Workpiece carrier for vacuum coating machine and vacuum coating machine

Abstract

The application discloses a workpiece carrier for a vacuum coating machine and the vacuum coating machine. The workpiece carrier comprises a revolution shaft and a revolution carrier rotatably installed on the revolution shaft. A plurality of self-rotation shafts for connecting and installing workpieces are installed on the revolution carrier. The self-rotation shafts are swingably installed on the revolution carrier. A rotation linkage assembly for driving the self-rotation shafts to synchronously rotate when the revolution carrier rotates and a swing linkage assembly for driving the self-rotation shafts to synchronously reciprocating swing when the revolution carrier rotates are arranged between each self-rotation shaft and the revolution shaft. The plurality of self-rotation shafts are divided into a plurality of shaft groups which are arranged at intervals around the revolution shaft. Each shaft group comprises a plurality of self-rotation shafts which are arranged at intervals along the axial direction of the revolution carrier. The vacuum coating machine is provided with the workpiece carrier. The application has the advantages of improving the uniformity and quality of coating of complex workpieces, adapting to diversified advanced process requirements and the like.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating equipment technology, specifically to a workpiece carrier for a vacuum coating machine and a vacuum coating machine. Background Technology

[0002] Vacuum coating technologies (such as physical vapor deposition (PVD) and chemical vapor deposition (CVD) are widely used in modern manufacturing to prepare thin film coatings with specific functions (such as wear resistance, corrosion resistance, decoration, optics, and conductivity) on workpiece surfaces. In this technology, the workpiece carrier (or workpiece rotating frame, tooling fixture) is one of the core actuators of the coating equipment, undertaking the crucial task of positioning and supporting multiple workpieces and ensuring their movement within the coating chamber in a predetermined manner. Its performance directly affects the efficiency and quality of the coating production (film uniformity, adhesion, structural density, etc.).

[0003] To improve the uniformity of film thickness distribution on workpiece surfaces, especially complex surfaces, and to overcome the deposition advantage of the line-of-sight direction caused by fixed placement (i.e., faster deposition rate and larger film thickness in areas facing the sputtering or evaporation source), modern vacuum coating equipment generally adopts a rotatable workpiece carrier design. This design continuously moves the workpiece during the coating process, changing its angle and position relative to the coating source (such as a sputtering target or evaporation boat), thereby averaging the deposition angle, effectively reducing shading effects, and improving overall film thickness uniformity.

[0004] Currently, most mainstream rotary workpiece carriers employ planetary gear systems or similar transmission mechanisms to achieve composite motion of the workpiece: the workpiece not only revolves around a common central axis (revolution axis) but also rotates around a local axis (rotation axis). For example, a workpiece carrier disclosed in Chinese Patent Application Publication No. CN215887213U uses this typical dual-axis rotation structure, which improves the uniformity of film thickness distribution to a certain extent through the superposition of revolution and rotation. However, in the prior art, the revolution axis and rotation axis of such rotatable workpiece carriers are usually designed to be parallel to each other. The degree of freedom of motion provided by this parallel axis rotation mode (mainly composite rotation in a two-dimensional plane) is too singular and limited. Although it is effective in improving the film thickness uniformity of workpieces with simple geometries (such as planes and regular outer surfaces), it is significantly insufficient in improving the coating uniformity, coverage, and quality of workpieces with complex geometries (especially those with deep holes, grooves, cavities, sharp edges, and complex curved surface features). Meanwhile, its single motion mode is also difficult to adapt to the increasingly sophisticated coating processes that require more precise workpiece movement. Therefore, there is an urgent need to develop a new workpiece carrier technology with higher degrees of freedom of movement, the ability to more flexibly adjust the posture and angle of the workpiece in the coating space, thereby significantly improving the uniformity and quality of coating on complex workpieces, and adapting to the diverse needs of advanced processes. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to overcome the shortcomings of the existing technology and provide a workpiece carrier and vacuum coating machine that can improve the uniformity and quality of coating on complex workpieces and meet the needs of diverse advanced processes.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0007] A workpiece carrier for a vacuum coating machine includes a revolution shaft and a revolution frame rotatably mounted on the revolution shaft. Multiple spin shafts for connecting and mounting workpieces are mounted on the revolution frame. Each spin shaft is mounted on the revolution frame in a swinging manner. A rotation linkage component that drives the spin shaft to rotate synchronously when the revolution frame rotates, and a swing linkage component that drives the spin shaft to reciprocate synchronously when the revolution frame rotates, are provided between each spin shaft and the revolution shaft. The multiple spin shafts are divided into multiple groups of shafts arranged at intervals around the revolution shaft. Each group of shafts includes multiple spin shafts arranged sequentially at intervals along the axial direction of the revolution frame.

[0008] As a further improvement to the above technical solution:

[0009] The orbital frame is equipped with one or more connecting beams that reciprocate linearly along the orbital axis. Each rotating shaft is fitted with a rotating sleeve, and the rotating sleeve of the rotating shaft is hinged to the connecting beam via a first swing shaft.

[0010] The swing linkage assembly includes a first gear, a second gear, and a swing drive shaft rotatably mounted on a revolution frame. The first gear is fixedly mounted on the revolution shaft, and the second gear is fixedly mounted on the swing drive shaft. The first gear and the second gear mesh with each other. The swing drive shaft is connected to a crank, and the crank is connected to the connecting beam through a connecting rod to form a crank-slider mechanism that drives the connecting beam to reciprocate when the crank rotates.

[0011] The rotating sleeve of the self-rotating shaft is installed in the strip-shaped through hole provided on the connecting beam through the first swing shaft.

[0012] The orbital frame is equipped with multiple guide sleeves, and the connecting beam is installed through and in the multiple guide sleeves and slides and guides each guide sleeve in the axial direction of the orbital axis.

[0013] The rotation linkage assembly includes a first linkage gear, a second linkage gear, and a rotation drive shaft rotatably mounted on the revolution frame. The first linkage gear is fixedly mounted on the revolution shaft, and the second linkage gear is fixedly mounted on the rotation drive shaft. The first linkage gear and the second linkage gear mesh with each other. The rotation drive shaft is connected to the rotation shaft via a universal coupling.

[0014] Each connecting beam connects to and installs multiple rotating shafts of a set of shafts.

[0015] The rotation linkage assembly is connected to the rotation shaft via a transmission shaft. The transmission shaft is rotatably mounted on the orbital frame. One end of the rotation shaft is provided with a second swing shaft and is hinged to the transmission shaft via the second swing shaft. The swing linkage assembly includes a swing limiting member fixedly connected to the rotation shaft and a driving surface provided on the orbital frame. The swing limiting member contacts the driving surface and forces the rotation shaft to swing around the axis of the second swing shaft when the transmission shaft drives the rotation shaft to rotate.

[0016] The rotation linkage assembly includes a third linkage gear and a fourth linkage gear that mesh with each other. The third linkage gear is fixedly mounted on the revolution shaft, and the fourth linkage gear is connected to the transmission shaft.

[0017] The swing limiting member has two contact limiting parts located on both sides of the second swing axis, and the two contact limiting parts are in contact with the driving surface at the same time.

[0018] An elastic mechanism is provided between the second swing shaft and the transmission shaft to force the swing limiting member to remain in contact with the driving surface.

[0019] The swing limiting member is provided with a spherical ball that is rolled and contacts the driving surface through the spherical ball.

[0020] The orbital frame is equipped with a flexible cover that seals and encloses the second swing shaft, the swing limiter, and the drive surface.

[0021] The orbital frame includes multiple strip beams extending axially, with the multiple strip beams evenly spaced around the orbital axis, and each strip beam is equipped with a type of shaft assembly.

[0022] Both ends of the revolution shaft are equipped with rotating seats, and both ends of the strip beam are detachably connected to the rotating seats at both ends of the revolution shaft.

[0023] Multiple support frames are rotatably mounted on the revolution axis and arranged sequentially at intervals along the axial direction. Each strip beam is connected to the support frame.

[0024] The present invention also provides a vacuum coating machine, wherein the vacuum coating machine is provided with the above-mentioned workpiece carrier for vacuum coating machine.

[0025] As a further improvement to the above technical solution:

[0026] The vacuum coating machine includes a transfer chamber and multiple process chambers connected to the transfer chamber. The multiple process chambers are arranged around the transfer chamber. Each process chamber and the transfer chamber are provided with a material inlet and outlet with a first openable and closable door. The transfer chamber is connected to an inlet and outlet device for supplying and receiving workpiece carriers. The transfer chamber is provided with a transfer device for transferring workpiece carriers between the inlet and outlet device and each process chamber. Each process chamber is provided with a drive device for mounting the workpiece carriers vertically in a revolution axis and driving the revolution carriers to rotate.

[0027] The driving device includes a lifting drive assembly and a rotary drive assembly for docking with the orbital frame to drive the orbital frame to rotate around the orbital axis. The rotary drive assembly is located at the top of the process chamber, and the lifting drive assembly is located at the bottom of the process chamber and can support the orbital axis for lifting and lowering. When the lifting drive assembly supports the orbital axis to move upward, it can dock with the orbital frame. When the lifting drive assembly supports the orbital axis to move downward, it can disengage the orbital frame from the rotary drive assembly.

[0028] Compared with the prior art, the advantages of the present invention are as follows:

[0029] The workpiece carrier for the vacuum coating machine of the present invention comprises multiple rotating shafts mounted on a rotating frame. These rotating shafts are mounted on the rotating frame in a swinging manner. When workpieces are loaded and coated on these rotating shafts, the workpieces not only rotate around the rotating shafts, but the rotating shafts also swing along the workpieces while simultaneously causing the workpieces to rotate around their own axes. Compared to existing technologies, this allows for greater freedom of movement of the workpieces, enabling more flexible adjustment of their posture and angle within the coating space. This improves the uniformity and quality of coating on complex workpieces and adapts to the needs of diverse advanced processes. Furthermore, the multiple rotating shafts are divided into multiple groups arranged at intervals around the rotating shaft. Each group has multiple rotating shafts arranged sequentially at intervals along the axial direction of the rotating frame, ensuring a uniform and rational arrangement of workpieces on the rotating frame. This facilitates the mounting of as many workpieces as possible on the rotating frame while maintaining coating quality.

[0030] The vacuum coating machine of the present invention also has the advantages of the workpiece carrier for vacuum coating machine because it is equipped with the workpiece carrier for vacuum coating machine of the present invention. Attached Figure Description

[0031] Figure 1 This is a three-dimensional structural diagram of the workpiece carrier for the vacuum coating machine in Example 1.

[0032] Figure 2 for Figure 1 Enlarged structural diagram at point A in the middle.

[0033] Figure 3 for Figure 1 Enlarged structural diagram at point B.

[0034] Figure 4 This is an enlarged structural diagram of the hinged installation position of the rotation shaft and the connecting beam in Example 1.

[0035] Figure 5 This is a three-dimensional structural diagram of the location of a single rotating shaft in Example 2.

[0036] Figure 6 This is a three-dimensional structural diagram of the location of the swing linkage component in Example 2.

[0037] Figure 7 This is a top sectional view of the vacuum coating machine in Example 3.

[0038] Figure 8 This is a schematic diagram of the main cross-sectional structure of the process chamber in Example 3.

[0039] Legend:

[0040] 1. Revolution shaft; 11. Rotary seat; 2. Revolution frame; 21. Strip beam; 22. Guide sleeve; 23. Drive surface; 24. Support frame; 3. Rotation shaft; 31. Rotating sleeve; 32. First swing shaft; 33. Second swing shaft; 34. Swing limiting component; 341. Contact limiting part; 4. Rotation linkage assembly; 41. First linkage gear; 42. Second linkage gear; 43. Rotation drive shaft; 44. Universal coupling; 45. Third linkage gear; 6. Fourth linkage gear; 5. Swing linkage assembly; 51. First gear; 52. Second gear; 53. Swing drive shaft; 54. Crank; 55. Connecting rod; 6. Connecting beam; 61. Strip-shaped through hole; 7. Drive shaft; 101. Process chamber; 102. Transfer chamber; 103. Material inlet / outlet; 1031. First openable / closable door; 104. Feeding / discharging device; 105. Transfer device; 106. Lifting drive assembly; 107. Rotation drive assembly. Detailed Implementation

[0041] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0042] Example 1

[0043] like Figures 1 to 3As shown, the workpiece carrier for the vacuum coating machine in this embodiment includes a revolution shaft 1 and a revolution frame 2 rotatably mounted on the revolution shaft 1. The revolution frame 2 is equipped with multiple spin shafts 3 for connecting and mounting workpieces. The spin shafts 3 are mounted on the revolution frame 2 in a swinging manner. Each spin shaft 3 is provided with a rotation linkage component 4 that drives the spin shaft 3 to rotate synchronously when the revolution frame 2 rotates, and a swing linkage component 5 that drives the spin shaft 3 to swing synchronously back and forth when the revolution frame 2 rotates. The multiple spin shafts 3 are divided into multiple groups of shafts arranged at intervals around the revolution shaft 1. Each group of shafts includes multiple spin shafts 3 arranged at intervals along the axial direction of the revolution frame 2. This vacuum coating machine uses a workpiece carrier with multiple rotating shafts 3 mounted on a rotating frame 2. These rotating shafts 3 are mounted on the rotating frame 2 in a swinging manner. When workpieces are loaded onto these rotating shafts 3 for coating, the workpieces not only rotate around the rotating shaft 1, but the rotating shafts 3 also swing along the workpieces while simultaneously rotating the workpieces around their own axes. Compared to existing technologies, this allows for greater freedom of movement of the workpieces, enabling more flexible adjustment of their posture and angle within the coating space. This improves the uniformity and quality of coating on complex workpieces and adapts to the needs of diverse advanced processes. Furthermore, the multiple rotating shafts 3 are divided into multiple groups arranged at intervals around the rotating shaft 1. Each group has multiple rotating shafts 3 arranged sequentially at intervals along the axial direction of the rotating frame 2, ensuring a uniform and rational arrangement of workpieces on the rotating frame 2. This facilitates the mounting of as many workpieces as possible on the rotating frame 2 while maintaining coating quality.

[0044] In this embodiment, multiple connecting beams 6 are installed on the revolution frame 2, reciprocating linearly along the revolution axis 1. Each rotating shaft 3 is fitted with a rotating sleeve 31. The rotating sleeve 31 of the self-rotating shaft 3 is hinged to the connecting beam 6 via a first swing shaft 32. The self-rotating shaft 3 can rotate within the rotating sleeve 31 and move axially relative to the rotating sleeve 31, while the rotating sleeve 31 can rotate relative to the connecting beam 6 around the first swing shaft 32, thus enabling the self-rotating shaft 3 to perform both rotational and swinging motions. This mounting structure of the self-rotating shaft 3 has the advantages of simple structure, easy manufacturing and assembly, and stable and reliable operation.

[0045] In this embodiment, the swing linkage assembly 5 includes a first gear 51, a second gear 52, and a swing drive shaft 53 rotatably mounted on the orbital frame 2. The first gear 51 is fixedly mounted on the orbital shaft 1, and the second gear 52 is fixedly mounted on the swing drive shaft 53. The first gear 51 and the second gear 52 mesh with each other. The swing drive shaft 53 is connected to a crank 54, which is connected to a connecting beam 6 via a connecting rod 55, forming a crank-slider mechanism that drives the connecting beam 6 to reciprocate when the crank 54 rotates. When the orbital frame 2 rotates around the orbital shaft 1, the swing drive shaft 53 rotates synchronously through the cooperation of the first gear 51 and the second gear 52, which in turn drives the connecting beam 6 to reciprocate through the crank 54 and the connecting rod 55. The reciprocating connecting beam 6 causes the spin shaft 3 to swing. This swing linkage assembly 5 uses a combination mechanism of the first gear 51, the second gear 52, the swing drive shaft 53, the crank 54, and the connecting rod 55. It requires no additional power and has the advantages of simple structure, low cost, easy assembly and maintenance, and stable and reliable operation. The first gear 51 and the second gear 52 mentioned above are specifically bevel gears or spur gears.

[0046] In this embodiment, as Figure 4 As shown, the rotating sleeve 31 of the spindle shaft 3 is installed in the strip-shaped through hole 61 provided on the connecting beam 6 via the first swing shaft 32. This makes the force on the connecting beam 6 more balanced, improves the stability of the connection between the rotating sleeve 31 and the connecting beam 6, and helps to improve the stability of the movement of the spindle shaft 3.

[0047] In this embodiment, multiple guide sleeves 22 are installed on the revolution frame 2, and the connecting beam 6 is installed through and in the multiple guide sleeves 22 and slides and guides each guide sleeve 22 in the axial direction of the revolution axis 1. Its structure is simple and compact, and easy to manufacture and assemble.

[0048] In this embodiment, the rotation linkage assembly 4 includes a first linkage gear 41, a second linkage gear 42, and a rotation drive shaft 43 rotatably mounted on the revolution frame 2. The first linkage gear 41 is fixedly mounted on the revolution shaft 1, and the second linkage gear 42 is fixedly mounted on the rotation drive shaft 43. The first linkage gear 41 and the second linkage gear 42 mesh with each other. The rotation drive shaft 43 is connected to the rotation shaft 3 via a universal coupling 44. This rotation linkage assembly 4 uses a gear mechanism with the first linkage gear 41 and the second linkage gear 42 engaged, requiring no additional power and possessing advantages such as simple structure, low cost, easy assembly and maintenance, and stable and reliable transmission. Specifically, the first linkage gear 41 and the second linkage gear 42 are bevel gears or spur gears. In other embodiments, the rotation linkage assembly 4 can also use a non-gear mechanism, as long as it can achieve synchronous rotation of the rotation shaft 3 when the revolution frame 2 is driven to rotate.

[0049] In this embodiment, each connecting beam 6 is connected to and installed with multiple rotating shafts 3 of a set of shafts. Each connecting beam 6 simultaneously connects to and drives multiple rotating shafts 3 to swing, which reduces the number of connecting beams 6 required, making the structure simple and compact, and reducing costs.

[0050] In this embodiment, the orbital frame 2 includes multiple strip beams 21 extending axially. These strip beams 21 are evenly spaced around the orbital axis 1, and each strip beam 21 is equipped with a set of shafts, i.e., multiple rotation shafts 3 arranged sequentially and at intervals along the axial direction of the orbital frame 2. The orbital frame 2 has a simple structure, is lightweight, and is easy to manufacture and assemble. In this embodiment, only one connecting beam 6 is provided for each strip beam 21 to connect and control all the rotation shafts 3 on that strip beam 21.

[0051] In this embodiment, rotating seats 11 are installed at both ends of the revolution shaft 1, and the two ends of the strip beam 21 are detachably connected to the rotating seats 11 at both ends of the revolution shaft 1. During manufacturing and assembly, the two manufactured rotating seats 11 are installed at the two ends of the revolution shaft 1, the rotation shaft 3 is installed on the strip beam 21, and then the strip beam 21 is connected and fixed to the two rotating seats 11. The assembly is simple, and it is easy to disassemble each strip beam 21 individually for replacement and maintenance. Furthermore, the number of strip beams 21 can be increased or decreased as needed, provided the installation space allows, making it flexible and convenient to use. For example, in this embodiment, the rotating seat 11 has a hexagonal structure and specifically has three strip beams 21 installed. In other cases, up to six other strip beams 21 can be installed on the hexagonal rotating seat 11 as needed. In other embodiments, the rotating seat 11 can also be configured in other shapes, and more strip beams 21 can be provided. In this embodiment, the rotating seat 11 is rotatably mounted on the revolution shaft 1 through a bearing mechanism, and the self-rotating shaft 3 is rotatably mounted on the strip beam 21 through a bearing mechanism or a bushing structure. The strip beam 21 and the rotating seat 11 are connected by screws.

[0052] In this embodiment, a plurality of support frames 24 are rotatably mounted on the revolution shaft 1, arranged sequentially at intervals along the axial direction. Each strip beam 21 is connected to the support frame 24. The support frame 24 strengthens the connection and supports the strip beam 21, which can prevent the strip beam 21 from deforming and improve the installation stability and load-bearing capacity of the strip beam 21.

[0053] Example 2

[0054] The workpiece carrier for the vacuum coating machine in this embodiment is basically the same as that in Embodiment 1, with the main difference being that, for example... Figure 5 and Figure 6As shown, in this embodiment, the rotation linkage component 4 is connected to the rotation shaft 3 via the transmission shaft 7. The transmission shaft 7 is rotatably mounted on the revolution frame 2. One end of the rotation shaft 3 is provided with a second swing shaft 33, which is hinged to the transmission shaft 7. The swing linkage component 5 includes a swing limiting member 34 fixedly connected to the rotation shaft 3 and a driving surface 23 provided on the revolution frame 2. The swing limiting member 34 contacts the driving surface 23 and forces the rotation shaft 3 to swing around the axis of the second swing shaft 33 when the transmission shaft 7 drives the rotation shaft 3 to rotate. This vacuum coating machine workpiece carrier directly hinges the rotation shaft 3 to the transmission shaft 7. By using the cooperation of the driving surface 23 and the swing limiting member 34, the rotation shaft 3 can rotate and swing simultaneously. The swing linkage component 5 has a simple structure, occupies little space, and has low cost, making it particularly suitable for workpiece carriers with small dimensions. Furthermore, by using different forms of driving surfaces 23, the rotation shaft 3 can have different swing forms and amplitudes.

[0055] In this embodiment, the rotation linkage assembly 4 includes a third linkage gear 45 and a fourth linkage gear 46 that mesh with each other. The third linkage gear 45 is fixedly mounted on the revolution shaft 1, and the fourth linkage gear 46 is connected to the transmission shaft 7. This rotation linkage assembly 4 uses a gear mechanism with the third linkage gear 45 and the fourth linkage gear 46 meshing together. It requires no additional power and has the advantages of simple structure, low cost, easy assembly and maintenance, and stable and reliable transmission.

[0056] In this embodiment, the swing limiting member 34 has two contact limiting parts 341 respectively disposed on both sides of the second swing shaft 33. The two contact limiting parts 341 simultaneously contact the driving surface 23. The two contact limiting parts 341 are disposed on both sides of the second swing shaft 33 and contact the driving surface 23 to force the rotation shaft 3 to swing. The rotation shaft 3 has high motion stability and strong load-bearing capacity.

[0057] In this preferred embodiment, an elastic mechanism is provided between the second swing shaft 33 and the transmission shaft 7 to force the swing limiting member 34 to remain in contact with the driving surface 23. This elastic mechanism can be a torsion spring. The elastic mechanism applies an elastic force to the swing limiting member 34, forcing the swing limiting member 34 to remain in contact with the driving surface 23, which can ensure smooth movement of the rotation shaft 3 and reduce the requirements for manufacturing and assembly precision. When setting the elastic mechanism, the swing limiting member 34 can also be provided with only one contact limiting part 341.

[0058] In this embodiment, the swing limiting member 34 is provided with rolling spherical balls, which contact the driving surface 23 through the spherical balls, which can reduce wear, extend service life, and improve smooth operation.

[0059] In this embodiment, the orbiter 2 is equipped with a flexible covering sleeve that seals and encloses the second swing shaft 33, the swing limiting member 34 and the driving surface 23, which can prevent the generation of impurities and other contaminants that affect the coating quality.

[0060] Example 3

[0061] A vacuum coating machine is provided, which is equipped with a workpiece carrier for a vacuum coating machine as described in Embodiment 1 or 2. The vacuum coating machine of this embodiment, by being equipped with the workpiece carrier for a vacuum coating machine as described in Embodiment 1 or 2, also possesses the advantages of that workpiece carrier.

[0062] In this embodiment, as Figure 7 and Figure 8 As shown, the vacuum coating machine includes a transfer chamber 102 and multiple process chambers 101 connected to the transfer chamber 102. The multiple process chambers 101 are arranged around the transfer chamber 102. Each process chamber 101 and the transfer chamber 102 are provided with a material inlet / outlet 103 with a first openable / closeable door 1031. The transfer chamber 102 is connected to a feeding / discharging device 104 for supplying and receiving workpiece carriers. The transfer chamber 102 is provided with a transfer device 105 for transferring workpiece carriers between the feeding / discharging device 104 and each process chamber 101. Each process chamber 101 is provided with a drive device for installing the workpiece carrier in the process chamber 101 in a vertical arrangement with a revolution axis 1 and driving the revolution frame 2 to rotate.

[0063] This vacuum coating machine arranges multiple process chambers 101 around a transfer chamber 102. A transfer device 105 is installed in the transfer chamber 102 to transfer the workpiece carrier. The machine occupies little space and has low site requirements. Only one transfer device 105 is needed to transfer the workpiece carrier between the feeding / discharging device 104 and each process chamber 101. The structure is simple, the equipment manufacturing and maintenance costs are low, and the control difficulty is low. The workpiece carrier does not need to be handed over multiple times during the transfer between the feeding / discharging device 104 and each process chamber 101, which can ensure high precision and high repeatability of the workpiece carrier positioning during the transfer process, improve the accuracy and stability of the workpiece carrier transfer. At the same time, there is no need to set up a conveying system in the process chamber 101, which can reduce the size of the process chamber 101 and facilitate the installation and layout of other functional devices in the process chamber 101. Furthermore, the workpiece carrier is usually large in the axial direction, while the drive device of each process chamber 101 can install the workpiece carrier in the process chamber 101 with the revolution axis 1 arranged vertically and drive the revolution frame 2 to rotate, so that the radial dimension of each process chamber 101 in the transfer chamber 102 is small, which can reduce the footprint of the entire vacuum coating machine. At the same time, the revolution axis 1 is arranged in the vertical direction, and the rotation axis 3 is arranged in the horizontal direction. The axis of rotation of the workpiece mounted on the rotation axis 3 is arranged horizontally, so that impurities and other contaminants are not easy to adhere to the workpiece, and impurities and other contaminants on the workpiece are easy to fall off, which can improve the coating quality.

[0064] In this embodiment, the driving device includes a lifting drive assembly 106 and a rotary drive assembly 107 for docking with the orbital frame 2 to drive the orbital frame 2 to rotate around the orbital axis 1. The rotary drive assembly 107 is located at the top of the process chamber 101, and the lifting drive assembly 106 is located at the bottom of the process chamber 101 and can support the orbital axis 1 to move up and down. When the lifting drive assembly 106 supports the orbital axis 1 to move up, it can dock the orbital frame 2 with the rotary drive assembly 107, so that the workpiece carrier is stably and reliably clamped between the lifting drive assembly 106 and the rotary drive assembly 107. The rotary drive assembly 107 can drive the orbital frame 2 to rotate around the orbital axis 1. When the lifting drive assembly 106 supports the orbital axis 1 to move down, it can disengage the orbital frame 2 from the rotary drive assembly 107, thereby facilitating the loading and unloading of the workpiece carrier. The combination of lifting drive assembly 106 and rotation drive assembly 107 enables loading and unloading of the workpiece carrier and driving the rotation of the revolution frame 2, while having the advantages of simple structure, low cost and easy control.

[0065] Preferably, the lifting drive assembly 106 includes a support and a lifting drive mechanism for lifting and lowering the drive connecting seat. The support has a positioning hole for the lower end of the rotating shaft 1 to be inserted and positioned. After the lower end of the rotating shaft 1 is inserted into the positioning hole, it can be supported and positioned on the support. The rotation drive assembly 107 includes a connector and a motor for driving the connector to rotate. The connector is provided with a socket hole for positioning and engaging with the upper end of the rotating frame 2. When the lifting drive assembly 106 drives the rotating shaft 1 to move upward, the upper end of the rotating frame 2 is inserted into the socket hole to achieve docking. The motor drives the connector to drive the rotating frame 2 to rotate. When the lifting drive assembly 106 drives the rotating shaft 1 to move downward, the upper end of the rotating frame 2 is disengaged from the rotation drive assembly 107.

[0066] The multiple process chambers 101 in this embodiment can be configured as needed to complete any step in the coating process, such as cleaning, preheating, and coating. Specific configuration can be referenced from existing coating machines. The first openable / closable door 1031 can be an isolation door that completely isolates the process chambers 101 and the transfer chamber 102 when closed, such as a gate valve; or it can be a door that does not completely isolate the process chambers 101 and the transfer chamber 102 when closed, only blocking the material inlet / outlet 103, such as a roller shutter. The feeding / discharging device 104 includes a feeding / discharging chamber and a first carrier assembly installed inside the feeding / discharging chamber. The feeding / discharging chamber has two feeding / discharging ports with gate valves, one of which communicates with the transfer chamber 102. The transfer device 105 can be a commercially available robotic arm.

[0067] The above description is merely a preferred embodiment of the present invention, and the scope of protection of the present invention is not limited to the above embodiments. For those skilled in the art, improvements and modifications obtained without departing from the inventive concept should also be considered within the scope of protection of the present invention.

Claims

1. A workpiece carrier for a vacuum coating machine, comprising a revolution shaft (1) and a revolution frame (2) rotatably mounted on the revolution shaft (1), characterized in that: The orbital frame (2) is equipped with multiple rotating shafts (3) for connecting and installing workpieces. The rotating shafts (3) are mounted on the orbital frame (2) in a swinging manner. Each rotating shaft (3) is provided with a rotation linkage component (4) that drives the rotating shaft (3) to rotate synchronously when the orbital frame (2) rotates, and a swing linkage component (5) that drives the rotating shaft (3) to swing synchronously back and forth when the orbital frame (2) rotates. The multiple rotating shafts (3) are divided into multiple groups of shafts arranged at intervals around the orbital frame (1). Each group of shafts includes multiple rotating shafts (3) arranged at intervals along the axial direction of the orbital frame (2). The orbital frame (2) is equipped with one or more connecting beams (6) that reciprocate linearly along the orbital axis (1). Each rotating shaft (3) is fitted with a rotating sleeve (31). The rotating sleeve (31) of the rotating shaft (3) is hinged to the connecting beam (6) through the first swing shaft (32).

2. The workpiece carrier for a vacuum coating machine according to claim 1, characterized in that: The swing linkage assembly (5) includes a first gear (51), a second gear (52), and a swing drive shaft (53) rotatably mounted on the orbital frame (2). The first gear (51) is fixedly mounted on the orbital shaft (1), and the second gear (52) is fixedly mounted on the swing drive shaft (53). The first gear (51) and the second gear (52) mesh with each other. The swing drive shaft (53) is connected to a crank (54). The crank (54) is connected to the connecting beam (6) through a connecting rod (55) to form a crank-slider mechanism that drives the connecting beam (6) to reciprocate when the crank (54) rotates.

3. The workpiece carrier for a vacuum coating machine according to claim 1, characterized in that: The rotating sleeve (31) of the self-rotating shaft (3) is installed in the strip-shaped through hole (61) provided on the connecting beam (6) through the first swing shaft (32).

4. The workpiece carrier for a vacuum coating machine according to claim 1, characterized in that: Multiple guide sleeves (22) are installed on the revolution frame (2). The connecting beam (6) is installed through the multiple guide sleeves (22) and slides and guides each guide sleeve (22) in the axial direction of the revolution axis (1).

5. The workpiece carrier for a vacuum coating machine according to claim 1, characterized in that: The rotation linkage assembly (4) includes a first linkage gear (41), a second linkage gear (42), and a rotation drive shaft (43) rotatably mounted on the revolution frame (2). The first linkage gear (41) is fixedly mounted on the revolution shaft (1), and the second linkage gear (42) is fixedly mounted on the rotation drive shaft (43). The first linkage gear (41) and the second linkage gear (42) mesh with each other. The rotation drive shaft (43) is connected to the rotation shaft (3) through a universal coupling (44).

6. The workpiece carrier for a vacuum coating machine according to claim 1, characterized in that: Each connecting beam (6) is connected to and installed with multiple rotating shafts (3) of a set of shafts.

7. The workpiece carrier for a vacuum coating machine according to any one of claims 1 to 6, characterized in that: The orbital frame (2) includes multiple strip beams (21) extending along the axial direction. The multiple strip beams (21) are evenly spaced around the orbital axis (1), and each strip beam (21) is equipped with a set of shafts.

8. The workpiece carrier for a vacuum coating machine according to claim 7, characterized in that: Both ends of the revolution shaft (1) are equipped with rotating seats (11), and both ends of the strip beam (21) are respectively connected to the rotating seats (11) at both ends of the revolution shaft (1) in a detachable manner.

9. The workpiece carrier for a vacuum coating machine according to claim 7, characterized in that: Multiple support frames (24) are rotatably mounted on the revolution shaft (1) and arranged sequentially at intervals along the axial direction. Each strip beam (21) is connected to the support frame (24).

10. A vacuum coating machine, characterized in that: The vacuum coating machine is equipped with a workpiece carrier for vacuum coating machine as described in any one of claims 1 to 9.

11. The vacuum coating machine according to claim 10, characterized in that: The vacuum coating machine includes a transfer chamber (102) and multiple process chambers (101) connected to the transfer chamber (102). The multiple process chambers (101) are arranged around the transfer chamber (102). Each process chamber (101) and the transfer chamber (102) are provided with a material inlet and outlet (103) with a first openable and closable door (1031). The transfer chamber (102) is connected to an inlet and outlet device (104) for supplying and receiving workpiece carriers. The transfer chamber (102) is provided with a transfer device (105) for transferring workpiece carriers between the inlet and outlet device (104) and each process chamber (101). Each process chamber (101) is provided with a drive device for installing the workpiece carrier in the process chamber (101) in a vertical arrangement with a revolution axis (1) and driving the revolution frame (2) to rotate.

12. The vacuum coating machine according to claim 11, characterized in that: The driving device includes a lifting drive assembly (106) and a rotary drive assembly (107) for docking with the orbital frame (2) to drive the orbital frame (2) to rotate around the orbital axis (1). The rotary drive assembly (107) is located at the top of the process chamber (101), and the lifting drive assembly (106) is located at the bottom of the process chamber (101) and can support the orbital axis (1) to move up and down. When the lifting drive assembly (106) supports the orbital axis (1) to move up, it can dock the orbital frame (2) with the rotary drive assembly (107). When the lifting drive assembly (106) supports the orbital axis (1) to move down, it can disengage the orbital frame (2) from the rotary drive assembly (107).

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