protrusion 82 is connected to the X-axis piezoelectric drive mechanism 4. The Y-axis piezoelectric drive mechanism 6 directly pushes the moving surface 61 to realize Y-axis linear motion. Through the series structure of the Y-axis piezoelectric drive mechanism 6, the first adapter plate 7, the Z-axis piezoelectric drive mechanism 5, the second adapter plate 8 and the X-axis piezoelectric drive mechanism 4, the Z-axis piezoelectric drive mechanism 5 and the X-axis piezoelectric drive mechanism 4 respectively drive the moving surface 61 to move linearly along the Z-axis and the X-axis.

[0043] The Y-axis piezoelectric drive mechanism 6 further includes a first moving portion 62, a first fixed portion 63 and a first flexible hinge 64. Figure 4 and Figure 5 The first moving part 62 is provided in the middle, the first fixed part 63 is provided on the periphery of the first moving part 62 , the first flexible hinge 64 is provided between the first moving part 62 and the first fixed part 63 , and the first moving part 62 and the first fixed part 63 are connected by the first flexible hinge 64 .

[0044] The moving surface 61 is provided on the side of the first moving portion 62 close to the upper cover 1. A groove 622 is provided on the side of the first moving portion 62 facing away from the moving surface 61, and an opening is provided on the end of the groove 622 facing the first fixed portion 63. A first piezoelectric ceramic 623 is provided in the groove 622. The first piezoelectric ceramic 623 is arranged parallel to the Y-axis. The fixed end of the first piezoelectric ceramic 623 passes through the opening of the groove 622 and is connected to the first fixed portion 63, and the moving end of the first piezoelectric ceramic 623 is connected to the first moving portion 62. The first flexible hinge 64 includes a plurality of first flexible hinge arms, which are arranged parallel to the X-axis and symmetrically distributed on both sides of the first moving portion 62.

[0045] When voltage is applied, the first piezoelectric ceramic 623 propels the first moving portion 62 in a linear motion along the positive Y-axis. When the voltage is removed, the first piezoelectric ceramic 623 recovers its length, driving the first moving portion 62 in a linear motion along the negative Y-axis. Strain sensors 9 are installed on the side of the first flexible hinge arm to eliminate the hysteresis and creep characteristics of the piezoelectric ceramic, providing real-time position detection and feedback, and achieving nanometer-level precision positioning control.

[0046] The Z-axis piezoelectric drive mechanism 5 includes a plurality of parallel Z-axis piezoelectric drive mechanism units 51. Figure 6. The Z-axis piezoelectric drive mechanism unit 51 includes a first amplifier 511 and a second piezoelectric ceramic 512. The first amplifier 511 includes a cavity structure 5112 and a second piezoelectric ceramic 512 arranged in the cavity structure 5112. In a preferred embodiment, the first amplifier 511 is provided with four second flexible hinges 5111, two ceramic fixed ends and two protruding ends. The two protruding ends are symmetrically arranged up and down. The two ceramic fixed ends are symmetrically arranged left and right. The four second flexible hinges 5111 are respectively connected to the ceramic fixed ends and the protruding ends, and are symmetrically distributed. The cavity structure 5112 is surrounded by the second flexible hinge 5111, the ceramic fixed end and the protruding end. The moving end of the Z-axis piezoelectric drive mechanism unit 51 is connected to the second protrusion 72 of the first adapter plate 7 by bolts. The fixed end of the Z-axis piezoelectric drive mechanism unit 51 is connected to the third protrusion 81 of the second adapter plate 8 by bolts. Several Z-axis piezoelectric drive mechanism units 51 are arranged parallel to the X-axis or parallel to the Y-axis. The angles between the long axes of two adjacent second piezoelectric ceramics 512 and the Z-axis are +α and -α, respectively, and 0≤α<90°. In order to ensure that the first adapter plate 7 remains horizontal and does not deflect during movement, the moving ends of the several Z-axis piezoelectric drive mechanism units 51 must be evenly distributed. Therefore, the moving ends of the several Z-axis piezoelectric drive mechanism units 51 of the present invention are staggered, and the tilt directions of adjacent second piezoelectric ceramics 512 are opposite. Furthermore, the Z-axis piezoelectric drive mechanism unit 51 is provided with a strain sensor 9, specifically, it is arranged on the outer surface of the second flexible hinge 5111. Several Z-axis piezoelectric drive mechanism units 51 are connected in parallel to jointly drive the moving surface 61 to move linearly along the Z-axis, which has the advantages of high output and compact structure.

[0047] The X-axis piezoelectric drive mechanism 4 includes a second moving portion 41, a second fixed portion 42, an X-axis piezoelectric driver 43 and a third flexible hinge 44. Figure 7. The second moving part 41 is arranged in the middle part, and the second moving part 41 is connected to the fourth protrusion 82 by a bolt. The second fixed part 42 is arranged on the outer periphery of the second moving part 41. The third flexible hinge 44 is arranged between the second moving part 41 and the second fixed part 42. The two ends of the third flexible hinge 44 are respectively connected to the second moving part 41 and the second fixed part 42. The X-axis piezoelectric driver 43 is arranged between the second moving part 41 and the second fixed part 42. The X-axis piezoelectric driver 43 includes a quadrilateral magnifying body 431 and a third piezoelectric ceramic 432. The third piezoelectric ceramic 432 is arranged inside the quadrilateral magnifying body 431 and is arranged parallel to the Y-axis. The fixed end of the quadrilateral magnifying body 431 is connected to the second fixed part 42. The movable end of the quadrilateral magnifying body 431 is connected to the second moving part 41. The quadrilateral magnifying body 431 includes four flexible arms, and the four flexible arms can be set to an inward-concave or outward-expanding structure. The quadrilateral magnifying body 431 is configured to be concave, the third piezoelectric ceramic 432 is extended, and the movable end of the quadrilateral magnifying body 431 moves in a direction away from the third piezoelectric ceramic 432. The quadrilateral magnifying body 431 is configured to be flared, the third piezoelectric ceramic 432 is extended, and the movable end of the quadrilateral magnifying body 431 moves in a direction toward the third piezoelectric ceramic 432. The third flexible hinge 44 includes a plurality of third flexible hinge arms. These arms are arranged parallel to the Y-axis and symmetrically distributed on either side of the second moving portion 41. Strain sensors 9 are provided on the sides of the third flexible hinge arms.

[0048] When voltage is applied, the third piezoelectric ceramic 432 extends to push the second moving part 41 to move linearly along the positive direction of the X-axis. When voltage is removed, the third piezoelectric ceramic 432 returns to its original length to push the second moving part 41 to move linearly along the negative direction of the X-axis.

[0049] It is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A three-dimensional piezoelectric nanopositioning stage, comprising an upper cover (1), a lower cover (2) and a housing (3), characterized in that: An X-axis piezoelectric drive mechanism (4), a Z-axis piezoelectric drive mechanism (5), and a Y-axis piezoelectric drive mechanism (6) are sequentially provided in the housing (3) from bottom to top between the upper cover (1) and the lower cover (2); The Y-axis piezoelectric drive mechanism (6) is connected to the Z-axis piezoelectric drive mechanism (5) via a first adapter plate (7); the Z-axis piezoelectric drive mechanism (5) is connected to the X-axis piezoelectric drive mechanism (4) via a second adapter plate (8); The Y-axis piezoelectric drive mechanism (6) is provided with a moving surface (61), and the X-axis piezoelectric drive mechanism (4), the Y-axis piezoelectric drive mechanism (6), and the Z-axis piezoelectric drive mechanism (5) respectively drive the moving surface (61) to move linearly along the X-axis, the Y-axis, and the Z-axis.

2. The three-dimensional piezoelectric nanopositioning stage according to claim 1, characterized in that: The Y-axis piezoelectric drive mechanism (6) further includes a first moving portion (62), a first fixed portion (63) arranged on the periphery of the first moving portion (62), and a first flexible hinge (64) connected to the first moving portion (62) and the first fixed portion (63); The moving surface (61) is provided on a side of the first moving part (62) close to the upper cover (1); a groove (622) is provided on a side of the first moving part (62) away from the moving surface (61); a first piezoelectric ceramic (623) is provided in the groove (622); the first piezoelectric ceramic (623) is arranged parallel to the Y axis, a fixed end of the first piezoelectric ceramic (623) passes through the groove (622) and is connected to the first fixed part (63), and a moving end of the first piezoelectric ceramic (623) is connected to the first moving part (62).

3. The three-dimensional piezoelectric nanopositioning stage according to claim 2, characterized in that: The first flexible hinge (64) comprises a plurality of first flexible hinge arms, which are arranged parallel to the X-axis and symmetrically distributed on both sides of the first moving part (62).

4. The three-dimensional piezoelectric nanopositioning stage according to claim 3, characterized in that: A strain sensor (9) is provided on the side of the first flexible hinge arm.

5. The three-dimensional piezoelectric nanopositioning stage according to claim 1, characterized in that: The Z-axis piezoelectric drive mechanism (5) includes a plurality of Z-axis piezoelectric drive mechanism units (51); the Z-axis piezoelectric drive mechanism unit (51) includes a first amplifier (511) and a second piezoelectric ceramic (512); the first amplifier (511) is provided with a cavity structure (5112), and the second piezoelectric ceramic (512) is provided in the cavity structure (5112); the movable end of the Z-axis piezoelectric drive mechanism unit (51) is connected to the first adapter plate (7), and the fixed end of the Z-axis piezoelectric drive mechanism unit (51) is connected to the second adapter plate (8).

6. The three-dimensional piezoelectric nanopositioning stage according to claim 5, characterized in that: A plurality of the Z-axis piezoelectric drive mechanism units (51) are arranged parallel to the X-axis or the Y-axis, and the angles between the long axes of two adjacent second piezoelectric ceramics (512) and the Z-axis are +α and -α, respectively, and 0≤α<90°.

7. The three-dimensional piezoelectric nanopositioning stage according to claim 5, characterized in that: The Z-axis piezoelectric drive mechanism unit (51) is provided with a strain sensor (9).

8. The three-dimensional piezoelectric nanopositioning stage according to claim 1, characterized in that: The X-axis piezoelectric drive mechanism (4) includes a second moving part (41) and a second fixed part (42) arranged on the periphery of the second moving part (41), and an X-axis piezoelectric driver (43) and a third flexible hinge (44) connected to the second moving part (41) and the second fixed part (42); The X-axis piezoelectric driver (43) includes a quadrilateral magnifying body (431) and a third piezoelectric ceramic (432) arranged in the quadrilateral magnifying body (431), wherein the third piezoelectric ceramic (432) is arranged parallel to the Y-axis, the fixed end of the quadrilateral magnifying body (431) is connected to the second fixed part (42), and the movable end of the quadrilateral magnifying body (431) is connected to the second moving part (41), and is used to push the second moving part (41) to move linearly along the X-axis.

9. The three-dimensional piezoelectric nanopositioning stage according to claim 8, characterized in that: The third flexible hinge (44) includes a plurality of third flexible hinge arms, and the plurality of third flexible hinge arms are arranged parallel to the Y axis and symmetrically distributed on both sides of the second moving part (41).

10. The three-dimensional piezoelectric nanopositioning stage according to claim 9, characterized in that: A strain sensor (9) is provided on the side of the third flexible hinge arm.

Images