Splicing equipment for semiconductor quartz plate and operation method of splicing equipment

Abstract

The invention relates to the technical field of semiconductor quartz product processing, in particular to splicing equipment for semiconductor quartz plates and an operation method thereof, and the splicing equipment comprises a first rack which is provided with a supporting table for bearing a first quartz plate; the second rack and the first rack are arranged side by side in the horizontal X-axis direction, and a clamping part used for clamping the second quartz plate is arranged on the second rack; the adjusting assembly is arranged on the second rack and used for adjusting the positions of the clamping part in the vertical Z-axis direction and the horizontal X-axis direction; and the welding gun assembly is arranged on the second rack and used for heating the welding ends of the first quartz plate on the supporting table and the second quartz plate on the clamping part, so that the welding ends of the first quartz plate and the second quartz plate are fused and in butt joint. According to the equipment, two quartz plates made of the same or different materials can be quickly butted, the appearance of the butted part is relatively uniform, the generated stress is small, and a good forming effect is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor quartz product processing, and more particularly, to a splicing device for semiconductor quartz plates and an operating method thereof. Background Art

[0002] Currently, in the processing of semiconductor quartz products, the splicing of two quartz plates of the same or different materials is done by stacking them, and then using a molten welding rod to melt the two plates together. However, due to the long stacking time, the stress at the joint is relatively concentrated, resulting in a high scrap rate for the product. In addition, the skill requirements for the operator are also high during the splicing process. Summary of the Invention

[0003] The main purpose of the present invention is to provide a splicing device for semiconductor quartz plates and an operating method thereof to solve the technical problems mentioned in the background technology.

[0004] In order to solve the above technical problems, the present invention provides a splicing device for semiconductor quartz plates, comprising: a first frame, on which a support platform for carrying a quartz plate 1 is provided; a second frame, arranged side by side with the first frame along the horizontal X-axis direction, and provided with a clamping portion for clamping the second quartz plate; an adjusting assembly, disposed on the second frame, for adjusting the position of the clamping portion in the vertical Z-axis direction and the horizontal X-axis direction; and a welding gun assembly, which is arranged on the second frame and is used for heating the welding ends of the quartz plate 1 on the supporting platform and the quartz plate 2 on the clamping part, so that the welding ends of the two are melted and butted.

[0005] In the above technical solution, further, the support platform includes: A support base, provided on the first frame, for supporting the horizontal quartz plate 1; and a stopper, which is arranged on the first frame and is higher than the supporting seat, and is used for limiting the side end of the quartz plate 1 away from the quartz plate 2.

[0006] In any of the above technical solutions, further, the adjustment component includes: A lifting platform is arranged on the second frame; The positioning base is set on the lifting platform, and there is a slide rail set along the horizontal X-axis direction on the positioning base. A sliding plate is slidably arranged on the slide rail; and a first adjusting rod for adjusting the position of the sliding plate on the slide rail; Wherein, the clamping portion is arranged on the sliding plate.

[0007] In any of the above technical solutions, further, the clamping portion includes: A U-shaped clamping seat, wherein the opening of the U-shaped clamping seat is arranged toward the first frame, and the opening is used for the side end of the second quartz plate to be embedded; And a positioning bolt is arranged on the U-shaped clamp seat along the vertical direction and is used to adjust the opening size of the U-shaped clamp seat.

[0008] In any of the above technical solutions, further, a stand is provided on the second rack; The welding gun assembly includes: The sliding frame is slidably arranged on the vertical frame along the horizontal Y-axis direction; The upper support is slidably arranged on the sliding frame along the vertical Z-axis direction; The upper welding gun group is arranged on the upper support. The upper welding gun group has a plurality of upper welding guns arranged along the horizontal Y-axis direction, and the flame nozzles of each upper welding gun are arranged downward; The lower support is slidably arranged on the sliding frame along the vertical Z-axis direction; and a lower welding gun group, which is arranged on the lower support. The lower welding gun group has a plurality of lower welding guns arranged along the horizontal Y-axis direction, and the flame nozzles of the lower welding guns are all arranged upward; Among them, the upper welding gun group is used to heat the upper end surface of the welding end of quartz plate 1 and quartz plate 2; the lower welding gun group is used to heat the lower end surface of the welding end of quartz plate 1 and quartz plate 2.

[0009] In any of the above technical solutions, further, the angle between the upper welding gun assembly and the upper support along the vertical direction can be adjusted; the angle between the lower welding gun assembly and the lower support along the vertical direction can be adjusted.

[0010] In any of the above technical solutions, further, the welding gun assembly also includes: The second adjusting rod is used to adjust the position of the sliding frame in the horizontal Y-axis direction; The third adjusting rod is used to adjust the position of the upper support in the vertical Z-axis direction; And a fourth adjusting rod is used to adjust the position of the lower support in the vertical Z-axis direction.

[0011] In any of the above technical solutions, further, the sliding frame is a square frame structure, which includes: an upper rod, a lower rod and two side rods; Among them, there is a sliding rod arranged along the horizontal Y-axis direction on the vertical frame. There are two sliding rods, which are arranged up and down. The upper rod and the lower rod are each provided with a first slider. The upper rod and the lower rod are respectively slidably arranged on the two sliding rods through the first slider; the second adjusting rod is arranged on one of the side rods.

[0012] In any of the above technical solutions, further, the upper support includes: a horizontally arranged upper support plate and an upper slide plate connected to the upper support plate, the upper welding gun group is arranged on the upper support plate; two second slide blocks are provided on the upper slide block, and the upper slide block is slidably arranged on the two side rods through the two second slide blocks; The lower support includes: a horizontally arranged lower support plate and a lower slide plate connected to the lower support plate, and the lower welding gun group is arranged on the lower support plate; two third sliders are arranged on the lower sliding plate, and the lower slide plate is slidably arranged on the two side rods through the two third sliders.

[0013] On the other hand, an operating method for the above-mentioned splicing device is also proposed, and the specific steps of the operating method are as follows: S1. Place quartz plate 1 on the support table and fix quartz plate 2 on the clamping part so that the left and right sides of quartz plate 1 and quartz plate 2 are flush; S2. Adjust the position of the second quartz plate in the vertical Z-axis direction by adjusting the assembly so that the upper end surface of the second quartz plate is flush with the upper end surface of the first quartz plate; at the same time, adjust the horizontal position of the second quartz plate so that the distance between the first and second quartz plates is 1-2 mm; S3. Use the third and fourth adjusting levers to adjust the positions of the upper and lower welding torch groups, respectively, so that the flames are aimed at the upper and lower end surfaces of the welding ends of the first and second quartz plates; S4, ignite, start the upper welding gun group and the lower welding gun group, and pull the second adjustment rod back and forth at a uniform speed, so that the upper welding gun group and the lower welding gun group jointly heat the welding ends of the quartz plate 1 and the quartz plate 2 uniformly; S5. After the welding ends of the quartz plate 1 and the quartz plate 2 are in a molten state, the quartz plate 2 is moved toward the quartz plate 1 by adjusting the assembly, and the two are melted and butted, and then the flame is turned off; S6. After the temperature drops, the clamping part releases the second quartz plate and takes out the docked quartz plate.

[0014] Beneficial effects: Compared with the existing technology, this equipment can realize the rapid docking of two quartz plates of the same or different materials, and the appearance of the docking part is relatively uniform, the stress generated is small, and it has a good forming effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention; Figure 2 This is a schematic diagram of the three-dimensional structure of the present invention after removing the protective cover; Figure 3 It is a structural schematic diagram of the second frame of the present invention and the components thereon; Figure 4 It is a structural schematic diagram of the second frame of the present invention and the components thereon from another perspective.

[0017] The following are the descriptions of the reference numerals: 100, quartz plate 1; 200, quartz plate 2; 1, first frame; 2, support platform; 21, support base; 22, stopper; 3, second frame; 31, stand; 32, slide bar; 4, clamping part; 41, U-shaped clamping base; 42, positioning bolt; 5, adjustment assembly; 51, lifting platform; 52, positioning base; 53, slide plate; 54, first adjustment rod; 6, welding gun assembly; 61, slide frame; 611 , upper rod, 612, lower rod; 613, side rod; 614, first slider; 62, upper support; 621, upper support plate; 622, upper slide; 623, second slider; 63, upper welding gun group; 64, lower support; 641, lower support plate; 642, lower slide; 643, third slider; 65, lower welding gun group; 66, second adjusting rod; 67, third adjusting rod; 68, fourth adjusting rod; 7, protective cover. DETAILED DESCRIPTION

[0018] Below, example embodiments according to the present application will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. It should be understood that the present application is not limited to the example embodiments described herein. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts shall fall within the scope of protection of the present invention.

[0019] It should be noted that, as shown in this application and the claims, unless the context clearly indicates an exception, the words "a," "an," "an," and / or "the" do not refer to the singular and may include the plural. Generally speaking, the terms "comprise" and "include" only indicate the inclusion of the steps and elements specifically identified, and these steps and elements do not constitute an exclusive list. A method or apparatus may also include other steps or elements.

[0020] If the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), such directional indications are only used to explain the relative positional relationship, movement, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0021] In the present invention, unless otherwise specified or limited, the terms "connection" and "fixation" should be understood in a broad sense. For example, "fixation" can mean fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. Those skilled in the art will be able to understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0022] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the meaning of "and / or" appearing throughout the text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0023] Example 1: like Figures 1-4 As shown, in this embodiment, a splicing device for semiconductor quartz plates includes: a first frame 1, on which a support table 2 for carrying a quartz plate 100 is provided; a second frame 3, arranged side by side with the first frame 1 along the horizontal X-axis direction, and the second frame 3 is provided with a clamping portion 4 for clamping a quartz plate 200; an adjustment component 5, arranged on the second frame 3, for adjusting the position of the clamping portion 4 in the vertical Z-axis direction and the horizontal X-axis direction; and a welding gun assembly 6, arranged on the second frame 3, for heating the welding ends of the quartz plate 100 on the support table 2 and the quartz plate 200 on the clamping portion 4, so that the welding ends of the two are melted and butted.

[0024] To achieve precise docking of quartz plate 100 and quartz plate 200, a first frame 1 and a second frame 3 are provided. A support platform 2 is mounted on the first frame 1, and a clamping portion 4, an adjustment assembly 5, and a welding torch assembly 6 are mounted on the second frame 3. First, quartz plate 100 is placed on support platform 2 of the first frame 1. Quartz plate 200 is then secured to clamping portion 4 of the second frame 3. Quartz plates 100 and 200 are then aligned so that their front and back sides, as well as their top and bottom sides, are flush. The welding torch assembly 6 is then ignited, spraying a flame onto quartz plates 100 and 200. The high temperature melts the welded ends of quartz plates 100 and 200. Quartz plates 100 and 200 are then docked, fusing the melted portions together and welding quartz plates 100 and 200 together. This method is not only easy to operate, but also has high welding precision and high welding efficiency.

[0025] It should be noted that to facilitate the docking of quartz plate 100 and quartz plate 200, self-locking rollers are installed around the bottom of the first rack 1 and the second rack 3. After quartz plate 100 and quartz plate 200 are placed on the first rack 1 and the second rack 3, respectively, the front and back sides of quartz plate 100 and quartz plate 200 are aligned by moving the first rack 1 and / or the second rack 3. After welding is completed, when removing the product, after loosening quartz plate 200, the first rack 1 and the second rack 3 are separated, and the welded quartz plates can be easily removed from the clamping portion 4.

[0026] In this embodiment, the support platform 2 is optimized and includes: a support base 21, which is arranged on the first frame 1 and is used to support the horizontal quartz plate 100; and a stopper 22, which is arranged on the first frame 1 and is higher than the support base 21 and is used to limit the side end of the quartz plate 100 away from the quartz plate 200.

[0027] For quartz plate 100 and quartz plate 200, when quartz plate 200 can be fixed by the clamping part 4, there is no need for high requirements for quartz plate 100 on the first frame 1, it only needs to be in a horizontal state, and when quartz plate 200 moves toward quartz plate 100 and presses against quartz plate 100, quartz plate 100 cannot move, so a support seat 21 and a stopper 22 are used as a support platform 2, and the support seat 21 is composed of a plurality of vertically arranged support blocks. When quartz plate 100 is placed on each support block, quartz plate 100 is in a horizontal state, and the stopper 22 is located on the rear side of the support block (the left side in the drawing) and is used to limit the left side of quartz plate 100. When quartz plate 200 moves toward quartz plate 100 for docking, the stopper 22 can prevent quartz plate 100 from moving. Of course, a clamping device can also be provided on the first frame 1 to clamp the quartz plate 100, but this method not only increases the cost, but also relatively reduces the efficiency of loading and unloading, which is not conducive to practical operation.

[0028] Example 2: This embodiment is a further improvement based on the first embodiment.

[0029] like Figure 2 As shown, in this embodiment, the adjustment assembly 5 includes: a lifting platform 51, which is arranged on the second frame 3; a positioning base plate 52, which is arranged on the lifting platform 51, and has a slide rail arranged along the horizontal X-axis direction on the positioning base plate 52, a sliding plate 53, which is slidably arranged on the slide rail; and a first adjustment rod 54, which is used to adjust the position of the sliding plate 53 on the slide rail; The clamping portion 4 is disposed on the sliding plate 53 .

[0030] Regarding the adjustment component 5, it is mainly composed of a lifting platform 51 and a sliding plate 53. The lifting platform 51 is used to adjust the height of the quartz plate 200 on the clamping part 4, and the sliding plate 53 adjusts the movement of the quartz plate 200 to change the distance between the quartz plate 200 and the quartz plate 100.

[0031] It should be noted that the lifting platform 51 is a cross lifting platform 51 , and the sliding plate 53 thereon can be driven to rise or fall by manually adjusting the cross lifting platform 51 .

[0032] It should be noted that a linear bearing is provided on the positioning base plate 52 , and the first adjustment rod 54 passes through the linear bearing and is connected to the sliding plate 53 . By pushing and pulling the first adjustment rod 54 , the sliding plate 53 can be moved on the slide rail.

[0033] Example 3 This embodiment is a further improvement based on the first embodiment.

[0034] like Figure 1-Figure 3 As shown, in this embodiment, the clamping portion 4 includes: a U-shaped clamping seat 41, the opening of the U-shaped clamping seat 41 is set toward the first frame 1, and the opening is used for the side end of the quartz plate 200 to be embedded; and a positioning bolt 42, which is set on the U-shaped clamping seat 41 along the vertical direction and is used to adjust the opening size of the U-shaped clamping seat 41.

[0035] Regarding the clamping part 4, in order to clamp the quartz plate 200, a U-shaped clamping seat 41 is provided. The U-shaped clamping seat 41 is long and has an opening on the side. After the end of the quartz plate 200 is embedded in the opening, the quartz plate 200 can be fixed on the U-shaped clamping seat 41 by rotating the positioning bolt 42. This clamping method is very convenient and saves cost.

[0036] It should be noted that a plurality of positioning bolts 42 may be provided and distributed along the length direction of the U-shaped clamping seat 41 so as to uniformly apply the fixing external force to the quartz plate 200 .

[0037] Example 3: This embodiment is a further improvement based on any of the above embodiments.

[0038] like Figure 2-Figure 4 As shown, in this embodiment, a vertical frame 31 is provided on the second frame 3; the welding gun assembly 6 includes: a sliding frame 61, which is slidably provided on the vertical frame 31 along the horizontal Y-axis direction; an upper support 62, which is slidably provided on the sliding frame 61 along the vertical Z-axis direction; an upper welding gun group 63, which is provided on the upper support 62, and has a plurality of upper welding guns provided along the horizontal Y-axis direction on the upper welding gun group 63, and the flame nozzle of each upper welding gun is provided downward; a lower support 64, which is slidably provided on the sliding frame 61 along the vertical Z-axis direction; and a lower welding gun group 65, which is provided on the lower support 64, and has a plurality of lower welding guns provided along the horizontal Y-axis direction on the lower welding gun group 65, and the flame nozzle of each lower welding gun is provided upward; The upper welding gun group 63 is used to heat the upper end surfaces of the welding ends of the quartz plate 1 100 and the quartz plate 2 200 ; the lower welding gun group 65 is used to heat the lower end surfaces of the welding ends of the quartz plate 1 100 and the quartz plate 2 200 .

[0039] The welding gun assembly 6 is a component used to heat the quartz plate 1 100 and the quartz plate 2 200. It is mainly divided into an upper welding gun group 63 and a lower welding gun group 65. The upper and lower end surfaces of the quartz plate 1 100 and the quartz plate 2 200 are heated by the upper welding gun group 63 and the lower welding gun group 65 respectively so that the two can melt, thereby facilitating subsequent extrusion splicing.

[0040] It should be noted that in order to ensure that the quartz plate 100 and the quartz plate 200 are heated evenly, the sliding frame 61 is set to slide along the horizontal Y-axis direction, and then by driving the sliding frame 61 to move back and forth, the upper welding gun on the upper welding gun group 63 and the lower welding gun on the lower welding gun group 65 can move back and forth to evenly heat the quartz plate 100 and the quartz plate 2 200, thereby making them melt more fully.

[0041] In this embodiment, it is optimized that the angle between the upper welding gun assembly 63 and the upper support 62 along the vertical direction is adjustable; the angle between the lower welding gun assembly 65 and the lower support 64 along the vertical direction is adjustable.

[0042] By setting the angles of the upper welding gun group 63 and the lower welding gun group 65 to be adjustable, the flames ejected from the upper welding gun and the lower welding gun act on the optimal positions on the quartz plate 100 and the quartz plate 200.

[0043] In this embodiment, it is optimized that a protective cover 7 is further installed on the second frame 3 to protect the sliding frame 61 and the components located thereon to prevent dust.

[0044] Example 4: This embodiment is a further improvement made on the basis of the third embodiment.

[0045] like Figures 1-4 As shown, in this embodiment, the welding gun assembly 6 also includes: a second adjusting rod 66 for adjusting the position of the sliding frame 61 in the horizontal Y-axis direction; a third adjusting rod 67 for adjusting the position of the upper support 62 in the vertical Z-axis direction; and a fourth adjusting rod 68 for adjusting the position of the lower support 64 in the vertical Z-axis direction.

[0046] By setting the manually adjustable second adjustment rod 66, third adjustment rod 67 and fourth adjustment rod 68, accurate adjustment of the welding gun assembly 6 is achieved, which is easy to operate. Of course, in order to improve the automation effect, the production cost can be appropriately increased by using a motor to achieve automatic adjustment.

[0047] Embodiment 5: This embodiment is a further improvement based on the fourth embodiment.

[0048] like Figure 2-Figure 4 As shown, in this embodiment, the sliding frame 61 is a square frame structure, which includes: an upper rod 611, a lower rod 612 and two side rods 613; Among them, there is a sliding rod 32 arranged along the horizontal Y-axis direction on the stand 31. There are two sliding rods 32, which are arranged up and down. The upper rod 611 and the lower rod 612 are both provided with a first slider 614. The upper rod 611 and the lower rod 612 are respectively slidably set on the two sliding rods 32 through the first slider 614; the second adjusting rod 66 is set on one of the side rods 613.

[0049] The upper support 62 includes: a horizontally arranged upper support plate 621 and an upper slide plate 622 connected to the upper support plate 621. The upper welding gun assembly 63 is arranged on the upper support plate 621; two second sliders 623 are provided on the upper slide plate 622, and the upper slide plate 622 is slidably arranged on the two side rods 613 through the two second sliders 623; The lower support 64 includes: a horizontally arranged lower support plate 641 and a lower slide plate 642 connected to the lower support plate 641, and the lower welding gun group 65 is arranged on the lower support plate 641; two third sliders 643 are provided on the lower slide plate 642, and the lower slide plate 642 is slidably arranged on the two side rods 613 through the two third sliders 643.

[0050] The sliding frame 61 is provided to realize the movement of the welding gun assembly 6 in the horizontal Y-axis direction, and the upper support 62 and the lower support 64 are provided to realize the movement of the upper welding gun group 63 and the lower welding gun group 65 in the vertical Z-axis direction. Specifically, the third adjusting rod 67 and the fourth adjusting rod 68 are used to adjust the distance between the upper welding gun group 63 and the lower welding gun group 65 and the quartz plate respectively. After the distance is adjusted appropriately, the upper welding gun group 63 and the lower welding gun group 65 are started, and the upper welding gun and the lower welding gun spray flames. Then, by pushing the second adjusting rod 66 back and forth, the sliding rack 61 can be driven to move, so that the upper welding gun and the lower welding gun act evenly on the quartz plate back and forth, so that the quartz plate 100 and the quartz plate 200 are evenly heated and melted. Finally, the first adjusting rod 54 is pushed with the same specification to make the quartz plate 200 press against the quartz plate 100. Under the action of the extrusion force, the melted parts of the quartz plate 200 and the quartz plate 100 are fused together to form an integrated structure.

[0051] Example 6: This embodiment provides an operating method for the above-mentioned splicing device, and the specific steps of the operating method are as follows: S1. Place quartz plate 100 on support platform 2 and fix quartz plate 200 on clamping portion 4 so that the left and right sides of quartz plate 100 and quartz plate 200 are flush. S2. Adjust the position of the second quartz plate 200 in the vertical Z-axis direction by adjusting component 5 so that the upper end surface of the second quartz plate 200 is flush with the upper end surface of the first quartz plate 100; at the same time, adjust the horizontal position of the second quartz plate 200 so that the distance between the first quartz plate 100 and the second quartz plate 200 is 1-2 mm; S3. Use the third adjusting rod 67 and the fourth adjusting rod 68 to adjust the positions of the upper welding torch assembly 63 and the lower welding torch assembly 65 respectively, so that the flames are aimed at the upper and lower end surfaces of the welding ends of the quartz plate 100 and the quartz plate 200; S4, ignite, start the upper welding gun group 63 and the lower welding gun group 65, and pull the second adjustment rod 66 back and forth at a uniform speed, so that the upper welding gun group 63 and the lower welding gun group 65 jointly heat the welding ends of the quartz plate 100 and the quartz plate 200 uniformly; S5. After the welding ends of the quartz plate 100 and the quartz plate 200 are in a molten state, the quartz plate 200 is moved toward the quartz plate 100 by adjusting the component 5, and the two are melted and butted, and then the flame is turned off. S6. After the temperature drops, the clamping part 4 releases the quartz plate 200 and takes out the docked quartz plate.

[0052] By adopting the above method, two quartz plates of the same or different materials can be quickly butted together, and the appearance of the butted parts is relatively uniform, the stress generated is small, and a good forming effect is achieved.

[0053] While various embodiments of the present disclosure have been described above, the above descriptions are illustrative, non-exhaustive, and not intended to be limiting of the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is selected to best explain the principles of the embodiments, their practical applications, or improvements to existing technologies, or to enable others skilled in the art to understand the embodiments disclosed herein.

Claims

1. A splicing device for semiconductor quartz plates, characterized in that: include: A first frame (1) having a support platform (2) disposed thereon for carrying a quartz plate (100); A second frame (3) is arranged side by side with the first frame (1) along the horizontal X-axis direction, and a clamping portion (4) for clamping the second quartz plate (200) is provided on the second frame (3); An adjustment component (5) is provided on the second frame (3) and is used to adjust the position of the clamping portion (4) in the vertical Z-axis direction and the horizontal X-axis direction; and a welding gun assembly (6) disposed on the second frame (3) for heating the welding ends of the quartz plate 1 (100) on the support platform (2) and the quartz plate 2 (200) on the clamping portion (4) so that the welding ends thereof are melted and butted.

2. The splicing device for semiconductor quartz plates according to claim 1, characterized in that: The support platform (2) comprises: A support base (21) is provided on the first frame (1) and is used to support the horizontal quartz plate 1 (100); and a stopper (22), which is arranged on the first frame (1) and is higher than the support seat (21), and is used to limit the side end of the quartz plate 1 (100) away from the quartz plate 2 (200).

3. The splicing device for semiconductor quartz plates according to claim 1, characterized in that: The regulating component (5) comprises: A lifting platform (51) is arranged on the second frame (3); A positioning base plate (52) is provided on the lifting platform (51), and a slide rail is provided on the positioning base plate (52) along the horizontal X-axis direction. A sliding plate (53) is slidably arranged on the slide rail; and a first adjusting rod (54) for adjusting the position of the sliding plate (53) on the sliding rail; Wherein, the clamping portion (4) is arranged on the sliding plate (53).

4. The splicing device for semiconductor quartz plates according to claim 3, characterized in that: The clamping portion (4) comprises: A U-shaped clamp seat (41), wherein the opening of the U-shaped clamp seat (41) is arranged toward the first frame (1), and the opening is used for the side end of the second quartz plate (200) to be embedded; and a positioning bolt (42) arranged on the U-shaped clamp seat (41) in a vertical direction, for adjusting the opening size of the U-shaped clamp seat (41).

5. The splicing device for semiconductor quartz plates according to claim 1, characterized in that: A stand (31) is provided on the second frame (3); The welding gun assembly (6) comprises: A sliding frame (61) is slidably arranged on the vertical frame (31) along the horizontal Y-axis direction; An upper support (62) is slidably arranged on the sliding frame (61) along the vertical Z-axis direction; An upper welding gun group (63) is arranged on the upper support (62), and the upper welding gun group (63) has a plurality of upper welding guns arranged along the horizontal Y-axis direction, and the flame nozzle of each upper welding gun is arranged downward; A lower support (64) is slidably arranged on the sliding frame (61) along the vertical Z-axis direction; and a lower welding gun group (65) arranged on the lower support (64), wherein the lower welding gun group (65) has a plurality of lower welding guns arranged along the horizontal Y-axis direction, and the flame nozzles of the lower welding guns are all arranged upward; The upper welding gun group (63) is used to heat the upper end surfaces of the welding ends of the quartz plate 1 (100) and the quartz plate 2 (200); and the lower welding gun group (65) is used to heat the lower end surfaces of the welding ends of the quartz plate 1 (100) and the quartz plate 2 (200).

6. The splicing device for semiconductor quartz plates according to claim 5, characterized in that: The angle between the upper welding gun assembly (63) and the upper support (62) along the vertical direction is adjustable; the angle between the lower welding gun assembly (65) and the lower support (64) along the vertical direction is adjustable.

7. The splicing device for semiconductor quartz plates according to claim 5, characterized in that: The welding gun assembly (6) further comprises: A second adjusting rod (66) is used to adjust the position of the sliding frame (61) in the horizontal Y-axis direction; a third adjusting rod (67) for adjusting the position of the upper support (62) in the vertical Z-axis direction; and a fourth adjusting rod (68) for adjusting the position of the lower support (64) in the vertical Z-axis direction.

8. The splicing device for semiconductor quartz plates according to claim 7, characterized in that: The sliding frame (61) is a square frame structure, comprising an upper rod (611), a lower rod (612) and two side rods (613); Wherein, the stand (31) is provided with a slide bar (32) arranged along the horizontal Y-axis direction, there are two slide bars (32) and they are arranged up and down, the upper bar (611) and the lower bar (612) are both provided with a first slider (614), the upper bar (611) and the lower bar (612) are respectively slidably arranged on the two slide bars (32) through the first slider (614); the second adjustment bar (66) is arranged on one of the side bars (613).

9. The splicing device for semiconductor quartz plates according to claim 8, characterized in that: The upper support (62) comprises: a horizontally arranged upper support plate (621) and an upper slide plate (622) connected to the upper support plate (621); the upper welding gun group (63) is arranged on the upper support plate (621); two second slide blocks (623) are arranged on the upper slide plate (622); the upper slide plate (622) is slidably arranged on the two side rods (613) via the two second slide blocks (623); The lower support (64) comprises: a horizontally arranged lower support plate (641) and a lower slide plate (642) connected to the lower support plate (641); the lower welding gun group (65) is arranged on the lower support plate (641); two third sliders (643) are arranged on the lower slide plate (642); the lower slide plate (642) is slidably arranged on the two side rods (613) through the two third sliders (643).

10. A method for operating the splicing device according to any one of claims 7 to 9, characterized in that: The specific steps of the operation method are as follows: S1. Place the quartz plate 1 (100) on the support platform (2), and fix the quartz plate 2 (200) on the clamping portion (4) so that the left and right sides of the quartz plate 1 (100) and the quartz plate 2 (200) are flush; S2. Adjust the position of the second quartz plate (200) in the vertical Z-axis direction by adjusting the assembly (5) so that the upper end surface of the second quartz plate (200) is flush with the upper end surface of the first quartz plate (100); at the same time, adjust the horizontal position of the second quartz plate (200) so that the distance between the first quartz plate (100) and the second quartz plate (200) is 1-2 mm; S3, adjusting the positions of the upper welding gun assembly (63) and the lower welding gun assembly (65) respectively through the third adjusting rod (67) and the fourth adjusting rod (68) so that the flame is aligned with the upper and lower end surfaces of the welding ends of the quartz plate 1 (100) and the quartz plate 2 (200); S4, ignite, start the upper welding gun group (63) and the lower welding gun group (65), and pull the second adjustment rod (66) back and forth at a uniform speed, so that the upper welding gun group (63) and the lower welding gun group (65) jointly heat the welding ends of the quartz plate 1 (100) and the quartz plate 2 (200) uniformly; S5. After the welding ends of the quartz plate 1 (100) and the quartz plate 2 (200) are in a molten state, the quartz plate 2 (200) is moved toward the quartz plate 1 (100) by adjusting the component (5), and the two are melted and butted, and then the flame is turned off; S6. After the temperature drops, the clamping part (4) releases the second quartz plate (200) and takes out the docked quartz plate.

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