Power cycle test device for semiconductor device

Abstract

The invention relates to a semiconductor device power cycle test device, and relates to the technical field of semiconductor device power, the test device comprises a machine body, a test machine, a positioning mechanism and a simulation mechanism, the simulation mechanism comprises a water storage plate which is arranged on the machine body, is internally provided with a liquid storage cavity and is used for placing a device for testing; the temperature control assembly is arranged on the machine body and used for introducing a liquid medium with the required temperature into the liquid storage cavity and controlling the temperature of the water storage plate; and the positioning mechanism is arranged on the machine body and is used for positioning the device on the water storage plate. The device is electrically connected with the testing machine, the positioning mechanism fixes the device on the water storage plate, and the temperature control assembly controls the temperature of the water storage plate, so that the external environment is simulated, the device is located in different external environments, the testing machine is started to test the power of the device, the external environment is closer to the actual operation environment when the device is detected, and the testing efficiency is improved. The quality or reliability of the device is thus confirmed.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor device power, and in particular to a semiconductor device power cycle test device. Background Art

[0002] Before semiconductor devices leave the factory, they need to undergo module power cycling tests. Module power cycling tests intermittently apply electrical stress to the device, subjecting it to cyclic changes in electrical stress between "on" and "off" to accelerate the physical and chemical reaction processes within the device. Therefore, there is an urgent need to provide test equipment for testing the power of semiconductor devices to verify the quality or reliability of the devices. Summary of the Invention

[0003] In order to verify the quality or reliability of a device, the present application provides a semiconductor device power cycle test apparatus.

[0004] The semiconductor device power cycle test device provided in this application adopts the following technical solutions: A semiconductor device power cycle test device includes a body, a tester, a positioning mechanism, and a simulation mechanism, wherein the simulation mechanism includes: A water storage plate is provided on the machine body and has a liquid storage cavity inside for placing components for testing; The temperature control component is arranged on the machine body and is used to introduce the liquid medium of the required temperature into the liquid storage chamber and control the temperature of the water storage plate; the positioning mechanism is arranged on the machine body and is used to position the device located on the water storage plate, and the testing machine is used to conduct tests after being electrically connected to the device.

[0005] By adopting the above technical solution, the device is electrically connected to the test machine, and then the positioning mechanism fixes the device to the water storage plate. The temperature control component starts to introduce liquid medium into the liquid storage cavity to control the temperature of the water storage plate. The water storage plate then controls the temperature at the device, thereby simulating the external environment, so that the device is in different external environments. Then the test machine is started to test the device power, so that the external environment during device testing is closer to the actual operating environment, thereby confirming the quality or reliability of the device.

[0006] Optionally, the temperature control component includes: A liquid storage tank, arranged on the machine body and filled with liquid medium; A pump body is arranged on the liquid storage tank; A liquid inlet pipe and a liquid outlet pipe are provided on the water storage plate and communicated with the liquid storage cavity. The liquid inlet pipe is communicated with the pump body and is used to input the liquid medium into the liquid storage cavity. The liquid outlet pipe is provided on the liquid storage tank and is used to return the liquid medium in the liquid storage cavity to the liquid storage tank. Temperature detector, used to detect the temperature of liquid medium; The heating tube and the fan are electrically connected to the temperature detector and are used for heating and cooling the liquid medium respectively.

[0007] By adopting the above technical solution, the temperature of the liquid medium is controlled by the cooperation of the heating tube, the fan and the temperature detector, so that the liquid medium can quickly reach the required temperature, and then the pump body is started to allow the liquid medium to pass into the liquid storage cavity, and the liquid medium controls the temperature of the water storage plate. Then the liquid medium flows back to the liquid storage tank through the liquid outlet pipe, thereby realizing the control of the temperature of the water storage plate. Furthermore, the heating tube and the fan can accelerate the temperature change speed of the liquid medium, shorten the test time, and improve the test efficiency.

[0008] Optionally, the positioning mechanism includes: A sliding seat is slidingly arranged on the machine body located on both sides of the water storage plate and extends above the water storage plate; A locking assembly, used to lock the position of the sliding seat; A sliding block is slidingly arranged on the sliding seat and its sliding direction is perpendicular to the sliding direction of the sliding seat; The positioning component is arranged on the sliding block and can move vertically and press against the device for positioning.

[0009] By adopting the above technical solution, the locking component is unlocked, and the sliding seat is moved to adjust the position of the sliding block and the positioning component. After the movement is completed, the locking component positions the sliding seat and the positioning component, and then the moving block moves to continue adjusting the position of the positioning component, thereby achieving the adjustment of the position of the positioning component in two mutually perpendicular directions. After the adjustment is completed, the device is connected to the testing machine and placed on the water storage plate, and then the positioning component is vertically moved to press against the device for positioning, while also generating a reaction force on the sliding block to position the positioning component. The sliding block does not need to be locked using a locking structure. The positioning component can unlock the position of the device and the sliding block by moving it upward, thereby achieving the positioning of the device, and also improving the convenience of the positioning process, thereby confirming the quality or reliability of the device and improving the test efficiency.

[0010] Optionally, the positioning component includes: A positioning screw, vertically threaded and connected to the sliding block; The positioning column is rotatably mounted on the bottom of the positioning screw and presses against the component for positioning.

[0011] By adopting the above technical solution, the positioning screw is turned to drive the positioning column to move downward, so that the positioning column is pressed against the device, and the positioning screw is continued to be turned to position the positioning column. At this time, the positioning screw and the positioning column rotate relative to each other, which reduces the probability of damage to the device caused by the rotation of the positioning column. While achieving positioning, it also reduces the risk of damage to the device. At the same time, turning the positioning screw in the opposite direction can drive the positioning column to disengage from the device, thereby unlocking the device.

[0012] Optionally, the locking assembly includes: The locking block slides in a direction close to or away from the machine body; The locking screw is threadedly connected to the machine body and is used to drive the locking block to move.

[0013] By adopting the above technical solution, the locking screw is rotated to push the locking block against the machine body, thereby positioning the sliding seat, and the sliding seat can be unlocked by twisting the locking screw in the opposite direction.

[0014] Optionally, the machine body is provided with an insulation component for insulating the water storage plate, and the insulation component includes: An insulation box is provided on the machine body so that the water storage plate is located inside the insulation box, and the insulation box is provided with a plurality of insulation holes for allowing devices to pass through and be placed on the water storage plate; The insulation plate is vertically slidably arranged on the sliding seat and connected to the positioning column; when the positioning column is pressed against the device for positioning, the insulation plate is pressed against the insulation box and is used to seal the insulation hole, or the positioning column moves upward to drive the insulation plate upward to open the insulation hole.

[0015] By adopting the above technical solution, the device is placed on the water storage plate through the insulation hole and is located in the insulation box. Then the positioning column moves downward to drive the insulation plate to move downward. When the positioning column presses on the device for positioning, the insulation plate also presses on the insulation box to seal the insulation hole. When heating is required, the heat stays in the insulation box, so that the temperature at the device can reach the required temperature more quickly. When cooling is required, the risk of external heat entering through the insulation hole and affecting the cooling speed is reduced, which greatly reduces the time of the temperature control process, improves the test efficiency, and greatly reduces the energy loss in the temperature control process and the risk of thermal pollution to the external environment during heating. At the same time, it also makes the environment in which the device is located closer to the required environment, thereby improving the test effect and efficiency.

[0016] Optionally, a replacement hole is provided on the insulation box, a replacement plate is mounted on the replacement hole, the insulation hole is provided on the replacement plate, and a avoidance hole is provided on the insulation hole for passing the wires electrically connecting the test machine and the device.

[0017] By adopting the above technical solution, the replacement board is connected and installed on the replacement hole, so it can be replaced when placing devices of different numbers and sizes. The number and size of the insulation holes are used to adapt to devices of different numbers and sizes. At the same time, the design of the avoidance holes can make it easier for the wires connecting the devices and the test machine to pass through, greatly reducing the damage to the wires, and reducing the time gap when the insulation board blocks the insulation hole, thereby improving the stability and accuracy during the test, confirming the quality or reliability of the device and improving the test efficiency.

[0018] Optionally, the test machine is electrically connected to a mounting base, and a mold base for different devices to be mounted on the mounting base is detachably mounted thereon, and the mold base is used to electrically connect the device to the test machine for testing.

[0019] By adopting the above technical solution, the device is snap-fitted and installed on the mold base, and the mold base electrically connects the device to the test machine, so that the device does not need to be electrically connected to the test machine during testing, which improves the convenience of the connection process and reduces the risk of inaccurate connection during manual connection, improves test efficiency, and further confirms the quality or reliability of the device.

[0020] Optionally, the mold base is located below the insulation plate and has a snap-in groove on its upper surface for device snap-in configuration. The positioning column is rotatably connected to the mounting seat through a rotating assembly and enables the mounting seat to rotate within a certain range. When the positioning column moves downward, the mounting seat rests on the water storage plate for positioning. When the positioning column moves upward, the mounting seat and the mold base are moved to the outside of the insulation box through the insulation hole. During the movement, the mounting seat and the mold base rotate under the action of gravity and the mold base is turned to an inclined state to facilitate device replacement.

[0021] By adopting the above technical solution, since the insulation plate is located above the mold base and close to one side of the mold base, when replacing the device, it is necessary to pass through the space between the mold base and the insulation plate, which makes it more troublesome to replace the device; The positioning column moves upward to drive the mounting seat away from the water storage plate and then moves to the top of the insulation box through the insulation hole. During the movement of the mounting seat and the mold base, they rotate under the action of gravity, so that the mounting seat and the mold base turn to an inclined state, that is, the device turns from parallel to the insulation plate to an inclined state. The inclined mold base can make it easier for the staff to replace the device on the mold base under the insulation plate. Then the positioning column moves downward, so that the mounting seat, mold base and device are moved into the insulation box through the insulation hole, so that the mounting seat is positioned against the water storage plate, and the mold base is in a horizontal state, so that the device can be tested.

[0022] The rotating mold base makes it easier to replace the device. At the same time, the positioning column moves the mold base to the outside of the insulation box for replacement, which greatly improves the convenience of replacing the device, thereby greatly improving the test efficiency and further confirming the quality or reliability of the device.

[0023] Optionally, the rotating assembly includes: A rotating plate is detachably mounted on the bottom of the positioning column; A rotating column is provided on the mounting seat and is rotatably mounted on the rotating plate; Positioning block one and positioning block two are respectively arranged on the rotating plate and the mounting seat. When the mounting seat is against the water storage plate for positioning, positioning block one and positioning block two are in a disengaged state. When the mounting seat, mold base and device are rotated to an inclined state under the action of gravity, positioning block two is against positioning block one for positioning.

[0024] By adopting the above technical solution, the positioning column drives the rotating plate, the mounting seat and the mold base to move simultaneously, so that the mounting seat is close to and abuts against the water storage plate. During the movement, the inclined mounting seat is rotated until it abuts against the mounting seat for positioning, thereby enabling the device to be positioned and then tested. After the test is completed, the positioning column drives the rotating plate, the positioning column, the mounting seat and the mold base to move. During the movement, the mounting seat and the mold base rotate under the action of gravity, and the mounting seat rotates to drive the positioning block 2 to approach and abut against the positioning block 1 for positioning, thereby making the mounting seat and the mold base in an inclined state, thereby facilitating the replacement of devices and then repeating the test.

[0025] By positioning the positioning block 1 and the positioning block 2 against each other, the mounting seat can be stably rotated and abutted against the water storage plate after moving back and contacting the water storage plate, making the entire process stable and reliable, improving the test efficiency, and further confirming the quality or reliability of the device.

[0026] In summary, this application includes at least one of the following beneficial technical effects: 1. By electrically connecting the device to the test machine, and then fixing the device to the water storage plate with a positioning mechanism, the temperature control component starts to pass liquid medium into the liquid storage chamber to control the temperature of the water storage plate. The water storage plate then controls the temperature at the device to simulate the external environment, so that the device is in different external environments. Then the test machine is started to test the device power, so that the external environment during device testing is closer to the actual operating environment, thereby confirming the quality or reliability of the device.

[0027] 2. By placing the device through the insulation hole onto the water storage plate and inside the insulation box, when the positioning column presses against the device for positioning, the insulation plate also presses against the insulation box to seal the insulation hole; when heating is required, the heat stays in the insulation box, so that the temperature at the device can reach the required temperature more quickly, and when cooling is required, the risk of external heat entering through the insulation hole and affecting the cooling speed is also reduced, which greatly reduces the time of the temperature control process, improves the test efficiency, and greatly reduces the energy loss in the temperature control process and the risk of thermal pollution to the external environment during heating. At the same time, it also makes the environment in which the device is located closer to the required environment, thereby improving the test effect and efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of the first embodiment of the test device; Figure 2 1 is a partial structural diagram of the first embodiment of the test device, wherein the side wall of the liquid storage tank is cut away; Figure 3 It is a partial structural diagram of the second embodiment of the test device; Figure 4 is a partial structural diagram of the third embodiment of the test device, wherein the side walls of the insulation box and the replacement plate are cut away; Figure 5 It is a partial structural diagram of the third embodiment of the test device, which is in the state of replacing components.

[0029] Reference numerals: 1, machine body; 11, testing machine; 12, insulation bottom plate; 13, wire; 14, mounting base; 15, mold base; 16, device; 2, simulation mechanism; 21, water storage plate; 22, temperature control component; 23, liquid storage tank; 24, pump body; 25, liquid inlet pipe; 26, liquid outlet pipe; 27, temperature detector; 28, heating pipe; 29, fan; 3, positioning mechanism; 31, sliding seat; 32, sliding block; 3 3. Sliding groove; 4. Locking assembly; 41. Locking block; 42. Locking screw; 43. Moving groove; 5. Positioning assembly; 51. Positioning screw; 52. Positioning column; 6. Insulation assembly; 61. Insulation box; 62. Insulation plate; 63. Replacement hole; 64. Replacement plate; 65. Insulation hole; 66. Avoidance hole; 67. Avoidance hole; 71. Rotating plate; 72. Rotating column; 73. Positioning block one; 74. Positioning block two. DETAILED DESCRIPTION

[0030] The application is described in further detail below.

[0031] The embodiments of the present application disclose a power cycle test device for a semiconductor device.

[0032] Example 1, with reference to Figure 1 and Figure 2 The semiconductor device power cycle test device includes a body 1, a test machine 11, a positioning mechanism 3 and a simulation mechanism 2. The test machine 11 is fixedly installed on the upper surface of the body 1, and a wire 13 electrically connected to the device 16 is fixedly installed on the test machine 11. The wire 13 is designed according to needs. The wire 13 can be one, two or even more wires. The test machine 11 is used to perform power-on testing on the device 16; the simulation mechanism 2 simulates different external environments as needed, and the positioning mechanism 3 is used to fix the device 16 to the simulation mechanism 2, so that the device 16 is in the required external environment. The test machine 11 is started to test the device 16.

[0033] The simulation mechanism 2 includes a water storage plate 21 and a temperature control component 22. An insulating bottom plate 12 for insulation is fixedly installed on the upper surface of the body 1. The water storage plate 21 is fixedly installed on the upper surface of the insulating bottom plate 12 and is located on one side of the testing machine 11. The water storage plate 21 is in a horizontal state and has a liquid storage cavity inside; the temperature control component 22 is set on the body 1 and is used to pass a liquid medium of the required temperature into the liquid storage cavity to control the temperature of the water storage plate 21. At the same time, the device 16 is placed on the upper surface of the water storage plate 21. The positioning mechanism 3 is used to position the device 16 so that the device 16 is in the designed external environment.

[0034] The temperature control assembly 22 includes a liquid storage tank 23, a pump body 24, a liquid inlet pipe 25 and a liquid outlet pipe 26, a temperature detector 27, a heating pipe 28 and a fan 29. The liquid storage tank 23 is fixedly mounted on the side wall of the body 1 and is filled with liquid medium, and the pump body 24 is fixedly mounted on the upper surface of the liquid storage tank 23 and is connected to the liquid storage tank 23; one end of the liquid inlet pipe 25 and the liquid outlet pipe 26 are fixedly mounted on the side wall of the water storage plate 21 and are connected to the liquid storage cavity, the other end of the liquid inlet pipe 25 is fixedly mounted on the pump body 24, and the other end of the liquid outlet pipe 26 is fixedly connected to the upper surface of the liquid storage tank 23.

[0035] When the pump body 24 is started, the liquid medium enters the liquid storage chamber through the liquid inlet pipe 25, thereby controlling the temperature of the water storage plate 21. The liquid medium then flows back into the liquid storage tank 23 through the liquid outlet pipe 26. A temperature detector 27 is fixedly mounted on the inner wall of the liquid storage tank 23 and is used to detect the temperature of the liquid medium. A heating pipe 28 is fixedly mounted on the inner wall of the liquid storage tank 23 and is used to heat the liquid medium. A mounting hole is opened on the upper surface of the liquid storage tank 23, and a fan 29 is fixedly mounted on the mounting hole. When the fan 29 is started, it is used to quickly cool the liquid medium. A control box that controls the start and stop of the heating pipe 28 and fan 29 is fixedly mounted on the liquid storage tank 23. The temperature detector 27 transmits the monitored temperature to the control box, which controls the start and stop of the heating pipe 28 and fan 29 according to the temperature, thereby controlling the temperature of the liquid medium.

[0036] The positioning mechanism 3 includes a sliding seat 31, a locking assembly 4, a sliding block 32, and a positioning assembly 5. The sliding seat 31 is a door-type structure. The two ends of the sliding seat 31 are horizontally slidably installed on the upper surface of the body 1 on both sides of the water storage plate 21. At the same time, the sliding seat 31 passes through the top of the water storage plate 21 and is provided with a sliding groove 33. The sliding groove 33 is opened along a direction perpendicular to the sliding direction of the sliding seat 31; the locking assembly 4 is used to lock the position of the sliding seat 31. The locking assembly 4 includes a locking block 41 and a locking screw 42. A moving groove 43 is opened on the lower surface of the sliding seat 31. The locking block 41 is vertically slidably installed on the sliding groove 33. The locking screw 42 is vertically threaded on the upper surface of the sliding seat 31, and the bottom end of the locking screw 42 extends into the sliding groove 33 and pushes the locking block 41 to press against the body 1 for positioning, thereby realizing the positioning of the sliding seat 31.

[0037] The sliding block 32 is slidably installed on the sliding groove 33, and the sliding direction of the sliding block 32 is perpendicular to the sliding direction of the sliding seat 31. The positioning assembly 5 is arranged on the sliding block 32 and can move vertically and press against the device 16 for positioning; there are multiple sliding blocks 32 and positioning assemblies 5 spaced apart and correspondingly arranged along the sliding direction of the sliding block 32.

[0038] The positioning assembly 5 includes a positioning screw 51 and a positioning column 52. The positioning screw 51 vertically passes through the sliding block 32 and extends to the upper and lower sides of the sliding block 32. The positioning screw 51 is threadedly connected to the sliding block 32. The positioning column 52 is rotatably installed on the bottom of the positioning screw 51. The axis of the rotation direction of the positioning column 52 coincides with the axis of the positioning screw 51; the positioning screw 51 is rotated to drive the positioning column 52 to move vertically, so that the positioning column 52 moves down and presses on the device 16 for positioning; two sliding seats 31 can also be provided, and the two positioning columns 52 located on the two sliding seats 31 press on the two ends of the device 16 for positioning.

[0039] The working principle of the embodiment of this application is as follows: After the locking screw 42 is turned away from the locking block 41, the position of the sliding seat 31 can be moved. After the movement is completed, the locking screw 42 is turned to push the locking block 41 to press against the body 1 for positioning, and then the sliding block 32 is moved to drive the positioning column 52 to move at the same time, and then the device 16 is connected to the testing machine 11 through the wire 13, and the device 16 is placed on the water storage plate 21. The positioning screw 51 is turned to drive the positioning column 52 to press against the device 16 for positioning, and the temperature detector 27 detects the temperature of the liquid medium. The temperature of the liquid medium is controlled by starting the heating tube 28 or the fan 29, and the pump body 24 is started to make the liquid medium The liquid medium enters the liquid storage chamber and controls the temperature of the water storage plate 21, and then the liquid medium flows back into the liquid storage tank 23 through the liquid outlet pipe 26, thereby controlling the device 16 to be in different external environments. At the same time, the testing machine 11 is powered on to test the device 16, thereby completing the test of the device 16. After the test is completed, the positioning screw 51 is turned to drive the positioning column 52 to disengage from the device 16, and then the wire 13 is removed from the device 16, thereby completing the test of the device 16. By placing the device 16 in different environments for testing, the test effect of the device 16 is improved, and the quality or reliability of the device 16 is confirmed.

[0040] Example 2, reference Figure 2 and Figure 3 The difference between this embodiment and embodiment 1 is that a heat-insulating assembly 6 for heat-insulating the water storage plate 21 is further provided on the heat-insulating bottom plate 12 .

[0041] The insulation assembly 6 includes an insulation box 61 and an insulation plate 62. The insulation box 61 is fixed on the upper surface of the insulation base plate 12 by screws, and the water storage plate 21 is located in the insulation box 61 for insulation. Two avoidance holes 67 for the liquid inlet pipe 25 and the liquid outlet pipe 26 to pass through are opened on the side wall of the insulation box 61, and the avoidance holes 67 are connected to the bottom of the insulation box 61.

[0042] A replacement hole 63 is provided on the upper surface of the insulation box 61, and a replacement plate 64 is snap-fitted onto the replacement hole 63. The replacement plate 64 is provided with one or more insulation holes 65, or a plurality of insulation holes 65 are provided on the replacement plate 64 along the sliding direction of the sliding block 32. The plurality of insulation holes 65 are arranged in a one-to-one correspondence with the plurality of tested devices 16. The insulation holes 65 are for the devices 16 to be placed on the water storage plate 21. A avoidance hole 66 for avoiding the placement of the power supply line 13 is also provided on the side wall of the insulation hole 65. The number and size of the insulation holes 65 on different replacement plates 64 are different. By replacing different replacement plates 64, it is possible to test devices 16 of different numbers and sizes.

[0043] The insulation plate 62 is vertically slidably installed on the sliding seat 31, and the insulation plate 62 is rotatably connected to the positioning column 52. When there are two or more positioning columns 52 to position a device 16, the insulation plate 62 is not connected to the sliding seat 31, and the insulation plate 62 is rotatably connected to the two positioning columns 52. When the positioning column 52 presses the device 16 against the water storage plate 21 for positioning, the insulation plate 62 presses on the insulation box 61 and blocks the insulation hole 65, so that the device 16 is located in the insulation box 61. At the same time, after replacing different replacement plates 64, after the size of the insulation hole 65 changes, the insulation plate 62 can continue to block the insulation hole 65 within a certain range.

[0044] When the device 16 needs to be heated, the thermal insulation box 61 allows the heat to be accumulated, reducing the risk of heat escape, prolonged heating time, and large-scale energy consumption; when the device 16 needs to be cooled, the thermal insulation box 61 can block the adverse effects of external heat on the device 16 test, and at the same time make the environment in which the device 16 is located closer to the required environmental state, thereby greatly improving the test efficiency and effect and reducing energy consumption.

[0045] The working principle of the embodiment of this application is as follows: The device 16 is connected to the wire 13, and then the device 16 is placed on the water storage plate 21 through the insulation hole 65, so that the wire 13 passes through the avoidance hole 66, and then the positioning column 52 moves downward to drive the insulation plate 62 to move downward at the same time, so that the positioning column 52 presses on the device 16 for positioning, and the insulation plate 62 presses on the insulation box 61 for sealing, and then the test is carried out, so that the device 16 is located in the insulation box 61 during the test, which reduces the risk of heat dissipation and external heat entry, improves the test efficiency and effect, and reduces energy consumption.

[0046] Example 3, reference Figure 1 、 Figure 4 and Figure 5 The difference between this embodiment and embodiment 2 is that the wire 13 on the test machine 11 is connected to the mounting base 14, and the mold base 15 is detachably mounted on the mounting base 14, thereby realizing the replacement of the mold base 15. A snap-in groove is provided on the upper surface of the mold base 15. The snap-in grooves of different mold bases 15 have different sizes. The snap-in grooves are used for snap-in installation of devices 16 of different sizes. After the device 16 is snap-in installed on the snap-in groove, the mold base 15 is used to electrically connect the device 16 to the wire 13, so that the test machine 11 can be electrically connected to the device 16, thereby realizing the test of the device 16.

[0047] The mounting seat 14 and the mold base 15 are both located below the insulation plate 62. The rotating column 72 is detachably connected to the mounting seat 14 through a rotating assembly and enables the mounting seat 14 to rotate within a certain range. When the rotating column 72 moves downward, the mounting seat 14, the mold base 15 and the device 16 pass through the insulation hole 65 and move into the insulation box 61, so that the mounting seat 14, the mold base 15 and the device 16 are turned to a horizontal state and rest against the upper surface of the water storage plate 21 for positioning. At this time, the mounting seat 14, the mold base 15 and the device 16 are all parallel to the insulation plate 62, and the insulation plate 62 rests on the insulation box 61 to block the insulation hole 65; or, when the rotating column 72 moves upward, the mounting seat 14 and the mold base 15 are moved to the outside of the insulation box 61 through the insulation hole 65, and the mounting seat 14 and the mold base 15 rotate under the action of gravity during the movement, so that the mounting seat 14, the mold base 15 and the device 16 are all turned to an inclined state and convenient for replacing the device 16.

[0048] Reference Figure 4 and Figure 5 The rotating assembly includes a rotating plate 71, a rotating column 72, a positioning block 1 73 and a positioning block 2 74. The rotating plate 71 is fixedly mounted on the bottom of the positioning column 52 by screws, and the rotating plate 71 is set vertically downward; the rotating column 72 is fixedly mounted on the mounting seat 14, and the rotating column 72 is in a horizontal state and is rotatably connected to the rotating plate 71; the positioning block 1 73 and the positioning block 2 74 are respectively fixedly mounted on the rotating plate 71 and the side wall of the mounting seat 14, and the positioning block 1 73 is located above the positioning block 2 74.

[0049] In a natural state, the mounting base 14, mold base 15, and device 16 can rotate under the action of gravity, with positioning block 2 74 approaching and resting against positioning block 1 73 for positioning. At this point, the mounting base 14, mold base 15, and device 16 are all tilted, forming an inclined replacement space between the upper surface of mold base 15 and insulation plate 62, thereby facilitating replacement of device 16. When positioning column 52 drives the mounting base 14 toward the water storage plate 21, the tilted mounting base 14 gradually approaches the water storage plate 21, which causes the mounting base 14, mold base 15, and device 16 to rotate to a horizontal state, while simultaneously moving positioning block 2 74 away from positioning block 1 73, thereby facilitating testing of device 16.

[0050] The working principle of the embodiment of this application is as follows: After the test is completed, the positioning column 52 drives the mounting seat 14, the mold base 15 and the device 16 to move upward through the insulation hole 65 to above the insulation box 61, and during the rotation, the positioning block 2 74 abuts against the positioning block 1 73 to position the mounting seat 14, the mold base 15 and the device 16, so that the mounting seat 14, the mold base 15 and the device 16 are in an inclined state, thereby facilitating the replacement of the device 16; after the replacement of the device 16 is completed, the positioning column 52 moves downward so that the mounting seat 14 abuts against the water storage plate 21 for positioning, so that the mounting seat 14, the mold base 15 and the device 16 are turned to a horizontal state for positioning, and at the same time, the insulation plate 62 is pressed against the insulation box 61 to block the insulation hole 65, thereby greatly improving the convenience of testing the device 16 and improving the test efficiency and effect.

[0051] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A semiconductor device power cycle test device, characterized in that: It comprises a machine body (1), a testing machine (11), a positioning mechanism (3) and a simulation mechanism (2), wherein the simulation mechanism (2) comprises: A water storage plate (21) is provided on the machine body (1) and has a liquid storage cavity therein for placing the device (16) for testing; The temperature control component (22) is provided on the machine body (1) and is used to introduce a liquid medium of a required temperature into the liquid storage chamber and to control the temperature of the water storage plate (21); the positioning mechanism (3) is provided on the machine body (1) and is used to position the device (16) located on the water storage plate (21); the testing machine (11) is used to conduct a test after being electrically connected to the device (16); The temperature control component (22) includes: A liquid storage tank (23) is provided on the machine body (1) and is filled with a liquid medium; A pump body (24) is provided on the liquid storage tank (23); A liquid inlet pipe (25) and a liquid outlet pipe (26) are provided on the water storage plate (21) and communicated with the liquid storage cavity. The liquid inlet pipe (25) is communicated with the pump body (24) and is used to input the liquid medium into the liquid storage cavity. The liquid outlet pipe (26) is provided on the liquid storage tank (23) and is used to return the liquid medium in the liquid storage cavity to the liquid storage tank (23). A temperature detector (27) for detecting the temperature of the liquid medium; The heating tube (28) and the fan (29) are electrically connected to the temperature detector (27) and are used to heat and cool the liquid medium respectively; The positioning mechanism (3) comprises: A sliding seat (31) is slidingly arranged on the body (1) located on both sides of the water storage plate (21) and extends above the water storage plate (21); A locking assembly (4) for locking the position of the sliding seat (31); A sliding block (32) is slidingly arranged on the sliding seat (31) and its sliding direction is perpendicular to the sliding direction of the sliding seat (31); The positioning assembly (5) is arranged on the sliding block (32) and can move vertically and press against the device (16) for positioning.

2. The semiconductor device power cycle test device according to claim 1, wherein: The positioning component (5) comprises: A positioning screw (51) is vertically threadedly connected to the sliding block (32); The positioning column (52) is rotatably mounted on the bottom of the positioning screw (51) and presses against the device (16) for positioning.

3. The semiconductor device power cycle test device according to claim 1, wherein: The locking assembly (4) comprises: The locking block (41) slides in a direction toward or away from the body (1); A locking screw (42) is threadedly connected to the machine body (1) and is used to drive the locking block (41) to move.

4. The semiconductor device power cycle test device according to claim 1, wherein: The machine body (1) is provided with a heat-insulating component (6) for heat-insulating the water storage plate (21), and the heat-insulating component (6) comprises: A heat preservation box (61) is provided on the machine body (1) so that the water storage plate (21) is located inside the heat preservation box (61), and a plurality of heat preservation holes (65) are provided on the heat preservation box (61) at intervals for allowing the device (16) to pass through and be placed on the water storage plate (21); The heat preservation plate (62) is vertically slidably arranged on the sliding seat (31) and connected to the positioning column (52); when the positioning column (52) is pressed against the device (16) for positioning, the heat preservation plate (62) is pressed against the heat preservation box (61) and is used to block the heat preservation hole (65); or, the positioning column (52) moves upward to drive the heat preservation plate (62) to move upward and open the heat preservation hole (65).

5. The semiconductor device power cycle test device according to claim 4, characterized in that: The heat preservation box (61) is provided with a replacement hole (63), a replacement plate (64) is mounted on the replacement hole (63), the heat preservation hole (65) is provided on the replacement plate (64), and the heat preservation hole (65) is provided with a avoidance hole (66) for passing the wire (13) electrically connecting the test machine (11) and the device (16).

6. The semiconductor device power cycle test device according to claim 4, characterized in that: The test machine (11) is electrically connected to a mounting base (14), and a mold base (15) for different devices (16) to be mounted and connected is detachably mounted on the mounting base (14). The mold base (15) is used to electrically connect the device (16) to the test machine (11) for testing.

7. The semiconductor device power cycle test device according to claim 6, characterized in that: The mold base (15) is located below the insulation plate (62) and has a snap-in groove on its upper surface for snapping the device (16). The positioning column (52) is rotatably connected to the mounting seat (14) through a rotating assembly and enables the mounting seat (14) to rotate within a certain range. When the positioning column (52) moves downward, the mounting seat (14) abuts against the water storage plate (21) for positioning. When the positioning column (52) moves upward, the mounting seat (14) and the mold base (15) move to the outside of the insulation box (61) through the insulation hole (65). During the movement, the mounting seat (14) and the mold base (15) rotate under the action of gravity and enable the mold base (15) to turn to an inclined state and facilitate the replacement of the device (16).

8. The semiconductor device power cycle test device according to claim 7, wherein: The rotating assembly comprises: A rotating plate (71) is detachably mounted on the bottom of the positioning column (52); A rotating column (72) is disposed on the mounting seat (14) and is rotatably mounted on the rotating plate (71); The first positioning block (73) and the second positioning block (74) are respectively arranged on the rotating plate (71) and the mounting seat (14). When the mounting seat (14) is pressed against the water storage plate (21) for positioning, the first positioning block (73) and the second positioning block (74) are in a disengaged state. When the mounting seat (14), the mold base (15) and the device (16) are rotated to an inclined state under the action of gravity, the second positioning block (74) is pressed against the first positioning block (73) for positioning.

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