Integrated detection device
Through the integrated vertical drive and cylindrical cam structure in the detection device, the synchronous or rotational movement of the radio frequency probe card and the DC probe card is achieved, solving the problems of low testing efficiency and high cost in the prior art, and meeting different testing needs.
Patent Information
- Application Number
- CN202510710508.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-29
- Publication Date
- 2025-08-19
AI Technical Summary
In the prior art, RF signal and DC signal testing require independent probe cards to be used separately, resulting in low testing efficiency and high cost, and inability to compatible with RF signals, which cannot meet the test requirements that can be carried out in turn or synchronously.
An integrated detection device is designed, using vertical driving parts, frames, drive and rotary mechanisms and cylindrical cam. Through the sliding connection of the guide grooves and guide columns, combined with the linkage mechanism and position adjustment mechanism, the synchronous or rotational movement of the radio frequency probe card and the DC probe card is achieved to meet different test needs.
The RF signal and DC signal test can be carried out simultaneously or in turn, improving testing efficiency and compatibility and reducing costs.
Smart Images
Figure CN120507638A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of semiconductor chip detection, and in particular to an integrated detection device. Background Art
[0002] With the widespread application of 5G and wireless technologies, the demand for RF signal testing of semiconductor chips has surged, and the test frequency range has expanded to 2.4G to 82G. RF signal testing needs to maintain signal integrity as much as possible and reduce loss and interference.
[0003] In this regard, in the current existing technology, independent probe cards, namely RF probe cards and DC probe cards, are required to test radio frequency signals (RF) and direct current signals (DC). The RF probe card has a complex structure, high cost and needs to be installed separately. The DC probe card is low cost but is not compatible with RF signals. During testing, the two probe cards need to be manually switched and the test machine needs to be recalibrated to complete the test of the semiconductor chip.
[0004] Of course, for the sake of test efficiency, designers have designed a device that integrates two types of probe cards into one device, that is, a single card that integrates RF and DC probes, and then directly adapts to test machines that support both RF and DC signals, so that the two types of tests can be carried out simultaneously.
[0005] However, sometimes users want to perform both tests alternately or simultaneously. Some testers only support single-channel input, meaning one probe card can be tested independently. Alternatively, separate time-sharing tests are required to calibrate the accuracy of two signal types. Of course, there are also special test scenarios with stringent requirements, such as when sensitive RF components need to be tested independently without DC interference. Summary of the Invention
[0006] In order to meet the requirement that the two tests can be performed both alternately and simultaneously, the present application provides an integrated detection device.
[0007] The integrated detection device provided in this application adopts the following technical solution: An integrated detection device includes a vertical driving member, the vertical driving member is connected to a frame, the frame is equipped with a driving mechanism, the driving mechanism is connected to a cylindrical cam, and the driving mechanism can drive the cylindrical cam to rotate; the cylindrical cam includes a guide groove on the outer wall of the cylinder, a guide post is inserted into the guide groove, and the guide post and the guide groove are slidably connected; there are at least two guide posts, wherein the two guide posts are respectively a first guide post and a second guide post, the first guide post is connected to a first linkage mechanism, the second guide post is connected to a second linkage mechanism, the first linkage mechanism is connected to a radio frequency probe card, and the second linkage mechanism is connected to a direct current probe card; In the direction of the cylindrical cam axis, the first guide post and the second guide post each have two extreme positions; when the first guide post and the second guide post are in the same extreme position in the initial state, the rotation of the cylindrical cam will drive the first guide post and the second guide post to move in the same direction, and the RF probe card and the DC probe card will move in the same direction; when the first guide post and the second guide post are in different extreme positions in the initial state, the rotation of the cylindrical cam will drive the first guide post and the second guide post to move in opposite directions, and the RF probe card and the DC probe card will also move in opposite directions; The frame is provided with a position adjustment mechanism connected to the first linkage mechanism and the second linkage mechanism. The position adjustment mechanism can adjust the positions of the first linkage mechanism and the second linkage mechanism so as to adjust the initial states of the first guide column and the second guide column.
[0008] By adopting the above technical solution, when the first and second guide pins are initially at the same extreme position, the driving mechanism drives the cylindrical cam to rotate, which in turn drives the first and second guide pins to move in the same direction along the axis of the cylindrical cam. At this time, the first linkage mechanism drives the RF probe card downward while the second linkage mechanism also drives the DC probe card downward, allowing the two tests to be performed simultaneously. When the first and second guide pins are initially at different extreme positions, the driving mechanism drives the cylindrical cam to rotate, which in turn drives the first and second guide pins to move in opposite directions along the axis of the cylindrical cam. At this time, the first linkage mechanism drives the RF probe card in one direction while the second linkage mechanism drives the DC probe card in the opposite direction, allowing the two tests to be performed alternately. The initial positions of the first and second guide pins can be adjusted by the positioning mechanism. This application can meet the requirements of performing the two tests both alternately and simultaneously.
[0009] Preferably, the guide groove includes a plurality of connected guide groove segments distributed along the circumferential direction of the cylindrical cam, the guide groove segments include a first guide groove and a second guide groove connected to each other, the cylindrical cam has a first end and a second end, the first guide groove gradually inclines from the first end toward the second end along the circumferential direction of the cylindrical cam, and the second guide groove gradually inclines from the second end toward the first end along the circumferential direction of the cylindrical cam.
[0010] Preferably, the positioning mechanism includes an annular slide rail provided on the frame, and the annular slide rail is slidably connected with a first feeding component corresponding to the first linkage mechanism and is slidably connected with a second feeding component corresponding to the second linkage mechanism. The frame is also provided with a gear ring that is transmission-connected to both the first feeding component and the second feeding component. The first feeding component is used to drive the first linkage mechanism to move along the circumferential direction of the cylindrical cam, thereby driving the first guide column to move along the circumferential direction of the cylindrical cam, and the second feeding component is used to drive the second linkage mechanism to move along the circumferential direction of the cylindrical cam, thereby driving the second guide column to move along the circumferential direction of the cylindrical cam.
[0011] By adopting the above technical solution, driving the first feeding component can make the first linkage mechanism move along the circumferential direction of the gear ring, that is, the circumferential direction of the cylindrical cam, so as to change the extreme position of the first guide column in the initial state; driving the second feeding component can make the second linkage mechanism move along the circumferential direction of the gear ring, that is, the circumferential direction of the cylindrical cam, so as to change the extreme position of the second guide column in the initial state.
[0012] Preferably, the first feeding assembly has the same structure as the second feeding assembly; the first feeding assembly includes an installation box slidably connected to the annular slide rail, the installation box is equipped with a worm gear drive and a transmission gear connected to the worm gear drive, the transmission gear is engaged with the gear ring, and the installation box is connected to the first linkage mechanism.
[0013] By adopting the above technical solution, when the cylindrical cam is stationary, the driving worm gear drive can drive the transmission gear to rotate so that the mounting box moves along the circumferential direction of the cylindrical cam, that is, the first guide column moves along the circumferential direction of the cylindrical cam, and the extreme position of the first guide column is changed.
[0014] Preferably, the first linkage mechanism has the same structure as the second linkage mechanism; the first linkage mechanism includes a mounting bar connected to the mounting box, the mounting bar has a guide groove, the guide groove is arranged along the axis direction of the cylindrical cam, the first guide column is connected to a guide fitting, the guide fitting is slidably connected to the guide groove, and the guide fitting is connected to the radio frequency probe card.
[0015] By adopting the above technical solution, when the cylindrical cam rotates, the first guide column will move back and forth along the axis direction of the cylindrical cam, and the guide matching part will move synchronously with the first guide column. At this time, the RF probe card can move back and forth to complete the extension test action and the retraction stop test action.
[0016] Preferably, the radio frequency probe card includes a rack connected to the first linkage mechanism, and the rack is connected to a plurality of vertically arranged needles.
[0017] Preferably, the DC probe card includes an arc frame connected to the second linkage mechanism, and a plurality of probe pieces are provided on the arc frame, and the plurality of probe pieces are arranged around the needle body.
[0018] Preferably, the driving mechanism includes a box body connected to the frame body, the box body is equipped with a worm gear power assembly, and the worm gear power assembly is connected to the cylindrical cam.
[0019] By adopting the above technical solution, driving the vertical driving member can drive the frame to move up and down, and driving the worm gear power assembly can drive the cylindrical cam to rotate.
[0020] In summary, the present invention includes at least one of the following beneficial technical effects: 1. When the first and second guide pins are initially at the same extreme position, the cylindrical cam driven by the driving mechanism rotates, causing the first and second guide pins to move in the same direction along the cylindrical cam axis. At this time, the first linkage mechanism drives the RF probe card downward while the second linkage mechanism also drives the DC probe card downward, allowing the two tests to be performed simultaneously. When the first and second guide pins are initially at different extreme positions, the cylindrical cam driven by the driving mechanism rotates, causing the first and second guide pins to move in opposite directions along the cylindrical cam axis. At this time, the first linkage mechanism drives the RF probe card in one direction while the second linkage mechanism drives the DC probe card in the opposite direction, allowing the two tests to be performed alternately. The initial positions of the first and second guide pins can be adjusted by the positioning mechanism. 2. When the cylindrical cam is stationary, the driving worm gear drive can drive the transmission gear to rotate so that the mounting box moves along the circumferential direction of the cylindrical cam, that is, the first guide column moves along the circumferential direction of the cylindrical cam, and the extreme position of the first guide column is changed. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 This is a schematic diagram of the overall structure of an integrated detection device in an embodiment of the present application; Figure 2 It is a cross-sectional view used to reflect the driving mechanism; Figure 3 is a schematic top view when the first guide post is in the lowest limit position and the second guide post is in the highest limit position; Figure 4 is a schematic front view of the first guide post and the second guide post when both are at the highest limit position; Figure 5 is a front view schematic diagram when the first guide post is in the lowest limit position and the second guide post is in the highest limit position; Figure 6 It is a structural diagram of a cylindrical cam; Figure 7 This is a structural diagram when the first guide post and the second guide post are both at the highest limit position; Figure 8 yes Figure 7 Schematic diagram of the structure after rotating clockwise for a certain angle; Figure 9 yes Figure 8 Enlarged view of part A.
[0022] Markings in the accompanying drawings: 1. vertical driving member; 2. frame; 3. driving mechanism; 31. box; 32. worm gear power assembly; 4. cylindrical cam; 41. guide groove; 411. guide groove section; 4111. first guide groove; 4112. second guide groove; 42. first guide column; 43. second guide column; 44. first end; 45. second end; 5. first linkage mechanism; 51. mounting bar; 52. guide groove; 53. guide fitting; 6. second linkage mechanism; 7. RF probe card; 71. frame rod; 72. needle body; 8. DC probe card; 81. arc frame; 82. probe member; 9. positioning mechanism; 91. annular slide rail; 92. first feeding assembly; 921. mounting box; 9211. linkage part; 922. worm gear driving member; 923. transmission gear; 93. second feeding assembly; 94. gear ring. DETAILED DESCRIPTION
[0023] The present invention will be further described in detail below with reference to the accompanying drawings.
[0024] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.
[0025] The embodiment of the present application discloses an integrated detection device for enabling two tests, radio frequency signals and direct current signals, to be performed alternately or simultaneously.
[0026] Reference Figure 1 An integrated detection device includes a plate body, a vertical driving member 1 is installed on the plate body, the vertical driving member 1 is a cylinder, the vertical driving member 1 is connected to a frame body 2, a driving mechanism 3 is installed on the frame body 2, the driving mechanism 3 is connected to a cylindrical cam 4, and the cylindrical cam 4 is vertically arranged; Figure 2Specifically, the driving mechanism 3 includes a box body 31 connected to the frame body 2, the box body 31 is equipped with a worm gear power assembly 32, the worm gear power assembly 32 is connected to the cylindrical cam 4, the worm gear power assembly 32 can be self-locking, and the worm gear power assembly 32 can drive the cylindrical cam 4 to rotate.
[0027] Reference Figure 2 and Figure 3 The cylindrical cam 4 includes a guide groove 41 on the outer wall of the cylinder. The guide groove 41 is wavy. A guide column is inserted into the guide groove 41 and the guide column and the guide groove 41 are slidably connected. The guide column is arranged horizontally, and there are at least two guide columns. In this embodiment, there are two guide columns, which are a first guide column 42 and a second guide column 43. The first guide column 42 is connected to a first linkage mechanism 5, and the second guide column 43 is connected to a second linkage mechanism 6. The first linkage mechanism 5 is connected to a radio frequency probe card 7, and the second linkage mechanism 6 is connected to a DC probe card 8. The up and down movement of the first guide column 42 can make the radio frequency probe card 7 move up and down synchronously through the first linkage mechanism 5, and the up and down movement of the second guide column 43 can make the DC probe card 8 move up and down synchronously through the second linkage mechanism 6.
[0028] Reference Figure 3 、 Figure 4 and Figure 5 The first guide column 42 and the second guide column 43 have two limit positions in the vertical direction, which are the highest limit position and the lowest limit position. Figure 4 In the embodiment, the first guide column 42 and the second guide column 43 are both at the highest limit position; Figure 5 In the embodiment, the first guide post 42 is at the lowest limit position, and the second guide post 43 is at the highest limit position. In order to be able to adjust the vertical position of the first guide post 42 and the second guide post 43 when the cylindrical cam 4 does not rotate, the first guide post 42 and the second guide post 43 are combined with the first guide post 42 and the second guide post 43. Figure 1 A positioning mechanism 9 connected to the first linkage mechanism 5 and the second linkage mechanism 6 is installed on the frame 2. The positioning mechanism 9 can adjust the positions of the first linkage mechanism 5 and the second linkage mechanism 6 in the circumferential direction of the cylindrical cam 4, thereby adjusting the vertical heights of the first guide column 42 and the second guide column 43.
[0029] Reference Figure 3 and Figure 4 When the first guide post 42 and the second guide post 43 are at the same limit position in the initial state, for example, at the highest limit position, the cylindrical cam 4 rotates clockwise to drive the first guide post 42 and the second guide post 43 to move downward at the same time, and the RF probe card 7 and the DC probe card 8 will also move downward synchronously. Conversely, the RF probe card 7 and the DC probe card 8 can also move upward synchronously. Reference Figure 5When the first guide post 42 and the second guide post 43 are in different extreme positions in the initial state, for example, the first guide post 42 is in the highest extreme position and the second guide post 43 is in the lowest extreme position, the cylindrical cam 4 rotates clockwise to drive the first guide post 42 and the second guide post 43 to move in opposite directions, for example, the first guide post 42 moves upward and the second guide post 43 moves downward. Driven by the first linkage mechanism 5 and the second linkage mechanism 6, the RF probe card 7 moves upward and the DC probe card 8 moves downward.
[0030] It should be noted that since the contact surface of the semiconductor chip to be tested is usually flat, when the two tests are performed simultaneously, Figure 4 When the first guide post 42 and the second guide post 43 are at the same extreme position, it is necessary to make the bottom of the RF probe card 7 and the bottom of the DC probe card 8 at the same height; and when performing the two tests in turn, refer to Figure 5 , that is, when the first guide post 42 and the second guide post 43 are at different limit positions, the bottom end of the RF probe card 7 and the bottom end of the DC probe card 8 are at different heights.
[0031] Reference Figure 6 The guide groove 41 includes a plurality of connected guide groove segments 411 distributed along the circumferential direction of the cylindrical cam 4, with a smooth transition between adjacent guide groove segments 411. The guide groove segments 411 include a first guide groove 4111 and a second guide groove 4112 connected to each other. There is a smooth transition between the first guide groove 4111 and the second guide groove 4112. The cylindrical cam 4 has a first end 44 and a second end 45. The first end 44 is higher than the second end 45. The first guide groove 4111 gradually inclines from the first end 44 toward the second end 45 along the circumferential direction of the cylindrical cam 4, and the second guide groove 4112 gradually inclines from the second end 45 toward the first end 44 along the circumferential direction of the cylindrical cam 4.
[0032] Reference Figure 7 and Figure 8 Combined with Figure 1The positioning mechanism 9 includes an annular slide rail 91 provided on the frame body 2, and a first feeding component 92 is slidably connected to the annular slide rail 91 corresponding to the first linkage mechanism 5 and a second feeding component 93 is slidably connected to the second linkage mechanism 6. The frame body 2 is also provided with a gear ring 94 that is transmission-connected to the first feeding component 92 and the second feeding component 93. The gear ring 94 is located below the annular slide rail 91, and the gear ring 94, the annular slide rail 91 and the cylindrical cam 4 are all coaxially arranged; the first feeding component 92 can drive the first linkage mechanism 5 to move along the circumferential direction of the cylindrical cam 4, thereby driving the first guide column 42 to move along the circumferential direction of the cylindrical cam 4. At this time, the first guide column 42 will move up and down, and the second feeding component 93 can also drive the second linkage mechanism 6 to move along the circumferential direction of the cylindrical cam 4, thereby driving the second guide column 43 to move along the circumferential direction of the cylindrical cam 4. At this time, the second guide column 43 can also move up and down.
[0033] Reference Figure 8 and Figure 9 Specifically, the first feeding assembly 92 and the second feeding assembly 93 have the same structure; taking the structure of the first feeding assembly 92 as an example: the first feeding assembly 92 includes a mounting box 921 slidably connected to the annular slide rail 91, specifically, the mounting box 921 includes an L-shaped linkage portion 9211, the linkage portion 9211 is slidably connected to the annular slide rail 91, the specific structure of the annular slide rail 91 is the prior art and is not described here, the cooperation of the linkage portion 9211 and the annular slide rail 91 also plays a role in supporting the mounting box 921, combined with Figure 2 The installation box 921 is installed with a worm gear drive 922 and a transmission gear 923 connected to the worm gear drive 922. The worm gear drive 922 can be self-locking. The worm gear drive 922 is a prior art and will not be described here. The transmission gear 923 is engaged with the gear ring 94. The transmission gear 923 and the gear ring 94 are internally engaged. The installation box 921 is connected to the first linkage mechanism 5.
[0034] Reference Figure 8 and Figure 9 The first linkage mechanism 5 has the same structure as the second linkage mechanism 6; taking the structure of the first linkage mechanism 5 as an example: the first linkage mechanism 5 includes a mounting bar 51 connected to the mounting box 921, the mounting bar 51 has a guide groove 52, the guide groove 52 is set along the axis direction of the cylindrical cam 4, the first guide column 42 is fixedly connected to a guide matching piece 53, the guide matching piece 53 is slidably connected to the guide groove 52, and the guide matching piece 53 can reciprocate along the setting direction of the guide groove 52, combined with Figure 5 , the guide fitting 53 is connected to the radio frequency probe card 7 .
[0035] The worm gear drive 922 drives the transmission gear 923 to rotate. Due to the sliding fit between the annular slide rail 91 and the linkage 9211, and the meshing between the transmission gear 923 and the gear ring 94, the mounting box 921 rotates along the circumference of the cylindrical cam 4. At this time, the first guide post 42 moves up and down, guided by the guide groove 41. Simultaneously, the guide fitting 53 and the RF probe card 7 also move up and down synchronously. The DC probe card 8 moves in the same manner as the RF probe card 7.
[0036] Reference Figure 5 The DC probe card 8 includes an arc frame 81 connected to the second linkage mechanism 6, and a plurality of tilted probe pieces 82 are provided on the arc frame 81. Specifically, the plurality of probe pieces 82 are distributed along the circumference of the cylindrical cam 4 and tilted toward the center of the cylindrical cam 4 when viewed from above. The RF probe card 7 includes a frame rod 71 connected to the first linkage mechanism 5, and the frame rod 71 is connected to three vertically arranged needle bodies 72. The three needle bodies 72 are vertically arranged and are located in the middle of the plurality of probe pieces 82 when viewed from above. The purpose of the above structural setting is to ensure the reliability of the movement of the RF probe card 7 and the DC probe card 8 to avoid collision. Of course, the specific orientation, length and number of the needle bodies 72 and the probe pieces 82 are determined based on actual test requirements.
[0037] The implementation principle of an integrated detection device in the embodiment of the present application is: First, the worm gear drive 922 is driven to rotate the transmission gear 923. At this time, based on the sliding cooperation between the annular slide rail 91 and the linkage part 9211 and the meshing of the transmission gear 923 and the gear ring 94, the installation box 921 rotates along the circumferential direction of the cylindrical cam 4. The first guide post 42 or the second guide post 43 will move up and down under the guidance of the guide groove 41. Under the linkage of the guide matching part 53, the RF probe card 7 or the DC probe card 8 also moves up and down, so that the initial position of the RF probe card 7 or the DC probe card 8 can be adjusted. After adjustment, the height of the first guide post 42 and the second guide post 43, that is, the height of the RF probe card 7 and the DC probe card 8, has two situations: the first situation is that the first guide post 42 and the second guide post 43 are at the same extreme position, that is, in the initial state, the bottom end of the needle body 72 and the bottom end of the RF probe card 7 are at the same height; the second situation is that the first guide post 42 and the second guide post 43 are at different extreme positions, for example, the first guide post 42 is at the highest extreme position and the second guide post 43 is at the lowest extreme position; In the first case, the driving mechanism 3 drives the cylindrical cam 4 to rotate. At this time, based on the cooperation between the first guide post 42 and the second guide post 43 and the guide groove 41, the first guide post 42 and the second guide post 43 can move downward synchronously, and the needle body 72 and the probe member 82 move up and down synchronously to complete the test; For the second case, the driving mechanism 3 drives the cylindrical cam 4 to rotate. At this time, the first guide column 42 and the second guide column 43 will move in opposite directions, that is, the needle body 72 and the probe member 82 will move in opposite directions. If the needle body 72 moves toward the semiconductor chip to be tested, the probe member 82 will move away from the semiconductor chip. When the needle body 72 contacts the semiconductor chip, the probe member 82 will not contact the semiconductor chip. Conversely, when the probe member 82 contacts the semiconductor chip, the needle body 72 will not contact the semiconductor chip.
[0038] The embodiments of this specific implementation method are all preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Therefore, any equivalent changes made based on the structure, shape, and principle of the present invention should be included in the scope of protection of the present invention.
Claims
1. An integrated detection device, characterized in that: The invention comprises a vertical driving member (1), wherein the vertical driving member (1) is connected to a frame (2), a driving mechanism (3) is installed on the frame (2), the driving mechanism (3) is connected to a cylindrical cam (4), and the driving mechanism (3) can drive the cylindrical cam (4) to rotate; the cylindrical cam (4) comprises a guide groove (41) on the outer wall of the cylinder, a guide column is inserted into the guide groove (41), and the guide column and the guide groove (41) are in sliding connection; at least two guide columns are provided, wherein the two guide columns are respectively a first guide column (42) and a second guide column (43), the first guide column (42) is connected to a first linkage mechanism (5), the second guide column (43) is connected to a second linkage mechanism (6), the first linkage mechanism (5) is connected to a radio frequency probe card (7), and the second linkage mechanism (6) is connected to a direct current probe card (8); In the axial direction of the cylindrical cam (4), the first guide column (42) and the second guide column (43) both have two extreme positions; when the first guide column (42) and the second guide column (43) are at the same extreme position in the initial state, the rotation of the cylindrical cam (4) will drive the first guide column (42) and the second guide column (43) to move in the same direction, and the radio frequency probe card (7) and the DC probe card (8) will move in the same direction; when the first guide column (42) and the second guide column (43) are at different extreme positions in the initial state, the rotation of the cylindrical cam (4) will drive the first guide column (42) and the second guide column (43) to move in opposite directions, and the radio frequency probe card (7) and the DC probe card (8) will also move in opposite directions; The frame (2) is provided with a position adjustment mechanism (9) connected to the first linkage mechanism (5) and the second linkage mechanism (6); the position adjustment mechanism (9) is capable of adjusting the positions of the first linkage mechanism (5) and the second linkage mechanism (6) so as to adjust the initial states of the first guide column (42) and the second guide column (43).
2. The integrated detection device according to claim 1, characterized in that: The guide groove (41) includes a plurality of connected guide groove segments (411) distributed along the circumferential direction of the cylindrical cam (4), the guide groove segments (411) including a first guide groove (4111) and a second guide groove (4112) connected to each other, the cylindrical cam (4) having a first end (44) and a second end (45), the first guide groove (4111) gradually tilting from the first end (44) toward the second end (45) along the circumferential direction of the cylindrical cam (4), and the second guide groove (4112) gradually tilting from the second end (45) toward the first end (44) along the circumferential direction of the cylindrical cam (4).
3. The integrated detection device according to claim 2, characterized in that: The positioning mechanism (9) includes an annular slide rail (91) provided on the frame (2), a first feeding assembly (92) being slidably connected to the annular slide rail (91) corresponding to the first linkage mechanism (5) and a second feeding assembly (93) being slidably connected to the annular slide rail (91) corresponding to the second linkage mechanism (6), and a gear ring (94) being transmission-connected to both the first feeding assembly (92) and the second feeding assembly (93) is also provided on the frame (2), the first feeding assembly (92) being used to drive the first linkage mechanism (5) to move along the circumferential direction of the cylindrical cam (4) and thereby drive the first guide column (42) to move along the circumferential direction of the cylindrical cam (4), and the second feeding assembly (93) being used to drive the second linkage mechanism (6) to move along the circumferential direction of the cylindrical cam (4) and thereby drive the second guide column (43) to move along the circumferential direction of the cylindrical cam (4).
4. The integrated detection device according to claim 3, characterized in that: The first feeding assembly (92) and the second feeding assembly (93) have the same structure; the first feeding assembly (92) includes a mounting box (921) slidably connected to the annular slide rail (91), the mounting box (921) is equipped with a worm gear drive (922) and a transmission gear (923) connected to the worm gear drive (922), the transmission gear (923) is engaged with the gear ring (94), and the mounting box (921) is connected to the first linkage mechanism (5).
5. The integrated detection device according to claim 4, characterized in that: The first linkage mechanism (5) and the second linkage mechanism (6) have the same structure; the first linkage mechanism (5) includes a mounting bar (51) connected to the mounting box (921), the mounting bar (51) is provided with a guide groove (52), the guide groove (52) is arranged along the axis direction of the cylindrical cam (4), the first guide column (42) is connected to a guide fitting (53), the guide fitting (53) is slidably connected to the guide groove (52), and the guide fitting (53) is connected to the radio frequency probe card (7).
6. The integrated detection device according to claim 1, characterized in that: The radio frequency probe card (7) comprises a frame rod (71) connected to the first linkage mechanism (5), and the frame rod (71) is connected to a plurality of vertically arranged needle bodies (72).
7. The integrated detection device according to claim 6, characterized in that: The DC probe card (8) comprises an arc frame (81) connected to the second linkage mechanism (6), and a plurality of probe pieces (82) are provided on the arc frame (81), and the plurality of probe pieces (82) are arranged around the needle body (72).
8. The integrated detection device according to claim 1, characterized in that: The driving mechanism (3) comprises a box body (31) connected to the frame body (2), the box body (31) is equipped with a worm gear power assembly (32), and the worm gear power assembly (32) is connected to the cylindrical cam (4).