Horizontal vacuum furnace with uniform heating

Abstract

The application discloses a horizontal vacuum furnace with the function of uniform heating, and relates to the technical field of vacuum furnaces. The horizontal vacuum furnace comprises a furnace body, a furnace door, a vacuum system, an atmosphere panel, a cooling water system, a pneumatic system, a circulation system, a detection and adjustment system and a base. The furnace door is hinged to the furnace body. The vacuum system is communicated with the furnace body. The atmosphere panel is connected with the furnace body. The atmosphere panel is used for controlling the gas environment in the furnace body. The cooling water system is communicated with the furnace body. The pneumatic system is used for controlling the opening and closing of the furnace door. The circulation system is connected with the furnace body. The circulation system realizes uniform heating through forced gas circulation. The detection and adjustment system is connected with the furnace body. The detection and adjustment system is used for ensuring the uniformity of the temperature in the furnace body. The base is tightly connected with the furnace body. When heating, the temperature of each part in the furnace body is detected through the detection and adjustment system, and the position with uneven temperature in the furnace body is adjusted, so that the temperature of each part in the furnace body is kept consistent.

Description

Technical Field

[0001] This invention relates to the field of vacuum furnace technology, specifically a horizontal vacuum furnace with uniform heating function. Background Technology

[0002] Horizontal vacuum furnaces, as heat treatment equipment, are widely used in oxygen-free tempering processes for workpieces. However, existing technologies still have significant drawbacks:

[0003] Insufficient temperature uniformity: Traditional furnaces rely on natural convection or simple fan circulation, resulting in uneven distribution of hot airflow and the formation of hot and cold zones inside the furnace. This leads to significant differences in the heating of workpieces, especially for large or complex workpieces, which can easily cause quality problems such as uneven hardness and deformation.

[0004] High-temperature sensing has poor reliability: Conventional electronic temperature sensors (such as thermocouples and resistance thermometers) are prone to drift or failure in long-term high-temperature environments, requiring frequent calibration or even replacement. This not only increases maintenance costs but also directly affects temperature control accuracy due to measurement inaccuracies.

[0005] Energy consumption and efficiency bottlenecks: To compensate for uneven temperature, it is often necessary to extend the heating time or increase the overall furnace temperature, resulting in energy waste; at the same time, the lack of zone temperature control capability makes it impossible to accurately intervene in local overheated or overcooled areas, and the cooling system often needs to operate throughout the entire area, further increasing energy consumption. Summary of the Invention

[0006] The purpose of this invention is to provide a horizontal vacuum furnace with uniform heating function to solve the problems mentioned in the prior art.

[0007] To achieve the above objectives, the present invention provides the following technical solution: A horizontal vacuum furnace includes a furnace body, a furnace door, a vacuum system, an atmosphere panel, a cooling water system, a pneumatic system, a circulation system, a detection and adjustment system, and a base. The furnace door is hinged to the furnace body, the vacuum system is connected to the furnace body, the atmosphere panel is connected to the furnace body, the atmosphere panel is used to control the gas environment inside the furnace, the cooling water system is connected to the furnace body, the pneumatic system is used to control the opening and closing of the furnace door, the circulation system is connected to the furnace body, the circulation system achieves uniform heating through forced gas circulation, the detection and adjustment system is connected to the furnace body, the detection and adjustment system is used to ensure the uniformity of temperature inside the furnace, and the base is securely connected to the furnace body.

[0008] The base, placed on the ground, provides stable support for the vacuum furnace. The horizontal vacuum furnace is used for tempering workpieces. During tempering, the workpiece is first placed inside the furnace, and the furnace door is closed. Then, the furnace is evacuated using a vacuum system to ensure an oxygen-free environment. Inert gas is then introduced into the furnace through an atmosphere panel. The workpiece is then heated, and a circulation system forces the inert gas to circulate within the furnace, promoting the circulation of hot gas. Furthermore, during heating, a detection and adjustment system monitors the temperature at various points within the furnace and adjusts areas with uneven temperatures to ensure consistent temperature throughout the furnace.

[0009] Furthermore, a heater is installed inside the furnace to heat the workpiece inside the furnace. The cooling water system mainly controls and removes the heat generated during the operation of the vacuum furnace, ensuring that key components operate at a safe temperature.

[0010] The heater heats the workpiece inside the furnace through thermal radiation. The heat from heating the workpiece will cause the temperature of the furnace shell to rise due to thermal conduction. Excessive temperature will cause the furnace to deform and reduce its sealing performance. The cooling water system can carry away the heat by surrounding the furnace with a water-cooled jacket or coils to maintain the furnace at a safe temperature.

[0011] Furthermore, the detection and adjustment system includes a fixed box, a detection component, and an adjustment fan. The furnace body is provided with several baffles and adjustment channels. The baffles form an annular flow channel. The annular flow channel and the adjustment channel cooperate to make the hot air flow in the furnace body flow in an annular manner. The fixed box is fixedly connected to the furnace body and is located inside the adjustment channel. The fixed box is provided with an air inlet. The detection component is installed at the air inlet. The adjustment fan is fixedly connected to the inner wall of the air inlet.

[0012] The fixed box is fixed inside the regulating channel, providing support for the detection and regulation system. When the vacuum furnace is working, the regulating fan is activated, and the regulating fan creates a negative pressure at the air inlet, thereby drawing in the hot airflow from the inlet of the regulating channel and discharging it through the outlet of the regulating channel. Then, the hot airflow is guided by an annular channel formed between several baffles, causing the hot airflow to flow in an annular pattern along several annular channels. Separating the annular flow of hot airflow creates several annular heating zones inside the furnace. When the detection component detects a change in the temperature of the hot airflow in a certain zone, the corresponding component adjusts the temperature of the hot airflow in that zone to keep the temperature uniform throughout.

[0013] Furthermore, the fixed box is also equipped with an exhaust channel, a heating channel and a cooling channel. The inlets of the exhaust channel, the heating channel and the cooling channel are all equipped with regulating valves. The heating channel and the cooling channel are symmetrically arranged on both sides of the exhaust channel.

[0014] When the hot air temperature is suitable: the air inlet is connected to the exhaust channel;

[0015] When the hot air temperature is low: the air inlet is connected to the heating channel;

[0016] When the hot air temperature is high: the air inlet is connected to the cooling channel.

[0017] The regulating valve can automatically control its opening and closing based on the temperature data detected by the detection component. When the hot gas temperature is suitable, the regulating valve located at the exhaust channel opens, and the airflow flows into the exhaust channel along the air inlet and then flows out from the regulating channel. When the hot gas temperature is low, the regulating valve located at the heating channel opens, and the airflow flows into the heating channel along the air inlet for heating treatment. When the hot gas temperature is high, the regulating valve located at the cooling channel opens, and the airflow flows into the cooling channel along the air inlet for cooling treatment. In other words, the automatic adjustment of the hot gas temperature inside the furnace is achieved through the switchable channels, thereby ensuring that the temperature remains consistent throughout the furnace.

[0018] Furthermore, a heating wire is installed inside the heating channel, and a cooling pipe is wrapped around the outside of the cooling channel, with the cooling pipe connected to a cooling water system.

[0019] The heating channel heats the cooler airflow through heating wires, while the cooling channel cools the higher-temperature airflow through cooling water in the cooling pipes.

[0020] Furthermore, the detection assembly includes a bimetallic strip, a first telescopic rod, a connecting ball, a second telescopic rod, a slip ring, and a resistance rod. One end of the bimetallic strip is securely connected to the inner wall of the air inlet, and the other end of the bimetallic strip is hinged to the first telescopic rod. The end of the first telescopic rod away from the bimetallic strip is securely connected to the connecting ball, which is rotatably connected to the fixed box. One end of the second telescopic rod is securely connected to the connecting ball, and the other end of the second telescopic rod is hinged to the slip ring. The fixed box has a movable groove, and the resistance rod is securely connected to the inner wall of the movable groove. The slip ring is slidably connected to the resistance rod. The resistance rod and the slip ring are externally connected to a detection system, which is used to detect the resistance between the resistance rod and the slip ring.

[0021] Furthermore, the bimetallic strip is made by firmly bonding two layers of different types of metal sheets together, with the two metal sheets having different coefficients of thermal expansion.

[0022] When the temperature rises: the bimetallic strip bends toward the metal sheet with the lower coefficient of thermal expansion.

[0023] Due to the high temperature inside the vacuum furnace, resistance thermometers may experience changes in their grain structure at high temperatures, leading to a shift in the relationship between resistance and temperature. This drift is usually irreversible and requires periodic calibration. In other words, existing temperature sensors inevitably experience a decrease in accuracy after prolonged use in the high-temperature environment of a vacuum furnace, resulting in inaccurate temperature readings. This application uses a bimetallic strip composed of two metal sheets with different coefficients of thermal expansion to detect temperature changes. The bimetallic strip has good heat resistance and can be used for extended periods. Furthermore, the resistance rod is located within a movable groove, away from the heat source, reducing the impact of temperature on the resistance value. When the temperature in a certain area of ​​the furnace is high, the bimetallic strip is heated, causing it to bend towards the metal sheet with the lower coefficient of thermal expansion. This causes the first telescopic rod to deflect to one side along the connecting ball, which in turn causes the second telescopic rod to deflect to the other side at a certain angle. This causes the slip ring to move a certain distance along the resistance rod, increasing the length of the resistance rod connected to the detection system and resulting in a higher resistance value detected by the system. Furthermore, the higher the temperature, the greater the bending of the bimetallic strip and the greater the distance the slip ring moves along the resistance rod, meaning the higher the resistance value detected by the system and the higher the temperature.

[0024] Furthermore, the second telescopic pole is longer than the first telescopic pole.

[0025] Since the bimetallic strip deforms relatively little when heated, a lever system is formed by setting a first telescopic rod and a second telescopic rod of different lengths to amplify the deformation of the bimetallic strip, thereby facilitating detection.

[0026] Furthermore, the resistance rod is divided into regions E, F, and G along the direction of movement of the slip ring.

[0027] When the slip ring is in zone E, the temperature of the hot airflow is relatively low;

[0028] When the slip ring is in zone F, the temperature of the hot airflow is moderate;

[0029] When the slip ring is in zone G, the temperature of the hot airflow is relatively high.

[0030] The partitions on the resistance rod correspond to the opening and closing of the regulating valves at different positions. When the slip ring is in zone E, the temperature of the hot air is low, and the regulating valve in the heating channel is open; when the slip ring is in zone F, the temperature of the hot air is moderate, and the regulating valve in the exhaust channel is open; when the slip ring is in zone G, the temperature of the hot air is high, and the regulating valve in the cooling channel is open. In other words, by partitioning the resistance rod, the accuracy of controlling the temperature of the hot air is improved.

[0031] Furthermore, the circulation system includes a drive motor and circulation fan blades. The drive motor is fixedly connected to the furnace body, and the output end of the drive motor is connected to the circulation fan blades via a transmission.

[0032] The drive motor is the main power source of the circulation system. Driven by the drive motor, the circulating fan blades form a hot airflow circulation in the furnace body, thereby promoting the uniformity of heating, reducing energy consumption, and improving environmental protection.

[0033] Compared with the prior art, the beneficial effects of the present invention are:

[0034] 1. By accelerating the flow of inert gas within the furnace through a forced gas circulation system, and combining this with a unique detection and control system—including bimetallic strip temperature sensing, lever amplification, and resistance rod zone detection—real-time, zoned, and dynamic temperature control of the hot airflow in each area of ​​the furnace is achieved, enabling heating in low-temperature zones and cooling in high-temperature zones. This intelligent temperature control mechanism ensures the uniformity of temperature within the furnace, thereby significantly improving the heating consistency and processing quality of workpiece tempering.

[0035] 2. The detection component adopts a high-temperature resistant bimetallic strip mechanical sensing combined with a resistance displacement detection scheme, effectively avoiding the drift problem of traditional electronic sensors at high temperatures, resulting in more reliable measurements and a longer lifespan. The lever mechanism amplifies minute temperature deformations, and the partitioned design of the resistance rod enables precise temperature identification. Based on this, the system automatically controls the regulating valve to switch airflow paths, with a rapid and accurate response. The heating wire or cooling water is only activated when needed, greatly reducing ineffective energy consumption and improving operating efficiency and economy.

[0036] 3. The cooling water system continuously removes the heat generated during furnace operation, effectively preventing the furnace shell from deforming due to overheating and ensuring the integrity of the furnace structure and vacuum sealing performance. Meanwhile, the durable bimetallic temperature sensing element and the resistance rod detection design, located away from heat sources, reduce wear and tear on the detection components in high-temperature environments, improving the long-term operational stability and service life of the entire vacuum furnace system. Attached Figure Description

[0037] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0038] Figure 2 for Figure 1 Sectional view along axis AA;

[0039] Figure 3 This is a schematic diagram of the furnace body structure of the present invention;

[0040] Figure 4 This is a partial cross-sectional view of the furnace body of the present invention;

[0041] Figure 5 A partial sectional view of the detection and adjustment system;

[0042] Figure 6 This is a schematic diagram of the detection component;

[0043] Figure 7 for Figure 6 A magnified view of section B;

[0044] Figure 8 This is a schematic diagram illustrating the action of the detection component;

[0045] Figure 9 for Figure 8 A magnified view of a portion of point C.

[0046] In the diagram: 1. Furnace body; 11. Baffle plate; 12. Regulating flow channel; 2. Furnace door; 3. Vacuum system; 4. Atmosphere panel; 5. Cooling water system; 6. Pneumatic system; 7. Circulation system; 71. Drive motor; 72. Circulating fan blade; 8. Detection and regulation system; 81. Fixing box; 811. Air inlet; 812. Exhaust flow channel; 813. Heating flow channel; 814. Cooling flow channel; 815. Movable slot; 82. Detection component; 821. Bimetallic strip; 822. First telescopic rod; 823. Connecting ball; 824. Second telescopic rod; 825. Slip ring; 826. Resistance rod; 83. Regulating fan; 84. Regulating valve; 85. Heating wire; 86. Cooling pipe; 9. Base. Detailed Implementation

[0047] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0048] Example: Figures 1-9 As shown, this invention provides a horizontal vacuum furnace with uniform heating function. The horizontal vacuum furnace includes a furnace body 1, a furnace door 2, a vacuum system 3, an atmosphere panel 4, a cooling water system 5, a pneumatic system 6, a circulation system 7, a detection and adjustment system 8, and a base 9. The furnace door 2 is hinged to the furnace body 1, the vacuum system 3 is connected to the furnace body 1, the atmosphere panel 4 is connected to the furnace body 1 and is used to control the gas environment inside the furnace body 1, the cooling water system 5 is connected to the furnace body 1, the pneumatic system 6 is used to control the opening and closing of the furnace door 2, the circulation system 7 is connected to the furnace body 1 and achieves uniform heating through forced gas circulation, the detection and adjustment system 8 is connected to the furnace body 1 and is used to ensure the uniformity of temperature inside the furnace body 1, and the base 9 is firmly connected to the furnace body 1.

[0049] The base 9 is placed on the ground to provide stable support for the vacuum furnace. The horizontal vacuum furnace is used to temper workpieces. During the tempering operation, the workpiece is first placed in the furnace body 1 and the furnace door 2 is closed. Then, the vacuum system 3 is used to evacuate the inside of the furnace body 1 to ensure an oxygen-free environment. Inert gas is then injected into the furnace body 1 through the atmosphere panel 4. The workpiece in the furnace body 1 is then heated. The circulation system 7 drives the inert gas to circulate in the furnace body 1, thereby promoting the circulation of hot air in the furnace body 1. In addition, during heating, the detection and adjustment system 8 detects the temperature at various points in the furnace body 1 and adjusts the areas with uneven temperatures to ensure that the temperature is consistent throughout the furnace body 1.

[0050] The furnace body 1 is equipped with a heater, which is used to heat the workpieces inside the furnace body 1. The cooling water system 5 mainly controls and removes the heat generated during the operation of the vacuum furnace, ensuring that key components operate at a safe temperature.

[0051] The heater heats the workpiece inside the furnace body 1 through thermal radiation. The heat from heating the workpiece will cause the outer shell temperature of the furnace body 1 to rise due to thermal conduction. Excessive temperature will cause the furnace body 1 to deform and reduce its sealing performance. The cooling water system 5 can carry away the heat by surrounding the furnace body 1 with a water-cooled jacket or coil to maintain the furnace body 1 at a safe temperature.

[0052] The detection and adjustment system 8 includes a fixed box 81, a detection component 82, and an adjustment fan 83. The furnace body 1 is provided with several baffles 11 and an adjustment channel 12. The baffles 11 form an annular channel. The annular channel and the adjustment channel 12 cooperate to make the hot air flow in the furnace body 1 flow in an annular manner. The fixed box 81 is fixedly connected to the furnace body 1 and is located in the adjustment channel 12. The fixed box 81 is provided with an air inlet 811. The detection component 82 is installed at the air inlet 811. The adjustment fan 83 is fixedly connected to the inner wall of the air inlet 811.

[0053] The fixed box 81 is fixed inside the regulating channel 12 to provide support for the detection and regulation system 8. When the vacuum furnace is working, the regulating fan 83 is started. The regulating fan 83 creates a negative pressure at the air inlet 811, thereby drawing in the hot airflow from the inlet of the regulating channel 12 and discharging it through the outlet of the regulating channel 12. The hot airflow is then guided by an annular channel formed between several baffles 11, causing the hot airflow to flow in an annular pattern along several annular channels. Separating the annular flow of hot airflow creates several annular heating areas inside the furnace body 1. When the detection component 82 detects a change in the temperature of the hot airflow in a certain area, the corresponding component adjusts the temperature of the hot airflow in that area to keep the temperature uniform.

[0054] The fixed box 81 is also provided with an exhaust flow channel 812, a heating flow channel 813 and a cooling flow channel 814. The inlets of the exhaust flow channel 812, the heating flow channel 813 and the cooling flow channel 814 are all provided with regulating valves 84. The heating flow channel 813 and the cooling flow channel 814 are symmetrically arranged on both sides of the exhaust flow channel 812.

[0055] When the hot air temperature is suitable: the air inlet 811 is connected to the exhaust channel 812;

[0056] When the hot air temperature is low: the air inlet 811 is connected to the heating channel 813;

[0057] When the hot air temperature is high: the air inlet 811 is connected to the cooling channel 814.

[0058] The regulating valve 84 can be automatically controlled to open and close based on the temperature data detected by the detection component 82. When the hot gas temperature is suitable, the regulating valve 84 located at the exhaust channel 812 opens, and the airflow flows into the exhaust channel 812 along the air inlet 811 and then flows out from the regulating channel 812. When the hot gas temperature is low, the regulating valve 84 located at the heating channel 813 opens, and the airflow flows into the heating channel 813 along the air inlet 811 for heating treatment. When the hot gas temperature is high, the regulating valve 84 located at the cooling channel 814 opens, and the airflow flows into the cooling channel 814 along the air inlet 811 for cooling treatment. That is, the automatic adjustment of the hot gas temperature in the furnace body 1 is realized through the switchable channels, so that the temperature in all parts of the furnace body 1 remains consistent.

[0059] A heating wire 85 is provided inside the heating channel 813, and a cooling pipe 86 is wrapped around the outside of the cooling channel 814. The cooling pipe 86 is connected to a cooling water system 5.

[0060] The heating channel 813 heats the cooler airflow through the heating wire 85, while the cooling channel 814 cools the higher-temperature airflow through the cooling water in the cooling pipe 86.

[0061] The detection assembly 82 includes a bimetallic strip 821, a first telescopic rod 822, a connecting ball 823, a second telescopic rod 824, a slip ring 825, and a resistance rod 826. One end of the bimetallic strip 821 is fixedly connected to the inner wall of the air inlet 811, and the other end of the bimetallic strip 821 is hinged to the first telescopic rod 822. The end of the first telescopic rod 822 away from the bimetallic strip 821 is fixedly connected to the connecting ball 823. The connecting ball 823 is rotatably connected to the fixed box 81. One end of the second telescopic rod 824 is fixedly connected to the connecting ball 823, and the other end of the second telescopic rod 824 is hinged to the slip ring 825. The fixed box 81 has a movable groove 815. The resistance rod 826 is fixedly connected to the inner wall of the movable groove 815. The slip ring 825 is slidably connected to the resistance rod 826. The resistance rod 826 and the slip ring 825 are externally connected to a detection system. The detection system is used to detect the resistance between the resistance rod 826 and the slip ring 825.

[0062] Bimetallic strip 821 is made of two layers of different types of metal sheets firmly bonded together, with the two metal sheets having different coefficients of thermal expansion;

[0063] When the temperature rises: the bimetallic strip 821 bends towards the metal sheet with the lower coefficient of thermal expansion.

[0064] Due to the high temperature inside the vacuum furnace, resistance thermometers may experience changes in their grain structure at high temperatures, leading to a shift in the relationship between resistance and temperature. This drift is usually irreversible and requires periodic calibration. In other words, existing temperature sensors inevitably experience a decrease in accuracy after prolonged use in the high-temperature environment of a vacuum furnace, resulting in inaccurate temperature readings. This application uses a bimetallic strip 821 composed of two layers of metal sheets with different coefficients of thermal expansion to detect temperature changes. The bimetallic strip 821 has good heat resistance and can be used for extended periods. Furthermore, the resistance rod 826 is located within the movable groove 815, away from the heat source, which reduces the effect of temperature on the resistance value. Impact: When the temperature in a certain area of ​​the furnace body 1 is high, the bimetallic strip 821 is heated, causing it to bend towards the metal sheet with the lower coefficient of thermal expansion. This causes the first telescopic rod 822 to deflect to one side along the connecting ball 823, which in turn causes the second telescopic rod 824 to deflect to the other side at a certain angle. This causes the slip ring 825 to move a certain distance along the resistance rod 826, increasing the length of the resistance rod 826 connected to the detection system. Consequently, the resistance value detected by the detection system increases. Furthermore, the higher the temperature, the greater the degree of bending of the bimetallic strip 821, and the greater the distance the slip ring 825 moves along the resistance rod 826. In other words, the higher the resistance value detected by the detection system on the resistance rod 826, the higher the temperature.

[0065] The length of the second telescopic rod 824 is greater than that of the first telescopic rod 822.

[0066] Since the bimetallic strip 821 deforms relatively little when heated, a lever system is formed by setting a first telescopic rod 822 and a second telescopic rod 824 of different lengths to amplify the deformation of the bimetallic strip 821, thereby facilitating detection.

[0067] The resistor rod 826 is divided into three regions, E, F and G, along the moving direction of the slip ring 825.

[0068] When slip ring 825 is in zone E, the temperature of the hot airflow is lower;

[0069] When slip ring 825 is in zone F, the temperature of the hot airflow is moderate;

[0070] When slip ring 825 is in zone G, the temperature of the hot airflow is relatively high.

[0071] The partitions on the resistance rod 826 correspond to the opening and closing of the regulating valve 84 at different positions. When the slip ring 825 is in zone E, the temperature of the hot air is low, and the regulating valve 84 at the heating channel 813 is open; when the slip ring 825 is in zone F, the temperature of the hot air is moderate, and the regulating valve 84 at the exhaust channel 812 is open; when the slip ring 825 is in zone G, the temperature of the hot air is high, and the regulating valve 84 at the cooling channel 814 is open. In other words, by partitioning the resistance rod 826, the accuracy of controlling the temperature of the hot air is improved.

[0072] The circulation system 7 includes a drive motor 71 and a circulation fan blade 72. The drive motor 71 is fixedly connected to the furnace body 1, and the output end of the drive motor 71 is connected to the circulation fan blade 72 for transmission.

[0073] The drive motor 71 is the main power source of the circulation system 7. The circulation fan blades 72, driven by the drive motor 71, form a hot airflow circulation in the furnace body 1, thereby promoting the uniformity of heating, reducing energy consumption, and improving environmental protection.

[0074] The working principle of this invention is as follows: When the horizontal vacuum furnace is working, the workpiece is first placed into the furnace body 1 and the furnace door 2 is closed. A vacuum is created by the vacuum system 3, and then an oxygen-free environment is created. Inert gas is then injected through the atmosphere panel 4. Subsequently, the heater heats the workpiece by thermal radiation. At the same time, the drive motor 71 in the circulation system 7 drives the circulation fan blades 72 to rotate, forcibly pushing the inert gas to circulate in the furnace body and promoting heat distribution. During this process, the detection and adjustment system 8 detects the airflow temperature in each area through the bimetallic strip 821. Its deformation is controlled by the first telescopic rod 822, the second telescopic rod 824, and the connecting ball 823. The lever system, after being amplified, is converted into the displacement of the slip ring 825 on the resistance rod 826. The temperature is accurately determined by the change in resistance value: zone E is low temperature, zone F is moderate temperature, and zone G is high temperature. Based on this, the regulating valve 84 is automatically controlled to switch the airflow path. When the temperature is moderate, the airflow circulates directly through the exhaust channel 812; when the temperature is too low, the airflow is introduced into the heating channel 813 and heated by the heating wire; when the temperature is too high, the airflow is introduced into the cooling channel 814 and cooled by the cooling pipe, thereby dynamically adjusting the airflow temperature in each zone to ensure a highly uniform temperature inside the furnace. In addition, the cooling water system continuously removes heat from the furnace body to maintain structural safety.

[0075] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A horizontal vacuum furnace with a function of uniform heating, characterized by: The horizontal vacuum furnace comprises a furnace body (1), a furnace door (2), a vacuum system (3), an atmosphere panel (4), a cooling water system (5), a pneumatic system (6), a circulation system (7), a detection and adjustment system (8) and a base (9), the furnace door (2) is hinged to the furnace body (1), the vacuum system (3) is communicated with the furnace body (1), the atmosphere panel (4) is connected with the furnace body (1), the atmosphere panel (4) is used for controlling the gas environment in the furnace body (1), the cooling water system (5) is communicated with the furnace body (1), the pneumatic system (6) is used for controlling the opening and closing of the furnace door (2), the circulation system (7) is connected with the furnace body (1), the circulation system (7) realizes uniform heating through forced gas circulation, the detection and adjustment system (8) is connected with the furnace body (1), the detection and adjustment system (8) is used for ensuring the uniformity of the temperature in the furnace body (1), and the base (9) is tightly connected with the furnace body (1); The detection and adjustment system (8) comprises a fixed box (81), a detection assembly (82) and an adjustment fan (83), a plurality of baffles (11) and an adjustment flow channel (12) are arranged in the furnace body (1), the plurality of baffles (11) form an annular flow channel therebetween, the annular flow channel cooperates with the adjustment flow channel (12) to make the hot gas flow in the furnace body (1) flow in an annular shape, the fixed box (81) is tightly connected with the furnace body (1) and located in the adjustment flow channel (12), an air inlet (811) is arranged in the fixed box (81), the detection assembly (82) is installed at the air inlet (811), and the adjustment fan (83) is tightly connected with the inner wall of the air inlet (811); The fixed box (81) is further provided with an exhaust flow channel (812), a temperature rising flow channel (813) and a temperature falling flow channel (814), adjustment valves (84) are arranged at the inlets of the exhaust flow channel (812), the temperature rising flow channel (813) and the temperature falling flow channel (814), and the temperature rising flow channel (813) and the temperature falling flow channel (814) are symmetrically arranged on the two sides of the exhaust flow channel (812); When the temperature of the hot gas is suitable, the air inlet (811) is communicated with the exhaust flow channel (812); When the temperature of the hot gas is lower, the air inlet (811) is communicated with the temperature rising flow channel (813); When the temperature of the hot gas is higher, the air inlet (811) is communicated with the temperature falling flow channel (814); The temperature rising flow channel (813) is provided with a heating wire (85), and the temperature falling flow channel (814) is provided with a cooling pipe (86) outside.

2. The horizontal vacuum furnace with the function of uniform heating according to claim 1, characterized in that: The furnace body (1) is provided with a heater, the heater is used for heating a workpiece in the furnace body (1), and the cooling water system (5) is used for controlling and taking away the heat generated in the operation process of the vacuum furnace, so that the key components can work at a safe temperature.

3. The horizontal vacuum furnace with the function of uniform heating according to claim 1, characterized in that: The detection assembly (82) comprises a bimetallic strip (821), a first telescopic rod (822), a connecting ball (823), a second telescopic rod (824), a sliding ring (825) and a resistance stick (826), one end of the bimetallic strip (821) is fixedly connected with the inner wall of the air inlet (811), the other end of the bimetallic strip (821) is hingedly connected with the first telescopic rod (822), one end of the first telescopic rod (822) away from the bimetallic strip (821) is fixedly connected with the connecting ball (823), the connecting ball (823) is rotatably connected with the fixed box (81), one end of the second telescopic rod (824) is fixedly connected with the connecting ball (823), the other end of the second telescopic rod (824) is hingedly connected with the sliding ring (825), the fixed box (81) is provided with a movable groove (815), the resistance stick (826) is fixedly connected with the inner wall of the movable groove (815), the sliding ring (825) is slidably connected with the resistance stick (826), the resistance stick (826) and the sliding ring (825) are connected with an external detection system, and the detection system is used for detecting the resistance between the resistance stick (826) and the sliding ring (825).

4. The horizontal vacuum furnace with the function of uniform heating according to claim 3, characterized in that: The bimetallic strip (821) is made of two layers of metal sheets of different types firmly attached together, and the two layers of metal sheets have different thermal expansion coefficients. When the temperature rises: the bimetallic strip (821) bends towards the metal sheet with a lower thermal expansion coefficient.

5. A horizontal vacuum furnace with uniform heating function according to claim 4, characterized in that: The length of the second telescopic rod (824) is greater than that of the first telescopic rod (822).

6. The horizontal vacuum furnace with the function of uniform heating according to claim 4, characterized in that: The resistance stick (826) is divided into E zone, F zone and G zone in sequence along the moving direction of the sliding ring (825). When the sliding ring (825) is located in the E zone, the temperature of the hot air flow is low. When the sliding ring (825) is located in the F zone, the temperature of the hot air flow is moderate. When the sliding ring (825) is located in the G zone, the temperature of the hot air flow is high.

7. The horizontal vacuum furnace with the function of uniform heating according to claim 1, characterized in that: The circulating system (7) comprises a driving motor (71) and circulating fan blades (72), the driving motor (71) is fixedly connected with the furnace body (1), and the output end of the driving motor (71) is in transmission connection with the circulating fan blades (72).

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