Visual inspection device, cutting-up equipment and pivoted window assembly

Abstract

The invention discloses a visual inspection device, cutting-up equipment and a rotating window assembly.The visual inspection device comprises an outer cover and an image acquisition assembly arranged in the outer cover, an acquisition hole corresponding to a lens of the image acquisition assembly is formed in a bottom plate of the outer cover, and the rotating window assembly for shielding the acquisition hole is arranged on the bottom plate; the rotating window assembly comprises a turbine rotating fan which is blown by airflow generated by the blowing component to rotate, and a light-transmitting plate corresponding to the collecting hole in position is coaxially arranged at a center hole of the turbine rotating fan. According to the structure, the rotary window assembly with the light-transmitting plate is adopted to shield the collection hole, the unnecessary opening and closing process can be omitted, meanwhile, the occupied horizontal space can be effectively reduced through the structure, the size of the visual detection device can be reduced, the two image collection assemblies can be arranged in the outer cover conveniently, and the visual detection efficiency is improved. And the turbine rotating fan can rotate to drive the light-transmitting plate to rotate, so that chippings and the like are thrown out from the light-transmitting plate, and the purpose of cleaning is achieved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor equipment, in particular to a visual inspection device, a dicing device and a rotating window assembly. Background Art

[0002] A dicing machine is a device used to dice wafers.

[0003] The dicing machine is equipped with a visual inspection device to identify the cutting paths of the wafer.

[0004] Patent document CN221688757U discloses a visual recognition mechanism, wherein a driving mechanism drives a cover plate to translate to cover a first through hole corresponding to a lens of an image acquisition component.

[0005] The problem with this structure is that the drive mechanism, cover plate and other structures need to occupy a large space, which makes the visual recognition mechanism larger and limits the provision of two image acquisition components in the visual recognition mechanism. Summary of the Invention

[0006] The purpose of the present invention is to solve the above problems existing in the prior art and to provide a visual inspection device, a cutting device and a rotating window assembly.

[0007] The purpose of the present invention is achieved through the following technical solutions: A visual inspection device includes an outer cover and an image acquisition assembly arranged in the outer cover. A collection hole corresponding to the lens of the image acquisition assembly is provided on the bottom plate of the outer cover. A rotating window assembly that shields the collection hole is provided on the bottom plate. The rotating window assembly includes a turbine rotating fan that rotates by the airflow generated by the blowing component. A light-transmitting plate corresponding to the position of the collection hole is coaxially arranged at the center hole of the turbine rotating fan.

[0008] Preferably, in the visual detection device, there are two image acquisition components, and there are two acquisition holes corresponding to the two image acquisition components respectively; the turbine rotating fans of the two rotating window assemblies are driven by a blowing component, and the blowing component includes two blowing ports corresponding to the two turbine rotating fans respectively.

[0009] Preferably, in the visual inspection device, the turbine rotary fan can be rotatably clamped in a slide groove on the rotating track.

[0010] Preferably, in the visual inspection device, the turbine rotating fan and / or rotating track are made of self-lubricating material.

[0011] Preferably, in the visual inspection device, the rotating track is assembled from a plurality of arc-shaped track components or is assembled from a bottom ring and an upper ring.

[0012] Preferably, in the visual inspection device, a first air jet tube is provided on the image acquisition component, and the first air jet tube passes under the bottom plate and the air jet port thereof faces the lower surface of the light-transmitting plate.

[0013] Preferably, in the visual inspection device, a second air jet tube is provided on the image acquisition component, the second air jet tube passes through the bottom of the base plate and its air outlet is oblique to the first axis of the light-transmitting plate and the second axis of the air outlet forms an acute angle with the first axis of the light-transmitting plate.

[0014] The present invention also discloses a cutting device, comprising any of the above-described visual inspection devices, wherein the rotating window assembly of the visual inspection device generates an airflow through the blowing component according to program settings to drive the turbine rotating fan to rotate so as to clean the light-transmitting plate.

[0015] Preferably, in the cutting equipment, before the visual inspection device captures the image, the light-transmitting plate is cleaned by blowing air toward the lower surface of the light-transmitting plate through the first air jet tube and / or the position on the workpiece where the image is to be captured is cleaned through the second air jet tube.

[0016] The present invention also discloses a rotating window assembly, comprising a turbine rotating fan, wherein a light-transmitting plate corresponding to the position of the collection hole is coaxially arranged at the center hole of the turbine rotating fan, the turbine rotating fan is rotatably arranged on a rotating track, and a blowing component is arranged next to the turbine rotating fan for blowing air toward the turbine rotating fan to generate an airflow to drive the turbine rotating fan to rotate.

[0017] The advantages of the technical solution of the present invention are mainly reflected in: The structure of the present invention changes the existing method of covering or opening the through hole by opening and closing the cover plate, and adopts a rotating window assembly with a light-transmitting plate to cover the collection hole, which can save the unnecessary opening and closing process. At the same time, this structure can effectively reduce the required horizontal space, which is conducive to reducing the size of the visual detection device, and is convenient for setting two image collection assemblies in the outer cover. The rotation of the turbine rotating fan can drive the light-transmitting plate to rotate, thereby throwing debris and the like out of the light-transmitting plate, thereby achieving the purpose of self-cleaning of the lower surface of the light-transmitting plate.

[0018] The shape of the blades and the position design of the air outlet of the turbine rotary fan of the present invention can not only effectively blow the turbine rotary fan through the blowing component, but also guide the gas blown out of the air outlet to the upper surface of the light-transmitting plate through the blades, thereby achieving demisting treatment of the upper surface of the light-transmitting plate, which is beneficial to ensuring stable image acquisition requirements in cold weather.

[0019] The present invention further provides a first air jet pipe to blow air toward the lower surface of the light-transmitting plate, which can purge the light-transmitting plate during its rotation, thereby more comprehensively cleaning the light-transmitting plate and improving coverage.

[0020] The present invention further provides a second air jet pipe to blow air toward the bottom of the light-transmitting plate. Before the image acquisition component acquires an image, the second air jet pipe can be used to blow air at the position where the image is to be acquired to ensure the cleanliness of the position where the image is to be acquired, thereby improving the quality of the acquired image and facilitating accurate image analysis. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a cross-sectional view of a visual inspection device of the present invention; Figure 2 It is a partial cross-sectional enlarged view of the rotary window assembly covering the collection hole of the present invention; Figure 3 is a partial perspective view of the visual inspection device of the present invention; Figure 4 is a cross-sectional view of a visual inspection device of the present invention; Figure 5 It is a partial cross-sectional view of the light source assembly of the image acquisition assembly of the visual inspection device of the present invention, which is integrated with the lens and the light-transmitting plate purge structure; Figure 6 Schematic diagram of a visual inspection device according to the present invention provided with a first air injection pipe; Figure 7 It is a partial cross-sectional enlarged view of the first air injection pipe and the rotating window assembly of the visual inspection device of the present invention; Figure 8 It is a schematic diagram of the visual inspection device of the present invention provided with a second air injection pipe. DETAILED DESCRIPTION

[0022] The objects, advantages, and features of the present invention are illustrated and explained through the following non-limiting description of preferred embodiments. These embodiments are merely typical examples of the application of the technical solutions of the present invention, and any technical solutions formed by equivalent substitution or equivalent transformation fall within the scope of protection claimed by the present invention.

[0023] In the description of the scheme, it should be noted that the terms "center," "upper," "lower," "left," "right," "front," "back," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplification. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0024] Example 1 The visual detection device disclosed by the present invention is described below with reference to the accompanying drawings. Figure 1 As shown, it includes an outer housing 100. The specific shape of the outer housing 100 can be designed as needed. It can generally be a rectangular parallelepiped housing, but other feasible shapes are also possible and are not limited here. The outer housing 100 is provided with an image acquisition assembly 200. The image acquisition assembly 200 includes, for example, a microscope camera, a lens 210, a light source assembly 220, and other components. The specific structure of these components can be the same as in the prior art and will not be described in detail here.

[0025] The number of the image acquisition component 200 may be only one. More preferably, there may be two image acquisition components 200 arranged side by side. Moreover, one image acquisition component 200 uses a high-power microscope camera, and the other image acquisition component 200 uses a low-power microscope camera.

[0026] As attached Figure 1 As shown, a collection hole 111 corresponding to the lens 210 of each image collection assembly 200 is provided on the bottom plate 110 of the outer cover 100 for the image collection assembly 200 to collect images. A rotating window assembly 300 is provided on the bottom plate 110 to cover the collection hole 111. The rotating window assembly 300 is preferably arranged above the bottom plate 110, that is, located inside the outer cover 100. At this time, a small distance is maintained between the rotating window assembly 300 and the image collection assembly 200. The specific distance can be designed as needed and is not limited here. Of course, in other embodiments, the rotating window assembly 300 can also be arranged below the bottom plate 110, that is, located outside the outer cover 100.

[0027] As attached Figure 2 , Attachment Figure 3 As shown, the rotating window assembly 300 includes a turbo-rotating fan 310 that rotates automatically due to airflow generated by a blowing component 330. A light-transmitting plate 320 is coaxially positioned at the center hole 311 of the turbo-rotating fan 310, corresponding to the position of the collection hole. Specifically, the turbo-rotating fan 310 is annular and concentrically positioned with the collection hole. The light-transmitting plate 320 is made of high-transmittance glass with a light transmittance of at least 90% and is bonded to the bottom of the turbo-rotating fan 310.

[0028] Furthermore, the turbo fan 310 is rotatably engaged with a chute 341 on the rotating track 340. The rotating track 340 also has a circular center hole, and the chute 341 is a circular groove that matches the outer circumference of the turbo fan 310. A small gap is maintained between the turbo fan 310 and the chute 341 to enable the turbo fan 310 to rotate smoothly without eccentricity.

[0029] In order to facilitate the assembly of the rotating track and the turbine rotating fan 310, the rotating track 340 is assembled from a plurality of arc-shaped track components, for example, two semicircular track components, or four 90° arc track components. Alternatively, the rotating track 340 includes a bottom ring 342 and an upper ring 343, the cross-sectional shape of the bottom ring 342 is L-shaped, and the upper ring 343 is arranged on the bottom ring 342. During assembly, the turbine rotating fan 310 can be placed on the support portion of the bottom ring 342 first, and then the upper ring 343 can be concentrically fixed on the bottom ring 342 to achieve the limitation of the turbine rotating fan 310. At the same time, in order to enable the turbine rotating fan 310 to rotate smoothly, the turbine rotating fan 310 and / or the rotating track 340 are made of self-lubricating materials. The self-lubricating material is, for example, polytetrafluoroethylene material or graphite material, etc., which is not limited here.

[0030] As attached Figure 3 As shown, the blowing component 330 can be a plate of suitable thickness, and the plate is provided with a blowing port 331. The height of the blowing port 331 is adapted to the height of the fan blades protruding from the top of the turbo rotating fan 310, and the blowing port 331 is biased toward one side of the turbo rotating fan 310, so that when the airflow blown out of the blowing port 331 blows onto the fan blades 312, it drives the turbo rotating fan 310 to rotate.

[0031] When two image acquisition assemblies 200 are set, the turbo rotating fans 310 of the two rotating window assemblies 300 are driven by one blowing component 330, that is, the blowing component 330 includes two blowing ports 331 corresponding to the two turbo rotating fans 310, and the axes of the two blowing ports 331 are parallel. An air duct 333 connected to the blowing port 331 is formed on the corresponding blowing component 330, and the air duct 333 is connected to the external air supply system through an external connector 332. The two blowing ports 331 can be connected to the same external connector 332 through an air duct. Of course, the two blowing ports 331 can also be connected to independent external connectors 332 through air ducts.

[0032] As attached Figure 4As shown, in order to give full play to the role of the turbine rotating fan 310, the turbine rotating fan 310 includes a circle of blades 312 evenly distributed on the circumference, and the blades 312 include a first end face 313 and a second end face 314. The arc of the first end face 313 coincides with a small arc on the first circle O1, and the first circle O1 is concentric with the turbine rotating fan 310; the arc of the second end face 314 coincides with a small arc on the second circle O2, and the second circle O2 is concentric with the turbine rotating fan 310. The outer diameter of the second circle is larger than the outer diameter of the first circle O1 and smaller than the outer diameter of the turbine rotating fan 310, and the arc lengths of the first end face 313 and the second end face 314 are equivalent or the same. At the same time, the first end face 313 and the second end face 314 of each fan blade are staggered in the circumferential direction, and the first end face 313 and the second end face 314 are connected by two first side faces 315 and the second side faces 316. The first side faces 315 and the second side faces 316 can be inclined surfaces or arc surfaces, preferably arc surfaces, and the first side face 315 is connected to the first side of the first end face 313 and the second end face 314 and the first side face 315 protrudes toward the second side of the second end face 314 and the second end face 314, and the second side face 316 is connected to the second side of the first end face 313 and the second end face 314 and the second side face 316 protrudes outward.

[0033] As attached Figure 4 As shown, the axis of the air outlet 331 extends horizontally along a second direction D2, which is perpendicular to the first direction D1. The first direction D1 is the direction of extension of a line L perpendicularly connecting the axes of the two turborotating fans 310. Furthermore, the dimensions of the air outlet 331 ensure that the airflow 334 blown out is directed to a single blade, and the airflow 334 blows to a position on the first side 315 of the blade near the second end surface 314. Therefore, the first side 315 not only blows the blade to drive the turborotating fan 310 to rotate, but also directs the airflow to the center of the turborotating fan 310, thereby cleaning and / or defogging the upper surface of the light-transmitting plate 320 at the center. Furthermore, due to the small distance between the image capture assembly and the turborotating fan 310, the airflow directed to the center can also simultaneously clean and defog the lens 210 of the image capture assembly, thereby improving the image capture quality of the image capture assembly.

[0034] However, the efficiency of guiding the airflow to the upper surface of the light-transmitting plate 320 and the lower surface of the lens 210 by the fan blades for purging and demisting is relatively slow. Figure 5As shown, the light source assembly 220 is an annular light source and is mounted on the periphery of the lens 210. The light source assembly 220 is provided with an air inlet channel 222 connected to its central hole 221. The air inlet channel 222 is L-shaped, and its air inlet end is located at the top of the light source assembly 220 and is connected to an air nozzle 223. The air nozzle 223 is connected to the air supply system. When the air supply system supplies air to the air nozzle 223, the air flow enters the central hole 221 through the air inlet channel 222, flows downward between the lens 210 and the lower end plate 224 below the lens, and finally flows out through the through hole 225 in the lower end plate. The flowing airflow quickly sweeps the lower surface of the lens at the lower end of the lens 210 and the upper surface of the light-transmitting plate 320, thereby achieving the effect of quickly cleaning and defogging the lens at the lower end of the lens 210 and the upper surface of the light-transmitting plate 320.

[0035] In the above embodiment, when the light-transmitting plate 320 is driven to rotate by the rotation of the turbo rotating fan 310 to achieve cleaning, the cleaning effect may not be ideal. Therefore, in order to better clean the lower surface of the light-transmitting plate 320, as shown in the attached Figure 4 , Attachment Figure 6 As shown, a first air injection pipe 400 is provided on the image acquisition assembly. The first air injection pipe 400 passes under the bottom plate and its air injection port 410 faces the lower surface of the light-transmitting plate 320 .

[0036] Specifically, a socket (not shown in the figure) is provided on the light source assembly 220 of the image acquisition assembly, the upper end of which is connected to a pipe joint (not shown in the figure), which is connected to an air supply system for supplying air thereto. Figure 7 As shown, the first air jet pipe 400 includes a vertical extension section 410 and a bent section 420. The vertical extension section 410 is located outside the rotating window assembly and is inserted into the insertion hole from the lower end of the insertion hole and extends under the bottom plate. The bent section 420 first extends downwardly toward the light-transmitting plate 320 for a certain length, and then extends upward at one end, so that the air jet hole of the first air jet pipe 400 faces the lower surface of the light-transmitting plate 320. The light-transmitting plate 320 can be purged by the first air jet pipe 400 spraying air toward the lower surface of the light-transmitting plate 320.

[0037] Furthermore, since there will be water mist in the dicing box of the dicing machine, when the workpiece enters the dicing box, the water mist in the dicing box will contaminate the surface of the workpiece and affect the image quality collected by the image acquisition component. Therefore, as shown in the attached figure, Figure 4 , Attachment Figure 8As shown, a second air jet 500 is provided on the image acquisition assembly. The second air jet 500 is also plugged into the air passage provided on the light source assembly 220. The second air jet and the first air jet can be connected to the same air passage on the light source assembly so that they can be cleaned simultaneously, facilitating simpler cleaning control. Of course, they can also be connected to independent air passages. The second air jet 500 also includes a vertical extension section and a curved section. The straight extension section passes under the bottom plate. Unlike the first air jet 400, the air outlet 510 of the curved section of the second air jet is oblique to the first axis 321 of the light-transmitting plate 320, and the second axis 520 of the air outlet forms an acute angle with the first axis 321 of the light-transmitting plate 320. The position and number of the second air jet 500 can be designed as needed and are not limited here. For example, a second air jet is provided next to the first air jet at each visual acquisition assembly.

[0038] Example 2 This embodiment discloses a slicing device, including any of the visual inspection devices described above. The slicing device also includes other structures of a known slicing machine, such as a horizontally movable wafer table, a cutting mechanism, etc., which will not be described here. The controller of the slicing device can control the air supply system to supply air to the rotating window assembly of the visual inspection device according to the program setting, so that the blowing component generates an airflow to blow the turbine rotating fan 310 to rotate to achieve the cleaning of the light-transmitting plate 320. For example, before the visual inspection device captures the image, the turbine rotating fan 310 is blown to rotate by the blowing component. Of course, the turbine rotating fan 310 can also be blown to rotate by the blowing component while the image acquisition component moves into place to capture the image; the turbine rotating fan 310 can also be blown to rotate by the blowing component after the image acquisition component completes the image acquisition movement and resets.

[0039] Preferably, when the visual inspection device is required for inspection, the visual inspection device can be first lowered to a position close to the workpiece, and then air can be supplied to the second air jet pipe 500 so that the second air jet pipe 500 is blown toward the position where the image is to be captured for cleaning. While, before, or after the second air jet pipe 500 is blowing, the air blowing component can be used to blow the turbo fan 310 to rotate and / or air can be supplied to the first air jet pipe 400 so that the first air jet pipe 400 blows the lower surface of the light-transmitting plate 320 and / or to the air nozzle on the light source assembly, thereby cleaning the upper surface of the light-transmitting plate 300 and the lower surface of the lens through the air inlet channel and the central hole. After the second air jet pipe 500 has been blowing for a period of time, the image capture assembly can capture images. During image capture, the air supply system can continue to supply air to the second air jet pipe 500, the first air jet pipe 400, the air nozzle, and the air blowing component, or can stop supplying air to them, or can continue to supply air to some of them. Preferably, during image acquisition, the air supply system can continue to supply air to the second air jet tube 500, the first air jet tube 400, the air nozzle and the air blowing component, and when image acquisition is completed, stop supplying air to the second air jet tube 500, the first air jet tube 400, the air nozzle and the air blowing component.

[0040] Example 3 The present invention also discloses a rotating window assembly 300, comprising a turborotating fan 310. A light-transmitting plate 320 corresponding to the position of the collection hole is coaxially arranged at the central hole 311 of the turborotating fan 310. The turborotating fan 310 is rotatably arranged on a rotating track 340. A blowing component 330 is provided adjacent to the turborotating fan 310 for blowing air into the turborotating fan 310 to generate an airflow to drive the turborotating fan 310 to rotate. In addition to being used in the aforementioned visual inspection device, the rotating window assembly 300 can also be used in other scenarios requiring shielding of window openings, which are not limited here.

[0041] There are many implementation methods of the present invention, and all technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of the present invention.

Claims

1. A visual inspection device comprising an outer housing and an image acquisition assembly disposed within the outer housing, wherein a collection hole corresponding to a lens of the image acquisition assembly is disposed on a bottom plate of the outer housing, characterized in that: A rotating window assembly covering the collection hole is provided on the bottom plate. The rotating window assembly includes a turbine rotating fan driven by airflow generated by a blowing component. A light-transmitting plate corresponding to the position of the collection hole is coaxially provided at the center hole of the turbine rotating fan.

2. The visual inspection device according to claim 1, wherein: There are two image acquisition components, and there are two acquisition holes corresponding to the two image acquisition components respectively; the turbine rotating fans of the two rotating window assemblies are driven by a blowing component, and the blowing component includes two blowing ports corresponding to the two turbine rotating fans respectively.

3. The visual inspection device according to claim 1, wherein: The turbine rotary fan is rotatably clamped in a sliding groove on the rotating track.

4. The visual inspection device according to claim 5, characterized in that: The turbine rotating fan and / or rotating track are made of self-lubricating material.

5. The visual inspection device according to claim 5, characterized in that: The rotating track is assembled from a plurality of arc-shaped track components or is assembled from a bottom ring and an upper ring.

6. The visual inspection device according to claim 1, wherein: The image acquisition component is provided with a first air injection pipe, which passes through the bottom of the bottom plate and has an air injection port facing the lower surface of the light-transmitting plate.

7. The visual inspection device according to claims 1-8, characterized in that: The image acquisition assembly is provided with a second air injection pipe, which passes through the bottom of the base plate and has an air outlet oblique to the first axis of the light-transmitting plate. The second axis of the air outlet forms an acute angle with the first axis of the light-transmitting plate.

8. Slicing equipment, characterized by: It comprises a visual inspection device as described in any one of claims 1 to 7, wherein the rotating window assembly of the visual inspection device generates an airflow through a blowing component according to program settings to blow the turbine rotating fan to rotate so as to clean the light-transmitting plate.

9. The dicing device according to claim 8, characterized in that: Before the visual inspection device collects images, the light-transmitting plate is cleaned by blowing air toward the lower surface of the light-transmitting plate through the first air jet pipe and / or the position on the workpiece where the image is to be collected is cleaned through the second air jet pipe.

10. Rotating window assembly, characterized in that: It includes a turborotating fan, a light-transmitting plate corresponding to the position of the collecting hole is coaxially arranged at the central hole of the turborotating fan, the turborotating fan is rotatably arranged on a rotating track, and a blowing component is arranged next to the turborotating fan for blowing air to the turborotating fan to generate an airflow to drive the turborotating fan to rotate.

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