Liquid phase epitaxy tool and method for growing thin film by using liquid phase epitaxy tool

Abstract

The invention relates to the technical field of liquid phase epitaxy growth, and discloses a liquid phase epitaxy tool and a method for growing a thin film through liquid phase epitaxy of the liquid phase epitaxy tool, the tool comprises a base, a sliding strip, a falling-off supporting component, a mother liquor plate and a cover plate, the falling-off supporting component comprises an inner core and an outer ring which are arranged in a sleeving mode; the mother liquor plate is provided with a mother liquor tank for containing mother liquor; a first groove matched with the sliding strip is formed in the base, and a second groove is formed in the upper surface of the base; the sliding strip is located in the first groove, the sliding strip is provided with a through hole penetrating through the thickness, the falling-off supporting component is located in the through hole, and the upper surface of the falling-off supporting component is used for containing a substrate; the depth of the second groove is not smaller than the thickness of the substrate, the width of the second groove is matched with the thickness of the outer ring, and the outer ring falls into the second groove when moving to the position above the second groove along with the sliding strip, so that the edge of the substrate protrudes out of the inner core; the mother liquor plate is located on the upper surfaces of the base and the sliding strip. The tool can cut off the film from the periphery when mother liquor is in a molten state, and the yield of the film is improved.

Description

Technical Field

[0001] The present application relates to the field of liquid phase epitaxial growth technology, and in particular to a liquid phase epitaxial tool and a method for growing a thin film using the same. Background Art

[0002] Liquid phase epitaxial growth technology is a mature III-V or II-VI compound semiconductor single crystal thin film growth technology, which has the characteristics of higher mobility and carrier lifetime, high deposition efficiency and low growth cost.

[0003] Horizontal push boat liquid phase epitaxial growth is a major growth method. The liquid phase epitaxial tooling is the most critical component of horizontal liquid phase epitaxial growth. The structural design of the graphite boat directly determines the quality of liquid phase epitaxial thin film materials. At present, the structure of the liquid phase epitaxial tooling is as follows: Figure 1 As shown, it includes a base 1, a slide 2, a pad 3, a mother liquid plate 4 and a cover plate 5, wherein the mother liquid plate is provided with a mother liquid tank for holding mother liquid 6, the cover plate 5 is located on the upper surface of the mother liquid plate 4, the base 1 is provided with a groove, the slide 2 is provided in the groove of the base 1, the upper surface of the slide 2 is flush with the upper surface of the base 1, the mother liquid plate 4 is located on the upper surfaces of the slide 2 and the base 1, and the slide 2 can move relative to the mother liquid tank in the groove of the base 1; the slide 2 is provided with a substrate groove, the pad 3 is located in the substrate groove, the height of the pad 3 is less than the thickness of the slide 2, the difference between the height of the pad 3 and the thickness of the slide 2 is the thickness of the substrate 6, and the substrate 7 is placed above the pad 3.

[0004] After the epitaxial growth of the thin film is completed, wait for the temperature of the graphite boat to drop to room temperature, and then remove the film from the substrate slot. When removing the film, it is necessary to gently push the pad upwards to lift the film above the upper surface of the slider, and then gently push the film away from the pad to complete the removal of the epitaxial material. Usually there is a small amount of residual solidified mother liquid in the gap between the film and the substrate slot, which sticks the film material and the slider together. Due to the high brittleness and poor toughness of the film, the thickness is generally relatively thin. Uneven force or slight collisions will easily cause cracks on the four sides of the film or even direct splits, causing the film to be scrapped. During the growth process, part of the mother liquid will inevitably flow into the gap between the substrate and the substrate slot, forming adhesion between the substrate slot and the substrate. When the film is pressed upward to remove the film, there will inevitably be uneven force on the adhesion part, which will tear the substrate and the epitaxial film, forming local cracks, or even direct shattering, seriously affecting the integrity of the film and resulting in a decrease in the process yield.

[0005] Therefore, how to solve the above technical problems should be the focus of those skilled in the art. Summary of the Invention

[0006] The purpose of the present application is to provide a liquid phase epitaxial growth tool and a method for growing a thin film using the same, so as to improve the yield of the liquid phase epitaxial growth thin film.

[0007] To solve the above technical problems, the present application provides a liquid phase epitaxial growth tool, comprising:

[0008] A base, a slide bar, a detachable support component, a mother liquid plate and a cover plate, wherein the detachable support component includes a sleeved inner core and an outer ring; the mother liquid plate is provided with a mother liquid tank for holding the mother liquid;

[0009] The base is provided with a first groove matched with the slide bar, and the upper surface of the base is provided with a second groove;

[0010] The slide bar is located in the first groove, the slide bar is provided with a through hole extending through the thickness thereof, the detachable support component is located in the through hole, and the upper surface of the detachable support component is used for placing a substrate;

[0011] The depth of the second groove is not less than the thickness of the substrate, and the width of the second groove matches the thickness of the outer ring. When the slider moves above the second groove, the outer ring falls into the second groove, so that the edge of the substrate protrudes from the inner core.

[0012] The mother liquid plate is located on the upper surfaces of the base and the slide bar, and the cover plate is located on the upper surface of the mother liquid plate.

[0013] Optionally, the inner core and the outer ring are separate structures.

[0014] Optionally, the inner core includes a support block, and the outer ring includes a support ring.

[0015] Optionally, the inner core and the outer ring are connected, and the inner core and the outer ring are relatively slidable.

[0016] Optionally, one of the outer surface of the inner core and the inner surface of the outer ring is provided with a slideway, and the other surface is provided with a protrusion matching the slideway.

[0017] Optionally, the upper surface of the outer ring has a step surface, the height of the outer ring is equal to the thickness of the slider, the height of the inner core is less than the height of the outer ring, and the height difference between the inner core and the outer ring and the height difference of the step surface are both equal to the thickness of the substrate.

[0018] Optionally, at least one end of the slide bar is provided with an opening and / or a support.

[0019] Optionally, it also includes:

[0020] A fastener is used to fix the base, the mother liquid plate and the cover plate.

[0021] Optionally, the fasteners include bolts, and the base, the mother liquid plate and the cover plate are provided with screw holes.

[0022] The present application also provides a method for growing a thin film by liquid phase epitaxy, using any of the above-mentioned liquid phase epitaxial tooling, comprising:

[0023] placing the substrate and the mother liquid in the liquid phase epitaxy tool;

[0024] Placing the liquid phase epitaxy device in an epitaxial furnace and heating the epitaxial furnace to melt the mother liquid in the mother liquid tank;

[0025] Cooling the epitaxial furnace to the mother liquid crystallization point temperature;

[0026] Pulling the slider to position the substrate below the mother liquid tank for epitaxial growth, and growing a thin film on the surface of the substrate;

[0027] When the epitaxial growth is completed and the mother liquid is still in a molten state, the slider is pulled again to separate the mother liquid from the substrate;

[0028] Continue to pull the slide bar so that the outer ring falls into the second groove of the base, the edge area around the substrate is in a suspended state, and the substrate and the film located on the upper surface of the substrate are automatically separated from the surrounding area.

[0029] A liquid phase epitaxial tool provided in the present application includes: a base, a slide, a detachable support component, a mother liquid plate and a cover plate, the detachable support component includes a sleeved inner core and an outer ring; the mother liquid plate is provided with a mother liquid tank for holding mother liquid; the base is provided with a first groove cooperating with the slide, and the upper surface of the base is provided with a second groove; the slide is located in the first groove, the slide is provided with a through hole penetrating the thickness, the detachable support component is located in the through hole, and the upper surface of the detachable support component is used to place a substrate; the depth of the second groove is not less than the thickness of the substrate, the width of the second groove matches the thickness of the outer ring, and the outer ring falls into the second groove when the slide moves to above the second groove, so that the edge of the substrate protrudes from the inner core; the mother liquid plate is located on the upper surfaces of the base and the slide, and the cover plate is located on the upper surface of the mother liquid plate.

[0030] It can be seen that the liquid phase epitaxial tooling of the present application includes a base, a slide, a detachable support component, a mother liquid plate and a cover plate. The detachable support component includes an inner core and an outer ring. The slide is provided in the first groove of the base and can slide in the first groove. The mother liquid tank of the mother liquid plate can hold the mother liquid, and the thin film is epitaxially grown on the surface of the substrate located on the detachable support component. After the growth is completed, when the mother liquid is in a molten state, the slide is pulled, and the detachable support component and the substrate move together with the slide. The base is also provided with a second groove matching the outer ring. When the outer ring moves to above the second groove, the outer ring falls into the second groove. Moreover, since the depth of the second groove is not less than the thickness of the substrate, the edges of the substrate are suspended and completely separated from the surrounding components, and the separation of the film from the surrounding components is also completed. Since the mother liquid of the film and the surrounding components is still in a molten state when the film is separated from the surrounding components, the film can be easily disconnected from the surrounding components, avoiding the operation of removing the film by pressing the pad after the mother liquid is completely cooled, solving the problem of film cracks and splits and improving the integrity of the film.

[0031] In addition, the present application also provides a method for liquid phase epitaxial thin film growth having the above advantages. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present application or the technical solutions of the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0033] Figure 1 It is a cross-sectional schematic diagram of a liquid phase epitaxial tool in the prior art;

[0034] Figure 2 A schematic structural diagram of a base in a liquid phase epitaxial tooling provided in an embodiment of the present application;

[0035] Figure 3 A schematic diagram of the structure of a slider in a liquid phase epitaxial tooling provided in an embodiment of the present application;

[0036] Figure 4 A schematic diagram of the structure of a mother liquid plate in a liquid phase epitaxy tool provided in an embodiment of the present application;

[0037] Figure 5 A schematic structural diagram of a cover plate in a liquid phase epitaxial tooling provided in an embodiment of the present application;

[0038] Figure 6 This is a schematic structural diagram of an outer ring in the liquid phase epitaxy tooling provided in an embodiment of the present application;

[0039] Figure 7 A schematic diagram of the structure in which the substrate is located on the inner core in the liquid phase epitaxial tooling provided in an embodiment of the present application;

[0040] Figure 8 A schematic diagram showing the state change of the detachable support component of the liquid phase epitaxy tooling provided in an embodiment of the present application when the slide bar is pulled;

[0041] In the figure, 1. base, 2. slide bar, 3. pad, 4. mother liquid plate, 5. cover plate, 6. mother liquid, 7. substrate, 8. inner core, 9. outer ring, 10. screw hole, 11. first groove, 12. second groove, 21. opening, 41. mother liquid tank. DETAILED DESCRIPTION

[0042] In order to enable those skilled in the art to better understand the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific embodiments. Obviously, the embodiments described are only a part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making any creative efforts are within the scope of protection of the present application.

[0043] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0044] The process of performing liquid phase epitaxial growth using current liquid phase epitaxial (LPE) tooling generally includes three steps: boat loading, epitaxial growth, and boat removal. First, boat loading: According to the desired film composition, the growth mother liquor of a certain composition ratio is weighed and placed into the mother liquor tank, and the substrate is placed into the substrate tank. Second, epitaxial growth: Automatically controlled by the equipment, the furnace body is heated and cooled according to a set temperature program. After the graphite boat is heated until the mother liquor is completely and evenly melted, the temperature is slowly lowered at a controlled rate. The solubility of the solute in the liquid solvent decreases with decreasing temperature. When saturation is reached, the slider is pulled to move the substrate directly below the mother liquor. Then, a suitable cooling process is used to control the growth rate, and a thin film is crystallized and grown on the substrate surface. After epitaxial growth is completed, the slider is pushed a second time to push the substrate out from under the mother liquor. Third, boat removal: After the temperature drops to room temperature, the film is removed from the substrate tank. Typically, a small amount of solidified mother liquor remains in the gap between the film and the substrate tank, adhering the film material to the slider. When removing the film, you need to gently push the pad upwards to lift the film above the upper surface of the slider, and then gently push the film away from the pad to complete the removal of the epitaxial material.

[0045] As described in the background technology section, after growing a thin film using current liquid phase epitaxial tooling, it is easy to cause local cracks or even direct breakage when taking out the film, which seriously affects the integrity of the film and leads to a decrease in the process yield.

[0046] In view of this, this application provides a liquid phase epitaxial tool, please refer to Figures 2 to 7 ,include:

[0047] Base 1, slide 2, detachable support component, mother liquid plate 4 and cover plate 5, the detachable support component includes a sleeved inner core 8 and outer ring 9; the mother liquid plate 4 is provided with a mother liquid tank 41 for holding mother liquid;

[0048] The base 1 is provided with a first groove 11 that cooperates with the slide bar 2, and the upper surface of the base 1 is provided with a second groove 12;

[0049] The slide bar 2 is located in the first groove 11. The slide bar 2 is provided with a through hole extending through the thickness thereof. The detachable support component is located in the through hole. The upper surface of the detachable support component is used for placing the substrate 7.

[0050] The depth of the second groove 12 is not less than the thickness of the substrate 7 , and the width of the second groove 12 matches the thickness of the outer ring 9 . When the slider 2 moves above the second groove 12 , the outer ring 9 falls into the second groove 12 , so that the edge of the substrate 7 protrudes from the inner core 8 .

[0051] The mother liquid plate 4 is located on the upper surfaces of the base 1 and the slide bar 2 , and the cover plate 5 is located on the upper surface of the mother liquid plate 4 .

[0052] The first groove 11 extends along the length of the base 1 , the width of the slide bar 2 is equal to the width of the first groove 11 , and the thickness of the slide bar 2 is equal to the depth of the first groove 11 . The second groove 12 is located at the bottom of the first groove 11 .

[0053] It should be noted that the shape of the detachable supporting component is not limited in this application and can be set at will.

[0054] For example, the shape of the detachable support component can be cylindrical, in which case the inner core 8 is cylindrical and the outer ring 9 is a circular ring; or the shape of the detachable support component can be a rectangular parallelepiped, in which case the inner core 8 is a rectangular parallelepiped and the outer ring 9 is a rectangular ring.

[0055] The outer ring 9 contacts the inner wall of the through hole in the slide bar 2 , and the lower surface of the outer ring 9 is flush with the lower surface of the inner core 8 .

[0056] The shape of the second groove 12 matches the shape of the outer ring 9. For example, when the outer ring 9 is a circular ring, the shape of the second groove 12 is circular; when the outer ring 9 is a rectangular ring, the shape of the second groove 12 is rectangular.

[0057] The depth of the second groove 12 can be equal to the thickness of the substrate 7, or the depth of the second groove 12 can be greater than the thickness of the substrate 7. The purpose is that when the outer ring 9 falls into the second groove 12, the height of the inner core 8 remains unchanged, so that the substrate 7 can be completely higher than the outer ring 9, completely separating the film from the surrounding molten mother liquid, and facilitating film removal.

[0058] To ensure that the detachable support component is not affected by the horizontal movement of the slider 2 on the base 1, the thickness of the outer ring 9 and the width of the second groove 12 should be minimized while meeting processing requirements. For example, the thickness of the outer ring 9 and the width of the second groove 12 can be 2 mm, which is much smaller than the dimensions of the substrate 7 and inner core 8. When the slider 2 is pulled during the process, the horizontal movement of the inner core 8 and outer ring 9 will not be affected by the second groove 12.

[0059] It should be noted that the present application does not impose any specific restrictions on the structure of the detachable supporting component, which can be set at will.

[0060] In one embodiment, the inner core 8 and outer ring 9 are separate components. This means that if the inner core 8 or outer ring 9 is damaged, the damaged component can be replaced independently, eliminating the need to replace both components, thus saving costs.

[0061] In one embodiment of the present application, the inner core 8 comprises a support block, and the outer ring 9 comprises a support ring. Figure 6 and Figure 7 shown.

[0062] The projection of the inner core 8 on the base 1 is within the projection range of the substrate 7 on the base 1, so that the substrate 7 can be directly grasped with tweezers. The distance between the four edges of the inner core 8 and the four edges of the substrate 7 can be within 1 mm.

[0063] As another possible embodiment, the inner core 8 and the outer ring 9 are connected, and the inner core 8 and the outer ring 9 can slide relative to each other. The inner core 8 and the outer ring 9 are connected together and can be placed in the through hole at the same time when in use, which is convenient for installation.

[0064] In one embodiment of the present application, one of the outer surface of the inner core 8 and the inner surface of the outer ring 9 is provided with a slideway, and the other surface is provided with a protrusion matching the slideway. The protrusion is stuck in the slideway and can slide in the slideway.

[0065] For example, a slideway may be provided on the outer surface of the inner core 8 and a protrusion may be provided on the inner surface of the outer ring 9; or a protrusion may be provided on the outer surface of the inner core 8 and a slideway may be provided on the inner surface of the outer ring 9.

[0066] The outer surface of the inner core 8 is the surface close to the outer ring 9 , and the inner surface of the outer ring 9 is the surface close to the inner core 8 .

[0067] The base 1, the slide 2, the detachable support component, the mother liquid plate 4 and the cover plate 5 can be made of graphite, that is, the liquid phase epitaxy tooling is a graphite tooling. Graphite has the advantages of high chemical stability, good thermal stability, and can be reused many times after cleaning and maintenance.

[0068] The liquid phase epitaxy tooling of this embodiment includes a base 1, a slide 2, a detachable support component, a mother liquid plate 4, and a cover plate 5. The detachable support component includes an inner core 8 and an outer ring 9. The slide 2 is disposed in a first groove 11 of the base 1 and can slide in the first groove 11. The mother liquid tank 41 of the mother liquid plate 4 can hold mother liquid, and epitaxially grow a thin film on the surface of the substrate 7 located on the detachable support component. After the growth is completed, when the mother liquid is in a molten state, the slide 2 is pulled, and the detachable support component and the substrate 7 move along with the slide 2. The base 1 is also provided with a second groove 12 that matches the outer ring 9. When the outer ring 9 moves above the second groove 12, the outer ring 9 falls into the second groove 12. Moreover, since the depth of the second groove 12 is not less than the thickness of the substrate 7, the edges of the substrate 7 are suspended and completely separated from the surrounding components, thereby completing the separation of the thin film from the surrounding components. Since the mother liquid of the film and the surrounding components is still in a molten state when the film is separated from the surrounding components, the film can be easily disconnected from the surrounding components, avoiding the operation of removing the film by pressing the pad after the mother liquid is completely cooled, solving the problem of film cracks and splits and improving the integrity of the film.

[0069] Based on the above embodiments, in one embodiment of the present application, please refer to Figure 6 The upper surface of the outer ring 9 has a step surface, the height of the outer ring 9 is equal to the thickness of the slide bar 2, the height of the inner core 8 is less than the height of the outer ring 9, and the height difference between the inner core 8 and the outer ring 9 and the height difference of the step surface are both equal to the thickness of the substrate 7.

[0070] The upper surface of the outer ring 9 includes two surfaces of different heights. The height of the outer ring 9 is the distance between the highest surface and the lower surface. In other words, the highest surface of the outer ring 9 is flush with the upper surface of the slider 2. The upper surface of the inner core 8 is flush with the lower surface of the outer ring 9.

[0071] When the substrate 7 is placed on the upper surface of the inner core 8, the upper surface of the substrate 7 is flush with the upper surface of the outer ring 9. When the outer ring 9 falls into the second groove 12, the height of the outer ring 9 changes as follows: Figure 8 shown.

[0072] In this embodiment, before the outer ring 9 falls into the second groove 12, the substrate 7 is located within the range of the outer ring 9 and moves with the movement of the outer ring 9. When the outer ring 9 falls into the second groove 12, the edge of the epitaxially grown thin film on the substrate 7 is automatically disconnected from the outer ring 9.

[0073] Based on the above embodiment, in one embodiment of the present application, the height of outer ring 9 is the same as that of inner core 8. The heights of outer ring 9 and inner core 8 are lower than the thickness of slider 2. The difference between the heights of outer ring 9 and inner core 8 and the thickness of slider 2 is equal to the thickness of substrate 7. When outer ring 9 falls into second groove 12, the edge of the epitaxially grown thin film on substrate 7 is automatically disconnected from the sidewall of the through-hole.

[0074] On the basis of any of the above embodiments, in one embodiment of the present application, at least one end of the slide bar 2 is provided with an opening 21 and / or a support.

[0075] An opening 21 and / or a support can be provided at either end of the slide bar 2, or both ends of the slide bar 2 are provided with an opening 21 and / or a support, or one end of the slide bar 2 is provided with an opening 21 and the other end is provided with a support.

[0076] The purpose of providing the opening 21 and / or the pillar is to facilitate the sliding of the control slide 2. For example, a hook can be hooked onto the opening 21 and / or the pillar to pull the slide 2 to move.

[0077] Based on any of the above embodiments, in one embodiment of the present application, the liquid phase epitaxial tooling may further include:

[0078] Fasteners are used to fix the base 1 , the mother liquid plate 4 and the cover plate 5 .

[0079] The base 1 , the mother liquid plate 4 and the cover plate 5 are tightly connected by providing fasteners, so as to facilitate the movement of the epitaxial tooling and prevent the mother liquid from being spilled out of the mother liquid tank 41 after being placed therein.

[0080] It should be noted that the present application does not impose any specific restrictions on fasteners, as long as the base 1 , the mother liquid plate 4 and the cover plate 5 can be tightly connected.

[0081] As an implementation method, the fasteners include bolts, and the base 1 , the mother liquid plate 4 and the cover plate 5 are provided with screw holes 10 .

[0082] After the base 1, the slide bar 2, the mother liquid plate 4 and the cover plate 5 are stacked up, the bolts are screwed into the screw holes 10 for fastening. The operation is very simple and convenient.

[0083] As another possible implementation method, the fastener can also include two clips, bolts and nuts, and screw holes 10 are provided on the two clips. After the base 1, the slide bar 2, the mother liquid plate 4 and the cover plate 5 are stacked up, one clip is set on the upper surface of the cover plate 5, and the other clip is set on the lower surface of the base 1. The bolts pass through the screw holes 10 of the two clips and cooperate with the nuts for tightening.

[0084] The present application further provides a method for growing a thin film by liquid phase epitaxy, using the liquid phase epitaxy tooling described in any of the above embodiments, comprising:

[0085] Step S101: placing a substrate and a mother liquid in the liquid phase epitaxy tool.

[0086] The mother liquor is located in the mother liquor tank of the liquid phase epitaxial growth tooling. The mother liquor depends on the material to be grown. For example, when epitaxial growth of mercury cadmium telluride is required, the mother liquor is the mother liquor required for growing mercury cadmium telluride. When growing gallium arsenide thin film, the mother liquor is the mother liquor required for growing gallium arsenide.

[0087] The substrate is located on the upper surface of the inner core in the liquid phase epitaxial tooling.

[0088] Step S102: placing the liquid phase epitaxial process in an epitaxial furnace and heating the epitaxial furnace to melt the mother liquid in the mother liquid tank.

[0089] Step S103: cooling the epitaxial furnace to the mother liquid crystallization point temperature.

[0090] Step S104: Pull the slider to position the substrate below the mother liquid tank for epitaxial growth, and grow a thin film on the surface of the substrate.

[0091] Step S105: When the epitaxial growth is completed and the mother liquid is still in a molten state, the slider is pulled again to separate the mother liquid from the substrate.

[0092] Step S106: Continue to pull the slide bar so that the outer ring falls into the second groove of the base, the edge area around the substrate is in a suspended state, and the substrate and the film on the upper surface of the substrate are automatically separated from the surrounding area.

[0093] The method in this embodiment drops the outer ring into the second groove of the base after the epitaxy is completed and the mother liquid is still in a molten state, that is, the separation of the film and the tooling is completed during the liquid phase epitaxial growth process, and a suspended state is achieved in the edge area of the substrate. The entire substrate can be directly clamped with a clamp for subsequent sheet removal, avoiding the operation of pressing upward to remove the sheet after the mother liquid is completely cooled, thereby solving the problem of cracks and splits in the substrate and epitaxial film caused by uneven force when removing the sheet, ensuring the integrity of the film, and improving the yield of liquid phase epitaxial growth.

[0094] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0095] The above is a detailed introduction to the liquid phase epitaxial tooling provided by the present application and the method for growing thin films using the liquid phase epitaxial tooling. This article uses specific examples to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the scheme of the present application and its core idea. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present application, several improvements and modifications can be made to the present application, and these improvements and modifications also fall within the scope of protection of the present application.

Claims

1. A liquid phase epitaxial tool, characterized in that: include: A base, a slide bar, a detachable support component, a mother liquid plate and a cover plate, wherein the detachable support component includes a sleeved inner core and an outer ring; the mother liquid plate is provided with a mother liquid tank for holding the mother liquid; The base is provided with a first groove matched with the slide bar, and the upper surface of the base is provided with a second groove; The slide bar is located in the first groove, the slide bar is provided with a through hole extending through the thickness thereof, the detachable support component is located in the through hole, and the upper surface of the detachable support component is used for placing a substrate; The depth of the second groove is not less than the thickness of the substrate, and the width of the second groove matches the thickness of the outer ring. When the slider moves above the second groove, the outer ring falls into the second groove, so that the edge of the substrate protrudes from the inner core. The mother liquid plate is located on the upper surfaces of the base and the slide bar, and the cover plate is located on the upper surface of the mother liquid plate.

2. The liquid phase epitaxial tooling according to claim 1, characterized in that: The inner core and the outer ring are separate structures.

3. The liquid phase epitaxial tooling according to claim 2, characterized in that: The inner core includes a support block, and the outer ring includes a support ring.

4. The liquid phase epitaxial tooling according to claim 1, characterized in that: The inner core and the outer ring are connected, and the inner core and the outer ring are relatively slidable.

5. The liquid phase epitaxial tooling according to claim 4, characterized in that: Of the outer surface of the inner core and the inner surface of the outer ring, one surface is provided with a slideway, and the other surface is provided with a protrusion matching the slideway.

6. The liquid phase epitaxial tooling according to claim 1, characterized in that: The upper surface of the outer ring has a step surface, the height of the outer ring is equal to the thickness of the slider, the height of the inner core is less than the height of the outer ring, and the height difference between the inner core and the outer ring and the height difference of the step surface are both equal to the thickness of the substrate.

7. The liquid phase epitaxial tooling according to claim 1, wherein: At least one end of the slide bar is provided with an opening and / or a support.

8. The liquid phase epitaxial tool according to any one of claims 1 to 7, characterized in that: Also includes: A fastener is used to fix the base, the mother liquid plate and the cover plate.

9. The liquid phase epitaxial tooling according to claim 8, characterized in that: The fasteners include bolts, and the base, the mother liquid plate and the cover plate are provided with screw holes.

10. A method for growing a thin film by liquid phase epitaxial growth, characterized in that: The liquid phase epitaxial tooling according to any one of claims 1 to 9 comprises: placing the substrate and the mother liquid in the liquid phase epitaxy tool; Placing the liquid phase epitaxy device in an epitaxial furnace and heating the epitaxial furnace to melt the mother liquid in the mother liquid tank; Cooling the epitaxial furnace to the mother liquid crystallization point temperature; Pulling the slider to position the substrate below the mother liquid tank for epitaxial growth, and growing a thin film on the surface of the substrate; When the epitaxial growth is completed and the mother liquid is still in a molten state, the slider is pulled again to separate the mother liquid from the substrate; Continue to pull the slide bar so that the outer ring falls into the second groove of the base, the edge area around the substrate is in a suspended state, and the substrate and the film located on the upper surface of the substrate are automatically separated from the surrounding area.

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