A split connection device for ultra-high vacuum gate valve

Abstract

The present invention relates to the technical field of vacuum gate valves, and in particular to a split connection device for an ultra-high vacuum gate valve, comprising a valve body, wherein the valve body is rotatably connected to a valve plate, and a connecting plate is fixed to the bottom of the outer wall of the valve body, and a driver for controlling the valve plate to open and close is fixed to the bottom of the connecting plate, and fastening mechanisms for driving the pipeline to move are provided on both sides of the connecting plate, and a supporting mechanism for supporting the pipeline is also provided on the outside of the fastening mechanism; the present invention realizes synchronous and precise positioning of the centering and coaxiality between two pipelines to be connected and the valve body through the cooperation of structures such as the fastening mechanism, the power plate, the transmission rod and the fixed block, and can gradually reduce the distance between the two pipelines and the valve body in an orderly and synchronous manner, and uses the fixed block to accurately control the neutrality and coaxiality of the pipeline and the valve body, thereby improving the sealing and structural strength of the welding joint, extending the service life of the equipment, improving the installation efficiency and increasing the equipment installation cost.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum gate valves, and in particular to a split connection device for ultra-high vacuum gate valves. Background Art

[0002] In the field of semiconductor manufacturing, ultra-high vacuum environment is crucial for key processes such as ion implantation, physical vapor deposition, and chemical vapor deposition. These processes have extremely high requirements for environmental cleanliness, vacuum level, and equipment reliability. Ultra-high vacuum gate valves are indispensable components in the vacuum system, and their performance directly affects the stability of the entire process and product quality.

[0003] Although the existing split connection device for vacuum gate valves can achieve rapid positioning of the centering and coaxiality of the pipeline and vacuum gate valve to a certain extent, when the vacuum gate valve is welded to the first pipeline, the volume and weight of the entire device increase significantly, which not only greatly increases the risk of collision during installation, which can easily cause damage to the pipeline and valve surface, but also makes it extremely difficult to fine-tune the centering and coaxiality of the vacuum gate valve after installation with the pipeline. Installers often need to spend a lot of time and manpower to make repeated adjustments, which seriously reduces installation efficiency and increases equipment installation costs. Therefore, we propose a split connection device for ultra-high vacuum gate valves. Summary of the Invention

[0004] In order to overcome the deficiencies of the prior art, the present invention provides a split connection device for an ultra-high vacuum gate valve.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0006] A split connection device for an ultra-high vacuum gate valve comprises a valve body, wherein the valve plate is rotatably connected to the inside of the valve body, and a connecting plate is fixed to the bottom of the outer wall of the valve body, and a driver for controlling the opening and closing of the valve plate is fixed to the bottom of the connecting plate. Fastening mechanisms for driving the pipeline to move are provided on both sides of the connecting plate. The fastening mechanisms can not only drive the pipeline to move and shorten the distance between the pipeline and the valve plate, but also clamp the pipeline so that the center of the pipeline and the center of the valve plate remain on the same horizontal line. A supporting mechanism for supporting the pipeline is also provided on the outside of the fastening mechanism. The supporting mechanism can not only support the end of the pipeline, but also limit the pipeline to prevent the pipeline from deviating when the fastening mechanism clamps the pipeline.

[0007] As an optimal technical solution of the present invention, the fastening mechanism includes a power plate inserted in the middle of the connecting plate, and a transmission rod is rotatably installed at one end of the power plate away from the valve body, and a rotating rod is fixed to the upper half of the transmission rod, and two fixed blocks are rotatably installed at both ends of the rotating rod, and the sides of the two fixed blocks facing each other are recessed inward to form a slot, the center line of the slot and the central axis of the valve body are on the same horizontal plane, and the edge of the slot is provided with an arc-shaped first chamfer. The chamfer of the slot contacts the pipe, thereby increasing the contact area between the pipe and the fixed block, so that the fixed block can clamp the pipe more stably, and the transmission rod is rotated, the transmission rod drives the rotating rod to rotate, and the rotating rod drives the fixed block to rotate, and the end of the fixed block with the slot contacts the outer wall of the pipe, and the pipe and the fixed block cooperate to make the two fixed blocks move in an interlaced manner, shortening the distance between the two fixed blocks and clamping the pipe between the two fixed blocks.

[0008] As an optimal technical solution of the present invention, a worm gear is fixed at the bottom of the transmission rod, and a handle is rotatably connected to the end of the power plate away from the connecting plate. A worm engaged with the worm gear is fixed to the middle of the handle, and a mounting groove is also provided at the end of the power plate away from the connecting plate. The worm and worm gear are rotatably installed inside the mounting groove. A snap ring is also rotatably installed on the outer wall of the transmission rod. Two support rods are fixed between the snap ring and the power plate. An annular groove adapted to the snap ring is provided on the outer wall of the transmission rod. The top of the support rod is fixed to the snap ring, and the bottom of the support rod is fixed to the power plate. The support rod cooperates with the power plate to limit the transmission rod, and the transmission rod cooperates with the annular groove to limit the transmission rod to prevent the transmission rod from swinging during rotation. By rotating the handle, the handle drives the worm gear to rotate, the worm gear drives the worm gear engaged with it to rotate, and the worm gear drives the transmission rod to rotate.

[0009] The cam is secured to the rear of the lock member and is adapted to engage the locking plate, the locking plate being secured to the locking plate when the lock member is engaged. The locking plate is driven by the locking rod to rotate counterclockwise so that the locking rod moves to the inside of the rectangular groove, and the rectangular groove cooperates with the locking rod to limit the pushing plate to prevent the pushing plate from rotating after the pipeline is fixed.

[0010] As a preferred technical solution of the present invention, a main plug-in rod and a sub-plug-in rod are respectively provided on both sides of the power plate away from one end of the transmission rod. The main plug-in rod is arranged in the lower half of one side of the power plate, and the sub-plug-in rod is arranged in the upper half of the other side of the power plate. The main plug-in rod and the sub-plug-in rod are diagonally symmetrically arranged on both sides of the power plate. A socket adapted for the main plug-in rod and the sub-plug-in rod is opened in the middle of the rotating rod, and the main plug-in rod and the sub-plug-in rod arranged on the outside of the power plate are staggered and stacked with each other and inserted into the socket.

[0011] As a preferred technical solution of the present invention, the end of the power plate away from the transmission rod is further provided with a push rod, the outer wall of the push rod is fixed with a shift block, the top of the shift block is hinged with a T-shaped block, the end of the power plate away from the transmission rod is fixed with a card column, the top of the card column is provided with a lock groove adapted to the T-shaped block, the end of the power plate away from the transmission rod is provided with a positioning groove for facilitating the sliding of the T-shaped block, the end of the push rod away from the shift block extends outward after passing through the power plate, the end of the push rod away from the shift block extends to the top of the main plug rod, and the auxiliary plug rod is close to the main plug rod. A deep hole that matches the push rod is provided on one side near the main plug rod. When the main plug rod and the auxiliary plug rod arranged on the outside of the two power plates contact each other and are inserted into the inside of the socket, the shift block is pushed, and the shift block drives the push rod to move, so that the push rod is inserted into the inside of the deep hole, and the T-block is pushed to rotate downward around the top of the shift block, so that the T-block rotates to the inside of the locking groove, and the T-block is limited by the locking groove. The T-block limits the push rod through the shift block, and the push rod cooperates with the deep hole to lock the two power plates.

[0012] As a preferred technical solution of the present invention, the supporting mechanism includes a slide plate slidably mounted on the top of the power plate, a force frame is fixed on the top of the slide plate, a lifting frame is provided on the upper half of the force frame, a support plate is fixed on the middle part of the lifting frame, a groove is provided on the outer wall of the power plate for facilitating the sliding of the slide plate, the force frame is arranged in a Y shape, and the support plate is arranged in a quarter-circular ring shape, the slide plate is pushed to move, the slide plate drives the force frame to move, the force frame drives the lifting frame to move, the lifting frame drives the support plate to move, the relative position of the support plate and the pipeline is adjusted, the support point of the pipeline is changed, the stability of the pipeline during movement is increased, the pipeline is placed in the depression of the support plate, the pipeline is limited by the support plate, so that the pipeline remains in a horizontal state, and the placement groove is prevented from clamping the pipeline and causing the pipeline to rotate.

[0013] As a preferred technical solution of the present invention, a threaded rod is provided between the support plate and the force frame, a threaded hole compatible with the threaded rod is provided in the middle of the force frame, and a lifting groove is provided in the upper half of the force frame to facilitate the movement of the lifting frame. A placement groove is provided on the top of the support plate, and the threaded rod is rotated, and the threaded rod cooperates with the threaded hole. The threaded rod drives the support plate to rise and fall, and the distance between the support plate and the pipeline is adjusted so that the top of the support plate fits the pipeline. The flange can also be stored through the placement groove, and the flange is aligned with the valve body by lifting and lowering the support plate, which facilitates people to install the flange and the valve body.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] The present invention realizes the synchronous and precise positioning of the centering and coaxiality between the two pipes to be connected and the valve body through the cooperation of the fastening mechanism, the power plate, the transmission rod and the fixing block. At the same time, the spacing between the two pipes and the valve body can be gradually reduced in an orderly and synchronous manner. The fixing block is used to accurately control the centering and coaxiality of the pipes and the valve body, thereby improving the sealing and structural strength of the welded joint, extending the service life of the equipment, improving the installation efficiency and reducing the equipment installation cost.

[0016] The present invention utilizes the self-locking property of the worm and worm wheel by cooperating with the handle, worm, worm wheel and transmission rod to effectively prevent the pipeline from being affected by external forces during movement, which may cause sudden changes in the position of the pipeline or valve body, thereby changing the neutrality and coaxiality of the pipeline and valve body.

[0017] The present invention utilizes the coordination of the adjusting rod, the propulsion plate, the shifting rod, the blocking plate, the connecting rod, and the extension block to move the extension block away from the fixed block, thereby significantly increasing the contact area with the pipe. The enlarged contact surface can evenly disperse the clamping force, effectively reducing wear or deformation caused by excessive force on the local surface of the pipe, and significantly improving the stability of the clamping.

[0018] The present invention cooperates with the power plate, main plug rod, auxiliary plug rod and push rod to insert the push rod into the deep hole, so that the two power plates are self-locking, and the two pipes can be firmly locked on both sides of the valve body. After the installation is completed, the fastening mechanism can be removed as a whole, which not only significantly reduces the weight of the connecting block, making it more lightweight, but also facilitates subsequent transportation, maintenance and use with other equipment;

[0019] The present invention uses the cooperation of the T-block, the shift block and the clamping column to enable the locking groove to limit the T-block. The T-block is used to limit the shift block, thereby preventing the shift block from driving the push rod to move outside the deep hole, ensuring that the push rod always remains in the deep hole, thereby maintaining the self-locking state of the two power plates.

[0020] The present invention cooperates with structures such as a force-bearing frame, a threaded rod, a support plate and a lifting frame, so that the rotation of the threaded rod drives the support plate to perform stable lifting and lowering movements, thereby flexibly adjusting the distance between the support plate and the pipeline until the top of the support plate is tightly fitted with the pipeline. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic structural diagram of the present invention as a whole;

[0022] Figure 2 Schematic diagram of the motion structure of the fastening mechanism of the present invention;

[0023] Figure 3 It is a structural schematic diagram of the power plate of the present invention;

[0024] Figure 4 It is a structural schematic diagram of the transmission rod of the present invention;

[0025] Figure 5 It is a structural schematic diagram of the adjusting rod of the present invention;

[0026] Figure 6 This is a schematic diagram of the structure of the handle of the present invention;

[0027] Figure 7 This is a schematic structural diagram of the propulsion plate of the present invention;

[0028] Figure 8 Schematic diagram of the cross-sectional structure of the fixing block of the present invention;

[0029] Figure 9 Schematic diagram of the structure of the barrier plate of the present invention;

[0030] Figure 10 This is a structural diagram of the main plug rod of the present invention;

[0031] Figure 11 Schematic diagram of the structure of the auxiliary rod of the present invention;

[0032] Figure 12 Schematic diagram of the structure of the push rod of the present invention;

[0033] Figure 13 For the present invention Figure 12 Schematic diagram of the local enlarged structure at A in the middle;

[0034] Figure 14 It is a structural schematic diagram of the skateboard of the present invention;

[0035] Figure 15 It is a structural schematic diagram of the force-bearing frame of the present invention.

[0036] 1. Valve body; 2. Valve plate; 3. Connecting plate; 4. Driver; 5. Fastening mechanism; 6. Support mechanism; 501. Power plate; 502. Transmission rod; 503. Rotating rod; 504. Fixed block; 505. Extension block; 506. Adjusting rod; 507. Handle; 508. Worm; 509. Worm gear; 510. Push plate; 511. Locking rod; 512. Push rod; 513. Blocking plate; 514. Connecting rod; 515. Spring; 516. Snap ring; 517. Support rod; 518. Main plug rod; 519. Secondary plug rod; 520. Push rod; 521. Push block; 522. T-block; 523. Column; 601. Slide plate; 602. Force frame; 603. Lifting frame; 604. Support plate; 605. Placement slot; 606. Threaded rod. DETAILED DESCRIPTION

[0037] In order to make the technical means, creative features, purpose and efficacy of the present invention easy to understand, the present invention is further described below in conjunction with specific examples, but the following examples are only preferred embodiments of the present invention, not all. Based on the examples in the embodiments, other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the present invention. The experimental methods in the following examples, unless otherwise specified, are conventional methods, and the materials, reagents, etc. used in the following examples, unless otherwise specified, can be obtained from commercial channels.

[0038] Embodiment: The present invention provides Figure 1 The split connection device for an ultra-high vacuum gate valve shown includes a valve body 1, a valve plate 2 is rotatably connected to the inside of the valve body 1, a connecting plate 3 is fixed to the bottom of the outer wall of the valve body 1, and a driver 4 for controlling the opening and closing of the valve plate 2 is fixed to the bottom of the connecting plate 3.

[0039] As can be seen from the above, when in use, the valve body 1 is placed between the two pipes to be connected, and after the central axis of the valve body 1 is aligned with the central axis of the pipe, the valve body 1 is installed on the two pipes, and the valve plate 2 is driven by the driver 4 to control the opening and closing of the vacuum gate valve.

[0040] refer to Figure 1 、 Figure 2 and Figure 3 As shown, both sides of the connecting plate 3 are provided with a fastening mechanism 5 for driving the pipeline to move. The fastening mechanism 5 includes a power plate 501 inserted in the middle of the connecting plate 3. A transmission rod 502 is rotatably installed at one end of the power plate 501 away from the valve body 1. A rotating rod 503 is fixed to the upper half of the transmission rod 502. Two fixing blocks 504 are rotatably installed at both ends of the rotating rod 503. The two sides of the two fixing blocks 504 facing each other are concave inward to form a slot. The fastening mechanism 5 can not only drive the pipeline to move and shorten the distance between the pipeline and the valve plate 2, but also the fastening mechanism 5 can clamp the pipeline so that the center of the pipeline and the center of the valve plate 2 are kept on the same horizontal line, and the center of the slot is The line is on the same horizontal plane as the central axis of the valve body 1, and the edge of the slot is provided with an arc-shaped first chamfer, which contacts the pipeline through the chamfer of the slot, thereby increasing the contact area between the pipeline and the fixed block 504, so that the fixed block 504 can clamp the pipeline more stably, and the transmission rod 502 is rotated, and the transmission rod 502 drives the rotating rod 503 to rotate, and the rotating rod 503 drives the fixed block 504 to rotate, and the end of the fixed block 504 with the slot contacts the outer wall of the pipeline, and the pipeline and the fixed block 504 cooperate to make the two fixed blocks 504 move laterally in an interlaced manner, shortening the distance between the two fixed blocks 504, and clamping the pipeline between the two fixed blocks 504.

[0041] refer to Figure 4 、 Figure 5 and Figure 6 As shown, a worm gear 509 is fixed to the bottom of the transmission rod 502, and a handle 507 is rotatably connected to the end of the power plate 501 away from the connecting plate 3. A worm 508 meshing with the worm gear 509 is fixed to the middle of the handle 507, and a mounting groove is also provided at the end of the power plate 501 away from the connecting plate 3. The worm 508 and the worm gear 509 are rotatably installed inside the mounting groove. A snap ring 516 is also rotatably installed on the outer wall of the transmission rod 502. Two support rods 517 are fixed between the snap ring 516 and the power plate 501. The outer wall of the transmission rod 502 is provided with a The annular groove matches the snap ring 516, the top of the support rod 517 is fixed to the snap ring 516, the bottom of the support rod 517 is fixed to the power plate 501, the support rod 517 cooperates with the power plate 501 to limit the transmission rod 502, and the transmission rod 502 cooperates with the annular groove to limit the transmission rod 502 to prevent the transmission rod 502 from swinging during rotation. Rotate the handle 507, the handle 507 drives the worm 508 to rotate, the worm 508 drives the worm wheel 509 engaged with it to rotate, and the worm wheel 509 drives the transmission rod 502 to rotate.

[0042] refer to Figure 7 、 Figure 8 and Figure 9 As shown, extension blocks 505 are provided on both sides of the fixed block 504, and a connecting rod 514 is provided between the extension block 505 and the fixed block 504. A blocking plate 513 is fixed to the end of the connecting rod 514 away from the extension block 505, and a lever 512 is fixed to the side of the blocking plate 513 away from the slot of the fixed block 504. A sliding groove is further provided inside the fixed block 504 to facilitate the movement of the blocking plate 513. A spring 515 is also provided inside the sliding groove, and an adjusting rod 506 is rotatably installed on the side of the fixed block 504 away from the slot. A pushing plate 510 is fixed to the middle of the adjusting rod 506, and two locking rods 511 are fixed to both ends of the pushing plate 510.

[0043] The fixing block 504 is provided with a rectangular groove on the side away from the card slot, and the rectangular groove is connected to the slide slot. The end of the lever 512 away from the blocking plate 513 passes through the slide slot and the rectangular groove and extends to the outside of the fixing block 504. The end of the connecting rod 514 away from the blocking plate 513 passes through the fixing block 504 and is fixed to the extension block 505. The free end of the spring 515 is fixed to the blocking plate 513. The end of the spring 515 away from the blocking plate 513 is fixed to the inner wall of the slide slot, and the spring 515 is sleeved on the outside of the connecting rod 514. The fixing block 504 is provided with a lock hole adapted for the locking rod 511 on the side away from the card slot. The pushing plate 510 is arranged between the two pushing rods 512. The pushing plate 510 is arranged in an S shape. Pulling the adjusting rod 506 to move to the side away from the fixing block 504, the adjusting rod 506 drives the pushing plate 510 to move, and the pushing plate 510 drives the locking rod 511 to move, so that the locking rod 511 moves to the outside of the lock hole. The push plate 510 is limited by the cooperation of the rectangular groove and the locking rod 511 to prevent the push plate 510 from rotating after the pipeline is fixed.

[0044] refer to Figure 10 、 Figure 11 and Figure 12 As shown, a main plug rod 518 and a sub-plug rod 519 are respectively provided on both sides of the power plate 501 away from one end of the transmission rod 502. The main plug rod 518 is arranged in the lower half of one side of the power plate 501, and the sub-plug rod 519 is arranged in the upper half of the other side of the power plate 501. The main plug rod 518 and the sub-plug rod 519 are diagonally symmetrically arranged on both sides of the power plate 501. A socket adapted for the main plug rod 518 and the sub-plug rod 519 is opened in the middle of the rotating rod 503. The main plug rod 518 and the sub-plug rod 519 arranged on the outside of the power plate 501 are staggered and stacked with each other and inserted into the socket.

[0045] refer to Figure 12 and Figure 13As shown, the end of the power plate 501 away from the transmission rod 502 is further provided with a push rod 520, the outer wall of the push rod 520 is fixed with a dial block 521, the top of the dial block 521 is hinged with a T-shaped block 522, the end of the power plate 501 away from the transmission rod 502 is fixed with a clamping column 523, the top of the clamping column 523 is provided with a locking groove adapted to the T-shaped block 522, the end of the power plate 501 away from the transmission rod 502 is provided with a positioning groove for facilitating the sliding of the T-shaped block 522, the end of the push rod 520 away from the dial block 521 passes through the power plate 501 and extends outward, the end of the push rod 520 away from the dial block 521 extends to the top of the main plug rod 518, and the auxiliary plug rod A deep hole is provided on one side of 519 close to the main plug rod 518, which is compatible with the push rod 520. When the main plug rod 518 and the auxiliary plug rod 519 set on the outside of the two power plates 501 contact each other and are inserted into the inside of the socket, the shift block 521 is pushed, and the shift block 521 drives the push rod 520 to move, so that the push rod 520 is inserted into the inside of the deep hole, pushing the T-block 522 to rotate downward around the top of the shift block 521, so that the T-block 522 rotates to the inside of the lock groove, and the T-block 522 is limited by the lock groove. The T-block 522 limits the push rod 520 through the shift block 521, and the push rod 520 cooperates with the deep hole to lock the two power plates 501.

[0046] After the valve body 1 is placed between the two pipes so that the pipes are between the two extension blocks 505, the handle 507 is rotated, and the handle 507 drives the worm 508 to rotate, and the worm 508 drives the worm gear 509 engaged with it to rotate, and the worm gear 509 drives the transmission rod 502 to rotate, and the transmission rod 502 drives the rotating rod 503 to rotate, and the rotating rod 503 drives the fixed block 504 to rotate, and the end of the fixed block 504 with the slot contacts the outer wall of the pipe. The pipe and the fixed block 504 cooperate to make the two fixed blocks 504 staggered horizontal movement, shorten the distance between the two fixed blocks 504, clamp the pipe between the two fixed blocks 504, push the power plate 501 to move toward the side close to the valve body 1, and the power plate 501 drives the transmission rod 502 to move, The transmission rod 502 drives the fixed block 504 to move through the rotating rod 503, and the fixed block 504 drives the pipeline to move to the side close to the valve body 1, so that the two pipelines and the valve body 1 are synchronized in centering and coaxiality. When the main plug rod 518 and the auxiliary plug rod 519 provided on the outside of the two power plates 501 contact each other and are inserted into the inside of the socket, the dial block 521 is pushed, and the dial block 521 drives the push rod 520 to move, so that the push rod 520 is inserted into the inside of the deep hole, pushing the T-block 522 to rotate downward around the top of the dial block 521, so that the T-block 522 rotates to the inside of the lock groove, and the T-block 522 is limited by the lock groove. The T-block 522 limits the push rod 520 through the dial block 521, and the push rod 520 cooperates with the deep hole to lock the two power plates 501.

[0047] refer to Figure 14 and Figure 15 As shown, the outside of the fastening mechanism 5 is also provided with a supporting mechanism 6 for supporting the pipeline. The supporting mechanism 6 includes a slide plate 601 slidably mounted on the top of the power plate 501. A force frame 602 is fixed to the top of the slide plate 601. A lifting frame 603 is provided on the upper half of the force frame 602. A support plate 604 is fixed to the middle of the lifting frame 603. The outer wall of the power plate 501 is provided with a groove for facilitating the sliding of the slide plate 601. The supporting mechanism 6 can not only support the end of the pipeline, but also limit the pipeline to prevent the pipeline from deflecting when the fastening mechanism 5 clamps the pipeline. The force frame 602 is set to be Y-shaped, and the support plate 604 is set to be a quarter-circular ring. The slide plate 601 is pushed to move, and the slide plate 601 drives the force frame 602 to move. The force frame 602 drives the lifting frame 603 to move, and the lifting frame 603 drives the support plate 604 to move. The relative position of the support plate 604 and the pipeline is adjusted to change the support point of the pipeline and increase the stability of the pipeline during movement. The pipeline is placed in the depression of the support plate 604, and the pipeline is limited by the support plate 604 to keep the pipeline in a horizontal state to prevent the placement groove 605 from rotating when clamping the pipeline.

[0048] refer to Figure 14 and Figure 15 As shown, a threaded rod 606 is provided between the support plate 604 and the force frame 602, and a threaded hole compatible with the threaded rod 606 is provided in the middle of the force frame 602, and a lifting groove is provided in the upper half of the force frame 602 to facilitate the movement of the lifting frame 603. A placement groove 605 is provided on the top of the support plate 604, and the threaded rod 606 is rotated, and the threaded rod 606 cooperates with the threaded hole, and the threaded rod 606 drives the support plate 604 to rise and fall, and adjusts the distance between the support plate 604 and the pipeline so that the top of the support plate 604 fits the pipeline. The flange can also be stored through the placement groove 605, and the flange is aligned with the valve body 1 by the lifting and lowering of the support plate 604, so that people can facilitate the installation of the flange and the valve body 1.

[0049] Push the slide 601 to move, the slide 601 drives the force frame 602 to move, the force frame 602 drives the lifting frame 603 to move, the lifting frame 603 drives the support plate 604 to move, adjust the relative position of the support plate 604 and the pipeline, change the support point of the pipeline, rotate the threaded rod 606, the threaded rod 606 cooperates with the threaded hole, the threaded rod 606 drives the support plate 604 to move up and down, adjust the distance between the support plate 604 and the pipeline, and make the top of the support plate 604 fit the pipeline.

[0050] Working principle:

[0051] When the valve body 1 needs to be installed with two pipes at the same time, after placing the valve body 1 between the two pipes so that the pipes are between the two extension blocks 505, the handle 507 is rotated, and the handle 507 drives the worm 508 to rotate, and the worm 508 drives the worm gear 509 engaged therewith to rotate, and the worm gear 509 drives the transmission rod 502 to rotate, and the transmission rod 502 drives the rotating rod 503 to rotate, and the rotating rod 503 drives the fixing block 504 to rotate, and the end of the fixing block 504 with the slot contacts the outer wall of the pipe, which is convenient for The pipes are matched with the fixed blocks 504 to make the two fixed blocks 504 move in an alternating lateral direction, shortening the distance between the two fixed blocks 504 and clamping the pipe between the two fixed blocks 504. The power plate 501 is pushed to move toward the side close to the valve body 1. The power plate 501 drives the transmission rod 502 to move. The transmission rod 502 drives the fixed blocks 504 to move through the rotating rod 503. The fixed blocks 504 drive the pipes to move toward the side close to the valve body 1, so that the two pipes and the valve body 1 are aligned and coaxial synchronously.

[0052] When the main insertion rod 518 and the auxiliary insertion rod 519 provided on the outside of the two power plates 501 contact each other and are inserted into the inside of the socket, the shift block 521 is pushed, and the shift block 521 drives the push rod 520 to move, so that the push rod 520 is inserted into the inside of the deep hole, and the T-shaped block 522 is pushed to rotate downward around the top of the shift block 521, so that the T-shaped block 522 rotates to the inside of the locking groove, and the T-shaped block 522 is limited by the locking groove. The T-shaped block 522 limits the push rod 520 through the shift block 521, and the push rod 520 cooperates with the deep hole to lock the two power plates 501;

[0053] Push the slide 601 to move, the slide 601 drives the force frame 602 to move, the force frame 602 drives the lifting frame 603 to move, the lifting frame 603 drives the support plate 604 to move, adjust the relative position of the support plate 604 and the pipeline, change the support point of the pipeline, rotate the threaded rod 606, the threaded rod 606 cooperates with the threaded hole, the threaded rod 606 drives the support plate 604 to move up and down, adjust the distance between the support plate 604 and the pipeline, and make the top of the support plate 604 fit the pipeline.

[0054] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited thereto. Various changes can be made within the scope of knowledge possessed by those skilled in the art without departing from the spirit of the present invention.

Claims

1. A split-type connection device for an ultra-high vacuum gate valve, comprising a valve body, a valve plate rotatably connected to the interior of the valve body, a connecting plate fixed to the bottom of the outer wall of the valve body, and a driver for controlling the opening and closing of the valve plate fixed to the bottom of the connecting plate, characterized in that: Both sides of the connecting plate are provided with a fastening mechanism for driving the pipeline to move. The fastening mechanism can not only drive the pipeline to move and shorten the distance between the pipeline and the valve plate, but also clamp the pipeline so that the center of the pipeline and the center of the valve plate are kept on the same horizontal line. A supporting mechanism for supporting the pipeline is also provided on the outside of the fastening mechanism. The supporting mechanism can not only support the end of the pipeline, but also limit the pipeline to prevent the pipeline from deflecting when the fastening mechanism clamps the pipeline. The fastening mechanism includes a power plate inserted in the middle of the connecting plate, a transmission rod is rotatably mounted on one end of the power plate away from the valve body, a rotating rod is fixed to the upper half of the transmission rod, and two fixed blocks are rotatably mounted on both ends of the rotating rod, and the sides of the two fixed blocks facing each other are both concave inward to form a slot; A worm gear is fixed to the bottom of the transmission rod, and a handle is rotatably connected to the end of the power plate away from the connecting plate. A worm that meshes with the worm gear is fixed to the middle of the handle. A mounting groove is also provided at the end of the power plate away from the connecting plate. The worm and the worm gear are rotatably mounted inside the mounting groove. A snap ring is also rotatably mounted on the outer wall of the transmission rod, and two support rods are fixed between the snap ring and the power plate. Extension blocks are provided on both sides of the fixed block, and a connecting rod is provided between the extension block and the fixed block. A blocking plate is fixed to the end of the connecting rod away from the extension block, and a lever is fixed to the side of the blocking plate away from the fixed block slot. A sliding groove is also provided inside the fixed block to facilitate the movement of the blocking plate. A spring is also provided inside the sliding groove, and an adjusting rod is rotatably installed on the side of the fixed block away from the slot. A pushing plate is fixed in the middle of the adjusting rod, and two locking rods are fixed to both ends of the pushing plate. The power plate is provided with a main plug rod and a secondary plug rod on both sides away from one end of the transmission rod, the main plug rod is provided at the lower half of one side of the power plate, and the secondary plug rod is provided at the upper half of the other side of the power plate; The end of the power plate away from the transmission rod is also provided with a push rod, the outer wall of the push rod is fixed with a shift block, the top of the shift block is hinged with a T-shaped block, the end of the power plate away from the transmission rod is fixed with a clamping column, the top of the clamping column is provided with a locking groove adapted to the T-shaped block, the end of the power plate away from the transmission rod is provided with a positioning groove for facilitating the sliding of the T-shaped block, and the end of the push rod away from the shift block passes through the power plate and extends outward.

2. A split-type connection device for an ultra-high vacuum gate valve according to claim 1, characterized in that: The support mechanism includes a slide plate slidably mounted on the top of the power plate, a force frame is fixed on the top of the slide plate, a lifting frame is provided on the upper half of the force frame, a support plate is fixed in the middle of the lifting frame, and a groove is opened on the outer wall of the power plate to facilitate the sliding of the slide plate.

3. A split connection device for an ultra-high vacuum gate valve according to claim 2, characterized in that: A threaded rod is provided between the support plate and the force frame, a threaded hole adapted to the threaded rod is provided in the middle of the force frame, and a lifting slot is provided in the upper half of the force frame to facilitate the movement of the lifting frame, and a placement slot is provided on the top of the support plate.

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