Antifouling member, display, touch panel and sensor using same, and method for manufacturing antifouling member

By forming a nano-level concave and convex structure on the substrate surface and installing an anti-fouling layer on the concave portion, the problem of insufficient wear resistance and durability of the anti-fouling layer is solved, and a longer-term anti-fouling effect and transparency are achieved.

CN120500407APending Publication Date: 2025-08-15DAIKIN INDUSTRIES LTD
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Patent Information

Application Number
CN202380089579.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2022-12-28
Filing Date
2023-12-27
Publication Date
2025-08-15

AI Technical Summary

Technical Problem

The prior art has shortcomings in the wear resistance and long-term anti-fouling performance of the anti-fouling layer, resulting in the anti-fouling effect being not lasting.

Method used

A nano-level concave and convex structure is formed on the surface of the substrate, and an anti-fouling layer is provided on the concave and convex structure to enhance the anchoring effect of the anti-fouling layer, combined with a perfluoropolyether-containing silane compound material, improve the wear resistance and anti-fouling properties of the anti-fouling layer.

Benefits of technology

Through the combination of nano-level concave and convex structure and anti-fouling layer, the wear resistance and durability of the anti-fouling layer are significantly improved, and the transparency and anti-fouling effect of the anti-fouling parts are maintained.

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Abstract

In a first embodiment of the present invention, provided is an antifouling member which is provided with nanoscale irregularities on a surface of one surface, and which includes an antifouling layer provided on a recessed portion of the irregularities. The present invention also provides a display in which at least a part of a display portion is covered by the antifouling member, a touch panel in which at least a part of a touch portion is covered by the antifouling member, and a sensor in which at least a part of a surface is covered by the antifouling member.
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Description

Technical Field

[0001] The present invention relates to an antifouling member, a display, a touch panel, and a sensor using the antifouling member, and a method for manufacturing the antifouling member. Background Art

[0002] It is known that water- and oil-repellency and antifouling properties can be imparted to a substrate by surface treatment with a fluorine-based compound (for example, Patent Documents 1 and 2).

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-218639

[0004] [Patent Document 2] Japanese Patent Application Laid-Open No. 2017-082194

[0005] In a first embodiment of the present invention, an antifouling member having an antifouling layer is provided. Nanoscale concavities and convexities may be provided on one surface of an antifouling substrate. The antifouling layer may be provided on the concave portions of the concavities and convexities.

[0006] Among the above, the average pitch width of the convex portions of the concavo-convex may be 5 to 18 nm.

[0007] Among the above, the surface roughness (Rz) measured on the plane of the concave and convex parts may be 9 to 12 nm.

[0008] Among the above, the surface roughness (Rz) measured on the cross section of the concave and convex parts may be 3 to 5 nm.

[0009] Among the above, the maximum height difference (P-V) measured on the plane of the concavo-convex can be 5 to 15 nm.

[0010] Among the above, the maximum height difference (P-V) measured on the cross section of the concavo-convex can be 4 to 8 nm.

[0011] Among the above, the arithmetic mean roughness (Ra) measured on the plane of the concavoconvexity may be 0.6 to 2.0 nm.

[0012] Among the above, the arithmetic mean roughness (Ra) measured on the cross section of the concavo-convex may be 0.6 to 2.0 nm.

[0013] Among the above, the root mean square roughness (RMS) measured on the concavoconvex plane may be 0.8 to 2.0 nm.

[0014] Among the above, the root mean square roughness (RMS) measured on the cross section of the concavoconvex may be 0.7 to 3.0 nm.

[0015] Among the above, the antifouling member may include a substrate and a concavity-convexity-forming layer, and concavity-convexity may be formed on the surface of the concavity-convexity-forming layer.

[0016] Among the above, the antifouling member may include a substrate, and irregularities may be formed on the surface of the substrate.

[0017] In the above, the height of one surface of the antifouling layer formed in the concave portion in the normal direction does not exceed the convex portion of the concavo-convex portion.

[0018] Among the above, the contact angle of one surface of the antifouling member when it contacts water may be 105 to 120°.

[0019] Among the above, the pencil hardness of one surface of the antifouling member may be HB or higher.

[0020] Among the above, the antifouling layer may contain a perfluoropolyether group-containing silane compound.

[0021] Among the above, the concavoconvexity-forming layer may contain a silicone resin.

[0022] Among the above, the silicone resin may contain a Q unit structure and a T unit structure.

[0023] Among the above, the composition ratio of carbon atoms in the concave portion of the concavo-convex forming layer is larger than that in the convex portion.

[0024] Among the above, the molar concentration of the silanol groups in the concave portions of the concavo-convex forming layer is higher than that in the convex portions.

[0025] In a second aspect of the present invention, there is provided a display in which at least a portion of a display portion is covered with the above-mentioned antifouling member.

[0026] According to a third aspect of the present invention, there is provided a touch panel in which at least a portion of a touch portion is covered with the above-mentioned antifouling member.

[0027] In a fourth aspect of the present invention, there is provided a sensor in which at least a portion of the surface is covered with the above-mentioned antifouling member.

[0028] The above summary of the invention does not list all the features of the present invention. In addition, subcombinations of these feature groups can also constitute inventions. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 An example of the antifouling member 10 according to this embodiment is shown.

[0030] Figure 2 Another example of the antifouling member 10 according to this embodiment is shown.

[0031] Figure 3 An example of a flow of a method for manufacturing the antifouling member 10 according to the present embodiment is shown.

[0032] Figure 4 When the concavo-convex forming layer 120 is provided Figure 3An example of S100 of the process. DETAILED DESCRIPTION

[0033] The present invention will be described below by way of embodiments of the invention, but the following embodiments do not limit the invention as claimed. In addition, not all combinations of features described in the embodiments are essential for the solution of the invention.

[0034] Figure 1 and Figure 2 The figure shows an example of the antifouling component 10 of the present embodiment. The antifouling component 10 is a surface protection component to which stains and other attachments are not easily attached and any attached attachments are easy to remove. The antifouling component 10 is suitable for products (mobile terminals such as automobiles and smartphones, optical products such as cameras, measuring instruments such as sensors, other machinery, electrical products, etc.) or components to which stains (such as dust, pollen, fingerprints, oil, etc.) are not desired to be attached. For example, the antifouling component 10 is used to cover at least a portion of the display portion of a display, to cover at least a portion of the touch portion of a touch panel, or to cover at least a portion of the surface of a sensor. The antifouling component 10 is provided with nano-scale concavities and convexities on the surface of one surface, and is provided with an antifouling layer 130 provided on the concave portions of the concavities and convexities.

[0035] exist Figure 1 In the embodiment, the antifouling member 10 includes a substrate 110 , an unevenness-forming layer 120 , and an antifouling layer 130 , and the unevenness-forming layer 120 has nano-scale unevenness on its surface.

[0036] The substrate 110 supports the uneven surfaces provided on the antifouling member 10 and the antifouling layer 130. The substrate 110 can be made from a variety of materials depending on the intended use of the antifouling member 10. For example, the substrate 110 can be made of glass, resin, metal, ceramic, semiconductor, fiber material, fur, leather, wood, ceramic, stone, or any other material. When the antifouling member 10 is provided in an optical product or component thereof, such as a display or touch panel, the substrate 110 can be made of a transparent material such as glass or resin. The substrate 110 can have any shape, for example, a plate, as long as it has areas where the uneven surfaces can be provided.

[0037] The unevenness-forming layer 120 is provided on one surface of the substrate 110 and is a layer that uses its unevenness to support the antifouling layer 130. The unevenness-forming layer 120 can also function as a hard coating layer that imparts wear resistance to the antifouling member 10. The unevenness-forming layer 120 can be made of a wear-resistant material, such as an inorganic material such as silicon dioxide or a metal oxide, or a relatively hard organic material such as a silicone resin, acrylic resin, melamine resin, or polyurethane resin.

[0038] exist Figure 1In the example, the concavity-forming layer 120 is provided with concavities and convexities. By providing the concavities and convexities on the concavity-forming layer 120 as the lower layer of the antifouling layer 130, the antifouling layer 130 is surrounded by the convex parts and protected, and the antifouling layer 130 is embedded in the concave parts, so that the antifouling layer 130 is firmly bonded to the concavity-forming layer 120. At present, due to friction such as wiping off stains or long-term use, the antifouling layer on the surface of the antifouling component is sometimes worn out, and the antifouling performance cannot be sustained. On the other hand, with the antifouling component 10 of this embodiment, the antifouling layer 130 is firmly maintained by the concavities and convexities, so that the antifouling performance can be sustained for a longer time. In addition, by making the concavities and convexities nanometer-level, the transparency of the antifouling component 10 can also be ensured.

[0039] As an example, the concave-convex layer 120 can be made of a silicone resin having concave-convex structures. The silicone resin can contain Q unit structures and T unit structures. The concave portion can contain more T unit structures than the convex portion of the concave-convex portion. The surfaces of the convex and concave portions (particularly the surface of the concave portion) can also at least partially expose active silanol groups (Si-OH). This can further strengthen the bond with the anti-fouling layer 130. The method for forming the concave-convex structure of the silicone resin will be described later.

[0040] The cross section of the concavoconvex portion can adopt various shapes. For example, the cross section of the convex portion can be a shape with a rectangular tip, a conical or inverted conical tip, a pointed tip, a curved surface such as a hemisphere, etc.

[0041] The average pitch width (average peak-to-peak length) of the convex and concave portions can be 5 to 18 nm, preferably 7 to 15 nm. As long as the average pitch width is less than a specified size, the transparency of the antifouling component 10 can be ensured. In addition, as long as the average pitch width is greater than a specified size, the antifouling layer 130 can be more firmly maintained. In particular, by keeping the average pitch width within a certain range, the concave and convex portions of the concave-convex forming layer and the antifouling layer 130 can be firmly combined due to the anchoring effect, and the holding force of the antifouling layer 130 can be enhanced. The average pitch width can be a value measured on a specific cross section or plane using an atomic force microscope or the like.

[0042] The surface roughness (Rz) measured on the concave-convex plane can be 1 to 15 nm, and can be preferably 9 to 12 nm. The surface roughness (Rz) assumed on the cross section of the concave-convex can be 1 to 10 nm, and can be preferably 3 to 5 nm or more. As long as the surface roughness (Rz) is below the specified size, the transparency of the anti-fouling component 10 can be ensured. In addition, as long as the surface roughness (Rz) is above the specified size, the anti-fouling layer 130 can be more firmly maintained. In particular, by keeping the surface roughness (Rz) within a certain range, the concave-convex of the concave-convex forming layer and the anti-fouling layer 130 can be firmly combined due to the anchoring effect, which can enhance the holding force of the anti-fouling layer 130.

[0043] The arithmetic mean roughness (Ra) measured on the concave-convex plane can be 0.6 to 2.0 nm or more, and can be preferably 0.8 to 1.0 nm. The arithmetic mean roughness (Ra) measured on the concave-convex cross section can be 0.6 to 2.0 nm, and can be preferably 0.8 to 1.0 nm. As long as the arithmetic mean roughness (Ra) is below the specified size, the transparency of the anti-fouling component 10 can be ensured. In addition, as long as the arithmetic mean roughness (Ra) is above the specified size, the anti-fouling layer 130 can be more firmly maintained. In particular, by keeping the arithmetic mean roughness (Ra) within a certain range, the concave-convex of the concave-convex forming layer and the anti-fouling layer 130 can be firmly combined due to the anchoring effect, which can enhance the holding force of the anti-fouling layer 130.

[0044] The root mean square roughness (RMS) measured on the concave and convex plane can be 0.8 to 2.0 nm, and can be preferably 0.9 to 1.5 nm. The root mean square roughness (RMS) measured on the concave and convex cross section can be 0.7 to 3.0 nm, and can be preferably 0.9 to 1.5 nm. As long as the root mean square roughness (RMS) is below the specified size, the transparency of the anti-fouling component 10 can be ensured. In addition, as long as the root mean square roughness (RMS) is above the specified size, the anti-fouling layer 130 can be more firmly maintained. In particular, by keeping the root mean square roughness (RMS) within a certain range, the concave and convex of the concave and convex forming layer and the anti-fouling layer 130 can be firmly combined due to the anchoring effect, which can enhance the holding force of the anti-fouling layer 130.

[0045] The maximum height difference (P-V) measured on the plane of the concave and convex can be 5 to 15 nm, and can be preferably 8 to 12 nm. The maximum height difference (P-V) measured on the cross section of the concave and convex can be 4 to 8 nm, and can be preferably 3 to 7 nm. As long as the maximum height difference (P-V) is below the specified size, the transparency of the anti-fouling component 10 can be ensured. In addition, as long as the maximum height difference (P-V) is above the specified size, the anti-fouling layer 130 can be more firmly maintained. In particular, by keeping the maximum height difference (P-V) within a certain range, the concave and convex of the concave and convex forming layer and the anti-fouling layer 130 can be firmly combined due to the anchoring effect, which can enhance the holding force of the anti-fouling layer 130.

[0046] The antifouling layer 130 is formed on the side of the concavo-convex forming layer 120 opposite to the substrate 110 (i.e., the outermost surface of the antifouling member 10) to prevent stains and other attachments from adhering to the surface of the antifouling member 10. The antifouling layer 130 can be formed at least in the concave portion of the concavo-convex forming layer 120. For example Figure 1 As shown, the anti-fouling layer 130 may be formed only in the concave portions.

[0047] Alternatively, the antifouling layer 130 may be formed not only on the concave portions but also on the convex portions. In this case, the antifouling layer 130 on the convex portions may partially or completely peel off due to handling, use, or wiping of attached objects. Even in such a case, the concave portions firmly hold the antifouling layer 130. Therefore, the antifouling member 10 can maintain its antifouling performance.

[0048] The antifouling layer 130 only needs to be provided on at least the bottom surface of the concave portion and / or the upper surface of the convex portion. The antifouling layer 130 may be provided on all or part of the side surfaces of the concave portion and / or the convex portion, or may not be provided at all.

[0049] The normal direction of one surface of the antifouling layer 130 formed in the concave portion of the concavo-convex forming layer 120 ( Figure 1 The height of the antifouling layer 130 in the vertical direction may not exceed the convex part of the concave and ... forming layer 120. For example, it is desired that the height of the antifouling layer 130 in the concave part does not exceed the convex part in at least half of the concave parts. Figure 1 In the example, the height of one surface of the antifouling layer 130 formed in the concave portion in the normal direction is the same as the height of the convex portion of the concave-convex forming layer 120 (i.e., flush with the upper surface of the convex portion). In addition, the thickness of the antifouling layer 130 on the concave portion is preferably 1 to 10 nm.

[0050] The antifouling layer 130 exerts its antifouling properties only at the surface. Excessive thickness of the antifouling layer 130 in the concave portions can cause cloudiness (cloudiness) in the antifouling component. By ensuring that the antifouling layer 130 in the concave portions is not excessively thick, cloudiness (cloudiness) in the antifouling component can be prevented. Furthermore, the thicker portions of the antifouling layer 130 on the convex portions are more easily worn away by wiping, etc., thus reducing the risk of cloudiness (cloudiness).

[0051] The antifouling layer 130 can be formed from a material having oil-repellency and / or water-repellency. For example, the antifouling layer 130 can contain a fluorinated silane compound. Examples of fluorinated silane compounds include silane compounds containing perfluoropolyether groups, silane compounds containing perfluoroalkyl groups, and silane compounds containing an isocyanuric acid backbone. Details of the materials used for the antifouling layer 130 will be described later.

[0052] The antifouling member 10 can have a contact angle of 105 to 120° when one surface side (e.g., the antifouling layer 130 side) contacts water. This allows the antifouling member 10 to exhibit water repellency and demonstrate antifouling performance. Furthermore, the antifouling member 10 can have a contact angle of 90° or greater after the wear test 1 and / or the wear test 2 described below. This allows the antifouling member 10 to demonstrate long-term antifouling performance.

[0053] The pencil hardness of one surface side (eg, the antifouling layer 130 side) of the antifouling member 10 may be HB or higher. This allows the antifouling member 10 to maintain wear resistance sufficient to maintain the antifouling layer 130 for a longer period of time.

[0054] The antifouling member 10 can have a ΔHaze of 5 or less in the Taber abrasion test according to ASTM D1044 on one side (e.g., the antifouling layer 130 side). This allows the antifouling member 10 to retain the antifouling layer 130 for a longer period of time and maintain abrasion resistance sufficient to maintain transparency.

[0055] exist Figure 2 In the embodiment of the present invention, the antifouling member 10 includes a substrate 110 and an antifouling layer 130. Figure 2 In the embodiment, the concavoconvex forming layer 120 is not present, and concavoconvex is provided on the surface of the substrate 110. Thus, the substrate 110 is in direct contact with the antifouling layer 130. Figure 2 In the embodiment, the antifouling layer 130 is also firmly held by the concave and convex, so that the same Figure 1 The material, shape, size, contact angle and hardness of the substrate 110 and the antifouling layer 130 are different. Figure 1 The matters described in Figure 2 The present invention is also applicable to the embodiment of the present invention, so the description is omitted.

[0056] exist Figures 1-2In the example of the antifouling member 10, the antifouling layer 130 ( Figure 1 While the example of the antifouling member 10 further comprising a concavo-convex forming layer 120 is described, other layers may be provided. For example, the antifouling member 10 may be provided with a primer layer, an antireflection layer, an antiglare layer, an insulating layer, an adhesive layer, a release layer, a polarizing layer, and / or a phase difference layer, as needed.

[0057] Figure 3 An example of a flow of a method for manufacturing the antifouling member 10 according to this embodiment is shown. The antifouling member 10 can be manufactured by performing at least a part of S100 to S200.

[0058] In S100, nano-scale concavities and convexities are provided on the surface of the substrate 110. The substrate 110 may be Figures 1-2 For example, by providing the concavity-convexity forming layer 120 having nano-scale concavity-convexity on the substrate 110, concavity-convexity can be formed on the substrate 110.

[0059] Figure 4 When the concavo-convex forming layer 120 is provided Figure 3 An example of S100 of the process. Figure 3 The S100 can be performed by Figure 4 The processing of S110 to S130 is implemented.

[0060] In S110, a resin composition for forming unevenness is applied to the substrate 110. The resin composition for forming unevenness may be an organosiloxane-based hard coating agent having a T unit structure and a Q unit structure.

[0061] The Q unit structure is contained in the concavoconvex-forming resin composition in the form of silica gel particles (colloidal silica). The silica gel particles are substances that provide the shape of the convex portions of the concavoconvex structure in the later stage, and can preferably have a diameter of 1 to 100 nm, preferably 10 to 50 nm, and more preferably 10 to 20 nm. The diameter can be the particle size at which the cumulative volume accounts for 50% by volume when the volume-based particle size distribution is measured using a laser diffraction scattering particle size distribution measurement method, i.e., the median particle size D50.

[0062] The T unit structure can be included in the unevenness-forming resin composition in the form of an organosilsesquioxane polymer. The Q unit structure can be uniformly dispersed in the matrix of the T unit structure. The Q unit structure can be included in an amount of 5 to 50% by weight, preferably 15 to 35% by weight, relative to the sum of the T and Q unit structures.

[0063] For example, the unevenness-forming resin composition can be obtained by hydrolyzing colloidal silica and an alkyltrialkoxysilane (for example, methyltrimethoxysilane) and then condensing them to obtain a unevenness-forming resin composition containing a T unit structure and a Q unit structure.

[0064] A skeleton having a UV-absorbing function can be at least partially introduced into the T unit structure and / or the Q unit structure. Examples of skeletons having a UV-absorbing function include 4,6-dibenzoyl-2-(3-trialkoxysilylalkyl)resorcinol (specifically, 4,6-dibenzoyl-2-(3-triethoxysilylpropyl)resorcinol) described in Japanese Patent Application Laid-Open No. 7-278525, and hydroxybenzophenone compounds described in Japanese Patent Application Laid-Open Nos. 57-21476 and 57-21432. As an example of a resin composition for forming uneven surfaces, hard coating agents such as AS4700, AS4700F, PHC587C, and PHC587C2 manufactured by Momentive can be used.

[0065] As the coating method, coating can be performed by various coating methods such as dip coating, spin coating, flow coating, spray coating, roll coating, gravure coating, or printing methods such as relief printing, gravure printing, offset printing, reverse printing, and inkjet.

[0066] The thickness of the coated unevenness-forming resin composition may be 1 to 20 μm, and preferably 3 to 10 μm.

[0067] In S110, before applying the unevenness-forming resin composition, a primer composition for improving the adhesion between the substrate 110 and the unevenness-forming resin composition may be applied to the substrate 110. For example, the primer composition may be an acrylic resin composition, a polyester resin composition, a polyurethane resin composition, an epoxy resin composition, a melamine resin composition, a polyolefin resin composition, or a polyurethane acrylate resin composition.

[0068] Next, in S120, the unevenness-forming resin composition applied in S110 is dried. For example, it can be heat-cured at a temperature of 100-150°C, preferably 120-130°C, for 10-120 minutes, preferably 30-60 minutes. Drying can be performed using a hot air drying oven, a hot plate, an infrared heater, or the like.

[0069] Next, in S130, the concave-convex portion is formed by the dried concave-convex forming resin composition. For example, the concave-convex portion is formed by exposing the concave-convex forming resin composition. This is because the T unit structure of the concave-convex forming resin composition is modified into silicon dioxide (SiO2) by exposure, which causes volume shrinkage. Specifically, by irradiating UV light, ozone and active oxygen radicals are generated from oxygen in the atmosphere, which react with the Si-alkyl group contained in the T unit structure. As a result, the Si-alkyl group contained in the T unit structure decomposes into a silanol group and an aldehyde, and the two silanol groups further condense to form silicon dioxide (SiO2). The aldehyde further decomposes into water and CO2. In this way, when the T unit structure is modified into silicon dioxide (SiO2), volume shrinkage occurs, and the portion where the volume shrinkage occurs is recessed to form a concave portion.

[0070] Furthermore, although it depends on the exposure conditions, it is believed that not all T-unit structures are converted into silicon dioxide (SiO2) with Q-unit structures, and some T-unit structures may still remain. As a result, the convex and concave portions of the concave and convex are composed of Q-unit structures, while the concave and convex portions contain both Q-unit structures and T-unit structures.

[0071] On the other hand, the Q unit structure (colloidal silica) does not undergo chemical changes or volume shrinkage due to exposure. As a result, in the layer of the unevenness-forming resin composition, concave portions are formed only in areas containing more T unit structures, while convex portions are formed in areas containing more Q unit structures. In this way, an unevenness-forming layer 120 having unevenness can be formed.

[0072] In the concave-convex forming layer 120 formed in this way, silanol groups remain on the surface. In particular, in the concave portion, a portion of the silanol groups obtained by decomposing the T unit structure remain without condensation. In addition, in the concave portion, a portion of the Si-alkyl group from the T unit structure also remains. As a result, the composition ratio of carbon atoms contained in the concave portion is greater than that in the convex portion. In this way, as a result of a large number of carbon atoms or silanol groups remaining in the concave portion, it can be more firmly bonded to the anti-fouling layer 130 containing a silane compound containing a perfluoropolyether group, thereby improving the durability of the anti-fouling layer 130. The molar concentration of carbon atoms can be measured using an X-ray photoelectron spectroscopy analyzer.

[0073] The light source used for exposure can be any light source capable of modifying the T unit structure into silicon dioxide, and for example, a light source having a wavelength of about 150 to 190 nm can be used. Specifically, exposure can be performed using an excimer lamp, an excimer laser, an F2 laser, or the like.

[0074] Exposure can reach a cumulative illuminance of 300mJ / cm 2 The above method is carried out. The cumulative illumination is less than 1000mJ / cm 2 When the decomposition and condensation of the T unit structure is insufficient, the unevenness may not be sufficiently formed.

[0075] Exposure can reach a cumulative illuminance of 6000mJ / cm 2 The following method is used. More than 6000mJ / cm 2 When the silanol groups do not remain sufficiently on the surface of the concave portion, the adhesion to the antifouling layer 130 may be insufficient. However, even if the cumulative illuminance exceeds 6000 mJ / cm 2 The concavoconvex forming layer 120 itself can also be formed, which helps to fully improve the durability of the antifouling layer, so it is not necessary to make the cumulative illuminance 6000mJ / cm 2 the following.

[0076] exist Figure 4 The description relates to forming the concavo-convex layer 120 by exposing an organosiloxane-based hard coat agent to light, but the method is not limiting. The concavo-convex layer 120 can also be formed with nanoscale concavo-convexity by subjecting a thin film formed of a resin material or the like to nanoimprinting, photolithography, plasma processing, laser processing, or the like.

[0077] replace Figure 4 The processing of S110 to S130 can also be implemented by forming concave and convex on the substrate 110. For example, the desired concave and convex can be formed by performing nanoimprinting, photolithography, plasma treatment, laser treatment, etc. on the substrate 110. In this case, the desired concave and convex are formed. Figure 2 The antifouling member 10 shown in FIG. After S100, the process of S200 is performed.

[0078] In S200, an antifouling layer 130 is formed on the concavo-convex surface formed in S100. For example, the antifouling layer 130 can be formed by forming a layer of a fluorine-containing silane compound having oil repellency and / or water repellency on the concavo-convex surface. The antifouling layer 130 can be formed by applying a composition containing a fluorine-containing silane compound to the concavo-convex surface and drying the composition.

[0079] Examples of the fluorine-containing silane compound include a perfluoroalkyl group-containing silane compound (particularly a perfluoropolyether group-containing silane compound) and an isocyanuric acid skeleton-containing silane compound.

[0080] Examples of the perfluoroalkyl group-containing silane compound include compounds represented by the following formula (I).

[0081] [A] b1 Q 2 [B] b2 (I)

[0082] [Where:

[0083] Q 2 is a linking group having a valence of (b1+b2),

[0084] A is R f3 -O-R f2 - the group shown,

[0085] R f2 is a poly(oxyfluoroalkylene) chain,

[0086] R f3 is a perfluoroalkyl group,

[0087] B has 1 -R 12 -(SiR 2 r X 2 3-r ) and does not contain a monovalent group of fluorine atoms,

[0088] R 12 It is a hydrocarbon group having 2 to 10 carbon atoms, which may have an ethereal oxygen atom between carbon atoms or at the terminal opposite to the terminal bonded to Si, or may have -NH- between carbon atoms.

[0089] R 2 are each independently a hydrogen atom or a monovalent hydrocarbon group having 1 to 6 carbon atoms which may have a substituent,

[0090] X 2 are independently a hydroxyl group or a hydrolyzable group,

[0091] r is an integer from 0 to 2,

[0092] Q 2 and B does not contain a cyclic siloxane structure,

[0093] b1 is an integer from 1 to 3,

[0094] b2 is an integer from 2 to 9,

[0095] When b1 is 2 or more, the b1 A's may be the same or different, and the b2 B's may be the same or different.]

[0096] In formula (I), A is R f3 -O-R f2 - the group shown.

[0097] R f3 is a perfluoroalkyl group, preferably having 1 to 20 carbon atoms, more preferably 1 to 6 carbon atoms. f3 It can be straight chain or branched. Among them, the straight chain group is preferred from the perspective of easy availability: CF3 (CF2) m3-1(wherein m3 is 1 to 20, preferably 1 to 6), more preferably CF3- or CF3(CF2)2-, particularly preferably CF3(CF2)2-.

[0098] R f2 is a poly(oxyfluoroalkylene) chain. f2 For example, x F 2x O) y -(x is an integer from 1 to 6, y is an integer greater than 2, each -C x F 2x O-units may be the same or different). -C x F 2x The O- unit may be linear or branched, and examples include -CF2CF2CF2CF2CF2CF2CF2O-, -CF2CF2CF2CF2CF2O-, -CF2CF2CF2CF2O-, -CF2CF2CF2O-, -CF(CF3)CF2O-, -CF2CF2O-, and -CF2O-. y can be appropriately adjusted depending on the desired number average molecular weight. The preferred upper limit of y is 200.

[0099] R f2 It may also be a combination of multiple units, in which case the units may be present in any form, such as block, alternating, or random. For example, from the perspective of excellent light resistance, it is preferred to include -CF2CF2CF2CF2CF2CF2O-, -CF2CF2CF2CF2CF2O-, and -CF2CF2CF2CF2O-. The greater the ratio of these structures, the more preferred. From the perspective of ease of synthesis, a unit composed of a combination of -CF2CF2CF2CF2O- and -CF2CF2O-, i.e., -CF2CF2O-CF2CF2CF2CF2O-, is more preferred.

[0100] R f2 Specific examples include: (CF2CF2CF2CF2CF2CF2O) n3 -(CF2CF2CF2CF2CF2O) n4 -(CF2CF2CF2CF2O) n5 -(CF2CF2CF2O) n6 -(CF(CF3)CF2O) n7 -(CF2CF2O) n8 -(CF2O) n9 - (wherein, n3, n4, n5, n6, n7, n8 and n9 are each independently an integer greater than 0, the total of n3, n4, n5, n6, n7, n8 and n9 is greater than 2, and each repeating unit may exist in any form such as block, alternating or random).

[0101] As R f2 , preferably {(CF2O) n11 (CF2CF2O) n12}、(CF2CF2O) n13 、(CF2CF2CF2O) n14 、(CF2CF2O-CF2CF2CF2CF2O) n15 , more preferably {(CF2O) n11 (CF2CF2O) n12}、(CF2CF2CF2O) n14 Wherein, n11 is an integer greater than or equal to 1, n12 is an integer greater than or equal to 1, n11+n12 is an integer from 2 to 200, and the order of combining n11 CF2O and n12 CF2CF2O is not limited. n13 and n14 are integers from 2 to 200, and n15 is an integer from 1 to 100.

[0102] In formula (I), R f3 -O-R f2 - The number of groups A (b1) shown is an integer of 1 to 3. In formula (I), when there are multiple groups A, the groups A may be the same or different. Group A and the perfluoroalkyl group in the fluoroalkylsilane compound are groups that contribute to the hydrophobicity of the obtained surface treatment layer. When the perfluoroalkyl-containing silane compound has multiple groups A, it is preferred that R f3 -O-R f2 - The base density is high.

[0103] In formula (I), group B is a group having one -R at the terminal 12 -(SiR 2 r X 2 3-r )(hereinafter also referred to as "group (B a )".) and does not contain a cyclic siloxane structure and a monovalent group of a fluorine atom.

[0104] Group B is specifically -Y a -R 12 -(SiR 2 r X 2 3-r ) shown in the group. a -, group (B a ) and Q 2 Connect. Y a is a single bond, or is a divalent organic group that does not contain a cyclic siloxane structure and a fluorine atom. aFor example, it is a divalent group formed by bonding an alkylene group (e.g., an alkylene group or an arylene group) having an arylene group such as a phenylene group having 6 to 8 carbon atoms at the end, an alkylene group (e.g., a carbon number of 1 to 20 carbon atoms) and a silalkylene structure (e.g., a carbon number of 1 to 10, a Si number of 2 to 10) or a silarylene structure (e.g., a carbon number of 1 to 10, a Si number of 2 to 10), and the group (B a ) side terminal does not include an alkylene group. a Bonded Q 2 The atoms are atoms constituting the main chain, and specific examples thereof include Si, C, and N. a Single bonds are preferred.

[0105] R 12 It is a hydrocarbon group having 2 to 10 carbon atoms, which may have an etheric oxygen atom at the end of the carbon-carbon atom or the side opposite to the side bonded to Si, or may have -NH- between carbon-carbon atoms. Specifically, a group selected from -CH2CH2-, -CH2CH2CH2-, -CH2OCH2CH2CH2-, and -OCH2CH2CH2- (wherein the right side is bonded to Si) is preferred. In view of the excellent light resistance of the water-repellent film, -CH2CH2- and -CH2CH2CH2- without an etheric oxygen atom are particularly preferred. In formula (I), R of the group B that exists in multiple forms 12 They may or may not all be the same groups.

[0106] X 2 is a hydroxyl group or a hydrolyzable group. As the hydrolyzable group, X is suitable. 1 Examples and preferred embodiments of the hydrolyzable group. r is an integer from 0 to 2, and is preferably 0 or 1, more preferably 0, from the perspective of excellent adhesion and durability. 2 In the case of X 2 They may be the same or different, but are preferably the same from the viewpoint of easy availability.

[0107] R 2 is a hydrogen atom or a monovalent hydrocarbon group having 1 to 6 carbon atoms, which may also contain a substituent. Examples of the hydrocarbon group include linear or branched alkyl groups. Among them, linear or branched alkyl groups having 1 to 4 carbon atoms are preferred from the perspective of ease of availability, and methyl or ethyl groups are more preferred. Examples of the substituent group include a halogen atom (e.g., a chlorine atom). R as Si bonded 2 The number r is an integer from 0 to 2. 2 In the case of R 2 They may be the same or different, but are preferably the same from the viewpoint of easy availability.

[0108] In formula (I), the number of the groups B represented by b2 is an integer of 2 to 9. Therefore, the group (B a ) is 2 to 9. a ) is a group that contributes to the light resistance and wear resistance of the obtained water-repellent film. From the perspective of excellent light resistance and wear resistance of the obtained water-repellent film, the number of groups B in the perfluoroalkyl-containing silane compound, i.e., the number of groups (B a ) is preferably 2 to 4.

[0109] The multiple groups B in the perfluoroalkyl-containing silane compound may be the same or different. a ), can be the same or different.

[0110] In formula (I), Q 2 is a (b1+b2) valence linking group. 2 For example, it is a hydrocarbon group, and it may have an ester bond, an ether bond, an amide bond, a urethane bond, a phenylene group, -S-, a divalent amino group, a silylene structure, a silylene structure, or a siloxane structure (excluding a cyclic siloxane structure) at the terminal or between carbon atoms. The hydrogen atoms of the hydrocarbon group may be substituted by fluorine atoms. The hydrogen atoms of the hydrocarbon group may be substituted by hydroxyl groups, and the number of substituted hydroxyl groups is preferably 1 to 5. The hydrocarbon group may be straight-chain or branched. 2 The number of carbon atoms in is preferably 1-20, more preferably 1-10.

[0111] Among them, in Q 2 In the above, group A and group B may be bonded to the same atom, but preferably they are bonded to different atoms, and more preferably the atoms to which they are bonded are as far away from each other as possible within the molecule.

[0112] In addition, Q 2 -SiR may be directly bonded to atoms other than the ends of the molecular chain. 0 r1 X 4 3-r1 (R 0 、X 4 and r1 are respectively a ) of R 2 、X 2 The perfluoroalkyl group-containing silane compound preferably does not have a group (B a ) other than hydrolyzable silyl groups. Among them, the perfluoroalkyl-containing silane compound has -SiR 0 r1 X 4 3-r1 In the case of calculating the SiR 1p X 1 3-p SiR with silane compounds containing perfluoroalkyl 2 r X 2 3-r When the molar ratio of -SiR 0 r1 X 4 3-r1 Not included in SiR 2 r X 2 3-r middle.

[0113] In one embodiment, the perfluoroalkyl group-containing silane compound may be a compound represented by any of the following formulas (A1), (A2), (B1), (B2), (C1), and (C2):

[0114] (Rf-PFPE) β’ -X 5 -(SiR 21 n1 R 22 3-n1 ) β …(A1)

[0115] (R 22 3-n1 R 21 n1 Si) β -X 5 -PFPE-X 5 -(SiR 21 n1 R 22 3-n1 )β…(A2)

[0116] (Rf-PFPE) γ -X 7 -(SiR a k1 R b l1 R c m1 ) γ …(B1)

[0117] (R c m1 R b l1 R a k1 Si) γ -X 7 -PFPE-X 7 -(SiRa k1 R bl1 R c m1 ) γ …(B2)

[0118] (Rf-PFPE) δ -X 9 -(CR d k2 R e l2 R f m2 ) δ …(C1)

[0119] (R f m2 R e 12 R d k2 C) δ -X 9 -PFPE-X 9 -(CR d k2 R e l2 R f m2 ) δ …(C2)

[0120] [Where:

[0121] PFPE is independently represented at each occurrence by a group of the formula:

[0122] -(OC4F8) a -(OC3F6) b -(OC2F4) c -(OCF2) d -

[0123] (wherein, a, b, c, and d are each independently an integer of 0 to 200, the sum of a, b, c, and d is at least 1, and the order of the repeating units marked with the subscript a, b, c, or d and enclosed in parentheses is arbitrary in the formula.);

[0124] Rf, when present, independently represents an alkyl group having 1 to 16 carbon atoms which may be substituted with one or more fluorine atoms;

[0125] R 21 Each occurrence independently represents a hydroxyl group or a group capable of hydrolyzing;

[0126] R 22Each occurrence independently represents a hydrogen atom or an alkyl group having 1 to 22 carbon atoms;

[0127] n1 in each (-SiR 21 n1 R 22 3-n1 ) units are independently an integer from 0 to 3;

[0128] wherein, in formulas (A1) and (A2), at least one n1 is an integer from 1 to 3;

[0129] X 5 Each independently represents a single bond or a 2- to 10-valent organic group;

[0130] β are each independently an integer from 1 to 9;

[0131] β' are each independently an integer from 1 to 9;

[0132] X 7 Each independently represents a single bond or a 2- to 10-valent organic group;

[0133] γ are each independently an integer from 1 to 9;

[0134] γ' are each independently an integer from 1 to 9;

[0135] R a Indicates -Z independently at each occurrence 1 -SiR 71 p1 R 72 q1 R 73 r1 ;

[0136] Z 1 Each occurrence independently represents an oxygen atom or a divalent organic group;

[0137] R 71 Each occurrence represents R independently a' ;

[0138] R a' The significance of R a same;

[0139] R a In, through Z 1 The maximum number of Si groups connected in a straight chain is 5;

[0140] R 72 Each occurrence independently represents a hydroxyl group or a group capable of hydrolyzing;

[0141] R 73represents independently at each occurrence a hydrogen atom or a lower alkyl group;

[0142] p1 is independently an integer from 0 to 3 at each occurrence;

[0143] q1 is independently an integer from 0 to 3 at each occurrence;

[0144] r1 is independently an integer from 0 to 3 at each occurrence;

[0145] Wherein, in formulas (B1) and (B2), at least one q1 is an integer from 1 to 3;

[0146] R b Each occurrence independently represents a hydroxyl group or a group capable of hydrolyzing;

[0147] R c represents independently at each occurrence a hydrogen atom or a lower alkyl group;

[0148] k1 is independently an integer from 1 to 3 at each occurrence;

[0149] l1 is independently an integer from 0 to 2 at each occurrence;

[0150] m1 is independently an integer from 0 to 2 at each occurrence;

[0151] In the unit marked with γ and enclosed in brackets, the sum of k1, l1, and m1 is 3;

[0152] X 9 Each independently represents a single bond or a 2- to 10-valent organic group;

[0153] δ are each independently an integer from 1 to 9;

[0154] δ' are each independently an integer from 1 to 9;

[0155] R d Indicates -Z independently at each occurrence 2 -CR 81 p2 R 82 q2 R 83 r2 ;

[0156] Z 2 Each occurrence independently represents an oxygen atom or a divalent organic group;

[0157] R 81 Each occurrence represents R independently d' ;

[0158] Rd' The significance of R d same;

[0159] R d In, through Z 2 The maximum number of C atoms in a straight chain is 5.

[0160] R 82 Each occurrence represents -Y-SiR independently 85 n2 R 86 3-n2 ;

[0161] Y each independently represents a divalent organic group;

[0162] R 85 Each occurrence independently represents a hydroxyl group or a group capable of hydrolyzing;

[0163] R 86 represents independently at each occurrence a hydrogen atom or a lower alkyl group;

[0164] n2 in each (-Y-SiR 85 n2 R 86 3-n2 ) units independently represent an integer from 0 to 3;

[0165] wherein, in formulas (C1) and (C2), at least one n2 is an integer from 1 to 3;

[0166] R 83 represents independently at each occurrence a hydrogen atom, a hydroxyl group or a lower alkyl group;

[0167] p2 is independently an integer from 0 to 3 at each occurrence;

[0168] q2 is independently an integer from 0 to 3 at each occurrence;

[0169] r2 is independently an integer from 0 to 3 at each occurrence;

[0170] R e Each occurrence represents -Y-SiR independently 85 n2 R 86 3-n2 ;

[0171] R f represents independently at each occurrence a hydrogen atom, a hydroxyl group or a lower alkyl group;

[0172] k2 is independently an integer from 0 to 3 at each occurrence;

[0173] l2 is independently an integer from 0 to 3 at each occurrence;

[0174] m2 is independently an integer from 0 to 3 at each occurrence;

[0175] Wherein, in formulas (C1) and (C2), at least one q2 is 2 or 3, or at least one l2 is 2 or 3. ].

[0176] Formulas (A1) and (A2):

[0177] (Rf-PFPE) β’ -X 5 -(SiR 21 n1 R 22 3-n1 ) β …(A1)

[0178] (R 22 3-n1 R 21 n1 Si) β -X 5 -PFPE-X 5 -(SiR 21 n1 R 22 3-n1 ) β (A2) In the above formulas (A1) and (A2), PFPE is independently

[0179] -(OC6F 12 ) a -(OC5F 10 ) b -(OC4F8) c -(OC3F6) d -(OC2F4) e -(OCF2) f - the group shown.

[0180] In the formula, a, b, c, d, e, and f are each independently an integer from 0 to 200, and the sum of a, b, c, d, e, and f is at least 1. Preferably, the sum of a, b, c, d, e, and f is 5 or more, more preferably 10 or more. Preferably, the sum of a, b, c, d, e, and f is 200 or less, more preferably 200 or less, for example, from 10 to 200, more specifically from 10 to 100. In addition, the order of presence of the repeating units indicated by a, b, c, d, e, or f and enclosed in parentheses in the formula is arbitrary.

[0181] The above-mentioned a and b are each independently preferably 0 or more and 30 or less, and may be 0.

[0182] In one embodiment, a, b, c, and d are each independently preferably an integer of 0 or more and 30 or less, more preferably an integer of 20 or less, particularly preferably an integer of 10 or less, further preferably an integer of 5 or less, and may be 0.

[0183] In one embodiment, the sum of a, b, c, and d is preferably 30 or less, more preferably 20 or less, further preferably 10 or less, and particularly preferably 5 or less.

[0184] In one embodiment, the sum of e and f is preferably 30 or greater, more preferably 40 or greater, and even more preferably 50 or greater.

[0185] These repeating units may be linear or branched, preferably linear. For example, -(OC6F 12 )- can be -(OCF2CF2CF2CF2CF2CF2)-, -(OCF(C3)CF2CF2CF2CF2)-, -(OCF2CF(CF3)CF2CF2CF2)-, -(OCF2CF2CF(CF3)CF2CF2)-, -(OCF2CF2CF2CF(CF3)CF2CF2)-, -(OCF2CF2CF2CF2CF(CF3)CF2)-, -(OCF2CF2CF2CF2CF(CF3)CF2)-, -(OCF2CF2CF2CF2CF(CF3))-, etc., preferably -(OCF2CF2CF2CF2CF2CF2CF2)-. -(OC5F 10)- can be -(OCF2CF2CF2CF2CF2)-, -(OCF(CF3)CF2CF2CF2)-, -(OCF2CF(CF3)CF2CF2)-, -(OCF2CF2CF(CF3)CF2)-, -(OCF2CF2CF2CF(CF3)CF2)-, -(OCF2CF2CF2CF(CF3))-, etc., and is preferably -(OCF2CF2CF2CF2CF2)-. -(OC4F8)- may be any of -(OCF2CF2CF2CF2)-, -(OCF(CF3)CF2CF2)-, -(OCF2CF(CF3)CF2)-, -(OCF2CF2CF(CF3))-, -(OC(CF3)2CF2)-, -(OCF2C(CF3)2)-, -(OCF(CF3)CF(CF3))-, -(OCF(C2F5)CF2)-, and -(OCF2CF(C2F5))-, and is preferably -(OCF2CF2CF2CF2)-. -(OC3F6)- may be any of -(OCF2CF2CF2)-, -(OCF(CF3)CF2)-, and -(OCF2CF(CF3))-, and is preferably -(OCF2CF2CF2)-. In addition, -(OC2F4)- may be any of -(OCF2CF2)- and -(OCF(CF3))-, but is preferably -(OCF2CF2)-.

[0186] In one embodiment, the PFPE is -(OC3F6) d -(wherein, d is an integer from 1 to 200, preferably from 5 to 200, more preferably from 10 to 200). Preferably, PFPE is -(OCF2CF2CF2) d -(wherein, d is an integer of 1 to 200, preferably 5 to 200, more preferably 10 to 200) or -(OCF(CF3)CF2) d -(wherein, d is an integer from 1 to 200, preferably from 5 to 200, more preferably from 10 to 200). More preferably, PFPE is -(OCF2CF2CF2) d - (wherein, d is an integer of 1 to 200, preferably 5 to 200, more preferably 10 to 200).

[0187] In another embodiment, PFPE is -(OC4F8) c -(OC3F6) d -(OC2F4) e -(OCF2) f-(wherein, c and d are each independently an integer from 0 to 30, e and f are each independently an integer from 1 to 200, preferably from 5 to 200, more preferably from 10 to 200, the sum of c, d, e and f is at least 5, preferably at least 10, and the order of the repeating units enclosed in parentheses and denoted by the subscript c, d, e or f in the formula is arbitrary). A preferred PFPE is -(OCF2CF2CF2CF2) c -(OCF2CF2CF2) d -(OCF2CF2) e -(OCF2) f -.

[0188] In one embodiment, PFPE may be -(OC2F4) e -(OCF2) f -(wherein, e and f are each independently an integer of 1 to 200, preferably 5 to 200, more preferably 10 to 200, and the order of existence of the repeating units indicated by the subscript e or f and enclosed in parentheses is arbitrary in the formula).

[0189] In another embodiment, PFPE is -(R 6 -R 7 ) j - shown in the group. In the formula, R 6 Each occurrence is independently OCF2 or OC2F4, preferably OC2F4. 7 Each occurrence is independently selected from OC2F4, OC3F6, OC4F8, OC5F 10 and OC6F 12 or a combination of two or three groups independently selected from these groups. 7 is a group selected from OC2F4, OC3F6 and OC4F8, or is a group selected from OC3F6, OC4F8, OC5F 10 and OC6F 12The group in , or a combination of two or three groups independently selected from these groups. The combination of two or three groups independently selected from OC2F4, OC3F6 and OC4F8 is not particularly limited, and examples thereof include -OC2F4OC3F6-, -OC2F4OC4F8-, -OC3F6OC2F4-, -OC3F6OC3F6-, -OC3F6OC4F8-, -OC4F8OC4F8-, -OC4F8OC3F6-, -OC4F8OC2F4-, -OC2F 4OC2F4OC3F6-, -OC2F4OC2F4OC4F8-, -OC2F4OC3F6OC2F4-, -OC2F4OC3F6OC3F6-, -OC2F4OC4F8OC2F4-, -OC3F6OC2F4OC2F4-, -OC3F6OC2F4OC3F6-, -OC3F6OC3F6OC2F4- and -OC4F8OC2F4OC2F4-. The above j is an integer of 2 or more, preferably 3 or more, more preferably 5 or more and 100 or less, preferably 50 or less. In the above formula, OC2F4, OC3F6, OC4F8, OC5F 10 and OC6F 12 It can be either straight chain or branched chain, preferably straight chain. In this embodiment, PFPE is preferably -(OC2F4-OC3F6) j - or - (OC2F4-OC4F8) j -.

[0190] In PFPE, the ratio of e to f (hereinafter referred to as "e / f ratio") is 0.1 or more and 10 or less, preferably 0.2 or more and 5 or less, more preferably 0.2 or more and 2 or less, and further preferably 0.2 or more and 1.5 or less. By making the e / f ratio within the above range, the water repellency, oil repellency and chemical resistance (for example, durability to salt water, acid or alkaline aqueous solution, acetone, oleic acid or hexane) of the surface treatment layer obtained by the surface treatment agent of the present invention can be further improved. The smaller the e / f ratio, the higher the water repellency, oil repellency and chemical resistance of the surface treatment layer. On the other hand, by making the e / f ratio 0.1 or more, the stability of the compound can be further improved. The larger the e / f ratio, the higher the stability of the compound.

[0191] In the above formula, Rf represents an alkyl group having 1 to 16 carbon atoms which may be substituted with one or more fluorine atoms.

[0192] The "alkyl group having 1 to 16 carbon atoms" in the above-mentioned alkyl group having 1 to 16 carbon atoms which may be substituted with one or more fluorine atoms may be a linear or branched chain, preferably a linear or branched chain alkyl group having 1 to 6 carbon atoms, particularly a linear chain alkyl group having 1 to 3 carbon atoms, and more preferably a linear chain alkyl group having 1 to 3 carbon atoms.

[0193] The above Rf is preferably an alkyl group having 1 to 16 carbon atoms substituted with one or more fluorine atoms, more preferably CF2H-C 1-15 The fluorinated alkylene group is more preferably a perfluoroalkyl group having 1 to 16 carbon atoms.

[0194] The perfluoroalkyl group having 1 to 16 carbon atoms may be linear or branched, preferably a linear or branched perfluoroalkyl group having 1 to 6 carbon atoms, particularly a perfluoroalkyl group having 1 to 3 carbon atoms, more preferably a linear perfluoroalkyl group having 1 to 3 carbon atoms, specifically -CF3, -CF2CF3 or -CF2CF2CF3.

[0195] In the above formula, R 21 Each occurrence independently represents a hydroxyl group or a hydrolyzable group.

[0196] In the above formula, R 22 Each occurrence independently represents a hydrogen atom or an alkyl group having 1 to 22 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms.

[0197] In the above formula, n1 is in each (-SiR 21 n1 R 22 3-n1 ) units are independently an integer of 0 to 3, preferably 1 to 3, more preferably 3. In the formula, all n1 are not 0 at the same time. In other words, in the formula, there is at least one R 21 .

[0198] In the above formula, X 5 Each independently represents a single bond or a di- to decavalent organic group. 5 In the compounds represented by formula (A1) and (A2), it can be understood that the perfluoropolyether part (Rf-PFPE part or -PFPE- part) which mainly provides water repellency and surface smoothness and the silane part (specifically -SiR 21 n1 R 22 3-n1 Therefore, as long as the compounds represented by formula (A1) and (A2) can exist stably, the X 5 It can be any organic group.

[0199] In the above formula, β is an integer of 1 to 9, and β' is an integer of 1 to 9. These β and β' are determined by X 3 The valence is determined by the formula (A1), the sum of β and β' and X 5 The valence of is the same. For example, in X 5In the case of a decavalent organic group, the sum of β and β' is 10, for example, β is 9 and β' is 1, β is 5 and β' is 5, or β is 1 and β' is 9. 5 When X is a divalent organic group, β and β' are 1. In formula (A2), β is X 5 The value obtained by subtracting 1 from the valence value.

[0200] The above X 5 It is preferably a di- to hepta-valent organic group, more preferably a di- to tetra-valent organic group, and still more preferably a divalent organic group.

[0201] In one approach, X 5 It is a divalent to tetravalent organic group, β is 1 to 3, and β' is 1.

[0202] In another way, X 5 is a divalent organic group, β is 1, and β' is 1. In this case, formulae (A1) and (A2) are represented by the following formulae (A1') and (A2').

[0203] Rf-PFPE-X 5 -SiR 21 n1 R 22 3-n1 …(A1')

[0204] R 22 3-n1 R 21 n1 Si-X 5 -PFPE-X 5 -SiR 21 n1 R 22 3-n1 …(A2')

[0205] As the above X 5 Examples of are not particularly limited, and include single bonds or divalent groups represented by the following formula:

[0206] -(R 31 ) p' -(X a ) q' -

[0207] [Where:

[0208] R 31 Each occurrence independently represents a single bond, -(CH2) s' - or o-phenylene, m-phenylene or p-phenylene, preferably - is (CH2) s' -,

[0209] s' is an integer of 1 to 20, preferably an integer of 1 to 6, more preferably an integer of 1 to 3, and even more preferably 1 or 2.

[0210] X a Each occurrence represents independently -(X b ) l' -,

[0211] X b Each occurrence independently represents a group selected from -O-, -S-, o-phenylene, m-phenylene or p-phenylene, -C(O)O-, -Si(R 33 )2-、-(Si(R 33 )2O) m' -Si(R 33 )2-、-CONR 34 -、-O-CONR 34 -, -NR 34 - and -(CH2) n' - in the group,

[0212] R 33 Each occurrence independently represents phenyl, C 1-6 Alkyl or C 1-6 Alkoxy, preferably phenyl or C 1-6 Alkyl, more preferably methyl,

[0213] R 34 Each occurrence independently represents a hydrogen atom, a phenyl group or a C 1-6 an alkyl group (preferably a methyl group),

[0214] m' is independently an integer of 1 to 100 at each occurrence, preferably an integer of 1 to 20,

[0215] n' is independently an integer of 1 to 20 at each occurrence, preferably an integer of 1 to 6, more preferably an integer of 1 to 3,

[0216] l' is an integer of 1 to 10, preferably an integer of 1 to 5, more preferably an integer of 1 to 3,

[0217] p' is 0, 1, or 2,

[0218] q' is 0 or 1,

[0219] However, at least one of p' and q' is 1, and the order of existence of the repeating units indicated by p' or q' and enclosed in parentheses is arbitrary].

[0220] Among them, R 31 and X a (Typically R 31 and Xa The hydrogen atoms) may be selected from fluorine atoms, C 1-3 Alkyl and C 1-3 The fluoroalkyl group is substituted with one or more substituents.

[0221] In one embodiment, l' is 1.

[0222] Preferably, the above X 5 For -(R 31 ) p' -(X a ) q' -R 32 -. R 32 Represents a single bond, -(CH2) t' - or o-phenylene, m-phenylene or p-phenylene, preferably -(CH2) t' -. t' is an integer of 1 to 20, preferably an integer of 2 to 6, and more preferably an integer of 2 to 3. 32 (Typically R 32 The hydrogen atoms) may be selected from fluorine atoms, C 1-3 Alkyl and C 1-3 The fluoroalkyl group is substituted with one or more substituents.

[0223] Preferably, the above X 5 Can be a single bond or -Rf'-X 12 - shown in the group [wherein, X 12 C 1-20 Alkylene, -R 31 -X c -R 32 -or-X d -R 32 -[Where R 31 and R 32 The meaning is the same as above.] group, Rf' is a single bond or -(C l' F 2l' )-, l' is an integer from 1 to 4. ] wherein the alkylene group is a group having -(C n H 2n The group having a )- structure may be substituted or unsubstituted, and may be linear or branched.

[0224] More preferably, the above X 5 for

[0225] -X f -

[0226] -X f -C 1-20 Alkylene,

[0227] -X f-(CH2) s' -X c -

[0228] -X f -(CH2) s' -X c -(CH2) t' -

[0229] -X f -X d -,or

[0230] -X f -X d -(CH2) t' -.

[0231] Wherein, s' and t' have the same meanings as above.

[0232] In the above formula, X f It is an alkylene group having 1 to 6 carbon atoms, preferably 1 to 4 carbon atoms, more preferably 1 to 2 carbon atoms, for example, a methylene group. f The hydrogen atoms in the 1-3 Alkyl and C 1-3 The fluoroalkyl group is substituted with one or more substituents, preferably substituted. f It may be linear or branched, and is preferably linear.

[0233] More preferably, the above X 5 Can be a single bond, or -Rf'-X 13 - the group shown,

[0234] [Where, X 13 for

[0235] C 1-20 Alkylene,

[0236] -(CH2) s' -X c -

[0237] -(CH2) s' -X c -(CH2) t' -

[0238] -X d -,or

[0239] -X d -(CH2) t' -

[0240] [In the formula, s' and t' have the same meanings as above.] group,

[0241] Rf' is a single bond or -(C l' F 2l' )-,

[0242] l' is an integer from 1 to 4. ].

[0243] In the above formula, X c express

[0244] -O-,

[0245] -S-,

[0246] -C(O)O-,

[0247] -CONR 34 -

[0248] -O-CONR 34 -

[0249] -Si(R 33 )2-、

[0250] -(Si(R 33 )2O) m' -Si(R 33 )2-、

[0251] -O-(CH2) u' -(Si(R 33 )2O) m' -Si(R 33 )2-、

[0252] -O-(CH2) u' -Si(R 33 )2-O-Si(R 33 )2-CH2CH2-Si(R 33 )2-O-Si(R 33 )2-、

[0253] -O-(CH2) u' -Si(OCH3)2OSi(OCH3)2-,

[0254] -CONR 34 -(CH2) u' -(Si(R 33 )2O) m' -Si(R 33 )2-、

[0255] -CONR 34 -(CH2) u' -N(R 34 )-,or

[0256] -CONR34 -(o-phenylene, m-phenylene or p-phenylene)-Si(R 33 )2-

[0257] [Where R 33 、R 34 and m' have the same meaning as above,

[0258] u' is an integer of 1 to 20, preferably an integer of 2 to 6, and more preferably an integer of 2 to 3. ]

[0259] X c It is preferably -O-.

[0260] In the above formula, X d express

[0261] -S-,

[0262] -C(O)O-,

[0263] -CONR 34 -

[0264] -CONR 34 -(CH2) u' -(Si(R 33 )2O) m' -Si(R 33 )2-、

[0265] -CONR 34 -(CH2) u' -N(R 34 )-,or

[0266] -CONR 34 -(o-phenylene, m-phenylene or p-phenylene)-Si(R 33 )2-

[0267] [In the formula, the meanings of the symbols are the same as above. ]

[0268] The above X is particularly preferred 5 for

[0269] -X f -

[0270] -X f -C 1-20 Alkylene,

[0271] -X f -(CH2) s' -X c -

[0272] -X f -(CH2) s'-X c -(CH2) t' -

[0273] -X f -X d -,or

[0274] -X f -X d -(CH2) t' - the group shown,

[0275] [Where, X f , s' and t' have the same meanings as above.

[0276] X c -O- or -CONR 34 -,

[0277] X d CONR 34 -

[0278] R 34 Each occurrence independently represents a hydrogen atom, a phenyl group or a C 1-6 Alkyl (preferably methyl). ].

[0279] In one embodiment, the above X 5 for

[0280] -X f -(CH2) s' -X c -

[0281] -X f -(CH2) s' -X c -(CH2) t' -

[0282] -X f -X d -,or

[0283] -X f -X d -(CH2) t' - the group shown,

[0284] [Where, X f , s' and t' have the same meanings as above.

[0285] X c CONR 34 -,

[0286] X d CONR 34 -,

[0287] R 34 Each occurrence independently represents a hydrogen atom, a phenyl group or a C 1-6 Alkyl (preferably methyl). ].

[0288] In one embodiment, the above X 5 Can be

[0289] single bond,

[0290] C 1-20 Alkylene,

[0291] -(CH2) s' -X c -(CH2) t' -,or

[0292] -X d -(CH2) t' -

[0293] [In the formula, the meanings of the symbols are the same as above. ]

[0294] Preferably, the above X 5 is a single bond, or -Rf'-X 14 - the group shown,

[0295] [Where, X 14 for

[0296] C 1-20 Alkylene,

[0297] -(CH2) s' -O-(CH2) t' -

[0298] -(CH2) s' -(Si(R 33 )2O) m' -Si(R 33 )2-(CH2) t' -

[0299] -(CH2) s' -O-(CH2) u' -(Si(R 33 )2O) m' -Si(R 33 )2-(CH2) t' -,or

[0300] -(CH2) s' -O-(CH2) t' -Si(R 33 )2-(CH2) u'-Si(R 33 )2-(C v H 2v )-

[0301] [Where R 33 , m', s', t' and u' have the same meanings as above, and v is an integer of 1 to 20, preferably an integer of 2 to 6, and more preferably an integer of 2 to 3. ] group,

[0302] Rf' is a single bond or -(C l' F 2l' )-,

[0303] l' is an integer from 1 to 4. ].

[0304] In the above formula, -(C v H 2v )- may be a straight chain or a branched chain, for example, it may be -CH2CH2-, -CH2CH2CH2-, -CH(CH3)-, or -CH(CH3)CH2-.

[0305] The above X 5 The group may be selected from fluorine atoms, C 1-3 Alkyl and C 1-3 Fluoroalkyl (preferably C 1-3 substituted with one or more substituents in a perfluoroalkyl group.

[0306] In another way, as X 5 Groups include, for example, the following groups:

[0307]

[0308]

[0309] [Where R 41 are independently a hydrogen atom, a phenyl group, an alkyl group having 1 to 6 carbon atoms, or a C 1-6 an alkoxy group, preferably a methyl group;

[0310] D is -Rf'-X 15 -

[0311] [Where, X 15 For selected

[0312] -CH2O(CH2)2-,

[0313] -CH2O(CH2)3-,

[0314] -CF2O(CH2)3-,

[0315] -(CH2)2-,

[0316] -(CH2)3-,

[0317] -(CH2)4-,

[0318] -CONH-(CH2)-、

[0319] -CONH-(CH2)2-、

[0320] -CONH-(CH2)3-,

[0321] -CON(CH3)-(CH2)3-,

[0322] -CON(Ph)-(CH2)3- (wherein Ph refers to phenyl), and

[0323]

[0324] (Where R 42 Each independently represents a hydrogen atom, C 1-6 Alkyl or C 1-6 The alkoxy group of , preferably represents a methyl group or a methoxy group, more preferably represents a methyl group.

[0325] Rf' is a single bond or -(C l' F 2l' )-,

[0326] l' is an integer from 1 to 4. ] represented by the group,

[0327] E is -(CH2) n - (n is an integer from 2 to 6),

[0328] D is bonded to the PFPE of the molecular main chain, and E is bonded to the group opposite to the PFPE.].

[0329] As the above X 5 Specific examples include:

[0330] Single bond, or -Rf'-X 10 - the groups shown, etc.,

[0331] [Where, X 10 For selected

[0332] -CH2OCH2-,

[0333] -CH2O(CH2)2-,

[0334] -CH2O(CH2)3-,

[0335] -CH2O(CH2)6-,

[0336] <h2 style=";text-align:left;direction:ltr">CF2+CH2+O+CH2+<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0337] <h2 style=";text-align:left;direction:ltr"> -CF2-CH2-O-(CH2)2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0338] <h2 style=";text-align:left;direction:ltr"> -CF2-CH2-O-(CH2)3-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0339] <h2 style=";text-align:left;direction:ltr"> -CF2-CH2-O-(CH2)6-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0340] <h2 style=";text-align:left;direction:ltr"> -CH2O(CH2)3Si(CH3)2OSi(CH3)2(CH2)2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0341] <h2 style=";text-align:left;direction:ltr"> -CH2O(CH2)3Si(CH3)2OSi(CH3)2OSi(CH3)2(CH2)2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0342] <h2 style=";text-align:left;direction:ltr"> -CH2O(CH2)3Si(CH3)2O(Si(CH3)2O)2Si(CH3)2(CH2)2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0343] <h2 style=";text-align:left;direction:ltr"> -CH2O(CH2)3Si(CH3)2O(Si(CH3)2O)3Si(CH3)2(CH2)2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0344] <h2 style=";text-align:left;direction:ltr"> -CH2O(CH2)3Si(CH3)2O(Si(CH3)2O)<h2 style=";text-align:left;direction:ltr"> 10 <h2 style=";text-align:left;direction:ltr"> Si(CH3)2(CH2)2-<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0345] <h2 style=";text-align:left;direction:ltr"> -CH2O(CH2)3Si(CH3)2O(Si(CH3)2O)<h2 style=";text-align:left;direction:ltr"> 20 <h2 style=";text-align:left;direction:ltr"> Si(CH3)2(CH2)2-<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0346] <h2 style=";text-align:left;direction:ltr"> CH2OCF2CHFOCF2<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0347] <h2 style=";text-align:left;direction:ltr"> -CH2OCF2CHFOCF2CF2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0348] <h2 style=";text-align:left;direction:ltr"> -CH2OCF2CHFOCF2CF2CF2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0349] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CF2CF2OCF2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0350] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CF2CF2OCF2CF2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0351] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CF2CF2OCF2CF2CF2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0352] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CF2CF2OCF(CF3)CF2OCF2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0353] <h2 style=";text-align:left;direction:ltr">-CH2OCH2CF2CF2OCF(CF3)CF2OCF2CF2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0354] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CF2CF2OCF(CF3)CF2OCF2CF2CF2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0355] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CHFCF2OCF2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0356] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CHFCF2OCF2CF2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0357] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CHFCF2OCF2CF2CF2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0358] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CHFCF2OCF(CF3)CF2OCF2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0359] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CHFCF2OCF(CF3)CF2OCF2CF2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0360] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CHFCF2OCF(CF3)CF2OCF2CF2CF2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0361] <h2 style=";text-align:left;direction:ltr"> -CH2OCF2CHFOCF2CF2CF2-C(O)NH-CH2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0362] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2(CH2)7CH2Si(OCH3)2OSi(OCH3)2(CH2)2Si(OCH3)2OSi(OCH3)2(CH2)2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0363] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CH2CH2Si(OCH3)2OSi(OCH3)2(CH2)3-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0364] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CH2CH2Si(OCH2CH3)2OSi(OCH2CH3)2(CH2)3-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0365] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CH2CH2Si(OCH3)2OSi(OCH3)2(CH2)2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0366] <h2 style=";text-align:left;direction:ltr"> -CH2OCH2CH2CH2Si(OCH2CH3)2OSi(OCH2CH3)2(CH2)2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0367] <h2 style=";text-align:left;direction:ltr"> -(CH2)2-Si(CH3)2-(CH2)2-、<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0368] <h2 style=";text-align:left;direction:ltr"> CH2<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0369] <h2 style=";text-align:left;direction:ltr"> (CH2)2<h2 style=";text-align:left;direction:ltr"> <h2 style=";text-align:left;direction:ltr">

[0370] -(CH2)3-,

[0371] -(CH2)4-,

[0372] -(CH2)5-,

[0373] -(CH2)6-,

[0374] -CF2-,

[0375] -(CF2)2-,

[0376] -CF2-CH2-,

[0377] -CF2-(CH2)2-,

[0378] -CF2-(CH2)3-,

[0379] -CF2-(CH2)4-,

[0380] -CF2-(CH2)5-,

[0381] -CF2-(CH2)6-,

[0382] -CO-,

[0383] -CONH-,

[0384] -CONH-CH2-,

[0385] -CONH-(CH2)2-、

[0386] -CONH-(CH2)3-,

[0387] -CONH-(CH2)6-、

[0388] -CF2CONH-,

[0389] -CF2CONHCH2-,

[0390] -CF2CONH(CH2)2-,

[0391] -CF2CONH(CH2)3-,

[0392] -CF2CONH(CH2)6-,

[0393] -CON(CH3)-(CH2)3-,

[0394] -CON(Ph)-(CH2)3- (where Ph refers to phenyl),

[0395] -CON(CH3)-(CH2)6-,

[0396] -CON(Ph)-(CH2)6- (where Ph refers to phenyl),

[0397] -CF2-CON(CH3)-(CH2)3-,

[0398] -CF2-CON(Ph)-(CH2)3- (where Ph refers to phenyl),

[0399] -CF2-CON(CH3)-(CH2)6-,

[0400] -CF2-CON(Ph)-(CH2)6- (where Ph refers to phenyl),

[0401] -CONH-(CH2)2NH(CH2)3-,

[0402] -CONH-(CH2)6NH(CH2)3-,

[0403] -CH2O-CONH-(CH2)3-、

[0404] -CH2O-CONH-(CH2)6-、

[0405] -S-(CH2)3-,

[0406] -(CH2)2S(CH2)3-,

[0407] -CONH-(CH2)3Si(CH3)2OSi(CH3)2(CH2)2-,

[0408] -CONH-(CH2)3Si(CH3)2OSi(CH3)2OSi(CH3)2(CH2) 2 -、

[0409] -CONH-(CH2)3Si(CH3)2O(Si(CH3)2O)2Si(CH3)2(CH2) 2 -、

[0410] -CONH-(CH2)3Si(CH3)2O(Si(CH3)2O)3Si(CH3)2(CH2) 2 -、

[0411] -CONH-(CH2)3Si(CH3)2O(Si(CH3)2O) 10 Si(CH3)2(CH2)2-、

[0412] -CONH-(CH2)3Si(CH3)2O(Si(CH3)2O) 20 Si(CH3)2(CH2)2-、

[0413] -C(O)O-(CH2)3-,

[0414] -C(O)O-(CH2)6-,

[0415] -CH2-O-(CH2)3-Si(CH3)2-(CH2)2-Si(CH3)2-(CH2) 2 -、

[0416] -CH2-O-(CH2)3-Si(CH3)2-(CH2)2-Si(CH3)2-CH(CH3)-,

[0417] -CH2-O-(CH2)3-Si(CH3)2-(CH2)2-Si(CH3)2-(CH2) 3 -、

[0418] -CH2-O-(CH2)3-Si(CH3)2-(CH2)2-Si(CH3)2-CH(CH3)-CH2-,

[0419] -OCH2-,

[0420] -O(CH2)3-,

[0421] -OCFHCF2-,

[0422]

[0423] The groups in

[0424] Rf' is a single bond or -(C l' F 2l' )-,

[0425] l' is an integer from 1 to 4. ].

[0426] In a more preferred embodiment, X 5 Represents X e' .X e' is a single bond, an alkylene group having 1 to 6 carbon atoms, -R 51 -C6H4-R 52 -, -R 51 -CONR 4 -R 52 -, -R 51 -CONR 4 -C6H4-R 52 -, -R 51 -CO-R 52 -, -R 51 -CO-C6H4-R 52 -, -R51 -SO2NR 4 -R 52 -, -R 51 -SO2NR 4 -C6H4-R 52 -, -R 51 -SO2-R 52 -, or -R 51 -SO2-C6H4-R 52 -. R 51 and R 52 Each independently represents a single bond or an alkylene group having 1 to 6 carbon atoms, and is preferably a single bond or an alkylene group having 1 to 3 carbon atoms. 4 The meaning of is the same as above. The above-mentioned alkylene group is substituted or unsubstituted, preferably unsubstituted. As a substituent of the above-mentioned alkylene group, for example, a halogen atom can be mentioned, preferably a fluorine atom. The above-mentioned alkylene group is linear or branched, preferably linear.

[0427] In a further preferred embodiment, X e' Can be

[0428] single bond,

[0429] -X f -

[0430] an alkylene group having 1 to 6 carbon atoms, preferably 1 to 3 carbon atoms,

[0431] -X f -C 1-6 Alkylene, preferably -X f -C 1-3 Alkylene, more preferably -X f -C 1-2 Alkylene,

[0432] -C6H4-R 52' -

[0433] -CONR 4' -R 52' -

[0434] -CONR 4' -C6H4-R 52' -

[0435] -X f -CONR 4' -R 52' -

[0436] -X f -CONR 4' -C6H4-R 52' -

[0437] -CO-R 52' -、

[0438] -CO-C6H4-R 52' -、

[0439] -SO2NR 4' -R 52' -、

[0440] -SO2NR 4' -C6H4-R 52' -、

[0441] -SO2-R 52' -、

[0442] -SO2-C6H4-R 52' -、

[0443] -R 51' -C6H4-、

[0444] -R 51' -CONR 4' -、

[0445] -R 51' -CONR 4' -C6H4-、

[0446] -R 51' -CO-、

[0447] -R 51' -CO-C6H4-、

[0448] -R 51' -SO2NR 4' -、

[0449] -R 51' -SO2NR 4' -C6H4-、

[0450] -R 51' -SO2-、

[0451] -R 51' -SO2-C6H4-、

[0452] -C6H4-

[0453] -CONR 4' -、

[0454] -CONR 4' -C6H4-、

[0455] -X f -CONR 4' -、

[0456] -X f -CONR 4' -C6H4-,

[0457] -CO-,

[0458] -CO-C6H4-,

[0459] -SO2NR 4' -

[0460] -SO2NR 4' -C6H4-

[0461] -SO2-, or

[0462] -SO2-C6H4-

[0463] (Where R 51' and R 52' Each independently represents a linear alkylene group having 1 to 6 carbon atoms, preferably 1 to 3 carbon atoms. As described above, the alkylene group may be substituted or unsubstituted. Examples of the substituent of the alkylene group include a halogen atom, preferably a fluorine atom.

[0464] R 4' is a hydrogen atom or a methyl group. ).

[0465] Among the above, X e' It can be preferably

[0466] -X f -

[0467] an alkylene group having 1 to 6 carbon atoms, preferably 1 to 3 carbon atoms,

[0468] -X f -C 1-6 Alkylene, preferably -X f -C 1-3 Alkylene, more preferably -X f -C 1-2 Alkylene,

[0469] -CONR 4' -R 52' -

[0470] -CONR 4' -C6H4-R 52' -

[0471] -X f -CONR 4' -R 52' -

[0472] -Xf -CONR 4' -C6H4-R 52' -

[0473] -R 51' -CONR 4' -

[0474] -R 51' -CONR 4' -C6H4-,

[0475] -CONR 4' -

[0476] -CONR 4' -C6H4-,

[0477] -X f -CONR 4' -

[0478] -X f -CONR 4' -C6H4-,

[0479] -R 51' -CONR 4' -,or

[0480] -R 51' -CONR 4' -C6H4-.

[0481] Where, X f 、R 4' 、R 51' and R 52' The meanings are the same as above.

[0482] Among the above, X e' It can be more preferably

[0483] -CONR 4' -R 52' -

[0484] -CONR 4' -C6H4-R 52' -

[0485] -X f -CONR 4' -R 52' -

[0486] -X f -CONR 4' -C6H4-R 52' -

[0487] -R51' -CONR 4' -

[0488] -R 51' -CONR 4' -C6H4-,

[0489] -CONR 4' -

[0490] -CONR 4' -C6H4-,

[0491] -X f -CONR 4' -,or

[0492] -X f -CONR 4' -C6H4-.

[0493] In this method, as X e' Specific examples include, for example,

[0494] single bond,

[0495] Perfluoroalkylene with 1 to 6 carbon atoms (e.g., -CF2-, -(CF2)2-, etc.),

[0496] an alkylene group having 1 to 6 carbon atoms,

[0497] -CF2-C 1-6 Alkylene,

[0498] -CONH-,

[0499] -CONH-CH2-,

[0500] -CONH-(CH2)2-

[0501] -CONH-(CH2)3-,

[0502] -CF2-CONH-,

[0503] -CF2CONHCH2-,

[0504] -CF2CONH(CH2)2-,

[0505] -CF2CONH(CH2)3-,

[0506] -CON(CH3)-,

[0507] -CON(CH3)-CH2-,

[0508] -CON(CH3)-(CH2)2-,

[0509] -CON(CH3)-(CH2)3-、

[0510] -CF2-CON(CH3)-、

[0511] -CF2-CON(CH3)CH2-、

[0512] -CF2-CON(CH3)-(CH2)2-、

[0513] -CF2-CON(CH3)-(CH2)3-、

[0514] -CH2-CONH-、

[0515] -CH2-CONH-CH2-、

[0516] -CH2-CONH-(CH2)2-、

[0517] -CH2-CONH-(CH2)3-、

[0518] -CF2-CH2-CONH-、

[0519] -CF2-CH2-CONH-CH2-、

[0520] -CF2-CH2-CONH-(CH2)2-、

[0521] -CF2-CH2-CONH-(CH2)3-、

[0522] -CONH-C6H4-、

[0523] -CON(CH3)-C6H4-、

[0524] -CH2-CON(CH3)-CH2-、

[0525] -CH2-CON(CH3)-(CH2)2-、

[0526] -CH2-CON(CH3)-(CH2)3-、

[0527] -CON(CH3)-C6H4-、

[0528] -CF2-CONH-C6H4-、

[0529] -CF2-CON(CH3)-C6H4-、

[0530] -CF2-CH2-CON(CH3)-CH2-、

[0531] -CF2-CH2-CON(CH3)-(CH2)2-,

[0532] -CF2-CH2-CON(CH3)-(CH2)3-,

[0533] -CF2-CON(CH3)-C6H4-,

[0534] -CO-,

[0535] -CO-C6H4-,

[0536] -C6H4-,

[0537] -SO2NH-,

[0538] -SO2NH-CH2-,

[0539] -SO2NH-(CH2)2-,

[0540] -SO2NH-(CH2)3-,

[0541] -SO2NH-C6H4-、

[0542] -SO2N(CH3)-,

[0543] -SO2N(CH3)-CH2-,

[0544] -SO2N(CH3)-(CH2)2-,

[0545] -SO2N(CH3)-(CH2)3-,

[0546] -SO2N(CH3)-C6H4-、

[0547] -SO2-,

[0548] -SO2-CH2-,

[0549] -SO2-(CH2)2-,

[0550] -SO2-(CH2)3-, or

[0551] -SO2-C6H4-, etc.

[0552] Among the examples listed above, X is preferably e' , you can list

[0553] an alkylene group having 1 to 6 carbon atoms,

[0554] Perfluoroalkylene with 1 to 6 carbon atoms (e.g., -CF2-, -(CF2)2-, etc.),

[0555] -CF2-C 1-6 Alkylene,

[0556] -CONH-,

[0557] -CONH-CH2-,

[0558] -CONH-(CH2)2-, -CONH-(CH2)3-, -CF2CONH-, -CF2CONHCH2-, -CF2CONH(CH2)2-, -CF2CONH(CH2)3-, -CON(CH3)-, -CON(CH3)-CH2-, -CON(CH3)-(CH2)2-, -CON( CH3)-(CH2)3-, -CF2-CON(CH3)-, -CF2-CON(CH3)CH2-, -CF2-CON(CH3)-(CH2)2-, -CF2-CON(CH3)-(CH2)3-, -CH2-CONH-, -CH2-CONH-CH2-, -CH2-CONH-(CH2)2 -, -CH2-CONH-(CH2)3-, -CF2-CH2-CONH-, -CF2-CH2-CONH-CH2-, -CF2-CH2-CONH-(CH2)2-, -CF2-CH2-CONH-(CH2)3-, -CONH-C6H4-, -CON(CH3)-C6H4-, -CH2-C ON(CH3)-CH2-, -CH2-CON(CH3)-(CH2)2-, -CH2-CON(CH3)-(CH2)3-, -CON(CH3)-C6H4-, -CF2-CONH-C6H4-, -CF2-CON(CH3)-C6H4-, -CF2-CH2-CON(CH3)-CH2-,

[0559] -CF2-CH2-CON(CH3)-(CH2)2-,

[0560] -CF2-CH2-CON(CH3)-(CH2)3-,

[0561] -CF2-CON(CH3)-C6H4-, etc.

[0562] Among the examples listed above, more preferred X e' , we can list -CONH-,

[0563] -CONH-CH2-,

[0564] -CONH-(CH2)2-、

[0565] -CONH-(CH2)3-,

[0566] -CF2CONH-、

[0567] -CF2CONHCH2-、

[0568] -CF2CONH(CH2)2-、

[0569] -CF2CONH(CH2)3-、

[0570] -CON(CH3)-、

[0571] -CON(CH3)-CH2-、

[0572] -CON(CH3)-(CH2)2-、

[0573] -CON(CH3)-(CH2)3-、

[0574] -CF2-CON(CH3)-、

[0575] -CF2-CON(CH3)CH2-、

[0576] -CF2-CON(CH3)-(CH2)2-、

[0577] -CF2-CON(CH3)-(CH2)3-、

[0578] -CH2-CONH-、

[0579] -CH2-CONH-CH2-、

[0580] -CH2-CONH-(CH2)2-、

[0581] -CH2-CONH-(CH2)3-、

[0582] -CF2-CH2-CONH-、

[0583] -CF2-CH2-CONH-CH2-、

[0584] -CF2-CH2-CONH-(CH2)2-、

[0585] -CF2-CH2-CONH-(CH2)3-、

[0586] -CONH-C6H4-、

[0587] -CON(CH3)-C6H4-、

[0588] -CH2-CON(CH3)-CH2-、

[0589] -CH2-CON(CH3)-(CH2)2-,

[0590] -CH2-CON(CH3)-(CH2)3-,

[0591] -CON(CH3)-C6H4-、

[0592] -CF2-CONH-C6H4-,

[0593] -CF2-CON(CH3)-C6H4-,

[0594] -CF2-CH2-CON(CH3)-CH2-,

[0595] -CF2-CH2-CON(CH3)-(CH2)2-,

[0596] -CF2-CH2-CON(CH3)-(CH2)3-, or

[0597] -CF2-CON(CH3)-C6H4-, etc.

[0598] The compounds represented by the above formulae (A1) and (A2) can be produced by a known method, for example, the method described in Patent Document 1 or a modified method thereof.

[0599] Formulas (B1) and (B2):

[0600] (Rf-PFPE) γ’ -X 7 -(SiR a k1 R bl1 R c m1 ) γ …(B1)

[0601] (R c m1 R b l1 R a k1 Si) γ -X 7 -PFPE-X 7 -(SiR ak1 R b l1 R c m1 ) γ …(B2)

[0602] In the above formulae (B1) and (B2), Rf and PFPE have the same meanings as described in relation to the above formulae (A1) and (A2).

[0603] In the above formula, X 7 Each independently represents a single bond or a di- to decavalent organic group. 7 In the compounds represented by formula (B1) and (B2), it can be understood that the perfluoropolyether part (Rf-PFPE part or -PFPE- part) which mainly provides water repellency and surface smoothness and the silane part (specifically -SiR a k1 R b l1 R c m1 Therefore, as long as the compounds represented by formula (B1) and (B2) can exist stably, the X 7 It can be any organic group.

[0604] In the above formula, γ is an integer of 1 to 9, and γ' is an integer of 1 to 9. These γ and γ' are determined by X 7 The valence of is determined, in formula (B1), the sum of γ and γ' and X 7 The valence of is the same. For example, in X 7 In the case of a devalent organic group, the sum of γ and γ' is 10, for example, γ is 9 and γ' is 1, γ is 5 and γ' is 5, or γ is 1 and γ' is 9. 7 When X is a divalent organic group, γ and γ' are 1. In formula (B2), γ is X 7 The value obtained by subtracting 1 from the valence value.

[0605] The above X 7 It is preferably a di- to hepta-valent organic group, more preferably a di- to tetra-valent organic group, and still more preferably a divalent organic group.

[0606] In one approach, X 7 It is a divalent to tetravalent organic group, γ is 1 to 3, and γ' is 1.

[0607] In another way, X 7 is a divalent organic group, γ is 1, and γ' is 1. In this case, formulae (B1) and (B2) are represented by the following formulae (B1') and (B2').

[0608] Rf-PFPE-X 7 -SiR a k1 R b l1 R c m1 …(B1')

[0609] R cm1 R b l1 R a k1 Si-X 7 -PFPE-X 7 -SiR a k1 R b l1 R c m1 …(B2')

[0610] As the above X 7 Examples of X are not particularly limited, for example, 5 The same groups as those described above.

[0611] In the above formula, R a Indicates -Z independently at each occurrence 1 -SiR 71 p1 R 72 q1 R 73 r1 .

[0612] Where Z 1 Each occurrence independently represents an oxygen atom or a divalent organic group.

[0613] The above Z 1 It is preferably a divalent organic group, and does not contain a terminal Si atom (R a A group in which the Si atom to which it is bonded forms a siloxane bond.

[0614] The above Z 1 Preferably C 1-6 Alkylene, -(CH2) g -O-(CH2) h -(wherein, g is an integer of 1 to 6, and h is an integer of 1 to 6), or -phenylene-(CH2) i - (wherein i is an integer from 0 to 6), more preferably C 1-3 These groups can be selected from fluorine atoms, C 1-6 Alkyl, C 2-6 Alkenyl and C 2-6 The alkynyl group is substituted with one or more substituents.

[0615] Where R 71 Each occurrence represents R independently a' . R a' The significance of R a same.

[0616] R a In, through Z 1 The maximum number of Si groups connected in a straight chain is 5. a In the presence of at least one R 71 In the case of R a There are more than 2 through Z 1 The Si atoms are connected in a straight chain, but the Z 1 The maximum number of Si atoms connected in a straight chain is 5. a Through Z 1 The number of Si atoms connected in a straight chain is related to R a -Z in straight chain connection 1 The number of repetitions of -Si- is equal.

[0617] For example, the following expression in R a Through Z 1 An example of a group (hereinafter referred to as "Z") connected to a Si atom.

[0618]

[0619] In the above formula, * indicates the site of bonding to Si in the main chain, and ... indicates the end of the ZSi repeat when a predetermined group other than ZSi is bonded, that is, when all three bonds of the Si atom are .... In addition, the number in the upper right corner of Si indicates the number of occurrences of Si connected in a straight chain through the Z group, counting from *. That is, Si 2 End the ZSi repeat chain, "R a Through Z 1 The number of Si atoms connected in a straight chain is 2. Similarly, 3 、Si 4 and Si 5 End the ZSi repeat chain, "R a Through Z 1 The number of Si atoms connected in a straight chain by the group is 3, 4 and 5 respectively. In addition, it can be clearly seen from the above formula that in R a In the embodiment, there are multiple ZSi chains, but they do not all have to be the same length and each can be of any length.

[0620] In a preferred embodiment, as described below, "R a Through Z 1 The number of Si atoms connected in a straight chain by the group is 1 (left formula) or 2 (right formula) in all chains.

[0621]

[0622] In one embodiment, R a The number of Si atoms linearly linked via the Z group in is 1 or 2, preferably 1.

[0623] Where R 72 Each occurrence independently represents a hydroxyl group or a hydrolyzable group.

[0624] The above-mentioned "hydrolyzable group" when used in this specification refers to a group that can undergo a hydrolysis reaction. Examples of hydrolyzable groups include -OR, -OCOR, -O-N=C(R)2, -N(R)2, -NHR, halogen (in these formulas, R represents a substituted or unsubstituted alkyl group with 1 to 4 carbon atoms), etc., preferably -OR (alkoxy). Examples of R include: unsubstituted alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl; and substituted alkyl groups such as chloromethyl. Among these, alkyl groups are preferred, unsubstituted alkyl groups are particularly preferred, and methyl or ethyl groups are more preferred. The hydroxyl group is not particularly limited and may be a hydroxyl group generated by hydrolysis of a hydrolyzable group.

[0625] Preferred R 72 -OR (where R represents a substituted or unsubstituted C 1-3 alkyl, more preferably methyl).

[0626] Where R 73 Each occurrence of ' represents independently a hydrogen atom or a lower alkyl group. The lower alkyl group is preferably an alkyl group having 1 to 20 carbon atoms, more preferably an alkyl group having 1 to 6 carbon atoms, and even more preferably a methyl group.

[0627] In the formula, p1 is independently an integer from 0 to 3 at each occurrence; q1 is independently an integer from 0 to 3 at each occurrence; and r1 is independently an integer from 0 to 3 at each occurrence. The sum of p1, q1, and r1 is 3.

[0628] In a preferred embodiment, in R a The terminal R a' (There is no R a' When R a ), the above q1 is preferably greater than 2, for example, 2 or 3, more preferably 3.

[0629] In a preferred embodiment, R a At least one of the terminal portions may be -Si(-Z 1 -SiR 72 q R 73 r )2 or -Si(-Z 1 -SiR72 q R 73 r )3, preferably -Si(-Z 1 -SiR 72 q R 73 r )3. In the formula, (-Z 1 -SiR 72 q R 73 r ) is preferably (-Z 1 -SiR 72 3). In a further preferred embodiment, R a The terminal parts of all can be -Si(-Z 1 -SiR 72 q R 73 r )3, preferably -Si(-Z 1 -SiR 72 3)3.

[0630] In the above formulas (B1) and (B2), there is at least one R 72 .

[0631] In the above formula, R b Each occurrence independently represents a hydroxyl group or a hydrolyzable group.

[0632] The above R b Preferred are hydroxyl, -OR, -OCOR, -O-N=C(R)2, -N(R)2, -NHR, halogen (in these formulas, R represents a substituted or unsubstituted alkyl group having 1 to 4 carbon atoms), preferably -OR. R includes: unsubstituted alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl; substituted alkyl groups such as chloromethyl. Among these, alkyl groups are preferred, unsubstituted alkyl groups are particularly preferred, and methyl or ethyl groups are more preferred. The hydroxyl group is not particularly limited and may be a hydroxyl group generated by hydrolysis of a hydrolyzable group. More preferred is R b -OR (where R represents a substituted or unsubstituted C 1-3 Alkyl, more preferably means methyl).

[0633] In the above formula, R c Each occurrence of ' represents independently a hydrogen atom or a lower alkyl group. The lower alkyl group is preferably an alkyl group having 1 to 20 carbon atoms, more preferably an alkyl group having 1 to 6 carbon atoms, and even more preferably a methyl group.

[0634] In the formula, k1 is independently an integer from 0 to 3 at each occurrence; l1 is independently an integer from 0 to 3 at each occurrence; m1 is independently an integer from 0 to 3 at each occurrence. The sum of k1, l1, and m1 is 3.

[0635] In a preferred embodiment, k1 is independently an integer of 1 to 3 at each occurrence; l1 is independently an integer of 0 to 2 at each occurrence; and m1 is independently an integer of 0 to 2 at each occurrence.

[0636] For example, using a perfluoropolyether derivative corresponding to the Rf-PFPE- portion as a raw material, after introducing a hydroxyl group to the terminal, a group having an unsaturated bond is introduced to the terminal, the group having an unsaturated bond is reacted with a silyl derivative having a halogen atom, and then a hydroxyl group is introduced to the terminal of the silyl group, and the introduced group having an unsaturated bond is reacted with the silyl derivative, thereby obtaining the compounds represented by the above formulae (B1) and (B2).

[0637] Formulas (C1) and (C2):

[0638] (Rf-PFPE) δ’ -X 9 -(CR dk2 R e l2 R f m2 ) δ …(C1)

[0639] (R f m2 R e l2 R d k2 C) δ -X 9 -PFPE-X 9 -(CR d k2 R e l2 R f m2 ) δ …(C2)

[0640] In the above formulae (C1) and (C2), Rf and PFPE have the same meanings as described in relation to the above formulae (A1) and (A2).

[0641] In the above formula, X 9Each independently represents a single bond or a di- to decavalent organic group. In the compounds represented by formulas (C1) and (C2), X can be understood as a linker that connects the perfluoropolyether portion (i.e., the Rf-PFPE portion or the -PFPE- portion), which primarily provides hydrophobicity and surface smoothness, with the portion (i.e., the group enclosed in parentheses and denoted by δ) that provides binding energy to the substrate. Therefore, X can be any organic group as long as the compounds represented by formulas (C1) and (C2) can be stably present.

[0642] In the above formula, δ is an integer of 1 to 9, and δ' is an integer of 1 to 9. These δ and δ' may vary depending on the valence of X. In formula (C1), the sum of δ and δ' is the same as the valence of X. For example, when X is an organic group with a valence of 10, the sum of δ and δ' is 10, and for example, δ may be 9 and δ' may be 1, δ may be 5 and δ' may be 5, or δ may be 1 and δ' may be 9. In addition, in the case of X 9 When X is a divalent organic group, δ and δ' are 1. In formula (C2), δ is X 9 The value obtained by subtracting 1 from the valence of .

[0643] The above X 9 It is preferably a di- to hepta-valent organic group, more preferably a di- to tetra-valent organic group, and still more preferably a divalent organic group.

[0644] In one approach, X 9 It is a divalent to tetravalent organic group, δ is 1 to 3, and δ' is 1.

[0645] In another way, X 9 is a divalent organic group, δ is 1, and δ' is 1. In this case, formulae (C1) and (C2) are represented by the following formulae (C1') and (C2').

[0646] Rf-PFPE-X 9 -CR d k2 R e l2 R f m2 …(C1')

[0647] R f m2 R e l2 R d k2 CX 9 -PFPE-X 9 -CR d k2 R e l2 R f m2 …(C2')

[0648] As the above X 9 Examples of X are not particularly limited, for example, 5 The same groups as those described above.

[0649] In the above formula, R d Indicates -Z independently at each occurrence 2 -CR 81 p2 R 82 q2 R 83 r2 .

[0650] Where Z 2 Each occurrence independently represents an oxygen atom or a divalent organic group.

[0651] The above Z 2 Preferably C 1-6 Alkylene, -(CH2) g -O-(CH2) h -(wherein, g is an integer of 0 to 6, for example, an integer of 1 to 6, and h is an integer of 0 to 6, for example, an integer of 1 to 6), or -phenylene-(CH2) i - (wherein i is an integer from 0 to 6), more preferably C 1-3 These groups can be selected from fluorine atoms, C 1-6 Alkyl, C 2- 6 alkenyl and C 2-6 The alkynyl group is substituted with one or more substituents.

[0652] Where R 81 Each occurrence represents R independently d' . R d' The significance of R d same.

[0653] R d In, through Z 2 The maximum number of C groups connected in a straight chain is 5. d In the presence of at least one R 81 In the case of R d There are more than 2 through Z 2 The C atoms are connected in a straight chain, but such a Z 2 The maximum number of C atoms connected in a straight chain is 5. d Through Z 2 The number of C atoms in the straight chain is related to R d -Z in straight chain connection2 The number of repetitions of -C- is equal. This is consistent with the R a The records are the same.

[0654] In a preferred embodiment, "R d Through Z 2 The number of C atoms connected in a straight chain by the group is 1 (left-hand formula) or 2 (right-hand formula) in all chains.

[0655] In one embodiment, R d Through Z 2 The number of C atoms connected in a straight chain is 1 or 2, preferably 1.

[0656] Where R 82 Indicates -Y-SiR 85 n2 R 86 3-2n .

[0657] Y, at each occurrence, independently represents a divalent organic group.

[0658] In a preferred embodiment, Y is C 1-6 Alkylene, -(CH2) g' -O-(CH2) h' -(wherein, g' is an integer of 0 to 6, for example, an integer of 1 to 6, and h' is an integer of 0 to 6, for example, an integer of 1 to 6), or -phenylene-(CH2) i' - (wherein i' is an integer from 0 to 6). These groups can be selected from, for example, fluorine atoms, C 1-6 Alkyl, C 2-6 Alkenyl and C 2- 6 The alkynyl group is substituted with one or more substituents.

[0659] In one embodiment, Y can be C 1-6 Alkylene, -O-(CH2) h' - or -phenylene-(CH2) i' When Y is the above-mentioned group, light resistance, particularly ultraviolet resistance, can be further improved.

[0660] The above R 85 Each occurrence independently represents a hydroxyl group or a hydrolyzable group.

[0661] The above-mentioned "hydrolyzable group" when used in this specification refers to a group that can undergo a hydrolysis reaction. Examples of hydrolyzable groups include -OR, -OCOR, -O-N=C(R)2, -N(R)2, -NHR, halogen (in these formulas, R represents a substituted or unsubstituted alkyl group with 1 to 4 carbon atoms), etc., preferably -OR (alkoxy). Examples of R include: unsubstituted alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl; and substituted alkyl groups such as chloromethyl. Among these, alkyl groups are preferred, unsubstituted alkyl groups are particularly preferred, and methyl or ethyl groups are more preferred. The hydroxyl group is not particularly limited and may be a hydroxyl group generated by hydrolysis of a hydrolyzable group.

[0662] Preferred R 85 -OR (where R represents a substituted or unsubstituted C 1-3 Alkyl, more preferably means ethyl or methyl, especially methyl).

[0663] The above R 86 Each occurrence of ' represents independently a hydrogen atom or a lower alkyl group. The lower alkyl group is preferably an alkyl group having 1 to 20 carbon atoms, more preferably an alkyl group having 1 to 6 carbon atoms, and even more preferably a methyl group.

[0664] n2 in each (-Y-SiR 85 n2 R 86 3-n2 ) units independently represent an integer of 0 to 3, preferably an integer of 1 to 3, more preferably 2 or 3, and even more preferably 3.

[0665] The above R 83 Each occurrence of is independently a hydrogen atom, a hydroxyl group or a lower alkyl group. The lower alkyl group is preferably an alkyl group having 1 to 20 carbon atoms, more preferably an alkyl group having 1 to 6 carbon atoms, and even more preferably a methyl group. In one embodiment, R 83 Each occurrence independently represents a hydrogen atom or a lower alkyl group.

[0666] In the formula, p2 is independently an integer from 0 to 3 at each occurrence; q2 is independently an integer from 0 to 3 at each occurrence; and r2 is independently an integer from 0 to 3 at each occurrence. The sum of p2, q2, and r2 is 3.

[0667] In a preferred embodiment, in R d The terminal R d' (There is no R d' When R d ), the above q2 is preferably greater than 2, for example, 2 or 3, more preferably 3.

[0668] In a preferred embodiment, R dAt least one of the terminal portions may be -C(-Y-SiR 85 q2 R 86 r2 )2 or -C(-Y-SiR 85 q2 R 86 r2 )3, preferably -C(-Y-SiR 85 q2 R 86 r2 )3. In the formula, (-Y-SiR 85 q2 R 86 r2 ) unit is preferably (-Y-SiR 85 3). In a further preferred embodiment, R d The terminal parts can all be -C(-Y-SiR 85 q2 R 86 r2 )3, preferably -C(-Y-SiR 85 3)3.

[0669] In the above formula, R e Each occurrence represents -Y-SiR independently 85 n2 R 86 3-n2 Among them, Y, R 85 、R 86 The meaning of n2 is the same as that of R 82 The records are the same.

[0670] In the above formula, R f Each occurrence of is independently a hydrogen atom, a hydroxyl group or a lower alkyl group. The lower alkyl group is preferably an alkyl group having 1 to 20 carbon atoms, more preferably an alkyl group having 1 to 6 carbon atoms, and even more preferably a methyl group. In one embodiment, R f Each occurrence independently represents a hydrogen atom or a lower alkyl group.

[0671] In the formula, k2 is independently an integer from 0 to 3 at each occurrence; l2 is independently an integer from 0 to 3 at each occurrence; and m2 is independently an integer from 0 to 3 at each occurrence. The sum of k2, l2, and m2 is 3.

[0672] In one embodiment, at least one k2 is 2 or 3, preferably 3.

[0673] In one embodiment, k2 is 2 or 3, preferably 3.

[0674] In one embodiment, l2 is 2 or 3, preferably 3.

[0675] In the above formulas (C1) and (C2), at least one q2 is 2 or 3, or at least one l is 2 or 3. That is, in the formula, there are at least two -Y-SiR 85 n2 R 86 3-n2 group.

[0676] The perfluoro(poly)ether group-containing silane compound represented by formula (C1) or formula (C2) can be produced by combining known methods. For example, the compound represented by formula (C1') where X is divalent is not limited and can be produced by the following procedure.

[0677] In one embodiment, Rf' in the above embodiments is a single bond in formulas (A1), (B1) and (C1), and in formulas (A2), (B2) and (C2), the X on the left side of PFPE is 5 (C l' F 2l' ), on the X on the right side of PFPE 5 (C l' F 2l' ).

[0678] In one embodiment, Rf' in each of the above embodiments may be a single bond.

[0679] The perfluoro(poly)ether group-containing silane compounds represented by the above formulae (A1), (A2), (B1), (B2), (C1), and (C2) are not particularly limited and may have a 5×10 2 ~1×10 5 The number average molecular weight is preferably 2,000 to 30,000, more preferably 3,000 to 10,000, and even more preferably 3,000 to 8,000. The "number average molecular weight" can be measured by GPC (gel permeation chromatography) analysis.

[0680] In the surface treatment agent of the present invention, the content of the double-end compound is preferably 0.1 mol% to 35 mol% relative to the total of the compounds represented by formulas (A1), (B1), and (C1) (hereinafter also referred to as "single-end compounds") and the compounds represented by formulas (A2), (B2), or (C2) (hereinafter also referred to as "double-end compounds"). The lower limit of the content of the double-end compound is preferably 0.1 mol%, more preferably 0.2 mol%, even more preferably 0.5 mol%, even more preferably 1 mol%, particularly preferably 2 mol%, and particularly preferably 5 mol%. The upper limit of the content of the double-end compound is preferably 35 mol%, more preferably 30 mol%, even more preferably 20 mol%, even more preferably 15 mol% or 10 mol% relative to the total of the single-end compound and the double-end compound. The content of the double-end compound relative to the total of the single-end compound and the double-end compound is preferably 0.1 mol% to 30 mol%, more preferably 0.1 mol% to 20 mol%, even more preferably 0.2 mol% to 10 mol%, even more preferably 0.5 mol% to 10 mol%, particularly preferably 1 mol% to 10 mol%, for example, 2 mol% to 10 mol% or 5 mol% to 10 mol%. By setting the content of the double-end compound within this range, friction durability can be further improved.

[0681] Other examples of the perfluoroalkyl group-containing silane compound include the following (1) and (2) described in WO2020 / 019653.

[0682] R F1 α -X A -R Si β (1)

[0683] R Si γ -X A -R F2 -X A -R Si γ (2)

[0684] R F1 Rf is independently 1 -R F -O q -;

[0685] R F2 -Rf 2 p -R F -O q -;

[0686] Rf 1 Each occurrence is independently C which may be substituted with one or more fluorine atoms. 1-16 alkyl;

[0687] Rf 2 C may be substituted by one or more fluorine atoms 1-6 alkylene;

[0688] R F Each occurrence is independently a divalent fluoropolyether group;

[0689] p is 0 or 1;

[0690] q is independently 0 or 1 at each occurrence;

[0691] R Si Each occurrence is independently a monovalent group containing a Si atom bonded to a hydroxyl group, a hydrolyzable group, a hydrogen atom, or a monovalent organic group;

[0692] At least 1 R Si It is a monovalent group containing a Si atom to which a hydroxyl group or a hydrolyzable group is bonded;

[0693] X A Each is independently a single bond or a 2- to 10-valent organic group;

[0694] α is an integer from 1 to 9;

[0695] β is an integer from 1 to 9;

[0696] γ is an integer of 1 to 9, respectively, independently.

[0697] As the isocyanuric acid skeleton-containing silane compound, for example, the following isocyanuric acid skeleton-containing compound described in WO2018 / 056413 can be used.

[0698]

[0699] (Where R 1 represents a monovalent organic group containing a polyether chain, X 1 and X 2 Independently represents a monovalent group, the above polyether chain is of the formula: -(OC6F 12 ) m11 -(OC5F 10 ) m12 -(OC4F8) m13 -(OC3X 10 6) m14 -(OC2F4) m15-(OCF2) m16 -(wherein, m11, m12, m13, m14, m15 and m16 are independently integers of 0 or 1 or greater, X 10 (a) independently represents H, F or Cl, and the order of occurrence of each repeating unit is arbitrary.

[0700] The antifouling layer 130 can be formed by forming a fluorine-containing silane compound on the concavo-convex surface by using a PVD process such as vacuum evaporation, sputtering, or resistance heating evaporation, or a CVD process.

[0701] In addition, the antifouling layer 130 can also be formed by dissolving a fluorine-containing silane compound in an organic solvent, applying it on the concave and convex surfaces, and drying it. Examples of organic solvents include acetone, methyl ethyl ketone, methyl amyl ketone, ethyl acetate, propylene glycol, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate (PGMEA), dipropylene glycol, dipropylene glycol monomethyl ether, dipropylene glycol dimethyl ether, dipropylene glycol monomethyl ether acetate, dipropylene glycol diacetate, tripropylene glycol, 3-methoxybutyl acetate (MBA), 1,3-butylene glycol diacetate, cyclohexanol acetate, dimethylformamide, dimethyl sulfoxide, methyl cellosolve, cellosolve acetate, butyl cellosolve. Agents, butyl carbitol, carbitol acetate, ethyl lactate, isopropyl alcohol, methanol, ethanol, chloroform, HFC141b, HCHC225, hydrofluoroether, pentane, hexane, heptane, octane, cyclohexane, benzene, toluene, xylene, petroleum ether, tetrahydrofuran, 1,4-dioxane, methyl isobutyl ketone, butyl acetate, 1,1,2,2-tetrachloroethane, 1,1,1-trichloroethane, trichloroethylene, perchloroethylene, tetrachlorodifluoroethane, trichlorotrifluoroethane, etc., and one or more thereof can be selected from these.

[0702] As the coating method, coating can be performed by various coating methods such as dip coating, spin coating, flow coating, spray coating, roll coating, gravure coating, or printing methods such as letterpress printing and inkjet printing.

[0703] Drying can be performed under conditions that allow the organic solvent to evaporate and form a solid film of the antifouling layer 130. For example, this can be performed by heating at 100 to 200°C for 1 to 60 minutes. Furthermore, since the condensation reaction itself proceeds even at low temperatures, drying can be performed under milder conditions (heating at a temperature below 100°C for more than 60 minutes). For example, drying can be performed by leaving the material at room temperature for an extended period of time.

[0704] In addition to the fluorine-containing silane compound, monomers, oligomers, polymers, and other additives (catalysts, surfactants, polymerization inhibitors, sensitizers, etc.) may be used to form the antifouling layer 130 .

[0705] For example, when using a silane compound containing an isocyanuric acid skeleton as the fluorine-containing silane compound, in addition to the fluorine-containing silane compound, the following may also be used:

[0706] (A) polymerizable coating agent monomers such as monofunctional and / or polyfunctional acrylates and methacrylates (hereinafter, acrylates and methacrylates are collectively referred to as "(meth)acrylates"), monofunctional and / or polyfunctional urethane (meth)acrylates, and monofunctional and / or polyfunctional epoxy (meth)acrylates; or

[0707] (B) (b-1) Thermosetting resins such as acrylic polymers, polycarbonate polymers, polyester polymers, polyamide polymers, polyimide polymers, polyethersulfone polymers, cyclic polyolefin polymers, fluorinated polyolefin polymers (PTFE, etc.), and fluorinated cyclic amorphous polymers (CYTOP (registered trademark), Teflon (registered trademark) AF, etc.); and (b-2) curable monomers such as polyurethane (meth)acrylates, epoxy (meth)acrylates, polyester (meth)acrylates, polyether (meth)acrylates, silicon-containing (meth)acrylates, and (meth)acrylate monomers.

[0708] When a perfluoroalkyl group-containing silane compound is used as the fluorine-containing silane compound, a fluoroalkylsilane oligomer mixture may be used in addition to the fluorine-containing silane compound to form the antifouling layer 130 .

[0709] The fluoroalkylsilane oligomer mixture may contain a partial hydrolysis-condensation product of a fluoroalkylsilane compound represented by the following formula (II).

[0710] Rf1-Q1-SiR1pX13-p (II)

[0711] [Where:

[0712] Rf1 is ClF2l+1,

[0713] l is an integer from 1 to 10,

[0714] Q1 is a single bond or a divalent hydrocarbon group having 1 to 6 carbon atoms,

[0715] R1 is independently a monovalent hydrocarbon group having 1 to 6 carbon atoms,

[0716] X1 is independently a hydroxyl group or a hydrolyzable group,

[0717] p is an integer from 0 to 2.]

[0718] In formula (II), R f1 C l F 2l+1, l is an integer of 1 to 10, preferably an integer of 1 to 8, more preferably an integer of 1 to 6, for example an integer of 2 to 6 or an integer of 3 to 6.

[0719] In formula (II), Q 1 It is a single bond or a divalent hydrocarbon group having 1 to 6 carbon atoms. Examples of the hydrocarbon group include a linear or branched alkylene group, a linear or branched alkylene group having 2 to 6 carbon atoms and a group having an amide group or an ethereal oxygen atom between carbon atoms, etc. Among them, a linear alkylene group having 1 to 6 carbon atoms is preferred from the perspective of excellent weather resistance: -(CH2) t - (wherein t is an integer of 1 to 6), more preferably -(CH2)2-, -(CH2)3-, or -(CH2)4-, and particularly preferably -(CH2)2-.

[0720] In formula (II), R 1 is a monovalent hydrocarbon group having 1 to 6 carbon atoms, and examples thereof include linear or branched alkyl groups. Among them, linear or branched alkyl groups having 1 to 4 carbon atoms are preferred from the perspective of easy availability, and methyl or ethyl groups are more preferred. When there are multiple groups, R 1 They may be the same or different, but are preferably the same from the viewpoint of easy availability.

[0721] In formula (II), X 1 It is a hydroxyl group or a hydrolyzable group. The "hydrolyzable group" mentioned above, when used in this specification, refers to a group that can be separated from the main skeleton of the compound by a hydrolysis reaction. Examples of hydrolyzable groups include -OR, -OCOR, -O-N=CR2, -NR2, -NHR, halogen (in these formulas, R represents a substituted or unsubstituted alkyl group with 1 to 4 carbon atoms), etc., preferably -OR (i.e., alkoxy). Examples of R include: unsubstituted alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, and substituted alkyl groups such as chloromethyl. Among these, alkyl groups are preferred, unsubstituted alkyl groups are particularly preferred, and methyl or ethyl groups are more preferred. The hydroxyl group is not particularly limited and may be a hydroxyl group generated by hydrolysis of a hydrolyzable group.

[0722] In X 1 In the case of a chlorine atom, the reactivity is high and the hydrolysis reaction proceeds sufficiently even without adding an acid catalyst. 1 A compound containing chlorine atoms.

[0723] In formula (II), p is an integer of 0 to 2, and is preferably 0 or 1, more preferably 0, from the viewpoint of excellent adhesion and durability.

[0724] Examples of the compound represented by formula (II) include the following:1 、R 1 Examples and preferred embodiments are as described above.

[0725] Formula (I-1): CF3(CF2) l-1 -(CH2) t -SiX 1 3

[0726] Formula (I-2): CF3(CF2) l-1 -(CH2) t -SiR 1 X 1 2

[0727] The fluoroalkylsilane compound represented by formula (II) may be used alone or in combination of two or more. The fluoroalkylsilane compound represented by formula (II) can be produced by a conventional production method and is commercially available.

[0728] The above-mentioned fluoroalkylsilane oligomer is a mixture of two or more fluoroalkylsilane compounds represented by the above-mentioned formula (II) (SiX 1 The fluoroalkylsilane oligomers are usually a mixture of polymers mainly containing 2 to 14-mers.

[0729] The degree of oligomerization / condensation can be measured using 29 Si-NMR was used to measure the 29 The integrated values of Si-NMR spectra (40-48 ppm), T1 species (48-54 ppm), T2 species (54-63 ppm), and T3 species (63-75 ppm) are shown. 29 Si-NMR shows 0-10%, more preferably 0-5%, and even more preferably 0-3% of T0 species (40-48ppm), 0-40%, more preferably 1-30%, and even more preferably 10-25% of T1 species (48-54ppm), and 20-80%, more preferably 25-75%, and even more preferably 30-70% of T2 species (54-63ppm). 29 "Structural Analysis of Silicon-Containing Materials by Si NMR Method" [online], Asahi Glass Research Report 66 (2016), pp. 32-36, URL <URL: https: / / www.agc.com / innovation / library / pdf / 66-07.pdf>" describes the descriptions of T0, T1, T2, and T3.

[0730] Oligomers are formed by hydrolysis of the compound shown in formula (II). Oligomers can be formed by hydrolysis of the compound shown in the same or different formula (II). The hydrolysis reaction of the compound shown in formula (II) and water can be carried out in the presence of a catalyst or in the absence of a catalyst. Suitable catalysts are not particularly limited and include acid catalysts, base catalysts, organic amine catalysts or metal catalysts. In a specific example, the catalyst can be selected from hydrochloric acid, nitric acid, acetic acid, sulfuric acid, phosphoric acid, sulfonic acid, methanesulfonic acid, p-toluenesulfonic acid, sodium hydroxide, potassium hydroxide, ammonia, triethylamine, titanium isopropoxide or dibutyltin dilaurate. It should be understood that water can be provided as a part of an aqueous catalyst composition.

[0731] The degree of oligomerization (based on 29 Si-NMR analysis) and / or the size of the oligomer (based on number average molecular weight) can be adjusted by adjusting the amount of water in the reaction system, selecting a suitable catalyst, and / or selecting appropriate reaction conditions. In particular, the molar ratio of water to silicon is controlled when providing the oligomers of the present invention. In one embodiment, the molar ratio of water to silicon (water:silicon) can be approximately 2.5:1 or less, approximately 2:1 or less, approximately 1.5:1 or less, approximately 1.25:1 or less, approximately 1:1 or less, approximately 0.75:1 or less, or approximately 0.5:1 or less. In one embodiment, the molar ratio of water to silicon (water:silicon) can be 0.5:1 to 2.5:1, 0.75:1 to 2:1, 1:1 to 1.5:1, or 1:1 to 1.25:1. Furthermore, even ranges other than the above may be other ranges formed by combining the above upper and lower limits.

[0732] For the above-mentioned fluoroalkylsilane oligomer, 1 H-NMR, 29 Si-NMR, GC (gas chromatography), and LC (liquid chromatography) analyses can perform structural and compositional analyses and can determine the composition or ratio of a mixture of multimers containing 2- to 14-mers, the ratio or residual rate of hydrolyzable groups, the degree of condensation, and the like.

[0733] The number average molecular weight of the fluoroalkylsilane oligomer mixture is preferably 300 or more, preferably 400 or more, more preferably 500 or more, and further preferably 800 or more.

[0734] The number average molecular weight of the fluoroalkylsilane oligomer mixture may be preferably 4500 or less, more preferably 4000 or less, further preferably 3500 or less, and even more preferably 3000 or less.

[0735] In the present invention, the "number average molecular weight" can be measured by GPC (gel permeation chromatography) analysis.

[0736] In the fluoroalkylsilane oligomer mixture, the ratio of methoxy groups (OCH3) to silicon (Si) (OCH3 / Si, molar ratio) is preferably 1.5 or greater, more preferably 2.0 or greater, and even more preferably 2.2 or greater. By setting this ratio to 1.5 or greater, friction durability is further improved. Furthermore, the ratio of methoxy groups to silicon is preferably 2.8 or less, more preferably 2.7 or less, and even more preferably 2.5 or less. By setting this ratio to 2.8 or less, wear durability is further improved.

[0737] The above-mentioned methoxy group content ratio relative to silicon can be used 29 The measurement was performed by Si-NMR.

[0738] The amount of the fluoroalkylsilane oligomer mixture relative to the total amount of the fluoroalkylsilane oligomer mixture and the perfluoroalkyl group-containing silane compound may be preferably 20% by mass or less, more preferably 10% by mass or less.

[0739] The amount of the fluoroalkylsilane oligomer mixture relative to the total amount of the fluoroalkylsilane oligomer mixture and the perfluoroalkyl group-containing silane compound may be preferably 0.1% by mass or more, more preferably 0.5% by mass or more.

[0740] As described above, in this embodiment, by performing S100 to S200, the antifouling layer 130 is formed on the concavoconvexity (the concavoconvexity of the substrate 110 or the concavoconvexity-forming layer 120). This makes the antifouling layer 130 firmly bonded to the concavoconvexity, thereby improving the wear resistance and durability of the antifouling layer 130.

[0741] [Example]

[0742] Hereinafter, examples of this embodiment will be described using Examples. The following compound X was used.

[0743] Compound X: CF3CF2CF2O (CF2CF2CF2O) 30 CF2CF2CONHCH2C[CH2CH2CH2Si(OCH3)3]3

[0744] Compound X was dissolved in hydrofluoroether (3M Japan Co., Ltd., Novec HFE7200) to a concentration of 20% by mass, to obtain a surface treatment agent Y.

[0745] [Example 1]

[0746] AS4700F (manufactured by Momentive) as a resin composition for forming irregularities was applied to a substrate [chemically strengthened glass ("Gorilla" glass manufactured by Corning Incorporated, thickness 0.7 mm)] and dried by heating to obtain a member A.

[0747] The dried unevenness-forming resin composition of member A was irradiated with a Xe excimer lamp to form an unevenness-forming layer 120 , thereby obtaining member B.

[0748] The surface treatment agent Y was vacuum-deposited on the side of the dried unevenness-forming resin composition of the component A. The processing conditions of the vacuum deposition were a pressure of 3.0×10 -3 Pa. Regarding the treatment amount, 2 mg of the surface treatment agent Y (ie, containing 0.4 mg of the compound X) was vapor-deposited per one piece of chemically strengthened glass to form the antifouling layer 130 and obtain a component C.

[0749] The surface treatment agent Y was vacuum-deposited on the concavo-convex forming layer 120 of the component B. The processing conditions of the vacuum deposition were a pressure of 3.0×10 -3 Pa. Regarding the treatment amount, 2 mg / (ie, containing 0.4 mg of compound X) of surface treatment agent Y was vapor-deposited per one piece of chemically strengthened glass to form an antifouling layer 130, thereby obtaining a component D.

[0750] [Friction durability test]

[0751] The static contact angle of water was measured for the surface layers of the member C and member D formed as described above. The static contact angle of water was measured using a contact angle measuring device (manufactured by Kyowa Interface Science Co., Ltd.) with 1 μL of water.

[0752] First, as an initial evaluation, the static contact angle of water of the member C and the member D was measured in a state where there was no contact with the surface (number of frictions 0).

[0753] Afterwards, as a friction durability evaluation, a steel wool friction durability evaluation was implemented. Specifically, the substrate formed with the surface treatment layer was arranged horizontally, and the steel wool (number #0000, size 5mm×10mm×10mm) was brought into contact with the exposed upper surface of the surface treatment layer, and a load of 1,000gf was applied thereto. Thereafter, the steel wool was reciprocated at a speed of 140mm / second under the applied load. The static contact angle (degrees) of water was measured every 1,000 reciprocating times. Among them, the evaluation was carried out until the reciprocating number was 10,000, or until the measured value of the contact angle was less than 80°. The results are shown in Table 2 ("-" means not measured).

[0754] [Table 1]

[0755] Number of frictions Part C Part D 0 113 115 1000 104 110 2000 92 105 3000 74 99 4000 - 92 5000 - 84 6000 - 75

[0756] The results of measuring the surface conditions of parts A to D using an atomic force microscope are shown below.

[0757] [Table 2]

[0758]

[0759] Among them, Profile is a value calculated based on the analysis image, with the cross section on the surface as the measurement area, and Image is a value calculated based on the analysis image, with the entire plane of the surface as the measurement area. Ra (nm) is the arithmetic mean roughness (for example, it can be calculated using the calculation formula specified in JIS B0601 or an extension of this formula), RMS (nm) is the root mean square roughness, Rz (nm) is the surface roughness (i.e., the maximum height, which can be calculated using the calculation formula for the ten-point average roughness Rz specified in JIS B0601 or an extension of this formula), P-V (nm) is the maximum height difference (maximum value - minimum value) of the height z, and S (μm) is the maximum height difference. 2 ) is calculated by calculating the net surface area of the analysis plane as the sum of the vector products of the small dividing surfaces, and S Ratio is the ratio of the net surface area S to the surface area S0 when the analysis plane is regarded as an ideal plane.

[0760] While the present invention has been described above using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It is obvious to those skilled in the art that the above embodiments can be variously modified or improved. It is clear from the description of the scope of the claims that such modified or improved methods are also included in the technical scope of the present invention.

[0761] Regarding the order in which the various processes, procedures, steps, and stages of the methods described in the claims, descriptions, and drawings are implemented, it should be noted that, unless specifically and explicitly indicated by reference to "earlier," "before," or the like, and provided that no material generated as a result of the preceding process is used in the subsequent process, they may be implemented in any order. Regarding the operational flows described in the claims, descriptions, and drawings, even if references to "first," "next," or the like are used for ease of explanation, this does not necessarily imply that they must be implemented in that order.

[0762] Explanation of symbols

[0763] 10: Antifouling member; 110: Base material; 120: Concavoconvexity-forming layer; 130: Antifouling layer.

Claims

1. An antifouling component, characterized in that: The surface of one surface is provided with nano-scale irregularities. The antifouling member includes an antifouling layer provided on the concave portions of the concavoconvex portions.

2. The antifouling component according to claim 1, wherein: The average pitch width of the convex portions of the concavo-convex is 5 to 18 nm.

3. The antifouling member according to claim 1 or 2, wherein: The surface roughness Rz measured on the plane of the concavoconvex is 9 to 12 nm.

4. The antifouling member according to any one of claims 1 to 3, wherein: The surface roughness Rz measured on the cross section of the concavo-convex portion is 3 to 5 nm.

5. The antifouling member according to any one of claims 1 to 4, characterized in that: The maximum height difference PV measured on the plane of the concavoconvex is 5 to 15 nm.

6. The antifouling member according to any one of claims 1 to 5, characterized in that: The maximum height difference PV measured on the cross section of the concavo-convex is 4 to 8 nm.

7. The antifouling member according to any one of claims 1 to 6, characterized in that: The arithmetic mean roughness Ra measured on the plane of the concavoconvex is 0.6 to 2.0 nm.

8. The antifouling member according to any one of claims 1 to 7, wherein: The arithmetic mean roughness Ra measured on the cross section of the concavoconvex is 0.6 to 2.0 nm.

9. The antifouling member according to any one of claims 1 to 8, wherein: The root mean square roughness RMS measured on the concave and convex plane is 0.8 to 2.0 nm.

10. The antifouling member according to any one of claims 1 to 9, characterized in that: The root mean square roughness RMS measured on the cross section of the concavoconvex is 0.7 to 3.0 nm.

11. The antifouling member according to any one of claims 1 to 10, wherein Include: substrate; and Concavoconvex cambium, The concavities and convexities are formed on the surface of the concavity-convexity-forming layer.

12. The antifouling member according to any one of claims 1 to 10, wherein: Contains a substrate, The concavoconvexities are formed on the surface of the substrate.

13. The antifouling member according to any one of claims 1 to 12, wherein: The height of the one surface of the antifouling layer formed in the concave portion in the normal direction does not exceed the convex portion of the concavo-convex portion.

14. The antifouling member according to any one of claims 1 to 13, wherein: The contact angle of one side of the surface when contacting water is 105 to 120 degrees.

15. The antifouling member according to any one of claims 1 to 14, characterized in that: The pencil hardness of the one surface is HB or higher.

16. The antifouling member according to any one of claims 1 to 15, characterized in that: The antifouling layer contains a silane compound containing a perfluoropolyether group.

17. The antifouling member according to claim 11, wherein: The concavoconvexity-forming layer contains a silicone resin.

18. The antifouling member according to claim 17, wherein: The organic silicone resin includes a Q unit structure and a T unit structure.

19. The antifouling member according to claim 18, wherein: The composition ratio of carbon atoms in the concave portion of the concave-convex forming layer is larger than that in the convex portion.

20. The antifouling member according to claim 18 or 19, wherein: The molar concentration of the silanol groups in the concave portion of the concave-convex forming layer is higher than that in the convex portion.

21. A display, characterized in that: At least a portion of the display portion is covered with the antifouling member according to any one of claims 1 to 20.

22. A touch panel, characterized in that: At least a portion of the touch portion is covered with the antifouling member according to any one of claims 1 to 20.

23. A sensor, characterized in that: At least a portion of the surface is covered with the antifouling member according to any one of claims 1 to 20.

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